WO2023073878A1 - Appareil d'irradiation par plasma et procédé de fabrication de liquide de traitement au plasma - Google Patents

Appareil d'irradiation par plasma et procédé de fabrication de liquide de traitement au plasma Download PDF

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Publication number
WO2023073878A1
WO2023073878A1 PCT/JP2021/039874 JP2021039874W WO2023073878A1 WO 2023073878 A1 WO2023073878 A1 WO 2023073878A1 JP 2021039874 W JP2021039874 W JP 2021039874W WO 2023073878 A1 WO2023073878 A1 WO 2023073878A1
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Prior art keywords
liquid
plasma
cover housing
treated
cover
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PCT/JP2021/039874
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English (en)
Japanese (ja)
Inventor
俊之 池戸
高広 神藤
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株式会社Fuji
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Priority to PCT/JP2021/039874 priority Critical patent/WO2023073878A1/fr
Publication of WO2023073878A1 publication Critical patent/WO2023073878A1/fr

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma

Definitions

  • the present disclosure relates to a technique for irradiating a liquid to be processed with plasma.
  • Patent Document 1 describes an apparatus for plasma-processing a liquid to be treated (culture solution) held inside a cover housing. Specifically, an inert gas is supplied to the inside of the cover housing, and when the oxygen concentration in the cover housing becomes equal to or less than a predetermined value, the plasma generator blows out plasma into the cover housing. As a result, the liquid to be treated is plasma-treated, but the inert gas is continuously supplied to the inside of the cover housing even while the plasma is being irradiated. must be vented. For this reason, a duct opening is provided at the bottom of the cover housing. The duct opening penetrates to the outside through a pipe, and the pipe is provided with an ozone filter. Therefore, the air in the cover housing passes through the duct port and the piping, has ozone removed by the ozone filter, and is discharged to the outside.
  • An object of the present disclosure is to provide a technique that, when the liquid to be treated leaks from a container holding the liquid to be treated, can stop the leaked liquid to be treated near the mouth of the duct.
  • the plasma irradiation apparatus of the present disclosure includes a cover housing that defines a predetermined space, a plasma generator that ejects plasma toward the inside of the cover housing, and a gas that is supplied to the inside of the cover housing.
  • a gas supply device a holding portion provided inside the cover housing for holding the liquid to be treated, a duct port provided at the bottom of the cover housing for exhausting gas from the inside of the cover housing, and a duct port provided below the cover housing. and a liquid reservoir for reserving liquid.
  • the leaked liquid to be treated can be retained near the duct opening.
  • FIG. 1 is an exploded view of a plasma generator;
  • FIG. 1 is an exploded view of a plasma generator;
  • FIG. It is a sectional view of a plasma generator.
  • It is a perspective view of an atmospheric pressure plasma irradiation apparatus.
  • It is a side view of an atmospheric pressure plasma irradiation apparatus.
  • It is a side view of an atmospheric pressure plasma irradiation apparatus.
  • It is a perspective view of an atmospheric pressure plasma irradiation apparatus.
  • It is the perspective view ((a)) of an irradiation block, and the cross-sectional perspective view ((b)) in the BB line.
  • FIG. 2 is a cross-sectional view taken along line AA of FIG. 1; It is a block diagram of a control device.
  • FIG. 1 shows an atmospheric pressure plasma irradiation device 10 according to one embodiment of the present disclosure.
  • the atmospheric pressure plasma irradiation device 10 is a device for irradiating a culture solution (an example of a “liquid to be treated”) with plasma under atmospheric pressure, and includes a plasma generator 20, a cover housing 22, an opening and closing mechanism 24, It comprises a stage 26, an elevating device 28, a purge gas supply mechanism 32 (see FIG. 5), a concentration detection mechanism 34, an exhaust mechanism 36, and a control device 38 (see FIG. 11).
  • the width direction of the atmospheric pressure plasma irradiation device 10 is called the X direction
  • the depth direction of the atmospheric pressure plasma irradiation device 10 is called the Y direction
  • the direction perpendicular to the X direction and the Y direction, that is, the vertical direction is called the Z direction.
  • the plasma generator 20 includes a cover 50, an upper block 52, a lower block 54, a pair of electrodes 56, and a nozzle block 58, as shown in FIGS.
  • the cover 50 generally has a rectangular tubular shape with a lid, and an upper block 52 is arranged inside the cover 50 .
