WO2022270086A1 - ノズルヘッド、ノズルヘッドの製造方法および液滴吐出装置 - Google Patents
ノズルヘッド、ノズルヘッドの製造方法および液滴吐出装置 Download PDFInfo
- Publication number
- WO2022270086A1 WO2022270086A1 PCT/JP2022/013972 JP2022013972W WO2022270086A1 WO 2022270086 A1 WO2022270086 A1 WO 2022270086A1 JP 2022013972 W JP2022013972 W JP 2022013972W WO 2022270086 A1 WO2022270086 A1 WO 2022270086A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- nozzle
- pseudo
- nozzles
- droplet ejection
- nozzle head
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 18
- 238000007599 discharging Methods 0.000 title abstract 6
- 239000011159 matrix material Substances 0.000 claims description 19
- 239000007788 liquid Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 11
- 230000000052 comparative effect Effects 0.000 description 10
- 230000005684 electric field Effects 0.000 description 10
- 239000000463 material Substances 0.000 description 8
- 238000012545 processing Methods 0.000 description 6
- 239000000945 filler Substances 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 239000007769 metal material Substances 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- 238000005266 casting Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 238000000879 optical micrograph Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000003054 catalyst Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000635 electron micrograph Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000007641 inkjet printing Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000002608 ionic liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000012454 non-polar solvent Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14314—Structure of ink jet print heads with electrostatically actuated membrane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/1433—Structure of nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1625—Manufacturing processes electroforming
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14475—Structure thereof only for on-demand ink jet heads characterised by nozzle shapes or number of orifices per chamber
Definitions
- the present invention relates to a nozzle head, a method for manufacturing the nozzle head, and a droplet ejection device.
- inkjet printing technology has been applied to industrial processes.
- the manufacturing process of color filters for liquid crystal displays is one example.
- piezo-type heads which eject droplets by mechanical pressure or vibration, have been widely used in the past.
- Japanese Unexamined Patent Application Publication No. 2002-100003 discloses an electrostatic discharge type inkjet recording apparatus.
- the liquid includes a plate portion having through holes, and a plurality of droplet ejection nozzles provided corresponding to the through holes of the plate portion and ejecting droplets by an electrostatic ejection method.
- a nozzle head is provided that includes a droplet ejection nozzle section, and a pseudo nozzle section that is provided in the plate section around the droplet ejection nozzle section and includes a plurality of pseudo nozzles with closed tip ends. .
- the plurality of droplet ejection nozzles may be arranged side by side in the first direction, and the pseudo nozzle sections may be provided on both sides of the droplet ejection nozzle section in the first direction.
- the plurality of pseudo nozzles may be provided over the entire range of 1 mm or more and 5 mm or less in the first direction from the outermost pseudo nozzle.
- the pseudo nozzle section may include five or more pseudo nozzles on both sides of the liquid droplet ejection nozzle section in the first direction.
- the first distance between adjacent droplet ejection nozzles may be the same as the second distance between adjacent pseudo nozzles.
- the plurality of droplet ejection nozzles are arranged in a first direction and a second direction in a direction intersecting the first direction, and the pseudo nozzle section surrounds the droplet ejection nozzle section.
- the pseudo nozzles are arranged on both sides in the first direction and on both sides in the second direction so as to correspond to each of the droplet ejection nozzles provided on the outer side among the plurality of droplet ejection nozzles. and the number of the pseudo nozzles per row provided on one side in the first direction and one side in the second direction may be 2 or more and 30 or less.
- the pseudo nozzle may have a frame shape.
- a first height from the plate portion to the tips of the pseudo nozzles may be lower than a second height from the plate portion to the tips of the droplet ejection nozzles.
- a droplet ejection device including the above nozzle head.
- a first recess group having a first surface and a second surface opposite to the first surface, and having a plurality of first recesses on the first surface side; preparing a master mold including a second recess group provided around the first recess group and having a plurality of second recesses, forming a plurality of first structures each having an open tip end in each of the first recesses; forming a plurality of second structures with closed distal ends in the second recesses, forming planar third structures in the first surface, and forming the plurality of first structures and the plurality of second structures forming a resist mask to shield the structures; forming a fourth structure over the third structure; removing the resist mask; By releasing the structure and the fourth structure from the master mold, a liquid droplet ejection nozzle is formed from the first structure, a pseudo nozzle is formed from the second structure, and the third structure is formed. and forming a plate portion from the fourth structure.
- an insulating layer may be exposed at the bottom of the first recess.
- the plurality of droplet ejection nozzles may be arranged side by side in a first direction, and the plurality of pseudo nozzles may be formed on both sides of the droplet ejection nozzles in the first direction.
- the plurality of pseudo nozzles may be formed over the entire range of 1 mm or more and 5 mm or less in the first direction from the outermost pseudo nozzle.
- five or more pseudo nozzles may be formed on both sides of the droplet ejection nozzle.
- the first distance between adjacent droplet ejection nozzles may be the same as the second distance between adjacent pseudo nozzles.
- the plurality of droplet ejection nozzles are arranged in a first direction and a second direction in a direction intersecting the first direction, and the pseudo nozzles surround the droplet ejection nozzles. may be formed.
- the pseudo nozzles are arranged on both sides in the first direction and on both sides in the second direction so as to correspond to each of the droplet ejection nozzles formed on the outside of the plurality of droplet ejection nozzles. and the number of the pseudo nozzles per row formed on one side in the first direction and one side in the second direction may be 2 or more and 30 or less.
- the pseudo nozzles may be formed to have a frame shape.
- FIG. 1 is a schematic diagram of a droplet ejection device according to an embodiment of the present invention
- FIG. 1A and 1B are a plan view and a cross-sectional view of a nozzle head according to an embodiment of the present invention
- FIG. It is an enlarged view of a plan view of a nozzle head according to one embodiment of the present invention.
