WO2023032413A1 - 半導体装置 - Google Patents

半導体装置 Download PDF

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Publication number
WO2023032413A1
WO2023032413A1 PCT/JP2022/024328 JP2022024328W WO2023032413A1 WO 2023032413 A1 WO2023032413 A1 WO 2023032413A1 JP 2022024328 W JP2022024328 W JP 2022024328W WO 2023032413 A1 WO2023032413 A1 WO 2023032413A1
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Prior art keywords
voltage
transistor
circuit
sig
line
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Ceased
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PCT/JP2022/024328
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English (en)
French (fr)
Japanese (ja)
Inventor
英夫 原
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Rohm Co Ltd
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Rohm Co Ltd
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Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Priority to DE112022003832.2T priority Critical patent/DE112022003832T5/de
Priority to CN202280059113.1A priority patent/CN117917010A/zh
Priority to JP2023545105A priority patent/JPWO2023032413A1/ja
Publication of WO2023032413A1 publication Critical patent/WO2023032413A1/ja
Priority to US18/590,556 priority patent/US20240204777A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/06—Modifications for ensuring a fully conducting state
    • H03K17/063—Modifications for ensuring a fully conducting state in field-effect transistor switches
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/51—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used
    • H03K17/56—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used by the use, as active elements, of semiconductor devices
    • H03K17/687—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used by the use, as active elements, of semiconductor devices the devices being field-effect transistors
    • H03K17/6871—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used by the use, as active elements, of semiconductor devices the devices being field-effect transistors the output circuit comprising more than one controlled field-effect transistor
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/08—Circuits specially adapted for the generation of control voltages for semiconductor devices incorporated in static converters
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of DC power input into DC power output
    • H02M3/02—Conversion of DC power input into DC power output without intermediate conversion into AC
    • H02M3/04—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters
    • H02M3/06—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using resistors or capacitors, e.g. potential divider
    • H02M3/07—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using resistors or capacitors, e.g. potential divider using capacitors charged and discharged alternately by semiconductor devices with control electrode, e.g. charge pumps
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of DC power input into DC power output
    • H02M3/02—Conversion of DC power input into DC power output without intermediate conversion into AC
    • H02M3/04—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters
    • H02M3/10—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M3/145—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M3/155—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/51—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used
    • H03K17/56—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used by the use, as active elements, of semiconductor devices
    • H03K17/687—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used by the use, as active elements, of semiconductor devices the devices being field-effect transistors
    • H03K17/6871—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used by the use, as active elements, of semiconductor devices the devices being field-effect transistors the output circuit comprising more than one controlled field-effect transistor
    • H03K17/6874—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used by the use, as active elements, of semiconductor devices the devices being field-effect transistors the output circuit comprising more than one controlled field-effect transistor in a symmetrical configuration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/14—Indicating direction of current; Indicating polarity of voltage
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/165—Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/30—Modifications for providing a predetermined threshold before switching
    • H03K2017/307—Modifications for providing a predetermined threshold before switching circuits simulating a diode, e.g. threshold zero
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K2217/00—Indexing scheme related to electronic switching or gating, i.e. not by contact-making or -breaking covered by H03K17/00
    • H03K2217/0063—High side switches, i.e. the higher potential [DC] or life wire [AC] being directly connected to the switch and not via the load
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K2217/00—Indexing scheme related to electronic switching or gating, i.e. not by contact-making or -breaking covered by H03K17/00
    • H03K2217/0072—Low side switches, i.e. the lower potential [DC] or neutral wire [AC] being directly connected to the switch and not via the load
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K2217/00—Indexing scheme related to electronic switching or gating, i.e. not by contact-making or -breaking covered by H03K17/00
    • H03K2217/0081—Power supply means, e.g. to the switch driver
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K5/00—Manipulating of pulses not covered by one of the other main groups of this subclass
    • H03K5/01—Shaping pulses
    • H03K5/08—Shaping pulses by limiting; by thresholding; by slicing, i.e. combined limiting and thresholding

Definitions

  • the present disclosure relates to semiconductor devices.
  • a bootstrap circuit including a bootstrap capacitor is used to drive the high-side transistors in the half-bridge circuit.
  • one end of the bootstrap capacitor is generally connected to the connection node between the high-side transistor and the low-side transistor, and the other end of the bootstrap capacitor is connected to the cathode of the bootstrap diode. do.
  • a predetermined voltage is applied to the anode of the bootstrap diode.
  • the high-side transistor is driven based on the charging voltage of the bootstrap capacitor.
  • the bootstrap capacitor is charged in the process of the potential change of the connection node due to the switching of the high-side transistor and the low-side transistor.
  • the charging voltage of the bootstrap capacitor may become inappropriate. For example, when the bootstrap capacitor is overcharged, there is concern that the withstand voltage of the high-side transistor may be exceeded. It is hoped that a technology will be developed that can optimize the charging voltage of the bootstrap capacitor.
  • An object of the present disclosure is to provide a semiconductor device that contributes to optimizing the charging voltage of the bootstrap capacitor.
  • a semiconductor device includes: a first output transistor; a second output transistor connected in series with the first output transistor on a low potential side of the first output transistor; a first terminal connected to a connection node between transistors; a second terminal configured to be connected to the first terminal through a bootstrap capacitor; and a voltage between the first terminal and the second terminal.
  • a first driver configured to drive the first output transistor based on a base
  • a second driver configured to drive the second output transistor
  • an N-channel type having a source connected to the second terminal.
  • a second switch element composed of an N-channel MOSFET having a source for receiving a predetermined control power supply voltage and a drain connected to the drain of the first switching element. and a switch control circuit configured to control ON or OFF of the first switch element and the second switch element according to the voltage of the first terminal.
  • FIG. 1 is an overall configuration diagram of a load driving system according to the first embodiment of the present disclosure.
  • FIG. 2 is an external perspective view of the semiconductor device according to the first embodiment of the present disclosure.
  • FIG. 3 is a waveform diagram of signals and the like related to the semiconductor device according to the first embodiment of the present disclosure.
  • FIG. 4 relates to the first embodiment of the present disclosure and is a diagram showing current flow and the like in both off periods.
  • FIG. 5 relates to the first embodiment of the present disclosure and is a diagram showing current flow and the like in both off periods.
  • FIG. 6 is a configuration diagram related to the generation of the boot voltage according to the first embodiment of the present disclosure.
  • FIG. 7 is a timing chart relating to on/off control of transistors in the switch circuit according to the first embodiment of the present disclosure.
  • FIG. 8 is a timing chart relating to on/off control of transistors in the switch circuit according to the first embodiment of the present disclosure.
  • FIG. 9 is a configuration diagram related to the reference example and involved in the generation of the boot voltage.
  • FIG. 10 is a waveform diagram of voltage and current according to the reference example.
  • FIG. 11 is a voltage and current waveform diagram according to the first embodiment of the present disclosure.
  • FIG. 12 is a diagram showing the relationship between multiple periods, multiple detection signals, and the state of the switch circuit according to the first embodiment of the present disclosure.
  • FIG. 13 is a timing chart according to the first embodiment of the present disclosure;
  • FIG. 14 is a partial configuration diagram of a semiconductor device according to a second embodiment of the present disclosure.
  • FIG. 15 is a circuit diagram of a negative voltage detection circuit according to the second embodiment of the present disclosure.
  • FIG. 16 is a diagram showing two current paths provided in the negative voltage detection circuit according to the second embodiment of the present disclosure.
  • FIG. 17 is an explanatory diagram of the static state of the negative voltage detection circuit according to the second embodiment of the present disclosure.
  • FIG. 18 is an explanatory diagram of the static state of the negative voltage detection circuit according to the second embodiment of the present disclosure.
  • FIG. 19 is a diagram for explaining the state transition of the negative voltage detection circuit according to the second embodiment of the present disclosure.
  • FIG. 20 is a diagram for explaining the state transition of the negative voltage detection circuit according to the second embodiment of the present disclosure.
  • FIG. 21 is a diagram for explaining the state transition of the negative voltage detection circuit according to the second embodiment of the present disclosure.
  • FIG. 22 is a diagram schematically showing schematic waveforms of some signals related to the negative voltage detection circuit, according to the second embodiment of the present disclosure.
  • FIG. 23 is a diagram schematically showing schematic waveforms of some signals related to the virtual negative voltage detection circuit, according to the second embodiment of the present disclosure.
  • FIG. 24 is a diagram showing a modified configuration of the negative voltage detection circuit according to the second embodiment of the present disclosure.
  • FIG. 25 is a diagram showing another modified configuration of the negative voltage detection circuit according to the second embodiment of the present disclosure.
  • FIG. 26 is a circuit diagram of a high voltage detection circuit according to a third embodiment of the present disclosure.
  • FIG. 27 is a diagram illustrating two current paths provided in a high voltage detection circuit according to a third embodiment of the present disclosure
  • FIG. 28 is an explanatory diagram of the static state of the high voltage detection circuit according to the third embodiment of the present disclosure.
  • FIG. 29 is an explanatory diagram of the static state of the high voltage detection circuit according to the third embodiment of the present disclosure.
  • FIG. 30 is a diagram for explaining the state transition of the high voltage detection circuit according to the third embodiment of the present disclosure.
  • FIG. 31 is a diagram for explaining the state transition of the high voltage detection circuit according to the third embodiment of the present disclosure.
  • FIG. 32 is a diagram for explaining the state transition of the high voltage detection circuit according to the third embodiment of the present disclosure.
  • FIG. 33 is a diagram schematically showing schematic waveforms of some signals related to the high voltage detection circuit, according to the third embodiment of the present disclosure.
  • FIG. 34 is a diagram schematically showing schematic waveforms of some signals related to the virtual high voltage detection circuit, according to the third embodiment of the present disclosure.
  • FIG. 35 is a diagram showing a modified configuration of the high voltage detection circuit according to the third embodiment of the present disclosure.
  • FIG. 36 is a diagram showing another modified configuration of the high voltage detection circuit according to the third embodiment of the present disclosure.
  • FIG. 37 is a circuit diagram of a charge pump circuit according to a fourth embodiment of the present disclosure;
  • FIG. 38 is a circuit diagram of a charge pump circuit based on the output terminal voltage according to the fourth embodiment of the present disclosure.
  • FIG. 39 is a circuit diagram of a ground referenced charge pump circuit according to a fourth embodiment of the present disclosure.
  • FIG. 40 is a diagram for explaining the operation of the charge pump circuit according to the fourth embodiment of the present disclosure.
  • FIG. 41 is a diagram for explaining the operation of the charge pump circuit according to the fourth embodiment of the present disclosure.
  • FIG. 42 is a diagram for explaining the operation of the charge pump circuit according to the fourth embodiment of the present disclosure.
  • FIG. 43 is a waveform diagram of signals and voltages related to the charge pump circuit according to the fourth embodiment of the present disclosure.
  • FIG. 44 is a diagram showing the relationship between control signals and gate signals, etc., according to the fourth embodiment of the present disclosure.
  • FIG. 40 is a diagram for explaining the operation of the charge pump circuit according to the fourth embodiment of the present disclosure.
  • FIG. 41 is a diagram for explaining the operation of the charge pump circuit according to the fourth embodiment of the present disclosure.
  • FIG. 42 is a diagram for explaining the operation of the charge pump circuit according to the fourth
  • FIG. 45 is a diagram showing the relationship between control signals and gate signals, etc., according to the fourth embodiment of the present disclosure.
  • FIG. 46 is a modified circuit diagram of the charge pump circuit according to the fourth embodiment of the present disclosure.
  • FIG. 47 is a circuit diagram of part of a switch control circuit and its peripheral circuits according to the fifth embodiment of the present disclosure.
  • FIG. 48 is a circuit diagram of part of a switch control circuit and its peripheral circuits according to the fifth embodiment of the present disclosure.
  • FIG. 49 is an explanatory diagram of high and low levels of signals according to the fifth embodiment of the present disclosure.
  • FIG. 50 is a diagram showing an example of the relationship between the output terminal voltage and the differential voltage between the output terminal voltage and the boot voltage, according to the fifth embodiment of the present disclosure.
  • FIG. 51 is a diagram showing an example of the relationship between the output terminal voltage and the differential voltage between the output terminal voltage and the boot voltage, according to the fifth embodiment of the present disclosure.
  • Lines refer to wires through which electrical signals are propagated or applied.
  • Ground refers to a reference conductive portion having a potential of 0V (zero volts) or a potential of 0V itself.
  • a potential of 0 V is sometimes referred to as a ground potential.
  • voltages shown without specific reference represent potentials with respect to ground.
  • a level refers to a level of potential, and for any signal or voltage of interest, a high level has a higher potential than a low level.
  • a high level For any signal or voltage of interest, strictly speaking that the signal or voltage is at a high level means that the signal or voltage is at a high level, and strictly speaking that the signal or voltage is at a low level. It means that the signal or voltage level is at low level.
  • Levels for signals are sometimes referred to as signal levels, and levels for voltages are sometimes referred to as voltage levels. For any given signal of interest, when the signal is at a high level, the inverse of the signal assumes a low level, and when the signal is at a low level, the inverse of the signal assumes a high level.
  • a transition from a low level to a high level in any signal or voltage of interest is called an up edge (or rising edge).
  • a transition from a high level to a low level in any signal or voltage of interest is called a falling edge.
  • the ON state refers to the state in which there is conduction between the drain and source of the transistor
  • the OFF state refers to the state in which there is conduction between the drain and source of the transistor. It refers to the state in which the current between the two is non-conducting (blocking state).
  • MOSFETs are understood to be enhancement mode MOSFETs unless otherwise stated.
  • MOSFET is an abbreviation for "metal-oxide-semiconductor field-effect transistor".
  • the backgate may be considered shorted to the source unless otherwise stated.
  • the electrical characteristics of a MOSFET include the gate threshold voltage.
  • the gate potential of the transistor is higher than the source potential of the transistor, and the magnitude of the gate-to-source voltage of the transistor is the gate threshold voltage of the transistor. If so, the transistor is on; otherwise, the transistor is off.
  • the gate potential of the transistor is lower than the source potential of the transistor, and the magnitude of the gate-to-source voltage of the transistor is the gate threshold voltage of the transistor. If so, the transistor is on; otherwise, the transistor is off.
  • the gate-source voltage refers to the potential of the gate seen from the potential of the source.
  • Each transistor shown below has a withstand voltage sufficient to withstand a voltage applied thereto.
  • the on state and off state of any transistor may be simply expressed as on and off.
  • switching from an off state to an on state is expressed as turn-on, and switching from an on state to an off state is expressed as turn-off.
  • the period during which the transistor is on is sometimes referred to as the on period, and the period during which the transistor is off is sometimes referred to as the off period.
  • the period during which the level of the signal is high level may be referred to as the high level period
  • the period during which the level of the signal is low level may be referred to as the low level period.
  • the same is true for any voltage that takes a high or low voltage level.
  • Connections between multiple parts forming a circuit such as arbitrary circuit elements, wiring (lines), nodes, etc., may be understood to refer to electrical connections unless otherwise specified.
  • FIG. 1 shows the overall configuration of the system SYS according to the first embodiment.
  • System SYS can be referred to as a load driving system.
  • the system SYS includes a semiconductor device 1 for driving a load LD, an MPU (Micro Processing Unit) 2, voltage sources 3 and 4, a capacitor CB, and a sense resistor RSNS .
  • MPU Micro Processing Unit
  • RSNS sense resistor
  • FIG. 2 is an external perspective view of the semiconductor device 1.
  • the semiconductor device 1 includes a semiconductor chip having a semiconductor integrated circuit formed on a semiconductor substrate, a semiconductor discrete component, a housing (package) for housing the semiconductor chip and the semiconductor discrete component, and an exterior of the semiconductor device 1 from the housing. and a plurality of external terminals exposed to the electronic component.
  • a semiconductor device 1 is formed by enclosing a semiconductor chip and semiconductor discrete components in a housing (package) made of resin. This type of semiconductor device 1 can be called IPM (Intelligent Power Modules).
  • IPM Intelligent Power Modules
  • the number of external terminals of the semiconductor device 1 and the type of housing of the semiconductor device 1 shown in FIG. 2 are merely examples, and they can be designed arbitrarily.
  • terminals TM11 to TM18 are shown in FIG.
  • a terminal TM11 is an output terminal to which an output terminal voltage VS is applied.
  • a terminal TM12 is a boot terminal to which a boot voltage VB is applied.
  • a terminal TM13 is a ground terminal connected to the ground.
  • a terminal TM14 is a control power supply terminal to which a control power supply voltage VCC is applied.
  • a terminal TM15 is a power supply terminal to which a power supply voltage VP is applied.
  • Terminal TM16 is a low-side terminal.
  • a terminal TM17 is a control input terminal to which a drive control signal HIN is applied.
  • a terminal TM18 is a control input terminal to which a drive control signal LIN is applied.
  • the load LD is connected to the output terminal TM11 and driven based on power supplied through the output terminal TM11.
  • Load LD includes an inductive load.
  • a coil is included in the load LD, one end of the coil is connected to the output terminal TM11, and the other end of the coil is connected to a smoothing capacitor (non-smoothing capacitor). shown) to ground.
  • the load LD may be a motor coil (armature winding).
  • a current flowing between the output terminal TM11 and the load LD is hereinafter referred to as a load current.
  • a capacitor CB is a bootstrap capacitor provided outside the semiconductor device 1 .
  • the capacitor CB is provided between the terminals TM11 and TM12. That is, one end of the capacitor CB is connected to the output terminal TM11, and the other end of the capacitor CB is connected to the boot terminal TM12.
  • a modification in which the capacitor CB is incorporated in the semiconductor device 1 is also possible.
  • the voltage source 3 outputs a power supply voltage VP having a predetermined positive DC voltage value.
  • the power supply voltage VP may also be called a power supply voltage.
  • a power supply voltage VP is input to a power supply terminal TM15.
  • the voltage value of the power supply voltage VP is arbitrary, it is assumed below that the power supply voltage VP is 600 V (volt) as an example.
  • the voltage source 4 outputs a power supply voltage VCC having another predetermined positive DC voltage value.
  • the power supply voltage VCC may also be referred to as a control power supply voltage.
  • the control power supply voltage VCC is input to the control power supply terminal TM14.
  • the voltage value of the power supply voltage VCC is arbitrary, the power supply voltage VCC is assumed to be 18 V (volt) below as an example.
  • the low side terminal TM16 is connected to the ground via the sense resistor RSNS .
  • a modification in which the sense resistor RSNS is built in the semiconductor device 1 is also possible.
  • the low-side terminal TM16 may be directly connected to the ground.
  • an overcurrent protection operation for the output transistor MH or ML which will be described later, can be performed.
  • it is also possible to omit the sense resistor R SNS in the system SYS it is also possible to omit the sense resistor R SNS in the system SYS (it may be understood that the resistance value of the sense resistor R SNS is 0 ⁇ ).
  • the MPU2 is an arithmetic processing unit driven based on the power supply voltage VCC2.
  • the MPU 2 generates and outputs drive control signals HIN and LIN.
  • the drive control signal HIN is input to the control input terminal TM17
  • the drive control signal LIN is input to the control input terminal TM18.
  • Each of the drive control signals HIN and LIN is a digital signal (binary signal) that takes either a high level or a low level. High levels of the drive control signals HIN and LIN match the level of the power supply voltage VCC2, and low levels of the drive control signals HIN and LIN match the ground level (see FIG. 3). Matching here is a concept that also includes substantially matching. Although the voltage value of power supply voltage VCC2 is arbitrary, it is assumed below that power supply voltage VCC2 is 5 V (volt) as an example.
  • the semiconductor device 1 includes a high-side output transistor MH and a low-side output transistor ML, as well as a high-side driver 10, a low-side driver 20, a switch circuit 30, a switch driver 40 and a switch control circuit 50.
  • the output transistors MH and ML are composed of N-channel MOSFETs.
  • the output transistors MH and ML can be included in the semiconductor device 1 as discrete components.
  • Output transistors MH and ML are constructed using silicon carbide (SiC).
  • SiC silicon carbide
  • a parasitic diode is added to each of the output transistors MH and ML. In each output transistor, the forward direction of the parasitic diode matches the direction from the source to the drain of the output transistor.
  • the drain of the output transistor MH is connected to the power supply terminal TM15 that receives the power supply voltage VP.
