WO2022201423A1 - 光特性検査用回路、装置および方法 - Google Patents
光特性検査用回路、装置および方法 Download PDFInfo
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- WO2022201423A1 WO2022201423A1 PCT/JP2021/012522 JP2021012522W WO2022201423A1 WO 2022201423 A1 WO2022201423 A1 WO 2022201423A1 JP 2021012522 W JP2021012522 W JP 2021012522W WO 2022201423 A1 WO2022201423 A1 WO 2022201423A1
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- Prior art keywords
- optical
- circuit
- characteristic inspection
- inspected
- photocurrent
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- 230000003287 optical effect Effects 0.000 title claims abstract description 246
- 238000007689 inspection Methods 0.000 title claims abstract description 82
- 238000000034 method Methods 0.000 title claims description 14
- 238000001228 spectrum Methods 0.000 claims description 21
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- 238000010586 diagram Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 239000010408 film Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 239000011162 core material Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000001312 dry etching Methods 0.000 description 3
- 238000009429 electrical wiring Methods 0.000 description 3
- 229910052732 germanium Inorganic materials 0.000 description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
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- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000010408 sweeping Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- KXNLCSXBJCPWGL-UHFFFAOYSA-N [Ga].[As].[In] Chemical compound [Ga].[As].[In] KXNLCSXBJCPWGL-UHFFFAOYSA-N 0.000 description 1
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- 238000011156 evaluation Methods 0.000 description 1
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- 238000004377 microelectronic Methods 0.000 description 1
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- 229920001721 polyimide Polymers 0.000 description 1
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- 239000011347 resin Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/30—Testing of optical devices, constituted by fibre optics or optical waveguides
- G01M11/33—Testing of optical devices, constituted by fibre optics or optical waveguides with a light emitter being disposed at one fibre or waveguide end-face, and a light receiver at the other end-face
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/30—Testing of optical devices, constituted by fibre optics or optical waveguides
- G01M11/33—Testing of optical devices, constituted by fibre optics or optical waveguides with a light emitter being disposed at one fibre or waveguide end-face, and a light receiver at the other end-face
- G01M11/338—Testing of optical devices, constituted by fibre optics or optical waveguides with a light emitter being disposed at one fibre or waveguide end-face, and a light receiver at the other end-face by measuring dispersion other than PMD, e.g. chromatic dispersion
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/30—Testing of optical devices, constituted by fibre optics or optical waveguides
- G01M11/33—Testing of optical devices, constituted by fibre optics or optical waveguides with a light emitter being disposed at one fibre or waveguide end-face, and a light receiver at the other end-face
- G01M11/331—Testing of optical devices, constituted by fibre optics or optical waveguides with a light emitter being disposed at one fibre or waveguide end-face, and a light receiver at the other end-face by using interferometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
- G01R19/0046—Arrangements for measuring currents or voltages or for indicating presence or sign thereof characterised by a specific application or detail not covered by any other subgroup of G01R19/00
- G01R19/0061—Measuring currents of particle-beams, currents from electron multipliers, photocurrents, ion currents; Measuring in plasmas
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
Definitions
- the present invention relates to an optical characteristic inspection circuit, device and method for inspecting an optical waveguide.
- Optical circuit inspection requires time to align the optical fiber with the optical circuit in order to input light into the optical circuit to be inspected and obtain optical output. For example, when a normal single mode fiber is used, it is necessary to adjust the position of the optical fiber with a spatial resolution of 1 ⁇ m or less, which makes it difficult to reduce the number of man-hours.
- optical input or optical output In order to reduce the man-hours required for inspection, it is effective to omit at least either optical input or optical output. Although it is difficult to omit the optical input, the optical output can be replaced by an electrical output from a photodetector that is directly connected to the optical circuit. Electrical inputs and outputs only need to be in electrical contact, and since it is usually possible to perform alignment with a spatial resolution of 10 ⁇ m or more, alignment does not require time, and by using this, the number of inspection man-hours can be significantly reduced. be able to.
- photodetectors that are directly connected to optical circuits have variations in characteristics for each photodetector.
- germanium photodiodes used in silicon photonics have large variations in sensitivity between individuals, so in order to inspect the characteristics of optical circuits from the absolute value of the photocurrent, it is necessary to correct the sensitivity of each individual germanium photodiode.