- 1 is a perspective view of a droplet discharge nozzle according to one embodiment of the present invention
- FIG. 1A and 1B are a top view and a cross-sectional view of a droplet discharge nozzle according to an embodiment of the present invention
- FIG. 1 is a perspective view of a pseudo-nozzle according to one embodiment of the present invention
- FIG. 1A and 1B are a top view and a cross-sectional view of a pseudo nozzle according to an embodiment of the present invention
- FIG. It is a manufacturing flow figure of a nozzle head concerning one embodiment of the present invention. It is a manufacturing flow figure of a nozzle head concerning one embodiment of the present invention.
- 1A and 1B are a plan view and a cross-sectional view of a nozzle head according to an embodiment of the present invention
- FIG. 1A and 1B are a plan view and a cross-sectional view of a nozzle head according to an embodiment of the present invention
- FIG. 1A and 1B are a top view and a cross-sectional view of a pseudo nozzle according to an embodiment of the present invention
- FIG. 1A and 1B are a top view and a cross-sectional view of a pseudo nozzle according to an embodiment of the present invention
- FIG. 4 is an electron micrograph of droplet ejection nozzles in a nozzle head manufactured using an embodiment of the present invention.
- 4 is an optical micrograph of droplets ejected using the nozzle head of Example 1.
- FIG. 4 is a graph showing the size of droplets ejected using the nozzle head of Example 1.
- FIG. 4 is an optical micrograph of droplets ejected using a nozzle head of a comparative example.
- 7 is a graph showing the size of droplets ejected using a nozzle head of a comparative example;
- the terms “above” and “below” refer only to cases where the component is located directly above or below a certain component. However, unless otherwise specified, it includes the case where other components are interposed between them.
- FIG. 1 is a schematic diagram of a droplet ejection device 100 according to one embodiment of the present invention.
- the droplet ejection device 100 includes a control section 110 , a storage section 115 , a power supply section 120 , a driving section 130 , a droplet ejection section 140 and an object holding section 160 .
- the control unit 110 includes a CPU (Central Processing Unit), ASIC (Application Specific Integrated Circuit), FPGA (Field Programmable Gate Array), or other arithmetic processing circuit.
- the control unit 110 controls the ejection process of the droplet ejection unit 140 using a preset droplet ejection program.
- the storage unit 115 functions as a database that stores droplet ejection programs and various information used in the droplet ejection programs.
- a memory, an SSD, or an element capable of storing information is used for the storage unit 115 .
- the power supply unit 120 is connected to the control unit 110, the driving unit 130, and the droplet ejection unit 140.
- the power supply unit 120 applies voltage to the droplet ejection unit 140 based on a signal input from the control unit 110 .
- the power supply section 120 applies a pulsed voltage (1000 V in this example) to the droplet ejection section 140 .
- the voltage is not limited to the pulse voltage, and a constant voltage may be applied all the time.
- the voltage applied from the power supply unit 120 to the nozzle head 150 causes the liquid held in the ink tank 145 to flow from the tips 153a (see FIG. 2B) of the droplet ejection nozzles 153 (described later) of the nozzle head 150.
- the droplets are ejected in the direction of the object 200 (the third direction D3).
- the driving unit 130 is composed of driving members such as motors, belts and gears. Based on an instruction from the control unit 110, the driving unit 130 moves the droplet ejection unit 140 (more specifically, the nozzle head 150 described later) relative to the object holding unit 160 in one direction (in this example Then, it is moved in the second direction D2). Note that the driving unit 130 may move the object while fixing the droplet ejection unit 140 . Also, the drive unit 130 may be used in combination with a goniometer stage to finely adjust the position of the nozzle head 150 .
- the droplet ejection section 140 includes an ink tank 145 and a nozzle head 150 .
- a nozzle head 150 For the nozzle head 150, an electrostatic discharge type inkjet nozzle is used. Details of the nozzle head 150 will be described later.
- the nozzle head 150 is used by being fixed to a mount and attachment (not shown).
- the mount and attachment may have grooves (long holes) for temporarily storing ink supplied from the ink tank 145 in portions corresponding to the droplet ejection nozzles 153 .
- the object holding unit 160 has a function of holding the object 200 .
- a stage is used for the object holding unit 160 in this example.
- a mechanism for holding the object 200 by the object holding unit 160 is not particularly limited, and a general holding mechanism is used.
- the object 200 is vacuum-adsorbed to the object holder 160 .
- the object holding unit 160 may hold the object 200 using a fixture, without being limited to this.
- FIG. 2A is a plan view of the nozzle head 150.
- FIG. 2B is a cross-sectional view of the nozzle head 150 between C1 and C2.
- FIG. 3 is an enlarged plan view of the nozzle head 150.
- FIG. FIG. 4 is a perspective view of the droplet ejection nozzle 153.
- FIG. 5A is a top view of the droplet discharge nozzle 153.
- FIG. 5B is a cross-sectional view of the droplet discharge nozzle 153 along A1-A2.
- FIG. 6 is a perspective view of the pseudo nozzle 155.
- FIG. 7A is a top view of the pseudo nozzle 155.
- FIG. FIG. 7B is a cross-sectional view of the pseudo nozzle 155 along B1-B2.
- the nozzle head 150 includes a plate portion 151, a droplet discharge nozzle portion 152, and a pseudo nozzle portion 154.
- the plate portion 151 is provided in a plate shape.
- the plate portion 151 extends in the first direction D1.
- a metal material such as stainless steel is used for the plate portion 151 .
- the thickness of the plate portion 151 is appropriately set. In this example, the thickness of the plate portion is 10 ⁇ m or more and 100 ⁇ m or less.
- the droplet discharge nozzle section 152 is provided on one side of the plate section 151 .
