WO2023024741A1 - 基于激光超声的激光点焊微焊点质量检测装置及方法 - Google Patents

基于激光超声的激光点焊微焊点质量检测装置及方法 Download PDF

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WO2023024741A1
WO2023024741A1 PCT/CN2022/105335 CN2022105335W WO2023024741A1 WO 2023024741 A1 WO2023024741 A1 WO 2023024741A1 CN 2022105335 W CN2022105335 W CN 2022105335W WO 2023024741 A1 WO2023024741 A1 WO 2023024741A1
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laser
scanning
spot
spot welding
light
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French (fr)
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卢明辉
丁雷
颜学俊
鲁强兵
徐晓东
陈延峰
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南京大学
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/26—Scanned objects
    • G01N2291/267—Welds
    • G01N2291/2672—Spot welding

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  • the invention relates to a welding spot quality testing device and method, in particular to a laser spot welding micro-soldering spot quality testing device and method based on laser ultrasound.
  • LSW Laser spot welding
  • LSW quality testing mainly adopts two methods: destructive testing and non-destructive testing.
  • Metallographic inspection can better and accurately observe the morphology of molten pool.
  • this method is destructive, has low detection efficiency, cannot be detected online, and cannot meet the needs of large-scale industrial production.
  • non-destructive testing technology is widely used in quality testing of structural parts, especially ultrasonic method.
  • the prior art has reported the application of ultrasonic testing in spot welding, and achieved good testing results.
  • ultrasonic testing requires an additional layer of coupling fluid between the sensor and the workpiece, which is contact testing and cannot be used in harsh environments (high temperature, severe radiation, etc.).
  • LUT Laser ultrasound technology
  • ZHANG K et al. used the time of flight to distinguish the reflected waves of good welds and non-good weld areas, and used body waves to detect the quality of friction stir spot welding (FSSW), but the diameter of the weld spot detected by the report was about 12mm.
  • Metallographic testing is a destructive test with low efficiency.
  • Ultrasonic testing is a contact testing method that requires a coupling medium as an aid, and cannot be applied to extreme environments such as high temperature and the testing of structural parts with complex shapes. To sum up, both metallographic testing and ultrasonic testing have certain problems. Therefore, there is an urgent need for a technology that can perform non-contact non-destructive testing and evaluation of the quality of tiny laser solder joints.
  • the purpose of the present invention is to provide a laser spot welding micro-solder spot quality detection device based on laser ultrasound that is convenient and efficient, suitable for high-temperature extreme environments and complex-shaped structural parts detection
  • Another object of the present invention is to provide a completely non-contact method for detecting the quality of laser spot welding micro solder joints based on laser ultrasound.
  • a laser spot welding micro-welding spot quality detection device based on laser ultrasound includes a nanosecond pulse laser, and the laser light emitted by the nanosecond pulse laser reaches the polarization beam splitter through a half wave plate, and the polarization
  • the beam splitter splits the laser beams and enters the energy detector and the beam splitter respectively.
  • the energy detector is connected to the computer through the head of the energy detector.
  • the laser light passing through the optical mirror passes through the diaphragm and the scanning galvanometer to the multi-axis displacement platform in turn.
  • the multi-axis displacement platform is on the same line as the optical filter and the laser Doppler vibrometer.
  • the vibrometer is connected to the computer.
  • the maximum resonant frequency of the scanning galvanometer is 10 kHz, which is used to focus the laser light into a point light source and excite ultrasonic waves on the sample surface of the multi-axis displacement platform according to the preset scanning path.
  • the default scanning path is one-dimensional linear shape scanning or two-dimensional rectangular shape scanning.
  • the laser light and the probe light are on opposite sides of the sample.
  • the laser and the probe light are in the same vertical direction, the probe light is located directly below the laser, and the center of the laser scanning path is where the solder joint is located.
  • the laser light and the probe light are on the different side or the same side of the sample.
  • the position of the probe light is the back of the solder joint, and the center of the scanning path is the position of the solder joint.
  • the probe light is located directly below the preset scanning path, and the center of the laser scanning path is the position of the welding spot.
  • the wavelength of the nanosecond pulsed laser is 532-1064 nm, and the pulse width is 6-12 ns.
  • the detection method of the above-mentioned laser spot welding micro-solder spot quality detection device based on laser ultrasound comprises the following steps:
  • the pulse laser is emitted by the pulse laser, and the laser spot welding micro spot area of the sample welded by two 304 stainless steel plates with a thickness of 0.2mm is scanned through the automatic scanning galvanometer.
