JP2012013249A - Plate lamination type heat sink - Google Patents

Plate lamination type heat sink Download PDF

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JP2012013249A
JP2012013249A JP2010147480A JP2010147480A JP2012013249A JP 2012013249 A JP2012013249 A JP 2012013249A JP 2010147480 A JP2010147480 A JP 2010147480A JP 2010147480 A JP2010147480 A JP 2010147480A JP 2012013249 A JP2012013249 A JP 2012013249A
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heat sink
plate
bone
longitudinal
laminated heat
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JP5432838B2 (en
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Joji Yamazaki
丈嗣 山崎
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T Rad Co Ltd
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T Rad Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation

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  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

PROBLEM TO BE SOLVED: To reduce the fluid resistance and to perform smooth distribution when a cooling liquid 10 bypasses horizontal rib parts 3 in a plate lamination type liquid-cooled heat sink provided with many vertical rib parts 2 and horizontal rib parts 3 on an intermediate plate configuring an inner fin.SOLUTION: At the position of the horizontal rib parts 3 of one intermediate plate 6, the width of the vertical rib parts 2 of the other intermediate plates 5 and 7 adjacent to it is narrowed, a constricted part 11 for fluid resistance reduction is provided there, and the width of the flow path 16 is turned to a wide part 17 wider than the other parts.

Description

本発明は、複数のプレート積層型のインナーフィンを一対の端板で挟持し、その端板に発熱体を接触固定すると共に、内部に冷却液を流通して、発熱体を冷却するヒートシンクに関する。   The present invention relates to a heat sink that sandwiches a plurality of plate-stacked inner fins with a pair of end plates, contacts and fixes a heating element to the end plates, and cools the heating element by circulating a cooling liquid therein.

下記特許文献1に記載のプレート積層型のヒートシンクは、インナーフィンとして夫々四周に枠部が形成されると共に、長手方両端部に連通部を有する。そして枠内に網目状部が形成され、網目の各孔が整合しないように位置ずれして、複数のインナーフィンが積層され、それらの上下両端に端板を配し、プレートの長手方向両端部に冷却液の出入口を設けたものである。
また、本出願人は下記特許文献2に記載のものを既に提案している。これは、各インナーフィンの中間部に複数の伝熱促進用の島部を設け、各インナーフィンの島部が互いに整合するようにしたものである。
The plate-stacked heat sink described in Patent Document 1 below has frame portions formed as four inner circumferences as inner fins, and has communicating portions at both longitudinal ends. A mesh-like portion is formed in the frame, and the positions of the mesh holes are shifted so as not to be aligned, a plurality of inner fins are stacked, end plates are arranged at both upper and lower ends, and both longitudinal end portions of the plate Is provided with a coolant inlet / outlet.
The applicant has already proposed the one described in Patent Document 2 below. In this structure, a plurality of islands for promoting heat transfer are provided in the middle part of each inner fin, and the island parts of each inner fin are aligned with each other.

さらに、本出願人は下記特許文献3に記載のヒートシンクを提案している。これは、各インナーフィンが多数の並列した縦部材と、その縦部材間を連結する斜めの斜め部材とを有し、各縦部材が整合されると共に、斜部材は互いに重ならないように配置されたものである。
このように構成することにより厚み方向への伝熱性が向上する。
Furthermore, the present applicant has proposed a heat sink described in Patent Document 3 below. This is because each inner fin has a large number of juxtaposed longitudinal members and oblique oblique members connecting the longitudinal members, and the longitudinal members are aligned and arranged so that the oblique members do not overlap each other. It is a thing.
By comprising in this way, the heat conductivity to the thickness direction improves.

特表平4−505046号公報Japanese National Publication No. 4-505046 特開2008−170060号公報JP 2008-170060 A 特開2010−114174号公報JP 2010-114174 A

特許文献1に記載のヒートシンクは、発熱体の受熱面から各インナーフィンへの伝熱が十分でない欠点があった。これはインナーフィンに多数の細い網目状の部分を有し、発熱体との伝熱面積が比較的小さいため、伝熱が悪い欠点があった。
特許文献2に記載の発明は、それを補うため発熱体の位置で、インナーフィンに円形等の島部を設け、発熱体の伝熱が積層方向に直接伝熱するようにしたものである。しかしながら、それ以外の部分での伝熱性が期待できない欠点があった。
The heat sink described in Patent Document 1 has a drawback that heat transfer from the heat receiving surface of the heating element to each inner fin is not sufficient. This has a drawback that heat transfer is poor because the inner fin has a large number of thin mesh portions and the heat transfer area with the heating element is relatively small.
In the invention described in Patent Document 2, in order to compensate for this, an island portion such as a circle is provided in the inner fin at the position of the heating element so that the heat transfer of the heating element is directly transferred in the stacking direction. However, there is a drawback that heat transfer in other parts cannot be expected.