- the droplet ejection nozzle section 152 includes a plurality of droplet ejection nozzles 153 .
- the droplet ejection nozzles 153 are arranged side by side in the first direction D1.
- , 153-(N ⁇ 1), 153-N are provided in the plate portion 151 in this embodiment.
- a metal material such as nickel is used for the droplet discharge nozzle 153 .
- the droplet ejection nozzle 153 has a tapered shape.
- the plate portion 151 has a portion (overlapping portion) corresponding to the droplet ejection nozzle 153, which is larger than the inner diameter r153a of the ejection port of the droplet ejection nozzle 153 (opening portion 153ao of the tip portion 153a of the droplet ejection nozzle 153). It has a through hole 151o with an inner diameter r151o.
- the inner diameter of the through hole of the plate portion 151 may be 1 ⁇ m or more and 100 ⁇ m or less.
- the inner diameter of the tip portion 153a of the droplet ejection nozzle 153 may be several hundred nm or more and 50 ⁇ m or less, preferably 1 ⁇ m or more and 30 ⁇ m or less, more preferably 5 ⁇ m or more and 20 ⁇ m or less.
- a voltage may be applied to the droplet discharge nozzle 153, a voltage may be applied to the plate portion 151 (or the ink tank 145), or a voltage may be applied to the ink.
- electrodes may be provided. Electrodes may be provided with tungsten, nickel, molybdenum, titanium, gold, silver, copper, platinum and the like.
- a plurality of electrodes may be provided so that the voltage is uniformly applied to the entire plate portion 151 .
- a jig for example, a mount or attachment
- the pseudo nozzle section 154 is provided on the same surface of the plate section 151 as the liquid droplet ejection nozzle section 152 .
- the pseudo-nozzle section 154 includes a plurality of pseudo-nozzles 155 .
- the pseudo nozzle section 154 is provided around the liquid droplet ejection nozzle section 152 .
- the pseudo nozzle sections 154 are provided on both sides of the liquid droplet ejection nozzle section 152 in the first direction D1.
- the plurality of pseudo nozzles 155 may be arranged in a predetermined area from the outermost pseudo nozzle 155 (the pseudo nozzle 155-1).
- the plurality of pseudo nozzles 155 may be provided over the entire range of 1 mm or more and 5 mm or less (preferably 2 mm) from the outermost pseudo nozzle 155 in the first direction D1. good.
- the number of pseudo nozzles 155 provided on one side of the droplet ejection nozzle section 152 in the first direction D1 may be 1 ⁇ 5 or more of the number of droplet ejection nozzles 153 .
- the number of pseudo nozzles 155 provided on one side of the droplet discharge nozzle section 152 in the first direction D1 may be 5 or more and 50 or less, preferably 10 or more and 30 or less.
- a left pseudo nozzle 155L including five pseudo nozzles 155 is provided on the left side of the droplet ejection nozzle section 152 including 21 droplet ejection nozzles 153. be done.
- a right pseudo nozzle 155R including five pseudo nozzles 155 is provided on the right side of the droplet discharge nozzle section 152.
- distance D1 between adjacent droplet ejection nozzles (distance between droplet ejection nozzle 153-1 and droplet ejection nozzle 153-2), adjacent droplet ejection nozzle 153 and pseudo nozzle 155 (the distance between the droplet ejection nozzle 153-1 and the pseudo nozzle 155-L5), and the distance between the adjacent pseudo nozzles 155 (the pseudo nozzle 155-L4 and the pseudo nozzle 155-L5). ) D3 are the same. In this example, the distances D1, D2, D3 between each nozzle are 200 ⁇ m.
- the tip 155a of the pseudo nozzle 155 does not have an opening and is closed. Therefore, the pseudo nozzle 155 does not eject droplets.
- a material similar to that of the droplet discharge nozzle 153 is used for the pseudo nozzle 155 .
- the pseudo nozzles 155 may have the same shape as the droplet ejection nozzles 153 .
- the height H155 of the pseudo nozzle 155 also referred to as the first height. Specifically, the height from the upper surface 151a of the plate portion 151 to the tip portion 155a of the pseudo nozzle 155) It may be the same as the height H153 (also referred to as the second height. Specifically, the height from the upper surface 151a of the plate portion 151 to the tip portion 153a of the droplet discharge nozzle 153).
- the electric field may become larger in the peripheral region of the plate than in the center of the plate.
- a pseudo nozzle section 154 is arranged around the liquid droplet ejection nozzle section 152 .
- a plurality of pseudo nozzles 155 are arranged in regions where the electric field is large. Since the tips of the plurality of pseudo nozzles 155 are closed, droplets are not ejected.
- the electric field in the area where the droplet ejection nozzles 153 are arranged becomes uniform. As a result, the sizes of droplets ejected from the respective droplet ejection nozzles 153 can be made uniform.
- a master mold 2000 for forming droplet ejection nozzles 153 and pseudo nozzles 155 is prepared.
- the concave matrix 2000 has a first surface 2000A and a second surface 2000B opposite the first surface 2000A.
- Matrix 2000 includes a first matrix 2001 and a second matrix 2005 .
- a first concave portion group 2006 having a plurality of first concave portions 2007 for forming droplet ejection nozzles, and pseudo nozzles provided around the first concave portion group 2006 are formed.
- a second recess group 2008 is provided having a plurality of second recesses 2009 for.
- the matrix 2000 is formed by performing film formation processing, photolithography processing, and etching processing. Specifically, a plate-shaped first mother die 2001 is prepared.
- the first matrix 2001 may be a metal substrate, or may be an insulating substrate or a semiconductor substrate with a conductive film formed on the upper surface thereof.
- an insulating layer 2003 is formed on a portion of the upper surface of the first master mold 2001 where the droplet discharge nozzles 153 are formed.
