WO2023115652A1 - 一种搬运机器人 - Google Patents

一种搬运机器人 Download PDF

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Publication number
WO2023115652A1
WO2023115652A1 PCT/CN2022/070429 CN2022070429W WO2023115652A1 WO 2023115652 A1 WO2023115652 A1 WO 2023115652A1 CN 2022070429 W CN2022070429 W CN 2022070429W WO 2023115652 A1 WO2023115652 A1 WO 2023115652A1
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WO
WIPO (PCT)
Prior art keywords
wrist
rotating shaft
notch
hollow rotating
arm
Prior art date
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PCT/CN2022/070429
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English (en)
French (fr)
Inventor
王旭晨
王文广
鲍伟成
张冬峰
叶莹
Original Assignee
上海果纳半导体技术有限公司
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Application filed by 上海果纳半导体技术有限公司 filed Critical 上海果纳半导体技术有限公司
Publication of WO2023115652A1 publication Critical patent/WO2023115652A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B25J17/02—Wrist joints
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric

Definitions

  • the invention relates to the field of semiconductor manufacturing, in particular to a handling robot used for wafer delivery.
  • An integrated circuit is a tiny electronic device or component. Using a certain process, the transistors, resistors, capacitors, inductors and other components required in a circuit are interconnected together, fabricated on a small or several small semiconductor chips, and then packaged in a tube shell to become a circuit with The microstructure of the required circuit function; all the components have been formed into a whole in the structure, which makes the electronic components take a big step towards miniaturization, low power consumption, intelligence and high reliability. It is represented by the letter "IC" in the circuit.
  • the basis of an integrated circuit is a semiconductor chip, also known as a wafer.
  • a semiconductor chip also known as a wafer.
  • high precision and high cleanliness are required.
  • wafers need to be processed between various processes. Therefore, a handling robot is required to stably transfer and transport wafers between various processes.
  • the current handling machine belongs to the long-arm planar joint type wafer handling manipulator, and the two end effectors (finger/fork) in its structure are used for direct contact wafer picking and placing. Since there are electrical components (sensors, cylinders, etc.) in each end effector for holding, monitoring wafers, etc., the associated cables and air tubing need to be routed to both end effector sites. In addition, due to the strict cleanliness requirements of the integrated circuit manufacturing production area, the cables and air pipes need to be placed inside the manipulator.
  • the cables and air pipes in the moving part need to have excellent wear resistance, which increases the cost of raw materials; during the installation process, due to the winding of wire harnesses in a small space, this design also increases labor costs and later maintenance costs.
  • the current handling robot has an unreasonable wiring harness setting position, which leads to increased difficulty in early assembly, increased performance requirements for parts, faster wear and tear of the later wiring harness, increased maintenance times, increased maintenance costs, and reduced production efficiency.
  • the object of the present invention is to provide a handling robot.
  • a handling robot comprising:
  • the lower arm one end of the lower arm is rotated and installed on the base, and the lower arm can rotate in the horizontal plane under the action of external force;
  • An upper arm one end of the upper arm is rotatably connected to the other end of the lower arm, and the rotation axis of the upper arm is parallel to the rotation axis of the lower arm, and the upper arm can rotate in a horizontal plane under the action of an external force;
  • the actuator is rotatably arranged at the other end of the upper arm, the actuator includes a drive module, and the drive module is coaxially provided with a lower wrist and an upper wrist, and a lower end effector is arranged on the lower wrist,
  • the upper wrist is provided with an upper end effector, and driven by the driving module, the lower wrist and the upper wrist rotate coaxially, and a wire harness is arranged inside the driving module, and the wire harness can extend to the lower wrist and the upper wrist respectively.
  • the inner space of the wrist is arranged at the other end of the upper arm, the actuator includes a drive module, and the drive module is coaxially provided with a lower wrist and an upper wrist, and a lower end effector is arranged on the lower wrist,
  • the upper wrist is provided with an upper end effector, and driven by the driving module, the lower wrist and the upper wrist rotate coaxially, and a wire harness is arranged inside the driving module, and the wire harness can extend to the lower wrist and the upper wrist respectively.
  • the driving module is arranged inside the other end of the upper arm, and the driving module includes a first hollow rotating shaft and a second hollow rotating shaft, and the first hollow rotating shaft is sleeved on the second central rotating shaft and the two are coaxially arranged, and a connecting bearing is arranged between the two, and a first notch is arranged on the side of the first hollow rotating shaft, and a second notch is arranged on the side of the second hollow rotating shaft, and the The first notch is connected to the second notch, and the wire harness can be placed in the first notch and the second notch.
  • harness channels in the drive module there are two harness channels in the drive module, one: the hollow internal channel of the first hollow rotating shaft, which is set through from bottom to top and enters the upper wrist; the second: the hollow internal channel from the first hollow rotating shaft from bottom to top , when it reaches the height of the first notch, it enters the channel formed by the first notch and the second notch, and enters the lower wrist; it can be seen that the two wire harnesses rotate coaxially, which can effectively reduce wear during use .
  • the outer ring of the connecting bearing is located inside the second central rotating shaft, and the inner ring is stuck on the outside of the first hollow rotating shaft, which ensures the coaxial rotation of the first hollow rotating shaft and the second hollow rotating shaft, and when the reverse rotation , more flexible and fluid.
  • the hollow rotating shaft with grooves on the side simplifies the guidance of the wire harness, greatly reduces the contact area and range of motion between the wire harness and moving parts, and improves the overall reliability of the manipulator.
  • the first notch is arranged at 310 degrees
  • the second notch is arranged at 50 degrees. That is to say, the first notch and the second notch are set correspondingly, and when the upper wrist and the lower wrist are overlapped, refer to the accompanying drawing 5, the two are set correspondingly, the groove part of the first notch is 50 degrees, and the groove The opening is 310 degrees, and the 50-degree slot part and the 50-degree opening of the second notch are respectively located on both sides of the central axis.