  • the source of the output transistor MH and the drain of the output transistor ML are commonly connected to the output terminal TM11. That is, the output terminal TM11 is connected to the connection node between the output transistors MH and ML.
  • the source of the output transistor ML is connected to the low side terminal TM16. Therefore, the output transistor ML is connected in series with the output transistor MH on the lower potential side than the output transistor MH.
  • a drive control signal HIN received at the control input terminal TM17 is input to the high side driver 10 .
  • the driver 10 is connected to the ground, and the control power supply voltage VCC, the output terminal voltage VS, and the boot voltage VB are input to the driver 10 .
  • the driver 10 generates a gate signal GH according to the drive control signal HIN, and supplies the gate signal GH to the gate of the output transistor MH to drive the output transistor MH (control the state of the output transistor MH).
  • a drive control signal LIN received at the control input terminal TM18 is input to the low-side driver 20 .
  • the driver 20 is connected to the ground, and the control power supply voltage VCC is input to the driver 20 .
  • the driver 20 generates a gate signal GL according to the drive control signal LIN, and supplies the gate signal GL to the gate of the output transistor ML to drive the output transistor ML (control the state of the output transistor ML).
  • FIG. 3 shows the waveform of the drive control signal HIN, the waveform of the gate signal GH, the state of the output transistor MH, the waveform of the drive control signal LIN, the waveform of the gate signal GL, the state of the output transistor ML, and the waveform of the output terminal voltage VS. indicate.
  • the high side driver 10 generates and outputs the gate signal GH based on the voltage between the terminals TM11 and TM12, that is, based on the differential voltage (VB-VS). That is, the driver 10 has a high-side output buffer (not shown) that operates using the output terminal voltage VS as a negative power supply voltage and the boot voltage VB as a positive power supply voltage.
  • the high-side output buffer sets the gate signal GH to high level during the high level period of the drive control signal HIN, and sets the gate signal GH to low level during the low level period of the drive control signal HIN.
  • the high level of the gate signal GH has the level of the boot voltage VB
  • the low level of the gate signal GH has the level of the output terminal voltage VS.
  • the signal of interest has a specific voltage level or a specific potential level means that the level of the signal of interest is a specific voltage level or a specific potential level.
  • the concept includes that the level of the signal of interest substantially matches the level of a specific voltage or the level of a specific potential. Therefore, for example, the high-level gate signal GH is equivalent to the level of the boot voltage VB, but strictly speaking, it may differ slightly from the level of the boot voltage VB.
  • the voltage (VB-VS) represents the differential voltage between the terminals TM11 and TM12 with the potential of the terminal TM11 as a reference, and corresponds to the height of the boot voltage VB seen from the output terminal voltage VS.
  • the boot voltage VB is higher than the output terminal voltage VS, and in a stable state, the difference voltage (VB-VS) is stabilized at or near the control power supply voltage VCC.
  • the value of the differential voltage (VB-VS) is stabilized at the same level as the value of the control power supply voltage VCC).
  • the magnitude of the control power supply voltage VCC is greater than the magnitude of the gate threshold voltage of the output transistor MH.
  • the output transistor MH is turned on during the high level period of the gate signal GH (that is, while the gate signal GH has the level of the boot voltage VB), and during the low level period of the gate signal GH (that is, while the gate signal GH is at the level of the boot voltage VB).
  • the output transistor MH is in an off state during the period when the output voltage VS is at the level of the output terminal voltage VS.
  • the output transistor MH is turned on in synchronization with the rising edge of the drive control signal HIN.
  • there is a certain delay from the rising edge of the drive control signal HIN to the turn-on of the output transistor MH this delay is not explicitly shown in FIG. 3).
  • the output transistor MH is turned off in synchronization with the falling edge of the drive control signal HIN. However, there is a certain delay from the falling edge of the drive control signal HIN to the turn-off of the output transistor MH (this delay is not explicitly shown in FIG. 3).
  • the high-side driver 10 is a circuit driven by a power supply voltage VCC2 (here, 5 V) and is a first input stage circuit that outputs a signal obtained by binarizing the drive control signal HIN; It has a first level shifter (neither shown) for level-shifting the level of the output signal of the stage circuit using the control power supply voltage VCC (here, 18 V), and the high side output is based on the signal obtained by the first level shifter.
  • a gate signal GH is output from the buffer.
  • the low-side driver 20 generates and outputs the gate signal GL based on the control power supply voltage VCC. That is, the driver 20 has a low-side output buffer (not shown) that operates using the ground as a negative power supply voltage and using the control power supply voltage VCC as a positive power supply voltage.
  • the low-side output buffer sets the gate signal GL to high level during the high level period of the drive control signal LIN, and sets the gate signal GL to low level during the low level period of the drive control signal LIN.
  • the high level of the gate signal GL has the level of the control power supply voltage VCC
  • the low level of the gate signal GL has the ground potential.
  • the magnitude of the control power supply voltage VCC is greater than the magnitude of the gate threshold voltage of the output transistor ML. Therefore, the output transistor ML is turned on during the high level period of the gate signal GL (that is, while the gate signal GL has the level of the control power supply voltage VCC), and during the low level period of the gate signal GL (that is, the gate signal GL has the ground potential), the output transistor ML is turned off. As a result, the output transistor ML is turned on in synchronization with the rising edge of the drive control signal LIN, but there is a certain delay from the rising edge of the drive control signal LIN to the turning on of the output transistor ML (in without specifying such delay).
  • the output transistor ML is turned off in synchronization with the down edge of the drive control signal LIN, but there is a certain delay from the down edge of the drive control signal LIN to the turn off of the output transistor ML (see FIG. 3). does not specify the delay).
  • the low-side driver 20 is a circuit driven by a power supply voltage VCC2 (here, 5 V) and is a second input stage circuit that outputs a signal obtained by binarizing the drive control signal LIN; It has a second level shifter (neither shown) for level-shifting the level of the output signal of the circuit using the control power supply voltage VCC (here, 18 V), and based on the signal obtained by the second level shifter, from the low side output buffer It outputs the gate signal GL.
  • VCC2 here, 5 V
  • VCC control power supply voltage
  • a bootstrap circuit is formed by the switch circuit 30 and the capacitor CB, and a boot voltage VB is generated by the bootstrap circuit.
  • the switch circuit 30 is provided between the control power supply line to which the control power supply voltage VCC is applied and the boot terminal TM12.
  • the switch driver 40 drives the switch circuit 30 so that the state of the switch circuit 30 becomes the state specified by the switch control circuit 50 .
  • the switch control circuit 50 controls charging of the capacitor CB from the control power supply line through the switch circuit 30, thereby accumulating charges in the capacitor CB so that "(VB-VS)>0".
  • a period consisting of periods P HON , P DD1 , P LON and P DD2 is defined as a unit period, and the unit period is repeated. Assuming that one unit period starts from the period PHON , in each unit period, the period PHON is followed by the period P DD1 , followed by the period P LON , and finally by the period P DD2 .
  • the period PHON is a high-side ON period in which the drive control signal HIN is at high level and the drive control signal LIN is at low level.
  • the output transistors MH and ML are turned on and off, respectively. Therefore, during the high-side ON period PHON , the load current flows through the channel (between the drain and the source) of the output transistor MH, and the output terminal voltage VS at this time approximately matches the power supply voltage VP.
  • the output terminal voltage VS in the high-side ON period PHON is slightly different from the power supply voltage VP depending on the ON resistance and drain current of the output transistor MH.
  • the output terminal voltage VS has the same voltage value as the power supply voltage VP during the high side ON period PHON .
  • the period P DD1 is both off periods in which the drive control signals HIN and LIN are both at low level. Both the output transistors MH and ML are turned off during the both off periods P DD1 . A current flows from the output terminal TM11 toward the load LD immediately before the transition from the high-side ON period PHON to the both-OFF period PDD1 . Then, since the load LD includes an inductive load, as shown in FIG. 4, the current output from the output terminal TM11 to the load LD continues even during both off periods P DD1 following the high side on period PHON. The load current during both off periods P DD1 is supplied through the parasitic diode of the output transistor ML.
  • a current flows from the ground to the load LD via the low-side terminal TM16, the parasitic diode of the output transistor ML, and the output terminal TM11. is lower than 0 V by the voltage drop at (see FIG. 3).
  • the output end voltage VS drops to (-100 V) during both off periods PDD1 .
  • the load current at can flow through the low-side parallel diode.
  • the period PLON is a low-side ON period in which the drive control signal HIN is at low level and the drive control signal LIN is at high level.
  • the output transistors MH and ML are turned off and on, respectively. Therefore, during the low-side ON period P LON , the load current flows through the channel (between the drain and the source) of the output transistor ML, and at this time the output end voltage VS approximately coincides with the ground voltage (0 V).
  • the output terminal voltage VS during the low-side ON period P LON is slightly different from the ground voltage (0 V) depending on the on-resistance and drain current of the output transistor ML.
  • the output terminal voltage VS is 0V during the low-side ON period PLON .
  • the period P DD2 is both off periods in which the drive control signals HIN and LIN are both at low level, like the period P DD1 . Both the output transistors MH and ML are turned off during the both off periods P DD2 . A current flows from the load LD toward the output terminal TM11 immediately before the transition from the low-side ON period PLON to the both-OFF period PDD2 . Then, since the load LD includes an inductive load, as shown in FIG. 5, the current continues to flow from the load LD to the output terminal TM11 during both off periods P DD2 following the low side on period P LON . The load current during both off periods P DD2 flows through the parasitic diode of the output transistor MH.
  • the periods P DD1 and P DD2 are called dead times for suppressing the generation of through current between the terminals TM15 and TM16.
  • the timing may not exist.
  • the load current may always flow from the output terminal TM11 (the connection node between the output transistors MH and ML) to the load LD.
  • FIG. 6 shows the internal configurations of the switch circuit 30, switch driver 40 and switch control circuit 50 according to the first embodiment.
  • the switch circuit 30 is configured by a series circuit of switch elements M1 and M2.
  • the switch elements M1 and M2 are both N-channel MOSFETs, and the switch elements M1 and M2 are hereinafter referred to as transistors M1 and M2.
  • Transistors M1 and M2 have a withstand voltage exceeding the power supply voltage VP (eg 600V).
  • line LN_VCC represents a control power supply line connected to control power supply terminal TM14 (not shown in FIG. 6) to receive control power supply voltage VCC
  • line LN_VB is connected to boot terminal TM12 to receive boot voltage VB.
  • the source of transistor M1 is connected to boot terminal TM12 via line LN_VB. That is, the source of transistor M1 is connected to the boot voltage line LN_VB, and thus the boot voltage VB is applied to the source of transistor M1.
  • the source of the transistor M2 is connected to the control power supply terminal TM14 (see FIG. 1) via the line LN_VCC. That is, the source of the transistor M2 is connected to the control power supply line LN_VCC, so the control power supply voltage VCC is applied to the source of the transistor M2.
  • the drain of transistor M1 and the drain of transistor M2 are commonly connected to each other.
  • the current flowing between the control power supply terminal TM14 and the boot terminal TM12 is referred to by the symbol "IB".
  • the polarity of the current IB flowing from the control power supply terminal TM14 to the boot terminal TM12 is positive.
  • diode M1_D represents the parasitic diode added to transistor M1
  • diode M2_D represents the parasitic diode added to transistor M2.
  • Diode M1_D has a forward direction from the source to the drain of transistor M1.
  • Diode M2_D has a forward direction from the source to the drain of transistor M2.
  • the diode M1_D includes the parallel-connected diode to the transistor M1.
  • a parallel-connected diode for transistor M1 has an anode connected to the source of transistor M1 and a cathode connected to the drain of transistor M1.
  • a separate parallel-connected diode could be connected to transistor M2, in which case diode M2_D would include the parallel-connected diode to transistor M2.
  • a parallel-connected diode for transistor M2 has an anode connected to the source of transistor M2 and a cathode connected to the drain of transistor M2.
  • the switch driver 40 supplies a gate signal SW_G1 to the gate of the transistor M1 to turn on or off the transistor M1, and supplies a gate signal SW_G2 to the gate of the transistor M2 to turn on or off the transistor M2. turn off.
  • the switch driver 40 is provided with a charge pump circuit 41 as a circuit for generating the gate signal SW_G1 and a charge pump circuit 42 as a circuit for generating the gate signal SW_G2.
  • the charge pump circuit 41 has an output node OUT1, which is connected to the gate of the transistor M1.
  • the charge pump circuit 41 outputs the gate signal SW_G1 from the output node OUT1.
  • the charge pump circuit 41 receives the output terminal voltage VS and the boot voltage VB, and also receives the control signal IN1 from the switch control circuit 50 .
  • the charge pump circuit 41 can perform the first charge pump operation according to the control signal IN1.
  • the charge pump circuit 41 In the first charge pump operation, the charge pump circuit 41 generates a first boosted voltage higher than the boot voltage VB at the output node OUT1 based on the boot voltage VB with reference to the potential of the output terminal TM11.
  • the control signal IN1 is a binary signal that takes a value (logical value) of "0" or "1".
  • the control signal IN1 alternates between "0" and "1".
  • the first boosted voltage generated at the output node OUT1 by the first charge pump operation is the voltage (VB+V UP1 ).
  • the voltage (VB+V UP1 ) is a voltage higher than the boot voltage VB by a predetermined voltage V UP1 (V UP1 >0).
  • the charge pump circuit 41 When the control signal IN1 has a value of "1", the charge pump circuit 41 performs a first charge pump operation and outputs a high level gate signal SW_G1 from the output node OUT1.
  • the high level gate signal SW_G1 has the potential of the first boosted voltage (VB+V UP1 ).
  • the control signal IN1 has a value of "0”
  • the first charge pump operation is not performed in the charge pump circuit 41, and the gate signal SW_G1 of low level is output from the output node OUT1.
  • the low level gate signal SW_G1 has the potential of the boot voltage VB.
  • Voltage VUP1 is higher than the gate threshold voltage of transistor M1. Therefore, when the control signal IN1 has a value of "1", the transistor M1 is turned on by applying the first boosted voltage (VB+V UP1 ) as the gate signal SW_G1 to the gate of the transistor M1. On the other hand, when the control signal IN1 has a value of "0", the boot voltage VB is applied to the gate of the transistor M1 as the gate signal SW_G1, thereby turning off the transistor M1.
  • the charge pump circuit 42 has an output node OUT2, which is connected to the gate of the transistor M2.
  • the charge pump circuit 42 outputs the gate signal SW_G2 from the output node OUT2.
  • a control power supply voltage VCC and a ground voltage are input to the charge pump circuit 42 , and a control signal IN ⁇ b>2 is input from the switch control circuit 50 .
  • the charge pump circuit 42 can perform the second charge pump operation according to the control signal IN2.
  • the charge pump circuit 42 In the second charge pump operation, the charge pump circuit 42 generates a second boosted voltage higher than the control power supply voltage VCC at the output node OUT2 based on the control power supply voltage VCC with reference to the ground potential.
  • the control signal IN2 is a binary signal that takes a value (logical value) of "0" or "1".
  • the control signal IN2 alternately takes values of "0" and "1".
  • the second boosted voltage generated at the output node OUT2 by the second charge pump operation is the voltage (VCC+V UP2 ).
  • the voltage (VCC+V UP2 ) is higher than the control power supply voltage VCC by a predetermined voltage V UP2 (V UP2 >0).
  • the charge pump circuit 42 When the control signal IN2 has a value of "1", the charge pump circuit 42 performs a second charge pump operation and outputs a high level gate signal SW_G2 from the output node OUT2.
  • the high level gate signal SW_G2 has the potential of the second boosted voltage (VCC+ VUP2 ).
  • the control signal IN2 has a value of "0”
  • the charge pump circuit 42 does not perform the second charge pump operation and the output node OUT2 outputs a low level gate signal SW_G2.
  • the low level gate signal SW_G2 has the potential of the control power supply voltage VCC.
  • Voltage V UP2 is higher than the gate threshold voltage of transistor M2. Therefore, when the control signal IN2 has a value of "1", the transistor M2 is turned on by applying the second boosted voltage (VCC+V UP2 ) as the gate signal SW_G2 to the gate of the transistor M2. On the other hand, when the control signal IN2 has a value of "0", the transistor M2 is turned off by applying the control power supply voltage VCC as the gate signal SW_G2 to the gate of the transistor M2.
  • a boot voltage VB, an output terminal voltage VS, a control power supply voltage VCC, and a ground voltage are input to the switch control circuit 50 .
  • the control signal IN1 output from the switch control circuit 50 to the charge pump circuit 41 takes a signal level of high level or low level.
  • the high-level control signal IN1 has the potential of the boot voltage VB (however, it may have a potential slightly lower than the boot voltage VB).
  • the low-level control signal IN1 has the potential of the output terminal voltage VS (however, it may have a potential slightly higher than the output terminal voltage VS).
  • the switch control circuit 50 can generate the control signal IN1 by a combination circuit (for example, an inverter circuit) driven using the boot voltage VB as the positive side power supply voltage and the output terminal voltage VS as the negative side power supply voltage.
  • the control signal IN2 output from the switch control circuit 50 to the charge pump circuit 42 takes a signal level of high level or low level.
  • the high-level control signal IN2 has the potential of the control power supply voltage VCC (however, it may have a potential slightly lower than the control power supply voltage VCC).
  • the low-level control signal IN2 has a ground potential (although it may have a potential slightly higher than the ground potential).
  • the switch control circuit 50 can generate the control signal IN2 by a combination circuit (for example, an inverter circuit) driven using the control power supply voltage VCC as the positive power supply voltage and the ground as the negative power supply voltage.
  • the switch control circuit 50 controls the transistors M1 and M2 to turn on or off by generating control signals IN1 and IN2 according to the output terminal voltage VS.
  • the switch control circuit 50 is provided with a negative voltage detection circuit 51 , a high voltage detection circuit 52 and a differential voltage detection circuit 53 in order to properly implement the control.
  • the negative voltage detection circuit 51 detects whether the polarity of the output terminal voltage VS is negative (that is, detects whether the output terminal voltage VS is lower than the ground voltage), and outputs a negative voltage as a signal representing the detection result. It generates and outputs a detection signal Sig_n.
  • the negative voltage detection signal Sig_n is a binary signal that takes a value (logical value) of "0" or "1".
  • the negative voltage detection signal Sig_n has a value of "1” when the polarity of the output terminal voltage VS is negative, and has a value of "0" when the polarity of the output terminal voltage VS is not negative.
  • the threshold voltage Vth_n has a predetermined negative voltage value (eg -10V).
  • the high voltage detection circuit 52 detects whether the output end voltage VS is higher than a predetermined positive threshold voltage Vth_p, and generates and outputs a high voltage detection signal Sig_p as a signal representing the detection result.
  • the high voltage detection signal Sig_p is a binary signal that takes a value (logical value) of "0" or “1".
  • the circuit 52 generates and outputs a signal Sig_p of "1" when the output terminal voltage VS is higher than the threshold voltage Vth_p, and generates and outputs a signal Sig_p of "0" when the output terminal voltage VS is lower than the threshold voltage Vth_p. do.
  • the threshold voltage Vth_p has a positive predetermined voltage value (eg, 30V).
  • the threshold voltage Vth_p is lower than the power supply voltage Vp (eg 600V).
  • the differential voltage detection circuit 53 detects the differential voltage (VB-VS) and generates and outputs a differential voltage detection signal Sig_dff, which is a signal corresponding to the differential voltage (VB-VS).
  • the differential voltage detection signal Sig_dff is a binary signal that takes a value (logical value) of "0" or "1".
  • the circuit 53 generates and outputs a signal Sig_dff of "1" when the difference voltage (VB-VS) is higher than the threshold voltage Vth_dff, and a signal Sig_dff of "0" when the difference voltage (VB-VS) is lower than the threshold voltage Vth_dff. It generates and outputs the signal Sig_dff.
  • the threshold voltage Vth_dff has a positive predetermined voltage value.
  • the threshold voltage Vth_dff may have the same voltage value as the control power supply voltage VCC (here 18V) or a voltage value close thereto.
  • the switch control circuit 50 generates control signals IN1 and IN2 based on the negative voltage detection signal Sig_n, the high voltage detection signal Sig_p, and the differential voltage detection signal Sig_dff. Therefore, the states of the transistors M1 and M2 will be controlled based on the signals Sig_n, Sig_p and Sig_dff.
