WO2023056761A1 - 一种蒸发镀膜设备及蒸发镀膜挡板 - Google Patents

一种蒸发镀膜设备及蒸发镀膜挡板 Download PDF

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Publication number
WO2023056761A1
WO2023056761A1 PCT/CN2022/101060 CN2022101060W WO2023056761A1 WO 2023056761 A1 WO2023056761 A1 WO 2023056761A1 CN 2022101060 W CN2022101060 W CN 2022101060W WO 2023056761 A1 WO2023056761 A1 WO 2023056761A1
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WO
WIPO (PCT)
Prior art keywords
fan
rib
baffle
outer shaft
evaporation coating
Prior art date
Application number
PCT/CN2022/101060
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English (en)
French (fr)
Inventor
熊继光
李卫东
赵志国
刘家梁
李梦洁
赵东明
秦校军
董超
夏渊
文军
汪强
丁坤
Original Assignee
中国华能集团清洁能源技术研究院有限公司
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Application filed by 中国华能集团清洁能源技术研究院有限公司 filed Critical 中国华能集团清洁能源技术研究院有限公司
Publication of WO2023056761A1 publication Critical patent/WO2023056761A1/zh

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process

Definitions

  • the invention relates to the field of new energy technology, in particular to an evaporation coating device and an evaporation coating baffle.
  • evaporation coating is a common coating deposition process.
  • the baffle of the evaporation coating equipment can improve the gradient of the evaporation rate at different angles and improve the uniformity of the evaporation coating.
  • the baffles commonly used in evaporation coating equipment are generally semicircular or rectangular baffles, and the number is two.
  • the direction of opening and closing, the baffle shielding adjustment range is small, and the applicable evaporation scenarios are limited.
  • the present invention provides a baffle for an evaporation coating device to enhance the adjustment of the shading range of the baffle.
  • the invention also provides an evaporation coating device.
  • the present invention provides the following technical solutions:
  • An evaporation coating equipment baffle including a baffle assembly and an adjustment assembly
  • the baffle assembly is used to improve the uniformity of the evaporated coating, and the adjustment assembly is used to adjust the baffle assembly,
  • the adjustment assembly includes an inner shaft and an outer shaft,
  • a first installation hole arranged coaxially with the outer shaft is opened in the outer shaft, and the outer shaft can rotate around its own axis,
  • the inner shaft can rotate around its own axis, and the inner shaft is installed in the first installation hole and has clearance fit with the first installation hole, or the inner shaft is installed in the first installation hole through a bearing Inside, the outer ring of the bearing is connected to the hole wall of the first installation hole, the inner ring of the bearing is connected to the inner shaft,
  • the baffle assembly includes a fan-shaped baffle, a first fan rib, a second fan rib and a middle fan rib,
  • the first fan rib is connected to the first side of the fan-shaped baffle, and the first fan rib is located on the first surface of the fan-shaped baffle, and the position of the first fan rib corresponds to the center of the fan-shaped baffle and
  • the inner shaft is fixedly connected, and the first fan can move synchronously with the inner shaft,
  • the second fan rib is connected to the second side of the fan-shaped baffle, and the second fan rib is located on the second surface of the fan-shaped baffle, and the position of the second fan rib corresponds to the center of the fan-shaped baffle and
  • the outer shaft is fixedly connected, and the second fan can move synchronously with the outer shaft
  • the number of the middle fan rib is at least one, the middle fan rib is located between the first fan rib and the second fan rib, the middle fan rib is connected to the first surface or the second surface of the fan-shaped baffle and Arranged along the radial direction of the fan-shaped baffle, the fan-shaped baffle can be folded at the position of the middle fan rib, and a second installation hole is opened at a position corresponding to the center of the fan-shaped baffle on the middle fan-shaped baffle, the The middle fan bone is sleeved on the inner shaft or the outer shaft through the second installation hole, and the second installation hole is in clearance fit with the inner shaft or the outer shaft,
  • first side and the second side are the sides where the two radii corresponding to the outer circular arc of the fan-shaped baffle are located, and the first surface and the second side are respectively the sides of the fan-shaped baffle Two faces of the plate, the first face being opposite to the second face.
  • the second rib is connected to the outer shaft through a bushing, and the bushing is sleeved on the outer shaft and has an interference fit with the outer shaft.
  • the outer shaft of the bushing is connected to the position of the second rib corresponding to the center of the circle.
  • the outer wall of the sleeve is provided with a stop bar, and the stop bar can abut against the side of the second fan bar away from the middle fan bar.
  • the baffle rod is an L-shaped baffle rod.
  • a first angle sensor is provided on the baffle rod, and the first angle sensor is used to detect the angle between the first fan rib and the second fan rib.
  • a third mounting hole is provided at the position corresponding to the center of the circle of the second fan, and the second fan is sleeved on the outer shaft through the third mounting hole, so that The third mounting hole is interference fit with the outer shaft;
  • the position of the second fan bone corresponding to the center of the circle is adhesively connected to the outer shaft
  • the position of the second fan bone corresponding to the center of the circle is connected with the outer shaft by bolts.
  • the end of the inner shaft connected to the first rib protrudes from the outer shaft, and the first rib and the inner shaft protrude from the outer shaft location connection,
  • the second rib is located below the middle rib.
  • the outer shaft is driven to rotate by the first drive assembly
  • the inner shaft rotates by driving with the second drive assembly
  • the first drive assembly and the second drive assembly can be driven synchronously.
  • the first drive assembly includes a first motor, a first gear and a second gear, the output shaft of the first motor is connected to the first gear, and the first The second gear is connected to the outer shaft, and the first gear meshes with the second gear;
  • the first drive assembly includes a first motor, a first sprocket, a first chain and a second sprocket, the output shaft of the first motor is connected to the first sprocket, and the second sprocket is connected to the first sprocket The outer shaft is connected, and the first sprocket is connected with the second sprocket through a first chain.
  • the second drive assembly includes a second motor, a third gear and a fourth gear, the output shaft of the second motor is connected to the third gear, and the first The four gears are connected to the inner shaft, and the third gear meshes with the fourth gear;
  • the second drive assembly includes a second motor, a third sprocket, a second chain and a fourth sprocket, the output shaft of the second motor is connected to the third sprocket, and the fourth sprocket is connected to the fourth sprocket
  • the inner shaft is connected, and the third sprocket is connected with the fourth sprocket through a second chain.
  • the position of the first fan bone corresponding to the center of the circle is adhesively connected to the inner shaft
  • the position of the first fan bone corresponding to the center of the circle is connected with the inner shaft by riveting,
  • the position of the first fan bone corresponding to the center of the circle is connected with the inner shaft by bolts.
  • the inner shaft is provided with a second angle sensor for detecting the rotation angle of the inner shaft
  • a third angle sensor for detecting the rotation angle of the outer shaft is arranged on the outer shaft.
  • a position sensor for detecting the position of the fan-shaped baffle plate is arranged on the outer shaft.
  • the arc of the fan-shaped baffle plate is 30°-360°.
