WO2022196555A1 - 表面被覆切削工具 - Google Patents

表面被覆切削工具 Download PDF

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Publication number
WO2022196555A1
WO2022196555A1 PCT/JP2022/010850 JP2022010850W WO2022196555A1 WO 2022196555 A1 WO2022196555 A1 WO 2022196555A1 JP 2022010850 W JP2022010850 W JP 2022010850W WO 2022196555 A1 WO2022196555 A1 WO 2022196555A1
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Prior art keywords
layer
coating layer
less
content
cutting
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Ceased
Application number
PCT/JP2022/010850
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English (en)
French (fr)
Japanese (ja)
Inventor
大輝 江畑
英利 淺沼
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Mitsubishi Materials Corp
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Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP2023507059A priority Critical patent/JP7794188B2/ja
Priority to CN202280022266.9A priority patent/CN117042898A/zh
Priority to EP22771303.9A priority patent/EP4309835A4/en
Priority to KR1020237032538A priority patent/KR20230159440A/ko
Priority to US18/281,831 priority patent/US20240157450A1/en
Publication of WO2022196555A1 publication Critical patent/WO2022196555A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • B23B27/148—Composition of the cutting inserts
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/347—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/44—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by a measurable physical property of the alternating layer or system, e.g. thickness, density, hardness
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates

Definitions

  • the present invention relates to a surface-coated cutting tool (hereinafter sometimes referred to as a coated tool).
  • a coated tool This application claims priority from Japanese Patent Application No. 2021-46163 filed on March 19, 2021. All the contents described in the Japanese patent application are incorporated herein by reference.
  • a coated tool for example, a tool substrate (substrate) formed of a tungsten carbide (hereinafter referred to as WC)-based cemented carbide or the like and having a coating layer formed thereon is known.
  • WC tungsten carbide
  • Patent Document 1 describes (Al x Ti 1-x ) (B y N 1-y ) (x is 0.05 to 0.75, y is 0.02 to 0.12) on the surface of the substrate. ) and having an average thickness of 0.5 to 8.0 ⁇ m, the coated tool is boric nitrided by adding boron (B) to the coating layer. It is said that it exhibits excellent wear resistance by having a solid layer and has low reactivity (low adhesion) with iron-based work materials.
  • the present invention has been made in view of the above circumstances and proposals, and has excellent wear resistance even when subjected to high-speed cutting, such as martensitic stainless steel, where the cutting speed is 30% or more higher than normal conditions.
  • An object of the present invention is to provide a coated tool that exhibits
  • a surface-coated cutting tool is 1) having a substrate and a coating layer on the surface of the substrate; 2) the coating layer includes a layer having an average thickness of 0.1 ⁇ m or more and 10.0 ⁇ m or less, in which the first layer and the second layer are alternately laminated; 3)
  • the first layer has an average thickness of 0.5 nm or more and 100.0 nm or less, and an average composition of (Al x Ti 1-xyz M y )B z N (where M is one or more elements selected from Groups 4, 5 and 6 of the periodic table and lanthanoids, x is 0.100 or more and 0.640 or less, y is 0.001 or more and 0.100 or less, z is 0.060 or more and 0.400 or less), 4)
  • the second layer has an average thickness of 0.5 nm or more and 100.0 nm or less, and an average composition of (Al p Cr 1-p )N (p is 0.650 or more and 0.900 below) and 5)
  • the surface-coated cutting tool described above exhibits excellent wear resistance and chipping resistance even when used for high-speed cutting of stainless steel such as martensitic stainless steel.
  • FIG. 3 is a schematic diagram showing a cutting edge ridge line in the surface-coated cutting tool according to the embodiment of the present invention.
  • the present inventor conducted extensive research on a coated tool that exhibits excellent wear resistance even when used for high-speed cutting of stainless steel such as martensitic stainless steel. As a result, although the coating layer containing B is excellent in wear resistance, it is brittle.
  • the present inventor believes that since B is a light element at the ridgeline of the cutting edge, the content of B decreases with respect to the portion away from the ridgeline of the cutting edge due to resputtering. , The effect of improving hardness by containing B is not sufficiently exhibited, and as a result, the hardness of the cutting edge ridge line and other areas are different, so wear does not proceed uniformly, and abnormal damage such as chipping may occur. rice field.
  • the present inventors have further studied, and as a result, a layer containing B does not exist in the coating layer to compensate for the brittleness of the layer containing B and suppress the occurrence of abnormal damage to the coating layer.
  • the inventors have found that if the high-temperature hardness is improved by suppressing the decrease in the B content at the ridgeline of the cutting edge, the coating layer can exhibit excellent wear resistance.
  • Coating Layer The coating layer will be described below.
  • the average thickness of the layer in which the first layer and the second layer included in the coating layer are alternately laminated is 0.1 ⁇ m or more and 10.0 ⁇ m or less.
  • the reason why the average thickness is in this range is that if it is less than 0.1 ⁇ m, excellent wear resistance cannot be exhibited over a long period of use, while if it exceeds 10.0 ⁇ m, the crystal grains of the coating layer This is because the particles tend to coarsen, and the chipping resistance cannot be improved.
  • This average thickness is more preferably 0.8 ⁇ m or more and 8.0 ⁇ m or less.
  • the coating layer (2) in the coated tool according to the present embodiment is provided on the substrate (1), and the first layers are alternately laminated. (3) and a second layer (4).
  • the first layer has an average thickness of 0.5 nm or more and 100.0 nm or less per layer, and is obtained by averaging the composition of all the laminated first layers.
  • the average composition obtained is (Al x Ti 1-x-y-z M y )B z N (where M is one or more elements selected from Groups 4, 5, and 6 of the periodic table and lanthanides, x is 0.100 or more and 0.640 or less, y is 0.001 or more and 0.100 or less, and z is 0.060 or more and 0.400 or less).
  • the first layer as a whole may satisfy the above range, and may locally deviate from the above range.
  • the elements of groups 4, 5 and 6 of the periodic table refer to Zr, Hf, V, Nb, Ta, Cr, Mo and W.
  • the thickness is less than 0.5 nm, the improvement in crack propagation resistance brought about by the laminated structure cannot be sufficiently exhibited, while if it exceeds 100.0 nm, it is nano This is because the improvement in wear resistance brought about by lamination cannot be sufficiently exhibited.
  • the reason why the above range is preferable for the average composition is as follows.
  • x is less than 0.100, the heat resistance of the first layer cannot be sufficiently improved by the addition of Al. This is because the abrasion resistance cannot be exhibited.
  • y is less than 0.001, the heat resistance and mechanical properties of the first layer cannot be sufficiently improved by the addition of M.