- a second matrix 2005 made of a metal material is formed on the first matrix 2001 .
- the second matrix 2005 may be formed by forming a metal layer and then processing it by photolithography, etching, or the like.
- the insulating layer 2003 is exposed at the bottom of the first recess 2007 .
- the first matrix 2001 is exposed at the bottom of the second recess 2009 .
- the present invention is not limited to this.
- the insulating layer 2003 may be formed over the entire top surface of the first matrix 2001 .
- a conductive layer or a catalyst layer may be formed on the exposed portion of the insulating layer 2003 in the region where the pseudo nozzle 155 is formed.
- the second matrix 2005 may be joined to the first matrix 2001 .
- a plurality of structures 1531 are formed in the first recess 2007 by electrocasting (plating), and a plurality of structures 1531 are formed in the second recess 2009.
- a structure 1551 (also referred to as a second structure) is formed, and a planar structure 1511 (also referred to as a third structure) is formed on the first surface 2000A.
- Structures 1531, 1551, and 1511 are formed at the same timing.
- a structure 1551 is formed around the structure 1531 . In this example, a group of structures 1531 are formed on both sides.
- the insulating layer 2003 is exposed at the bottom 2007B of the first recess 2007, as shown in FIG. 8(B). Therefore, due to the presence of the insulating layer 2003, the front end of the structure 1531 is not electrocast. Therefore, the tip portion 1531a of the structure 1531 is opened. As a result, a droplet discharge nozzle 153 having an opening 153ao at the tip 153a is formed.
- the tip of the structure 1551 is closed. Therefore, a pseudo nozzle 155 is formed.
- a portion corresponding to the tip portion 153a of the droplet discharge nozzle 153 (specifically, the tip portion 1531a) and a portion corresponding to the tip portion 155a of the pseudo nozzle 155 (specifically, Then, a resist mask 2011 is formed on the tip portion 1551a).
- a structure 1513 is formed by electrolytic casting on the exposed portion of the structure 1511 . After the structure 1513 is formed, the resist mask 2011 is removed (FIG. 9B).
- the structures 1511, 1513, 1531 and 1551 are removed from the matrix 2000 (released). Thereby, the plate portion 151 is formed from the structures 1511 and 1513 .
- a droplet discharge nozzle 153 is formed from the structure 1531 .
- a pseudo nozzle 155 is formed from the structure 1551 . As described above, the nozzle head 150 can be manufactured.
- the electric field tends to be non-uniform in the end regions of the master mold 2000 .
- the end regions of the matrix 2000 are regions in which pseudo nozzles are formed. Therefore, the electric field in the area where the droplet ejection nozzles 153 are formed becomes uniform. Thereby, the shape of the droplet discharge nozzle 153 and the shape of the opening of the tip portion 153a can be made uniform.
- the shapes of the plurality of droplet ejection nozzles become uniform. Therefore, it is possible to improve the discharge uniformity by the plurality of droplet discharge nozzles.
- a nozzle head 150A different from that in the first embodiment will be described. Specifically, an example in which the pseudo nozzle section is provided so as to surround the liquid droplet ejection nozzle will be described. For the sake of explanation, members will be omitted as appropriate.
- FIG. 10A is a plan view of the nozzle head 150A.
- FIG. 10B is a cross-sectional view of the nozzle head 150A along C1-C2.
- the nozzle head 150A includes a plate portion 151, a droplet ejection nozzle portion 152A, and a pseudo nozzle portion 154A.
- the droplet discharge nozzle portion 152A is provided on one surface of the plate portion 151.
- the droplet ejection nozzle section 152A includes a plurality of droplet ejection nozzles 153A.
- the droplet ejection nozzles 153A are arranged side by side in a first direction D1 and a second direction D2 that intersects (perpendicularly in this example) the first direction D1.
- the pseudo nozzle section 154A is provided on the same surface of the plate section 151 as the droplet ejection nozzle section 152A.
- the pseudo-nozzle section 154A includes a plurality of pseudo-nozzles 155A.
- the pseudo nozzle section 154A is provided around the liquid droplet ejection nozzle section 152A.
- the pseudo nozzle section 154A is provided so as to surround the droplet ejection nozzle section 152A.
- the number of pseudo nozzles provided in each row on both sides (left and right sides) in the first direction D1 and on both sides (upper and lower sides) in the second direction D2 may be 2 or more and 30 or less.
- pseudo nozzles 155A are provided on both left and right sides of the droplet discharge nozzle section 152A.
- two rows of pseudo nozzles 155A are provided on both upper and lower sides of the droplet ejection nozzle section 152A.
- 20 rows (columns) of pseudo nozzles 155A are provided on each of the top, bottom, left, and right sides. good too.
- the plurality of pseudo nozzles 155A may have an interval (pitch) of 10 ⁇ m between the outermost pseudo nozzle 155 (the pseudo nozzle 155-1) and the adjacent pseudo nozzle 155A.
- the shapes of the plurality of droplet ejection nozzles become uniform. Therefore, it is possible to improve the discharge uniformity by the plurality of droplet discharge nozzles.
- a nozzle head different from those in the first and second embodiments will be described. Specifically, an example in which pseudo nozzles are provided in a frame shape will be described. It should be noted that portions overlapping those of the first embodiment and the second embodiment will be appropriately omitted from the description.
- FIG. 11A is a plan view of the nozzle head 150B.
- FIG. 11B is a schematic cross-sectional view between C1 and C2 of the nozzle head 150B.
- the nozzle head 150B includes a plate portion 151, a droplet ejection nozzle portion 152B, and a pseudo nozzle portion 154B.
- the droplet discharge nozzle portion 152B is provided on one surface of the plate portion 151.
- the droplet ejection nozzle section 152B includes a plurality of droplet ejection nozzles 153B.
