CN112200289A - Photoelectron bar code system based on non-Hermite coupling principle - Google Patents

Photoelectron bar code system based on non-Hermite coupling principle Download PDF

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Publication number
CN112200289A
CN112200289A CN202011284812.5A CN202011284812A CN112200289A CN 112200289 A CN112200289 A CN 112200289A CN 202011284812 A CN202011284812 A CN 202011284812A CN 112200289 A CN112200289 A CN 112200289A
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Prior art keywords
substrate
laser
bar code
silicon conducting
hermite
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CN202011284812.5A
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Chinese (zh)
Inventor
黄海阳
赵瑛璇
仇超
盛振
甘甫烷
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Shanghai Institute of Microsystem and Information Technology of CAS
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Shanghai Institute of Microsystem and Information Technology of CAS
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Priority to CN202011284812.5A priority Critical patent/CN112200289A/en
Priority to PCT/CN2020/133057 priority patent/WO2022104909A1/en
Publication of CN112200289A publication Critical patent/CN112200289A/en
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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
    • G06K19/06—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
    • G06K19/06009—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code with optically detectable marking
    • G06K19/06037—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code with optically detectable marking multi-dimensional coding
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
    • G06K19/06—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
    • G06K19/06009—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code with optically detectable marking
    • G06K19/06046—Constructional details
    • G06K19/06112—Constructional details the marking being simulated using a light source, e.g. a barcode shown on a display or a laser beam with time-varying intensity profile
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
    • G06K7/10—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
    • G06K7/10544—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum
    • G06K7/10712—Fixed beam scanning
    • G06K7/10762—Relative movement
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
    • G06K7/10—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
    • G06K7/10544—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum
    • G06K7/10821—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum further details of bar or optical code scanning devices
    • G06K7/1095—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum further details of bar or optical code scanning devices the scanner comprising adaptations for scanning a record carrier that is displayed on a display-screen or the like

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Artificial Intelligence (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)

Abstract

The invention relates to a photoelectronic bar code system based on a non-Hermite coupling principle, wherein a bar code recognition device comprises a substrate, wherein a layer of insulating layer is fixedly arranged on the substrate, a plurality of silicon conducting wires which are parallel to each other and have the same shape and size are arranged on the insulating layer, the distances between the adjacent silicon conducting wires are equal, conducting wires are led out from two ends of each silicon conducting wire and are connected with a potential meter, and the potential meter is connected with a processor; the middle part of the substrate is provided with a through hole for the laser emitted by the laser to pass through, and the laser is fixed relative to the substrate; when laser emitted by the laser irradiates on the bar code and is reflected to the silicon conducting wire, a near-field coupling effect occurs between the silicon conducting wire and the substrate, the vibration amplitude of a resonator formed by the silicon conducting wire and the substrate is completely inhibited, and the processor calculates the position of a laser reflection point according to position information of two silicon conducting wires with the minimum potential value in the silicon conducting wire. The invention can provide bar code identification for the micro-nano device.

