WO2022131049A1 - Système de détection magnétique, système de détection de position et module de détection magnétique - Google Patents

Système de détection magnétique, système de détection de position et module de détection magnétique Download PDF

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Publication number
WO2022131049A1
WO2022131049A1 PCT/JP2021/044690 JP2021044690W WO2022131049A1 WO 2022131049 A1 WO2022131049 A1 WO 2022131049A1 JP 2021044690 W JP2021044690 W JP 2021044690W WO 2022131049 A1 WO2022131049 A1 WO 2022131049A1
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Prior art keywords
magnetic
detection system
bias magnet
block
magnetic detection
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PCT/JP2021/044690
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English (en)
Japanese (ja)
Inventor
礼孝 一宮
和弘 尾中
直樹 小原
卓史 津島
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パナソニックＩｐマネジメント株式会社
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Priority to JP2022569875A priority Critical patent/JPWO2022131049A1/ja
Publication of WO2022131049A1 publication Critical patent/WO2022131049A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices

Definitions

  • the present disclosure generally relates to a magnetic detection system, a position detection system and a magnetic detection module, and more particularly to a magnetic detection system including a plurality of bias magnets, and a position detection system and a magnetic detection module including the magnetic detection system.
  • the magnetic position detection device described in Patent Document 1 includes a magnetic scale unit and a magnetic sensor unit (magnetic detection system).
  • the magnetic scale unit is magnetized as magnetic information.
  • the magnetic sensor unit is configured to move relative to the magnetic scale unit and detect magnetic information from the magnetic scale unit.
  • the magnetic sensor unit includes a plurality of giant magnetoresistive elements (magnetic sensors) and a bias magnet that applies a bias magnetic field to the giant magnetoresistive element.
  • the direction magnetized as magnetic information in the magnetic scale unit is substantially orthogonal to the relative movement direction in which the magnetic sensor unit moves relative to the magnetic scale unit. Bias magnets are configured and arranged so that bias magnetic fields in different directions are applied to substantially adjacent giant magnetoresistive elements.
  • An object of the present disclosure is to provide a magnetic detection system, a position detection system, and a magnetic detection module capable of reducing distortion of the output waveform of a magnetic sensor.
  • the magnetic detection system includes a magnetic sensor, a first bias magnet, and a second bias magnet.
  • the magnetic sensor has a half-bridge circuit of a first magnetoresistive effect element and a second magnetoresistive effect element.
  • the first magnetoresistive sensor detects a magnetic field in the first direction.
  • the second magnetoresistive element is arranged along a second direction orthogonal to the first direction with respect to the first magnetoresistive element.
  • the second magnetoresistive sensor detects a magnetic field in the first direction.
  • the first bias magnet applies a magnetic field in the direction toward the first side of both sides of the first direction to the first magnetoresistive element.
  • the second bias magnet applies a magnetic field in the direction toward the second side of both sides of the first direction to the second magnetoresistive element.
  • the second side is opposite to the first side.
  • the position detection system includes a detection block and a magnetic pole block.
  • the detection block has two magnetic detection systems.
  • the magnetic pole block includes a plurality of magnetic poles arranged along the first direction.
  • the detection block and the magnetic pole block face each other in a direction intersecting the first direction.
  • the plurality of magnetic poles are arranged so that the north pole and the south pole are alternately arranged in the first direction.
  • At least one of the detection block and the magnetic pole block is movable with respect to the other along the first direction.
  • the two magnetic detection systems are arranged in the first direction at a distance of 1/4 + M / 2 times the distance between the same poles of the plurality of magnetic poles. However, M is 0 or a natural number.
  • the magnetic detection module includes the two magnetic detection systems.
  • the magnetic detection module further comprises a positioning member.
  • the positioning member fixes the positional relationship between the two magnetic detection systems.
  • FIG. 1 is a plan view of the magnetic detection system according to the first embodiment.
  • FIG. 2A is a cross-sectional view of the same magnetic detection system in the cross section of A1-A1 of FIG.
  • FIG. 2B is a cross-sectional view of the same magnetic detection system in the cross section of B1-B1 of FIG.
  • FIG. 3 is a plan view of a position detection system including the same two magnetic detection systems.
  • FIG. 4 is a perspective view of the same magnetic detection system.
  • FIG. 5 is an exploded perspective view of the same magnetic detection system.
  • FIG. 6 is a circuit block diagram of a position detection system including the same two magnetic detection systems.
  • FIG. 7 is an explanatory diagram showing the output waveform of the magnetic detection system of the above.
  • FIG. 1 is a plan view of the magnetic detection system according to the first embodiment.
  • FIG. 2A is a cross-sectional view of the same magnetic detection system in the cross section of A1-A1 of FIG.
  • FIG. 2B
  • FIG. 8 is a characteristic diagram of the same magnetic detection system.
  • FIG. 9 is a characteristic diagram of the magnetic detection system according to the comparative example.
  • FIG. 10 is a perspective view of the magnetic detection module according to the second embodiment.
  • FIG. 11 is a side view of the magnetic detection module of the same.
  • each of the following embodiments is only part of the various embodiments of the present disclosure.
  • Each of the following embodiments can be variously modified according to the design and the like as long as the object of the present disclosure can be achieved.
  • each figure described in each of the following embodiments is a schematic view, and the ratio of the size and the thickness of each component in the figure does not necessarily reflect the actual dimensional ratio. do not have.
  • the position detection system 1 detects the position of the detection target by using magnetism.
  • the position detection system 1 is used as a position sensor such as a linear encoder or a rotary encoder, for example. More specifically, the position detection system 1 is used, for example, as a position sensor (encoder) for detecting the position of a motor (linear motor or rotary motor) that drives a lens or the like of a camera. Further, the position detection system 1 is used, for example, as a position sensor for detecting the position of a brake pedal, a brake lever or a shift lever of an automobile. Alternatively, the position detection system 1 is used as a reader of a code written by a magnetic material.
