WO2022095459A1 - 传送装置及半导体生产设备 - Google Patents

传送装置及半导体生产设备 Download PDF

Info

Publication number
WO2022095459A1
WO2022095459A1 PCT/CN2021/101295 CN2021101295W WO2022095459A1 WO 2022095459 A1 WO2022095459 A1 WO 2022095459A1 CN 2021101295 W CN2021101295 W CN 2021101295W WO 2022095459 A1 WO2022095459 A1 WO 2022095459A1
Authority
WO
WIPO (PCT)
Prior art keywords
controller
signal
transfer table
transfer
conveying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2021/101295
Other languages
English (en)
French (fr)
Inventor
梁学玉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Changxin Memory Technologies Inc
Original Assignee
Changxin Memory Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Changxin Memory Technologies Inc filed Critical Changxin Memory Technologies Inc
Priority to US17/439,596 priority Critical patent/US11923226B2/en
Publication of WO2022095459A1 publication Critical patent/WO2022095459A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3202—Mechanical details, e.g. rollers or belts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0061—Force sensors associated with industrial machines or actuators
    • G01L5/0076—Force sensors associated with manufacturing machines
    • G01L5/0085—Force sensors adapted for insertion between cooperating machine elements, e.g. for measuring the nip force between rollers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/22—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers
    • G01L5/226—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0604—Process monitoring, e.g. flow or thickness monitoring
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3204—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations using magnetic elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3208—Changing the direction of the conveying path
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3222—Loading to or unloading from a conveyor