特許文献3に記載のヒートシンクは、多数の縦部材が積層方向に一致するため、積層方向への伝熱性が向上する特徴がある。しかしながら、斜め部材の位置で冷却液はが積層方向に分流または合流するとき、その位置での流体抵抗が比較的大きくなり、冷却液の円滑な流通を疎外する欠点があった。
そこで本発明は、これらの欠点を取り除き、伝熱性が良く且つ、冷却液側の圧力損失の小さな、性能の良いヒートシンクを提供することを課題とする。
The heat sink described in Patent Document 3 has a feature that heat transfer in the stacking direction is improved because a large number of vertical members coincide with the stacking direction. However, when the coolant splits or merges in the stacking direction at the position of the oblique member, the fluid resistance at that position becomes relatively large, and there is a drawback that the smooth circulation of the coolant is excluded.
Therefore, an object of the present invention is to provide a heat sink with good performance that eliminates these drawbacks and has good heat transfer and low pressure loss on the coolant side.

請求項1に記載の本発明は、それぞれ平坦な金属板のプレス成形体よりなり、外周の少なくとも両側に枠部(1)を有し、その枠部(1) 内に多数の細長い縦骨部(2) が互いに離間して配置されると共に、各縦骨部(2) (2) 間が横骨部(3) で連結され、その枠部(1) と縦骨部(2) と横骨部(3) とが平面的に且つ一体に連結された複数の中間プレート(5)(6)(7) と、
積層された複数の中間プレート(5)(6)(7) の積層方向の両端に位置される一対の端プレート(8)(9) と、を具備し、
積層された中間プレート(5)(6)(7) の一端から、その各縦骨部(2) (2) 間の多数のスリット状の流路(16)を他端へ冷却液(10)が流通し、前記端プレート(8)に被冷却用の発熱体(15)が接触するプレート積層型ヒートシンクにおいて、
各中間プレート(5)(6)(7) は、細長い多数の縦骨部(2) が略同一位置で積層され、それぞれの横骨部(3) は互いに異なった位置で積層され、
一方の中間プレート(6)の横骨部(3) の位置で、それに隣接する他方の中間プレート(5)(7) の縦骨部(2) の幅が細くなる流体抵抗減少用のくびれ部(11)が設けられて、そこの流路(16)の幅が他の部分より広い幅広部(17)を有することを特徴とするプレート積層型ヒートシンクである。
The present invention according to claim 1 is formed of a press-formed body of a flat metal plate, has a frame portion (1) on at least both sides of the outer periphery, and a plurality of elongated longitudinal bone portions in the frame portion (1). (2) are spaced apart from each other, and the longitudinal bones (2) and (2) are connected by the transverse bone (3), and the frame (1) and the longitudinal bone (2) A plurality of intermediate plates (5), (6), (7) in which the bone part (3) is connected in a plane and integrally;
A pair of end plates (8) and (9) positioned at both ends in the stacking direction of the plurality of stacked intermediate plates (5), (6) and (7),
From one end of the laminated intermediate plate (5) (6) (7), a number of slit-like channels (16) between each longitudinal bone (2) (2) are connected to the other end of the coolant (10). In the plate laminated heat sink in which the heating element (15) to be cooled contacts the end plate (8),
Each of the intermediate plates (5), (6), and (7) has a large number of elongated longitudinal bone portions (2) laminated at substantially the same position, and the respective transverse bone portions (3) are laminated at different positions,
Constriction for reducing fluid resistance, where the width of the longitudinal bone (2) of the other intermediate plate (5) (7) adjacent to the horizontal bone (3) of one intermediate plate (6) becomes narrower (11) is provided, and the flow path (16) there is a wide plate portion (17) having a wider width than other portions.

請求項2に記載の本発明は、請求項1のプレート積層型ヒートシンクにおいて、
前記くびれ部(11)が縦骨部(2) の幅方向両側に存在するプレート積層型ヒートシンクである。
請求項3に記載の本発明は、請求項1のプレート積層型ヒートシンクにおいて、
隣接する中間プレート(5)(6)(7) の各縦骨部(2) の位置がその幅方向に僅かに位置ずれして、一方の中間プレート(6)の縦骨部(2) とそれに隣接する他方の中間プレート(5)(7) の縦骨部(2) とが、積層方向に重なる重部分(2a)と重ならない非重部分(2b)とを有するプレート積層型ヒートシンクである。
The present invention according to claim 2 is the plate laminated heat sink according to claim 1,
It is a plate laminated heat sink in which the constricted part (11) exists on both sides in the width direction of the longitudinal bone part (2).
According to a third aspect of the present invention, in the plate laminated heat sink of the first aspect,
The positions of the longitudinal bones (2) of the adjacent intermediate plates (5), (6), and (7) are slightly displaced in the width direction, and the longitudinal bones (2) of one intermediate plate (6) The vertical bone portion (2) of the other intermediate plate (5) (7) adjacent to it is a plate laminated heat sink having a overlapping portion (2a) overlapping in the stacking direction and a non-overlapping portion (2b) not overlapping .

