WO2022104909A1

WO2022104909A1 - Optoelectronic barcode system based on non-hermitian coupling principle

Info

Publication number: WO2022104909A1
Application number: PCT/CN2020/133057
Authority: WO
Inventors: 黄海阳; 赵瑛璇; 仇超; 盛振; 甘甫烷
Original assignee: 中国科学院上海微系统与信息技术研究所
Priority date: 2020-11-17
Filing date: 2020-12-01
Publication date: 2022-05-27
Also published as: CN112200289A

Abstract

The present invention relates to an optoelectronic barcode system based on a non-Hermitian coupling principle. A barcode recognition device comprises a substrate; an insulting layer is fixedly provided on the substrate; a plurality of silicon wires which is parallel to each other and has the same shape and size is provided on the insulating layer, and the distances between adjacent silicon wires are equal; wires are lead out from either end of each silicon wire so as to be connected to a potentiometer; the potentiometer is connected to a processor; the middle of the substrate is provided with a through hole for laser light emitted by a laser device to pass through; the laser device is fixed relative to the substrate; when the laser light emitted by the laser device irradiates on a barcode and is then reflected onto the silicon wires, a near-field coupling effect occurs between the silicon wires and the substrate, and a resonator formed by the silicon wires and the substrate is made to produce amplitude complete suppression; and the processor calculates the position of a laser light reflection point according to position information of two silicon wires, among the silicon wires, having minimum potential values. The present invention can provide a barcode identifier for a micro-nano device.

Description

An optoelectronic barcode system based on the principle of non-Hermitian coupling

technical field

The invention relates to the technical field of micro-nano photonic devices and micro-systems, in particular to an optoelectronic barcode system based on the principle of non-Hermitian coupling.

Background technique

At present, the widely used barcode is an important symbol in the commodity circulation supply chain and plays an important role in production and life. However, the standard size of commodity barcodes commonly used in various industries is 37.29mmx26.26mm, which is difficult to use on the surface of small items. There are various tiny devices in production and life, and the development of barcode systems suitable for the identification of tiny devices has a wide range of application requirements.

SUMMARY OF THE INVENTION

The technical problem to be solved by the present invention is to provide an optoelectronic barcode system based on the principle of non-Hermitian coupling, which can provide barcode identification for micro-nano devices.

The technical solution adopted by the present invention to solve the technical problem is to provide an optoelectronic barcode system based on the principle of non-Hermitian coupling, including a barcode identification device, including a barcode identification device, and the barcode identification device includes a substrate, and the substrate A layer of insulating layer is fixed on the insulating layer, and several silicon wires that are parallel to each other and have the same shape and size are arranged on the insulating layer, and the distance between adjacent silicon wires is equal. The potentiometer is connected to the processor; the middle of the substrate is provided with a through hole for the laser to pass through, and the laser is fixed relative to the substrate; the laser emitted by the laser is irradiated on the barcode When it is reflected on the silicon wire after being lifted up, a near-field coupling effect occurs between the silicon wire and the substrate, and the amplitude of the resonator formed by the silicon wire and the substrate is completely suppressed. The processor is based on the minimum potential value in the silicon wire. The position information of the two silicon wires of the value calculates the position of the laser reflection point.

The distance between the adjacent silicon wires is one-fifth of the wavelength of the laser light.

The thickness of the insulating layer is 15-20 nm.

The insulating layer is a transparent aluminum oxide isolation layer.

The substrate is a silver matrix in the shape of a rectangular parallelepiped.

The barcode includes a base body, and a group of rectangular grooves or protrusions parallel to each other are engraved on the surface of the working surface of the base body.

The working surface and the rectangular groove/convex surface of the base body are surfaces capable of diffusely reflecting light.

beneficial effect

Compared with the prior art, the present invention has the following advantages and positive effects due to the adoption of the above-mentioned technical solution: the present invention has the advantages of small size, large amount of information, magnetic field resistance, low delay, strong confidentiality, and low energy consumption. , and can provide a barcode identification for various micro-nano devices such as chips and optoelectronic devices.

Description of drawings

1 is a schematic structural diagram of an embodiment of the present invention;

2 is a front view of a two-dimensional barcode in an embodiment of the present invention;

3 is a top view of a two-dimensional barcode in an embodiment of the present invention;

4 is a front view of a barcode identification device in an embodiment of the present invention;

5 is a top view of a barcode identification device in an embodiment of the present invention;

6 is a schematic diagram of the principle of laser detection based on non-Hermitian coupling specific frequency in an embodiment of the present invention;

FIG. 7 is a schematic diagram of the principle of detecting the position of a point light source in an embodiment of the present invention.

