WO2022071099A1

WO2022071099A1 - Fluid-cooling type cold plate and method for producing same

Info

Publication number: WO2022071099A1
Application number: PCT/JP2021/035007
Authority: WO
Inventors: 大輔江藤
Original assignee: 京セラドキュメントソリューションズ株式会社
Priority date: 2020-10-01
Filing date: 2021-09-24
Publication date: 2022-04-07
Also published as: JP2023166635A

Abstract

A cold plate (16) comprises: a first plate-shaped member (30) that is provided with a slit (31) in which cooling fluid flows; a pair of second plate-shaped members (40) that are layered on and joined to respective sides of the first plate-shaped member (30) so that the slit (31) is covered; and an inlet (43) and an outlet (44) that communicate with the slit (31).

Description

Manufacturing method of fluid-cooled cold plate and fluid-cooled cold plate

The present invention relates to a fluid-cooled cold plate and a method for manufacturing a fluid-cooled cold plate.

The inkjet recording device is equipped with a drive circuit that drives the nozzle of the inkjet head. The drive circuit generates heat as it operates, but excessive heat generation causes deterioration of the performance of the drive circuit. Further, when the drive circuit is provided integrally with the inkjet head, the heat generated by the drive circuit may affect the ejection accuracy of the nozzle.

Various proposals have been made so far regarding the cooling of electronic devices. For example, Patent Document 1 describes a method for manufacturing a fluid-cooled cold plate using a fixing bracket attached to a metal pipe in order to maintain a positional relationship between a plurality of metal pipes embedded in a mold. .. In Patent Document 2, at least a part of a translucent portion of a resin member and at least a part of a fine concavo-convex structure portion of a metal member irradiate an article in contact with each other via a photocurable layer. Describes how to make a cold plate that cures the photocurable layer in. Patent Document 3 describes a method for manufacturing a liquid-cooled jacket in which a jacket body and a sealed body are friction-stir welded.

International Publication No. 2016/167022 Japanese Unexamined Patent Publication No. 2019-13872 Japanese Unexamined Patent Publication No. 2017-42819

However, in the manufacturing method described in Patent Document 1, since the metal pipe is positioned in the mold with metal fittings and the molten aluminum is poured into the mold, the equipment becomes large and the man-hours increase. In terms of performance, since the metal pipe and the aluminum portion exist between the refrigerant and the heat source to be cooled, the thickness increases, the thermal resistance increases, and the heat exchange efficiency decreases. In the manufacturing method described in Patent Document 2, the photocurable adhesive is expensive. Further, since the adhesive surface is exposed to light such as ultraviolet rays, the degree of freedom in the flow path configuration is low due to the restriction of the optical path, and it is difficult to improve the performance. In the manufacturing method described in Patent Document 3, the equipment cost of agitated friction stir welding is high. In addition, since the joining speed is slow, the number of man-hours increases. Further, since the joining line (welding line) is limited to a straight line, a gentle curve, or a circle, it is not possible to form a complicated flow path, and it is difficult to improve the performance.

A cold plate that allows the refrigerant liquid to flow through a hole formed in an aluminum block with a gun drill is also conceivable, but since a deep hole is drilled with a gun drill, the number of man-hours increases. Also, if the wall thickness in the radial direction of the hole is not sufficiently secured, the hole will be opened in the radial direction due to the misalignment of the center of the gun drill, and liquid leakage will occur. Performance is reduced. Moreover, it is difficult to improve the performance because only a straight flow path can be formed.

Further, in all of the above four examples, the thickness of the cold plate becomes large, and it is difficult to save space.

In consideration of the above circumstances, an object of the present invention is to provide a thin, high-cooling performance and inexpensive method for manufacturing a fluid-cooled cold plate and a fluid-cooled cold plate.

In order to solve the above problems, in the fluid cooling type cold plate according to the present invention, the slits are closed on both sides of the first plate-shaped member provided with a slit through which the cooling fluid flows and the first plate-shaped member. It is characterized by comprising a pair of second plate-shaped members laminated and joined, and an inlet and an outlet communicating with the slit.

