WO2022168439A1 - インクジェットヘッド - Google Patents

インクジェットヘッド Download PDF

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Publication number
WO2022168439A1
WO2022168439A1 PCT/JP2021/045455 JP2021045455W WO2022168439A1 WO 2022168439 A1 WO2022168439 A1 WO 2022168439A1 JP 2021045455 W JP2021045455 W JP 2021045455W WO 2022168439 A1 WO2022168439 A1 WO 2022168439A1
Authority
WO
WIPO (PCT)
Prior art keywords
straight line
inkjet head
ink
piezoelectric element
head according
Prior art date
Application number
PCT/JP2021/045455
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
洋介 豊福
英博 吉田
Original Assignee
パナソニックＩｐマネジメント株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by パナソニックＩｐマネジメント株式会社 filed Critical パナソニックＩｐマネジメント株式会社
Priority to CN202180091098.4A priority Critical patent/CN116710287A/zh
Priority to JP2022579368A priority patent/JPWO2022168439A1/ja
Publication of WO2022168439A1 publication Critical patent/WO2022168439A1/ja

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/18—Ink recirculation systems

Definitions

  • the present disclosure relates to inkjet heads.
  • Patent Document 1 As an example of conventional inkjet head technology, one disclosed in Patent Document 1 is known.
  • the inkjet head When printing is performed on an object having a width wider than the width of the inkjet head, the inkjet head is reciprocated a plurality of times.
  • Patent Document 1 by arranging a plurality of inkjet heads on a substrate in a zigzag pattern, it is possible to reduce the number of reciprocations of the substrate and thus the inkjet heads. Further, the pitch between nozzles can be adjusted by adjusting the distance between the inkjet heads on the substrate.
  • An inkjet head includes a plurality of nozzle holes that are arranged on a straight line to eject ink, a plurality of ink chambers that communicate with the plurality of nozzle holes, and a plurality of ink chambers that vibrate.
  • a head body having a vibration plate that pressurizes ink; and piezoelectric elements that vibrate the vibration plate. with the unit.
  • FIG. 1 is a top view of an inkjet head according to a first embodiment of the present disclosure
  • Cross-sectional view of an inkjet head taken along line III-III shown in FIG. A diagram showing the operation of an inkjet head when changing the pitch between nozzles.
  • FIG. 5 is a top view of an inkjet head according to a second embodiment of the present disclosure; Cross-sectional view of the inkjet head taken along line VI-VI shown in FIG. Cross-sectional view of the inkjet head along line VII-VII shown in FIG.
  • Inkjet heads are also being used for the production of semiconductor devices.
  • the inter-nozzle pitch can be varied, for example, by arranging the nozzles in a straight line and tilting the inkjet head with respect to the scanning direction.
  • the piezoelectric element used for the actuator for ejecting the ink has a characteristic of the piezoelectric element. It is difficult to make the length longer.
  • variations in internal stress due to changes in temperature, and thus strain affect the pitch between nozzles.
  • the present disclosure aims to solve the above-described problems, and aims to suppress distortion caused by temperature changes even when the inkjet head is lengthened.
  • the inkjet head 1 ejects ink to print on an object.
  • the ink is a printing ink.
  • the inks can also be liquid materials, such as solder pastes, silver pastes, stamping pastes, phosphor pastes and cell suspensions.
  • the inkjet head 1 ejects ink by controlling piezoelectric elements, which will be described later, by a control device (not shown). Further, the inkjet head 1 is configured such that ink circulates between it and a liquid transfer device (not shown). That is, the liquid feeding device supplies ink to the inkjet head 1 and ejects the ink that has not been ejected from the inkjet head 1 .
  • the inkjet head 1 includes a head body 10, a piezoelectric element unit 20 and a housing member 30, as shown in FIGS.
  • the head main body 10 is formed in the shape of a rectangular parallelepiped, and is configured by laminating a nozzle plate 11, an ink chamber plate 12 and a vibration plate 13.
  • the nozzle plate 11, the ink chamber plate 12, and the vibration plate 13 are bonded with an adhesive, for example.
  • the nozzle plate 11 is formed in a plate shape from alloy steel such as stainless steel.
  • the nozzle plate 11 is formed with a plurality of nozzle holes 11a which are arranged on a straight line L and eject ink.
  • a straight line L is a virtual straight line extending in the horizontal direction.
  • the number of nozzle holes 11a is 36, it goes without saying that the number is not limited to this.
  • the ink chamber plate 12 is formed in a rectangular parallelepiped shape, for example, by bonding stainless steel plates molded by etching or press working with an adhesive.
  • the ink chamber plate 12 includes a plurality of sets of supply channels 12a, ink chambers 12b, silos 12c, and discharge channels 12d.
  • the plurality of sets are configured to correspond to the plurality of nozzle holes 11a. That is, the number of sets is 36, which is the same as the number of nozzle holes 11a, but it is needless to say that the number is not limited to this.
