WO2022177389A1

WO2022177389A1 - Electrically conductive contact pin and assembly thereof

Info

Publication number: WO2022177389A1
Application number: PCT/KR2022/002515
Authority: WO
Inventors: 안범모; 박승호; 홍창희
Original assignee: (주)포인트엔지니어링
Priority date: 2021-02-22
Filing date: 2022-02-21
Publication date: 2022-08-25
Also published as: KR20220119879A; TW202244506A; KR102509525B1; TWI812020B

Abstract

The present invention provides an electrically conductive contact pin and an assembly thereof, the electrically conductive contact pin adopting a resilient contact structure on a contact tip portion which slides inside a housing, to slide while constantly staying in contact with the inner surface of the housing, thereby minimizing contact resistance.

Description

Electrically conductive contact pins and their assemblies

The present invention relates to an electrically conductive contact pin and an assembly thereof.

A test apparatus and test socket having a plurality of electrically conductive contact pins between a connection terminal of a semiconductor package or wafer for testing and a connection terminal on the side of the test circuit board are used in a test apparatus for a semiconductor package or a wafer for an integrated circuit. . In the electrical property test of a semiconductor device, an inspection object (semiconductor wafer or semiconductor package) is approached to an inspection device having a plurality of electrically conductive contact pins, and the electrically conductive contact pins are applied to corresponding electrode pads (or solder balls or bumps) on the inspection object. This is done by making contact. When the electrically conductive contact pin and the electrode pad on the inspection object are brought into contact, after reaching a state in which both start to contact, a process for further approaching the inspection object is performed.

1 shows an electrically conductive contact pin according to the prior art. The electrically conductive contact pin shown in FIG. 1 is a slide-type electrically conductive contact pin that enables the application of a necessary contact pressure and shock absorption at the contact position by installing the spring member 12 between the tip portions 11 at both ends.

In order for the electrically conductive contact pin to slide within the housing, a gap must exist between the outer surface of the electrically conductive contact pin and the inner surface of the housing. However, in the conventional slide-type electrically conductive contact pin, since the housing 13 and the electrically conductive contact pin are separately manufactured and then used by combining them, the outer surface of the electrically conductive contact pin is spaced apart from the inner surface of the housing 13 more than necessary. It is not possible to precisely perform niche management. Accordingly, loss and distortion of the electrical signal are generated in the process in which the electrical signal is transmitted to the housing via the tip portion 11 , so that the inspection reliability is reduced.

[Prior art literature]

[Patent Literature]

(Patent Document 1) Republic of Korea Patent Publication Registration No. 10-0659944

(Patent Document 2) Republic of Korea Patent Publication No. 10-0647131

The present invention has been devised to solve the problems of the prior art, and by adopting an elastic contact structure to a contact tip sliding within a housing, and slidingly moving while always in contact with the inner surface of the housing, an electrically conductive contact pin that minimizes contact resistance and an assembly thereof.

In order to achieve this object of the present invention, an electrically conductive contact pin according to the present invention includes a first contact tip portion; a second contact tip portion; a body portion connecting the first contact tip portion and the second contact tip portion; and an elastic contact portion formed on at least one of the first contact tip portion and the second contact tip portion.

In addition, one end of the elastic contact portion is connected to the first contact tip portion, and the other end of the elastic contact portion is a free end.

In addition, the elastic contact portion is formed to be curved.

On the other hand, the electrically conductive contact pin assembly according to the present invention is an electrically conductive contact pin assembly including an electrically conductive contact pin which is inserted into a housing, the first contact tip portion; a second contact tip portion; a body portion connecting the first contact tip portion and the second contact tip portion; and an elastic contact portion formed on at least one of the first contact tip portion and the second contact tip portion, wherein the elastic contact portion slides in contact with the interior of the housing.

In addition, a metal layer made of a material having high electrical conductivity is coated on the inner wall of the housing.