  • the second notch includes a horizontal part and a vertical part, and both the horizontal part and the vertical part are arranged at 50 degrees, and the vertical part communicates with the inner space of the lower wrist.
  • the inner space under the wrist stores the wiring harness to facilitate the conduction of electrical components.
  • a first synchronous pulley is fixedly arranged on the outside of the first hollow rotating shaft, and a second synchronous pulley is connected to the second hollow rotating shaft, and the first synchronous pulley and the second synchronous pulley can be driven separately
  • the first hollow rotary shaft and the second hollow rotary shaft rotate. That is, two synchronous pulleys cooperate with the synchronous belt and the synchronous motor to provide power for the rotation of the two.
  • a second synchronous pulley is arranged below the second hollow rotating shaft, is connected through a second bearing, and is clamped in the upper arm.
  • the second synchronous pulley needs to be set downwards and kept parallel to the first synchronous pulley, and referring to Figure 2, the length of the first hollow rotating shaft is greater than that of the second hollow rotating shaft, so the second The space for setting a synchronous pulley is sufficient, but the second hollow rotating shaft is sleeved on the outside, and its size is already larger than that of the first hollow rotating shaft, so the second synchronous belt is simultaneously clamped by the inner ring of the second bearing The wheel and the second hollow rotating shaft make the rotation more stable and save space at the same time.
  • the executive mechanism also includes a limit module, and there are two limit modules, one of which is set between the upper wrist and the lower wrist, and the other is set between the lower wrist and the upper arm; the limit module
  • the module includes a limit pin and a limit groove.
  • the limit pin is located in the limit groove, and the limit groove is arranged in an arc shape, and does not exceed 340 degrees.
  • the center of the limit groove and the rotation of the lower wrist axes are on the same axis.
  • the limit pin and the limit slot shown in Figure 2 can ensure that the wire harness will not be entangled due to excessive rotation of the wrist (> ⁇ 180°).
  • Figure 3 shows a detailed view of the limiting measures for the lower wrist
  • the limiting groove is a thickened part, concentric with the first hollow rotating shaft
  • the two limiting grooves of the two limiting components are the same axis settings.
  • the limit groove is not a full circle. After testing, it is found that there is an opening angle of about 23°, so the rotation range of the lower wrist around the axis a is about ⁇ 168.5°, and the rotation angle of the lower wrist reaches At the maximum value of the range, the limit pin and the lower wrist will contact, preventing the lower wrist from further rotation, which is the best effect.
  • Both the upper wrist and the lower wrist are provided with similar limiting slot structures, and the corresponding limiting pins are placed on the lower wrist (see Figure 2). Therefore, the maximum relative angle between the upper wrist and the lower wrist is also about ⁇ 168.5°, and adding the rotation range of the lower wrist, the rotation range of the upper wrist around the axis a is about ⁇ 337°.
  • the diameter of the limiting pin is smaller than the width of the limiting groove.
  • a bottom plate is provided on the lower side of the upper arm, and a wire inlet hole is arranged on the bottom board, and the wire inlet hole communicates with the hollow inner channel of the first hollow rotating shaft. That is to ensure that the wiring harness can enter smoothly.
  • a fixing part is arranged on the upper arm, and a second bearing is arranged inside the fixing part. That is, the second bearing is fixed through the arrangement of the fixing component, so as to ensure the stable rotation of the second hollow rotating shaft.
  • the upper wrist and the second hollow rotation shaft are connected through a connecting component, and the upper wrist and the lower wrist are parallel. That is, the stability during coaxial rotation is ensured, and parallelism is also guaranteed.
  • the lower arm is driven by a servo motor and rotates in the horizontal plane
  • the rotation connection of the upper arm and the lower arm is also driven by a servo motor
  • the upper wrist and the lower wrist are respectively connected by two synchronous servo motors to drive the first synchronous pulley and
  • the second synchronous pulley rotates, and at the same time, a group of screw components can be set on the base.
  • the screw motor drives the screw, and the screw is set with a nut.
  • the nut is connected with the workbench in the base, and can drive the workbench along the direction of the screw.
  • Lifting that is, the handling robot has 5 degrees of freedom (4 rotational degrees of freedom and 1 translational degree of freedom), see Figure 1, there are two rotational degrees of freedom at the axis a, and one rotational degree of freedom at the axis b , there is a rotational degree of freedom and a translational degree of freedom at the axis c; in a certain space that can be controlled by an algorithm, the pick-and-place of the wafer can be realized.
  • the upper wrist-linked upper end effector and the lower wrist-linked lower end effector open or close synchronously.
  • the beneficial effect of the handling robot of the present invention is that, by setting the wire harness in the drive module, the reciprocating motion of the wire harness can be avoided, and the performance requirements for the wire harness itself can be reduced to save costs;
  • the abrasion of the wiring harness suppresses the generation of dust, and also reduces the manpower and material costs for later maintenance and replacement of the wiring harness;
  • the structure is greatly simplified, which reduces the difficulty of assembly and assembly time, and also reduces the difficulty of processing and material costs. Simple structure It can reduce the time for post-maintenance and increase production efficiency.
  • Figure 1 is a schematic diagram of the structure of the handling robot.
  • Fig. 2 is a schematic longitudinal section at the axis a.
  • Fig. 3 is a schematic diagram of the limit module corresponding to the lower wrist.
  • Fig. 4 is a schematic diagram of the limit module corresponding to the upper wrist.
  • FIG. 5 is a combined schematic view of the first notch and the second notch.
  • Fig. 6 is a schematic diagram of a conventional transport robot.
