Classifications

• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
  • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
  • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
  • H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
  • H10W70/63—Vias, e.g. via plugs
  • H10W70/635—Through-vias
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
  • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
  • H10W70/01—Manufacture or treatment
  • H10W70/05—Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
  • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
  • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
  • H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
  • H10W70/65—Shapes or dispositions of interconnections
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
  • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
  • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
  • H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
  • H10W70/68—Shapes or dispositions thereof
  • H10W70/685—Shapes or dispositions thereof comprising multiple insulating layers
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
  • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
  • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
  • H10W70/611—Insulating or insulated package substrates; Interposers; Redistribution layers for connecting multiple chips together
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
  • H10W90/00—Package configurations
  • H10W90/401—Package configurations characterised by multiple insulating or insulated package substrates, interposers or RDLs
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
  • H10W90/00—Package configurations
  • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
  • H10W90/00—Package configurations
  • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
  • H10W90/721—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
  • H10W90/724—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL

Definitions

• the field of the disclosure relates to integrated circuit (IC) packages, and more particularly to design and manufacture of package substrates that support signal routing to a semiconductor die(s) in the IC package.
• IC integrated circuit
• Integrated circuits are the cornerstone of electronic devices. ICs are packaged in an IC package, also called a “semiconductor package” or “chip package.”
• the IC package includes one or more semiconductor dice (“dies” or “dice”) as an IC(s) that are mounted on and electrically coupled to a package substrate to provide physical support and an electrical interface to the die(s).
• the package substrate includes one or more metallization layers that include metal interconnects (e.g., metal traces, metal lines) with vertical interconnect accesses (vias) coupling the metal interconnects together between adjacent metallization layers to provide electrical interfaces between the die(s).
• the die(s) is electrically interfaced to metal interconnects exposed in a top, die-side metallization layer of the package substrate to electrically couple the die(s) to the metal interconnects of the package substrate.
• the package substrate also includes a bottom, outer metallization layer that includes metal interconnects coupled to external metal interconnects (e.g., ball grid array (BGA) interconnects) to provide an external interface between the die(s) in the IC package.
• BGA ball grid array
• the external metal interconnects can also be coupled (e.g., soldered) to traces in a printed circuit board (PCB) to attach the package to the PCB and interface its die(s) with the circuitry of the PCB.
• PCB printed circuit board
• the package substrate of an IC package may be an embedded- trace substrate (ETS)-based package substrate.
• An ETS-based package substrate includes one or more metallization layers that are ETS metallization layers having embedded metal traces as metal interconnects.
• the embedded metal traces are embedded in an insulating layer (i.e., dielectric layer) that is part of an ETS metallization layer.
• An ETS metallization layer facilitates providing higher density bump/solder joints with reduced line/spacing ratio (L/S) for electrically coupling a die to the package substrate for signal routing.
• L/S line/spacing ratio
• Metal embedded traces are formed in the ETS metallization layer that are electrically coupled to the die and metal interconnects in other metallization layers of the package substrate to provide signal routing paths for signal routing.
• the package substrate is a two layer (2L) ETS-based package substrate
• the package substrate could include an upper, die side ETS metallization layer with embedded metal traces coupled to die interconnects of a die, and a bottom, external interconnect side ETS metallization layer with embedded metal traces coupled to external interconnects to provide the external interface to the IC package.
• the routing and interconnect design of the IC package dictates the number of embedded metal traces provided in a die-side ETS metallization layer of a package substrate. This affects the area of metal traces provided in the die-side ETS metallization layer in a horizontal direction (i.e., the X- and Y-axes directions). This can cause a metal (e.g., copper) area mismatch, and thus metal density mismatch, between embedded metal traces in the die side ETS metallization layer and metal traces in other metallization layers in the package substrate.
• a metal e.g., copper
• the metal density of the embedded metal traces in the die-side ETS metallization layer may be ten percent (10%) less than the metal density of the metal traces in another metallization layer(s) in the package substrate.
• One reason that a metal density mismatch can occur is due to the metal in die-side ETS metallization layer being dominated by metal traces, as opposed to pad and/or a ground plane for example.
• This asymmetric metal density between the die-size ETS metallization layer and other metallization layers in the package substrate causes a coefficient of thermal expansion (CTE) mismatch in the package substrate.
• This CTE mismatch can cause warpage in response to different expansion and contraction in the horizontal direction (X and Y-axis directions) between the die-side ETS metallization layer and another metallization layer(s) in the package substrate.
• An integrated circuit (IC) package employing a supplemental metal layer coupled to embedded metal traces in a die-side embedded trace substrate (ETS) layer to reduce metal density mismatch.
• An IC package is provided that includes a semiconductor die (“die”) electrically coupled to a package substrate.
• the package substrate includes a dieside ETS metallization layer adjacent to and coupled to die interconnects (e.g., raised interconnect bumps) of the die to provide an electrical coupling between the die and the package substrate.
• the die-side ETS metallization layer facilitates providing higher density bump/solder joints with reduced line/spacing ratio (L/S) for providing a higher density electrical interface to the die for higher density signal routing.
• L/S line/spacing ratio
• the embedded metal traces in the die-side ETS metallization layer may be of less area than the area of metal interconnects in other metallization layers in the package substrate due to the metal in the die-side ETS metallization layer being dominated by metal traces, as opposed to for example, metal pads or ground planes.
• This difference in metal area causes a metal density mismatch between the die-side ETS metallization layer and other metallization layers that causes a mismatch in their coefficient of thermal expansions (CTEs).
• CTEs coefficient of thermal expansions
• a supplemental (i.e., additional) metal layer with additional metal interconnects formed therein is disposed adjacent to the die-side ETS metallization layer.
• the additional metal interconnects are coupled in a vertical direction to the embedded metal traces in the dieside ETS metallization layer to form die-side metal interconnects of increased thickness/density in the package substrate. This can reduce or avoid the need to reduce the thickness of metal layers in another metallization layer(s) in the package substrate to reduce the metal density mismatch between the die-side ETS metallization layer and the other metallization layer(s) in the package substrate.
• reducing the thickness of a metal layer in an external metallization layer of a package substrate supporting external interconnects can lead to increased dimple depth in the metal interconnects therein, that then increases the risk of voids in solder joints coupling the metal interconnects to the external interconnects.
• the additional metal interconnects can be provided in a supplemental metal layer (e.g., an additional copper layer) that is formed adjacent to an outer surface of the die-size ETS metallization layer in fabrication of the IC package.
• the additional metal interconnects can be coupled to respective exposed outer surfaces of the embedded metal traces in the die-side ETS metallization layer of the package substrate in a vertical direction such that the additional metal interconnects are disposed between the die-size ETS metallization layer and the die.
• the additional metal interconnects could be formed as added metal plating, such as added copper plating, on the embedded metal traces in the die-size ETS metallization layer.
• additional metal interconnects could also be formed as added metal traces or metal lines coupled to the embedded metal traces in the die-size ETS metallization layer.
• the additional metal interconnects coupled to the embedded metal traces of the die-side ETS metallization layer that form the die-side metal interconnects of the package substrate can be exposed for connections through openings patterned in a solder resist layer disposed on the supplemental metal layer.
• Providing the supplemental metal layer in the IC package may add height to the IC package in the vertical direction. However, this added height comes at the benefit of not being required to increase the thickness of one or more metallization layers in the package substrate to avoid or reduce the imbalance in metal density between the die-side ETS metallization layer and another metallization layer(s) in the package substrate.
• an IC package comprises a package substrate.
• the package substrate comprises a first metallization layer comprising a first insulating layer; and a first metal layer comprising one or more first metal traces embedded in the first insulating layer.