Further, the method for manufacturing a fluid-cooled cold plate according to the present invention includes a step of forming a slit in the first plate-shaped member, and an inlet and an outlet communicating with the slit in the second plate-shaped member or the first plate-shaped member. A step of forming the first plate-shaped member and a step of joining a pair of the second plate-shaped members to the first plate-shaped member so as to sandwich the first plate-shaped member and close the slit.

According to the present invention, it is possible to provide a thin, high-cooling performance and inexpensive method for manufacturing a fluid-cooled cold plate and a fluid-cooled cold plate.

It is a front view which shows typically the internal structure of the printer which concerns on 1st Embodiment of this invention. It is a figure which shows typically the ink supply path which concerns on 1st Embodiment of this invention. It is a top view of the image formation unit which concerns on 1st Embodiment of this invention. It is a perspective view of the inkjet head which concerns on 1st Embodiment of this invention. It is a perspective view of the inkjet head which concerns on 1st Embodiment of this invention. It is a perspective view of the inkjet head which concerns on 1st Embodiment of this invention. It is a perspective view of the inkjet head which concerns on 1st Embodiment of this invention. It is a perspective view of the cold plate which concerns on 1st Embodiment of this invention. It is a perspective view of the cold plate which concerns on 1st Embodiment of this invention. It is an exploded view of the cold plate which concerns on 1st Embodiment of this invention. It is a perspective view which shows the positional relationship between a cold plate and a driver IC which concerns on 1st Embodiment of this invention. It is a perspective view which shows the positional relationship between a slit and a driver IC which concerns on 1st Embodiment of this invention. It is an exploded view of the cold plate which concerns on 2nd Embodiment of this invention. It is a perspective view of the cold plate which concerns on 2nd Embodiment of this invention. It is a perspective view which shows the appearance of laminating the pair of 1st plate-shaped members which concerns on 2nd Embodiment of this invention. It is a perspective view which shows the flow of the cooling fluid inside the slit which concerns on 2nd Embodiment of this invention. It is a perspective view which shows the flow of the cooling fluid inside the slit which concerns on 2nd Embodiment of this invention. It is a perspective view of the cold plate which concerns on 1st modification of 2nd Embodiment of this invention. It is a perspective view of the cold plate which concerns on the 2nd modification of 2nd Embodiment of this invention. It is a perspective view of the cold plate which concerns on the 3rd modification of the 2nd Embodiment of this invention.

[First Embodiment]
Hereinafter, the printer 1 (inkjet recording device) according to the first embodiment of the present invention will be described with reference to the drawings.

First, the overall configuration of printer 1 will be described. FIG. 1 is a front view schematically showing the internal configuration of the printer 1. FIG. 2 is a diagram schematically showing an ink supply path. FIG. 3 is a plan view of the image forming unit 6. 4A and 4B are perspective views of the inkjet head 12. Hereinafter, the front side of the paper surface in FIG. 1 will be referred to as the front side (front side) of the printer 1, and the left-right orientation will be described with reference to the direction in which the printer 1 is viewed from the front. In each figure, U, Lo, L, R, Fr, and Rr indicate top, bottom, left, right, front, and back, respectively.

The printer 1 is an inkjet type image forming apparatus that forms an image by ejecting ink. The printer 1 includes a rectangular parallelepiped main body housing 3. At the lower part of the main body housing 3, a paper feed cassette 4 for accommodating a sheet S of sheets such as plain paper and coated paper, and a paper feed roller 5 for feeding the sheet S from the paper feed cassette 4 are provided. A transport unit 7 for sucking and transporting the sheet S is provided above the paper feed cassette 4. An inkjet image-forming unit 6 is provided above the transport unit 7. At the upper right portion of the main body housing 3, a discharge roller pair 8 for discharging the sheet S on which the image is formed and a discharge tray 9 on which the discharged sheet S is loaded are provided.

