WO2022222280A1 - Rotary ultrasonic grinding machine tool and application - Google Patents
Rotary ultrasonic grinding machine tool and application Download PDFInfo
- Publication number
- WO2022222280A1 WO2022222280A1 PCT/CN2021/104863 CN2021104863W WO2022222280A1 WO 2022222280 A1 WO2022222280 A1 WO 2022222280A1 CN 2021104863 W CN2021104863 W CN 2021104863W WO 2022222280 A1 WO2022222280 A1 WO 2022222280A1
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- Prior art keywords
- ultrasonic
- grinding
- grinding wheel
- ball screw
- axis ball
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- 238000000034 method Methods 0.000 claims abstract description 20
- 238000003754 machining Methods 0.000 claims abstract description 12
- 230000005540 biological transmission Effects 0.000 claims abstract description 8
- 230000007704 transition Effects 0.000 claims abstract description 3
- 230000033001 locomotion Effects 0.000 claims description 90
- 239000000463 material Substances 0.000 claims description 15
- 230000008569 process Effects 0.000 claims description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 7
- 229910052802 copper Inorganic materials 0.000 claims description 7
- 239000010949 copper Substances 0.000 claims description 7
- 229910003460 diamond Inorganic materials 0.000 claims description 7
- 239000010432 diamond Substances 0.000 claims description 7
- 239000003082 abrasive agent Substances 0.000 claims description 4
- 238000005452 bending Methods 0.000 claims description 3
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 230000003321 amplification Effects 0.000 claims 1
- 238000003199 nucleic acid amplification method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 238000005219 brazing Methods 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000013406 biomanufacturing process Methods 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000007730 finishing process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 239000011156 metal matrix composite Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/20—Drives or gearings; Equipment therefor relating to feed movement
Definitions
- the invention belongs to the technical field of ultrasonic precision machining of hard and brittle materials, in particular to a rotary ultrasonic grinding machine tool and its application.
- Hard and brittle materials such as metal matrix composites, ceramic materials, cemented carbides, and semiconductor materials are widely used in aerospace, biomanufacturing, microelectronics manufacturing and other fields because of their excellent mechanical, physical and chemical properties.
- hard and brittle materials are difficult-to-machine materials, and there are problems such as poor machining performance, low machining efficiency, poor machining surface quality, easy cracks and edge chipping, etc., resulting in high machining costs, which is not conducive to the popularization and use of these materials.
- Rotary ultrasonic grinding technology is an effective composite finishing process for hard and brittle materials. Compared with traditional grinding, it has the advantages of reducing grinding force and grinding heat, reducing processing damage, improving processing efficiency and precision, and prolonging the life of abrasive tools. As a special energy-carrying machining method, rotary ultrasonic grinding has opened up a new way for precision machining of hard, brittle and difficult-to-machine material parts, and has broad application prospects.
- Rotary ultrasonic grinding technology equipment is the key to the rotary ultrasonic grinding process system, and its performance directly affects the processing quality and performance of hard and brittle materials.
- small grinding wheels or grinding heads are mostly used, which restricts the improvement of ultrasonic grinding efficiency.
- Ultrasonic grinding tools for hard and brittle materials Parallel grinding wheels, cup grinding wheels, and internal grinding wheels are large-loaded tools.
- the design of such a large-load rotary ultrasonic machining resonance system lacks systematic and effective theoretical methods, and lacks large-scale production and application.
- Loaded rotating ultrasonic grinding wheel resonant spindle and rotating ultrasonic grinding machine restrict the popularization and application of ultrasonic grinding technology for hard, brittle and difficult-to-machine materials.
- the invention patent with the application number ZL201810387090.2 proposed an ultrasonic vibration grinding machine in 2018, which consists of a base, a worktable, a workpiece clamping mechanism and an ultrasonic vibration grinding mechanism.
- the grinding wheel drive motor is connected with the grinding wheel and is jointly arranged on the sliding plate.
- the ultrasonic motor drives the eccentric shaft resonance box as an ultrasonic vibration generating device, which excites the sliding plate to vibrate, and finally drives the grinding wheel to realize ultrasonic vibration grinding.
- the ultrasonic excitation route of the grinding wheel is long and the load is large, and the actual production application is difficult to implement.
- the invention patent with the application number ZL201911287513.4 proposed an ultrasonic grinding spindle in 2019.
- the device is supported by bearings at the node position of the ultrasonic horn, and is directly connected to the grinding wheel at the front end of the ultrasonic horn adjacent to the node.
- the vibration of the outer surface of the grinding wheel is the largest, thereby improving the ultrasonic grinding performance.
- the rigidity and rotation accuracy of the cutting spindle are improved, and the joints do not generate heat, and the overall structure design is reasonable and compact. But it does not involve the installation arrangement of the ultrasonic grinding spindle in the rotary ultrasonic grinding machine and the technological application of the ultrasonic grinding of parts.
- the invention patent with the application number ZL201810864416.6 proposed an ultrasonic-assisted grinding device and its application in 2018.
- the ultrasonic-assisted grinding system consists of a sleeve, a transducer, a horn, a grinding wheel, and a tool holder. It can be used as a general accessory and can be installed on the spindle of a vertical machining center through a standard tool holder to complete the ultrasonic grinding process.
- the disadvantage is that the ultrasonic excitation route of the grinding wheel is long, and the tool shank and the sleeve are assembled structures, which affect the rigidity and accuracy of the ultrasonic-assisted grinding system. And can only be used as a machine tool spindle attachment to expand the processing capacity of existing machine tools. It cannot be used as the main shaft of the grinding machine to realize the ultrasonic grinding of different surface structures of parts.
- the present invention provides a rotary ultrasonic grinding machine tool and its application.
- a rotary ultrasonic grinding spindle includes a grinding wheel, the grinding wheel is mounted on the output end of a horn, a horn flange is arranged in the middle of the horn, and the horn flange is connected to a hollow sleeve.
- the end face of the horn is connected, the big end mandrel of the horn extends into the hollow sleeve and is connected to the output end face of the transducer, a copper sheet is arranged on the transducer, and the outer surface of the transducer is connected.
- a positioning flange is arranged in the middle, and the transducer is connected with the inner surface of the hollow sleeve by transition fit through the positioning flange, the hollow sleeve is installed in the support, and the end of the hollow sleeve is connected with the shaft coupling Spindle connection.
- two high-speed precision angular contact ball bearings are arranged between the outer surface of the hollow sleeve and the inner surface of the support, and bearing positioning steps are arranged at both ends of the first step of the hollow sleeve for pairing.
- the inner end face of the inner ring of the high-speed precision angular contact ball bearing is positioned, and two inner cylindrical surface positioning steps are arranged on the inner surface of the support for positioning the inner end face of the outer ring of the high-speed precision angular contact ball bearing.
- a left end cover is installed on the left end of the support through a bolt fixing assembly, and the inner ring surface of the left end cover is in close contact with the outer end surface of the outer ring of the left high-speed precision angular contact ball bearing, at the right end of the support
- a right end cover is installed through the bolt fixing assembly, and a positioning sleeve is arranged between the right end cover and the right high-speed precision angular contact ball bearing, and the left and right end surfaces of the positioning sleeve are respectively connected with the right side of the high-speed precision angular contact ball bearing.
- the outer end surface of the outer ring is in close contact with the inner ring surface of the right end cap.
- the horn flange is connected with the end face of the hollow sleeve through a screw fixing assembly, a matching ring is provided on the right side of the horn flange, and the outer circumferential surface of the matching ring is connected to the The inner surfaces of the hollow sleeves are in contact.
- the grinding wheels are classified into parallel grinding wheels, cup grinding wheels or internal grinding grinding wheels according to their shapes.
- the grinding wheels are classified into electroplated diamond grinding wheels, electroplated CBN grinding wheels, brazed diamond grinding wheels and brazed CBN grinding wheels according to abrasives.
- a rotary ultrasonic grinding machine tool is composed of four parts: a rotary ultrasonic grinding spindle, an ultrasonic power transmission device, a spindle clamping and lifting device, and a parts clamping and feeding device;
- the ultrasonic power transmission device includes an ultrasonic generator, an outer insulated wire and an inner insulated wire, the ultrasonic generator is installed on the upper surface of the support, one end of the outer insulated wire is connected to the output end of the ultrasonic generator, and the The other end of the outer insulated wire is connected to the outer ring of the conductive slip ring, the conductive slip ring is installed on the second step at the rear of the hollow sleeve, and one end of the inner insulated wire is connected to the inner ring of the conductive slip ring , the other end of the inner insulated wire is connected with the copper sheet on the transducer;
- the main shaft clamping and lifting device includes a Z-axis ball screw motion pair, a column and a control panel.
- the Z-axis ball screw motion pair is installed on the column, and is on the slider platform of the Z-axis ball screw motion pair.
- a support is installed on it, and the control panel is installed on the side of the column;
- the parts clamping and feeding device includes a base, an X-axis ball screw motion pair, a Y-axis ball screw motion pair, a T-slot platform and a machine tool fixture, and the X-axis ball screw motion pair is installed on the base,
- the Y-axis ball screw motion pair is installed on the slider platform of the X-axis ball screw motion pair
- the T-slot platform is installed on the slider platform of the Y-axis ball screw motion pair
- the machine tool fixture is installed on a T-slot platform.