  • the upper block 52 has a generally rectangular parallelepiped shape and is made of ceramic.
  • a pair of cylindrical recesses 60 are formed in the lower surface of the upper block 52 .
  • the lower block 54 also has a generally rectangular parallelepiped shape and is made of ceramic.
  • a concave portion 62 is formed in the upper surface of the lower block 54.
  • the concave portion 62 is composed of a pair of cylindrical concave portions 66 and a connecting concave portion 68 connecting the pair of cylindrical concave portions 66.
  • the lower block 54 is fixed to the lower surface of the upper block 52 while protruding from the lower end of the cover 50, and the columnar recess 60 of the upper block 52 and the columnar recess 66 of the lower block 54 communicate with each other.
  • the cylindrical recess 60 and the cylindrical recess 66 have substantially the same diameter.
  • a slit 70 penetrating through the lower surface of the lower block 54 is formed in the bottom surface of the recess 62 .
  • Each of the pair of electrodes 56 is arranged in a columnar space defined by the columnar recess 60 of the upper block 52 and the columnar recess 66 of the lower block 54 .
  • the outer diameter of the electrode 56 is smaller than the inner diameter of the cylindrical recesses 60 and 66 .
  • the nozzle block 58 has a generally flat plate shape and is fixed to the lower surface of the lower block 54 .
  • the nozzle block 58 is formed with an ejection port 72 that communicates with the slit 70 of the lower block 54 , and the ejection port 72 vertically penetrates the nozzle block 58 .
  • the plasma generator 20 further has a processing gas supply device 74 (see FIG. 11).
  • the processing gas supply device 74 is a device for supplying a processing gas obtained by mixing an active gas such as oxygen and an inert gas such as nitrogen at an arbitrary ratio, and is a cylindrical space defined by the cylindrical recesses 60 and 66. And it is connected to the upper part of the connection recessed part 68 via piping (not shown). As a result, the processing gas is supplied into the recess 62 from the gap between the electrode 56 and the cylindrical recess 66 and from the top of the connecting recess 68 .
  • the plasma generator 20 ejects plasma from the ejection port 72 of the nozzle block 58.
  • the processing gas is supplied to the interior of the recess 62 by a processing gas supply device 74 .
  • voltage is applied to the pair of electrodes 56 in the recess 62 , and current flows between the pair of electrodes 56 .
  • an electric discharge is generated between the pair of electrodes 56, and the electric discharge converts the processing gas into plasma.
  • Plasma is then ejected from the ejection port 72 through the slit 70 .
  • the cover housing 22 also includes an upper cover 76 and a lower cover 78, as shown in FIG.
  • the upper cover 76 generally has a cylindrical shape with a lid, and a through hole (not shown) having a shape corresponding to the lower block 54 of the plasma generator 20 is formed in the lid portion of the upper cover 76 .
  • a cover 50 of the plasma generator 20 is fixed upright on the lid portion of the upper cover 76 so as to cover the through hole. Therefore, the lower block 54 and the nozzle block 58 of the plasma generator 20 protrude toward the inside of the upper cover 76 so as to extend in the Z direction. As a result, the plasma generated by the plasma generator 20 is jetted in the Z direction from the jetting port 72 of the nozzle block 58 toward the inside of the upper cover 76 .
  • a transparent glass plate 80 is disposed so as to block the through holes. ing. This allows the inside of the upper cover 76 to be visually recognized through the glass plate 80 .
  • the lower cover 78 of the cover housing 22 has a generally disk shape and is fixed to a housing (not shown) of the mounting section on which the atmospheric pressure plasma irradiation device 10 is mounted.
  • the outer diameter of the lower cover 78 is larger than the outer diameter of the upper cover 76 , and an annular packing 82 having the same diameter as the upper cover 76 is arranged on the upper surface of the lower cover 78 .
  • the opening/closing mechanism 24 includes a pair of slide mechanisms 86 and an air cylinder 88, as shown in FIGS.
  • Each slide mechanism 86 includes a support shaft 90 and a slider 92 .
  • the support shaft 90 is provided upright on the housing of the placement section so as to extend in the Z direction.
  • the slider 92 has a generally cylindrical shape and is fitted onto the support shaft 90 so as to be slidable in the axial direction of the support shaft 90 .
  • the upper cover 76 is held on the slider 92 by an upper bracket 96 and a lower bracket 98 . Thereby, the upper cover 76 is slidable in the Z direction, that is, in the vertical direction.
