WO2022119377A1 - Procédé pour séparer du deutérium d'un mélange gazeux de deutérium et d'azote, et purifier celui-ci - Google Patents

Procédé pour séparer du deutérium d'un mélange gazeux de deutérium et d'azote, et purifier celui-ci Download PDF

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WO2022119377A1
WO2022119377A1 PCT/KR2021/018223 KR2021018223W WO2022119377A1 WO 2022119377 A1 WO2022119377 A1 WO 2022119377A1 KR 2021018223 W KR2021018223 W KR 2021018223W WO 2022119377 A1 WO2022119377 A1 WO 2022119377A1
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deuterium
pressure
adsorption
nitrogen
adsorption tower
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PCT/KR2021/018223
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English (en)
Korean (ko)
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조순행
김인백
임삼목
박주현
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주식회사 젠스엔지니어링
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Publication of WO2022119377A1 publication Critical patent/WO2022119377A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D59/00—Separation of different isotopes of the same chemical element
    • B01D59/22—Separation by extracting
    • B01D59/26—Separation by extracting by sorption, i.e. absorption, adsorption, persorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0462—Temperature swing adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/047—Pressure swing adsorption
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B4/00—Hydrogen isotopes; Inorganic compounds thereof prepared by isotope exchange, e.g. NH3 + D2 → NH2D + HD
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/102—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/104—Alumina
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/106—Silica or silicates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/106—Silica or silicates
    • B01D2253/108—Zeolites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40011—Methods relating to the process cycle in pressure or temperature swing adsorption
    • B01D2259/40013—Pressurization
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40011—Methods relating to the process cycle in pressure or temperature swing adsorption
    • B01D2259/40028—Depressurization
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40011—Methods relating to the process cycle in pressure or temperature swing adsorption
    • B01D2259/40035—Equalization