  • Drive module 411, first hollow rotating shaft, 412, second hollow rotating shaft, 413, connecting bearing, 414, first notch, 415, second notch, 4151, horizontal part, 4152, vertical Department, 416, the first synchronous pulley, 417, the second synchronous pulley, 418, the second bearing,
  • a kind of handling robot in the present embodiment comprises: base 1;
  • the upper arm 3, one end of the upper arm 3 is rotationally connected with the other end of the lower arm 2, and the rotation axis of the upper arm 3 is parallel to the rotation axis of the lower arm 2, and under the action of an external force, the upper arm 3 can rotate in a horizontal plane
  • the actuator 4, the actuator 4 is rotated at the other end of the upper arm 3, the actuator 4 includes a driving module 41, and the lower wrist 5 and the upper wrist 6 are coaxially arranged on the driving module 41, and the lower wrist 5 is arranged on the lower wrist 5.
  • the end effector 7 is provided with an upper end effector 8 on the upper wrist 6.
  • the lower wrist 5 and the upper wrist 6 rotate coaxially, and a wiring harness is arranged inside the driving module 41.
  • the wiring harness can Extend to the inner spaces of the lower wrist 5 and the upper wrist 6 respectively.
  • the driving module 41 is arranged inside the other end of the upper arm 3, and the driving module 41 includes a first hollow rotating shaft 411 and a second hollow rotating shaft 412, and the first hollow rotating shaft 411 is sleeved on the second center In the rotating shaft, and the two are coaxially arranged, and a connecting bearing 413 is arranged between the two, and a first notch 414 is provided on the side of the first hollow rotating shaft 411, and a second notch is arranged on the side of the second hollow rotating shaft 412. Two notches 415, and the first notch 414 and the second notch 415 communicate, and the first notch 414 and the second notch 415 can be placed in the wire harness.
  • the drive module 41 includes two wire harness passages, one: the hollow inner passage of the first hollow rotating shaft 411, which penetrates from bottom to top and enters the upper wrist 6; the second: from the hollow interior of the first hollow rotating shaft 411 Passage is from bottom to top, when reaching the height of first notch 414, enter the passage that first notch 414 and second notch 415 form, and enter lower wrist 5; It can be seen that two wiring harnesses are coaxial rotation, can Effectively reduce wear and tear during use.
  • the outer ring of the connecting bearing 413 is located inside the second central rotating shaft, and the inner ring is stuck on the outside of the first hollow rotating shaft 411, ensuring the coaxial rotation of the first hollow rotating shaft 411 and the second hollow rotating shaft 412, and When turning in reverse, it is more flexible and smooth.
  • the hollow rotating shaft with grooves on the side simplifies the guidance of the wire harness, greatly reduces the contact area and range of motion between the wire harness and moving parts, and improves the overall reliability of the manipulator.
  • first notch 414 is arranged at 310 degrees
  • second notch 415 is arranged at 50 degrees. That is, the first notch 414 and the second notch 415 are set correspondingly, and when the upper wrist 6 and the lower wrist 5 are overlapped, referring to the accompanying drawing 5, the two are set 422 correspondingly, the groove of the first notch 414 The body part is 50 degrees, and the notch is 310 degrees.
  • the 50-degree notch body part and the 50-degree opening of the second notch 415 are respectively located on both sides of the central axis, while the first notch 414 and the second notch 415
  • the edges are respectively provided with rounded structures to ensure the integrity of the wire harness when rotating, especially when rotating to a limit angle, there is still enough space to pass through the first notch 414 and the second notch 415, and the wire harness will not be dragged and deformed.
  • the second notch 415 includes a horizontal portion 4151 and a vertical portion 4152 , and both the horizontal portion 4151 and the vertical portion 4152 are arranged at 50 degrees, and the vertical portion 4152 communicates with the inner space of the lower wrist 5 .
  • the inner space of the lower wrist 5 stores the wiring harness, which facilitates the conduction of the electrical components.
  • a first synchronous pulley 416 is fixedly installed on the outside of the first hollow rotating shaft 411, and a second synchronous pulley 417 is connected to the second hollow rotating shaft 412, and the first synchronous pulley 416 and the second synchronous pulley 417 can
  • the first hollow rotating shaft 411 and the second hollow rotating shaft 412 are respectively driven to rotate. That is, two synchronous pulleys cooperate with the synchronous belt and the synchronous motor to provide power for the rotation of the two.
  • a second synchronous pulley 417 is arranged below the second hollow rotating shaft 412 , is connected through a second bearing 418 , and is clamped in the upper arm 3 .
  • the second synchronous pulley 417 needs to be set downwards and kept parallel to the first synchronous pulley 416, and referring to accompanying drawing 2, the length of the first hollow rotating shaft 411 is greater than that of the second hollow rotating shaft 412, so the space for setting the first synchronous pulley 416 is sufficient, but the second hollow rotating shaft 412 is sleeved on the outside, and its size is already larger than the first hollow rotating shaft 411, so it passes through the inner shaft of the second bearing 418 The ring is engaged with the second synchronous pulley 417 and the second hollow rotating shaft 412 at the same time, making the rotation more stable and saving space.
  • the actuator 4 also includes a limit module 42, two limit modules 42 are set, one is set between the upper wrist 6 and the lower wrist 5, and the other is set between the lower wrist 5 and the upper arm 3;
  • the position module 42 includes a limit pin 421 and a limit groove 422.
  • the limit pin 421 is located in the limit groove 422, and the limit groove 422 is arranged in an arc shape, and does not exceed 340 degrees.
  • the rotation axes of the lower wrist 5 are on the same axis. In order to prevent the wire harness from being entangled, corresponding rotation limiting measures must be taken.
  • the limiting pin 421 and the limiting groove 422 shown in FIG. 2 can ensure that the wire harness will not be entangled due to excessive rotation of the wrist (> ⁇ 180°).
