WO2023015937A1 - 一种太阳能电池激光清边机以及清边方法 - Google Patents

一种太阳能电池激光清边机以及清边方法 Download PDF

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Publication number
WO2023015937A1
WO2023015937A1 PCT/CN2022/088111 CN2022088111W WO2023015937A1 WO 2023015937 A1 WO2023015937 A1 WO 2023015937A1 CN 2022088111 W CN2022088111 W CN 2022088111W WO 2023015937 A1 WO2023015937 A1 WO 2023015937A1
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Prior art keywords
laser
solar cell
working platform
edge cleaning
air
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PCT/CN2022/088111
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English (en)
French (fr)
Inventor
汪玉树
谢美才
孙琳琳
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苏州迈为科技股份有限公司
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Publication of WO2023015937A1 publication Critical patent/WO2023015937A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/549—Organic PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the invention belongs to the technical field of photovoltaic solar energy processing, and in particular relates to a laser edge cleaning machine and a method for edge cleaning of solar cells.
  • a solar cell usually consists of a solar cell substrate and a thin-film layer structure attached to a solar cell glass substrate, such as a perovskite solar cell.
  • the thin-film layer on the solar cell substrate includes a transparent conductive layer, a perovskite layer ( or film layers of other materials), conductive layers.
  • edge cleaning will be performed along the edge of the solar cell glass substrate to prevent the short circuit between the thin film layer and the metal frame or the ingress of moisture to reduce the conductivity of the solar cell when the solar cell is installed on the metal. Edge cleaning is an essential process in the solar cell manufacturing process.
  • the invention patent application document with the application number 202010361352.5 discloses a film removal method, a substrate treatment method and a substrate treatment device; and the patent document with the application number 201080050150.3 also discloses A method for manufacturing a battery module and an apparatus for manufacturing a solar cell module.
  • the present invention provides a laser edge cleaning machine capable of effectively cleaning solar cells and a method of using the edge cleaning machine for edge cleaning, which can effectively reduce the edge heat impact in the edge cleaning process.
  • the present invention provides a laser edge cleaning machine, comprising:
  • a plurality of linear drive mechanisms a plurality of linear drive mechanisms are arranged on the machine table, enclosing a rectangular processing area; each of the linear drive mechanisms is provided with a laser cleaning head, and the laser cleaning head includes a frame, The micro-movement module arranged on the upper end of the frame, the first laser system arranged on the micro-motion module and the second laser system arranged on the lower part of the frame; the first laser system is used for Scribing the solar cell to divide the solar cell into an effective area and an invalid area, and the second laser system is used to remove the invalid area;
  • a working platform the working platform is set on the machine table and is located in the rectangular processing area, the working platform is provided with a number of air holes through which air can be blown or sucked, so that the solar cell can Floating above the working platform or adsorbed on the surface of the working platform;
  • the lifting transmission mechanism is arranged on the working platform and is used for lifting and transmitting the solar cells during the edge cleaning process of the solar cells.
  • the four linear drive mechanisms are all set sideways, which can ensure the height tolerance and parallelism of the worktable, eliminate the influence of machining errors during equipment manufacturing, and are easy to install and debug.
  • the first laser system includes a first laser, a first laser and a focusing lens.
  • the laser beam emitted by the first laser is reflected by the first laser and enters the focusing lens, and is then emitted after being focused by the focusing lens.
  • the second laser system includes a second laser, a second reflecting mirror, a vibrating mirror and a field mirror, and the laser beam emitted by the second laser is reflected by the second reflecting mirror and enters the vibrating mirror and the field mirror in turn before being emitted.
  • the machine platform is provided with several tightening and positioning parts, and the tightening and positioning parts are located outside the linear drive mechanism, and are used for tightening and positioning the solar cells on the edge cleaning machine.
  • the focusing lens is provided with a dust cover
  • the dust cover is provided with a laser through hole and a dust extraction port, and the laser beam coming out of the focusing lens passes through the laser through hole, which can be cleaned during the edge cleaning process. Simultaneously carry out vacuuming in order to avoid the influence of smoke and dust on the solar cells.
  • the lifting transmission mechanism is arranged under the working platform, and the lifting transmission mechanism includes several roller transmission units, and the rollers of the roller transmission units can pass through the roller holes opened on the working platform for lifting.
  • the lifting transmission mechanism includes a support body, a first driving part, a second driving part and the above-mentioned several roller transmission units, several of the roller transmission units are arranged on the support body, and the roller transmission units include The beam and several rollers and transmission wheels arranged on the beam, the transmission between the transmission wheels and the rollers is carried out through a synchronous belt; the first driving part is used to drive the supporting body to move up and down, and the second driving part drives the rollers to rotate .
  • an air-connecting part is arranged under the working platform, and the air-connecting part is connected to the air hole, and is connected to an external air machine through the air-connecting part.
  • a laser power detection device is provided on the machine platform for detecting the power of the laser system.
  • the tightening and positioning component is an air cylinder or an electric cylinder, which has a simple structure and is easy to control.
  • a method for clearing edges of solar cells by using the solar cell edge clearing machine including:
  • the solar cell is scribed, and the solar cell is divided into an effective area and an invalid area;
  • the power of the first laser is smaller than the power of the second laser.
  • the lifting transmission mechanism when the solar cell is loaded, the lifting transmission mechanism is raised, and the solar cell is placed on the lifting transmission mechanism; the lifting transmission mechanism is lowered, and the working platform is blown outward, so that the solar battery is air-floated above the working platform; the positioning is tightened
  • the parts are stretched out, and after pushing the solar cells to the accurate edge-clearing position, retract and tighten the positioning parts; gradually reduce the blowing air pressure of the working platform until the solar cells fall back on the working platform, and the working platform will absorb the solar cells.
