WO2023004879A1 - Leveling method and apparatus for flexible product - Google Patents

Leveling method and apparatus for flexible product Download PDF

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Publication number
WO2023004879A1
WO2023004879A1 PCT/CN2021/111417 CN2021111417W WO2023004879A1 WO 2023004879 A1 WO2023004879 A1 WO 2023004879A1 CN 2021111417 W CN2021111417 W CN 2021111417W WO 2023004879 A1 WO2023004879 A1 WO 2023004879A1
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WO
WIPO (PCT)
Prior art keywords
positioning unit
hollow
plane
flexible
carrying platform
Prior art date
Application number
PCT/CN2021/111417
Other languages
French (fr)
Chinese (zh)
Inventor
靳登科
顾勇强
季树勇
王永兴
Original Assignee
逸美德科技股份有限公司
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Application filed by 逸美德科技股份有限公司 filed Critical 逸美德科技股份有限公司
Priority to KR1020217034660A priority Critical patent/KR102450558B1/en
Publication of WO2023004879A1 publication Critical patent/WO2023004879A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H5/00Feeding articles separated from piles; Feeding articles to machines
    • B65H5/36Article guides or smoothers, e.g. movable in operation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H9/00Registering, e.g. orientating, articles; Devices therefor
    • B65H9/08Holding devices, e.g. finger, needle, suction, for retaining articles in registered position
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2406/00Means using fluid
    • B65H2406/10Means using fluid made only for exhausting gaseous medium
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00Handled material; Storage means
    • B65H2701/10Handled articles or webs
    • B65H2701/19Specific article or web

Definitions

  • the invention relates to the field of flexible product processing, in particular to a flattening method and device for flexible products.
  • the inventor tried to use a non-contact plane positioning and leveling method, which placed flexible products on the plane part of the carrying platform through the carrying platform and the vacuum adsorption micropores opened on the carrying platform and vacuum adsorption The micropores are vacuum-suctioned, intending to absorb them from the end of the carrying platform away from the flexible product so as to achieve the smooth effect of the flexible product.
  • the inventor also tried to use an air gun to inject gas from the end of the flexible product away from the carrying platform, but found that the gas in the air gun vibrates, and the flexible product cannot be kept in a fixed position while the flexible product is in a flat state.
  • embodiments of the present invention provide a flattening method and device for flexible products, which are used to solve the above-mentioned problems of crushing or damage to flexible products and poor flattening effect.
  • the embodiment of the present application discloses: a flattening method for a flexible product, the flexible product includes a detection part and an auxiliary material part surrounding the periphery of the detection part, including the following steps: using a positioning unit with a hollow part to place the flexible The product is fixed on the carrying platform, the positioning unit is pressed on the auxiliary material part, and the hollow part is set corresponding to the detection part; the end of the hollow part away from the carrying platform is closed to make the hollow part Sealing: Inject positive pressure gas into the hollow part to form a positive pressure on all surfaces in the hollow part, thereby flattening the detection part.
  • the flexible product includes a PU film and a wafer arranged on the PU film detection part, and the pressure of the hollow part is set at 0.5MPA-0.7MPA.
  • the embodiment of the present application also provides a flattening device for flexible products.
  • the flexible product includes a detection part and an auxiliary material part surrounding the detection part.
  • the flattening device includes: a carrying platform, and the carrying platform There is a plane part on which the flexible product is arranged; a positioning unit, the positioning unit is pressed on the side of the auxiliary material part away from the plane part, and the positioning unit has a position perpendicular to the plane part
  • the hollow part penetrates in the direction of the hollow part, and the hollow part is arranged correspondingly to the detection part, and the positioning unit is penetrated with an air flow channel from the vicinity of the hollow part to the away from the hollow part; the sealing part, the sealing part It is arranged on the side of the hollow part away from the bearing platform and seals the hollow part; an air source, the gas source is communicated with the air flow channel, so that the gas can be input into the air flow channel so that the hollow part reaches A preset pressure, the gas source can stop feeding gas into the airflow channel when
  • the sealing part is transparent optical glass.
  • a fixing unit is included, the fixing unit is adjacent to the positioning unit and the carrying platform, and the fixing unit is screwed to the positioning unit and the carrying platform.
  • a plurality of the fixing units are arranged at an end of the positioning unit away from the hollow portion.
  • the positioning unit has a first plane and a second plane parallel to the plane part, a side of the sealing part adjacent to the plane part is parallel to the plane part, and the first plane is parallel to the plane part.
  • the auxiliary material part abuts, and the second plane abuts against the sealing part.
  • sealing part is fixedly connected with the positioning unit.
  • the carrying platform is provided with a groove which is recessed from its edge to the inside thereof, and the groove is arranged correspondingly to the air pipe joint.
  • both the carrying platform and the positioning unit are aluminum plates.
  • the effect of flattening the detection part in the flexible product can be achieved without touching the flexible product, so that subsequent detection can be performed, and the situation of crushing or destroying the flexible product can be avoided. Moreover, since the preset pressure value is set in the whole method, the force exerted by the positive pressure gas on each part of the detection part remains the same, so that the leveling effect is better.
  • the positive pressure gas therein can exert force on the detection part and make the detection part flat.
  • direct contact with the flexible product can be avoided, thereby preventing crushing or damage to the flexible product.
  • it can also realize uniform stress on the flexible product and make the flexible product fixed in the flat position, which improves the flexibility of the product. The flattening effect of the material.
  • Positioning units are respectively arranged around the positioning unit, so as to fix the surroundings of the positioning unit and improve the stability of the whole device. In addition, direct fixing between the positioning unit and the carrying platform can also be avoided, thereby saving the positioning unit, so that the positioning unit does not need to be fixed with the carrying platform beyond the auxiliary material part.
  • Fig. 1 is an exploded view of a flattening device for flexible products in an embodiment of the present invention
  • Fig. 2 is a schematic structural view of a flattening device for flexible products in an embodiment of the present invention
  • FIG. 3 is a schematic cross-sectional view of a leveling device for flexible products in an embodiment of the present invention.
  • the flexible product 2 may include a detection part 21 and an auxiliary material part 22 surrounding the periphery of the detection part 21, including the following steps:
  • the flexible product 2 is fixed on the carrying platform 1 with the positioning unit 3 having the hollow part 31, the positioning unit 3 can be pressed on the auxiliary material part 22, the hollow part 31 can be set corresponding to the detection part 21, so that the detection part 21 is located in the hollow In the part 31 , at this time, the detection part 21 may have a part that is tilted relative to the carrying platform 1 .
