WO2022193344A1 - 晶圆载具的存储装置 - Google Patents

晶圆载具的存储装置 Download PDF

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Publication number
WO2022193344A1
WO2022193344A1 PCT/CN2021/082623 CN2021082623W WO2022193344A1 WO 2022193344 A1 WO2022193344 A1 WO 2022193344A1 CN 2021082623 W CN2021082623 W CN 2021082623W WO 2022193344 A1 WO2022193344 A1 WO 2022193344A1
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WIPO (PCT)
Prior art keywords
storage device
main body
wafer carrier
roller
groove
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PCT/CN2021/082623
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English (en)
French (fr)
Inventor
邓群
王崇林
陈定操
Original Assignee
台湾积体电路制造股份有限公司
台积电(中国)有限公司
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Application filed by 台湾积体电路制造股份有限公司, 台积电(中国)有限公司 filed Critical 台湾积体电路制造股份有限公司
Publication of WO2022193344A1 publication Critical patent/WO2022193344A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D19/00—Pallets or like platforms, with or without side walls, for supporting loads to be lifted or lowered
    • B65D19/02—Rigid pallets with side walls, e.g. box pallets
    • B65D19/06—Rigid pallets with side walls, e.g. box pallets with bodies formed by uniting or interconnecting two or more components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D19/00—Pallets or like platforms, with or without side walls, for supporting loads to be lifted or lowered
    • B65D19/38—Details or accessories
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Definitions

  • the present application relates to the field of semiconductors, and in particular, to a storage device for a wafer carrier.
  • Multiple wafers are typically placed into cassettes, which are placed into carriers to facilitate handling in the fab.
  • the carriers are usually stored in a storage device, and the robot automatically grabs the carrier from the storage device when needed.
  • the existing storage device has no positioning function, and the positional accuracy of the carrier is poor, which is not conducive to the accurate grasping of the manipulator.
  • the present application provides a storage device for a wafer carrier, which can automatically position the wafer carrier.
  • the present application provides a storage device for a wafer carrier, which includes: a support plate, including a first end portion, a main body portion and a second end portion continuously arranged along a first direction; a spacer block, fixed on the first end portion The lower side of the support plate is inclined as a whole, and the first end is higher than the second end; the stopper is fixed on the upper side of the second end; two limit plates are fixed on the upper side of the main body and are arranged at intervals along the second direction, the second direction is perpendicular to the first direction; a plurality of transmission assemblies are arranged between the two limit plates and are arranged at intervals along the second direction, and each transmission assembly includes a plurality of transmission assemblies arranged along the first direction Rollers, each of which is rotatably connected to the main body portion, each roller at least partially protrudes from the upper surface of the main body portion and is used for supporting the wafer carrier. In each transmission assembly, the heights of the plurality of rollers gradually decrease in the direction close to the second end
  • the upper surface of the first end portion is an arc-shaped surface, and an end of the arc-shaped surface close to the main body portion is higher than an end of the arc-shaped surface away from the main body portion.
  • the roller includes a mandrel and a roller body sleeved on the mandrel, the mandrel is connected to the main body, and at least part of the roller protrudes from the upper surface of the main body.
  • the main body portion is provided with a plurality of first through holes, and the plurality of first through holes are arranged at intervals along the second direction.
  • the transmission assembly is arranged corresponding to the first through hole. A part of the roller body of the roller of the transmission assembly is accommodated in the corresponding first through hole.
  • the main body portion has a first groove, the first groove is recessed relative to the upper surface of the main body portion, and the first through hole penetrates through the bottom wall of the first groove.
  • the bottom wall of the first groove includes two connection areas, which are respectively located on both sides of the first through hole along the second direction. Each connection area is formed with a second groove, and the second groove is recessed relative to the upper surface of the connection area and communicated with the first through hole. Both ends of the mandrel are respectively inserted into the second grooves of the two connecting areas.
  • the storage device further includes a cover plate received in the first groove and covering the second groove.
  • the cover plate is provided with a second through hole, and the roller body of the roller is exposed through the second through hole.
  • the upper surface of the cover plate is flush with the upper surface of the main body portion.
  • the storage device further includes a sensor disposed on the stopper and used to detect whether the wafer carrier reaches a set position.
  • the support plate is inclined at an angle of 5°-15°.