- an optical circuit 33_1 formed on a substrate is provided with a wafer surface optical input element 31_1 such as a grating coupler and a photodetector 34_1, and an optical circuit 33_2 is provided. is provided with a wafer surface light input element 31_2 and a photodetector 34_2.
- the difference between the electrical output of the photodetector 34_1 and the electrical output of the photodetector 34_2 is measured to evaluate the waveguide loss of the optical circuits 33_1 and 33_2.
- the waveguide loss cannot be accurately evaluated if there are variations in the characteristics of each photodetector.
- the wafer surface light input devices 31_1 and 31_2 have individual variations in characteristics, these characteristics variations are also superimposed on the evaluation results based on the electrical outputs of the photodetectors 34_1 and 34_2, and the waveguide loss can be accurately calculated. cannot be evaluated.
- an optical characteristic inspection circuit 40 is disclosed as shown in FIG. 6 (Patent Document 1).
- the optical characteristic inspection circuit 40 includes a wafer surface optical input element 41 and a photodetector 44 common to two optical circuits 43_1 and 43_2 formed on a substrate.
- Non-Patent Document 1 a grating coupler (GC) used as an optical input port in the optical characteristic inspection circuit 40 has steep wavelength dependence (Non-Patent Document 1).
- the output waveform from the waveguide which is the object under test (DUT, device under test)
- the optical characteristics (guiding loss) of the waveguide cannot be evaluated accurately.
- optical characteristic inspection circuit 40 to on-wafer optical characteristic inspection to accurately evaluate the optical characteristics (guiding loss) of the waveguide.
- the optical characteristic inspection circuit includes, in order, an optical input element, an optical branch circuit having a resistor, and a second optical branch circuit connected to one output of the optical branch circuit.
- one optical circuit to be inspected a second optical circuit to be inspected connected to the other output of the optical branch circuit, light passing through the first optical circuit to be inspected, and the second optical circuit to be inspected and a photodetector for detecting the intensity of light transmitted through the.
- an optical characteristic inspection circuit, apparatus, and method that can reduce the number of man-hours required for optical characteristic inspection.
- FIG. 1 is a block diagram showing the configuration of an optical characteristic inspection apparatus according to the first embodiment of the present invention.
- FIG. 2 is a schematic diagram showing a configuration example of the optical characteristic inspection circuit according to the first embodiment of the present invention.
- FIG. 3 is a diagram showing an example of the output of the optical characteristic inspection circuit according to the first embodiment of the present invention.
- FIG. 4 is a schematic diagram showing a configuration example of an optical characteristic inspection circuit according to a second embodiment of the present invention.
- FIG. 5 is a schematic diagram showing a configuration example of a conventional optical characteristic inspection circuit.
- FIG. 6 is a schematic diagram showing a configuration example of a conventional optical characteristic inspection circuit.
- An optical characteristic inspection apparatus 1 includes an optical characteristic inspection circuit 10, an optical fiber 21, and a controller 31, as shown in FIG.
- the optical characteristic inspection circuit 10 is an on-wafer optical characteristic inspection circuit fabricated on the same wafer, and includes an optical input element 11, an optical branch circuit 12, and a first optical circuit to be inspected (hereinafter referred to as the "first optical circuit”).
- 1 optical circuit”) 13_1 a second optical circuit to be inspected (hereinafter referred to as “second optical circuit”) 13_2, and a photodetector .
- the resistor 15 is arranged in the waveguide of the optical branch circuit 12 . Further, an electrode 16 is arranged on the resistor 15 via an electric wiring.
- the controller 31 is electrically connected to the photodetector 14 and the electrode 16 respectively.
- the control unit 31 has a power supply that supplies voltage to the resistor 15 via the electrode 16 .
- a photocurrent is also input from the photodetector 14 . From the photocurrent spectrum obtained from this photocurrent and the voltage supplied to the resistor 15, the characteristics (guiding loss) of the optical circuit are evaluated (described later).
- the light from the light source propagates through the optical fiber 21 , enters the optical input element 11 in the optical characteristic inspection circuit, and is branched by the optical branch circuit 12 .
- One of the split lights is input to the first optical circuit 13_1, and the other light is input to the second optical circuit 13_2.
