WO2023048025A1 - 樹脂組成物、プリプレグ、金属箔張積層板、樹脂複合シート、プリント配線板、および、半導体装置 - Google Patents

樹脂組成物、プリプレグ、金属箔張積層板、樹脂複合シート、プリント配線板、および、半導体装置 Download PDF

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Publication number
WO2023048025A1
WO2023048025A1 PCT/JP2022/034259 JP2022034259W WO2023048025A1 WO 2023048025 A1 WO2023048025 A1 WO 2023048025A1 JP 2022034259 W JP2022034259 W JP 2022034259W WO 2023048025 A1 WO2023048025 A1 WO 2023048025A1
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Prior art keywords
group
formula
mass
resin composition
carbon atoms
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Ceased
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PCT/JP2022/034259
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English (en)
French (fr)
Japanese (ja)
Inventor
克哉 山本
悠仁 鎌田
恵一 長谷部
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Mitsubishi Gas Chemical Co Inc
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Mitsubishi Gas Chemical Co Inc
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Priority to CN202280064917.0A priority Critical patent/CN118019802A/zh
Priority to JP2023549495A priority patent/JPWO2023048025A1/ja
Priority to KR1020247012995A priority patent/KR20240065288A/ko
Publication of WO2023048025A1 publication Critical patent/WO2023048025A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L71/00Compositions of polyethers obtained by reactions forming an ether link in the main chain; Compositions of derivatives of such polymers
    • C08L71/08Polyethers derived from hydroxy compounds or from their metallic derivatives
    • C08L71/10Polyethers derived from hydroxy compounds or from their metallic derivatives from phenols
    • C08L71/12Polyphenylene oxides
    • C08L71/126Polyphenylene oxides modified by chemical after-treatment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/20Layered products comprising a layer of metal comprising aluminium or copper
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G65/00Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule
    • C08G65/34Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from hydroxy compounds or their metallic derivatives
    • C08G65/48Polymers modified by chemical after-treatment
    • C08G65/485Polyphenylene oxides
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/12Unsaturated polyimide precursors
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/24Impregnating materials with prepolymers which can be polymerised in situ, e.g. manufacture of prepregs
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/34Silicon-containing compounds
    • C08K3/36Silica
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/49Phosphorus-containing compounds
    • C08K5/51Phosphorus bound to oxygen
    • C08K5/52Phosphorus bound to oxygen only
    • C08K5/521Esters of phosphoric acids, e.g. of H3PO4
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L53/00Compositions of block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Compositions of derivatives of such polymers
    • C08L53/02Compositions of block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Compositions of derivatives of such polymers of vinyl-aromatic monomers and conjugated dienes
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L53/00Compositions of block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Compositions of derivatives of such polymers
    • C08L53/02Compositions of block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Compositions of derivatives of such polymers of vinyl-aromatic monomers and conjugated dienes
    • C08L53/025Compositions of block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Compositions of derivatives of such polymers of vinyl-aromatic monomers and conjugated dienes modified
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L71/00Compositions of polyethers obtained by reactions forming an ether link in the main chain; Compositions of derivatives of such polymers
    • C08L71/08Polyethers derived from hydroxy compounds or from their metallic derivatives
    • C08L71/10Polyethers derived from hydroxy compounds or from their metallic derivatives from phenols
    • C08L71/12Polyphenylene oxides
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/40Encapsulations, e.g. protective coatings characterised by their materials
    • H10W74/47Encapsulations, e.g. protective coatings characterised by their materials comprising organic materials, e.g. plastics or resins
    • H10W74/473Encapsulations, e.g. protective coatings characterised by their materials comprising organic materials, e.g. plastics or resins containing a filler