  • the present invention has the following advantages: when performing edge cleaning, the lifting transmission mechanism is raised, and under the action of the rollers, the solar battery is forwardly transmitted to the set position, the rollers stop, and then the lifting transmission mechanism descends , the working platform blows air outwards to float the solar cells above the working platform, start the tightening and positioning parts to tighten and position the solar cells; then the tightening and positioning parts are retracted, and the external air pressure is gradually reduced, so that the solar cells fall on the working platform Adsorb the solar cell on the surface; then start the first laser system, and under the drive of the linear drive mechanism, scribe the solar cell, and divide the film layer on the surface of the solar cell into an effective area and an invalid area; then start the second laser The system, driven by the linear drive mechanism, clears the film in the invalid area; then the lifting transmission mechanism rises, and under the action of the rollers, the solar cells after edge cleaning are transported forward for unloading. Using this equipment, two laser systems cooperate to complete the edge cleaning operation
  • Fig. 1 is the three-dimensional general assembly drawing of edge cleaning machine in the embodiment of the present invention
  • Fig. 2 is a partial enlarged view of place A in Fig. 1;
  • Fig. 3 is a partial enlarged view of place B in Fig. 1;
  • Fig. 4 is the perspective view of edge cleaning machine in the embodiment of the present invention.
  • Fig. 5 is the side view of edge cleaning machine in the embodiment of the present invention.
  • Fig. 6 is a partial enlarged view of place C in Fig. 5;
  • Fig. 7 is the top view of edge cleaning machine in the embodiment of the present invention.
  • Fig. 8 is a partial enlarged view at D in Fig. 7;
  • FIG. 9 is a schematic diagram of a solar cell edge cleaning process
  • Fig. 10 is a schematic diagram of installation of a linear drive mechanism in an embodiment of the present invention.
  • Figure 11 is a perspective view of a laser cleaning head in an embodiment of the present invention.
  • Fig. 12 is a perspective view of another perspective of the laser cleaning head in the embodiment of the present invention.
  • Figure 13 is a schematic diagram of the laser light path in an embodiment of the present invention.
  • Fig. 14 is a structural diagram of a dust suction hood in an embodiment of the present invention.
  • Fig. 15 is a flowchart of an edge clearing method in an embodiment of the present invention.
  • 100 machine; 200, tightening and positioning parts
  • 300 linear drive mechanism
  • 400 laser cleaning head
  • 410 frame
  • 420 micro-motion module
  • 430 the first laser system; 431, the first Laser
  • 432 first mirror; 433, focusing lens
  • 440 second laser system; 441, second laser; 442, second mirror; 443, vibrating mirror
  • 444 field mirror
  • 450 dust cover
  • the laser edge cleaning machine includes: a machine 100, a plurality of linear drive mechanisms 300, a working platform 500, and a lifting transmission mechanism 600; in the embodiment of the present invention, a total of four linear drive mechanisms 300 are used , the linear drive mechanism 300 may adopt a linear motor, a linear module, and the like. In the preferred solution, four linear motors are used, and the four linear motors are all arranged on the machine platform 100 to form a rectangular processing area. Because the solar cell is rectangular, it is necessary to clean the four sides of the rectangle at the same time. , to increase production efficiency. Usually, the solar cell is rectangular, and there are two opposite long sides and two opposite opposite sides.
  • the linear motor can adopt an existing high-precision linear motor.
  • a laser cleaning head 400 is arranged on each linear motor, and each linear motor can drive a laser cleaning head to move along a preset motion track to complete the cleaning of one side of the solar cell. Therefore, the four linear motors drive their respective laser cleaning heads 400 to work at the same time, so that the four sides of the solar cell can be cleaned simultaneously, which effectively improves the production efficiency.
  • the laser cleaning head 400 includes a frame 410, a micro-movement module 420 arranged on the upper end of the frame 410, a first laser system 430 arranged on the micro-motion module 420, and a The lower second laser system 440 .
  • the edge cleaning machine of the present invention is mainly developed for a new laser edge cleaning process.
  • the laser light emitted by the first laser system 430 is first used to scribe the solar cell, and the drive of the linear drive mechanism Next, the film layer on the surface of the solar cell is divided into an effective area (the area that needs to be kept) and an invalid area (the area that needs to be removed), as shown in FIG. Next, remove the film from the invalid area.
  • the working platform 500 is set on the machine platform 100 and is located in the rectangular processing area, and its function is to provide platform support for the solar cells.
  • a number of air holes 510 are opened on the working platform 500 , through which air is blown or inhaled, so that the solar cells can be air-floated above the working platform 500 or adsorbed on the surface of the working platform 500 .
  • An air-connecting part 520 is arranged under the working platform 500. The air-connecting part 520 communicates with the air hole 510, and an external air pressure machine is connected through the air-connecting part 520, so that the air hole blows or sucks air to the outside, so that the solar cell is air-floated during work. Above the platform, or adsorbed to the surface of the working platform.
  • the lifting and transporting mechanism 600 is arranged on the machine platform 100, and is used for raising or lowering the solar cells and enabling the solar cells to be transported forward.
  • the lifting transmission mechanism 600 can use manipulators, etc., but the use of manipulators will increase the volume of the entire equipment and increase the cost.
  • the lifting transmission mechanism is arranged below the working platform 500
  • the lifting transmission mechanism 600 includes several roller transmission units 610
  • the rollers 611 of the roller transmission unit 610 can pass through the working platform 500 through the roller through holes 530 provided on the working platform 500,
  • the roller 611 moves upward through the working platform, thereby supporting the solar cell to rise, and when the solar cell needs to be dropped, the roller 611 descends, so that the solar cell descends; and the solar cell needs to be transported forward , the roller 611 rotates to transport the solar battery forward.
  • the lifting transmission mechanism 600 includes a support body 620, a first driving component, a second driving component, and the above-mentioned several roller transmission units 610, and the roller transmission unit 610 is arranged on the support body 620,
  • the roller transmission unit 610 includes a beam 612 , several transmission wheels 613 arranged on the beam 612 and several above-mentioned rollers 611 , and the transmission between the rollers 611 and the transmission wheels 613 is carried out by a synchronous belt 614 .