- the droplet discharge nozzles 153B are arranged side by side in a first direction D1 and a second direction D2 intersecting the first direction D1.
- the pseudo nozzle section 154B is provided on the same surface of the plate section 151 as the droplet discharge nozzle section 152B.
- the pseudo nozzle section 154B includes a plurality of pseudo nozzles 155B.
- the pseudo nozzle section 154B is provided around the liquid droplet ejection nozzle section 152B.
- the pseudo nozzle section 154B is provided so as to surround the droplet ejection nozzle section 152B.
- four pseudo-nozzles 155B having a frame shape surrounding the droplet ejection nozzle section 152B are provided.
- the pseudo nozzle 155B may have a rectangular shape as shown in FIG. 11B, or may have a shape that tapers toward the tip.
- the shapes of the plurality of droplet ejection nozzles become uniform. Therefore, it is possible to improve the discharge uniformity by the plurality of droplet discharge nozzles.
- the height H155 of the pseudo nozzle 155 is the same as the height H153 of the liquid droplet ejection nozzle 153 in the first embodiment of the present invention, the present invention is not limited to this.
- a nozzle head different from that of the first embodiment will be described.
- an example in which the height of the droplet discharge nozzle and the height of the dummy nozzle are different will be described. It should be noted that portions overlapping those of the first embodiment and the second embodiment will be appropriately omitted from the description.
- FIG. 12(A) is a top view of the pseudo nozzle 155C.
- FIG. 12B is a cross-sectional view along B1-B2 in the pseudo nozzle 155C.
- the height H155C of the pseudo nozzle 155C may be lower than the height H153 of the droplet ejection nozzle 153.
- the droplet ejection nozzle 153 does not interfere with ejection of droplets. Therefore, by using one embodiment of the present invention, droplets can be stably ejected.
- a nozzle head different from that of the first embodiment will be described. Specifically, an example in which a dummy nozzle is filled with a filler will be described. It should be noted that portions overlapping those of the first embodiment and the second embodiment will be appropriately omitted from the description.
- FIG. 13(A) is a top view of the pseudo nozzle 155D.
- FIG. 13B is a cross-sectional view along B1-B2 in the pseudo nozzle 155D.
- Pseudo nozzle 155D may be filled with filler 157 .
- the filler 157 may be provided only at the tip of the pseudo nozzle 155 or may be filled up to the plate portion 151 .
- the pseudo nozzle 155D may be filled with a material different from the ink material.
- the pseudo nozzle 155 is filled with a resin material.
- the filler 157 may be made of a glass material or a ceramic material in addition to the resin material. Also, depending on the filling material, the electric field formed may change.
- the filler 157 may be a liquid that does not exert an ejection force due to an electric field, such as a non-polar solvent, silicone, a hydrocarbon solvent, or an ionic liquid.
- Nozzle head of Example 1 The configuration of the nozzle head of Example 1 is as follows. Droplet ejection nozzles: 21 x 1 row Pseudo-nozzles: 5 on both sides of the droplet ejection nozzle The nozzle head of Example 1 was formed by electrocasting and adhered to a mount.
- FIG. 14 is an electron micrograph of the droplet discharge nozzle. As shown in FIG. 14, droplet ejection nozzles are arranged in a row. The configuration of the droplet discharge nozzle is as follows. Distance between adjacent droplet ejection nozzles: 200 ⁇ m Height of droplet discharge nozzle: 50 ⁇ m Inner diameter of tip of droplet ejection nozzle: 20 ⁇ m Inclination from bottom to tip of droplet discharge nozzle: 20°
- Nozzle head of comparative example The configuration of the nozzle head in the comparative example is as follows. Droplet ejection nozzles: 100 x 1 row Pseudo-nozzles: none The nozzle head of the comparative example was formed by electrocasting.
- Droplet Ejection Result> 15 is an optical microscope photograph of droplets ejected using the nozzle head of Example 1.
- FIG. 16 is a graph showing the size (diameter) of droplets ejected using the nozzle head of Example 1.
- FIG. 17 is an optical micrograph of droplets ejected using the nozzle head of the comparative example.
- FIG. 18 is a graph showing the size (diameter) of droplets ejected using the nozzle head of the comparative example.
- the droplets ejected from the first droplet ejection nozzle are different from the droplets ejected from the fifth droplet ejection nozzle. 43% larger than Also, the droplet ejected from the 100th droplet ejection nozzle is 39% larger than the droplet ejected from the 96th droplet ejection nozzle.
- droplets ejected from the first droplet ejection nozzle are ejected from the fourth droplet ejection nozzle. 13% larger than normal droplets. Also, the droplet ejected from the 21st droplet ejection nozzle is 7% larger than the droplet ejected from the 17th droplet ejection nozzle.
- Example 1 by using the nozzle head of Example 1 according to one embodiment of the present invention, the sizes of discharged droplets can be made uniform compared to the nozzle head of the comparative example.
- the pseudo nozzle 155 has the same shape as the droplet discharge nozzle 153 in the first embodiment of the present invention, the present invention is not limited to this.
- the pseudo nozzles 155 may have a shape different from that of the droplet ejection nozzles 153 .
- it may have a rectangular shape, a conical shape, or a semi-circular shape.
- the pseudo nozzle 155 may have a shape that protrudes from the plate portion 151 .
- the distance D1 between adjacent droplet ejection nozzles, the distance D2 between adjacent droplet ejection nozzles 153 and pseudo nozzles 155, and the distance D3 between adjacent pseudo nozzles 155 are Although each example is the same, the invention is not limited to this.
- the distance D1 between adjacent droplet ejection nozzles, the distance D2 between adjacent droplet ejection nozzles 153 and pseudo nozzles 155, and the distance D3 between adjacent pseudo nozzles 155 may be different.
