WO2022229164A2 - Verfahren und system zur herstellung mikrostrukturierter komponenten - Google Patents
Verfahren und system zur herstellung mikrostrukturierter komponenten Download PDFInfo
- Publication number
- WO2022229164A2 WO2022229164A2 PCT/EP2022/061015 EP2022061015W WO2022229164A2 WO 2022229164 A2 WO2022229164 A2 WO 2022229164A2 EP 2022061015 W EP2022061015 W EP 2022061015W WO 2022229164 A2 WO2022229164 A2 WO 2022229164A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- laser
- camera
- workpiece
- processing
- plane
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 71
- 238000012545 processing Methods 0.000 claims abstract description 278
- 239000000758 substrate Substances 0.000 claims abstract description 86
- 230000033001 locomotion Effects 0.000 claims abstract description 50
- 238000012937 correction Methods 0.000 claims abstract description 47
- 238000004519 manufacturing process Methods 0.000 claims abstract description 22
- 238000003754 machining Methods 0.000 claims abstract description 20
- 230000004044 response Effects 0.000 claims abstract description 7
- 238000005286 illumination Methods 0.000 claims description 94
- 238000004458 analytical method Methods 0.000 claims description 49
- 230000008569 process Effects 0.000 claims description 36
- 230000005855 radiation Effects 0.000 claims description 33
- 238000003384 imaging method Methods 0.000 claims description 27
- 238000010191 image analysis Methods 0.000 claims description 21
- 238000011156 evaluation Methods 0.000 claims description 18
- 201000009310 astigmatism Diseases 0.000 claims description 15
- 230000005540 biological transmission Effects 0.000 claims description 12
- 238000005259 measurement Methods 0.000 claims description 12
- 230000003595 spectral effect Effects 0.000 claims description 12
- 238000000576 coating method Methods 0.000 claims description 11
- 239000011248 coating agent Substances 0.000 claims description 10
- 230000001960 triggered effect Effects 0.000 claims description 9
- 238000011065 in-situ storage Methods 0.000 claims description 8
- 230000036961 partial effect Effects 0.000 claims description 7
- 238000003745 diagnosis Methods 0.000 claims description 5
- 238000010249 in-situ analysis Methods 0.000 claims description 4
- 230000001154 acute effect Effects 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 238000004377 microelectronic Methods 0.000 abstract description 7
- 238000012544 monitoring process Methods 0.000 abstract description 2
- 230000003287 optical effect Effects 0.000 description 14
- 238000012546 transfer Methods 0.000 description 14
- 230000002950 deficient Effects 0.000 description 13
- 230000008439 repair process Effects 0.000 description 13
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 10
- 235000012431 wafers Nutrition 0.000 description 10
- 229910002601 GaN Inorganic materials 0.000 description 9
- 238000011161 development Methods 0.000 description 9
- 230000018109 developmental process Effects 0.000 description 9
- 230000012010 growth Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 230000008901 benefit Effects 0.000 description 6
- 238000009826 distribution Methods 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 230000002829 reductive effect Effects 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000004075 alteration Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 230000001427 coherent effect Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 230000005670 electromagnetic radiation Effects 0.000 description 3
- 229910052594 sapphire Inorganic materials 0.000 description 3
- 239000010980 sapphire Substances 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 241000276498 Pollachius virens Species 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 2
- 230000033228 biological regulation Effects 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000011835 investigation Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000000608 laser ablation Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 238000000275 quality assurance Methods 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000002996 emotional effect Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000024703 flight behavior Effects 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000012634 optical imaging Methods 0.000 description 1
- 238000013386 optimize process Methods 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 238000011165 process development Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000002096 quantum dot Substances 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012549 training Methods 0.000 description 1
- 238000013024 troubleshooting Methods 0.000 description 1
- 238000001429 visible spectrum Methods 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
- B23K26/0676—Dividing the beam into multiple beams, e.g. multifocusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
- B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
- B23K26/0861—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane in at least in three axial directions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0869—Devices involving movement of the laser head in at least one axial direction
- B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
- B23K26/0884—Devices involving movement of the laser head in at least one axial direction in at least two axial directions in at least in three axial directions, e.g. manipulators, robots
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
- B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/57—Working by transmitting the laser beam through or within the workpiece the laser beam entering a face of the workpiece from which it is transmitted through the workpiece material to work on a different workpiece face, e.g. for effecting removal, fusion splicing, modifying or reforming
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
- B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
- B23K37/0408—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work for planar work
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/7806—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices involving the separation of the active layers from a substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/56—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26 semiconducting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/075—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00
- H01L25/0753—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00 the devices being arranged next to each other
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0095—Post-treatment of devices, e.g. annealing, recrystallisation or short-circuit elimination
Definitions
- the invention relates to a method and a system for producing a microstructured component that has a large number of microfunctional elements on a substrate, in which laser processing is carried out in at least one method step in a laser processing station under the control of a control unit.
- a preferred area of application is the production of a micro-LED display, which has a substrate that carries an array of pixel-forming micro-light-emitting diodes, which are arranged on an electrical supply structure arranged on the substrate.
- micro-LED sometimes also called micro-LED or pLED - stands for a flat screen technology based on light emitting diodes (LED).
- Micro LED displays are microelectronic components based on arrays of microscopic light-emitting diodes that form the display's picture elements, also known as pixels. Between the individual pLEDs there are gaps, which are also referred to as streets. Individual pixels can consist of three sub-pixels, i.e. three pLEDs for red (R), green (G) and blue (B). This means that there can also be streets between the pLEDs within a pixel.
- the micro-LEDs are self-illuminating, dimmable and can be switched off completely and therefore do not require any backlighting, as is the case with liquid crystal displays (LCDs for short).
- LCDs liquid crystal displays
- LLO Laser Lift-Off
- LIFT Laser-Induced-Forward-Transfer
- Laser Lift-Off is a method of selectively ablating one material from another. A process is used in which the laser beam penetrates a transparent base material and is strongly coupled into a second material. LLO is commonly used in LED manufacturing to separate the GaN semiconductor from a sapphire base wafer.
- Laser-induced forward transfer is a class of processes that use laser radiation to transfer material from a starting substrate (donor) to a target substrate (acceptor).
- the arrangement of the pLED on the EPI wafer can differ from that on the display.
- the lateral distances can be different.
- e.g. blue pLEDs with different color conversion layers (e.g. quantum dots) can be used.
- micro-LED screens as screens with light-emitting diodes that have a light width of less than 50 pm or a light area of less than 0.003 mm 2 .
- the width (lateral extent) of a pLED can range, for example, from more than 30 pm ( ⁇ 100 pm) down to around 1 pm to 3 pm.
- the webs between the pLEDs are often only about 6 pm to 1 pm wide. Deviations from these currently typical dimensions are possible, in particular in the direction of further miniaturization, for example in order to create screens with an even higher resolution.
- one object of the invention is to provide a method and a system for the production of microstructured components which allow such components to be produced economically even with increasing miniaturization of the structures to be produced.
- the invention provides a method with the features of claim 1.
- a system having the features of claim 12 is also provided.
- Advantageous developments are specified in the dependent claims. The wording of all claims is incorporated into the description by reference.
- microstructured components that have a large number of microfunctional elements on a substrate.
- This can be, for example, microelectronic and/or micromechanical functional elements.
- An example is the production of a micro-LED display, which has a substrate (display substrate) which carries an array of pixel-forming micro-light-emitting diodes on an electrical supply structure (also referred to as a backplane).
- laser processing is carried out in a laser processing station under the control of a control unit.
- laser radiation with definable beam properties is radiated onto the workpiece in a definable manner in order to bring about locally limited changes in the workpiece.
- Laser processing can also be referred to as laser micro processing, since processing accuracies in the micrometer range (e.g. a few micrometers, possibly less than one micrometer) may be required.
- the workpiece can be a substrate that has not yet been processed or a substrate that has a coating and/or other functional structures.
- a positioning operation is carried out.
- a workpiece to be machined is moved into a machining position of the laser machining station in response to movement signals from the control unit.
- the positioning movement takes place in such a way that the workpiece is in a desired position at a specified point in time.
- the workpiece can move constantly and run through the desired position at a finite speed in such a way that it is in the desired position at the target time (“dynamic positioning”).
- the Positioning motion can also be controlled so that the motion stops momentarily when the workpiece is in the target position (“static positioning”)
- a movement system is an electro-mechanical system for movement and positioning purposes in automation and allows an object moved with it to be moved and positioned according to a specific movement profile in two or three dimensions. They are also often referred to as motion and positioning systems.