The transport unit 7 is provided with a large number of ventilation holes (not shown), an endless transport belt 21 wound around a plurality of rollers 22a to 22e, and a large number of ventilation holes, and the upper surface is the inner surface of the transport belt 21. It is provided with a transport plate 23 that comes into contact with the transport plate 23, and a suction portion 24 that sucks the sheet S to the transport belt 21 by sucking air through the ventilation holes of the transport plate 23. When the roller 22a is driven by a drive unit (not shown) such as a motor, the conveyor belt 21 rotates in the Y1 direction, and the sheet S adsorbed on the conveyor belt 21 is conveyed in the Y1 direction.

The image forming unit 6 includes head units 11Y, 11Bk, 11C, and 11M (collectively referred to as head unit 11), and ejects yellow, black, cyan, and magenta inks, respectively. Ink containers 20Y, 20Bk, 20C, and 20M (collectively referred to as ink containers 20) filled with yellow, black, cyan, and magenta inks are connected to the head units 11Y, 11Bk, 11C, and 11M, respectively.

The head unit 11 includes one or more inkjet heads 12, for example, a plurality of inkjet heads 12 arranged in a staggered pattern (FIGS. 3 to 4B). The inkjet head 12 includes a rectangular parallelepiped housing 13 having a longitudinal direction in the front-rear direction, and a nozzle plate 14 provided at the bottom of the housing 13. The nozzle plate 14 includes a large number of nozzles arranged in the front-rear direction (the width direction of the transport belt 21 intersecting the transport direction of the transport belt 21), and the discharge port of each nozzle is provided on the lower surface of the nozzle plate 14 (not shown). omit). Each nozzle is provided with a piezoelectric element (not shown), and a driver IC 15 for driving the piezoelectric element is provided inside the housing 13.

The printer 1 includes an ink supply path shown in FIG. In the figure, a supply path corresponding to one color of ink is shown, but since four colors of ink are used in this embodiment, four similar supply paths are provided. The printer 1 has a container mounting portion 51 to which the ink container 20 is mounted, a filter 52 for filtering ink, a pump 53 for sucking ink from the ink container 20 through the filter 52, and ink sent from the pump 53. A sub tank 54 for storing ink and a pump 55 for supplying ink stored in the sub tank 54 to the head unit 11 are provided. The pump 55 is connected to the socket 12S provided in the inkjet head 12.

Inside the main body housing 3, a transport path 10 is provided from the paper feed cassette 4 to the discharge tray 9 via the transport unit 7. The transport path 10 is provided with a plurality of transport roller pairs 17 for transporting the sheet S. A resist roller pair 18 is provided on the upstream side of the image forming unit 6 in the transport direction.

Each part of the printer 1 is controlled by the control unit 2. The control unit 2 includes a processor and a memory. The processor is, for example, a CPU (Central Processing Unit). The memory includes a storage medium such as ROM (Read Only Memory), RAM (Random Access Memory), and EEPROM (Electrically Erasable Programmable Read Only Memory). The processor performs various processes by reading and executing the control program stored in the memory. The control unit 2 may be realized by an integrated circuit that does not use software.

The basic image formation operation of printer 1 is as follows. When an image forming job is input to the printer 1 from an external computer or the like, the paper feed roller 5 sends the sheet S from the paper feed cassette 4 to the transport path 10, and the resist roller pair 18 whose rotation is stopped tilts the sheet S. Correct the line. When the resist roller pair 18 feeds the sheet S to the transport unit 7 at a predetermined timing, the transport unit 7 attracts the sheet S to the transport belt 21 and transports the sheet S in the Y1 direction. When the control unit 2 supplies the gradation data corresponding to each nozzle of the inkjet head 12 to the drive circuit in synchronization with the transfer of the sheet S, the drive circuit supplies the drive signal corresponding to the gradation data to the piezoelectric element. Ink droplets are ejected from the nozzles, and an image is formed on the sheet S. The discharge roller pair 8 discharges the sheet S on which the image is formed to the discharge tray 9.

[Inkjet head]
Next, the configuration of the inkjet head 12 will be described in detail. 4A to 5B are perspective views of the inkjet head 12.

[Inkjet head]
The housing 13 and the nozzle plate 14 are made of a metal such as stainless steel. A connector 12C to which a cable (not shown) from the control unit 2 is connected is provided on the upper portion of the housing 13. Sockets 12S to which the piping from the pump 55 is connected are provided at both front and rear ends of the nozzle plate 14.