  • the ultrasonic wave is generated by the instantaneous impact of the pulsed laser, and then propagates on the surface of the sample and in the body. If it is a standard welding, the solder joints are tightly connected to two 304 stainless steel plates. At this time, most of the energy of the ultrasonic wave can be transmitted to the other steel plate. Influence, and then block the acoustically transmitted energy and its corresponding Lamb wave mode. The propagation of ultrasonic waves will cause weak vibrations on the surface of the sample.
  • the ultrasonic signal related to the quality of the solder joints is detected by the laser Doppler vibrometer, and the quality of the solder joints can be deduced by processing them.
  • the present invention has the following remarkable features: convenient and efficient, suitable for detection of high-temperature extreme environments and structural parts with complex shapes; it is a completely non-contact laser micro-soldering non-destructive testing technology, and the scanning speed Fast, intuitive and reliable detection results, this method has broad application prospects in the field of in-situ online detection of the quality of laser spot welding micro solder joints; no ultrasonic transmitting circuit is required, and the hardware equipment is simple and easy to implement.
  • Fig. 1 is a structural representation of the present invention
  • Fig. 2 is the sectional view of the sample to be tested of the present invention
  • Fig. 3 is a schematic diagram of the one-dimensional linear shape scanning on the different side of the present invention.
  • Fig. 4 is a schematic diagram of the same-side two-dimensional rectangular shape scanning of the present invention.
  • Fig. 5 is a work flow chart of the present invention.
  • Fig. 6 is that the experiment of the present invention records the Lamb wave waveform
  • Fig. 7 is a visualized ultrasonic field diagram of the present invention, wherein (a) and (b) are 1.2mm standard welding diagrams at different times, and (c) and (d) are 0.4mm standard welding and 0.4mm virtual welding diagrams at the same time;
  • Fig. 8 is an industrial CT test result diagram of the present invention, wherein, (a) is a top view of a 1.2mm standard welding pattern, (b) is a cross-sectional view of a 1.2mm standard welding pattern, and (c) is a top view of a 1.2mm virtual welding pattern , (d) is a cross-sectional view of a 1.2mm virtual weld map.
  • the laser spot welding micro-soldering spot quality detection device based on laser ultrasound includes: an ultrasonic signal excitation device, an ultrasonic signal detection device and a signal processing unit.
  • the ultrasonic signal excitation device includes a nanosecond pulse laser 1, the wavelength of the nanosecond pulse laser 1 is 532nm or 1064nm, and the pulse width is 6-12ns, preferably 8ns.
  • Nanosecond pulsed laser 11 emits a beam of pulsed laser light 15, passes through half-wave plate 2 and polarizing beam splitter 3, splits a certain proportion of laser light 15 to energy detector 4, and reads out the light through energy detector head 6 The beam energy of the pulsed laser 15 .
  • the ultrasonic signal detection device includes a filter 13 with a high reflectivity of 532nm and a high transmittance of 633nm and a laser Doppler vibrometer 14 with a working wavelength of 633nm.
  • the filter 13 is placed on the laser Doppler vibrometer at an angle of 45°.
  • the signal processing unit includes a computer 7 integrating a high-speed acquisition card, the model is Gage, RazorMax.
  • the energy detector head 6, the photoelectric detector 8, and the laser Doppler vibrometer 14 respectively transmit signals to the computer 7 through data lines.
  • the sample to be tested is provided by Wuhan Huagong Laser, which is welded by two 0.2mm thick 304 stainless steel plates.
  • the characteristics of the solder joints are standard welds and virtual welds with diameters of 1.2mm and standard welds and virtual welds with a size of 0.4mm, (a) 1.2mm standard welds, (b) 1.2mm virtual welds, (c), 0.4mm standard welds , (d) 0.4mm virtual welding,
  • the preset scanning paths are one-dimensional linear shape scanning and two-dimensional rectangular shape scanning.
  • the laser light 15 is emitted from the pulse laser 1 along the scanning galvanometer 11 , and the detection light is emitted along the optical filter 13 .
  • the one-dimensional linear shape scanning is specifically: the laser 15 and the probe light 16 are on opposite sides of the sample, the laser 15 and the probe light 16 are in the same vertical direction, the probe light 16 is located directly below the laser 15, and the laser 15 scans The position of the center of the path is where the welding spot is located.