  • the supply path 12a is formed to extend along the front-rear direction and supplies ink to the ink chamber 12b.
  • the ink chamber 12b is formed in a rectangular parallelepiped shape extending in the front-rear direction, and is connected to the supply path 12a and the silo 12c.
  • a vibrating plate 13 constitutes the upper wall of the ink chamber 12b.
  • the silo 12c is formed to extend vertically and is connected to the ink chamber 12b and the discharge path 12d. Also, the silo 12c is formed to be connected to the nozzle hole 11a. That is, each of the plurality of ink chambers 12b communicates with a corresponding one of the plurality of nozzle holes 11a through a corresponding one of the plurality of silos 12c.
  • the discharge passage 12d is formed to extend along the front-rear direction and is connected to the silo 12c.
  • the discharge passage 12d communicates with the ink chamber 12b through the silo 12c, and discharges the ink from the ink chamber 12b.
  • multiple pairs are divided into multiple groups.
  • the number of groups is four. That is, the number of sets per group is nine. Needless to say, the number of groups is not limited to four.
  • Each of the groups has one supply connection 12e and one discharge connection 12f.
  • the supply connection path 12e is connected to each of the plurality of supply paths 12a in one of the plurality of groups.
  • the outlet connection 12f is connected to each of the plurality of outlets 12d in one of the plurality of groups.
  • a plurality of groups are arranged in a zigzag pattern along the straight line L with the straight line L interposed therebetween (Fig. 1). That is, the nine supply channels 12a, the ink chambers 12b, the silos 12c, and the discharge channels 12d, which constitute one group, are arranged in a zigzag pattern along the straight line L with the straight line L interposed therebetween. .
  • the supply connection path 12e, the supply path 12a and the ink chamber 12b, and the discharge path 12d and the discharge connection path 12f are arranged opposite to each other across the straight line L. placed on the side.
  • the plurality of discharge paths 12d communicate with the plurality of ink chambers 12b arranged on opposite sides of the straight line L, respectively.
  • the plurality of supply paths 12a communicate with the plurality of ink chambers 12b arranged on the same side as viewed from the straight line L, respectively.
  • the supply connection path 12e and the discharge connection path 12f are also arranged in a zigzag pattern along the straight line L with the straight line L interposed therebetween.
  • 2 is a cross-sectional view of a portion where the ink chamber 12b is positioned forward when viewed from the straight line L.
  • FIG. 3 is a cross-sectional view of a portion where the ink chamber 12b is positioned rearward when viewed from the straight line L.
  • FIG. 1 is a cross-sectional view of a portion where the ink chamber 12b is positioned forward when viewed from the straight line L.
  • the vibrating plate 13 pressurizes the ink in the plurality of ink chambers 12b by vibrating.
  • the vibration plate 13 is formed in a single plate shape and arranged so as to cover the plurality of ink chambers 12b.
  • the vibrating plate 13 is formed using an alloy of nickel and cobalt, nickel, or the like.
  • the vibrating plate 13 has a plurality of vibrating plates 13a joined by, for example, an adhesive so as to correspond to the ink chambers 12b.
  • a plurality of piezoelectric element units 20 are arranged so as to correspond to a plurality of groups. Although the number of piezoelectric element units 20 is four, it goes without saying that the number is not limited to this.
  • One of the plurality of piezoelectric element units 20 has a plurality of piezoelectric elements 20a corresponding to a plurality of sets forming one of the plurality of groups.
  • the number of piezoelectric elements 20a in one piezoelectric element unit 20 is nine, it goes without saying that the number is not limited to this.
  • the piezoelectric element 20a is formed in a rectangular parallelepiped shape.
  • the piezoelectric element unit 20 is a combination of a plurality of piezoelectric elements 20a.
  • the piezoelectric element unit 20 is formed in a comb shape so that a plurality of piezoelectric elements 20a are connected to each other at the upper end.
  • the lower end of the piezoelectric element 20a is bonded to the vibration plate 13a with an adhesive, for example.
  • the piezoelectric element 20a is deformed by being applied, and vibrates the vibration plate 13a and the vibration plate 13 by extension.
  • the piezoelectric element unit 20 is formed in a rectangular parallelepiped shape including electrodes (not shown) for applying voltage to the piezoelectric element 20a, and is bonded to the vibration plate 13 with an adhesive, for example.
  • the plurality of piezoelectric element units 20 are arranged in a zigzag pattern along the straight line L with the straight line L interposed therebetween. Specifically, the plurality of piezoelectric element units 20 are arranged in a zigzag pattern along the straight line L with the straight line L interposed therebetween so as to correspond to the plurality of ink chambers 12b. Conversely, the plurality of ink chambers 12b are arranged in a zigzag pattern along the straight line L so as to correspond to the plurality of piezoelectric element units 20. As shown in FIG.