Definitions

  • the present application relates to the technical field of semiconductor production equipment, and in particular, to a conveying device and semiconductor production equipment.
  • the semiconductor production equipment includes a machine and a conveying device that is slidably arranged on the machine.
  • the conveying device It includes a transfer table and a driving mechanism. The output end of the driving mechanism is connected with the transfer table to drive the transfer device to move along a predetermined track, so as to transfer the wafers to different chambers of the semiconductor production equipment for related processing.
  • oil filling ports are usually provided on the machine and conveyor. By adding lubricating oil or protective substances to the oil filling ports, regular maintenance and repair of semiconductor production equipment can be carried out.
  • the conveying device usually blocks the oil filling port, so that the operator cannot add lubricating oil into the oil filling port. Therefore, the operator needs to push or pull the conveying device to expose the oil filling port, which leads to the efficiency of oil filling. Low and poor security flaws.
  • embodiments of the present application provide a conveying device and a semiconductor production equipment for improving oil injection efficiency and safety.
  • a first aspect of the embodiments of the present application provides a conveying device, which is installed on a machine table of a semiconductor production equipment, the machine table is provided with a guide structure, and the guide structure is provided with lines arranged along the extending direction of the guide structure.
  • a plurality of oil filling ports the conveying device includes a conveying table and a driving mechanism, the conveying table is slidably mounted on the guiding structure to carry and convey the wafer, and the conveying table covers the plurality of oil filling ports.
  • the driving mechanism is connected with the transfer table, and is used for driving the transfer table to rise or fall relative to the machine table, so as to expose the oil filling port blocked by the transfer table.
  • the driving mechanism comprises a support and a driver connected with the support; the support is located below the conveying table and is connected with the conveying table; the drive passes through The support member drives the transfer table to rise or fall relative to the machine table.
  • the supporting member comprises a supporting plate
  • one end of the driver is connected to the upper surface of the supporting plate or the lower surface of the supporting plate
  • the other end of the driver is connected to the supporting plate. on the mentioned machine.
  • the driver comprises at least one driving cylinder
  • one end of the driving cylinder is fixedly connected to the support plate through a connecting rod
  • the other end of the driving cylinder is fixedly connected to the machine table.
  • the transmission device further comprises a signal transmitter arranged on the transmission platform, a signal receiver arranged on the upper surface of the support plate facing the transmission platform, and a signal receiver arranged on the upper surface of the support plate facing the transmission platform, a controller electrically connected between the signal transmitter and the signal receiver, the controller is used for controlling the signal transmitter to transmit a first signal to the signal receiver, and according to the second signal output by the signal receiver, The speed at which the driver drives the conveying platform to rise or fall is controlled, wherein the second signal is converted and generated by the signal receiver using the first signal.
  • the signal transmitter is a light emitting diode
  • the signal receiver is a photoelectric sensor
  • the photoelectric sensor includes a signal processor
  • the signal processor is used for processing the first signal , to convert the first signal into the second signal.
  • the above-mentioned conveying device wherein, at least one pressure sensor is provided on the upper surface of the support plate facing the conveying table, and the pressure sensor is used to detect the pressure on the support plate; the controller and the The pressure sensor is connected to control the speed at which the driver drives the conveying platform to rise or fall according to the pressure value of the pressure sensor.
  • the conveying device as described above, wherein the conveying device further comprises a motor connected with the conveying table and a switch connected with the motor, the switch being connected with the controller, and the controller is used for according to the The second signal and/or the pressure of the pressure sensor controls the switch to open or close.
  • the controller includes a first controller, a radio frequency chip and a second controller, the first controller and the second controller are connected through the radio frequency chip;
  • the first controller A controller is respectively connected with the signal receiver, the pressure sensor and the driver, and is used for controlling the driver to drive the conveying platform to rise or fall according to the second signal and the pressure of the pressure sensor. speed;
  • the second controller is connected to the switch and used to control the opening or closing of the switch according to the output signal of the first controller.
  • the radio frequency chip includes a first radio frequency chip and a second radio frequency chip that are communicatively connected, the first radio frequency chip is connected to the first controller, and the second radio frequency chip is connected to the connected to the second controller.
  • the first controller controls the speed at which the driver drives the conveying platform to rise or fall through a solenoid valve.
  • a second aspect of the embodiments of the present application provides a semiconductor production equipment, which includes a machine table and the above-mentioned conveying device;
  • the machine table includes a frame and a guide structure disposed on the frame, the guide structure is provided on There are a plurality of oil filling ports arranged along the extending direction of the guide structure;
  • the transfer table of the conveying device is slidably installed on the guide mechanism, and the transfer table covers at least one of the plurality of oil filling ports;
  • the transfer table One end of the driving mechanism of the device is arranged on the frame, and the other end is connected with the conveying platform, and is used to drive the conveying platform to rise or fall relative to the machine platform, so as to expose the surface covered by the conveying platform. the oil filling port.
  • control button is provided on the rack, and the control button is connected to a controller of the conveying device, and is used to provide an action command to the controller.
  • control buttons include an up button, a down button and a reset button connected to the controller.
  • the upward movement button is used to send an upward movement instruction to the controller, and the controller controls the driving mechanism to drive the conveying platform to rise relative to the machine platform according to the upward movement command.
  • the downward movement button is used to send a downward movement instruction to the controller, and the controller controls the driving mechanism to drive the conveying platform to descend relative to the machine platform according to the downward movement command.
  • the reset button is used to send a reset instruction to the controller, and the controller closes the switch of the conveying device according to the reset instruction.
  • a driving mechanism is provided on the machine table, the output end of the driving mechanism is connected to the conveying table, and the conveying table is driven by the driving mechanism to rise or fall relative to the machine table, so as to expose the The oil filling port is blocked by the transfer table, so that the operator does not have to manually push or pull the transfer device, which can improve the oil filling efficiency and safety.
  • the transmission device and the semiconductor production equipment provided by the embodiments of the present application can Other technical problems to be solved, other technical features included in the technical solution, and the beneficial effects brought about by these technical features will be described in further detail in the specific embodiments.
  • FIG. 1 is a partial structural schematic diagram of a semiconductor production equipment provided by an embodiment of the present application
  • FIG. 2 is a schematic structural diagram of a drive mechanism and a transfer table provided in an embodiment of the present application
  • Figure 3 is a side view of Figure 2;
  • FIG. 4 is a schematic structural diagram of a driving cylinder provided by an embodiment of the present application.
  • FIG. 5 is a circuit diagram 1 of a transmission device provided by an embodiment of the present application.
  • FIG. 6 is a second circuit diagram of a transmission device provided by an embodiment of the present application.
  • FIG. 7 is a schematic structural diagram of a support member and a pressure sensor provided by an embodiment of the present application.
  • FIG. 8 is a schematic structural diagram of a motor and a switch provided by an embodiment of the present application.
  • FIG. 9 is a third circuit diagram of a transmission device provided by an embodiment of the present application.
  • Fig. 10 is the working state 1 of the driver and the solenoid valve provided by the embodiment of the application;
  • FIG. 11 is the second working state of the driver and the solenoid valve provided by the embodiment of the application.
  • FIG. 12 is a circuit diagram of a controller and a control button provided by an embodiment of the present application.
  • the conveying device of the semiconductor production equipment usually blocks part of the oil filling port located on the machine table.
  • the power is turned off, and then one operator pushes or pulls the conveying device, and always applies force to the conveying device to expose the oil filling port blocked by the conveying device, and another operator injects lubricating oil into the oil filling port to complete the semiconductor
  • the oil filling process of the equipment but the above-mentioned operation process must be completed by two operators, which has the defect of low oil filling efficiency.
  • the weight of the conveying device is large, which is easy to damage the operator, which leads to high labor intensity and poor safety. Defects.
  • the embodiments of the present application provide a conveying device and semiconductor production equipment, wherein a driving mechanism is provided on the machine table, the output end of the driving mechanism is connected to the conveying table, and the conveying table is driven by the driving mechanism to lift relative to the machine table. It can be lifted or lowered to expose the oil filling port blocked by the transfer table, so that the operator does not have to manually push or pull the transfer device, which can improve the oil filling efficiency and safety.
  • the semiconductor production equipment includes a machine 10 and a conveying device installed on the machine 10.
  • the machine 10 is used to provide a carrier for the conveying device or other components, wherein the machine
  • the stage 10 may include a frame and a guide structure 20 arranged on the frame.
  • the guide structure 20 is provided with a plurality of oil filling ports (not shown in the figure) arranged along the extending direction of the guiding structure 20, and the guide structure 20 can be guided through the oil filling ports. Lubricating oil is injected into the structure 20 to ensure the normal operation of the guide structure 20 .
  • the guide structure 20 can be a slide rail on the machine table 10 and a slider slidably arranged on the slide rail, so that the transfer table 30 of the conveying device can be installed on the slider, when a force is applied to the transfer table 30, the transfer table The 30 can move along the slide rails to transfer the wafers on the transfer table 30 to a designated position.
