WO2023026646A1 - 撮影用筐体及び検査装置 - Google Patents

撮影用筐体及び検査装置 Download PDF

Info

Publication number
WO2023026646A1
WO2023026646A1 PCT/JP2022/023884 JP2022023884W WO2023026646A1 WO 2023026646 A1 WO2023026646 A1 WO 2023026646A1 JP 2022023884 W JP2022023884 W JP 2022023884W WO 2023026646 A1 WO2023026646 A1 WO 2023026646A1
Authority
WO
WIPO (PCT)
Prior art keywords
light source
housing
imaging device
imaging
mounting portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2022/023884
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
睦 川中子
慶延 岸根
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
Original Assignee
Fujifilm Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujifilm Corp filed Critical Fujifilm Corp
Priority to CN202280055206.7A priority Critical patent/CN117813489A/zh
Priority to JP2023543713A priority patent/JPWO2023026646A1/ja
Publication of WO2023026646A1 publication Critical patent/WO2023026646A1/ja
Priority to US18/427,835 priority patent/US20240167876A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2823—Imaging spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0251—Colorimeters making use of an integrating sphere
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B15/00—Special procedures for taking photographs; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B15/00—Special procedures for taking photographs; Apparatus therefor
    • G03B15/02—Illuminating scene
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B15/00—Special procedures for taking photographs; Apparatus therefor
    • G03B15/02—Illuminating scene
    • G03B15/03—Combinations of cameras with lighting apparatus; Flash units
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B15/00—Special procedures for taking photographs; Apparatus therefor
    • G03B15/02—Illuminating scene
    • G03B15/03—Combinations of cameras with lighting apparatus; Flash units
    • G03B15/05—Combinations of cameras with electronic flash apparatus; Electronic flash units
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B15/00—Special procedures for taking photographs; Apparatus therefor
    • G03B15/02—Illuminating scene
    • G03B15/06—Special arrangements of screening, diffusing, or reflecting devices, e.g. in studio
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2823—Imaging spectrometer
    • G01J2003/2826—Multispectral imaging, e.g. filter imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0248—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using a sighting port, e.g. camera or human eye