  • the plurality of piezoelectric element units 20 are arranged in a zigzag pattern along the straight line L with the straight line L interposed therebetween. Therefore, the plurality of piezoelectric element units 20 includes two or more first piezoelectric element units and two or more second piezoelectric element units positioned opposite to the two or more first piezoelectric element units with respect to the straight line L. .
  • the two or more first piezoelectric element units are arranged in a direction parallel to the straight line L at first intervals.
  • the two or more second piezoelectric element units are arranged in a direction parallel to the straight line L at second intervals. The second interval may be the same as the first interval.
  • the two or more second piezoelectric element units have an offset in a direction parallel to the straight line L with respect to the two or more first piezoelectric element units.
  • the offset may be half the length of the first interval.
  • the two or more first piezoelectric element units may each be separated from the straight line L by a first distance in a direction orthogonal to the straight line L.
  • the two or more second piezoelectric element units may each be separated from the straight line L by a second distance in a direction orthogonal to the straight line L.
  • the second distance may be the same as the first distance.
  • one of the plurality of piezoelectric element units 20 is arranged so as to partially face the other one of the plurality of piezoelectric element units 20 in the direction perpendicular to the straight line L.
  • the right and left portions of the piezoelectric element unit 20 arranged forward as viewed from the straight line L are the left and right portions of the piezoelectric element unit 20 arranged rearward as viewed from the straight line L. They face each other on the right side.
  • the housing member 30 is made of alloy steel such as stainless steel and is formed into a rectangular frame shape when viewed from above.
  • the housing member 30 is bonded to the upper surface of the head body 10 with an adhesive, for example.
  • the housing member 30 has a common supply channel 31 , a plurality of second discharge connections 32 and a common discharge channel 33 .
  • the common supply path 31, the plurality of second discharge connection paths 32, and the common discharge path 33 are arranged on both sides of the straight line L, respectively.
  • the common supply path 31 is formed on the lower side of the housing member 30 so as to extend along the direction along the straight line L, and is connected to each of the plurality of supply connection paths 12e. Specifically, the common supply path 31 located forward when viewed from the straight line L is connected to each of the plurality of supply connection paths 12e located forward when viewed from the straight line L. Further, the common supply path 31 arranged behind the straight line L is connected to each of the plurality of supply connection paths 12e located behind the straight line L.
  • the common supply channel 31 is connected to the liquid transfer device via a supply pipe 40 connected to the housing member 30 .
  • the plurality of second discharge connection paths 32 are provided so as to connect with the discharge connection path 12f in one of the plurality of groups and the common discharge path 33, respectively.
  • the common discharge path 33 is formed on the upper side of the housing member 30 so as to extend along the direction along the straight line L, and is connected to each of the plurality of discharge connection paths 12f via the second discharge connection paths 32. Specifically, the common discharge path 33 located forward when viewed from the straight line L is connected to each of the plurality of discharge connection paths 12f located forward when viewed from the straight line L via the second discharge connection path 32. It is connected. Further, the common discharge path 33 arranged behind the straight line L is connected to each of the plurality of discharge connection paths 12f positioned behind the straight line L via the second discharge connection paths 32. . The common discharge path 33 is connected to the liquid transfer device via a discharge pipe 50 connected to the housing member 30 .
  • the linear expansion coefficients of the nozzle plate 11 , the ink chamber plate 12 and the housing member 30 are different from those of the vibration plate 13 and the piezoelectric element unit 20 . Also, the linear expansion coefficients of the nozzle plate 11 , the ink chamber plate 12 , the housing member 30 and the vibration plate 13 are larger than the linear expansion coefficient of the piezoelectric element unit 20 .
  • the coefficient of linear expansion of the nozzle plate 11, ink chamber plate 12 and housing member 30 is about 10 to 18 ⁇ 10-6/°C.
  • the linear expansion coefficient of the vibrating plate 13 is about 13-15 ⁇ 10 -6 /°C.
  • the coefficient of linear expansion of the piezoelectric element unit 20 is approximately 2 to 4 ⁇ 10 -6 /°C.
  • the materials and linear expansion coefficients of the members constituting the inkjet head 1 are not limited to the above.