  • one end of each limiting plate close to the first end is provided with a guiding inclined surface, and the guiding inclined surface is used to guide the wafer carrier to enter between the two limiting plates.
  • the handler places the wafer carrier on the rollers; under the action of gravity, the wafer carrier automatically slides down along the multiple rollers in the transmission assembly.
  • the two limiting plates can limit the wafer carrier from both sides, and play a guiding role to guide the wafer carrier to slide down to prevent the wafer carrier from slipping off the support plate.
  • the stopper block stops the wafer carrier from continuing to slide down, and at this time, the wafer carrier moves to the set position.
  • the carrier does not need to precisely place the wafer carrier at the set position, but only needs to place the wafer carrier on the rollers. No extra force is required, and the wafer carrier can be automatically slid to Set the location. Therefore, the embodiment of the present application can simplify the placement process of the wafer carrier, and automatically position the wafer carrier, which is convenient for grasping by the robot.
  • FIG. 1 is a schematic structural diagram of a storage device and a wafer carrier according to an embodiment of the present application
  • FIG. 2 is a schematic structural diagram of the storage device shown in FIG. 1;
  • FIG. 3 is a schematic structural diagram of the storage device shown in FIG. 2 at another angle;
  • FIG. 4 is a side view of the storage device described in FIG. 2, wherein one limiting plate is omitted;
  • FIG. 5 is a schematic structural diagram of a storage device according to a specific embodiment of the present application, wherein one cover plate is omitted;
  • FIG. 6 is an enlarged schematic view of the storage device shown in FIG. 5 at the circle frame A;
  • FIG. 7 is an enlarged schematic view of the storage device shown in FIG. 5 at the circle frame B;
  • FIG. 8 is a partial cross-sectional schematic diagram of a storage device according to an embodiment of the present application.
  • the storage device of the embodiment of the present application is used for storing wafer carriers.
  • FIG. 1 is a schematic structural diagram of a storage device and a wafer carrier according to an embodiment of the present application
  • FIG. 2 is a schematic structural diagram of the storage device shown in FIG. 1
  • FIG. 3 is another perspective of the storage device shown in FIG. 2 Schematic diagram of the structure
  • FIG. 4 is a side view of the storage device described in FIG. 2, one of the limiting plates is omitted.
  • the storage device of the wafer carrier includes a support plate 1 , a spacer block 2 , a stop block 3 , two limit plates 4 and a plurality of transmission assemblies 5 .
  • the support plate 1 includes a first end portion 11 , a main body portion 12 and a second end portion 13 which are continuously arranged along the first direction X.
  • the support plate 1 is generally a flat plate structure.
  • the spacer block 2 is fixed on the lower side of the first end portion 11 so that the support plate 1 is inclined as a whole, wherein the first end portion 11 is higher than the second end portion 13 .
  • the spacer 2 is removably connected to the first end 11 by fasteners.
  • the inclination of the support plate 1 can be adjusted by replacing the spacer block 2 .
  • the stopper block 3 is fixed on the upper side of the second end portion 13 .
  • the stopper 3 may be one or more.
  • the second direction Y is perpendicular to the first direction X.
  • the support plate 1 is a generally rectangular plate.
  • the first direction X is parallel to the length direction of the support plate 1, and the second direction Y is parallel to the width direction of the support plate 1; or, the first direction X is parallel to the width direction of the support plate 1, and the second direction Y is parallel to the support plate 1 length direction.
  • the two limiting plates 4 are fixed on the upper side of the main body portion 12 and are arranged along the second direction Y at intervals.
  • the limiting plate 4 is a strip-shaped structure and extends along the first direction X.
  • at least one stopper block 3 is located between the two limit plates 4 .
  • a plurality of transmission assemblies 5 are arranged between the two limiting plates 4 and are arranged at intervals along the second direction Y.
  • Each transmission assembly 5 includes a plurality of rollers 51 arranged along the first direction X, each roller 51 is rotatably connected to the main body portion 12, and each roller 51 at least partially protrudes from the upper surface 121 of the main body portion 12 and is used for supporting the wafer carrier Tool 6.
  • the upper surface 121 of the body portion 12 is generally an inclined plane.
  • each transmission assembly 5 the heights of the plurality of rollers 51 gradually decrease in the direction close to the second end portion 13 . Because the supporting plate 1 is disposed obliquely as a whole, the heights of the plurality of rollers 51 in the transmission assembly 5 in the vertical direction Z gradually decrease. In the embodiment of the present application, the upper end of the limiting plate 4 is higher than the roller 51 .