Definitions

  • the present invention relates to an imaging housing and an inspection device.
  • Patent Document 1 proposes a housing that includes an imaging device and a lighting device, and proposes a technique intended to stably evaluate fabric products.
  • An embodiment according to the technology of the present disclosure provides an imaging housing and an inspection apparatus that can change the degree of diffusion of light from a light source according to the shape of an object and irradiate the object.
  • an imaging housing which is one aspect of the present invention, comprises a housing that covers a shooting space, an imaging device mounting portion for mounting an imaging device on a first surface of the housing, and a a light source mounting portion provided on a second surface that intersects with the first surface and to which a first light source for illuminating the inside of the housing is mounted;
  • the housing includes a diffusion member provided therein;
  • a light source mounting portion having a first opening facing a lens of an imaging device, a second opening on a second surface, a movable plate for changing an opening area of the second opening on which light from the first light source is incident, and a light source mounting portion. has a change mechanism capable of changing the orientation of the first light source in the aperture region.
  • the diffusion member is replaceable.
  • the housing has an insertion/extraction mechanism, and the diffusion member is provided in the housing by the insertion/extraction mechanism.
  • the diffusion member attached to the bottom of the housing is removable.
  • the first surface of the housing is provided with an imaging device hood.
  • the imaging device is detachably attached to the imaging device mounting portion.
  • the imaging device mounting portion has a shooting direction adjustment mechanism that adjusts the shooting direction of the imaging device.
  • An inspection apparatus which is another aspect of the present invention, includes the imaging housing described above, an imaging device provided in the imaging device mounting portion, and a first light source provided in the light source mounting portion.
  • the light source mounting portion is composed of a first light source mounting portion and a second light source mounting portion, the first light source mounting portion is provided with the first light source, and the second light source mounting portion is provided with the second light source. .
  • an intensity changing mechanism for changing the wavelength intensity of the first light source and the second light source is provided.
  • the first light source is a halogen lamp and the second light source is a metahalane lamp.
  • the imaging device is a multispectral camera
  • the multispectral camera is a pupil division type in which a plurality of bandpass filters are arranged at or near the pupil position.
  • FIG. 1 is a conceptual diagram for explaining an inspection device.
  • FIG. 2 is a perspective view of the imaging housing.
  • FIG. 3 is a view of the photographing housing viewed from the Y-axis direction.
  • FIG. 4 is a plan view of the imaging housing.
  • FIG. 5 is a bottom view of the imaging housing.
  • FIG. 6 is a diagram conceptually showing an example of the characteristics of the diffusion member.
  • FIG. 7 is a front view with the irradiation aperture facing the front.
  • FIG. 8 is a front view with the irradiation aperture facing forward.
  • FIG. 9 is a diagram for explaining the degree of diffusion of light from the first light source according to the position of the movable plate.
  • FIG. 9 is a diagram for explaining the degree of diffusion of light from the first light source according to the position of the movable plate.
  • FIG. 10 is a cross-sectional view in the direction of the optical axis L of the lens device attached to the multispectral camera.
  • FIG. 11 is a conceptual diagram for explaining an inspection device.
  • FIG. 12 is a perspective view of the imaging housing.
  • FIG. 13 is a diagram showing spectrum data of a halogen lamp.
  • FIG. 14 is a diagram showing spectrum data of a metahalal lamp.
  • FIG. 1 is a conceptual diagram for explaining the inspection apparatus of this embodiment.
  • the inspection apparatus 1 includes a control unit 3, an imaging device 10, a first light source 20, and a housing 100 for imaging.
  • the imaging housing 100 includes the imaging device 10 and the first light source 20 , and the work S to be inspected is arranged inside the imaging housing 100 .
  • the imaging device 10 is detachably attached to the imaging housing 100, and images the work S, which is an inspection target.
  • the imaging device 10 for example, a multispectral camera, a hyperspectral camera, or the like is used.
  • the work S can be inspected by photographing the work S with the imaging device 10 and analyzing the obtained data.
  • the imaging device 10 is attached to the imaging housing 100 and photographs the work S in the imaging space covered by the imaging housing 100 (housing 111).
  • the first light source 20 is a lighting device that irradiates the work S with light.