Definitions

  • the present invention relates to a method for separating and purifying deuterium from a mixed gas of deuterium and nitrogen, and more particularly, nitrogen as an impurity to the adsorbent by passing it through four or more pressure swing adsorption devices filled with an adsorbent from deuterium gas containing nitrogen. It relates to a deuterium adsorption separation and purification method for removing nitrogen from a mixed gas of deuterium and nitrogen by discharging and recovering deuterium that is not adsorbed after adsorbing it from an adsorption tower.
  • the pressure swing adsorption process is a process of separating a mixed gas using the adsorption selectivity of the adsorbent to the adsorbent.
  • the adsorbent is regenerated by desorbing the adsorbed component. In order to sufficiently regenerate the adsorbent, it is cleaned at low pressure with high-purity weak adsorption components, and raw material gas or product gas is used to pressurize the adsorption pressure.
  • PSA Pressure Swing Adsorption
  • a technology and method for removing impurities using various adsorbents and producing hydrogen, and a technology and method for producing nitrogen and oxygen in air have been commercialized.
  • Korean Patent Application Laid-Open No. 10-1479691 describes a method for recovering deuterium using a nitrogen separation membrane.
  • deuterium is purified using a separation membrane in this way, nitrogen is removed and deuterium can be concentrated, but purification with high purity is difficult, and there is no mention of recovery of high-purity deuterium.
  • Korean Patent Application Laid-Open No. 10-2016-0016486 discloses a method and apparatus for recovering deuterium.
  • a system for recovering deuterium, a rare gas used in the semiconductor manufacturing process is described.
  • the above technology was conceived of a system to recover and use deuterium, but a specific separation and recovery technology is not described.
  • Korean Patent Application Laid-Open No. 10-2002-0085379 describes a hydrogen isotope separation method. A method for separating hydrogen isotopes using a catalytic reactor is described.
  • Korean Patent Application Laid-Open No. 10-2019-0080619 discloses a metal-organic framework for isotope separation, an isotope separation system, an isotope separation method, and a manufacturing method. A method for adsorption separation of isotopes using a MOF catalyst is described.
  • the present inventors have made diligent efforts to solve the above problems and efficiently purify deuterium from which nitrogen has been removed from a mixed gas of deuterium and nitrogen. After passing through a pressure swing adsorption device filled with an adsorbent selected from a nitrogen mixed gas, nitrogen is adsorbed on the adsorbent, and then the deuterium that is not adsorbed is discharged from the adsorption tower to purify the deuterium. It was confirmed that it can be purified to a high purity of about %, and the present invention was completed.
  • An object of the present invention is to provide a method and apparatus capable of removing nitrogen from a mixed gas of deuterium and nitrogen and purifying deuterium to a high concentration.
  • the present invention is (a) passing a mixed gas of deuterium and nitrogen through a pressure swing adsorption device equipped with an adsorption tower filled with a nitrogen selective adsorbent to adsorb nitrogen to the adsorbent, and deuterium that is not adsorbed Separating deuterium by discharging to the top of the adsorption tower; And (b) depressurizing the pressure of the adsorption tower to atmospheric pressure, and performing a pressure swing adsorption (PSA) method in which nitrogen adsorbed on the adsorbent is desorbed and discharged.
  • PSA pressure swing adsorption
  • 1 is a deuterium according to an embodiment of the present invention - a four-bed pressure swing adsorption process diagram for producing deuterium from nitrogen gas.
  • V-1, V-2, V-3, V-4 adsorption tower
  • T-1 Deuterium source gas storage tank containing nitrogen
  • T-2 high-purity deuterium storage tank from which nitrogen is removed
  • the present invention is (a) passing a mixed gas of deuterium and nitrogen through a pressure swing adsorption device equipped with an adsorption tower filled with a nitrogen-selective adsorbent to adsorb nitrogen to the adsorbent, and to absorb deuterium that is not adsorbed on the upper part of the adsorption tower Separating deuterium by discharging to; And (b) depressurizing the pressure of the adsorption tower to atmospheric pressure, and performing a pressure swing adsorption (PSA) method in which nitrogen adsorbed on the adsorbent is desorbed and discharged.
  • PSA pressure swing adsorption
  • the step (b) comprises (i) supplying high-purity deuterium discharged while reducing the pressure of the adsorption tower where the adsorption step has been completed to a co-current in the same direction as the flow of the raw material gas to another adsorption tower being pressurized.
  • differential pressure equalization step (ii) a countercurrent depressurization step of depressurizing the adsorption tower to atmospheric pressure in a countercurrent manner to remove nitrogen, which is an adsorbed impurity, after the first equalization step is completed; (iii) a vacuum desorption step of removing nitrogen, which is an adsorbed impurity, to a vacuum pressure after the countercurrent depressurization step; (iv) a second pressure equalization step of pressurizing the tower by introducing the exhaust gas of another adsorption tower in the first equalization step in a counter flow from the outlet of the tower while co-current pressure is reduced after the vacuum desorption step; And (v) after the pressure equalization step for the pressurization, a portion of the product deuterium may be introduced countercurrently to pressurize the pressure of the adsorption tower to the pressure of the adsorption step.