- the output light from each of the first optical circuit 13_1 and the second optical circuit 13_2 is input to the photodetector 14 .
- the input light is converted into electricity by the photodetector 14 , output as a photocurrent, and input to the control unit 31 .
- the electrical output (photocurrent) from the photodetector 14 corresponds to the sum of the intensities of light passing through the first optical circuit 13_1 and the second optical circuit 13_2.
- optical characteristic inspection circuit 10 the transmission characteristic and the branching ratio of the optical branching circuit 12 change according to the phase of the input light.
- one of the split lights reaches the photodetector 14 after passing through the first optical circuit 13_1.
- the other light reaches the photodetector 14 after passing through the second optical circuit 13_2.
- the photocurrent spectrum detected and output by the photodetector 14 is the sum of the current due to the transmitted light through the first optical circuit 13_1 and the current due to the transmitted light through the second optical circuit 13_2.
- a resistor (heater) 15 that generates heat when an electrical input is supplied from the outside, and an electrode 16 connected to the resistor 15 via electrical wiring are arranged.
- a voltage is applied to the resistor 15 through the electrode 16 and the electrical wiring to generate heat in the resistor 15.
- the phase of the input light changes according to the change in the refractive index due to the thermo-optical effect of the waveguide of the optical branch circuit 12. can be changed.
- the optical characteristic inspection circuit 10 by changing the phase of the input light, the transmission characteristic of the optical branching circuit 12 and its branching ratio are changed.
- the optical characteristics (guiding loss) of the first optical circuit 13_1 and the second optical circuit 13_2 are inspected from the change in the photocurrent (photocurrent spectrum) that accompanies the change in the branching ratio. Details will be described later.
- the optical characteristic inspection circuit 10 includes a grating coupler 11, an optical branch circuit 12, a first optical circuit 13_1, a second optical circuit 13_2, and a photodetector .
- Grating coupler 11 may be another wafer surface light input device.
- the resistor 15 is arranged in the waveguide of the optical branch circuit 12 . Further, an electrode 16 is arranged on the resistor 15 via an electric wiring.
- the input light is then input to the optical branch circuit 12 .
- the optical branching circuit 12 is a directional coupler composed of two adjacent waveguides, two input ports, and two output ports. Here, one input port connects to one of the two waveguides and connects to one output port.
- a grating coupler 11 is connected to one input port.
- the other input port connects to the other waveguide and connects to the other output port.
- the optical branch circuit 12 should have at least one input port.
- a portion of the light input to one input port of the optical branch circuit 12 is transmitted through one waveguide and output from one output port.
- another part of the input light is coupled to the other waveguide in the region where the two waveguides are adjacent to each other, is transmitted therethrough, and is output from the other output port.
- all of the light input to one input port of the optical branch circuit 12 may pass through one waveguide and be output from one output port.
- all of the input light may be coupled to the other waveguide in the region where the two waveguides are adjacent, pass through the other waveguide, and be output from the other output port.
- optical waveguides The light output from one output port is input to the first optical circuit 13_1. Also, the light output from the other output port is input to the second optical circuit 13_2.
- the quality of the optical waveguides of the first optical circuit 13_1 and the second optical circuit 13_2 (hereinafter, the waveguides of the first optical circuit 13_1 and the second optical circuit 13_2 are referred to as "optical waveguides") is approximately They are equivalent and differ in the length of the optical waveguides.
- quality corresponds to waveguide loss per unit length, and depends on the layer structure, cross-sectional shape, and the like.
- FIG. 2 shows an example in which the output lights from the first optical circuit 13_1 and the second optical circuit 13_2 are input to different end faces of the photodetector 14. However, even if they are input to the same end face of the photodetector 14, good.
- the input light is converted to electricity in the photodetector 14 and output as a photocurrent.
- the photocurrent corresponds to the sum of the intensity of light transmitted through the first optical circuit 13_1 and the second optical circuit 13_2.
- a resistor 15 is arranged in each of two adjacent waveguides in the optical branch circuit 12 .
- This resistor 15 generates heat when a voltage is applied through the electrode 16 and the electrical wiring.
- the refractive index changes due to the thermo-optical effect of the waveguide, so that the phase of the input light can be changed.
- the transmission characteristics of the waveguides of the optical branching circuit 12 change due to the phase change of the input light, the branching ratio of the light branched and output from each waveguide can be changed.