  • Figure 3 shows a detailed view of the limiting measures for the lower wrist 5, the limiting groove 422 is a thickened part, concentric with the first hollow rotating shaft 411, and the two limiting grooves 422 of the two limiting components Coaxial setting.
  • the limit groove 422 is not a full circle. After testing, it is found that there is an opening angle of about 23°, so the rotation range of the lower wrist 5 around the axis a is about ⁇ 168.5°. When the rotation angle reaches the maximum value in the range, the limit pin 421 will contact the lower wrist 5 to prevent the lower wrist 5 from further rotation, and the effect is the best at this time.
  • Both the upper wrist 6 and the lower wrist 5 are provided with a similar limiting groove 422 structure, and the corresponding limiting pin 421 is placed on the lower wrist 5 (see FIG. 2 ). Therefore, the maximum relative angle between the upper wrist 6 and the lower wrist 5 is also about ⁇ 168.5°, and adding the rotation range of the lower wrist 5, the rotation range of the upper wrist 6 around the axis a is about ⁇ 337°.
  • the diameter of the limiting pin 421 is smaller than the width of the limiting groove 422 . Such a setting can ensure that the relative movement is smoother and less prone to collisions.
  • a bottom plate 31 is provided on the lower side of the upper arm 3 , and a wire inlet hole 32 is arranged on the bottom board 31 , and the wire inlet hole 32 communicates with the hollow inner channel of the first hollow rotating shaft 411 . That is to ensure that the wiring harness can enter smoothly.
  • the upper arm 3 is provided with the fixing part 33 , and the second bearing 418 is arranged inside the fixing part 33 . That is, the second bearing 418 is fixed by setting the fixing member 33 to ensure the stable rotation of the second hollow rotating shaft 412 .
  • the upper wrist 6 and the second hollow rotating shaft 412 are connected through the connecting member 61 , and the upper wrist 6 and the lower wrist 5 are parallel. That is, the stability during coaxial rotation is ensured, and parallelism is also guaranteed.
  • the lower arm 2 is driven by a servo motor and rotates in the horizontal plane
  • the rotation connection between the upper arm 3 and the lower arm 2 is also driven by a servo motor
  • the upper wrist 6 and the lower wrist 5 are respectively connected by two synchronous servo motors.
  • a synchronous pulley 416 and a second synchronous pulley 417 rotate, and at the same time, a group of screw assembly can also be set on the base 1, the screw motor drives the screw, the screw is sleeved with a nut, and the nut is connected with the workbench in the base 1 , can drive the table to move up and down along the direction of the screw, that is, the handling robot has 5 degrees of freedom (4 rotation degrees of freedom and 1 translation degree of freedom), see Figure 1, there are two rotation degrees of freedom at the axis a, There is a rotational degree of freedom at the axis b, and a rotational degree of freedom and a translational degree of freedom at the axis c; it can be controlled by an algorithm in a certain space to realize the pick-and-place of the wafer.
  • the upper wrist 6 is linked with the upper end effector 8 and the lower wrist 5 is linked with the lower end effector 7 to open or close synchronously.
  • the beneficial effect of a handling robot is that by setting the wiring harness in the driving module 41, the reciprocating motion of the wiring harness can be avoided, and the performance requirements for the wiring harness itself can be reduced to save costs; at the same time, the robot is reduced in the process of handling wafers.
  • the wear of the wire harness suppresses the generation of dust, and also reduces the manpower and material costs for later maintenance and replacement of the wire harness; the structure is greatly simplified, which reduces the difficulty of assembly and assembly time, and also reduces the difficulty of processing and material costs.
  • the simple structure can Reduce the time for post-maintenance and increase production efficiency.
  • the wiring harness is built into the rotating shaft of the driving module, avoiding the reciprocating movement of the wiring harness, which can reduce the performance requirements of the wiring harness itself to save costs; at the same time, it reduces the robot's time in handling wafers.
  • the abrasion of the wiring harness during the process suppresses the generation of dust, and also reduces the labor and material costs for subsequent maintenance and replacement of the wiring harness;
  • the wrist of the robot is equipped with a limit module, which can effectively prevent the wrist from rotating too much and provide protection for the equipment;
  • the structure of the actuator is greatly simplified, which reduces the difficulty of assembly and assembly time, and also reduces the difficulty of processing and material costs.
  • the simple structure can reduce the time for later maintenance and increase production efficiency.
  • the materials of the first hollow rotating shaft and the second hollow rotating shaft can be replaced with wear-resistant materials, such as wear-resistant ceramic materials;
  • wear-resistant parts such as wear-resistant plastic structural parts or wear-resistant plastic films
  • the size and angle of slotting are variable, (the opening angle of the existing spacer slot width 4, the spacer slot is 23 °, the first notch and the second notch are respectively 310 °, 50 °, also It can be changed to 300 and 60, 320 and 40, 270 and 90, etc., and the combination range equal to 360 can be tried);
  • the first notch and the second notch are used in combination, so the number of combinations of the two can be set to increase the number of slots, for example, multiple slots can be spaced apart to increase the number of lower wrists.
  • the positions of the two end effectors are set on the same axis, and are respectively driven by the corresponding rotating shafts and synchronous pulleys, which makes it difficult to guide the wire harness.
  • the wire harness guide design of the current product is complicated, and the wire harness guide path is divided into two outside the rotation axis: the wire harness of the upper end effector is guided to the upper end effector from under the bottom plate through the hollow rotating shaft; the wire harness of the lower end effector is guided through the middle layer wire harness The guide part is guided to the lower end effector through the notch after making a circle around the rotation shaft of the lower end effector (dotted line part).
  • This design has an unreasonable setting position of the wire harness.
  • part of the wire harness in Figure 6 will reciprocate, resulting in faster wear of the wire harness, increased maintenance times, and reduced production efficiency.