  • the scanning of the two-dimensional rectangular shape is specifically: the laser light 15 and the probe light 16 are on the different side and the same side of the sample respectively. As shown in Figure 4, when located on the same side, the probe light 16 is located directly below the rectangular scanning path, and the center of the scanning path is the position of the solder joint; The center position is the solder joint position.
  • the detection method of the laser spot welding micro solder joint quality detection device based on laser ultrasound includes the following steps:
  • Figure 7 is the results of industrial CT testing, (a) is the top view of the 1.2mm standard welding pattern, (b) is the cross-sectional view of the 1.2mm standard welding pattern, (c) is the top view of the 1.2mm virtual welding pattern, (d) is A cross-sectional view of a 1.2mm virtual solder pattern. It can be seen from Figure 8 that the standard solder joint of 1.2mm has a dense interior without pores, while the virtual solder joint of 1.2mm has a loose interior with some pores and other defects.

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Abstract

本发明公开了一种基于激光超声的激光点焊微焊点质量检测装置，包括纳秒脉冲激光器，纳秒脉冲激光器发出的激光经过二分之一波片到达偏振分光镜，偏振分光镜将激光分束，分别进入能量探测器和分束镜，能量探测器通过能量探测器表头与电脑相连，分束镜将激光分束，分别进入光电探测器和光反射镜，光电探测器与电脑相连，穿过光反射镜的激光依次经过光阑、扫描振镜到达多轴位移平台，多轴位移平台与滤光片、激光多普勒测振仪在同一直线上。本发明还公开了一种基于激光超声的激光点焊微焊点质量检测装置的检测方法。本发明方便高效，适用于高温极端环境以及复杂形貌结构件检测；是完全非接触式激光微焊点无损检测，扫查速度快，检测结果直观可靠。

Description

基于激光超声的激光点焊微焊点质量检测装置及方法 技术领域
本发明涉及焊点质量检测装置及方法，具体为一种基于激光超声的激光点焊微焊点质量检测装置及方法。
背景技术
激光点焊(LSW)是以高能量密度激光束为热源的一种高效、精密的焊接方法，是激光材料加工技术应用的重要方面之一。广泛应用于航空航天，汽车工业，核能，电子工业。与传统焊接工艺相比，LSW具有焊接速度快、加热冷却速率高、定位精度高、热影响区小、结构变形小等优点。由于焊点的大小通常在几百微米量级，因此LSW特别适用于微小零件的精密焊接。虽然LSW有以上优点，但由于焊点数量大，每个焊点的质量必须合格才能保证设备的安全。否则，如果在焊接过程中出现虚焊、漏焊、气孔、夹杂等缺陷，将对整个焊接工件寿命带来致命的缺陷。