  • the end of the hollow portion 31 away from the carrying platform 1 is closed to seal the hollow portion 31 , so as to prevent the gas from flowing out after the positive pressure gas is injected into the hollow portion 31 .
  • Positive pressure gas is injected into the hollow part 31 to form a positive pressure on all surfaces in the hollow part 31.
  • the positive pressure gas in the hollow part 31 can make the flexible product 2 be flattened on the carrying platform 1 by pressure, thereby flattening detection part 21.
  • the flexible product may include a PU film and a wafer disposed on the PU film detection part 21, and the pressure of the hollow part is set at 0.5MPa-0.7MPa.
  • the gas source injects high-pressure gas into the hollow part 31 through the air flow channel 33 on the positioning unit 3, and the preset pressure value of the hollow part 31 is set to 0.6 MPa.
  • the air source is closed at 0.6MPa.
  • the positive pressure gas in the hollow part 31 forms a positive pressure to pressurize all surfaces, and the detection part 21 is pressed to the plane part 11 by the positive pressure, so that the detection part 21 and the plane part 11 are in close contact, and then the detection part is realized 21 smooth effects.
  • the detection part 21 in the flexible product 2 can be flattened without touching the flexible product 2 , so that subsequent detection can be performed, and the situation of crushing or destroying the flexible product 2 can be avoided. Moreover, since the preset pressure value is set in the whole method, the force exerted by the positive pressure gas on each part of the detection part 21 remains the same, so that the smoothing effect is better.
  • this embodiment also provides a flattening device for flexible products.
  • the flexible product 2 can be arranged on the plane part 11, and the flexible product 2 can include a detection part 21 and be surrounded by the detection part. 21 peripheral auxiliary material portion 22.
  • the auxiliary material part 22 is used for positioning the unit 3 thereon and positioning the entire flexible product 2 to the plane part 11 . Wafers may be disposed on the detection unit 21 .
  • the specific shapes of the auxiliary material part 22 and the detection part 21 can be adjusted according to actual needs.
  • Leveling devices include:
  • the carrying platform 1, the carrying platform 1 may have a plane portion 11, so that the carrying platform 1 can carry materials and other mechanisms.
  • the flat part 11 can be located on the flat part 11 so that the flexible product 2 can keep close contact with the flat part 11 after the gas pressure in the hollow part 31 acts, so that the flexible product 2 can be kept flat.
  • Other parts of the carrying platform 1 except the plane portion 11 can be adjusted according to actual needs, so that the carrying platform 1 can be set under different working conditions.
  • the carrying platform 1 can be made of rigid material, so that the carrying platform 1 can provide a flat reference surface.
  • the positioning unit 3 the positioning unit 3 can be arranged on the side of the auxiliary material part 22 away from the plane part 11 , and the positioning unit 3 can have a hollow part 31 penetrating in a direction perpendicular to the plane part 11 . Therefore, after the positioning unit 3 is in contact with the flexible product 2, the positioning unit 3 can contact the auxiliary material part 22, and the hollow part 31 corresponds to the detection part 21, thereby preventing the detection part 21 from being affected by the contact between the positioning part and the detection part 21.
  • the positioning unit 3 can be provided with an airflow channel 33 from the adjacent hollow part 31 to the airflow channel 33 away from the hollow part 31, and the airflow channel 33 away from the hollow part 31 can include a tracheal joint 6, so that the positive pressure gas can pass through the tracheal joint 6 from the airflow channel 33 into the hollow portion 31.
  • the positioning unit 3 can be made of rigid material, so that the positioning unit 3 can fasten the auxiliary material part 22 .
  • the sealing part 4, the sealing part 4 can be arranged on the side of the hollow part 31 away from the carrying platform 1 and seal the hollow part 31, so that the positive pressure gas in the hollow part 31 can gather in the hollow part 31 and make the air in the hollow part 31 Positive pressure gas seal is airtight.
  • a gas source (not shown in the figure), the gas source can be communicated with the airflow channel 33, so that the gas can be input to the airflow channel 33 and the hollow part 31 can reach a preset pressure, and the gas source can be stopped when the hollow part 31 is at a preset pressure Gas is supplied to the gas flow channel 33 .
  • the gas input therein can be a positive pressure gas, so that the inside of the hollow part 31 reaches the preset pressure value faster.
  • the air source includes an electric control cabinet, a high-pressure gas pipe controllable by the electric control cabinet, and a solenoid valve electrically connected to the electric control cabinet.
  • the electric control cabinet controls the high-pressure air pipe to communicate with the air pipe joint 6 and makes the solenoid valve electrically connected to the electric control cabinet open.
  • the high-pressure air pipe injects high-pressure gas into the air pipe joint 6 and makes the high-pressure gas flow into the hollow part 31 through the air flow channel 33 , and finally cut off the electromagnetic valve after the gas in the hollow part 31 reaches a preset pressure value, so that the gas path of the high-pressure gas pipe is closed.
  • the positive pressure gas in the hollow part 31 forms a positive pressure that applies pressure to all surfaces, and the detection part 21 is pressed to the plane part 11 by the positive pressure, so that the detection part 21 is in close contact with the plane part 11, Furthermore, the effect of leveling the detection part 21 is achieved.
  • the positive pressure gas therein can exert force on the detection portion 21 and make the detection portion 21 flat.
  • direct contact with the flexible product 2 can be avoided, thereby preventing the flexible product 2 from being crushed or damaged.
  • the flexible product 2 can be evenly stressed everywhere and the flexible product 2 can be fixed in a flat position. Improved leveling for flexible materials.
  • the sealing part 4 may be transparent optical glass, so that the sealing part 4 acts as an observation window for the hollow part 31 , which is convenient for observing and monitoring the flexible product 2 in the hollow part 31 . Therefore, it is convenient for the operator to intuitively understand the working environment in the hollow portion 31 and to further judge the flatness of the flexible product 2 .
  • a fixing unit 5 is included, and the fixing unit 5 can be adjacent to the positioning unit 3 and the carrying platform 1 , and the fixing unit 5 is screwed to the positioning unit 3 and the carrying platform 1 . Therefore, the positioning unit 3 and the carrying platform 1 are fixed to each other by the fixing unit 5 . A reinforcement effect on the positioning unit 3 and the carrying platform 1 can be achieved.
  • the fixing unit 5, the positioning unit 3 and the carrying unit can all be screwed, except that the airflow channel 33 communicated with the air pipe joint 6 communicates with the hollow part 31, and the rest can be threaded holes 34 isolated from the hollow part 31.