  • the carrier places the wafer carrier 6 on the rollers 51 ; under the action of gravity, the wafer carrier 6 will automatically go down along the plurality of rollers 51 in the transmission assembly 5 slide.
  • the two limiting plates 4 can limit the wafer carrier 6 from both sides, and play a guiding role to guide the wafer carrier 6 to slide down, so as to prevent the wafer carrier 6 from sliding from the support plate 1 . slip on.
  • the stopper block 3 stops the wafer carrier 6 from continuing to slide down, and at this time, the wafer carrier 6 moves to the set position.
  • the carrier does not need to place the wafer carrier 6 precisely at the set position, but only needs to place the wafer carrier 6 on the roller 51 in general. 6 can automatically slide to the set position. Therefore, the embodiment of the present application can simplify the placement process of the wafer carrier 6, and automatically position the wafer carrier 6, which is convenient for grasping by the robot.
  • the storage device in the embodiment of the present application has an open structure, and the carrier can place the wafer carrier 6 from above, and the robot arm can also directly grab the wafer carrier 6 from above.
  • the storage device is mounted on the magazine.
  • a plurality of storage devices are fixedly mounted on the material rack, and each storage device is used for placing one wafer carrier 6 .
  • the carrier when the wafer carrier 6 needs to be placed, the carrier can place the wafer carrier 6 into the storage device from above, or can push the wafer carrier 6 into the storage device from the left side.
  • the upper surface of the first end portion 11 is an arc-shaped surface, and an end of the arc-shaped surface close to the main body portion 12 is higher than an end of the arc-shaped surface away from the main body portion 12 .
  • the curved surface can play a guiding role. Specifically, the carrier can put one end of the wafer carrier 6 on the first end portion 11 first, and then push the wafer carrier 6 to the right, and the curved surface can guide the wafer carrier 6 during the pushing process.
  • the two transmission assemblies 5 are respectively disposed close to the two limiting plates 4 .
  • the storage device further includes a sensor 7 disposed on the stopper 3 and used to detect whether the wafer carrier 6 reaches a set position.
  • the sensor 7 can be a photoelectric sensor, which can automatically detect the position of the wafer carrier 6 to ensure that the wafer carrier 6 slides to the set position.
  • the sensor 7 can also sense the position of the robot hand, so as to prevent the robot hand from damaging the wafer carrier 6 and the storage device.
  • the rollers 51 are dust-free rollers.
  • the angle ⁇ at which the support plate 1 is inclined is 5°-15°.
  • each limiting plate 4 close to the first end portion 11 is provided with a guiding slope 41 , and the guiding slope 41 is used to guide the wafer carrier 6 to enter between the two limiting plates 4 .
  • the guide slopes 41 of the two limiting plates 4 face each other. When the wafer carrier 6 is pushed into the storage device from the left, the guide slope 41 can guide the wafer carrier 6 to move, so that the wafer carrier 6 enters between the two limiting plates 4 and slides along the rollers 51 .
  • FIG. 5 is a schematic structural diagram of a storage device according to a specific embodiment of the present application, wherein one cover is omitted;
  • FIG. 6 is an enlarged schematic view of the storage device shown in FIG. 5 at the circle frame A;
  • FIG. 7 is a storage device shown in FIG. 5 .
  • FIG. 8 is a schematic partial cross-sectional view of a storage device according to an embodiment of the present application. Wherein, the cover plate in FIG. 6 is omitted, while the cover plate in FIG. 7 is retained.
  • the roller 51 includes a mandrel 511 and a roller body 512 sleeved on the mandrel 511 , the mandrel 511 is connected to the main body portion 12 , and at least a part of the roller 51 protrudes from the mandrel 511 .
  • the upper surface 121 of the main body portion 12 Exemplarily, both ends of the mandrel 511 protrude from the roller body 512 and are connected to the main body portion 12 .
  • the roller body 512 is rotatably connected to the mandrel 511 , and both ends of the mandrel 511 are fixed to the main body 12 ; when the wafer carrier 6 slides on the roller body 512 , the roller body 512 wraps around the mandrel 511 turn.