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  • Mechanical Engineering (AREA)
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Abstract

本发明公开了一种搬运机器人，包括依次转动连接的底座、下臂和上臂，在上臂上转动设置执行机构，执行机构的驱动模组内部设置线束，同时线束能分别延伸至下手腕和上手腕的内部空间，并通过线束分别连接下末端执行器和上末端执行器的电子元器件。通过驱动模组内设置线束，避免了线束的往复运动，可以降低对线束本身的性能要求以此节省成本；同时减少了机器人在搬运晶圆的过程中对线束的磨损，抑制了粉尘产生，也减少了后期维护、更换线束所产生的人力和材料成本；结构大幅简化，降低了装配难度和装配时间，也减少了加工难度和物料成本，简单的结构可以减少后期维护的时间，增加生产效率。

Description

一种搬运机器人 技术领域
本发明涉及半导体制造领域，尤其涉及一种用于晶圆输送的搬运机器人。
背景技术
集成电路(integrated circuit)是一种微型电子器件或部件。采用一定的工艺，把一个电路中所需的晶体管、电阻、电容和电感等元件及布线互连一起，制作在一小块或几小块半导体晶片上，然后封装在一个管壳内，成为具有所需电路功能的微型结构；其中所有元件在结构上已组成一个整体，使电子元件向着微小型化、低功耗、智能化和高可靠性方面迈进了一大步。它在电路中用字母“IC”表示。
而集成电路的基础是半导体晶片，也称之为晶圆。在集成电路的制造过程中，要求高精度和高洁净度，同时晶圆需要在各个工序之间进行加工处理，因此需要搬运机器人将晶圆在各个工序之间进行稳定的传输和搬运。
目前的搬运机器属于长臂平面关节型晶圆搬运机械手，其结构中的两个末端执行器(手指/片叉)，用于进行直接接触式的晶圆取放。由于每个末端执行器中都有电气元件(传感器、气缸等)用于固定、监测晶圆等，所以需要将相关线缆和气管引导至两个末端执行器部位。此外，由于集成电路制造生产区域有严格的洁净度要求，所述线缆和气管需要置于机械手内部。
另外，运动部分的线缆和气管需要有优秀的耐磨性能，增加了原材料成本；在安装过程中，由于涉及到狭小空间内的线束缠绕，此设计也增加了人工成本和后期维护成本。
因此，目前搬运机器人存在线束设置位置不合理，导致前期装配难度增加，对零部件性能要求增加，后期线束磨损较快，维修次数增多，增加了维护成本、 降低了生产效率。
发明内容
本发明的目的在于提供一种搬运机器人。
为了达到以上目的，本发明采用的技术方案是：一种搬运机器人，包括：
底座；
下臂，所述下臂的一端转动设置底座上，在外力作用下，所述下臂能在水平面内进行旋转；
上臂，所述上臂的一端与下臂的另一端转动连接，且所述上臂的旋转轴与下臂的旋转轴平行，并在外力作用下，所述上臂能在水平面内进行旋转；
执行机构，所述执行机构转动设置在上臂的另一端，所述执行机构包括驱动模组，且所述驱动模组上同轴设置下手腕和上手腕，且下手腕上设置下末端执行器，所述上手腕上设置上末端执行器，在驱动模组的驱动下，所述下手腕和上手腕进行同轴转动，且驱动模组的内部设置线束，同时线束能分别延伸至下手腕和上手腕的内部空间。
进一步的，所述驱动模组设置在上臂的另一端的内部，且所述驱动模组包括第一中空旋转轴和第二中空旋转轴，且第一中空旋转轴套设在第二中心旋转轴内，且二者同轴设置，并在二者之间设置连接轴承，并在第一中空旋转轴的侧面设置第一槽口，在第二中空旋转轴的侧面设置第二槽口，且所述第一槽口和第二槽口相通，且第一槽口和第二槽口内能放置线束。在驱动模组中包括两条线束通道，其一：第一中空旋转轴的中空内部通道，由下至上贯穿设置并进入上手腕；其二：从第一中空旋转轴的中空内部通道由下至上，当到达第一槽口高度时，进入第一槽口和第二槽口组成的通道，并进入下手腕；可以看出两条线束均为同轴转动，能有效地减少使用过程中的磨损。同时连接轴承的外圈 位于第二中心旋转轴的内部，内圈卡在第一中空旋转轴的外侧，保证了第一中空旋转轴和第二中空旋转轴的同轴转动，且反向转动时，更加灵活和流畅。采用中空并在侧面开槽的旋转轴，简化线束引导，大幅度减少线束和运动部件的接触面积和运动范围，提高机械手整体可靠性。
进一步的，所述第一槽口呈310度设置，所述第二槽口呈50度设置。即第一槽口和第二槽口是对应设置的，且上手腕和下手腕重合时，参见附图5所示二者是对应设置的，第一槽口的槽体部分是50度，槽口为310度，50度的槽体部分和第二槽口的50度开口分别位于中心轴线的两侧，同时对第一槽口和第二槽口的边缘分别设置圆角结构，保证线束在旋转时的完整，特别是在旋转至极限角度时，仍有足够的空间通过第一槽口和第二槽口，线束不会被拖拽变形。
进一步的，所述第二槽口包括水平部和竖直部，且水平部和竖直部均呈50度设置，且竖直部与下手腕的内部空间相通。下手腕的内部空间存放线束，方便电气元件的导通。
进一步的，所述第一中空旋转轴的外侧固定设置第一同步带轮，在所述第二中空旋转轴连接第二同步带轮，且第一同步带轮和第二同步带轮能分别驱动第一中空旋转轴和第二中空旋转轴进行旋转。即通过两个同步带轮配合同步带和同步电机为二者的旋转提供动力。
