JPH02306097A - Heat sink - Google Patents

Abstract

PURPOSE:To form many passage plates for forming a heat sink in a short period of time, to enhance mass productivity and to inexpensively manufacture them by forming a passage filtration plate by pressing, and then manufacturing it in assembling and adhering steps. CONSTITUTION:Surface plates 1, 2 are formed in a rectangular shape by pressing, and a zigzag passage 8 is formed by pressing at a passage unit 3 interposed between the plates 1 and 2. Holes 6, 7 communicating with the passage 8 are provided at positions corresponding to both ends of the passage 8 of the unit 3 at the plate 1, and an inlet port 4 and an outlet port 5 are attached to the holes 6, 7. Cooling medium of fluid heat medium fed from the port 4 is fed through the passage B of the plate 3 to carry heat energy stored at the plate 2, and to discharge from the port 5 of the plate 1. The plates are formed at a round corner R at one side of its sectional face. When the plates 1, 2 and the plate 3 are disposed in a laminated state and brazed, a brazing material reservoir 9 is generated via the round R of the end face to flatly finish the end face.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a heat sink that is applied to equipment that generates heat, such as electronic equipment, and recovers the heat generated.

[Conventional technology]

-IIIQ, the heat sink has the function of absorbing excess thermal energy. For such a heat sink, a thick plate made of a good heat conductor such as metal is cut with a flow channel groove using a machine tool such as a milling machine, and a cover plate is brazed onto the thick plate so as to cover the flow groove. There is also a structure in which a thin metal plate is press-formed to form a channel-shaped recess, and a lid plate is then bonded to the thin metal plate to cover the recess. something is known.

[Problem to be solved by the invention]

However, the conventional heat sink described above has the following problems due to the performance of the machine tool used and the manufacturing cost. In other words, it is not possible to form a complex groove shape in the plate material, it is impossible to form a narrow and deep channel in the plate material, and the shape of the groove formed in the plate material is limited to a planar channel, and it is not possible to form a narrow and deep channel in the plate material. It is not possible to create a flow path. Furthermore, it takes too much effort and time to form the flow path.
As a result, it cannot be mass produced and becomes expensive.

Alternatively, when manufacturing a heat sink, when joining the cover plate and the flow path forming plate by brazing, as shown in FIG. The plates 71, 72, 73, and 74 are joined with the soldering material 75 in between, but as shown in FIG. At the same time, there is a shortage of brazing material in this part, and a phenomenon of shrinkage due to shrinkage of the brazing material occurs during solidification, causing the joint 7
A gap 78 is likely to be formed between the parts 7 and 7, which increases the defect rate during manufacturing due to poor bonding, and causes leakage of cooling fluid due to causes such as pinholes occurring at the joint between the lid plate and the flow path forming plate. This tends to cause problems in pressure resistance at the joint between the lid plate and the flow path forming plate, and there is a risk of damage to the joint when high cooling fluid pressure is applied. In order to avoid these drawbacks, as shown in FIG.
Although countermeasures have been taken to reduce the number of defects to 5, an increase in costs cannot be avoided due to the increase in processing steps.

The purpose of this invention is to solve the above-mentioned problems, and the heat sink body itself is composed of a plurality of plate materials as a whole, and various processing such as contour shape, flow path, communication hole, etc. is formed by pressing each plate material. However, by joining these adjacent plates by brazing, etc., it is possible to have a degree of freedom in designing the shape and structure of the flow path, and the processing can be done in a short time. It is an object of the present invention to provide a heat sink that can be manufactured at low cost.

[Means to solve the problem]

In order to achieve the above object, the present invention is configured as follows. That is, the present invention includes two surface plates each having an inlet port and an outlet port formed on at least one of them, and a surface plate that is arranged between the two surface plates in a laminated manner and joined to each other, and that allows inflow from the inlet port. The present invention relates to a heat sink comprising a flow path plate having a flow path formed by press punching through which a fluid heat medium can flow out to the outlet port.

Further, the flow path is constituted by a meandering flow path.