  • FIG. 10 shows various schematic waveforms according to the reference example.
  • a large charging current IB is supplied to the capacitor CB during the period when the output terminal voltage VS is negative (corresponding to the both-off period PDD1 in FIG. 3).
  • the differential voltage (VB-VS) is equal to or lower than the voltage (VCC-Vf)
  • Vf represents the forward voltage of the diode.
  • the capacitor CB may be overcharged. That is, when the output terminal voltage VS decreases to, for example, (-100 V) during the period when the output terminal voltage VS is negative (corresponding to the both-off period PDD1 in FIG. 3), the voltage across the capacitor CB Capacitor CB may be charged to the extent that a voltage of 100V or more is applied to . Applying such an excessive voltage between the gate and source of the output transistor MH may damage the output transistor MH.
  • the output transistor MH is made of silicon carbide (SiC)
  • SiC silicon carbide
  • the switching circuit 30 is configured with the transistors M1 and M2 to optimize the charging of the capacitor CB.
  • FIG. 11 shows various schematic waveforms according to this embodiment. Also in this embodiment, basically, a large charging current IB is supplied to the capacitor CB during the period when the output terminal voltage VS is negative (corresponding to the both-off period PDD1 in FIG. 3). However, when the differential voltage (VB-VS) reaches a predetermined threshold voltage Vth_dff during the period when the output terminal voltage VS is negative, further charging of the capacitor CB is suppressed. As a result, the charging voltage of the capacitor CB is optimized, and the output transistor MH can be driven safely and properly.
  • both off periods P DD1 _A, P DD1 _B and P DD1 _C, and three both off periods P DD1 are shown.
  • the difference voltage ( VB -VS) is less than the threshold voltage Vth_dff during and before both off periods P DD1 _A. It is assumed that the threshold voltage Vth_dff is reached.
  • FIG. 12 shows the relationship between signals Sig_n, Sig_p and Sig_dff and the states of transistors M1 and M2.
  • the same is true for other signals with a value of "0” or "1” (eg IN1 and IN2).
  • Other similar notations are interpreted similarly.
  • iA and iB each have a value of "0" or "1".
  • the high voltage detection signal Sig_p has a value of "1" during the high-side ON period P HON and both OFF periods P DD2 (see FIG. 3).
  • the negative voltage detection signal Sig_n has a value of "0".
  • the voltage across the capacitor CB approximately matches the voltage VCC.
  • a current corresponding to the consumption current of the circuit driven using the boot voltage VB is supplied from the control power supply line LN_VCC to the boot voltage. flow to line LN_VB.
  • the negative voltage detection signal Sig_n has a value of "1" in both off periods P DD1 (see FIG. 3).
  • the high voltage detection signal Sig_p has a value of “0” because the output terminal voltage VS is negative, but the difference voltage detection signal Sig_dff is the difference voltage (VB ⁇ VS) and the threshold voltage It has a value of "0” or "1” according to the level relationship with Vth_dff.
  • the threshold voltage Vth_dff has a voltage value that is the same as or similar to the control power supply voltage VCC as described above.
  • FIG. 13 shows a detailed timing chart according to this embodiment.
  • FIG. 13 shows waveforms of drive control signal HIN, drive control signal LIN, output terminal voltage VS, high voltage detection signal Sig_p, negative voltage detection signal Sig_n, and differential voltage detection signal Sig_dff from top to bottom.
  • the states of transistors M1 and M2 are also shown.
  • Time t A1 to t A10 are shown in FIG. Let time t Ai+1 be later than time t Ai for any integer i.
  • the j-th down edge occurs in the drive control signal HIN
  • the j-th rising edge occurs in the drive control signal LIN
  • the j-th down edge occurs in the drive control signal LIN
  • the (j+1)-th rising edge occurs in the drive control signal HIN
  • the (j+1)-th down edge occurs in the drive control signal HIN
  • the (j+1)-th rising edge occurs in the drive control signal LIN.
  • j here represents an arbitrary natural number.
  • the operation of the system SYS will be described starting immediately before time t A1 .
  • the timing immediately before time t A1 belongs to the high side ON period PHON (see FIG. 3).
  • the output transistor MH is switched from the ON state to the OFF state based on the falling edge of the drive control signal HIN, so that the output terminal voltage VS decreases from the power supply voltage VP, and the inductive load in the load LD also acts. As a result, the output terminal voltage VS reaches a negative voltage.
  • the value of signal Sig_p switches from “1” to "0” while the value of signal Sig_n changes from “0" to "1”.
  • a down edge occurs in the drive control signal LIN, causing a transition from the low-side ON period PLON to the both-OFF period P DD2 ( see FIG. 3).
  • the output terminal voltage VS rises toward the power supply voltage VP due to the action of the inductive load in the load LD, and exceeds the power supply voltage VP.
  • Both transistors M1 and M2 are switched from on to off.
  • the output terminal voltage VS decreases from the power supply voltage VP, and further the inductive load in the load LD increases.
  • the action causes the output terminal voltage VS to reach a negative voltage.
  • the value of signal Sig_p switches from “1” to "0” while the value of signal Sig_n changes from “0" to “1”. ”.
  • a second embodiment of the present disclosure will be described.
  • the second embodiment and third to fifth embodiments to be described later are embodiments based on the first embodiment.
  • the description of the embodiments also applies to the second to fifth embodiments.
  • the description of the second embodiment may take precedence over any contradictory matters between the first and second embodiments (the third to fifth embodiments described later may also be used). as well).
  • arbitrary plural embodiments can be combined among the first to fifth embodiments.
  • the second and third embodiments may be implemented in combination with each other, and all of the first to fifth embodiments may also be combined.
  • FIG. 14 shows a partial configuration of the semiconductor device 1.
  • Signal generation circuits 54 and 55 shown in FIG. 14 are included in the components of switch control circuit 50 of FIG.
  • the line LN_VB is connected to the boot terminal TM12 to represent the boot voltage line (floating power supply line) to which the boot voltage VB is applied
  • the line LN_VCC is connected to the control power supply terminal TM14 to represent the control power supply voltage VCC.
  • VCC represents the control supply line to which is applied (see also FIG. 1).
  • a line LN_VS represents an output terminal line connected to the output terminal TM11 to which the output terminal voltage VS is applied
  • a line LN_GND represents a ground line connected to the ground terminal TM13 to which a ground potential is applied (see also FIG. 1).
  • the negative voltage detection circuit 51 is connected to lines LN_VB, LN_VS, LN_VCC and LN_GND.
  • the negative voltage detection signal Sig_n (see FIG. 6) output from the negative voltage detection circuit 51 is specifically composed of the negative voltage detection signals Sig_n1 and Sig_n2.
  • Sig_n1 and Sig_n2 are binarized signals each taking a value (logical value) of "0" or "1".
  • the signal Sig_n1 is a negative voltage detection signal Sig_n based on the potential of the output terminal TM11 (therefore, the potential of the output terminal line LN_VS), while the signal Sig_n2 is a negative voltage detection signal Sig_n based on the ground potential.
  • the signals Sig_n1 and Sig_n2 are negative voltage detection signals having the same meaning, except that the reference potential is different.
  • the value of the negative voltage detection signal Sig_n changes according to the magnitude relationship between the output terminal voltage VS and the negative threshold voltage Vth_n.
  • “ and "Sig_n2 1”
  • This circuit simultaneously generates and outputs a signal Sig_n1 of "0" and a signal Sig_n2 of "0".
  • the low level signal Sig_n1 has a value of "0” and the high level signal Sig_n1 has a value of "1".
  • the high-level signal Sig_n1 has the potential of the boot voltage VB (and thus the potential of the line LN_VB), and the low-level signal Sig_n1 has the potential of the output terminal voltage VS (and thus the potential of the line LN_VS).
  • the low level signal Sig_n2 has a value of "0” while the high level signal Sig_n2 has a value of "1".
  • the high-level signal Sig_n2 has the potential of the control power supply voltage VCC (and thus the potential of the line LN_VCC), and the low-level signal Sig_n2 has the ground potential (and thus the potential of the line LN_GND).
  • the high voltage detection circuit 52 is connected to lines LN_VB, LN_VS, LN_VCC and LN_GND.
  • the high voltage detection signal Sig_p (see FIG. 6) output from the high voltage detection circuit 52 is specifically composed of the high voltage detection signals Sig_p1 and Sig_p2.
  • Sig_p1 and Sig_p2 are binarized signals each taking a value (logical value) of "0" or "1".
  • the signal Sig_p1 is a high voltage detection signal Sig_p based on the potential of the output terminal TM11 (therefore, the potential of the output terminal line LN_VS), while the signal Sig_p2 is a high voltage detection signal Sig_p based on the ground potential.
  • the signals Sig_p1 and Sig_p2 are high voltage detection signals having the same meaning, except that the reference potential is different.
  • the value of the high voltage detection signal Sig_p changes according to the magnitude relationship between the output terminal voltage VS and the positive threshold voltage Vth_p.
  • “ and "Sig_p2 1”
  • the circuit 52 simultaneously generates and outputs the signal Sig_p1 of "1” and the signal Sig_p2 of “1” when the output terminal voltage VS is higher than the threshold voltage Vth_p, and outputs the signal Sig_p1 of "1” when the output terminal voltage VS is lower than the threshold voltage Vth_p
  • This circuit simultaneously generates and outputs a signal Sig_p1 of "0” and a signal Sig_p2 of "0".
  • the low level signal Sig_p1 has a value of "0” while the high level signal Sig_p1 has a value of "1".
  • the high-level signal Sig_p1 has the potential of the boot voltage VB (and thus the potential of the line LN_VB), and the low-level signal Sig_p1 has the potential of the output terminal voltage VS (and thus the potential of the line LN_VS).
  • the low level signal Sig_p2 has a value of "0” while the high level signal Sig_p2 has a value of "1".
  • the high-level signal Sig_p2 has the potential of the control power supply voltage VCC (and thus the potential of the line LN_VCC), and the low-level signal Sig_p2 has the ground potential (and thus the potential of the line LN_GND).
  • the signal generation circuit 54 is connected to the lines LN_VB and LN_VS, and drives the boot voltage VB as the positive side power supply voltage and the output terminal voltage VS as the negative side power supply voltage.
  • the signal generation circuit 54 generates the control signal IN1 based on the negative voltage detection signal Sig_n1 from the negative voltage detection circuit 51 and the high voltage detection signal Sig_p1 from the high voltage detection circuit 52, and supplies the control signal IN1 to the charge pump circuit 41. do.
  • the differential voltage detection circuit 53 of FIG. 6 is included in the signal generation circuit 54, and the signal generation circuit 54 appropriately controls the transistor M1 by generating the control signal IN1 in consideration of the differential voltage (VB-VS) as well. See Figure 12).
  • the low level control signal IN1 has a value of "1" while the high level control signal IN1 has a value of "0".
  • the low-level control signal IN1 has the potential of the output terminal voltage VS (and thus the potential of the line LN_VS), and the high-level control signal IN1 has the potential of the boot voltage VB (and thus the potential of the line LN_VB).
  • the signal generation circuit 55 is connected to the lines LN_VCC and LN_GND, and drives the control power supply voltage VCC as the positive power supply voltage and the ground voltage as the negative power supply voltage.
  • the signal generation circuit 55 generates a control signal IN2 based on the negative voltage detection signal Sig_n2 from the negative voltage detection circuit 51 and the high voltage detection signal Sig_p2 from the high voltage detection circuit 52, and supplies the control signal IN2 to the charge pump circuit 42. do.
  • the low level control signal IN2 has a value of "1" while the high level control signal IN2 has a value of "0".
  • the low-level control signal IN2 has the ground potential (therefore, the potential of the line LN_GND), and the high-level control signal IN2 has the potential of the control power supply voltage VCC (therefore, the potential of the line LN_VCC).
  • the charge pump circuit 41 is connected to lines LN_VB and LN_VS, and executes or disables the above-described first charge pump operation based on the control signal IN1.
  • a charge pump circuit 42 is connected to lines LN_VCC and LN_GND and performs or disables the second charge pump operation described above based on control signal IN2.
  • a control signal IN1 based on the potential of the output terminal voltage VS is required, and a circuit (54) for generating the control signal IN1. requires a negative voltage detection signal and a high voltage detection signal based on the potential of the output terminal voltage VS.
  • the control signal IN2 whose reference is the ground potential is required.
  • a negative voltage detection signal and a high voltage detection signal referenced to are required. Therefore, the negative voltage detection circuit 51 simultaneously generates the negative voltage detection signals Sig_n1 and Sig_n2, and the high voltage detection circuit 52 simultaneously generates the high voltage detection signals Sig_p1 and Sig_p2.
  • a virtual configuration in which the negative voltage detection circuit 51 generates only a negative voltage detection signal based on the ground potential is also considered.
  • a level shifter is required to generate a negative voltage detection signal based on the potential of the output terminal voltage VS from a negative voltage detection signal based on the ground potential, but it is extremely difficult to realize such a level shifter. .
  • the reference potential (VS) after the level shift fluctuates between positive and negative when viewed from the reference potential (ground potential) before the level shift, and it is impossible or extremely difficult to create a level shifter that can tolerate such fluctuations. Have difficulty.
  • FIG. 15 shows a circuit diagram of the negative voltage detection circuit 51 that enables generation of the above-described signals Sig_n1 and Sig_n2.
  • 15 includes transistors 211, 212, 223-225, 231, 234-236 and 252; resistors 221, 222, 232, 233 and 251;
  • Current limiter 240 consists of a series circuit of a plurality of resistors. However, the current limiter 240 may be composed of a single resistor.
  • Transistors 211, 212, 224, 235 and 252 are P-channel MOSFETs, and transistors 223, 225, 231, 234 and 236 are N-channel MOSFETs.
  • the negative voltage detection circuit 51 includes a current path CP_ngnd provided between the boot voltage line LN_VB and the ground line LN_GND, a current path CP_nvs provided between the boot voltage line LN_VB and the output terminal line LN_VS, have FIG. 16 is a diagram clearly showing the current paths CP_nvs and CP_ngnd in dashed frames on the basis of FIG. 15 .
  • a current mirror circuit 210 is formed by transistors 211 and 212 . Among them, the transistor 211 is a current mirror transistor inserted on the current path CP_nvs, and the transistor 212 is a current mirror transistor inserted on the current path CP_ngnd.
  • a transistor 212, a resistor 251, a transistor 252, a current limiter 240, a transistor 231, a resistor 232 and a transistor 236 are located on the current path CP_ngnd.
  • a transistor 211, a resistor 221, a resistor 222 and a transistor 223 are positioned on the current path CP_nvs.
  • An output terminal voltage VS (target voltage) whose polarity varies between positive and negative when viewed from the ground is applied to the output terminal line LN_VS. This variation is transmitted to boot voltage LN_VB via bootstrap capacitor CB.
  • the differential voltage (VB-VS) in the stable state is 18V
  • the output terminal voltage VS fluctuates in the voltage range from -100V to 600V.
  • the absolute value (100 V) of the negative output terminal voltage VS in both off periods P DD1 is greater than the differential voltage (VB ⁇ VS) in the stable state. Therefore, the boot voltage VB, like the output terminal voltage VS, varies in polarity between positive and negative when viewed from the ground.
  • a current corresponding to the output terminal voltage VS (a current in a direction corresponding to the polarity of the output terminal voltage VS) may flow through the current path CP_ngnd in FIG.
  • a current corresponding to the current in the current path CP_ngnd flows through the current path CP_nvs.
  • the presence or absence of a current in the current path CP_ngnd, and the magnitude and direction of the current when the current flows in the current path CP_ngnd depend on the output terminal voltage VS.
  • a detection signal generation circuit 220 provided in the negative voltage detection circuit 51 generates and outputs a negative voltage detection signal Sig_n1 based on the current in the current path CP_nvs. Specifically, for example, the detection signal generation circuit 220 generates and outputs the negative voltage detection signal Sig_n1 by converting the current in the current path CP_nvs into a voltage based on the potential of the output terminal line LN_VS.
  • the current in the current path CP_nvs may flow through the channel of the MOSFET provided on the current path CP_nvs, or may flow through the parasitic diode of the MOSFET provided on the current path CP_nvs.
  • a detection signal generation circuit 230 provided in the negative voltage detection circuit 51 generates and outputs a negative voltage detection signal Sig_n2 based on the current in the current path CP_ngnd. Specifically, for example, the detection signal generation circuit 230 generates and outputs the negative voltage detection signal Sig_n2 by converting the current in the current path CP_ngnd into a voltage based on the ground potential.
  • the current in the current path CP_ngnd may flow through the channel of the MOSFET provided on the current path CP_ngnd, or may flow through the parasitic diode of the MOSFET provided on the current path CP_ngnd.
  • the detection signal generation circuit 220 can be considered to be composed of resistors 221 and 222 and transistors 223-225.
  • the resistors 221 and 222 constitute a first resistor section provided in series with the transistor 211 and inserted between the node n1_pre and the output terminal line LN_VS.
  • the transistors 224 and 225 form a first binarization circuit that binarizes the voltage at the node n1_pre based on the potential of the output terminal line LN_VS to generate the detection signal Sig_n1.
  • a high voltage detection signal Sig_p1 supplied from the high voltage detection circuit 52 is input to the gate of the transistor 223 .
  • the transistor 223 functions as an adjustment circuit that adjusts the resistance value between the node n1_pre and the output terminal line LN_VS, and the significance of this adjustment will be described later.
  • the detection signal generation circuit 230 can be considered to be composed of resistors 232 and 233 and transistors 231 and 234-236.
  • the resistor 232 constitutes a second resistor section provided in series with the transistor 212 and inserted between the node n2_pre and the ground line LN_GND.
  • the resistor 233 and the transistor 234 form a second binarization circuit that binarizes the voltage at the node n2_pre based on the potential of the ground line LN_GND to generate the detection signal Sig_n2.
  • the detection signal Sig_n1 becomes low level (“0”)
  • the detection signal Sig_n2 also becomes low level (“0”)
  • the detection signal Sig_n1 becomes high level (“1”).
  • the detection signals Sig_n1 and Sig_n2 are generated at the same time so that the detection signal Sig_n2 is also at a high level (“1”) when it becomes (however, a minute time lag may exist).
  • the transistor 235 is provided to prevent the voltage of the node n2_pre from excessively increasing in the process in which the output terminal voltage VS rises from about 0V toward the power supply voltage VP. rise is restrained.
  • the transistor 236 is provided to prevent the voltage of the node n2_pre from dropping excessively when the output terminal voltage VS becomes negative (for example, when it becomes ⁇ 100 V). decrease in
  • Each source of transistors 211 and 212 is connected to boot voltage line LN_VB.
  • the gates of transistors 211, 212 and 252 are commonly connected together.
  • Each gate of transistors 211, 212 and 252 is connected through resistor 251 to boot voltage line LN_VB.
  • the drain of transistor 212 is connected to the source of transistor 252 .
  • In transistor 252 the drain and gate are shorted.
  • the drain of transistor 252 is connected to the drain of transistor 231 through current limiter 240 .
  • a gate of the transistor 231 is connected to the control power supply line LN_VCC.
  • the source of transistor 231 is connected to node n2_pre.
  • Node n2_pre is connected to ground line LN_GND via resistor 232 .
  • the source and gate of the transistor 235 and one end of the resistor 233 are connected to the control power supply line LN_VCC.
  • the other end of resistor 233 is connected to the drain of transistor 234 at node n2.
  • the drains of transistors 235 and 236 and the gate of transistor 234 are connected to node n2_pre.
  • the gate and source of transistor 236 and the source of transistor 234 are connected to ground line LN_GND.
  • the drain of the transistor 211 is connected to the node n1_pre.
  • One end of the resistor 221 is connected to the node n1_pre, and the other end of the resistor 221 is connected to one end of the resistor 222 and the drain of the transistor 223 .
  • the other end of the resistor 222 and the source of the transistor 223 are connected to the output terminal line LN_VS.
  • the source of transistor 224 is connected to boot voltage line LN_VB.
  • the drains of transistors 224 and 225 are connected together at node n1.
  • the source of transistor 225 is connected to output terminal line LN_VS.
  • Each gate of transistors 224 and 225 is connected to node n1_pre.
  • the signal generated at the node n1 is the negative voltage detection signal Sig_n1.