• the IC package also comprises a second metal layer disposed adjacent to the first metallization layer.
• the second metal layer comprises one or more second metal interconnects each coupled to a first metal trace among the one or more first metal traces in the first metal layer of the first metallization layer.
• a method of fabricating an IC package is provided. The method comprises forming a package substrate.
• Forming the package substrate comprises forming a first metallization layer comprising forming a first insulating layer, and embedding one or more first metal traces in the first insulating layer forming a first metal layer in the first insulating layer.
• the method also comprises forming one or more second metal interconnects in a second metal layer adjacent to the first metallization layer.
• the method also comprises coupling each of the one or more second metal interconnects in the second metal layer to a first metal trace among the one or more first metal traces in the first metal layer of the first metallization layer.
• Figure 1 is a side view of an integrated circuit (IC) package that includes a semiconductor die (“die”) mounted on a package substrate that includes an embedded trace substrate (ETS) metallization layer to provide an electrical interface between the package substrate and the die;
• IC integrated circuit
• Figure 2A is a side view of a portion of a package substrate that includes a die-side ETS metallization layer and an external metallization layer with a dimple formed in an external metal interconnect pad;
• Figure 2B is a side view of a portion of the package substrate that has a reduced thickness metal layer in a die-side ETS metallization layer over the thickness of the metal layer in the die-side ETS metallization layer in Figure 2A, and a reduced thickness metal layer in an external metallization layer with a dimple formed in an external metal interconnect pad of greater depth than the external metal interconnect pad in Figure 2 A;
• Figure 3A is a side view of an exemplary IC package that employs a supplemental metal layer with additional metal interconnects coupled to embedded metal traces in a die-side ETS metallization layer of a package substrate to avoid or reduce metal density mismatch between the die-side ETS metallization layer and an external metallization layer supporting external interconnects;
• Figures 3B and 3C are close-up left side views of the IC package in Figure 3A;
• Figure 4 is a top view of an exemplary supplemental metal layer disposed on a die-side ETS metallization layer in a package substrate showing additional metal interconnects coupled to embedded metal traces in the die-side ETS metallization layer of a package substrate, wherein the additional metal interconnects are inwardly offset from the embedded metal traces in a vertical direction;
• Figure 5 is a side view of another exemplary IC package that is a stacked-die IC package with a second die package stacked on and electrically connected to the first die package through an interposer substrate in the first die package, wherein the IC package employs a supplemental metal layer with additional metal interconnects coupled to embedded metal traces in a die-side ETS metallization layer of a package substrate to avoid or reduce metal density mismatch between the die-side ETS metallization layer and an external metallization layer supporting external interconnects;
• Figure 6A is a side view of the first die package of the stacked-die IC package in Figure 5;
• Figure 6B is a close-up left side view of the first die package of the stacked- die IC package in Figure 6A;
• Figure 7 is a flowchart illustrating an exemplary fabrication process of fabricating an ETS metallization layer with embedded metal traces, and a supplemental metal layer with additional metal interconnects coupled to the embedded metal traces in the ETS metallization layer to increase the metal density of the embedded metal traces, including but not limited to the ETS metallization layer and supplemental metal layer packages in Figures 3 A-6B;
• Figures 8A-8E is a flowchart illustrating another exemplary fabrication process of fabricating ETS metallization layer with embedded metal traces, and a supplemental metal layer with additional metal interconnects coupled to the embedded metal traces in the ETS metallization layer to increase the metal density of the embedded metal traces, including but not limited to the ETS metallization layer and supplemental metal layer packages in Figures 3A-6B;
• Figures 9A-9I are exemplary fabrication stages during fabrication of an ETS metallization layer with a supplemental added metal layer according to the fabrication process in Figures 8A-8E;
• Figure 10 is a block diagram of an exemplary processor-based system that can include components that can include an IC package that employs a supplemental metal layer with additional metal interconnects coupled to embedded metal traces in a die-side ETS metallization layer of a package substrate to avoid or reduce metal density mismatch between the die-side ETS metallization layer and another metallization layer(s) in the package substrate, including, but not limited, to the package substrates in Figures 3 A-6B, and 9A-9I, and according to the exemplary fabrication processes in Figures 7-8E; and
• Figure 11 is a block diagram of an exemplary wireless communications device that includes radio-frequency (RF) components that can include an IC package that employs a supplemental metal layer with additional metal interconnects coupled to embedded metal traces in a die-side ETS metallization layer of a package substrate to avoid or reduce metal density mismatch between the die-side ETS metallization layer and another metallization layer(s) in the package substrate, including, but not limited to the package
• RF radio
• An integrated circuit (IC) package employing a supplemental metal layer coupled to embedded metal traces in a die-side embedded trace substrate (ETS) layer to reduce metal density mismatch.
• An IC package is provided that includes a semiconductor die (“die”) electrically coupled to a package substrate.
• the package substrate includes a dieside ETS metallization layer adjacent to and coupled to die interconnects (e.g., raised interconnect bumps) of the die to provide an electrical coupling between the die and the package substrate.
• the die-side ETS metallization layer facilitates providing higher density bump/solder joints with reduced line/spacing ratio (L/S) for providing a higher density electrical interface to the die for higher density signal routing.
• L/S line/spacing ratio
• the embedded metal traces in the die-side ETS metallization layer may be of less area than the area of metal interconnects in other metallization layers in the package substrate due to the metal in the die-side ETS metallization layer being dominated by metal traces, as opposed to for example, metal pads or ground planes.
• This difference in metal area causes a metal density mismatch between the die-side ETS metallization layer and other metallization layers that causes a mismatch in their coefficient of thermal expansions (CTEs).
• CTEs coefficient of thermal expansions
• a supplemental (i.e., additional) metal layer with additional metal interconnects formed therein is disposed adjacent to the die-side ETS metallization layer.
• the additional metal interconnects are coupled in a vertical direction to the embedded metal traces in the dieside ETS metallization layer to form die-side metal interconnects of increased thickness/density in the package substrate. This can reduce or avoid the need to reduce the thickness of metal layers in another metallization layer(s) in the package substrate to reduce the metal density mismatch between the die-side ETS metallization layer and the other metallization layer(s) in the package substrate.
• reducing the thickness of a metal layer in an external metallization layer of a package substrate supporting external interconnects can lead to increased dimple depth in the metal interconnects therein, that then increases the risk of voids in solder joints coupling the metal interconnects to the external interconnects.
• Examples of IC packages that employ a supplemental metal layer with additional metal interconnects coupled to embedded metal traces in a die-side ETS metallization layer of a package substrate to avoid or reduce metal density mismatch between the die-side ETS metallization layer and another metallization layer(s) in the package substrate start at Figure 3 A.
• an IC package that employs a package substrate with a die-side ETS metallization layer that includes embedded metal traces, wherein the IC package does not include a supplemental metal layer with additional metal interconnects coupled to the embedded metal traces is first described below with regard to Figures 1-2B.
• Figure 1 illustrates a schematic side view of a cross-section of an IC assembly 100 that includes an IC package 102 that is mounted to a printed circuit board (PCB) 104 using external interconnects 106, such as solder balls.
• the IC package 102 includes a semiconductor die 108 (also referred to as “IC die 108” or “die 108”) that is mounted to a package substrate 110 via a die-to-die bonding and/or underfill adhesive.
• the external interconnects 106 are coupled to metal interconnections in the package substrate 110 to provide an electrical interface to the die 108 when the IC package 102 is mounted to the PCB 104.
• the package substrate 110 includes a plurality of metallization layers 112(1)-112(3) that include metal interconnects 114(1)-114(3) (e.g., metal traces, metal lines).
• the metal interconnects 114( 1 )- 114(3) are interconnected to each other to provide signal routing to the die 108 and between the external interconnects 106 to the die 108.
• Each of the metallization layers 112(1)-112(3) include an insulating layer 116( 1 )- 116(3) to insulate the metal interconnects 114( 1 )- 114(3).
• the package substrate 110 includes a first solder resist layer 118 and a second solder resist layer 120.
• the external interconnects 106 are formed in openings in the first solder resist layer 118 coupled to the metal interconnects 114(3) in the bottom metallization layer 112(3).
• the upper metallization layer 112(1) is an ETS metallization layer, wherein the metal interconnects 114(1) are formed as embedded metal traces in the insulating layer 116(1).
• the metal interconnects 114(1) are also referred to as embedded metal traces 114(1).