A piezoelectric element (not shown) is provided for each nozzle provided on the nozzle plate 14. A driver IC 15 (Integrated Circuit, not shown) for driving a piezoelectric element is provided inside the housing 13. The control unit 2 supplies gradation data for each pixel corresponding to each nozzle to the driver IC 15, and the driver IC 15 supplies a drive signal corresponding to the gradation data to the piezoelectric element.

The driver IC 15 generates heat as it operates, and this heat may affect the viscosity of the ink, the performance of the piezoelectric element, and the like. Therefore, in order to promote heat dissipation to the outside of the housing 13, driver ICs 15 are attached to the inner surfaces of the left and right side plates of the housing 13. Further, on the outside of the housing 13, a pair of cold plates 16 (an example of a fluid-cooled cold plate) are provided so as to face the driver IC 15 with the left and right side plates interposed therebetween. A flow path through which the cooling fluid flows is provided inside the cold plate 16, and the heat generated by the driver IC 15 is transferred to the cooling fluid via the housing 13 to cool the driver IC 15. A gel sheet having high thermal conductivity may be provided between the housing 13 and the cold plate 16. The cooling fluid may be a liquid or a gas, but if a liquid is used as the cooling fluid, the cooling efficiency can be increased. As the liquid, water, antifreeze or the like can be used. As the antifreeze liquid, for example, one containing glycol or alcohol as a main component can be used. As the gas, nitrogen, air, or the like can be used.

[Cold plate]
Next, the configuration of the cold plate 16 will be described in detail. 6A and 6B are perspective views of the cold plate 16. FIG. 7 is an exploded view of the cold plate 16. FIG. 8A is a perspective view showing the positional relationship between the cold plate 16 and the driver IC 15. FIG. 8B is a perspective view showing the positional relationship between the slit 31 and the driver IC 15. Here, the cold plate 16 provided on the right side of the housing 13 of the inkjet head 12 will be described. The cold plate 16 on the left side has the same structure as the cold plate 16 on the right side except that it has a left-right inverted structure.

The cold plate 16 is a pair of a first plate-shaped member 30 provided with a slit 31 through which a cooling fluid flows, and a pair laminated on the first plate-shaped member 30 so as to sandwich the first plate-shaped member 30 and close the slit 31. The second plate-shaped member 40, and the inflow port 43 and the outflow port 44 communicating with the slit 31 are provided.

The first plate-shaped member 30 and the second plate-shaped member 40 are rectangular plate-shaped members having a longitudinal direction in the front-rear direction. The first plate-shaped member 30 and the second plate-shaped member 40 are formed by using any one of aluminum, an aluminum alloy, copper, and a copper alloy. The materials of the first plate-shaped member 30 and the second plate-shaped member 40 may be different. For example, in order to improve the cooling performance, it is better that the thickness of the second plate-shaped member 40 is thin, but in that case, the corrosion resistance and the rigidity may be insufficient, so that the additive supplements the corrosion resistance and the rigidity. It is conceivable to use a material containing.

The thickness of the second plate-shaped member 40 is thicker than that of the first plate-shaped member 30. The thickness of the first plate-shaped member 30 is, for example, 2 mm or more and 3 mm or less. The thickness of the second plate-shaped member 40 is, for example, 0.3 mm or more and 0.5 mm or less.

The first plate-shaped member 30 is provided with a slit 31. The first end portion 311 of the slit 31 is provided on the front end portion side of the first plate-shaped member 30, and the second end portion 312 of the slit 31 is provided on the rear end portion side of the first plate-shaped member 30. .. Needless to say, the slit 31 penetrates in the left-right direction. The slit 31 is formed by laser cutting, cutting, punching, etching, or the like.