  • a halogen lamp, a metal halide lamp, an LED (Light Emitting Diode) lamp, or the like is used as the first light source 20 .
  • the first light source 20 is attached to the imaging housing 100 by a first light source attachment portion (light source attachment portion) 113 (FIG. 2).
  • the control unit 3 is configured by a computer, and a CPU (Central Processing Unit: processor) installed in the computer executes a program stored in a memory to control the operations of the imaging device 10 and the first light source 20.
  • the control unit 3 controls the start and end of imaging by the imaging device 10 .
  • the control unit 3 acquires and analyzes still image or moving image data of the workpiece S acquired by the imaging device 10, and outputs inspection results.
  • the control unit 3 controls power ON/OFF of the first light source 20 .
  • the control unit 3 can centrally control operations related to the inspection apparatus 1 .
  • FIG. 2 to 5 are diagrams for explaining the imaging housing 100.
  • FIG. 2 is a perspective view of the imaging housing 100
  • FIG. 3 is a view of the imaging housing 100 viewed from the Y-axis direction
  • FIG. 4 is a plan view of the imaging housing 100
  • FIG. 4 is a bottom view of the imaging housing 100.
  • FIG. 3 some members are indicated by imaginary lines (double-dot chain lines).
  • the panel 101E is omitted.
  • the imaging housing 100 includes a housing 111 , an imaging device mounting portion 125 and a first light source mounting portion (light source mounting portion) 113 .
  • the housing 111 preferably has a cubic or rectangular parallelepiped box shape.
  • the housing 111 is composed of a panel frame 103 and panels (101A, 101B, 101C, 101D, 101E) attached to the panel frame 103.
  • a panel 101A is provided on the top surface of the housing 111
  • a panel 101E is provided on the bottom surface of the housing 111
  • three of the four side surfaces of the housing 111 are provided with panels.
  • 101B, panel 101C, and panel 101D are provided (see FIGS. 2 and 3).
  • One side surface (second surface) of the housing 111 on which the panel is not provided is formed with an irradiation opening T (second opening) for irradiating light from the first light source 20 (see FIG. 2).
  • the aperture area of the irradiation aperture T is changed by the movable plate 107 as will be described later.
  • the movable plate 107 is attached by movable plate attachment portions 105A and 105B respectively provided on the panel frame 103 and the movable plate 107 (see FIG. 2).
  • the movable plate 107 can be moved in the vertical direction (positive direction and negative direction of the Z-axis). By moving the movable plate 107, the light diffusion degree of the first light source 20 can be changed.
  • FIGS. 2 and 3 show a state in which the movable plate 107 is positioned on the lower side.
  • the movable plate mounting portions 105A and 105B are mounted on the upper side (Z-axis direction plus side).
  • a lens opening U (first opening) is provided on the top surface of the housing 111 (the surface formed by the panel 101A: first surface) (see FIGS. 3 and 5).
  • a lens barrel (lens) 10a of the imaging device 10 is arranged to face the lens opening U (see FIG. 5).
  • the imaging device 10 is installed facing downward (in the negative direction of the Z axis), and images the work S placed on the bottom surface of the housing 111 (the surface formed by the panel 101E).
  • an imaging device hood 117 is provided in the lens opening U provided in the panel 101A (see FIG. 3).
  • the image pickup device hood 117 functions as a light shield for the image pickup device 10 and assists the image pickup device 10 in proper photographing. Note that the upper surface (first surface) and the side surface (second surface) of the housing 111 intersect.
  • a diffusion member is provided inside the housing 111 .
  • the panels 101A to 101E are composed of diffusion plates.
  • a diffusion member is also provided on the inner surface of the movable plate 107 (the surface opposite to the surface facing the first light source 20).
  • the panels 101A to 101E are composed of diffusion plates similar to those of the panels 101A to 101E.
  • FIG. 6 is a diagram conceptually showing an example of the characteristics of the diffusion member used in the housing 111.
  • the vertical axis indicates wavelength intensity, and the horizontal axis indicates wavelength.
  • the imaging device 10 it is preferable to use diffusion members having similar wavelength intensities at least between the wavelengths used in the imaging device 10. For example, as shown in FIG. 6, it is preferable to use a diffusing member having a flat wavelength intensity characteristic in a predetermined wavelength band. By using such a diffusion member for housing 111, errors in data obtained at each wavelength can be suppressed.
  • the diffusion member is replaceably provided in the imaging housing 100 .
  • the panels 101A to 101E are provided on the panel frame 103 by an insertion/extraction mechanism (not shown), and the panels 101A to 101E are replaceable.