  • the first driving part can be an electric cylinder, an air cylinder or an oil cylinder, and the first driving part is used to push the supporting body 620 to move up and down, so that the roller transmission unit 610 can move up and down, and then drive the solar cell to move up and down.
  • the second driving component can use an electric motor, a hydraulic motor, etc. to drive the transmission wheel 613 to rotate, thereby driving all the rollers 611 to rotate to transmit the solar battery.
  • the four linear drive mechanisms are all set sideways, so as to ensure the height tolerance and parallelism with the working platform 230 table.
  • the tolerance of the linear motor installation reference error is relatively large ( ⁇ 0.03mm)
  • the long-stroke linear motor (2200mm is used in one embodiment of the present invention) substrate processing thickness tolerance is too large ⁇ 0.02mm)
  • the error will deviate from the design requirement ⁇ 0.05mm when the front is installed
  • the long-stroke linear motor has a straight line
  • the precision can reach 0.008mm, and the influence of machining error can be removed by using side-mounted installation, and the installation and debugging are convenient, as shown in Figure 10.
  • Adjusting Y1 and Y2 can make the walking straightness of the linear motor parallel to the worktable Z3, and adjusting X1 and X2 can make the distance between the linear motor and the worktable consistent during operation.
  • the first laser system 430 in conjunction with Fig. 11 and Fig. 12 the first laser system 430 includes a first laser 431, a first reflector 432 and a focusing lens 433, and the laser beam emitted by the first laser 431 is reflected by the first reflector 432 Afterwards, the light enters the focusing lens 433 and is focused by the focusing lens 433 before being emitted.
  • the first laser system 430 is used to divide the thin film of the instant surface of the solar cell into an active area and an inactive area. Usually, when the solar cell is divided into regions, a high-power laser is not required.
  • the first laser 431 adopts a laser with a power range of 10-30W, which can reduce the cost of equipment.
  • the first reflector 432 reflects the laser light emitted by the first laser 431 by 90° and then enters the focusing lens 433. After being focused by the focusing lens 433, the laser light is emitted onto the surface of the solar cell. Driven by the linear drive mechanism 300, the area is completed. division.
  • the second laser system 440 includes a second laser 441, a second mirror 442, a vibrating mirror 443, and a field mirror 444, and the laser beam emitted by the second laser 441 enters after being reflected by the second mirror 442. It enters the vibrating mirror 443 and the field mirror 444 in sequence and then exits.
  • the second laser system 440 mainly removes the film in the invalid area, and the inactive area has been separated from the effective area. During the cleaning process, it will no longer have a large thermal impact on the effective area, so a higher power laser can be used. Laser, therefore, in the implementation of the present invention, a laser with a power range of 100-500W is selected.
  • the laser beam emitted by the second laser 441 is reflected by the second reflector 442 by 90°, and then enters the vibrating mirror 443.
  • the vibrating mirror 443 can focus the beam and emit it through the field mirror 444.
  • the mirror 443 swings to mark on the fly, and is driven by the linear drive mechanism to complete the removal of invalid areas.
  • the optical path structure formed by the first laser system and the second laser system is shown in FIG. 13 .
  • tightening and positioning parts 200 are arranged on the machine 100, and the number of tightening and positioning parts 200 needs to be determined according to the size of the solar cell used by the laser edge cleaning machine.
  • the clamping and positioning components 200 can be provided. Specifically, the clamping and positioning components 200 are arranged outside the linear drive mechanism, that is, outside the rectangular processing area, and can be arranged oppositely in order to tighten and position the solar cell.
  • the tightening and positioning part 200 can use an air cylinder or an electric cylinder, then when the solar cell is tightened and positioned, only the cylinder rod of the air cylinder or the electric cylinder is stretched out, that is, the solar cell can be positioned in an accurate position. Processing position, simple structure, easy to control.
  • a dust collection cover 450 is provided on the focusing lens 433. As shown in FIG. A dust suction device may be connected, and the laser beam emitted from the focusing lens 433 passes through the laser through hole 451 .
  • the laser beam coming out from the focusing lens 433 can be emitted perpendicular to the dust collection hood 450, and the dust collection cover 450 can completely cover the working area of the laser beam coming out from the focusing lens 433, thereby improving the dust collection efficiency.
  • the second laser system 440 is approximately opposite to the first laser system 430, so that when the second laser system 440 is working, the dust can be sucked away through the dust cover 450 at any time, thereby avoiding the influence of the smoke on the battery.
  • a laser power detection device 700 is provided on the machine table 100, specifically, the laser power detection device 700 is arranged at the initial position of the laser cleaning head 400, and in the present invention, the laser cleaning head
  • the initial position of 400 is at the intersection of the two linear drive mechanisms, that is, the corner position of the rectangular working area, because the power detection of the four laser cleaning heads 400 is required, so at least two laser power detection devices need to be provided , which are respectively set at the two corners of the rectangular working area.
  • the edge cleaning machine proposed in the embodiment of the present invention, firstly, under the drive of the linear drive mechanism, the first laser system 430 on the laser cleaning head 400 is used to scribe the thin film layer of the solar cell, and the thin film layer is divided into The ineffective area and the effective area are then driven by the linear drive mechanism, and the film in the inactive area is removed by the second laser system, thereby realizing the efficient edge cleaning of the solar cell.
  • the edge cleaning is performed by the edge cleaning machine, because the edge cleaning is completed through two processes, the edge heat effect caused by the laser on the solar cell can be effectively reduced to ensure the performance of the solar cell.
  • the high degree of automation can greatly improve production efficiency.