That is, the channel body may be composed of a single channel plate having a meandering channel, or may be composed of a plurality of channel plates laminated and bonded to each other and each having a meandering channel of the same shape. You may.

Alternatively, in a state in which a plurality of channels are formed in the channel plate and a plurality of the channel plates are stacked, at least one channel in one of the adjacent channel plates and at least one channel in the other channel plate are adjacent to each other. The two channels are in communication with each other.

Alternatively, the flow path plate has two small holes that communicate with the flow paths of the flow path plates on both sides adjacent to each other and have different flow directions of the fluid heat medium.

In some cases, the channel system consisting of the inlet port, the outlet port, and the channel formed in the channel plate can be formed into a plurality of channel systems through which fluid heat carriers having different temperatures flow.

Furthermore, this heat sink is manufactured by a manufacturing method comprising a press punching process, a surface modification treatment process, an assembly process, and a bonding process.

[Effect]

Since the heat sink according to the present invention is configured as described above, it has the following effects. That is, in this heat sink, an artificial port and an outlet port are provided on either one of two surface plates, and a flow channel body in which a flow channel is formed by punching is bonded in a laminated manner between the two surface plates. Therefore, the fluid heat medium flowing in from the artificial port flows through the flow path formed by pressing the flow path body and flows out from the outlet port of the surface plate. During this time, the thermal energy conducted to the channel body through the surface plate is absorbed by the fluid heat medium and carried out to the outside of the heat sink.

In manufacturing this heat sink by press punching, when stacking the flow channel plates, a brazing material is attached and heated to join them, but the punch radius that occurs on the cut surface of the press punched flow channel plates is The optimum value has been determined experimentally. That is, if the punch radius produced on the cut surface of the pressed channel plate is 0.1 mm to 0.5 mm, then
When flow path plates are laminated, brazing with a clean solder pool on the end faces forms the end faces.

When the channel body is composed of a single channel plate having a meandering channel, or when it is composed of a plurality of channel plates laminated and joined to each other and each having a meandering channel of the same shape, the inlet The fluid heat transfer medium that flows in from the port flows through the flow path and exits from the outlet port. When constructed from a plurality of channel plates, a narrow (deep) channel can be constructed.

Two types of press punching patterns are used to form a channel body, in which when two channel plates are stacked, the channel in one channel plate communicates with the two channels in the other channel plate. When flow path plates are alternately stacked and bonded, the fluid heat medium that flows in from the inlet port branches or merges each time it passes through the flow path and reaches the outlet port. In this case, the flow path has a so-called offset fin type, so that the heat absorption efficiency is good.

In addition, the flow channel body is made by joining flow channel plates with different press punching patterns on both sides of a flow channel plate having a pair of small holes, and stacking them so that the flow direction of the heat transfer medium through the small holes is different. In the case of bonding, the fluid heat medium flows through the inlet port and absorbs heat through the flow path of the flow path plate formed by pressing out the flow path, and the flow path plate with small holes forms. The liquid then descends or ascends through the small hole and flows through a channel formed in another stamping pattern formed in the next channel plate. In this case, two types of press punching patterns may be prepared and used alternately each time flow passage plates with flow passages formed thereon are stacked.

If the inlet port, the outlet port, and the flow path formed in the flow path body are two systems through which fluid heat transfer media with different temperatures flow, the fluid heat transfer medium flowing from the inlet port of one system flows through the flow path. While circulating around the body, heat is exchanged with a fluid heat medium of a different temperature that flows in from the inlet port of the other system,
It flows out from the exit port of each system. in this case,
A heat sink can act as a heat exchanger,
A heat sink can be used as a heat exchanger.

〔Example〕

Embodiments of the heat sink according to the present invention will be described below with reference to the drawings. In each drawing, the same reference numerals are given to parts having the same configuration and the same function, and redundant explanation will be omitted.

FIG. 1(A) and FIG. 1(B) are an exploded perspective view and an exploded enlarged view of essential parts of an embodiment of the heat sink according to the present invention, showing the state of the components before joining. The surface plate 1.2 is formed into a rectangular shape as shown in the figure by processing such as press punching. A meandering channel 8 is formed in the channel body 3 sandwiched between the surface plates 1.2 by press punching.