  • the air cylinder 88 includes a rod 100, a piston (not shown) and a cylinder 102.
  • the rod 100 is arranged to extend in the Z direction and is fixed to the upper cover 76 at its upper end.
  • a piston is fixed to the lower end of the rod 100 .
  • the piston is fitted inside the cylinder 102 from the top end and slidably moves inside the cylinder 102 .
  • the lower end of the cylinder 102 is fixed to the housing of the placement section, and a predetermined amount of air is sealed inside the cylinder 102 .
  • the air cylinder 88 functions as a damper to prevent the upper cover 76 from descending rapidly.
  • the air pressure inside the cylinder 102 is set to a pressure that can be compressed by the weight of the integrated body that slides together with the upper cover 76, that is, the upper cover 76, the plasma generator 20, the slider 92, and the like. That is, when the operator releases the upper cover 76 while the upper cover 76 is raised, the upper cover 76 descends due to the weight of the upper cover 76 and the like. Then, the upper cover 76 is in close contact with the packing 82 of the lower cover 78, and the inside of the cover housing 22 is sealed by the upper cover 76 and the lower cover 78, as shown in FIG.
  • the inside of the cover housing 22 is opened by the operator lifting the upper cover 76 .
  • a magnet 106 (see FIG. 1) is fixed to the upper surface of the upper cover 76, and when the upper cover 76 is lifted, the magnet 106 is attracted to the housing of the placement section. In this way, by attracting the magnet 106 to the housing of the placement section, the state in which the upper cover 76 is lifted, that is, the state in which the cover housing 22 is opened is maintained.
  • the stage 26 is generally disc-shaped, and an irradiation block 180 is placed on the upper surface of the stage 26 . Also, the outer diameter of the stage 26 is made smaller than the outer diameter of the lower cover 78 . The stage 26 is arranged on the upper surface of the lower cover 78 .
  • the irradiation block 180 is used to store the liquid to be treated that has been sent by the liquid sending tube 120, and to generate the plasma-treated liquid by irradiating the stored liquid to be treated with the plasma ejected from the plasma generator 20. .
  • the generated plasma-treated liquid is drained from irradiation block 180 by drain tube 122 .
  • the liquid to be treated is supplied from a liquid to be treated supply unit (not shown) provided outside the cover housing 22 to the irradiation block 180 inside the cover housing 22 through the liquid delivery tube 120 using a pump (not shown). be done. Also, the plasma-treated liquid generated in the irradiation block 180 is drained from the irradiation block 180 through a drainage tube 122 using a pump (not shown), and is placed outside the cover housing 22 in a temporary storage bin (see FIG. 1). not shown). Accordingly, through holes 134 and 136 through which the liquid feeding tube 120 and the liquid draining tube 122 are passed are formed in the side surface of the lower cover 78 .
  • FIG. 9 shows a schematic configuration of the irradiation block 180.
  • FIG. 9(a) is a perspective view showing the appearance of the entire irradiation block 180
  • FIG. 9(b) is a cross-sectional perspective view taken along line BB in FIG. 9(a). The direction from left to right is the direction in which the liquid to be treated flows.
  • the irradiation block 180 is made of ceramic and consists of an irradiation block main body 181 having a generally rectangular parallelepiped shape.
  • the long side direction of the irradiation block 180 is the X direction, and the short side direction is the Y direction.
  • the irradiation block body portion 181 is formed with a groove portion 183 and a storage portion 184 having an open surface facing the plasma generator 20 when installed in the cover housing 22 .
  • the groove portion 183 has a U-shape opening upward in the YZ cross section.
  • a bottom surface 183a forming the groove 183 is curved.
  • the YZ cross section of this groove portion 183 is slightly narrower than the cross-sectional shape of the liquid-feeding tube 120 (see FIG. 1). is fixed.
  • the reservoir 184 stores the liquid to be treated for plasma irradiation.
  • the storage portion 184 is configured by a cylindrical recess having a side surface 184a and a bottom surface 184b. Further, the bottom surface 184b that constitutes the storage portion 184 is formed so as to be located below the bottom surface 183a that constitutes the groove portion 183. As shown in FIG. Furthermore, a drain hole 184c is formed in the bottom surface 184b of the reservoir 184 for discharging the plasma-treated liquid generated by irradiating the liquid to be treated with plasma from the reservoir 184 to the outside.