  • a plurality of fixing units 5 may be arranged at an end of the positioning unit 3 away from the hollow portion 31 .
  • the projection shape of the positioning unit 3 on the section perpendicular to its thickness is a rectangular ring, and the positioning units 3 are respectively arranged around the positioning unit 3, so that the positioning unit 3 Fixed all around to improve the stability of the whole device.
  • direct fixing between the positioning unit 3 and the carrying platform 1 can also be avoided, thereby saving the positioning unit 3 , so that the positioning unit 3 does not need to be fixed to the carrying platform 1 beyond the auxiliary material portion 22 .
  • the fixing unit 5 can surround it to fix it.
  • the positioning unit 3 may have a first plane and a second plane 32 parallel to the plane part 11, and the side of the sealing part 4 adjacent to the plane part 11 may be parallel to the plane part 11, so that during use Among them, the first plane can be in contact with the auxiliary material part 22 , and the second plane 32 can be in contact with the sealing part 4 .
  • the part of the hollow part 31 close to the flexible product 2 can be sealed between the first plane and the auxiliary material part 22, and the part of the hollow part 31 close to the sealing part 4 can be sealed between the second plane 32 and the sealing part 4, thereby lifting the hollow part 31 Tightness of medium positive pressure gas.
  • the sealing part 4 can be fixedly connected with the positioning unit 3, so that there is a stronger bonding force between the sealing part 4 and the positioning unit 3, which can prevent the positive pressure gas inside the hollow part 31 from sealing the device during use.
  • the situation that the part 4 pushes away from the positioning unit 3 improves the use stability of the whole flattening device for flexible products.
  • the supporting platform 1 can be provided with a groove 12 which is recessed from its edge to its interior, and the groove 12 can be set corresponding to the air pipe joint 6, that is, the opening position of the groove 12 can be located at At the position where the carrying platform 1 corresponds to the air pipe joint 6 , the size of the groove 12 may be slightly larger than the air pipe joint 6 , so as to prevent interference between the air pipe joint 6 and the carrying platform 1 .
  • the carrying platform 1 and the positioning unit 3 can both be aluminum plates. Since the aluminum plate has the characteristics of light weight and high hardness, the flexible product 2 located in the carrying platform 1 and the positioning unit 3 can be fixed on the plane part 11 The formed datum surface improves the fixing effect on the flexible product 2 .

Abstract

Disclosed in the present invention is a leveling method for a flexible product. The flexible product comprises a detection portion and an accessory portion arranged around the detection portion. The leveling method comprises the following steps: fixing the flexible product on a bearing platform by using a positioning unit having a hollow portion, the positioning unit being pressed on the accessory portion, and the hollow portion being arranged corresponding to the detection portion; closing the end of the hollow portion distant from the bearing platform to seal the hollow portion; and injecting a positive-pressure gas into the hollow portion to form a positive pressure, applied to all surfaces, in the hollow portion, so as to flatten the detection portion. According to the present invention, the effect of flattening the detection portion in the flexible product without contacting the flexible product can be achieved, such that the detection portion can be enabled to perform subsequent detection, thereby avoiding the situation that the flexible product is crushed or damaged. In addition, since a preset pressure value is set in the whole method, an acting force applied to each part of the detection portion by the positive-pressure gas is kept the same, such that the leveling effect is better.

Description

用于柔性产品的平整方法和装置Smoothing method and device for flexible products
交叉参考相关引用Cross Reference Related References
本申请要求2021年7月30日提交的申请号为2021108748608、名称为“用于柔性产品的平整方法和装置”的中国专利申请的优先权,上述申请参考并入本文。This application claims the priority of the Chinese patent application with application number 2021108748608 and titled "Smoothing method and device for flexible products" filed on July 30, 2021, which is incorporated herein by reference.
技术领域technical field
本发明涉及了柔性产品处理领域,具体的是一种用于柔性产品的平整方法和装置。The invention relates to the field of flexible product processing, in particular to a flattening method and device for flexible products.
背景技术Background technique
柔性产品在实际使用过程中存在需要展平后对其进行检测的步骤。现有的用于柔性产品的平整方法是通过刚性材料对柔性产品进行平整操作,但可能会对柔性产品产生压伤或破坏。为解决这一问题,现有的行业常规做法为寻找超柔性薄膜平压产品,但是柔性薄膜刚性不足,无法对柔性产品实施有效的平面定位、压紧和整形的操作。In the actual use of flexible products, there are steps that need to be inspected after being flattened. Existing flattening methods for flexible products use rigid materials to flatten flexible products, but the flexible products may be crushed or damaged. In order to solve this problem, the existing industry routine is to find ultra-flexible film flat pressing products, but the flexible film is not rigid enough to perform effective plane positioning, pressing and shaping operations on flexible products.
发明人为解决上述问题,尝试使用一种非接触式的平面定位平整方法,其通过承载平台和在承载平台上开设的真空吸附微孔,将柔性产品放置在承载平台的平面部上并对真空吸附微孔进行吸真空处理,意图从承载平台远离柔性产品的一端对其进行吸附从而达到柔性产品平整的效果。但经过尝试发现这种点吸的方式对于柔性产品施加的作用力并不均匀,平整效果不佳。此外发明人还尝试使用气枪从柔性产品背离承载平台的一端朝其喷射气体,但发现气枪中的气体存在振动,无法在对于柔性产品实现平整的状态下使得柔性产品仍然保持位置固定。In order to solve the above problems, the inventor tried to use a non-contact plane positioning and leveling method, which placed flexible products on the plane part of the carrying platform through the carrying platform and the vacuum adsorption micropores opened on the carrying platform and vacuum adsorption The micropores are vacuum-suctioned, intending to absorb them from the end of the carrying platform away from the flexible product so as to achieve the smooth effect of the flexible product. However, after trying, it was found that this way of spot suction exerted uneven force on flexible products, and the smoothing effect was not good. In addition, the inventor also tried to use an air gun to inject gas from the end of the flexible product away from the carrying platform, but found that the gas in the air gun vibrates, and the flexible product cannot be kept in a fixed position while the flexible product is in a flat state.
发明内容Contents of the invention
为了克服现有技术中的缺陷,本发明实施例提供了一种用于柔性产品的平整方法和装置,其用于解决上述对柔性产品产生压伤或破坏以及平整效果不佳的问题。In order to overcome the defects in the prior art, embodiments of the present invention provide a flattening method and device for flexible products, which are used to solve the above-mentioned problems of crushing or damage to flexible products and poor flattening effect.