The longer the slit 31, the better, in order to improve the cooling performance. Therefore, as shown in FIG. 7, it is desirable that the slit 31 has a meandering shape. Further, in order to suppress the flow path resistance, it is better that the slit 31 is less bent. Therefore, as shown in FIG. 7, it is desirable that the ends of a plurality of linear slits 31S along the longitudinal direction of the first plate-shaped member 30 are connected to each other by an arcuate slit 31B. The shape of the slit 31 may be a shape other than the example of FIG. 7. For example, one linear slit 31 may be provided. Further, both the first end portion 311 and the second end portion 312 of the slit 31 may be provided on the front end portion side of the first plate-shaped member 30, or both may be provided on the rear end portion side. good.

Screw holes 32 penetrating in the left-right direction are provided at the front end portion and the rear end portion of the first plate-shaped member 30. A thread is formed on the inner surface of the screw hole 32. The second plate-shaped member 40 is provided with a screw hole 42 corresponding to the screw hole 32 of the first plate-shaped member 30. Of the pair of second plate-shaped members 40, the second plate-shaped member 40 on the left side is located at a position corresponding to the first end portion 311 and the second end portion 312 of the slit 31 of the first plate-shaped member 30. An inlet 43 and an outlet 44 are provided, respectively. The inflow port 43 and the outflow port 44 penetrate in the left-right direction (an example in the thickness direction). Through

holes

35 and 45 into which stays 71, which will be described later, are inserted are provided at both front and rear ends of the first plate-shaped member 30 and the second plate-shaped member 40.

A base 61 is provided at the inflow port 43 and the outflow port 44, but it is difficult to attach the base 61 because the second plate-shaped member 40 is a thin-walled member. Therefore, the mounting member 62 is provided on the left side of the front end portion and the rear end portion of the second plate-shaped member 40. The mounting member 62 is a plate-shaped metal member having a thickness thicker than that of the second plate-shaped member 40. The mounting member 62 is provided with a screw hole 63 for mounting the base 61 and a screw hole 64 corresponding to the screw hole 32 of the first plate-shaped member 30. A screw thread is formed on the outer peripheral surface of the base 61. A comb-made gasket 66 is provided between the mounting member 62 and the second plate-shaped member 40. The gasket 66 is provided with a base screw hole 63 of the mounting member 62 and a through hole 67 corresponding to the screw hole 64. The mounting member 62 and the gasket 66 are provided with

notches

65 and 68 for avoiding interference with the stay 71.

As shown in FIG. 7, a pair of second plate-shaped members 40 are laminated with the first plate-shaped member 30 interposed therebetween. Of the pair of second plate-shaped members 40, the second plate-shaped member 40 provided with the inflow port 43 and the outflow port 44 is arranged on the left side, and the other second plate-shaped member 40 is arranged on the right side. .. The first plate-shaped member 30 and the second plate-shaped member 40 are joined by laser welding.

The gasket 66 is arranged on the left surface of the second plate-shaped member 40 on the left side, the mounting member 62 is arranged on the left surface of the gasket 66, and the mounting member 62 and the gasket 66 are the first plate-shaped member 30 and the first plate-shaped member 30 using screws 70. 2 Fastened to the plate-shaped member 40. The base 61 is fastened to the base screw hole 63 of the mounting member 62. The cold plate 16 assembled in this way is arranged so as to face the right side surface of the housing 13. Further, the cold plate 16 having a structure in which the cold plate 16 is inverted left and right is arranged so as to face the left side surface of the housing 13.

As shown in FIGS. 6A and 6B, in the assembled cold plate 16, the lower end of the mounting member 62 protrudes below the lower ends of the first plate-shaped member 30 and the second plate-shaped member 40. The lower end of the mounting member 62 is abutted against the upper surface of the nozzle plate 14, and a gap is formed between the nozzle plate 14 and the cold plate 16, so that heat transfer between the nozzle plate 14 and the cold plate 16 is suppressed. Will be done. The stay 71 is inserted into the through

holes

35 and 45 of the first plate-shaped member 30 and the second plate-shaped member 40 of the left and right cold plates 16, and the left and right cold plates 16 are connected by the stay 71.