The present invention provides an electrically conductive contact pin and an assembly thereof that minimizes contact resistance by slidingly moving while always in contact with the inner surface of the housing by adopting an elastic contact structure to the contact tip portion that slides within the housing.

1 is a view showing an electrically conductive contact pin according to the prior art.

2 is a plan view of an electrically conductive contact pin according to a first preferred embodiment of the present invention;

3 is a perspective view of an electrically conductive contact pin according to a first preferred embodiment of the present invention;

4 is a cross-sectional view of an electrically conductive contact pin assembly according to a first preferred embodiment of the present invention.

5 is a cross-sectional view of an electrically conductive contact pin assembly according to a second preferred embodiment of the present invention.

6 is a plan view showing a modified example of the electrically conductive contact pin according to the first and second preferred embodiments of the present invention.

The following is merely illustrative of the principles of the invention. Therefore, those skilled in the art will be able to devise various devices that, although not explicitly described or shown herein, embody the principles of the invention and are included in the spirit and scope of the invention. In addition, it should be understood that all conditional terms and examples listed herein are, in principle, expressly intended only for the purpose of understanding the inventive concept and are not limited to the specifically enumerated embodiments and states as such. .

The above-described objects, features, and advantages will become more apparent through the following detailed description in relation to the accompanying drawings, and accordingly, those of ordinary skill in the art to which the invention pertains will be able to easily practice the technical idea of the invention. .

Embodiments described herein will be described with reference to cross-sectional and/or perspective views, which are ideal illustrative drawings of the present invention. The thicknesses of films and regions shown in these drawings are exaggerated for effective description of technical content. The shape of the illustrative drawing may be modified due to manufacturing technology and/or tolerance. Accordingly, embodiments of the present invention are not limited to the specific form shown, but also include changes in the form generated according to the manufacturing process.

In describing various embodiments, components performing the same function will be given the same names and the same reference numbers for convenience even if the embodiments are different. In addition, configurations and operations already described in other embodiments will be omitted for convenience.

The electrically conductive contact pin according to a preferred embodiment of the present invention may be manufactured by MEMS technology, and application fields may vary according to its use. The electrically conductive contact pin according to a preferred embodiment of the present invention is provided in the inspection device and is used to electrically and physically contact the inspection object to transmit an electrical signal. The inspection apparatus may be an inspection apparatus used in a semiconductor manufacturing process, and for example, may be a probe card or a test socket depending on an object to be inspected. The inspection apparatus according to a preferred embodiment of the present invention is not limited thereto, and any apparatus for checking whether an object to be inspected is defective by applying electricity is included.

An electrically conductive contact pin assembly according to a preferred embodiment of the present invention is configured to include an electrically conductive contact pin and a housing in which the electrically conductive contact pin is accommodated.

Hereinafter, a preferred embodiment of the present invention will be described based on the accompanying drawings.

2 to 4 are views for explaining an electrically conductive contact pin 100 and an assembly thereof according to a first embodiment of the present invention, and FIG. 2 is an electrically conductive contact pin 100 according to the first embodiment of the present invention. 3 is a perspective view of the electrically conductive contact pin 100 according to the first embodiment, and FIG. 4 is a plan view of the electrically conductive contact pin assembly according to the first embodiment.

2 to 4 , an electrically conductive contact pin 100 according to a preferred embodiment of the present invention includes a first contact tip portion 210 , a second contact tip portion 230 , a first contact tip portion 210 and a second contact tip portion 210 . It includes a body part 300 for connecting the two contact tip parts 230 . An elastic contact portion 400 is formed on at least one of the first contact tip portion 210 and the second contact tip portion 230 .

In the electrically conductive contact pin 100 , the first contact tip portion 210 , the second contact tip portion 230 , and the body portion 300 may be integrally manufactured by MEMS technology.

The body part 300 may be formed in a zigzag shape to be elastically stretchable in the longitudinal direction of the electrically conductive contact pin 100 . The shape of the body part 300 may be manufactured in another shape as long as it is elastically deformable in addition to the zigzag shape.