The surface plate 1 is provided with holes 6.7 communicating with the channel 8 at positions corresponding to both ends of the channel 8 of the channel body 3. Preferably, this hole 6.7 is also formed by press punching. An inlet port 4 and an outlet port 5 are attached to the holes 6.degree.7 in the surface plate 1.

FIGS. 2(A) and 2(B) are a perspective view and an enlarged end view of a heat sink completed by joining the components shown in FIG. 1(A).

The cooling medium, which is a fluid heat medium, flows in from the artificial port 4, passes through the flow path 8 of the flow path plate 3, carries out the thermal energy stored in the surface plate 2, and flows out from the outlet port 5 of the surface plate l. .

FIG. 1(B) shows press punched cross sections of the surface plates 1 and 2 and the channel plate 3, and each plate has one side of the cut surface (
A punching radius R is formed on the upper side in the figure. In the illustrated example, the press die and punching speed are adjusted so that the height H of the punching radius R is 0.1 to 0.5 mm. Surface plate 1 with punched radius R formed in this way
．． 2 and the channel plate 3 are arranged and bonded in a laminated manner as shown in FIG. 2(B), so that the surfaces 10 facing each other are brazed. At this time, a solder pool 9 is generated on the end surface of the heat sink due to the punch radius R, and the end surface is finished flat by brazing.

FIG. 3(A) is an exploded perspective view showing the state of components before joining of another embodiment of the heat sink according to the present invention, and FIG. 3(B) is a channel plate of the heat sink of FIG. 3(A). It is an end enlarged view showing a part of.

The face plate 1.2 connects the inlet port 4 and the outlet port 5 to the hole 6.
．． It is installed on 7. In this example, the laminated flow path vi,
Reference numeral 13 denotes channel plates 13a and 13b in which meandering channels 8 of the same shape are formed by press punching.

It is formed by arranging a plurality of sheets 13c and 13d in a stacked manner and joining them. Therefore, compared to the flow path 8 shown in FIG. 1(A), the flow path of the laminated flow path plate 13 can have a depth twice as many as the number of flow path plates. , suitable for constructing narrow and deep channels.

FIG. 3(B) shows a channel plate 1 constituting the laminated channel plate 13.
Parts of 3a, 13b, 13c, and 13d are shown,
Each channel plate 13a, 13b, 13c.

13d shows the case where the plate material is punched out by fine blanking by punching from both the upper and lower sides, and punching radiuses R are formed on both sides of the plate. Brazing is performed on each channel plate 13B, 13b at step 10.

When 13c and 13d are joined together, a solder pool 9 is formed between the cutout radiuses R of adjacent channel plates, so that the end face of the laminate, that is, the laminated channel plate 13, has a good finish. In this case, it is desirable that the punching radius be approximately 1/2 of the punching radius R shown in FIG. 2(B).

FIG. 4(A) is an exploded perspective view showing still another embodiment of the heat sink according to the present invention, in which an offset flow path is constructed, which is another form of the three-dimensional flow path of the heat sink shown in FIG. 3(A). be done. FIG. 4(B) is a plan view showing each channel plate constituting the laminated channel plate 23 of the heat sink of FIG. 4(A).

The face plate 1.2 is configured with an artificial port 4 and an outlet port 5, each mounted in a hole 6.7.

It has the same structure as the top plates 1 and 2 shown in FIG. 1(A). In this embodiment, the laminated channel plate 23 is composed of a plurality of channel plates, and in the figure, as an example, the one-layer channel plate 23 includes five channel plates 23a.

It is formed by joining 23b, 23c, 23d, and 23g. In this figure, channel plates 23a and 23c.