  • the bottom surface 184b is an inclined surface that slopes downward from the side surface 184a toward the drainage hole 184c. This has a function of quickly discharging the plasma-treated liquid from the reservoir 184 and a function of preventing, as much as possible, a state in which part of the plasma-treated liquid remains in the reservoir 184 without being discharged. This is to make it happen.
  • the irradiation block main body part 181 has a discharge part 186 in addition to the above configuration.
  • the discharge portion 186 is formed on the lower surface 181a of the irradiation block body portion 181 and protrudes downward from a position including the liquid discharge hole 184c of the storage portion 184 .
  • the discharge portion 186 has a base portion 186a, a flange portion 186b, and a discharge locking portion 186c, and is integrally formed with the components 186a to 186c connected downward.
  • a through hole 186 d is formed in the Z direction at the center of the discharge portion 186 and communicates with the discharge hole 184 c of the storage portion 184 .
  • a portion of the outer peripheral surface of the discharge portion 186 that is continuous with the lower surface 181a of the irradiation block body portion 181 is a base portion 186a.
  • the diameter of the outer periphery of the discharge locking portion 186c formed below the base portion 186a with the flange portion 186b interposed therebetween is made larger than the diameter of the liquid discharge tube 122 (see FIG. 1).
  • the outer diameter of the upper portion 186c1 of the ejection locking portion 186c is made smaller than the outer diameter of the ejection locking portion 186c.
  • the irradiation block 180 is fixed to the stage 26 by fitting the base portion 186a and the notch portion 26a (see FIG. 1) of the stage 26 together. In this way, the irradiation block 180 can be easily attached to and detached from the stage 26 because it is not fixed using fixtures.
  • the lifting device 28 includes a support rod 112, a rack 114, a pinion 116, and an electromagnetic motor 117 (see FIG. 11), as shown in FIG.
  • a through hole (not shown) is formed through the lower cover 78 in the vertical direction, and the support rod 112 is inserted through the through hole.
  • the outer diameter of the support rod 112 is made smaller than the inner diameter of the through hole, and the support rod 112 is movable in the vertical direction, that is, in the Z direction.
  • a lower surface of the stage 26 is fixed to the upper end of the support rod 112 .
  • the rack 114 is fixed to the outer peripheral surface of the portion of the support rod 112 extending downward from the lower cover 78 so as to extend in the axial direction of the support rod 112 .
  • the pinion 116 is meshed with the rack 114 and is driven by the electromagnetic motor 117 to rotate.
  • the pinion 116 is rotatably held by the housing of the placement section.
  • the purge gas supply mechanism 32 includes four air joints 130 (three are shown in the figure) and a purge gas supply device 132 (see FIG. 11).
  • Four air joints 130 are provided at four equal positions on the upper end of the side surface of the upper cover 76 , and each air joint 130 opens inside the upper cover 76 .
  • the purge gas supply device 132 is a device that supplies an inert gas such as nitrogen, and is connected to each air joint 130 via a pipe (not shown). With such a structure, the purge gas supply mechanism 32 supplies inert gas to the inside of the upper cover 76 .
  • the concentration detection mechanism 34 includes an air joint 140, a pipe 142, and a detection sensor 144 (see FIG. 11).
  • a through hole (not shown) is formed in the lower cover 78 to communicate the upper surface and the side surface of the lower cover 78 .
  • An opening 146 on the upper surface side of the lower cover 78 of the through hole is located inside the packing 82 .
  • an air joint 140 is connected to the side opening of the lower cover 78 of the through hole.
  • a detection sensor 144 is a sensor that detects oxygen concentration and is connected to the air joint 140 via a pipe 142 . With such a structure, the concentration detection mechanism 34 detects the oxygen concentration inside the cover housing 22 when the cover housing 22 is sealed.
  • the exhaust mechanism 36 includes an L-shaped pipe 150, a connecting pipe 152, and a main pipe 154, as shown in FIG.
  • the lower cover 78 is formed with a duct port 160 that opens to the upper and lower surfaces.
  • the opening of the duct port 160 on the upper surface side of the lower cover 78 is formed into a tapered surface 162 whose inner diameter increases upward. That is, when the cover housing 22 is closed, the tapered surface 162 is inclined toward the inner wall surface of the upper cover 76 .
  • an L-shaped pipe 150 is connected to the opening of the duct port 160 on the lower surface side of the lower cover 78 .