  • the fan-shaped baffle plate is a steel foil baffle plate, an aluminum foil baffle plate, a tin foil baffle plate or a high temperature resistant plastic film baffle plate.
  • the included angles between the adjacent middle ribs, the first ribs and the middle ribs, and the second ribs and the middle ribs are 15-60° .
  • the inner shaft and the outer shaft are steel shafts.
  • An evaporation coating equipment comprising an evaporation coating equipment baffle, the evaporation coating equipment baffle being the evaporation coating equipment baffle described in any one of the solutions above.
  • the evaporation coating equipment baffle provided by the present invention includes a baffle assembly and an adjustment assembly. and outer shaft.
  • the adjustment assembly can adjust the position of the baffle assembly.
  • the inner shaft and the outer shaft rotate synchronously.
  • the inner shaft drives the first fan to move, the outer shaft drives the second fan to move, and the middle fan moves with the first fan and the second fan.
  • Adjust the shading position of the fan-shaped baffle; the adjustment component can also adjust the shading area of the baffle assembly. Specifically, the inner shaft does not rotate, the first fan does not move, the outer shaft rotates, the second fan moves, and the second fan pulls the fan.
  • the fan-shaped baffle drives the middle fan bone to move, so that the fan-shaped baffle in the folded state is unfolded or the fan-shaped baffle in the unfolded state is folded, and the folding area of the fan-shaped baffle is adjusted, and then the blocking area of the fan-shaped baffle is adjusted.
  • the baffle plate of the evaporation coating equipment disclosed in this scheme can not only adjust the shading position, but also can adjust the shading area, which enhances the adjustment of the shading range of the evaporative coating equipment baffle, and adapts to a wider range of evaporation scenarios.
  • This solution also discloses an evaporation coating device, which includes a baffle plate for the evaporation coating equipment, and the baffle plate for the evaporation coating equipment is the baffle plate for the evaporation coating equipment disclosed in any one of the above solutions. Since the baffle plate of the evaporation coating equipment has the above-mentioned technical effect, the evaporation coating equipment having the baffle plate of the evaporation coating equipment also has the same technical effect, and will not be repeated here.
  • Fig. 1 is a schematic structural view of the baffle plate of the evaporation coating equipment provided by the embodiment of the present invention
  • FIG. 2 is a schematic structural view of the baffle assembly of the baffle of the evaporation coating equipment provided by the embodiment of the present invention
  • FIG. 3 is a schematic structural diagram of an adjustment assembly of a baffle plate of an evaporation coating device provided by an embodiment of the present invention.
  • Adjustment assembly 21, inner shaft, 22, outer shaft, 23, shaft sleeve, 24, retaining rod.
  • the invention discloses a baffle plate of an evaporation coating equipment to enhance the adjustment of the shading range of the baffle plate.
  • the invention also discloses an evaporation coating device.
  • the invention discloses a baffle for evaporation coating equipment, which includes a baffle assembly 1 and an adjustment assembly 2 , wherein the baffle assembly 1 is used to improve the uniformity of the evaporation coating, and the adjustment assembly 2 is used to adjust the baffle assembly 1 .
  • the adjustment assembly 2 includes an inner shaft 21 and an outer shaft 22, and the outer shaft 22 and the inner shaft 21 are coaxially arranged.
  • the outer shaft 22 can rotate around its own axis, and the outer shaft 22 is provided with a first installation hole coaxially arranged with the outer shaft 22.
  • the inner shaft 21 is located in the first installation hole, the inner shaft 21 can rotate around its own axis, and the rotation between the inner shaft 21 and the outer shaft 22 does not affect each other.
  • the first one is that the inner shaft 21 and the first installation hole have a clearance fit, and the outer wall of the inner shaft 21 does not contact the wall of the first installation hole;
  • One is that a bearing is arranged in the first installation hole, and the outer ring of the bearing is fixedly connected with the hole wall of the first installation hole.
  • the inner ring of the bearing is fixedly connected with the outer wall of the inner shaft 21, and the inner shaft 21 and the outer shaft 22 realize asynchronous rotation through the bearing. .
  • the baffle plate assembly 1 comprises a fan-shaped baffle plate 11, a first fan rib 12, a second fan rib 13 and an intermediate fan rib 14, wherein the number of the first fan rib 12 and the second fan rib 13 is one, and the number of the middle fan rib 14 is at least one.
  • the number of the middle rib 14 is at least one, which means that the number of the middle rib 14 can be one, or two, three, or even more.
  • the first rib 12 and the second rib 13 are respectively located on the first side and the second side of the fan-shaped baffle 11 .
  • the first side and the second side of the fan-shaped baffle 11 are described, and the first side and the second side of the fan-shaped baffle 11 are sides where two radii corresponding to the outer arc of the fan-shaped baffle 11 are located.
  • the first rib 12 is located on the first surface of the fan-shaped baffle 11
  • the second fan rib 13 is located on the second surface of the fan-shaped baffle 11 .
  • the fan-shaped baffle 11 is a plate-shaped structure and has two surfaces with larger areas. These two surfaces are working surfaces for improving the uniformity of the evaporation coating. And these two surfaces are parallel to the plane where the first fan rib 12 is located. In this solution, these two surfaces of the fan-shaped baffle 11 are named as the first surface and the second surface, and the first surface and the second surface are opposite.
  • the first rib 12 and the second rib 13 are located on the first surface and the second surface of the fan-shaped baffle 11 respectively, so that both surfaces of the fan-shaped baffle 11 can bear the force.
  • the position of the center of the circle of the first fan 12 corresponding to the fan-shaped baffle plate 11 is fixedly connected with the inner shaft 21, the first fan 12 can move synchronously with the inner shaft 21, and the movement direction of the first fan 12 is the circumferential direction of the inner shaft 21, specifically, When the inner shaft 21 rotates, the first rib 12 moves synchronously with the inner shaft 21, and when the inner shaft 21 does not rotate, the first rib 12 does not move either.
  • the position of the second rib 13 corresponding to the center of the fan-shaped baffle plate 11 is fixedly connected with the outer shaft 22, the second rib 13 can move synchronously with the outer shaft 22, and the movement direction of the second rib 13 is the circumferential direction of the outer shaft 22, specifically, When the outer shaft 22 rotates, the second rib 13 rotates synchronously with the outer shaft 22, and when the outer shaft 22 does not rotate, the second rib 13 does not move either.
  • the middle fan rib 14 is located between the first fan rib 12 and the second fan rib 13, and the middle fan rib 14 is connected to the first or second face of the fan-shaped baffle 11, that is, the middle fan rib 14 can be located on the side of the fan-shaped baffle 11 with the first fan rib 12. On the same side, the middle fan rib 14 may also be located on the same side of the fan-shaped baffle plate 11 as the second fan rib 13 .
  • the middle rib 14 is arranged along the radial direction of the fan-shaped baffle 11, and the fan-shaped baffle 11 can be folded at the position of the middle fan-shaped rib 14, and the fan-shaped baffle 11 realizes the adjustment of the working area by folding.