23e is formed in the flow path 28 of the same shape,
Of course, channels of different shapes may be formed. Here, a plurality of elongated channels 28a, 28C, 28e of the same shape are formed by press punching in a regular arrangement in the channel plates 23a, 23c, 23e. The positions of the channels in each channel plate are exactly the same. The channel plate 23b sandwiched between the channel plate 23a and the channel plate 23C and the channel plate 23d sandwiched between the channel plate 23C and the channel plate 23e have the same shape. The patterns of the channels 28b and 28d formed in the channel plates 23b and 23d, which may be formed in the channels 28b and 28d, are formed into different shapes by press punching. That is, the channel plates 23a, 23
c, 23e, each elongated channel 28a, 28c,
28e communicates with the channels 28b and 28d of the other vertically adjacent channel plates 23b and 23d at two locations so as to serve as ports on the inlet side and outlet side.

Therefore, the cooling medium flowing in from the inlet port 4 flows into the channel plate 2.
Enter the upper left channel 28a of 3a and go to the next channel plate 23b.
Pass through the upper left channel hole 28b to the next channel plate 23.
It enters the upper left channel 28C of c, and also enters the channel Fi, 2
3a from the right end of the upper left channel 28a to the channel plate 23b.
It also flows into the flow path 28b in the second row of the uppermost stage. This flow path 2
8b, the cooling medium flows into the channel 28a of the channel plate 23a and the channels 28c and 28d of the channel plate 23C.

As mentioned above, the cooling medium flowing in through the inlet port 4 is
Each channel plate 23a, 23b, 23c one after another
.

A plurality of channels 28a are formed in 23d and 23a.

It flows separately into 28b, 28c, 28d, and 28e, and finally joins the flow path 28a communicating with the hole 7 on the outlet side of the flow path plate 23a again and flows out from the outlet port 25.

FIG. 4(C) shows these channel plates 23a, 23b, 23
FIG. 4 is a partial end view showing a flow path plate 23 of a heat sink when it is constructed by laminating layers 23c, 23d, and 23e. This figure 4 (
C) is a view similar to FIG. 2(B), in which the laminated flow path plates and the surface plates 1.2 laminated above and below these are joined by brazing as in the previous embodiment. .

FIG. 5(A) is an exploded perspective view showing still another embodiment of the heat sink according to the present invention having a three-dimensional flow path;
Figure (B) shows the laminated flow path plate 3 of the heat sink in Figure 5 (A).
The top plate 1.2 in which the port 4 and the outlet bow 15 are connected by a hole 6.7 is the same as the top plate 1.2 shown in FIG. In this embodiment, the laminated channel plate 33 includes three channel plates 33 a, 33 b,
Consisting of 33 c. The flow path plate 33b located in the center has a function as a type of partition plate, and has two communication holes 38b,
38b are provided, and the flow directions of the cooling medium through these communication holes are different as will be described later.

A meandering channel 38a communicating with the inlet port 4 is formed in the channel plate 33a, and a hole 39a communicating with the outlet port 5 is also formed.

Similarly, the channel plate 33c has a meandering channel 38c that communicates with the communication hole 38b at one end and communicates with the communication hole 38b at the other end.
is formed.

Therefore, the cooling medium flowing in from the inlet port 34 flows through one end of the flow path 38a of the flow path plate 33a, reaches the other end, descends through the communication hole 38b of the separator plate 33b, and flows into the flow path 38a of the flow path plate 33a.
It flows into one end of the channel 38c of C. The cooling medium that has flowed through the channel 38c and reached the other end flows through the channel 38 of the channel plate 33b.
b, reaches the hole 39a of the channel plate 33a, and flows out from the outlet port 5. In this example, the laminated flow path plate 33 is composed of three flow path plates, but the number of stages of flow path plates may be increased by stacking another flow path plate via a separator plate. For the channel bodies 33a, 33b, and 33C, it is sufficient to consider the combination of the positions of the end portions of the channels and the positions of the communicating holes, and it is possible to obtain a laminated channel plate 33 with a sufficient number of stages.