• the ETS metallization layer 112(1) facilitates providing higher density bump/solder joints with reduced line/spacing ratio (L/S) for electrically coupling the die 108 to the package substrate 110 for signal routing.
• Raised metal interconnects 122 e.g., interconnect solder/metal bumps
• Die interconnects 124 e.g., raised interconnect bumps
• Die interconnects 124 disposed on an active surface 126 of the die 108 are coupled to metal interconnects 114(1) as embedded metal traces 114(1), to provide an electrical coupling between the die 108 and the package substrate 110.
• FIG. 2A is a side view of a portion of a package substrate 200 that includes an ETS metallization layer 202 that is configured to be coupled to a die (not shown).
• the ETS metallization layer 202 can be thought of a “die-side” ETS metallization layer.
• the ETS metallization layer 202 includes embedded metal traces 204(1 )-204(4) embedded in an insulating layer 206, which is a layer made of a dielectric material.
• the embedding of the embedded metal traces 204(l)-204(4) in the insulating layer 206 forms a first metal layer 208 in the ETS metallization layer 202.
• the embedded metal traces 204(l)-204(4) are recessed from a top surface 210 of the insulating layer 206 as a result of etching during the fabrication process.
• a solder resist layer 212 is disposed on the top surface 210 of the insulating layer 206 to insulate and protect portions of the embedded metal traces 204(1)- 204(4) that are not connected. Openings 214 are formed in the solder resist layer 212 to expose the embedded metal traces 204(3), 204(4) to be connected as part of an IC package.
• the package substrate 200 also includes a second metallization layer 216 disposed below the ETS metallization layer 202 in the vertical direction (Z-axis direction).
• the second metallization layer 216 includes a second metal layer 218 that includes a second metal interconnect 220 formed on a bottom surface 222 of the insulating layer 206 of the ETS metallization layer 202.
• the second metal interconnect 220 is coupled to the embedded metal traces 204(1) through a vertical interconnect access (via) 224 (e.g., a metal pillar, metal trace, or other metal interconnect) extending in the vertical direction (Z-axis direction) between the second metal interconnect 220 and the embedded metal trace 204(1).
• a vertical interconnect access (via) 224 e.g., a metal pillar, metal trace, or other metal interconnect
• the second metallization layer 216 is an external metallization layer of the package substrate 200 that is configured facilitate the formation of external interconnects (e.g., solder bumps, ball grid array (BGA) interconnects) to provide an external interface to the package substrate 200 and its IC package.
• external interconnects e.g., solder bumps, ball grid array (BGA) interconnects
• an opening 226 is formed to expose a bottom surface 228 of second metal interconnect 220 so that an external interconnect can be formed in the opening 226 and a solder joint formed between the external interconnect and the second metal interconnect 220.
• a dimple 230 is formed in the bottom surface 228 of the second metal interconnect 220 as a result of etching in the fabrication of the package substrate 200.
• the dimple 230 is not of a sufficient depth Di from the bottom surface 228 to risk a void in a solder joint coupling the second metal interconnect 220 to an external interconnect that can risk the integrity of the connection between the second metal interconnect 220 and an external interconnect.
• a height Hi i.e., thickness
• Z-axis direction Z-axis direction
• the height Hi of the second metal interconnect 220 is based on a height H2 (i.e., thickness) of the first metal layer 208 of the ETS metallization layer 202 in the vertical direction (Z-axis direction). This is to reduce or mitigate a metal density mismatch between the first metal layer 208 in the ETS metallization layer 202 and second metal interconnects 220 in the second metallization layer 216.
• H2 i.e., thickness
• the area of the embedded metal traces 204(1 )-204(4) may be less than the area of the second metal interconnects 220 in the second metallization layer 216 due to the metal in the ETS metallization layer 202 being dominated by metal traces, as opposed to for example, metal pads or ground planes.
• This metal density mismatch can cause a coefficient of thermal expansion (CTE) mismatch between the ETS metallization layer 202 and the second metallization layer 216 that can contribute to increased warpage of the package substrate 200.
• CTE coefficient of thermal expansion
• the height Hi of the second metal layer 218 of the second metallization layer 216 is decreased from the height H2 of the first metal layer 208 of the ETS metallization layer 202.
• the decrease in height Hi of the second metal layer 218 of the second metallization layer 216 reduces the metal density (volume) of the second metallization layer 216 to attempt to balance the metal density between the second metallization layer 216 and the ETS metallization layer 202.
• the height H2 of the first metal layer 208 may be eighteen (18) micrometers (pm), and the height Hi of the second metal layer 218 may be fifteen (15) pm.
• the package substrate 240 includes an ETS metallization layer 242 includes embedded metal traces 244(l)-244(4) embedded in an insulating layer 246, which is a layer made of a dielectric material.
• the embedding of the embedded metal traces 244(1 )-244(4) in the insulating layer 246 forms a first metal layer 248 in the ETS metallization layer 242(1).
• a solder resist layer 252 is disposed on the insulating layer 246 to insulate and protect portions of the embedded metal traces 204(l)-204(4) that are not connected.
• the package substrate 240 also includes a second metallization layer 256 disposed below the ETS metallization layer 242 in the vertical direction (Z-axis direction).
• the second metallization layer 256 includes a second metal layer 258 that includes a second metal interconnect 260 formed on a bottom surface 262 of the insulating layer 206 of the ETS metallization layer 202.
• the second metal interconnect 220 is coupled to the embedded metal traces 204(1) through a vertical interconnect access (via) 264 (e.g., a metal pillar, metal trace, or other metal interconnect) extending in the vertical direction (Z-axis direction) between the second metal interconnect 220 and the embedded metal trace 244(1).
• a vertical interconnect access (via) 264 e.g., a metal pillar, metal trace, or other metal interconnect
• the second metal interconnect 260 has a height EE (i.e., thickness) that is based on a height Ek (i.e., thickness) of the first metal layer 248 of the ETS metallization layer 242 in the vertical direction (Z-axis direction).
• a height EE of the second metal layer 258 of the second metallization layer 256 is decreased from a height Ek of the first metal layer 248 of the ETS metallization layer 242.
• the decrease in height Ek of the second metal layer 258 of the second metallization layer 256 reduces the metal density (volume) of the second metallization layer 256 to attempt to balance the metal density between the second metallization layer 256 and the ETS metallization layer 242.
• the height Ek of the first metal layer 248 may be twelve (12) micrometers (pm)
• the height Ek of the second metal layer 218 may be ten (10) pm.
• a dimple 270 is formed in a bottom surface 268 of the second metal interconnect 260 as a result of etching in the fabrication of the package substrate 240.
• the dimple 270 is of a sufficient depth D2 from the bottom surface 268 of the second metallization layer 256 to risk a void in a solder joint coupling the second metal interconnect 260 to an external interconnect that can risk the integrity of the connection between the second metal interconnect 260 and an external interconnect.
• the height H3 i.e., thickness
• Z-axis direction is reduced making the second metal interconnect 260 thinner in thickness.
• the metal etching that occurs in the fabrication of the package substrate 200, and that causes the bottom surface 268 of the second metal interconnect 260 to be etched, provides the dimple 270 of a larger depth D2 from the bottom surface 268 of the second metal interconnect 260. This increases the risk of voids in a solder joint formed in contact with the second metal interconnect 260. If the height H3 (i.e., thickness) of the second metal interconnect 260 is increased to reduce the depth D2 of the dimple 270, this increases any metal density mismatch between the second metallization layer 256 and the ETS metallization layer 242 unless the height H4 (i.e., thickness) of the first metal layer 248 in the ETS metallization layer 242 is increased. This may not be possible and still achieve the desired L/S of the embedded metal traces 244(l)-244(4) in the ETS metallization layer 242.
• a metal layer in an ETS metallization layer such as a die-side ETS metallization layer
• reducing thickness in an external metallization layer can risk voids in solder joints formed in contact with metal interconnects in the external metallization layer that are coupled to external interconnects (e.g., BGA interconnects).
• Figures 3 A and 3B are side views of an exemplary IC package 300 that includes a package substrate 302 that employs a second metal layer 304 referred to herein as a “supplemental metal layer 304” (e.g., a copper layer) with additional second metal interconnects 306 to reduce or avoid metal density mismatch between an ETS metallization layer 308 and a third, external metallization layer 310.
• the supplemental metal layer 304 is outside of the package substrate 302 and is formed adjacent to and in contact with the ETS metallization layer 308 in this example.
• the ETS metallization layer 308 is a die-side metallization layer that is disposed adjacent to a coupled die 312 in the IC package 300.
• the third metallization layer 310 is an external interconnect-side metallization layer that facilitates the formation of external interconnects 314 (e.g., solder bumps, metal pillars, BGA interconnects) coupled to second metal interconnects 316(1), 316(2) in the third, external metallization layer 310.
• external interconnects 314 e.g., solder bumps, metal pillars, BGA interconnects
• additional metal interconnects 306(1 )-306(3) in the supplemental metal layer 304 are coupled in a vertical direction (Z-axis direction) to the respective embedded metal traces 318(l)-318(3) embedded in an insulating layer 320 of the die-side ETS metallization layer 308 to form die-side metal interconnects 322(l)-322(3) of increased thickness/density in the package substrate 302.