  • the "position” detected by the position detection system 1 is the coordinates of the detection target and the rotation angle (direction of the detection target) of the detection target centered on the rotation axis (virtual axis) passing through the detection target. It is a concept that includes both. That is, the position detection system 1 detects at least one of the coordinates of the detection target and the rotation angle of the detection target.
  • the position detection system 1 detects the rotation angle of the detection target.
  • the position detection system 1 of the present embodiment includes a detection block 4 and a magnetic pole block 2.
  • the detection block 4 has two magnetic detection systems 5. At least one of the detection block 4 and the magnetic pole block 2 is movable with respect to the other along the first direction D1.
  • the magnetic detection system 5 includes a magnetic sensor 6, a first bias magnet 71, and a second bias magnet 72.
  • the magnetic sensor 6 has a half-bridge circuit 60 of a first magnetoresistive effect element 61 and a second magnetoresistive effect element 62.
  • the first magnetoresistive sensor 61 detects the magnetic field in the first direction D1.
  • the second magnetoresistive element 62 is arranged along the second direction D2 orthogonal to the first direction D1 with respect to the first magnetoresistive element 61.
  • the second magnetoresistive sensor 62 detects the magnetic field in the first direction D1. As shown in FIG.
  • the first bias magnet 71 applies a magnetic field in the direction toward the first side of both sides of the first direction D1 to the first magnetoresistive effect element 61.
  • the second bias magnet 72 applies a magnetic field in the direction toward the second side of both sides of the first direction D1 to the second magnetoresistive effect element 62.
  • the second side is opposite to the first side.
  • the output waveform of the magnetic sensor 6 can be made into a waveform close to a sine wave.
  • the position detection system 1 further includes a processing circuit 11 (see FIG. 6) in addition to the magnetic pole block 2 and the detection block 4 described above.
  • the processing circuit 11 obtains the position of one of the magnetic pole block 2 and the detection block 4 with respect to the other based on the output of each magnetic sensor 6 of the two magnetic detection systems 5.
  • the magnetic pole block 2 of the magnetic pole block 2 and the detection block 4 moves (rotates) with respect to the detection block 4 along the first direction D1 will be described. That is, the magnetic pole block 2 of the present embodiment is attached to the detection target whose position (rotation angle) is detected, or is integrally incorporated in the detection target.
  • the first direction D1 is the rotation direction of the magnetic pole block 2 and the detection block 4 (in the present embodiment, the magnetic pole block 2) to rotate. Is.
  • the rotation direction (first direction D1) of the magnetic pole block 2 is a straight line within the range occupied by the magnetic detection system 5.
  • the first direction D1 is regarded as a linear direction and is shown.
  • Magnetic pole block As the shape of the magnetic pole block 2 (see FIG. 3), for example, an annular shape, an arc shape, a linear shape, or the like can be adopted. Typical examples of the annular shape are a disk, an annulus and an ellipse. Typical examples of arc-shaped shapes are arcs and elliptical arcs. In this embodiment, a case where the shape of the magnetic pole block 2 is an annular shape will be described.
  • the direction orthogonal to both the first direction D1 and the second direction D2 is defined as the third direction D3 (see FIGS. 2A and 3).
  • the third direction D3 coincides with the radial direction of the magnetic pole block 2.
  • the magnetic pole block 2 is rotatable around the center C1. More specifically, the magnetic pole block 2 is rotatable around a rotation axis through the center C1 and along the second direction D2.
  • the magnetic pole block 2 includes a plurality of (20 in FIG. 3) magnetic poles 20.
  • the plurality of magnetic poles 20 are arranged along the first direction D1. Since the first direction D1 is the rotation direction of the magnetic pole block 2, the plurality of magnetic poles 20 are arranged in an annular shape along the rotation direction.
  • Half of the plurality of magnetic poles 20 are N pole poles, and the rest are S pole poles.
  • the plurality of magnetic poles 20 are arranged so that the north pole and the south pole are alternately arranged in the first direction D1.
  • the lengths of the plurality of magnetic poles 20 in the first direction D1 are equal to each other.
  • Each magnetic pole 20 is, for example, a ferrite magnet.
  • the letter “N” is attached to the magnetic pole of the N pole
  • the letter “S” is attached to the magnetic pole of the S pole.
  • the magnetic poles of the N pole and the magnetic poles of the S pole are distinguished by the shading of the dots.
  • the letters and dots of "N” and "S” are displayed only for explanation, and the letters and dots are not actually attached to the magnetic pole 20.
  • the distance between the same poles of the plurality of magnetic poles 20 is expressed as the distance ⁇ 2 .
  • the interval ⁇ 2 is defined as the angle difference between the same poles of the plurality of magnetic poles 20 with respect to the center C1. That is, the angle formed by the line segment connecting the center of the magnetic pole of the S pole (or N pole) and the center C1 and the line segment connecting the center of the magnetic pole of the next S pole (or N pole) and the center C1. , Defined as interval ⁇ 2 .
  • the first direction D1 is a linear direction.
  • the interval ⁇ 2 may be defined as follows. That is, the linear distance between the center of the magnetic pole of the S pole (or N pole) and the center of the magnetic pole of the next S pole (or N pole) may be defined as the interval ⁇ 2 .
  • the magnetic detection system 5 includes a magnetic sensor 6, a first bias magnet 71, a second bias magnet 72, two positive electrode terminals 53, and two positive electrode terminals 53. It includes a negative electrode terminal 55 and two output terminals 54.
  • the magnetic sensor 6 has two half-bridge circuits 60. Each half-bridge circuit 60 includes a first magnetoresistive element 61, a second magnetoresistive element 62, and a conductor 63.
  • the magnetic detection system 5 further includes a protective sheet 56 (see FIG. 2A) and a package 50 (see FIG. 4).
  • the package 50 has a base 51 and a cover 52 (see FIG. 4).
  • the protective sheet 56 is not shown.
  • the cover 52 is not shown.
  • the shape of the base 51 is a rectangular parallelepiped shape.
  • the base 51 is, for example, an alumina substrate.
  • Two half-bridge circuits 60 are formed on one surface (main surface 511) of the base 51 in the thickness direction.
