WO2023053438A1 - 細径ビーム生成装置 - Google Patents

細径ビーム生成装置 Download PDF

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Publication number
WO2023053438A1
WO2023053438A1 PCT/JP2021/036398 JP2021036398W WO2023053438A1 WO 2023053438 A1 WO2023053438 A1 WO 2023053438A1 JP 2021036398 W JP2021036398 W JP 2021036398W WO 2023053438 A1 WO2023053438 A1 WO 2023053438A1
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WO
WIPO (PCT)
Prior art keywords
light source
narrow beam
lens
axicon
beam generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2021/036398
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English (en)
French (fr)
Japanese (ja)
Inventor
健 笠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tekjp Inc
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Tekjp Inc
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Filing date
Publication date
Application filed by Tekjp Inc filed Critical Tekjp Inc
Priority to JP2022564615A priority Critical patent/JP7266348B1/ja
Priority to PCT/JP2021/036398 priority patent/WO2023053438A1/ja
Priority to US18/697,700 priority patent/US20240402507A1/en
Priority to CN202180102804.0A priority patent/CN118020006A/zh
Priority to EP21959472.8A priority patent/EP4411449A4/en
Publication of WO2023053438A1 publication Critical patent/WO2023053438A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/001—Axicons, waxicons, reflaxicons
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0955—Lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01—Head-up displays
    • G02B27/017—Head mounted
    • G02B27/0172—Head mounted characterised by optical features
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0988—Diaphragms, spatial filters, masks for removing or filtering a part of the beam
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/30—Collimators
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01—Head-up displays
    • G02B27/0101—Head-up displays characterised by optical features
    • G02B2027/0118—Head-up displays characterised by optical features comprising devices for improving the contrast of the display / brillance control visibility
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01—Head-up displays
    • G02B27/0101—Head-up displays characterised by optical features
    • G02B2027/0127—Head-up displays characterised by optical features comprising devices increasing the depth of field
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01—Head-up displays
    • G02B27/017—Head mounted
    • G02B2027/0178—Eyeglass type

Definitions

  • the present invention relates to a narrow beam generator.
  • projector devices and display devices using light sources such as laser light emitting elements are known.
  • one or more light sources such as lasers, beam shaping optics, coupling optics, MEMS scanners, and one or more optical frames such as to facilitate mounting and maintain optical alignment.
  • An integrated photonics module has been disclosed (see, for example, US Pat. No. 6,200,401) that includes a mechanical component.
  • LBS Laser Beam Steering
  • the beam scanning the retina has a very small diameter (for example, about 20 ⁇ m).
  • a Gaussian beam into a parallel beam with a diameter of about 300 ⁇ m or less, for example, so a spot beam focused at a specific distance is used as an alternative means.
  • the spot beam has a very small beam diameter at a specific distance, but the beam diameter becomes large at positions before and after the focal length. Due to the different reach distances, a delicate adjustment mechanism is required to adjust the distance.
  • a Bessel beam generated by an axicon or the like can only be generated at a position very close to the axicon or the like, and there is a problem that it cannot be applied to a projector apparatus.
  • the present invention has been made in view of the above, and provides a narrow beam generator capable of generating a narrow beam having a predetermined diameter or less at an arbitrary position based on light emitted from an arbitrary light source. intended to
  • the present invention has beam shaping means for shaping a linear light source, the beam shaping means has a condensing section, the linear light source is arranged on the optical axis of the condensing section, and the It relates to the narrow beam generating device, wherein the center position on the optical axis of the line light source is arranged at a position farther from the condensing part than the focal position of the condensing part.
  • the narrow beam generator according to (1) which has a linear light source generator including a light source, a collimator optical system, and an axicon optical element.
  • the narrow beam generating device which has a linear light source generating means including a light source, a collimator optical system, and an axicon mirror, and wherein the condensing section has a parabolic mirror.