- the resistor 15 may be placed in either of the two waveguides.
- metal or the like as a resistor is placed on the surface of the waveguide, light propagating through the waveguide is scattered by the metal or the like, resulting in optical loss.
- the branching ratio of the output light in other words, the first optical circuit 13_1 and the second light
- the intensity of light input to each circuit 13_2 can be changed.
- a voltage may be applied to the resistors 15 arranged in both of the two waveguides.
- the optical characteristic inspection circuit 10 by changing the voltage applied to the resistor 15, the intensity of the light transmitted through the first optical circuit 13_1 and the second optical circuit 13_2 is changed.
- the photocurrent in photodetector 14 changes.
- the waveguide loss of the optical waveguide of the optical circuit can be evaluated from the change in the photocurrent (photocurrent spectrum). Details are described below.
- FIG. 3 shows a schematic diagram of a photocurrent spectrum obtained at the photodetector 14. As shown in FIG. The photocurrent spectrum is obtained by changing the voltage applied to the resistor 15, that is, the power supplied to the resistor and measuring the photocurrent.
- the dotted line indicates the photocurrent contribution component of the first optical circuit 13_1
- the dashed line indicates the photocurrent contribution component of the second optical circuit 13_2.
- the solid line is the photocurrent spectrum measured by the photodetector 14 and corresponds to the sum of the photocurrent contribution components of the first optical circuit 13_1 and the second optical circuit 13_2.
- the amplitude of each photocurrent spectrum corresponds to the waveguide loss of the optical circuit.
- the first optical circuit 13_1 is longer than the second optical circuit 13_2, so the optical loss is large. Therefore, the photocurrent contribution component of the first optical circuit 13_1 is smaller than the photocurrent contribution component of the second optical circuit 13_2.
- the minimum value in the photocurrent spectrum (solid line) the light intensity is minimum, that is, the optical loss is maximum, so it corresponds to the case where all the input light is transmitted through the first optical circuit 13_1.
- the photocurrent contribution component of the first optical circuit 13_1 is 100%.
- the minimum value in the photocurrent spectrum (solid line) is due to the waveguide loss of the first optical circuit 13_1.
- the light intensity is maximum, that is, the optical loss is minimum, so it corresponds to the case where all the input light is transmitted through the second optical circuit 13_2.
- the photocurrent contribution component of the second optical circuit 13_2 is 100%.
- the maxima in the photocurrent spectrum (solid line) are due to the waveguide loss of the second optical circuit 13_2.
- the difference ( ⁇ S) between the maximum and minimum values of the photocurrent is due to the difference in waveguide loss caused by the difference in length ( ⁇ L) between the first optical circuit 13_1 and the second optical circuit 13_2. .
- the waveguide loss per unit length can be evaluated by calculating ⁇ S/ ⁇ L (dB/m) as an inspection result of the optical waveguide in the optical circuit.
- the average value of the multiple maximum values (or minimum values) may be used to calculate ⁇ S/ ⁇ L.
- one value may be selected from a plurality of maximum values (or minimum values) and used. Maximum and minimum values may be used.
- the common photodetector 14 is used in the optical characteristic inspection circuit 10, even if the sensitivity of each manufactured photodetector varies, only the entire photocurrent spectrum increases or decreases, and the amplitude is not affected. Therefore, the waveguide loss of the optical waveguide of the optical circuit formed on the substrate is similarly evaluated by acquiring and evaluating the photocurrent spectrum using the optical characteristic inspection circuit having the optical circuit of different length. can do.
- optical characteristic inspection circuit and the optical characteristic inspection method according to the present embodiment it is not necessary to sweep the wavelength of the input light. Optical characteristics (guiding loss) can be accurately evaluated.
- the optical characteristic inspection circuit according to the present embodiment can be used to configure the optical characteristic inspection apparatus according to the first embodiment, and the optical characteristics of the optical circuit can be inspected.
- the optical characteristic inspection circuit 20 includes a grating coupler 11, an optical branch circuit 22, a first optical circuit 13_1, a second optical circuit 13_2, and a photodetector .
- a resistor 25 is arranged in the waveguide of the optical branch circuit 22 . Further, the electrode 16 is arranged on the resistor 25 via electric wiring.