As shown in FIG. 4A, on the front side of the inkjet head 12, the bases 61 of the left and right cold plates 16 face each other. Of these, the base 61 of the cold plate 16 on the right side communicates with the inflow port 43 and is connected to a pump (not shown) that sends out the cooling fluid. The base 61 of the cold plate 16 on the left side communicates with the outlet 44 and is connected to a heat exchanger (not shown) for cooling the cooling fluid. Further, as shown in FIG. 5A, even on the rear side of the inkjet head 12, the bases 61 of the left and right cold plates 16 face each other, but both are connected by a relay tube 72. With this configuration, the cooling fluid flowing in from the right base 61 passes through the slit 31 of the cold plate 16 on the right side, then passes through the slit 31 of the cold plate 16 on the left side via the relay pipe 72, and the base 61 on the left side. Outflow from.

As described above, the driver IC 15 faces the cold plate 16 via the left and right side plates of the housing 13. For example, on the right side of the housing 13, the cold plate 16 and the driver IC 15 face each other in the positional relationship shown in FIG. 8A. In the figure, the side plate of the housing 13 is not shown. When the second plate-shaped member 40 on the left side is omitted, the slit 31 and the driver IC 15 face each other as shown in FIG. 8B.

According to the cold plate 16 according to the present embodiment described above, it is possible to provide a thin, high-cooling performance and inexpensive fluid-cooled cold plate.

Further, according to the cold plate 16 according to the present embodiment, since aluminum, aluminum alloy, copper, and copper alloy have high thermal conductivity, the cooling performance of the fluid-cooled cold plate can be improved.

Further, according to the cold plate 16 according to the present embodiment, since the thickness of the second plate-shaped member 40 is thinner than that of the first plate-shaped member 30, the heat capacity of the second plate-shaped member 40 becomes smaller, so that the fluid cooling type is used. The cooling performance of the cold plate can be improved.

Further, according to the cold plate 16 according to the present embodiment, the processing is easier and the fluid-cooled cold plate is airtight as compared with the case where the inflow port 43 and the outflow port 44 are provided in the first plate-shaped member 30. It can enhance the sex.

Further, according to the cold plate 16 according to the present embodiment, the first plate-shaped member 30 and the second plate-shaped member 40 are joined by laser welding or bonded using an adhesive, so that another method can be used. A fluid-cooled cold plate can be manufactured at a lower cost than when it is used.

Further, according to the cold plate 16 according to the present embodiment, the average roughness of the adhesive surfaces of the first plate-shaped member 30 and the second plate-shaped member 40 is 0.3 μm or more and 1 μm or less, so that during welding. It melts well. Further, the transfer of heat from the adhesive surface to the cooling fluid is promoted by appropriately disturbing the flow of the cooling fluid along the adhesive surface.

[Second Embodiment]
Next, the cold plate 75 (an example of a fluid-cooled cold plate) according to the second embodiment of the present invention will be described. The second embodiment includes the same second plate-shaped member 40, base 61, mounting member 62, and gasket 66 as in the first embodiment, but description and illustration of these members will be omitted. FIG. 9 is an exploded view of the cold plate 75. FIG. 10A is a perspective view of the cold plate 75. FIG. 10B is a perspective view showing a state in which the third plate-shaped member 80 and the fourth plate-shaped member 90 are laminated. 11 and 12 are perspective views showing the flow of the cooling fluid inside the first slit 81 and the second slit 91.

The first plate-shaped member 30 includes a third plate-shaped member 80 and a fourth plate-shaped member 90 laminated on the third plate-shaped member 80, and the slit 31 is provided in the third plate-shaped member 80. The first slit 81 includes the first slit 81 and the second slit 91 provided in the fourth plate-shaped member 90, and the first slit 81 is first in the first direction intersecting the first trunk portion 81S and the first trunk portion 81S. A plurality of first branch portions 81B branched from one trunk portion 81S are provided, and the second slit 91 has a plurality of second trunk portions 91S branched from the second trunk portion 91S in a second direction opposite to the first direction. The two branch portions 91B are provided, and each of the plurality of first branch portions 81B and each of the plurality of second branch portions 91B face each other in a one-to-one relationship. Specifically, it is as follows.