請求項4に記載の本発明は、請求項3のプレート積層型ヒートシンクにおいて、
前記くびれ部(11)が、縦骨部(2) の前記非重部分(2b)の側のみに存在するプレート積層型ヒートシンクである。
請求項5に記載の本発明は、請求項1のプレート積層型ヒートシンクにおいて、
前記縦骨部(2) が平面波形に曲折され、その波の頂部または谷部に前記横骨部(3) が平面千鳥状に位置されたプレート積層型ヒートシンクである。
The present invention according to claim 4 is the plate laminated heat sink according to claim 3,
The constricted portion (11) is a plate laminated heat sink in which only the non-heavy portion (2b) side of the longitudinal bone portion (2) exists.
The present invention according to claim 5 is the plate laminated heat sink according to claim 1,
The plate bone type heat sink in which the longitudinal bone portion (2) is bent into a plane waveform and the transverse bone portion (3) is located in a plane zigzag at the top or valley of the wave.

請求項6に記載の本発明は、請求項5のプレート積層型ヒートシンクにおいて、
前記くびれ部(11)が、前記縦骨部(2) の前記横骨部(3)と反対の位置に配置されたプレート積層型ヒートシンクである。
請求項7に記載の本発明は、請求項1〜請求項6のいずれかのプレート積層型ヒートシンクにおいて、
前記縦骨部(2) の幅と流路(16)の幅が略同一であるプレート積層型ヒートシンクである。
The present invention according to claim 6 is the plate laminated heat sink according to claim 5,
The constricted portion (11) is a plate laminated heat sink in which the longitudinal bone portion (2) is disposed at a position opposite to the transverse bone portion (3).
The present invention according to claim 7 is the plate laminated heat sink according to any one of claims 1 to 6,
In this plate heat sink, the width of the vertical bone portion (2) and the width of the flow path (16) are substantially the same.

本発明のプレート積層型ヒートシンクは、細長い多数の縦骨部2が略同一位置で積層され、各縦骨部2間に冷却液10の流路16が存在するため、発熱体15からの熱が各縦骨部2に直接伝わり、冷却液10との間の熱交換を促進できる。
そのうえ、各プレートの横骨部3は互いに異なった位置で積層され、一方の中間プレート6の横骨部3の位置で、それに隣接する他方の中間プレート5,7は縦骨部2にくびれ部11が設けられている。そして、そこに流路の幅が広い幅広部17が形成されたから、それがない場合、本来、流路の流体抵抗の大きな横骨部3の位置で、その流体抵抗を減少させ、流体の流通を円滑にして、全体として圧力低下の小さな性能の良いヒートシンクを提供できる。
In the plate laminated heat sink of the present invention, a large number of elongated vertical bone portions 2 are laminated at substantially the same position, and the flow path 16 of the cooling liquid 10 exists between the vertical bone portions 2, so that heat from the heating element 15 is generated. It is directly transmitted to each longitudinal bone 2 and heat exchange with the coolant 10 can be promoted.
In addition, the lateral bone portions 3 of each plate are stacked at different positions, and the other intermediate plates 5 and 7 adjacent to the lateral bone portion 3 of one intermediate plate 6 are constricted to the longitudinal bone portion 2. 11 is provided. And since the wide part 17 with the wide flow path was formed there, if it is not there, the fluid resistance is reduced at the position of the lateral bone part 3 where the fluid resistance of the flow path is large. As a result, it is possible to provide a heat sink having a good performance with a small pressure drop as a whole.

上記構成において請求項2に記載のように、くびれ部11を縦骨部2の幅方向両側に形成した場合には、より効果的に横骨部3の位置での流体抵抗を減少することができる。
上記構成において請求項3に記載のように、中間プレート5,6,7の各縦骨部2の位置をその幅方向に僅かに位置ずれさせ、各縦骨部2が重部分2aと非重部分2bとを有するようにした場合には、非重部分2bにより冷却液10との接触面積を広くして、熱交換を促進すると共に、重部分2aによって発熱体15との伝熱性を良好にし得る。
In the above configuration, when the constricted portions 11 are formed on both sides in the width direction of the longitudinal bone portion 2 as described in claim 2, the fluid resistance at the position of the lateral bone portion 3 can be more effectively reduced. it can.
In the above-described configuration, as described in claim 3, the positions of the vertical bone portions 2 of the intermediate plates 5, 6, and 7 are slightly shifted in the width direction so that each vertical bone portion 2 is not overlapped with the heavy portion 2 a. In the case of having the portion 2b, the non-heavy portion 2b widens the contact area with the coolant 10 to promote heat exchange, and the heavy portion 2a improves heat transfer with the heating element 15. obtain.