  • the opening angle between the first fan 12 and the second fan 13 is different
  • the folding degree of the fan-shaped baffle 11 is different
  • the shading area is different. According to the requirements of the shading area, the first fan 12 and the second fan 13 open differently. angle.
  • the middle rib 14 is provided with a second installation hole at the position corresponding to the center of the fan-shaped baffle 11, and the middle rib 14 is sleeved on the inner shaft 21 or the outer shaft 22 through the second installation hole, that is, the middle rib 14 can be used together with the first rib 12. Installed on the inner shaft 21 , alternatively, the middle rib 14 can be installed on the outer shaft 22 together with the second rib 13 .
  • the second mounting hole is in clearance fit with the inner shaft 21 or the outer shaft 22 , and when the inner shaft 21 or the outer shaft 22 rotates, the middle fan rib 14 does not rotate together with the inner shaft 21 or the outer shaft 22 .
  • the evaporation coating equipment baffle disclosed in this solution includes a baffle assembly 1 and an adjustment assembly 2.
  • the baffle assembly 1 includes a fan-shaped baffle 11, a first fan rib 12, a second fan rib 13, and an intermediate fan rib 14.
  • the adjustment assembly 2 includes an inner shaft. 21 and outer shaft 22. The adjustment assembly 2 can adjust the position of the baffle assembly 1.
  • the inner shaft 21 and the outer shaft 22 rotate synchronously, the inner shaft 21 drives the first fan 12 to move, the outer shaft 22 drives the second fan 13 to move, and the middle fan 14 moves with the The first fan 12 and the second fan 13 move to adjust the shielding position of the fan-shaped baffle 11;
  • the adjustment assembly 2 can also adjust the shielding area of the baffle assembly 1, and the specific inner shaft 21 does not rotate, and the first fan 12 does not move , the outer shaft 22 rotates, the second rib 13 moves, the second rib 13 pulls the fan-shaped baffle 11 to move, and the fan-shaped baffle 11 drives the middle fan 14 to move, so that the fan-shaped baffle 11 in the folded state unfolds or the fan-shaped baffle in the unfolded state
  • the baffle 11 is folded to adjust the folding area of the fan-shaped baffle 11 , thereby adjusting the shielding area of the fan-shaped baffle 11 .
  • the baffle plate of the evaporation coating equipment disclosed in this scheme can not only adjust the shading position, but also can adjust the shading area, which enhances the adjustment of the shading range of the evaporative coating equipment baffle, and adapts to a wider range of evaporation scenarios.
  • the length of the first rib 12, the second rib 13 and the middle rib 14 is equal, the width of the first rib 12 and the second rib 13 is at least equal to the width of the middle rib 14, and the thickness of the first rib 12 and the second rib 13 is at least equal to The thickness of the fan bone 14 in the middle.
  • the second fan bone 13 is connected to the outer shaft 22 through a shaft sleeve 23 .
  • the position of the second fan bone 13 corresponding to the center of the circle is provided with a bushing 23, and the bushing 23 is sleeved on the outer shaft 22 and has an interference fit with the outer shaft 22 to ensure that the bushing 23 can rotate with the outer shaft 22, thereby ensuring that the bushing 23 can drive the second fan 13 to move.
  • the second rib 13 is provided with a third mounting hole at the position corresponding to the center of the fan-shaped baffle 11, and the second rib 13 is sleeved on the outer shaft 22 through the third mounting hole, and the second The three mounting holes are in interference fit with the outer shaft 22 .
  • the position of the second fan bone 13 corresponding to the center of the fan-shaped baffle 11 is adhesively connected with the outer shaft 22 .
  • the position of the second fan bone 13 corresponding to the center of the fan-shaped baffle 11 is riveted with the outer shaft 22 .
  • the position of the second fan rib 13 corresponding to the center of the fan-shaped baffle 11 is connected to the outer shaft 22 by bolts.
  • the outer wall of the bushing 23 is provided with a stop bar 24 , and the stop bar 24 can abut against the side of the second rib 13 away from the middle rib 14 .
  • the outer shaft 22 drives the second fan 13 to move, and the fan-shaped baffle 11 will be folded at the position where the middle fan 14 is arranged, and the blocking rod 24 can be positioned between the middle fan 14 and the second fan 13.
  • the middle fan bone 14 plays a position-limiting role.
  • the blocking rod 24 is an L-shaped blocking rod.
  • a first angle sensor is provided on the blocking rod 24 , and the first angle sensor is used to detect the angle between the first fan rib 12 and the second fan rib 13 . Detecting the angle between the first fan rib 12 and the second fan rib 13 by the first angle sensor can determine the shielding area of the fan-shaped baffle 11 .
  • the end of the inner shaft 21 connected to the first fan 12 protrudes from the outer shaft 22, and the first fan 12 is connected to the position where the inner shaft 21 protrudes from the outer shaft 22, and the first fan 12 and the inner shaft are lowered. 21 connection difficulty.
  • first fan rib 12 the middle fan rib 14 and the second fan rib 13 are stacked from top to bottom.
  • the first drive assembly and the second drive assembly are driven synchronously, the first drive assembly drives the outer shaft 22 to rotate, and the second drive assembly drives the inner shaft 21 to rotate.
  • the first drive assembly includes a first motor, a first gear and a second gear, the output shaft of the first motor is connected to the first gear, the second gear is connected to the outer shaft 22, and the first gear is connected to the second gear.
  • the two gears mesh.
  • the first drive assembly includes a first motor, a first sprocket, a first chain and a second sprocket, the output shaft of the first motor is connected to the first sprocket, and the second sprocket is connected to the outer shaft 22 connection, the first sprocket and the second sprocket are connected by the first chain.
  • the second drive assembly includes a second motor, a third gear and a fourth gear, the output shaft of the second motor is connected to the third gear, the fourth gear is connected to the inner shaft 21, and the first gear is connected to the first gear.
  • the two gears mesh.
  • the second drive assembly includes a second motor, a third sprocket, a second chain and a fourth sprocket, the output shaft of the second motor is connected to the third sprocket, and the fourth sprocket is connected to the inner shaft 21 connection, the third sprocket and the fourth sprocket are connected by the second chain.
  • the position of the first fan bone 12 corresponding to the center of the fan-shaped baffle 11 is adhesively connected with the inner shaft 21 .
  • the position of the first fan rib 12 corresponding to the center of the fan-shaped baffle 11 is riveted with the inner shaft 21 .
  • the position of the first fan bone 12 corresponding to the center of the fan-shaped baffle 11 is connected to the inner shaft 21 by bolts.
  • the inner shaft 21 and the outer shaft 22 can rotate simultaneously, but the rotation speeds of the inner shaft 21 and the outer shaft 22 may be inconsistent, for example, the rotation speed of the outer shaft 22 is greater than that of the inner shaft 21
  • the shading position of the fan-shaped baffle 11 can be changed, but also the shading area of the fan-shaped baffle 11 can be increased at the same time, or the rotation speed of the outer shaft 22 is lower than the rotation speed of the inner shaft 21.