- the distance D3 between adjacent pseudo nozzles 155 may be smaller than the distance D1 between adjacent droplet ejection nozzles and the distance D2 between adjacent droplet ejection nozzles 153 and pseudo nozzles 155 . This can improve the uniformity of the electric field.
- DESCRIPTION OF SYMBOLS 100... Droplet discharge apparatus, 110... Control part, 115... Storage part, 120... Power supply part, 130... Drive part, 140... Droplet discharge part, 145... Ink tank 150 Nozzle head 151 Plate portion 151a Upper surface 151o Through hole 152 Droplet ejection nozzle portion 153 Droplet ejection nozzle 153a ... tip part, 153ao... aperture part, 154... pseudo-nozzle part, 155... pseudo-nozzle part, 155a... tip part, 157... filling material, 160... object holding Part 200 Object 1511 Structure 1531 Structure 1531a Tip 1533 Structure 1551 Structure 2000 Matrix , 2001... First matrix, 2003... Insulating layer, 2005... Second matrix, 2006... First concave part group, 2007... First concave part, 2008... Second concave part Group, 2009... Second concave portion, 2011... Resist mask
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Coating Apparatus (AREA)
Abstract
Description
(1-1.液滴吐出装置100の構成)
図1は、本発明の一実施形態に係る液滴吐出装置100の概略図である。
以下に、ノズルヘッド150の構成について詳細に説明する。図2(A)は、ノズルヘッド150の平面図である。図2(B)は、ノズルヘッド150のC1-C2間の断面図である。図3は、ノズルヘッド150の平面図の拡大図である。図4は、液滴吐出ノズル153の斜視図である。図5(A)は、液滴吐出ノズル153の上面図である。図5(B)は、液滴吐出ノズル153におけるA1-A2間の断面図である。図6は、擬似ノズル155の斜視図である。図7(A)は、擬似ノズル155の上面図である。図7(B)は、擬似ノズル155におけるB1-B2間の断面図である。
ノズルヘッド150の製造方法について図面を用いて説明する。図8(A)~(D),図9(A)~(C)は、ノズルヘッドの製造フローを示す断面図である。
本実施形態では、第1実施形態とは異なるノズルヘッド150Aについて説明する。具体的には、擬似ノズル部が液滴吐出ノズルを囲むように設けられている例について説明する。なお、説明の関係上、適宜部材を省略して説明する。
図10(A)は、ノズルヘッド150Aの平面図である。図10(B)は、ノズルヘッド150AのC1-C2間の断面図である。図10(A)および図10(B)に示すように、ノズルヘッド150Aは、プレート部151、液滴吐出ノズル部152A、および擬似ノズル部154Aを含む。
本実施形態では、第1実施形態および第2実施形態とは異なるノズルヘッドについて説明する。具体的には、擬似ノズルが枠状に設けられている例について説明する。なお、第1実施形態および第2実施形態と重複する部分については、適宜省略して説明する。
図11(A)は、ノズルヘッド150Bの平面図である。図11(B)は、ノズルヘッド150BのC1-C2間の概略断面図である。図11(A)および図11(B)に示すように、ノズルヘッド150Bは、プレート部151、液滴吐出ノズル部152B、および擬似ノズル部154Bを含む。
本発明の第1実施形態では、擬似ノズル155の高さH155は、液滴吐出ノズル153の高さH153と同じ例である例が示されたが、本発明はこれに限定されない。本実施形態では、第1実施形態とは異なるノズルヘッドについて説明する。具体的には、液滴吐出ノズルの高さと、擬似ノズルの高さと異なる例について説明する。なお、第1実施形態および第2実施形態と重複する部分については、適宜省略して説明する。
本実施形態では、第1実施形態とは異なるノズルヘッドについて説明する。具体的には、擬似ノズルに充填物が充填される例について説明する。なお、第1実施形態および第2実施形態と重複する部分については、適宜省略して説明する。
以下に、本発明の一実施形態を用いて擬似ノズルを有するノズルヘッドと、比較例として擬似ノズルを設けないノズルヘッドについて説明する。
実施例1のノズルヘッドの構成は以下のとおりである。
液滴吐出ノズル:21個×1列
擬似ノズル:液滴吐出ノズルの両側に5個
実施例1のノズルヘッドは、電解鋳造法により形成され、マウントに接着された。
隣接する液滴吐出ノズル間の距離:200μm
液滴吐出ノズルの高さ:50μm
液滴吐出ノズルの先端部の内径:20μm
液滴吐出ノズルの底部から先端部への傾き:20°
比較例におけるノズルヘッドの構成は以下のとおりである。
液滴吐出ノズル:100個×1列
擬似ノズル:なし
比較例のノズルヘッドは、電解鋳造法により形成された。
図15は、実施例1のノズルヘッドを用いて吐出された液滴の光学顕微鏡写真である。図16は、実施例1のノズルヘッドを用いて吐出された液滴の大きさ(直径)を示すグラフである。図17は、比較例のノズルヘッドを用いて吐出された液滴の光学顕微鏡写真である。図18は、比較例のノズルヘッドを用いて吐出された液滴の大きさ(直径)を示すグラフである。
本発明の思想の範疇において、当業者であれば、各種の変更例および修正例に想到し得るものであり、それら変更例および修正例についても本発明の範囲に属するものと了解される。例えば、前述の各実施形態に対して、当業者が適宜、構成要素の追加、削除、各実施形態の組み合わせ若しくは設計変更を行ったもの、又は、処理の追加、省略若しくは条件変更を行ったものも、本発明の要旨を備えている限り、本発明の範囲に含まれる。
Claims (19)
- 貫通孔を有するプレート部と、
前記プレート部の貫通孔に対応して設けられ、静電吐出方式で液滴を吐出する複数の液滴吐出ノズルを含む液滴吐出ノズル部と、
前記プレート部のうち前記液滴吐出ノズル部の周辺に設けられ、先端部が閉塞されている複数の擬似ノズルを含む擬似ノズル部と、を含む、
ノズルヘッド。 - 前記複数の液滴吐出ノズルは、第1方向に並んで設けられ、
前記擬似ノズル部は、前記液滴吐出ノズル部のうち前記第1方向における両側に設けられる、
請求項1に記載のノズルヘッド。 - 前記複数の擬似ノズルは最も外側に配置された擬似ノズルから前記第1方向に向かって1mm以上5mm以下の範囲の全体にわたって設けられる、