上記構成において請求項4に記載のように、くびれ部11を縦骨部2の非重部分2bの側のみに配置した場合には、縦骨部2と冷却液10との接触面積を広く確保すると共に、横骨部3における冷却液10の流体抵抗を効果的に減少することができる。
上記構成において請求項5に記載のように、縦骨部2を平面波形に曲折し、その波の頂部または谷部に横骨部3を平面千鳥状に配置した場合には、各縦骨部2間に形成される多数の流路16の流路長を長くし、且つその蛇行により冷却液10の攪拌効果が増大し伝熱性が向上する。
In the above configuration, when the constricted portion 11 is disposed only on the non-heavy portion 2b side of the longitudinal bone portion 2 as described in claim 4, a wide contact area between the longitudinal bone portion 2 and the coolant 10 is ensured. In addition, the fluid resistance of the coolant 10 in the transverse bone 3 can be effectively reduced.
In the above configuration, as described in claim 5, when the longitudinal bone portion 2 is bent into a planar waveform and the transverse bone portions 3 are arranged in a plane zigzag at the top or valley of the wave, each longitudinal bone portion The flow path length of the multiple flow paths 16 formed between the two is increased, and the meandering effect increases the stirring effect of the coolant 10 and improves heat transfer.

上記構成において請求項6に記載のように、そのくびれ部11を縦骨部2の横骨部3と反対側の位置に配置した場合には、横骨部3により流路16の幅広部17近傍を補強し且つ、流路抵抗を効果的に減少させることができる。
上記構成において請求項7に記載のように、縦骨部2の幅と流路16とを略同じにした場合には、流路抵抗と伝熱性とのバランスのよいヒートシンクを提供できる。
When the constricted part 11 is arranged at a position opposite to the transverse bone part 3 of the longitudinal bone part 2 as described in claim 6 in the above configuration, the wide part 17 of the channel 16 is formed by the transverse bone part 3. The vicinity can be reinforced and the flow resistance can be effectively reduced.
When the width of the longitudinal bone portion 2 and the flow path 16 are made substantially the same as described in claim 7 in the above configuration, a heat sink having a good balance between flow path resistance and heat transfer can be provided.

本発明の第1実施例のヒートシンク12の分解斜視図。The disassembled perspective view of the heat sink 12 of 1st Example of this invention. 同ヒートシンク12の正面図。The front view of the heat sink 12. FIG. 同ヒートシンク12の各プレートの平面図。The top view of each plate of the heat sink 12. FIG. 図3のA〜C部の拡大図及び、その組立て状態を示す平面図並びに、図4(D)のE−E,F−F,G−Gの各矢視断面図。The enlarged view of the AC section of FIG. 3, the top view which shows the assembly state, and each EE, FF, and GG sectional drawing of FIG. 4 (D). 同第1実施例の作用を示す説明図。Explanatory drawing which shows the effect | action of the 1st Example. 本発明の第2実施例の各プレートの平面図。The top view of each plate of 2nd Example of this invention. 図6のA〜C部の拡大図及び、その組立て状態を示す平面図並びに、図7(D)のE−E〜K−Kの各矢視断面図。The enlarged view of the AC part of FIG. 6, the top view which shows the assembly state, and each EE arrow KK sectional drawing of FIG.7 (D). 同第2実施例の作用を示す説明図。Explanatory drawing which shows the effect | action of the 2nd Example. 本発明の第3実施例の各プレートの平面図。The top view of each plate of 3rd Example of this invention. 図9のA〜C部の拡大図及び、その組立て状態を示す平面図。The enlarged view of the AC part of FIG. 9, and the top view which shows the assembly state. 図10(D)のE−E〜M−Mの各矢視断面図。FIG. 10D is a cross-sectional view taken along arrows EE to MM in FIG. 同第3実施例の作用を示す説明図。Explanatory drawing which shows the effect | action of the 3rd Example.

次に、図面に基づいて本発明の各実施の形態につき説明する。
図1〜図5は本発明のヒートシンク12の第1の実施の形態を示す。
このヒートシンク12は、複数の中間プレート5,6,7(この例では3枚)が厚み方向に積層され、その上下両端に一対の端プレート8,9が配置され、それらの間が一体にろう付け固定されるものである。各中間プレート5,6,7は四周に枠部1を有し、その枠部1内に多数の縦骨部2が互いに略縦骨部の幅の空間で離間して平行に配置されると共に、各縦骨部2,2間が横骨部3で連結されている。
この例では、横骨部3が夫々一直線上に配置されているが、それに代えて各横骨部3を千鳥状に配置しても良い。
Next, each embodiment of the present invention will be described with reference to the drawings.
1 to 5 show a first embodiment of a heat sink 12 of the present invention.
In the heat sink 12, a plurality of intermediate plates 5, 6, and 7 (three in this example) are laminated in the thickness direction, and a pair of end plates 8 and 9 are arranged at both upper and lower ends thereof, and they are integrated together. It is fixed. Each of the intermediate plates 5, 6, 7 has a frame portion 1 on four sides, and a large number of vertical bone portions 2 are arranged in parallel in the frame portion 1 so as to be spaced apart from each other by a space having a width substantially equal to the vertical bone portion. The vertical bone portions 2 and 2 are connected by a horizontal bone portion 3.
In this example, the horizontal bone portions 3 are arranged in a straight line, but the horizontal bone portions 3 may be arranged in a staggered manner instead.