  • the collimator optical system has a plurality of collimator lenses into which light emitted from a plurality of light sources enters, and an axicon optical element into which a plurality of collimated lights of different wavelengths emitted from the plurality of collimator lenses enter.
  • the narrow beam generator according to (5) comprising:
  • a narrow beam generator capable of generating a narrow beam having a predetermined diameter at an arbitrary position based on light emitted from an arbitrary light source.
  • FIG. 1 is a schematic diagram showing the configuration of a narrow beam generator according to a first embodiment of the present invention
  • FIG. FIG. 4 is an enlarged schematic diagram showing conditions for optical simulation of the narrow beam generator according to the first embodiment; It is a figure which shows the simulation result which observed the light with a wavelength of 520 nm on the conditions of FIG.
  • FIG. 3 is a diagram showing a simulation result of observing light with a wavelength of 450 nm under the conditions of FIG. 2;
  • FIG. 3 is a diagram showing a simulation result of observing light with a wavelength of 638 nm under the conditions of FIG. 2;
  • FIG. 11 is an enlarged schematic diagram showing the configuration of a narrow beam generator and the conditions of optical simulation according to the second embodiment;
  • FIG. 7 is a diagram showing a simulation result of observing light with a wavelength of 520 nm under the conditions of FIG. 6; 7 is a diagram showing a simulation result of observing light with a wavelength of 450 nm under the conditions of FIG. 6.
  • FIG. 7 is a diagram showing a simulation result of observing light with a wavelength of 638 nm under the conditions of FIG. 6.
  • FIG. 11 is an enlarged schematic diagram showing the configuration of a narrow beam generation device and the conditions of optical simulation according to the third embodiment;
  • FIG. 11 is a diagram showing a simulation result of observing light with a wavelength of 520 nm under the conditions of FIG. 10;
  • FIG. 11 is a schematic diagram showing the configuration of a narrow beam generator according to a fourth embodiment;
  • the narrow beam generator 1 has a light source 2, a collimator optical element 3, an axicon lens 4, a condenser lens 5, and apertures A1 and A2.
  • the light source 2, the collimator optical element 3, and the axicon lens 4 correspond to linear light source generating means for generating the linear light source L1, and the condenser lens 5 as a condenser and the apertures A1 and A2 serve as beams. It corresponds to shaping means.
  • the collimator optical element 3, the axicon lens 4, and the condenser lens 5 are arranged so that their optical axes are substantially the same optical axis X.
  • a linear light source L1 generated on the optical axis X is shaped by the condensing lens 5 to generate a narrow beam L2 at a preset position.
  • the preset position where the narrow beam L2 is generated can be, for example, an arbitrary position separated by several tens of mm or more from the condenser lens 5, and the length of the narrow beam L2 is theoretically Since it is at infinity, the position where the narrow beam L2 is generated can be substantially any position.
  • the center of the optical axis of the linear light source L1 does not necessarily have to be the center of the optical axis X, and there may be some deviation of the axis.
  • the use of the narrow beam generator 1 capable of generating the narrow beam L2 is not particularly limited, and the size and generation position of the narrow beam L2 can be arbitrarily designed, so various projectors can be used.
  • the narrow beam generation device 1 can be applied to devices, display devices, laser processing devices, lighting devices, optical communication devices, optical memory devices, optical information processing devices, and the like.
  • the size of the beam diameter of the narrow beam L2 can be set to a predetermined size or less, and in a predetermined length (in principle, up to infinity) in the optical axis X direction, there is almost no divergence and the focal position is adjustment is not required. Therefore, the narrow beam generator 1 can be preferably applied to a retinal scan display.
  • the beam diameter of the narrow beam L2 can be, for example, 50 ⁇ m or less, 20 ⁇ m or less, or 10 ⁇ m or less.
  • the light source 2 is an arbitrary light source such as a semiconductor laser (LD), LED, surface light source, or the like.
  • the light source 2 is not particularly limited, and any light source can be used because neither spatial coherence nor temporal coherence is required.