- a camera-based observation of the workpiece takes place.
- the observation is carried out with the aid of a camera system that has at least one camera and includes image acquisition, ie the acquisition of at least one section of the workpiece in the object field of the camera and the generation of an image representing the section. It can be a single image or multiple images.
- the image is evaluated by image processing using an evaluation unit of the system in order to determine position data that represent the actual position of at least one structural element of the workpiece in the object field at the time of image acquisition.
- the structural element is an element on the workpiece that can be easily identified in the image with regard to its position. Possible structural elements are, for example, contact pads on the backplane, alignment marks specially attached at certain points, one or more LEDs or other functional elements.
- the actual position is compared with a specified target position of the structure element. Based on the comparison, correction signals are generated as a function of a deviation of the actual position from the target position.
- correction signals or correction values are generated which represent the extent of the deviation and indicate a need for correction . If the comparison shows that the determined actual position already corresponds sufficiently well to the target position, a corresponding correction signal (“no correction necessary”) can be generated, which would correspond to a correction value of zero. Based on the result of the comparison, the machining position of the workpiece is corrected as part of a position correction by generating a corrective movement by controlling the workpiece movement system in such a way that the actual position of the structural element is adjusted as well as possible to the target position. The target position does not have to be reached exactly, but the difference between the target and actual position must be reduced in such a way that the actual position after the position correction is within the tolerance range for the target position.
- At least one laser beam directed onto the workpiece for local laser processing of the workpiece is radiated onto the workpiece at at least one processing point of the correctly positioned workpiece.
- a system that is suitable and configured for carrying out the method accordingly comprises a control unit, the laser processing station with the laser processing unit that can be controlled by the control unit, and a workpiece movement system that can move a workpiece in response to movement signals from the control unit. Furthermore, a camera system with a camera for observing the workpiece and for capturing one or more images is provided, which are then evaluated in the evaluation unit.
- the evaluation unit is configured to evaluate the image using image processing to determine position data that represents the actual position, and also compares the actual position with the target position of the structural element to possibly generate correction signals if the deviations are too large.
- the control unit is prompted to correct the machining position by controlling the workpiece movement system in order to adjust the actual position to the target position on the basis of the correction signals.
- the actual position is at or close to the target position with a high level of accuracy. If this is the case, the control unit can cause the laser processing unit to radiate at least one laser beam directed onto the workpiece for local laser processing of the workpiece at at least one processing point of the positioned workpiece.
- the claimed invention is based, among other things, on findings by the inventors from investigations into commercially available workpiece movement systems, which are frequently also referred to as movement and positioning systems. Surprisingly, it turned out that even with high-quality and correspondingly expensive workpiece movement systems, the absolute accuracy of the positioning over relatively large travel distances and possibly over a relatively long period of time, as required for display production for the process of precise Positioning of very small micro-LEDs is required, not or hardly sufficient.
- the absolute position error can amount to several microns for traversing distances of the order of 500 mm.
- the non-correctable repetition error with a travel path of less than 50 mm should be less than 100 nm in a relatively short period of time after a correction and thus lie within the required accuracy range.
- a workpiece movement system can be used for high-precision laser processing, even if it generates relatively high absolute position errors, for example with large travel distances, since camera-based observation including image processing, determination of any position errors and position correction based on them can still be used for the Laser micro-machining required position of the workpiece can be set with the highest precision in the micrometer range even after longer traverse paths.
- a camera-based position control is implemented, which can compensate for any structural or principle-related weaknesses of commercial workpiece movement systems with relatively inexpensive means.
- a mask with a large number of mask openings is used in order to enable parallel processing at a large number of processing points at the same time.
- the mask splits a possibly processed laser beam into a large number of partial beams.
- the mask openings emitting laser radiation are then imaged onto a processing plane of the laser processing unit.
- the mask is arranged in a mask plane that is optically conjugate to the processing plane.
- the mask openings emitting laser radiation are imaged onto a processing plane of the laser processing unit by means of an optical imaging system.
- a mask movement system is preferably provided which supports the mask and, under the control of the control unit, allows the mask to be displaced in the mask plane and rotated about an axis perpendicular to the mask plane.
- the workpiece is moved continuously by means of the movement system and a laser pulse is triggered at each of the specified positions.
- a laser pulse frequency within the scope of the specification of the laser system and a distance between the processing positions and a specific traversing speed of the substrate.
- a positioning with a brief standstill or a positioning with a very slow movement through the desired position is carried out, which is only available for a short but sufficient period of time.
- work is carried out step by step on a sectoral basis.
- a sector is a sub-area or a section of the entire workpiece that can be virtually divided into a large number of equal or unequal sectors.
- a sector can, for example, have a rectangular shape with equal or unequal side lengths.
- the method includes the generation and storage of a grid of correction values within a measured sector and subsequent processing of this sector.
- the corrected values are used for the laser processing of the workpiece. If necessary, an interpolation of the intermediate values at the positions not measured is carried out.
- narrow-band light is used for camera observation and image acquisition. This can make a further contribution to achieving the highest positioning accuracies and the lowest positioning errors.
- the term “light” is used in general both for electromagnetic radiation from the spectral range visible to the naked eye (VIS, visible spectral range) and for electromagnetic radiation not visible to the naked eye, in particular from the ultraviolet spectral range (UV).
- narrow-band light is also referred to as “quasi-monochromatic” or “single-color” light.
- the terms “narrow-band”, “quasi-monochromatic” or “monochrome” are synonyms and are intended to make it clear that the light is electromagnetic radiation from a relatively narrow wavelength range or from a narrow wavelength band.
- the spectral bandwidth of the narrow-band light or the narrow-band radiation can be significantly less than 100 nm, with the spectral bandwidth of the light used for image acquisition preferably being 50 nm or less, in particular 10 nm or less. There are different ways to implement this.
- an illumination area on the workpiece that encompasses the object field of the camera is illuminated with narrow-band illumination light for camera observation and image acquisition at least during the acquisition of an image.
- the system can have an illumination system that includes an illumination light source that is already narrow-band per se and/or optical devices (e.g. gratings or filters) for limiting the illumination light spectrum of an illumination light source to a narrower wavelength range.
- optical devices e.g. gratings or filters
- Suitable light-emitting diodes (LEDs) or laser diodes can be used as the light source for generating the illumination light.
- the light from the laser of the laser processing unit can also be used for illumination with a correspondingly lower intensity.
- quasi- monochromatic illumination light the occurrence of color errors or chromatic aberrations can be avoided or reduced to such an extent that the resolution for position measurements is not significantly impaired.
- monochromatic illuminating light enables the use of optical systems, such as laser optics, which are generally not chromatically corrected, for beam guidance.
- a filter, a grid and/or another wavelength-selective device can be arranged between the object plane of the camera (or the processing plane of the laser processing unit) and the camera sensor, which, e.g. with the effect of a bandpass filter, only sends light from a narrow wavelength band to the camera lets through, so that only narrow-band or quasi-monochromatic light is used to generate the image used for the evaluation.
- the illumination system can be configured in such a way that the principle of Koehler illumination is used.
- a ring light can be used as an illumination light source.
- the productive laser processing of substrates is often done "on-the-fly", i.e. in the movement of the substrate, so that an available time window for the exposure and the creation of an image would only be relatively small, unless a pulsed laser is used as the light source of the illumination system becomes.
- a full "on-the-fly" correction might come too late in some situations to compensate for larger deviations. Therefore, according to preferred embodiments, it is provided that the observation and image processing is implemented within a correction operation before the laser processing and the laser processing step (e.g. to implement an LLO, LIFT or repair process) is only started after the corrected processing position has been set.
- the laser processing therefore starts as soon as possible after a possible displacement of the workpiece to correct a position error.
- the workpiece preferably does not move during the image acquisition, so that the measurement for the correction can be carried out with the workpiece stationary.
- the correction should be as local as possible, i.e. where the next laser processing takes place, with the shortest possible travel distances.
- the area in which the structural elements used for position measurement are located should be as close as possible are at the next processing point.
- the preferred step-by-step sectorial processing has proven itself, since only traversing paths in the magnitude of the sector transverse dimensions (eg in the range from approx. 10 mm to approx. 30 mm) have to be covered.
- the position correction takes place promptly before the start of the next processing step, ie in particular before an additional error may occur due to the input of energy during processing.