本申请实施例公开了:一种用于柔性产品的平整方法,所述柔性产品包括检测部和围设在所述检测部外围的辅料部,包括以下步骤:用具有空心部的定位单元将柔性产品固定在承载平台上,所述定位单元压设在辅料部上,所述空心部与所述检测部对应设置;将所述空心部远离所述承载平台的一端闭合,以使所述空心部密封;向所述空心部注入正压气体,在所述空心部形成向所有面施压的正压力,从而压平所述检测部。The embodiment of the present application discloses: a flattening method for a flexible product, the flexible product includes a detection part and an auxiliary material part surrounding the periphery of the detection part, including the following steps: using a positioning unit with a hollow part to place the flexible The product is fixed on the carrying platform, the positioning unit is pressed on the auxiliary material part, and the hollow part is set corresponding to the detection part; the end of the hollow part away from the carrying platform is closed to make the hollow part Sealing: Inject positive pressure gas into the hollow part to form a positive pressure on all surfaces in the hollow part, thereby flattening the detection part.
进一步地,所述柔性产品包括PU薄膜和设置在所述PU薄膜检测部上的晶圆,设定所述空心部的压力为0.5MPA-0.7MPA。Further, the flexible product includes a PU film and a wafer arranged on the PU film detection part, and the pressure of the hollow part is set at 0.5MPA-0.7MPA.
本申请实施例还提供了一种用于柔性产品的平整装置,所述柔性产品包括检测部和围设在所述检测部外围的辅料部,所述平整装置包括:承载平台,所述承载平台具有用于所述柔性产品设置于其上的平面部;定位单元,所述定位单元压设于所述辅料部远离所述平面部的一侧,所述定位单元具有在垂直于所述平面部的方向上贯通的空心部,所述空心部与所述检测部对应设置,所述定位单元贯通开设有自临近所述空心部向着远离所述空心部的气流通道;密封部,所述密封部设置于所述空心部远离所述承载平台的一侧并使所述空心部密封;气源,所述气源与所述气流通道连通,以能向所述气流通道输入气体从而使空心部达到预设压力,所述气源能在所述空心部处于预设压力时停止向所述气流通道输入气体。The embodiment of the present application also provides a flattening device for flexible products. The flexible product includes a detection part and an auxiliary material part surrounding the detection part. The flattening device includes: a carrying platform, and the carrying platform There is a plane part on which the flexible product is arranged; a positioning unit, the positioning unit is pressed on the side of the auxiliary material part away from the plane part, and the positioning unit has a position perpendicular to the plane part The hollow part penetrates in the direction of the hollow part, and the hollow part is arranged correspondingly to the detection part, and the positioning unit is penetrated with an air flow channel from the vicinity of the hollow part to the away from the hollow part; the sealing part, the sealing part It is arranged on the side of the hollow part away from the bearing platform and seals the hollow part; an air source, the gas source is communicated with the air flow channel, so that the gas can be input into the air flow channel so that the hollow part reaches A preset pressure, the gas source can stop feeding gas into the airflow channel when the hollow part is at the preset pressure.
进一步地,所述密封部为透明的光学玻璃。Further, the sealing part is transparent optical glass.
进一步地,包括固定单元,所述固定单元邻接于所述定位单元和所述承载平台,所 述固定单元与所述定位单元和所述承载平台螺纹连接。Further, a fixing unit is included, the fixing unit is adjacent to the positioning unit and the carrying platform, and the fixing unit is screwed to the positioning unit and the carrying platform.
进一步地,多个所述固定单元设置在所述定位单元的远离所述空心部的一端。Further, a plurality of the fixing units are arranged at an end of the positioning unit away from the hollow portion.
进一步地,所述定位单元具有与所述平面部平行的第一平面和第二平面,所述密封部临近所述平面部的一侧与所述平面部平行,所述第一平面与所述辅料部抵接,所述第二平面与所述密封部抵接。Further, the positioning unit has a first plane and a second plane parallel to the plane part, a side of the sealing part adjacent to the plane part is parallel to the plane part, and the first plane is parallel to the plane part. The auxiliary material part abuts, and the second plane abuts against the sealing part.
进一步地,所述密封部与所述定位单元固定连接。Further, the sealing part is fixedly connected with the positioning unit.
进一步地,所述承载平台开设有自其边缘向其内部凹陷的凹槽,所述凹槽与所述气管接头对应设置。Further, the carrying platform is provided with a groove which is recessed from its edge to the inside thereof, and the groove is arranged correspondingly to the air pipe joint.
进一步地,所述承载平台与所述定位单元均为铝板。Further, both the carrying platform and the positioning unit are aluminum plates.
本发明的有益效果如下:The beneficial effects of the present invention are as follows:
1、可以实现在不接触柔性产品的情况下使得柔性产品中的检测部压平的效果,从而使其可以进行后续检测,避免了压伤或破坏柔性产品的情况。且整个方法中由于设定了预设压力值,使得正压气体对于检测部各部分施加的作用力保持相同,使得平整效果较佳。1. The effect of flattening the detection part in the flexible product can be achieved without touching the flexible product, so that subsequent detection can be performed, and the situation of crushing or destroying the flexible product can be avoided. Moreover, since the preset pressure value is set in the whole method, the force exerted by the positive pressure gas on each part of the detection part remains the same, so that the leveling effect is better.
2、通过形成密闭的空心部,使得其中的正压气体可以向检测部施加作用力,并使得检测部平整。在此过程中,可避免对于柔性产品的直接接触,从而防止压伤或破坏柔性产品,此外,也可以实现柔性产品各处均匀受力并使得柔性产品在平整后的位置固定,提升了对于柔性材料的平整效果。2. By forming the airtight hollow part, the positive pressure gas therein can exert force on the detection part and make the detection part flat. In this process, direct contact with the flexible product can be avoided, thereby preventing crushing or damage to the flexible product. In addition, it can also realize uniform stress on the flexible product and make the flexible product fixed in the flat position, which improves the flexibility of the product. The flattening effect of the material.
3、便于观察和监视空心部内的柔性产品。从而方便操作人员对于空心部内的工作环境进行直观了解,并进一步判断柔性产品的平整状态。3. It is convenient to observe and monitor the flexible products in the hollow part. In this way, it is convenient for the operator to have an intuitive understanding of the working environment in the hollow part, and to further judge the flatness of the flexible product.