  • the panel 101E provided at the bottom of the imaging housing 100 is detachable. By removing the panel 101E and installing the photographing housing 100 on the upper part of the belt conveyor, it is possible to inspect the workpieces S continuously conveyed by the belt conveyor.
  • the first light source 20 is attached to the imaging housing 100 by the first light source attachment portion 113 .
  • the first light source mounting portion 113 has a changing mechanism 113a capable of changing the orientation of the first light source 20 (see FIGS. 2 and 3).
  • the first light source 20 irradiates the irradiation opening T with light by changing the direction thereof by the changing mechanism 113a.
  • the orientation of the first light source 20 is changed manually or automatically.
  • the imaging device 10 is detachably attached to the housing 111 by an imaging device attachment portion 125 provided on the panel 101A.
  • the imaging device mounting portion 125 is composed of a first mounting member 110A, a second mounting member 110B, a mounting plate 110C, a pan head 110D, and a height adjusting mechanism 110E (see FIGS. 2 and 4).
  • the first mounting members 110A are provided in pairs on the panel 101A and the panel frame 103 in parallel.
  • the second mounting members 110B are provided on the first mounting member 110A in pairs in parallel so as to be perpendicular to the first mounting member 110A.
  • the lower end of the mounting plate 110C is attached to the second mounting member 110B, and the upper end of the mounting plate 110C is attached to the camera platform 110D (imaging direction adjusting mechanism).
  • the pan head 110D is attached to the body of the imaging device 10 and can adjust the imaging direction of the imaging device 10 .
  • a height adjustment mechanism 110E is attached to the body of the imaging device 10 .
  • the height adjustment mechanism 110E can adjust the height of the imaging device 10 (displacement in the Z-axis direction).
  • a shadow occurs in the imaging range, and if the shadow is photographed as it is, it may cause erroneous detection in the inspection. Therefore, by diffusing the light from the first light source 20 and irradiating the work S with the light, it is possible to suppress the occurrence of shadows, thereby performing the inspection with high accuracy.
  • a multispectral camera or a polarized multispectral camera
  • the amount of light is attenuated more than a general camera because only specific wavelengths are input and polarized light is handled.
  • a multispectral camera or a polarization multispectral camera
  • the movable plate 107 is moved to change the aperture area of the irradiation aperture T, and the degree of diffusion is adjusted according to the shape of the work S and the required light amount of the multispectral camera used in the imaging device 10. change.
  • the inspection apparatus 1 can realize highly accurate inspection.
  • FIG. 7 and 8 are front views with the irradiation aperture T facing the front. 7 shows the case where the movable plate 107 is positioned on the lower side, and FIG. 8 shows the case where the movable plate 107 is positioned on the upper side.
  • the movable plate 107 By positioning the movable plate 107 on the lower side, the irradiation aperture T is positioned on the upper side (see FIG. 7). On the other hand, when the movable plate 107 is positioned on the upper side, the irradiation aperture T is positioned on the lower side (see FIG. 8).
  • the movable plate 107 is moved manually and automatically. In the case shown in FIG. 2, the movable plate 107 is manually moved, and the movable plate 107 is attached to the lower side by the movable plate attachment portions 105A and 105B made of magnets.
  • the position of the movable plate 107 is determined according to the height of the workpiece S. Specifically, the movable plate 107 is moved downward when the height of the work S is equal to or higher than the threshold, and is moved upward when the height of the work S is less than the threshold.
  • the height of the work S can be measured by various methods. For example, the height of the workpiece S may be measured manually using a scale or the like. Also, the height of the workpiece S may be measured using LiDER (Light detection and ranging). Further, when the imaging device 10 is of a compound eye type, the height of the workpiece S may be measured using the imaging device 10 . Further, when the imaging device 10 is a polarization multispectral camera (FIG. 10), which will be described later, the height of the work S may be estimated from positional deviation due to pupil division or from left and right perspective shapes.
  • FIG. 10 polarization multispectral camera
  • FIG. 9 is a diagram for explaining the degree of diffusion of light from the first light source 20 according to the position of the movable plate 107.
  • FIG. 9 is a diagram for explaining the degree of diffusion of light from the first light source 20 according to the position of the movable plate 107.
  • the height of the work S is equal to or higher than the threshold, and the shadow of the work S is likely to occur.