  • a washing supply step for washing impurities generated in the adsorbent charged in the adsorption tower after step (i) may be added and performed.
  • the cleaning supply step (i) after the first equalization step is completed the pressure of the adsorption tower is further reduced in co-current flow, and the gas discharged at this time is supplied to the cleaning gas of the adsorption tower in the cleaning step, and the (ii) countercurrent pressure reduction step It may be a step of cleaning nitrogen present in the adsorption tower by supplying the gas discharged from the adsorption tower of the cleaning supply step to the adsorption tower where is started.
  • pressure equalization step - washing supply step - (ii) countercurrent pressure reduction step can be carried out in the order.
  • step (b) is a preferred embodiment, (i) supplying high-purity deuterium discharged while reducing the pressure of the adsorption tower where the adsorption step has been completed to a co-current in the same direction as the flow of the raw material gas to another adsorption tower being pressurized.
  • a nitrogen-selective adsorbent from a mixed gas of deuterium and nitrogen into an adsorption tower filled with a nitrogen-selective adsorbent to selectively adsorb nitrogen in the mixed gas to the nitrogen-selective adsorbent, and a product that is not adsorbed from the adsorption tower adsorption step of discharging deuterium;
  • the present invention is an apparatus and method for producing high concentration of deuterium by removing nitrogen contained in deuterium by a pressure swing adsorption method.
  • the deuterium mixed gas containing about 10% nitrogen is passed through a pressure swing adsorption device filled with an adsorbent to adsorb nitrogen to the adsorbent.
  • the adsorbed nitrogen is depressurized or vacuum desorbed using a vacuum pump.
  • the adsorption separation process of the present invention is a process using four adsorption towers, and consists of an adsorption step - a pressure equalization step - a washing supply step - a countercurrent depressurization step - a vacuum desorption step - a pressure equalization step - a pressure accumulation step.
  • a plurality of adsorption towers may be used, and in particular, four or more adsorption towers may be arranged in parallel with each other.
  • the adsorption step, the first equalization step, the washing supply step, the countercurrent pressure reduction step, the vacuum desorption step, the second pressure equalization step and the pressure accumulation step are different from each other at the same time in at least four adsorption towers during the 4 bed process. This can be done by repeating the steps.
  • the adsorption separation method may constitute a method of performing (c) the washing supply step, and may also constitute an adsorption separation method excluding the washing supply step (c).
  • the pressure equalization step may be additionally performed after the (i) first equalization step or the (v) second equalization step.
  • the (e) vacuum desorption step may be performed under a pressure of -1 to 2 barG, and the adsorption step (a) may be performed under a pressure of 2 to 30 barG, preferably 10 barG.
  • the adsorption pressure can be used from atmospheric pressure to 30 bar, and the accumulating pressure is applied to the adsorption pressure so that the operation of the next adsorption step is not disrupted. In this case, there is no need to separately control the operating temperature.
  • the pressure swing adsorption method PSA
  • TSA temperature swing adsorption method
  • PTSA pressure temperature swing adsorption method
  • Table 1 shows a process for producing high concentration (99.999%) of deuterium by introducing a deuterium-nitrogen mixed gas into the adsorption separation process.
  • Table 1 shows the operation steps of the pressure swing adsorption device using four adsorption towers. As shown in Table 1, each of the four adsorption towers (V-1, V-2, V-3, V-4) may be operated by performing an adsorption step, a pressure equalization step, a washing supply step, and a desorption step.
  • FIG. 1 shows a 4-bed pressure swing adsorption device composed of four main adsorption towers (V-1,2,3,4).
  • control valves are attached to control the gas flow in each operation step, and it is composed of a vacuum pump for vacuum desorption of nitrogen by lowering the vacuum pressure from the main adsorption tower.
  • the operation of the device for producing deuterium goes through the following operation steps.
  • nitrogen which is a strongly adsorbed component, is adsorbed by the adsorption tower, and unadsorbed gas deuterium is discharged through the valve (6) and enters the deuterium storage (T-2). .
  • the adsorption tower (V-2), which has been adsorbed, is reduced countercurrently to atmospheric pressure through the valve (7) and valve (25), and the adsorption tower (V-3) and the adsorption tower (V-4) perform primary equalization, co-current pressure reduction
  • the exhaust gas of the adsorption tower (V-4) is supplied to the adsorption tower (V-3) through the valve (21) and the valve (12) is used to partially pressurize the adsorption tower (V-3).
  • the adsorption tower (V-4) turns the exhaust gas into the washing gas of the adsorption tower (V-2) while reducing the co-current pressure through the valve (22).
  • a cleaning supply step of supplying is performed, and the adsorption tower (V-2) opens the valve (10) to receive the gas supplied from the adsorption tower (V-4) to clean the adsorbent.
  • the adsorption tower (V-2) performs vacuum desorption using a vacuum pump by opening the valve 26 after the countercurrent pressure reduction to atmospheric pressure is completed. While performing vacuum desorption, a cleaning gas is supplied and used to clean the adsorbent.