そして、夫々の縦骨部2間にはスリット状の流路16が図4(A)〜(D)の如く存在し、各流路16は横骨部3によって閉じられている。そして図3および図4から明らかなように、上段の中間プレート5の横骨部3と、中段の中間プレート6の横骨部3と、下段の中間プレート7の横骨部3とは、夫々互いに長手方向に位置が異なるように配置されている。これに対して、各中間プレート5,6,7の夫々の縦骨部2は積層されたとき、それが互いに整合する位置に配置されている。各中間プレートの長手方向両端部にはタンク部4が設けられ、そこには何れの骨部も存在しない。   A slit-like flow path 16 exists between the longitudinal bone portions 2 as shown in FIGS. 4A to 4D, and each flow path 16 is closed by the lateral bone portion 3. As apparent from FIGS. 3 and 4, the horizontal bone 3 of the upper intermediate plate 5, the horizontal bone 3 of the intermediate intermediate plate 6, and the horizontal bone 3 of the lower intermediate plate 7 are respectively It arrange | positions so that a position may mutually differ in a longitudinal direction. On the other hand, when the vertical bone portions 2 of the intermediate plates 5, 6 and 7 are laminated, they are arranged at positions where they are aligned with each other. Tank portions 4 are provided at both longitudinal ends of each intermediate plate, and there are no bones there.

次に、本発明の特徴は、図3及び図4に示されている。
図4の(A)〜(C)に記載されている如く、上段の中間プレート5の横骨部3と同じ位置において、中段ならびに下段の中間プレート6,7の縦骨部2には、その両側にくびれ部11が設けられている。このくびれ部11は、縦骨部2の幅が細くなるように滑らかにくびれており、その結果、隣り合う縦骨部2間には幅広部17が形成される。即ち、上段の中間プレート5の横骨部3の位置において、中段および下段の中間プレート6,7には幅広部17が配置される。同様に、中段の中間プレート6の横骨部3の位置では、上段と下段の中間プレート5,7にくびれ部11が設けられ、そこに幅広部17が形成される。さらには、下段の中間プレート7の横骨部3の位置に置いて、上段および中段の中間プレート5,6に前記同様のくびれ部11が形成され、そこに幅広部17が形成される。そして同図(D)(G)の如く、それらの中間プレート5,6,7が積層される。
Next, features of the present invention are shown in FIGS.
As shown in FIGS. 4A to 4C, at the same position as the lateral bone portion 3 of the upper intermediate plate 5, the longitudinal bone portion 2 of the intermediate and lower intermediate plates 6, 7 has Constrictions 11 are provided on both sides. The constricted portion 11 is smoothly constricted so that the width of the vertical bone portion 2 is narrowed. As a result, a wide portion 17 is formed between the adjacent vertical bone portions 2. That is, the wide portion 17 is disposed on the middle and lower intermediate plates 6 and 7 at the position of the lateral bone portion 3 of the upper intermediate plate 5. Similarly, at the position of the lateral bone portion 3 of the middle intermediate plate 6, the narrowed portion 11 is provided in the upper and lower intermediate plates 5 and 7, and the wide portion 17 is formed there. Further, a narrow portion 11 similar to the above is formed in the upper and middle intermediate plates 5 and 6 at the position of the lateral bone portion 3 of the lower intermediate plate 7, and a wide portion 17 is formed there. Then, as shown in FIGS. 4D and 4G, the intermediate plates 5, 6, and 7 are laminated.

このとき各中間プレートの横骨部3の位置は、互いに長手方向に異なると共に、その位置でそれに隣接する他の中間プレートには幅広部17が形成される。そして、その上下両端に端プレート8,9が積層され、それらの間に冷却液10が流通する。このとき図4(G)に示す如く、冷却液10は各横骨部3によって、流路16が閉塞され、その位置で上下方向に流路変更し、隣接する中間プレートの流路16内に迂回して円滑に流通する。上段の中間プレート5の横骨部3を冷却液10が迂回するとき、それが中段および下段の中間プレート6,7の各流路16を図において下方に移動する。その横骨部3を迂回して、隣接する中間プレート5の流路16に流入し、各中間プレートの流路16内を流通する。そして中段の中間プレート6の横骨部3に冷却液10が達すると、その上下両側の中間プレート5,7を迂回し、各プレートの流路16内を流入する。同様に下段の中間プレート7の横骨部3を迂回するときは、中段および上段の中間プレート5,6の幅広部17を流通する。   At this time, the positions of the lateral bone portions 3 of the respective intermediate plates are different from each other in the longitudinal direction, and the wide portion 17 is formed on the other intermediate plate adjacent to the position at that position. End plates 8 and 9 are laminated on both upper and lower ends, and a coolant 10 flows between them. At this time, as shown in FIG. 4 (G), the cooling fluid 10 is blocked by the respective lateral bone portions 3 and the flow path 16 is changed in the vertical direction at the position, and the cooling liquid 10 enters the flow path 16 of the adjacent intermediate plate. Circulate smoothly by detour. When the coolant 10 bypasses the lateral bone portion 3 of the upper intermediate plate 5, it moves downward in the drawing in the flow paths 16 of the intermediate and lower intermediate plates 6, 7. It bypasses the lateral bone 3 and flows into the flow path 16 of the adjacent intermediate plate 5 and flows through the flow path 16 of each intermediate plate. When the coolant 10 reaches the horizontal bone portion 3 of the intermediate plate 6 at the middle stage, it bypasses the upper and lower intermediate plates 5 and 7 and flows into the flow path 16 of each plate. Similarly, when detouring the lateral bone portion 3 of the lower intermediate plate 7, the wide portion 17 of the intermediate and upper intermediate plates 5 and 6 is circulated.