  • the coefficients of linear expansion are different between the members constituting the inkjet head 1, the amount of deformation caused by changes in the ambient temperature, for example, is different. Also, the members constituting the inkjet head 1 are joined as described above. Therefore, variations in internal stress and, in turn, distortion occur in the head body 10 .
  • the plurality of piezoelectric element units 20 are arranged in a zigzag pattern along the straight line L with the straight line L interposed therebetween. Variations in the internal stress of the main body 10 and, in turn, distortion are suppressed.
  • an inkjet head 1 of a comparative example a case in which all of the plurality of piezoelectric element units 20 are arranged in the direction along the straight line L only forward when viewed from the straight line L will be considered.
  • all of the plurality of ink chambers 12b are arranged so as to be positioned forward when viewed from the straight line L. As shown in FIG.
  • the coefficient of linear expansion of the piezoelectric element unit 20 is smaller than the coefficient of linear expansion of the nozzle plate 11, the ink chamber plate 12 and the vibration plate 13. Therefore, when the ambient temperature rises, an internal stress is generated due to the difference in linear expansion coefficients in the front portion of the head body 10 viewed from the straight line L on which the piezoelectric element units 20 are arranged.
  • the piezoelectric element unit 20 is not arranged in the rear part of the head body 10 as viewed from the straight line L.
  • the internal stress generated in the rear portion of the head body 10 as viewed from the straight line L is smaller than the internal stress generated in the front portion of the head body 10 as viewed from the straight line L. Therefore, in the head main body 10, there is a difference between the internal stresses generated on both sides of the straight line L, that is, variations in the internal stresses. Therefore, the head body 10 is distorted, and the pitch between nozzles is affected.
  • the piezoelectric element units 20 are arranged in a zigzag pattern along the straight line L with the straight line L interposed therebetween, as described above. Further, in the head body 10, the internal stress generated in each of the portions where the plurality of piezoelectric element units 20 are arranged has the same magnitude. Therefore, variations in internal stress generated in the head main body 10 are smaller than in the inkjet head 1 of the comparative example. In other words, the distortion that occurs in the inkjet head 1 of the first embodiment and the effect on the pitch between nozzles is suppressed compared to the inkjet head 1 of the comparative example.
  • one of the plurality of piezoelectric element units 20 is arranged so as to partially face the other one of the plurality of piezoelectric element units 20 in the direction orthogonal to the straight line L.
  • the distance between adjacent piezoelectric element units 20 becomes smaller.
  • the difference between the internal stress generated in the portion where the piezoelectric element unit 20 is arranged and the internal stress generated in the portion where the piezoelectric element unit 20 is not arranged, that is, the variation in the internal stress is small. Become. Therefore, the strain generated in the head body 10 and the effect on the pitch between nozzles is reduced.
  • One of the plurality of piezoelectric element units 20 may be arranged so as not to partially face the other one of the plurality of piezoelectric element units 20 in the direction orthogonal to the straight line L.
  • Ink is supplied to the common supply path 31 from the liquid transfer device through the supply pipe 40 .
  • the ink supplied to the common supply path 31 is branched to the plurality of supply paths 12a via the supply connection paths 12e of each of the plurality of groups.
  • the ink flows through the supply path 12a, the ink chamber 12b, the silo 12c, and the discharge path 12d, and joins at the discharge connection path 12f.
  • the ink that has flowed through one of the multiple groups is discharged from the discharge connection path 12f through the second discharge connection path 32 to the common discharge path 33, and joins the ink that has flowed through the other one of the multiple groups. do.
  • the ink is discharged from the common discharge path 33 to the liquid transfer device through the discharge pipe 50 .
  • the vibration plate 13a and thus the vibration plate 13 vibrate according to the deformation of the piezoelectric element 20a. do.
  • the vibration of the vibrating plate 13 pressurizes the ink in the ink chamber 12b and ejects the ink from the nozzle hole 11a. As a result, the object passing under the inkjet head 1 is printed.
  • a plurality of piezoelectric element units 20 are arranged in a zigzag pattern along the straight line L with the straight line L interposed therebetween.
  • the ink chamber 12b, the supply connection path 12e, the supply connection path 12a, the silo 12c, the discharge path 12d, the discharge connection path 12f, and the second discharge connection path 32 are arranged in a straight line so as to correspond to the piezoelectric element unit 20. They are arranged in a zigzag pattern along L with the straight line L interposed therebetween. Therefore, along the straight line L, the piezoelectric element units 20 and the discharge connection paths 12f are arranged alternately. Therefore, the head body 10 can be configured efficiently and compactly.