  • the light source 2 may be capable of adjusting and modulating the light intensity by a light source driver or the like that serves as a power source.
  • a plurality of light sources emitting light with the same or different wavelengths may be provided.
  • a plurality of light sources may be used, and the light sources may be light sources in which RGB light is combined.
  • a collimator optical element 3 as a collimator optical system is an optical element into which light emitted from the light source 2 is incident.
  • the collimator optical element 3 converts the incident light into parallel light substantially parallel to the optical axis X and emits the parallel light.
  • a collimator optical element 3 as a collimator optical system includes a collimator lens, a mirror, a diffractive optical element (DOE), and the like.
  • DOE diffractive optical element
  • a diffractive optical element is an element that has a fine concave-convex structure on its surface and can spatially split light by utilizing the diffraction phenomenon of light to output light in a desired pattern and shape.
  • a plurality of collimator optical elements 3 are provided according to the number of light sources 2 .
  • a collimator optical system is used for a light source with divergence characteristics, but a collimator optical system is not used for a light source without divergence characteristics, and the collimator optical system is used directly or by using a beam expander to match the subsequent optical system. You may let it inject.
  • the axicon lens 4 is a lens into which the parallel light generated by the collimator optical element 3 enters perpendicularly, and the light is emitted from the vertex of the axicon surface formed on the exit side.
  • Light emitted from the axicon lens 4 is condensed in a ring on the optical axis X, and a line light source L1 of a predetermined length along the optical axis X is emitted from the vertex of the axicon surface.
  • a diffractive optical element (DOE) lens having similar optical characteristics may be used instead of the axicon lens 4 .
  • the linear light source L1 generated by the linear light source generator is a real image, but the linear light source L1 also includes a virtual image.
  • any means that can generate the linear light source L1 may be used as the linear light source generating means, and is not limited to the light source 2, the collimator optical element 3, and the axicon lens 4 described above.
  • it may be linear light source generating means according to another embodiment described later.
  • a linear light source such as a light emitting fiber may be used as the linear light source generating means.
  • the condensing lens 5 as a condensing part is a beam shaping means, and shapes the linear light source L1 emitted from the axicon lens 4 to generate a narrow beam L2 at an arbitrary position.
  • the condenser lens 5 is not particularly limited as long as it has a function of condensing incident light.
  • a one-sided aspherical plano-convex lens or a double-sided aspherical biconvex lens as shown in FIG. 2 may be used. can be done.
  • the condensing part is not limited to a condensing lens, and a parabolic mirror as in another embodiment described later may be used.
  • the center position C on the optical axis X of the linear light source L1 generated by the linear light source generating means is arranged at a position farther from the condenser lens 5 than the focal position F of the condenser lens 5 as a condenser. be.
  • the narrow beam L2 having a diameter equal to or smaller than a predetermined size can be generated without the narrow beam L2 diverging.
  • the small-diameter beam L2 hardly diverges within a predetermined length (in principle, up to infinity) in the optical axis X direction from its generation position, and maintains a diameter of a predetermined size or less.
  • the center position C of the linear light source L1 is arranged closer to the condenser lens 5 than the focal position F, the light emitted from the condenser lens 5 diverges and a narrow beam cannot be efficiently generated.
  • the narrow beam L2 can be generated near the condenser lens 5. Therefore, the relative positions of the central position C and the focal position F are By adjusting, an arbitrary position can be set as the generation position of the narrow beam L2.
  • the apertures A1 and A2 are members having holes (light transmitting portions) through which the linear light source L1 is transmitted, and are beam shaping means for shaping the linear light source L1. Unnecessary light emitted from the axicon lens 4 can be removed by the apertures A1 and A2.
  • Aperture A1 can be arranged, for example, at a position corresponding to center position C in the direction of the optical axis X, and the hole of aperture A1 has the same diameter as that of linear light source L1 emitted from axicon lens 4. can do.