- This can be compensated if a new measurement is carried out beforehand.
- the split times may be on the order of a second or less, for example down to a millisecond.
- the processing should therefore take place immediately after the position correction, without further movements not related to the processing, e.g. without an intermediate beam analysis.
- the laser processing unit includes an imaging lens for imaging a mask plane in the processing plane of the laser processing unit, which is usually in or near the surface of the workpiece.
- an imaging lens for imaging a mask plane in the processing plane of the laser processing unit, which is usually in or near the surface of the workpiece.
- the camera-based observation of the workpiece to be positioned or of the positioned workpiece is carried out by means of the camera through this imaging lens.
- an observation beam path runs from the workpiece or the object plane of the imaging lens on the workpiece side through the imaging lens to the camera.
- the illumination beam path, with which the illumination light is directed onto the section to be observed preferably also runs through the imaging objective. This is particularly well possible when monochromatic illumination light is used, for the beam guidance of which chromatically non-corrected optics can also be used.
- the illumination area on the workpiece is illuminated with quasi-monochromatic illumination light with an illumination wavelength in the ultraviolet range (UV illumination light).
- the illumination system can have a light source that emits in the ultraviolet range.
- the use of ultraviolet light for measuring offers, among other things, the advantage of a higher resolution due to the shorter wavelength. This means that even finer structures can be recorded and evaluated more precisely with the camera than when used longer wavelengths.
- illumination wavelengths in the range of less than 300 nm can be used, for example illumination wavelengths in the range of around 270 nm or illumination wavelengths in the range of around 248 nm or below.
- a further advantage of using ultraviolet light for illumination arises in many exemplary embodiments from the fact that a laser wavelength in the ultraviolet range is also used for laser processing, for example at a wavelength of 193 nm, 248 nm, 308 nm or 355 nm.
- a laser wavelength in the ultraviolet range is also used for laser processing, for example at a wavelength of 193 nm, 248 nm, 308 nm or 355 nm.
- an excimer laser can be used as the laser source, for example a KrF excimer laser with an emission wavelength of approximately 248 nm.
- Such excimer lasers have proven themselves for laser processing. Good adaptation to the laser processing unit is possible by using illumination light with similar wavelengths.
- the illumination light has an illumination wavelength that corresponds to or is close to the laser wavelength, it is particularly easy to design the anti-reflection coating of transparent optical components in such a way that they have an anti-reflective or transmission-increasing effect both for the laser wavelength and for the illumination light.
- the illumination system is designed in such a way that illumination light with an illumination wavelength in the visible spectral range (VIS) is used, narrow-band green light with a wavelength in the range from 490 nm to 575 nm preferably being used for illumination.
- VIS visible spectral range
- narrow-band green light with a wavelength in the range from 490 nm to 575 nm preferably being used for illumination.
- the laser processing unit has a beam deflection device, which has a substrate and a beam deflection surface formed thereon, oriented obliquely to a main axis of the laser processing unit, for deflecting the laser beam into an essentially having direction of propagation parallel to the main axis.
- the laser radiation source and the downstream beam guidance components can be constructed in this way be that the irradiation occurs essentially in the horizontal direction, while the main axis of the laser processing unit is oriented vertically.
- the main axis of the laser processing unit is that axis which is defined by the optical axis of the imaging objective.
- an observation beam path running between the processing plane of the laser processing unit and the camera passes through the beam deflection surface, with the beam deflection device being designed in such a way that it at least partially transmits illumination light.
- the beam deflection surface should have a certain transmission for illuminating light, ie it should not reflect and/or absorb it completely.
- the substrate of the beam deflection device can be coated with a dielectric coating that forms the beam deflection surface.
- the coating is preferably designed in such a way that it has a very high degree of reflection (e.g. more than 99%) for the incoming laser light at the angles of incidence present and a relatively high transmission for the illumination light used for illumination, e.g. in the range from 20% to 70 %.
- the substrate of the beam deflection device is designed as a plane plate which is transparent to the illumination light and which is tilted relative to the main axis about a first tilting axis which is oriented perpendicularly to the main axis, for example by 45°.
- the substrate can consist, for example, of synthetic quartz glass (fused silica) or another material which is transparent to ultraviolet light and visible light and has a low coefficient of thermal expansion.
- an astigmatism compensation unit that transmits illumination light is therefore arranged in the observation beam path between the beam deflection device and the camera. This is designed to at least reduce the introduced astigmatic aberration components to partially compensate, whereby the resolving power of the observation system can be increased overall.
- the astigmatism compensation unit preferably has a plane plate that is transparent to illumination light and that relative to the main axis is about a second tilting axis oriented perpendicularly to the main axis and to the first tilting axis.
- the plane plate of the beam deflection device and the astigmatism compensation unit should have the same or essentially the same thickness, so that they introduce astigmatic distortions in two mutually perpendicular directions, which mutually compensate due to the different orientation of the tilting axes.
- the observation system can thus be designed in such a way that there are no astigmatic aberrations between the object plane of the camera and the light-sensitive sensor (for example CCD sensor or CMOS sensor) that would impair the resolution of the sample observation.
- Exact positioning of the workpiece and any functional elements attached to it in space is an important contribution to achieving the highest machining accuracy. Further contributions come from the side of the laser processing unit, since the position of the impinging laser beams in space should also be known for precise processing. In addition, a homogeneous intensity distribution over the entire beam cross-section and a high edge steepness at the edge of the mask apertures are important prerequisites for high processing quality.
- each individual functional element for example each micro-LED, should ideally be irradiated individually, completely and evenly across the LED, while neighboring LEDs are not hit by the radiation intended for an LED, but only by the laser beams assigned to them.
- preferred embodiments have a camera-based beam analysis system integrated into the laser processing station for in-situ analysis of beam parameters of the laser beam. This enables beam diagnostics to be carried out promptly before processing, for example when setting up the laser processing station or checking the beam quality to ensure correct imaging of the mask on the workpiece.
- the beam analysis system preferably has at least one beam analysis unit which has a camera arrangement which is sensitive to the laser wavelength and has a camera which has an object field which lies in the processing plane of the laser processing unit or in a plane optically conjugate to the processing plane.
- the camera can capture an image that is as sharp as possible and has a good resolution of the laser beams effective in the processing plane or, for example, an image of the illuminated apertures of the mask. Beam parameters and alignment parameters can then be determined from this in an evaluation device and processed by the control unit to correct any errors.
- the camera assembly has a laser wavelength sensitive camera, preferably an ultraviolet light (UV) camera, that can directly process the laser light from a UV laser.
- a laser wavelength sensitive camera preferably an ultraviolet light (UV) camera
- UV ultraviolet light
- the object field of the camera is not large enough to cover all apertures of a mask at the same time. Rather, only subgroups of the apertures are detected in each case.
- the camera is moved step-and-repeat over the plane to be measured and individual images are combined in the evaluation unit using software to form an image of the complete mask and evaluated using image processing. Alternatively, the individual images can also be evaluated.
- the beam analysis system can be mounted on the positioning device of the acceptor substrate outside of the substrate table or on a separate positioning unit. This favors precise positioning of the beam analysis system in the sub-pm range, which is a prerequisite for the exact composition of the individual images and thus the correct analysis of the laser beam in the processing plane.
- the positioning device can then be measured using a high-precision lithographic mask structure, which is imaged in the processing position using the laser system. This results in the positions where adjacent images are stitched together, a deviation from the original structure that is a measure of the relative positioning error in the X and Y directions (respectively the sum of the X and Y errors at the two positions where the images were taken). After calculating these deviations, the error can thus be compensated.
- a camera-based beam analysis system for in-situ analysis of beam parameters of the laser beam of the type described in this application can also represent a protectable invention independently of the other features of the claimed invention.
- a laser processing system with an integrated beam analysis system is thus also disclosed, but without camera-based position correction or without camera-based position regulation.
- a camera-based shadow-cast image analysis system for in-situ observation and analysis of rapidly occurring processes in the area of the processing zone influenced by the laser beam is integrated into the laser processing station for these purposes.
- knowledge of the processes occurring during laser ablation can be gained by means of "shadowgraphy” or by means of shadow-cast image generation and analysis, and corrections of processing parameters can be made possible in the event of unfavorable processes.
- the shadow image analysis system is also referred to below as the “shadowgraphy system”.