4、在定位单元的四周分别设置有定位单元,从而将定位单元的四周固定,提升整个装置的稳定性。除此之外,也可以避免定位单元与承载平台之间直接固定,从而节省了定位单元,使得定位单元不必设置超出辅料部来与承载平台固定。4. Positioning units are respectively arranged around the positioning unit, so as to fix the surroundings of the positioning unit and improve the stability of the whole device. In addition, direct fixing between the positioning unit and the carrying platform can also be avoided, thereby saving the positioning unit, so that the positioning unit does not need to be fixed with the carrying platform beyond the auxiliary material part.
为让本发明的上述和其他目的、特征和优点能更明显易懂,下文特举较佳实施例,并配合所附图式,作详细说明如下。In order to make the above and other objects, features and advantages of the present invention more comprehensible, preferred embodiments will be described in detail below together with the accompanying drawings.
附图说明Description of drawings
为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only These are some embodiments of the present invention. Those skilled in the art can also obtain other drawings based on these drawings without creative work.
图1是本发明实施例中用于柔性产品的平整装置的爆炸图;Fig. 1 is an exploded view of a flattening device for flexible products in an embodiment of the present invention;
图2是本发明实施例中用于柔性产品的平整装置的结构示意图;Fig. 2 is a schematic structural view of a flattening device for flexible products in an embodiment of the present invention;
图3是本发明实施例中用于柔性产品的平整装置的截面示意图;3 is a schematic cross-sectional view of a leveling device for flexible products in an embodiment of the present invention;
以上附图的附图标记:1、承载平台;11、平面部;12、凹槽;2、柔性产品;21、检测部;22、辅料部;3、定位单元;31、空心部;32、第二平面;33、气流通道;34、螺纹孔;4、密封部;5、固定单元;6、气管接头。The reference signs of the above drawings: 1. carrying platform; 11. plane part; 12. groove; 2. flexible product; 21. detection part; 22. auxiliary material part; 3. positioning unit; 31. hollow part; 32. 2nd plane; 33, air flow channel; 34, threaded hole; 4, sealing part; 5, fixing unit; 6, air pipe joint.
具体实施方式Detailed ways
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
如图1至图3所示,本实施例的用于柔性产品的平整方法,柔性产品2可以包括检 测部21和围设在检测部21外围的辅料部22,包括以下步骤:As shown in Figures 1 to 3, in the flattening method for flexible products of this embodiment, the flexible product 2 may include a detection part 21 and an auxiliary material part 22 surrounding the periphery of the detection part 21, including the following steps:
用具有空心部31的定位单元3将柔性产品2固定在承载平台1上,定位单元3可以压设在辅料部22上,空心部31可以与检测部21对应设置,从而使得检测部21位于空心部31内,此时检测部21可能存在相对于承载平台1翘起的部分。The flexible product 2 is fixed on the carrying platform 1 with the positioning unit 3 having the hollow part 31, the positioning unit 3 can be pressed on the auxiliary material part 22, the hollow part 31 can be set corresponding to the detection part 21, so that the detection part 21 is located in the hollow In the part 31 , at this time, the detection part 21 may have a part that is tilted relative to the carrying platform 1 .
将空心部31远离承载平台1的一端闭合,以使空心部31密封,从而避免在向空心部31内注入正压气体后气体流出的情况。The end of the hollow portion 31 away from the carrying platform 1 is closed to seal the hollow portion 31 , so as to prevent the gas from flowing out after the positive pressure gas is injected into the hollow portion 31 .
向空心部31注入正压气体,在空心部31形成向所有面施压的正压力,空心部31内的正压气体可以通过压力使得柔性产品2被压平在承载平台1上,从而压平检测部21。Positive pressure gas is injected into the hollow part 31 to form a positive pressure on all surfaces in the hollow part 31. The positive pressure gas in the hollow part 31 can make the flexible product 2 be flattened on the carrying platform 1 by pressure, thereby flattening detection part 21.
具体的,柔性产品可以包括PU薄膜和设置在PU薄膜检测部21上的晶圆,设定空心部的压力为0.5MPa-0.7MPA。Specifically, the flexible product may include a PU film and a wafer disposed on the PU film detection part 21, and the pressure of the hollow part is set at 0.5MPa-0.7MPa.
在本实施例中,气源通过定位单元3上的气流通道33向空心部31内注入高压气体,并设定空心部31的预设压力值为0.6MPa,当空心部31内的压力值达到0.6MPa时气源关闭。在空心部31内的正压气体形成向所有面施压的正压力,并通过正压力将检测部21压向平面部11,从而使得检测部21与平面部11紧贴,进而实现将检测部21平整的效果。In this embodiment, the gas source injects high-pressure gas into the hollow part 31 through the air flow channel 33 on the positioning unit 3, and the preset pressure value of the hollow part 31 is set to 0.6 MPa. When the pressure value in the hollow part 31 reaches The air source is closed at 0.6MPa. The positive pressure gas in the hollow part 31 forms a positive pressure to pressurize all surfaces, and the detection part 21 is pressed to the plane part 11 by the positive pressure, so that the detection part 21 and the plane part 11 are in close contact, and then the detection part is realized 21 smooth effects.
借由上述方法,可以实现在不接触柔性产品2的情况下使得柔性产品2中的检测部21压平的效果,从而使其可以进行后续检测,避免了压伤或破坏柔性产品2的情况。且整个方法中由于设定了预设压力值,使得正压气体对于检测部21各部分施加的作用力保持相同,使得平整效果较佳。By means of the above method, the detection part 21 in the flexible product 2 can be flattened without touching the flexible product 2 , so that subsequent detection can be performed, and the situation of crushing or destroying the flexible product 2 can be avoided. Moreover, since the preset pressure value is set in the whole method, the force exerted by the positive pressure gas on each part of the detection part 21 remains the same, so that the smoothing effect is better.
如图1至图3所示,本实施例还提供了一种用于柔性产品的平整装置,柔性产品2可以设置在平面部11上,柔性产品2可以包括检测部21和围设在检测部21外围的辅料部22。辅料部22用于定位单元3设置于其上并使得整个柔性产品2定位到平面部11。检测部21上可以设置有晶元。辅料部22和检测部21的具体形状可以根据实际需要进行调整。As shown in Figures 1 to 3, this embodiment also provides a flattening device for flexible products. The flexible product 2 can be arranged on the plane part 11, and the flexible product 2 can include a detection part 21 and be surrounded by the detection part. 21 peripheral auxiliary material portion 22. The auxiliary material part 22 is used for positioning the unit 3 thereon and positioning the entire flexible product 2 to the plane part 11 . Wafers may be disposed on the detection unit 21 . The specific shapes of the auxiliary material part 22 and the detection part 21 can be adjusted according to actual needs.