Description

Photoelectron bar code system based on non-Hermite coupling principle
Technical Field
The invention relates to the technical field of micro-nano photonic devices and micro-systems, in particular to a photoelectron bar code system based on a non-Hermite coupling principle.
Background
The currently widely used bar code is an important mark in a commodity circulation supply chain, plays an important role in production and life, but the standard size of the commodity bar code commonly used in various industries is 37.29mmx26.26mm, and the bar code is difficult to use on the surface of a tiny article. Various micro devices exist in production and life, and the development of a bar code system suitable for the identity identification of the micro devices has wide application requirements.
Disclosure of Invention
The invention aims to solve the technical problem of providing an optoelectronic bar code system based on the non-hermite coupling principle, which can provide bar code identification for micro-nano devices.
The technical scheme adopted by the invention for solving the technical problems is as follows: the photoelectronic bar code system based on the non-Hermite coupling principle comprises a bar code recognition device, wherein the bar code recognition device comprises a substrate, a layer of insulating layer is fixedly arranged on the substrate, a plurality of silicon conducting wires which are parallel to each other and have the same shape and size are arranged on the insulating layer, the distances between the adjacent silicon conducting wires are equal, conducting wires are led out from two ends of each silicon conducting wire and are connected with a potential meter, and the potential meter is connected with a processor; the middle part of the substrate is provided with a through hole for the laser emitted by the laser to pass through, and the laser is fixed relative to the substrate; when laser emitted by the laser irradiates on the bar code and is reflected to the silicon conducting wire, a near-field coupling effect occurs between the silicon conducting wire and the substrate, the vibration amplitude of a resonator formed by the silicon conducting wire and the substrate is completely inhibited, and the processor calculates the position of a laser reflection point according to position information of two silicon conducting wires with the minimum potential value in the silicon conducting wire.
The distance between the adjacent silicon wires is one fifth of the wavelength of the laser emitted by the laser.
The thickness of the insulating layer is 15-20 nm.
The insulating layer is a transparent alumina isolation layer.
The substrate is a cuboid silver matrix.
The bar code comprises a base body, wherein a group of parallel rectangular grooves or protrusions are carved on the surface of the working surface of the base body.
The working surface and the rectangular groove/convex surface of the substrate are surfaces capable of diffusely reflecting light.
Advantageous effects
Due to the adoption of the technical scheme, compared with the prior art, the invention has the following advantages and positive effects: the invention has the advantages of small volume, large information quantity, magnetic field resistance, low delay, strong confidentiality, low energy consumption and the like, and can provide a bar code mark for various micro-nano devices such as chips, photoelectric devices and the like.
Drawings
FIG. 1 is a schematic structural diagram of an embodiment of the present invention;
FIG. 2 is a front view of a two-dimensional bar code in an embodiment of the present invention;
FIG. 3 is a top view of a two-dimensional bar code in an embodiment of the present invention;
FIG. 4 is a front view of a bar code identification device in an embodiment of the present invention;
FIG. 5 is a top view of a bar code identification device in an embodiment of the present invention;
FIG. 6 is a schematic diagram of a non-Hermite coupling specific frequency-based laser detection principle in an embodiment of the present invention;
FIG. 7 is a schematic diagram illustrating the principle of detecting the position of a point light source in an embodiment of the present invention.
Detailed Description
The invention will be further illustrated with reference to the following specific examples. It should be understood that these examples are for illustrative purposes only and are not intended to limit the scope of the present invention. Further, it should be understood that various changes or modifications of the present invention may be made by those skilled in the art after reading the teaching of the present invention, and such equivalents may fall within the scope of the present invention as defined in the appended claims.
The embodiment of the invention relates to an optoelectronic bar code system based on the non-Hermite coupling principle, which comprises a bar code identification device and a bar code as shown in figure 1.
The bar code comprises a base body, wherein a group of parallel rectangular grooves/bulges are carved on the surface of the working surface of the base body. The working surface of the substrate and the surfaces of the rectangular grooves/protrusions are surfaces capable of diffusely reflecting light. As shown in fig. 2 and 3, the substrate 15 is a two-dimensional bar code substrate having a rectangular parallelepiped shape, a set of rectangular grooves 17 which are parallel to each other and are not necessarily equal in width, depth, and adjacent pitch are engraved on the surface of the work plane 16 on one side, and the work plane 16 of the two-dimensional bar code and each groove bottom surface of the rectangular grooves 17 are made to be surfaces which can diffusely reflect light, so that the substrate 15, the work plane 16, and the rectangular grooves 17 constitute a two-dimensional bar code.
As shown in fig. 4 and 5, the barcode recognition apparatus includes a substrate 11, and the substrate 11 is a silver matrix in a rectangular parallelepiped shape. An insulating layer 12 with a certain thickness is fixedly arranged on the substrate 11, and the insulating layer 12 is a transparent alumina isolation layer. The insulating layer 12 is provided with a plurality of parallel silicon wires 13 with the same shape and size, and the distances between adjacent silicon wires are equal, and the distances are determined according to the used laser wavelength. Two ends of each silicon wire 13 are respectively led out of a wire 23 to be connected with a potential measuring meter, and the potential measuring meter is connected with a processor; the middle part of the substrate is provided with a through hole 14 for passing laser emitted by a laser 18, and the laser 18 is fixed relative to the substrate 11, so that the substrate 11, the insulating layer 12 and the silicon wire 13 form a bar code identification device.