  • a main pipe 154 is connected to the L-shaped pipe 150 via a connecting pipe 152 .
  • a portion of the connecting pipe 152 on the L-shaped pipe 150 side is omitted.
  • An ozone filter 166 is arranged inside the main pipe 154 .
  • the ozone filter 166 is made of activated carbon and absorbs ozone.
  • an opening 150a is formed in the bottom surface of the L-shaped pipe 150 positioned directly below the opening on the lower surface side of the lower cover 78, and a tubular liquid reservoir 151 is connected to the opening 150a.
  • a stopper 151a is detachably attached to the lower end of the liquid pool portion 151 opposite to the opening 150a.
  • the liquid pool part 151 is provided to store the liquid to be processed (including plasma-processed liquid) that has leaked from the irradiation block 180 for some reason. That is, the liquid to be treated that has leaked from the irradiation block 180 drops downward from the duct port 160 and reaches the liquid pool 151 through the opening 150 a of the L-shaped pipe 150 .
  • the liquid to be treated that has reached the liquid reservoir 151 stays in the liquid reservoir 151 and does not flow from the L-shaped pipe 150 to the connecting pipe 152 . There is no contact with the ozone filter 166 provided in the . This prevents the function of the ozone filter 166 from being lost due to the liquid to be treated coming into contact with the ozone filter 166 .
  • the liquid to be processed stored in the storage section 184 of the irradiation block 180 may escape from the irradiation block 180 due to the liquid supply tube 120 or the liquid drainage tube 122 being detached from the irradiation block 180 . It is conceivable that the liquid may leak out or leak out from the liquid feeding tube 120 or the liquid draining tube 122 itself.
  • the liquid pooling part 151 is preferably made of a transparent member so that the liquid to be treated that has accumulated therein can be observed from the outside.
  • the liquid pool 151 is provided with a detachable plug 151a so that the liquid to be treated that has accumulated inside the liquid pool 151 can be easily taken out.
  • the control device 38 includes a controller 170 and a plurality of drive circuits 172, as shown in FIG.
  • a plurality of drive circuits 172 are connected to the electrodes 56 , the processing gas supply device 74 , the electromagnetic motor 117 and the purge gas supply device 132 .
  • the controller 170 includes a CPU, ROM, RAM, etc., is mainly a computer, and is connected to a plurality of drive circuits 172 . Thereby, the controller 170 controls the operations of the plasma generator 20 , the lifting device 28 , and the purge gas supply mechanism 32 .
  • Controller 170 is also connected to detection sensor 144 . Thereby, the controller 170 acquires the detection result of the detection sensor 144 , that is, the oxygen concentration inside the cover housing 22 .
  • the culture solution By irradiating the culture solution with plasma, the culture solution is activated, so the use of plasma in the medical field is expected, such as cancer treatment using the plasma-irradiated culture solution. Therefore, the plasma-irradiated culture solution is generated, and the culture solution is preferably irradiated with the plasma under controlled conditions.
  • the atmospheric pressure plasma irradiation apparatus 10 by placing the irradiation block 180 on the stage 26 and sealing the cover housing 22, it is possible to irradiate the culture medium with plasma under predetermined conditions. is. The technique of irradiating the culture medium with plasma under predetermined conditions will be described in detail below.
  • the irradiation block 180 is placed on the stage 26 .
  • the stage 26 is moved up and down to an arbitrary height by the lifting device 28 . This makes it possible to arbitrarily set the distance between the plasma ejection port 72 and the culture medium as the object to be irradiated with the plasma. It should be noted that the elevation height of the stage 26 can be confirmed by the scale of the measurement rod 118 .
  • the upper cover 76 is lowered to seal the cover housing 22.
  • An inert gas is supplied to the inside of the cover housing 22 by the purge gas supply mechanism 32 .
  • the oxygen concentration in the cover housing 22 is detected by the concentration detection mechanism 34 .
  • the plasma generator 20 ejects plasma into the cover housing 22 . It should be noted that the inert gas is continuously supplied to the inside of the cover housing 22 even when the plasma is being irradiated.
  • the liquid to be treated which has been adjusted to a constant flow rate, flows through the liquid-sending tube 120 to the reservoir 184 of the irradiation block 180 .