  • the plurality of oil filling ports may be evenly arranged along the extending direction of the guide structure 20, or may be unevenly arranged.
  • the transfer device includes a transfer table 30 and a drive mechanism 40 connected with the transfer table, wherein the transfer table 30 is slidably installed on the guide structure 20, in other words, the transfer table 30 can be installed on the slide On the block, the slider slides on the slide rail.
  • the transfer table 30 is used to carry and transfer the wafers to transfer the wafers to a designated position for related processing. Since the guide structure 20 is provided with an oil filling port, the transfer table 30 will block at least one of the plurality of oil filling ports. When the oil filling port needs to be filled with oil, the transfer table 30 needs to be moved to expose the oil filling port blocked by the transfer table 30 .
  • the transmission device provided in the embodiment of the present application is provided with a driving mechanism 40, one end of the driving mechanism 40 is arranged on the frame, for example, one end of the driving mechanism 40 can be welded on the frame, and the other end of the driving mechanism 40 is connected to the transmission
  • the table 30 is connected to provide power for the transfer table 30 to drive the transfer table 30 to rise or fall relative to the machine table 10 to expose the oil filling port blocked by the transfer table 30, so that the operator does not need to push or pull the transfer device, thereby improving the efficiency and safety of oil injection.
  • the driving mechanism 40 may be a cylinder or a linear motor arranged on the frame, and the piston rod of the cylinder or the output shaft of the linear motor is connected to the transfer table 30, and the expansion and contraction of the piston rod or the output shaft is used to Drive the conveyor to rise or fall.
  • the driving mechanism 40 includes a support member 41 and a driver 42 connected with the support member 41 , wherein the support member 41 is located below the transfer table 30 and is connected with the transfer table 30 , used to carry the transfer table; the driver 42 drives the transfer table 30 to rise or fall relative to the machine table through the support 41 .
  • the driver 42 drives the support member 41 to move in the direction toward the transfer table 30, so that the upper surface of the support member 41 contacts the lower surface of the transfer table 30, which is the transfer table. 30 provides a support force, the driver 42 continues to move, and drives the support 41 to rise relative to the machine table 10 to expose the oil filling port blocked by the transfer table 30. At this time, the driver 42 stops moving, so that the transfer table 30 is kept at a certain position. position, the operator can fill the oil filling port with oil.
  • the driver 42 drives the support 41 to descend relative to the machine table 10.
  • the transfer table 30 relies on gravity to contact the support 41, and together with the support 41 It descends relative to the machine table 10 until the transfer table 30 falls back onto the guide structure 20 .
  • the driver 42 can be located above the support member 41, and the output end of the driver 42 is connected to the side of the support member 41 facing the transfer table 30.
  • the support member 41 is relatively opposite to the machine table. 10 moves from bottom to top; when the output end of the driver 42 is extended, the support 41 moves from top to bottom relative to the machine table 10 .
  • the driver 42 can also be located below the support member 41, and the output end of the driver 42 is connected on the side of the support member 41 away from the transfer table 30, that is, on the lower surface of the transfer table 30, when the output end of the driver 42 is elongated , the support member 41 moves from bottom to top relative to the machine table 10 ; when the output end of the driver 42 contracts, the support member 41 moves relative to the machine table 10 from top to bottom.
  • the support member 41 includes a support plate, one end of the driver 42 is connected to the upper surface of the support plate or the lower surface of the support plate, and the other end of the driver 42 is used to connect to the machine table 10 .
  • One end of the driver 42 can be fixedly connected to the support plate, for example, one end of the driver 42 can be welded to the support plate, and the other end of the driver 42 can also be fixedly connected to the machine table 10 by welding or bolting.
  • the shape of the support plate can match the shape of the transfer table 30, and the support plate can be a square plate, wherein the material of the square plate is stainless steel, and the support plate made of stainless steel has the advantages of high structural strength and corrosion resistance .
  • the area of the support plate can be larger than that of the transfer table 30 or smaller than that of the transfer table 30 .
  • two spaced baffles may be provided on the side of the support plate facing the conveying table, and the distance between the two baffles may be slightly larger than the length of the conveying table 30 Alternatively, the width of the transfer table 30 can be limited by the arrangement of the two baffles, so as to ensure the stability of the transfer table.
  • the driver 42 includes a driving cylinder, one end of the driving cylinder is connected to the support plate, and the other end of the driving cylinder can be fixedly connected to the machine table 10 by welding, and the driving cylinder and the machine table can be increased by welding. connection strength between.
  • the drive cylinder can be directly connected to the support plate, or connected to the support plate through the connecting rod 43.
  • the connecting rod 43 can be a solid rod body made of stainless steel, or can be a stainless steel pipe.
  • driving cylinders there are various options for the number of driving cylinders.
  • the driving cylinder may include a cylinder block 421 , a piston 422 and a piston rod 423 , wherein the piston 422 is arranged in the cylinder block 421 , and one end of the piston rod 423 is connected to the piston 422 , the other end of the piston rod 423 can move relative to the axis of the cylinder block 421 to extend out of the cylinder block 421 or retract into the cylinder block 421 .
  • the piston 422 divides the inner cavity of the cylinder block 421 into a first cavity 424 provided with the piston rod 423 and a second cavity 425 without the piston rod 423, wherein the first cavity 424 is provided with a first communication
  • the second cavity 425 is provided with a second communication hole.
  • the reciprocating linear motion of the piston rod 423 can be realized, thereby driving the support plate to rise or fall relative to the machine table 10 .
  • the transmission device includes a signal transmitter 44 , a signal receiver 45 and a controller 46 , wherein the signal transmitter 44 is arranged on the transmission platform 30 , and the signal receiver 45 is arranged on the On the upper surface of the support plate facing the transfer table 30 , the signal transmitter 44 can be disposed on the lower surface of the transfer table 30 facing the support plate so that the signal transmitted by the signal transmitter 44 can be quickly received by the signal receiver 45 .
  • the controller 46 is respectively electrically connected with the signal transmitter 44 and the signal receiver 45, and the controller 46 is used for controlling the signal transmitter 44 to transmit the first signal to the signal receiver 45, and according to the second signal output by the signal receiver 45, control the
  • the drive 42 drives the transfer table 30 to raise or lower the speed relative to the machine table 10, wherein the second signal is converted and generated by the signal receiver 45 using the first signal.
  • the signal transmitter 44 is a light-emitting diode
  • the light-emitting diode is disposed on the side of the transfer table 30 facing the support plate
  • the light-emitting diode is connected to the controller 46
  • the controller 46 acts as a power source for the light-emitting diode
  • the controller 46 is a power source for the light-emitting diode.
  • the light-emitting diode can emit light with a frequency of 2Hz, and control the above-mentioned light to flash alternately at a certain frequency.
  • the light whose frequency is 2 Hz is the first signal.
  • the signal receiver 45 is a photoelectric sensor, for example, a photoresistor, and the signal receiver 45 is used to receive the first signal and transmit the first signal to the signal processor 47, and the signal processor 47 can process the first signal and send the first signal to the signal processor 47.
  • the first signal is converted into a second signal, and the signal processor 47 transmits the second signal to the controller 46 , and the controller 46 controls the driving speed of the conveying platform 30 of the driver 42 to rise or fall relative to the machine platform 10 according to the second signal.
  • the signal processor 47 may be arranged in the signal receiver 45, and the signal processor 47 may include a signal shaping circuit and a signal conditioning circuit.
  • the circuit of the signal receiver 45 is shown in FIG. After the sensor is received, the resistance of the signal receiver becomes smaller, which in turn causes the change of the input value Ui. After the change of the input value Ui is processed by the signal shaping circuit and the signal conditioning circuit, the second signal is formed. The signal processor 47 converts the second signal into the second signal.
  • the distance a is approximately equal to 0, it means that the support plate is in contact with the transfer table 30 .
  • the transfer device may further include a pressure sensor 48 connected to the controller 46, wherein the pressure sensor 48 may be disposed on the upper surface of the support plate facing the transfer table 30, when the support plate is in contact with the transfer table 30, The weight of the support plate begins to increase, the pressure sensor 48 can detect the pressure on the support plate, and transmit the pressure value to the controller 46, and the controller 46 can control the driver to drive the transfer table 30 relative to the machine according to the pressure value of the pressure sensor 48. The speed at which the table 10 is raised or lowered.
  • the controller 46 includes a preset threshold value, for example, the threshold value is 100N, the controller 46 can receive the pressure value of the pressure sensor 48 and compare the pressure value with the threshold value. If the pressure value is greater than 100N, it means The support plate has fully supported the transfer table 30. If the pressure value is less than 100N, it means that the support plate has not fully supported the transfer table 30.
  • the number of pressure sensors 48 may be one or two. As shown in FIG. 7 , when there are two pressure sensors 48 , the two pressure sensors 48 may be symmetrically arranged with respect to the central axis of the support plate, so that the The pressure values detected by the two pressure sensors 48 are summed, and the sum of the pressure values of the two pressure sensors 48 is the pressure on the support plate.
  • the pressure sensor 48 in this embodiment can be a MIK-P300 type sensor, and the pressure sensor 48 has a high-precision, high-stability pressure-sensitive chip.
  • the pressure-sensitive chip adopts an advanced micro-machine etching process, and forms a Wheatstone bridge by distributing four high-precision resistors with temperature compensation on the silicon wafer. Due to the piezoresistive effect, the resistance of the four bridge arm resistors changes, the bridge is unbalanced, and the sensitive element outputs an electrical signal corresponding to the pressure change.
  • the output electrical signal is amplified by the 24-bit AD digital chip and compensated for nonlinear correction. Generates voltage and current signals that have a linear corresponding relationship with the input pressure.
  • the above voltage and current signals are amplified, stabilized and filtered by the signal conditioning circuit, and the A/D conversion is completed to become a digital signal that the controller can recognize.