• a height Hs i.e., thickness
• Hs i.e., thickness
• a height EE i.e., thickness
• reducing the height EE (i.e., thickness) of the third metal layer 323 in the third, external metallization layer 310 can lead to increased dimple depth in the second metal interconnects 316(1), 316(2) in the third metal layer 323, that then increases the risk of voids in solder joints coupling the second metal interconnects 316(1), 316(2) to the external interconnects 314.
• the embedded metal traces 318(1)- 318(3) embedded in the insulating layer 320 of the ETS metallization layer 308 form a metal layer 324 in the insulating layer 320.
• a height He (i.e., thickness) of the metal layer 324 controls the maximum height of the embedded metal traces 318( 1 )-318(3).
• the height He of the metal layer 324 of the ETS metallization layer 308 affects the metal density of the embedded metal traces 318(l)-318(3).
• the height He of the metal layer 324 of the ETS metallization layer 308 is less than the height Hs of the third metal layer 323 of the third, external metallization layer 310.
• the supplemental metal layer 304 is provided and disposed on the ETS metallization layer 308 in a vertical direction (Z-axis direction) with the additional metal interconnects 306 of the supplemental metal layer 304 being coupled to respective embedded metal traces 318(l)-318(3).
• additional metal interconnects 306 of the supplemental metal layer 304 may be directly coupled to respective embedded metal traces 318(l)-318(3) of the ETS metallization layer 308 in the vertical direction (Z- axis direction).
• the combination of the additional metal interconnects 306 of the supplemental metal layer 304 coupled to respective embedded metal traces 318( 1 )-318(3) forms die-side metal interconnects 322(l)-322(3) of increased metal density to avoid or reduce the metal density imbalance, and thus CTE imbalance, between the ETS metallization layer 308 and the third, external metallization layer 310 to reduce or avoid warpage of the package substrate 302.
• the IC package 300 includes the die 312. As shown in Figure 3B, the die 312 is coupled through die interconnects 326 (e.g., raised interconnect bumps) to the package substrate 302. More specifically, the die interconnects 326 extending from an active side 328 of the die 312 are coupled to other embedded metal traces 330 embedded in the insulating layer 320 of the ETS metallization layer 308. Select die interconnects 326 that are designated to provide an external signal interface to the IC package 300 can be coupled through the ETS metallization layer 308 to second metal interconnects 316(1), 316(2) in the third, external metallization layer 310 to provide a signal routing path between the die 312 and external interconnects 314.
• die interconnects 326 e.g., raised interconnect bumps
• the supplemental metal layer 304 is disposed both inside and outside of the vertical area in the vertical direction (Z-axis direction) between the die 312 and the package substrate 302.
• the additional metal interconnects 306(1), 306(2) of the supplemental metal layer 304 are disposed outside of the vertical area in the vertical direction (Z-axis direction) between the die 312 and the package substrate 302. This may be because the embedded metal traces 318(1), 318(2) coupled to the additional metal interconnects 306(1), 306(2) are for providing connections that are not directly coupled to the die 312, such as for a ground plane.
• the additional metal interconnect 306(3) of the supplemental metal layer 304 is disposed inside of the vertical area in the vertical direction (Z-axis direction) between the die 312 and the package substrate 302. This may be because the embedded metal trace 318(3) coupled to the additional metal interconnects 306(3) is for providing a connection to the die 312 through a die interconnect 326.
• a solder resist layer 332 is disposed adjacent to a first, outer surface 334 of the insulating layer 320 of the ETS metallization layer 308.
• the supplemental metal layer 304 is also disposed adjacent to the first, outer surface 334 of the insulating layer 320 of the ETS metallization layer 308.
• the solder resist layer 332 is disposed over the additional metal interconnects 306(1)- 306(3) in the supplemental metal layer 304.
• the supplemental metal layer 304 can be thought of as being disposed in the solder resist layer 332.
• the additional metal interconnects 306(l)-306(3) are not contained in or embedded in the insulating layer 320 of the ETS metallization layer 308 in this example.
• the height He of the metal layer 324 (or its embedded metal traces 318(l)-318(3)) of the ETS metallization layer 308 is less than the height Hs of the third metal layer 323 (or its second metal interconnects 316(l)-316(3)) of the third, external metallization layer 310.
• the coupling of the additional metal interconnects 306(l)-306(3) to the respective embedded metal traces 318(l)-318(3) avoids or reduces the metal density imbalance between the ETS metallization layer 308 and the third, external metallization layer 310.
• the height He of the metal layer 324 of the ETS metallization layer 308 in the vertical direction (Z-axis direction) may be between eight (8) and fourteen (14) micrometers (pm).
• the height Hs of the third metal layer 323 in the third, external metallization layer 310 may be between ten (10) and twenty (20) pm.
• a height H? of the supplemental metal layer 304 (or its additional metal interconnects 306(l)-306(3)) in the vertical direction (Z-axis direction) may be between one (1) and five (5) pm.
• a ratio of the height He of the metal layer 324 of the ETS metallization layer 308 to the height Hs of the third metal layer 323 in the third, external metallization layer 310 may be at least 8/20.
• the additional metal interconnects 306(l)-306(3) being coupled to the embedded metal traces 318(l)-318(3) raises the effective height of the embedded metal traces 318(l)-318(3) to the height He and the height H? combined (e.g., 20 pm) to provide effective die-side metal interconnects 322(l)-322(3) of increased metal density.
• the height He of the metal layer 324 of the ETS metallization layer 308 may be fourteen (14) pm
• the height Hs of the third metal layer 323 in the third, external metallization layer 310 may be fifteen (15) pm
• the height H? of the supplemental metal layer 304 may be four (4) pm.
• the height He of the metal layer 324 of the ETS metallization layer 308 may be twelve (12) pm
• the height Hs of the third metal layer 323 in the third, external metallization layer 310 may be fifteen (15) pm
• the height H? of the supplemental metal layer 304 may be four (4) pm.
• end portions of the embedded metal traces 318(l)-318(2) may be recessed below the outer, top surface 334 of the insulating layer 320.
• these recesses formed in the embedded metal traces 318(l)-318(3) are a result of using the embedded metal traces 318(l)-318(3) as an alignment mechanism for etching a supplemental metal layer 504 to leave portions resident to form the additional metal interconnects 306(l)-306(3).
• Other embedded metal traces 518(2), 518(3) in the ETS metallization layer also have inner and outer metal portions that form recesses like embedded metal traces 518(1).
• the first, outer surface 334 of the insulating layer 320 is disposed in a first horizontal plane Pi in a horizontal direction (X- and Y-axes direction).
• the embedded metal trace 318(1) has an inner metal portion 336(1) that has a top, outer surface 338 that extends to the first horizontal plane Pi in the vertical direction (Z-axis direction), which may be co-planar with the outer, top surface 334 of the insulating layer 320.
• the inner metal portion 336(1) of the embedded metal trace 318(1) has the height He from a bottom surface 338 of the embedded metal trace 318(1).
• the bottom surface 338 of the embedded metal trace 318(1) is disposed in a second horizontal plane P2 in a horizontal direction (X- and Y-axes directions).
• the embedded metal trace 318(1) also has an outer metal portion 336(2) that surrounds the inner metal portion 336(1).
• the outer metal portion 336(2) of the embedded metal trace 318(1) has a top, outer surface 340 that does not extend up to the first horizontal plane Pi in the vertical direction (Z-axis direction), but extends to a third horizontal plane P3 below the first horizontal plane Pi in the vertical direction (Z-axis direction).
• the outer metal portion 336(2) of the embedded metal trace 318(1) also shares the same bottom surface 338 with the inner metal portion 336(1) disposed in the second horizontal plane P2.
• the outer metal portion 336(2) of the embedded metal trace 318(1) has a height Hx from the bottom surface 338 to its top, outer surface 340, which is less than the height He of the inner metal portion 336(1) of the embedded metal trace 318(1).
• a recess 342 is formed between the intersection of the inner metal portion 336(1) and the outer metal portion 336(2) of the embedded metal trace 318(1).
• the recess 342 has a width Wi in the horizontal direction (X- and/or Y-axes directions), which may be ten (10) pm as an example.
• Figure 4 is a top view of the supplemental metal layer 304 in the package substrate 302 in Figures 3A-3C disposed on the die-side ETS metallization layer 308.
• Figure 4 shows the additional metal interconnects 306 disposed on and above embedded metal traces 318 in the die-side ETS metallization layer 308.
• the die-side ETS metallization layer 308 is disposed underneath the supplemental metal layer 304 in the vertical direction (Z-axis direction).
• Figure 4 also shows the offset and recess 342 between the additional metal interconnects 306 and the outer metal portion 336(2) of the embedded metal traces 318.
• FIG. 5 is a side view of a stacked- die IC package 500 that can include a supplemental metal layer with additional metal interconnects coupled to embedded metal traces in a die-side ETS metallization layer 508 to avoid or reduce metal density mismatch between the die-side ETS metallization layer 508 and a third, external metallization layer 510 supporting external interconnects 514.
• the stacked-die IC package 500 includes multiple dies 512(1), 512(2) that are included in respective die packages 550(1), 550(2) and that are stacked in top of each other in the vertical direction (Z-axis direction).
• the first die package 550(1) of the stacked-die IC package 500 includes the die 512(1) coupled to a package substrate 502.
• the package substrate 502 includes a first, upper ETS metallization layer 508(1) disposed on a core substrate 509.