The electrically conductive contact pins 100 may be formed of a conductive material. Here, the conductive material is platinum (Pt), rhodium (Ph), palladium (Pd), copper (Cu), silver (Ag), gold (Au), iridium (Ir) or an alloy thereof, or nickel-cobalt (NiCo). At least one may be selected from an alloy, a palladium-cobalt (PdCo) alloy, a palladium-nickel (PdNi) alloy, or a nickel-phosphorus (NiP) alloy. The body portion of the electrically conductive contact pin 100 may have a multilayer structure in which a plurality of conductive materials are stacked. Each conductive layer composed of different materials is platinum (Pt), rhodium (Ph), palladium (Pd), copper (Cu), silver (Ag), gold (Au), iridium (Ir) or alloys thereof. , or a palladium-cobalt (PdCo) alloy, a palladium-nickel (PdNi) alloy, or a nickel-phosphorus (NiP) alloy.

The first contact tip portion 210 is a portion substantially in contact with the pad of the inspection device, and the second contact tip portion 230 is a portion substantially in contact with the object to be inspected, and is a compressive force applied to both ends of the electrically conductive contact pin 100 . By this, the body part 300 is elastically compressed in the longitudinal direction, and when the compressive force applied to both ends is released, the body part 300 is restored to its original state again.

The electrically conductive contact pin 100 may be manufactured by a mold made of an anodized film material. More specifically, the electrically conductive contact pin 100 may be manufactured by forming an opening in a mold made of an anodization film material and electroplating using a seed layer provided under the mold made of an anodization film material.

A mold made of an anodized film material means a film formed by anodizing a metal as a base material, and a pore means a hole formed in the process of anodizing a metal to form an anodizing film. For example, when the base metal is aluminum (Al) or an aluminum alloy, when the base material is anodized, an anodization film made of aluminum oxide (Al ₂ 0 ₃ ) material is formed on the surface of the base material. The anodic oxide film formed as described above is vertically divided into a barrier layer having no pores formed therein and a porous layer having pores formed therein. When the base material is removed from the base material on which the anodized film having a barrier layer and a porous layer is formed on the surface, only the anodized film made of aluminum oxide (Al ₂ O ₃ ) material remains. The anodization film may be formed in a structure in which the barrier layer formed during anodization is removed to penetrate the top and bottom of the pores, or the barrier layer formed during anodization remains as it is and seals one end of the top and bottom of the pores. The anodized film has a coefficient of thermal expansion of 2-3 ppm/°C. For this reason, when exposed to a high temperature environment, thermal deformation due to temperature is small. Therefore, even in a high-temperature environment in the manufacturing environment of the electrically conductive contact pin 100, the precise electrically conductive contact pin 100 can be manufactured without thermal deformation.

The elastic contact portion 400 is formed on at least one of the first contact tip portion 210 and the second contact tip portion 230 . 2 and 3 show a configuration in which the elastic contact portion 400 is provided on the first contact tip portion 210 .

One end of the elastic contact portion 400 is connected to the first contact tip portion 400 , and the other end of the elastic contact portion 400 is a free end. Through this, the elastic contact portion 400 is elastically deformable while being supported and fixed by the first contact tip portion 400 .

The elastic contact part 400 provided on the left side of the electrically conductive contact pin 100 is curved in the same shape as the English alphabet "C" shape, and the elastic contact part 400 provided on the right side of the electrically conductive contact pin 100 . ) is formed by being curved in the same shape as the "inverted C" shape.

One end of the elastic contact part 400 is a root part connected to the first contact tip part 400, and the thickness of the electrically conductive contact pin 100 increases from the other end to the root part. Through this, it has an effect of preventing damage due to concentration of stress in the vicinity of the electrically conductive contact pin 100 during deformation.