  • the two half-bridge circuits 60 are formed, for example, by printing and molding.
  • the base 51 has four side surfaces intersecting with the main surface 511, and of the four side surfaces, two side surface 512s located on opposite sides have a positive electrode terminal 53, a negative electrode terminal 55, and an output terminal 54, respectively. , Are arranged (see FIG. 1).
  • the material of the cover 52 is, for example, an epoxy resin.
  • the shape of the cover 52 is a rectangular parallelepiped.
  • the cover 52 has an opening on one surface thereof.
  • the base 51 is coupled to the cover 52 so as to cover the opening of the cover 52. As a result, the hollow package 50 is formed.
  • the package 50 houses the magnetic sensor 6, the first bias magnet 71, and the second bias magnet 72. That is, the magnetic sensor 6 has two half-bridge circuits 60 housed in the package 50.
  • the external shape of the package 50 is a rectangular parallelepiped. In the direction of the rotation axis of the magnetic pole block 2 (second direction D2), the width of the package 50 is smaller than the width of the magnetic pole block 2 (see FIG. 7).
  • the magnetic detection system 5 its components are integrated into one package 50. That is, the magnetic detection system 5 constitutes one electronic component.
  • the magnetic detection system 5 can be miniaturized. Further, the accuracy of the positional relationship between the first bias magnet 71 and the first magnetoresistive effect element 61 and the positional relationship between the second bias magnet 72 and the second magnetoresistive element 62 is to be improved. Can be done.
  • Each of the two half-bridge circuits 60 includes a first magnetoresistive effect element 61, a second magnetoresistive effect element 62, and a conductor 63.
  • the conductor 63 electrically connects the first magnetoresistive effect element 61, the second magnetoresistive effect element 62, the positive electrode terminal 53, the negative electrode terminal 55, and the output terminal 54 to each other. ..
  • Each of the first magnetoresistive sensor 61 and the second magnetoresistive sensor 62 detects the magnetic field in the first direction D1.
  • Each of the first magnetoresistive effect element 61 and the second magnetoresistive effect element 62 is a GMR (Giant Magneto Resistive effect) element.
  • Examples of the type of GMR element include a CIP (current in plane) type and a CPP (current perpendicular to plane) type.
  • Each of the first magnetoresistive element 61 and the second magnetoresistive element 62 of the present embodiment is a CIP type GMR element.
  • Each of the first magnetoresistive effect element 61 and the second magnetoresistive effect element 62 has a laminated structure formed by alternately laminating magnetic layers and non-magnetic layers.
  • the magnetic layer contains, for example, cobalt and iron.
  • the non-magnetic layer comprises, for example, copper, silver, gold, platinum or ruthenium.
  • each half-bridge circuit 60 the first magnetoresistive element 61 and the second magnetoresistive element 62 are arranged along the second direction D2. Assuming that the first magnetoresistive sensor 61 is moved in parallel with the second D2 when viewed from the third direction D3, the first magnetoresistive sensor 61 is the second magnetoresistive element 62. It is preferable that it overlaps with at least a part.
  • each half-bridge circuit 60 the node between the first magnetoresistive element 61 and the second magnetoresistive element 62 is electrically connected to the output terminal 54.
  • the first end on the first magnetoresistive element 61 side is electrically connected to the positive electrode terminal 53.
  • the second end of the second magnetoresistive sensor 62 side is electrically connected to the negative electrode terminal 55. That is, the first magnetoresistive sensor 61 is electrically connected to the positive electrode terminal 53, and the second magnetoresistive sensor 62 is electrically connected to the negative electrode terminal 55.
  • the positive electrode terminal 53 is electrically connected to the high potential side terminal (Vcc) of the power supply, and the negative electrode terminal 55 is the low potential side terminal of the power supply. (Ground (GND)) is electrically connected.
  • the positive electrode terminal 53 is electrically connected to the low potential side terminal (ground (GND)) of the power supply, and the negative electrode terminal 55 is connected to the high potential side terminal (Vcc) of the power supply. It is electrically connected. That is, one half-bridge circuit 60 is connected to the other in opposite phase.
  • the first magnetoresistive element 61 of one half-bridge circuit 60 is arranged in the first direction D1 with respect to the first magnetoresistive element 61 of the other half-bridge circuit 60. It is preferable that these two first magnetoresistive elements 61 are arranged close to each other.
  • the second magnetoresistive element 62 of one half-bridge circuit 60 is arranged in the first direction D1 with respect to the second magnetoresistive element 62 of the other half-bridge circuit 60. It is preferable that these two second magnetoresistive elements 62 are arranged close to each other.
  • the protective sheet 56 covers at least a part of the main surface 511 of the base 51. Further, the protective sheet 56 covers the two first magnetoresistive effect elements 61 and the two second magnetoresistive effect elements 62 formed on the main surface 511. The protective sheet 56 has electrical insulation.
  • the protective sheet 56 is between the two first magnetoresistive element 61 and the first bias magnet 71, and between the two second magnetoresistive element 62 and the second bias magnet 72. It is preferable that it is sandwiched between at least one of them. In other words, the protective sheet 56 is between the two first magnetoresistive elements 61 and the first bias magnet 71 and / or the two second magnetoresistive elements 62 and the second bias magnet 72. It is preferable that it is sandwiched between and.
  • the protective sheet 56 of the present embodiment is sandwiched between the two first magnetoresistive element 61 and the first bias magnet 71, and is sandwiched between the two second magnetoresistive element 62 and the second. It is sandwiched between the bias magnet 72 and the above.
  • the protective sheet 56 covers the entire main surface 511, for example.
  • the protective sheet 56 may cover only a part of the main surface 511.
  • the magnetic detection system 5 may include a plurality of protective sheets 56.
  • first bias magnet 71 and the second bias magnet 72 for example, a permanent magnet or an electromagnet can be adopted.
  • the first bias magnet 71 and the second bias magnet 72 are preferably permanent magnets of the same type as the magnetic pole 20 of the magnetic pole block 2.