  • the aperture A2 has a ring-shaped hole through which the linear light source L1 diverging in a ring shape can pass.
  • the aperture A2 can be realized, for example, by masking part of the surface of the condenser lens 5 in a ring shape.
  • the aperture A2 is provided on the exit side of the condensing lens 5, but the aperture A2 may be provided on the incident side of the condensing lens 5.
  • FIG. Only one of the apertures A1 and A2 may be used.
  • FIG. 2 is a diagram showing the conditions under which an optical simulation was performed using the optical design software ZEMAX (registered trademark) (manufactured by ZEMAX Development Corporation) using the narrow beam generator 1 according to the first embodiment. .
  • ZEMAX registered trademark
  • FIG. 2 is a diagram showing the conditions under which an optical simulation was performed using the optical design software ZEMAX (registered trademark) (manufactured by ZEMAX Development Corporation) using the narrow beam generator 1 according to the first embodiment. .
  • the axicon lens 4 shown in FIG. 2 has an inclination of 33°.
  • a plano-convex lens (effective diameter: 3.0 mm) having an aspherical surface on one side was used.
  • the length of the axicon lens 4 on the optical axis X is 1.0 mm
  • the length of the condenser lens 5 on the optical axis X is 1.707 mm.
  • the distance between the axicon lens 4 and the condenser lens 5 is 1.575 mm.
  • a focal position F of the condenser lens 5 is positioned on the optical axis X 0.93 mm to the left from the incident surface (plane) of the condenser lens 5 .
  • the linear light source L1 is distributed over a length of 0.9 mm on the optical axis X from the vertex of the axicon lens 4 to the right. Therefore, the center position C of the linear light source L1 is located on the optical axis X 0.45 mm to the right from the vertex of the axicon lens 4 (1.125 mm to the left from the incident surface (plane) of the condenser lens 5). above). Therefore, the center position C of the line light source L1 is located farther from the condenser lens 5 than the focal position F of the condenser lens 5 is.
  • 3 to 5 show the above optical simulations in which a detector is placed on a plane perpendicular to the optical axis X at positions where the distance D from the output side end face of the condenser lens 5 is 10 mm, 20 mm, 40 mm, 80 mm, and 160 mm, respectively. It is a figure which shows the result of having output the irradiance distribution by.
  • the wavelength of the parallel light flux (beam diameter: 1.0 mm) from the collimator lens entering the axicon lens 4 is 520 nm
  • the wavelength is similarly 450 nm
  • FIGS. 3 and 3 to 5 show the distribution of irradiance proportional to the intensity of light incident on the detector, meaning that the brighter the color, the higher the irradiance.
  • the small-diameter beam generator 1a has an integral lens 6 having an incident surface S1 that is a concave axicon surface and an exit surface S2 that is aspherical.
  • the configuration of the narrow beam generator 1a other than the above is the same as that of the first embodiment. That is, parallel light generated by the same light source and collimator optical system as in the first embodiment is incident on the incident surface S1.
  • the lens 6 functions both as a linear light source generator and as a condenser.
  • the linear light source L1 generated by the lens 6 is a virtual image generated on the incident side of the lens 6 .
  • the center position C on the optical axis X of the linear light source L1 is arranged at a position farther from the exit surface S2 than the focal position F of the exit surface S2 as the condensing portion.
  • the narrow beam L2 having a diameter equal to or smaller than a predetermined size can be generated without the narrow beam L2 diverging.
  • FIG. 6 shows the configuration of a narrow beam generator 1a according to the second embodiment, and optical design software ZEMAX (registered trademark) (manufactured by ZEMAX Development Corporation) is used using the narrow beam generator 1a. , and are diagrams showing the conditions under which the optical simulation was performed.
  • ZEMAX registered trademark
  • the lens 6 shown in FIG. 6 has an effective diameter of 2.0 mm, and the incident surface S1 (concave axicon surface) has an inclination angle of 19°.