The other end of the elastic contact part 400 is configured as a free end. When the other end of the elastic contact part 400 is not configured as a free end and a configuration connected somewhere in the electrically conductive contact pin 100 is adopted, the elastic contact part 400 deforms when the first contact tip part 210 slides. Since it is not large, the frictional resistance can act significantly. On the other hand, the elastic contact part 400 according to the preferred embodiment of the present invention has the other end configured as a free end, so that when the first contact tip part 210 slides, deformation of the elastic contact part 400 easily occurs, thereby reducing frictional resistance. has the effect of reducing

The elastic contact part 400 is provided on both sides of the first contact tip part 210 . The length of the width before deformation of the elastic contact portion 400 provided on both sides of the first contact tip portion 210 is smaller than the length between the inner surfaces of the housing 500 . Through this, the first contact tip 210 can always maintain a state of contact with the inner surface of the housing 500 .

In addition, since the elastic contact part 400 has a curved shape, even when the first contact tip part 210 slides along the inner surface of the housing 500 , the normal drag force of the frictional force acting on the elastic contact part 400 is the first contact tip part It acts in the (210) direction. As a result, the first contact tip 210 can always maintain a contact state with the inner surface of the housing 500 even when sliding.

The housing 500 comprises an electrically conductive material. The housing 500 itself may be constructed of an electrically conductive material. Alternatively, the inner surface of the housing 500 may be formed by coating an electrically conductive material.

As the elastic contact part 400 contacts the inner surface of the housing 500 made of an electrically conductive material, a current path passing through the first contact tip part 210 , the housing 500 , and the second contact tip part 230 is formed. Therefore, the elastic deformation of the electrically conductive contact pin 100 is handled by the body portion 300, and the current path of the electrically conductive contact pin 100 is the first contact tip portion 210, the housing 500, and the second contact tip portion ( As the 230 is in charge, it is possible to form a shorter path of the current flowing through the electrically conductive contact pin 100 .

The housing 500 may have a rectangular cross-section. Since the cross-sectional shape of the electrically conductive contact pin 100 is a rectangular shape and the cross-sectional shape of the housing 500 is manufactured to have a rectangular shape, the electrically conductive contact pin 100 is prevented from tilting in the housing 500 and the electrically conductive contact pin It has the advantage of being able to arrange the assemblies at narrower pitch intervals. When the cross-section of the housing 500 is manufactured in a circular shape, there is a limitation in arranging the electrically conductive contact pin assembly in a narrow pitch. In addition, there may be a problem in that the electrically conductive contact pin 100 having a rectangular cross-section is tilted within the housing 500 . However, according to a preferred embodiment of the present invention, through the configuration in which the electrically conductive contact pin 100 of the rectangular cross-section is provided in the housing 500 of the rectangular cross-section, it is possible to simultaneously achieve tilting prevention and narrow pitch implementation.

Caulking parts 510 are formed at both ends of the housing 500 . The size of the hole formed by the caulking part 510 is such that the electrically conductive contact pin 100 cannot easily come out. The size of the hole formed by the caulking portion 510 is greater than the width of the first contact tip portion 210 and smaller than the longest distance between the two elastic contact portions 400 . When the body portion 300 is elongated to its maximum length, the caulking portion 510 supports the proximal portion 410 of the elastic contact portion 400 . Through this, it is possible to make a clearance between the housing 500 and the caulking part 510 in the manufacturing process, and it is possible to ensure the smooth sliding movement of the first contact tip part 210 .

In addition, since the elastic contact part 400 always maintains a state of contact with the inner surface of the housing 500 , foreign substances are prevented from penetrating into the housing 500 . Moreover, at the proximal side of the elastic contact part 400 , a sufficient separation space exists between the caulking part 510 and the first contact tip part 210 , so that foreign substances generated during the sliding process can be easily discharged to the outside.

5 is a view for explaining an electrically conductive contact pin 100 and an assembly thereof according to a second preferred embodiment of the present invention. Since the configuration of the electrically conductive contact pin 100 is the same as that of the electrically conductive contact pin 100 according to the first embodiment described above, a detailed description thereof will be omitted.