FIG. 6(A) is an exploded perspective view showing another embodiment of the heat sink having a three-dimensional flow path according to the present invention, and FIG.
B) is a plan view showing each channel plate forming the laminated channel plate of FIG. 6(A). The heat sink in this embodiment is
Two channels 48 on the surface plate 41 and 42 and the laminated channel plate 43
．． Two sets of fluid medium flow path systems consisting of 48' are made to function as a heat exchanger in which heat exchange is performed between the two fluid heat media by flowing two fluid heat media having different temperatures through these cooling medium flow path systems. This is an example. Accordingly, the surface plate 41 is also provided with two sets of inlet ports 4 and outlet ports 5. That is, the inlet port 4 and the outlet port 5 are connected to one set of holes 6, 7 formed in the surface plate 41, and the inlet port 4 and the outlet port 5 are connected to the other set of holes 6,7. ing.

The laminated flow path plate 43 in this embodiment comprises two sets of flow paths by combining two types of flow path plates.

That is, in the laminated channel plate 43, one channel plate 43a,
43c, 43e, and 43g are a pair of communication holes 49a, 49c, and 49a at one corner of the channel plate.

49g is formed, and a single meandering flow path 48a serving as an inlet end and an outlet end is formed at the other corner.

48c, 48e, and 48g are formed. In the laminated channel plate 43, each of the channel plates 43a, 43c,
Other channel plates 43b and 43 located between 43e and 43g
d and 43f function as a separator, and the communication hole 49a
, 49c, 49e, and 49g and at positions corresponding to both ends of the meandering channels 48a, 48c, 48e, and 48g, respectively. It is preferable to form the communicating holes at the four corners in symmetrical positions, since this allows common parts to be used in processing. Since the laminated flow path plate 43 can be configured with two types of flow path plates, the flow path plate can be easily manufactured by press punching at an extremely low cost, and manufacturing management of the half-finished product is easy.

These two types of channel plates are alternately stacked, and the channel plates 43a, 43c, 43e, and 43g having meandering channels 48a, 48c, 48e, and 48ff are further alternately stacked in alternate directions. . That is, one fluid heat medium flowing from one set of inlet ports 4 flows through the flow path plate 43a.
passes through the communication hole 49a of , and the communication hole 49b of the flow path Fi43b, and reaches one end of the meandering flow path 48c of the flow path plate 43C, and a part of the fluid heat medium flows through this flow path 48c. The other fluid heat medium further descends to the communication hole 49 of the channel plate 43d.
It passes through the communication hole 49e of the d2 flow path plate 438 and the communication hole 49f of the flow path plate 43f, and reaches one end of the meandering flow path 48g of the flow path plate 43g. The medium flowing through this meandering flow nt 4 B g passes through the communication hole 49f of the channel plate 43f, the communication hole 49e of the channel plate 43e, the communication hole 49d of the channel plate 43d, and the channel plate 43.
The other end of the meandering channel 48C of c, the communication hole 49 of the channel plate 43b
b. The outlet port 5 passes through the communication hole 49a of the flow path plate 43a.
flows out from.

Similarly, the fluid heat medium flowing in from the other set of inlet ports 4 flows through the meandering flow path 48e of the flow path plate 43a and the flow path plate 43e, and flows out from the outlet port 5.

In this way, fluid heat carriers with different temperatures are transferred to the laminated flow path plate 4.
3, and heat exchange takes place between them. Moreover, since the flow paths are arranged alternately as in this example, heat exchange between both media can be performed efficiently.

FIG. 7 is a block diagram showing in a flowchart the manufacturing process for manufacturing the heat sink according to the present invention.

That is, first, for the plate-shaped material constituting the surface plate and the channel plate, the outline shape, the channel, the meandering channel, and the communication hole are all formed by press punching (step 50). The material that has been punched is subjected to a surface modification treatment consisting of a surface roughening treatment and a subsequent cleaning treatment (step 51). After surface modification treatment is applied to the plate-shaped material, holes are formed in the inlet port and outlet port parts during the assembly process for joining each surface plate and the channel plate. At the same time, as a brazing material assembling process, a brazing material for bonding is assembled between the surface plate and the channel plates and between the channel plates (step 52).