  • the shielding position of the baffle 11 can also reduce the shielding area of the fan-shaped baffle 11 at the same time.
  • the inner shaft 21 is provided with a second angle sensor for detecting the rotation angle of the inner shaft 21, and the outer shaft 22 is provided with a third angle sensor for detecting the rotation angle of the outer shaft 22.
  • the second angle sensor and The angle difference of the third angle sensor obtains the shielding area of the fan-shaped baffle 11 .
  • the baffle plate of the evaporation coating equipment disclosed in this solution further includes a position sensor, which is used to detect the blocking position of the fan-shaped baffle plate 11 .
  • the position sensor is arranged on the outer shaft 22 .
  • the arc of the fan-shaped baffle 11 is 30°-360°. It should be noted here that the radian of the fan-shaped baffle 11 is the radian when the fan-shaped baffle 11 is fully expanded.
  • the fan-shaped baffle 11 When the arc of the fan-shaped baffle 11 is 90°, the fan-shaped baffle 11 is a quarter circle when fully expanded;
  • the fan-shaped baffle 11 When the arc of the fan-shaped baffle 11 is 180°, the fan-shaped baffle 11 is semicircular when fully expanded;
  • the fan-shaped baffle 11 When the arc of the fan-shaped baffle 11 is 360°, the fan-shaped baffle 11 is circular when fully expanded.
  • the fan-shaped baffle 11 is a steel sheet baffle, an aluminum foil baffle, a tin foil baffle or a high temperature resistant plastic film baffle.
  • the included angle between adjacent middle fan ribs 14, the angle between the first fan rib 12 and the middle fan rib 14, and the distance between the middle fan rib 14 and the second fan rib 13 in this solution is 15°-60°.
  • the angle between the adjacent middle fan ribs 14, the angle between the first fan rib 12 and the middle fan rib 14, and the angle between the middle fan rib 14 and the second fan rib 13 are 15°, when the fan-shaped baffle plate 11 is completely folded
  • the shading area is 15° arc.
  • the angle between the adjacent middle ribs 14, the angle between the first rib 12 and the middle rib 14, and the angle between the middle rib 14 and the second rib 13 are 30°, when the sector baffle 11 is fully folded
  • the shading area is a 30° arc.
  • the angle between the adjacent middle ribs 14, the angle between the first rib 12 and the middle rib 14, and the angle between the middle rib 14 and the second rib 13 are 45°, when the sector baffle 11 is completely folded
  • the shading area is a 45° arc.
  • the angle between the adjacent middle ribs 14, the angle between the first rib 12 and the middle rib 14, and the angle between the middle rib 14 and the second rib 13 are 60°, when the sector baffle 11 is completely folded
  • the occlusion area is a 60° arc.
  • angles between adjacent middle ribs 14, the angles between the first ribs 12 and the middle ribs 14, and the angles between the middle ribs 14 and the second ribs 13 are 15°, 30°, 45° and 60° , can also be other included angles, such as 10°, 14.4°, 20° or other included angles, which are not specifically limited here.
