WO2022100188A1

WO2022100188A1 - Automatic sampling device for negative photoresist

Info

Publication number: WO2022100188A1
Application number: PCT/CN2021/113039
Authority: WO
Inventors: 纪昌炜
Original assignee: 苏州瑞红电子化学品有限公司
Priority date: 2020-11-10
Filing date: 2021-08-17
Publication date: 2022-05-19
Also published as: CN213456268U

Abstract

An automatic sampling device for a negative photoresist, comprising a main cylinder (1). An auxiliary cylinder (2) is fixedly connected at the bottom end of the main cylinder (1); a suction cup (7) is fixedly mounted at the bottom end of the auxiliary cylinder (2); a fixing sleeve (6) is fixedly sleeved on the outer side surface of the auxiliary cylinder (2); fixed rods (8) are fixedly mounted at the bottom end of the fixing sleeve (6) at equal angles. According to the automatic sampling device for a negative photoresist, by fixedly sleeving the fixing sleeve (6) on the outer side surface of the auxiliary cylinder (2) and fixing the fixed rods (8) at the bottom end of the fixing sleeve (6), when a photoresist needs to be suctioned, the bottom ends of bases (11) can be contacted with the bottom end of a container cavity containing the photoresist, or the suction cup (7) can be fixed to the bottom end of the container cavity; buffer springs (10) at the top ends of movable rods (9) can adapt to the deformation of the suction cup (7) to drive the movable rods (9) to move with respect to the fixed rods (8) to adapt to different working conditions; at this time, the photoresist can be suctioned by means of a connecting rod (4). Thus, the advantage of no need of handholding is achieved.

Description

Negative photoresist automatic sampling device

technical field

The utility model relates to the technical field of photoresist sampling, in particular to a negative photoresist automatic sampling device.

Background technique

Negative photoresist, also known as photoresist, is a light-sensitive mixed liquid composed of three main components: photosensitive resin, sensitizer (see spectral sensitizing dye) and solvent. After the photosensitive resin is exposed to light, a photocuring reaction can occur quickly in the exposed area, which makes the physical properties of the material, especially solubility and affinity, change significantly. After appropriate solvent treatment, the soluble part is dissolved to obtain the desired image (see photoresist imaging platemaking process). Photoresists are widely used in the manufacture of printed circuits and integrated circuits, as well as in processes such as printing plate making. The technology of photoresist is complex and there are many varieties. According to its chemical reaction mechanism and developing principle, it can be divided into two types: negative glue and positive glue. Negative glues form insoluble substances after exposure to light; on the contrary, positive glues are insoluble to certain solvents and become soluble substances after exposure to light. Taking advantage of this property, the photoresist can be used as a coating to etch the desired circuit pattern on the surface of the silicon wafer. Based on the chemical structure of photosensitive resins, photoresists can be classified into three types. ①Photopolymerization type, which uses vinyl monomers to generate free radicals under the action of light, and the free radicals further initiate the polymerization of monomers, and finally generate polymers, which have the characteristics of forming a positive image. ②Photo-decomposition type, using materials containing quinone azide compounds, after exposure to light, a photo-decomposition reaction will occur, changing from oil-soluble to water-soluble, and it can be made into a positive adhesive. ③Photocrosslinking type, using polyvinyl alcohol laurate as a photosensitive material, under the action of light, the double bond in the molecule is opened, and the chain is crosslinked to form an insoluble network This is a typical negative photoresist. Kodak's product KPR glue belongs to this category. When photosensitive resins are imaged with near-ultraviolet light irradiation, the wavelength of the light will limit the improvement of resolution (see photosensitive materials). In order to further improve the resolution to meet the requirements of the VLSI process, radiation with a shorter wavelength must be used as the light source. This results in electron beam, X-ray and deep ultraviolet (<250nm) etching techniques and corresponding electron beam etching pastes, X-ray etching pastes and deep ultraviolet etching pastes. Among them, the production process of negative photoresist: the raw material cyclized polyisoprene glue (concentrated solution RCIS) and xylene are respectively pumped into the preparation kettle from the suction port according to a certain ratio with a diaphragm pump; The amount of BAC-M is filled with nitrogen and stirred to make it fully dissolved. After mixing evenly, sampling is carried out, and the central control inspection is carried out, which conforms to the "Process Product Control Specification"; During the filling process, the finished product is inspected, and then the outer packaging is carried out; after the packaging inspection is qualified, it is put into storage. In the production process, it is often necessary to perform a sampling operation on the photoresist to inspect it, and in this case, a photoresist sampling device needs to be used.