請求項2に記載のノズルヘッド。 - 前記擬似ノズル部は、前記液滴吐出ノズル部の前記第1方向における両側に5個以上の擬似ノズルを含む、
請求項2に記載のノズルヘッド。 - 隣接する前記液滴吐出ノズルの間の第1距離は、隣接する前記擬似ノズルの間の第2距離と同じである、
請求項1乃至4のいずれか一項に記載のノズルヘッド。 - 前記複数の液滴吐出ノズルは、第1方向および前記第1方向に交差する方向に第2方向に並んで設けられ、
前記擬似ノズル部は、前記液滴吐出ノズル部を囲むように設けられる、
請求項1に記載のノズルヘッド。 - 前記擬似ノズルは、前記複数の液滴吐出ノズルのうち外側に設けられた液滴吐出ノズルの各々に対応するように前記第1方向における両側および前記第2方向における両側に並んで設けられ、
前記第1方向における片側および前記第2方向における片側に設けられる一列ごとの前記擬似ノズルの数は、2個以上30個以下である、
請求項6に記載のノズルヘッド。 - 前記擬似ノズルは、枠形状を有する、
請求項6に記載のノズルヘッド。 - 前記プレート部から前記擬似ノズルの先端部までの第1高さは、前記プレート部から前記液滴吐出ノズルの先端部までの第2高さよりも低い、
請求項1乃至8のいずれか一項に記載のノズルヘッド。 - 請求項1乃至9のいずれか一項に記載のノズルヘッドを含む、
液滴吐出装置。 - 第1面、および前記第1面の反対側に第2面を有し、前記第1面側に複数の第1凹部を有する第1凹部群、および前記第1凹部群の周囲に設けられ複数の第2凹部を有する第2凹部群を含む母型を用意し、
前記第1凹部において先端部が開口された複数の第1構造体を形成し、前記第2凹部において先端部が閉塞された複数の第2構造体を形成し、および前記第1面において平面状の第3構造体を形成し、
前記複数の第1構造体および前記複数の第2構造体を遮蔽するようにレジストマスクを形成し、
前記第3構造体上に第4構造体を形成し、
前記レジストマスクを除去し、前記第1構造体、前記第2構造体、前記第3構造体および前記第4構造体を前記母型から離型することにより、前記第1構造体から液滴吐出ノズルを形成し、前記第2構造体から擬似ノズルを形成し、前記第3構造体および前記第4構造体からプレート部を形成する、
ノズルヘッドの製造方法。 - 前記第1凹部の底部には絶縁層が露出される、
請求項11に記載のノズルヘッドの製造方法。 - 前記複数の液滴吐出ノズルは、第1方向に並んで形成され、
前記複数の擬似ノズルは、前記液滴吐出ノズルに対して前記第1方向における両側に形成される、
請求項12に記載のノズルヘッドの製造方法。 - 前記複数の擬似ノズルは最も外側に配置された擬似ノズルから前記第1方向に向かって1mm以上5mm以下の範囲の全体にわたって形成される、
請求項13に記載のノズルヘッドの製造方法。 - 前記擬似ノズルは、前記液滴吐出ノズルの両側に5個以上形成される、
請求項13に記載のノズルヘッドの製造方法。 - 隣接する前記液滴吐出ノズルの間の第1距離は、隣接する前記擬似ノズルの間の第2距離と同じである、
請求項12乃至15のいずれか一項に記載のノズルヘッドの製造方法。 - 前記複数の液滴吐出ノズルは、第1方向および前記第1方向に交差する方向に第2方向に並んで形成され、
前記擬似ノズルは、前記液滴吐出ノズルを囲むように形成される、
請求項12に記載のノズルヘッドの製造方法。 - 前記擬似ノズルは、前記複数の液滴吐出ノズルのうち外側に形成された液滴吐出ノズルの各々に対応するように前記第1方向における両側および前記第2方向における両側に並んで形成され、
前記第1方向における片側および前記第2方向における片側に形成される一列ごとの前記擬似ノズルの数は、2個以上30個以下である、
請求項17に記載のノズルヘッドの製造方法。 - 前記擬似ノズルは、枠形状を有するように形成される、
請求項17に記載のノズルヘッドの製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202280037683.0A CN117377574A (zh) | 2021-06-21 | 2022-03-24 | 喷嘴头、喷嘴头的制造方法以及液滴喷射装置 |
KR1020237038970A KR20230169318A (ko) | 2021-06-21 | 2022-03-24 | 노즐 헤드, 노즐 헤드의 제조 방법 및 액적 토출 장치 |
EP22828005.3A EP4360887A1 (en) | 2021-06-21 | 2022-03-24 | Nozzle head, manufacturing method of nozzle head, and droplet discharging device |
IL309312A IL309312A (en) | 2021-06-21 | 2022-03-24 | Nozzle head, nozzle head manufacturing method and droplet discharge device |
US18/541,419 US20240227397A9 (en) | 2021-06-21 | 2023-12-15 | Nozzle head, manufacturing method of nozzle head, and droplet discharging device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2021-102675 | 2021-06-21 | ||
JP2021102675A JP2023001757A (ja) | 2021-06-21 | 2021-06-21 | ノズルヘッド、ノズルヘッドの製造方法および液滴吐出装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US18/541,419 Continuation US20240227397A9 (en) | 2021-06-21 | 2023-12-15 | Nozzle head, manufacturing method of nozzle head, and droplet discharging device |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2022270086A1 true WO2022270086A1 (ja) | 2022-12-29 |
Family
ID=84545595
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2022/013972 WO2022270086A1 (ja) | 2021-06-21 | 2022-03-24 | ノズルヘッド、ノズルヘッドの製造方法および液滴吐出装置 |
Country Status (8)
Country | Link |
---|---|
US (1) | US20240227397A9 (ja) |
EP (1) | EP4360887A1 (ja) |
JP (1) | JP2023001757A (ja) |
KR (1) | KR20230169318A (ja) |
CN (1) | CN117377574A (ja) |
IL (1) | IL309312A (ja) |
TW (1) | TW202302374A (ja) |
WO (1) | WO2022270086A1 (ja) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1034967A (ja) | 1996-07-19 | 1998-02-10 | Fuji Xerox Co Ltd | インクジェット記録装置 |