进一步的，所述第二中空旋转轴的下方设置第二同步带轮，且通过第二轴承连接，并卡设在上臂内。为了保证同步带的传动，所以第二同步带轮需要向下设置，并与第一同步带轮保持平行，且参见附图2，第一中空旋转轴的长度大于第二中空旋转轴，所以第一同步带轮的设置的空间是足够的，但是第二中空旋转轴是套设在外部的，其尺寸已经大于第一中空旋转轴，因此通过第二轴承的内圈同时卡接第二同步带轮和第二中空旋转轴，使得旋转更加稳定，同时节 约空间。
进一步的，所述执行机构还包括限位模组，所述限位模组设置两个，其一设置在上手腕和下手腕之间，其二设置在下手腕和上臂之间；所述限位模组包括限位销与限位槽，所述限位销位于限位槽内，且所述限位槽呈弧形设置，且不超过340度，同时限位槽的圆心与下手腕的旋转轴处于同一轴线。为了防止线束缠绕，必须有相应的旋转限位措施，图2所示的限位销和限位槽可以保证线束不会因为手腕部的过度旋转(>±180°)而缠绕。图3给出了对于下手腕起作用的所述限位措施的细节图，限位槽为加粗线条部分，与第一中空旋转轴同心，而且两个限位组件的两个限位槽均同轴设置。如图3和4所示，限位槽非整圆，经过测试得出，留有大约为23°的开口角，所以下手腕绕轴线a的旋转范围约为±168.5°，当下手腕旋转角度达到所述范围的最大值时，限位销和下手腕会接触，防止下手腕作进一步旋转，此时效果最佳。上手腕和下手腕均设置了类似的限位槽结构，与其对应的限位销则置于下手腕上(见图2)。所以，上手腕和下手腕的最大相对角度同样约为±168.5°，而加上下手腕的旋转范围，上手腕绕轴a的旋转范围约为±337°。
进一步的，所述限位销的直径尺寸小于限位槽的宽度。这样的设置，能保证相对运动时，更加流畅，且不易发生碰撞。
进一步的，所述上臂的下侧设置底板，且底板上设置进线孔，且所述进线孔与第一中空旋转轴的中空内部通道相通。即保证线束能顺利进入。
进一步的，所述上臂上设置固定部件，且所述固定部件内设置第二轴承。即通过固定部件的设置，固定第二轴承，保证第二中空旋转轴的稳定旋转。
进一步的，所述上手腕和第二中空旋转轴通过连接部件连接，且上手腕和下手腕平行。即保证了同轴旋转时的稳定，同时也保证平行。
进一步的，下臂通过伺服电机驱动，并在水平面内进行旋转，上臂和下臂的转动连接也通过伺服电机驱动，上手腕和下手腕分别连接由两个同步伺服电机带动第一同步带轮和第二同步带轮旋转，同时底座上还可以设置一组丝杆组件，丝杆电机驱动丝杆，丝杆上套设螺母，螺母与底座内的工作台连接，能驱动工作台沿丝杆方向升降，即此搬运机器人有5个自由度(4个旋转自由度和1个平移自由度)，参见附图1，在轴线a处有两个旋转自由度，在轴线b处有一个旋转自由度，在轴线c处有一个旋转自由度和一个平移自由度；在可以通过算法控制在一定空间内，实现晶圆的取放。当然在取放晶圆时，上手腕联动上末端执行器与下手腕联动下末端执行器同步张开或同步闭合的。
本发明一种搬运机器人的有益效果是，通过驱动模组内设置线束，避免了线束的往复运动，可以降低对线束本身的性能要求以此节省成本；同时减少了机器人在搬运晶圆的过程中对线束的磨损，抑制了粉尘产生，也减少了后期维护、更换线束所产生的人力和材料成本；结构大幅简化，降低了装配难度和装配时间，也减少了加工难度和物料成本，简单的结构可以减少后期维护的时间，增加生产效率。
附图说明
图1为搬运机器人的结构示意图。
图2为轴线a处的的纵剖面示意图。
图3为下手腕对应的限位模组的示意图。
图4为上手腕对应的限位模组的示意图。
图5为第一槽口与第二槽口的组合示意图。
图6为现有的搬运机械手的示意图。
图中：
1、底座，
2、下臂，
3、上臂，31、底板，32、进线孔，33、固定部件，
4、执行机构，
41、驱动模组，411、第一中空旋转轴，412、第二中空旋转轴，413、连接轴承，414、第一槽口，415、第二槽口，4151、水平部，4152、竖直部，416、第一同步带轮，417、第二同步带轮，418、第二轴承，
42、限位模组，421、限位销，422、限位槽，
5、下手腕，
6、上手腕，61、连接部件，
7、下末端执行器，
8、上末端执行器。
具体实施方式
下面结合附图对本发明的较佳实施例进行详细阐述，以使本发明的优点和特征能更易于被本领域技术人员理解，从而对本发明的保护范围做出更为清楚明确的界定。
参见附图1-6所示，本实施例中的一种搬运机器人，包括：底座1；下臂2，下臂2的一端转动设置底座1上，在外力作用下，下臂2能在水平面内进行旋转；上臂3，上臂3的一端与下臂2的另一端转动连接，且上臂3的旋转轴与下臂2的旋转轴平行，并在外力作用下，上臂3能在水平面内进行旋转；执行机构4，执行机构4转动设置在上臂3的另一端，执行机构4包括驱动模组41，且驱动模组41上同轴设置下手腕5和上手腕6，且下手腕5上设置下末端执行 器7，上手腕6上设置上末端执行器8，在驱动模组41的驱动下，下手腕5和上手腕6进行同轴转动，且驱动模组41的内部设置线束，同时线束能分别延伸至下手腕5和上手腕6的内部空间。