The existing photoresist sampling device is generally composed of a needle tube with a needle removed. In actual use, the bottom end of the device needs to be inserted into the container containing the photoresist to absorb the photoresist, but this device can only be used. When a small amount of photoresist is absorbed, it is necessary to hold the device all the time to absorb a certain amount of photoresist, which may cause the operator's arm soreness, which cannot meet the actual use requirements.

The currently used photoresist sampling device needs to discharge the air inside the device and use the principle of negative pressure to absorb the photoresist into the device during the sampling process. During the suction process, the operator needs to pull up the connecting rod to drive the piston. The plate is displaced relative to the cylinder to absorb the photoresist into the inside of the device, but this device cannot achieve automatic sampling and still requires manual operation, which is inconvenient to use.

Utility model content

In view of the deficiencies of the prior art, the present invention provides an automatic sampling device for negative photoresist, which has the advantages of no need for hand-holding and automatic sampling, and solves the problems raised in the above-mentioned background art.

The utility model provides the following technical solutions: an automatic sampling device for negative photoresist, comprising a main cylinder, the bottom end of the main cylinder is fixedly connected with a secondary cylinder, the bottom end of the secondary cylinder is fixedly installed with a suction cup, and the secondary cylinder is fixedly installed. A fixed sleeve is fixedly sleeved on the outer side of the fixed sleeve, the bottom end of the fixed sleeve is fixedly installed with a fixed rod, the bottom end of the fixed rod is movably sleeved with a movable rod, and the bottom end of the movable rod is fixedly installed with a base The top end of the movable rod is fixedly installed with a buffer spring located inside the fixed rod, and the top end of the buffer spring is fixedly connected with the top end of the inner cavity of the fixed rod.

Preferably, a piston plate is movably sleeved inside the auxiliary cylinder, a connecting rod is fixedly installed on the top of the piston plate, the top of the connecting rod penetrates the top of the main cylinder and is fixedly installed with a threaded rod, and the piston plate is fixedly installed with a connecting rod. The diameter is the same as the inner diameter of the auxiliary cylinder.

Preferably, a return spring is movably sleeved on the outer side of the connecting rod, the upper and lower ends of the return spring are fixedly connected to the bottom end of the auxiliary cylinder and the top end of the main cylinder respectively, and one side of the main cylinder is fixedly installed with mount.

Preferably, a threaded sleeve is threadedly sleeved on the outer side of the threaded rod, and a secondary gear is fixedly sleeved on the outer side of the threaded sleeve.

Preferably, a limit rod is fixedly installed on the top end of the threaded rod, a motor is fixedly installed at one end of the mounting seat, and a transmission shaft is fixedly installed at the top end of the motor output shaft.

Preferably, a main gear is fixedly sleeved on the outer side of the transmission shaft, the main gear is meshed with the auxiliary gear, and the motor is connected to the auxiliary gear through the transmission shaft and the main gear.

Compared with the prior art, the utility model has the following beneficial effects:

1. The negative photoresist automatic sampling device is fixedly installed with a suction cup at the bottom end of the auxiliary cylinder, and a fixed sleeve is fixedly sleeved on the outer side of the auxiliary cylinder and a fixed rod is fixed at the bottom end of the fixed sleeve. When the photoresist needs to be sucked, the bottom end of the base can be contacted with the bottom end of the inner cavity of the container containing the photoresist, or the suction cup can be fixed with the bottom end of the inner cavity of the container, and the buffer spring at the top of the movable rod can be fixed. Then, it can adapt to the deformation of the suction cup to drive the movable rod to displace relative to the fixed rod to adapt to different working conditions. At this time, the photoresist can be absorbed by the connecting rod, thereby realizing the advantage of not holding hands.