  • a laser edge cleaning method for solar cells is provided in the embodiment of the present invention, as shown in Figure 15, the edge cleaning method includes:
  • S200 Start the first laser system 430 to emit the first laser to irradiate the thin film layer of the solar cell, and under the drive of the four linear drive mechanisms 300, scribe the solar cell to divide the solar cell into an effective area and an ineffective area;
  • the power of the first laser is smaller than the power of the second laser, because only a small area needs to be ablated when the solar cell is scribed and divided, so only a low-power laser is required to ensure the processing efficiency, and , the use of a low-power laser can effectively reduce the thermal impact on the edge of the solar cell during the edge cleaning process, and the low-power laser can reduce the manufacturing cost of the device.
  • the use of the second laser with higher power can effectively improve the edge cleaning efficiency, and because the invalid area has been separated from the effective area, when the invalid area is cleaned, it will not cause a large thermal impact on the effective area.
  • the lifting transmission mechanism 600 when the solar cells are loaded, the lifting transmission mechanism 600 is raised to place the solar cells on the lifting transmission mechanism 600; the lifting transmission mechanism 600 is lowered, and the working platform 500 blows air outwards to The solar cell is air-floated above the working platform 500; the clamping and positioning part 200 is stretched out, and after pushing the solar cell to an accurate edge-clearing position, the clamping and positioning component 200 is retracted; the blowing air pressure of the working platform 500 is gradually reduced until the solar cell falls back to On the working platform 500, the working platform absorbs the solar cells.
  • the main function is to adjust the position of the solar cell, so that the precision of edge cleaning is better and the quality of edge cleaning is better.
  • the dust is sucked at the same time, and the smoke and dust generated by the laser ablation is sucked away in time through the dust suction cover 450 , to avoid damage to the surface of solar cells caused by smoke and dust.

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Abstract

一种太阳能电池激光清边机，包括机台(100)、多个直线驱动机构(300)、工作平台(500)、升降传输机构(600)；多个直线驱动机构围成一矩形的加工区域；每个直线驱动机构上设置有激光清洗头(400)，激光清洗头包括机架(410)、微动模组(420)、第一激光系统(430)和第二激光系统(441)；工作平台位于矩形的加工区域中，工作平台上设置有若干气孔(510)，通过气孔吹气或吸气，以将太阳能电池气浮在工作平台上方或吸附在工作平台表面；升降传输机构设置在工作平台上，用于在太阳能电池清边过程中将太阳能电池进行升降及传输。还公开了一种该清边机的清边方法。该清边机能够对太阳能电池进行有效清边，边缘热影响小，效率高。

Description