  • the roller body 512 is fixed to the mandrel 511 , and both ends of the mandrel 511 are rotatably connected to the main body 12 via bearings; when the wafer carrier 6 slides on the roller body 512 , the roller body 512 and the The mandrel 511 rotates synchronously.
  • the main body portion 12 is provided with a plurality of first through holes 122 , and the plurality of first through holes 122 are arranged along the second direction Y at intervals.
  • the transmission assembly 5 is arranged corresponding to the first through hole 122 .
  • the number of the transmission assembly 5 is the same as that of the first through holes 122 , for example, there are two first through holes 122 .
  • the first through hole 122 is a rectangular hole.
  • a part of the roller body 512 of the roller 51 of the transmission assembly 5 is accommodated in the corresponding first through hole 122 .
  • the roller bodies 512 of the plurality of rollers 51 are sequentially arranged along the first direction X in the first through hole 122 .
  • an escape space can be provided for the roller 51 , which facilitates the installation of the roller 51 .
  • the body portion 12 has a first groove 123 , the first groove 123 is recessed relative to the upper surface 121 of the body portion 12 , and the first through hole 122 penetrates through the bottom wall 124 of the first groove 123 .
  • the bottom wall 124 of the first groove 123 includes two connecting regions 124a, which are located on both sides of the first through hole 122 along the second direction Y, respectively.
  • Each connection area 124a is formed with a second groove 124b, and the second groove 124b is recessed relative to the upper surface of the connection area 124a and communicated with the first through hole 122 . Both ends of the mandrel 511 are inserted into the second grooves 124b of the two connecting regions 124a, respectively.
  • the roller body 512 When assembling the roller 51, the roller body 512 is inserted into the first through hole 122, and the two ends of the mandrel 511 are respectively inserted into the first grooves 123 of the two connecting areas 124a.