Definitions

  • the content of the filler (E) is 10 to 300 parts by mass with respect to 100 parts by mass of the resin solid content,
  • Ar represents an aromatic hydrocarbon linking group. * represents a bonding position.
  • R M1 , R M2 , R M3 , and R M4 each independently represent a hydrogen atom or an organic group.
  • R M5 and R M6 each independently represent a hydrogen atom or an alkyl group.
  • the content of the thermoplastic elastomer (A) in the resin composition of the present embodiment is preferably 1 part by mass or more, more preferably 2 parts by mass or more, with respect to 100 parts by mass of the resin solid content. It is more preferably at least 8 parts by mass, even more preferably at least 12 parts by mass, even more preferably at least 16 parts by mass, further preferably 20 parts by mass. parts or more, particularly preferably 25 parts by mass or more.
  • the content is at least the above lower limit, low dielectric loss tangent property, crack resistance, low thermal expansion property, especially low thermal expansion property tend to be further improved.
  • the upper limit of the content of the thermoplastic elastomer (A) is preferably 40 parts by mass or less, more preferably 35 parts by mass or less, with respect to 100 parts by mass of the resin solid content. It may be 30 parts by mass or less, 25 parts by mass or less, 21 parts by mass or less, or 18 parts by mass or less depending on the application. When the content is equal to or less than the upper limit, the crack resistance tends to be further improved.
  • the resin composition of the present embodiment may contain only one type of thermoplastic elastomer (A), or may contain two or more types. When two or more types are included, the total amount is preferably within the above range.
  • the compatible thermosetting resin (B) is preferably a thermosetting resin containing an aromatic ring and a vinyl group. By using such a resin, it tends to be compatible with the styrene monomer units contained in the thermoplastic elastomer (A), and the compatibility tends to be further improved.
  • the compatible thermosetting resin (B) has a number average molecular weight Mn of preferably 300 or more, more preferably 500 or more, even more preferably 1,000 or more. , 500 or more.
  • the upper limit is preferably 130,000 or less, more preferably 120,000 or less, even more preferably 110,000 or less, even more preferably 100,000 or less. When two or more thermosetting resins (B) are included, the number average molecular weight of the mixture is preferably within the above range.
  • the structure of the chain end of the polymer having the structural unit represented by the formula (V) is not particularly limited, but the group derived from the divinyl aromatic compound may have the structure of the following formula (E1). mentioned.
  • the excellent low dielectric properties of the polymer having the structural unit represented by the formula (V), especially Df and dielectric properties after moisture absorption, are effectively applied to the cured product of the resin composition.
  • the upper limit of the weight average molecular weight Mw is preferably 160,000 or less, more preferably 150,000 or less, even more preferably 140,000 or less, and even more preferably 130,000 or less. .
  • the thickness is equal to or less than the above upper limit, there is a tendency that poor embedding is less likely to occur when the prepreg or resin sheet is laminated on the circuit board.
  • the vinyl group equivalent weight of the polymer having the structural unit represented by formula (V) is 200 g/eq. 230 g/eq. more preferably 250 g/eq. It is more preferable that it is above. Moreover, the equivalent weight of the vinyl group is 1200 g/eq. It is preferably less than or equal to 1000 g/eq. It is more preferably less than or equal to 800 g/eq. 600 g/eq. 400 g/eq. Below, 300g/eq. It may be below. When the amount is at least the above lower limit, the storage stability of the resin composition tends to improve, and the fluidity of the resin composition tends to improve.
  • the upper limit of the content of the polymer having the structural unit represented by formula (V) is preferably 45 parts by mass or less when the resin solid content in the resin composition is 100 parts by mass. It is more preferably 40 parts by mass or less, and even more preferably 35 parts by mass or less. Moreover, the metal foil peel strength of the obtained hardened
  • the polymer having the structural unit represented by formula (V) may be contained in the resin composition either singly or in combination of two or more. When two or more types are included, the total amount is preferably within the above range.
  • the modified polyphenylene ether compound (g) in the present embodiment is preferably a compound represented by formula (OP-2).
  • -(O-X-O)- is the formula (OP-3):
  • R 4 , R 5 , R 6 , R 10 and R 11 may be the same or different and are an alkyl group having 6 or less carbon atoms or a phenyl group.
  • a polyphenylene ether compound having a carbon-carbon unsaturated double bond at its end may be produced by a known method, or a commercially available product may be used.
  • Commercially available products include, for example, "SA9000” manufactured by SABIC Innovative Plastics Co., Ltd. as a modified polyphenylene ether compound having a methacryl group at the end.
  • modified polyphenylene ether compounds having a terminal vinylbenzyl group include "OPE-2St1200” and "OPE-2st2200” manufactured by Mitsubishi Gas Chemical.
  • Such other resin (C) is not necessarily an essential component for achieving the effect of the present invention, but by blending these components, various physical properties can be imparted to the resin composition or cured product. , the dielectric properties, moisture absorption and heat resistance of the resin composition or cured product can be further improved.