  • An inverter circuit is formed by the transistors 224 and 225, and the inverter circuit (224, 225) generates a negative voltage detection signal Sig_n1 corresponding to the voltage of the node n1_pre at the node n1.
  • the resistors 221 and 222 and the transistor 223 form an inverter gate signal generation circuit that generates gate signals to the inverter circuits (224, 225).
  • the signal generated at the node n2 is the negative voltage detection signal Sig_n2.
  • Transistor 234 cooperates with resistor 233 to generate negative voltage detection signal Sig_n2 corresponding to the voltage of node n2_pre at node n2.
  • the high level and low level are defined as follows for the potentials (voltage levels) of the nodes n1_pre and n2_pre.
  • the transistor 224 When the potential of the node n1_pre is high level, the transistor 224 is turned off and the transistor 225 is turned on, and the signal Sig_n1 becomes low level.
  • the transistor 224 When the potential of the node n1_pre is low level, the transistor 224 is turned on and the transistor 225 is turned off. Then the signal Sig_n1 becomes high level.
  • the transistor 234 is on and the signal Sig_n2 is low, and when the potential of the node n2_pre is low, the transistor 234 is off and the signal Sig_n2 is high.
  • FIG. 17 The static operation of the negative voltage detection circuit 51 will be described with reference to FIGS. 17 and 18.
  • FIG. 17 The static operation of the negative voltage detection circuit 51 will be described with reference to FIGS. 17 and 18.
  • FIG. 17 shows the state of the negative voltage detection circuit 51 when the value of the output terminal voltage VS is consistent with a predetermined voltage VSn1 lower than the threshold voltage Vth_n and stable.
  • a current flows from the ground line LN_GND to the boot voltage line LN_VB.
  • a negative potential is applied to the gate of the transistor 234, so the transistor 234 is turned off.
  • the detection signal Sig_n2 becomes high level.
  • the transistor 211 is off because no voltage is applied between the gate and source of the transistor 211 to turn on the transistor 211 . Therefore, in the state of FIG. 17, the node n1_pre becomes low level (the node n1_pre has the potential of the output terminal line LN_VS), and as a result the detection signal Sig_n1 becomes high level.
  • FIG. 18 shows the state of the negative voltage detection circuit 51 when the output terminal voltage VS is consistent with a predetermined voltage VSn2 higher than the threshold voltage Vth_n and is stable.
  • the voltage VSn2 is, for example, 0V or equal to the power supply voltage VP.
  • the transistor 212 is turned on and current flows from the boot voltage line LN_VB to the ground line LN_GND.
  • the node n2_pre becomes high level and the detection signal Sig_n2 becomes low level.
  • a drain current corresponding to the drain current of the transistor 212 flows through the transistor 211, so that the node n1_pre becomes high level, and as a result, the detection signal Sig_n1 becomes low level.
  • the negative voltage detection circuit 51 is a circuit that switches each negative voltage detection signal (Sig_n1, Sig_n2) between a high level and a low level according to the level relationship between the output terminal voltage VS and the threshold voltage Vth_n. It may be interpreted as having a constant voltage width. When interpreted in this way, the voltage VSn1 is lower than the lower limit of the voltage width at the threshold voltage Vth_n, and the voltage VSn2 is higher than the upper limit of the voltage width at the threshold voltage Vth_n. When the output terminal voltage VS falls within the voltage width of the threshold voltage Vth_n, each negative voltage detection signal (Sig_n1, Sig_n2) may have an intermediate potential that is neither classified as high level nor low level. However, in the semiconductor device 1, the level relationship between the output terminal voltage VS and the threshold voltage Vth_n changes rapidly in the fluctuation of the output terminal voltage VS, so no particular problem occurs.
  • FIGS. 19 to 21 A total of six states ST_n1, ST_n2a, ST_n2b, ST_n3, ST_n4 and ST_n5 are shown in FIGS. It is assumed that these six states are states when the differential voltage (VB-VS) is stabilized near the threshold voltage Vth_dff.
  • the state ST_n1 shown on the left side of FIG. 19 as a starting point. Then, the state ST_n1 is changed to the states ST_n2a, ST_n2b, ST_n3, ST_n4, and ST_n5 in this order, and the operation to return to the state ST_n1 is repeated.
  • a period during which the state of the negative voltage detection circuit 51 is in the state ST_n1 may be regarded as the first period, and a period during which the state of the negative voltage detection circuit 51 is in the state ST_n2a or ST_n2b may be regarded as the second period. Furthermore, the periods during which the negative voltage detection circuit 51 is in states ST_n3, ST_n4, and ST_n5 can be regarded as third, fourth, and fifth periods, respectively. Focusing on the negative voltage detection circuit 51, when each period is grasped as described above, in the semiconductor device 1, the first period, the second period, the third period, the fourth period, the fifth period, and then the fifth period. The sequence back to one period will be repeated.
  • a transient response occurs in the operation of the negative voltage detection circuit 51 in the process of changing the output terminal voltage VS.
  • the timing of switching from "VS>Vth_n” to "VS ⁇ Vth_n” and the level of the negative voltage detection signals Sig_n1 and Sig_n2 change from low level ("0") to A lag may occur between the timing of switching to high level (“1”) and the timing.
  • State ST_n1 corresponds to a state in which the output terminal voltage VS is sufficiently high during the high-side ON period PHON and substantially matches the power supply voltage VP.
  • the transistor 212 is turned on and current flows through the current path CP_ngnd. That is, current flows from the boot voltage line LN_VB through the transistors 212 and 252, the current limiting section 240, the transistor 231 and the resistor 232 toward the ground line LN_GND.
  • the voltage drop across resistor 232 at this time is greater than the gate threshold voltage of transistor 234 . Therefore, in the state ST_n1, the potential of the node n2_pre becomes high level, the transistor 234 is turned on, and the detection signal Sig_n2 becomes low level (that is, substantially has the ground potential).
  • the transistor 211 is also turned on in conjunction with the turning on of the transistor 212, and current flows through the current path CP_nvs. That is, current flows from the boot voltage line LN_VB to the output terminal line LN_VS via the transistor 211 and the inverter gate signal generation circuits (221 to 223).
  • the high voltage detection signal Sig_p1 is at high level, and the transistor 223 is turned on at this time. Therefore, in the state ST_n1, the potential of the node n1_pre becomes higher than the output terminal voltage VS by the voltage drop across the resistor 221 due to the drain current of the transistor 211 (on-resistance of the transistor 223 is considered sufficiently small and ignored). At this time, the potential of the node n1_pre corresponds to high level. Therefore, in the state ST_n1, the detection signal Sig_n1 becomes low level (that is, has substantially the same potential as the output terminal voltage VS).
  • State ST_n2a (see the right side of FIG. 19) is a state in which the output terminal voltage VS drops from the level of the power supply voltage VP due to the transition from the high-side ON period PHON to the both-OFF period PDD1 . However, in the state ST_n2a, it is assumed that the output terminal voltage VS is higher than the threshold voltage Vth_p (>0) for the high voltage detection circuit 52 .
  • the discharge of the accumulated charge of each capacitive component associated with the current path CP_ngnd progresses. . If the discharge of the stored charge proceeds from the boot voltage line LN_VB to the ground line LN_GND, the transistor 212 is on, and vice versa, the transistor 212 is off. In any case, in the state ST_n2a, the current flows from the node n2_pre to the ground, or the accumulated charge in the gate capacitance of the transistor 234 is not completely discharged, so that the transistor 234 is turned on continuously from the state ST_n1. state, so the signal Sig_n2 is at a low level.
  • the discharging of the accumulated charges in the gate capacitance of the inverter circuits (224, 225) proceeds.
  • the path of this discharge includes a path through the parasitic diode of the transistor 211 and a path through the inverter gate signal generation circuits (221 to 223).
  • the current flow through the former path is particularly illustrated. Since the resistance value of the resistor 221 is relatively large here, the discharge through the former path is dominant, and the potential of the node n1_pre turns off the transistor 224 and turns on the transistor 225, so that the signal Sig_n1 becomes low level.
  • the transition from the high-side ON period PHON to the both-OFF period PDD1 causes the output terminal voltage VS to decrease from the level of the power supply voltage VP. state.
  • the output terminal voltage VS is near the threshold voltage Vth_n ( ⁇ 0) for the negative voltage detection circuit 51 .
  • the transistor 211 is also turned off in conjunction with the turning off of the transistor 212 .
  • the discharge path of the charge accumulated in the gate capacitance of the inverter circuits (224, 225) is the path through the inverter gate signal generation circuits (221-223).
  • the high voltage detection signal Sig_p1 is at low level, so the transistor 223 is off.
  • the discharge of the charge stored in the gate capacitance of the inverter circuits (224, 225) progresses to such an extent that the potential of the node n1_pre is classified as low level. Therefore, in the state ST_n2b, the potential of the node n1_pre becomes sufficiently close to the output terminal voltage VS, thereby generating an up edge in the signal Sig_n1.
  • the output terminal voltage VS completes the drop through the transition from the high side ON period PHON to the both OFF period P DD1 , and the output terminal voltage VS drops to It is the state with the lowest potential (eg -100V).
  • the current limiter 240 keeps the current of the current path CP_ngnd low in the state ST_n3. That is, the current flowing from the ground line LN_GND to the boot voltage line LN_VB (so-called reverse current) is suppressed.
  • the transistor 211 is also turned off in conjunction with the turning off of the transistor 212 .
  • the discharge of the gate capacitance of the inverter circuits (224, 225) has already been completed and the potential of the node n1_pre has already transitioned to a low level. The potential remains low. Therefore, in state ST_n3, signal Sig_n1 is at high level. Incidentally, in the state ST_n3, the high voltage detection signal Sig_p1 is at low level, so the transistor 223 is off.
  • State ST_n4 corresponds to a state in which the output terminal voltage VS substantially coincides with 0 V (specific voltage) during the low-side ON period PLON .
  • the boot voltage VB is higher than the ground voltage by the voltage difference (VB-VS), so the transistor 212 is turned on and current flows through the current path CP_ngnd. That is, current flows from the boot voltage line LN_VB through the transistors 212 and 252, the current limiting section 240, the transistor 231 and the resistor 232 toward the ground line LN_GND.
  • the voltage drop across resistor 232 at this time is greater than the gate threshold voltage of transistor 234 . Therefore, in the state ST_n4, the potential of the node n2_pre becomes high level, so the transistor 234 is turned on and the detection signal Sig_n2 becomes low level (that is, substantially has the ground potential).
  • the transistor 211 is also turned on in conjunction with the turning on of the transistor 212, and current flows through the current path CP_nvs. That is, current flows from the boot voltage line LN_VB to the output terminal line LN_VS via the transistor 211 and the inverter gate signal generation circuits (221 to 223).
  • the potential of the node n1_pre becomes high level
  • the detection signal Sig_n1 becomes low level (that is, has substantially the same potential as the output terminal voltage VS).
  • State ST_n4 (see the left side of FIG. 21) is similar to state ST_n1 (see the left side of FIG. 19). However, the output terminal voltage VS in the state ST_n1 is higher than the threshold voltage Vth_p, and the output terminal voltage VS in the state ST_n4 is lower than the threshold voltage Vth_p. In other words, the boot voltage VB (eg 18V) in state ST_n4 is lower than the boot voltage VB (eg 18V+600V) in state ST_n1. Therefore, the magnitude of the current flowing through the current path CP_ngnd is smaller in the state ST_n4 than in the state ST_n1. It is smaller in state ST_n4 than in state ST_n1.
  • the magnitude of the current flowing through the current path CP_ngnd when the transistor 212 is on is basically determined by the control power supply voltage VCC and each value of the resistor 232 .
  • the potential of the node n1_pre is set to the extent that the signal Sig_n1 becomes low level. need to raise.
  • a transistor 223 is provided in consideration of this.
  • the high voltage detection signal Sig_p1 is at low level, and the transistor 223 is turned off at this time. Therefore, in state ST_n4, the resistance between node n1_pre and output terminal line LN_VS is greater than in state ST_n1. As a result, even in the state ST_n4, the potential of the node n1_pre increases to such an extent that the signal Sig_n1 becomes low level.
  • the detection signal generation circuit 220 has an adjustment circuit (223) that adjusts the resistance value between the node n1_pre and the output terminal line LN_VS, and responds to the high voltage detection signal Sig_p1 (that is, the output terminal voltage VS increases from the positive threshold voltage Vth_p). higher), the resistance value between the node n1_pre and the output terminal line LN_VS is changed.
  • State ST_n5 (see the right side of FIG. 21) is a state in which the output terminal voltage VS rises from the ground level as a result of the transition from the low-side ON period PLON to the both-OFF period PDD2 .
  • the transistor 212 In the state ST_n5, as in the state ST_n4, the transistor 212 is turned on, current flows through the current path CP_ngnd, and the potential of the node n2_pre becomes high level, so the transistor 234 is turned on. Therefore, in state ST_n5, the detection signal Sig_n2 is at low level (that is, has substantially the ground potential) as in state ST_n4.
  • the transistor 211 is also turned on in conjunction with the turning on of the transistor 212, and current flows through the current path CP_nvs. That is, current flows from the boot voltage line LN_VB to the output terminal line LN_VS via the transistor 211 and the inverter gate signal generation circuits (221 to 223).
  • the potential of the node n1_pre becomes high level
  • the detection signal Sig_n1 becomes low level (that is, has substantially the same potential as the output terminal voltage VS).
  • the high voltage detection signal Sig_p1 changes from low level to high level in the process in which the output terminal voltage VS rises from the ground level, and the transistor 223 transitions from the off state to the on state in response to this change. However, when the transistor 223 is turned off, the drain current of the transistor 211 is sufficiently increased as the boot voltage VB rises, so the signal Sig_n1 continues from the state ST_n4 and remains low even in the state ST_n5.
  • the node n2_pre would be affected by the drain-source capacitance of the transistor 231 in the process of raising the output terminal voltage VS from the ground level to the power supply voltage VP (for example, 600 V) level. potential may rise excessively (for example, it may momentarily rise to about 200 V).
  • the above excessive increase can be suppressed and the transistor 234 can be protected.
  • FIG. FIG. 22 schematically shows rough waveforms of some signals relating to the negative voltage detection circuit 51.
  • FIG. FIG. 23 schematically shows schematic waveforms of some signals related to the virtual negative voltage detection circuit.
  • the transistor 223 is provided in the negative voltage detection circuit 51 as described above and the transistor 223 is turned on/off based on the signal Sig_p1.
  • the virtual negative voltage detection circuit has a configuration obtained by removing the transistor 223 from the negative voltage detection circuit 51 .
  • the node n1_pre in the virtual negative voltage detection circuit is represented by n1_pre'
  • the negative voltage detection signal Sig_n1 in the virtual negative voltage detection circuit is represented by Sig_n1'.
  • the charge of the node n1_pre is quickly discharged and the signal Sig_n1 quickly switches to high level in the process of the output terminal voltage VS decreasing due to the transition from the high-side ON period PHON to both OFF periods PDD1 .
  • the node n1_pre' discharge speed is slow in the process of decreasing the output terminal voltage VS because the resistance value of the node n1_pre' is always high. As a result, it can be seen that the generation of the rising edge of the negative voltage detection signal (Sig_n1') is delayed.
  • a delay in the generation of the rising edge of the negative voltage detection signal results in a reduction in the charging time of the bootstrap capacitor CB based on the negative output terminal voltage VS (a delay in charging start timing).
  • the second embodiment includes the following examples EX2_1 to EX2_3.
  • Example EX2_1 If it is required to lower the potential of the node n1_pre at a higher speed in the process of lowering the output terminal voltage VS from the power supply voltage VP, the transistor shown in FIG. A variant is also possible in which the drain of 223 is directly connected to node n1_pre.
  • Example EX2_2 Alternatively, depending on the speed or amount of change in the output terminal voltage VS, the gate capacitance of the inverter circuits (224, 225), etc., the delay of the negative voltage detection signal Sig_n1 may not be a problem even if the transistor 223 does not exist. . In this case, it is possible to omit the transistor 223 in the negative voltage detection circuit 51 as shown in FIG.
  • the negative voltage detection circuit 51 shown in the second embodiment can be applied not only to the semiconductor device 1 having the configuration of FIG. 1, but also to any device that requires a plurality of negative voltage detection signals based on different potentials. is.
  • a third embodiment of the present disclosure will be described.
  • a high voltage detection circuit 52 (see FIG. 14) capable of generating high voltage detection signals Sig_p1 and Sig_p2 will be described.
  • FIG. 26 shows a circuit diagram of the high voltage detection circuit 52 according to the third embodiment.
  • 26 includes transistors 311, 312, 323-327, 331, 334-338 and 352; resistors 321, 322, 332, 333 and 351;
  • Current limiter 340 consists of a series circuit of a plurality of resistors and a plurality of Zener diodes.
  • the number of resistors forming the current limiting section 340 may be one, and the number of Zener diodes forming the current limiting section 340 may be one.
  • Transistors 311, 312, 324, 326, 335, 337 and 352 are P-channel MOSFETs and transistors 323, 325, 327, 331, 334, 336 and 338 are N-channel MOSFETs.
  • the high voltage detection circuit 52 includes a current path CP_pgnd provided between the boot voltage line LN_VB and the ground line LN_GND, a current path CP_pvs provided between the boot voltage line LN_VB and the output terminal line LN_VS, have FIG. 27 is a diagram clearly showing the current paths CP_pvs and CP_pgnd in a dashed frame with FIG. 26 as a reference.
  • a current mirror circuit 310 is formed by transistors 311 and 312 . Among them, the transistor 311 is a current mirror transistor inserted on the current path CP_pvs, and the transistor 312 is a current mirror transistor inserted on the current path CP_pgnd.
  • a transistor 312, a resistor 351, a transistor 352, a current limiter 340, a transistor 331, a resistor 332 and a transistor 336 are located on the current path CP_pgnd.
  • a transistor 311, a resistor 321, a resistor 322 and a transistor 323 are positioned on the current path CP_pvs.
  • An output terminal voltage VS (target voltage) whose polarity varies between positive and negative when viewed from the ground is applied to the output terminal line LN_VS. This variation is transmitted to boot voltage LN_VB via bootstrap capacitor CB.
  • the differential voltage (VB-VS) in the stable state is 18V
  • the output terminal voltage VS fluctuates in the voltage range from -100V to 600V.
  • the absolute value (100 V) of the negative output terminal voltage VS in both off periods P DD1 is greater than the differential voltage (VB ⁇ VS) in the stable state. Therefore, the boot voltage VB, like the output terminal voltage VS, varies in polarity between positive and negative when viewed from the ground.
  • a current corresponding to the output terminal voltage VS may flow through the current path CP_pgnd in FIG. Flows to CP_pvs.
  • the presence or absence of a current in the current path CP_pgnd, and the magnitude and direction of the current when the current flows in the current path CP_pgnd depend on the output end voltage VS.
  • a detection signal generation circuit 320 provided in the high voltage detection circuit 52 generates and outputs a high voltage detection signal Sig_p1 based on the current in the current path CP_pvs. Specifically, for example, the detection signal generation circuit 320 generates and outputs the high voltage detection signal Sig_p1 by converting the current in the current path CP_pvs into a voltage based on the potential of the output terminal line LN_VS.
  • the current in the current path CP_pvs may flow through the channel of the MOSFET provided on the current path CP_pvs, or may flow through the parasitic diode of the MOSFET provided on the current path CP_pvs.
  • a detection signal generation circuit 330 provided in the high voltage detection circuit 52 generates and outputs a high voltage detection signal Sig_p2 based on the current in the current path CP_pgnd. Specifically, for example, the detection signal generation circuit 330 generates and outputs the high voltage detection signal Sig_p2 by converting the current in the current path CP_pgnd into a voltage based on the ground potential.
  • the current in the current path CP_pgnd may flow through the channel of the MOSFET provided on the current path CP_pgnd, or may flow through the parasitic diode of the MOSFET provided on the current path CP_pgnd.
  • the detection signal generation circuit 320 can be considered to be composed of resistors 321 and 322 and transistors 323-327.
  • the resistors 321 and 322 constitute a first resistor section provided in series with the transistor 311 and inserted between the node p1_pre and the output terminal line LN_VS.
  • the transistors 324 to 327 form a first binarization circuit that binarizes the voltage at the node p1_pre based on the potential of the output terminal line LN_VS to generate the detection signal Sig_p1.