  • each connection area 124a is formed with a plurality of second grooves 124b arranged in sequence along the first direction X, and the number of the second grooves 124b in the connection area 124a is the same as the number of the rollers 51 of the transmission assembly 5 and One-to-one correspondence.
  • the storage device further includes a cover plate 8 received in the first groove 123 and covering the second groove 124b.
  • the cover plate 8 can cover the second groove 124b, which can function as a stopper for the mandrel 511 to prevent the mandrel 511 from coming out of the second groove 124b.
  • the cover plate 8 is a rectangular structure whose size and shape are adapted to the first groove 123 .
  • the cover plate 8 simultaneously covers the plurality of second grooves 124b of the connection area 124a.
  • the cover plate 8 is provided with a second through hole 81 , and the roller body 512 of the roller 51 is exposed through the second through hole 81 . A portion of the roller body 512 protrudes from the cover plate 8 to support the wafer carrier 6 .
  • the upper surface 82 of the cover plate 8 is flush with the upper surface 121 of the main body portion 12 .

Abstract

本申请涉及一种晶圆载具的存储装置。本申请实施例的存储装置包括：支撑板，包括沿第一方向连续设置的第一端部、主体部和第二端部；垫块，固定于第一端部的下侧以使支撑板整体倾斜设置，第一端部高于第二端部；止挡块，固定于第二端部的上侧；两个限位板，固定于主体部的上侧并沿第二方向间隔设置，第二方向垂直于第一方向；多个传动组件，设置于两个限位板之间并沿第二方向间隔设置，各传动组件包括沿第一方向布置的多个滚轮，各滚轮可转动地连接于主体部，各滚轮至少部分凸出于主体部的上表面并用于支撑晶圆载具。在各传动组件中，沿靠近第二端部的方向，多个滚轮的高度逐渐降低。

Description

晶圆载具的存储装置
相关申请的交叉引用
本申请要求享有于2021年03月19日提交的名称为“晶圆载具的存储装置”的中国专利申请202120570954.1的优先权，该申请的全部内容通过引用并入本文中。
技术领域
本申请涉及半导体领域，特别是涉及一种晶圆载具的存储装置。
背景技术
传统的半导体制造工厂通常包含必要的制造机台，用以处理半导体晶圆，诸如曝光、化学机械研磨或化学气相沉积。在制造过程中，半导体晶圆需要通过一系列的各式各样的机台，用以完成制造步骤。
多个晶圆通常放置到卡匣(cassette)内，而卡匣会被放入载具中，以利于在厂房中搬运。载具通常存放在存储装置中，当需要时，机械手自动从存储装置上抓取载具。然而，现有的存储装置无定位功能，载具的位置精度较差，不利于机械手的准确抓取。
发明内容
本申请提供一种晶圆载具的存储装置，其能够自动对晶圆载具进行定位。
本申请提出了一种晶圆载具的存储装置，其包括：支撑板，包括沿第一方向连续设置的第一端部、主体部和第二端部；垫块，固定于第一端部的下侧以使支撑板整体倾斜设置，第一端部高于第二端部；止挡块，固定于第二端部的上侧；两个限位板，固定于主体部的上侧并沿第二方向间隔设置，第二方向垂直于第一方向；多个传动组件，设置于两个限位板之间并沿第二方向间隔设置，各传动组件包括沿第一方向布置的多个滚轮，各滚轮可转动地连接于主体部，各滚轮至少部分凸出于主体部的上表面并用 于支撑晶圆载具。在各传动组件中，沿靠近第二端部的方向，多个滚轮的高度逐渐降低。