  • the inner shaft 21 and the outer circumference are steel shafts.
  • This solution also discloses an evaporation coating device, which includes a baffle plate for the evaporation coating equipment, and the baffle plate for the evaporation coating equipment is the baffle plate for the evaporation coating equipment disclosed in any one of the above solutions.
  • the evaporation coating equipment having the baffle plate of the evaporation coating equipment also has the same technical effect, and will not be repeated here.

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  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

一种蒸发镀膜设备及蒸发镀膜设备挡板，其中，蒸发镀膜设备挡板包括挡板组件和调节组件。调节组件包括内轴和外轴，内轴和外轴同步转动，内轴带动第一扇骨运动，外轴带动第二扇骨运动，中间扇骨随第一扇骨和第二扇骨运动，调节扇形挡板的遮挡位置；内轴不转动，第一扇骨不运动，外轴转动，第二扇骨运动，第二扇骨拉动扇形挡板运动，扇形挡板带动中间扇骨运动，使处于折叠状态的扇形挡板展开或者将处于展开状态的扇形挡板折叠，调节扇形挡板的折叠面积，进而调节扇形挡板的遮挡面积。蒸发镀膜设备挡板不仅可以调节遮挡位置，而且可以调节遮挡面积，增强了蒸发镀膜设备挡板遮挡范围的调节，适应的蒸镀场景更加广泛。

Description

一种蒸发镀膜设备及蒸发镀膜挡板
本申请要求于2021年10月9日提交中国专利局、申请号为202122434328.2、发明名称为“一种蒸发镀膜设备及蒸发镀膜挡板”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本发明涉及新能源技术领域，特别涉及一种蒸发镀膜设备及蒸发镀膜挡板。
背景技术
在半导体制造领域，蒸发镀膜是一种常见的镀膜沉积工艺。
蒸发镀膜设备的挡板能够改善蒸发速率在不同角度的渐变性，提高蒸发镀膜的均匀性。
现有技术中，蒸发镀膜设备常用的挡板一般为半圆形或者矩形形状的挡板，且个数为两个，两个挡板通过气动装置控制开合，两个挡板只能在特定的方向开合，挡板遮挡调节范围小，适应的蒸镀场景有限。
发明内容
有鉴于此，本发明提供了一种蒸发镀膜设备挡板，以增强挡板遮挡范围的调节。本发明还提供了一种蒸发镀膜设备。
为实现上述目的，本发明提供如下技术方案：
一种蒸发镀膜设备挡板，包括挡板组件和调节组件，
所述挡板组件用于提高蒸发镀膜的均匀性，所述调节组件用于调节所述挡板组件，
所述调节组件包括内轴和外轴，
所述外轴内开设有与所述外轴同轴布置的第一安装孔，所述外轴能够绕自身轴线转动，
所述内轴能够绕自身轴线转动，所述内轴安装在所述第一安装孔内且与所述第一安装孔间隙配合，或者，所述内轴通过轴承安装在所述第一安装孔内，所述轴承的外圈与所述第一安装孔的孔壁连接，所述轴承的内圈与所述内轴连接，
所述挡板组件包括扇形挡板、第一扇骨、第二扇骨和中间扇骨，
所述第一扇骨与所述扇形挡板的第一边连接，且所述第一扇骨位于所述扇形挡板的第一面，所述第一扇骨对应所述扇形挡板的圆心的位置与所述内轴固定连接，所述第一扇骨能够随所述内轴同步运动，
所述第二扇骨与所述扇形挡板的第二边连接，且所述第二扇骨位于所述扇形挡板的第二面，所述第二扇骨对应所述扇形挡板的圆心的位置与所述外轴固定连接，所述第二扇骨能够随所述外轴同步运动，
所述中间扇骨的个数至少为一个，所述中间扇骨位于所述第一扇骨和所述第二扇骨之间，所述中间扇骨与所述扇形挡板的第一面或者第二面连接且沿所述扇形挡板的半径方向设置，所述扇形挡板能够在所述中间扇骨的位置发生折叠，所述中间扇骨对应所述扇形挡板的圆心的位置开设有第二安装孔，所述中间扇骨通过所述第二安装孔套设在所述内轴或者所述外轴上且所述第二安装孔与所述内轴或者外轴间隙配合，
其中，所述第一边和所述第二边分别为所述扇形挡板的外圆弧对应的两条半径所在的边，所述第一面和所述第二面分别为所述扇形挡板的两个面，所述第一面与所述第二面相对。
优选的，在上述蒸发镀膜设备挡板中，所述第二扇骨通过轴套与所述外轴连接，所述轴套套设在所述外轴上且与所述外轴过盈配合，所述轴套的外轴与所述第二扇骨对应所述圆心的位置连接。
优选的，在上述蒸发镀膜设备挡板中，所述轴套的外壁设置有挡杆，所述挡杆能够与所述第二扇骨远离所述中间扇骨的一侧相抵。
优选的，在上述蒸发镀膜设备挡板中，所述挡杆为L型挡杆。
优选的，在上述蒸发镀膜设备挡板中，所述挡杆上设置有第一角度传感器，所述第一角度传感器用于检测所述第一扇骨和所述第二扇骨之间的角度。
优选的，在上述蒸发镀膜设备挡板中，所述第二扇骨对应所述圆心的位置设置有第三安装孔，所述第二扇骨通过第三安装孔套设在所述外轴上，所述第三安装孔与所述外轴过盈配合；
或者，
所述第二扇骨对应所述圆心的位置与所述外轴胶粘连接，
或者，
所述第二扇骨对应所述圆心的位置与所述外轴铆接连接，
或者，
所述第二扇骨对应所述圆心的位置与所述外轴通过螺栓连接。
优选的，在上述蒸发镀膜设备挡板中，所述内轴与所述第一扇骨连接的一端凸出于所述外轴，所述第一扇骨与所述内轴凸出于所述外轴的位置连接，
所述第二扇骨位于所述中间扇骨的下方。
优选的，在上述蒸发镀膜设备挡板中，所述外轴通过与第一驱动组件驱动转动，
所述内轴通过与第二驱动组件驱动转动，
所述第一驱动组件和所述第二驱动组件能够同步驱动。
优选的，在上述蒸发镀膜设备挡板中，所述第一驱动组件包括第一电机、第一齿轮和第二齿轮，所述第一电机的输出轴与所述第一齿轮连接，所述第二齿轮与所述外轴连接，所述第一齿轮与所述第二齿轮啮合；
或者，
所述第一驱动组件包括第一电机、第一链轮、第一链条和第二链轮，所述第一电机的输出轴与所述第一链轮连接，所述第二链轮与所述外轴连接，所述第一链轮与所述第二链轮通过第一链条连接。
优选的，在上述蒸发镀膜设备挡板中，所述第二驱动组件包括第二电机、第三齿轮和第四齿轮，所述第二电机的输出轴与所述第三齿轮连接，所述第四齿轮与所述内轴连接，所述第三齿轮与所述第四齿轮啮合；
或者，
所述第二驱动组件包括第二电机、第三链轮、第二链条和第四链轮，所述第二电机的输出轴与所述第三链轮连接，所述第四链轮与所述内轴连接，所述第三链轮与所述第四链轮通过第二链条连接。