- the specific application method is as follows: install the rotating ultrasonic grinding spindle on the slider platform of the Z-axis ball screw motion pair, clamp the workpiece on the machine tool fixture, input commands on the control panel, and control the parts clamping and clamping.
- the feeding device clamps the workpiece to realize the feeding movement in the horizontal direction, and controls the Z-axis ball screw motion pair to drive the rotating ultrasonic grinding spindle to realize the feeding movement along the vertical direction of the column.
- the electric spindle starts to rotate, driving the hollow sleeve to rotate.
- the hollow sleeve transmits the torque to the horn, and the horn then drives the grinding wheel to rotate, and the grinding wheel contacts the workpiece for grinding;
- the inner insulated wire is transmitted to the transducer, and the transducer converts the ultrasonic electrical signal into a mechanical wave.
- the mechanical wave is transmitted and amplified through the horn, so that the grinding wheel generates ultrasonic mechanical vibration along the axial direction on the basis of the rotary motion. Ultrasonic precision grinding of workpieces.
- the ultrasonic vibration mode and the specific feeding mode of the grinding wheel are as follows:
- the grinding wheel When the grinding wheel is a parallel grinding wheel and performs rotary ultrasonic grinding, the grinding wheel performs ultrasonic pitch-circular transverse bending ultrasonic vibration while rotating, and the grinding wheel also performs feed motion along the Z-axis, and the X-axis ball screw motion pair drives the Y-axis.
- the axis ball screw motion pair moves back and forth, and at the same time, the Y axis ball screw motion pair drives the machine tool fixture to move left and right, thereby realizing the feed movement of the workpiece in the horizontal plane;
- the grinding wheel When the grinding wheel is a cup-shaped grinding wheel, when the rotary ultrasonic grinding process is performed, the grinding wheel performs ultrasonic axial ultrasonic vibration while rotating. At the same time, the grinding wheel also performs feed motion along the Z axis, and the X-axis ball screw motion pair drives the Y-axis balls. The screw motion pair moves back and forth, and at the same time, the Y-axis ball screw motion pair drives the machine tool fixture to move left and right, thereby realizing the feed movement of the workpiece in the horizontal plane;
- the grinding wheel When the grinding wheel is an internal grinding wheel, and the rotary ultrasonic grinding process is performed, the grinding wheel performs ultrasonic axial ultrasonic vibration while rotating, and the grinding wheel also performs feed motion along the Z axis, and the X-axis ball screw motion pair drives the Y The axis ball screw motion pair moves back and forth, and at the same time, the Y-axis ball screw motion pair drives the machine tool fixture to move left and right, thereby realizing the feed movement of the workpiece in the horizontal plane.
- the present invention has the following advantages:
- the grinding spindle is directly driven by the electric spindle, and different resonance modes are adopted in combination with different structural characteristics of the grinding wheel.
- Brazed diamond and brazed CBN abrasives can ultrasonically grind hard and brittle materials, improve grinding efficiency, reduce grinding force, grinding heat, reduce grinding burns, improve parts processing quality, and prolong grinding wheel life.
- Fig. 1 is the structural representation of the rotating ultrasonic grinding spindle of the present invention
- Fig. 2 is the sectional view of the rotating ultrasonic grinding spindle of the present invention
- Fig. 3 is the partial enlarged view of circle A in Fig. 2 of the present invention.
- Fig. 4 is the exploded view of the rotating ultrasonic grinding spindle of the present invention.
- Fig. 5 is the structural representation of the horn of the present invention.
- Fig. 6 is the structural representation of the hollow sleeve of the present invention.
- Fig. 7 is the structural schematic diagram of the transducer of the present invention.
- FIG. 8 is a schematic structural diagram of the right end cap of the present invention.
- Fig. 9 is the structural schematic diagram of the machine tool of the present invention.
- Fig. 10 is the structural schematic diagram of the machine tool of the present invention.
- FIG. 11 is a perspective view showing the combined movement direction of the rotating ultrasonic grinding process of the parallel grinding wheel of the present invention.
- FIG. 12 is a perspective view showing the combined motion direction of the rotary ultrasonic grinding process of the cup-shaped grinding wheel of the present invention.
- FIG. 13 is a schematic diagram of an auxiliary rotary ultrasonic grinding process for the cup-shaped grinding wheel of the present invention.
- FIG. 14 is a perspective view of the combined motion direction of the rotary ultrasonic grinding process of the internal grinding wheel of the present invention.
- a rotary ultrasonic grinding spindle includes a grinding wheel 101 , the grinding wheel 101 is installed at the output end of the horn 103 , and a horn method is arranged in the middle of the horn 103 A flange 104, the horn flange 104 is connected with the end face of the hollow sleeve 106 through a screw fixing assembly, a matching ring 105 is provided on the right side of the horn flange 104, and the outer surface of the matching ring 105 is The circumferential surface is in contact with the inner surface of the hollow sleeve 106 , and the large end mandrel of the horn 103 extends into the hollow sleeve 106 and is connected to the output end surface of the transducer 107 .
- a copper sheet 108 is arranged on the upper part, and a positioning flange 109 is arranged in the middle of the outer surface of the transducer 107.
- the transducer 107 is connected with the inner surface of the hollow sleeve 106 through the positioning flange
- the end of the hollow sleeve 106 is connected to the motorized spindle 112 through the coupling 111 , the hollow sleeve 106 is installed in the support 102 , and two holes are arranged between the outer surface of the hollow sleeve 106 and the inner surface of the support 102 .
- a high-speed precision angular contact ball bearing 116 is provided, and bearing positioning steps 117 are provided at both ends of the first step of the hollow sleeve 106 for positioning the inner end face of the inner ring of the high-speed precision angular contact ball bearing 116, Two inner cylindrical surface positioning steps 118 are provided on the inner surface of the support 102 for positioning the inner end surface of the outer ring of the high-speed precision angular contact ball bearing 116, and the assembly is fixed at the left end of the support 102 by bolts 119 is installed with a left end cover 120, the inner ring surface of the left end cover 120 is in close contact with the outer end surface of the outer ring of the left high-speed precision angular contact ball bearing 116, and a bolt fixing assembly 119 is installed on the right end of the support 102.
- the right end cover 113 is provided with a positioning sleeve 121 between the right end cover 113 and the right high-speed precision angular contact ball bearing 116.
- the outer end surface of the outer ring is in close contact with the inner ring surface of the right end cap 113 .
- the grinding wheel 101 is divided into parallel grinding wheel, cup grinding wheel or internal grinding wheel according to the shape, and the grinding wheel 101 is divided into electroplating diamond grinding wheel, electroplating CBN grinding wheel, brazing diamond grinding wheel and brazing CBN grinding wheel according to the abrasive material.
- a rotary ultrasonic grinding machine is composed of four parts: a rotary ultrasonic grinding spindle 1, an ultrasonic power transmission device 2, a spindle clamping and lifting device 3, and a parts clamping and feeding device 4;
- the ultrasonic power transmission device 2 includes an ultrasonic generator 201, an outer insulated wire 202 and an inner insulated wire 203.
- the ultrasonic generator 201 is installed on the upper surface of the support 102.
- One end of the outer insulated wire 202 is connected to the ultrasonic generator.
- the output end of 201 is connected, and the other end of the outer insulated wire 202 is connected to the outer ring of the conductive slip ring 204.
- the conductive slip ring 204 is installed on the second step at the rear of the hollow sleeve 106.
- One end of the insulated wire 203 is connected to the inner ring of the conductive slip ring 204, and the other end of the inner insulated wire 203 is connected to the copper sheet 108 on the transducer 107;
- the main shaft clamping and lifting device 3 includes a Z-axis ball screw motion pair 301, a column 302 and a control panel 303.
- the Z-axis ball screw motion pair 301 is installed on the column 302, and the Z-axis ball screw A support 102 is installed on the slider platform of the motion pair 301, and the control panel 303 is installed on the side of the column 302;
- the parts clamping and feeding device 4 includes a base 401, an X-axis ball screw motion pair 402, a Y-axis ball screw motion pair 403, a T-slot platform 404 and a machine tool fixture 405.
- the X-axis ball screw moves The pair 402 is installed on the base 401, the Y-axis ball screw movement pair 403 is installed on the slider platform of the X-axis ball screw movement pair 402, and the T-slot platform 404 is installed on the Y-axis ball screw movement pair On the slider platform of 403 , the machine tool fixture 405 is installed on the T-slot platform 404 .
- An application of a rotary ultrasonic grinding machine tool for machining hard and brittle material parts is: install the rotary ultrasonic grinding spindle 1 on the slider platform of the Z-axis ball screw motion pair 301, and clamp the workpiece. Hold it on the machine tool fixture 405, input commands on the control panel 303, control the parts clamping and feeding device 4 to clamp the workpiece to realize the feeding movement in the horizontal direction, and control the Z-axis ball screw motion pair 301 to drive the rotary ultrasonic grinding.
- the main shaft 1 realizes the feeding movement along the vertical direction of the column 302, the electric main shaft 112 starts to rotate, and drives the hollow sleeve 106 to rotate, the hollow sleeve 106 transmits the torque to the horn 103, and the horn 103 further drives the grinding wheel 101 to rotate
- the grinding wheel 101 is in contact with the workpiece for grinding; at the same time, the ultrasonic signal output by the control ultrasonic generator 201 is transmitted to the transducer 107 through the outer insulated wire 202, the conductive slip ring 204 and the inner insulated wire 203, and the transducer 107 will The ultrasonic electrical signal is converted into a mechanical wave, and the mechanical wave is transmitted and amplified by the horn 103, so that the grinding wheel 101 generates ultrasonic mechanical vibration along the axial direction on the basis of the rotary motion, and realizes the ultrasonic precision grinding of the workpiece.