  • the adsorption tower (V-3) closes the valve (15) and opens the valve (17) to introduce the product gas in a counter-current flow, thereby accumulating the pressure of the tower to the adsorption pressure.
  • the valve 22, the valve 10, the valve 7 and the valve 26 of the adsorption tower (V-2) where the vacuum desorption has been completed and the washing supply step (V-4) are closed, and the valve (9) is closed. ), the secondary pressure equalization proceeds as the valve 21 is opened, and the remaining adsorption towers proceed with the existing performing steps.
  • the adsorption tower (V-1) and the adsorption tower (V-2) close the valve (2) and the valve (6), and open the valve (3) to perform the first equalization pressure
  • the adsorption tower (V-3) closes the valve (17), and opens the valve (14) and valve (18) to perform the adsorption step
  • the adsorption tower (V-4) closes the valve (21)
  • the valve (19) the countercurrent pressure reduction step is performed to atmospheric pressure by opening the valve 25 .
  • the adsorption tower (V-1) closes the valve (3) and opens the valve (4) to reduce the co-current pressure while removing the exhaust gas from the adsorption tower (V-)
  • a cleaning supply step of sending a cleaning gas to 4) is performed, and the adsorption tower (V-4) receives the gas supplied from the adsorption tower (V-1) by opening the valve (22) to clean the adsorbent.
  • the adsorption tower (V-4) performs vacuum desorption using a vacuum pump by opening the valve 26 after the countercurrent pressure reduction to atmospheric pressure is completed.
  • a cleaning gas is supplied and used to clean the adsorbent.
  • the adsorption tower (V-2) closes the valve (3) and opens the valve (11) to introduce the product gas in a counter-current flow, thereby accumulating the pressure of the tower to the adsorption pressure.
  • the valves 4, 22, 19, and 26 of the adsorption tower (V-4) where the vacuum desorption has been completed and the adsorption tower (V-1) where the cleaning supply step is completed are closed, and the valve (3) is closed. ), the secondary pressure equalization proceeds as the valve 21 is opened, and the remaining adsorption towers proceed with the existing performing steps.
  • the adsorption tower (V-3) and the adsorption tower (V-4) close the valve 13 and 24, and open the valve 3 to perform the first equalization pressure
  • the adsorption tower (V-2) closes the valve (11), and opens the valve (7) and valve 12 to perform the adsorption step
  • the adsorption tower (V-1) closes the valve (3)
  • the valve (1) the countercurrent pressure reduction step is performed to atmospheric pressure by opening the valve 25 .
  • the adsorption tower (V-3) closes the valve (15) and opens the valve (16) to co-currently pressure reduce the exhaust gas to the adsorption tower (V-)
  • a cleaning supply step of sending a cleaning gas to 1) is performed, and the adsorption tower (V-1) receives the gas supplied from the adsorption tower (V-3) by opening the valve (4) to clean the adsorbent.
  • the adsorption tower (V-1) performs vacuum desorption using a vacuum pump by opening the valve 26 after the countercurrent pressure reduction to atmospheric pressure is completed.
  • a cleaning gas is supplied and used to clean the adsorbent.
  • the adsorption tower (V-4) closes the valve (21) and opens the valve (23) to introduce the product gas in a counter-current flow, thereby accumulating the pressure of the tower to the adsorption pressure.
  • the valve (1), valve (4), valve (10), and valve (26) of the adsorption tower (V-1) where the vacuum desorption is completed and the adsorption tower (V-3) where the cleaning supply stage is completed are closed, and the valve (3) ), the secondary pressure equalization proceeds as the valve 15 is opened, and the remaining adsorption towers proceed with the existing performing steps.
  • the adsorption tower (V-1) and the adsorption tower (V-2) close the valve (8) and the valve (12), and open the valve (9) to perform the first equalization pressure
  • the adsorption tower (V-4) closes the valve 23, and opens the valve 20 and the valve 24 to perform the adsorption step
  • the adsorption tower (V-3) closes the valve 15, the valve 13
  • the countercurrent pressure reduction step is performed to atmospheric pressure by opening the valve 25 .
  • the adsorption tower (V-2) closes the valve (9) and opens the valve (10) to reduce the co-current pressure while removing the exhaust gas from the adsorption tower (V-)
  • a cleaning supply step of sending the cleaning gas to 3) is performed, and the adsorption tower (V-3) receives the gas supplied from the adsorption tower (V-2) by opening the valve (16) to clean the adsorbent.
  • the adsorption tower (V-3) performs vacuum desorption using a vacuum pump by opening the valve 26 after the countercurrent pressure reduction to atmospheric pressure is completed.
  • a cleaning gas is supplied and used to clean the adsorbent.
  • the adsorption tower (V-1) closes the valve (3) and opens the valve (5) to introduce the product gas in a counter-current flow, thereby accumulating the pressure of the tower to the adsorption pressure.
  • the valves 10, 16, 13, and 26 of the adsorption tower (V-3) where the vacuum desorption has been completed and the washing supply step (V-2) are closed, and the valve (9) is closed. ), the secondary pressure equalization proceeds as the valve 15 is opened, and the remaining adsorption towers proceed with the existing performing steps.
  • This operation is alternately continued in the four adsorption towers, forming one cycle, and continuous operation is performed.
  • deuterium having a nitrogen content of 10 ppm or less and a deuterium purity of 99.999% is obtained as a product.
  • deuterium from which nitrogen is removed from a mixed gas of deuterium and nitrogen can be obtained as a product of high purity (99.999%).