一种太阳能电池激光清边机以及清边方法 技术领域
本发明属于光伏太阳能加工技术领域，具体涉及一种太阳能电池激光清边机以及清边方法。
背景技术
太阳能电池通常由太阳能电池基板和附着于太阳能电池玻璃基板上的薄膜层结构构成，例如钙钛矿太阳能电池，在太阳能电池基板上的薄膜层包括由下之上的透明导电层、钙钛矿层(或者其他材料的膜层)、导电层。在太阳能电池的生产工艺中，会沿着太阳能电池玻璃基板边缘进行清边，以防止太阳能电池在安装到金属时，薄膜层与金属边框发生短路或者水分进入使得导电性能降低，因此，对太阳能电池进行清边，是在太阳能电池制造过程中必不可少的工序。
然而，传统的太阳能电池清边工艺中，通常是采用一台大功率的红外激光器，完成清边过程，但这种工艺在太阳能电池的清边过程中，会对太阳能点至造成较大的边缘热影响，从而影响太阳能电池的导电性和整体性能。此外，还有一些新的加工工艺及设备，例如申请号为202010361352.5的发明专利申请文件中公开了膜去除方法、基板处理方法和基板处理装置；以及申请号为201080050150.3的专利文件中也公开了太阳能电池模块的制造方法及太阳能电池模块的制造装置。但是研究发现，现有的这些技术在对太阳能电池进行清边的过程中，依然不能对太阳能电池进行有效的清边。
发明内容
技术问题：本发明提供一种能够对太阳能电池进行有效清边的激光清边机以及利用该清边机进行清边的方法，能够有效的降低清边过程中的边缘热影响。
技术方案：一方面，本发明提供一种激光清边机，包括：
机台；
多个直线驱动机构，多个所述直线驱动机构设置在机台上，围成一矩形的加工区域；每个所述直线驱动机构上设置有激光清洗头，所述激光清洗头包括机架、设置在所述机架上端的微动模组、设置在所述微动模组上的第一激光系统和设置在所述机架下部的第二激光系统；所述第一激光系统用于对太阳能电池进行划线，将太阳能电池发划分有效区域和无效区域，所述第二激光系统用于将无效区域清除；
工作平台，所述工作平台设置在机台上，并位于所述矩形的加工区域中，所述工作平台上设置有若干气孔，通过所述气孔能够进行吹气或吸气，使得太阳能电池能够气浮在工作平台上方或吸附在工作平台表面；
升降传输机构，设置在工作平台上，用于在太阳能电池清边过程中将太阳能电池进行升降及传输。
在进行清边时，升起升降传输机构，将太阳能电池向前传输到设定位置，然后升降传输机构下降，工作平台向外吹气，将太阳能电池气浮于工作平台上方，启动加紧定位部件对太阳能电池进行加紧定位；然后加紧定位部件缩回，逐渐较小对外的气压，使太阳能电池落于工作平台表面，将太阳能电池吸附；然后启动第一激光系统，并在直线驱动机构的驱动下，对太阳能电池进行划线，将太阳能电池表面的膜层分割为有效区域和无效区域；然后启动第二激光系统，在直线驱动机构的驱动下，将无效区域的膜清除；清除完毕后，直线驱动机构归位，激光清洗头回到初始位置；然后升降传输机构上升，，将清边后的太阳能电池向前输送下料。利用该设备，通过两个激光系统配合完成清边操作，可以有效地降低激光对太阳能电池造成的边缘热影响，保证太阳能电池的性能。此外，自动化程度高，可以极大地提高生产效率。
进一步地，四个所述直线驱动机构均侧立设置，能够保证工作台面的高度公差和平行，消除设备制造时加工误差的影响，并且易于安装和调试。
进一步地，所述第一激光系统包括第一激光器、第一激光器和聚焦透镜，第一激光器发出的激光光束经第一激光器反射后照进聚焦透镜，经聚焦透镜聚焦后射出。
进一步地，所述第二激光系统包括第二激光器、第二反射镜、振镜和场镜，第二激光器发出的激光光束经第二反射镜反射后依次进入振镜和场镜后射出。
进一步地，所述机台上设置有若干个加紧定位部件，所述加紧定位部件位于所述直线驱动机构的外侧，用于对清边机上的太阳能电池进行加紧定位。
进一步地，所述聚焦透镜上设置有吸尘罩，所述吸尘罩上设置有激光过孔和抽尘口，从聚焦透镜出来的激光光束穿过所述激光过孔，可以在清边过程中同步进行吸尘，避免烟尘对太阳能电池造成影响。
进一步地，所述升降传输机构设置于所述工作平台下方，所述升降传输机构包括若干个滚轮传输单元，所述滚轮传输单元的滚轮能够穿过在工作平台上开设的滚轮过孔进行升降。
进一步地，所述升降传输机构包括支撑体、第一驱动部件、第二驱动部件以及所述 的若干滚轮传输单元，若干所述滚轮传输单元设置在所述支撑体上，所述滚轮传输单元包括横梁和设置在所述横梁上的若干滚轮以及传动轮，所述传动轮与滚轮之间通过同步带进行传动；所述第一驱动部件用于驱动支撑体上下运动，第二驱动部件驱动滚轮转动。
进一步地，所述工作平台下面设置有接气部件，所述接气部件与所述气孔连接，通过接气部件与外界气压机连接。
进一步地，所述机台上设置有激光功率检测装置，用于对激光系统的功率进行检测。
进一步地，所述加紧定位部件为气缸或电缸，结构简单，易于控制。
另一方面，提供一种利用所述的太阳能电池清边机对太阳能电池进行清边的方法，包括：
将激光清洗头复位，将太阳能电池吸附在工作平台上；
启动第一激光系统发出第一激光照射在太阳能电池的薄膜层上，在四个直线驱动机构驱动下，对太阳能电池进行划线，将太阳能电池分割为有效区域和无效区域；
关闭第一激光系统，启动第二激光系统发出第二激光透过玻璃基板照射在薄膜层上，利用振镜改变激光光束聚焦位置，并在四个直线驱动机构驱动下，将无效区域中的薄膜清除。
通过上述方法，有效的降低清边过程中的对太阳能电池造成边缘热影响，并且清边效率高。
进一步地，所述第一激光的功率小于第二激光的功率。
进一步地，在太阳能电池上料时，升起升降传输机构，将太阳能电池置于升降传输机构上；降下升降传输机构，工作平台向外吹气，使太阳能电池气浮于工作平台上方；加紧定位部件伸出，推动太阳能电池到准确清边位置后，缩回加紧定位部件；逐渐减小工作平台的吹气气压，直至太阳能电池回落到工作平台上，工作平台将太阳能电池吸附。
进一步地，在太阳能电池进行划线，以及在对无效区域进行清除时，进行吸尘操作，通过吸尘罩，将烟尘吸走，从而避免烟尘对太阳能电池造成的影响。