- the ultrasonic vibration mode and the specific feeding mode of the grinding wheel 101 are as follows:
- the grinding wheel 101 When the grinding wheel 101 is a parallel grinding wheel and performs rotary ultrasonic grinding, the grinding wheel 101 performs ultrasonic pitch-circular transverse bending ultrasonic vibration while rotating, and at the same time, the grinding wheel 101 also performs feed motion along the Z axis, and the X axis ball screw moves
- the pair 402 drives the Y-axis ball screw movement pair 403 to move back and forth, and at the same time, the Y-axis ball screw movement pair 403 drives the machine tool fixture 405 to move left and right, thereby realizing the feed movement of the workpiece in the horizontal plane;
- the grinding wheel 101 When the grinding wheel 101 is a cup-shaped grinding wheel, and the rotary ultrasonic grinding process is performed, the grinding wheel 101 performs ultrasonic axial ultrasonic vibration while rotating. At the same time, the grinding wheel 101 also performs a feeding motion along the Z axis, and the X-axis ball screw motion pair 402 Drive the Y-axis ball screw motion pair 403 to move back and forth, and at the same time, the Y-axis ball screw motion pair 403 drives the machine tool fixture 405 to move left and right, thereby realizing the feed movement of the workpiece in the horizontal plane;
- the grinding wheel 101 When the grinding wheel 101 is an internal grinding wheel, and the rotary ultrasonic grinding process is performed, the grinding wheel 101 performs ultrasonic axial ultrasonic vibration while rotating. At the same time, the grinding wheel 101 also performs feed motion along the Z axis, and the X axis ball screw moves The pair 402 drives the Y-axis ball screw movement pair 403 to move back and forth, and at the same time, the Y-axis ball screw movement pair 403 drives the machine tool fixture 405 to move left and right, thereby realizing the feed movement of the workpiece in the horizontal plane.
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- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
A rotary ultrasonic grinding machine tool, comprising a rotary ultrasonic grinding spindle (1), an ultrasonic power transmission device (2), a spindle clamping and lifting device (3), and a part clamping and feeding device (4), wherein the rotary ultrasonic grinding spindle (1) comprises a grinding wheel (101) mounted at an output end of an amplitude transformer (103); a mandrel at a large end of the amplitude transformer (103) extends into a hollow sleeve (106) to be connected to an output end face of a transducer (107); the transducer (107) is connected to an inner surface of the hollow sleeve (106) in a transition fitting manner by means of a positioning flange (109); the hollow sleeve (106) is mounted in a supporting base (102); and a tail end of the hollow sleeve (106) is connected to an electric spindle (112) by means of a coupler (111). Further comprised is a method for using the rotary ultrasonic grinding machine tool. The rotary ultrasonic grinding spindle is directly driven by the electric spindle, thereby improving the grinding efficiency, reducing the grinding force and grinding heat, and improving the part machining quality.
Description
本发明属于硬脆材料超声精密加工技术领域,具体涉及一种旋转超声磨削机床及应用。The invention belongs to the technical field of ultrasonic precision machining of hard and brittle materials, in particular to a rotary ultrasonic grinding machine tool and its application.
金属基复合材料、陶瓷材料、硬质合金、半导体材料等硬脆材料,因其具有优异的机械、物理和化学性能,在航空航天、生物制造、微电子制造等领域中具有广泛应用。但硬脆材料属于难加工材料,存在着机械加工性能差,加工效率低,加工表面质量差,易产生裂纹和崩边等问题,导致加工成本较高,不利于这些材料的推广使用。Hard and brittle materials such as metal matrix composites, ceramic materials, cemented carbides, and semiconductor materials are widely used in aerospace, biomanufacturing, microelectronics manufacturing and other fields because of their excellent mechanical, physical and chemical properties. However, hard and brittle materials are difficult-to-machine materials, and there are problems such as poor machining performance, low machining efficiency, poor machining surface quality, easy cracks and edge chipping, etc., resulting in high machining costs, which is not conducive to the popularization and use of these materials.
旋转超声磨削加工技术是一种对硬脆材料有效的复合精加工工艺。与传统磨削相比,具有降低磨削力和磨削热、减少加工损伤、提高加工效率和精度、延长磨具寿命等优点。旋转超声磨削作为一种载能特种加工方法,为硬脆难加工材料零件的精密加工开辟了一种新的途径,具有广阔的应用前景。Rotary ultrasonic grinding technology is an effective composite finishing process for hard and brittle materials. Compared with traditional grinding, it has the advantages of reducing grinding force and grinding heat, reducing processing damage, improving processing efficiency and precision, and prolonging the life of abrasive tools. As a special energy-carrying machining method, rotary ultrasonic grinding has opened up a new way for precision machining of hard, brittle and difficult-to-machine material parts, and has broad application prospects.
旋转超声磨削技术装备是旋转超声磨削工艺系统的关键,它的性能直接影响着硬脆材料的加工质量和使用性能。超声磨削刀柄的设计中大多使用的是小型砂轮或磨头,制约着超声磨削效率的提高。硬脆材料超声磨削加工工具平行砂轮、杯形砂轮、内圆磨削砂轮是大负载刀具,目前该种大负载旋转超声加工谐振系统的设计缺乏系统、有效的理论方法,生产应用中缺乏大负载旋转超声磨削砂轮谐振主轴、旋转超声磨削机床制约着硬脆难加工材料超声磨削加工技术的推广与应用,为此研制大功率旋转超声磨削机床已十分迫切。Rotary ultrasonic grinding technology equipment is the key to the rotary ultrasonic grinding process system, and its performance directly affects the processing quality and performance of hard and brittle materials. In the design of ultrasonic grinding tool holders, small grinding wheels or grinding heads are mostly used, which restricts the improvement of ultrasonic grinding efficiency. Ultrasonic grinding tools for hard and brittle materials Parallel grinding wheels, cup grinding wheels, and internal grinding wheels are large-loaded tools. At present, the design of such a large-load rotary ultrasonic machining resonance system lacks systematic and effective theoretical methods, and lacks large-scale production and application. Loaded rotating ultrasonic grinding wheel resonant spindle and rotating ultrasonic grinding machine restrict the popularization and application of ultrasonic grinding technology for hard, brittle and difficult-to-machine materials.
申请号为ZL201810387090.2的发明专利于2018年提出了一种超声振动磨 床,由底座、工作台、工件夹持机构和超声振动磨削机构组成。砂轮驱动电机连接砂轮共同设置在滑板上。超声波电机驱动偏心轴共振箱作为超声振动发生装置,激励滑板进行振动,最终带动砂轮实现超声振动打磨。但其砂轮超声激励的路线长、负载大,实际生产应用实施困难。The invention patent with the application number ZL201810387090.2 proposed an ultrasonic vibration grinding machine in 2018, which consists of a base, a worktable, a workpiece clamping mechanism and an ultrasonic vibration grinding mechanism. The grinding wheel drive motor is connected with the grinding wheel and is jointly arranged on the sliding plate. The ultrasonic motor drives the eccentric shaft resonance box as an ultrasonic vibration generating device, which excites the sliding plate to vibrate, and finally drives the grinding wheel to realize ultrasonic vibration grinding. However, the ultrasonic excitation route of the grinding wheel is long and the load is large, and the actual production application is difficult to implement.
申请号为ZL201911287513.4的发明专利于2019年提出了一种超声磨削主轴。该装置在超声变幅杆节点位置利用轴承支撑,在超声变幅杆前端紧邻节点位置与砂轮直接相连,超声振动在砂轮中的传播过程中,砂轮外圆面的振动最大,进而提高了超声磨削主轴刚度和旋转精度,且连接处不发热,整体结构设计合理、紧凑。但未涉及超声磨削主轴在旋转超声磨削机床中的安装布置以及零件超声磨削的工艺应用。The invention patent with the application number ZL201911287513.4 proposed an ultrasonic grinding spindle in 2019. The device is supported by bearings at the node position of the ultrasonic horn, and is directly connected to the grinding wheel at the front end of the ultrasonic horn adjacent to the node. During the propagation of ultrasonic vibration in the grinding wheel, the vibration of the outer surface of the grinding wheel is the largest, thereby improving the ultrasonic grinding performance. The rigidity and rotation accuracy of the cutting spindle are improved, and the joints do not generate heat, and the overall structure design is reasonable and compact. But it does not involve the installation arrangement of the ultrasonic grinding spindle in the rotary ultrasonic grinding machine and the technological application of the ultrasonic grinding of parts.