  • the common supply path 31 and the common discharge path 33 are arranged on both sides of the head body 10 with the straight line L therebetween as described above. Therefore, the head body 10 can be configured more efficiently.
  • the inkjet head 1 according to the second embodiment of the present disclosure will be described mainly with respect to parts that differ from the first embodiment.
  • the inkjet head 1 of the second embodiment has a plurality of vibrating plates 113 corresponding to a plurality of groups.
  • the number of vibrating plates 113 is four in the second embodiment, it is needless to say that the number is not limited to this.
  • the vibrating plate 113 is formed by an electroforming method including a photolithography process using an alloy of nickel and cobalt, an alloy of nickel and palladium, nickel, or the like.
  • the vibrating plate 113 is a thin metal film formed using metal. Since the manufacturing of vibration plate 113 includes a photolithography process, the outer shape of vibration plate 113 can be formed with high accuracy. Further, when a plurality of diaphragms 13a are formed by photolithography and bonded to diaphragm 113, the accuracy of the outer shape of diaphragm 13a and the positional accuracy of diaphragm 13a with respect to diaphragm 113 are improved.
  • the positional accuracy of the vibration plate 13a with respect to the piezoelectric element 20a and the positional accuracy of the vibration plate 113 with respect to the piezoelectric element unit 20 are improved. Therefore, the plurality of vibration plates 113 can be arranged without interfering with each other. Further, since the vibration plate 113 is a metal thin film, it has good responsiveness to deformation of the piezoelectric element 20a.
  • the vibration plate 113 of the second embodiment is formed smaller than the vibration plate 13 of the first embodiment. Therefore, when the ambient temperature changes, the deformation amount of each vibration plate 113 in the second embodiment is smaller than the deformation amount of the vibration plate 13 in the first embodiment. Therefore, the magnitude of the internal stress of the head body 10 in the second embodiment is smaller than the magnitude of the internal stress of the head body 10 in the first embodiment. In other words, by forming a plurality of vibration plates 113, it is possible to reduce variations in the internal stress of the head body 10 and, in turn, the distortion.
  • the plurality of vibration plates 113 are arranged in a zigzag pattern along the straight line L so as to correspond to the piezoelectric element units 20 . Therefore, similarly to the arrangement of the plurality of piezoelectric element units 20 described above, the plurality of vibration plates 113 of the second embodiment can reduce variations in the internal stress of the head body 10 and, in turn, reduce distortion.
  • one of the plurality of vibration plates 113 is arranged so as to partially face the other one of the plurality of vibration plates 113 in the direction along the straight line L. Furthermore, one of the plurality of vibration plates 113 is arranged so as to partially face the other one of the plurality of vibration plates 113 in the direction orthogonal to the straight line L.
  • the plurality of vibration plates 113 in the second embodiment has a larger space between the plurality of vibration plates 113. distance becomes smaller. That is, similarly to the arrangement of the plurality of piezoelectric element units 20 described above, variations in the internal stress of the head main body 10 and thus distortion can be reduced.
  • the plurality of vibration plates 113 have chamfered corners located on the side of the straight line L, and are arranged so that the corners of the plurality of diagonally adjacent vibration plates 113 face each other. .
  • one of the plurality of vibration plates 113 may be arranged so as not to partially face another one of the plurality of vibration plates 113 in the direction orthogonal to the straight line L or the direction along the straight line L.
  • the ink chambers 12b are spaced apart from the nozzle holes 11a in the direction orthogonal to the straight line L.
  • the ink chamber 12b of the second embodiment can be made smaller than the ink chamber 12b of the first embodiment. Therefore, since the vibration plate 113 forming the upper wall of the ink chamber 12b can be made smaller, the plurality of vibration plates 113 can be arranged so as not to interfere with each other.
  • the ink chamber 12b and the silo 12c are connected via an intermediate channel 112g.
  • the distance between the plurality of ink chambers 12b through the discharge connection path 12f is longer than in the first embodiment, so that the influence of pressure fluctuations between the plurality of ink chambers 12b can be suppressed.
  • distortion caused by temperature change can be suppressed even when the inkjet head is lengthened.
  • the present invention can be widely used for inkjet heads.