在一些实施例中，第一端部的上表面为弧形面，且弧形面的靠近主体部的一端高于弧形面的远离主体部的一端。
在一些实施例中，传动组件为两个。
在一些实施例中，滚轮包括芯轴和套设于芯轴的滚轮本体，芯轴连接于主体部，滚轮的至少部分凸出于主体部的上表面。
在一些实施例中，主体部设置有多个第一通孔，多个第一通孔沿第二方向间隔设置。传动组件与第一通孔对应设置。传动组件的滚轮的滚轮本体的一部分容纳于对应的第一通孔内。
在一些实施例中，主体部具有第一凹槽，第一凹槽相对于主体部的上表面凹陷，第一通孔贯通第一凹槽的底壁。第一凹槽的底壁包括两个连接区，分别位于第一通孔沿第二方向的两侧。各连接区形成有第二凹槽，第二凹槽相对于连接区的上表面凹陷并与第一通孔连通。芯轴的两端分别插入两个连接区的第二凹槽。
在一些实施例中，存储装置还包括盖板，盖板容纳于第一凹槽内并覆盖第二凹槽。盖板设置有第二通孔，滚轮的滚轮本体经由第二通孔露出。盖板的上表面与主体部的上表面齐平。
在一些实施例中，存储装置还包括传感器，设置于止挡块上且用于检测晶圆载具是否到达设定的位置。
在一些实施例中，支撑板倾斜的角度为5°-15°。
在一些实施例中，各限位板靠近第一端部的一端设置有导向斜面，导向斜面用于引导晶圆载具进入两个限位板之间。
当需要存储晶圆载具时，搬运人员将晶圆载具放置到滚轮上；在重力的作用下，晶圆载具会沿着传动组件中的多个滚轮自动向下滑动。在滑动的过程中，两个限位板可以从两侧限制晶圆载具，并起到导向的作用，引导晶圆载具向下滑动，避免晶圆载具从支撑板上滑落。当晶圆载具向下滑动至与止挡块接触时，止挡块阻挡晶圆载具继续下滑，此时，晶圆载具移动到设定的位置。在本申请实施例中，搬运人员无需将晶圆载具精确地放 置在设定位置，只需大体将晶圆载具放置到滚轮上即可，无需额外用力，晶圆载具可自动滑动至设定位置。因此，本申请实施例可以简化晶圆载具的放置过程，并自动对晶圆载具进行定位，便于机械手的抓取。
附图说明
下面将参考附图来描述本申请示例性实施例的特征、优点和技术效果。
图1为根据本申请一实施例的存储装置和晶圆载具的结构示意图；
图2为图1所示的存储装置的一结构示意图；
图3为图2所示的存储装置在另一角度的结构示意图；
图4为图2所述的存储装置的侧视图，其中一个限位板省略；
图5为根据本申请具体实施例的存储装置结构示意图，其中，一个盖板省略；
图6为图5所示的存储装置在圆框A处的放大示意图；
图7为图5所示的存储装置在圆框B处的放大示意图；
图8为根据本申请一实施例的存储装置的局部剖视示意图。
在附图中，附图未必按照实际的比例绘制。
具体实施方式
下面结合附图和实施例对本申请的实施方式作进一步详细描述。以下实施例的详细描述和附图用于示例性地说明本申请的原理，但不能用来限制本申请的范围，即本申请不限于所描述的实施例。
在本申请的描述中，需要说明的是，除非另有说明，“多个”的含义是两个以上；术语“上”、“下”、“左”、“右”、“内”、“外”等指示的方位或位置关系仅是为了便于描述本申请和简化描述，而不是指示或暗示所指的装置或组件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本申请的限制。此外，术语“第一”、“第二”等仅用于描述目的，而不能理解为指示或暗示相对重要性。“垂直”并不是严格意义上的垂直，而是在误差允许范围之内。“平行”并不是严格意义上的平行，而是在误差允许范围之内。
在本申请中提及“实施例”意味着，结合实施例描述的特定特征、结构或特性可以包含在本申请的至少一个实施例中。在说明书中的各个位置出现该短语并不一定均是指相同的实施例，也不是与其它实施例互斥的独立的或备选的实施例。本领域技术人员显式地和隐式地理解的是，本申请所描述的实施例可以与其它实施例相结合。
在本申请的描述中，还需要说明的是，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或一体地连接；可以是直接相连，也可以通过中间媒介间接相连。对于本领域的普通技术人员而言，可视具体情况理解上述术语在本申请中的具体含义。
在半导体的制造过程中，多个晶圆通常放置到卡匣(cassette)内，而卡匣会被放入晶圆载具中，以利于在厂房中搬运。本申请实施例的存储装置用于存储晶圆载具。
图1为根据本申请一实施例的存储装置和晶圆载具的结构示意图；图2为图1所示的存储装置的一结构示意图；图3为图2所示的存储装置在另一角度的结构示意图；图4为图2所述的存储装置的侧视图，其中一个限位板省略。
如图1至图4所示，本申请实施例的晶圆载具的存储装置包括支撑板1、垫块2、止挡块3、两个限位板4和多个传动组件5。
支撑板1包括沿第一方向X连续设置的第一端部11、主体部12和第二端部13。示例性地，支撑板1大体为平板结构。