The third plate-shaped member 80 and the fourth plate-shaped member 90 are rectangular plate-shaped members whose longitudinal direction is the front-rear direction. The third plate-shaped member 80 and the fourth plate-shaped member 90 are formed by using any one of aluminum, an aluminum alloy, copper, and a copper alloy. The material of the third plate-shaped member 80 and the fourth plate-shaped member 90 may be different from the material of the second plate-shaped member 40. The thickness of the third plate-shaped member 80 and the fourth plate-shaped member 90 is, for example, 1 mm or more and 1.5 mm or less.

The third plate-shaped member 80 and the fourth plate-shaped member 90 are provided with a comb-shaped first slit 81 and a second slit 91, respectively. The first slit 81 and the second slit 91 are formed by laser cutting, cutting, punching, etching, or the like.

The first slit 81 includes a linear first trunk portion 81S having a longitudinal direction in the front-rear direction, and a plurality of linear first branch portions 81B branched downward from the first trunk portion 81S. The front end portion of the first trunk portion 81S is located on the front side of the frontmost first branch portion 81B. The second slit 91 has a linear second trunk portion 91S having a longitudinal direction in the front-rear direction and a linear second branch portion 91B having the same number as the first branch portion 81B branched upward from the second trunk portion 91S. Be prepared. The rear end portion of the second trunk portion 91S is located on the rear side of the rearmost rear branch portion 91B. The length of the second cadre 91S is equal to that of the first cadre 81S. The length of the second branch portion 91B is equal to that of the first branch portion 81B. The second plate-shaped member 40 on the left side is provided with an inflow port 43 at a position corresponding to the front end portion of the first trunk portion 81S. The second plate-shaped member 40 on the right side is provided with an outlet 44 at a position corresponding to the rear end portion of the second trunk portion 91S.

As shown in FIG. 10B, when the third plate-shaped member 80 and the fourth plate-shaped member 90 are laminated, each of the plurality of first branch portions 81B and each of the plurality of second branch portions 91B are one-to-one. However, each of the first branch portions 81B is displaced backward by about one-third to two-thirds of the width of the first branch portion 81B with respect to each of the second branch portions 91B. It is in the same position. Further, the first branch portion 81B is located at a position slightly upwardly displaced with respect to the second branch portion 91B. Therefore, as shown in FIGS. 11 and 12, the cooling fluid flowing in from the inflow port 43 branches from the first trunk portion 81S to the plurality of first branch portions 81B, and faces each of the plurality of first branch portions 81B. It flows into the second branch portion 91B, joins the second branch portion 91B from the plurality of second branch portions 91B, and flows out from the outflow port 44.

According to the cold plate 75 according to the present embodiment described above, a parallel flow path is formed between the inflow port 43 and the outflow port 44. When forming a parallel flow path, if one attempt is made to form the first plate-shaped member 30, the portion between the parallel flow paths is separated from the other parts, and the joining work with the second plate-shaped member 40 is performed. However, according to the cold plate 75 according to the present embodiment, since the portions between the parallel flow paths are not separated, the parallel flow paths can be easily formed.

Further, according to the cold plate 75 according to the present embodiment, the cooling fluid and the third plate-shaped member 80 and the fourth plate-shaped member 80 are compared with the case where the first branch portion 81B is not displaced with respect to the second branch portion 91B. Since the contact area with the member 90 increases, the cooling performance can be improved.

The above embodiment may be modified as follows.

FIG. 13 is a perspective view of the cold plate 75 according to the first modification of the second embodiment. In the second embodiment, an example is shown in which the first branch portion 81B is displaced in the front-rear direction and the vertical direction with respect to the second branch portion 91B, but as shown in the figure, the first branch portion 81B is It does not have to be displaced with respect to the second branch portion 91B. According to this configuration, parallel flow paths can be easily formed.

FIG. 14A is a perspective view of the cold plate 75 according to the second modification of the second embodiment. As shown in the figure, the first branch portion 81B may be displaced only in the front-rear direction with respect to the second branch portion 91B. Further, FIG. 14B is a perspective view of the cold plate 75 according to the third modification of the second embodiment. As shown in the figure, the first branch portion 81B may be displaced only in the vertical direction with respect to the second branch portion 91B. According to the second modification and the third modification, the cooling fluid and the third plate-shaped member 80 and the fourth plate-shaped member are compared with the case where the first branch portion 81B is not displaced with respect to the second branch portion 91B. Since the contact area with the 90 is increased, the cooling performance can be improved.