• the core substrate 509 is disposed on a bottom, third, external metallization layer 510.
• the ETS metallization layer 508 provides an electrical interface for signal routing to the first die 512(1).
• the first die 512(1) is coupled to die interconnects 526 (e.g., raised metal bumps) that are electrically coupled to embedded metal traces 518(1) in the ETS metallization layer 508.
• the embedded metal traces 518 in the ETS metallization layer 508 are coupled to metal interconnects 519 in the core substrate 509, which are coupled to metal interconnects 516 in the third, external metallization layer 510.
• the package substrate 502 provides interconnections between its metallization layers 508, 510, and core substrate 509 to provide signal routing to the first die 512(1).
• the external interconnects 514 are coupled to metal interconnects 516 in the third, external metallization layer 510 to provide interconnections through the package substrate 502 to the first die 512(1) through the die interconnects 526.
• a first, active side 552(1) of the first die 512(1) is adjacent to and coupled to the package substrate 502, and more specifically the ETS metallization layer 508 of the package substrate 502.
• a second die package 550(2) is provided and coupled to the first die package 550(1) to support multiple dies.
• the first die 512(1) in the first die package 550(1) may include an application processor
• the second die 512(2) may be a memory die, such as a dynamic random access memory (DRAM) die that provides memory support for the application processor.
• the first die package 550(1) also includes an interposer substrate 554 that is disposed on a package mold 556 encasing the first die 512(1), adjacent to a second, inactive side 552(2) of the first die 512(1).
• the interposer substrate 554 also includes one or more metallization layers 558 that each includes external, metal interconnects 560 to provide interconnections to the second die 512(2) in the second die package 550(2).
• the second die package 550(2) is physically and electrically coupled to the first die package 550(1) by being coupled through external, metal interconnects 560 (e.g., solder bumps, BGA interconnects) to the interposer substrate 554.
• the external interconnects 562 are coupled to the external, metal interconnects 560 in the interposer substrate 554.
• vertical interconnects 564 e.g., metal pillars, metal posts, metal vertical interconnect accesses (vias), such as through-mold vias (TMVs)
• TSVs through-mold vias
• the vertical interconnects 564 extend from a first, bottom surface 566 of the interposer substrate 554 to a first, top surface 568 of the package substrate 502 in the vertical direction (Z-axis direction) in this example.
• the vertical interconnects 564 are coupled to the external, metal interconnects 560 in the interposer substrate 554 adjacent bottom surface 566 of the interposer substrate 554.
• the vertical interconnects 564 are also coupled to embedded metal traces 518 in the ETS metallization layer 508 of the package substrate 502 adjacent to the first, top surface 568 of the package substrate 502.
• the vertical interconnects 564 provide a bridge for interconnections, such as input/output (I/O) connections, between the interposer substrate 554 and the package substrate 502. This provides signal routing paths between the second die 512(2) in the second die package 550(2) and the first die 512(1) in the first die package 550(1), and to the external interconnects 514 through the package substrate 502.
• a second, supplemental metal layer can also be provided in the stacked-die IC package 500 in Figure 5 and disposed adjacent to the ETS metallization layer 508 of the package substrate 502, between the ETS metallization layer 508 and the first die 512(1).
• the supplemental metal layer can include additional metal interconnects that are each coupled to embedded metal traces 518 in the ETS metallization layer 508 to provide connectivity while increasing the metal density of the ETS metallization layer 508.
• die interconnects 526 could be coupled to the additional metal interconnects to the supplemental metal layer to couple the first die 512(1) to ETS metallization layer 508 of the package substrate 502.
• the vertical interconnects 564 could be coupled to additional metal interconnects and to a supplemental metal layer, to couple the second die 512(2) in the second die package 550(2), through the interposer substrate 554, to the ETS metallization layer 508 of the package substrate 502.
• Figures 6A and 6B are side views of the stacked-die IC package 500 in Figure 5 that shows the package substrate 502 that employs a supplemental metal layer 504 (e.g., a copper layer) with additional metal interconnects 506 to reduce or avoid metal density mismatch between the ETS metallization layer 508 and the third, external metallization layer 510.
• the second, supplemental metal layer 504 is outside of the package substrate 502 and is formed adjacent to and in contact with the ETS metallization layer 508 in this example.
• the ETS metallization layer 508 is a die-side metallization layer that is disposed adjacent to the coupled first die 512(1) in the IC package 500.
• the third, external metallization layer 510 is an external interconnect-side metallization layer that facilitates the formation of the external interconnects 514 (e.g., solder bumps, metal pillars, BGA interconnects) coupled to second metal interconnects 516(1), 516(2) in the third, external metallization layer 510.
• the external interconnects 514 e.g., solder bumps, metal pillars, BGA interconnects
• additional metal interconnects 506(l)-506(3) in the supplemental metal layer 504 are coupled in a vertical direction (Z-axis direction) to the embedded metal traces 518(l)-518(3) embedded in an insulating layer 520 of the die-side ETS metallization layer 508 to form die-side metal interconnects 522(1)- 522(3) of increased thickness/density in the package substrate 502.
• a height H9 i.e., thickness
• a third metal layer 523 of the third, external metallization layer 510 can reduce or avoid the need to reduce a height H9 (i.e., thickness) of a third metal layer 523 of the third, external metallization layer 510 to avoid or reduce metal density mismatch between the die-side ETS metallization layer 508 and the third, external metallization layer 510 in the package substrate 502.
• reducing the height H9 (i.e., thickness) of the third metal layer in the third, external metallization layer 510 can lead to increased dimple depth in the second metal interconnects 516(1), 516(2) in the third metal layer 523, that then increases the risk of voids in solder joints coupling the second metal interconnects 516(1), 516(2) to the external interconnects 514.
• the embedded metal traces 518(1)- 518(3) embedded in the insulating layer 520 of the ETS metallization layer 508 form a metal layer 524 in the insulating layer 520.
• a height H10 (i.e., thickness) of the metal layer 524 controls the maximum height of the embedded metal traces 518(l)-518(3).
• the height H10 of the metal layer 524 of the ETS metallization layer 508 affects the metal density of the embedded metal traces 518(l)-518(3).
• the height H10 of the metal layer 524 of the ETS metallization layer 508 is less than the height H9 of the third metal layer 523 of the third, external metallization layer 510.
• the supplemental metal layer 504 is provided and disposed on the ETS metallization layer 308 in a vertical direction (Z-axis direction) with the additional metal interconnects 506 of the supplemental metal layer 504 being coupled to respective embedded metal traces 518(l)-518(3).
• additional metal interconnects 506 of the supplemental metal layer 504 may be directly coupled to respective embedded metal traces 518(l)-518(3) of the ETS metallization layer 508 in the vertical direction (Z- axis direction).
• the combination of the additional metal interconnects 506 of the supplemental metal layer 504 coupled to respective embedded metal traces 518( 1 )-518(3) forms die-side metal interconnects 522(l)-522(3) of increased metal density to avoid or reduce the metal density imbalance, and thus CTE imbalance, between the ETS metallization layer 508 and the third, external metallization layer 510 to reduce or avoid warpage of the package substrate 502.
• the stacked-die IC package 500 includes the first die 512(1).
• the first die 512(1) is coupled through die interconnects 526 (e.g., raised interconnect bumps) to the package substrate 502. More specifically, the die interconnects 526 extending from an active side 528 of the first die 512(1) are coupled to other embedded metal traces 530 embedded in the insulating layer 520 of the ETS metallization layer 508.
• die interconnects 526 e.g., raised interconnect bumps
• Select die interconnects 526 that designated to provide an external signal interface to the stacked-die IC package 500 can be coupled through the ETS metallization layer 508 to second metal interconnects 516(1), 516(2) in the third, external metallization layer 510 to provide a signal routing path between the first die 512(1) and external interconnects 514.
• the supplemental metal layer 504 is disposed both inside and outside of the vertical area in the vertical direction (Z-axis direction) between the first die 512(1) and the package substrate 502.
• the additional metal interconnects 506(1), 506(2) of the supplemental metal layer 504 are disposed outside of the vertical area in the vertical direction (Z-axis direction) between the first die 512(1) and the package substrate 502.
• the embedded metal traces 518(1), 318(2) coupled to the additional metal interconnects 506(1), 506(2) are for providing connections that are not directly to the first die 512(1), such as for a ground plane.
• the additional metal interconnect 506(3) of the supplemental metal layer 504 is disposed inside of the vertical area in the vertical direction (Z-axis direction) between the first die 512(1) and the package substrate 502. This may be because the embedded metal trace 518(3) coupled to the additional metal interconnects 506(3) is for providing a connection to the first die 512(1) through a die interconnect 526.
• a solder resist layer 532 is disposed adjacent to a first, outer surface 534 of the insulating layer 520 of the ETS metallization layer 508.
• the supplemental metal layer 504 is also disposed adjacent to the first, outer surface 534 of the insulating layer 520 of the ETS metallization layer 508.
• the solder resist layer 532 is disposed over the additional metal interconnects 506(1)- 506(3) in the supplemental metal layer 504.