- the optical branch circuit 22 is a so-called asymmetric Mach-Zehnder interferometer, which includes multimode interferometers (MMI) at both input and output ends and two arm waveguides of different lengths.
- MMI multimode interferometers
- the asymmetric Mach-Zehnder interferometer type optical branching circuit 22 splits light and inputs it into each of two arm waveguides, merges the light from each arm waveguide, and splits it into a first optical circuit. 13_1 and the second optical circuit 13_2.
- heat is generated by applying a voltage to at least one of the resistors 25 arranged in the two arm waveguides.
- the refractive index changes due to the thermo-optical effect of the arm waveguide, so that the phase of the input light can be changed.
- This change in the phase of the input light changes the transmission characteristics of the arm waveguide, so that the branching ratio of the output light can be changed.
- the light from the light source is input to the grating coupler 11, branched by the optical branch circuit 22, and sent to the first optical circuit 13_1 and the second optical circuit. 13_2 and input to the photodetector 14 .
- the waveguide loss of the optical waveguide of the optical circuit is evaluated from the photocurrent spectrum obtained by changing the voltage applied to the resistor 25 .
- the optical characteristic inspection circuit according to the present embodiment can be used to configure the optical characteristic inspection apparatus according to the first embodiment.
- the characteristics of the optical circuit can be inspected by the optical characteristic inspection method according to the first embodiment.
- both the directional coupler and the asymmetric Mach-Zehnder interferometer are fabricated on commercially available silicon-on-insulator substrates using known lithographic techniques, thin-film volumetric techniques and dry etching techniques. be able to.
- a germanium photodiode or the like can be used as a photodetector. , thin film deposition, and dry etching.
- an indium gallium arsenide photodiode or the like may be used as the photodetector.
- a wafer or die containing an indium phosphide thin film is bonded onto a commercially available silicon-on-insulator substrate by a wafer bonding technique, and after removing an unnecessary substrate portion, , lithography, crystal regrowth, and dry etching.
- the core material of the optical circuit is silicon
- the core material should have a higher refractive index than the clad material.
- the core material is a silicon oxide film, a silicon oxynitride film, or a silicon nitride film with a high silicon content.
- the clad material should have a refractive index smaller than that of the core material.
- An organic material such as resin or polyimide may be used.
- the present invention can be applied to an optical characteristic inspection apparatus and the like used for inspection of optical waveguides that constitute optical devices.
- optical characteristic inspection device 10 optical characteristic inspection circuit 11 optical input element 12 optical branch circuit 13_1 first optical circuit to be inspected (first optical circuit) 13_2 Second optical circuit to be inspected (second optical circuit) 14 photodetector 15 resistor 16 electrode 21 optical fiber 31 controller