  • a negative voltage detection signal Sig_n1 supplied from the negative voltage detection circuit 51 is input to the gate of the transistor 323 .
  • the transistor 323 functions as an adjustment circuit that adjusts the resistance value between the node p1_pre and the output terminal line LN_VS, and the significance of this adjustment will be described later.
  • the detection signal generation circuit 330 can be considered to be composed of resistors 332 and 333 and transistors 331 and 334-338.
  • the resistor 332 constitutes a second resistor section provided in series with the transistor 312 and inserted between the node p2_pre and the ground line LN_GND.
  • a resistor 333 and transistors 334, 337 and 338 form a second binarization circuit that binarizes the voltage at the node p2_pre based on the potential of the ground line LN_GND to generate the detection signal Sig_p2.
  • the detection signal Sig_p1 when the detection signal Sig_p1 becomes low level (“0”), the detection signal Sig_p2 also becomes low level (“0”), and the detection signal Sig_p1 becomes high level (“1”).
  • the detection signals Sig_p1 and Sig_p2 are generated at the same time so that the detection signal Sig_p2 is also at high level (“1”) when it becomes (however, a minute time lag may exist).
  • the transistor 335 is provided to prevent the voltage of the node p2_pre from excessively increasing during the process in which the output terminal voltage VS rises from about 0V toward the power supply voltage VP. rise is restrained.
  • the transistor 336 is provided to prevent the voltage of the node p2_pre from dropping excessively when the output terminal voltage VS becomes negative (for example, when it becomes -100V). decrease in
  • Each source of transistors 311 and 312 is connected to boot voltage line LN_VB.
  • the gates of transistors 311, 312 and 352 are commonly connected to each other.
  • Each gate of transistors 311 , 312 and 352 is connected through resistor 351 to boot voltage line LN_VB.
  • the drain of transistor 312 is connected to the source of transistor 352 .
  • the drain and gate are shorted.
  • the drain of transistor 352 is connected to the drain of transistor 331 through current limiter 340 .
  • the current limiter 340 is configured by a series circuit of a plurality of Zener diodes and a plurality of resistors, one end of the series circuit is connected to the drain of the transistor 352 and the other end of the series circuit is connected to the transistor 331. Connected to drain. The direction from the anode to the cathode in each Zener diode of the current limiting section 340 matches the direction from the drain of the transistor 331 to the drain of the transistor 352 .
  • a gate of the transistor 331 is connected to the control power supply line LN_VCC.
  • the source of transistor 331 is connected to node p2_pre.
  • Node p2_pre is connected to ground line LN_GND through resistor 332 .
  • the source and gate of the transistor 335, one end of the resistor 333, and the source of the transistor 337 are connected to the control power supply line LN_VCC.
  • the other end of resistor 333 is connected to the drain of transistor 334 and the gates of transistors 337 and 338 .
  • the drains of transistors 335 and 336 and the gate of transistor 334 are connected to node p2_pre.
  • the gate and source of transistor 336 and the sources of transistors 334 and 338 are connected to ground line LN_GND.
  • the drains of transistors 337 and 338 are connected at node p2.
  • the drain of the transistor 311 is connected to the node p1_pre.
  • One end of the resistor 321 is connected to the node p1_pre, and the other end of the resistor 321 is connected to one end of the resistor 322 and the drain of the transistor 323 .
  • the other end of the resistor 322 and the source of the transistor 323 are connected to the output terminal line LN_VS.
  • Each source of transistors 324 and 326 is connected to boot voltage line LN_VB.
  • Each gate of transistors 324 and 325 is connected to node p1_pre.
  • the drains of transistors 324 and 325 and the gates of transistors 326 and 327 are connected together.
  • the drains of transistors 326 and 327 are connected at node p1.
  • Each source of transistors 325 and 327 is connected to the output terminal line LN_VS.
  • the signal generated at the node p1 is the high voltage detection signal Sig_p1.
  • Transistors 324 and 325 form a first inverter circuit, and transistors 326 and 327 form a second inverter circuit. Output signals of the first inverter circuits (324, 325) are input signals of the second inverter circuits (326, 327).
  • a series circuit (324 to 327) of the first inverter circuit and the second inverter circuit generates a high voltage detection signal Sig_p1 corresponding to the voltage of the node p1_pre at the node p1.
  • the resistors 321 and 322 and the transistor 323 form an inverter gate signal generation circuit that generates gate signals to the first inverter circuits (324, 325).
  • the signal generated at the node p2 is the high voltage detection signal Sig_p2.
  • a circuit (second binarization circuit) consisting of a resistor 333 and transistors 334, 337 and 338 generates a high voltage detection signal Sig_p2 corresponding to the voltage of the node p2_pre at the node p2.
  • High level and low level are defined as follows for the potentials (voltage levels) of the nodes p1_pre and p2_pre.
  • the transistor 324 is turned off and the transistor 325 is turned on, so that the output terminal voltage VS appears at the drains of the transistors 324 and 325.
  • the transistor 326 is turned on and the transistor 327 is turned on.
  • the signal Sig_p1 becomes high level.
  • the transistor 324 When the potential of the node p1_pre is at a low level, the transistor 324 is turned on and the transistor 325 is turned off, so that the boot voltage VB appears at the drains of the transistors 324 and 325, and as a result, the transistor 326 is turned off and the transistor 327 is turned on. As a result, the signal Sig_p1 becomes low level.
  • the transistor 334 When the potential of the node p2_pre is high, the transistor 334 is turned on, so that the transistor 337 is turned on and the transistor 338 is turned off, so that the signal Sig_p2 becomes high.
  • the transistor 334 When the potential of the node p2_pre is low, the transistor 334 is turned off, so that the transistor 337 is turned off and the transistor 338 is turned on, so that the signal Sig_p2 becomes low.
  • FIG. 28 shows the state of the high voltage detection circuit 52 when the output terminal voltage VS is consistent with a predetermined voltage VSp1 higher than the threshold voltage Vth_p and is stable.
  • the transistor 312 is turned on and current flows from the boot voltage line LN_VB to the ground line LN_GND.
  • the node p2_pre becomes high level
  • the detection signal Sig_p2 becomes high level.
  • a drain current corresponding to the drain current of the transistor 312 flows through the transistor 311, so that the node p1_pre becomes high level, and as a result, the detection signal Sig_p1 becomes high level.
  • FIG. 29 shows the state of the high voltage detection circuit 52 when the output terminal voltage VS is consistent with a predetermined voltage VSp2 lower than the threshold voltage Vth_p and stable.
  • the voltage VSp2 is, for example, 0V or has a negative polarity.
  • current may or may not flow from the ground line LN_GND to the boot voltage line LN_VB depending on the value of the voltage VSp2. does not flow. Therefore, in the state of FIG. 29, the node p2_pre becomes low level, and as a result, the detection signal Sig_p2 becomes low level.
  • the transistor 311 is also turned off because the transistor 312 is turned off. Therefore, in the state of FIG. 29, the node p2_pre becomes low level, and as a result, the detection signal Sig_p1 becomes low level.
  • the high voltage detection circuit 52 is a circuit that switches each high voltage detection signal (Sig_p1, Sig_p2) between a high level and a low level according to the level relationship between the output terminal voltage VS and the threshold voltage Vth_p. It may be interpreted as having a constant voltage width. When interpreted in this way, the voltage VSp1 is higher than the upper limit of the voltage range at the threshold voltage Vth_p, and the voltage VSp2 is lower than the lower limit of the voltage range at the threshold voltage Vth_p. When the output terminal voltage VS falls within the voltage width of the threshold voltage Vth_p, each high voltage detection signal (Sig_p1, Sig_p2) may have an intermediate potential that is neither classified as high level nor low level. However, in the semiconductor device 1, the level relationship between the output terminal voltage VS and the threshold voltage Vth_p is quickly switched in the fluctuation of the output terminal voltage VS, so that no problem occurs.
  • FIGS. 30 to 32 A total of six states ST_p1, ST_p2, ST_p3, ST_p4a, ST_p4b and ST_p5 are shown in FIGS. It is assumed that these six states are states when the differential voltage (VB-VS) is stabilized near the threshold voltage Vth_dff.
  • the state ST_p1 shown on the left side of FIG. 30 as a starting point. Then, the state ST_p1 changes to states ST_p2, ST_p3, ST_p4a, ST_p4b, and ST_p5 in this order, and the operation to return to the state ST_p1 is repeated.
  • the period during which the state of the high voltage detection circuit 52 is in the state ST_p1 may be regarded as the first period, and the period during which the state of the high voltage detection circuit 52 is in the state ST_p4a or ST_p4b may be regarded as the fourth period. Furthermore, the periods in which the state of the high voltage detection circuit 52 is in states ST_p2, ST_p3, and ST_p5 can be regarded as second, third, and fifth periods, respectively. Focusing on the high voltage detection circuit 52, when each period is grasped as described above, in the semiconductor device 1, the first period, the second period, the third period, the fourth period, the fifth period, and then the fifth period. The sequence back to one period will be repeated.
  • a transient response occurs in the operation of the high voltage detection circuit 52 in the process of changing the output terminal voltage VS.
  • the timing of switching from "VS ⁇ Vth_p" to "VS>Vth_p” and the level of the high voltage detection signals Sig_p1 and Sig_p2 change from low level ("0") to A lag may occur between the timing of switching to high level (“1”) and the timing.
  • State ST_p1 corresponds to a state in which the output terminal voltage VS substantially coincides with 0 V (specific voltage) during the low-side ON period PLON .
  • the boot voltage VB has a voltage value (e.g., 18 V) higher than the output terminal voltage VS by the voltage across the bootstrap capacitor CB.
  • No current directed to the ground line LN_GND occurs in the current path CP_pgnd. That is, in the state ST_p1, the current limiter 340 suppresses current generation in the current path CP_pgnd. As a result, the discharge of the bootstrap capacitor CB in state ST_p1 is suppressed.
  • State ST_p2 (see the right side of FIG. 30) is a state in which the output terminal voltage VS rises from the ground level as a result of the transition from the low-side ON period PLON to the both-OFF period PDD2 .
  • a current from the boot voltage line LN_VB to the ground line LN_GND begins to flow through the current path CP_pgnd. That is, a current starts to flow from the boot voltage line LN_VB through the transistors 312 and 352, the current limiting section 340, the transistor 331 and the resistor 332 toward the ground line LN_GND.
  • the potential of the node p2_pre switches from low level to high level, so the detection signal Sig_p2 also switches from low level to high level.
  • the current in current path CP_pgnd flows through the channel of transistor 312 .
  • the transistor 311 is also turned on in conjunction with the flow of current through the transistor 312, and the current flows through the current path CP_pvs. That is, current flows from the boot voltage line LN_VB to the output terminal line LN_VS via the transistor 311 and the inverter gate signal generation circuits (321 to 323). Therefore, the potential of the node p1_pre switches from the low level to the high level during the rising process of the output terminal voltage VS in the state ST_p2, and the detection signal Sig_p1 also switches from the low level to the high level.
  • the negative voltage detection signal Sig_n1 supplied to the gate of the transistor 323 is at the low level from state ST_p1 and also in state ST_p2, so the transistor 323 is off in state ST_p2.
  • the up edge of the signal Sig_p1 and the up edge of the signal Sig_p2 do not necessarily occur at exactly the same timing, these up edges occur substantially at the same time. is defined).
  • the node p2_pre would be affected by the drain-source capacitance of the transistor 331 during the process in which the output terminal voltage VS rises from the ground level to the power supply voltage VP (for example, 600 V) level. potential may rise excessively (for example, it may momentarily rise to about 200 V).
  • the above excessive increase can be suppressed and the transistor 334 can be protected.
  • a state ST_p3 (see the left side of FIG. 31) is a state during the high-side ON period PHON , and corresponds to a state where the output terminal voltage VS substantially matches the power supply voltage VP.
  • the current After the current starts to flow through the current path CP_pgnd in the state ST_p2, the current continues to flow through the current path CP_pgnd in the state ST_p3. That is, in the state ST_p3, current flows from the boot voltage line LN_VB through the transistors 312 and 352, the current limiter 340, the transistor 331 and the resistor 332 toward the ground line LN_GND.
  • the detection signal Sig_p2 becomes high level in the state ST_p3.
  • the current in the current path CP_pgnd in the state ST_p3 can be limited. can be determined.
  • the transistor 311 is also turned on in conjunction with the turning on of the transistor 312, and current flows through the current path CP_pvs. That is, in state ST_p3, current flows from the boot voltage line LN_VB through the transistor 311 and the inverter gate signal generation circuits (321 to 323) toward the output terminal line LN_VS. Since the potential of the node p1_pre becomes high level due to the current flowing through the current path CP_pvs, the detection signal Sig_p1 also becomes high level in the state ST_p3. The negative voltage detection signal Sig_n1 supplied to the gate of the transistor 323 is at a low level in the state ST_p3 following the state ST_p2, so the transistor 323 is off in the state ST_p3.
  • State ST_p4a (see the right side of FIG. 31) is a state in which the output terminal voltage VS decreases from the level of the power supply voltage VP due to the transition from the high-side ON period PHON to the both-OFF period PDD1 . However, in the state ST_p4a, it is assumed that the output terminal voltage VS is higher than the threshold voltage Vth_p (>0) for the high voltage detection circuit 52 .
  • the discharge of the accumulated charge of each capacitive component associated with the current path CP_pgnd progresses. . If the discharge of the stored charge proceeds from the boot voltage line LN_VB to the ground line LN_GND, the transistor 312 is on, and vice versa, the transistor 312 is off. In any case, in the state ST_p4a, the current flows from the node p2_pre to the ground, or the accumulated charge of the gate capacitance of the transistor 334 is not completely discharged, so that the transistor 334 is turned on continuously from the state ST_p3. state, so the signal Sig_p2 is at a high level.
  • the path of this discharge includes a path through the parasitic diode of the transistor 311 and a path through the inverter gate signal generation circuits (321 to 323).
  • the current flow through the former path is particularly illustrated.
  • the discharge through the former path becomes dominant, the potential of the node p1_pre becomes high level, and the signal Sig_p1 becomes high level.
  • the negative voltage detection signal Sig_n1 supplied to the gate of the transistor 323 is at a low level also in the state ST_p4a following the state ST_p3, so the transistor 323 is off in the state ST_p4a.
  • the output terminal voltage VS changes from the level of the power supply voltage VP to the negative voltage due to the transition from the high-side ON period PHON to the both-OFF period PDD1 . It is a state in the process of declining toward However, in the state ST_p4b, the drop in the output terminal voltage VS progresses more than in the state ST_p4a, and it is assumed that the output terminal voltage VS is near 0V or a negative voltage close to 0V.
  • the boot voltage When the output terminal voltage VS is near 0V, the boot voltage has a voltage value approximately equal to the control power supply voltage VCC (eg, 18V).
  • VCC control power supply voltage
  • the state ST_p4b due to the existence of the Zener diode of the current limiter 340, no current is generated in the current path CP_pgnd from the boot voltage line LN_VB to the ground line LN_GND.
  • the potential of the node p2_pre switches from the high level to the low level in the state ST_p4b. to low level.
  • state ST_p4b the transistor 311 is off following state ST_p4a.
  • the potential of the node p1_pre switches from high level to low level in the state ST_p4b.
  • the detection signal Sig_p1 also switches from high level to low level.
  • the negative voltage detection signal Sig_n1 switches from low level to high level in the process of decreasing the output terminal voltage VS, the transistor 323 is turned on.
  • the output terminal voltage VS completes the drop through the transition from the high-side ON period PHON to the both-OFF period P DD1 , and the output terminal voltage VS drops during the both-OFF period P DD1 . It is the state with the lowest potential.
  • the lowest potential of the output terminal voltage VS has a negative polarity, and the output terminal voltage VS in state ST_p5 is, for example, "-100V".
  • state ST_p5 the potential of the boot voltage VB is well below the ground potential, and the current flows through the current path CP_pgnd from the ground line LN_GND to the boot voltage line LN_VB through the parasitic diode of the transistor 336 and the current limiter 340. flows. Therefore, in the state ST_p5, the potential of the node p2_pre is lower than the ground potential, so that the transistor 334 is turned off and the signal Sig_p2 becomes low level. The presence of transistor 336 prevents the voltage of node p2_pre from dropping excessively, thereby protecting transistor 334 .
  • the resistor provided in the current limiter 340 keeps the current of the current path CP_pgnd low in the state ST_p5. That is, the current flowing from the ground line LN_GND to the boot voltage line LN_VB (so-called reverse current) is suppressed.
  • a transition is made to a state ST_p1 corresponding to the low-side ON period PLON , and after the transition to the state ST_p1, the transistor 323 is turned off.
  • the resistance between the node p1_pre and the output terminal line LN_VS increases. is low level, the potential of the node p1_pre is kept low even in the state ST_p1 after the state ST_p5.
  • the detection signal Sig_p1 should be high level, it is necessary to increase the resistance value between the node p1_pre and the output terminal line LN_VS to some extent so that the drain current of the transistor 311 causes the potential of the node p1_pre to be high level.
  • the output terminal voltage VS decreases from the level of the power supply voltage VP toward the negative level, the charge accumulated in the gate capacitance of the first inverter circuits (324, 325) is quickly discharged to generate the detection signal Sig_p1. It is necessary to produce a down edge.
  • the transistor 323 is provided. In the process of the output terminal voltage VS decreasing from the level of the power supply voltage VP toward the negative level (in the corresponding period of the states ST_p4a and ST_p4b), the transistor 323 is turned on to turn on the gates of the first inverter circuits (324, 325). Accumulated electric charge in the capacitor is quickly discharged, so that a proper down edge can be generated in the high voltage detection signal Sig_p1.
  • the detection signal generation circuit 320 has an adjustment circuit (323) that adjusts the resistance value between the node p1_pre and the output terminal line LN_VS, depending on whether the output terminal voltage VS has a negative polarity (more specifically, It can be said that the resistance value between the node p1_pre and the output terminal line LN_VS is changed depending on, for example, whether it is lower than the negative threshold voltage Vth_n. Further, the detection signal generation circuit 320 has a resistance value between the node p1_pre and the output terminal line LN_VS that is higher when the output terminal voltage VS has a negative polarity than when the output terminal voltage VS has a positive polarity. has the function of reducing
  • FIG. 33 schematically shows rough waveforms of some signals related to the high voltage detection circuit 52.
  • FIG. 34 schematically shows schematic waveforms of some signals related to the virtual high voltage detection circuit.
  • the transistor 323 is provided in the high voltage detection circuit 52 as described above and the transistor 323 is turned on/off based on the signal Sig_n1.
  • the virtual high voltage detection circuit has a configuration obtained by removing the transistor 323 from the high voltage detection circuit 52 .
  • the node p1_pre in the virtual high voltage detection circuit is represented by p1_pre'
  • the high voltage detection signal Sig_p1 in the virtual high voltage detection circuit is represented by Sig_p1'.
  • the virtual high voltage detection circuit is used in combination with the virtual negative voltage detection circuit described in the second embodiment.
  • the charge of the node p1_pre is quickly discharged through the turn-on of the transistor 323, and the signal Sig_p1 becomes It can be seen that it quickly switches to the low level.
  • the node p1_pre' discharge speed is slow in the process of decreasing the output terminal voltage VS because the resistance value of the node p1_pre' is always high. As a result, it can be seen that the transition of the high voltage detection signal (Sig_p1') to the low level is delayed.
  • the bootstrap capacitor CB When the output terminal voltage VS has a negative polarity due to the transition from the high side ON period PHON to both OFF periods P DD1 , the bootstrap capacitor CB is charged with a large charging current IB by turning on the transistor M1. (See FIG. 12).
  • the delay in the transition of the high voltage detection signal to the low level accompanying the transition from the high-side ON period PHON to the both-OFF period P DD1 reduces the charging time of the bootstrap capacitor CB based on the negative output terminal voltage VS ( delay in charging start timing). By installing the transistor 323, such a delay can be suppressed.
  • the third embodiment includes the following examples EX3_1 to EX3_3.
  • Example EX3_1 If it is required to lower the potential of the node p1_pre at a higher speed in the process of lowering the output terminal voltage VS from the power supply voltage VP, the transistors shown in FIG. A variant is also possible in which the drain of 323 is directly connected to node p1_pre.