  • the magnetic pole 20 is a ferrite magnet
  • the shapes of the first bias magnet 71 and the second bias magnet 72 are rectangular parallelepiped. Each of the first bias magnet 71 and the second bias magnet 72 is arranged in a region surrounded by the outer edge of the base 51 when viewed from the third direction D3 (see FIG. 2A).
  • the two first magnetoresistive elements 61 are arranged in a region surrounded by the outer edge of the first bias magnet 71.
  • the two second magnetoresistive elements 62 are arranged in a region surrounded by the outer edge of the second bias magnet 72. This makes it possible to reduce the possibility that the magnetic field of the first bias magnet 71 is applied to the two second magnetoresistive elements 62. Further, it is possible to reduce the possibility that the magnetic field of the second bias magnet 72 is applied to the two first magnetoresistive elements 61.
  • the first bias magnet 71 and the second bias magnet 72 are magnetized in the direction along the first direction D1.
  • the direction of the magnetic moment of the first bias magnet 71 is opposite to the direction of the magnetic moment of the second bias magnet 72.
  • the first bias magnet 71 has two first magnetoresistive elements 61 that generate a magnetic field in the direction toward one side (first side) of both sides of the first direction D1. Apply to.
  • the second bias magnet 72 has two second magnetoresistive elements 62 that direct a magnetic field toward the other side (second side) of both sides of the first direction D1. Apply to.
  • the detection block 4 (two magnetic detection systems 5) and the magnetic pole block 2 intersect the first direction D1 (the first direction). They face each other in the three directions D3).
  • the rotation of the magnetic pole block 2 changes which of the plurality of magnetic poles 20 the two magnetic detection systems 5 face.
  • the two magnetic detection systems 5 are arranged side by side at a distance ⁇ 1 which is 1/4 times the distance ⁇ 2 between the same poles of the plurality of magnetic poles 20 in the first direction D1.
  • the distance ⁇ 1 between the two magnetic detection systems 5 is defined in the same manner as the distance ⁇ 2 between the same poles of the plurality of magnetic poles 20. That is, when the first direction D1 is the rotation direction as in the present embodiment, the distance ⁇ 1 between the two magnetic detection systems 5 is the angle difference between the centers of the two magnetic detection systems 5 with respect to the center C1. Defined.
  • the distance ⁇ 1 between the two magnetic detection systems 5 may be defined as the linear distance between the centers of the two magnetic detection systems 5.
  • the two magnetic detection systems 5 may be distinguished, one may be referred to as a magnetic detection system 5A, and the other may be referred to as a magnetic detection system 5B.
  • the four magnetic poles 20 shown in FIG. 7 may be distinguished and referred to as magnetic poles 20A, 20B, 20C, and 20D in order from the left.
  • the first voltage Vo1 (see FIGS. 6 and 7) is output from one of the output terminals 54 of the two half-bridge circuits 60, and the first voltage Vo1 is output from the other output terminal 54.
  • Reversed phase voltage (-Vo1) is output.
  • the second voltage Vo2 (see FIGS. 6 and 7) is output from one of the output terminals 54 of the two half-bridge circuits 60, and the second voltage Vo2 is output from the other output terminal 54.
  • Reversed phase voltage (-Vo2) is output.
  • the coordinate axes (horizontal axis) representing the rotation angle of the magnetic pole block 2 with respect to the detection block 4 and the coordinate axes (vertical axis) representing the first voltage Vo1 and the second voltage Vo2 are orthogonal to each other.
  • the waveforms of the first voltage Vo1 and the second voltage Vo2 are sinusoidal (or cosine waves).
  • the first voltage Vo1 and the second voltage Vo2 also change.
  • the period of the first voltage Vo1 and the second voltage Vo2 is equal to the interval ⁇ 2 .
  • the distance ⁇ 1 between the two magnetic detection systems 5 is 1/4 times the distance ⁇ 2 . Due to such an arrangement, the first voltage Vo1 and the second voltage Vo2 are different in phase as a sine wave by 1/4 times of one cycle (interval ⁇ 2 ). That is, the second voltage Vo2 corresponds to a cosine wave having the same phase as the sinusoidal first voltage Vo1.
  • the position and the rotation angle (horizontal axis) of the magnetic detection system 5A on the left side of the two magnetic detection systems 5 are shown so as to correspond to each other in the vertical direction of the paper surface.
  • the values of the first voltage Vo1 and the second voltage Vo2 are the values when the rotation angle is 0.
  • the first magnetic field applied to the first magnetoresistive effect element 61 is the first. It becomes a magnetic field strengthened by the bias magnet 71 of.
  • the second magnetic field applied to the first magnetoresistive sensor 61 becomes a magnetic field weakened by the first bias magnet 71. .. Therefore, the absolute value of the first magnetic field and the absolute value of the second magnetic field are different.
  • the third magnetic field applied to the second magnetoresistive sensor 62 is weakened by the second bias magnet 72. It becomes a magnetic field.
  • the fourth magnetic field applied to the second magnetoresistive sensor 62 becomes a magnetic field strengthened by the second bias magnet 72. .. Therefore, the absolute value of the third magnetic field and the absolute value of the fourth magnetic field are different.
  • the first magnetic field between the magnetic poles 20A and 20B is in the opposite direction to the second magnetic field between the magnetic poles 20B and 20C.
  • the absolute values are the same. Therefore, the output of the magnetic detection system 5 with respect to the first magnetic field is the same as the output of the magnetic detection system 5 with respect to the second magnetic field. In this way, the output of the magnetic detection system 5 differs depending on the presence or absence of the first bias magnet 71 and the second bias magnet 72.
  • the processing circuit 11 includes a computer system having one or more processors and memories.
  • the processor of the computer system executes the program recorded in the memory of the computer system, at least a part of the functions of the processing circuit 11 are realized.
  • the program may be recorded in a memory, provided through a telecommunication line such as the Internet, or may be recorded and provided on a non-temporary recording medium such as a memory card.
  • the first voltage Vo1 and the second voltage Vo2 are input to the processing circuit 11.