  • y exceeds 0.100, the toughness of the first layer decreases. , chipping, and breakage are more likely to occur.
  • z is less than 0.060, the addition of B cannot sufficiently improve the hardness of the first layer. , is likely to cause defects.
  • Each second layer has an average thickness of 0.5 nm or more and 100.0 nm or less per layer, and is obtained by averaging the composition of all the laminated first layers.
  • the average composition is preferably (Al p Cr 1-p )N (p is 0.650 or more and 0.900 or less).
  • the thickness is less than 0.5 nm, the improvement in crack propagation resistance brought about by the laminated structure cannot be sufficiently exhibited, while if it exceeds 100.0 nm, it is nano This is because the improvement in wear resistance brought about by lamination cannot be sufficiently exhibited.
  • the first layer and the second layer are alternately laminated
  • the first layer and the second layer are preferably laminated alternately in the thickness direction.
  • the second layer containing no B compensates for the brittleness of the first layer, which has an increased B content to provide wear resistance
  • the coating layer as a whole is a martensitic stainless steel. It exhibits excellent wear resistance and chipping resistance even when used for high-speed cutting of stainless steel such as.
  • both the layer closest to the substrate and the layer closest to the surface of the tool substrate may be either the first layer or the second layer. I don't mind.
  • the number of laminated layers of the first layer and the second layer satisfies the average thickness of the first layer and the second layer, respectively, and the average thickness of the coating layer also satisfies the average thickness of the above range.
  • the number of laminations (the sum of the number of laminations of the first layer and the second layer) is more preferably 50 layers or more and 1000 layers or less.
  • the B content in the cutting edge ridgeline of the coating layer is 60% or more of the B content in the area 1 mm or more away from the cutting edge ridgeline of the coating layer in the flank direction. is preferably Although the upper limit of the B content is not restricted, 100% is a tentative upper limit in production by the PVD method, which will be described later.
  • the B content can be regarded as a constant value at a distance of 1 mm or more in the flank direction from the cutting edge ridgeline. Therefore, in the examples described later, the B content is measured at a point on a line 1.5 mm away from the cutting edge ridge in the flank direction.
  • the fact that the B content can be regarded as a constant value means that any line segment parallel to the cutting edge ridgeline that is 1 mm or more away from the cutting edge ridgeline in the direction of the flank face, any line segment on this line segment
  • the average value of the B content for the 5 points it means that the value is substantially the same, that is, it matches within the error range.
  • the B content in the cutting edge ridgeline of the coating layer is 60% or more with respect to the B content in the region separated by 1 mm or more in the flank direction from the cutting edge ridgeline of the coating layer, for example, the B content is 1 mm or more in the flank direction.
  • the cutting edge ridge is a line connecting the points at which the straight lines separate from the rake face and the flank face.
  • the point on the coating layer surface that is closest to the intersection of the approximate straight lines in the region that is, the region from the inflection point of the rake face to the inflection point of the flank face on the surface of the coating layer) (the point indicated by the dotted arrow) .
  • the object of the present invention can be achieved by having a first layer and a second layer, but when a TiN layer is formed as an upper layer of the coating layer, the TiN layer itself has a golden color tone.
  • the composition of the TiN layer is not limited to a stoichiometric composition as long as it exhibits a golden lining). It can be used as an identification layer that can The average thickness of the TiN layer as the identification layer may be, for example, 0.1 ⁇ m or more and 1.0 ⁇ m or less.
  • the film is formed so that there are no layers other than the first layer, the second layer, and the upper layer (TiN layer).
  • the film formation is changed to a layer of )
  • pressure fluctuations in the film formation apparatus unintentionally occurred, and unintentional oxygen and carbon different in composition from these layers were included between the adjacent layers. Layers may form.
  • the average thickness of each layer is measured using an energy dispersive X-ray spectroscope attached to a scanning electron microscope (SEM) or a transmission electron microscope (TEM).
  • SEM scanning electron microscope
  • TEM transmission electron microscope
  • Dispersive X-ray Spectrometer (EDS) Observation of a cross section in the layer thickness direction (a cross section perpendicular to this horizontal plane when ignoring minute irregularities on the substrate surface and treating the substrate surface as a horizontal plane: longitudinal cross section) can be done. That is, for example, it is magnified 5000 times, and the thickness at a plurality of points (for example, 5 points) is obtained and averaged.
  • the average composition is obtained by observing a longitudinal section using TEM-energy dispersive X-ray spectroscopy (EDS), and performing a line analysis of multiple lines (for example, 5 lines) in the thickness direction for Al, Ti, Cr. , the average value of the M amount.
  • EDS TEM-energy dispersive X-ray spectroscopy
  • B content z the contents of Al, Ti, Cr, M, and B in the entire coating layer from the surface are determined using an Electron Probe Micro Analyzer (EPMA). Since the second layer does not contain B, the ratio of Ti and B contents in the first layer is the same as the ratio of Ti and B contents in the entire coating layer. Therefore, the B content of the first layer is obtained from the Ti and M contents obtained by TEM-EDS and the Ti, M and B contents obtained by EPMA.