• the supplemental metal layer 504 can be thought of as being disposed in the solder resist layer 532.
• the additional metal interconnects 506( 1 )-506(3) are not contained in or embedded in the insulating layer 520 of the ETS metallization layer 508 in this example.
• the height Hio of the metal layer 524 (or its embedded metal traces 518(l)-518(3)) of the ETS metallization layer 508 is less than the height EE of the third metal layer 523 (or its second metal interconnects 516(l)-516(3)) of the third, external metallization layer 510.
• the coupling of the additional metal interconnects 506(l)-506(3) to the respective embedded metal traces 518(l)-518(3) avoids or reduces the metal density imbalance between the ETS metallization layer 508 and the third, external metallization layer 510.
• the height Hio of the metal layer 524 of the ETS metallization layer 508 in the vertical direction (Z-axis direction) may be between eight (8) and fourteen (14) pm.
• the height H9 of the third metal layer 523 in the third, external metallization layer 510 may be between ten (10) and twenty (20) pm.
• a height H11 of the supplemental metal layer 504 (or its additional metal interconnects 506(l)-506(3)) in the vertical direction (Z-axis direction) may be between one (1) and five (5) pm.
• a ratio of height Hio of the metal layer 524 of the ETS metallization layer 508 to the height Hu of the supplemental metal layer 504 may be at least 8/5.
• a ratio of the height Hio of the metal layer 524 of the ETS metallization layer 508 to the height H9 of the third metal layer 523 in the third metallization layer 510 may be at least 8/20.
• the additional metal interconnects 506(l)-506(3) being coupled to the embedded metal traces 518(l)-518(3) raises the effective height of the embedded metal traces 518(l)-518(3) to the height Hio and height H11 combined (e.g., 20 pm) to provide effective die-side metal interconnects 522(l)-522(3) of increased metal density.
• the height Hio of the metal layer 524 of the ETS metallization layer 508 may be fourteen (14) pm
• the height H9 of the third metal layer 523 in the third, external metallization layer 510 may be fifteen (15) pm
• the height H7 of the supplemental metal layer 504 may be four (4) pm.
• the height Hio of the metal layer 524 of the ETS metallization layer 508 may be twelve (12) pm
• the height H9 of the third metal layer 523 in the third, external metallization layer 510 may be fifteen (15) pm
• the height H11 of the supplemental metal layer 504 may be four (4) pm.
• outer metal portions 536(1) of the embedded metal trace 518(1) may be recessed below the first, outer surface 534 of the insulating layer 520.
• An inner metal portion 536(2) of the embedded metal trace 518(1) extends to the same plane as the first, outer surface 534 of the insulating layer 520.
• This provides a recess 542 in the embedded metal trace 518(1) like discussed above for embedded metal traces 318(1)- 318(3) in the ETS metallization layer 508 in Figures 3B and 3C.
• the recess 542 formed in the embedded metal trace 518(1) is a result of using the embedded metal trace 518(1) as an alignment mechanism for etching the supplemental metal layer 504 to leave portions resident to form the additional metal interconnect 506(1).
• the other embedded metal traces 518(2), 518(3) in the ETS metallization layer 508 also have inner and outer metal portions that form recesses like embedded metal traces 518(1) wherein the additional metal interconnect 506(2), 506(3) are formed by etching the supplemental metal layer 504 in openings formed over the embedded metal traces 518(2), 518(3).
• Figure 7 is a flowchart illustrating an exemplary fabrication process 700 of fabricating an ETS metallization layer with a supplemental metal layer that can be included as a die-side ETS metallization structure in a package substrate of an IC package, wherein additional metal interconnects are formed in the supplemental metal layer and coupled to embedded metal traces in the ETS metallization layer to increase the metal density of the embedded metal traces, including but not limited to the package substrates 302, 502 in Figures 3A-6B.
• the fabrication process 700 in Figure 7 is discussed with regard to the IC packages 300, 500 in Figures 3A-3C and 6A-6B.
• a step in the fabrication process 700 includes forming a package substrate 302, 502 (block 702 in Figure 7).
• Forming the package substrate 302, 502 can include forming a first, ETS metallization layer 308, 508 (block 704 in Figure 7).
• the first metallization layer 308, 508 is an ETS metallization layer.
• Forming the first metallization layer 308, 508 includes forming a first insulating layer 320, 520 of a dielectric material (block 706 in Figure 7), and then embedding first metal traces 318(l)-318(3), 518(l)-518(3) in the first insulating layer 320, 520 thereby forming a first metal layer 324, 524 in the first insulating layer 320, 520 (block 708 in Figure 7).
• a next step in the fabrication process 700 includes forming one or more second, additional metal interconnects 306(l)-306(3), 506(l)-506(3) in a second, supplemental metal layer 304, 504 as the supplemental metal layer 304, 504 adjacent to the first metallization layer 308, 508 (block 710 in Figure 7).
• a next step in the fabrication process 700 includes coupling each of the one or more second, additional metal interconnects 306(1 )-306(3), 506(l)-506(3) in the second, supplemental metal layer 304, 504 to a first metal trace 318(l)-318(3), 518(l)-518(3) among the one or more first metal traces 318(l)-318(3), 518(l)-518(3) in the first metal layer 324, 524 of the first metallization layer 308, 508 (block 712 in Figure 7).
• ETS metallization layer with a supplemental metal layer that can be included as a die-side ETS metallization structure in a package substrate of an IC package, wherein additional metal interconnects are formed in the supplemental metal layer and coupled to embedded metal traces in the ETS metallization layer to increase the metal density of the embedded metal traces, including but not limited to the package substrates 302, 502 in Figures 3A-6B.
• Figures 8A-8E is a flowchart illustrating another exemplary fabrication process 800 of fabricating an ETS metallization layer with a supplemental metal layer that can be included as a die-side ETS metallization structure in a package substrate of an IC package, wherein additional metal interconnects are formed in the supplemental metal layer and coupled to embedded metal traces in the ETS metallization layer to increase the metal density of the embedded metal traces, including but not limited to the package substrates 302, 502 in Figures 3A-6B.
• Figures 9A-9I are exemplary fabrication stages 900A-900I during fabrication of an ETS metallization layer with a supplemental metal layer as part of a package substrate according to the fabrication process 800 in Figures 8A-8E.
• the fabrication process 800 as shown in the fabrication stages 900A-900I in Figures 9A-9I are in reference to the ETS metallization layer 308 with a supplemental metal layer 304 in the package substrate 302 in Figures 3 A-3C.
• the fabrication process 800 in Figures 8A-8E, and as shown in the fabrication stages 900A-900I in Figures 9A-9I is also applicable to fabricate the ETS metallization layer 508 with a supplemental metal layer 504 in the package substrate 502 in Figures 6A-6B.
• a first exemplary step in the fabrication process 800 is to prepare to fabricate the ETS metallization layer 308.
• a first step in forming the ETS metallization layer 308 involves forming raw metal layers 902, 904, 906, 908 on a carrier 910 that will be processed to form the ETS metallization layer 308 and supplemental metal layer (block 802 in Figure 8A).
• Metal layers 902, 904, 906, 908 can be copper layers for example.
• the metal layers 904, 906 are disposed on opposite sides 912(1), 912(2) of the carrier 910.
• the metal layers 904, 906 can form a seed layer in which the metal layers 902, 908 (e.g., metal foils, such as a copper foils) are formed on.
• the metal layers 902, 908 will be repurposed through process to form the additional metal interconnects 306(l)-306(3) as part of a supplemental metal layer 304 to increase the metal density of metal traces 318( 1 )-318(3) embedded in an insulating layer 320.
• the metal layer 902 will be used to form the supplemental metal layer 304 for a die-side ETS metallization layer 308.
• a next exemplary step in the fabrication process 800 is to form the metal traces 318(1), 318(3), 330 that will be embedded in the insulating layer 320 of a formed die-side ETS metallization layer 308 in a later processing step (block 804 in Figure 8A).
• the metal traces 318(1), 318(3), 330 are formed by disposing another metal layer 324 (e.g., a copper layer) on the metal layer 908 and patterning the metal layer 324 (e.g., using a photoresist layer that is exposed through a mask) to form openings 914 in the metal layer 324 with the remaining metal portions of the metal layer 324 forming the metal traces 318(1), 318(3), 330.
• a next exemplary step in the fabrication process 800 is to laminate the formed metal traces 318(1), 318(3), 330 in the metal layer 324 with a dielectric material 916 to form the insulating layer 320 (block 806 in Figure 9B). This embeds the metal traces 318(1), 318(3), 330 in the insulating layer 320 to form the ETS metallization layer 308.
• a next exemplary step in the fabrication process 800 is to remove the carrier 910 and metal layer 906 to prepare to prepare the metal layer 908 to be etched to expose the embedded metal traces 318(1), 318(3), 330 of the ETS metallization layer 308 to be able to make interconnections (block 808 in Figure 8B).
• the metal layer 906 would normally be fully etched away as part of the fabrication process for fabricating the ETS metallization layer 308. However, in this fabrication process 800, the metal layer 906 will be repurposed by only being selectively etched to form the additional metal interconnects 306(l)-306(3) to increase the metal density of the ETS metallization layer 308.
• the metal layer 906 will form the supplemental metal layer 304. Because the embedded metal traces 318(l)-318(3) were already formed in contact with the metal layer 906, when the metal layer 906 is selectively etched, the remaining metal material of the metal layer 906 that is unetched and that forms the additional metal interconnects 306(l)-306(3) will already be coupled to the embedded metal traces 318(1 )-318(3).