本发明与现有技术相比，具有以下优点：在进行清边时，升起升降传输机构，在滚轮的作用下，将太阳能电池向前传输到设定位置，滚轮停止，然后升降传输机构下降，工作平台向外吹气，将太阳能电池气浮于工作平台上方，启动加紧定位部件对太阳能电池进行加紧定位；然后加紧定位部件缩回，逐渐较小对外的气压，使太阳能电池落于工作平台表面，将太阳能电池吸附；然后启动第一激光系统，并在直线驱动机构的驱动下，对太阳能电池进行划线，将太阳能电池表面的膜层分割为有效区域和无效区域；然后启 动第二激光系统，在直线驱动机构的驱动下，将无效区域的膜清除；然后升降传输机构上升，并在滚轮作用下，将清边后的太阳能电池向前输送下料。利用该设备，通过两个激光系统配合完成清边操作，可以有效地降低激光对太阳能电池造成的边缘热影响，保证太阳能电池的性能，并且清边效率高，自动化程度高。
附图说明
图1为本发明的实施例中清边机的立体总装图；
图2为图1中A处的局部放大图；
图3为图1中B处的局部放大图；
图4为本发明的实施例中清边机的立体图；
图5为本发明的实施例中清边机的侧视图；
图6为图5中C处的局部放大图；
图7为本发明的实施例中清边机的俯视图；
图8为图7中D处的局部放大图；
图9为太阳能电池清边工艺的示意图；
图10为本发明的实施例中直线驱动机构的安装示意图；
图11为本发明的实施例中激光清洗头的立体图；
图12为本发明的实施例中激光清洗头另一视角的立体图；
图13为本发明的实施例中激光光路的示意图；
图14为本发明的实施例中吸尘罩的结构图；
图15为本发明的实施例中清边方法的流程图。
图中有：100、机台；200、加紧定位部件；300、直线驱动机构；400、激光清洗头；410、机架；420、微动模组；430、第一激光系统；431、第一激光器；432、第一反射镜；433、聚焦透镜；440、第二激光系统；441、第二激光器；442、第二反射镜；443、振镜；444、场镜；450、吸尘罩；451、激光过孔；452、抽尘口；500、工作平台；510、气孔；520、接气部件；530、滚轮过孔；600、升降传输机构；610、滚轮传输单元；611、滚轮；612、横梁；613、传动轮；614、同步带；620、支撑体；700，激光功率检测装置。
具体实施方式
下面结合实施例和说明书附图对本发明作进一步的说明。说明的是，术语“第一”、 “第二”等仅是为了便于描述，不能理解为对数量等的限制。
结合图1-8，该激光清边机包括：机台100、多个直线驱动机构300、工作平台500、升降传输机构600；在本发明的实施例种，共采用了四个直线驱动机构300，直线驱动机构300可以采用直线电机、直线模组等。优选的方案中，采用了四个直线电机，四个直线电机均设置在机台100上，围成一矩形的加工区域，因为太阳能电池是矩形的，需要对矩形的四个边同时进行清边，以提高生产效率。通常，太阳能电池时长方形的，存在两个相对的长边和两个相对的对边，因此四个直线电机中，有两个相对设置的长行程直线电机和两个相对设置的短行程直线电机，从而形成的矩形区域和太阳能电池的形状相似。直线电机可以采用现有的高精度的直线电机。在每个直线电机上均设置一个激光清洗头400，那么每个直线电机可以驱动一个激光清洗头沿着预设的运动轨迹运动，完成对太阳能电池一个边的清除。因此四个直线电机同时驱动各自的激光清洗头400进行工作，就可以对太阳能电池的四个边进行同时清除，有效地提高了生产效率。
在本发明的实施例中，激光清洗头400包括机架410、设置在机架410上端的微动模组420、设置在微动模组420上的第一激光系统430和设置在机架410下部的第二激光系统440。本发明的清边机主要是针对一种新的激光清边工艺而研制的，在进行清边时，首先利用第一激光系统430发出的激光对太阳能电池进行划线，在直线驱动机构的驱动下，将太阳能电池表面的薄膜层分割成有效区域(需要保留的区域)和无效区域(需要清除的区域)，如图9所示，然后利用第二激光系统440，在直线驱动机构300的驱动下，将无效区域的薄膜清除。
工作平台500设置在机台100上，并位于所述矩形的加工区域中，其作用是在对太阳能电池进行平台支撑。在本发明的实施例中，在工作平台500上开有若干气孔510，通过气孔510对外吹气或者吸气，从而能够将太阳能电池气浮于工作平台500的上方或者吸附于工作平台500表面。在工作平台500下面设置有接气部件520，接气部件520与气孔510连通，通过接气部件520连接外部气压机等，使得气孔对外吹气或吸气，从而使得太阳能电池时气浮于工作平台上方，或是吸附与工作平台表面。
升降传输机构600设置在机台100上，用于将太阳能电池升起或者降下，并且能够使得太阳能电池向前传输。在具体的实施过程中，升降传输机构600可以采用机械手等，但利用机械手会使得整个设备的体积增大，成本增加，因此在本发明的一个优选的实施例中，采用了另一种结构形式，升降传输机构设置在工作平台500的下方，升降传输机构600包括若干个滚轮传输单元610，滚轮传输单元610的滚轮611能够通过开设在工 作平台500上的滚轮过孔530穿过工作平台500，当需要将太阳能升起时，滚轮611穿过工作平台向上运动，从而支撑太阳能电池升起，当需要将太阳能电池落下时，则滚轮611下降，使得太阳能电池下降；而需要将太阳能电池向前传输时，滚轮611转动，将太阳能电池向前传输。
具体的，在本发明的实施例中，升降传输机构600包括支撑体620、第一驱动部件、第二驱动部件以及上述的若干个滚轮传输单元610，滚轮传输单元610设置在支撑体620上，滚轮传输单元610包括横梁612、设置在横梁612上的若干传动轮613以及若干个上述的滚轮611，滚轮611与传动轮613之间通过同步带614进行传动。第一驱动部件可以采用电缸、气缸或油缸，利用第一驱动部件推动支撑体620上下运动，从而使得滚轮传输单元610可以上下运动，进而带动太阳能电池进行升降。而第二驱动部件可以采用电机、液压马达等，驱动传动轮613转动，从而带动所有的滚轮611转动，以传输太阳能电池。
在本发明的优选实施例中，四个直线驱动机构均是侧立设置的，从而保证与工作平台230台面的高度公差和平行。以直线电机为例，在机器的制造过程中，因为在大幅面方通焊接加工中会存在焊接时方通形变，加工中应力释放形变等使得直线电机安装基准误差公差偏大(±0.03mm)，长行程直线电机(本发明的一个实施例中采用了2200mm的)基板加工厚度公差偏大±0.02mm)，采用正面安装时误差会偏移设计要求≥±0.05mm，长行程直线电机其直线度可达到0.008mm，采用侧挂安装可把加工误差对应的影响去除掉，并且安装和调试方便，可参照图10。