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  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
PCT/JP2021/045455 2021-02-03 2021-12-10 インクジェットヘッド WO2022168439A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN202180091098.4A CN116710287A (zh) 2021-02-03 2021-12-10 喷墨头
JP2022579368A JPWO2022168439A1 (enrdf_load_stackoverflow) 2021-02-03 2021-12-10

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Application Number Priority Date Filing Date Title
JP2021015710 2021-02-03
JP2021-015710 2021-02-03

Publications (1)

Publication Number Publication Date
WO2022168439A1 true WO2022168439A1 (ja) 2022-08-11

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JP (1) JPWO2022168439A1 (enrdf_load_stackoverflow)
CN (1) CN116710287A (enrdf_load_stackoverflow)
TW (1) TW202235292A (enrdf_load_stackoverflow)
WO (1) WO2022168439A1 (enrdf_load_stackoverflow)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08112896A (ja) * 1994-08-25 1996-05-07 Seiko Epson Corp 液体噴射ヘッド
JPH08118662A (ja) * 1994-10-26 1996-05-14 Mita Ind Co Ltd インクジェットプリンタ用印字ヘッド及びその製造方法
JP2002160375A (ja) * 2000-11-22 2002-06-04 Ricoh Co Ltd 静電アクチュエータ及びその製造方法並びにインクジェットヘッド
WO2018065744A1 (en) * 2016-10-05 2018-04-12 Xaar Technology Limited Droplet deposition head

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009226905A (ja) * 2008-03-25 2009-10-08 Seiko Epson Corp 液滴吐出ヘッド及び液滴吐出装置
JP7028178B2 (ja) * 2016-09-28 2022-03-02 コニカミノルタ株式会社 インクジェットヘッドおよびその製造方法と、インクジェットプリンタ
CN111347786B (zh) * 2018-12-21 2022-09-13 精工爱普生株式会社 液体喷射头以及液体喷射装置
JP7167697B2 (ja) * 2018-12-21 2022-11-09 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP7225794B2 (ja) * 2018-12-27 2023-02-21 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08112896A (ja) * 1994-08-25 1996-05-07 Seiko Epson Corp 液体噴射ヘッド
JPH08118662A (ja) * 1994-10-26 1996-05-14 Mita Ind Co Ltd インクジェットプリンタ用印字ヘッド及びその製造方法
JP2002160375A (ja) * 2000-11-22 2002-06-04 Ricoh Co Ltd 静電アクチュエータ及びその製造方法並びにインクジェットヘッド
WO2018065744A1 (en) * 2016-10-05 2018-04-12 Xaar Technology Limited Droplet deposition head

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CN116710287A (zh) 2023-09-05
TW202235292A (zh) 2022-09-16
JPWO2022168439A1 (enrdf_load_stackoverflow) 2022-08-11

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