目前，LSW质量检测主要采用两种方法：破坏性检测和无损检测。金相检测能较好地准确观察熔池形貌。但该方法具有破坏性，检测效率低，无法在线检测，不能满足大规模工业生产的需求。相反，无损检测技术被广泛应用于结构件的质量检测，尤其是超声波法。现有技术均报道了超声检测在点焊中的应用，取得了较好的检测效果。然而，超声检测需要在传感器与工件之间附加一层耦合流体，为接触式检测，不能适用于恶劣环境(高温、严重辐射等)。激光超声技术(LUT)可以激发高频信号，已被用于检测裂纹缺陷、残余应力、弹性模量、晶粒尺寸甚至医学成像。然而，关于LSW的质量检验却鲜有报道。ZHANG K等通过飞行时间来区分良好焊缝和非良好焊缝区域的反射波，并使用体波来检测摩擦搅拌点焊(FSSW)质量，但该报道检测的焊点直径约为12mm。
金相检测是一种破坏性检测，效率很低。超声检测为接触式检测，需要用到耦合介质作为辅助，也无法适用于高温等极端环境以及复杂形貌结构件的检测。综上所述，无论是金相检测还是超声检测都存在一定的问题，因此，亟需一种能对微小激光焊点质量进行完全非接触式的无损检测评估的技术。
发明内容
发明目的：为了克服现有技术中存在的不足，本发明目的是提供一种方便高效、适用于高温极端环境以及复杂形貌结构件检测的基于激光超声的激光点焊微焊点质量检测装置，本发明的另一目的是提供一种完全非接触式的基于激光超声的激光点焊微焊点 质量检测方法。
技术方案：本发明所述的一种基于激光超声的激光点焊微焊点质量检测装置，包括纳秒脉冲激光器，纳秒脉冲激光器发出的激光经过二分之一波片到达偏振分光镜，偏振分光镜将激光分束，分别进入能量探测器和分束镜，能量探测器通过能量探测器表头与电脑相连，分束镜将激光分束，分别进入光电探测器和光反射镜，光电探测器与电脑相连，穿过光反射镜的激光依次经过光阑、扫描振镜到达多轴位移平台，多轴位移平台与滤光片、激光多普勒测振仪在同一直线上，激光多普勒测振仪与电脑相连。
进一步地，扫描振镜的最大共振频率为10kHz，用于将激光聚焦成点光源并按照预设扫查路径在多轴位移平台的样品表面激发超声波。预设扫查路径为一维线性形状扫查或二维矩形形状扫查。
进一步地，预设扫查路径为一维线性形状扫查时，激光和探测光在样品的异侧。激光和探测光在同一垂直方向，探测光位于激光正下方，且激光扫查路径中心位置为焊点所在位置。
进一步地，预设扫查路径为二维矩形形状扫查时，激光和探测光在样品的异侧或同侧。激光和探测光在样品的异侧时，探测光位置为焊点背面位置，扫查路径中心位置为焊点位置。激光和探测光在样品的同侧时，探测光位于预设扫查路径的正下方，且激光扫查路径中心位置为焊点位置。
进一步地，纳秒脉冲激光器的波长为532～1064nm，脉宽6～12ns。
上述基于激光超声的激光点焊微焊点质量检测装置的检测方法，包括以下步骤：
(a)打开纳秒脉冲激光器和激光多普勒测振仪，将待检测样品放置于多轴位移平台上，调节样品位置和角度使激光多普勒测振仪直流信号达到最大；
(b)先进行异侧一维线性形状扫查和二维矩形形状扫查，后移动激光多普勒测振仪位置，置于同侧进行二维面扫查检测；
(c)通过电脑控制扫描振镜的扫查路径并记录激励点的位置X B，同时记录探测光斑位置X A，根据声学互易性原理P A(X B,t)＝P B(X A,t)，在t时刻，位置A处的声场P A等效于位置B处的声场 B，据此可对超声波的声场进行可视化处理；
(d)根据E＝(P B) 2计算透射的能量密度谱；
(e)根据二维傅里叶变换
Figure PCTCN2022105335-appb-000001
绘制兰姆(Lamb)波的色散特性曲线，其中，j为虚数，f为频率，k为波数，t为时间，X A为光斑位置，X B为激励点的位置；
(f)根据df/dk绘制速度-频率曲线；
(g)分析可视化处理结果、兰姆波的色散特性曲线和速度-频率曲线，判断激光点焊的焊接质量。
工作原理：由脉冲激光器发射脉冲激光，通过自动化扫描振镜对0.2mm厚的两片304不锈钢板焊接而成的样品的激光点焊微焊点区域进行扫查，其焊点特征为直径分别为1.2mm的标准焊和虚焊以及0.4mm大小的标准焊和虚焊。基于光声效应，通过脉冲激光的瞬时冲击产生超声波，进而在样品表面及体内传播。若是标准焊接，其焊点紧密将两片304不锈钢板连接，此时超声波的能量能大部分透射到另一片钢板，若是虚焊，则由于焊点连接不紧密，中间可能会有气孔，杂质等影响，进而阻挡了声透射的能量以及其对应的兰姆波模态。超声波的传播会引起样品表面微弱的振动，通过激光多普勒测振仪探测到与焊点质量相关的超声信号，再对其进行处理即可反推出焊点的质量。