  • the distance between the vertex of the incident surface S1 (concave axicon surface) and the output end surface of the output surface S2 is 1.9 mm as shown in FIG.
  • the focal position F of the exit surface S2 is positioned on the optical axis X 1.4 mm to the left from the vertex of the entrance surface S1 (concave axicon surface).
  • a linear light source L1 which is a virtual image, is distributed over a length of 4.4 mm on the optical axis X from the vertex of the incident surface S1 (concave axicon surface) to the left.
  • the center position C of the linear light source L1 exists on the optical axis X 2.2 mm to the left from the vertex of the incident surface S1 (concave axicon surface). Therefore, the center position C of the linear light source L1 is arranged at a position farther from the condensing part than the focal position F of the condensing part.
  • the distances D from the output end surface of the output surface S2 are 10 mm, 20 mm, 40 mm, 80 mm, and 160 mm, respectively, on a plane perpendicular to the optical axis X. It is a figure which shows the result of having installed the detector and having output the irradiance distribution by the said optical simulation.
  • the wavelength of the parallel light flux (beam diameter: 1.0 mm) from the collimator lens that is incident on the incident surface S1 (concave axicon surface) is 520 nm.
  • the wavelength was set to 638 nm.
  • Other conditions are the same as in FIGS.
  • a narrow beam generator 1b according to the third embodiment, as shown in FIG. 10, has a convex axicon mirror 4a and a parabolic mirror 5a.
  • the configuration of the narrow beam generator 1b other than the above is the same as that of the first embodiment. That is, parallel light generated by the same light source and collimator optical system as in the first embodiment is incident on the convex axicon mirror 4a. Light reflected by the convex axicon mirror 4a enters the parabolic mirror 5a.
  • the convex axicon mirror 4a is the linear light source generating means
  • the parabolic mirror 5a is the condensing part in the beam shaping means.
  • the linear light source L1 generated by the convex axicon mirror 4a is a virtual image generated on the opposite side of the reflected light of the convex axicon mirror 4a.
  • the center position C on the optical axis X of the line light source L1 is arranged at a position farther from the parabolic mirror 5a than the focal position F of the parabolic mirror 5a as the condensing part. .
  • the narrow beam L2 having a diameter equal to or smaller than a predetermined size can be generated without the narrow beam L2 diverging.
  • FIG. 10 shows the configuration of a narrow beam generator 1b according to the third embodiment, and uses the optical design software ZEMAX (registered trademark) (manufactured by ZEMAX Development Corporation) using the narrow beam generator 1a. , and are diagrams showing the conditions under which the optical simulation was performed.
  • ZEMAX registered trademark
  • the convex axicon mirror 4a shown in FIG. 10 has an effective diameter of 1.0 mm and an inclination angle of the axicon surface of 5.66°.
  • the parabolic mirror 5a has an effective diameter of 3.0 mm.
  • the distance between the vertex of the convex axicon mirror 4a and the plane of incidence of the parabolic mirror 5a is 4.5 mm as shown in FIG.
  • the distance between the end surface of the convex axicon mirror 4a opposite to the incident surface and the end surface of the parabolic mirror 5a opposite to the incident surface is 5.2 mm as shown in FIG.
  • the focal position F of the parabolic mirror 5a is positioned on the optical axis X 0.3 mm to the right from the vertex of the convex axicon mirror 4a.
  • a linear light source L1 which is a virtual image, is distributed over a length of 2.5 mm on the optical axis X from the vertex of the convex axicon mirror 4a to the right. Therefore, the center position C of the linear light source L1 exists on the optical axis X 1.25 mm to the right from the vertex of the convex axicon mirror 4a. Therefore, the center position C of the linear light source L1 is arranged at a position farther from the condensing part than the focal position F of the condensing part.
  • FIG. 11 shows a plane perpendicular to the optical axis X at positions where the distances D from the incident surface and the opposite end surface of the convex axicon mirror 4a are 10 mm, 20 mm, 40 mm, 80 mm, and 160 mm, respectively.