  • the degree of diffusion of the light from the first light source 20 is increased to irradiate the work S with the light, thereby suppressing the occurrence of shadows.
  • the movable plate 107 is moved downward to form the irradiation opening T in the upper part, and the first light source 20 is directed toward the irradiation opening T to irradiate the work S with light having a high degree of diffusion. can be irradiated with
  • the height of the work S is less than the threshold, and the shadow of the work S is unlikely to occur.
  • a multispectral camera is used as the imaging device 10, and it is preferable to illuminate the work S with a sufficient amount of light.
  • the work S is directly irradiated with light from the first light source 20 .
  • the movable plate 107 is moved upward to form the irradiation opening T in the lower part, and the first light source 20 is directed to the irradiation opening T to irradiate the work S with light directly. can be irradiated.
  • the inspection apparatus 1 by moving the movable plate 107, the degree of diffusion of the light from the first light source 20 is changed to irradiate the workpiece S with the light. can be done. Specifically, it is possible to inspect by increasing the degree of diffusion of light to suppress the generation of shadows on the workpiece S, or by decreasing the degree of diffusion of light to directly illuminate the workpiece S for inspection. . As a result, the inspection apparatus 1 can appropriately photograph the workpiece S using the imaging device 10, and can inspect the workpiece S with high accuracy.
  • the inspection apparatus 1 of this embodiment includes a first light source 20 and a second light source 21 .
  • the multispectral camera used as an example of the imaging device 10 will be described.
  • the brightness information of the multispectral camera is determined by "environmental light”, “BPF (Band-pass filter) spectral characteristics” and “sensor sensitivity”.
  • BPF Band-pass filter
  • sensor sensitivity When manufacturing a multispectral camera, adjustments are made by stacking BPF and ND (Neutral Density) filters so that the brightness level of each selected wavelength is uniform.
  • FIG. 10 is a cross-sectional view in the direction of the optical axis L of the lens device attached to the multispectral camera.
  • the multispectral camera used as an example of the imaging apparatus 10 is of a pupil division type in which a plurality of bandpass filters are arranged at or near the pupil position, as described below.
  • a single imaging optical system composed of a first lens 210 and a second lens 220 is arranged in the lens barrel 10a. Zoom and/or focus is adjusted by moving the first lens 210 and the second lens 220 in the optical axis L direction.
  • the first lens 210 and the second lens 220 may be a lens group composed of a plurality of lenses.
  • a slit 208 is formed in the lens barrel 10a at the pupil position (near the pupil) of the lens device 200, and the optical member 130 is inserted into the slit 208. As shown in FIG.
  • the optical member 130 includes an ND filter 129A, a frame 129B, a bandpass filter 129C, and a polarizing filter 129D.
  • the optical member 130 can be inserted into and removed from the lens barrel 10a.
  • the frame 129B is provided with four windows (open areas).
  • the bandpass filter 129C and the polarizing filter 129D transmit different light.
  • the light that has passed through the lens device 200 is received by a dedicated imaging element (sensor), so that four imaging data (images) with different wavelengths can be acquired at the same time.
  • optical members 130 with different characteristics can be used according to the characteristics of the light source (or subject).
  • the amount of light corresponding to the four windows can be adjusted by changing the filters of the optical member 130 (ND filter 129A, bandpass filter 129C, and polarizing filter 129D).
  • filters of the optical member 130 ND filter 129A, bandpass filter 129C, and polarizing filter 129D.
  • the adjustment is performed once, if the ambient light changes, the adjustment is required again, which poses a problem in terms of versatility.
  • the spectral weights of the first light source 20 and the second light source 21 are changed in accordance with the selection of wavelengths by the multispectral camera to adjust the amount of light for each wavelength.
  • FIG. 11 is a conceptual diagram explaining the inspection device 1 of this embodiment.
  • symbol is attached
  • the inspection apparatus 1 includes a control unit 3, an imaging device 10, a first light source 20, a second light source 21, a photographing housing 100, a first intensity changing mechanism 5, and a second intensity changing mechanism 7.
  • the second light source 21, like the first light source 20, is a lighting device that irradiates the work S with light.
  • Different types of light sources are preferably used for the first light source 20 and the second light source 21 .
  • the first light source 20 uses a halogen lamp
  • the second light source 21 uses a metahalane lamp.