有益效果：本发明和现有技术相比，具有如下显著性特点：方便高效，适用于高温极端环境以及复杂形貌结构件检测；是完全非接触式激光微焊点无损检测技术，扫查速度快，检测结果直观可靠，该方法在激光点焊微焊点质量原位在线检测领域具有广阔的应用前景；不需要超声发射电路，硬件设备简单易于实现。
附图说明
图1是本发明的结构示意图；
图2是本发明待测样品的剖视图；
图3是本发明异侧一维线性形状扫查的示意图；
图4是本发明同侧二维矩形形状扫查的示意图；
图5是本发明的工作流程图；
图6是本发明实验测得兰姆波波形；
图7是本发明的可视化超声波场图，其中，(a)和(b)为不同时刻1.2mm标准焊图，(c)和(d)为同一时刻0.4mm标准焊和0.4mm虚焊图；
图8是本发明的工业CT测试结果图，其中，(a)为1.2mm标准焊接图的俯视图，(b)为1.2mm标准焊接图的截面图，(c)为1.2mm虚焊图的俯视图，(d)为1.2mm虚焊图的截面图。
具体实施方式
如图1，基于激光超声的激光点焊微焊点质量检测装置包括：超声信号激励装置，超声信号探测装置以及信号处理单元。超声信号激励装置包括纳秒脉冲激光器1，纳秒 脉冲激光器1的波长为532nm或1064nm，脉宽为6～12ns，优选为8ns。纳秒脉冲激光器11发出一束脉冲激光15经过二分之一波片2、偏振分光镜3后，分出一定比例的激光15到能量探测器4，通过能量探测器表头6读出分出的脉冲激光15的光束能量。分束镜5分出的一部分激光15作为触发信号到达光电探测器8，分束镜5分出的另一部分激光15经过光反射镜9、光阑10，到达高速扫描振镜11(最大共振频率为10KHz)聚焦成点光源，并按照预设扫查路径在多轴位移平台12的样品表面激发超声波。超声信号探测装置包括532nm高反射率、633nm高透过率的滤光片13以及633nm工作波长的激光多普勒测振仪14，滤光片13以45°角放置于激光多普勒测振仪14的正前方。信号处理单元包括集成高速采集卡的电脑7，型号为Gage，RazorMax。能量探测器表头6、光电探测器8、激光多普勒测振仪14分别通过数据线将信号传输给电脑7。
如图2，待测样品由武汉华工激光提供，为0.2mm厚的两片304不锈钢板焊接而成。焊点特征为直径分别为1.2mm的标准焊和虚焊以及0.4mm大小的标准焊和虚焊，(a)1.2mm标准焊，(b)1.2mm虚焊，(c),0.4mm标准焊，(d)0.4mm虚焊，
预设扫查路径为一维线性形状扫查和二维矩形形状扫查。激光15自脉冲激光器1沿扫描振镜11发出，探测光沿滤光片13发出。如图3，一维线性形状扫查具体为：激光15和探测光16在样品的异侧，激光15和探测光16在同一垂直方向，探测光16位于激光15正下方，且激光15扫查路径中心位置为焊点所在位置。二维矩形形状扫查具体为：激光15和探测光16分别在样品的异侧和同侧。如图4，位于同侧时，探测光16位于矩形扫查路径的正下方，且扫查路径中心位置为焊点位置；位于异侧时，探测光16位置为焊点背面位置，扫查路径中心位置为焊点位置。
如图5，基于激光超声的激光点焊微焊点质量检测装置的检测方法，包括以下步骤：
a、打开纳秒脉冲激光器1和激光多普勒测振仪14，将待检测样品放置于多轴位移平台12上，调节样品位置和角度使激光多普勒测振仪14直流信号达到最大；
b、设置扫查参数，通过电脑7程序控制扫描振镜11的扫查位置和路径，先进行异侧一维线性形状扫查和二维矩形形状扫查，将数据存储至电脑7，后移动激光多普勒测振仪14位置，置于同侧进行二维面扫查检测，将数据存储至电脑7；
c、通过电脑7控制扫描振镜11的扫查路径并记录每个激励点的位置X B，同时记录探测光16斑位置X A，根据声学互易性原理P A(X B,t)＝P B(X A,t)，在t时刻，位置A处的声场P A等效于位置B处的声场 B，据此可对超声波的声场进行可视化处理；
d、根据E＝(P B) 2计算透射的能量密度谱；
e、根据二维傅里叶变换
Figure PCTCN2022105335-appb-000002
绘制兰姆(Lamb)波的色散特性曲线，如图7，其中，j为虚数，f为频率，k为波数，t为时间，X A为光斑位置，X B为激励点的位置；
f、根据df/dk绘制速度-频率曲线；
g、分析可视化处理结果、兰姆波的色散特性曲线和速度-频率曲线，判断激光点焊的焊接质量。