  • Example EX3_2 Alternatively, depending on the speed or amount of change in the output terminal voltage VS or the gate capacitance of the inverter circuits (324, 325), the delay of the high voltage detection signal Sig_p1 may not be a problem even if the transistor 323 does not exist. . In this case, it is possible to omit the transistor 323 from the high voltage detection circuit 52 as shown in FIG.
  • the high voltage detection circuit 52 shown in the third embodiment can be applied not only to the semiconductor device 1 having the configuration of FIG. 1, but also to any device that requires a plurality of high voltage detection signals based on different potentials. is.
  • a fourth embodiment of the present disclosure will be described.
  • configuration examples of the charge pump circuits 41 and 42 of FIG. 6 will be described.
  • the charge pump circuit is hereinafter sometimes referred to as a CP circuit.
  • FIG. 37 shows a circuit diagram of the CP circuit 400 according to the fourth embodiment.
  • the CP circuit 400 receives voltages V1 and V2 and a control signal INx, and can perform a charge pump operation according to the control signal INx. Voltage V2 is higher than voltage V1. In the charge pump operation, the CP circuit 400 generates a boosted voltage higher than the voltage V2 on the output line LNout based on the voltage V2 with the voltage V1 as a reference. The voltage applied to the output line LNout is called the output voltage Vout.
  • the CP circuit 400 can be used as the CP circuit 41 in FIG.
  • CP circuit 400 used as CP circuit 41 in FIG. 6 is particularly referred to as CP circuit 401 .
  • the voltage V1 is the output terminal voltage VS
  • the voltage V2 is the boot voltage VB
  • the control signal INx is the control signal IN1.
  • the output line out in the CP circuit 401 is connected to the output node OUT1 in FIG. 6, and the output voltage Vout in the CP circuit 401 is supplied to the gate of the transistor M1 as the gate signal SW_G1.
  • the charge pump operation performed by the CP circuit 401 is the first charge pump operation described in the first embodiment.
  • the CP circuit 400 can be used as the CP circuit 42 in FIG.
  • CP circuit 400 used as CP circuit 42 in FIG. 6 is particularly referred to as CP circuit 402 .
  • the voltage V1 is the ground voltage (that is, 0 V)
  • the voltage V2 is the control power supply voltage VCC
  • the control signal INx is the control signal IN2.
  • the output line out in the CP circuit 402 is connected to the output node OUT2 in FIG. 6, and the output voltage Vout in the CP circuit 402 is supplied to the gate of the transistor M2 as the gate signal SW_G2.
  • the charge pump operation performed by the CP circuit 402 is the second charge pump operation described in the first embodiment.
  • the configuration and operation of the CP circuits 41 and 42 of FIG. 6 are the same except that the voltages handled are different. Therefore, in the fourth embodiment, the configuration and operation of the CP circuit 400 of FIG. 37 will be described below.
  • the CP circuit 400 includes transistors 411-416, 421, 422, 431 and 432, and capacitors C1 and C2. Wirings to which circuit elements are connected, including lines LN_V1, LN_V2, LN1 to LN3, and LNout, are also included in the components of the CP circuit 400.
  • FIG. 1 A block diagram illustrating an exemplary computing environment in accordance with the present disclosure.
  • the transistors 411, 413, 415, 421, 431 and 432 are formed of P-channel MOSFETs, and the transistors 412, 414, 416 and 422 are formed of N-channel MOSFETs.
  • the transistors 411 and 412 form an inverter circuit INV0
  • the transistors 413 and 414 form an inverter circuit INV1
  • the transistors 415 and 416 form an inverter circuit INV2.
  • a voltage V1 is applied to the line LN_V1, and a voltage V2 is applied to the line LN_V2. It can be said that the voltage V2 functions as a power supply voltage for the CP circuit 400, and therefore the line LN_V2 may hereinafter be referred to as the power supply line LN_V2.
  • the source of transistor 412 is connected to line LN_V1 to receive voltage V1.
  • the source of transistor 411, the gates of transistors 413, 414, 421 and 422, and the drain of transistor 431 are connected to power supply line LN_V2 to receive voltage V2.
  • a control signal INx is input to each gate of the transistors 411 and 412 .
  • Each drain of transistors 411 and 412 is connected to line LN1.
  • the voltage applied to line LN1 is referred to as voltage Va.
  • the voltage Va corresponds to the output voltage of the inverter circuit INV0.
  • Each drain of transistors 413 and 414 is connected to the gate of transistor 431 .
  • the voltage applied to the gate of transistor 431 is called voltage Vb.
  • the voltage Vb corresponds to the output voltage of the inverter circuit INV1.
  • the source of transistor 414 is connected to line LN1.
  • a capacitor C1 is provided between lines LN1 and LN2. That is, one end of the capacitor C1 is connected to the line LN1, and the other end of the capacitor C1 is connected to the line LN2.
  • the voltage applied to line LN2 is referred to as voltage Vc.
  • the drains of the transistors 421 and 422 and the source of the transistor 416 are connected to the line LN3.
  • the voltage applied to line LN3 is referred to as voltage Vd.
  • a capacitor C2 is provided between lines LN3 and LNout. That is, one end of the capacitor C2 is connected to the line LN3, and the other end of the capacitor C2 is connected to the output line LNout.
  • Each drain of transistors 415 and 416 is connected to the gate of transistor 432 .
  • the voltage applied to the gate of transistor 432 is referred to as voltage Ve.
  • the voltage Ve corresponds to the output voltage of the inverter circuit INV2.
  • Each source of transistors 415 and 432 is connected to an output line LNout.
  • the source of transistor 422 is connected to line LN1.
  • FIG. 37 clearly shows only parasitic diodes added to transistors 421, 431 and 432 (FIGS. 40 to 42 described later).
  • the parasitic diode of the transistor 421 has a forward direction from the drain of the transistor 421 to the source.
  • transistor 421 includes a parasitic diode having an anode connected to line LN3 and a cathode connected to line LN2.
  • a diode having an anode connected to the line LN3 and a cathode connected to the line LN2 may be connected in parallel to the transistor 421 in addition to the parasitic diode.
  • the parasitic diode of the transistor 431 has a forward direction from the drain of the transistor 431 to the source.
  • transistor 431 includes a parasitic diode having an anode connected to power supply line LN_V2 and a cathode connected to line LN2.
  • a diode having an anode connected to the power supply line LN_V2 and a cathode connected to the line LN2 may be connected in parallel to the transistor 431 separately from the parasitic diode.
  • the parasitic diode of transistor 432 has a forward direction from the drain of transistor 432 to the source.
  • Transistor 432 thus includes a parasitic diode having an anode connected to line LN2 and a cathode connected to output line LNout.
  • a diode having an anode connected to the line LN2 and a cathode connected to the output line LNout may be connected in parallel to the transistor 432 in addition to the parasitic diode.
  • the control signal INx takes a signal level of high level or low level.
  • the high-level control signal INx has the potential of voltage V2.
  • the low-level control signal INx has the potential of voltage V1.
  • a high-level control signal INx corresponds to a control signal INx having a value of "0"
  • a low-level control signal INx corresponds to a control signal INx having a value of "1”.
  • FIG. 40 is a state explanatory diagram of the CP circuit 400 during the high level period of the control signal INx.
  • dashed arrows are attached for convenience in order to explain the state of each circuit element.
  • V2-V1 charges corresponding to the difference voltage (V2-V1) are accumulated in each of the capacitors C1 and C2.
  • FIG. 41 is a state explanatory diagram of the CP circuit 400 when the level of the control signal INx switches from high level to low level.
  • dashed arrows are attached for convenience in order to explain the state of each circuit element.
  • the source potential of the transistor 413 rises above the voltage V2 (the gate potential of the transistor 413) by exceeding the gate threshold voltage, thereby turning on the transistor 413.
  • the transistor 414 is turned off while the voltage Va rises from the voltage V1 toward the voltage V2. Then, since the output voltage Vb of the inverter circuit 1NV1 matches the voltage Vc, the gate potential and the source potential of the transistor 431 match and the transistor 431 is turned off.
  • the transistor 422 is turned off to cut off the conduction between the lines LN1 and LN3. After the transistor 421 is turned on and the transistor 422 is turned off, the voltage Vd on the line LN3 also rises in conjunction with the rise of the voltage Vc on the line LN2.
  • transistor 421 causes the gate-source voltage of transistor 416 to drop toward 0V, thereby turning off transistor 416 .
  • the transistor 415 is turned on, and as a result, the voltage Ve, which is the output voltage of the inverter circuit INV2, matches the output voltage Vout. Then, since the gate potential and source potential of the transistor 432 become the same, the transistor 432 is turned off.
  • FIG. 42 shows the state of the CP circuit 400 after the output voltage Vout has stabilized during the low level period of the control signal INx (assuming that there is no charge discharge on the output line LNout).
  • FIG. 43 shows waveforms of the control signal INx, the voltage Vc, the voltage Va, the voltage Vb, the output voltage Vout, the voltage Vd, and the voltage Ve from top to bottom.
  • the waveforms of the voltages Vb and Ve are shown as digital waveforms.
  • the voltage Va starts rising from the voltage V1 and the voltage Vc starts rising from the voltage V2.
  • the output voltage Vb of the inverter circuit INV1 switches from low level to high level, thereby turning off the transistor 431 and turning on the transistor 421 at substantially the same timing as the turn off timing of the transistor 431.
  • the transistor 421 is turned on, charges are supplied from the line LN2 to the line LN3 through the resistance component of the channel of the transistor 421, and the voltage Vd and the output voltage Vout gradually increase with a time constant dependent on the resistance component. continue to do
  • the output voltage Ve of the inverter circuit INV2 switches from low level to high level near the end timing of the rise of the voltages Va and Vc. After that, the voltage Vd and the output voltage Vout continue to rise for a while until the potential difference between the lines LN2 and LN3 becomes equal.
  • the transistor 421 functions as a first switching element provided between the line LN2 and the line LN3.
  • Transistor 421 is a switch element that turns on and off based on the difference voltage between voltage Vc and voltage V2 on line LN2, and turns on in response to voltage Va on line LN1 rising from voltage V1 to voltage V2 ( See Figure 41).
  • switching of the state of the CP circuit 400 is performed without requiring a dedicated gate signal for the transistor 421, and a desired boosting can be achieved with a simple configuration (for example, a small number of elements). voltage can be obtained.
  • the transistor 421 has a function of supplying charges from the line LN2 to the line LN3 to increase the output voltage Vout when the control signal INx becomes low level and the charge pump operation is performed.
  • transistor 421 accomplishes this by blocking the current flow from line LN2 to line LN3.
  • the transistor 422 functions as a second switch element connected to the line LN3.
  • transistor 422 has a drain (first electrode) connected to line LN3 and a source (second electrode) connected to line LN1.
  • the transistor 422 is turned on (that is, conductive between the drain and the source) when the voltage V1 is applied to the line LN1 by setting the control signal INx to high level, and the transistor 422 is turned on (that is, conductive between the drain and the source). is applied to line LN3.
  • the transistor 422 is turned off (that is, the drain and source are cut off) when the voltage V2 is applied to the line LN1 by setting the control signal INx to low level.
  • a voltage exceeding the differential voltage (V2-V1) is not applied between the electrodes of each transistor other than the transistor 422. Furthermore, by connecting the source of the transistor 422 to the line LN1, a voltage exceeding the differential voltage (V2-V1) is not applied between the electrodes.
  • the CP circuit 400 can be formed using only transistors having a breakdown voltage corresponding to the difference voltage (V2-V1). As a result, it is possible to generate an output voltage Vout that exceeds the withstand voltage using only low withstand voltage transistors with a voltage difference of approximately (V2-V1).
  • the transistor 431 functions as a first rectifying element provided between the power supply line LN_V2 and the line LN2.
  • the inverter circuit INV1 functions as an inverter circuit (first rectifying element inverter circuit) for driving the first rectifying element (431).
  • the inverter circuit INV1 uses the voltage Vc of the line LN2 as a positive power supply voltage and the voltage Va of the line LN1 as a negative power supply voltage.
  • the inverter circuit INV1 operates according to the level relationship between the voltage V2 on the power supply line LN_V2 and the voltage Vc on the line LN2 and the voltage Va on the line LN1 (that is, the level relationship between the voltages V2 and Vc and the level between the voltages V2 and Va). depending on the relationship), the voltage Va on line LN1 is output as voltage Vb (see FIG. 40), or the voltage Vc on line LN2 is output as voltage Vb (see FIG. 41). While the input voltage of the inverter circuit INV1 is fixed at the voltage V2, the power supply voltage of the inverter circuit INV1 fluctuates. However, when the voltage V2 is the boot voltage VB, the specific value of the voltage V2 fluctuates as the output terminal voltage VS fluctuates.
  • the capacitor C1 can accumulate electric charges corresponding to the difference voltage (V2-V1). If the first rectifying element is a simple diode, the voltage Vc of the line LN2 only increases to the voltage (V2-Vf) during the high level period of the control signal INx, and the output voltage obtained when the charge pump operation is performed is Vout is reduced compared to the configuration of FIG. Vf represents the forward voltage of the diode.
  • the transistor 432 functions as a second rectifying element provided between the line LN2 and the output line LNout.
  • the inverter circuit INV2 functions as an inverter circuit (second rectifier inverter circuit) for driving the second rectifier (432).
  • the inverter circuit INV2 uses the voltage of the output line LNout as a positive power supply voltage and the voltage of the line LN3 as a negative power supply voltage.
  • the inverter circuit INV2 operates according to the level relationship between the voltage Vc of the line LN2, the voltage Vout of the output line LNout, and the voltage Vd of the line LN3 (that is, the level relationship between the voltages Vc and Vout and the level between the voltages Vc and Vd).
  • the voltage Vd on line LN3 is output as voltage Ve (see FIG. 40), or the voltage Vout on output line LNout is output as voltage Ve (see FIG. 41).
  • the input voltage (Vc) of the inverter circuit INV2 fluctuates, and the power supply voltage of the inverter circuit INV2 also fluctuates.
  • CP circuit 401 in FIG. 38 corresponds to CP circuit 400 used as CP circuit 41 in FIG.
  • the control signal INx supplied from the switch control circuit 50 (see FIG. 6) to the CP circuit 401 is the control signal IN1.
  • the high level control signal IN1 has a value of "0" and the low level control signal IN1 has a value of "1".
  • the CP circuit 401 can perform the first charge pump operation described in the first embodiment.
  • the first charge pump operation is not performed during the high level period of the control signal IN1.
  • the boot voltage VB is applied to the high potential end of C2.
  • the first charge pump operation is performed, and a first boosted voltage higher than the boot voltage VB is generated on the output line LNout.
  • the output line out in the CP circuit 401 is connected to the output node OUT1 in FIG. 6, and the output voltage Vout in the CP circuit 401 is supplied to the gate of the transistor M1 as the gate signal SW_G1. Therefore, during the high level period of the control signal IN1, the potential difference between the gate and source of the transistor M1 is zero, and the transistor M1 is off. During the low level period of the control signal IN1, the transistor M1 is turned on by applying the voltage VUP1 between the gate and source of the transistor M1.
  • CP circuit 402 in FIG. 39 corresponds to CP circuit 400 used as CP circuit 42 in FIG.
  • the control signal INx supplied from the switch control circuit 50 (see FIG. 6) to the CP circuit 402 is the control signal IN2.
  • the high level control signal IN2 has a value of "0" and the low level control signal IN2 has a value of "1".
  • the CP circuit 402 can perform the second charge pump operation described in the first embodiment.
  • the second charge pump operation is not performed during the high level period of the control signal IN2.
  • the control power supply voltage VCC is applied to the high potential end of C2.
  • the second charge pump operation is performed by the occurrence of a falling edge in the control signal IN2, and a second boosted voltage higher than the control power supply voltage VCC is generated on the output line LNout.
  • the output line out in the CP circuit 402 is connected to the output node OUT2 in FIG. 6, and the output voltage Vout in the CP circuit 402 is supplied to the gate of the transistor M2 as the gate signal SW_G2. Therefore, during the high level period of the control signal IN2, the potential difference between the gate and the source of the transistor M2 is zero, and the transistor M2 is off. During the low level period of the control signal IN2, the transistor M2 is turned on by applying a voltage VUP2 between the gate and source of the transistor M2.
  • the fourth embodiment includes the following examples EX4_1 to EX4_3.
  • Example EX4_1 will be described. It is also possible to transform CP circuit 400 into CP circuit 400' of FIG.
  • the CP circuit 400' is the CP circuit according to the embodiment EX4_1.
  • CP circuit 400' can be used as CP circuit 41 of FIG. 6 and can be used as CP circuit 42 of FIG.
  • the code "400" of the CP circuit described above in the fourth embodiment may be read as "400'".
  • transistor 422 in the CP circuit 400 of FIG. 37 is replaced with a transistor 422'.
  • Transistor 422' is an N-channel MOSFET.
  • the drain of transistor 422' is connected to line LN3
  • the source of transistor 422' is connected to line LN_V1
  • the gate of transistor 422' receives control signal INx.
  • the transistor 431 in the CP circuit 400 of FIG. 37 is replaced with a diode 431'.
  • the inverter INV1 in the CP circuit 400 of FIG. 37 is omitted in the CP circuit 400'.
  • the anode of diode 431' is connected to power supply line LN_V2, and the cathode of diode 431' is connected to line LN2.
  • the transistor 432 in the CP circuit 400 of FIG. 37 is replaced with a diode 432'.
  • the inverter INV2 in the CP circuit 400 of FIG. 37 is omitted in the CP circuit 400'.
  • the anode of diode 432' is connected to power supply line LN_V2, and the cathode of diode 432' is connected to output line LNout.
  • the transistor 422′ is turned on during the high level period of the control signal INx (that is, while the control signal INx has the potential of the voltage V2), and is turned on during the low level period of the control signal INx (that is, while the control signal INx is at the voltage V2). It is turned off during the period when it has the potential of V1).
  • the transistor 422' is similar to the transistor 422 in FIG. 37 in that it is turned on during the high level period of the control signal INx and turned off during the low level period of the control signal INx (see also FIGS. 40 and 42).
  • transistor 422' has a drain (first electrode) connected to line LN3 and a source (second electrode) connected to line LN_V1 for receiving voltage V1.
  • the transistor 422' functions as the second switch element. Similar to the transistor 422 in the CP circuit 400, the transistor 422' in the CP circuit 400' is turned on when the voltage V1 is applied to the line LN1 by setting the control signal INx to high level (that is, the drain and source are connected to each other). conductive) and supplies the voltage V1 applied to the source (second electrode) to the line LN3. Similar to the transistor 422 in the CP circuit 400, the transistor 422' in the CP circuit 400' is turned off when the voltage V2 is applied to the line LN1 by setting the control signal INx to a low level (that is, the drain and source are connected to each other). blocked).
  • the transistor 422' has the same function as the transistor 422 in FIG. 37, so even if the first modification is adopted, the desired charge pump operation is realized.
  • the voltage Vd increases to the voltage ((V2-V1)+V2) during the low level period of the control signal INx (see FIG. 42)
  • the voltage (((V2-V1)+V2) is applied to the transistor 422'.
  • -V1 that is, twice the voltage difference (V2-V1).
  • the differential voltage (V2-V1) is 18V (volts)
  • the transistor 422 in FIG. 37 may have a withstand voltage of about 20V
  • the transistor 422' in FIG. 46 needs a withstand voltage of about 40V.
  • the CP circuit 400 is preferable to the CP circuit 400'.
  • the diode 431' functions as a first rectifying element provided between the power supply line LN_V2 and the line LN2. Similar to the case of using the transistor 431 (FIG. 37) as the first rectifying element, even when the diode 431' is used as the first rectifying element, the capacitor C1 can be charged during the high level period of the control signal INx. However, when the diode 431' is used, the voltage Vc of the line LN2 increases only to the voltage (V2-Vf) during the high level period of the control signal INx, and the output voltage Vout obtained when the charge pump operation is performed is as shown in FIG. configuration. Therefore, CP circuit 400 is preferred over CP circuit 400'.
  • the diode 432' functions as a second rectifying element provided between the power supply line LN_V2 and the output line LNout. Similar to the case of using the transistor 432 (FIG. 37) as the second rectifying element, even when the diode 432' is used as the second rectifying element, the capacitor C2 can be charged during the high level period of the control signal INx. However, when the diode 432′ is used, the voltage Vout of the output line LNout only increases to the voltage (V2 ⁇ Vf) during the high level period of the control signal INx, and the output voltage Vout obtained when the charge pump operation is executed is shown in FIG. 37 configuration. Therefore, CP circuit 400 is preferred over CP circuit 400'.