  • the liquid to be treated stored in the storage part 184 is irradiated with the plasma gas from the plasma generator 20 and activated. It is known that the liquid to be treated is irradiated with the plasma gas for a predetermined period of time, so that the treatment effect of the liquid to be treated that has been irradiated with the plasma is exhibited.
  • the liquid to be treated undergoes natural convection in the reservoir 184 by being irradiated with the plasma gas. As a result, a homogenous, activated liquid to be treated can be obtained, which exerts a therapeutic effect.
  • the air inside the cover housing 22 is exhausted to the outside of the cover housing 22 .
  • the oxygen concentration in the cover housing 22 the conditions affecting the plasma irradiation are managed. More specifically, since plasma contains active radicals, when it reacts with oxygen, it becomes ozone, which lowers the effect of plasma irradiation. Therefore, by adjusting the oxygen concentration in the cover housing 22, it is possible to examine the effect of the oxygen concentration on the effect of the plasma-irradiated culture solution. In addition, it becomes possible to irradiate the culture solution with plasma under the same conditions. This makes it possible to efficiently generate the plasma-treated liquid.
  • the distance between the plasma ejection port 72 and the culture solution is arbitrarily set. This makes it possible to investigate the effect of the irradiation distance on the effect of the plasma-irradiated culture solution, and to efficiently generate the plasma-treated liquid.
  • a duct port 160 is also formed in the lower cover 78 . Therefore, by supplying the inert gas into the cover housing 22 , the pressure inside the cover housing 22 becomes positive, and the inside of the cover housing 22 is naturally exhausted.
  • a duct port 160 of the lower cover 78 is formed with a tapered surface 162 whose inner diameter increases toward the upper surface of the lower cover 78 . This makes it possible to facilitate the evacuation of gas from the inside of the cover housing 22 .
  • the exhaust mechanism 36 is provided with an ozone filter 166 . As a result, even if plasma and oxygen react to generate ozone, it is possible to prevent ozone from being exhausted to the outside.
  • the plasma-treated liquid stored in the storage section 184 is discharged through the liquid discharge tube 122 .
  • the discharge of the plasma-treated liquid from the reservoir 184 is started and a predetermined time elapses, it is assumed that no plasma-treated liquid remains in the reservoir 184, and the discharge of the plasma-treated liquid from the reservoir 184 is completed. do.
  • the liquid to be plasma-treated next flows through the liquid-sending tube 120 to the reservoir 184 of the irradiation block 180 .
  • plasma irradiation of the liquid to be processed stored in the reservoir 184 for a predetermined time discharge of the plasma-processed liquid, supply of new liquid to be processed to the irradiation block 180, plasma irradiation of the liquid to be processed, and so on.
  • the plasma treatment process is performed repeatedly until a predetermined amount of plasma treated liquid is produced.
  • the atmospheric pressure plasma irradiation apparatus 10 of this embodiment includes the cover housing 22 that defines a predetermined space, the plasma generator 20 that ejects plasma toward the inside of the cover housing 22 , and the cover housing 22 .
  • a purge gas supply mechanism 32 that supplies gas to the inside of the cover housing 22; a stage 26 that is provided inside the cover housing 22 and holds the liquid to be processed; and a liquid pooling portion 151 provided below the duct port 160 for pooling part of the liquid to be treated leaking from the stage 26 .
  • the liquid to be treated leaking from the stage 26 is accumulated in the liquid pool 151 provided near the duct port 160, and the liquid outside the liquid pool 151 is Since it does not leak out, the liquid to be treated leaking from the stage 26 can be retained in the vicinity of the duct opening. Therefore, like the atmospheric pressure plasma irradiation apparatus 10 of the present embodiment, the main pipe 154 is provided downstream of the L-shaped pipe 150 provided with the liquid pool 151, and the ozone filter 166 is provided inside the main pipe 154.
  • the liquid to be treated that has leaked from the stage 26 does not reach the ozone filter 166, so that the liquid to be treated that has leaked from the stage 26 hits the ozone filter 166, and the function of the ozone filter 166 is lost. can be prevented.
  • the atmospheric pressure plasma irradiation device 10 is an example of a "plasma irradiation device”.
  • the purge gas supply mechanism 32 is an example of a "gas supply device”.
  • the stage 26 is an example of a "holding section”. A portion of the liquid to be treated that has leaked from the stage 26 is an example of "liquid.”