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Separation Of Gases By Adsorption (AREA)

Abstract

La présente invention concerne un procédé pour séparer du deutérium d'un mélange gazeux de deutérium et d'azote, et purifier celui-ci, et permet à un gaz mélangé au deutérium contenant de l'azote de passer à travers quatre dispositifs d'adsorption modulée en pression ou plus remplis d'un adsorbant, de sorte que l'azote soit adsorbé sur l'adsorbant, puis, le deutérium, non adsorbé, est évacué vers la partie supérieure de tours d'adsorption, ce qui permet de récupérer le deutérium purifié, et ainsi du deutérium à haute concentration, dont l'azote est éliminé, peut être produit à partir d'un gaz mixte de deutérium et d'azote.
PCT/KR2021/018223 2020-12-03 2021-12-03 Procédé pour séparer du deutérium d'un mélange gazeux de deutérium et d'azote, et purifier celui-ci WO2022119377A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2020-0167307 2020-12-03
KR1020200167307A KR102439733B1 (ko) 2020-12-03 2020-12-03 중수소와 질소의 혼합가스로부터 중수소의 분리 및 정제방법

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000051347A (ko) * 1999-01-21 2000-08-16 손재익 높은 생산성을 갖는 수소 압력변동흡착 공정
US20030172808A1 (en) * 2000-07-07 2003-09-18 Remi Le Bec Method for purifying hydrogen-based gas mixtures using a calcium x- zeolite
KR20090082458A (ko) * 2006-11-08 2009-07-30 스미토모 세이카 가부시키가이샤 수소가스의 분리방법 및 분리장치
KR20130129278A (ko) * 2011-02-07 2013-11-27 에어 프로덕츠 앤드 케미칼스, 인코오포레이티드 폐가스 스트림 흡착으로부터 고가치 성분을 회수하는 방법 및 시스템
KR101479691B1 (ko) * 2013-12-31 2015-01-06 주식회사 풍산 반도체 설비용 중수소 가스 재활용 시스템

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000051347A (ko) * 1999-01-21 2000-08-16 손재익 높은 생산성을 갖는 수소 압력변동흡착 공정
US20030172808A1 (en) * 2000-07-07 2003-09-18 Remi Le Bec Method for purifying hydrogen-based gas mixtures using a calcium x- zeolite
KR20090082458A (ko) * 2006-11-08 2009-07-30 스미토모 세이카 가부시키가이샤 수소가스의 분리방법 및 분리장치
KR20130129278A (ko) * 2011-02-07 2013-11-27 에어 프로덕츠 앤드 케미칼스, 인코오포레이티드 폐가스 스트림 흡착으로부터 고가치 성분을 회수하는 방법 및 시스템
KR101479691B1 (ko) * 2013-12-31 2015-01-06 주식회사 풍산 반도체 설비용 중수소 가스 재활용 시스템

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KR102439733B1 (ko) 2022-09-02

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