  • Example EX4_2 will be described.
  • the CP circuit 400' to which all of the above first to third modifications are applied has been described. may be applied, or only two arbitrary transformations may be applied.
  • Example EX4_3 The CP circuit (400, 400') shown in the fourth embodiment can be applied not only to the semiconductor device 1 having the configuration of FIG. 1, but also to any device requiring a boosted voltage.
  • a fifth embodiment of the present disclosure will be described.
  • control of the differential voltage (VB-VS) by the switch control circuit 50 will be described.
  • FIG. 47 shows part of the switch control circuit 50 according to the fifth embodiment together with its peripheral circuits.
  • the switch control circuit 50 includes a feedback control circuit 500 as a circuit for monitoring and controlling the differential voltage (VB-VS).
  • the feedback control circuit 500 includes a feedback voltage generation circuit 510 , a comparator 520 , a gain adjustment circuit 530 and a logic circuit 540 .
  • a feedback voltage generation circuit 510 includes feedback resistors 511 and 512 .
  • the feedback voltage generation circuit 510 is composed of a series circuit of feedback resistors 511 and 512 provided between the boot voltage line LN_VB and the output terminal line LN_VS, and generates a feedback voltage Vfb corresponding to the differential voltage (VB-VS). More specifically, one end of feedback resistor 511 is connected to boot voltage line LN_VB, the other end of feedback resistor 511 is connected to one end of feedback resistor 512 at node 513, and the other end of feedback resistor 512 is connected to output line LN_VS. connected to Feedback voltage Vfb is developed at node 513 where feedback resistors 511 and 512 are connected together.
  • the comparator 520 has a non-inverting input terminal, an inverting input terminal and an output terminal.
  • the non-inverting input terminal of comparator 520 is connected to node 513 to receive feedback voltage Vfb.
  • a predetermined reference voltage Vref is input to the inverting input terminal of the comparator 520 .
  • the comparator 520 compares the feedback voltage Vfb with the reference voltage Vref, generates a signal Sig_5a indicating the result of comparison between the feedback voltage Vfb and the reference voltage Vref, and outputs it from its own output terminal.
  • the comparator 520 is driven using the boot voltage VB as the positive power supply voltage and the output terminal voltage VS as the negative power supply voltage, and generates the signal Sig_5a using the boot voltage VB and the output terminal voltage VS. Therefore, the potential of the signal Sig_5a is lower than the potential of the boot voltage VB and higher than the potential of the output terminal voltage VS.
  • comparator 520 may be a comparator with hysteresis.
  • the gain adjustment circuit 530 includes a resistor 531 and transistors 532-534.
  • Transistors 532 and 534 are N-channel MOSFETs, and transistor 533 is a P-channel MOSFET.
  • One end of resistor 531 is connected to boot voltage line LN_VB.
  • the other end of resistor 531 is connected to the drain of transistor 532 and the gates of transistors 533 and 534 .
  • the source of transistor 532 is connected to output line LN_VS.
  • the gate of transistor 532 is connected to the output terminal of comparator 520 . Therefore, the signal Sig_5a is applied to the gate of transistor 532 .
  • the source of transistor 533 is connected to boot voltage line LN_VB.
  • the source of transistor 534 is connected to output line LN_VS.
  • the drains of transistors 533 and 534 are commonly connected to each other.
  • the signal appearing at the drain of transistor 532 is called signal Sig_5b.
  • the signal appearing at each drain of transistors 533 and 534 is called signal Sig_5c.
  • An inverter circuit is formed by transistors 533 and 534 .
  • the transistors 533 and 534 have a function of outputting an inverted signal of the signal Sig_5b as the signal Sig_5c.
  • the logic circuit 540 receives the input of the signal Sig_5c.
  • the logic circuit 540 generates a control signal Sig_5d for controlling the state of the switch circuit 30 based on the signal Sig_5c and outputs the generated control signal Sig_5d to the switch driver 40 .
  • the logic circuit 540 is driven using the boot voltage VB as the positive power supply voltage and the output terminal voltage VS as the negative power supply voltage, and generates the signal Sig_5d using the boot voltage VB and the output terminal voltage VS. Therefore, the potential of the control signal Sig_5d is lower than the potential of the boot voltage VB and higher than the potential of the output terminal voltage VS.
  • the switch circuit 30 is provided between the control power supply line LN_VCC and the boot voltage line LN_VB (in other words, provided between the control power supply terminal TM14 and the boot terminal TM12).
  • the switch circuit 30 is any circuit that permits or inhibits the flow of current between the lines LN_VCC and LN_VB (in other words, a circuit that permits or inhibits the flow of current between the control power supply terminal TM14 and the boot terminal TM12). be.
  • the switch circuit 30 may be configured with P-channel MOSFETs.
  • the switch circuit 30 may be configured with any type of switching element that is not classified as MOSFET.
  • the current flowing from the control power supply line LN_VCC to the boot voltage line LN_VB via the switch circuit 30 corresponds to the charging current of the bootstrap capacitor CB.
  • the charging current of the bootstrap capacitor CB increases the differential voltage (VB-VS).
  • the current flowing from the boot voltage line LN_VB to the control power supply line LN_VCC via the switch circuit 30 corresponds to the discharge current of the bootstrap capacitor CB.
  • a current flowing from the boot voltage line LN_VB to another line (for example, the output terminal line LN_VS or the ground line LN_GND) without passing through the switch circuit 30 also corresponds to the discharge current of the bootstrap capacitor CB (see FIG. 18, etc.). ).
  • the discharge current of bootstrap capacitor CB reduces the differential voltage (VB-VS).
  • the feedback voltage generation circuit 510, the comparator 520, the gain adjustment circuit 530, the logic circuit 540, the switch driver 40 and the switch circuit 30 form a feedback loop regarding the boot voltage VB.
  • the feedback control circuit 500 uses the feedback loop to control the state of the switch circuit 30 through the switch driver 40 so that the differential voltage (VB-VS) is stabilized. At this time, the feedback control circuit 500 stabilizes the differential voltage (VB ⁇ VS) by controlling the charging of the bootstrap capacitor CB via the switch circuit 30 through the control of the switch circuit 30 .
  • Stabilization of the differential voltage refers to keeping the differential voltage (VB-VS) below the threshold voltage Vth_dff and near the threshold voltage Vth_dff (see FIG. 11). It can be understood that this corresponds to stabilizing the differential voltage (VB-VS) at the threshold voltage Vth_dff. Note that the differential voltage (VB-VS) may exceed the threshold voltage Vth_dff for a very short time due to transient response.
  • the comparator 520 operates as follows in order to stabilize the differential voltage (VB-VS) at the threshold voltage Vth_dff. That is, when the feedback voltage Vfb is higher than the reference voltage Vref, the comparator 520 supplies charge (positive charge) to the gate of the transistor 532, thereby raising the potential of the signal Sig_5a. Conversely, when the feedback voltage Vfb is lower than the reference voltage Vref, the comparator 520 extracts charge (positive charge) from the gate of the transistor 532, thereby lowering the potential of the signal Sig_5a. As the absolute value
  • An increase in the potential of the signal Sig_5a causes a decrease in the potential of the signal Sig_5b, and a decrease in the potential of the signal Sig_5b causes an increase in the potential of the signal Sig_5c.
  • a decrease in the potential of the signal Sig_5a results in an increase in the potential of the signal Sig_5b, and an increase in the potential of the signal Sig_5b results in a decrease in the potential of the signal Sig_5c.
  • the logic circuit 540 switches through the switch driver 40 such that the higher the potential of the signal Sig_5c, the lower the charging current of the bootstrap capacitor CB, and the lower the potential of the signal Sig_5c, the higher the charging current of the bootstrap capacitor CB. Controls the state of the circuit 30 (generates and outputs a control signal Sig_5d for realizing the control). As a result, the differential voltage (VB-VS) can be stabilized at the threshold voltage Vth_dff.
  • the charging voltage of the capacitor CB is optimized, and the output transistor MH can be driven safely and properly.
  • the feedback control circuit 500 controls the state of the switch circuit 30 also considering the high voltage detection signal Sig_p1 and the negative voltage detection signal Sig_n1.
  • the feedback control circuit 500 (logic circuit 540) is controlled by the feedback voltage Vfb.
  • switch circuit 30 may be controlled to conduct between lines LN_VCC and LN_VB without (and therefore depending on signals Sig_5a, Sig_5b and Sig_5c). In other words, the feedback control circuit 500 (logic circuit 540) switches switch Through control of circuit 30, current may be allowed to pass between lines LN_VCC and LN_VB.
  • the feedback control circuit 500 controls the charging current of the bootstrap capacitor CB so that the higher the potential of the signal Sig_5c, the lower the charging current of the bootstrap capacitor CB.
  • the state of the switch circuit 30 is controlled through the switch driver 40 so that the charging current of the CB increases (the control signal Sig_5d for realizing the control is generated and output).
  • the logic circuit 540 controls the line The switch circuit 30 is controlled so as to conduct between LN_VCC and LN_VB. As a result, the charging current of the capacitor CB flows from the control power supply line LN_VCC toward the boot voltage line LN_VB.
  • logic circuit 540 connects line LN_VCC and LN_VB. is cut off. This cuts off the current (charging current of the capacitor CB) directed from the control power supply line LN_VCC to the boot voltage line LN_VB.
  • the gain adjustment circuit 530 can adjust the gain of the feedback loop. That is, by adjusting the resistance value of the resistor 531, the gain of the feedback loop can be adjusted. Increasing the resistance value of the resistor 531 increases the gain of the feedback loop, and decreasing the resistance value of the resistor 531 decreases the gain of the feedback loop. By adjusting the gain of the feedback loop, it is possible to obtain desired response characteristics related to feedback control of the differential voltage (VB-VS) corresponding to the charging voltage of the bootstrap capacitor CB.
  • VB-VS differential voltage
  • the fifth embodiment includes the following example EX5_1.
  • FIG. 48 is a circuit diagram of part of the switch control circuit 50 and its peripheral circuits according to the embodiment EX5_1.
  • the feedback control circuit 500 shown in FIG. 48 is the same as that shown in FIG.
  • the switch circuit 30 is formed of a series circuit of the transistors M1 and M2, and the switch driver 40 includes the charge pump circuit 41 in conjunction therewith. (See Figure 6).
  • the control signal Sid_5d output by the logic circuit 540 corresponds to the control signal IN1
  • the gate signal SW_G1 corresponding to the control signal IN1 is supplied from the charge pump circuit 41 to the gate of the transistor M1.
  • the control method of the transistor M2 is as described above in the first embodiment and the like, and only the control of the transistor M1 will be focused here.
  • the feedback voltage generation circuit 510, the comparator 520 and the gain adjustment circuit 530 of FIG. 48 constitute the differential voltage detection circuit 53 of FIG.
  • the signal Sig_5c corresponds to the differential voltage detection signal Sig_dff.
  • the signal Sig_5c is classified as high level, the signal Sig_5c has a value of "1", and the potential of the signal Sig_5c is If it is lower than the potential of voltage (VS+Vg2), signal Sig_5c is classified as a low level and signal Sig_5c has a value of "0".
  • Vg1>0 "Vg2>0”
  • Vg1+Vg2 ⁇ Vth_dfff" are satisfied.
  • the switch control circuit 50 (logic circuit 540) does not depend on the feedback voltage Vfb (therefore the signals Sig_5a, Sig_5b and Sig_5c ), the control signal Sig_5d (IN1) is set to high level to stop the first charge pump operation by the CP circuit 41, thereby turning off the transistor M1.
  • the switch control circuit 50 sets the control signal IN2 (not shown in FIG. 48) to high level, thereby enabling the second charge pump by the CP circuit 42 (not shown in FIG. 48). Deactivate, thereby turning off transistor M2 (see FIGS. 12 and 14).
  • the switch control circuit 50 (logic circuit 540) outputs the control signal Sig_5d (IN1 ) is set to a low level to cause the CP circuit 41 to perform the first charge pump operation, thereby turning on the transistor M1.
  • the switch control circuit 50 sets the control signal IN2 (not shown in FIG.
  • the logic circuit 540 sets the control signal Sig_5d (IN1) to a low level. This causes the CP circuit 41 to perform the first charge pump operation, thereby turning on the transistor M1. As a result, the charging current of the capacitor CB flows from the control power supply line LN_VCC toward the boot voltage line LN_VB.
  • the logic circuit 540 sets the control signal Sig_5d (IN1) to a high level, whereby the CP circuit 41 stops the first charge pump operation by , thereby turning off transistor M1. As a result, overcharging of the capacitor CB is suppressed.
  • FIG. 50 shows an example of the relationship between the output terminal voltage VS and the difference voltage (VB ⁇ VS) when the gain of the feedback loop is the gain G1
  • FIG. 51 shows the output when the gain of the feedback loop is the gain G2.
  • An example of the relationship between the terminal voltage VS and the differential voltage (VB-VS) is shown. Here, "G1>G2".
  • the potential of the signal Sig_5c becomes sufficiently low when "(VB ⁇ VS) ⁇ Vth_dff" holds, and the level of the control signal IN1 also becomes sufficiently low upon receiving the signal Sig_5c with a sufficiently low potential. Become. As a result, a sufficiently high potential of the gate SW_G1 is obtained, and the transistor M1 is turned on with a low on-resistance.
  • an intermediate potential refers to a potential between a high level and a low level, which is neither classified as a high level nor a low level.
  • the drive control signals HIN and LIN may be signals generated inside the semiconductor device 1 .
  • the control power supply voltage VCC is controlled within the semiconductor device 1 based on a power supply voltage (a power supply voltage other than the control power supply voltage VCC, for example, a power supply voltage VP or another power supply voltage not shown) supplied to the semiconductor device 1 from the outside. It may be a voltage generated by In this case, the control power supply terminal TM14 in FIG. 1 may be an internal terminal provided inside the semiconductor device 1 instead of an external terminal.
  • a power supply voltage a power supply voltage other than the control power supply voltage VCC, for example, a power supply voltage VP or another power supply voltage not shown
  • the semiconductor device 1 can also be used to drive a three-phase motor.
  • the three-phase coils of the three-phase motor are connected to the semiconductor device 1 as a three-phase load LD, and the semiconductor device 1 is provided with a three-phase circuit for driving the three-phase load LD. It should be set.
  • FET field effect transistor
  • any of the transistors described above may be any type of transistor as long as there is no inconvenience.
  • any transistor described above as a MOSFET can be replaced with a junction FET, an IGBT (Insulated Gate Bipolar Transistor), or a bipolar transistor as long as it does not cause any inconvenience.
  • Any transistor has a first electrode, a second electrode and a control electrode.
  • a FET one of the first and second electrodes is the drain and the other is the source, and the control electrode is the gate.
  • an IGBT one of the first and second electrodes is the collector and the other is the emitter, and the control electrode is the gate.
  • a bipolar transistor not belonging to an IGBT one of the first and second electrodes is the collector and the other is the emitter and the control electrode is the base.
  • a semiconductor device includes a first output transistor (MH) and the first output transistor on the low potential side of the first output transistor.
  • a second output transistor (ML) connected in series to the first terminal (TM11) connected to a connection node between the first output transistor and the second output transistor; a second terminal (TM12) configured to be connected through a capacitor (CB); and a first driver configured to drive the first output transistor based on the voltage between the first terminal and the second terminal.
  • a second driver (20) configured to drive said second output transistor, and a first switch element ( M1), and a second switch element (M2) composed of an N-channel MOSFET having a source for receiving a predetermined control power supply voltage (VCC) and having a drain connected to the drain of the first switch element, a switch control circuit (50) configured to control ON or OFF of the first switch element and the second switch element according to the voltage (VS) of the first terminal (hereinafter referred to as configuration W A1 ).
  • the switch control circuit operates with the potential of the first terminal as a reference when the polarity of the voltage (VS) at the first terminal is negative.
  • the first switching element may be switched between ON and OFF according to the difference voltage (VB-VS) between the first terminal and the second terminal (hereinafter referred to as a configuration W A2 ).
  • the bootstrap capacitor When the polarity of the voltage (VS) at the first terminal is negative, a large charging current can be supplied to the bootstrap capacitor. However, if the charging current is constantly supplied to the bootstrap capacitor during the period when the polarity of the voltage (VS) at the first terminal is negative, the bootstrap capacitor may be overcharged. Overcharging of the bootstrap capacitor can be suppressed by switching the first switch element between on and off according to the differential voltage.
  • the switch control circuit controls the difference voltage to be a predetermined voltage (Vth_dff ), and turns off the first switch element when the differential voltage is higher than the predetermined voltage (hereinafter referred to as configuration W A3 ).
  • the switch control circuit controls the second switch element when the voltage (VS) at the first terminal is higher than a positive threshold voltage. may be turned off (hereinafter referred to as a configuration W A4 ).
  • the switch control circuit controls the first output transistor when the first output transistor is off and the second output transistor is on.
  • a configuration in which the switch element and the second switch element are turned on (hereinafter referred to as configuration W A5 ) may be used.
  • the required current can be supplied to the bootstrap capacitor during the period in which the first output transistor is off and the second output transistor is on.
  • the current flowing through the bootstrap capacitor is relatively small. Therefore, there is no concern that the bootstrap capacitor will be overcharged by the current during this period.
  • the semiconductor device has a first output node (OUT1), and the voltage of the second terminal is based on the potential of the first terminal.
  • a first charge pump circuit (41) capable of generating a first boosted voltage higher than the voltage of the second terminal at the first output node by a first charge pump operation
  • a second output node (OUT2) a second charge pump circuit (42) capable of generating a second boosted voltage higher than the control power supply voltage at the second output node by a second charge pump operation based on the control power supply voltage with reference to ground potential
  • the first output node is connected to the gate of the first switch element
  • the second output node is connected to the gate of the second switch element
  • the switch control circuit is connected to the first charge pump circuit.
  • the second output transistor is provided between the first terminal and a reference potential point having a ground potential (hereinafter referred to as structure WA7) . ) may be
  • a semiconductor device includes a first line (LN_VS) configured to be applied with a target voltage (VS) with varying polarities, A second line (LN_VB) configured to be connected to the first line through a capacitor (CB; see FIG. 1), a ground line (LN_GND) configured to be applied with ground potential, and a positive control supply voltage ( VCC), connected to the first line, the second line, the ground line and the control power line (LN_VCC) to detect whether the polarity of the target voltage is negative.
  • LN_VS first line
  • VCC positive control supply voltage
  • a negative voltage detection circuit configured to: the negative voltage detection circuit having a current path (CP_ngnd) between the second line and the ground line, wherein the target voltage and the negative voltage detection circuit generates a signal representing the result of the detection based on the direction of the current in the current path, the first detection based on the potential of the first line A configuration (hereinafter referred to as configuration W B1 ) configured to output a signal (Sig_n1) and a second detection signal (Sig_n2) based on the ground potential.
  • configuration W B1 configured to output a signal (Sig_n1) and a second detection signal (Sig_n2) based on the ground potential.
  • the negative voltage detection circuit may be configured to simultaneously output the first detection signal and the second detection signal (hereinafter referred to as configuration W B2 ). good.
  • the negative voltage detection circuit is provided between the reference current path (CP_ngnd) as the current path and the second line and the first line. with the other current path (CP_nvs), the first current mirror transistor (211) inserted on the other current path, and the second current mirror transistor (212) inserted on the reference current path a current mirror circuit (210) configured, a first detection signal generation circuit (220) configured to generate the first detection signal (Sig_n1) based on the current in the other current path, and the reference current a second detection signal generation circuit (230) configured to generate the second detection signal (Sig_n2) based on the current in the path (hereinafter referred to as configuration W B3 ).
  • the target voltage is a positive voltage in the first period (state ST_n1 in FIG. 19).
  • the target voltage decreases from the positive voltage to the negative voltage, and then the target voltage decreases to the negative voltage. 20 (corresponding to state ST_n3 in FIG. 20).
  • the second detection signal having the first value (corresponding to the low level signal Sig_n2 in the example of FIG.