• a next exemplary step in the fabrication process 800 is to dispose (i.e., laminate) a masking layer 918 of a masking material on the metal layer 908 to prepare the metal layer 908 to be selectively etched to form the additional metal interconnects 306(l)-306(3) in the supplemental metal layer 304 (block 810 in Figure 8C).
• the masking layer 918 can be made of a material that is resistant to metal etching processes, such as a chemical or mechanical etching process.
• a next exemplary step in the fabrication process 800 is to expose the masking layer 918 through a mask to form the openings 920 in the masking layer 918 (block 812 in Figure 8D).
• the openings 920 are formed above areas in the metal layer 908 that will be etched away in a subsequent etching process, with the remaining metal portions of the metal layer 908 protected by the masking layer 918 forming the additional metal interconnects 306(1)- 306(3) in the metal layer 908 as the supplemental metal layer 304.
• a next exemplary step in the fabrication process 800 is to etch inside the openings 920 formed in the masking layer 918 to etch the metal material away in the metal layer 908 exposed by the openings 920 (block 814 in Figure 8D).
• the masking layer 918 not removed above areas of the metal layer 908 protect those areas from being etched away such that the metal layer 908 is repurposed.
• the areas of the metal layer 908 that protected by the masking layer 918 are not etched away form the additional metal interconnects 306(l)-306(3) of the supplemental metal layer 304.
• a next exemplary step in the fabrication process 800 is to form the solder resist layer 332 above the additional metal interconnects 306(l)-306(3) in the supplemental metal layer 304 and inside the recesses 342 (block 816 in Figure 8D).
• a next exemplary step in the fabrication process 800 is to finish (e.g., polish) the upper surface 922 of the solder resist layer 332 (block 818 in Figure 8E).
• IC packages that employ a supplemental metal layer with additional metal interconnects coupled to embedded metal traces in a die-side ETS metallization layer of a package substrate to avoid or reduce metal density mismatch between the die-side ETS metallization layer and another metallization layer(s) in the package substrate, including, but not limited, to the package substrates in Figures 3 A-6B, and 9A-9I and according to the exemplary fabrication processes in Figures 7-8E, and according to the exemplary fabrication processes in Figures 8-9C, may be provided in or integrated into any processor-based device.
• Figure 10 illustrates an example of a processor-based system 1000 including a circuit that can be provided in an IC package 1002 that includes a die(s).
• the IC package 1002 employs a supplemental metal layer with additional metal interconnects coupled to embedded metal traces in a die-side ETS metallization layer of a package substrate to avoid or reduce metal density mismatch between the die-side ETS metallization layer and another metallization layer(s) in the package substrate, including, but not limited, to the package substrates in Figures 3 A-6B, and 9A-9I and according to the exemplary fabrication processes in Figures 7-8E, and according to any aspects disclosed herein.
• the processor-based system 1000 may be formed as an IC 1004 in an IC package 1002 and as a system-on-a-chip (SoC) 1006.
• the processorbased system 1000 includes a central processing unit (CPU) 1008 that includes one or more processors 1010, which may also be referred to as CPU cores or processor cores.
• the CPU 1008 may have cache memory 1012 coupled to the CPU 1008 for rapid access to temporarily stored data.
• the CPU 1008 is coupled to a system bus 1014 and can intercouple master and slave devices included in the processor-based system 1000. As is well known, the CPU 1008 communicates with these other devices by exchanging address, control, and data information over the system bus 1014.
• the CPU 1008 can communicate bus transaction requests to a memory controller 1016, as an example of a slave device.
• a memory controller 1016 as an example of a slave device.
• multiple system buses 1014 could be provided, wherein each system bus 1014 constitutes a different fabric.
• Other master and slave devices can be connected to the system bus 1014. As illustrated in Figure 10, these devices can include a memory system 1020 that includes the memory controller 1016 and a memory array(s) 1018, one or more input devices 1022, one or more output devices 1024, one or more network interface devices 1026, and one or more display controllers 1028, as examples.
• Each of the memory system(s) 1020, the one or more input devices 1022, the one or more output devices 1024, the one or more network interface devices 1026, and the one or more display controllers 1028 can be provided in the same or different IC packages 1002.
• the input device(s) 1022 can include any type of input device, including, but not limited to, input keys, switches, voice processors, etc.
• the output device(s) 1024 can include any type of output device, including, but not limited to, audio, video, other visual indicators, etc.
• the network interface device(s) 1026 can be any device configured to allow exchange of data to and from a network 1030.
• the network 1030 can be any type of network, including, but not limited to, a wired or wireless network, a private or public network, a local area network (LAN), a wireless local area network (WLAN), a wide area network (WAN), a BLUETOOTHTM network, and the Internet.
• the network interface device(s) 1026 can be configured to support any type of communications protocol desired.
• the CPU 1008 may also be configured to access the display controller(s) 1028 over the system bus 1014 to control information sent to one or more displays 1032.
• the display controller(s) 1028 sends information to the display(s) 1032 to be displayed via one or more video processors 1034, which process the information to be displayed into a format suitable for the display(s) 1032.
• the display controller(s) 1028 and video processor(s) 1034 can be included as ICs in the same or different IC packages 1002, and in the same or different IC package 1002 containing the CPU 1008, as an example.
• the display(s) 1032 can include any type of display, including, but not limited to, a cathode ray tube (CRT), a liquid crystal display (LCD), a plasma display, a light emitting diode (LED) display, etc.
• CTR cathode ray tube
• LCD liquid crystal display
• LED light emitting diode
• Figure 11 illustrates an exemplary wireless communications device 1100 that includes radio frequency (RF) components formed from one or more ICs 1102, wherein any of the ICs 1102 can be included in an IC package 1103 that includes a die(s).
• the IC package 1103 employs a supplemental metal layer with additional metal interconnects coupled to embedded metal traces in a die-side ETS metallization layer of a package substrate to avoid or reduce metal density mismatch between the die-side ETS metallization layer and another metallization layer(s) in the package substrate, including, but not limited, to the package substrates in Figures 3 A-6B, and 9A-9I and according to the exemplary fabrication processes in Figures 7-8E, and according to any aspects disclosed herein.
• RF radio frequency
• the wireless communications device 1100 may include or be provided in any of the above-referenced devices, as examples. As shown in Figure 11, the wireless communications device 1100 includes a transceiver 1104 and a data processor 1106. The data processor 1106 may include a memory to store data and program codes. The transceiver 1104 includes a transmitter 1108 and a receiver 1110 that support bidirectional communications. In general, the wireless communications device 1100 may include any number of transmitters 1108 and/or receivers 1110 for any number of communication systems and frequency bands. All or a portion of the transceiver 1104 may be implemented on one or more analog ICs, RF ICs (RFICs), mixed-signal ICs, etc.
• RFICs RF ICs
• the transmitter 1108 or the receiver 1110 may be implemented with a superheterodyne architecture or a direct-conversion architecture.
• a signal is frequency -converted between RF and baseband in multiple stages, e.g., from RF to an intermediate frequency (IF) in one stage, and then from IF to baseband in another stage for the receiver 1110.
• IF intermediate frequency
• the direct-conversion architecture a signal is frequency-converted between RF and baseband in one stage.
• the super-heterodyne and direct-conversion architectures may use different circuit blocks and/or have different requirements.
• the transmitter 1108 and the receiver 1110 are implemented with the direct-conversion architecture.
• the data processor 1106 processes data to be transmitted and provides I and Q analog output signals to the transmitter 1108.
• the data processor 1106 includes digital-to-analog converters (DACs) 1112(1), 1112(2) for converting digital signals generated by the data processor 1106 into the I and Q analog output signals, e.g., I and Q output currents, for further processing.
• DACs digital-to-analog converters
• lowpass filters 1114(1), 1114(2) filter the I and Q analog output signals, respectively, to remove undesired signals caused by the prior digital-to-analog conversion.
• Amplifiers (AMPs) 1116(1), 1116(2) amplify the signals from the lowpass filters 1114(1), 1114(2), respectively, and provide I and Q baseband signals.
• An upconverter 1118 upconverts the I and Q baseband signals with I and Q transmit (TX) local oscillator (LO) signals through mixers 1120(1), 1120(2) from a TX LO signal generator 1122 to provide an upconverted signal 1124.
• TX transmit
• LO local oscillator
• a filter 1126 filters the upconverted signal 1124 to remove undesired signals caused by the frequency up- conversion as well as noise in a receive frequency band.
• a power amplifier (PA) 1128 amplifies the upconverted signal 1124 from the filter 1126 to obtain the desired output power level and provides a transmit RF signal.
• the transmit RF signal is routed through a duplexer or switch 1130 and transmitted via an antenna 1132.
• the antenna 1132 receives signals transmitted by base stations and provides a received RF signal, which is routed through the duplexer or switch 1130 and provided to a low noise amplifier (LNA) 1134.
• LNA low noise amplifier
• the duplexer or switch 1130 is designed to operate with a specific receive (RX)-to-TX duplexer frequency separation, such that RX signals are isolated from TX signals.
• the received RF signal is amplified by the LNA 1134 and filtered by a filter 1136 to obtain a desired RF input signal.