2. The negative photoresist automatic sampling device has a threaded rod fixed on the top of the connecting rod, a threaded sleeve is threadedly sleeved on the outer side of the threaded rod, and a secondary gear is fixedly sleeved on the outer side of the threaded sleeve. , and through the meshing connection of the auxiliary gear and the main gear, when the photoresist needs to be sampled, the main gear can be turned on to drive the rotation of the main gear, which in turn drives the rotation of the meshing auxiliary gear to further drive the rotation of the threaded sleeve. Under the action, the threaded rod can move up and down relative to the threaded sleeve, thereby driving the movement of the connecting rod and the piston plate to absorb the photoresist and suck it into the interior of the main cylinder to complete the sampling, thereby realizing the advantage of automatic sampling.

Description of drawings

Fig. 1 is the structural representation of the utility model;

Fig. 2 is the exploded schematic diagram of the utility model movable rod structure;

3 is an exploded schematic view of the structure of the main gear and the auxiliary gear of the present invention;

FIG. 4 is a cross-sectional view of the internal structure of the utility model.

In the figure: 1. Main cylinder; 2. Secondary cylinder; 3. Piston plate; 4. Connecting rod; 5. Return spring; 6. Fixed sleeve; 7. Suction cup; 8. Fixed rod; 9. Active rod; 10. Buffer Spring; 11, base; 12, threaded rod; 13, limit rod; 14, threaded sleeve; 15, auxiliary gear; 16, main gear; 17, mounting seat; 18, motor; 19, transmission shaft.

Detailed ways

The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the implementations. example. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present invention.

Please refer to Figure 1-4, the negative photoresist automatic sampling device, including the main cylinder 1, the bottom end of the main cylinder 1 is fixedly connected with the auxiliary cylinder 2, the bottom end of the auxiliary cylinder 2 is fixedly installed with a suction cup 7, The outer side fixed sleeve 6 is connected with a fixed sleeve 6, the bottom end of the fixed sleeve 6 is fixedly installed with a fixed rod 8 at an equal angle, the bottom end of the fixed rod 8 is movably connected with a movable rod 9, and the bottom end of the movable rod 9 is fixedly installed with a base 11. The top end of the movable rod 9 is fixedly installed with a buffer spring 10 located inside the fixed rod 8 , and the top end of the buffer spring 10 is fixedly connected with the top end of the inner cavity of the fixed rod 8 .

Wherein, a piston plate 3 is movably sleeved inside the auxiliary cylinder 2, a connecting rod 4 is fixedly installed on the top of the piston plate 3, and the top of the connecting rod 4 penetrates the top of the main cylinder 1 and is fixedly installed with a threaded rod 12. The diameter is the same as the inner diameter of the secondary cylinder 2 , and a certain negative pressure can be generated through the piston plate 3 with the same diameter as the inner diameter of the secondary cylinder 2 to suck the photoresist into the main cylinder 1 .

Among them, the outer side of the connecting rod 4 is movably sleeved with a return spring 5, and the upper and lower ends of the return spring 5 are respectively fixedly connected with the bottom end of the auxiliary cylinder 2 and the top of the main cylinder 1, and one side of the main cylinder 1 is fixedly installed with a mounting When the seat 17 is no longer acting on the connecting rod 4 and the threaded rod 12, the return spring 5 can drive the automatic reset of the piston plate 3 to realize the closing of the main cylinder 1 without being stressed.

Among them, the threaded sleeve 14 on the outer side of the threaded rod 12 is connected with the threaded sleeve 14, the outer side fixed sleeve 6 of the threaded sleeve 14 is connected with the auxiliary gear 15, and the threaded rod 12 can move up and down relative to the threaded sleeve 14 and drive the bottom end connecting rod 4. move.

The limit rod 13 is fixedly installed at the top of the threaded rod 12, the motor 18 is fixedly installed at one end of the mounting seat 17, and the transmission shaft 19 is fixedly installed at the top of the output shaft of the motor 18, and the transmission shaft 19 can be driven by turning on the motor 18. The rotation further drives the rotation of the main gear 16 .

The main gear 16 is fixedly sleeved on the outer side of the transmission shaft 19. The main gear 16 is meshed with the auxiliary gear 15. The motor 18 is connected to the auxiliary gear 15 through the transmission shaft 19 and the main gear 16. When the main gear 16 rotates, it is connected with the auxiliary gear 15. The meshed secondary gear 15 rotates accordingly to further drive the rotation of the threaded sleeve 14. Under the action of the threaded sleeve 14, the threaded rod 12 can move up and down relative to the threaded sleeve 14, thereby driving the connecting rod 4 and the piston plate 3 to move. Suction and suction to the inside of the main barrel 1 completes the sampling.