进一步的，驱动模组41设置在上臂3的另一端的内部，且驱动模组41包括第一中空旋转轴411和第二中空旋转轴412，且第一中空旋转轴411套设在第二中心旋转轴内，且二者同轴设置，并在二者之间设置连接轴承413，并在第一中空旋转轴411的侧面设置第一槽口414，在第二中空旋转轴412的侧面设置第二槽口415，且第一槽口414和第二槽口415相通，且第一槽口414和第二槽口415内能放置线束。在驱动模组41中包括两条线束通道，其一：第一中空旋转轴411的中空内部通道，由下至上贯穿设置并进入上手腕6；其二：从第一中空旋转轴411的中空内部通道由下至上，当到达第一槽口414高度时，进入第一槽口414和第二槽口415组成的通道，并进入下手腕5；可以看出两条线束均为同轴转动，能有效地减少使用过程中的磨损。同时连接轴承413的外圈位于第二中心旋转轴的内部，内圈卡在第一中空旋转轴411的外侧，保证了第一中空旋转轴411和第二中空旋转轴412的同轴转动，且反向转动时，更加灵活和流畅。采用中空并在侧面开槽的旋转轴，简化线束引导，大幅度减少线束和运动部件的接触面积和运动范围，提高机械手整体可靠性。
进一步的，第一槽口414呈310度设置，第二槽口415呈50度设置。即第一槽口414和第二槽口415是对应设置的，且上手腕6和下手腕5重合时，参见附图5所示二者是对应设422置的，第一槽口414的槽体部分是50度，槽口为310度，50度的槽体部分和第二槽口415的50度开口分别位于中心轴线的两侧，同时对第一槽口414和第二槽口415的边缘分别设置圆角结构，保证线束在旋转时的完整，特别是在旋转至极限角度时，仍有足够的空间通过第一槽口 414和第二槽口415，线束不会被拖拽变形。
进一步的，第二槽口415包括水平部4151和竖直部4152，且水平部4151和竖直部4152均呈50度设置，且竖直部4152与下手腕5的内部空间相通。下手腕5的内部空间存放线束，方便电气元件的导通。
进一步的，第一中空旋转轴411的外侧固定设置第一同步带轮416，在第二中空旋转轴412连接第二同步带轮417，且第一同步带轮416和第二同步带轮417能分别驱动第一中空旋转轴411和第二中空旋转轴412进行旋转。即通过两个同步带轮配合同步带和同步电机为二者的旋转提供动力。
进一步的，第二中空旋转轴412的下方设置第二同步带轮417，且通过第二轴承418连接，并卡设在上臂3内。为了保证同步带的传动，所以第二同步带轮417需要向下设置，并与第一同步带轮416保持平行，且参见附图2，第一中空旋转轴411的长度大于第二中空旋转轴412，所以第一同步带轮416的设置的空间是足够的，但是第二中空旋转轴412是套设在外部的，其尺寸已经大于第一中空旋转轴411，因此通过第二轴承418的内圈同时卡接第二同步带轮417和第二中空旋转轴412，使得旋转更加稳定，同时节约空间。
进一步的，执行机构4还包括限位模组42，限位模组42设置两个，其一设置在上手腕6和下手腕5之间，其二设置在下手腕5和上臂3之间；限位模组42包括限位销421与限位槽422，限位销421位于限位槽422内，且限位槽422呈弧形设置，且不超过340度，同时限位槽422的圆心与下手腕5的旋转轴处于同一轴线。为了防止线束缠绕，必须有相应的旋转限位措施，图2所示的限位销421和限位槽422可以保证线束不会因为手腕部的过度旋转(>±180°)而缠绕。图3给出了对于下手腕5起作用的限位措施的细节图，限位槽422为加粗线条部分，与第一中空旋转轴411同心，而且两个限位组件的两个限位槽422均同 轴设置。如图3和4所示，限位槽422非整圆，经过测试得出，留有大约为23°的开口角，所以下手腕5绕轴线a的旋转范围约为±168.5°，当下手腕5旋转角度达到范围的最大值时，限位销421和下手腕5会接触，防止下手腕5作进一步旋转，此时效果最佳。上手腕6和下手腕5均设置了类似的限位槽422结构，与其对应的限位销421则置于下手腕5上(见图2)。所以，上手腕6和下手腕5的最大相对角度同样约为±168.5°，而加上下手腕5的旋转范围，上手腕6绕轴a的旋转范围约为±337°。
进一步的，限位销421的直径尺寸小于限位槽422的宽度。这样的设置，能保证相对运动时，更加流畅，且不易发生碰撞。
进一步的，上臂3的下侧设置底板31，且底板31上设置进线孔32，且进线孔32与第一中空旋转轴411的中空内部通道相通。即保证线束能顺利进入。
进一步的，上臂3上设置固定部件33，且固定部件33内设置第二轴承418。即通过固定部件33的设置，固定第二轴承418，保证第二中空旋转轴412的稳定旋转。
进一步的，上手腕6和第二中空旋转轴412通过连接部件61连接，且上手腕6和下手腕5平行。即保证了同轴旋转时的稳定，同时也保证平行。
进一步的，下臂2通过伺服电机驱动，并在水平面内进行旋转，上臂3和下臂2的转动连接也通过伺服电机驱动，上手腕6和下手腕5分别连接由两个同步伺服电机带动第一同步带轮416和第二同步带轮417旋转，同时底座1上还可以设置一组丝杆组件，丝杆电机驱动丝杆，丝杆上套设螺母，螺母与底座1内的工作台连接，能驱动工作台沿丝杆方向升降，即此搬运机器人有5个自由度(4个旋转自由度和1个平移自由度)，参见附图1，在轴线a处有两个旋转自由度，在轴线b处有一个旋转自由度，在轴线c处有一个旋转自由度和一个 平移自由度；可以通过算法控制在一定空间内，实现晶圆的取放。当然在取放晶圆时，上手腕6联动上末端执行器8与下手腕5联动下末端执行器7同步张开或同步闭合的。