如图6，可视化超声波场图中，(a)和(b)为不同时刻1.2mm标准焊图，(c)和(d)为同一时刻0.4mm标准焊和0.4mm虚焊图。由图7可以看出：1.2mm标准焊点比0.4mm的标准焊点对声波传播阻碍更大。此外，0.4mm的标准焊点对声波的阻碍作用要大于0.4mm的虚焊焊点。
图7为工业CT测试结果图，(a)为1.2mm标准焊接图的俯视图，(b)为1.2mm标准焊接图的截面图，(c)为1.2mm虚焊图的俯视图，(d)为1.2mm虚焊图的截面图。由图8可以看出：1.2mm的标准焊点，其内部密实无气孔，而对于1.2mm的虚焊焊点，其内部松散，存在一些气孔等缺陷。

Claims (10)

  1. 一种基于激光超声的激光点焊微焊点质量检测装置，其特征在于：包括纳秒脉冲激光器(1)，所述纳秒脉冲激光器(1)发出的激光(15)经过二分之一波片(2)到达偏振分光镜(3)，所述偏振分光镜(3)将激光(15)分束，分别进入能量探测器(4)和分束镜(5)，所述能量探测器(4)通过能量探测器表头(6)与电脑(7)相连，所述分束镜(5)将激光(15)分束，分别进入光电探测器(8)和光反射镜(9)，所述光电探测器(8)与电脑(7)相连，穿过所述光反射镜(9)的激光(15)依次经过光阑(10)、扫描振镜(11)到达多轴位移平台(12)，所述多轴位移平台(12)与滤光片(13)、激光多普勒测振仪(14)在同一直线上，所述激光多普勒测振仪(14)与电脑相连。
  2. 根据权利要求1所述的一种基于激光超声的激光点焊微焊点质量检测装置，其特征在于：所述扫描振镜(11)用于将激光(15)聚焦成点光源并按照预设扫查路径在多轴位移平台(12)的样品表面激发超声波。
  3. 根据权利要求2所述的一种基于激光超声的激光点焊微焊点质量检测装置，其特征在于：所述预设扫查路径为一维线性形状扫查或二维矩形形状扫查。
  4. 根据权利要求3所述的一种基于激光超声的激光点焊微焊点质量检测装置，其特征在于：所述预设扫查路径为一维线性形状扫查时，激光(15)和探测光(16)在样品的异侧。
  5. 根据权利要求4所述的一种基于激光超声的激光点焊微焊点质量检测装置，其特征在于：所述激光(15)和探测光(16)在同一垂直方向，探测光(16)位于激光(15)下方，且激光(15)扫查路径中心位置为焊点所在位置。
  6. 根据权利要求3所述的一种基于激光超声的激光点焊微焊点质量检测装置，其特征在于：所述预设扫查路径为二维矩形形状扫查时，激光(15)和探测光(16)在样品的异侧或同侧。
  7. 根据权利要求6所述的一种基于激光超声的激光点焊微焊点质量检测装置，其特征在于：所述激光(15)和探测光(16)在样品的异侧时，探测光(16)位置为焊点背面位置，扫查路径中心位置为焊点位置。
  8. 根据权利要求6所述的一种基于激光超声的激光点焊微焊点质量检测装置，其特征在于：所述激光(15)和探测光(16)在样品的同侧时，探测光(16)位于预设扫查路径的正下方，且激光(15)扫查路径中心位置为焊点位置。
  9. 根据权利要求1所述的一种基于激光超声的激光点焊微焊点质量检测装置，其特 征在于：所述纳秒脉冲激光器(1)的波长为532～1064nm，脉宽6～12ns。
  10. 根据权利要求1～9任一所述的一种基于激光超声的激光点焊微焊点质量检测装置的检测方法，其特征在于，包括以下步骤：
    (a)打开纳秒脉冲激光器(1)和激光多普勒测振仪(14)，将待检测样品放置于多轴位移平台(12)上，调节样品位置和角度使激光多普勒测振仪(14)直流信号达到最大；
    (b)先进行异侧一维线性形状扫查和二维矩形形状扫查，后移动激光多普勒测振仪(14)位置，置于同侧进行二维面扫查检测；
    (c)通过电脑(7)控制扫描振镜(11)的扫查路径并记录激励点的位置，同时记录探测光斑位置，对超声波的声场进行可视化处理；
    (d)计算透射的能量密度谱；
    (e)根据二维傅里叶变换
    Figure PCTCN2022105335-appb-100001
    绘制兰姆波的色散特性曲线，其中，j为虚数，f为频率，k为波数，t为时间，X A为光斑位置，X B为激励点的位置；
    (f)根据df/dk绘制速度-频率曲线；
    (g)分析可视化处理结果、兰姆波的色散特性曲线和速度-频率曲线，判断激光点焊的焊接质量。
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