- a shadow image analysis system or the technique of shadowgraphy can be used, for example, in the context of process development and process control.
- Another area of application is in the area of repair processes, i.e. process steps with which partially defective components, such as pLED displays, can be repaired in order to improve the overall yield.
- the shadow cast analysis system has a short-pulse light source or flash light source for the time-controlled irradiation of short illumination light pulses or flashes in a direction of irradiation oriented transversely to the laser beam. Furthermore, on the opposite side, the system includes a camera for capturing shadow images (shadow graphs) of the processing zone irradiated with the laser beam. Furthermore, an evaluation unit for evaluating camera images of the camera is provided. Illumination light pulses are preferably radiated into the region of the processing zone parallel to the processing plane. Alternatively, irradiation at a relatively flat or acute angle is possible, which can be less than 30° or less than 20°, for example.
- a particularly critical process stage for example in the manufacture of micro-LED displays, is the transfer of micro-LEDs using the LIFT process.
- a very small donor-acceptor distance is generally used there. In-situ monitoring of the process would be desirable. Without this, the parameter search and optimization as well as the troubleshooting of quality problems are difficult.
- a LIFT processing station i.e. a laser processing station set up for a LIFT process
- a LIFT processing station which allows high-resolution shadowgraphy on a smaller area (measuring area).
- the flight phase of micro-LEDs can be precisely characterized after detachment from the donor.
- a suitable embodiment of a shadow image analysis system is characterized by a beam deflection system, in particular a mirror system, with a deflection element arranged between the short-pulse light source and the processing zone, in particular a deflection mirror, for deflecting illumination light from a direction oriented at an angle to the processing plane into a direction parallel to the processing plane and with a deflection element arranged between the processing zone and the camera, in particular a deflection mirror, for deflecting the radiation running parallel to the processing plane into a direction of incidence of the camera oriented obliquely to the processing plane.
- Embodiments are particularly advantageous in which the shadow-cast image analysis system is configured to trigger a series of illumination pulses, triggered by laser pulses from the laser processing laser, so that the part detached from the workpiece is imaged multiple times, at different times and in different positions, in one image. by the camera sensor integrating over the series of illumination pulses and evaluating the image. A multiple exposure is thus carried out.
- a trajectory tracking can be realized, in which the trajectory of a part, for example a pLED, detached from the workpiece by means of a laser pulse, is determined and analyzed.
- the process parameters can then be optimized in such a way that the trajectory at the detachment location leads to the intended installation location on the acceptor with sufficient precision.
- a camera-based shadow image analysis system for in-situ observation and analysis of rapidly occurring processes in the area of the processing zone influenced by the laser beam of the type described in this application can also represent a protectable invention independently of the other features of the claimed invention.
- a laser processing system with an integrated, camera-based shadow-cast image analysis system is thus also disclosed, but without camera-based position correction or without camera-based position regulation.
- 1 shows a laser processing station configured for the laser lift-off (LLO) method
- FIG. 2 shows a laser processing station configured for Laser-Induced Forward-Transfer (LIFT);
- LIFT Laser-Induced Forward-Transfer
- 3 shows an embodiment of a laser processing station that is equipped with components that enable camera-based position control, in which narrow-band green light is used; 4 shows an embodiment of a laser processing station equipped with components that enable camera-based position control, in which work is carried out with ultraviolet light;
- FIG. 5 shows a laser processing station for a laser lift-off operation with a UV camera and the possibility of in-situ observation of the micro-LEDs to be transferred;
- FIG. 6 shows exemplary embodiments of beam diagnosis systems which are integrated into the laser processing station, some alternatively or cumulatively usable beam analysis units being shown schematically in a single representation;
- Fig. 7 shows an embodiment of a laser processing station in which a
- Shadowgraphy system is integrated
- FIG. 8 shows another exemplary embodiment of a laser processing station in which a shadowgraphy system is integrated
- Fig. 9 shows an embodiment of a laser processing station in which a
- Shadowgraphy system is integrated, which is designed for the observation of the area close to the sample including the sample surface.
- microelectronic components each have a large number of micro-functional elements that are applied to a substrate. That at the
- the area of application in the foreground of the exemplary embodiments is the production of a micro-LED display.
- a display includes a substrate carrying an array of micro light emitting diodes (pLEDs) intended to form the individual picture elements or pixels of the display. These are applied to an electrical supply structure.
- pLEDs micro light emitting diodes
- laser processing is carried out in a laser processing station, which can also be referred to as laser microprocessing, since fine structures with typical structure sizes in the order of one or a few micrometers can be processed and/or produced.
- 1 and 2 schematically show some components of a laser processing station 100 according to the prior art (SdT).
- the laser processing station is configured for the Laser-Lift-Off (LLO) method, in the case of FIG. 2 for Laser-Induced Forward-Transfer (LIFT).
- LLO Laser-Lift-Off
- LIFT Laser-Induced Forward-Transfer
- the laser processing station 100 has a laser processing unit 110 that works with laser radiation from a laser radiation source 112 in the form of a KrF excimer laser, which emits a laser beam 105 with a laser wavelength of approx. 248 nm, i.e. laser radiation in the deep ultraviolet range (DUV).
- the laser beam is irradiated in a horizontal direction parallel to the x-axis of the system coordinate system.
- the expanded and/or otherwise prepared laser beam passes through a mask 107, which is arranged in a mask plane 108 and has a grid arrangement of apertures or openings 109, each of which allows partial beams to pass through, so that a group of partial beams exits, which requires parallel processing ( simultaneous processing at a large number of points on the workpiece).
- the mask can have several hundred or several thousand mask openings 109, which are generally of the same design (cf. detail).
- the mask openings can have different shapes, e.g. square, scalene rectangular or similar.
- the beams of the partial beams are deflected at a beam deflection device 115 and then propagate essentially vertically or parallel to a main axis 116 of the laser processing unit 110 (parallel to the z-direction) or at more or less acute angles thereto downwards in the direction of a workpiece 150 to be processed
- the beam deflection device 115 has a plane-parallel substrate 117 made of synthetic quartz glass, on which a plane surface is formed as a reflective beam deflection surface 118 by being coated with a dielectric coating that is highly reflective for the laser radiation.
- the arrangement of illuminated mask openings 109 in the mask plane 108 is imaged in the processing plane 122 of the laser processing unit with the aid of an imaging objective 120 .
- the optical axis of the imaging objective 120 defines or corresponds to the main axis 116 of the laser processing unit.
- the image can be enlarging, reducing or retaining the size (1:1 image).
- the intensity distribution in the processing level is the same as in the mask level, but on a smaller scale.
- the laser processing station 100 comprises a workpiece movement system 200 which is set up to switch on in response to movement signals from the control unit 190 to position the workpiece to be machined in a desired machining position of the laser machining station.
- the workpiece movement system 200 comprises a first substrate table 210, which moves parallel to the (horizontal) x-y plane of the system coordinate system and in the height direction (parallel to the z-direction) to a desired position very precisely and around a vertical one Axis of rotation can be rotated (PHI axis).
- precisely controllable direct electric drives are provided in the example.
- a second substrate table 220 is arranged above the first substrate table 210, which can also be moved in any direction horizontally (parallel to the x-y plane) and vertically (parallel to the z-direction) and rotated about a vertical axis can.
- the laser processing station 100 can contain both substrate tables, however, in the process stage of FIG. 1 the second substrate table is not used and is therefore not shown.
- the mask 107 is carried by a mask movement system, not shown, which, under control of the control unit, allows the mask 107 to translate in the mask plane 108 (parallel to the y-z plane) and to rotate the mask about an axis parallel to the x-direction .
- the laser processing station 100 is set up for a laser lift-off (LLO).
- LLO laser lift-off
- LEDs light-emitting diodes
- These layers often only have thicknesses in the micrometer range and are often already structured by means of laser processing in order to form individual functional elements 155 in the form of LEDs.
- a thin, mostly metallic connecting layer is applied to the GaN layer stack, for example by vapor deposition. With the help of this connecting layer, the growth substrate, which carries the GaN layer stack located thereon, is connected to another flat carrier substrate. The planar connection between the growth substrate and the GaN stack is released later. This transfers the GaN stack onto the carrier substrate.
- the workpiece 150 in FIG. 1 shows the arrangement before the planar connection is released.
- the upper flat substrate 152 is the growth substrate, which is also referred to as the donor substrate 152 because it later releases the functional elements 155 applied thereto. That
- the carrier substrate 154 resting on the first substrate table 210 is also referred to as the acceptor substrate 154 because it accepts or accommodates the functional elements 155 .