调节Y1和Y2可使得直线电机的行走直线度与工作台板Z3平行，调节X1和X2可使得直线电机运行时与工作台板的间隔一致。
在本发明的实施例中，结合图11和图12第一激光系统430包括第一激光器431、第一反射镜432和聚焦透镜433，第一激光器431发出的激光光束经第一反射镜432反射后照进聚焦透镜433，经聚焦透镜433聚焦后射出。在对太阳能电池进行清边时，利用第一激光系统430将太阳能电池便面的薄膜划分为有效区域和无效区域。通常，在对太阳能电池进行区域划分时，并不需要很大功率的激光，而且，为了降低对太阳能电池的边缘热影响，第一激光器的功率越小越好，但是太小了又影响效率，因此必须均衡效率和热影响的问题。因此在本发明的实施例中，第一激光器431采用的是功率范围在10～30W的激光器，这样可以降低设备的成本。并且，第一反射镜432将第一激光器431发出的激光反射90°后射进聚焦透镜433，由聚焦透镜433聚焦后射到太阳能电池的表 面上，在直线驱动机构300的驱动下，完成区域的划分。
在本发明的实施例中，第二激光系统440包括第二激光器441、第二反射镜442、振镜443和场镜444，第二激光器441发出的激光光束经第二反射镜442反射后进入依次进入振镜443和场镜444后射出。第二激光系统440主要是将无效区域中的薄膜清除，并且无效区域已经和有效区域分离，在清除的过程中，不会再对有效区域产生较大的热影响，因此可以采用功率较大的激光器，因此，在本发明的实施中，选用了功率范围在100～500W的激光器。在继续无效区域清除时，第二激光器441发出的激光光束镜第二反射镜442反射90°后，射进振镜443，振镜443可以将光束进行聚焦，通过场镜444射出，并且利用振镜443进行摆动，进行飞行打标，在直线驱动机构的驱动下，完成无效区域的清除。第一激光系统和第二激光系统构成的光路结构如图13所示。
在机台100上设置有若干个加紧定位部件200，加紧定位部件200的数量，需要根据激光清边机应用的太阳能电池的尺寸来确定，当激光清边机适用于加工大尺寸的太阳能电池时，可以多设置几个加紧定位部件200，具体的，加紧定位部件200设置在直线驱动机构的外侧，即矩形的加工区域的外侧，并且，为了对太阳能电池进行加紧定位，可以相对设置。在本发明的实施例中，加紧定位部件200可以采用气缸或者电缸，那么在对太阳能电池进行加紧定位时，仅通过气缸或电缸的缸杆伸出，即可以将太阳能电池定位到准确的加工位置，结构简单，便于控制。
进一步地，因为在激光清边过程中，很容易产生高温的烟尘，而烟尘如果落在太阳能电池上时，极有可能对电池表面造成损伤，因此需要及时的将烟尘吸走。在本实用新型的实施例中，在聚焦透镜433上设置有吸尘罩450，如图14所示，吸尘罩450上设置有激光过孔451和抽尘口452，其中，抽尘口452可连接吸尘装置，并且从聚焦透镜433出来的激光光束穿过所述激光过孔451。这样，从聚焦透镜433出来的激光光束可以垂直与吸尘罩450发出，并且，吸尘罩450能够完全的覆盖住从聚焦透镜433出来的激光光束的工作区域，从而提高了吸尘效率。而从第二激光系统440与第一激光系统430是近似相对的，从而在第二激光系统440工作时，烟尘也能够随时通过吸尘罩450吸走，从而避免了烟尘对电池的影响。
进一步地，在本发明的实施例中，在机台100上设置有激光功率检测装置700，具体地，激光功率检测装置700设置在激光清洗头400的初始位置，在本发明中，激光清洗头400的初始位置为在两个直线驱动机构的交汇处，也就是矩形的工作区域的角点位置，因为，需要对四个激光清洗头400进行功率检测，因此至少需要设置两个激光功率 检测装置，分别设置在矩形工作区域的两个角。在实际的工程中，仅需要检测第二激光系统发射出的激光的功率即可，因此，在进行太阳能电池的清边前，先将第二激光系统发出的激光打在激光功率检测装置上，检测激光的功率是否达到工艺需求。
利用本发明的实施例中所提出的清边机，首先在直线驱动机构的驱动下，利用激光清洗头400上的第一激光系统430对太阳能电池的薄膜层进行划线，将薄膜层分割成为无效区域和有效区域，然后在直线驱动机构的驱动下，通过第二激光系统，将无效区域中的薄膜清除干净，从而实现了太阳能电池的高效清边。并且，通过该清边机进行清边时，因为时通过两个过程完成清边的，可以有效地降低激光对太阳能电池造成的边缘热影响，保证太阳能电池的性能。此外，自动化程度高，可以极大地提高生产效率。
利用上述实施例中所提供的清边机，本发明的实施例中提供一种太阳能电池的激光清边方法，如图15，该清边方法包括：
S100：将激光清洗头400复位，将太阳能电池吸附在工作平台500上；
S200：启动第一激光系统430发出第一激光照射在太阳能电池的薄膜层上，在四个直线驱动机构300驱动下，对太阳能电池进行划线，将太阳能电池分割为有效区域和无效区域；
S300：关闭第一激光系统430，启动第二激光系统440发出第二激光光束透过玻璃基板照射在薄膜层上，利用振镜443改变激光光束聚焦位置，并在四个直线驱动机构300驱动下，将无效区域中的薄膜清除。
通过上述方法，通过将太阳能电池表面的薄膜分割成为有效区域和无效区域，那么在第一激光照射是，仅仅是进行划线，而并不进行大范围的激光烧蚀，因此对有效区域造成的边缘热影响较小；并且在第二激光清除无效区域时，由于已经和有效区域分离，那么也就不会再对有效区域产生较大的边缘热影响，从而综合两次激光照射过程，完成清边，使得整个清边过程都未产生较大的热影响，从而保证了太阳能电池的整体性能，不会因为清边而造成较大影响。
进一步，所述第一激光的功率小于第二激光的功率，因为在对太阳能电池进行划线分割时，仅需要烧蚀很小的面积，因此仅需要小功率的激光即可保证加工效率，并且，利用小功率的激光能够有效地降低在清边过程中对太阳能电池造成边缘热影响，并且小功率的激光器能够降低设备的制造成本。而采用功率较大的第二激光，可以有效地提高清边效率，并且因为无效区域已经和有效区域分割开来，在对无效区域进行清除时，不会对有效区域造成较大的热影响。