优选的，在上述蒸发镀膜设备挡板中，所述第一扇骨对应所述圆心的位置与所述内轴胶粘连接，
或者，
所述第一扇骨对应所述圆心的位置与所述内轴铆接连接，
或者，
所述第一扇骨对应所述圆心的位置与所述内轴通过螺栓连接。
优选的，在上述蒸发镀膜设备挡板中，所述内轴上设置有用于检测所述内轴旋转角度的第二角度传感器，
所述外轴上设置有用于检测所述外轴旋转角度的第三角度传感器。
优选的，在上述蒸发镀膜设备挡板中，所述外轴上设置有用于检测所述扇形挡板位置的位置传感器。
优选的，在上述蒸发镀膜设备挡板中，所述扇形挡板的弧度为30°-360°。
优选的，在上述蒸发镀膜设备挡板中，所述扇形挡板为钢制薄片挡板、铝箔挡板、锡箔挡板或者耐高温塑料薄膜挡板。
优选的，在上述蒸发镀膜设备挡板中，相邻所述中间扇骨、所述第一扇骨和所述中间扇骨以及所述第二扇骨和所述中间扇骨之间的夹角为15-60°。
优选的，在上述蒸发镀膜设备挡板中，所述内轴和所述外轴为钢制轴。
一种蒸发镀膜设备，包括蒸发镀膜设备挡板，所述蒸发镀膜设备挡板为上述任意一个方案中记载的所述蒸发镀膜设备挡板。
从上述技术方案可以看出，本发明提供的蒸发镀膜设备挡板，包括挡板组件和调节组件，挡板组件包括扇形挡板、第一扇骨、第二扇骨和中间扇骨，调节组件包括内轴和外轴。调节组件可以对挡板组件的位置进行调节，具体的内轴和外轴同步转动，内轴带动第一扇骨运动，外轴带动第二扇骨运动，中间扇骨随第一扇骨和第二扇骨运动，调节扇形挡板的遮挡位置；调节组件也可以对挡板组件的遮挡面积进行调节，具体的内轴不转动，第一扇骨不运动，外轴转 动，第二扇骨运动，第二扇骨拉动扇形挡板运动，扇形挡板带动中间扇骨运动，使处于折叠状态的扇形挡板展开或者将处于展开状态的扇形挡板折叠，调节扇形挡板的折叠面积，进而调节扇形挡板的遮挡面积。本方案公开的蒸发镀膜设备挡板不仅可以调节遮挡位置，而且可以调节遮挡面积，增强了蒸发镀膜设备挡板遮挡范围的调节，适应的蒸镀场景更加广泛。
本方案还公开了一种蒸发镀膜设备，包括蒸发镀膜设备挡板，蒸发镀膜设备挡板为上述任意一个方案中公开的蒸发镀膜设备挡板。由于蒸发镀膜设备挡板具有上述技术效果，具有该蒸发镀膜设备挡板的蒸发镀膜设备也具有同样的技术效果，在此不再赘述。
附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1为本发明实施例提供的蒸发镀膜设备挡板的结构示意图；
图2为本发明实施例提供的蒸发镀膜设备挡板的挡板组件的结构示意图；
图3为本发明实施例提供的蒸发镀膜设备挡板的调节组件的结构示意图。
其中，
1、挡板组件，11、扇形挡板，12、第一扇骨，13、第二扇骨，14、中间扇骨，
2、调节组件，21、内轴，22、外轴，23、轴套，24、挡杆。
具体实施方式
本发明公开了一种蒸发镀膜设备挡板，以增强挡板遮挡范围的调节。本发明还公开了一种蒸发镀膜设备。
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
请参阅图1-3。
本发明公开了一种蒸发镀膜设备挡板，包括挡板组件1和调节组件2，其中，挡板组件1用于提高蒸发镀膜的均匀性，调节组件2用于调节挡板组件1。
调节组件2包括内轴21和外轴22，外轴22和内轴21同轴布置。
具体的，外轴22能够绕自身轴线转动，外轴22内开设有与外轴22同轴布置的第一安装孔，
内轴21位于第一安装孔内，内轴21能够绕自身轴线转动，且内轴21与外轴22之间的转动相互不影响。
实现内轴21与外轴22分开转动的连接方式有两种，第一种是内轴21与第一安装孔间隙配合，内轴21的外壁与第一安装孔的孔壁不接触；第二种是第一安装孔内设置轴承，轴承的外圈与第一安装孔的孔壁固定连接轴承的内圈与内轴21的外壁固定连接，内轴21与外轴22通过轴承实现非同步转动。
此处对内轴21与外轴22之间的转动相互不影响进行解释说明，内轴21和外轴22发生相对转动时，内轴21与外轴22相互不干涉，内轴21和外轴22发生同步转动时，内轴21与外轴22相互不干涉。
挡板组件1包括扇形挡板11、第一扇骨12、第二扇骨13和中间扇骨14，其中，第一扇骨12和第二扇骨13的个数均为一个，中间扇骨14的个数至少为一个。中间扇骨14的个数至少为一个的意思是中间扇骨14的个数可以为一个，也可以为两个、三个、甚至更多个。
第一扇骨12和第二扇骨13分别位于扇形挡板11的第一边和第二边。此处对扇形挡板11的第一边和第二边进行说明，扇形挡板11的第一边和第二边分别为扇形挡板11的外圆弧对应的两个半径所在的边。
第一扇骨12位于扇形挡板11的第一面，第二扇骨13位于扇形挡板11的第二面。此处对扇形挡板11的第一面和第二面进行说明，扇形挡板11为板状结构，具有面积较大的两个面，这两个面为提高蒸发镀膜均匀性的工作面，且这两个面与第一扇骨12所在的平面平行，本方案中把扇形挡板11的这两个面命名为第一面和第二面，第一面和第二面相对。
第一扇骨12和第二扇骨13分别位于扇形挡板11的第一面和第二面，使得扇形挡板11的两个面均能够承受作用力。
第一扇骨12对应扇形挡板11的圆心的位置与内轴21固定连接，第一扇骨12能够随内轴21同步运动，第一扇骨12的运动方向为内轴21的圆周方向，具体的，内轴21转动时，第一扇骨12随内轴21同步运动，内轴21不转动时，第一扇骨12也不运动。
第二扇骨13对应扇形挡板11的圆心的位置与外轴22固定连接，第二扇 骨13能够随外轴22同步运动，第二扇骨13的运动方向为外轴22的圆周方向，具体的，外轴22转动时，第二扇骨13随外轴22同步转动，外轴22不转动时，第二扇骨13也不运动。
中间扇骨14位于第一扇骨12和第二扇骨13之间，中间扇骨14与扇形挡板11的第一面或者第二面连接，即中间扇骨14可以与第一扇骨12位于扇形挡板11的同侧，中间扇骨14也可以与第二扇骨13位于扇形挡板11的同侧。
本方案中中间扇骨14沿着扇形挡板11的半径方向设置，扇形挡板11能够在中间扇骨14的位置发生折叠，扇形挡板11通过折叠实现的工作面积的调节。具体的，第一扇骨12和第二扇骨13之间的张角不同，扇形挡板11的折叠程度不同，遮挡面积不同，按照遮挡面积的需求，第一扇骨12和第二扇骨13打开不同的角度。
中间扇骨14对应扇形挡板11的圆心的位置设置有第二安装孔，中间扇骨14通过第二安装孔套设在内轴21或者外轴22上，即中间扇骨14可以和第一扇骨12一同安装在内轴21上，或者，中间扇骨14可以和第二扇骨13一同安装在外轴22上。
第二安装孔与内轴21或者外轴22间隙配合，在内轴21或者外轴22转动时，中间扇骨14不随内轴21或者外轴22一起转动。