- the acceptor substrate with the GaN stacks carried by it then serves as the basis for the further steps in the production of the microelectronic component.
- the workpiece is positioned in such a way that the processing plane 122 lies in the area between the donor substrate 152 and the GaN elements 155 in order to release the planar connection between them by means of laser processing.
- the buffer layer which is located in the boundary area between the growth substrate and the GaN elements, is destroyed or removed by laser radiation.
- the laser irradiation takes place through the laser-transparent growth substrate 152 .
- the individual functional elements 155 held on the (acceptor) substrate 154 are then transferred or transferred onto a further flat substrate 156 .
- This is held in position by the first substrate table 210 and already has an electrical supply structure (backplane) applied by vapor deposition and structuring on its upper side, which is to be equipped with micro-LEDs.
- the underlying substrate 156 now serves as an acceptor substrate.
- the acceptor substrate 154 from FIG. 1, which carries the microelectronic functional elements 155 is turned over in such a way that the functional elements 155 now lie on the underside of the substrate. In this orientation, the substrate now serving as the donor substrate is held by the second substrate table 220 of FIG.
- the micro-LEDs are then detached from the donor substrate 154 and transferred to the acceptor substrate 156 by irradiating laser beams in the exact position.
- the laser does not act directly through radiation forces, but is used as a means of controlled energy input and usually thermally triggers the material transfer.
- the micro-LEDs are detached directly from the EPI wafer, the energy comes from the pressure generated by the liberated nitrogen decomposing a thin GaN layer.
- the donor-acceptor distance 158 which is a measure of the flight distance of the functional elements 155 to be transferred, is generally between 30 pm and 500 pm, in particular between 80 pm and 200 pm.
- the workpiece movement system 200 must be able to move the workpiece, if necessary over longer travel distances of the order of a few hundred millimeters, with high positioning accuracy (of the order of 1 pm or less) at a predetermined target position.
- high positioning accuracy of the order of 1 pm or less
- this is necessary for both substrate tables in order to be able to ensure that the transfer is in the correct position.
- a few exemplary embodiments are explained below, which make such high positioning accuracies possible in an economical manner.
- the laser processing station 300 in FIG. 3 is additionally equipped with optical, mechanical and software components that enable camera-based position control.
- an illumination system 310 for illuminating an illumination area 305 on the workpiece 150 with narrow-band illumination light from a narrow wavelength range in the visible spectrum at a wavelength of approximately 528 nm, ie with green light.
- the illumination system is set up for Koehler illumination, which offers homogeneous illumination of the zones to be illuminated in the illumination area 305 without imaging the light source.
- Green light source 312 may include one or more LEDs.
- a horizontal branch of the illumination beam path leads through a collector lens 316 and a downstream field diaphragm 314 to a beam splitter cube 321 whose flat beam splitter surface is inclined by 45° relative to the main axis 116 of the laser processing unit 110 .
- the beam splitter surface reflects a first portion of the illumination light in a direction parallel to the main axis 116 downward onto the workpiece 150.
- This portion passes through the plane-parallel substrate 317 of the beam deflection device 315, which is transparent to green light, and whose dielectric coating is highly reflective for the UV laser light, but for Green light has a high transmission, so that the illumination light impinges on the illumination area 305 on the workpiece through the laser objective 120 .
- Each point of the light source 312 illuminates the entire illuminated area on the workpiece, as a result of which a homogenization effect is achieved.
- the aperture of the imaging lens 120 represents the condenser diaphragm and the imaging lens simultaneously acts as a condenser. This should be taken into account when designing the system - so that if possible only the area that is visible in the camera is illuminated and the lens is illuminated is not outshone - this results in little scattered light and maximum intensity of the (usable) lighting.
- the illumination is imaged in the aperture of the imaging lens 120 (laser lens) in such a way that it is illuminated between 65% and a maximum of 90% and the luminous field diaphragm is imaged in the processing plane 122 via the laser lens in such a reduced size that the illuminated one is Area is only slightly larger than the area displayed in the camera.
- Portions of illuminating light that are let through or transmitted through the beam splitter surface are caught and absorbed by an absorber 319 and as a result cannot lead to undesired scattered light.
- imaging lens 120 which now functions as a lens for camera observation
- beam deflection device 315 and beam splitter cube 321 parallel to main axis 116 in the direction of a camera 340, which in the example for visible light, in particular for green light, has a has high sensitivity.
- a tube 325 is attached in front of the camera, which has a light-absorbing property on the inside and acts as a stray light absorber.
- the optical arrangement is designed in such a way that an image of the processing plane 122 falls onto the photosensitive sensor of the camera 340 with the aid of the imaging objective 120 (and optionally further optical components).
- the camera sensor is therefore in a plane that is optically conjugate to the processing plane 122 .
- the camera 340 is connected to the control unit 190 for signal transmission.
- the beam deflection device 315 has a substrate 117 which is transparent to visible light and is in the form of a flat plate made of quartz glass, for example, whose flat substrate surface facing the laser beam is coated with a dielectric coating.
- This has a highly reflective effect for the UV laser wavelength (degree of reflection R > 99%) and has a relatively high transmission for the green light of the illumination (degree of transmission T more than 20%, eg 50% - 70%).
- the illumination light coming from the workpiece in the observation beam path passes through the beam deflection device 315 in a parallel offset manner.
- the inventors have found that an astigmatic distortion of the image of structural elements on the workpiece can also occur, which can limit the local resolution.
- the reason for this is, among other things, that the rays in the bundle of rays do not all run parallel to one another - one direction "sees" a different plate thickness (X direction) for jet components with different angles of incidence, while the other direction (Y) does not. This causes the image to be distorted in one direction.
- an astigmatism compensation unit 330 that transmits illumination light is mounted between the beam deflection device 315 and the camera 340 in the observation beam path, which is shown in FIG. 3 from the y-direction and in detail figure 3A from the x-direction .
- the astigmatism compensation unit is formed by a plane-parallel transparent plate, which is tilted by 45° with respect to the main axis 116 of the laser processing unit 110 about a tilting axis running parallel to the x-axis.
- the beam deflection device 315 is tilted by 45° about a tilting axis which is parallel to the y-direction, i.e. perpendicular to the tilting axis of the astigmatism
- the arrangement can also be described in such a way that the substrate of the
- Beam deflection device 315 is designed as a plane plate that transmits illumination light, which is at an angle of 45° in the laser beam and thus deflects it by 90°, and that the astigmatism compensation unit has a plane plate 330 that is transparent to illumination light and is at an angle of 45° in the observation beam path , but is arranged rotated by 90° to the substrate 317 of the beam deflection device 315 in the axis of the observation beam path.
- a narrow-band bandpass filter 335 in front of the camera 340 limits the illumination bandwidth used for image generation to approximately ⁇ 5 nm around the central wavelength of the green illumination light, which was already relatively narrow-band before the filtering. As a result of the additional filtering around the central wavelength at the bandpass filter 335, only a relatively small amount of intensity is lost.
- a high-contrast image with a particularly good resolution is thus possible—in the example approximately 2 ⁇ m—although the imaging lens 120 is not diffraction-limited for the green wavelength used and the two thick, translucent plane plates (Beam deflection device and astigmatism compensator) are in the beam path. This means that ambient light and, if necessary, radiation from a laser plasma etc. are also suppressed.
- a workpiece positioning operation can be performed as follows using camera-based observation.
- the workpiece movement system 200 positions a substrate table such that a predetermined actual position should be reached for a predetermined structural element or multiple predetermined structural elements of the workpiece.
- the actual position must be in the detection range or in the object field of the camera 340.
- At least one image of that section of the workpiece which is illuminated by the lighting system and which is in the detection range of the camera is then generated with the aid of the camera.
- the image or images are evaluated using image processing in order to determine position data that represent the actual position of the selected structure element in the detection area.
- the control device 190 includes an evaluation unit 195 for evaluating images by means of image processing.
- a comparison module is also implemented in the evaluation unit (by means of appropriate software), which compares the determined actual position with a predetermined desired position of the structural element. If there is an intolerable deviation in position or position, correction signals or corresponding correction values are generated, which indicate to the workpiece movement system how a correction movement is to be carried out in order to bring the observed structural element to the desired position or to a sufficiently close proximity to it. The workpiece moving system 200 then performs the correction movement of the substrate table.