  • the signal is converted into a pressure value after calculation by the controller.
  • the conveying device further includes a motor 31 connected to the conveying table 30 and a switch 32 connected to the motor 31 .
  • the motor 31 uses In order to drive the transfer table 30 to slide along the guide structure 20 , the switch 32 is used to control the working state of the motor 31 .
  • the switch 32 can be turned on or off manually by the operator. For example, after the operator visually observes that the support plate is in contact with the transfer table 30, the operator can manually turn off the switch 32, so that the motor 31 is powered off, Only rely on the support plate for support.
  • the switch 32 is connected to the controller 46 , and the controller 46 is used to control the opening or closing of the switch 32 according to the second signal and/or the pressure of the pressure sensor 48 .
  • the controller 46 receives that the distance a between the transfer table 30 and the support plate is zero, and at the same time, the pressure value of the pressure sensor 48 is greater than 100N, the controller 46 will control the switch to close, and then the motor 31 is powered off, so that the transfer The stage 30 loses its driving force and is supported by the support plate.
  • the switch 32 includes a housing, a first contact 321 , a second contact 322 , a connecting plate 323 , a return spring 324 , and a magnet 325 connected to the return spring 324 arranged in the housing.
  • One end is rotatably connected to the first contact 321
  • the return spring 324 is arranged on the lower surface of the connecting plate 323, and the force of the return spring 324 drives the connecting plate 323 to move toward or away from the second contact 322, wherein the switch 32
  • the first contact 321 of the switch 32 is connected to one end of the motor 31 through a wire
  • the second contact 322 of the switch 32 is connected to the other end of the motor 31 through a wire.
  • the electromagnet 325 is connected to the controller 46 , the controller 46 is used to energize the electromagnet 325 , the electromagnet 325 generates suction, the electromagnet 325 attracts the return spring 324 , and the return spring 324 drives the connecting plate 323 toward the second contact 322 Moving, when the connecting plate 323 is in contact with the second contact 322, the switch 32 short-circuits the motor 31, and at this time the motor 31 is powered off.
  • the controller 46 does not energize the electromagnet 325, the electromagnet 325 does not generate suction, and drives the connecting plate 323 to move in the direction away from the second contact 322 under the action of the elastic restoring force of the return spring 324. , at this time, the motor 31 is powered on, so that the transfer table 30 stays on the guide structure 20 .
  • the controller 46 may be one, and the controller 46 is electrically connected to the signal transmitter 44 , the signal receiver 45 , the pressure sensor 48 , the driver 42 and the switch 32 at the same time, which will cause the control circuit of the controller 46 It is cumbersome.
  • the above-mentioned functions can be performed by using two controllers.
  • the controller 46 may include a first controller 461 , a second controller 462 and a radio frequency chip 463 , and the first controller 461 and the second controller 462 are connected through the radio frequency chip 463 .
  • the first controller 461 is respectively connected with the signal receiver 44 , the pressure sensor 48 and the driver 42 , and is used to control the driver 42 to drive the transfer table 30 to rise or fall relative to the machine table 10 according to the second signal and the pressure of the pressure sensor 48
  • the second controller 462 is connected to the switch 32 for controlling the opening or closing of the switch 32 according to the output signal of the first controller 461 .
  • the first controller 461 can control the speed at which the driver 42 drives the transfer table 30 to rise or fall relative to the machine table 10 through the solenoid valve 49 .
  • the solenoid valve 49 may be a straight solenoid spool valve, and the solenoid valve 49 may include a valve body 491 , a valve core 492 and a valve stem 493 disposed in the valve body 491 , wherein the valve core 492 passes through the valve body 491 .
  • the first spring 494 is arranged in the valve body, one end of the valve stem 493 is connected to the valve core 492, the other end of the valve stem 493 extends to the outside of the valve body 491, and the part of the valve stem 492 outside the valve body 491 is sleeved with a Solenoid coil 495 and second spring 496.
  • the valve body 491 has an air inlet 4991, an exhaust port 4992, a first air outlet 4993 and a second air outlet 4994 communicating with the inner cavity of the valve body, wherein the first air outlet 4993 communicates with the second communication hole of the cylinder, and the second air outlet 4993 communicates with the second communication hole of the cylinder.
  • the air outlet 4994 communicates with the first communication hole of the cylinder.
  • the valve stem 493 moves to the left along the axis of the valve stem 493 under the action of the elastic restoring force of the first spring 494 and the second spring 496, so that The air inlet 4991, the second air outlet 4994 are in communication with the first communication hole, and the second communication hole, the first air outlet 4993 and the exhaust port 4992 are in communication, so that the pressure of the first inner cavity 424 is greater than the pressure of the second inner cavity 425 , the pressure difference drives the piston rod 423 to move in the direction toward the second inner cavity 425 , so that the piston rod 423 retracts into the cylinder block 421 , thereby pushing the support plate to rise or fall relative to the machine table 10 .
  • the electromagnetic coil 495 moves to a proper position under the action of the electric signal, and seals all the air inlet 4991 and the exhaust port 4992 of the electromagnetic valve 49, so that the cylinder is in a static state.
  • the control instructions can be prevented from being confused, and the action sensitivity and accuracy of the driver 42 and the switch 32 can be ensured.
  • the radio frequency chip 463 includes a first radio frequency chip and a second radio frequency chip that are communicatively connected, the first radio frequency chip is connected to the first controller 461 , and the second radio frequency chip is connected to the second controller 462 .
  • both the first radio frequency chip and the second radio frequency chip may use a CC2530 radio frequency chip.
  • the first radio frequency chip receives the first control signal of the first controller, and decodes the received first control signal to obtain the second control signal, and the second control signal passes through the second control signal.
  • the controller makes further judgment, analysis, and controls the corresponding motor 31 to make corresponding adjustments.
  • the first radio frequency chip and the second radio frequency chip are communicated through a communication module.
  • the communication module can be an antenna, and the antenna can convert the electromagnetic wave sent by the first radio frequency chip into a weak AC current signal after filtering and high-frequency amplification. Then, the modulation and demodulation is carried out and sent to the subsequent second radio frequency chip and the second controller for further processing.
  • a control button 50 is also provided on the rack, and the control button 50 is connected to the controller 46 of the conveying device for controlling Controller 46 provides action instructions.
  • the control button 50 includes an up-move button 51 , a down-move button 52 and a reset button 53 connected to the controller.
  • the upward movement button 51 is used to send the upward movement instruction to the controller 46, and the controller 46 controls the drive mechanism to drive the conveying platform to rise relative to the machine table according to the upward movement command;
  • the controller 46 controls the drive mechanism to drive the conveying platform 30 to descend relative to the machine according to the down-moving instruction;
  • the reset button 53 is used to send a reset instruction to the controller 46, and the controller closes the switch of the conveying device according to the reset instruction.
  • the above-mentioned control button 50 is implemented by a key circuit.
  • the first controller 461 has a first pin 4611 , a second pin 4612 and a third pin 4613 , one end of the up button 51 is connected to the power supply voltage of the first pin 4611 and the first controller 461 respectively, the other end of the up button 51 is grounded; one end of the down button 52 is respectively connected to the second pin 4612 and the first The power supply voltage of the controller 461 is connected, the other end of the down button 52 is grounded; one end of the reset button 53 is connected to the third pin 4613 and the power supply voltage of the first controller 461 respectively, and the other end of the reset button is grounded.
  • the first controller When the up button is pressed, the voltage on the first pin is 0, when the up button is disconnected, the voltage on the first pin is 5V, the first controller will change according to the voltage on the first pin, To judge whether the up button is pressed, when the first controller detects that the voltage on the first pin is 0, the first controller will execute the up instruction and transmit the up instruction to the driver, so that The driver drives the support to move upward to support the transfer table, and drives the transfer table to rise relative to the machine table.
  • the execution commands of the move-down button and the reset button are similar to those of the move-up button, which will not be repeated in this embodiment.
  • the operator manually presses the up-shift button, and after the first controller receives the up-shift command, it controls the movement of the driver, so that the driver drives the support plate relative to the The machine platform is raised.
  • the first controller controls the signal transmitter and the signal receiver to work at the same time, and calculates the distance between the support plate and the transfer platform according to the second signal.
  • the first controller receives the pressure detected by the pressure sensor, and compares the pressure value with a preset threshold value. If the pressure value is greater than 100N, it indicates that the support plate can fully support the transfer table.
  • the first controller transmits this signal to the second controller, and the second controller controls the switch connected to the motor to be turned off, and at this time, the motor for driving the movement of the conveying table is powered off.
  • the first controller controls the drive to continue to work, and drives the transfer table to rise relative to the frame until the oil filling port blocked by the transfer table is exposed, and the first controller controls the transfer table to stay at a certain position. Personnel can fill the oil filling port with oil.
  • the operator manually presses the down button, and the driver drives the support plate and the transfer table to descend relative to the frame until the transfer table falls back to the guide structure.
  • the operator manually presses the reset button, and the second controller controls the switch connected to the motor to turn on. At this time, the motor for driving the movement of the conveying table is energized, and the conveying table stays on the guide structure.
  • the driver drives the support plate to continue to move down.
  • the first controller judges whether the support plate falls back to the original position according to the distance between the support plate and the transfer table.
  • the controller controls the drive to stop motion to complete the entire motion process.
  • each embodiment or implementation is described in a progressive manner, and each embodiment focuses on the differences from other embodiments, and the same and similar parts between the various embodiments can be referred to each other.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Automatic Assembly (AREA)