  • the processing circuit 11 obtains the position (rotation angle) of the magnetic pole block 2 with respect to the detection block 4 based on the first voltage Vo1 and the second voltage Vo2.
  • FIG. 7 illustrates the first voltage Vo1 and the second voltage Vo2.
  • the processing circuit 11 may obtain the position (rotation angle) of the magnetic pole block 2 with respect to the detection block 4 based on the differential output of each of the two half-bridge circuits 60 of the two magnetic detection systems 5. preferable. However, first, a process in which the processing circuit 11 obtains the position (rotation angle) of the magnetic pole block 2 with respect to the detection block 4 based on the output of one half bridge circuit 60 of each of the two magnetic detection systems 5 will be described.
  • One half-bridge circuit 60 of one of the two magnetic detection systems 5 outputs the first voltage Vo1.
  • the other half-bridge circuit 60 of the two magnetic detection systems 5 outputs a second voltage Vo2.
  • the shape of the first voltage Vo1 is a sinusoidal shape having a period of ⁇ 2 .
  • the shape of the second voltage Vo2 is a cosine wave with a period of ⁇ 2.
  • the processing circuit 11 obtains the phases of the first voltage Vo1 and the second voltage Vo2 based on the first voltage Vo1 and the second voltage Vo2. Every time the phase changes by ⁇ 2 , the processing circuit 11 can determine that the magnetic pole block 2 has rotated by ⁇ 2 . In this way, the processing circuit 11 can determine how much the magnetic pole block 2 has rotated from the rotation angle of the starting point (that is, the relative rotation angle).
  • the position detection system 1 may include a sensor (for example, an optical sensor or a magnetic sensor) for detecting a reference point for movement (rotation) of the magnetic pole block 2 (or detection block 4). Each time the magnetic pole block 2 (or the detection block 4) makes one rotation, the sensor generates a predetermined output signal, and the processing circuit 11 detects a reference point based on the output signal.
  • a sensor for example, an optical sensor or a magnetic sensor
  • the processing circuit 11 is one of the magnetic pole block 2 and the detection block 4 (here, based on the differential output of each of the two half-bridge circuits 60 of the two magnetic detection systems 5).
  • the position (angle of rotation) of the magnetic pole block 2) with respect to the other (detection block 4) is obtained. That is, in the magnetic detection system 5 of one of the two magnetic detection systems 5, the two half-bridge circuits 60 output a first voltage Vo1 and a reverse phase voltage ( ⁇ Vo1) of the first voltage Vo1.
  • the processing circuit 11 obtains a first differential voltage (2 ⁇ Vo1) which is a differential output between the first voltage Vo1 and the reverse phase voltage of the first voltage Vo1.
  • the two half-bridge circuits 60 output a second voltage Vo2 and a reverse phase voltage (-Vo2) of the second voltage Vo2.
  • the processing circuit 11 obtains a second differential voltage (2 ⁇ Vo2), which is a differential output between the second voltage Vo2 and the reverse phase voltage of the second voltage Vo2.
  • the processing circuit 11 obtains the phases of the first differential voltage and the second differential voltage based on the first differential voltage and the second differential voltage. Every time the phase changes by ⁇ 2 , the processing circuit 11 can determine that the magnetic pole block 2 has rotated by ⁇ 2 . Since the amplitudes of the first differential voltage and the second differential voltage are twice as large as the amplitudes of the first voltage Vo1 and the second voltage Vo2, the processing circuit 11 detects the rotation angle of the magnetic pole block 2 with the first voltage Vo1 and The detection accuracy can be improved as compared with the case where the second voltage Vo2 is used.
  • the two first magnetoresistive elements 61 are arranged close to each other due to the formation of the two half-bridge circuits 60 on one base 51, and the two second ones.
  • the magnetoresistive element 62 is arranged close to each other.
  • the strengths of the magnetic fields applied to the two first magnetoresistive sensor 61 are likely to match.
  • the strengths of the magnetic fields applied to the two second magnetoresistive sensor 62 are likely to match.
  • the differential outputs of the two half-bridge circuits 60 increase.
  • the position detection system 1 preferably further includes an output unit 12 (see FIG. 6).
  • the output unit 12 outputs position information indicating the position (rotation angle) of the magnetic pole block 2 obtained by the processing circuit 11.
  • the output unit 12 may, for example, output the position information to a memory provided inside or outside the position detection system 1 and store the position information.
  • the output unit 12 may output the position information to a presentation unit such as a display or a speaker provided inside or outside the position detection system 1, and the presentation unit may present the position information by an image or a voice.
  • FIG. 9 is a graph showing the change in the output of the first magnetoresistive element 61 with respect to the magnetic field strength in the comparative example (that is, when the first bias magnet 71 is not present).
  • FIG. 8 is a graph showing the change in the output of the first magnetoresistive element 61 with respect to the magnetic field strength in the embodiment (that is, when the first bias magnet 71 is present).
  • the magnetic field strength shown on the horizontal axis of FIG. 8 is the magnetic field obtained by subtracting the magnetic field generated by the first bias magnet 71.
  • the output of the first magnetoresistive sensor 61 shown on the vertical axis of FIG. 8 is an output derived from both the magnetic field generated by the magnetic pole block 2 and the magnetic field generated by the first bias magnet 71.
  • the output characteristics of the first magnetoresistive element 61 shown in FIG. 9 can be changed to the first magnetoresistive element 61 and the first bias magnet 71 shown in FIG. It changes to the output characteristics of the entire system consisting of.
  • the output of the first magnetoresistive sensor 61 in the comparative example is symmetrical when the magnetic field strength is positive and when it is negative.
  • the output of the first magnetoresistive element 61 in the embodiment is asymmetrical when the magnetic field strength is positive and when it is negative.
  • FIGS. 8 and 9 show both the output characteristics when the magnetic field strength increases and the output characteristics when the magnetic field strength decreases. That is, the first magnetoresistive element 61 has a hysteresis characteristic.