図5は冷却液10の流通状態示すものであり、横骨部3の位置に存在する他の中間プレートのくびれ部11によって、その流通が円滑に行われる様子を示している。そしてその冷却液10は、流路16を流通する間に厚み方向に移動し、攪拌されて熱交換が促進される。
従来のヒートシンクでは、このように冷却液10が各横骨部3を迂回するとき、その流通抵抗が増大する。しかしながら、本発明ではその位置の中間プレートの流路16には幅広部17が存在するため、その分だけ冷却液10の流通に伴う圧力抵抗を低減することができる。
FIG. 5 shows a flow state of the coolant 10 and shows a state in which the flow is smoothly performed by the constricted portion 11 of the other intermediate plate existing at the position of the transverse bone portion 3. The coolant 10 moves in the thickness direction while flowing through the flow path 16 and is stirred to promote heat exchange.
In the conventional heat sink, when the coolant 10 bypasses each lateral bone portion 3 in this way, the flow resistance increases. However, in the present invention, since the wide portion 17 exists in the flow path 16 of the intermediate plate at that position, the pressure resistance accompanying the circulation of the coolant 10 can be reduced by that amount.

なお、この例では上端の端プレート8には接合板18を介してパワートランジスタ等の発熱体15が接合される。接合板18は電気絶縁性であると共に、伝熱性の良い薄肉のセラミック材等が用いられる。
下端の端プレート9にはその両端部に出入口14が形成され、そこにパイプ13が接続される。
また、この例では3枚の中間プレートが積層されているが、それが2枚であっても、4枚以上の多数枚であっても良い。そして端プレート8上の発熱体15の熱は、端プレート8及び夫々の縦骨部2を介して伝熱される。そして各中間プレートの流路16内を流通する冷却液10との間に熱交換が行われるものである。
In this example, a heating element 15 such as a power transistor is bonded to the upper end plate 8 via a bonding plate 18. The joining plate 18 is made of a thin ceramic material that is electrically insulating and has good heat transfer.
The end plate 9 at the lower end is formed with inlets / outlets 14 at both ends thereof, and pipes 13 are connected thereto.
In this example, three intermediate plates are laminated, but it may be two or more than four. The heat of the heating element 15 on the end plate 8 is transferred through the end plate 8 and the respective longitudinal bone portions 2. Then, heat exchange is performed with the coolant 10 flowing in the flow path 16 of each intermediate plate.

この例では、各中間プレートにタンク部4が設けられているが、それに代えて端プレート8又は端プレート9にそれを設けて良い。その場合には、一例として端プレート8,9の四周を皿状に立ち上げ、各中間プレートの積層体をその内部に収納することが出きる。
また、図2において発熱体15が上端の端プレート8のみに接続されているが、それに加えて下端の端プレート9に発熱体15を接触固定しても良い。
In this example, the tank portion 4 is provided in each intermediate plate, but it may be provided in the end plate 8 or the end plate 9 instead. In that case, as an example, it is possible to raise the four rounds of the end plates 8 and 9 in a dish shape and store the laminated body of each intermediate plate therein.
In FIG. 2, the heating element 15 is connected only to the upper end plate 8, but in addition, the heating element 15 may be fixed to the lower end plate 9 by contact.

次に、図6〜図8は本発明の第2実施例であって、この例が前記第1実施例と異なる点は、くびれ部11の形状及び各中間プレートにおける縦骨部2どうしの積層状態である。そして他は前記第1実施例と全く同一である。
この例では、図7(A)〜(D)に示す如く、くびれ部11が夫々の縦骨部2の幅方向の片側のみに配置されている。さらに同図(E)〜(J)に示す如く、中段の中間プレート6の縦骨部2と、上段、下段の中間プレート5,7の縦骨部2とがその幅方向に僅かに位置ずれし、同図(F)に示す如く、積層状態で三つの縦骨部2が重なる重部分2aと夫々が重ならない非重部分2bとを有する。この例では、非重部分2bより重部分2aが大である。
各縦骨部2をこのように積層することにより、冷却液10との接触面積が非重部分2b分に相当する面積分だけ広くなる。それによって熱交換が促進される。
Next, FIGS. 6 to 8 show a second embodiment of the present invention, which differs from the first embodiment in that the shape of the constricted portion 11 and the lamination of the longitudinal bone portions 2 in each intermediate plate. State. The rest is exactly the same as in the first embodiment.
In this example, as shown in FIGS. 7A to 7D, the constricted portion 11 is disposed only on one side in the width direction of each longitudinal bone portion 2. Further, as shown in FIGS. 9E to 9J, the vertical bone portion 2 of the middle intermediate plate 6 and the vertical bone portions 2 of the upper and lower intermediate plates 5 and 7 are slightly displaced in the width direction. However, as shown in FIG. 5F, there are an overlapping portion 2a where the three vertical bone portions 2 overlap each other and a non-overlapping portion 2b where each does not overlap. In this example, the heavy portion 2a is larger than the non-heavy portion 2b.
By laminating the longitudinal bone portions 2 in this manner, the contact area with the coolant 10 is increased by an area corresponding to the non-overlapping portion 2b. This facilitates heat exchange.