此外，在本发明的实施例中，在太阳能电池上料时，升起升降传输机构600，将太阳能电池置于升降传输机构600上；降下升降传输机构600，工作平台500向外吹气，使太阳能电池气浮于工作平台500上方；加紧定位部件200伸出，推动太阳能电池到准确清边位置后，缩回加紧定位部件200；逐渐减小工作平台500的吹气气压，直至太阳能电池回落到工作平台500上，工作平台将太阳能电池吸附。主要作用时为了对太阳能电池进行位置调节，从而使得清边的精度更好，清边质量更好。
此外，为了减少激光烧蚀过程中产生的烟尘，在本发明的实施例中，在对太阳能电池进行清边时，同时进行吸尘，通过吸尘罩450将激光烧蚀产生的烟尘及时吸走，避免烟尘对太阳能电池表面造成损伤。
上述实施例仅是本发明的优选实施方式，应当指出：对于本技术领域的普通技术人员来说，在不脱离本发明原理的前提下，还可以做出若干改进和等同替换，这些对本发明权利要求进行改进和等同替换后的技术方案，均落入本发明的保护范围。

Claims (15)

  1. 一种太阳能电池激光清边机，其特征在于，包括：
    机台(100)；
    多个直线驱动机构(300)，多个所述直线驱动机构(300)设置在机台(100)上，围成一矩形的加工区域；每个所述直线驱动机构(300)上设置有激光清洗头(400)，所述激光清洗头(400)包括机架(410)、设置在所述机架(410)上端的微动模组(420)、设置在所述微动模组(420)上的第一激光系统(430)和设置在所述机架(410)下部的第二激光系统(440)；所述第一激光系统(430)用于对太阳能电池进行划线，将太阳能电池发划分有效区域和无效区域，所述第二激光系统(440)用于将无效区域清除；
    工作平台(500)，所述工作平台(500)设置在机台(100)上，并位于所述矩形的加工区域中，所述工作平台(500)上设置有若干气孔(510)，通过所述气孔(510)能够进行吹气或吸气，使得太阳能电池能够气浮在工作平台(500)上方或吸附在工作平台(500)表面；
    升降传输机构(600)，设置在工作平台(500)上，用于在太阳能电池清边过程中将太阳能电池进行升降及传输。
  2. 根据权利要求1所述的太阳能电池激光清边机，其特征在于，所述直线驱动机构(300)均侧立设置。
  3. 根据权利要求2所述的太阳能电池激光清边机，其特征在于，所述第一激光系统(430)包括第一激光器(431)、第一激光器(432)和聚焦透镜(433)，第一激光器(431)发出的激光光束经第一激光器(432)反射后照进聚焦透镜(433)，经聚焦透镜(433)聚焦后射出。
  4. 根据权利要求2所述的太阳能电池激光清边机，其特征在于，所述第二激光系统(440)包括第二激光器(441)、第二反射镜(442)、振镜(443)和场镜(444)，第二激光器(441)发出的激光光束经第二反射镜(442)反射后依次进入振镜(443)和场镜(444)后射出。
  5. 根据权利要求1所述的太阳能电池激光清边机，其特征在于，所述机台(100)上设置有若干个加紧定位部件(200)，所述加紧定位部件(200)位于所述直线驱动机构(300)的外侧。
  6. 根据权利要求3所述的太阳能电池激光清边机，其特征在于，所述聚焦透镜(433)上设置有吸尘罩(450)，所述吸尘罩(450)上设置有激光过孔(451)和抽尘口(452)，从聚焦透镜(433)出来的激光光束穿过所述激光过孔(451)。
  7. 根据权利要求6所述的太阳能电池激光清边机，其特征在于，所述升降传输机构(600)设置于所述工作平台(500)下方，所述升降传输机构(600)包括若干个滚轮传输单元(610)，所述滚轮传输单元(610)的滚轮(611)能够穿过在工作平台(500)上开设的滚轮过孔(530)进行升降。
  8. 根据权利要求7所述的太阳能电池激光清边机，其特征在于，所述升降传输机构(600)包括支撑体(620)、第一驱动部件、第二驱动部件以及所述的若干滚轮传输单元，若干所述滚轮传输单元(610)设置在所述支撑体(620)上，所述滚轮传输单元(610)包括横梁(612)和设置在所述横梁(612)上的若干滚轮(611)以及传动轮(613)，所述传动轮(613)与滚轮之间通过同步带(614)进行传动；所述第一驱动部件用于驱动支撑体(620)上下运动，第二驱动部件驱动滚轮转动。
  9. 根据权利要求8所述的太阳能电池激光清边机，其特征在于，所述工作平台(500)下面设置有接气部件(520)，所述接气部件(520)与所述气孔(510)连接。
  10. 根据权利要求1-9任一项所述的太阳能电池激光清边机，其特征在于，所述机台(100)上设置有激光功率检测装置(700)。
  11. 根据权利要求5所述的太阳能电池激光清边机，其特征在于，所述加紧定位部件(200)为气缸或电缸。
  12. 一种利用权利要求1-11任一项所述的太阳能电池清边机对太阳能电池进行清边的方法，其特征在于，包括：
    将激光清洗头(400)复位，将太阳能电池吸附在工作平台(500)上；
    启动第一激光系统(430)发出第一激光照射在太阳能电池的薄膜层上，在四个直线驱动机构(300)驱动下，对太阳能电池进行划线，将太阳能电池分割为有效区域和无效区域；
    关闭第一激光系统(430)，启动第二激光系统(440)发出第二激光透过玻璃基板照射在薄膜层上，利用振镜(443)改变激光光束聚焦位置，并在直线驱动机构(300)驱动下，将无效区域中的薄膜清除。
  13. 根据权利要求12所述的方法，其特征在于，所述第一激光的功率小于第二激光的功率。
  14. 根据权利要求13所述的方法，其特征在于，在太阳能电池上料时，升起升降传输机构(600)，将太阳能电池置于升降传输机构(600)上；降下升降传输机构(600)，工作平台(500)向外吹气，使太阳能电池气浮于工作平台(500)上方；加紧定位部件 (200)伸出，推动太阳能电池到准确清边位置后，缩回加紧定位部件(200)；逐渐减小工作平台(500)的吹气气压，直至太阳能电池回落到工作平台(500)上，工作平台将太阳能电池吸附。
  15. 根据权利要求14所述的方法，其特征在于，在太阳能电池进行划线，以及在对无效区域进行清除时，进行吸尘操作，通过吸尘罩(450)，将烟尘吸走。
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