垫块2固定于第一端部11的下侧以使支撑板1整体倾斜设置，其中，第一端部11高于第二端部13。通过在第一端部11的下侧安装垫块2，以增大第一端部11的高度，进而使支撑板1以设定的角度倾斜。
示例性地，垫块2通过紧固件可拆卸地连接于第一端部11。根据需要，可以通过更换垫块2，以调整支撑板1的倾斜程度。
止挡块3固定于第二端部13的上侧。止挡块3可为一个或多个。示例性地，止挡块3为多个并沿第二方向Y间隔设置。第二方向Y垂直于第一方向X。
在一些实施例中，支撑板1大体为矩形板。第一方向X平行于支撑板1的长度方向，第二方向Y平行于支撑板1的宽度方向；或者，第一方向X平行于支撑板1的宽度方向，第二方向Y平行于支撑板1的长度方向。
两个限位板4固定于主体部12的上侧并沿第二方向Y间隔设置。限位板4为条形结构并沿第一方向X延伸。示例性地，在第二方向Y上，至少一个止挡块3位于两个限位板4之间。
多个传动组件5设置于两个限位板4之间并沿第二方向Y间隔设置。各传动组件5包括沿第一方向X布置的多个滚轮51，各滚轮51可转动地连接于主体部12，各滚轮51至少部分凸出于主体部12的上表面121并用于支撑晶圆载具6。示例性地，主体部12的上表面121大体为倾斜的平面。
在各传动组件5中，沿靠近第二端部13的方向，多个滚轮51的高度逐渐降低。因为支撑板1整体倾斜设置，所以传动组件5中的多个滚轮51的在竖直方向Z上的高度逐渐降低。在本申请实施例中，限位板4的上端高于滚轮51。
当需要存储晶圆载具6时，搬运人员将晶圆载具6放置到滚轮51上；在重力的作用下，晶圆载具6会沿着传动组件5中的多个滚轮51自动向下滑动。在滑动的过程中，两个限位板4可以从两侧限制晶圆载具6，并起到导向的作用，引导晶圆载具6向下滑动，避免晶圆载具6从支撑板1上滑落。当晶圆载具6向下滑动至与止挡块3接触时，止挡块3阻挡晶圆载具6继续下滑，此时，晶圆载具6移动到设定的位置。在本申请实施例中，搬运人员无需将晶圆载具6精确地放置在设定位置，只需大体将将晶圆载具6放置到滚轮51上即可，无需额外用力，晶圆载具6可自动滑动至设定位置。因此，本申请实施例可以简化晶圆载具6的放置过程，并自动对晶圆载具6进行定位，便于机械手的抓取。
本申请实施例的存储装置为敞开式结构，搬运人员可以从上方放置晶圆载具6，机械手也可以直接从上方抓取晶圆载具6。
在一些实施例中，存储装置安装于料架上。示例性的，多个存储装置固定安装于料架上，每个存储装置用于放置一个晶圆载具6。
如图2所示，在需要放置晶圆载具6时，搬运人员可以从上方将晶圆 载具6放置到存储装置，也可以从左侧将晶圆载具6推入存储装置。
在一些实施例中，第一端部11的上表面为弧形面，且弧形面的靠近主体部12的一端高于弧形面的远离主体部12的一端。该弧形面可以起到引导作用。具体地，搬运人员可以先将晶圆载具6的一端搭在第一端部11上，然后再向右推动晶圆载具6，弧形面可以在推动过程中引导晶圆载具6。
在一些实施例中，传动组件5为两个。两个传动组件5分别靠近两个限位板4设置。
在一些实施例中，存储装置还包括传感器7，设置于止挡块3上且用于检测晶圆载具6是否到达设定的位置。示例性地，该传感器7可为光电传感器，其能自动侦测晶圆载具6的位置，保证晶圆载具6滑动至设定位置。另外，在机械手抓取晶圆载具6时，传感器7还可感应机械手的位置，避免机械手损伤晶圆载具6和存储装置。
在一些实施例中，滚轮51为无尘滚轮。
在一些实施例中，支撑板1倾斜的角度α为5°-15°。
在一些实施例中，各限位板4靠近第一端部11的一端设置有导向斜面41，导向斜面41用于引导晶圆载具6进入两个限位板4之间。两个限位板4的导向斜面41相互面对。从左侧将晶圆载具6推入存储装置时，导向斜面41可以引导晶圆载具6移动，以使晶圆载具6进入两个限位板4之间并沿着滚轮51滑动。
图5为根据本申请具体实施例的存储装置结构示意图，其中，一个盖板省略；图6为图5所示的存储装置在圆框A处的放大示意图；图7为图5所示的存储装置在圆框B处的放大示意图；图8为根据本申请一实施例的存储装置的局部剖视示意图。其中，图6中的盖板省略，而图7保留有盖板。
如图5至图8所示，在一些实施例中，滚轮51包括芯轴511和套设于芯轴511的滚轮本体512，芯轴511连接于主体部12，滚轮51的至少部分凸出于主体部12的上表面121。示例性地，芯轴511的两端从滚轮本体512中伸出并连接于主体部12。
在一些实施例中，滚轮本体512转动地连接于芯轴511，芯轴511的两 端固定于主体部12；当晶圆载具6在滚轮本体512上滑动时，滚轮本体512绕芯轴511转动。在另一些实施例中，滚轮本体512固定于芯轴511，芯轴511的两端经由轴承转动地连接于主体部12；当晶圆载具6在滚轮本体512上滑动时，滚轮本体512和芯轴511同步转动。
在一些实施例中，主体部12设置有多个第一通孔122，多个第一通孔122沿第二方向Y间隔设置。传动组件5与第一通孔122对应设置。传动组件5与第一通孔122的数量相同，示例性地，第一通孔122为两个。可选地，第一通孔122为矩形孔。