申请号为ZL201810864416.6的发明专利于2018年提出了一种超声辅助磨削装置及其应用。其超声辅助磨削系统由套筒、换能器、变幅杆、砂轮、刀柄组成,可以作为通用附件,通过标准刀柄安装在立式加工中心主轴上,完成超声磨削加工。不足在于砂轮超声激励的路线长、刀柄与套筒为装配结构,影响了超声辅助磨削系统的刚度和精度。而且仅能作为机床主轴附件扩展现有机床的加工能力。不能作为磨削机床的主轴,实现零件不同表面结构的超声磨削加工。The invention patent with the application number ZL201810864416.6 proposed an ultrasonic-assisted grinding device and its application in 2018. The ultrasonic-assisted grinding system consists of a sleeve, a transducer, a horn, a grinding wheel, and a tool holder. It can be used as a general accessory and can be installed on the spindle of a vertical machining center through a standard tool holder to complete the ultrasonic grinding process. The disadvantage is that the ultrasonic excitation route of the grinding wheel is long, and the tool shank and the sleeve are assembled structures, which affect the rigidity and accuracy of the ultrasonic-assisted grinding system. And can only be used as a machine tool spindle attachment to expand the processing capacity of existing machine tools. It cannot be used as the main shaft of the grinding machine to realize the ultrasonic grinding of different surface structures of parts.
发明内容SUMMARY OF THE INVENTION
本发明针对上述问题提供了一种旋转超声磨削机床及应用。In view of the above problems, the present invention provides a rotary ultrasonic grinding machine tool and its application.
为达到上述目的本发明采用了以下技术方案:For achieving the above object, the present invention has adopted the following technical solutions:
一种旋转超声磨削主轴,包括砂轮,所述砂轮安装在变幅杆的输出端,在所述变幅杆的中部设置有变幅杆法兰,所述变幅杆法兰与空心套筒的端面连接, 所述变幅杆的大端芯轴伸入空心套筒内部与换能器的输出端面连接,在所述换能器上设置有铜片,在所述换能器的外表面中部设置有定位法兰,所述换能器通过定位法兰与空心套筒的内表面过渡配合连接,所述空心套筒安装在支座内,所述空心套筒的末端通过联轴器与电主轴连接。A rotary ultrasonic grinding spindle includes a grinding wheel, the grinding wheel is mounted on the output end of a horn, a horn flange is arranged in the middle of the horn, and the horn flange is connected to a hollow sleeve. The end face of the horn is connected, the big end mandrel of the horn extends into the hollow sleeve and is connected to the output end face of the transducer, a copper sheet is arranged on the transducer, and the outer surface of the transducer is connected. A positioning flange is arranged in the middle, and the transducer is connected with the inner surface of the hollow sleeve by transition fit through the positioning flange, the hollow sleeve is installed in the support, and the end of the hollow sleeve is connected with the shaft coupling Spindle connection.
进一步,在所述空心套筒外表面与支座内表面之间设置有两个高速精密角接触球轴承,在所述空心套筒第一台阶的两端均设置有轴承定位台阶,用于对所述高速精密角接触球轴承的内圈内端面进行定位,在所述支座的内表面设置有两个内圆柱面定位台阶,用于对高速精密角接触球轴承的外圈内端面进行定位,在所述支座的左端通过螺栓固定组件安装有左端盖,所述左端盖的内环面与左侧的高速精密角接触球轴承的外圈外端面紧密接触,在所述支座的右端通过螺栓固定组件安装有右端盖,在所述右端盖与右侧的高速精密角接触球轴承之间设置有定位套,所述定位套的左右端面分别与右侧的高速精密角接触球轴承的外圈外端面和右端盖的内环面紧密接触。Further, two high-speed precision angular contact ball bearings are arranged between the outer surface of the hollow sleeve and the inner surface of the support, and bearing positioning steps are arranged at both ends of the first step of the hollow sleeve for pairing. The inner end face of the inner ring of the high-speed precision angular contact ball bearing is positioned, and two inner cylindrical surface positioning steps are arranged on the inner surface of the support for positioning the inner end face of the outer ring of the high-speed precision angular contact ball bearing. , a left end cover is installed on the left end of the support through a bolt fixing assembly, and the inner ring surface of the left end cover is in close contact with the outer end surface of the outer ring of the left high-speed precision angular contact ball bearing, at the right end of the support A right end cover is installed through the bolt fixing assembly, and a positioning sleeve is arranged between the right end cover and the right high-speed precision angular contact ball bearing, and the left and right end surfaces of the positioning sleeve are respectively connected with the right side of the high-speed precision angular contact ball bearing. The outer end surface of the outer ring is in close contact with the inner ring surface of the right end cap.
再进一步,所述变幅杆法兰通过螺钉固定组件与空心套筒的端面连接,在所述变幅杆法兰的右侧面设置有配合环,所述配合环的外圆周面与所述空心套筒的内表面相接触。Still further, the horn flange is connected with the end face of the hollow sleeve through a screw fixing assembly, a matching ring is provided on the right side of the horn flange, and the outer circumferential surface of the matching ring is connected to the The inner surfaces of the hollow sleeves are in contact.
更进一步,所述砂轮按形状分为平行砂轮、杯形砂轮或内圆磨削砂轮。Further, the grinding wheels are classified into parallel grinding wheels, cup grinding wheels or internal grinding grinding wheels according to their shapes.
更进一步,所述砂轮按磨料分为电镀金刚石砂轮、电镀CBN砂轮、钎焊金刚石砂轮、钎焊CBN砂轮。Further, the grinding wheels are classified into electroplated diamond grinding wheels, electroplated CBN grinding wheels, brazed diamond grinding wheels and brazed CBN grinding wheels according to abrasives.
一种旋转超声磨削机床,由旋转超声磨削主轴、超声波电源传输装置、主轴装夹与升降装置和零件装夹与进给装置四个部分组成;A rotary ultrasonic grinding machine tool is composed of four parts: a rotary ultrasonic grinding spindle, an ultrasonic power transmission device, a spindle clamping and lifting device, and a parts clamping and feeding device;
所述超声波电源传输装置包括超声波发生器、外绝缘导线和内绝缘导线, 所述超声波发生器安装在支座的上表面,所述外绝缘导线的一端与超声波发生器的输出端连接,所述外绝缘导线的另一端与导电滑环的外圈相连接,所述导电滑环安装在空心套筒中后部的第二台阶上,所述内绝缘导线的一端与导电滑环的内圈连接,所述内绝缘导线的另一端与换能器上的铜片相连接;The ultrasonic power transmission device includes an ultrasonic generator, an outer insulated wire and an inner insulated wire, the ultrasonic generator is installed on the upper surface of the support, one end of the outer insulated wire is connected to the output end of the ultrasonic generator, and the The other end of the outer insulated wire is connected to the outer ring of the conductive slip ring, the conductive slip ring is installed on the second step at the rear of the hollow sleeve, and one end of the inner insulated wire is connected to the inner ring of the conductive slip ring , the other end of the inner insulated wire is connected with the copper sheet on the transducer;
所述主轴装夹与升降装置包括Z轴滚珠丝杠运动副、立柱和控制面板,所述Z轴滚珠丝杠运动副安装在立柱上,在所述Z轴滚珠丝杠运动副的滑块平台上安装有支座,所述控制面板安装在立柱侧面;The main shaft clamping and lifting device includes a Z-axis ball screw motion pair, a column and a control panel. The Z-axis ball screw motion pair is installed on the column, and is on the slider platform of the Z-axis ball screw motion pair. A support is installed on it, and the control panel is installed on the side of the column;
所述零件装夹与进给装置包括底座、X轴滚珠丝杠运动副、Y轴滚珠丝杠运动副、T型槽平台和机床夹具,所述X轴滚珠丝杠运动副安装在底座上,所述Y轴滚珠丝杠运动副安装在X轴滚珠丝杠运动副的滑块平台上,所述T型槽平台安装在Y轴滚珠丝杠运动副的滑块平台上,所述机床夹具安装在T型槽平台上。The parts clamping and feeding device includes a base, an X-axis ball screw motion pair, a Y-axis ball screw motion pair, a T-slot platform and a machine tool fixture, and the X-axis ball screw motion pair is installed on the base, The Y-axis ball screw motion pair is installed on the slider platform of the X-axis ball screw motion pair, the T-slot platform is installed on the slider platform of the Y-axis ball screw motion pair, and the machine tool fixture is installed on a T-slot platform.
一种旋转超声磨削机床的应用,用于加工硬脆材料零件。An application of a rotary ultrasonic grinding machine for machining hard and brittle material parts.
进一步,具体的应用方法为:将旋转超声磨削主轴安装于Z轴滚珠丝杠运动副的滑块平台上,将工件夹持于机床夹具上,在控制面板上输入指令,控制零件装夹与进给装置装夹工件实现水平方向上的进给运动,控制Z轴滚珠丝杠运动副带动旋转超声磨削主轴实现沿立柱竖直方向的进给运动,电主轴开始转动,带动空心套筒旋转,空心套筒将扭矩传递给变幅杆,变幅杆进而带动砂轮做回转运动,砂轮与工件接触进行磨削加工;同时,控制超声波发生器输出的超声波信号经外绝缘导线、导电滑环、内绝缘导线传递至换能器,换能器将超声波电信号转换为机械波,机械波通过变幅杆的传导、放大作用,使砂轮在回转运动的基础上产生沿轴向的超声频机械振动,实现工件的超声精密磨削加工。Further, the specific application method is as follows: install the rotating ultrasonic grinding spindle on the slider platform of the Z-axis ball screw motion pair, clamp the workpiece on the machine tool fixture, input commands on the control panel, and control the parts clamping and clamping. The feeding device clamps the workpiece to realize the feeding movement in the horizontal direction, and controls the Z-axis ball screw motion pair to drive the rotating ultrasonic grinding spindle to realize the feeding movement along the vertical direction of the column. The electric spindle starts to rotate, driving the hollow sleeve to rotate. , the hollow sleeve transmits the torque to the horn, and the horn then drives the grinding wheel to rotate, and the grinding wheel contacts the workpiece for grinding; The inner insulated wire is transmitted to the transducer, and the transducer converts the ultrasonic electrical signal into a mechanical wave. The mechanical wave is transmitted and amplified through the horn, so that the grinding wheel generates ultrasonic mechanical vibration along the axial direction on the basis of the rotary motion. Ultrasonic precision grinding of workpieces.