  • a cyanate ester compound having a naphthol aralkyl skeleton, a naphthylene ether skeleton, a xylene skeleton, a trisphenolmethane skeleton, or an adamantane skeleton has a relatively large number of functional group equivalents, and the number of unreacted cyanate ester groups is small. Therefore, a cured product of a resin composition using these tends to be even more excellent in low water absorption. Also, mainly due to having an aromatic skeleton or adamantane skeleton, the plating adhesion tends to be further improved.
  • R 1 M7 and R 1 M8 are each independently an alkyl group, preferably an alkyl group having 1 to 6 carbon atoms, more preferably an alkyl group having 1 to 3 carbon atoms, and particularly preferably a methyl group.
  • mx is 1 or 2, preferably 2;
  • lx is 0 or 1, preferably 1;
  • R M9 and R M10 each independently represent a hydrogen atom or an alkyl group, more preferably an alkyl group.
  • the compound represented by formula (M1-1) is preferably a compound represented by formula (M1-2) below.
  • R M21 , R M22 , R M23 and R M24 each independently represent a hydrogen atom or an organic group
  • R M25 and R M26 each independently represent a hydrogen atom or an alkyl
  • R M27 , R M28 , R M29 and R M30 each independently represent a hydrogen atom or an organic group
  • R M31 and R M32 each independently represent a hydrogen atom or an alkyl group
  • R M33 , RM34 , RM35 and RM36 each independently represent a hydrogen atom or an organic group
  • RM37 , RM38 and RM39 each independently represent a hydrogen atom or an alkyl group
  • nx is represents an integer of 1 or more and 20 or less.
  • the resin composition in the present embodiment may contain only one type of epoxy compound, or may contain two or more types. When two or more types are included, the total amount is preferably within the above range. In addition, the resin composition in the present embodiment can also be configured so as not to substantially contain an epoxy compound.
  • the resin composition of the present embodiment preferably contains a filler (E).
  • a filler (E) By including the filler (E), physical properties such as dielectric properties (low dielectric constant, low dielectric loss tangent, etc.), flame resistance, and low thermal expansion of the resin composition and its cured product can be further improved.
  • the filler (E) used in the present embodiment preferably has excellent low dielectric properties.
  • the filler (E) used in the present embodiment preferably has a dielectric constant (Dk) of 8.0 or less, more preferably 6.0 or less, measured according to the cavity resonator perturbation method. It is more preferably 4.0 or less.
  • the lower limit value of the dielectric constant is practically 2.0 or more, for example.
  • the compound (F1) used in this embodiment is also preferably composed only of atoms selected from carbon atoms, hydrogen atoms, oxygen atoms and silicon atoms, and from carbon atoms, hydrogen atoms and oxygen atoms More preferably, it is composed only of selected atoms.
  • the compound (F1) used in this embodiment may or may not have a polar group.
  • the compound (F1) used in this embodiment preferably does not have a polar group.
  • Polar groups are exemplified by amino groups, carboxyl groups, hydroxy groups and nitro groups.
  • Substantially free means that the content of the active ester compound is less than 1 part by mass, preferably less than 0.1 part by mass, with respect to 100 parts by mass of the resin solid content in the resin composition. More preferably, it is less than 0.01 part by mass.
  • the metal foil-clad laminate of the present embodiment preferably has a low coefficient of thermal expansion (CTE) measured using a laminate from which the metal foil has been removed by etching.
  • CTE is preferably 10.0 ppm/°C or less.
  • 0 is ideal, but 0.001 ppm/°C or more is practical.
  • the measurement of CTE follows description of the Example mentioned later.
  • Examples of the support used here include polyethylene film, polypropylene film, polycarbonate film, polyethylene terephthalate film, ethylenetetrafluoroethylene copolymer film, and a release film obtained by applying a release agent to the surface of these films, Organic film substrates such as polyimide films, conductor foils such as copper foils and aluminum foils, glass plates, SUS (Steel Use Stainless) plates, FRP (Fiber-Reinforced Plastics) and other plate-like substrates. It is not particularly limited.
  • the physical properties (peel strength, dielectric loss tangent, post-curing appearance, coefficient of thermal expansion (CTE)) of the resulting copper-clad laminate were evaluated according to the methods described later.
  • a test piece (30 mm ⁇ 150 mm ⁇ 0.8 mm) was prepared by removing the copper foil from the obtained copper foil clad laminate by etching, and the dielectric loss tangent (Df) at 10 GHz was measured using a perturbation method cavity resonator. bottom. The measurement temperature was 23°C.
  • the perturbation method cavity resonator used was Agilent 8722ES, a product of Agilent Technologies. It was evaluated as follows. A: Less than 0.0025 B: 0.0025 or more
  • Comparative example 8 In Example 3, the modified polyphenylene ether compound was not blended, and the amount of the maleimide compound (MIR-3000-70MT manufactured by Nippon Kayaku Co., Ltd., corresponding to the compound represented by formula (M3)) was changed to 55 parts by mass. changed and others did as well.
  • MIR-3000-70MT manufactured by Nippon Kayaku Co., Ltd. corresponding to the compound represented by formula (M3)