- the system is programmed in such a way that laser processing by irradiating laser radiation only begins when positioning in the target position (if necessary including the necessary correction movement) has been completed.
- the workpiece is stationary, i.e. it is not moved.
- FIG. 4 it will now be explained by way of example how the achievable local resolution and the positioning accuracy can be further improved by some modifications to the structure of FIG.
- Some elements of the laser processing station 400 that are the same or substantially the same in Fig. 3 and Fig. 4 bear the same reference numbers as in Fig. 3.
- an improvement can be achieved, among other things, if the camera observation is carried out with radiation from the ultraviolet range.
- a camera 440 is used which is sensitive in the ultraviolet wavelength range (UV camera).
- an illumination system 410 is used with an illumination light source 412 operating within this ultraviolet wavelength range.
- an LED with a wavelength of 270 nm can be used as the illumination light source. This wavelength is close enough to the laser wavelength (248 nm) that, for example, the antireflection coatings in the imaging lens 120 are also effective for the illumination radiation.
- a dielectric coating can be provided on the beam deflection device 415, which has a highly reflective effect for 248 nm, while it is already sufficiently transparent (sufficient transmittance) for the illumination wavelengths of 270 nm (cf. reflectivity diagram in Fig. 4B).
- FIG. 5 shows a laser processing station 500 for a laser lift-off operation with a UV camera 540 and the possibility of in-situ observation of the micro-LEDs to be transferred.
- This exemplary embodiment explains how, by using a camera 540 that is sensitive in the ultraviolet wavelength range, the processes in the processing plane 122 can also be observed directly at the laser wavelength used (here 248 nm).
- a dielectric laser deflection mirror is used in the beam deflection device 515, which has a sufficient and defined transmission in the ultraviolet range used (for example at 248 nm).
- this beam deflection mirror can be designed as a physical beam splitter that transmits a small, defined part of the laser radiation on the way from the workpiece 150 to the camera 540 .
- this beam deflection mirror can be designed that, in principle, every dielectric mirror has a residual transmission for the wavelength used, which cannot be avoided due to the principle.
- a dedicated physical beam splitter is preferably used in the beam deflection device, i.e.
- a dielectric coating that has a relatively high, defined degree of reflection for the laser wavelength and at the same time a transmittance that is also defined with high precision for this laser wavelength at the incidence angles that occur (um 45°).
- beam splitters with a transmission in the range from about 0.5% to c. 5% can be used (cf. reflectivity diagram in Fig. 5B).
- Laser processing is particularly efficient and precise when work is carried out step by step and in sectors.
- Such method variants include the generation and storage of a grid of correction values within a measured sector and processing of this sector as soon as possible thereafter. The corrected values are used for the laser processing of the workpiece. Then a next sector is measured and processed accordingly, etc.
- the processing first takes place in a defined section (sector) of the entire traversing range of the various motion systems. This can mean, for example, that a 6-inch wafer is not processed in one step, but that smaller sectors of, for example, 25 x 25 mm 2 or 16 x 16 mm 2 or 22 x 27 mm 2 are processed step by step. Before processing in such a sector, the movement systems in this sector are currently measured and corrected. For image processing, the coordinate table should stand still or move slowly enough so that there is no disturbing motion blur. However, only a grid within the sector is recorded (eg 5 positions in the X direction by 10 positions in the Y direction), not the entire area of the workpiece within the sector and not all machining positions either.
- a grid within the sector is recorded (eg 5 positions in the X direction by 10 positions in the Y direction), not the entire area of the workpiece within the sector and not all machining positions either.
- Images are continuously recorded in the specified grid and the image processing and calculation of the correction values take place in parallel while the images are being recorded at the next positions. During processing, the values between the measured positions are then interpolated. The necessary number of measurement positions depends on the error that occurs and can be adjusted dynamically if necessary.
- a second sector is measured and then processed, so that the measurement and processing always take place in close succession. This means that deviations that only occur during the complete processing can also be corrected. That is, when the fix is done, it will be processed and the switch should happen automatically. If necessary, the operator can be informed and asked for confirmation if unusual, implausible deviations are measured.
- the properties of the laser beams are also decisive on the part of the laser processing unit in order to achieve maximum precision in processing.
- an exact alignment of the mask apertures to the micro LEDs on the donor substrate and an exact adjustment of the position of the image are essential for correct processing.
- FIG. 6 A few options for beam analysis or beam profiling are shown schematically in a single representation with reference to FIG. 6 .
- Some basic components of the laser processing units correspond to those of Fig. 5, including the laser, the mask 107 in the mask plane 108, the beam deflection device 515 and the camera 540, which is sensitive to UV radiation, and the astigmatism compensation unit 530 arranged between this and the beam deflection device.
- components of a camera-based beam analysis system 700 are provided, which are integrated into the laser processing station 600 and are set up to carry out an in situ analysis of beam properties of the laser beam 105 .
- components of a first beam analysis unit 720 and a second beam analysis unit 740 which can be provided as an alternative or in addition to the first beam analysis unit.
- the components of the first analysis group 720 are attached below the processing plane 122 in the extension of the laser beam impinging there, i.e. in the extension of the main axis 116 of the laser processing unit 610, in such a way that the laser beams can hit the beam analysis unit when the substrate table 210 of the movement system 200 is as far laterally as shown procedure is that it no longer blocks the beam path.
- the intensity distribution in the processing plane 122 is imaged onto a flat UV-VIS converter 726 by means of a lens 724 with a suitable imaging scale. This is arranged in a plane that is optically conjugate to the camera sensor of the camera 722 .
- the image of the UV-VIS converter is imaged via a further lens 728 onto the camera chip of the camera 722 (VIS camera), which is sensitive to visible light.
- UV camera a camera sensitive to UV light
- the intermediate UV-VIS converter and the intermediate image using it can then be omitted.
- the camera 722 is step-and-repeat in steps parallel to the processing plane 122 (ie parallel to the xy plane) in different measurement positions over the irradiated area of the processing plane emotional. Individual images are recorded in each case. The individual images are combined by software to form an image of the complete mask and evaluated using image processing.
- An advantage of this variant is that the complete beam path from the laser to the processing level 122 is included in the diagnosis and accordingly any error in one of the components from the laser to the processing level can be detected. In addition, there are no more components in the area after the processing level, ie in the first analysis group 720, than are absolutely necessary for the measurement.
- the camera positioning for the beam analysis can be measured and corrected using a high-precision lithographic mask structure, which is imaged in the processing position in the processing plane 122 with the aid of the laser system or laser processing unit 610 .
- positioning errors can be determined and corrected using image processing based on the errors in the image of the mask in the border area between the individual images.
- the components of the beam analysis system 720 can be mounted on the positioning device 200 or outside of the substrate holder 210 or on a separate positioning unit.
- the precise positioning of the beam analysis system in the sub-pm range is the prerequisite for the exact composition of the individual images and thus the correct analysis of the laser beam in the processing plane 122. Fine calibration of the positioning is therefore very important in this area.
- a second beam analysis unit 740 can be provided. Its components are arranged in a straight extension of the laser beams 105 behind the beam deflection device 515 acting as a beam splitter. The optical axis of the second beam analysis unit 740 is perpendicular to the main axis 116 of the laser processing unit.
- the structure with camera 742, optional imaging lens 748, optional UV-VIS converter 746 and lens 744 is analogous to corresponding components of the first beam analysis unit 720.
- An astigmatism compensation unit 745 with an inclined flat plate similar to the astigmatism compensation unit 530 is inserted in beam deflection device 515, since the laser beam incident on the second beam analysis unit 740 has passed through the inclined flat plate of beam deflection device 515 and has experienced astigmatic changes that are to be compensated.
- One advantage of the second beam analysis unit 740 is that it can also be used during laser processing to monitor the laser beams and/or the mask 107, for example for quality assurance.
- a disadvantage is that any defects in the imaging lens 520 could not be detected with the second beam analysis unit.
- the structure with UV camera 540 that is also present in other exemplary embodiments also allows a beam analysis or beam profiling to be carried out.
- an auxiliary substrate that scatters strongly and uniformly can be brought into the processing plane 122 .
- the energy distribution on this highly scattering plane is then imaged into camera 540 .
- An alternative method of beam profiling is possible if a plane mirror is brought into the processing plane 122.
- a UV-VIS converter can also be used in combination with a VIS camera.