In the above embodiment, an example in which the first plate-shaped member 30 and the second plate-shaped member 40 are joined by laser welding has been shown, but the first plate-shaped member 30 and the second plate-shaped member 40 have an adhesive. It may be glued using. Also in this case, when the average roughness of the adhesive surfaces of the first plate-shaped member 30 and the second plate-shaped member 40 is 0.3 μm or more and 1 μm or less, the adhesive becomes familiar well.

In the above embodiment, an example in which the inflow port 43 and the outflow port 44 are provided in the second plate-shaped member 40 is shown, but the inflow port 43 and the outflow port 44 are provided in the first plate-shaped member 30. May be good. For example, a drill having a diameter smaller than the thickness of the first plate-shaped member 30 is used to form a hole communicating with the first end portion 311 and the second end portion 312 of the slit 31 from the end surface of the first plate-shaped member 30. An inlet 43 and an outlet 44 may be formed.

Claims

A first plate-shaped member provided with a slit through which the cooling fluid flows, and
A pair of second plate-shaped members laminated and joined to both sides of the first plate-shaped member so as to close the slit,
A fluid-cooled cold plate comprising an inlet and an outlet communicating with the slit.
The fluid cooling according to claim 1, wherein the first plate-shaped member and the second plate-shaped member are formed by using at least one of aluminum, an aluminum alloy, copper, and a copper alloy. Formula cold plate.
The fluid-cooled cold plate according to claim 1, wherein the thickness of the second plate-shaped member is thinner than that of the first plate-shaped member.
The fluid-cooled cold plate according to claim 1, wherein the inlet and the outlet penetrate one of the pair of second plate-shaped members in the thickness direction.
The fluid-cooled cold plate according to claim 4, wherein the inflow port and the outflow port are provided at both ends in the longitudinal direction of the pair of second plate-shaped members.
The fluid-cooled cold plate according to claim 1, wherein the first plate-shaped member and the second plate-shaped member are joined by laser welding.
The fluid-cooled cold plate according to claim 1, wherein the first plate-shaped member and the second plate-shaped member are adhered to each other by using an adhesive.
The fluid-cooled cold plate according to claim 1, wherein the average roughness of the adhesive surfaces of the first plate-shaped member and the second plate-shaped member is 0.3 μm or more and 1 μm or less.
The fluid-cooled cold plate according to claim 1, wherein the slit has a meandering shape.
The ninth aspect of the present invention is characterized in that the slit has a plurality of straight portions long in the longitudinal direction of the first plate-shaped member and an arcuate curved portion connecting the ends of the adjacent straight portions. The fluid-cooled cold plate described.
The first plate-shaped member includes a third plate-shaped member and a fourth plate-shaped member laminated on the third plate-shaped member.
The slit includes a first slit provided in the third plate-shaped member and a second slit provided in the fourth plate-shaped member.
The first slit includes a linear first trunk portion and a plurality of first branch portions branched from the first trunk portion in a first direction intersecting the first trunk portion.
The second slit includes a linear second trunk portion and a plurality of second branch portions branched from the second trunk portion in a second direction opposite to the first direction.
The fluid-cooled cold plate according to claim 1, wherein each of the plurality of first branch portions and each of the plurality of second branch portions face each other in a one-to-one relationship.
Each of the plurality of first branch portions and each of the plurality of second branch portions face each other in a one-to-one relationship, and each of the plurality of first branch portions is of the plurality of second branch portions. The fluid-cooled cold plate according to claim 9, wherein the first direction and the direction intersecting the first direction are deviated from each other in at least one direction.
The process of forming a slit in the first plate-shaped member and
A step of forming an inflow port and an outflow port communicating with a slit in the second plate-shaped member or the first plate-shaped member, and
A method for manufacturing a fluid-cooled cold plate, which comprises a step of joining a pair of second plate-shaped members to the first plate-shaped member so as to sandwich the first plate-shaped member and close a slit.