In this embodiment, the two-dimensional barcode can be processed by conventional photolithography. The main parameters of the bar code identification device are as follows: the cross section of the single silicon wire 13 is 60 × 100nm, the center distance is 145nm, the substrate 11 is made of metal silver, and the wavelength emitted by the light source 18 is 727 nm. A conventional micro-nano processing technology is adopted, on an SOI (silicon on insulator) sheet, electron beam lithography is firstly used for etching silicon nanowires, then an ALD (atomic layer deposition) technology is used for depositing an aluminum oxide isolation layer (15-20nm), and then electron beam evaporation is used for depositing a silver substrate. When the light source wavelength is 727nm and the incident angle is 50 degrees, complete inhibition can be achieved.
When the laser scanning device works, laser emitted by the laser vertically irradiates on a bar code (the working surface 16 or the bottom surface of the rectangular groove 17), the bar code keeps a certain distance relative to the bar code recognition device and moves in parallel (for example, the bar code moves along the direction V in the figure 1), and the laser emitted by the laser 18 sequentially scans the working surface 16 and the rectangular groove 17 of the bar code and then is reflected to a silicon conductor. Due to the fact that the near field coupling effect occurs between the silicon conducting wires and the silver substrate, the processor can calculate the positions of the laser reflection points according to the position information of the two silicon conducting wires with the minimum potential values in the silicon conducting wires. The bar code identification device can read the geometric information and the positional information of the working face 16 of the bar code and each rectangular groove 17 as the laser scans the working face 16 and each rectangular groove 17 of the two-dimensional bar code.
The code reading principle of the embodiment is realized based on the non-Hermite coupling specific frequency laser detection principle. In fig. 5, 1 and 2 are conductive lines made of a silicon material parallel to each other, L1 is a parallel beam of laser light spatially directed perpendicularly to the conductive lines 1 and 2, L2 is a projection line of L1 projected onto the plane of the conductive lines 1 and 2, θ is an incident angle (an acute angle sandwiched between the parallel beam of laser light L1 and a normal line of the plane of the conductive lines 1 and 2), 7 is a transparent alumina isolation layer (insulating layer) having a certain thickness, and 8 is a silver substrate. The lead 1 and the lead 2 are fixedly connected on a transparent alumina isolation layer 7, and the transparent alumina isolation layer 7 is fixedly connected with a silver substrate 8. 3 and 4 are lead-out wires fixedly connected with two ends of the wire 1 and the wire 2, 5 and 6 are potentiometers, and the potential difference between two ends of the wire 1 and the wire 2 can be respectively measured through the lead-out wires 3 and 4.
When laser irradiates a single silicon wire, the silicon wire is illuminated, and a potential difference is generated at two ends of the silicon wire. In FIG. 5, for a light beam L1 with a specific wavelength (e.g., light source wavelength range 700-750nm), if the distance between the lead wire 1 and the lead wire 2 and the thickness of the alumina spacer 7 are appropriate (e.g., the distance between the lead wire 1 and the lead wire 2 is one fifth of the wavelength of light, oxygen is addedThe thickness of the aluminum oxide isolation layer 7 is 15-20nm), in this case, the two parallel wires 1, 2 and the silver substrate 8 together form a resonator, and under the irradiation of the light beam L1, a near field coupling effect occurs between the wires 1, 2 and the silver substrate 8, and at this time, the brightness of the wires 1 and 2 and the potential difference between the two ends change. According to the coupled mode theory, the potential difference between the two ends of the conducting wire 1 and the conducting wire 2 is related to the incident angle theta, and particularly, a certain incident angle theta can be realized through elaborately designing parameters0The amplitude of the resonator is completely inhibited, namely the potential difference between two ends of the conducting wire 1 which is closer to the light source tends to zero, while the potential difference between two ends of the conducting wire 2 which is farther from the light source does not change obviously, and the laser incidence angle theta at the position is adjusted0Referred to as the coupling angle of incidence. In order to improve the detection sensitivity, whether the light incident angle is the coupling incident angle theta can be judged according to the ratio of the potential difference between the two ends of the conducting wire 1 and the conducting wire 20: when the light incident angle is the coupling incident angle theta0When the voltage difference between the two ends of the conducting wire 1 and the conducting wire 2 reaches an extreme value. According to this principle, theta can be accurately measured0The value of (c).
Based on the above principle, a principle of detecting the position of a point light source is shown in fig. 6, in which 1a is a plurality of identical parallel wire sets made of silicon material, 7a is a transparent alumina isolation layer (insulation layer) with a certain thickness, 8a is a silver substrate, and the dimensions of the wire set 1a, the isolation layer 7a and the silver substrate 8a are properly set so that the adjacent wires in the wire set 1a all meet the condition of the non-hermitian coupling phenomenon; s is a scattered light source capable of emitting or reflecting light of a specific wavelength, [ theta ]0Is the coupling angle of incidence. According to the above-mentioned non-Hermite coupling specific frequency laser detection principle, when the light emitted from the point S is irradiated onto the lead group 1a, the incident angle is the coupling incident angle theta0The 2 illuminated wires a1 and a2 appear dark with a near zero potential difference across them.
The light source position can be found according to the positions of 2 dark wires in the wire group. If a rectangular coordinate system oxy is set, and the coordinates of the point a1 are (x1, y1), the coordinates of the point a2 are (x2, y2), and the coordinates of the point S of the light source are (x3, y3), then the coordinates of the point a1 (x1, y1) and the point a2 can be usedCoordinate (x2, y2) and theta0Find the coordinates (x3, y3) of the light source S point:
Figure BDA0002781979130000041
based on this principle, the barcode recognition device of the present embodiment can read the positions of the groove and the working surface on the barcode, thereby recognizing the barcode.