After this assembly process is completed, the process moves to the joining process of each surface plate and each flow path plate (step 53). In step 53, first, the entire assembly of each surface plate and each flow path plate is heated. (heating process), the assembled brazing material melts and brazes each surface plate and each channel plate, or between channel plates (
(brazing process), and finally, each surface plate and each channel plate that are joined to each other by brazing are cooled (cooling process). The heat sink according to the present invention is completed through the above steps.

Figure 8 shows the thickness of the surface plate and channel plate during press punching to avoid misalignment, depressions, soldering, and brazing when the surface plate and channel plate are brazed. FIG. 3 is a diagram showing the relationship of only extraction.

FIG. 8 is a region diagram showing the relationship between the plate thickness (plotted on the horizontal axis) of the plate-shaped material forming the surface plate and the channel plate and the height of the punch radius R (plotted on the vertical axis).

In Fig. 8, the hunting area indicates the optimum area for brazing, and the punching height H1, that is, the length of the punching radius R in the thickness direction, is 0.51 m1
1 or more, 0.1 mm to 0.5 mm (D range is sufficient, and if the plate thickness is in the range of 0.1 mm to 0.5 mm, then 0.11 mm or more) It can be seen that it is sufficient to form the punching radius R up to the length of the plate thickness.Here, only the punching radius R should be made larger in the area above the hunting area shown in Fig. 8, that is, relative to the plate thickness. As shown in FIG. 9, in the area beyond which the brazing is applied, a phenomenon occurs where the brazing becomes inconsistent and a depression 80 is likely to occur.Also, in the area below the hunting area shown in FIG. In a region where only the punching radius R is too small relative to the plate thickness, wax sag 76 and solder shrinkage 79 tend to occur as shown in FIG. 10.

〔Effect of the invention〕

The heat sink according to the present invention is configured as described above and has the following effects. That is, the heat sink according to the present invention includes two surface plates having an inlet port and an outlet port formed on at least one of them, and the surface plates are arranged in a laminated manner between the two surface plates and joined together, and there is no flow from the inlet port. Since the structure is composed of a channel plate having a channel formed by press punching that allows the inflowing fluid heat medium to flow out to the outlet port, it is necessary to form the channel in the channel plate without using the conventional channel. There is no need to form grooves in the channel plate by cutting. Therefore, the shape of the flow path can be formed more complexly and with higher precision than when the flow path is formed in the flow path plate by cutting.

In addition, as the length of the flow channel becomes longer, the processing time increases in proportion to the length in the case of cutting, but in the case of press punching, it can be formed in - times of press punching operations, so the processing time increases. is shortened regardless of the length of the flow path.

Furthermore, in the case of press punching, the depth of the channel can be increased by increasing the number of stacked flow path plates, and the processing time increases depending on the depth, as in the case of cutting. In addition, there is no limit to the depth as in the case of cutting.

In the case of cutting or press forming, it was not possible to create a three-dimensional flow path because the shape of the groove was limited to a two-dimensional shape, but it is possible to stack multiple press-cut flow path plates. In some cases, the structure of the channel itself can be configured into a three-dimensional structure.

In this way, in manufacturing this heat sink, the flow path plate forming the heat sink is formed by press punching, and then manufactured through the surface modification treatment process, assembly process, and bonding process, so that the flow path plate constituting the heat sink can be shortened. Since a large number of layers can be formed in one time, it has excellent mass productivity and can be manufactured at low cost.

The contour shape of the channel plate itself can be formed by press punching from the plate material, but the punch radius generated on the cut surface of the press punched channel plate is 0.1i + a.
If the length is 0.5 m, we know from experience that when flow channel plates are stacked and joined by brazing, a clean solder will form on the end face with a pool of solder on the end face, so there will be no chance of wax flowing out from the joint. The sagging phenomenon and the pulling phenomenon caused by the shrinkage of the brazing filler metal that occurs when the brazing filler metal solidifies does not occur, and no gaps are created in the joints. The defect rate during manufacturing is low, there is no leakage at the joints with the lid plate or channel plate, and there is no risk of damage to the joints even when high pressure is applied to the fluid heat transfer medium. do not have.