本方案公开的蒸发镀膜设备挡板，包括挡板组件1和调节组件2，挡板组件1包括扇形挡板11、第一扇骨12、第二扇骨13和中间扇骨14，调节组件2包括内轴21和外轴22。调节组件2可以对挡板组件1的位置进行调节，具体的内轴21和外轴22同步转动，内轴21带动第一扇骨12运动，外轴22带动第二扇骨13运动，中间扇骨14随第一扇骨12和第二扇骨13运动，调节扇形 挡板11的遮挡位置；调节组件2也可以对挡板组件1的遮挡面积进行调节，具体的内轴21不转动，第一扇骨12不运动，外轴22转动，第二扇骨13运动，第二扇骨13拉动扇形挡板11运动，扇形挡板11带动中间扇骨14运动，使处于折叠状态的扇形挡板11展开或者将处于展开状态的扇形挡板11折叠，调节扇形挡板11的折叠面积，进而调节扇形挡板11的遮挡面积。本方案公开的蒸发镀膜设备挡板不仅可以调节遮挡位置，而且可以调节遮挡面积，增强了蒸发镀膜设备挡板遮挡范围的调节，适应的蒸镀场景更加广泛。
第一扇骨12、第二扇骨13和中间扇骨14的长度相等，第一扇骨12和第二扇骨13的宽度至少等于中间扇骨14的宽度，且第一扇骨12和第二扇骨13的厚度至少等于中间扇骨14的厚度。
第二扇骨13与外轴22的连接方式有多种。
在本方案的第一个具体实施例中，第二扇骨13通过轴套23与外轴22连接。具体的，第二扇骨13对应圆心的位置设置有轴套23，轴套23套设在外轴22上且与外轴22过盈配合，保证轴套23能够对外轴22一起转动，进而保证轴套23能够带动第二扇骨13运动。
在本方案的第二个具体实施例中，第二扇骨13对应扇形挡板11的圆心的位置设置有第三安装孔，第二扇骨13通过第三安装孔套设在外轴22上，且第三安装孔与外轴22过盈配合。
在本方案的第三个具体实施例中，第二扇骨13对应扇形挡板11的圆心的位置与外轴22胶粘连接。
在本方案的第四个具体实施例中，第二扇骨13对应扇形挡板11的圆心的位置与外轴22铆接连接。
在本方案的第五个具体实施例中，第二扇骨13对应扇形挡板11的圆心的位置与外轴22通过螺栓连接。
在第二扇骨13通过轴套23与外轴22连接的实施例中，轴套23的外壁设置有挡杆24，挡杆24能够与第二扇骨13远离中间扇骨14的一侧相抵。在减小扇形挡板11遮挡面积时，外轴22带动第二扇骨13运动，扇形挡板11会在设置有中间扇骨14的位置发生折叠，挡杆24能够在中间扇骨14与第二扇骨13发生重叠时对中间扇骨14起到限位的作用。
如图1所示，挡杆24为L型挡杆。
在本方案的一个具体实施例中，挡杆24上设置有第一角度传感器，第一角度传感器用于检测第一扇骨12与第二扇骨13之间的角度。通过第一角度传感器检测第一扇骨12和第二扇骨13之间的角度能够明确扇形挡板11的遮挡面积。
如图1所示，内轴21与第一扇骨12连接的一端凸出于外轴22，第一扇骨12与内轴21凸出于外轴22的位置连接，降低第一扇骨12与内轴21的连接难度。
该实施例中，第一扇骨12、中间扇骨14和第二扇骨13由上至下层叠布置。
本方案中外轴22的转动通过第一驱动组件实现，内轴21的转动通过第二驱动组件实现。
调节扇形挡板11的遮挡位置时，第一驱动组件和第二驱动组件同步驱动，第一驱动组件驱动外轴22转动，第二驱动组件驱动内轴21转动。
本方案中公开了两种第一驱动组件的实施例中。
第一个实施例中，第一驱动组件包括第一电机、第一齿轮和第二齿轮，第一电机的输出轴与第一齿轮连接，第二齿轮与外轴22连接，第一齿轮与第二齿轮啮合。
第二个实施例中，第一驱动组件包括第一电机、第一链轮、第一链条和第二链轮，第一电机的输出轴与第一链轮连接，第二链轮与外轴22连接，第一链轮与第二链轮通过第一链条连接。
本方案中公开了两种第二驱动组件的实施例中。
第一个实施例中，第二驱动组件包括第二电机、第三齿轮和第四齿轮，第二电机的输出轴与第三齿轮连接，第四齿轮与内轴21连接，第一齿轮与第二齿轮啮合。
第二个实施例中，第二驱动组件包括第二电机、第三链轮、第二链条和第四链轮，第二电机的输出轴与第三链轮连接，第四链轮与内轴21连接，第三链轮与第四链轮通过第二链条连接。
第一扇骨12与内轴21连接的方式有多种。
在本方案的第一个具体实施例中，第一扇骨12对应扇形挡板11的圆心的位置与内轴21胶粘连接。
在本方案的第二个具体实施例中，第一扇骨12对应扇形挡板11的圆心的位置与内轴21铆接连接。
在本方案的第三个具体实施例中，第一扇骨12对应扇形挡板11的圆心的位置与内轴21通过螺栓连接。
在本方案的一个具体实施方式中，内轴21和外轴22能够同时进行转动，但是内轴21和外轴22的转动速度可以不一致，例如，外轴22的转动速度大 于内轴21的转动速度，此时不仅可以改变扇形挡板11的遮挡位置，还能够同时增大扇形挡板11的遮挡面积，或者，外轴22的转动速度小于内轴21的转动速度，此时不仅可以改变扇形挡板11的遮挡位置，还能够同时减小扇形挡板11的遮挡面积。
在上述实施方式中，内轴21上设置有用于检测内轴21旋转角度的第二角度传感器，外轴22上设置有用于检测外轴22旋转角度的第三角度传感器，通过第二角度传感器与第三角度传感器的角度差得到扇形挡板11的遮挡面积。
为了进一步优化上述技术方案，本方案公开的蒸发镀膜设备挡板还包括位置传感器，位置传感器用于检测扇形挡板11的遮挡位置。
具体的，位置传感器设置在外轴22上。
扇形挡板11的弧度为30°-360°。此处需要说明的是，扇形挡板11的弧度为扇形挡板11完全展开时的弧度。
扇形挡板11的弧度为90°时，扇形挡板11完全展开时呈四分之一圆形；
扇形挡板11的弧度为180°时，扇形挡板11完全展开时呈半圆形；
扇形挡板11的弧度为360°时，扇形挡板11完全展开时呈圆形。
扇形挡板11为钢制薄片挡板、铝箔挡板、锡箔挡板或者耐高温塑料薄膜挡板。
为了进一步增强扇形挡板11遮挡面积的调节范围，本方案中相邻中间扇骨14之间的夹角、第一扇骨12与中间扇骨14之间的夹角和中间扇骨14与第二扇骨13之间的夹角为15°-60°。
在相邻中间扇骨14之间的夹角、第一扇骨12与中间扇骨14之间的夹角和中间扇骨14与第二扇骨13之间的夹角为15°，扇形挡板11完全折叠时的 遮挡面积为15°圆弧。
在相邻中间扇骨14之间的夹角、第一扇骨12与中间扇骨14之间的夹角和中间扇骨14与第二扇骨13之间的夹角为30°，扇形挡板11完全折叠时的遮挡面积为30°圆弧。
在相邻中间扇骨14之间的夹角、第一扇骨12与中间扇骨14之间的夹角和中间扇骨14与第二扇骨13之间的夹角为45°，扇形挡板11完全折叠时的遮挡面积为45°圆弧。
在相邻中间扇骨14之间的夹角、第一扇骨12与中间扇骨14之间的夹角和中间扇骨14与第二扇骨13之间的夹角为60°，扇形挡板11完全折叠时的遮挡面积为60°圆弧。
相邻中间扇骨14之间的夹角、第一扇骨12与中间扇骨14之间的夹角和中间扇骨14与第二扇骨13之间的夹角为15°、30°、45°和60°，还可以为其他夹角，例如10°、14.4°、20°或者其他角度的夹角，在此不做具体限定。
优选的，夹角越小，遮挡面积调节的范围越大。
在本方案的一个具体实施例中，内轴21和外周为钢制轴。
本方案还公开了一种蒸发镀膜设备，包括蒸发镀膜设备挡板，蒸发镀膜设备挡板为上述任意一个方案中公开的蒸发镀膜设备挡板。
由于蒸发镀膜设备挡板具有上述技术效果，具有该蒸发镀膜设备挡板的蒸发镀膜设备也具有同样的技术效果，在此不再赘述。
对所公开的实施例的上述说明，使本领域专业技术人员能够实现或使用本发明。对这些实施例的多种修改对本领域的专业技术人员来说将是显而易见 的，本文中所定义的一般原理可以在不脱离本发明的精神或范围的情况下，在其它实施例中实现。因此，本发明将不会被限制于本文所示的这些实施例，而是要符合与本文所公开的原理和新颖特点相一致的最宽的范围。