- Beam diagnosis including measurement and, if necessary, correction of the position of the mask apertures, is an important part of the measures that can be taken to ensure the highest possible overall processing accuracy.
- FIG. 7 schematically shows an exemplary embodiment of a laser processing station 750 that is equipped with components of a shadow image analysis system 800, which can also be referred to as a shadowgraphy system 800.
- a shadow image analysis system 800 which can also be referred to as a shadowgraphy system 800. This allows fast processes to be observed in situ, i.e. during the laser processing, in the area of the processing zone 106, i.e. there where laser radiation impinges on the workpiece 150 and interacts with it.
- the shadowgraphy system has a short-pulse light source or flash light source 810, which can emit very short light pulses (typical length down to 30 ns to 100 ns) of sufficient intensity.
- LEDs are provided, which can provide the necessary brightness of the lighting pulses through high current (possibly more than 100 A) during the short exposure time.
- the short illumination light pulses can be triggered by the laser pulses from the laser processing unit 760 .
- control unit 190 contains a delay unit that makes it possible to emit light pulses only after predetermined delay times after a laser pulse, in order to be able to observe the processes during the detachment of a die within a short time after the laser pulse strikes.
- a collector diaphragm 812 Downstream of the short-pulse light source 810 are a collector diaphragm 812 and a collector lens 814 of the shadowgraphy illumination.
- the illumination beam path emanating from the light source initially runs obliquely to the processing plane 122, for example at an angle of 20° to 50° to it, so that the short-pulse light source and the downstream components can be placed relatively close to the processing zone without touching the workpiece collide.
- a first deflection mirror 822 of a mirror system 825 is arranged between the short-pulse light source and the processing zone.
- the mirror element is wedge-shaped and thus allows the end edge of the deflection mirror near the processing zone to be arranged at a very small distance from the processing plane. The distance can be between 50 pm and 200 pm, for example.
- the mirror system 825 On the side opposite the first deflection mirror 822, the mirror system 825 has a second deflection mirror 824, which can be arranged mirror-symmetrically to the first deflection mirror 822 with respect to the main axis 116 of the laser processing unit to a camera 830.
- a second deflection mirror 824 can be arranged mirror-symmetrically to the first deflection mirror 822 with respect to the main axis 116 of the laser processing unit to a camera 830.
- a suction device 840 is used to suck detached particles out of the processing zone.
- a camera 830 for capturing shadow images of the processing zone is provided on the side opposite the short-pulse light source.
- the optical axis of the camera is oriented at an angle to the processing plane (angle between 30° and 60°, for example). Due to the oblique orientation, the camera 830 can be brought very close to the processing zone without colliding with the workpiece.
- a lens 832 for imaging the detached die onto the chip of the camera is arranged between the camera and the deflection mirror.
- the shadow cast image analysis system 800 can be configured in such a way that, triggered by laser pulses from the laser 112, images with a large number of illumination pulses offset in time are generated and evaluated.
- the system is designed to observe particles with typical sizes between 3 pm and 30 pm.
- the multiple exposure allows the trajectory to be tracked in such a way that the particle or the micro-LED can be seen multiple times in the captured images, namely at different times and in different positions.
- particles with speeds of up to 8 m/s (80 m/s with clear motion blur) could be observed and their trajectories recorded and analyzed.
- a repair process or repair process can be implemented, for example, as follows.
- the display 150 (workpiece 150) to be examined is controlled, measured and each pixel or each micro-LED is evaluated. Micro-LEDs that remain dark, for example, or whose luminance is outside the specification are considered defective.
- a table or matrix is generated in which the positions of all defective dies are identified.
- An arithmetic unit of the control unit 190 calculates movements or a contour across the display that connects the positions of all defective pixels. This contour is traversed successively by controlling the movement system. Laser pulses are triggered at the respective positions of defective dies. In the process, the die 159 detaches itself from the display substrate, is accelerated and reaches the suction device 840. This results in empty spaces at the positions of the defective dies, which are fitted with new dies. There is therefore no stacking of new (defect-free) dies on top of remaining defective dies.
- the shadowgraphy system enables these process steps to be observed and controlled.
- the realization of a 100% inspection is made possible, among other things, by the mirror system 825, whose components close to the workpiece are positioned at a distance of, for example, approx to the imaging lens 120 of the laser processing unit configured for a LIFT process.
- a solution with a relatively low optical resolution can be used to make a larger area of the processing zone visible and to allow observation of the processing zone while the assembled display substrate is moved using the movement system 200 under the laser processing unit 760 is moved.
- it can be clarified whether a die has been detached and accelerated, and a new laser pulse can be triggered if this is not the case.
- the observation also makes it possible to determine whether the defective dies have safely entered the suction 840, otherwise a note can be made in the error log.
- the use of a shadow image analysis in the context of repair processes, for example in the manufacture of micro-LED displays, can thus help to produce practically error-free displays.
- a repair can also be carried out on a transfer substrate. This can be beneficial because there is no risk of damaging the backplane.
- a modern 8K display contains around 100 million micro LEDs.
- yield loss the so-called "yield loss” which is then significantly reduced when production is ramped up as part of a learning curve.
- a finished display may contain a few thousand defective pixels.
- repair processes are carried out to exchange these defective elements. The defective elements are first removed again. This can be done efficiently with a LIFT process. Even if the process is completely established, repair processes will probably be a useful addition to the production process in the long term.
- FIG. 8 Another possible use of the shadow impact image analysis within the framework of LIFT processes is explained with reference to FIG. 8 .
- the components of the shadow image analysis system 800 have the same reference numbers as the corresponding components in FIG. 7 for reasons of clarity.
- the mirror system is missing.
- the short-pulse light source 810 and the camera 830 mounted on the opposite side have coaxial optical axes that are perpendicular to the main axis of the laser processing unit 760 so that the illumination beam path of the shadow cast image analysis system is in front of and behind the Processing zone runs parallel to the processing plane 122.
- the arrangement can be used for high-resolution shadowgraphy during a LIFT operation to optimize the laser parameters.
- the observation runs parallel to the sample surface without a mirror. Observation is possible starting immediately with the detachment from the donor surface, since the illuminating light is practically no distance from the sample surface. High resolution observation can be achieved by allowing only a few centimeters between the short pulse light source 810 and the camera 830 on the acquisition side.
- the observable area can be relatively small, suitably the design can be such that the observable area is only slightly larger than the maximum donor-acceptor distance. In most cases, an observation of a distance of a maximum of 500 pm, possibly also significantly less, for example down to 100 pm or below, is sufficient.
- the detached die can only be observed from this position.
- a further development of the shadow image analysis system 900 shown in FIG. 9 is configured to observe the area from the sample surface to a height of approximately 500 ⁇ m.
- the radiation from the short-pulse light source 910 is directed at a flat angle (e.g. 10° to 30°) onto the sample surface (workpiece surface) in the area of the processing zone 106, so that the relatively well reflecting sample surface acts as a deflection mirror.
- the deflection mirror 924 arranged behind the processing zone on the side of the camera 930 is tilted slightly downwards (compared to the deflection mirror 824) so that the dies in the processing zone are visible in the lower area of the camera image.
- the radiation from the short-pulse light source 910 is now deflected from the sample surface onto the deflection mirror 924 of the camera and then imaged onto the chip of the camera 930.
- the shadowgraphy beam path no longer runs exactly parallel to the sample surface, but the entire area, starting with the sample surface, can be monitored with only slight distortion of the image. In this way, the process of detaching the die from the sample surface can also be visualized and evaluated.
- the laser parameters can be set in such a way that the particles to be detached (dies, pLEDs or the like) fly parallel to one another to the acceptor essentially without rotating or lateral offset in order to ensure the required accuracy.
- the observation of the flight behavior can depend on laser parameters as well as on the nature of the EPI wafer and others parameters. Observation within a narrow strip is usually sufficient for this.
- the shadow image analysis can be used to identify those parameters that ensure a high-quality LIFT process.
- the setup can be used for random checks of the production process to identify any quality problems.
- the inventors have performed extensive analysis and consideration of potential errors.
- the error analysis shows that the total of all errors to be considered should remain below approx. 1.5 pm if the currently foreseeable maximum machining accuracy is to be achieved.
- the width of the streets between the pLEDs can be regarded as a guideline value as the maximum tolerable error, since the adjacent pLED at the edge would also be irradiated with an even larger error.