  • the substrate used in the present embodiment can be any material as long as it is a conventionally known substrate material, as long as it does not interfere with the achievement of the above-mentioned object.
  • cemented carbide WC-based cemented carbide, containing Co in addition to WC, and further containing carbonitrides such as Ti, Ta, Nb, etc.), cermet (TiC, TiN, TiCN, etc. as a main component, etc.), ceramics (titanium carbide, silicon carbide, silicon nitride, aluminum nitride, aluminum oxide, etc.), cBN sintered body, or diamond sintered body is preferable. .
  • the shape of the substrate is not particularly limited as long as it has a shape that can be used as a cutting tool, examples of which include the shape of an insert and the shape of a drill.
  • the coating layer of the coated tool of the present invention can be manufactured using a film forming apparatus having an evaporation source for arc ion plating (AIP), which is a type of PVD, and the first layer is AlTiMB. (M is one or more elements selected from Groups 4, 5, and 6 of the periodic table, and lanthanoids)
  • AIP arc ion plating
  • the second layer is an AlCr target, which is arc-discharged
  • the first layer and the second layer are alternately
  • the B content in the cutting edge ridge is 60% or more with respect to the B content in the area 1 mm or more away from the cutting edge ridge in the flank direction. can do.
  • Co powder, TiC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, and WC powder were prepared as raw material powders, and these raw material powders were blended in the composition shown in Table 1, and further Wax is added and wet-mixed in a ball mill for 72 hours, dried under reduced pressure, and then press-molded at a pressure of 100 MPa.
  • Substrates 1 to 3 made of WC-based cemented carbide and having an insert shape were produced.
  • the substrates 1 to 3 are ultrasonically cleaned in acetone, and dried. It was mounted along the outer circumference at a position spaced apart by a predetermined distance in the radial direction. Also, an AlTiMB (M was shown in Table 3) target and an AlCr target were arranged as a cathode electrode (evaporation source).
  • the inside of the film forming apparatus was evacuated and maintained at a vacuum of 10 ⁇ 2 Pa or less, the inside of the apparatus was heated to 400° C. with a heater, then set to an Ar gas atmosphere of 1.0 Pa, and placed on the rotary table.
  • a DC bias voltage of ⁇ 1000 V was applied to the rotating substrate, and the substrate surface was bombarded with argon ions for 60 minutes.
  • metal ion bombardment may be performed using a metal target.
  • Nitrogen gas having a partial pressure within the range of 0.1 to 9.0 Pa shown in Table 2 was introduced as a reaction gas into the film forming apparatus for a predetermined time, and the temperature inside the furnace was maintained at the temperature shown in Table 2.
  • a predetermined DC bias voltage within the range of -10 to -500 V shown in Table 2 was applied to the substrate rotating on the table (the same range for the first layer and the second layer), and 80 to 240 A shown in Table 2.
  • the coated tools of the present invention hereinafter referred to as "Examples" 1 to 9 shown in Table 3 were produced by passing a predetermined current within the range of to generate an arc discharge.
  • the average thicknesses of the first and second layers constituting the coating layer and the average composition of the coating layer were determined by the method described above.
  • the B content in the cutting edge ridgeline of the coating layer and the B content in the region 1 mm or more away from the cutting edge ridgeline of the coating layer in the flank direction are the cutting edge ridgeline portion of the coating layer and the cutting edge ridgeline of the coating layer, respectively.
  • the furnace temperature, DC bias voltage value, and arc current value shown in Table 2 were constant during the film formation period.
  • cutting test A and cutting test B were carried out as high-speed cutting tests for stainless steel such as martensitic stainless steel.
  • Cutting test A Work material: block material of width 60 mm x length 200 mm Cutting speed: 160 m/min. Notch: 1.5mm Feed: 0.12 mm/tooth.
  • a wet high-speed cutting test of martensitic stainless steel SUS420J2 was conducted under the conditions of . Cutting was performed up to a cutting length of 1.8 m, the flank wear width was measured, and the wear state of the cutting edge was observed. The results of cutting test A are shown in Table 5.
  • Cutting test B Work material: Block material of width 60 mm x length 200 mm Cutting speed: 170 m/min. Notch: 1.5mm Feed: 0.10 mm/tooth.
  • Wet high-speed cutting test of austenitic stainless steel SUS304 was conducted under the following conditions. Cutting was performed up to a cutting length of 1.8 m, the flank wear width was measured, and the wear state of the cutting edge was observed. Table 6 shows the results of the cutting test B.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
PCT/JP2022/010850 2021-03-19 2022-03-11 表面被覆切削工具 Ceased WO2022196555A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2023507059A JP7794188B2 (ja) 2021-03-19 2022-03-11 表面被覆切削工具
CN202280022266.9A CN117042898A (zh) 2021-03-19 2022-03-11 表面包覆切削工具
EP22771303.9A EP4309835A4 (en) 2021-03-19 2022-03-11 Surface-coated cutting tool
KR1020237032538A KR20230159440A (ko) 2021-03-19 2022-03-11 표면 피복 절삭 공구
US18/281,831 US20240157450A1 (en) 2021-03-19 2022-03-11 Surface-coated cutting tool

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021046163 2021-03-19
JP2021-046163 2021-03-19

Publications (1)

Publication Number Publication Date
WO2022196555A1 true WO2022196555A1 (ja) 2022-09-22

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PCT/JP2022/010850 Ceased WO2022196555A1 (ja) 2021-03-19 2022-03-11 表面被覆切削工具

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