再进一步,所述砂轮的超声振动方式和具体进给方式如下:Further, the ultrasonic vibration mode and the specific feeding mode of the grinding wheel are as follows:
当砂轮为平行砂轮,进行旋转超声磨削加工时,砂轮在旋转的同时做超声频节圆型横向弯曲超声振动,同时砂轮还沿Z轴做进给运动,X轴滚珠丝杠运动副带动Y轴滚珠丝杠运动副做前后运动,同时,Y轴滚珠丝杠运动副带动机床夹具做左右运动,进而实现工件在水平面的进给运动;When the grinding wheel is a parallel grinding wheel and performs rotary ultrasonic grinding, the grinding wheel performs ultrasonic pitch-circular transverse bending ultrasonic vibration while rotating, and the grinding wheel also performs feed motion along the Z-axis, and the X-axis ball screw motion pair drives the Y-axis. The axis ball screw motion pair moves back and forth, and at the same time, the Y axis ball screw motion pair drives the machine tool fixture to move left and right, thereby realizing the feed movement of the workpiece in the horizontal plane;
当砂轮为杯形砂轮,进行旋转超声磨削加工时,砂轮在旋转的同时做超声频轴向超声振动,同时砂轮还沿Z轴做进给运动,X轴滚珠丝杠运动副带动Y轴滚珠丝杠运动副做前后运动,同时,Y轴滚珠丝杠运动副带动机床夹具做左右运动,进而实现工件在水平面的进给运动;When the grinding wheel is a cup-shaped grinding wheel, when the rotary ultrasonic grinding process is performed, the grinding wheel performs ultrasonic axial ultrasonic vibration while rotating. At the same time, the grinding wheel also performs feed motion along the Z axis, and the X-axis ball screw motion pair drives the Y-axis balls. The screw motion pair moves back and forth, and at the same time, the Y-axis ball screw motion pair drives the machine tool fixture to move left and right, thereby realizing the feed movement of the workpiece in the horizontal plane;
当砂轮为内圆磨削砂轮,进行旋转超声磨削加工时,砂轮在旋转的同时做超声频轴向超声振动,同时砂轮还沿Z轴做进给运动,X轴滚珠丝杠运动副带动Y轴滚珠丝杠运动副做前后运动,同时,Y轴滚珠丝杠运动副带动机床夹具做左右运动,进而实现工件在水平面的进给运动。When the grinding wheel is an internal grinding wheel, and the rotary ultrasonic grinding process is performed, the grinding wheel performs ultrasonic axial ultrasonic vibration while rotating, and the grinding wheel also performs feed motion along the Z axis, and the X-axis ball screw motion pair drives the Y The axis ball screw motion pair moves back and forth, and at the same time, the Y-axis ball screw motion pair drives the machine tool fixture to move left and right, thereby realizing the feed movement of the workpiece in the horizontal plane.
与现有技术相比本发明具有以下优点:Compared with the prior art, the present invention has the following advantages:
本发明中磨削主轴由电主轴直接驱动,结合不同的砂轮结构特点采用不同的谐振方式,旋转超声磨削砂轮采用平行砂轮、杯形砂轮或内圆磨削砂轮,采用电镀金刚石、电镀CBN、钎焊金刚石、钎焊CBN磨料,可以超声磨削硬脆材料,提高磨削效率,降低磨削力、磨削热,减少磨削烧伤,提高零件加工质量,延长砂轮寿命。In the present invention, the grinding spindle is directly driven by the electric spindle, and different resonance modes are adopted in combination with different structural characteristics of the grinding wheel. Brazed diamond and brazed CBN abrasives can ultrasonically grind hard and brittle materials, improve grinding efficiency, reduce grinding force, grinding heat, reduce grinding burns, improve parts processing quality, and prolong grinding wheel life.
图1为本发明旋转超声磨削主轴的结构示意图;Fig. 1 is the structural representation of the rotating ultrasonic grinding spindle of the present invention;
图2为本发明旋转超声磨削主轴的剖视图;Fig. 2 is the sectional view of the rotating ultrasonic grinding spindle of the present invention;
图3为本发明图2中圈A的局部放大图;Fig. 3 is the partial enlarged view of circle A in Fig. 2 of the present invention;
图4为本发明旋转超声磨削主轴的爆炸图;Fig. 4 is the exploded view of the rotating ultrasonic grinding spindle of the present invention;
图5为本发明变幅杆的结构示意图;Fig. 5 is the structural representation of the horn of the present invention;
图6为本发明空心套筒的结构示意图;Fig. 6 is the structural representation of the hollow sleeve of the present invention;
图7为本发明换能器的结构示意图;Fig. 7 is the structural schematic diagram of the transducer of the present invention;
图8为本发明右端盖的结构示意图;8 is a schematic structural diagram of the right end cap of the present invention;
图9为本发明机床的结构示意图;Fig. 9 is the structural schematic diagram of the machine tool of the present invention;
图10为本发明机床的结构示意图;Fig. 10 is the structural schematic diagram of the machine tool of the present invention;
图11为本发明的平行砂轮的旋转超声磨削加工组合运动方向立体示意图;11 is a perspective view showing the combined movement direction of the rotating ultrasonic grinding process of the parallel grinding wheel of the present invention;
图12为本发明的杯形砂轮的旋转超声磨削加工组合运动方向立体示意图;12 is a perspective view showing the combined motion direction of the rotary ultrasonic grinding process of the cup-shaped grinding wheel of the present invention;
图13为本发明的杯形砂轮的旋转超声磨削加工辅助示意图;13 is a schematic diagram of an auxiliary rotary ultrasonic grinding process for the cup-shaped grinding wheel of the present invention;
图14为本发明的内圆磨削砂轮的旋转超声磨削加工组合运动方向立体示意图;14 is a perspective view of the combined motion direction of the rotary ultrasonic grinding process of the internal grinding wheel of the present invention;
图中,旋转超声磨削主轴—1、超声波电源传输装置—2、主轴装夹与升降装置—3、零件装夹与进给装置—4、砂轮—101、支座—102、变幅杆—103、变幅杆法兰—104、配合环—105、空心套筒—106、换能器—107、铜片—108、定位法兰—109、联轴器—111、电主轴—112、右端盖—113、高速精密角接触球轴承—116、轴承定位台阶—117、内圆柱面定位台阶—118、螺栓固定组件—119、左端盖—120、定位套—121、超声波发生器—201、外绝缘导线—202、内绝缘导线—203、导电滑环—204、Z轴滚珠丝杠运动副—301、立柱—302、控制面板—303、底座—401、X轴滚珠丝杠运动副—402、Y轴滚珠丝杠运动副—403、T型槽平台—404、机床夹具—405。In the figure, rotating ultrasonic grinding spindle-1, ultrasonic power transmission device-2, spindle clamping and lifting device-3, parts clamping and feeding device-4, grinding wheel-101, support-102, horn- 103, horn flange—104, matching ring—105, hollow sleeve—106, transducer—107, copper sheet—108, positioning flange—109, coupling—111, electric spindle—112, right end Cover-113, high-speed precision angular contact ball bearing-116, bearing positioning step-117, inner cylindrical surface positioning step-118, bolt fixing assembly-119, left end cover-120, positioning sleeve-121, ultrasonic generator-201, outer Insulated wire—202, inner insulated wire—203, conductive slip ring—204, Z-axis ball screw motion pair—301, column—302, control panel—303, base—401, X-axis ball screw motion—402, Y-axis ball screw motion pair - 403, T-slot platform - 404, machine tool fixture - 405.
为了进一步阐述本发明的技术方案,下面通过实施例对本发明进行进一步说明。In order to further illustrate the technical solutions of the present invention, the present invention will be further described below through examples.