Abstract

本申请提供了一种传送装置及半导体生产设备，涉及半导体生产设备技术领域，该传送装置安装在半导体生产设备的机台上，机台上设置有导向结构，导向结构上设置有沿导向结构延伸方向排布的多个注油口，传送装置包括传送台以及驱动机构，传送台滑动安装导向结构上，以承载并传送晶圆，且传送台遮挡多个注油口中的至少一个，驱动机构与传送台连接。本申请通过驱动机构的设置，利用驱动机构驱动传送台相对于机台升起或者降落，以暴露出被传送台遮挡的注油口，这样操作人员就不必手动推动或者拉动传送装置，进而可以提高注油效率和安全性。

Description

传送装置及半导体生产设备
本申请要求于2020年11月03日提交中国专利局、申请号为202011212708.5、申请名称为“传送装置及半导体生产设备”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本申请涉及半导体生产设备技术领域，尤其涉及一种传送装置及半导体生产设备。
背景技术
在半导体制备过程中，需要利用半导体生产设备对晶圆进行涂胶、显影以及刻蚀的工艺，通常情况下，半导体生产设备包括机台以及滑设在机台上的传送装置，其中，传送装置包括传送台以及驱动机构，驱动机构的输出端与传送台连接，以带动传送装置沿预定的轨迹进行移动，以将晶圆传送至半导体生产设备的不同腔室内，进行相关的处理工艺。
为了保证半导体生产设备的正常工作，机台和传送装置上通常会设置有注油口，通过向注油口内加入润滑油或者防护物质，以对半导体生产设备进行定期的保养维护和维修。
然而，在上述保养维护和维修过程，传送装置通常会遮挡住注油口，致使操作人员无法向注油口内加入润滑油，因此，需要操作人员推动或者拉动传送装置，以暴露出注油口，导致注油效率低和安全性差的缺陷。
发明内容
鉴于上述问题，本申请实施例提供一种传送装置及半导体生产设备，用于提高注油效率和安全性。
为了实现上述目的，本申请实施例提供如下技术方案：
本申请实施例的第一方面提供一种传送装置，安装在半导体生产设备的机台上，所述机台上设置有导向结构，所述导向结构上设置有沿所述导 向结构延伸方向排布的多个注油口；所述传送装置包括传送台以及驱动机构，所述传送台滑动安装在所述导向结构上，以承载并传送晶圆，且所述传送台遮挡多个所述注油口中的至少一个；所述驱动机构与所述传送台连接，用于驱动所述传送台相对所述机台升起或者降落，以暴露出被所述传送台遮挡的所述注油口。
如上所述的传送装置，其中，所述驱动机构包括支撑件以及与所述支撑件连接的驱动器；所述支撑件位于所述传送台的下方，并与所述传送台连接；所述驱动器通过所述支撑件驱动所述传送台相对所述机台升起或者降落。
如上所述的传送装置，其中，所述支撑件包括支撑板，所述驱动器的一端连接在所述支撑板的上表面或者所述支撑板的下表面上，所述驱动器的另一端连接在所述机台上。
如上所述的传送装置，其中，所述驱动器包括至少一个驱动气缸，所述驱动气缸的一端通过连接杆与所述支撑板固定连接，所述驱动气缸的另一端与所述机台固定连接。
如上所述的传送装置，其中，所述传送装置还包括设置在所述传送台上的信号发射器、设置在所述支撑板朝向所述传送台的上表面的信号接收器以及分别与所述信号发射器和所述信号接收器电连接的控制器，所述控制器用于控制所述信号发射器向所述信号接收器发射第一信号，以及根据所述信号接收器输出的第二信号，控制所述驱动器驱动所述传送台升起或者降落的速度，其中，所述第二信号由所述信号接收器利用所述第一信号转化生成。
如上所述的传送装置，其中，所述信号发射器为发光二极管，所述信号接收器为光电传感器；所述光电传感器包括信号处理器，所述信号处理器用于对所述第一信号进行处理，以将所述第一信号转化为所述第二信号。
如上所述的传送装置，其中，所述支撑板朝向所述传送台的上表面上设有至少一个压力传感器，所述压力传感器用于检测所述支撑板所承受的压力；所述控制器与所述压力传感器连接，用于根据所述压力传感器的压力值，控制所述驱动器驱动所述传送台升起或者降落的速度。
如上所述的传送装置，其中，所述传送装置还包括与所述传送台连接 的电机以及与所述电机连接的开关，所述开关与所述控制器连接，所述控制器用于根据所述第二信号和/或所述压力传感器的压力，来控制所述开关打开或者关闭。
如上所述的传送装置，其中，所述控制器包括第一控制器、射频芯片以及第二控制器，所述第一控制器与所述第二控制器通过所述射频芯片连接；所述第一控制器分别与所述信号接收器、所述压力传感器以及所述驱动器连接，用于根据所述第二信号和所述压力传感器的压力控制所述驱动器驱动所述传送台升起或者降落的速度；所述第二控制器与所述开关连接，用于根据所述第一控制器的输出信号来控制所述开关的打开或者关闭。
如上所述的传送装置，其中，所述射频芯片包括通信连接的第一射频芯片和第二射频芯片，所述第一射频芯片与所述第一控制器连接，所述第二射频芯片与所述第二控制器连接。
如上所述的传送装置，其中，所述第一控制器通过电磁阀控制所述驱动器驱动所述传送台升起或者降落的速度。
本申请实施例的第二方面提供一种半导体生产设备，其包括机台以及如上所述的传送装置；所述机台包括机架以及设置在机架上的导向结构，所述导向结构上设置有沿所述导向结构延伸方向排布的多个注油口；所述传送装置的传送台滑动安装在所述导向机构上，所述传送台遮挡多个所述注油口中的至少一个；所述传送装置的驱动机构的一端设置在所述机架上，另一端与所述传送台连接，用于驱所述传送台相对所述机台升起或者降落，以暴露出被所述传送台遮挡的所述注油口。
如上所述的半导体生产设备，其中，所述驱动机构的驱动器焊接在所述机架上。
如上所述的半导体生产设备，其中，所述机架上设有控制按钮，所述控制按钮与所述传送装置的控制器连接，用于给所述控制器提供动作指令。
如上所述的半导体生产设备，其中，所述控制按钮包括与所述控制器连接的上移按钮、下移按钮以及复位按钮。
所述上移按钮用于向所述控制器发送上移的指令，所述控制器根据上移的指令控制所述驱动机构带动所述传送台相对于所述机台升起。
所述下移按钮用于向所述控制器发送下移的指令，所述控制器根据下 移的指令控制所述驱动机构带动所述传送台相对于所述机台降落。
所述复位按钮用于向所述控制器发送复位的指令，所述控制器根据复位的指令所述传送装置的开关闭合。
本申请实施例所提供的传送装置及半导体生产设备中，在机台上设置驱动机构，驱动机构的输出端与传送台连接，通过驱动机构带动传送台相对机台升起或者降落，以暴露出被传送台遮挡的注油口，这样操作人员就不必手动推动或者拉动传送装置，进而可以提高注油效率和安全性。
除了上面所描述的本申请实施例解决的技术问题、构成技术方案的技术特征以及由这些技术方案的技术特征所带来的有益效果外，本申请实施例提供的传送装置及半导体生产设备所能解决的其他技术问题、技术方案中包含的其他技术特征以及这些技术特征带来的有益效果，将在具体实施方式中作出进一步详细的说明。
附图说明
为了更清楚地说明本申请实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作以简单地介绍，显而易见地，下面描述中的附图是本申请的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1为本申请实施例提供的半导体生产设备的部分结构示意图；
图2为本申请实施例提供的驱动机构和传送台的结构示意图；
图3为图2侧视图；
图4为本申请实施例提供的驱动气缸的结构示意图；
图5为本申请实施例提供的传送装置的电路图一；
图6为本申请实施例提供的传送装置的电路图二；
图7为本申请实施例提供的支撑件和压力传感器的结构示意图；
图8为本申请实施例提供的电机和开关的结构示意图；
图9为本申请实施例提供的传送装置的电路图三；
图10为本申请实施例提供的驱动器和电磁阀的工作状态一；
图11为本申请实施例提供的驱动器和电磁阀的工作状态二；
图12为本申请实施例提供的控制器和控制按钮的电路图。
附图标记说明：
10-机台；20-导向结构；30-传送台；40-驱动机构；50-控制按钮；
31-电机；32-开关；41-支撑件；42-驱动器；43-连接杆；44-信号发射器；45-信号接收器；46-控制器；47-信号处理器；48-压力传感器；49-电磁阀；51-上移按钮；52-下移按钮；53-复位按钮；
321-第一触点；322-第二触点；323-连接板；324-复位弹簧；325-磁铁；421-气缸缸体；422-活塞；423-活塞杆；424-第一腔体；425-第二腔体；461-第一控制器；462-第二控制器；463-射频芯片；491-阀体；492-阀芯；493-阀杆；494-第一弹簧；495-电磁圈；496-第二弹簧；
4991-进气口；4992-排气口；4993-第一出气口；4994-第二出气口。
具体实施方式
本申请的发明人在实际工作过程中发现，半导体生产设备的传送装置通常会遮挡住位于机台上的部分注油口，当对半导体生产设备的注油口进行注油时，需要先对半导体生产设备进行断电，然后一个操作人员推动或者拉动传送装置，并一直给传送装置施加作用力，以使暴露出被传送装置遮挡住的注油口，另一个操作人员向注油口内注入润滑油，以完成对半导体设备进行注油的工序，但是上述的操作过程必须需要两个操作人员才能完成，具有注油效率低的缺陷，另外，传送装置的重量较大，容易砸伤操作人员，进而存在劳动强度高和安全性差的缺陷。
针对上述的技术问题，本申请实施例提供了一种传送装置及半导体生产设备，在机台上设置驱动机构，驱动机构的输出端与传送台连接，通过驱动机构驱动传送台相对于机台升起或者降落，以暴露出被传送台遮挡的注油口，这样操作人员就不必手动推动或者拉动传送装置，进而可以提高注油效率和安全性。
为了使本申请实施例的上述目的、特征和优点能够更加明显易懂，下面将结合本申请实施例中的附图，对本申请实施例中的技术方案进行清楚、完整地描述。显然，所描述的实施例仅仅是本申请的一部分实施例，而不是全部的实施例。基于本申请中的实施例，本领域普通技术人员在没有作出创造性劳动的前提下所获得的所有其它实施例，均属于本申请保护的范围。