  • the control unit 3 controls power ON/OFF of the first light source 20 and the second light source 21 . Also, the control unit 3 changes the light amount of the first light source 20 via the first intensity changing mechanism 5 . Also, the control unit 3 changes the light amount of the second light source 21 via the second intensity changing mechanism 7 .
  • the first intensity changing mechanism 5 and the second intensity changing mechanism 7 can change the respective light amounts of the first light source 20 and the second light source 21 by a known technique.
  • FIG. 12 is a diagram for explaining the imaging housing 100 provided in the inspection apparatus 1 of this embodiment.
  • FIG. 12 is a perspective view of the imaging housing 100.
  • symbol is attached
  • the second light source 21 is provided on the upper surface of the housing 111 (the surface formed by the panel 101A). In the illustrated case, four second light sources 21 are provided.
  • the second light source 21 is attached by a second light source attachment portion (light source attachment portion) 121 .
  • the second light source mounting portion 121 has an upper end connected to the second mounting member 110B and a lower end attached to the second light source 21 .
  • a transparent or translucent diffusion plate is used for the panel 101A.
  • FIG. 13 is a diagram showing spectral data of a halogen lamp used as the first light source 20.
  • the horizontal axis indicates wavelength, and the vertical axis indicates intensity.
  • the halogen lamp has intensity on the long wavelength side. Therefore, according to the selection of the wavelength of the multispectral camera, the amount of light of the first light source 20 is increased when it is desired to increase the intensity on the longer wavelength side. This makes it possible to adjust the amount of light corresponding to the long-wavelength imaging data acquired by the multispectral camera.
  • FIG. 14 is a diagram showing spectrum data of a metahalane lamp used as the second light source 21.
  • FIG. The horizontal axis indicates wavelength, and the vertical axis indicates intensity.
  • the metal halide lamp has intensity on the short wavelength side. Therefore, according to the selection of the wavelength of the multispectral camera, the amount of light of the second light source 21 is increased when it is desired to increase the intensity on the short wavelength side. This makes it possible to adjust the amount of light corresponding to short-wavelength imaging data acquired by the multispectral camera.
  • the imaging housing 100 includes the first light source 20 and the second light source 21, and the control unit 3 controls the first light source 20 and the second light source 21. are changed by a first intensity changing mechanism 5 and a second intensity changing mechanism 7, respectively.
  • the inspection apparatus 1 does not need to adjust the amount of light using an ND filter or the like, and can perform inspection with an appropriate amount of light according to the environment in which the inspection is performed.
  • the hardware structure of the processing unit (control unit 3) (processing unit) that executes various processes is the following various processors.
  • the circuit configuration can be changed after manufacturing, such as CPU (Central Processing Unit), FPGA (Field Programmable Gate Array), which is a general-purpose processor that executes software (program) and functions as various processing units.
  • Programmable Logic Device PLD
  • ASIC Application Specific Integrated Circuit
  • One processing unit may be composed of one of these various processors, or may be composed of two or more processors of the same type or different types (eg, multiple FPGAs, or combinations of CPUs and FPGAs).
  • a plurality of processing units may be configured by one processor.
  • a processor functions as multiple processing units.
  • SoC System On Chip
  • SoC System On Chip
  • the various processing units are configured using one or more of the above various processors as a hardware structure.
  • the hardware structure of these various processors is, more specifically, an electrical circuit that combines circuit elements such as semiconductor elements.
  • Reference Signs List 1 inspection device 3: control unit 5: first intensity changing mechanism 7: second intensity changing mechanism 10: imaging device 10a: lens barrel 20: first light source 21: second light source 100: imaging housing 101A: panel 101B: Panel 101C: Panel 101D: Panel 101E: Panel 103: Panel frame 107: Movable plate 110A: First mounting member 110B: Second mounting member 110C: Mounting plate 110D: Pan head 110E: Height adjustment mechanism 111: Housing 113: first light source mounting portion 113a: changing mechanism 117: imaging device hood 121: second light source mounting portion 125: imaging device mounting portion 129A: ND filter 129B: frame 129C: bandpass filter 129D: polarizing filter 130: optics Member 200 : Lens device 202 : Lens barrel 208 : Slit 210 : First lens 220 : Second lens L : Optical axis S : Work T : Irradiation aperture U : Lens aperture