Claims (7)

1. A photoelectron bar code system based on a non-Hermite coupling principle comprises a bar code identification device and is characterized by comprising a bar code identification device, wherein the bar code identification device comprises a substrate, a layer of insulating layer is fixedly arranged on the substrate, a plurality of silicon conducting wires which are parallel to each other and have the same shape and size are arranged on the insulating layer, the distances between the adjacent silicon conducting wires are equal, conducting wires are led out from two ends of each silicon conducting wire and are connected with a potential meter, and the potential meter is connected with a processor; the middle part of the substrate is provided with a through hole for the laser emitted by the laser to pass through, and the laser is fixed relative to the substrate; when laser emitted by the laser irradiates on the bar code and is reflected to the silicon conducting wire, a near-field coupling effect occurs between the silicon conducting wire and the substrate, the vibration amplitude of a resonator formed by the silicon conducting wire and the substrate is completely inhibited, and the processor calculates the position of a laser reflection point according to position information of two silicon conducting wires with the minimum potential value in the silicon conducting wire.
2. The non-hermite coupling principle based optoelectronic barcode system of claim 1, wherein a distance between the adjacent silicon wires is one fifth of a wavelength of the laser light emitted by the laser.
3. The non-hermitian coupling principle based optoelectronic barcode system of claim 1, wherein the thickness of the insulating layer is 15-20 nm.
4. The non-hermite coupling principle based optoelectronic barcode system of claim 1, wherein the insulating layer is a transparent alumina isolation layer.
5. The non-hermite coupling principle based optoelectronic barcode system of claim 1, wherein the substrate is a cuboid shaped silver matrix.
6. The non-hermite coupling principle based optoelectronic barcode system of claim 1, wherein the barcode comprises a substrate, the surface of the working surface of the substrate is engraved with a set of mutually parallel rectangular grooves or protrusions.
7. An optoelectronic barcode system based on the non-hermite coupling principle according to claim 6, wherein the working surface and the rectangular concave/convex surface of the substrate are surfaces capable of diffusely reflecting light.
CN202011284812.5A 2020-11-17 2020-11-17 Photoelectron bar code system based on non-Hermite coupling principle Pending CN112200289A (en)

Priority Applications (2)

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CN202011284812.5A CN112200289A (en) 2020-11-17 2020-11-17 Photoelectron bar code system based on non-Hermite coupling principle
PCT/CN2020/133057 WO2022104909A1 (en) 2020-11-17 2020-12-01 Optoelectronic barcode system based on non-hermitian coupling principle

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113625254A (en) * 2021-08-09 2021-11-09 中国科学院上海微系统与信息技术研究所 Microminiature laser radar receiving arrangement

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9016576B2 (en) * 2012-05-21 2015-04-28 Metrologic Instruments, Inc. Laser scanning code symbol reading system providing improved control over the length and intensity characteristics of a laser scan line projected therefrom using laser source blanking control
CN102799852B (en) * 2012-08-07 2015-10-14 深圳市民德电子科技股份有限公司 A kind of bar code identifying device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113625254A (en) * 2021-08-09 2021-11-09 中国科学院上海微系统与信息技术研究所 Microminiature laser radar receiving arrangement

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