  • the first detection signal having the first value (corresponding to the low-level signal Sig_n1 in the example of FIG. 19) is generated by the first detection signal generating circuit due to the current flowing through the other current path,
  • the second detection signal (FIG. 20) having a second value is generated by the second detection signal generation circuit. (corresponding to a high level signal Sig_n2 in the example of ) is generated, and in the other current path, the first current mirror transistor is turned off, so that the first detection signal generating circuit detects the second (corresponding to the high level signal Sig_n1 in the example of FIG.
  • each value of the first detection signal and the second detection signal is equal to the value of the second detection signal A configuration (hereinafter referred to as configuration W B4 ) in which the value of 1 (corresponding to low level, for example) is switched to the second value (corresponding to high level, for example) may be employed.
  • the first detection signal generation circuit is provided in series with the first current mirror transistor (211) in the other current path, and is connected to a predetermined first node (n1_pre) and The first detection signal (Sig_n1 ), wherein the second detection signal generation circuit is configured to generate the second current mirror transistor (212) in the reference current path.
  • a second resistor (232) provided in series and inserted between a predetermined second node (n2_pre) and the ground line; and binarizing the voltage at the second node based on the potential of the ground line. and second binarization circuits (233 and 234) configured to generate the second detection signal (Sig_n2) by doing so (hereinafter referred to as configuration W B5 ).
  • the first detection signal generation circuit has an adjustment circuit (223) for adjusting a resistance value between the first node and the first line, and the target voltage is A configuration (hereinafter referred to as configuration W B6 ) in which the resistance value between the first node and the first line is varied depending on whether the voltage is higher than the positive threshold voltage may be used.
  • the first detection result indicating the correct detection result is obtained. 1 detection signal can be generated. In addition, it is possible to reduce detection delay through changes in the resistance value between the first node and the first line during transient response based on fluctuations in the target voltage.
  • the semiconductor device transitions from the first period to the third period through the second period, and then enters the fourth period (corresponding to state ST_n4 in FIG. 21). 21), the sequence of returning to the first period is repeated, and in the fourth period, the target voltage is the positive voltage in the first period and a specific voltage (e.g., 0 V) higher than the negative voltage in the third period, and the target voltage increases from the specific voltage toward the positive voltage in the fifth period.
  • a specific voltage e.g., 0 V
  • each value of the first detection signal and the second detection signal is changed from the second value (e.g., corresponding to a high level) in response to switching from the third period to the fourth period; is switched to the first value (for example, corresponding to low level), and each value of the first detection signal and the second detection signal is changed to the first value (for example, to low level) in the fourth period and the fifth period. correspondence), and in the fourth period, the second detection signal generation circuit has the first value due to the current flowing through the reference current path from the second line to the ground line.
  • the second detection signal (corresponding to the low-level signal Sig_n2 in the example of FIG. 21) is generated, and current flows through the other current path from the second line to the first line.
  • the 1 detection signal generating circuit generates the first detection signal having the first value (corresponding to the low level signal Sig_n1 in the example of FIG. 21), and the magnitude of the current flowing through the reference current path the magnitude of the current flowing through the other current path is smaller in the fourth period than in the first period;
  • the target voltage is higher than the positive threshold voltage, and the target voltage is lower than the positive threshold voltage in the fourth period, and the first detection signal generation circuit is configured to be higher in the fourth period than in the first period.
  • the adjustment circuit may be used to increase the resistance value between the first node and the first line (hereinafter referred to as a configuration W B7 ).
  • the first detection result indicating the correct detection result is obtained. 1 detection signal can be generated. In addition, it is possible to reduce detection delay through changes in the resistance value between the first node and the first line during transient response based on fluctuations in the target voltage.
  • the first current mirror transistor and the second current mirror transistor have sources connected in common to each other through the second line and gates to each other in common.
  • the sources of the first current mirror transistor and the second current mirror transistor are commonly connected to each other through the second line, and the gates are common to each other.
  • the semiconductor device includes a first output transistor (MH) and a low potential side of the first output transistor connected in series with the first output transistor. a second output transistor (ML), wherein the first line (LN_VS) is connected to a connection node between the first output transistor and the second output transistor, the semiconductor device comprising: the first line and the second output transistor; a first driver (10) configured to drive the first output transistor based on the voltage across the second line; a second driver (20) configured to drive the second output transistor; A first switch element (M1) composed of an N-channel MOSFET having a source connected to the second line, and a source receiving the control power supply voltage (VCC) and connected to the drain of the first switch element a second switch element (M2) composed of an N-channel MOSFET having a connected drain, and turning on or off the first switch element and the second switch element according to the voltage (VS) of the first line; a switch control circuit (50) configured to control off,
  • a semiconductor device includes a first line (LN_VS) configured to apply a varying target voltage (VS), A second line (LN_VB) configured to be connected to the first line through a capacitor (CB), a ground line (LN_GND) configured to be applied with a ground potential, and a positive control power supply voltage (VCC).
  • LN_VS first line
  • LN_VB second line
  • CB capacitor
  • LN_GND ground line
  • VCC positive control power supply voltage
  • a controlled power supply line (LN_VCC) configured to apply voltage, and connected to the first line, the second line, the ground line and the controlled power supply line for determining whether the target voltage is higher than a positive threshold voltage (Vth_p); a high voltage detection circuit (52) configured to detect, said high voltage detection circuit having a current path (CP_pgnd) between said second line and said ground line, wherein a current flow in said current path The magnitude and presence/absence depend on the target voltage, and the high voltage detection circuit generates a first detection signal referenced to the potential of the first line as a signal representing the detection result based on the current in the current path. (Sig_p1) and a second detection signal (Sig_p2) based on the ground potential (hereinafter referred to as configuration W C1 ).
  • the high voltage detection circuit may be configured to output the first detection signal and the second detection signal at the same time (hereinafter referred to as configuration WC2 ). good.
  • the high voltage detection circuit is provided between the reference current path (CP_pgnd) as the current path and the second line and the first line. with the other current path (CP_pvs), the first current mirror transistor (311) inserted on the other current path, and the second current mirror transistor (312) inserted on the reference current path a current mirror circuit (310) configured, a first detection signal generation circuit (320) configured to generate the first detection signal (Sig_p1) based on the current in the other current path, and the reference current and a second detection signal generation circuit (330) configured to generate the second detection signal (Sig_p2) based on the current in the path (hereinafter referred to as configuration W C3 ).
  • the target voltage is a specific voltage (for example, 0 V) lower than the positive threshold voltage.
  • the target voltage is changed to the positive Transitioning to a third period (corresponding to state ST_p3 in FIG.
  • a current limiter (340) for suppressing current generation in the current path is provided in series with the second current mirror transistor (see state ST_p1 in FIG. 30).
  • the second detection signal having a first value in the second detection signal generation circuit (corresponding to the low level signal Sig_p2 in the example of FIG. 30) is generated, and the first current mirror transistor is turned off in the other current path, so that the first detection signal having the first value is generated in the first detection signal generation circuit (Fig.
  • configuration W C4 a configuration in which each value of the first detection signal and the second detection signal is switched from the first value (for example, corresponding to low level) to the second value (for example, corresponding to high level) (hereinafter, configuration W C4 ) may be used.
  • the first detection signal generation circuit is provided in series with the first current mirror transistor (311) in the other current path, and is connected to a predetermined first node (p1_pre) and The first detection signal (Sig_p1 ), wherein the second detection signal generation circuit is configured to generate the second current mirror transistor (312) in the reference current path.
  • a second resistor (332) provided in series and inserted between a predetermined second node (p2_pre) and the ground line; and binarizing the voltage at the second node based on the potential of the ground line.
  • a second binarization circuit (333, 334, 337 and 338) configured to generate the second detection signal ( Sig_p2 ) by Also good.
  • the first detection signal generation circuit has an adjustment circuit (323) for adjusting a resistance value between the first node and the first line, and the target voltage is
  • a configuration (hereinafter referred to as configuration W C6 ) may be employed in which the resistance value between the first node and the first line is varied depending on whether it has a negative polarity.
  • the semiconductor device transitions from the first period to the third period through the second period, and then the fourth period (state ST_p4a in FIG. 31 and state ST_p4a in FIG. 32). (corresponding to the state ST_p4b) to the fifth period (corresponding to the state ST_p5 in FIG. 32), and then the sequence of returning to the first period is repeated.
  • each value of the detection signal is maintained at the first value (e.g., corresponding to a low level), and when the target voltage has a negative polarity, the first current mirror transistor is in an off state;
  • the first detection signal generation circuit uses the adjustment circuit to increase the resistance between the first node and the first line when the target voltage has a negative polarity rather than when the target voltage has a positive polarity. may be reduced (hereinafter referred to as a configuration W C7 ).
  • the first current mirror transistor and the second current mirror transistor have sources connected in common to each other through the second line and gates to each other in common.
  • the first current mirror transistor and the second current mirror transistor have sources connected in common to each other through the second line and gates to each other in common.
  • the semiconductor device includes a first output transistor (MH) and a low potential side of the first output transistor connected in series with the first output transistor.
  • a second output transistor (ML) wherein the first line is connected to a connection node between the first output transistor and the second output transistor;
  • a first driver (10) configured to drive said first output transistor based on a line-to-line voltage;
  • a second driver (20) configured to drive said second output transistor;
  • a first switch element (M1) composed of an N-channel MOSFET having a source connected to the line, and having a source for receiving the control power supply voltage (VCC) and connected to the drain of the first switch element.
  • a second switch element (M2) composed of an N-channel MOSFET having a drain, and controlling on or off of the first switch element and the second switch element according to the voltage (VS) of the first line and a switch control circuit (50) configured to: depending on whether the target voltage is above the positive threshold voltage and whether the polarity of the target voltage is negative. , a configuration that performs the above control (hereinafter referred to as configuration W C10 ).
  • a charge pump circuit (fourth embodiment; see FIG. 37 or FIG. 46) according to the fourth aspect of the present disclosure supplies a first voltage (V1 ) or a voltage supply circuit (INV0) configured to supply a second voltage (V2) higher than the first voltage, and the first line (LN1) and the second line (LN2).
  • Vc voltage difference between the voltage of the first line from the first voltage (V1) to the second voltage (V2) (hereinafter referred to as W D1 ) which turns on in response to an increase in .
  • desired boosting can be achieved with a simple configuration (for example, a small number of elements).
  • the first switch element is composed of a P-channel MOSFET (421), and the MOSFET as the first switch element has the source It may be connected to the second line, the gate is connected to the power supply line, and the drain is connected to the third line (hereinafter referred to as a configuration W D2 ).
  • the second switch element is composed of an N-channel MOSFET (422), and the MOSFET as the second switch element has the drain A configuration in which the first electrode is connected to the third line, the source is the second electrode and is connected to the first line, and the gate is connected to the power source line (hereinafter referred to as configuration W D3 ).
  • the breakdown voltage required for the second switch element can be kept low.
  • the voltage of the second line is used as the positive side power supply voltage and the voltage of the first line is used as the negative side power supply voltage.
  • the first rectifying element inverter circuit (INV1) is provided, the first rectifying element (431) is composed of a P-channel MOSFET, and the first diode is a parasitic diode in the MOSFET as the first rectifying element Including, in the MOSFET as the first rectifying element, the source is connected to the second line, the drain is connected to the power supply line, and the output voltage of the inverter circuit for the first rectifying element is applied to the gate (hereinafter , configuration W D4 ).
  • the voltage of the output line is used as a positive power supply voltage and the voltage of the third line is used as a negative power supply voltage, It is configured to output the voltage (Vd) of the third line or the voltage (Vout) of the output line according to the level relationship between the voltage of the second line, the voltage of the output line, and the voltage of the third line.
  • a second rectifying element inverter circuit (INV2), wherein the second rectifying element (432) is composed of a P-channel MOSFET, and the second diode includes a parasitic diode in the MOSFET as the second rectifying element , in the MOSFET as the second rectifying element, the source is connected to the output line, the drain is connected to the second line, and the output voltage of the inverter circuit for the second rectifying element is applied to the gate (hereinafter referred to as configuration W D5 ).
  • the second switch element is composed of an N-channel MOSFET (422'), and the second switch element is , the drain is the first electrode and is connected to the third line, the source is the second electrode and is supplied with the first voltage, and the gate is supplied with the control signal ( hereinafter referred to as a configuration W D6 ).
  • the first rectifying element is the first diode (431′), and the first diode may be configured to be connected to the power supply line (hereinafter referred to as configuration W D7 ).
  • the second rectifying element is the second diode (432′), and the The anode of the second diode may be configured to be connected to the power supply line (hereinafter referred to as configuration W D8 ).
  • the first output transistor (MH) and the low potential side of the first output transistor have the a second output transistor (ML) connected in series with the first output transistor; a first terminal (TM11) connected to a connection node between the first output transistor and the second output transistor; a second terminal (TM12) configured to be connected through a bootstrap capacitor (CB), and configured to drive the first output transistor based on the voltage between the first terminal and the second terminal; a first driver (10) configured to drive said second output transistor; a second driver (20) configured to drive said second output transistor; 1 switch element (M1) and a second switch element (M1) composed of an N-channel MOSFET having a source for receiving a predetermined control power supply voltage (VCC) and a drain connected to the drain of the first switch element M2), and a switch control circuit (50) configured to control on or off of the first switch element and the second switch element according to the
  • a configuration hereinafter referred to as configuration W D9 ) may be used.
  • the semiconductor device according to configuration W D9 it is possible to properly control the charging voltage of the bootstrap capacitor.
  • the charge pump circuit according to any one of the configurations W D1 to W D8 it is possible to turn on the first switch element with a simple configuration (for example, a small number of elements). can be obtained.
  • the first output transistor (MH) and the low potential side of the first output transistor have the a second output transistor (ML) connected in series with the first output transistor; a first terminal (TM11) connected to a connection node between the first output transistor and the second output transistor; a second terminal (TM12) configured to be connected through a bootstrap capacitor (CB), and configured to drive the first output transistor based on the voltage between the first terminal and the second terminal; a first driver (10) configured to drive said second output transistor; a second driver (20) configured to drive said second output transistor; 1 switch element (M1) and a second switch element (M1) composed of an N-channel MOSFET having a source for receiving a predetermined control power supply voltage (VCC) and a drain connected to the drain of the first switch element M2), and a switch control circuit (50) configured to control on or off of the first switch element and the second switch element according to the
  • configuration W D10 A configuration in which the second switch element is turned on (hereinafter referred to as configuration W D10 ) may be employed.
  • the semiconductor device according to configuration W D10 it is possible to properly control the charging voltage of the bootstrap capacitor. In other words, for example, when the bootstrap capacitor is overcharged, there is concern that the first output transistor may exceed the withstand voltage . It can be driven safely and properly.
  • the charge pump circuit according to any one of the configurations W D1 to W D8 it is possible to turn on the second switch element with a simple configuration (for example, a small number of elements). can be obtained.
  • a semiconductor device includes a first output transistor (MH), and the first output transistor on the low potential side of the first output transistor.
  • a second output transistor (ML) connected in series to the first terminal (TM11) connected to a connection node between the first output transistor and the second output transistor; a second terminal (TM12) configured to be connected through a capacitor (CB); and a first driver configured to drive the first output transistor based on the voltage between the first terminal and the second terminal.
  • a second driver (20) configured to drive said second output transistor, a control power supply line (LN_VCC) to which a predetermined control power supply voltage (VCC) is applied, and said second terminal.
  • a switch control circuit (50) configured to control the switch circuit based on the voltage between the first terminal and the second terminal (hereinafter referred to as configuration W E1 ).
  • the switch control circuit controls the switch circuit so that the differential voltage (VB ⁇ VS) between the first terminal and the second terminal is stabilized.
  • a configuration W E2 the switch control circuit controls the switch circuit so that the differential voltage (VB ⁇ VS) between the first terminal and the second terminal is stabilized.
  • the switch control circuit controls the charging of the bootstrap capacitor via the switch circuit to control the difference voltage may be a configuration (hereinafter referred to as configuration W E3 ) that stabilizes .
  • the switch circuit includes a first switch element (M1) composed of an N-channel MOSFET having a source connected to the second terminal; a second switch element (M2) composed of an N-channel MOSFET having a source connected to a control power supply line and having a drain connected to the drain of the first switch element, wherein the switch control
  • the circuit switches the first switch element between on and off according to the difference voltage (VB-VS) when the polarity of the voltage (VS) at the first terminal is negative, thereby converting the difference voltage into
  • a stabilizing configuration hereinafter referred to as configuration WE4 ) may also be used.
  • the bootstrap capacitor When the polarity of the voltage (VS) at the first terminal is negative, a large charging current can be supplied to the bootstrap capacitor. However, if the charging current is constantly supplied to the bootstrap capacitor during the period when the polarity of the voltage (VS) at the first terminal is negative, the bootstrap capacitor may be overcharged. Overcharging of the bootstrap capacitor can be suppressed by switching the first switch element between on and off according to the differential voltage.
  • the switch control circuit controls the first terminal when the polarity of the voltage (VS) at the first terminal is negative and the differential voltage is lower than a predetermined voltage (Vth_dff).
  • a switch element may be turned on, and the first switch element may be turned off when the differential voltage is higher than the predetermined voltage (hereinafter referred to as WE5 ).
  • the switch control circuit turns off the second switch element when the voltage (VS) at the first terminal is higher than a positive threshold voltage (Vth_p). (hereinafter referred to as configuration WE6 ).
  • the switch control circuit controls the first switch element and the second output transistor when the first output transistor is off and the second output transistor is on.
  • a configuration in which two switch elements are turned on (hereinafter referred to as configuration W E7 ) may also be used.
  • the required current can be supplied to the bootstrap capacitor during the period in which the first output transistor is off and the second output transistor is on.
  • the current flowing through the bootstrap capacitor is relatively small. Therefore, there is no concern that the bootstrap capacitor will be overcharged by the current during this period.
  • the switch control circuit includes a comparator (520) configured to compare a feedback voltage (Vfb) corresponding to the differential voltage with a reference voltage (Vref). and a logic circuit (540) configured to generate a control signal (Sig_5d) for controlling the state of the switch circuit based on the comparison result of the comparator, the feedback including the comparator and the logic circuit.
  • a configuration that forms a loop (hereinafter referred to as configuration WE8 ) may also be used.
  • the charging voltage of the bootstrap capacitor can be kept at an appropriate level.
  • configuration WE9 a configuration (hereinafter referred to as configuration WE9 and ) may be used.
  • SYS system (load drive system) 1 semiconductor device 2 MPU 3, 4 voltage source LD load CB bootstrap capacitor TM11 output terminal TM12 boot terminal TM13 ground terminal TM14 control power supply terminal TM15 power supply terminal TM16 low side terminals TM17, TM18 control input terminal MH high side output transistor ML low side output transistor 10 high side driver 20 low-side driver 30 switch circuit 40 switch driver 50 switch control circuit VS output terminal voltage VB boot voltage VCC control power supply voltage VP power supply voltage M1, M2 transistors 41, 42 charge pump circuit 51 negative voltage detection circuit 52 high voltage detection circuit 53 difference Voltage detection circuits 54, 55 Signal generation circuit LN_VB Boot voltage line LN_VS Output terminal line LN_VCC Control power supply line LN_GND Ground power supply lines Sig_n, Sig_n1, Sig_n2 Negative voltage detection signals Sig_p, Sig_p1, Sig_p2 High voltage detection signals IN1, IN2 Control signal 210 Current Mirror circuits 220 and 230 Detection signal generation circuit

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US20210091655A1 (en) * 2019-09-23 2021-03-25 Stmicroelectronics Asia Pacific Pte Ltd Floating power supply for a driver circuit configured to drive a high-side switching transistor
US11095229B1 (en) * 2020-09-24 2021-08-17 Monolithic Power Systems, Inc. High switching frequency direct AC to AC converter

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US10673426B2 (en) * 2018-08-08 2020-06-02 University Of Electronic Science And Technology Of China Switch bootstrap charging circuit suitable for gate drive circuit of GaN power device
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* Cited by examiner, † Cited by third party
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US20210091655A1 (en) * 2019-09-23 2021-03-25 Stmicroelectronics Asia Pacific Pte Ltd Floating power supply for a driver circuit configured to drive a high-side switching transistor
US11095229B1 (en) * 2020-09-24 2021-08-17 Monolithic Power Systems, Inc. High switching frequency direct AC to AC converter

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