The electrically conductive contact pin assembly according to the second embodiment of the present invention differs only in the configuration of the housing of the electrically conductive contact pin assembly of the first embodiment.

Whereas the housing 500 according to the first embodiment is provided in a 1:1 ratio for each electrically conductive contact pin 100 , the housing 600 according to the second embodiment has a plurality of housings 600 in one housing 600 . There is a difference in that the electrically conductive contact pins 100 are provided. Although only one electrically conductive contact pin 100 is shown in FIG. 5 , a plurality of electrically conductive contact pins 100 are provided.

The housing 500 according to the first embodiment has a caulking part 510 to prevent the first and second

contact tip parts

210 and 230 from falling off, whereas the housing 600 according to the second embodiment has an upper portion. There is a difference in that the configuration prevents the first and second

contact tip portions

210 and 230 from falling off through the coupling of the housing 610 and the lower housing 630 . The upper housing 610 has a first hole 611 and a second hole 613 having a larger inner width than the first hole 611 therein, and the lower housing 630 has a second hole 613 and A third hole 631 having the same inner width and a fourth hole 633 having a smaller inner width than the third hole 631 are provided.

The size of the first hole 611 is greater than the width of the first contact tip portion 210 and is smaller than the longest distance between the two elastic contact portions 400 . When the body portion 300 is elongated to its maximum length, the first hole 611 supports the proximal portion 410 of the elastic contact portion 400 . Through this, it is possible to make a clearance between the housing 500 and the caulking part 510 in the manufacturing process, and it is possible to ensure the smooth sliding movement of the first contact tip part 210 .

The inner surface of the housing 600 may be coated with a metal layer having excellent electrical conductivity. As the elastic contact part 400 contacts the inner surface of the housing 600 made of an electrically conductive material, a current path passing through the first contact tip part 210 , the housing 600 , and the second contact tip part 230 is formed. Therefore, the elastic deformation of the electrically conductive contact pin 100 is carried out by the body portion 300, and the current path of the electrically conductive contact pin 100 is the first contact tip portion 210, the housing 600, and the second contact tip portion ( As the 230 is in charge, it is possible to form a shorter path of the current flowing through the electrically conductive contact pin 100 .

Although the structure of the above embodiment has been described as having the elastic contact portion 400 provided only on the first contact tip portion 210, referring to FIG. 6, the elastic contact portion 400 includes the first contact tip portion 210 and the second contact tip portion ( 230) may also be provided. The configuration and effect of the elastic contact portion 400 provided in the second contact tip portion 230 is the same as the configuration and effect of the elastic contact portion 400 provided in the first contact tip portion 210, and thus a detailed description thereof will be omitted.

As described above, although described with reference to preferred embodiments of the present invention, those skilled in the art can variously modify the present invention within the scope without departing from the spirit and scope of the present invention described in the claims below. Or it can be carried out by modification.

[Explanation of code]

100: electrically conductive contact pin

210: first contact tip portion

230: second contact tip portion

300: body part

400: elastic contact

500: housing

Claims

a first contact tip portion;

a second contact tip portion;

a body portion connecting the first contact tip portion and the second contact tip portion; and

An electrically conductive contact pin including an elastic contact portion formed on at least one of the first contact tip portion and the second contact tip portion.
According to claim 1,

One end of the elastic contact portion is connected to the first contact tip portion,

The other end of the elastic contact portion is a free end, an electrically conductive contact pin.
According to claim 1,

The elastic contact portion is formed by being curved, an electrically conductive contact pin.
An electrically conductive contact pin assembly comprising an electrically conductive contact pin inserted inside a housing, the assembly comprising:

a first contact tip portion;

a second contact tip portion;

a body portion connecting the first contact tip portion and the second contact tip portion; and

and an elastic contact portion formed on at least one of the first contact tip portion and the second contact tip portion,

and the elastic contact portion slides in contact with the interior of the housing.
5. The method of claim 4,

An electrically conductive contact pin assembly in which a metal layer of a material having high electrical conductivity is coated on an inner wall of the housing.