如图1所示，本申请实施例提供的半导体生产设备，包括机台10以及安装在机台10上的传送装置，机台10用于为传送装置或者其他部件提供承载的载体，其中，机台10可以包括机架以及设置在机架上的导向结构20，导向结构20上设置有沿导向结构20延伸方向排布的多个注油口(图中未示出)，可以通过注油口向导向结构20内注入润滑油，以保证导向结构20的正常工作。
导向结构20可以为设置机台10上滑轨以及滑设在滑轨上的滑块，这样可以将传送装置的传送台30安装在滑块上，当给传送台30施加作用力时，传送台30可以沿着滑轨进行移动，以将位于传送台30上的晶圆传送至指定的位置。
需要说明的是，在本实施例中，多个注油口可以沿着导向结构20的延伸方向均匀排布，也可以是不均匀排布。
如图1和图2所示，传送装置包括传送台30以及与传送台连接的驱动机构40，其中，传送台30滑动安装在导向结构20上，换而言之，传送台30可以安装在滑块上，滑块滑设在滑轨上。
传送台30用于承载并传送晶圆，以将晶圆传送至指定的位置进行相关的处理，由于导向结构20上设有注油口，传送台30会遮挡住多个注油口中的至少一个，当需要对注油口进行注油时，就需要将传送台30移动以暴露出被传送台30遮挡的注油口。
因此，本申请实施例提供的传送装置中设置了驱动机构40，驱动机构40的一端设置在机架上，例如，驱动机构40的一端可以焊接在机架上，驱动机构40的另一端与传送台30连接，用于为传送台30提供动力，以驱动传送台30相对于机台10升起或者降落，以暴露出被传送台30遮挡的注油口，这样就不需要操作人员推动或者拉动传送装置，进而提高了注油效率和安全性。
在本实施例中，驱动机构40可以是设置在机架上的气缸或者是直线电机，气缸的活塞杆或者是直线电机的输出轴与传送台30连接，通过活塞杆或者输出轴的伸缩，来带动传送台升起或者降落。
在一些实施例中，如图2和图3所示，驱动机构40包括支撑件41以及与支撑件41连接的驱动器42，其中，支撑件41位于传送台30的下方，并与传送台30连接，用于承载传送台；驱动器42通过支撑件41驱动传送台 30相对机台升起或者降落。
在本实施例中，当需要对注油口进行注油时，驱动器42带动支撑件41沿朝向传送台30的方向移动，以使支撑件41的上表面与传送台30的下表面接触，为传送台30提供支撑力，驱动器42继续运动，带动支撑件41相对于机台10升起，以暴露出被传送台30遮挡的注油口，此时，驱动器42暂停运动，使得传送台30保持在一定的位置上，操作人员可以向注油口内注油。
待注油完毕后，驱动器42带动支撑件41相对于机台10降落，在此过程中，鉴于传送台30的重量较大，传送台30依靠重力与支撑件41接触，并随着支撑件41一起相对于机台10降落，直至传送台30回落至导向结构20上。
需要说明的是，驱动器42可以位于支撑件41的上方，且驱动器42的输出端连接在支撑件41朝向传送台30的侧面上，当驱动器42的输出端收缩时，支撑件41相对于机台10从下往上运动；当驱动器42的输出端伸长时，支撑件41相对于机台10从上往下运动。
此外，驱动器42也可以位于支撑件41的下方，且驱动器42的输出端连接在支撑件41背离传送台30的侧面上，即传送台30的下表面上，当驱动器42的输出端伸长时，支撑件41相对于机台10从下往上运动；当驱动器42的输出端收缩时，支撑件41相对于机台10从上往下运动。
在一些实施例中，支撑件41包括支撑板，驱动器42的一端连接在支撑板的上表面上或者支撑板的下表面上，驱动器42的另一端用于连接在机台10上。其中，驱动器42的一端可以固定连接在支撑板上，例如，驱动器42的一端可以焊接在支撑板上，驱动器42的另一端也可以通过焊接或者螺栓连接的方式固定连接在机台10上。
在本实施例中，支撑板的形状可以与传送台30的形状相匹配，支撑板可以为方形板材，其中，方形板材的材质为不锈钢，利用不锈钢制备的支撑板具有结构强度大和耐腐蚀的优势。
另外，支撑板的面积可以大于传送台30的面积，也可以小于传送台30的面积，优选地，支撑板的面积可以大于传送台30的面积，这样可以提高支撑板的支撑能力。
为了保证传送台30在升起或者降落过程中平稳性，可以在支撑板朝向传送台的侧面上设置两个间隔设置的挡板，两个挡板之间的间距可以略大于传 送台30的长度或者宽度，利用两个挡板的设置可以对传送台30进行限位，保证传送台的稳固性。
在一些实施例中，驱动器42包括驱动气缸，驱动气缸的一端与支撑板连接，驱动气缸的另一端可以通过焊接的方式固定连接在机台10上，通过焊接的方式可以增加驱动气缸与机台之间的连接强度。
驱动气缸可以直接与支撑板连接，也可以通过连接杆43与支撑板连接，鉴于驱动气缸的活塞杆的尺寸一定，在将驱动气缸安装在机架上时，位于传送台上方或者下方的其他部件可能会与驱动气缸发生干涉，因此，在本实施例中，通过连接杆43的设计，可以将驱动气缸设置在机架上距离支撑板比较远的位置上，提高了驱动气缸的安装便利性。其中，连接杆43可以为采用不锈钢制备的实心杆体，也可以是不锈钢钢管。
驱动气缸的个数可以有多种选择，例如，驱动气缸可以为一个，驱动气缸的活塞杆可以连接在支撑板的几何中心上，即支撑板的两条对角线的交点。又例如，驱动气缸也可以为两个，如图2所示，两个驱动气缸相对于支撑板中轴线对称设置，这样可以保证支撑板的运行平稳性。
在本实施例中，如图4所示，驱动气缸可以包括气缸缸体421、活塞422以及活塞杆423，其中，活塞422设置在气缸缸体421内，活塞杆423的一端连接在活塞422上，活塞杆423的另一端可以相对于气缸缸体421的轴线移动，以伸出气缸缸体421外或者回缩至气缸缸体421内。
活塞422将气缸缸体421的内腔分割为设置有活塞杆423的第一腔体424，以及未设置活塞杆423的第二腔体425，其中，第一腔体424上设有第一连通孔，第二腔体425上设有第二连通孔，当通过第二连通孔向第二腔体425通入压缩空气时，第一腔体424内的气体通过第一连通孔排出，使得第一腔体424和第二腔体425之间形成压力差，在此压力作用下，活塞杆423向背离第二腔体425的方向移动，以使活塞杆423伸出第一腔体424。
当通过第一连通孔向第一腔体424内通入压缩空气时，第二腔体425内的气体通过第二连通孔排出，使得第一腔体424和第二腔体425之间形成压力差，在此压力作用下，活塞杆423向朝向第二腔体425的方向移动，以使活塞杆423缩回第一腔体424。
当第一腔体424和第二腔体425交替进气和排气，可以实现活塞杆423的往复直线运动，进而带动支撑板相对于机台10升起或降落。
在一些实施例中，如图2和图5所示，传送装置包括信号发射器44、信号接收器45以及控制器46，其中，信号发射器44设置传送台30上，信号接收器45设置在支撑板朝向传送台30的上表面上，为了使信号发射器44发射的信号能够快速地被信号接收器45接收，可以将信号发射器44设置在传送台30朝向支撑板的下表面上。
控制器46分别与信号发射器44和信号接收器45电连接，控制器46用于控制信号发射器44向信号接收器45发射第一信号，以及根据信号接收器45输出的第二信号，控制驱动器42的驱动传送台30相对于机台10升起或者降落速度，其中，第二信号由信号接收器45利用第一信号转化生成。
在一些实施例中，信号发射器44为发光二极管，发光二极管设置在传送台30朝向支撑板的侧面上，且发光二极管与控制器46连接，控制器46作为发光二极管的电源，在控制器46的控制下，发光二极管能够发射频率为2Hz的光，并且控制上述的光以一定的频率交替闪烁。其中此频率为2Hz的光即为第一信号。
信号接收器45为光电传感器，例如，光敏电阻，信号接收器45用于接收第一信号，并将第一信号传输至信号处理器47，信号处理器47能够对第一信号进行处理，并将第一信号转化为第二信号，信号处理器47将第二信号传输至控制器46，控制器46根据第二信号来控制驱动器42的驱动传送台30相对于机台10升起或者降落速度。
其中，信号处理器47可以设置在信号接收器45内，且信号处理器47可以包括信号整形电路和信号调理电路，其信号接收器45的电路如图6所示，发光二极管发射的光线被光电传感器接收之后，信号接收器的电阻变小，进而引起输入值Ui的变化，输入值Ui的变化经过信号整形电路和信号调理电路处理之后，形成的第二信号，信号处理器47并将第二信号传递至控制器46，控制器46会计算出发光二极管发射光线的时间与光电传感器接收光线的时间之间差值，并根据S＝vt计算出传送台30与支撑板之间的距离a，并根据此距离a来控制驱动器驱动传送台30相对于机台 10升起或者降落的速度，进而达到控制支撑板的速度。在此过程中，若距离a约等于0，说明支撑板与传送台30接触。
在一些实施例中，传送装置还可以包括与控制器46连接的压力传感器48，其中，压力传感器48可以设置在支撑板朝向传送台30的上表面上，当支撑板与传送台30接触时，支撑板上重量开始增大，压力传感器48可以检测支撑板所承受的压力，并将压力值传递至控制器46，控制器46能够根据压力传感器48的压力值控制驱动器驱动传送台30相对于机台10升起或者降落的速度。
在此过程中，控制器46中包含预先设置的阈值，例如阈值为100N，控制器46能够接收到压力传感器48的压力值，并将此压力值与阈值比对，若压力值大于100N，说明支撑板已经完全托住传送台30，若压力值小于100N，说明支撑板未完全托住传送台30。
压力传感器48的个数可以为一个，也可以为两个，如图7所示，当压力传感器48为两个时，两个压力传感器48可以相对于支撑板的中轴线对称设置，这样可以将两个压力传感器48检测压力值进行求和处理，两个压力传感器48的压力值之和即为支撑板上所承受的压力。