- the edge steepness of the image ie the area at the limit of the mask aperture in which the laser energy drops from 90% to 10%, still has to be subtracted from this maximum tolerable error. This depends on the properties of the lens used and can be 1.6 pm, for example. If the width of the streets is e.g.
- Additional measures may be useful to further increase the processing precision.
- a correction of the pixel sensitivity can be useful here.
- a correction can be achieved, for example, by measuring the same area of known intensity of the laser beam several times with different pixels by step-by-step displacement on the camera and then compensating for the differences.
- laser stability can also play a role. Small differences between the individual pulses can occur.
- An increase in accuracy can be achieved by averaging using a suitable filter.
- Image wandering caused by heating can be suppressed or avoided, for example, by using intermittent illumination instead of continuous illumination, eg via pulse width modulation in the illumination.
- Another solution provides for an additional, possibly to use a higher-resolution off-axis camera system with lighting, which is spatially arranged next to the processing lens. The observation then takes place before or after the processing.
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Plasma & Fusion (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Chemical & Material Sciences (AREA)
- Robotics (AREA)
- Laser Beam Processing (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020237041101A KR20240001716A (ko) | 2021-04-29 | 2022-04-26 | 미세구조 컴포넌트를 생산하는 방법 및 시스템 |
EP22725764.9A EP4329977A2 (de) | 2021-04-29 | 2022-04-26 | Verfahren und system zur herstellung mikrostrukturierter komponenten |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102021204313.5A DE102021204313A1 (de) | 2021-04-29 | 2021-04-29 | Verfahren und System zur Herstellung mikrostrukturierter Komponenten |
DE102021204313.5 | 2021-04-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2022229164A2 true WO2022229164A2 (de) | 2022-11-03 |
WO2022229164A3 WO2022229164A3 (de) | 2022-12-29 |
Family
ID=81850061
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2022/061015 WO2022229164A2 (de) | 2021-04-29 | 2022-04-26 | Verfahren und system zur herstellung mikrostrukturierter komponenten |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP4329977A2 (de) |
KR (1) | KR20240001716A (de) |
DE (1) | DE102021204313A1 (de) |
TW (1) | TW202247508A (de) |
WO (1) | WO2022229164A2 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115841969A (zh) * | 2022-12-12 | 2023-03-24 | 江苏宜兴德融科技有限公司 | 一种半导体器件激光钝化设备及钝化方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3842769B2 (ja) * | 2003-09-01 | 2006-11-08 | 株式会社東芝 | レーザ加工装置、レーザ加工方法、及び半導体装置の製造方法 |
JP2006315031A (ja) * | 2005-05-12 | 2006-11-24 | Sony Corp | レーザ加工装置及びレーザ加工方法 |
GB0524366D0 (en) | 2005-11-30 | 2006-01-04 | Gsi Group Ltd | Laser processing tool |
WO2008118365A1 (en) * | 2007-03-22 | 2008-10-02 | General Lasertronics Corporation | Methods for stripping and modifying surfaces with laser-induced ablation |
US8056222B2 (en) | 2008-02-20 | 2011-11-15 | The United States Of America, As Represented By The Secretary Of The Navy | Laser-based technique for the transfer and embedding of electronic components and devices |
CN102714150B (zh) * | 2009-12-07 | 2016-01-20 | Ipg微系统有限公司 | 激光剥离系统及方法 |
JP2013123721A (ja) | 2011-12-13 | 2013-06-24 | Olympus Corp | 欠陥修正装置、欠陥修正方法および欠陥修正プログラム |
JP6390898B2 (ja) * | 2014-08-22 | 2018-09-19 | アイシン精機株式会社 | 基板の製造方法、加工対象物の切断方法、及び、レーザ加工装置 |
JP6875177B2 (ja) | 2017-04-03 | 2021-05-19 | タカノ株式会社 | レーザー照射装置、及び、素子の生産方法 |
WO2019090245A1 (en) | 2017-11-06 | 2019-05-09 | Alltec Angewandte Laserlight Technologie GmbH | Laser marking through the lens of an image scanning system |
-
2021
- 2021-04-29 DE DE102021204313.5A patent/DE102021204313A1/de active Pending
-
2022
- 2022-04-26 WO PCT/EP2022/061015 patent/WO2022229164A2/de active Application Filing
- 2022-04-26 KR KR1020237041101A patent/KR20240001716A/ko unknown
- 2022-04-26 EP EP22725764.9A patent/EP4329977A2/de active Pending
- 2022-04-29 TW TW111116326A patent/TW202247508A/zh unknown
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115841969A (zh) * | 2022-12-12 | 2023-03-24 | 江苏宜兴德融科技有限公司 | 一种半导体器件激光钝化设备及钝化方法 |
CN115841969B (zh) * | 2022-12-12 | 2023-09-08 | 江苏宜兴德融科技有限公司 | 一种半导体器件激光钝化设备及钝化方法 |
Also Published As
Publication number | Publication date |
---|---|
KR20240001716A (ko) | 2024-01-03 |
WO2022229164A3 (de) | 2022-12-29 |
DE102021204313A1 (de) | 2022-11-03 |
EP4329977A2 (de) | 2024-03-06 |
TW202247508A (zh) | 2022-12-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP3838472B1 (de) | Ablenkeinheit mit zwei fenstern, einem optischen element und einer xy-ablenkvorrichtung | |
DE3114682C2 (de) | ||
DE3318980C2 (de) | Vorrichtung zum Justieren beim Projektionskopieren von Masken | |
EP1618426A1 (de) | Verfahren und anordnung zur bestimmung der fokusposition bei der abbildung einer probe | |
EP0527166A1 (de) | Belichtungsvorrichtung. | |
DE102016203990A1 (de) | Verfahren zum Herstellen eines Beleuchtungssystems für eine EUV-Projektionsbelichtungsanlage, Beleuchtungssystem und Messverfahren | |
DE3427611A1 (de) | Laserstrahl-lithograph | |
WO2011091900A2 (de) | Facettenspiegel zum einsatz in der mikrolithografie | |
DE1919991A1 (de) | Venfahren zur automatischen Ausrichtung von zwei aufeinander einzujustierenden Objekten | |
DE102011077223B4 (de) | Messsystem | |
DE112017000543T5 (de) | Laserstrahl-bestrahlungsvorrichtung | |
EP1116932A2 (de) | Messgerät und Verfahren zun Vermessen von Strukturen auf einem Substrat | |
DE102008040742A1 (de) | Verfahren und Vorrichtung zur Überwachung von Mehrfachspiegelanordnungen, optische Anordnung mit einer derartigen Vorrichtung sowie mit einer zweiten Mehrfachspiegelanordnung zum Ein- und Ausschalten einer ersten Mehrfachspiegelanordnung sowie Beleuchtungsoptik für eine Projektionsbelichtungsanlage mit einer derartigen Vorrichtung | |
DE3910048C2 (de) | ||
WO2022229164A2 (de) | Verfahren und system zur herstellung mikrostrukturierter komponenten | |
DE102010063337B9 (de) | Verfahren zur Maskeninspektion sowie Verfahren zur Emulation von Abbildungseigenschaften | |
EP3204825B1 (de) | Optisches system zur lithografischen strukturerzeugung | |
WO2018113918A1 (de) | Vorrichtung und verfahren zur belichtung einer lichtempfindlichen schicht | |
DE102007000981A1 (de) | Vorrichtung und Verfahren zum Vermessen von Strukturen auf einer Maske und zur Berechnung der aus den Strukturen resultierenden Strukturen in einem Photoresist | |
WO2015052323A1 (de) | Facettenelement mit justagemarkierungen | |
WO2014060271A1 (de) | Vorrichtung zur beleuchtung einer probe mit einem lichtblatt | |
DE112019003425T5 (de) | Laserbearbeitungsvorrichtung | |
DE102020126267A1 (de) | Vorrichtung zum Erzeugen einer Laserlinie auf einer Arbeitsebene | |
DE112019007690T5 (de) | Elektronenkanone und elektronenstrahlvorrichtung | |
DE102008006438A1 (de) | Verfahren und Vorrichtung zum Strukturieren eines strahlungsempfindlichen Materials |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 22725764 Country of ref document: EP Kind code of ref document: A2 |
|
ENP | Entry into the national phase |
Ref document number: 20237041101 Country of ref document: KR Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2022725764 Country of ref document: EP |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
ENP | Entry into the national phase |
Ref document number: 2022725764 Country of ref document: EP Effective date: 20231129 |