平整装置包括:Leveling devices include:
承载平台1,承载平台1可以具有平面部11,从而使得承载平台1可以承载物料和其他机构。平面部11可以位于平面部11可以使得柔性产品2在空心部31内的气体压力作用后可以与平面部11保持紧贴,从而使得柔性产品2保持平整。承载平台1除平面部11外的其他部分可以根据实际需要进行调整,从而使得承载平台1可以设置于不同的工况下。承载平台1可以采用刚性材料,从而使得承载平台1可以提供平整的基准面。The carrying platform 1, the carrying platform 1 may have a plane portion 11, so that the carrying platform 1 can carry materials and other mechanisms. The flat part 11 can be located on the flat part 11 so that the flexible product 2 can keep close contact with the flat part 11 after the gas pressure in the hollow part 31 acts, so that the flexible product 2 can be kept flat. Other parts of the carrying platform 1 except the plane portion 11 can be adjusted according to actual needs, so that the carrying platform 1 can be set under different working conditions. The carrying platform 1 can be made of rigid material, so that the carrying platform 1 can provide a flat reference surface.
定位单元3,定位单元3可以设置于辅料部22远离平面部11的一侧,定位单元3可以具有在垂直于平面部11的方向上贯通的空心部31。从而使得定位单元3在与柔性产品2接触后,定位单元3可以与辅料部22接触,而空心部31与检测部21对应,从而防止定位部与检测部21接触而影响检测部21的情况。定位单元3可以贯通开设有自临近空心部31向着远离空心部31的气流通道33,远离空心部31的气流通道33可以包括有气管接头6,从而使得正压气体可以经由气管接头6从气流通道33中进入空心部31。定位单元3可以采用刚性材料,从而使得定位单元3可以紧固辅料部22。The positioning unit 3 , the positioning unit 3 can be arranged on the side of the auxiliary material part 22 away from the plane part 11 , and the positioning unit 3 can have a hollow part 31 penetrating in a direction perpendicular to the plane part 11 . Therefore, after the positioning unit 3 is in contact with the flexible product 2, the positioning unit 3 can contact the auxiliary material part 22, and the hollow part 31 corresponds to the detection part 21, thereby preventing the detection part 21 from being affected by the contact between the positioning part and the detection part 21. The positioning unit 3 can be provided with an airflow channel 33 from the adjacent hollow part 31 to the airflow channel 33 away from the hollow part 31, and the airflow channel 33 away from the hollow part 31 can include a tracheal joint 6, so that the positive pressure gas can pass through the tracheal joint 6 from the airflow channel 33 into the hollow portion 31. The positioning unit 3 can be made of rigid material, so that the positioning unit 3 can fasten the auxiliary material part 22 .
密封部4,密封部4可以设置于空心部31远离承载平台1的一侧并使空心部31密封,使得空心部31内的正压气体可以聚集于空心部31内并使得空心部31内的正压气体密封不漏气。The sealing part 4, the sealing part 4 can be arranged on the side of the hollow part 31 away from the carrying platform 1 and seal the hollow part 31, so that the positive pressure gas in the hollow part 31 can gather in the hollow part 31 and make the air in the hollow part 31 Positive pressure gas seal is airtight.
气源(图中未示出),气源可以与气流通道33连通,以能向气流通道33输入气体并使空心部31达到预设压力,气源能在空心部31处于预设压力时停止向气流通道33输入气体。其中输入的气体可以为正压气体,从而使得空心部31内部更快达到预设压力值。A gas source (not shown in the figure), the gas source can be communicated with the airflow channel 33, so that the gas can be input to the airflow channel 33 and the hollow part 31 can reach a preset pressure, and the gas source can be stopped when the hollow part 31 is at a preset pressure Gas is supplied to the gas flow channel 33 . The gas input therein can be a positive pressure gas, so that the inside of the hollow part 31 reaches the preset pressure value faster.
在本实施例中,气源包括电控柜、电控柜可控制的高压气管和与电控柜电性连接的 电磁阀。电控柜控制高压气管与气管接头6连通并使得与电控柜电性连接的电磁阀处于打开状态,高压气管向气管接头6内注入高压气体并使得高压气体经由气流通道33流入空心部31中,并最终在空心部31内的气体达到预设压力值后切断电磁阀,使得高压气管的气路关闭。在此过程中,在空心部31内的正压气体形成向所有面施压的正压力,并通过正压力将检测部21压向平面部11,从而使得检测部21与平面部11紧贴,进而实现将检测部21平整的效果。In this embodiment, the air source includes an electric control cabinet, a high-pressure gas pipe controllable by the electric control cabinet, and a solenoid valve electrically connected to the electric control cabinet. The electric control cabinet controls the high-pressure air pipe to communicate with the air pipe joint 6 and makes the solenoid valve electrically connected to the electric control cabinet open. The high-pressure air pipe injects high-pressure gas into the air pipe joint 6 and makes the high-pressure gas flow into the hollow part 31 through the air flow channel 33 , and finally cut off the electromagnetic valve after the gas in the hollow part 31 reaches a preset pressure value, so that the gas path of the high-pressure gas pipe is closed. During this process, the positive pressure gas in the hollow part 31 forms a positive pressure that applies pressure to all surfaces, and the detection part 21 is pressed to the plane part 11 by the positive pressure, so that the detection part 21 is in close contact with the plane part 11, Furthermore, the effect of leveling the detection part 21 is achieved.
借由上述结构,通过形成密闭的空心部31,使得其中的正压气体可以向检测部21施加作用力,并使得检测部21平整。在此过程中,可避免对于柔性产品2的直接接触,从而防止压伤或破坏柔性产品2,此外,也可以实现柔性产品2各处均匀受力并使得柔性产品2在平整后的位置固定,提升了对于柔性材料的平整效果。With the above structure, by forming the airtight hollow portion 31 , the positive pressure gas therein can exert force on the detection portion 21 and make the detection portion 21 flat. During this process, direct contact with the flexible product 2 can be avoided, thereby preventing the flexible product 2 from being crushed or damaged. In addition, the flexible product 2 can be evenly stressed everywhere and the flexible product 2 can be fixed in a flat position. Improved leveling for flexible materials.