  • the output in the embodiment has a smaller hysteresis as compared with the output in the comparative example. Thereby, in the embodiment, it is possible to improve the detection accuracy of the rotation angle of the magnetic pole block 2 based on the first voltage Vo1 and the second voltage Vo2.
  • the output of the first magnetoresistive sensor 61 in the embodiment has better linearity with respect to the magnetic field strength as compared with the comparative example. Therefore, in the embodiment, the waveforms of the first voltage Vo1 and the second voltage Vo2 are closer to the ideal sine wave (or cosine wave) as compared with the comparative example. Thereby, in the embodiment, it is possible to improve the detection accuracy of the rotation angle of the magnetic pole block 2 based on the first voltage Vo1 and the second voltage Vo2.
  • first bias magnet 71 and the second bias magnet 72 it is possible to reduce the possibility that the first voltage Vo1 and the second voltage Vo2 are affected by the external magnetic field of the position detection system 1. can.
  • the magnetic detection module 8 includes two magnetic detection systems 5.
  • the magnetic detection module 8 further includes a positioning member 80.
  • the positioning member 80 positions each of the two magnetic detection systems 5.
  • the positioning member 80 fixes the positional relationship between the two magnetic detection systems 5 to each other.
  • the positioning member 80 includes two first members 81 and a second member 82.
  • the two first members 81 have a one-to-one correspondence with the two magnetic detection systems 5.
  • Each first member 81 holds the corresponding magnetic detection system 5.
  • the second member 82 holds two first members 81.
  • Each first member 81 has a main portion 811 and a plurality of (two in FIG. 10) ribs 812.
  • the shape of the main portion 811 is a rectangular parallelepiped shape.
  • the main portion 811 includes a recess r1.
  • a magnetic detection system 5 is inserted in the recess r1.
  • the plurality of ribs 812 project from the main portion 811.
  • Each magnetic detection system 5 is positioned and held in the positioning member 80 by being inserted into the recess r1 in a state of being integrated in the package 50.
  • the two magnetic detection systems 5 are positioned on the positioning member 80 so that the distance between the two magnetic detection systems 5 in the first direction D1 (interval ⁇ 1: see FIG. 3) is a predetermined distance.
  • the terminals On the inner surface of the recess r1, six terminals electrically connected to the two positive electrode terminals 53, the two negative electrode terminals 55, and the two output terminals 54 of the magnetic detection system 5 are exposed. By inserting the magnetic detection system 5 into the recess r1, the terminals come into contact with each other and the terminals are electrically connected.
  • the second member 82 has a mounting portion 821, a connector portion 822, two first holding bases 823, and a second holding base 824.
  • the shape of the mounting portion 821 is a plate shape.
  • the thickness direction of the mounting portion 821 is along the second direction D2. Seen from the second direction D2, the shape of the mounting portion 821 is an oval shape in which the length of the first direction D1 is longer than the length of the third direction D3.
  • the mounting portion 821 includes a plurality of mounting holes 8210 (two in FIG. 10). Screws are passed through each mounting hole 8210.
  • the positioning member 80 is attached to a predetermined member by fastening a screw passed through each mounting hole 8210 to the predetermined member.
  • the two first holding bases 823 and the second holding base 824 project from the mounting portion 821 in the second direction D2.
  • the two first holding pedestals 823 and the second holding pedestal 824 are arranged in the first direction D1.
  • a second holding table 824 is arranged between the two first holding tables 823.
  • Each first holding table 823 is provided with a recess r2.
  • the second holding table 824 includes two recesses r2.
  • One of the two magnetic detection systems 5 is inserted between the first holding table 823 and the second holding table 824.
  • the other of the two magnetic detection systems 5 is inserted between the other first holding table 823 and the second holding table 824.
  • Each first member 81 is held in the second member 82 by inserting the two ribs 812 into the recess r2, respectively.
  • the shape of the connector part 822 is a rectangular parallelepiped.
  • the connector portion 822 projects from the two first holding bases 823 and the second holding base 824 in the third direction D3.
  • the connector unit 822 includes terminals that are electrically connected to an external device.
  • the two positive electrode terminals 53, the two negative electrode terminals 55, and the two output terminals 54 of each magnetic detection system 5 are electrically connected to the processing circuit 11 (see FIG. 6) or the power supply via the connector portion 822, respectively. ..
  • the possibility that the two magnetic detection systems 5 are misaligned can be reduced by using the positioning member 80.
  • the distance between the two magnetic detection systems 5 can be made constant.
  • the positioning member 80 includes the recess r1 as the first holding structure for holding the magnetic detection system 5. By inserting the magnetic detection system 5 into the recess r1, the magnetic detection system 5 is held in the first member 81. Further, the first member 81 has two ribs 812 as a second holding structure for being held by the second member 82. The second member 82 has four recesses r2 as a third holding structure for holding the first member 81. The first member 81 is held by the second member 82 by inserting the two ribs 812 into the corresponding recesses r2, respectively. Further, the positioning member 80 includes a plurality of mounting holes 8210 as a mounting structure for mounting the positioning member 80 to a predetermined member.
  • the first holding structure, the second holding structure, the third holding structure, and the mounting structure are not limited to the structure of the present embodiment, and an appropriate structure can be appropriately adopted.
  • the magnetic detection system 5 may have only one half-bridge circuit 60.
  • the direction of the magnetic field applied by the first bias magnet 71 to the first magnetoresistive element 61 and the direction of the magnetic field applied by the second bias magnet 72 to the second magnetoresistive element 62 are in the first direction. It does not have to be exactly parallel to D1 and may be oblique to the first direction D1.
  • the magnetic poles 20 of the first bias magnet 71, the second bias magnet 72, and the magnetic pole block 2 are not limited to ferrite magnets, and may be, for example, neodymium magnets.
  • the detection block 4 may be movable along the first direction D1.
  • the processing circuit 11 may obtain the position (rotation angle) of the detection block 4 with respect to the magnetic pole block 2.
  • the two magnetic detection systems 5 of the detection block 4 move together so as to maintain a distance from each other in the first direction D1.