本实施例中的压力传感器48可以选用MIK-P300型传感器，该压力传感器48具有高精度、高稳定性压力敏感芯片。压力敏感芯片采用先进的微机械刻蚀加工工艺，通过在硅片上分布四个具有温度补偿作用的高精度电阻，从而形成惠斯登电桥。由于压阻效应，四个桥臂电阻的阻值发生变化，电桥失衡，敏感元件输出一个对应压力变化的电信号，输出的电信号通过24位AD数字芯片的放大和非线性矫正的补偿，产生与输入压力成线性对应关系的电压、电流信号，上述的电压、电流信号经过信号调理电路放大、稳压、滤波，并完成A/D转换，变成控制器可以识别的数字信号，该数字信号经控制器计算后转换为压力值。
在一些实施例中，如图8所示，传送装置还包括与传送台30连接的电机31以及与电机31连接的开关32，当不需要对机台10上注油口进行注油时，电机31用于带动传送台30沿着导向结构20进行滑动，开关32用于控制电机31的工作状态。
在实际的应用中，开关32的打开或者关闭，可以由操作人员手动操 作，比如，当操作人员目测支撑板与传送台30接触后，可以由操作人员手动关闭开关32，使得电机31断电，仅依靠支撑板进行支撑。
同时，也可以由控制器46进行控制，例如，开关32与控制器46连接，控制器46用于根据第二信号和/或压力传感器48的压力，来控制开关32的打开或者关闭。
也就是说，控制器46接收到传送台30与支撑板之间的距离a为零，同时，压力传感器48的压力值大于100N，控制器46会控制开关闭合，进而电机31断电，使得传送台30失去驱动力，依靠支撑板进行支撑。
在本实施例中，开关32包括壳体以及设置在壳体内的第一触点321、第二触点322、连接板323、复位弹簧324和与复位弹簧324连接的磁铁325，连接板323的一端与第一触点321转动连接，复位弹簧324设置在连接板323的下表面上，通过复位弹簧324的作用力带动连接板323朝向或者远离第二触点322的方向移动，其中，开关32的第一触点321通过导线与电机31的一端连接，开关32的第二触点322通过导线与电机31的另一端连接。
电磁铁325与控制器46连接，控制器46用于给电磁铁325通电时，电磁铁325产生吸力，电磁铁325吸合复位弹簧324，通过复位弹簧324带动连接板323朝向第二触点322移动，当连接板323与第二触点322接触时，开关32将电机31短路，此时电机31断电。
待操作人员完成注油工序之后，控制器46不在给电磁铁325通电，电磁铁325不产生吸力，在复位弹簧324的弹性恢复力的作用下带动连接板323沿背离第二触点322的方向移动，此时电机31通电，使得传送台30停留在导向结构20上。
在上述的实施例中，控制器46可以为一个，控制器46同时与信号发射器44、信号接收器45、压力传感器48、驱动器42以及开关32电连接，这样会致使控制器46的控制电路比较繁琐，为了简化控制器46和提供控制器的控制精度，上述的功能可以利用两个控制器进行完成。
在一些实施例中，如图9所示，控制器46可以包括第一控制器461、第二控制器462以及射频芯片463，第一控制器461与第二控制器462通过射频芯片463连接。其中，第一控制器461分别与信号接收器44、压力 传感器48以及驱动器42连接，用于根据第二信号和压力传感器48的压力控制驱动器42驱动传送台30相对于机台10升起或者降落的速度，第二控制器462与开关32连接，用于根据第一控制器461的输出信号来控制开关32的打开或者关闭。
在上述的过程中，第一控制器461可以通过电磁阀49控制驱动器42驱动传送台30相对于机台10升起或者降落的速度。例如，如图10所示，电磁阀49可以为直式电磁滑阀，电磁阀49可以包括阀体491、以及设置在阀体491内的阀芯492和阀杆493，其中，阀芯492通过第一弹簧494设置阀体内，阀杆493的一端连接在阀芯492上，阀杆493的另一端延伸至阀体491的外部，且位于阀体491外的阀杆492的部分上套设有电磁圈495和第二弹簧496。
阀体491上具有与阀体内腔连通的进气口4991、排气口4992、第一出气口4993和第二出气口4994，其中第一出气口4993与气缸的第二连通孔连通，第二出气口4994与气缸的第一连通孔连通。
以图10所示的方位为例，当电磁圈495通电时，在第二弹簧496的推动下，阀芯492沿阀杆的轴线向右移动，使得进气口4991、第一出气口4993和第二连通孔连通，第一连通孔、第二出气口4994和排气口4993连通，使得第二内腔425的压力大于第一内腔424的压力，该压力差带动活塞杆423沿背离第二内腔425的方向移动，使得活塞杆423伸出至气缸缸体421内，进而推动支撑板相对于机台10升起或者降落。
如图11所示，当电磁圈495断电时，阀杆493在第一弹簧494和第二弹簧496的弹性恢复力的作用下，阀芯492沿阀杆493的轴线方向向左移动，使得进气口4991、第二出气口4994和第一连通孔连通，第二连通孔、第一出气口4993和排气口4992连通，使得第一内腔424的压力大于第二内腔425的压力，该压力差带动活塞杆423沿朝向第二内腔425的方向移动，使得活塞杆423回缩至气缸缸体421内，进而推动支撑板相对于机台10升起或者降落。
在不需要气缸工作时，电磁圈495在电信号作用下运动到合适位置，将电磁阀49的进气口4991和排气口4992全部封住，使气缸处于静止状态。
本实施例通过第一控制器461和第二控制器462的设置，可以防止控制指令发生混乱，保证驱动器42和开关32的动作灵敏度和准确性。
在一些实施例中，射频芯片463包括通信连接的第一射频芯片和第二射频芯片，第一射频芯片与第一控制器461连接，第二射频芯片与第二控制器462连接。
在本实施例中，第一射频芯片和第二射频芯片均可以采用CC2530射频芯片。
具体的工作原理如下：第一射频芯片接收到第一控制器的第一控制信号，并将接收到的第一控制信号进行译码处理，得到第二控制信号，第二控制信号经由第二控制器做进一步的判断，解析，控制对应的电机31做相应的调节。
第一射频芯片与第二射频芯片之间通过通信模块进行通信连接，比如，通信模块可以为天线，天线能够把第一射频芯片发送来电磁波转为微弱交流电流信号经滤波，高频放大后，然后进行调制解调，送到后续的第二射频芯片和第二控制器做进一步的处理。
为了给控制器提供动作指令，本实施例提供的半导体生产设备中，如图3所示，机架上还设置有控制按钮50，控制按钮50与传送装置的控制器46连接，用于为控制器46提供动作指令。其中，控制按钮50包括与控制器连接的上移按钮51、下移按钮52以及复位按钮53。
上移按钮51用于向控制器46发送上移的指令，控制器46根据上移的指令控制驱动机构带动传送台相对于机台升起；下移按钮52用于向控制器46发送下移的指令，控制器46根据下移的指令控制驱动机构带动传送台30相对于机台降落；复位按钮53用于向控制器46发送复位的指令，控制器根据复位的指令传送装置的开关闭合。
在本实施例中，上述的控制按钮50的通过按键电路来实现，比如：如图12所示，第一控制器461上具有第一引脚4611、第二引脚4612以及第三引脚4613，上移按钮51的一端分别与第一引脚4611和第一控制器461的供电电压连接，上移按钮51的另一端接地；下移按钮52的一端分别与第二引脚4612和第一控制器461的供电电压连接，下移按钮52的另一端接地；复位按钮53的一端分别与第三引脚4613和第一控制器461的 供电电压连接，复位按钮的另一端接地。
当上移按钮按下时，第一引脚上的电压为0，当上移按钮断开时，第一引脚上的电压为5V，第一控制器会根据第一引脚上电压变化，来判断上移按钮是否按下，当第一控制器检测到第一引脚上的电压为0时，第一控制就会执行上移的指令，并将该上移的指令传递至驱动器，使得驱动器带动支撑件向上移动，以支撑住传送台，并带动传送台相对于机台升起。
下移按钮和复位按钮的执行命令与上移按钮的相似，本实施例在此不再多加赘述。
在实际的工作过程中，如果需要对半导体生产设备进行维护保养或者维修，操作人员手动按下上移按钮，第一控制器接收上移的指令之后，控制驱动器运动，使得驱动器驱动支撑板相对于机台升起，此时，第一控制器同时控制信号发射器和信号接收器工作，并根据第二信号来计算支撑板与传送台之间的距离，当支撑板与支撑台之间的距离近似为零时，第一控制器接收压力传感器检测到的压力，并将该压力值与预先设置的阈值进行比较，若压力值大于100N，则表明支撑板以完全支撑住传送台。
第一控制器将此信号传递至第二控制器，第二控制器控制与电机连接的开关关闭，此时用于驱动传送台运动的电机断电。
第一控制器控制驱动器继续工作，带动传送台相对于机架升起，直至暴露出被传送台遮挡住的注油口，第一控制器控制传送台停留在某一特定的位置，此时，操作人员可以向注油口内进行注油。
待注油完成之后，操作人员手动按下下移按钮，驱动器带动支撑板和传送台相对于机架降落，直至传送台回落至导向结构上。
最后，操作人员手动按下复位按钮，第二控制器控制与电机连接的开关打开，此时用于驱动传送台运动的电机恢复通电，传送台停留在导向结构上。
与此同时，驱动器带动支撑板继续下移，此时，第一控制器根据支撑板与传送台之间的距离判断支撑板是否回落至最初的位置，若支撑板回落至最初的位置，第一控制器控制驱动器停止运动，以完成整个运动过程。
本说明书中各实施例或实施方式采用递进的方式描述，每个实施例重点说明的都是与其他实施例的不同之处，各个实施例之间相同相似部分相互参 见即可。
在本说明书的描述中，参考术语“一个实施方式”、“一些实施方式”、“示意性实施方式”、“示例”、“具体示例”、或“一些示例”等的描述意指结合实施方式或示例描述的具体特征、结构、材料或者特点包含于本申请的至少一个实施方式或示例中。在本说明书中，对上述术语的示意性表述不一定指的是相同的实施方式或示例。而且，描述的具体特征、结构、材料或者特点可以在任何的一个或多个实施方式或示例中以合适的方式结合。
最后应说明的是：以上各实施例仅用以说明本申请的技术方案，而非对其限制；尽管参照前述各实施例对本申请进行了详细的说明，本领域的普通技术人员应当理解：其依然可以对前述各实施例所记载的技术方案进行修改，或者对其中部分或者全部技术特征进行等同替换；而这些修改或者替换，并不使相应技术方案的本质脱离本申请各实施例技术方案的范围。