Detailed ways

The present invention will be further described below in conjunction with specific embodiments. It should be understood that these examples are only used to illustrate the present invention and not to limit the scope of the present invention. In addition, it should be understood that after reading the content taught by the present invention, those skilled in the art can make various changes or modifications to the present invention, and these equivalent forms also fall within the scope defined by the appended claims of the present application.

The embodiment of the present invention relates to an optoelectronic barcode system based on the principle of non-Hermitian coupling, as shown in FIG. 1 , including a barcode identification device and a barcode.

The barcode includes a base body, and a group of rectangular grooves/protrusions parallel to each other are engraved on the surface of the working surface of the base body. The working surface and the rectangular groove/convex surface of the base body are surfaces capable of diffusely reflecting light. As shown in FIG. 2 and FIG. 3 , the base 15 is a two-dimensional barcode base with a rectangular parallelepiped shape, and the surface of the working surface 16 on one side is engraved with a set of parallel, width, depth and adjacent spacing not necessarily equal. The rectangular groove 17 of the two-dimensional barcode, the working surface 16 of the two-dimensional barcode and the bottom surface of each groove of the rectangular groove 17 are made into a surface that can diffusely reflect light, so that the base 15, the working surface 16 and the rectangular groove 17 constitute a two-dimensional barcode. .

As shown in FIGS. 4 and 5 , the barcode identification device includes a substrate 11 , and the substrate 11 is a silver matrix in the shape of a rectangular parallelepiped. An insulating layer 12 with a certain thickness is fixed on the substrate 11 , and the insulating layer 12 is a transparent aluminum oxide isolation layer. A plurality of silicon wires 13 parallel to each other and having the same shape and size are arranged on the insulating layer 12, and the distance between adjacent silicon wires is equal, and the distance is determined according to the used laser wavelength. Both ends of each silicon wire 13 lead out wires 23 to be connected to a potentiometer, and the potentiometer is connected to the processor; a through hole 14 for the laser 18 to pass through is provided in the middle of the substrate, and the laser 18 It is fixed relative to the substrate 11, so the substrate 11, the insulating layer 12 and the silicon wire 13 constitute a barcode identification device.

In this embodiment, the two-dimensional barcode can be processed by conventional photolithography technology. The main parameters of the barcode identification device: the cross section of a single silicon wire 13 is 60*100nm, the center spacing is 145nm, the material of the substrate 11 is metallic silver, and the wavelength emitted by the light source 18 is 727nm. Using conventional micro-nano processing technology, on SOI wafer, first use electron beam lithography to etch silicon nanowires, then use ALD process to deposit an aluminum oxide isolation layer (15-20nm), and then use electron beam evaporation to deposit Silver backing. When the light source wavelength is 727nm and the incident angle is 50°, complete suppression can be achieved.

When working, the laser emitted by the laser is vertically irradiated on the barcode (the bottom surface of the working surface 16 or the groove of the rectangular groove 17), and the barcode keeps a certain distance from the barcode identification device and moves in parallel (for example, according to the direction of V in Figure 1). movement), so that the laser light emitted by the laser 18 scans the working surface 16 and the rectangular groove 17 of the barcode in turn and is reflected on the silicon wire. Due to the near-field coupling effect between the silicon wire and the silver substrate, the processor can calculate the position of the laser reflection point according to the position information of the two silicon wires with the minimum potential value in the silicon wire. When the laser scans the working surface 16 of the two-dimensional barcode and each rectangular groove 17 , the barcode identification device can read the working surface 16 of the barcode and the geometric information and position information of each rectangular groove 17 .

The code reading principle of this embodiment is realized based on the non-Hermitian coupling specific frequency laser detection principle. In Figure 5, 1 and 2 are parallel wires made of silicon material, L1 is a laser parallel beam that is vertically shot to wire 1 and wire 2 in space, and L2 is the projection of L1 onto the plane where wire 1 and wire 2 are located. Line, θ is the incident angle (the acute angle between the laser parallel beam L1 and the normal line of the plane where the wire 1 and wire 2 are located), 7 is the transparent aluminum oxide isolation layer (insulating layer) with a certain thickness, 8 is the silver lining end. The wire 1 and the wire 2 are fixed on the transparent aluminum oxide isolation layer 7 , and the transparent aluminum oxide isolation layer 7 is fixedly connected with the silver substrate 8 . 3 and 4 are lead wires fixedly connected to both ends of lead 1 and

lead

2, 5 and 6 are potentiometers, and the potential difference at both ends of lead 1 and lead 2 can be measured through lead wire 3 and lead wire 4 respectively.