  • Both the detection block 4 and the magnetic pole block 2 may be movable along the first direction D1.
  • the processing circuit 11 may obtain at least one of the position of the magnetic pole block 2 with respect to the detection block 4 and the position of the detection block 4 with respect to the magnetic pole block 2.
  • the detection block 4 and the magnetic pole block 2 face each other in a direction intersecting the first direction D1.
  • the detection block 4 and the magnetic pole block 2 face each other in the third direction D3, but the present invention is not limited to this, and for example, the detection block 4 and the magnetic pole block 2 may face each other in the second direction D2.
  • the first magnetoresistive element 61 is arranged between the magnetic pole block 2 and the first bias magnet 71.
  • the first bias magnet 71 may be arranged between the magnetic pole block 2 and the first magnetoresistive element 61.
  • the second magnetoresistive element 62 is arranged between the magnetic pole block 2 and the second bias magnet 72.
  • the second bias magnet 72 may be arranged between the magnetic pole block 2 and the second magnetoresistive element 62.
  • the distance ⁇ 1 between the two magnetic detection systems 5 is not limited to 1/4 times the distance ⁇ 2 between the same poles of the plurality of magnetic poles 20.
  • the interval ⁇ 1 may be (1/4 + M / 2) times the interval ⁇ 2 (M is 0 or a natural number).
  • the magnetic pole block 2 may have a plurality (for example, two) of tracks including a plurality of magnetic poles 20 arranged in the first direction D1. Multiple tracks move (rotate) together. It is desirable that two magnetic detection systems 5 are arranged to face each other for each track.
  • the position detection system 1 in the present disclosure includes a computer system in the processing circuit 11 and the like.
  • the computer system mainly consists of a processor and a memory as hardware.
  • the program may be pre-recorded in the memory of the computer system, may be provided through a telecommunications line, and may be recorded on a non-temporary recording medium such as a memory card, optical disk, hard disk drive, etc. that can be read by the computer system. May be provided.
  • the processor of a computer system is composed of one or more electronic circuits including a semiconductor integrated circuit (IC) or a large scale integrated circuit (LSI).
  • the integrated circuit such as IC or LSI referred to here has a different name depending on the degree of integration, and includes an integrated circuit called a system LSI, VLSI (Very Large Scale Integration), or ULSI (Ultra Large Scale Integration).
  • an FPGA Field-Programmable Gate Array
  • a plurality of electronic circuits may be integrated on one chip, or may be distributed on a plurality of chips.
  • the plurality of chips may be integrated in one device, or may be distributed in a plurality of devices.
  • the computer system referred to here includes a microcontroller having one or more processors and one or more memories. Therefore, the microprocessor is also composed of one or a plurality of electronic circuits including a semiconductor integrated circuit or a large-scale integrated circuit.
  • processing circuit 11 it is not an essential configuration for the processing circuit 11 that a plurality of functions in the processing circuit 11 are integrated into one device, and the components of the processing circuit 11 are distributed and provided in the plurality of devices. It is also good. Further, at least a part of the functions of the processing circuit 11 may be realized by a cloud (cloud computing) or the like.
  • the same function as the processing circuit 11 may be embodied by a processing method, a (computer) program, a non-temporary recording medium on which the program is recorded, or the like.
  • the magnetic detection system (5) includes a magnetic sensor (6), a first bias magnet (71), and a second bias magnet (72).
  • the magnetic sensor (6) has a half-bridge circuit (60) of a first magnetoresistive effect element (61) and a second magnetoresistive effect element (62).
  • the first magnetoresistive sensor (61) detects a magnetic field in the first direction (D1).
  • the second magnetoresistive element (62) is arranged along the second direction (D2) orthogonal to the first direction (D1) with respect to the first magnetoresistive element (61).
  • the second magnetoresistive sensor (62) detects the magnetic field in the first direction (D1).
  • the first bias magnet (71) applies a magnetic field in the direction toward the first side of both sides of the first direction (D1) to the first magnetoresistive element (61).
  • the second bias magnet (72) applies a magnetic field in the direction toward the second side of both sides of the first direction (D1) to the second magnetoresistive element (62).
  • the second side is opposite to the first side.
  • the magnetic detection system (5) further includes a package (50) in the first aspect.
  • the package (50) houses the magnetic sensor (6), the first bias magnet (71) and the second bias magnet (72).
  • the configuration of the magnetic detection system (5) is integrated into one package (50), the usability of the magnetic detection system (5) is improved.
  • the magnetic sensor (6) has two half-bridge circuits (60).
  • the two half-bridge circuits (60) are housed in a package (50).
  • the two half-bridge circuits (60) can be connected in opposite phase to obtain the differential output of the two half-bridge circuits (60).
  • the differential output is greater than the output of a single half-bridge circuit (60). Therefore, the magnetic detection accuracy can be improved.
  • the magnetic detection system (5) further includes a protective sheet (56) in any one of the first to third aspects.
  • the protective sheet (56) is provided between the first magnetoresistive element (61) and the first bias magnet (71), and between the second magnetoresistive element (62) and the second bias magnet (72). ) Is sandwiched between at least one of them.
  • the distance between the first magnetoresistive element (61) and the first bias magnet (71) and / or the second magnetoresistive element (62) and the second bias magnet ( The distance from 72) can be made relatively small. Therefore, the magnetic field applied to the first magnetoresistive element (61) from the first bias magnet (71) and / or the second magnetoresistive element (62) from the second bias magnet (72). The magnetic field applied to the can be relatively large.
  • the first magnetoresistive effect element (61) is arranged in the region surrounded by the outer edge of the first bias magnet (71).
  • the second magnetoresistive element (62) is arranged in a region surrounded by the outer edge of the second bias magnet (72).
  • Configurations other than the first aspect are not essential configurations for the magnetic detection system (5) and can be omitted as appropriate.
  • the position detection system (1) includes a detection block (4) and a magnetic pole block (2).
  • the detection block (4) has two magnetic detection systems (5) according to any one of the first to fifth aspects.