一种搬运机器人的有益效果是，通过驱动模组41内设置线束，避免了线束的往复运动，可以降低对线束本身的性能要求以此节省成本；同时减少了机器人在搬运晶圆的过程中对线束的磨损，抑制了粉尘产生，也减少了后期维护、更换线束所产生的人力和材料成本；结构大幅简化，降低了装配难度和装配时间，也减少了加工难度和物料成本，简单的结构可以减少后期维护的时间，增加生产效率。
总的来说，
1、驱动模组结构的改进，将线束内置与驱动模组的旋转轴内，避免了线束的往复运动，可以降低对线束本身的性能要求以此节省成本；同时减少了机器人在搬运晶圆的过程中对线束的磨损，抑制了粉尘产生，也减少了后期维护、更换线束所产生的人力和材料成本；
2、机器人的腕部设置限位模组，可以有效防止手腕旋转幅度过大，对设备提供保护；
3、执行机构的结构大幅简化，降低了装配难度和装配时间，也减少了加工难度和物料成本，简单的结构可以减少后期维护的时间，增加生产效率。
在另一些可能的实施例中，
1.可以将第一中空旋转轴和第二中空旋转轴的材质更换为耐磨材料，例如改为耐磨陶瓷材料；
2.在第一中空旋转轴和第二中空旋转轴的内部进一步增加耐磨零件(例如耐磨塑料结构零件或耐磨塑料贴膜)；
3.开槽的大小和角度是可变的，(现有的限位槽宽度4、限位槽的开口角23°、第一槽口和第二槽口分别是310°、50°，也可以变为300和60,320和40,270和90，等等，相加等于360的组合范围均可尝试)；
4.第一槽口和第二槽口是组合使用的，所以二者的组合数可以设置多个，增加开槽数量，例如可间隔开多个槽，增加下手腕数量。
在其他实施例中，
参见附图6，两个末端执行器的位置设置于同一轴线上，由对应的旋转轴和同步带轮分别驱动，导致线束引导难度较大。目前产品的线束引导设计复杂，线束引导路径于旋转轴线外部分为两条：上末端执行器的线束从底板下通过中空旋转轴被引导至上末端执行器；下末端执行器的线束则通过中层线束引导部，在下末端执行器旋转轴外部环绕一圈后(虚线部分)经过槽口被引导至下末端执行器。此设计存在线束设置位置不合理，在下末端执行器旋转过程中，图6部分线束会作往复运动，导致线束磨损较快，维修次数增多，降低了生产效率。
以上实施方式只为说明本发明的技术构思及特点，其目的在于让熟悉此项技术的人了解本发明的内容并加以实施，并不能以此限制本发明的保护范围，凡根据本发明精神实质所做的等效变化或修饰，都应涵盖在本发明的保护范围内。

Claims (10)

  1. 一种搬运机器人，包括：
    底座；
    下臂，所述下臂的一端转动设置底座上，在外力作用下，所述下臂能在水平面内进行旋转；
    上臂，所述上臂的一端与下臂的另一端转动连接，且所述上臂的旋转轴与下臂的旋转轴平行，并在外力作用下，所述上臂能在水平面内进行旋转；
    其特征在于，还包括：
    执行机构，所述执行机构转动设置在上臂的另一端，所述执行机构包括驱动模组，且所述驱动模组上同轴设置下手腕和上手腕，且下手腕上设置下末端执行器，所述上手腕上设置上末端执行器，在驱动模组的驱动下，所述下手腕和上手腕进行同轴转动，且驱动模组的内部设置线束，同时线束能分别延伸至下手腕和上手腕的内部空间。
  2. 根据权利要求1所述的一种搬运机器人，其特征在于：所述驱动模组设置在上臂的另一端的内部，且所述驱动模组包括第一中空旋转轴和第二中空旋转轴，且第一中空旋转轴套设在第二中心旋转轴内，且二者同轴设置，并在二者之间设置连接轴承，并在第一中空旋转轴的侧面设置第一槽口，在第二中空旋转轴的侧面设置第二槽口，且所述第一槽口和第二槽口相通，且第一槽口和第二槽口内能放置线束。
  3. 根据权利要求2所述的一种搬运机器人，其特征在于：所述第一槽口呈310度设置，所述第二槽口呈50度设置。
  4. 根据权利要求2所述的一种搬运机器人，其特征在于：所述第二槽口包括水平部和竖直部，且水平部和竖直部均呈50度设置，且竖直部与下手腕的内 部空间相通。
  5. 根据权利要求2所述的一种搬运机器人，其特征在于：所述第一中空旋转轴的外侧固定设置第一同步带轮，在所述第二中空旋转轴连接第二同步带轮，且第一同步带轮和第二同步带轮能分别驱动第一中空旋转轴和第二中空旋转轴进行旋转。
  6. 根据权利要求2所述的一种搬运机器人，其特征在于：所述第二中空旋转轴的下方设置第二同步带轮，且通过第二轴承连接，并卡设在上臂内。
  7. 根据权利要求1所述的一种搬运机器人，其特征在于：所述执行机构还包括限位模组，所述限位模组设置两个，其一设置在上手腕和下手腕之间，其二设置在下手腕和上臂之间；所述限位模组包括限位销与限位槽，所述限位销位于限位槽内，且所述限位槽呈弧形设置，且不超过340度，同时限位槽的圆心与下手腕的旋转轴处于同一轴线。
  8. 根据权利要求7所述的一种搬运机器人，其特征在于：所述限位销的直径尺寸小于限位槽的宽度。
  9. 根据权利要求1所述的一种搬运机器人，其特征在于：所述上臂的下侧设置底板，且底板上设置进线孔，且所述进线孔与第一中空旋转轴的中空内部通道相通。
  10. 根据权利要求1所述的一种搬运机器人，其特征在于：所述上手腕和第二中空旋转轴通过连接部件连接，且上手腕和下手腕平行。
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