Working principle: When the negative photoresist automatic sampling device is in use, the bottom end of the base 11 can be contacted with the bottom end of the container cavity containing the photoresist, or the suction cup 7 can be contacted with the bottom end of the container cavity. Fixed, and the buffer spring 10 at the top of the movable rod 9 can adapt to the deformation of the suction cup 7 to drive the movable rod 9 to move relative to the fixed rod 8 to adapt to different working conditions, and can drive the rotation of the main gear 16 by turning on the motor 18 The rotation of the meshing pinion 15 further drives the rotation of the threaded sleeve 14. Under the action of the threaded sleeve 14, the threaded rod 12 can move up and down relative to the threaded sleeve 14, thereby driving the movement of the connecting rod 4 and the piston plate 3 to carry out the photoresist. Suction and suction to the inside of the main barrel 1 completes the sampling.

It should be noted that, in this document, relational terms such as first and second are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any relationship between these entities or operations. any such actual relationship or sequence exists. Moreover, the terms "comprising", "comprising" or any other variation thereof are intended to encompass non-exclusive inclusion such that a process, method, article or device comprising a list of elements includes not only those elements, but also includes not explicitly listed or other elements inherent to such a process, method, article or apparatus.

Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes and modifications can be made to these embodiments without departing from the principles and spirit of the present invention , alternatives and modifications, the scope of the present invention is defined by the appended claims and their equivalents.

Claims

An automatic sampling device for negative photoresist, comprising a main cylinder (1), characterized in that: the bottom end of the main cylinder (1) is fixedly connected with a secondary cylinder (2), and the bottom end of the secondary cylinder (2) is fixed A suction cup (7) is installed, a fixing sleeve (6) is connected to the outer side fixing sleeve (6) of the auxiliary cylinder (2), and a fixing rod (8) is fixedly installed at the bottom end of the fixing sleeve (6) at an equal angle. The bottom end of the fixed rod (8) is movably sleeved with a movable rod (9), the bottom end of the movable rod (9) is fixedly installed with a base (11), and the top of the movable rod (9) is fixedly installed There is a buffer spring (10) inside the fixing rod (8), and the top end of the buffer spring (10) is fixedly connected with the top end of the inner cavity of the fixing rod (8).
The negative photoresist automatic sampling device according to claim 1, characterized in that: a piston plate (3) is movably sleeved inside the auxiliary cylinder (2), and the top of the piston plate (3) is fixedly installed There is a connecting rod (4), the top of the connecting rod (4) penetrates the top of the main cylinder (1) and a threaded rod (12) is fixedly installed, and the diameter of the piston plate (3) is the same as the diameter of the auxiliary cylinder (2). The inner diameter is the same.
The negative photoresist automatic sampling device according to claim 2, characterized in that: the outer side surface of the connecting rod (4) is movably sleeved with a return spring (5), and the upper and lower sides of the return spring (5) The ends are respectively fixedly connected with the bottom end of the auxiliary cylinder (2) and the top end of the main cylinder (1), and a mounting seat (17) is fixedly installed on one side of the main cylinder (1).
The automatic sampling device for negative photoresist according to claim 2, wherein the threaded sleeve (14) on the outer side of the threaded rod (12) is connected with a threaded sleeve (14), and the threaded sleeve (14) An auxiliary gear (15) is connected to the fixing sleeve (6) on the outer side of the shaft.
The negative photoresist automatic sampling device according to claim 3, characterized in that: a limit rod (13) is fixedly installed on the top of the threaded rod (12), and a limit rod (13) is fixedly installed on one end of the mounting seat (17). A motor (18), a transmission shaft (19) is fixedly installed on the top end of the output shaft of the motor (18).
The negative photoresist automatic sampling device according to claim 5, characterized in that: a main gear (16) is fixedly sleeved on the outer surface of the transmission shaft (19), and the main gear (16) is connected to the auxiliary gear. (15) Meshing connection, the motor (18) is drivingly connected with the auxiliary gear (15) through the transmission shaft (19) and the main gear (16).