如图1至图10所示,一种旋转超声磨削主轴,包括砂轮101,所述砂轮101安装在变幅杆103的输出端,在所述变幅杆103的中部设置有变幅杆法兰104,所述变幅杆法兰104通过螺钉固定组件与空心套筒106的端面连接,在所述变幅杆法兰104的右侧面设置有配合环105,所述配合环105的外圆周面与所述空心套筒106的内表面相接触,所述变幅杆103的大端芯轴伸入空心套筒106内部与换能器107的输出端面连接,在所述换能器107上设置有铜片108,在所述换能器107的外表面中部设置有定位法兰109,所述换能器107通过定位法兰109与空心套筒106的内表面过渡配合连接,所述空心套筒106的末端通过联轴器111与电主轴112连接,所述空心套筒106安装在支座102内,在所述空心套筒106外表面与支座102内表面之间设置有两个高速精密角接触球轴承116,在所述空心套筒106第一台阶的两端均设置有轴承定位台阶117,用于对所述高速精密角接触球轴承116的内圈内端面进行定位,在所述支座102的内表面设置有两个内圆柱面定位台阶118,用于对高速精密角接触球轴承116的外圈内端面进行定位,在所述支座102的左端通过螺栓固定组件119安装有左端盖120,所述左端盖120的内环面与左侧的高速精密角接触球轴承116的外圈外端面紧密接触,在所述支座102的右端通过螺栓固定组件119安装有右端盖113,在所述右端盖113与右侧的高速精密角接触球轴承116之间设置有定位套121,所述定位套121的左右端面分别与右侧的高速精密角接触球轴承116的外圈外端面和右端盖113的内环面紧密接触。As shown in FIGS. 1 to 10 , a rotary ultrasonic grinding spindle includes a grinding wheel 101 , the grinding wheel 101 is installed at the output end of the horn 103 , and a horn method is arranged in the middle of the horn 103 A flange 104, the horn flange 104 is connected with the end face of the hollow sleeve 106 through a screw fixing assembly, a matching ring 105 is provided on the right side of the horn flange 104, and the outer surface of the matching ring 105 is The circumferential surface is in contact with the inner surface of the hollow sleeve 106 , and the large end mandrel of the horn 103 extends into the hollow sleeve 106 and is connected to the output end surface of the transducer 107 . A copper sheet 108 is arranged on the upper part, and a positioning flange 109 is arranged in the middle of the outer surface of the transducer 107. The transducer 107 is connected with the inner surface of the hollow sleeve 106 through the positioning flange The end of the hollow sleeve 106 is connected to the motorized spindle 112 through the coupling 111 , the hollow sleeve 106 is installed in the support 102 , and two holes are arranged between the outer surface of the hollow sleeve 106 and the inner surface of the support 102 . A high-speed precision angular contact ball bearing 116 is provided, and bearing positioning steps 117 are provided at both ends of the first step of the hollow sleeve 106 for positioning the inner end face of the inner ring of the high-speed precision angular contact ball bearing 116, Two inner cylindrical surface positioning steps 118 are provided on the inner surface of the support 102 for positioning the inner end surface of the outer ring of the high-speed precision angular contact ball bearing 116, and the assembly is fixed at the left end of the support 102 by bolts 119 is installed with a left end cover 120, the inner ring surface of the left end cover 120 is in close contact with the outer end surface of the outer ring of the left high-speed precision angular contact ball bearing 116, and a bolt fixing assembly 119 is installed on the right end of the support 102. The right end cover 113 is provided with a positioning sleeve 121 between the right end cover 113 and the right high-speed precision angular contact ball bearing 116. The outer end surface of the outer ring is in close contact with the inner ring surface of the right end cap 113 .
所述砂轮101按形状分为平行砂轮、杯形砂轮或内圆磨削砂轮,所述砂轮101按磨料分为电镀金刚石砂轮、电镀CBN砂轮、钎焊金刚石砂轮、钎焊CBN砂轮。The grinding wheel 101 is divided into parallel grinding wheel, cup grinding wheel or internal grinding wheel according to the shape, and the grinding wheel 101 is divided into electroplating diamond grinding wheel, electroplating CBN grinding wheel, brazing diamond grinding wheel and brazing CBN grinding wheel according to the abrasive material.
一种旋转超声磨削机床,由旋转超声磨削主轴1、超声波电源传输装置2、 主轴装夹与升降装置3和零件装夹与进给装置4四个部分组成;A rotary ultrasonic grinding machine is composed of four parts: a rotary ultrasonic grinding spindle 1, an ultrasonic power transmission device 2, a spindle clamping and lifting device 3, and a parts clamping and feeding device 4;
所述超声波电源传输装置2包括超声波发生器201、外绝缘导线202和内绝缘导线203,所述超声波发生器201安装在支座102的上表面,所述外绝缘导线202的一端与超声波发生器201的输出端连接,所述外绝缘导线202的另一端与导电滑环204的外圈相连接,所述导电滑环204安装在空心套筒106中后部的第二台阶上,所述内绝缘导线203的一端与导电滑环204的内圈连接,所述内绝缘导线203的另一端与换能器107上的铜片108相连接;The ultrasonic power transmission device 2 includes an ultrasonic generator 201, an outer insulated wire 202 and an inner insulated wire 203. The ultrasonic generator 201 is installed on the upper surface of the support 102. One end of the outer insulated wire 202 is connected to the ultrasonic generator. The output end of 201 is connected, and the other end of the outer insulated wire 202 is connected to the outer ring of the conductive slip ring 204. The conductive slip ring 204 is installed on the second step at the rear of the hollow sleeve 106. One end of the insulated wire 203 is connected to the inner ring of the conductive slip ring 204, and the other end of the inner insulated wire 203 is connected to the copper sheet 108 on the transducer 107;
所述主轴装夹与升降装置3包括Z轴滚珠丝杠运动副301、立柱302和控制面板303,所述Z轴滚珠丝杠运动副301安装在立柱302上,在所述Z轴滚珠丝杠运动副301的滑块平台上安装有支座102,所述控制面板303安装在立柱302侧面;The main shaft clamping and lifting device 3 includes a Z-axis ball screw motion pair 301, a column 302 and a control panel 303. The Z-axis ball screw motion pair 301 is installed on the column 302, and the Z-axis ball screw A support 102 is installed on the slider platform of the motion pair 301, and the control panel 303 is installed on the side of the column 302;
所述零件装夹与进给装置4包括底座401、X轴滚珠丝杠运动副402、Y轴滚珠丝杠运动副403、T型槽平台404和机床夹具405,所述X轴滚珠丝杠运动副402安装在底座401上,所述Y轴滚珠丝杠运动副403安装在X轴滚珠丝杠运动副402的滑块平台上,所述T型槽平台404安装在Y轴滚珠丝杠运动副403的滑块平台上,所述机床夹具405安装在T型槽平台404上。The parts clamping and feeding device 4 includes a base 401, an X-axis ball screw motion pair 402, a Y-axis ball screw motion pair 403, a T-slot platform 404 and a machine tool fixture 405. The X-axis ball screw moves The pair 402 is installed on the base 401, the Y-axis ball screw movement pair 403 is installed on the slider platform of the X-axis ball screw movement pair 402, and the T-slot platform 404 is installed on the Y-axis ball screw movement pair On the slider platform of 403 , the machine tool fixture 405 is installed on the T-slot platform 404 .
一种旋转超声磨削机床的应用,用于加工硬脆材料零件;具体的应用方法为:将旋转超声磨削主轴1安装于Z轴滚珠丝杠运动副301的滑块平台上,将工件夹持于机床夹具405上,在控制面板303上输入指令,控制零件装夹与进给装置4装夹工件实现水平方向上的进给运动,控制Z轴滚珠丝杠运动副301带动旋转超声磨削主轴1实现沿立柱302竖直方向的进给运动,电主轴112开始转动,带动空心套筒106旋转,空心套筒106将扭矩传递给变幅杆103,变幅杆103进而带动砂轮101做回转运动,砂轮101与工件接触进行磨削加工;同 时,控制超声波发生器201输出的超声波信号经外绝缘导线202、导电滑环204、内绝缘导线203传递至换能器107,换能器107将超声波电信号转换为机械波,机械波通过变幅杆103的传导、放大作用,使砂轮101在回转运动的基础上产生沿轴向的超声频机械振动,实现工件的超声精密磨削加工。An application of a rotary ultrasonic grinding machine tool for machining hard and brittle material parts; the specific application method is: install the rotary ultrasonic grinding spindle 1 on the slider platform of the Z-axis ball screw motion pair 301, and clamp the workpiece. Hold it on the machine tool fixture 405, input commands on the control panel 303, control the parts clamping and feeding device 4 to clamp the workpiece to realize the feeding movement in the horizontal direction, and control the Z-axis ball screw motion pair 301 to drive the rotary ultrasonic grinding. The main shaft 1 realizes the feeding movement along the vertical direction of the column 302, the electric main shaft 112 starts to rotate, and drives the hollow sleeve 106 to rotate, the hollow sleeve 106 transmits the torque to the horn 103, and the horn 103 further drives the grinding wheel 101 to rotate The grinding wheel 101 is in contact with the workpiece for grinding; at the same time, the ultrasonic signal output by the control ultrasonic generator 201 is transmitted to the transducer 107 through the outer insulated wire 202, the conductive slip ring 204 and the inner insulated wire 203, and the transducer 107 will The ultrasonic electrical signal is converted into a mechanical wave, and the mechanical wave is transmitted and amplified by the horn 103, so that the grinding wheel 101 generates ultrasonic mechanical vibration along the axial direction on the basis of the rotary motion, and realizes the ultrasonic precision grinding of the workpiece.