Claims (18)

  1. 一种蒸发镀膜设备挡板，其特征在于，包括挡板组件(1)和调节组件(2)，
    所述挡板组件(1)用于提高蒸发镀膜的均匀性，所述调节组件(2)用于调节所述挡板组件(1)，
    所述调节组件(2)包括内轴(21)和外轴(22)，
    所述外轴(22)能够绕自身轴线转动，所述外轴(22)内开设有与所述外轴(22)同轴布置的第一安装孔，
    所述内轴(21)能够绕自身轴线转动，所述内轴(21)安装在所述第一安装孔内且与所述第一安装孔间隙配合，或者，所述内轴(21)通过轴承安装在所述第一安装孔内，所述轴承的外圈与所述第一安装孔的孔壁连接，所述轴承的内圈与所述内轴(21)连接，
    所述挡板组件(1)包括扇形挡板(11)、第一扇骨(12)、第二扇骨(13)和中间扇骨(14)，
    所述第一扇骨(12)与所述扇形挡板(11)的第一边连接，且所述第一扇骨(12)位于所述扇形挡板(11)的第一面，所述第一扇骨(12)对应所述扇形挡板(11)的圆心的位置与所述内轴(21)固定连接，所述第一扇骨(12)能够随所述内轴(21)同步运动，
    所述第二扇骨(13)与所述扇形挡板(11)的第二边连接，且所述第二扇骨(13)位于所述扇形挡板(11)的第二面，所述第二扇骨(13)对应所述扇形挡板(11)的圆心的位置与所述外轴(22)固定连接，所述第二扇骨(13) 能够随所述外轴(22)同步运动，
    所述中间扇骨(14)的个数至少为一个，所述中间扇骨(14)位于所述第一扇骨(12)和所述第二扇骨(13)之间，所述中间扇骨(14)与所述扇形挡板(11)的第一面或者第二面连接且沿所述扇形挡板(11)的半径方向设置，所述扇形挡板(11)能够在所述中间扇骨(14)的位置发生折叠，所述中间扇骨(14)对应所述扇形挡板(11)的圆心的位置开设有第二安装孔，所述中间扇骨(14)通过所述第二安装孔套设在所述内轴(21)或者所述外轴(22)上且所述第二安装孔与所述内轴(21)或者外轴(22)间隙配合，
    其中，所述第一边和所述第二边分别为所述扇形挡板(11)的外圆弧对应的两条半径所在的边，所述第一面和所述第二面分别为所述扇形挡板(11)的两个面，所述第一面与所述第二面相对。
  2. 根据权利要求1所述的蒸发镀膜设备挡板，其特征在于，所述第二扇骨(13)通过轴套(23)与所述外轴(22)连接，所述轴套(23)套设在所述外轴(22)上且与所述外轴(22)过盈配合，所述轴套(23)的外轴(22)与所述第二扇骨(13)对应所述圆心的位置连接。
  3. 根据权利要求2所述的蒸发镀膜设备挡板，其特征在于，所述轴套(23)的外壁设置有挡杆(24)，所述挡杆(24)能够与所述第二扇骨(13)远离所述中间扇骨(14)的一侧相抵。
  4. 根据权利要求3所述的蒸发镀膜设备挡板，其特征在于，所述挡杆(24)为L型挡杆。
  5. 根据权利要求3所述的蒸发镀膜设备挡板，其特征在于，所述挡杆(24)上设置有第一角度传感器，所述第一角度传感器用于检测所述第一扇骨(12) 和所述第二扇骨(13)之间的角度。
  6. 根据权利要求1所述的蒸发镀膜设备挡板，其特征在于，所述第二扇骨(13)对应所述圆心的位置设置有第三安装孔，所述第二扇骨(13)通过第三安装孔套设在所述外轴(22)上，所述第三安装孔与所述外轴(22)过盈配合；
    或者，
    所述第二扇骨(13)对应所述圆心的位置与所述外轴(22)胶粘连接，
    或者，
    所述第二扇骨(13)对应所述圆心的位置与所述外轴(22)铆接连接，
    或者，
    所述第二扇骨(13)对应所述圆心的位置与所述外轴(22)通过螺栓连接。
  7. 根据权利要求1所述的蒸发镀膜设备挡板，其特征在于，所述内轴(21)与所述第一扇骨(12)连接的一端凸出于所述外轴(22)，所述第一扇骨(12)与所述内轴(21)凸出于所述外轴(22)的位置连接，
    所述第二扇骨(13)位于所述中间扇骨(14)的下方。
  8. 根据权利要求1所述的蒸发镀膜设备挡板，其特征在于，所述外轴(22)通过与第一驱动组件驱动转动，
    所述内轴(21)通过与第二驱动组件驱动转动，
    所述第一驱动组件和所述第二驱动组件能够同步驱动。
  9. 根据权利要求8所述的蒸发镀膜设备挡板，其特征在于，所述第一驱动组件包括第一电机、第一齿轮和第二齿轮，所述第一电机的输出轴与所述第一齿轮连接，所述第二齿轮与所述外轴(22)连接，所述第一齿轮与所述第二 齿轮啮合；
    或者，
    所述第一驱动组件包括第一电机、第一链轮、第一链条和第二链轮，所述第一电机的输出轴与所述第一链轮连接，所述第二链轮与所述外轴(22)连接，所述第一链轮与所述第二链轮通过第一链条连接。
  10. 根据权利要求8所述的蒸发镀膜设备挡板，其特征在于，所述第二驱动组件包括第二电机、第三齿轮和第四齿轮，所述第二电机的输出轴与所述第三齿轮连接，所述第四齿轮与所述内轴(21)连接，所述第三齿轮与所述第四齿轮啮合；
    或者，
    所述第二驱动组件包括第二电机、第三链轮、第二链条和第四链轮，所述第二电机的输出轴与所述第三链轮连接，所述第四链轮与所述内轴(21)连接，所述第三链轮与所述第四链轮通过第二链条连接。
  11. 根据权利要求1所述的蒸发镀膜设备挡板，其特征在于，所述第一扇骨(12)对应所述圆心的位置与所述内轴(21)胶粘连接，
    或者，
    所述第一扇骨(12)对应所述圆心的位置与所述内轴(21)铆接连接，
    或者，
    所述第一扇骨(12)对应所述圆心的位置与所述内轴(21)通过螺栓连接。
  12. 根据权利要求1所述的蒸发镀膜设备挡板，其特征在于，所述内轴(21)上设置有用于检测所述内轴(21)旋转角度的第二角度传感器，
    所述外轴(22)上设置有用于检测所述外轴(22)旋转角度的第三角度传 感器。
  13. 根据权利要求1所述的蒸发镀膜设备挡板，其特征在于，所述外轴(22)上设置有用于检测所述扇形挡板(11)位置的位置传感器。
  14. 根据权利要求1所述的蒸发镀膜设备挡板，其特征在于，所述扇形挡板(11)的弧度为30°-360°。
  15. 根据权利要求1所述的蒸发镀膜设备挡板，其特征在于，所述扇形挡板(11)为钢制薄片挡板、铝箔挡板、锡箔挡板或者耐高温塑料薄膜挡板。
  16. 根据权利要求1所述的蒸发镀膜设备挡板，其特征在于，相邻所述中间扇骨(14)、所述第一扇骨(12)和所述中间扇骨(14)以及所述第二扇骨(13)和所述中间扇骨(14)之间的夹角为15-60°。
  17. 根据权利要求1所述的蒸发镀膜设备挡板，其特征在于，所述内轴(21)和所述外轴(22)为钢制轴。
  18. 一种蒸发镀膜设备，其特征在于，包括蒸发镀膜设备挡板，所述蒸发镀膜设备挡板为权利要求1-17中任意一项所述的蒸发镀膜设备挡板。
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