• Downconversion mixers 1138(1), 1138(2) mix the output of the filter 1136 with I and Q RX LO signals (i.e., LO_I and LO_Q) from an RX LO signal generator 1140 to generate I and Q baseband signals.
• the I and Q baseband signals are amplified by AMPs 1142(1), 1142(2) and further filtered by lowpass filters 1144(1), 1144(2) to obtain I and Q analog input signals, which are provided to the data processor 1106.
• the data processor 1106 includes analog-to-digital converters (ADCs) 1146(1), 1146(2) for converting the analog input signals into digital signals to be further processed by the data processor 1106.
• ADCs analog-to-digital converters
• the TX LO signal generator 1122 generates the I and Q TX LO signals used for frequency up-conversion, while the RX LO signal generator 1140 generates the I and Q RX LO signals used for frequency down-conversion.
• Each LO signal is a periodic signal with a particular fundamental frequency.
• a TX phase-locked loop (PLL) circuit 1148 receives timing information from the data processor 1106 and generates a control signal used to adjust the frequency and/or phase of the TX LO signals from the TX LO signal generator 1122.
• PLL phase-locked loop
• an RX PLL circuit 1150 receives timing information from the data processor 1106 and generates a control signal used to adjust the frequency and/or phase of the RX LO signals from the RX LO signal generator 1140.
• DSP Digital Signal Processor
• ASIC Application Specific Integrated Circuit
• FPGA Field Programmable Gate Array
• a processor may be a microprocessor, but in the alternative, the processor may be any conventional processor, controller, microcontroller, or state machine.
• a processor may also be implemented as a combination of computing devices (e.g., a combination of a DSP and a microprocessor, a plurality of microprocessors, one or more microprocessors in conjunction with a DSP core, or any other such configuration).
• RAM Random Access Memory
• ROM Read Only Memory
• EPROM Electrically Programmable ROM
• EEPROM Electrically Erasable Programmable ROM
• registers a hard disk, a removable disk, a CD-ROM, or any other form of computer readable medium known in the art.
• An exemplary storage medium is coupled to the processor such that the processor can read information from, and write information to, the storage medium.
• the storage medium may be integral to the processor.
• the processor and the storage medium may reside in an ASIC.
• the ASIC may reside in a remote station.
• the processor and the storage medium may reside as discrete components in a remote station, base station, or server.
• An integrated circuit (IC) package comprising: a package substrate, comprising: a first metallization layer comprising: a first insulating layer; and a first metal layer comprising one or more first metal traces embedded in the first insulating layer; and a second metal layer disposed adjacent to the first metallization layer, the second metal layer comprising one or more second metal interconnects each coupled to a first metal trace among the one or more first metal traces in the first metal layer of the first metallization layer.
• IC integrated circuit
• the second metal layer is disposed adjacent to a first side of the first metallization layer in a vertical direction; and the package substrate further comprises: one or more vertical interconnect accesses (vias) each coupled to a first metal trace among the one or more first metal traces on a second side of the first metallization layer in the vertical direction.
• the package substrate further comprises a third metallization layer comprising a third metal layer comprising one or more third metal interconnects; each via among the one or more vias coupled to a third metal interconnect among the one or more third metal interconnects.
• the first surface of the first insulating layer is disposed in a horizontal plane in a horizontal direction; and at least a portion of the one or more first metal traces each comprise a second surface extending to the horizontal plane in a vertical direction.
• the one or more first metal traces each comprise: an outer metal portion having a first height in a vertical direction; and an inner metal portion disposed inside the outer metal portion, the inner metal portion having a second height in the vertical direction less than the first height.
• the first insulating layer comprises a first surface adjacent to the second metal layer, the first surface disposed in a first horizontal plane in a horizontal direction; and for each of the one or more first metal traces: the outer metal portion comprises: a second surface disposed a second horizontal plane in the horizontal direction; and a third surface opposite to the second surface in the vertical direction and adjacent to the second metal layer, the third surface disposed in a third horizontal plane in the horizontal direction between the first horizontal plane and the second horizontal plane in the vertical direction; and the inner metal portion comprises: a fourth surface disposed in the second horizontal plane; and a fifth surface opposite to the fourth surface in the vertical direction and adjacent to the second metal layer, the fifth surface disposed in the first horizontal plane.
• the IC package of any of clauses 1-13 wherein: the one or more first metal traces have a first height in a vertical direction between eight (8) and fourteen (14) micrometers (pm); and one or more second metal interconnects have a second height in the vertical direction between one (1) and five (5) pm.
• the IC package of any of clauses 1-14 wherein: the one or more first metal traces each have a first height in a vertical direction; the one or more second metal interconnects each have a second height in the vertical direction; and a ratio of the first height to the second height is at least 8/5. 16.
• the one or more first metal traces each have a first width in a horizontal direction less than or equal to seven (7) micrometers (pm); and further comprising one or more spaces between adjacent first metal traces among the one or more first metal traces having a second width in the horizontal direction less than or equal to nine (9) pm.
• the die comprises one or more die interconnects each coupled to a first metal trace among the one or more first metal traces.
• IC package of any of clauses 1-21 integrated into a device selected from the group consisting of: a set top box; an entertainment unit; a navigation device; a communications device; a fixed location data unit; a mobile location data unit; a global positioning system (GPS) device; a mobile phone; a cellular phone; a smart phone; a session initiation protocol (SIP) phone; a tablet; a phablet; a server; a computer; a portable computer; a mobile computing device; a wearable computing device; a desktop computer; a personal digital assistant (PDA); a monitor; a computer monitor; a television; a tuner; a radio; a satellite radio; a music player; a digital music player; a portable music player; a digital video player; a video player; a digital video disc (DVD) player; a portable digital video player; an automobile; a vehicle component; an avionics system; a drone; and a multicopter.
• GPS global positioning system
• a method of fabricating an integrated circuit (IC) package comprising: forming a package substrate, comprising: forming a first metallization layer, comprising: forming a first insulating layer; and embedding one or more first metal traces in the first insulating layer forming a first metal layer in the first insulating layer; forming one or more second metal interconnects in a second metal layer adjacent to the first metallization layer; and coupling each of the one or more second metal interconnects in the second metal layer to a first metal trace among the one or more first metal traces in the first metal layer of the first metallization layer.
• IC integrated circuit
• forming the one or more second metal interconnects in the second metal layer comprises forming the one or more second metal interconnects in the second metal layer adjacent to a first side of the first metallization layer in a vertical direction; and forming the package substrate further comprises: forming one or more vertical interconnect accesses (vias) each coupled to a first metal trace among the one or more first metal traces on a second side of the first metallization layer in the vertical direction.
• forming the package substrate further comprises forming a third metallization layer comprising a third metal layer comprising one or more third metal interconnects; and further comprising coupling each of the one or more third metal interconnects in the third metal layer to a via among the one or more vias.
• coupling each of the one or more second metal interconnects comprises disposing each of the one or more second metal interconnects in the second metal layer in contact with first metal trace among the one or more first metal traces in the first metal layer of the first metallization layer.
• forming the first insulating layer further comprises forming a first surface disposed in a horizontal plane in a horizontal direction; and embedding the one or more first metal traces in the first insulating layer further comprises forming a second surface in at least a portion of the one or more first metal traces extending to the horizontal plane in a vertical direction.
• coupling the die comprises coupling at least one die interconnect of the die to a second metal interconnects among the one or more second metal interconnects in the second metal layer.

Landscapes

• Wire Bonding (AREA)
• Physics & Mathematics (AREA)
• Geometry (AREA)
• Parts Printed On Printed Circuit Boards (AREA)
• Production Of Multi-Layered Print Wiring Board (AREA)
• Structure Of Printed Boards (AREA)

Priority Applications (4)

Applications Claiming Priority (2)

Publications (1)

Family

ID=83978905

Family Applications (1)

Country Status (7)

Families Citing this family (1)

Citations (1)

Family Cites Families (19)

• 2021
  • 2021-10-18 US US17/451,302 patent/US12362269B2/en active Active
• 2022
  • 2022-09-20 TW TW111135447A patent/TW202322330A/zh unknown
  • 2022-09-23 CN CN202280067307.6A patent/CN118056277A/zh active Pending
  • 2022-09-23 JP JP2024519876A patent/JP2024537996A/ja active Pending
  • 2022-09-23 KR KR1020247012117A patent/KR20240074788A/ko active Pending
  • 2022-09-23 WO PCT/US2022/076910 patent/WO2023069820A1/en not_active Ceased
  • 2022-09-23 EP EP22793496.5A patent/EP4420164A1/en active Pending

Patent Citations (1)

Also Published As

Similar Documents

Legal Events