所述砂轮101的超声振动方式和具体进给方式如下:The ultrasonic vibration mode and the specific feeding mode of the grinding wheel 101 are as follows:
当砂轮101为平行砂轮,进行旋转超声磨削加工时,砂轮101在旋转的同时做超声频节圆型横向弯曲超声振动,同时砂轮101还沿Z轴做进给运动,X轴滚珠丝杠运动副402带动Y轴滚珠丝杠运动副403做前后运动,同时,Y轴滚珠丝杠运动副403带动机床夹具405做左右运动,进而实现工件在水平面的进给运动;When the grinding wheel 101 is a parallel grinding wheel and performs rotary ultrasonic grinding, the grinding wheel 101 performs ultrasonic pitch-circular transverse bending ultrasonic vibration while rotating, and at the same time, the grinding wheel 101 also performs feed motion along the Z axis, and the X axis ball screw moves The pair 402 drives the Y-axis ball screw movement pair 403 to move back and forth, and at the same time, the Y-axis ball screw movement pair 403 drives the machine tool fixture 405 to move left and right, thereby realizing the feed movement of the workpiece in the horizontal plane;
当砂轮101为杯形砂轮,进行旋转超声磨削加工时,砂轮101在旋转的同时做超声频轴向超声振动,同时砂轮101还沿Z轴做进给运动,X轴滚珠丝杠运动副402带动Y轴滚珠丝杠运动副403做前后运动,同时,Y轴滚珠丝杠运动副403带动机床夹具405做左右运动,进而实现工件在水平面的进给运动;When the grinding wheel 101 is a cup-shaped grinding wheel, and the rotary ultrasonic grinding process is performed, the grinding wheel 101 performs ultrasonic axial ultrasonic vibration while rotating. At the same time, the grinding wheel 101 also performs a feeding motion along the Z axis, and the X-axis ball screw motion pair 402 Drive the Y-axis ball screw motion pair 403 to move back and forth, and at the same time, the Y-axis ball screw motion pair 403 drives the machine tool fixture 405 to move left and right, thereby realizing the feed movement of the workpiece in the horizontal plane;
当砂轮101为内圆磨削砂轮,进行旋转超声磨削加工时,砂轮101在旋转的同时做超声频轴向超声振动,同时砂轮101还沿Z轴做进给运动,X轴滚珠丝杠运动副402带动Y轴滚珠丝杠运动副403做前后运动,同时,Y轴滚珠丝杠运动副403带动机床夹具405做左右运动,进而实现工件在水平面的进给运动。When the grinding wheel 101 is an internal grinding wheel, and the rotary ultrasonic grinding process is performed, the grinding wheel 101 performs ultrasonic axial ultrasonic vibration while rotating. At the same time, the grinding wheel 101 also performs feed motion along the Z axis, and the X axis ball screw moves The pair 402 drives the Y-axis ball screw movement pair 403 to move back and forth, and at the same time, the Y-axis ball screw movement pair 403 drives the machine tool fixture 405 to move left and right, thereby realizing the feed movement of the workpiece in the horizontal plane.
以上显示和描述了本发明的主要特征和优点,对于本领域技术人员而言,显然本发明不限于上述示范性实施例的细节,而且在不背离本发明的精神或基本特征的情况下,能够以其他的具体形式实现本发明。因此,无论从哪一点来看,均应将实施例看作是示范性的,而且是非限制性的,本发明的范围由所附权利要求而不是上述说明限定,因此旨在将落在权利要求的等同要件的含义和范围 内的所有变化囊括在本发明内。While the main features and advantages of the present invention have been shown and described above, it will be apparent to those skilled in the art that the present invention is not limited to the details of the above-described exemplary embodiments, but can, without departing from the spirit or essential characteristics of the present invention, be The present invention may be implemented in other specific forms. Therefore, the embodiments are to be regarded in all respects as illustrative and not restrictive, and the scope of the invention is to be defined by the appended claims rather than the foregoing description, which are therefore intended to fall within the scope of the claims. All changes within the meaning and scope of the equivalents of , are included in the present invention.
此外,应当理解,虽然本说明书按照实施方式加以描述,但并非每个实施方式仅包含一个独立的技术方案,说明书的这种叙述方式仅仅是为清楚起见,本领域技术人员应当将说明书作为一个整体,各实施例中的技术方案也可以经适当组合,形成本领域技术人员可以理解的其他实施方式。In addition, it should be understood that although this specification is described in terms of embodiments, not each embodiment only includes an independent technical solution, and this description in the specification is only for the sake of clarity, and those skilled in the art should take the specification as a whole , the technical solutions in each embodiment can also be appropriately combined to form other implementations that can be understood by those skilled in the art.
Claims (9)
- 一种旋转超声磨削主轴,其特征在于:包括砂轮(101),所述砂轮(101)安装在变幅杆(103)的输出端,在所述变幅杆(103)的中部设置有变幅杆法兰(104),所述变幅杆法兰(104)与空心套筒(106)的端面连接,所述变幅杆(103)的大端芯轴伸入空心套筒(106)内部与换能器(107)的输出端面连接,在所述换能器(107)上设置有铜片(108),在所述换能器(107)的外表面中部设置有定位法兰(109),所述换能器(107)通过定位法兰(109)与空心套筒(106)的内表面过渡配合连接,所述空心套筒(106)安装在支座(102)内,所述空心套筒(106)的末端通过联轴器(111)与电主轴(112)连接。A rotary ultrasonic grinding spindle is characterized in that: comprising a grinding wheel (101), the grinding wheel (101) is mounted on the output end of a horn (103), and a variable horn is arranged in the middle of the horn (103). The horn flange (104), the horn flange (104) is connected with the end face of the hollow sleeve (106), and the big end mandrel of the horn (103) extends into the hollow sleeve (106) The inside is connected to the output end face of the transducer (107), a copper sheet (108) is arranged on the transducer (107), and a positioning flange (108) is arranged in the middle of the outer surface of the transducer (107). 109), the transducer (107) is connected by transition fit with the inner surface of the hollow sleeve (106) through the positioning flange (109), and the hollow sleeve (106) is installed in the support (102), so The end of the hollow sleeve (106) is connected with the electric spindle (112) through a coupling (111).
- 根据权利要求1所述的一种旋转超声磨削主轴,其特征在于:在所述空心套筒(106)外表面与支座(102)内表面之间设置有两个高速精密角接触球轴承(116),在所述空心套筒(106)第一台阶的两端均设置有轴承定位台阶(117),用于对所述高速精密角接触球轴承(116)的内圈内端面进行定位,在所述支座(102)的内表面设置有两个内圆柱面定位台阶(118),用于对高速精密角接触球轴承(116)的外圈内端面进行定位,在所述支座(102)的左端通过螺栓固定组件(119)安装有左端盖(120),所述左端盖(120)的内环面与左侧的高速精密角接触球轴承(116)的外圈外端面紧密接触,在所述支座(102)的右端通过螺栓固定组件(119)安装有右端盖(113),在所述右端盖(113)与右侧的高速精密角接触球轴承(116)之间设置有定位套(121),所述定位套(121)的左右端面分别与右侧的高速精密角接触球轴承(116)的外圈外端面和右端盖(113)的内环面紧密接触。A rotary ultrasonic grinding spindle according to claim 1, wherein two high-speed precision angular contact ball bearings are arranged between the outer surface of the hollow sleeve (106) and the inner surface of the support (102). (116), both ends of the first step of the hollow sleeve (106) are provided with bearing positioning steps (117) for positioning the inner end face of the inner ring of the high-speed precision angular contact ball bearing (116) , two inner cylindrical surface positioning steps (118) are arranged on the inner surface of the support (102) for positioning the inner end surface of the outer ring of the high-speed precision angular contact ball bearing (116). A left end cover (120) is installed on the left end of the (102) through the bolt fixing assembly (119), and the inner ring surface of the left end cover (120) is in close contact with the outer end surface of the outer ring of the left high-speed precision angular contact ball bearing (116). contact, a right end cover (113) is installed on the right end of the support (102) through a bolt fixing assembly (119), between the right end cover (113) and the right high-speed precision angular contact ball bearing (116) A positioning sleeve (121) is provided, and the left and right end surfaces of the positioning sleeve (121) are respectively in close contact with the outer end surface of the outer ring of the right high-speed precision angular contact ball bearing (116) and the inner ring surface of the right end cover (113).
- 根据权利要求1所述的一种旋转超声磨削主轴,其特征在于:所述变幅杆法兰(104)通过螺钉固定组件与空心套筒(106)的端面连接,在所述变幅杆法兰(104)的右侧面设置有配合环(105),所述配合环(105)的外圆周面 与所述空心套筒(106)的内表面相接触。A rotary ultrasonic grinding spindle according to claim 1, characterized in that: the horn flange (104) is connected with the end face of the hollow sleeve (106) through a screw fixing assembly, and the horn flange (104) is connected to the end face of the hollow sleeve (106) through a screw fixing assembly, A matching ring (105) is arranged on the right side of the flange (104), and the outer circumferential surface of the matching ring (105) is in contact with the inner surface of the hollow sleeve (106).
- 根据权利要求1所述的一种旋转超声磨削主轴,其特征在于:所述砂轮(101)按形状分为平行砂轮、杯形砂轮或内圆磨削砂轮。A rotary ultrasonic grinding spindle according to claim 1, wherein the grinding wheel (101) is classified into a parallel grinding wheel, a cup grinding wheel or an internal grinding grinding wheel according to the shape.
- 根据权利要求1所述的一种旋转超声磨削主轴,其特征在于:所述砂轮(101)按磨料分为电镀金刚石砂轮、电镀CBN砂轮、钎焊金刚石砂轮、钎焊CBN砂轮。A rotary ultrasonic grinding spindle according to claim 1, wherein the grinding wheel (101) is divided into electroplated diamond grinding wheel, electroplated CBN grinding wheel, brazed diamond grinding wheel and brazed CBN grinding wheel according to abrasive material.