次に、各中間プレートのくびれ部11はその向きを互いに異にする。図7(A)に示す如く、上段の中間プレート5ではくびれ部11が図において、上方に向き、中段の中間プレート6では(B)の如くそれが下方に向き、下段の中間プレート7では(C)の如く、それが上方に向いている。そしてそれらが重ね合わされたとき、同図(D)の如く、各くびれ部11は非重部分2b側に配置されている。このように構成することにより、各中間プレートの横骨部3を迂回するとき、より円滑に冷却液10を流通し得る。
図8はその流通状態を示すものである。
Next, the directions of the constricted portions 11 of the intermediate plates are different from each other. As shown in FIG. 7A, in the upper intermediate plate 5, the constricted portion 11 faces upward in the drawing, and in the intermediate intermediate plate 6, it faces downward as shown in (B), and in the lower intermediate plate 7 ( As shown in C), it faces upward. When they are superimposed, as shown in FIG. 4D, each constricted portion 11 is arranged on the non-overlapping portion 2b side. By comprising in this way, when detouring the horizontal bone part 3 of each intermediate | middle plate, the cooling fluid 10 can be distribute | circulated more smoothly.
FIG. 8 shows the distribution state.

次に、図9〜図12は本発明の第3実施例であり、この例が前記第1及び第2実施例と異なる点は、縦骨部2が蛇行状に形成されていると共に、横骨部3は千鳥状に形成されている点である。さらには、くびれ部11の位置が横骨部3の存在する縦骨部2の一方側にのみ配置され、その位置に幅広部17が形成されている点である。
各中間プレートの縦骨部2は僅かに波形に蛇行すると共に、図10(D)の如く各縦骨部2は互いに整合する。しかしながら、各横骨部3は積層した際に互いに離間して配置される。
Next, FIGS. 9 to 12 show a third embodiment of the present invention. This example is different from the first and second embodiments in that the longitudinal bone portion 2 is formed in a meandering shape, The bone part 3 is a point formed in a staggered pattern. Furthermore, the position of the constricted part 11 is disposed only on one side of the longitudinal bone part 2 where the transverse bone part 3 exists, and the wide part 17 is formed at that position.
The longitudinal bone portions 2 of each intermediate plate meander in a slightly wavy shape, and the longitudinal bone portions 2 are aligned with each other as shown in FIG. However, the horizontal bone portions 3 are arranged apart from each other when stacked.

なお、各横骨部3は曲折する縦骨部2の波の頂部または谷部に配置されている。そして一例として、中段の中間プレート6の横骨部3に整合する位置で、上段および下段の中間プレート5,7にはその流路16にくびれ部11が形成され、そこに幅広部17が存在する。それにより、冷却液10が各横骨部3を積層方向に迂回するとき、その流体抵抗を減ずることができる。その冷却液10の流通状態を図12に示す。   In addition, each horizontal bone part 3 is arrange | positioned at the top part or trough part of the wave of the vertical bone part 2 to bend. As an example, a narrowed portion 11 is formed in the flow path 16 of the upper and lower intermediate plates 5 and 7 at a position aligned with the lateral bone portion 3 of the middle intermediate plate 6, and a wide portion 17 is present there. To do. Thereby, when the coolant 10 bypasses each lateral bone portion 3 in the stacking direction, the fluid resistance can be reduced. The flow state of the coolant 10 is shown in FIG.

1 枠部
2 縦骨部
2a 重部分
2b 非重部分
3 横骨部
4 タンク部
5,6,7 中間プレート
8,9 端プレート
1 Frame 2 Longitudinal bone
2a overlap
2b Non-heavy part 3 Horizontal bone part 4 Tank part 5, 6, 7 Intermediate plate 8, 9 End plate

10 冷却液
11 くびれ部
12 ヒートシンク
13 パイプ
14 出入口
15 発熱体
16 流路
17 幅広部
18 接合板
10 Coolant
11 Constriction
12 heat sink
13 Pipe
14 Doorway
15 Heating element
16 flow path
17 Wide part
18 Joint plate

Claims (7)