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Abstract
Description
本発明の第1の実施の形態に係る光特性検査用回路および光特性検査装置について、図1を参照して説明する。
本実施の形態に係る光特性検査装置1は、図1に示すように、光特性検査用回路10と、光ファイバ21と、制御部31とを備える。
次に、光特性検査用回路10の基本動作について説明する。光特性検査用回路10では、光分岐回路12の透過特性およびその分岐比が入力光の位相によって変化する。
本発明の第1の実施例に係る光特性検査用回路および光特性検査方法について、図2、3を参照して説明する。
本実施例に係る光特性検査用回路10は、グレーティングカプラ11と、光分岐回路12と、第1の光回路13_1と、第2の光回路13_2と、光検出器14とを備える。グレーティングカプラ11は、他のウェハ面光入力素子でもよい。
任意の単一波長と任意の位相を有する光が、光ファイバからグレーティングカプラ11に入力される。
図3に、光検出器14において得られる光電流スペクトルの概略図を示す。光電流スペクトルは、抵抗体15に印加する電圧、すなわち抵抗体に供給する電力(パワー)を変化させ、光電流を測定することにより得られる。
本発明の第2の実施例に係る光特性検査用回路について、図4を参照して説明する。
本実施例に係る光特性検査用回路20は、グレーティングカプラ11と、光分岐回路22と、第1の光回路13_1と、第2の光回路13_2と、光検出器14とを備える。
非対称マッハツェンダ干渉計型の光分岐回路22は、光を分岐して2本のアーム導波路のそれぞれに入力し、各アーム導波路からの光を合流させてから分岐して、第1の光回路13_1と、第2の光回路13_2それぞれに出力する。
10 光特性検査用回路
11 光入力素子
12 光分岐回路
13_1 第1の検査対象光回路(第1の光回路)
13_2 第2の検査対象光回路(第2の光回路)
14 光検出器
15 抵抗体
16 電極
21 光ファイバ
31 制御部
Claims (5)
- 順に、光入力素子と、
抵抗体を有する光分岐回路と、
前記光分岐回路の一方の出力と接続する第1の検査対象光回路と、
前記光分岐回路の他方の出力と接続する第2の検査対象光回路と、
前記第1の検査対象光回路を透過する光と、前記第2の検査対象光回路を透過する光の強度を検出する光検出器と
を備える光特性検査用回路。 - 前記光分岐回路が、2本の導波路を有し、
前記抵抗体が、少なくとも前記2本の導波路のいずれか一方の導波路に配置されることを特徴とする請求項1に記載の光特性検査用回路。 - 請求項1又は請求項2に記載の光特性検査用回路と、
制御部と
を備え、
前記制御部が、前記抵抗体に供給する電圧と、前記光検出器から入力される光電流とから光電流スペクトルを取得する
ことを特徴とする光特性検査装置。 - 前記制御部が、前記光電流スペクトルより、前記第1の検査対象光回路および前記第2の検査対象光回路の導波損出を算出する
ことを特徴とする請求項3に記載の光特性検査装置。 - 請求項1又は請求項2に記載の光特性検査用回路を用いる光特性検査方法であって、
前記抵抗体に供給する電圧を変化させるステップと、
前記第1の検査対象光回路を透過する光と、前記第2の検査対象光回路を透過する光とによる光電流を取得するステップと、
前記電圧と、前記光電流とから光電流スペクトルを取得するステップと、
前記光電流スペクトルにおける極大値と極小値との差と、前記第1の検査対象光回路と前記第2の検査対象光回路との差から、単位長さ当たりの導波損失を算出するステップと
を備える光特性検査方法。
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Citations (7)
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US4786130A (en) * | 1985-05-29 | 1988-11-22 | The General Electric Company, P.L.C. | Fibre optic coupler |
JPH0851395A (ja) * | 1994-08-03 | 1996-02-20 | Nippon Telegr & Teleph Corp <Ntt> | 光コンセント |
JP2007067760A (ja) * | 2005-08-31 | 2007-03-15 | Nippon Telegr & Teleph Corp <Ntt> | 光分岐挿入スイッチ |
JP2008079342A (ja) * | 2007-11-27 | 2008-04-03 | Fujikura Ltd | 光クロスコネクト装置 |
JP2013142639A (ja) * | 2012-01-11 | 2013-07-22 | Sumitomo Bakelite Co Ltd | 光導波路評価装置および光導波路評価方法 |
JP2018186414A (ja) * | 2017-04-26 | 2018-11-22 | 日本電信電話株式会社 | 光送受信回路 |
JP2019096763A (ja) * | 2017-11-24 | 2019-06-20 | 日本電信電話株式会社 | 光特性検査用回路 |
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- 2021-03-25 WO PCT/JP2021/012522 patent/WO2022201423A1/ja active Application Filing
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4786130A (en) * | 1985-05-29 | 1988-11-22 | The General Electric Company, P.L.C. | Fibre optic coupler |
JPH0851395A (ja) * | 1994-08-03 | 1996-02-20 | Nippon Telegr & Teleph Corp <Ntt> | 光コンセント |
JP2007067760A (ja) * | 2005-08-31 | 2007-03-15 | Nippon Telegr & Teleph Corp <Ntt> | 光分岐挿入スイッチ |
JP2008079342A (ja) * | 2007-11-27 | 2008-04-03 | Fujikura Ltd | 光クロスコネクト装置 |
JP2013142639A (ja) * | 2012-01-11 | 2013-07-22 | Sumitomo Bakelite Co Ltd | 光導波路評価装置および光導波路評価方法 |
JP2018186414A (ja) * | 2017-04-26 | 2018-11-22 | 日本電信電話株式会社 | 光送受信回路 |
JP2019096763A (ja) * | 2017-11-24 | 2019-06-20 | 日本電信電話株式会社 | 光特性検査用回路 |
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