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Reinforced Plastic Materials (AREA)
PCT/JP2022/034259 2021-09-27 2022-09-13 樹脂組成物、プリプレグ、金属箔張積層板、樹脂複合シート、プリント配線板、および、半導体装置 Ceased WO2023048025A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN202280064917.0A CN118019802A (zh) 2021-09-27 2022-09-13 树脂组合物、预浸料、覆金属箔层叠板、树脂复合片、印刷电路板及半导体装置
JP2023549495A JPWO2023048025A1 (https=) 2021-09-27 2022-09-13
KR1020247012995A KR20240065288A (ko) 2021-09-27 2022-09-13 수지 조성물, 프리프레그, 금속박 피복 적층판, 수지 복합 시트, 프린트 배선판, 및 반도체 장치

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JP2021157026 2021-09-27
JP2021-157026 2021-09-27

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WO2023048025A1 true WO2023048025A1 (ja) 2023-03-30

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KR (1) KR20240065288A (https=)
CN (1) CN118019802A (https=)
TW (1) TW202323427A (https=)
WO (1) WO2023048025A1 (https=)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025115610A1 (ja) * 2023-12-01 2025-06-05 三菱瓦斯化学株式会社 樹脂組成物、硬化物、プリプレグ、金属箔張積層板、樹脂複合シート、プリント配線板、および、半導体装置
WO2025173575A1 (ja) * 2024-02-16 2025-08-21 株式会社レゾナック 樹脂組成物、プリプレグ、樹脂付き金属箔、積層板、プリント配線板及び半導体パッケージ
WO2025221863A1 (en) * 2024-04-17 2025-10-23 Rogers Corporation Curable composition and cured compositions derived therefrom
WO2026058740A1 (ja) * 2024-09-10 2026-03-19 三菱瓦斯化学株式会社 プリプレグ、金属箔張積層板、プリント配線板、および、半導体装置
WO2026083784A1 (ja) * 2024-10-15 2026-04-23 三菱瓦斯化学株式会社 樹脂組成物、硬化物、樹脂複合シート、プリプレグ、金属箔張積層板、プリント配線板、および、半導体装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI882738B (zh) * 2024-03-21 2025-05-01 昱鐳光電科技股份有限公司 含不飽和碳之熱固化樹脂及其製備方法

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JP2012126844A (ja) * 2010-12-16 2012-07-05 Asahi Kasei E-Materials Corp アリル化ポリフェニレンエーテル
JP2014001277A (ja) * 2012-06-15 2014-01-09 Asahi Kasei E-Materials Corp 硬化性樹脂組成物
WO2019230945A1 (ja) * 2018-06-01 2019-12-05 三菱瓦斯化学株式会社 樹脂組成物、プリプレグ、金属箔張積層板、樹脂シート及びプリント配線板

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CN120289924A (zh) 2019-02-28 2025-07-11 三菱瓦斯化学株式会社 树脂组合物、预浸料、覆金属箔层叠板、树脂复合片及印刷电路板

Patent Citations (3)

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Publication number Priority date Publication date Assignee Title
JP2012126844A (ja) * 2010-12-16 2012-07-05 Asahi Kasei E-Materials Corp アリル化ポリフェニレンエーテル
JP2014001277A (ja) * 2012-06-15 2014-01-09 Asahi Kasei E-Materials Corp 硬化性樹脂組成物
WO2019230945A1 (ja) * 2018-06-01 2019-12-05 三菱瓦斯化学株式会社 樹脂組成物、プリプレグ、金属箔張積層板、樹脂シート及びプリント配線板

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025115610A1 (ja) * 2023-12-01 2025-06-05 三菱瓦斯化学株式会社 樹脂組成物、硬化物、プリプレグ、金属箔張積層板、樹脂複合シート、プリント配線板、および、半導体装置
WO2025173575A1 (ja) * 2024-02-16 2025-08-21 株式会社レゾナック 樹脂組成物、プリプレグ、樹脂付き金属箔、積層板、プリント配線板及び半導体パッケージ
WO2025221863A1 (en) * 2024-04-17 2025-10-23 Rogers Corporation Curable composition and cured compositions derived therefrom
WO2026058740A1 (ja) * 2024-09-10 2026-03-19 三菱瓦斯化学株式会社 プリプレグ、金属箔張積層板、プリント配線板、および、半導体装置
WO2026083784A1 (ja) * 2024-10-15 2026-04-23 三菱瓦斯化学株式会社 樹脂組成物、硬化物、樹脂複合シート、プリプレグ、金属箔張積層板、プリント配線板、および、半導体装置

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TW202323427A (zh) 2023-06-16
KR20240065288A (ko) 2024-05-14

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