  • the magnetic pole block (2) includes a plurality of magnetic poles (20) arranged along the first direction (D1).
  • the detection block (4) and the magnetic pole block (2) face each other in a direction intersecting the first direction (D1).
  • the plurality of magnetic poles (20) are arranged so that the north pole and the south pole are alternately arranged in the first direction (D1).
  • At least one of the detection block (4) and the magnetic pole block (2) is movable with respect to the other along the first direction (D1).
  • the two magnetic detection systems (5) are arranged in the first direction (D1) at a distance ( ⁇ 1 ) that is 1/4 + M / 2 times the distance ( ⁇ 2 ) between the same poles of the plurality of magnetic poles (20). ..
  • M is 0 or a natural number.
  • the position of one of the magnetic detection system (5) and the magnetic pole block (2) with respect to the other, based on the output of each magnetic sensor (6) of the two magnetic detection systems (5). Can be detected.
  • the position detection system (1) further includes a processing circuit (11) in the sixth aspect.
  • the processing circuit (11) determines the position of one of the magnetic pole block (2) and the detection block (4) with respect to the other, based on the output of each magnetic sensor (6) of the two magnetic detection systems (5). Ask.
  • the magnetic sensor (6) of at least one of the two magnetic detection systems (5) is half. It is provided with two bridge circuits (60). The outputs of the two half-bridge circuits (60) are out of phase with each other.
  • the processing circuit (11) finds the position of one of the magnetic pole block (2) and the detection block (4) with respect to the other based on the differential output of the two half bridge circuits (60).
  • the differential output is larger than the output of the single half-bridge circuit (60). Therefore, the accuracy of position detection can be improved.
  • Configurations other than the sixth aspect are not essential configurations for the position detection system (1) and can be omitted as appropriate.
  • the magnetic detection module (8) according to the ninth aspect includes two magnetic detection systems (5) according to any one of the first to fifth aspects.
  • the magnetic detection module (8) further includes a positioning member (80).
  • the positioning member (80) fixes the positional relationship between the two magnetic detection systems (5).
  • various configurations (including modifications) of the magnetic detection system (5) and the position detection system (1) according to the embodiment can be applied to the magnetic detection module (8).
  • Position detection system 2 Magnetic pole block 4 Detection block 5 Magnetic detection system 6 Magnetic sensor 8 Magnetic detection module 11 Processing circuit 20 Magnetic pole 50 Package 56 Protective sheet 60 Half bridge circuit 61 First magnetic resistance effect element 62 Second magnetic resistance effect Element 71 First bias magnet 72 Second bias magnet 80 Positioning member D1 First direction D2 Second direction D3 Third direction ⁇ 1 , ⁇ 2 spacing

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measuring Magnetic Variables (AREA)

Abstract

L'objet de la présente invention est de réduire la distorsion de la forme d'onde de sortie d'un capteur magnétique. Ce système de détection magnétique (5) comprend un capteur magnétique (6), un premier aimant de polarisation (71) et un second aimant de polarisation (72). Le capteur magnétique (6) comprend un circuit en demi-pont (60) d'un premier élément à effet magnétorésistif (61) et d'un second élément à effet magnétorésistif (62). Le premier aimant de polarisation (71) applique, au premier élément à effet magnétorésistif (61), un champ magnétique orienté vers un premier côté parmi deux côtés dans une première direction (D1). Le second aimant de polarisation (72) applique, au second élément à effet magnétorésistif (62), un champ magnétique orienté vers un second côté parmi les deux côtés dans la première direction (D1) qui est le côté opposé par rapport au premier côté.
PCT/JP2021/044690 2020-12-18 2021-12-06 Système de détection magnétique, système de détection de position et module de détection magnétique WO2022131049A1 (fr)

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WO2024024821A1 (fr) * 2022-07-29 2024-02-01 パナソニックＩｐマネジメント株式会社 Module d'aimant, module de capteur et procédé de fabrication de module d'aimant

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JPS58154613A (ja) * 1982-03-10 1983-09-14 Copal Co Ltd 変位量検出装置
JPH01214715A (ja) * 1988-02-24 1989-08-29 Sony Magnescale Inc ロータリエンコーダ
JP2008151759A (ja) * 2006-12-20 2008-07-03 Alps Electric Co Ltd 磁気センサ及びそれを用いた磁気エンコーダ
JP2012078123A (ja) * 2010-09-30 2012-04-19 Tdk Corp 位置センサ及びその製造方法並びに位置決め治具
JP2018077149A (ja) * 2016-11-10 2018-05-17 浜松光電株式会社 磁気センサ
JP2018179776A (ja) * 2017-04-13 2018-11-15 大同特殊鋼株式会社 薄膜磁気センサ
US20200041310A1 (en) * 2018-08-06 2020-02-06 Allegro Microsystems, Llc Magnetic field sensor

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Publication number Priority date Publication date Assignee Title
JPS58154613A (ja) * 1982-03-10 1983-09-14 Copal Co Ltd 変位量検出装置
JPH01214715A (ja) * 1988-02-24 1989-08-29 Sony Magnescale Inc ロータリエンコーダ
JP2008151759A (ja) * 2006-12-20 2008-07-03 Alps Electric Co Ltd 磁気センサ及びそれを用いた磁気エンコーダ
JP2012078123A (ja) * 2010-09-30 2012-04-19 Tdk Corp 位置センサ及びその製造方法並びに位置決め治具
JP2018077149A (ja) * 2016-11-10 2018-05-17 浜松光電株式会社 磁気センサ
JP2018179776A (ja) * 2017-04-13 2018-11-15 大同特殊鋼株式会社 薄膜磁気センサ
US20200041310A1 (en) * 2018-08-06 2020-02-06 Allegro Microsystems, Llc Magnetic field sensor

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Publication number Priority date Publication date Assignee Title
WO2024024821A1 (fr) * 2022-07-29 2024-02-01 パナソニックＩｐマネジメント株式会社 Module d'aimant, module de capteur et procédé de fabrication de module d'aimant

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