Claims (15)

  1. 一种传送装置，安装在半导体生产设备的机台上，所述机台上设置有导向结构，所述导向结构上设置有沿所述导向结构延伸方向排布的多个注油口；其中，所述传送装置包括：
    传送台，所述传送台滑动安装在所述导向结构上，以承载并传送晶圆，且所述传送台遮挡多个所述注油口中的至少一个；
    驱动机构，所述驱动机构与所述传送台连接，用于驱动所述传送台相对所述机台升起或者降落，以暴露出被所述传送台遮挡的所述注油口。
  2. 根据权利要求1所述的传送装置，其中，所述驱动机构包括支撑件以及与所述支撑件连接的驱动器；
    所述支撑件位于所述传送台的下方，并与所述传送台连接；所述驱动器通过所述支撑件驱动所述传送台相对所述机台升起或者降落。
  3. 根据权利要求2所述的传送装置，其中，所述支撑件包括支撑板，所述驱动器的一端连接在所述支撑板的上表面或者所述支撑板的下表面上，所述驱动器的另一端连接在所述机台上。
  4. 根据权利要求3所述的传送装置，其中，所述驱动器包括至少一个驱动气缸，所述驱动气缸的一端通过连接杆与所述支撑板固定连接，所述驱动气缸的另一端与所述机台固定连接。
  5. 根据权利要求2-4任一项所述的传送装置，其中，所述传送装置还包括设置在所述传送台上的信号发射器、设置在所述支撑板朝向所述传送台的上表面的信号接收器以及分别与所述信号发射器和所述信号接收器电连接的控制器，所述控制器用于控制所述信号发射器向所述信号接收器发射第一信号，以及根据所述信号接收器输出的第二信号，控制所述驱动器驱动所述传送台相对于所述机台升起或者降落的速度，其中，所述第二信号由所述信号接收器利用所述第一信号转化生成。
  6. 根据权利要求5所述的传送装置，其中，所述信号发射器为发光二极管，所述信号接收器为光电传感器；
    所述光电传感器包括信号处理器，所述信号处理器用于对所述第一信号进行处理，以将所述第一信号转化为所述第二信号。
  7. 根据权利要求5所述的传送装置，其中，所述支撑板朝向所述传 送台的上表面上设有至少一个压力传感器，所述压力传感器用于检测所述支撑板所承受的压力；
    所述控制器与所述压力传感器连接，用于根据所述压力传感器的压力值，控制所述驱动器驱动所述传送台相对于所述机台升起或者降落的速度。
  8. 根据权利要求7所述的传送装置，其中，所述传送装置还包括与所述传送台连接的电机以及与所述电机连接的开关，所述开关与所述控制器连接，所述控制器用于根据所述第二信号和/或所述压力传感器的压力，来控制所述开关打开或者关闭。
  9. 根据权利要求8所述的传送装置，其中，所述控制器包括第一控制器、射频芯片以及第二控制器，所述第一控制器与所述第二控制器通过所述射频芯片连接；
    所述第一控制器分别与所述信号接收器、所述压力传感器以及所述驱动器连接，用于根据所述第二信号和所述压力传感器的压力控制所述驱动器驱动所述传送台相对于所述机台升起或者降落的速度；
    所述第二控制器与所述开关连接，用于根据所述第一控制器的输出信号来控制所述开关的打开或者关闭。
  10. 根据权利要求9所述的传送装置，其中，所述射频芯片包括通信连接的第一射频芯片和第二射频芯片，所述第一射频芯片与所述第一控制器连接，所述第二射频芯片与所述第二控制器连接。
  11. 根据权利要求10所述的传送装置，其中，所述第一控制器通过电磁阀控制所述驱动器驱动所述传送台相对于所述机台升起或者降落的速度。
  12. 一种半导体生产设备，其中，包括机台以及如权利要求1-11任一项所述的传送装置；
    所述机台包括机架以及设置在机架上的导向结构，所述导向结构上设置有沿所述导向结构延伸方向排布的多个注油口；
    所述传送装置的传送台滑动安装在所述导向机构上，所述传送台遮挡多个所述注油口中的至少一个；所述传送装置的驱动机构的一端设置在所述机架上，另一端与所述传送台连接，用于驱动所述传送台相对所述传送台相对所述机台升起或者降落，以暴露出被所述传送台遮挡的所述注油口。
  13. 根据权利要求12所述的半导体生产设备，其中，所述驱动机构的驱动器焊接在所述机架上。
  14. 根据权利要求13所述的半导体生产设备，其中，所述机架上设有控制按钮，所述控制按钮与所述传送装置的控制器连接，用于给所述控制器提供动作指令。
  15. 根据权利要求14所述的半导体生产设备，其中，所述控制按钮包括与所述控制器连接的上移按钮、下移按钮以及复位按钮；
    所述上移按钮用于向所述控制器发送上移的指令，所述控制器根据上移的指令控制所述驱动机构带动所述传送台相对于所述机台升起；
    所述下移按钮用于向所述控制器发送下移的指令，所述控制器根据下移的指令控制所述驱动机构带动所述传送台相对于所述机台降落；
    所述复位按钮用于向所述控制器发送复位的指令，所述控制器根据复位的指令所述传送装置的开关闭合。
PCT/CN2021/101295 2020-11-03 2021-06-21 传送装置及半导体生产设备 Ceased WO2022095459A1 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US17/439,596 US11923226B2 (en) 2020-11-03 2021-06-21 Conveyor device and semiconductor production equipment

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202011212708.5A CN114446844A (zh) 2020-11-03 2020-11-03 传送装置及半导体生产设备
CN202011212708.5 2020-11-03

Publications (1)

Publication Number Publication Date
WO2022095459A1 true WO2022095459A1 (zh) 2022-05-12

Family

ID=81361889

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2021/101295 Ceased WO2022095459A1 (zh) 2020-11-03 2021-06-21 传送装置及半导体生产设备

Country Status (3)

Country Link
US (1) US11923226B2 (zh)
CN (1) CN114446844A (zh)
WO (1) WO2022095459A1 (zh)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202839565U (zh) * 2012-08-15 2013-03-27 先进光电器材（深圳）有限公司 固晶机料盒装置
CN202871761U (zh) * 2012-08-15 2013-04-10 先进光电器材（深圳）有限公司 固晶机进料系统
US20190229003A1 (en) * 2018-01-20 2019-07-25 Boris Kesil Overhead Transportation System for Transporting Objects between Multiple Work Stations
CN211680609U (zh) * 2019-07-28 2020-10-16 泰州市光明电子材料有限公司 一种串焊上料机

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7506746B2 (en) * 2002-08-31 2009-03-24 Applied Materials, Inc. System for transporting substrate carriers
US7410340B2 (en) * 2005-02-24 2008-08-12 Asyst Technologies, Inc. Direct tool loading
ATE550138T1 (de) * 2007-09-14 2012-04-15 Flexlink Components Ab Hubvorrichtung für ein fördersystem, fördersystem und verfahren
US8235000B2 (en) * 2008-05-09 2012-08-07 Caterpillar Inc. Modular paint line and method of operation therefor
CN102177003B (zh) * 2008-10-07 2015-04-22 川崎重工业株式会社 基板输送机器人及系统
US8734079B1 (en) * 2012-11-13 2014-05-27 Sergey N. Razumov Self-lifting robotic device with load handling mechanism
US9442482B2 (en) * 2013-04-29 2016-09-13 GlobalFoundries, Inc. System and method for monitoring wafer handling and a wafer handling machine
JP6459682B2 (ja) * 2015-03-20 2019-01-30 Tdk株式会社 ガスパージ装置、ロードポート装置およびガスパージ方法
CN107161238A (zh) 2016-03-08 2017-09-15 深圳先进技术研究院 电动平台
JP7292163B2 (ja) * 2019-09-19 2023-06-16 株式会社ディスコ 被加工物の加工方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202839565U (zh) * 2012-08-15 2013-03-27 先进光电器材（深圳）有限公司 固晶机料盒装置
CN202871761U (zh) * 2012-08-15 2013-04-10 先进光电器材（深圳）有限公司 固晶机进料系统
US20190229003A1 (en) * 2018-01-20 2019-07-25 Boris Kesil Overhead Transportation System for Transporting Objects between Multiple Work Stations
CN211680609U (zh) * 2019-07-28 2020-10-16 泰州市光明电子材料有限公司 一种串焊上料机

Also Published As

Publication number Publication date
US20230067252A1 (en) 2023-03-02
US11923226B2 (en) 2024-03-05
CN114446844A (zh) 2022-05-06

Similar Documents

Publication Publication Date Title
CN104439776B (zh) 一种取料机构
CN220233099U (zh) 半导体工艺腔室及其顶针高度调节装置
CN116666301A (zh) 一种基片传送测试平台及测试方法
WO2022095459A1 (zh) 传送装置及半导体生产设备
CN204622051U (zh) 自动上下料机械手
CN212672149U (zh) 一种气浮动装置
CN205735461U (zh) 一种卫生陶瓷注浆模具安装设备
CN108098818B (zh) 一种高透气率工件搬运端拾器系统
CN210335859U (zh) 一种玻璃加工平台
CN110193842A (zh) 智能夹爪
CN105866550A (zh) 一种受电弓碳滑板粘结电阻测试装置
CN116699194A (zh) 一种电厂检修用安全检具
CN216051742U (zh) 一种瓦楞纸检验装置
CN205905023U (zh) 可探窗气动助力机械手
CN112027959B (zh) 升降装置与升降旋转设备
CN204119725U (zh) 全角度插件机头部插件机构
CN210862450U (zh) 一种模具零件孔位检测装置
CN112145488A (zh) 双面机高精度气液联动驱动系统
CN222813568U (zh) 一种晶片寻参定心装置
CN212552565U (zh) 一种电气比例阀控制的双作用气缸精准对位模组
CN218319092U (zh) 一种上吸式硅片搬运装置
CN208383456U (zh) 一种卡环检测机
CN214988704U (zh) 一种玻璃面板控制器
CN107728436A (zh) 接触式光刻机的调平装置及其调节方法
CN223712714U (zh) 气缸下压装置及晶圆键合卡盘组件

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 21888162

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 21888162

Country of ref document: EP

Kind code of ref document: A1