それぞれ平坦な金属板のプレス成形体よりなり、外周の少なくとも両側に枠部(1)を有し、その枠部(1) 内に多数の細長い縦骨部(2) が互いに離間して配置されると共に、各縦骨部(2) (2) 間が横骨部(3) で連結され、その枠部(1) と縦骨部(2) と横骨部(3) とが平面的に且つ一体に連結された複数の中間プレート(5)(6)(7) と、
積層された複数の中間プレート(5)(6)(7) の積層方向の両端に位置される一対の端プレート(8)(9) と、を具備し、
積層された中間プレート(5)(6)(7) の一端から、その各縦骨部(2) (2) 間の多数のスリット状の流路(16)を他端へ冷却液(10)が流通し、前記端プレート(8)に被冷却用の発熱体(15)が接触するプレート積層型ヒートシンクにおいて、
各中間プレート(5)(6)(7) は、細長い多数の縦骨部(2) が略同一位置で積層され、それぞれの横骨部(3) は互いに異なった位置で積層され、
一方の中間プレート(6)の横骨部(3) の位置で、それに隣接する他方の中間プレート(5)(7) の縦骨部(2) の幅が細くなる流体抵抗減少用のくびれ部(11)が設けられて、そこの流路(16)の幅が他の部分より広い幅広部(17)を有することを特徴とするプレート積層型ヒートシンク。
Each is formed of a flat metal plate press-molded body, and has frame portions (1) on at least both sides of the outer periphery, and a large number of elongated vertical bone portions (2) are arranged in the frame portion (1) so as to be separated from each other. At the same time, the longitudinal bones (2) and (2) are connected by the transverse bone (3), and the frame (1), longitudinal bone (2), and transverse bone (3) are planar. And a plurality of intermediate plates (5) (6) (7) coupled together,
A pair of end plates (8) and (9) positioned at both ends in the stacking direction of the plurality of stacked intermediate plates (5), (6) and (7),
From one end of the laminated intermediate plate (5) (6) (7), a number of slit-like channels (16) between each longitudinal bone (2) (2) are connected to the other end of the coolant (10). In the plate laminated heat sink in which the heating element (15) to be cooled contacts the end plate (8),
Each of the intermediate plates (5), (6), and (7) has a large number of elongated longitudinal bone portions (2) laminated at substantially the same position, and the respective transverse bone portions (3) are laminated at different positions,
Constriction for reducing fluid resistance, where the width of the longitudinal bone (2) of the other intermediate plate (5) (7) adjacent to the horizontal bone (3) of one intermediate plate (6) becomes narrower (11) is provided, and the flow path (16) there has a wide part (17) whose width is wider than other parts.
請求項1のプレート積層型ヒートシンクにおいて、
前記くびれ部(11)が縦骨部(2) の幅方向両側に存在するプレート積層型ヒートシンク。
The plate laminated heat sink of claim 1,
A plate laminated heat sink in which the constricted portion (11) exists on both sides in the width direction of the longitudinal bone portion (2).
請求項1のプレート積層型ヒートシンクにおいて、
隣接する中間プレート(5)(6)(7) の各縦骨部(2) の位置がその幅方向に僅かに位置ずれして、一方の中間プレート(6)の縦骨部(2) とそれに隣接する他方の中間プレート(5)(7) の縦骨部(2) とが、積層方向に重なる重部分(2a)と重ならない非重部分(2b)とを有するプレート積層型ヒートシンク。
The plate laminated heat sink of claim 1,
The positions of the longitudinal bones (2) of the adjacent intermediate plates (5), (6), and (7) are slightly displaced in the width direction, and the longitudinal bones (2) of one intermediate plate (6) A plate laminated heat sink, in which the longitudinal bone portion (2) of the other intermediate plate (5) (7) adjacent thereto has an overlapping portion (2a) overlapping in the stacking direction and a non-overlapping portion (2b) not overlapping.
請求項3のプレート積層型ヒートシンクにおいて、
前記くびれ部(11)が、縦骨部(2) の前記非重部分(2b)の側のみに存在するプレート積層型ヒートシンク。
The plate laminated heat sink of claim 3,
A plate laminated heat sink in which the constricted portion (11) exists only on the non-heavy portion (2b) side of the longitudinal bone portion (2).
請求項1のプレート積層型ヒートシンクにおいて、
前記縦骨部(2) が平面波形に曲折され、その波の頂部または谷部に前記横骨部(3) が平面千鳥状に位置されたプレート積層型ヒートシンク。
The plate laminated heat sink of claim 1,
A plate laminated heat sink in which the longitudinal bone portion (2) is bent into a plane corrugation, and the transverse bone portion (3) is positioned in a plane staggered pattern at the top or valley of the wave.
請求項5のプレート積層型ヒートシンクにおいて、
前記くびれ部(11)が、前記縦骨部(2) の前記横骨部(3)と反対の位置に配置されたプレート積層型ヒートシンク。
The plate laminated heat sink according to claim 5,
A plate laminated heat sink in which the constricted portion (11) is disposed at a position opposite to the transverse bone portion (3) of the longitudinal bone portion (2).
請求項1〜請求項6のいずれかのプレート積層型ヒートシンクにおいて、
前記縦骨部(2) の幅と流路(16)の幅が略同一であるプレート積層型ヒートシンク。
In the plate laminated heat sink according to any one of claims 1 to 6,
A plate laminated heat sink in which the width of the longitudinal bone portion (2) and the width of the flow path (16) are substantially the same.
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