When the laser irradiates a single silicon wire, the silicon wire is illuminated, and a potential difference is generated across the silicon wire. In Fig. 5, for a light beam L1 of a specific wavelength (eg, the wavelength range of the light source is 700-750 nm), if the distance between the wire 1 and the wire 2 and the thickness of the aluminum oxide isolation layer 7 are appropriate (eg, between the wire 1 and the wire 2) When the distance is one-fifth of the wavelength of light, and the thickness of the aluminum oxide isolation layer 7 is 15-20 nm), the two

parallel wires

1 and 2 and the silver substrate 8 in this case form a resonator together. Under the irradiation of the light beam L1, a near-field coupling effect will occur between the wire 1, the wire 2 and the silver substrate 8. At this time, the brightness of the wire 1 and the wire 2 and the potential difference between the two ends will change. According to the coupled mode theory, the potential difference between the two ends of wire 1 and wire 2 is related to the incident angle θ. In particular, by carefully designing the parameters, it can be achieved that at a certain incident angle θ ₀ , the resonator amplitude is completely suppressed, that is, the resonator is close to the light source. The potential difference between the two ends of the wire 1 tends to zero, while the potential difference between the two ends of the wire 2 which is far from the light source does not change significantly. The laser incident angle θ ₀ at this position is called the coupling incident angle. In order to improve the detection sensitivity, it can be judged whether the light incident angle is the coupling incident angle θ ₀ according to the ratio of the potential difference between the two ends of the wire 1 and the wire 2: then when the light incident angle is the coupling incident angle θ ₀ , the two ends of the wire 1 and the wire 2 The potential difference ratio reaches an extreme value. According to this principle, the value of θ ₀ can be accurately measured.

Based on the above principle, a point light source position detection principle is shown in Figure 6. In the figure, 1a is a plurality of identical parallel wire groups made of silicon material, and 7a is a transparent aluminum oxide isolation layer with a certain thickness ( Insulation layer), 8a is a silver substrate, the size of the wire group 1a, the isolation layer 7a and the silver substrate 8a are appropriately set so that the adjacent wires in the wire group 1a all meet the conditions for the occurrence of the above-mentioned non-Hermitian coupling phenomenon; A scattered light source that emits or reflects light of a specific wavelength, with θ ₀ being the coupled incidence angle. According to the above-mentioned non-Hermitian coupling specific frequency laser detection principle, when the light emitted by point S is irradiated on the wire group 1a, the two wires A1 and A2 irradiated by the incident angle of the coupling incident angle θ ₀ appear dark, and the potential difference between their two ends close to zero.

The position of the light source can be obtained from the positions of the two dark wires in the wire group. Set the rectangular coordinate system oxy. In the rectangular coordinate system oxy, the seat of point A1 is marked as (x1, y1), the seat of point A2 is marked as (x2, y2), and the seat of light source S is marked as (x3, y3), Then the coordinates (x3, y3) of the light source S point can be obtained according to the coordinates of point A1 (x1, y1), the coordinates of point A2 (x2, y2) and θ ₀ :

It can be seen that, based on this principle, the barcode identification device of this embodiment can read the positions of the working surface and the groove on the barcode, thereby realizing the identification of the barcode.

Claims

An optoelectronic bar code system based on the principle of non-Hermitian coupling, comprising a bar code recognition device, characterized in that it comprises a bar code recognition device, the bar code recognition device comprises a substrate, and an insulating layer is fixed on the substrate, and the The insulating layer is provided with a number of silicon wires that are parallel to each other and have the same shape and size, and the distances between adjacent silicon wires are equal. Both ends of each silicon wire are led out of wires and connected to a potentiometer. The potentiometer is connected with the processing The middle of the substrate is provided with a through hole for the laser emitted by the laser to pass through, and the laser is fixed relative to the substrate; when the laser emitted by the laser is irradiated on the barcode and reflected on the silicon wire, the silicon The near-field coupling effect occurs between the wire and the substrate, and the resonator formed by the silicon wire and the substrate is completely suppressed in amplitude. The processor calculates the position information of the two silicon wires with the minimum potential value in the silicon wire. The position of the laser reflection point is displayed.
The optoelectronic barcode system based on the principle of non-Hermitian coupling according to claim 1, wherein the distance between the adjacent silicon wires is one-fifth of the wavelength of the laser light emitted by the laser.
The optoelectronic barcode system based on the principle of non-Hermitian coupling according to claim 1, wherein the thickness of the insulating layer is 15-20 nm.
The optoelectronic barcode system based on the principle of non-Hermitian coupling according to claim 1, wherein the insulating layer is a transparent aluminum oxide insulating layer.
The optoelectronic barcode system based on the principle of non-Hermitian coupling according to claim 1, wherein the substrate is a silver matrix in the shape of a cuboid.
The optoelectronic barcode system based on the principle of non-Hermitian coupling according to claim 1, wherein the barcode comprises a base, and a group of rectangular grooves or protrusions parallel to each other are engraved on the surface of the working surface of the base.
The optoelectronic barcode system based on the principle of non-Hermitian coupling according to claim 6, wherein the working surface and the rectangular groove/convex surface of the base body are surfaces that can diffusely reflect light.