[Brief explanation of the drawing]

FIG. 1(A) is an exploded perspective view showing the state of the components before joining of an embodiment of the heat sink according to the present invention; FIG.
B) is an exploded end enlarged view showing the state of the components of the embodiment of the heat sink in FIG. 1(A) before joining; FIG. 2(A)
is a perspective view showing the completed state of the heat sink shown in Fig. 1, Fig. 2 CB) is an enlarged view of the end of Fig. 2 (A>),
FIG. 3(A) is an exploded perspective view showing the state of the components before joining of another embodiment of the three-dimensional flow path of the heat sink according to the present invention, and FIG. 3(B) is the heat sink of FIG. 3(A). FIG. 4(A) is an enlarged end view showing a part of the flow path plate of FIG. FIG. 4(B) is a plan view of each channel plate of the heat sink shown in FIG. 4(A), and FIG. 4(C) is an exploded perspective view showing the state of FIG. 4(B). Enlarged view of the end after joining the plates, Figure 5 (A
) is an exploded perspective view showing the state of the components before joining of another embodiment of the three-dimensional flow path of the heat sink according to the present invention;
Figure (B) is a plan view of each passage plate of the heat sink shown in Figure 5 (A), and Figure 6 (A) is a diagram of yet another embodiment in which the heat sink according to the present invention can function as a heat exchanger before being bonded. 6 (B) is an exploded perspective view showing the state of the component parts.
Figure (A) is a plan view of each channel plate of the heat sink shown in Fig. 7.
The figure is a block diagram showing the manufacturing process in a flowchart format for manufacturing the heat sink according to the present invention, and Figure 8 shows the thickness and height of the punching radius of the plate-like material forming the surface plate and flow path plate in the manufacture of the heat sink. Figure 9 is a schematic explanatory diagram showing an example of the state of the flow passage plate of a heat sink with a large extraction radius, and Figure 10 is a diagram showing another state of the flow passage plate of a heat sink with a small extraction radius. A schematic explanatory diagram showing an example, FIG. 11 is a schematic explanatory diagram showing another example of the state before bonding of the flow path plate of the heat sink with a small extraction radius, and FIG. 12 is a bonding of the flow path plate of the heat sink shown in FIG. 11. A schematic explanatory diagram showing the subsequent state, and FIG. 13 are schematic explanatory diagrams showing still another example of the state after the flow path plates of the conventional heat sink are joined. 1.2, 41.42--Surface plate, 3, 13a. 13b, 23a, 23b, 23c, 23d, 23e, 3
3a, 33b, 33c, 43a, 43b. 43c, 43d--channel plate, 13, 23, 33°4
3-----Laminated channel plate, 4-----One person port, 5-----Exit port, 6.7...-Thank you, 8
．． 18.28.38, 48. 48'------
-・Flow path.

Claims (6)

[Claims] (1) Two surface plates each having an inlet port and an outlet port formed on at least one of them, and fluid heat flowing from the inlet port by arranging and bonding the surface plates in a laminated manner between the two surface plates. a flow path plate having a flow path formed by press punching through which a medium can flow out to the outlet port. (2) The heat sink according to claim 1, wherein the flow path is a meandering flow path. (3) In a state in which a plurality of channels are formed in the channel plate and a plurality of the channel plates are stacked, at least one channel in one of the adjacent channel plates and at least one channel in the other channel plate are stacked. 1
The heat sink according to claim 1, wherein the two flow paths communicate with each other. (4) The heat sink according to claim 1, wherein the flow path plate has two small holes that communicate with the flow paths of the adjacent flow path plates on both sides and have different flow directions of the fluid heat medium. (5) The heat sink according to claim 1, wherein the flow path system including the inlet port, the outlet port, and the flow path formed in the flow path plate is formed into a plurality of flow path systems through which fluid heat carriers having different temperatures flow. (6) The heat sink according to claim 1, comprising a press punching step, a surface modification treatment step, an assembly step, and a bonding step.