  • the liquid pooling portion 151 is formed in a tubular shape, and the tubular liquid pooling portion 151 is formed in a vertically extending state. As a result, the liquid pooling portion 151 can reliably catch and store the liquid to be treated that has leaked from the stage 26 .
  • At least part of the liquid pooling part 151 is made of a transparent member so that a part of the liquid to be treated that has accumulated in the liquid pooling part 151 can be observed from the outside. Thereby, the operator can confirm from the outside whether or not the liquid to be treated is accumulated in the liquid reservoir 151 .
  • the stage 26 is further moved, and the distance between the stage 26 and the plasma ejection port 72 to the inside of the cover housing 22 of the plasma generator 20 is arbitrarily set.
  • a changing lifting device 28 is provided. This makes it possible to investigate the effect of the irradiation distance on the effect of the plasma-irradiated culture solution, and to efficiently generate the plasma-treated liquid.
  • the lifting device 28 is an example of a “moving device”.
  • a culture solution is used as the object to be processed, but liquids other than the culture solution can be used as the object to be processed.
  • the present disclosure can be applied not only to the medical field but also to various fields such as the industrial field.
  • the liquid reservoir 151 is entirely made of a transparent member, but it is not limited to this, and may be partially made of a transparent member. Moreover, the property of the member may be flexible or rigid.
  • the liquid reservoir 151 is described as a reservoir for the liquid to be processed (including the plasma-treated liquid) that has leaked from the irradiation block 180 for some reason. It is not limited to the liquid to be treated that has leaked out from 180.
  • the liquid to be treated that has evaporated to gas and then condensed to return to liquid can also be stored.
  • the liquid pooling portion 151 can store any type of liquid as long as it flows.
  • SYMBOLS 10 Atmospheric-pressure plasma irradiation apparatus, 20... Plasma generator, 22... Cover housing, 26... Stage, 28... Lifting device, 38... Control device, 72... Ejection port, 120... Liquid sending tube, 122... Draining tube, DESCRIPTION OF SYMBOLS 132... Purge gas supply apparatus, 150... L-shaped piping, 150a... Opening, 151... Liquid reservoir part, 151a... Stopper, 160... Duct opening, 166... Ozone filter, 180... Irradiation block, 184... Storage part, 186... Discharge part .

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Abstract

L'invention concerne un appareil d'irradiation par plasma à pression atmosphérique 10 comprenant : un boîtier de couvercle 22 qui délimite un espace prédéterminé ; un dispositif de génération de plasma 20 qui éjecte le plasma vers l'intérieur du boîtier de couvercle 22 ; un mécanisme d'alimentation en gaz de purge 32 qui fournit du gaz à l'intérieur du boîtier de couvercle 22 ; un étage 26 qui est disposé à l'intérieur du boîtier de couvercle 22 et qui contient un liquide cible de traitement ; un orifice de conduit 160 qui est disposé dans une partie inférieure du boîtier de couvercle 22 et à travers lequel le gaz est évacué de l'intérieur du boîtier de couvercle 22 ; et une partie réservoir de liquide 151 qui est disposée sur le côté inférieur de l'orifice de conduit 160 et qui stocke une partie du liquide cible de traitement ayant fui de l'étage 26.
PCT/JP2021/039874 2021-10-28 2021-10-28 Appareil d'irradiation par plasma et procédé de fabrication de liquide de traitement au plasma WO2023073878A1 (fr)

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Citations (3)

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JP2000208502A (ja) * 1999-01-14 2000-07-28 Hitachi Cable Ltd 光導波路用ガラス膜の製造方法及びその製造装置
JP2004530462A (ja) * 2001-02-26 2004-10-07 フンガロプラズマ ケルニェゼトヴェーデルミ ソルガールタトー ケーエフテー 有害な流体状有機廃棄物の処理方法
WO2017037775A1 (fr) * 2015-08-28 2017-03-09 富士機械製造株式会社 Dispositif d'irradiation plasma

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000208502A (ja) * 1999-01-14 2000-07-28 Hitachi Cable Ltd 光導波路用ガラス膜の製造方法及びその製造装置
JP2004530462A (ja) * 2001-02-26 2004-10-07 フンガロプラズマ ケルニェゼトヴェーデルミ ソルガールタトー ケーエフテー 有害な流体状有機廃棄物の処理方法
WO2017037775A1 (fr) * 2015-08-28 2017-03-09 富士機械製造株式会社 Dispositif d'irradiation plasma

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