传动组件5的滚轮51的滚轮本体512的一部分容纳于对应的第一通孔122内。多个滚轮51的滚轮本体512在第一通孔122内沿第一方向X依次布置。通过设置第一通孔122，可以为滚轮51提供避让空间，便于实现滚轮51的安装。
在一些实施例中，主体部12具有第一凹槽123，第一凹槽123相对于主体部12的上表面121凹陷，第一通孔122贯通第一凹槽123的底壁124。第一凹槽123的底壁124包括两个连接区124a，分别位于第一通孔122沿第二方向Y的两侧。各连接区124a形成有第二凹槽124b，第二凹槽124b相对于连接区124a的上表面凹陷并与第一通孔122连通。芯轴511的两端分别插入两个连接区124a的第二凹槽124b。
在装配滚轮51时，滚轮本体512插入到第一通孔122内，芯轴511的两端分别插入到两个连接区124a的第一凹槽123内。
在一些实施例中，各连接区124a形成有多个沿第一方向X依次设置的第二凹槽124b，连接区124a的第二凹槽124b的数量与传动组件5的滚轮51的数量相同且一一对应。
在一些实施例中，存储装置还包括盖板8，盖板8容纳于第一凹槽123内并覆盖第二凹槽124b。盖板8可以覆盖第二凹槽124b，其可以起到止挡芯轴511的作用，避免芯轴511从第二凹槽124b中脱出。
在一些实施例中，盖板8为矩形结构，其尺寸、形状与第一凹槽123相适配。盖板8同时覆盖连接区124a的多个第二凹槽124b。
在一些实施例中，盖板8设置有第二通孔81，滚轮51的滚轮本体512 经由第二通孔81露出。滚轮本体512的一部分凸出于盖板8，以支撑晶圆载具6。
在一些实施例中，盖板8的上表面82与主体部12的上表面121齐平。
虽然已经参考优选实施例对本申请进行了描述，但在不脱离本申请的范围的情况下，可以对其进行各种改进并且可以用等效物替换其中的部件，尤其是，只要不存在结构冲突，各个实施例中所提到的各项技术特征均可以任意方式组合起来。本申请并不局限于文中公开的特定实施例，而是包括落入权利要求的范围内的所有技术方案。

Claims (10)

  1. 一种晶圆载具的存储装置，包括：
    支撑板，包括沿第一方向连续设置的第一端部、主体部和第二端部；
    垫块，固定于所述第一端部的下侧以使所述支撑板整体倾斜设置，所述第一端部高于所述第二端部；
    止挡块，固定于所述第二端部的上侧；
    两个限位板，固定于所述主体部的上侧并沿第二方向间隔设置，所述第二方向垂直于所述第一方向；
    多个传动组件，设置于两个所述限位板之间并沿所述第二方向间隔设置，各传动组件包括沿所述第一方向布置的多个滚轮，各滚轮可转动地连接于所述主体部，各滚轮至少部分凸出于所述主体部的上表面并用于支撑晶圆载具；在各所述传动组件中，沿靠近所述第二端部的方向，多个所述滚轮的高度逐渐降低。
  2. 根据权利要求1所述的存储装置，其中，所述第一端部的上表面为弧形面，且所述弧形面的靠近所述主体部的一端高于所述弧形面的远离所述主体部的一端。
  3. 根据权利要求1所述的存储装置，其中，所述传动组件为两个。
  4. 根据权利要求1所述的存储装置，其中，所述滚轮包括芯轴和套设于所述芯轴的滚轮本体，所述芯轴连接于所述主体部，所述滚轮的至少部分凸出于所述主体部的上表面。
  5. 根据权利要求4所述的存储装置，其中，所述主体部设置有多个第一通孔，多个所述第一通孔沿所述第二方向间隔设置；
    所述传动组件与所述第一通孔对应设置；
    所述传动组件的所述滚轮的所述滚轮本体的一部分容纳于对应的所述第一通孔内。
  6. 根据权利要求5所述的存储装置，其中，所述主体部具有第一凹槽， 所述第一凹槽相对于所述主体部的上表面凹陷，所述第一通孔贯通所述第一凹槽的底壁；
    所述第一凹槽的底壁包括两个连接区，分别位于所述第一通孔沿所述第二方向的两侧；
    各所述连接区形成有第二凹槽，所述第二凹槽相对于所述连接区的上表面凹陷并与所述第一通孔连通；
    所述芯轴的两端分别插入两个所述连接区的所述第二凹槽。
  7. 根据权利要求6所述的存储装置，其中，所述存储装置还包括盖板，所述盖板容纳于所述第一凹槽内并覆盖所述第二凹槽；
    所述盖板设置有第二通孔，所述滚轮的所述滚轮本体经由所述第二通孔露出；
    所述盖板的上表面与所述主体部的上表面齐平。
  8. 根据权利要求1所述的存储装置，其中，所述存储装置还包括传感器，设置于所述止挡块上且用于检测所述晶圆载具是否到达设定的位置。
  9. 根据权利要求1所述的存储装置，其中，所述支撑板倾斜的角度为5°-15°。
  10. 根据权利要求1所述的存储装置，其中，各所述限位板靠近所述第一端部的一端设置有导向斜面，所述导向斜面用于引导所述晶圆载具进入两个所述限位板之间。
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