具体的,密封部4可以为透明的光学玻璃,使得密封部4对于空心部31起到观察窗的作用,便于观察和监视空心部31内的柔性产品2。从而方便操作人员对于空心部31内的工作环境进行直观了解,并进一步判断柔性产品2的平整状态。Specifically, the sealing part 4 may be transparent optical glass, so that the sealing part 4 acts as an observation window for the hollow part 31 , which is convenient for observing and monitoring the flexible product 2 in the hollow part 31 . Therefore, it is convenient for the operator to intuitively understand the working environment in the hollow portion 31 and to further judge the flatness of the flexible product 2 .
具体的,如图1至图3所示,包括固定单元5,固定单元5可以邻接于定位单元3和承载平台1,固定单元5与定位单元3和承载平台1螺纹连接。从而通过固定单元5使得定位单元3与承载平台1之间相互固定。可以实现对于定位单元3和承载平台1的加固效果。固定单元5与定位单元3和承载单元之间可以均为螺纹连接,除了与气管接头6连通的气流通道33与空心部31连通,其余的可以均为与空心部31隔离的螺纹孔34。Specifically, as shown in FIGS. 1 to 3 , a fixing unit 5 is included, and the fixing unit 5 can be adjacent to the positioning unit 3 and the carrying platform 1 , and the fixing unit 5 is screwed to the positioning unit 3 and the carrying platform 1 . Therefore, the positioning unit 3 and the carrying platform 1 are fixed to each other by the fixing unit 5 . A reinforcement effect on the positioning unit 3 and the carrying platform 1 can be achieved. The fixing unit 5, the positioning unit 3 and the carrying unit can all be screwed, except that the airflow channel 33 communicated with the air pipe joint 6 communicates with the hollow part 31, and the rest can be threaded holes 34 isolated from the hollow part 31.
具体的,如图1和图2所示,多个固定单元5可以设置在定位单元3远离空心部31的一端。如图1所示,在本实施例中,定位单元3在垂直于其厚度的截面上的投影形状为矩形环状,在定位单元3的四周分别设置有定位单元3,从而将定位单元3的四周固定,提升整个装置的稳定性。除此之外,也可以避免定位单元3与承载平台1之间直接固定,从而节省了定位单元3,使得定位单元3不必设置超出辅料部22来与承载平台1固定。当然的,在其他可选的实施方式中,当定位单元3在垂直于其厚度的截面上的投影形状为圆环或其他形状时,固定单元5可以围设在其外部来对其进行固定。Specifically, as shown in FIG. 1 and FIG. 2 , a plurality of fixing units 5 may be arranged at an end of the positioning unit 3 away from the hollow portion 31 . As shown in Figure 1, in the present embodiment, the projection shape of the positioning unit 3 on the section perpendicular to its thickness is a rectangular ring, and the positioning units 3 are respectively arranged around the positioning unit 3, so that the positioning unit 3 Fixed all around to improve the stability of the whole device. In addition, direct fixing between the positioning unit 3 and the carrying platform 1 can also be avoided, thereby saving the positioning unit 3 , so that the positioning unit 3 does not need to be fixed to the carrying platform 1 beyond the auxiliary material portion 22 . Of course, in other optional embodiments, when the projection shape of the positioning unit 3 on the section perpendicular to its thickness is a ring or other shapes, the fixing unit 5 can surround it to fix it.
具体的,如图1所示,定位单元3可以具有与平面部11平行的第一平面和第二平面32,密封部4临近平面部11的一侧可以与平面部11平行,使得在使用过程中,第一平面可以与辅料部22抵接,第二平面32可以与密封部4抵接。第一平面与辅料部22之间可以将空心部31临近柔性产品2的部分密封,第二平面32与密封部4之间可以将空心部31临近密封部4的部分密封,从而提升空心部31中正压气体的密封性。Specifically, as shown in FIG. 1, the positioning unit 3 may have a first plane and a second plane 32 parallel to the plane part 11, and the side of the sealing part 4 adjacent to the plane part 11 may be parallel to the plane part 11, so that during use Among them, the first plane can be in contact with the auxiliary material part 22 , and the second plane 32 can be in contact with the sealing part 4 . The part of the hollow part 31 close to the flexible product 2 can be sealed between the first plane and the auxiliary material part 22, and the part of the hollow part 31 close to the sealing part 4 can be sealed between the second plane 32 and the sealing part 4, thereby lifting the hollow part 31 Tightness of medium positive pressure gas.
具体的,密封部4可以与定位单元3固定连接,从而使得密封部4与定位单元3之间具有更强的结合力,可以防止在设备使用过程中位于空心部31内部的正压气体将密封部4顶离定位单元3的情况,从而提升了整个用于柔性产品的平整装置的使用稳定性。Specifically, the sealing part 4 can be fixedly connected with the positioning unit 3, so that there is a stronger bonding force between the sealing part 4 and the positioning unit 3, which can prevent the positive pressure gas inside the hollow part 31 from sealing the device during use. The situation that the part 4 pushes away from the positioning unit 3 improves the use stability of the whole flattening device for flexible products.
具体的,如图1和图2所示,承载平台1可以开设有自其边缘向其内部凹陷的凹槽12,凹槽12可以与气管接头6对应设置,即凹槽12的开设位置可以位于承载平台1与气管接头6对应的位置,凹槽12的尺寸可以略大于气管接头6,从而防止气管接头6和承载平台1之间发生干涉。Specifically, as shown in Fig. 1 and Fig. 2, the supporting platform 1 can be provided with a groove 12 which is recessed from its edge to its interior, and the groove 12 can be set corresponding to the air pipe joint 6, that is, the opening position of the groove 12 can be located at At the position where the carrying platform 1 corresponds to the air pipe joint 6 , the size of the groove 12 may be slightly larger than the air pipe joint 6 , so as to prevent interference between the air pipe joint 6 and the carrying platform 1 .
具体的,承载平台1与定位单元3可以均为铝板,由于铝板具有轻量化和硬度较高的特点,从而使得位于承载平台1和定位单元3中的柔性产品2可以被固定在由平面部11构成的基准面上,提升了对于柔性产品2的固定效果。Specifically, the carrying platform 1 and the positioning unit 3 can both be aluminum plates. Since the aluminum plate has the characteristics of light weight and high hardness, the flexible product 2 located in the carrying platform 1 and the positioning unit 3 can be fixed on the plane part 11 The formed datum surface improves the fixing effect on the flexible product 2 .