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Studio Devices (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
PCT/JP2022/023884 2021-08-23 2022-06-15 撮影用筐体及び検査装置 Ceased WO2023026646A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN202280055206.7A CN117813489A (zh) 2021-08-23 2022-06-15 拍摄用壳体及检查装置
JP2023543713A JPWO2023026646A1 (https=) 2021-08-23 2022-06-15
US18/427,835 US20240167876A1 (en) 2021-08-23 2024-01-31 Imaging housing and examination device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021-135716 2021-08-23
JP2021135716 2021-08-23

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US18/427,835 Continuation US20240167876A1 (en) 2021-08-23 2024-01-31 Imaging housing and examination device

Publications (1)

Publication Number Publication Date
WO2023026646A1 true WO2023026646A1 (ja) 2023-03-02

Family

ID=85321759

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2022/023884 Ceased WO2023026646A1 (ja) 2021-08-23 2022-06-15 撮影用筐体及び検査装置

Country Status (4)

Country Link
US (1) US20240167876A1 (https=)
JP (1) JPWO2023026646A1 (https=)
CN (1) CN117813489A (https=)
WO (1) WO2023026646A1 (https=)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07294448A (ja) * 1994-04-20 1995-11-10 Siemens Ag 半導体ウエハの検査装置
JP2005208054A (ja) * 2003-12-25 2005-08-04 Showa Denko Kk 表面検査方法および同装置
JP2018004509A (ja) * 2016-07-05 2018-01-11 株式会社リコー 測色システムおよび検査装置
KR101823101B1 (ko) * 2016-11-15 2018-01-29 주식회사 인스풀 광학 검사 장치

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6825930B2 (en) * 2002-06-04 2004-11-30 Cambridge Research And Instrumentation, Inc. Multispectral imaging system
US7396148B1 (en) * 2007-01-30 2008-07-08 Sean Shen Hsun Tsai Foldable lighting system
JP5036423B2 (ja) * 2007-06-28 2012-09-26 株式会社キーエンス 画像撮像装置
JP5866586B1 (ja) * 2015-09-22 2016-02-17 マシンビジョンライティング株式会社 検査用照明装置及び検査システム
US10538326B1 (en) * 2016-08-31 2020-01-21 Amazon Technologies, Inc. Flare detection and avoidance in stereo vision systems
JP6908793B2 (ja) * 2018-10-09 2021-07-28 富士フイルム株式会社 撮像装置
US12141949B2 (en) * 2019-03-26 2024-11-12 Sony Semiconductor Solutions Corporation Vehicle-mounted camera apparatus and image distortion correction method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07294448A (ja) * 1994-04-20 1995-11-10 Siemens Ag 半導体ウエハの検査装置
JP2005208054A (ja) * 2003-12-25 2005-08-04 Showa Denko Kk 表面検査方法および同装置
JP2018004509A (ja) * 2016-07-05 2018-01-11 株式会社リコー 測色システムおよび検査装置
KR101823101B1 (ko) * 2016-11-15 2018-01-29 주식회사 인스풀 광학 검사 장치

Also Published As

Publication number Publication date
CN117813489A (zh) 2024-04-02
JPWO2023026646A1 (https=) 2023-03-02
US20240167876A1 (en) 2024-05-23

Similar Documents

Publication Publication Date Title
CN107615049B (zh) 检查用照明装置及检查系统
KR101175595B1 (ko) 비접촉식 부품검사장치 및 부품검사방법
CN103592307B (zh) 三维测定装置、三维测定方法、程序及基板的制造方法
CN110691966A (zh) 检查系统以及检查方式
EP2685242B1 (en) Vision testing device with enhanced image clarity
JP7183155B2 (ja) 透明基板上の欠陥部検査方法および装置
CN106415247B (zh) 检查用照明装置及检查系统
TW201918439A (zh) 電子零件搬送裝置及電子零件檢查裝置
CN107110789B (zh) 贴装有部件的基板检查方法及检查装置
TW201915467A (zh) 檢查裝置及檢查方法
TWI668793B (zh) 電子零件搬送裝置及電子零件檢查裝置
TWI834843B (zh) 檢查裝置及檢查方法
WO2023026646A1 (ja) 撮影用筐体及び検査装置
JP6801860B2 (ja) 被検査物の外観検査装置
JP2021096112A (ja) 透明体の検査装置
WO2020121977A1 (ja) 検査システム、及び検査用の画像取得方法
CN110118787B (zh) 图像检查装置
KR101381836B1 (ko) 영상 선명도가 개선된 비전검사장치
JP7018006B2 (ja) 試料撮影装置
KR101164208B1 (ko) 기판 검사장치
JP7616953B2 (ja) 撮影装置及び撮影方法
JP2005188955A (ja) 形状計測装置
KR100576392B1 (ko) 비전 검사 장치
KR102336094B1 (ko) 다이의 방향을 결정하기 위한 장치
JP4334240B2 (ja) 認識装置

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 22860940

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 202280055206.7

Country of ref document: CN

WWE Wipo information: entry into national phase

Ref document number: 2023543713

Country of ref document: JP

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 22860940

Country of ref document: EP

Kind code of ref document: A1