  • FIG. 10 is a diagram showing a result of outputting an irradiance distribution by the above optical simulation with a detector installed at .
  • the wavelength of the parallel light flux (beam diameter: 1.0 mm) from the collimator lens that enters the convex axicon mirror 4a is set to 520 nm. Since the optical characteristics of the reflective optical system do not depend on the wavelength of the incident light, simulation results for other wavelengths are omitted.
  • the narrow beam generator 1c includes a plurality of light sources 2a, 2b, and 2c, a plurality of collimator optical elements 3a, 3b, and 3c, and a dichroic beam as a combining means. It has mirrors 7 a , 7 b and 7 c , an axicon lens 4 and a condenser lens 5 .
  • the plurality of light sources 2a, 2b, and 2c are, for example, light sources corresponding to RGB, respectively, and are light sources that emit light of different wavelengths.
  • the narrow beam generating device 1c includes a plurality of light sources 2a, 2b, and 2c as linear light source generating means, a plurality of collimator optical elements 3a, 3b, and 3c, dichroic mirrors 7a, 7b as combining means, and 7c, and combine light of different wavelengths to enter a single axicon lens 4. FIG. This makes it possible to combine lights of different wavelengths.
  • the narrow-beam generation device 1c is used as a projector device, it is possible to obtain a very clear image without requiring deviation correction.
  • the dichroic mirrors 7a, 7b, and 7c as combining means use light interference to transmit light in specific wavelength regions and reflect light in the remaining wavelength regions.
  • the combining means is not limited to the above dichroic mirror, and other combining means such as a dichroic prism, a PLC (planar light circuit), a reflecting mirror, an optical fiber, etc. may be used.
  • the present invention is not limited to the above, and can be combined with the configurations described in the first or fourth embodiment.
  • a plurality of light sources and multiplexing means, and apertures A1 and A2 may be combined with the configurations of the second and third embodiments.
  • the beam diameter of the narrow beam L2 generated by the narrow beam generator is described as being 50 ⁇ m or less, for example, but it is not limited to the above.
  • the narrow beam generating mechanism of the narrow beam generating device it can be used as a long-distance beam generating device that maintains the beam diameter as an application other than the purpose of reducing the beam diameter.
  • Reference Signs List 1 1a, 1b, 1c narrow beam generator 2 light source 3 collimator optical element (collimator optical system) 4 axicon lens 4a convex axicon mirror (axicon mirror) 5 Condensing lens (condensing part) 5a Parabolic mirror (condensing part) 6 integrated lens S1 concave axicon surface (axicon surface) S2 aspheric surface A1, A2 aperture L1 line light source L2 narrow beam X optical axis

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
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PCT/JP2021/036398 2021-10-01 2021-10-01 細径ビーム生成装置 Ceased WO2023053438A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2022564615A JP7266348B1 (ja) 2021-10-01 2021-10-01 細径ビーム生成装置
PCT/JP2021/036398 WO2023053438A1 (ja) 2021-10-01 2021-10-01 細径ビーム生成装置
US18/697,700 US20240402507A1 (en) 2021-10-01 2021-10-01 Narrow beam generation device
CN202180102804.0A CN118020006A (zh) 2021-10-01 2021-10-01 细径光束生成装置
EP21959472.8A EP4411449A4 (en) 2021-10-01 2021-10-01 THIN BEAM GENERATING DEVICE

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PCT/JP2021/036398 WO2023053438A1 (ja) 2021-10-01 2021-10-01 細径ビーム生成装置

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US20100302396A1 (en) * 2009-06-02 2010-12-02 Ilya Golub Axicon Lens Array
JP2017102474A (ja) * 2015-01-30 2017-06-08 アスフェリコン ゲゼルシャフト ミット ベシュレンクテル ハフツング ほぼコリメートされたビームを焦束するための光学素子の配置構造
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