本发明中应用了具体实施例对本发明的原理及实施方式进行了阐述,以上实施例的说明只是用于帮助理解本发明的方法及其核心思想;同时,对于本领域的一般技术人员,依据本发明的思想,在具体实施方式及应用范围上均会有改变之处,综上所述,本说明书内容不应理解为对本发明的限制。In the present invention, specific examples have been applied to explain the principles and implementation methods of the present invention, and the descriptions of the above examples are only used to help understand the method of the present invention and its core idea; meanwhile, for those of ordinary skill in the art, according to this The idea of the invention will have changes in the specific implementation and scope of application. To sum up, the contents of this specification should not be construed as limiting the present invention.

Claims (10)

  1. 一种用于柔性产品的平整方法,所述柔性产品包括检测部和围设在所述检测部外围的辅料部,其特征在于,包括以下步骤:A flattening method for a flexible product, the flexible product includes a detection part and an auxiliary material part surrounding the periphery of the detection part, characterized in that it includes the following steps:
    用具有空心部的定位单元将柔性产品固定在承载平台上,所述定位单元压设在辅料部上,所述空心部与所述检测部对应设置;The flexible product is fixed on the carrying platform with a positioning unit having a hollow part, the positioning unit is pressed on the auxiliary material part, and the hollow part is set correspondingly to the detection part;
    将所述空心部远离所述承载平台的一端闭合,以使所述空心部密封;closing the end of the hollow part away from the carrying platform, so that the hollow part is sealed;
    向所述空心部注入正压气体,在所述空心部形成向所有面施压的正压力,从而压平所述检测部。Positive pressure gas is injected into the hollow portion to form a positive pressure on all surfaces of the hollow portion, thereby flattening the detection portion.
  2. 根据权利要求1所述的用于柔性产品的平整方法,其特征在于,所述柔性产品包括PU薄膜和设置在所述PU薄膜检测部上的晶圆,设定所述空心部的压力为0.5MPA-0.7MPA。The flattening method for flexible products according to claim 1, wherein the flexible products include a PU film and a wafer arranged on the PU film detection part, and the pressure of the hollow part is set to 0.5 MPA-0.7MPA.
  3. 一种用于柔性产品的平整装置,所述柔性产品包括检测部和围设在所述检测部外围的辅料部,其特征在于,所述平整装置包括:A flattening device for flexible products, the flexible product includes a detection part and an auxiliary material part surrounding the periphery of the detection part, characterized in that the flattening device includes:
    承载平台,所述承载平台具有用于所述柔性产品设置于其上的平面部;a carrying platform having a planar portion for the flexible product to be disposed thereon;
    定位单元,所述定位单元压设于所述辅料部远离所述平面部的一侧,所述定位单元具有在垂直于所述平面部的方向上贯通的空心部,所述空心部与所述检测部对应设置,所述定位单元贯通开设有自临近所述空心部向着远离所述空心部的气流通道;密封部,所述密封部设置于所述空心部远离所述承载平台的一侧并使所述空心部密封;A positioning unit, the positioning unit is press-set on the side of the auxiliary material part away from the plane part, the positioning unit has a hollow part penetrating in a direction perpendicular to the plane part, and the hollow part is connected to the plane part The detection part is provided correspondingly, and the positioning unit is provided with an air flow channel from the adjacent hollow part to the airflow channel away from the hollow part; the sealing part is arranged on the side of the hollow part away from the carrying platform and sealing the hollow portion;
    气源,所述气源与所述气流通道连通,以能向所述气流通道输入气体从而使空心部达到预设压力,所述气源能在所述空心部处于预设压力时停止向所述气流通道输入气体。A gas source, the gas source is in communication with the air flow passage, so that gas can be input into the air flow passage to make the hollow part reach a preset pressure, and the gas source can stop supplying air to the air flow channel when the hollow part is at a preset pressure. The gas is input into the gas flow channel.
  4. 根据权利要求3所述的用于柔性产品的平整装置,其特征在于,所述密封部为透明的光学玻璃。The flattening device for flexible products according to claim 3, wherein the sealing part is transparent optical glass.
  5. 根据权利要求3所述的用于柔性产品的平整装置,其特征在于,包括固定单元,所述固定单元邻接于所述定位单元和所述承载平台,所述固定单元与所述定位单元和所述承载平台螺纹连接。The flattening device for flexible products according to claim 3, characterized in that it comprises a fixing unit, the fixing unit is adjacent to the positioning unit and the carrying platform, and the fixing unit is connected to the positioning unit and the loading platform. The bearing platform is threadedly connected.
  6. 根据权利要求5所述的用于柔性产品的平整装置,其特征在于,多个所述固定单元设置在所述定位单元的远离所述空心部的一端。The flattening device for flexible products according to claim 5, wherein a plurality of said fixing units are arranged at an end of said positioning unit away from said hollow portion.
  7. 根据权利要求3所述的用于柔性产品的平整装置,其特征在于,所述定位单元具有与所述平面部平行的第一平面和第二平面,所述密封部临近所述平面部的一侧与所述 平面部平行,所述第一平面与所述辅料部抵接,所述第二平面与所述密封部抵接。The flattening device for flexible products according to claim 3, wherein the positioning unit has a first plane and a second plane parallel to the plane part, and the sealing part is adjacent to one of the plane parts. The side is parallel to the plane part, the first plane is in contact with the auxiliary material part, and the second plane is in contact with the sealing part.
  8. 根据权利要求3所述的用于柔性产品的平整装置,其特征在于,所述密封部与所述定位单元固定连接。The flattening device for flexible products according to claim 3, wherein the sealing part is fixedly connected with the positioning unit.
  9. 根据权利要求3所述的用于柔性产品的平整装置,其特征在于,所述承载平台开设有自其边缘向其内部凹陷的凹槽,所述凹槽与所述气管接头对应设置。The flattening device for flexible products according to claim 3, characterized in that, the carrying platform is provided with a groove which is recessed from its edge to the inside thereof, and the groove is arranged corresponding to the air pipe joint.
  10. 根据权利要求3所述的用于柔性产品的平整装置,其特征在于,所述承载平台与所述定位单元均为铝板。The flattening device for flexible products according to claim 3, characterized in that, both the carrying platform and the positioning unit are aluminum plates.
PCT/CN2021/111417 2021-07-30 2021-08-09 Leveling method and apparatus for flexible product WO2023004879A1 (en)

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EP0477453A1 (en) * 1989-04-07 1992-04-01 Office National d'Etudes et de Recherches Aérospatiales (O.N.E.R.A.) Test station, especially for semiconductor wafers
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