JP2007253373A (ja) * | 2006-03-22 | 2007-10-04 | Seiko Epson Corp | 液滴吐出ヘッド、液滴吐出装置、液滴吐出ヘッドの製造方法及び液滴吐出装置の製造方法 |
US20090303272A1 (en) * | 2008-06-05 | 2009-12-10 | Samsung Electronics Co., Ltd | Array head type inkjet image forming apparatus and method of compensating alignment errors thereof |
JP2018183881A (ja) * | 2017-04-24 | 2018-11-22 | ブラザー工業株式会社 | 液体吐出装置及びインクジェットプリンタ |
-
2021
- 2021-06-21 JP JP2021102675A patent/JP2023001757A/ja active Pending
-
2022
- 2022-03-24 WO PCT/JP2022/013972 patent/WO2022270086A1/ja active Application Filing
- 2022-03-24 CN CN202280037683.0A patent/CN117377574A/zh active Pending
- 2022-03-24 KR KR1020237038970A patent/KR20230169318A/ko unknown
- 2022-03-24 IL IL309312A patent/IL309312A/en unknown
- 2022-03-24 EP EP22828005.3A patent/EP4360887A1/en active Pending
- 2022-06-15 TW TW111122155A patent/TW202302374A/zh unknown
-
2023
- 2023-12-15 US US18/541,419 patent/US20240227397A9/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1034967A (ja) | 1996-07-19 | 1998-02-10 | Fuji Xerox Co Ltd | インクジェット記録装置 |
JP2007253373A (ja) * | 2006-03-22 | 2007-10-04 | Seiko Epson Corp | 液滴吐出ヘッド、液滴吐出装置、液滴吐出ヘッドの製造方法及び液滴吐出装置の製造方法 |
US20090303272A1 (en) * | 2008-06-05 | 2009-12-10 | Samsung Electronics Co., Ltd | Array head type inkjet image forming apparatus and method of compensating alignment errors thereof |
JP2018183881A (ja) * | 2017-04-24 | 2018-11-22 | ブラザー工業株式会社 | 液体吐出装置及びインクジェットプリンタ |
Also Published As
Publication number | Publication date |
---|---|
EP4360887A1 (en) | 2024-05-01 |
US20240227397A9 (en) | 2024-07-11 |
KR20230169318A (ko) | 2023-12-15 |
IL309312A (en) | 2024-02-01 |
CN117377574A (zh) | 2024-01-09 |
JP2023001757A (ja) | 2023-01-06 |
US20240131843A1 (en) | 2024-04-25 |
TW202302374A (zh) | 2023-01-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102730627B (zh) | 在基板中形成凹部的方法 | |
CN104507686B (zh) | 喷嘴板、喷嘴板制造方法、喷墨头和喷墨打印装置 | |
JP7153343B2 (ja) | 液滴吐出装置および液滴吐出方法 | |
WO2021065435A1 (ja) | 液滴吐出装置および液滴吐出方法 | |
WO2022270086A1 (ja) | ノズルヘッド、ノズルヘッドの製造方法および液滴吐出装置 | |
KR20170127734A (ko) | 패턴라인 형성장치 | |
KR102381833B1 (ko) | 액적 토출 장치 및 액적 토출 방법 | |
WO2023181683A1 (ja) | 液滴吐出装置および液滴吐出方法 | |
WO2024080118A1 (ja) | 液滴吐出方法および液滴吐出装置 | |
JP2009274266A (ja) | 半導体チップ及び、インクジェット記録ヘッド | |
WO2024075464A1 (ja) | 液滴吐出装置、液滴吐出用ノズルヘッドおよび液滴吐出方法 | |
JP2005178227A (ja) | 液体吐出ヘッドの製造方法及び液体吐出ヘッド | |
JP2005131949A (ja) | 液体吐出ヘッドの製造方法及び液体吐出装置 | |
JP2017170836A (ja) | インクジェットヘッドおよびインクジェット装置 | |
JP2010197914A (ja) | パターン形成方法および装置 | |
JP2017144663A (ja) | インクジェットヘッドおよびインクジェット装置 | |
JP2010142719A (ja) | 液滴吐出ヘッドのクリーニング方法及び液滴吐出装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 22828005 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 20237038970 Country of ref document: KR Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 1020237038970 Country of ref document: KR |
|
WWE | Wipo information: entry into national phase |
Ref document number: 202280037683.0 Country of ref document: CN |
|
WWE | Wipo information: entry into national phase |
Ref document number: 309312 Country of ref document: IL |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2022828005 Country of ref document: EP |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
ENP | Entry into the national phase |
Ref document number: 2022828005 Country of ref document: EP Effective date: 20240122 |