- 应用权利要求1-5任一项所述旋转超声磨削主轴的机床,其特征在于:由旋转超声磨削主轴(1)、超声波电源传输装置(2)、主轴装夹与升降装置(3)和零件装夹与进给装置(4)四个部分组成;The machine tool for applying the rotating ultrasonic grinding spindle according to any one of claims 1-5, characterized in that: the rotating ultrasonic grinding spindle (1), the ultrasonic power transmission device (2), the spindle clamping and lifting device (3) It is composed of four parts with parts clamping and feeding device (4);所述超声波电源传输装置(2)包括超声波发生器(201)、外绝缘导线(202)和内绝缘导线(203),所述超声波发生器(201)安装在支座(102)的上表面,所述外绝缘导线(202)的一端与超声波发生器(201)的输出端连接,所述外绝缘导线(202)的另一端与导电滑环(204)的外圈相连接,所述导电滑环(204)安装在空心套筒(106)中后部的第二台阶上,所述内绝缘导线(203)的一端与导电滑环(204)的内圈连接,所述内绝缘导线(203)的另一端与换能器(107)上的铜片(108)相连接;The ultrasonic power transmission device (2) comprises an ultrasonic generator (201), an outer insulated wire (202) and an inner insulated wire (203), and the ultrasonic generator (201) is installed on the upper surface of the support (102), One end of the outer insulated wire (202) is connected to the output end of the ultrasonic generator (201), and the other end of the outer insulated wire (202) is connected to the outer ring of the conductive slip ring (204), and the conductive slip ring (204) is connected to the outer ring of the conductive slip ring (204). The ring (204) is installed on the second step at the middle and rear of the hollow sleeve (106), one end of the inner insulated wire (203) is connected to the inner ring of the conductive slip ring (204), the inner insulated wire (203) ) is connected to the copper sheet (108) on the transducer (107);所述主轴装夹与升降装置(3)包括Z轴滚珠丝杠运动副(301)、立柱(302)和控制面板(303),所述Z轴滚珠丝杠运动副(301)安装在立柱(302)上,在所述Z轴滚珠丝杠运动副(301)的滑块平台上安装有支座(102),所述控制面板(303)安装在立柱(302)侧面;The spindle clamping and lifting device (3) includes a Z-axis ball screw motion pair (301), a column (302) and a control panel (303), and the Z-axis ball screw motion pair (301) is installed on the column (301). 302), a support (102) is installed on the slider platform of the Z-axis ball screw motion pair (301), and the control panel (303) is installed on the side of the column (302);所述零件装夹与进给装置(4)包括底座(401)、X轴滚珠丝杠运动副(402)、Y轴滚珠丝杠运动副(403)、T型槽平台(404)和机床夹具(405),所述X 轴滚珠丝杠运动副(402)安装在底座(401)上,所述Y轴滚珠丝杠运动副(403)安装在X轴滚珠丝杠运动副(402)的滑块平台上,所述T型槽平台(404)安装在Y轴滚珠丝杠运动副(403)的滑块平台上,所述机床夹具(405)安装在T型槽平台(404)上。The parts clamping and feeding device (4) includes a base (401), an X-axis ball screw motion pair (402), a Y-axis ball screw motion pair (403), a T-slot platform (404) and a machine tool fixture (405), the X-axis ball screw motion pair (402) is installed on the base (401), and the Y-axis ball screw motion pair (403) is installed on the sliding surface of the X-axis ball screw motion pair (402). On the block platform, the T-slot platform (404) is installed on the slider platform of the Y-axis ball screw motion pair (403), and the machine tool fixture (405) is installed on the T-slot platform (404).
- 权利要求6所述一种旋转超声磨削机床的应用,其特征在于:用于加工硬脆材料零件。The application of a rotary ultrasonic grinding machine tool according to claim 6 is characterized in that: it is used for machining hard and brittle material parts.
- 根据权利要求7所述的一种旋转超声磨削机床的应用,其特征在于:具体的应用方法为:将旋转超声磨削主轴(1)安装于Z轴滚珠丝杠运动副(301)的滑块平台上,将工件夹持于机床夹具(405)上,在控制面板(303)上输入指令,控制零件装夹与进给装置(4)装夹工件实现水平方向上的进给运动,控制Z轴滚珠丝杠运动副(301)带动旋转超声磨削主轴(1)实现沿立柱(302)竖直方向的进给运动,电主轴(112)开始转动,带动空心套筒(106)旋转,空心套筒(106)将扭矩传递给变幅杆(103),变幅杆(103)进而带动砂轮(101)做回转运动,砂轮(101)与工件接触进行磨削加工;同时,控制超声波发生器(201)输出的超声波信号经外绝缘导线(202)、导电滑环(204)、内绝缘导线(203)传递至换能器(107),换能器(107)将超声波电信号转换为机械波,机械波通过变幅杆(103)的传导、放大作用,使砂轮(101)在回转运动的基础上产生沿轴向的超声频机械振动,实现工件的超声精密磨削加工。The application of a rotary ultrasonic grinding machine tool according to claim 7, characterized in that: the specific application method is: installing the rotary ultrasonic grinding spindle (1) on the sliding surface of the Z-axis ball screw motion pair (301). On the block platform, clamp the workpiece on the machine tool fixture (405), input commands on the control panel (303), and control the parts clamping and feeding device (4) to clamp the workpiece to realize the feeding movement in the horizontal direction, and control the The Z-axis ball screw motion pair (301) drives the rotating ultrasonic grinding spindle (1) to realize the feeding movement along the vertical direction of the column (302), the electric spindle (112) starts to rotate, and drives the hollow sleeve (106) to rotate, The hollow sleeve (106) transmits the torque to the horn (103), and the horn (103) then drives the grinding wheel (101) to make a rotary motion, and the grinding wheel (101) contacts the workpiece for grinding; at the same time, the ultrasonic generation is controlled. The ultrasonic signal output by the device (201) is transmitted to the transducer (107) through the outer insulated wire (202), the conductive slip ring (204) and the inner insulated wire (203), and the transducer (107) converts the ultrasonic electrical signal into The mechanical wave, through the conduction and amplification of the horn (103), causes the grinding wheel (101) to generate ultrasonic mechanical vibration along the axial direction on the basis of the rotary motion, so as to realize the ultrasonic precision grinding of the workpiece.
- 根据权利要求8所述的一种旋转超声磨削机床的应用,其特征在于:所述砂轮(101)的超声振动方式和具体进给方式如下:The application of a kind of rotary ultrasonic grinding machine tool according to claim 8, is characterized in that: the ultrasonic vibration mode and concrete feeding mode of described grinding wheel (101) are as follows:当砂轮(101)为平行砂轮,进行旋转超声磨削加工时,砂轮(101)在旋转的同时做超声频节圆型横向弯曲超声振动,同时砂轮(101)还沿Z轴做进给运动,X轴滚珠丝杠运动副(402)带动Y轴滚珠丝杠运动副(403)做前后运 动,同时,Y轴滚珠丝杠运动副(403)带动机床夹具(405)做左右运动,进而实现工件在水平面的进给运动;When the grinding wheel (101) is a parallel grinding wheel and performs rotary ultrasonic grinding, the grinding wheel (101) performs ultrasonic pitch-circular transverse bending ultrasonic vibration while rotating, and at the same time the grinding wheel (101) also performs a feeding motion along the Z axis, The X-axis ball screw motion pair (402) drives the Y-axis ball screw motion pair (403) to move back and forth, and at the same time, the Y-axis ball screw motion pair (403) drives the machine tool fixture (405) to move left and right, thereby realizing the workpiece. Feed movement in the horizontal plane;当砂轮(101)为杯形砂轮,进行旋转超声磨削加工时,砂轮(101)在旋转的同时做超声频轴向超声振动,同时砂轮(101)还沿Z轴做进给运动,X轴滚珠丝杠运动副(402)带动Y轴滚珠丝杠运动副(403)做前后运动,同时,Y轴滚珠丝杠运动副(403)带动机床夹具(405)做左右运动,进而实现工件在水平面的进给运动;When the grinding wheel (101) is a cup-shaped grinding wheel, and the rotary ultrasonic grinding process is performed, the grinding wheel (101) performs ultrasonic axial ultrasonic vibration while rotating, and at the same time, the grinding wheel (101) also performs a feeding motion along the Z axis, and the X axis The ball screw motion pair (402) drives the Y-axis ball screw motion pair (403) to move back and forth, and at the same time, the Y-axis ball screw motion pair (403) drives the machine tool fixture (405) to move left and right, thereby realizing the workpiece in the horizontal plane. feed movement;当砂轮(101)为内圆磨削砂轮,进行旋转超声磨削加工时,砂轮(101)在旋转的同时做超声频轴向超声振动,同时砂轮(101)还沿Z轴做进给运动,X轴滚珠丝杠运动副(402)带动Y轴滚珠丝杠运动副(403)做前后运动,同时,Y轴滚珠丝杠运动副(403)带动机床夹具(405)做左右运动,进而实现工件在水平面的进给运动。When the grinding wheel (101) is an internal grinding wheel, and the rotary ultrasonic grinding process is performed, the grinding wheel (101) performs ultrasonic axial ultrasonic vibration while rotating, and at the same time, the grinding wheel (101) also performs a feeding motion along the Z axis. The X-axis ball screw motion pair (402) drives the Y-axis ball screw motion pair (403) to move back and forth, and at the same time, the Y-axis ball screw motion pair (403) drives the machine tool fixture (405) to move left and right, thereby realizing the workpiece. Feed movement in the horizontal plane.
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