WO2022057386A1 - 环境监测系统 - Google Patents

环境监测系统 Download PDF

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Publication number
WO2022057386A1
WO2022057386A1 PCT/CN2021/103861 CN2021103861W WO2022057386A1 WO 2022057386 A1 WO2022057386 A1 WO 2022057386A1 CN 2021103861 W CN2021103861 W CN 2021103861W WO 2022057386 A1 WO2022057386 A1 WO 2022057386A1
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WO
WIPO (PCT)
Prior art keywords
sampling
pipeline
gas
humidification
monitoring system
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Application number
PCT/CN2021/103861
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English (en)
French (fr)
Inventor
王须宝
丁云霄
Original Assignee
长鑫存储技术有限公司
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Publication date
Application filed by 长鑫存储技术有限公司 filed Critical 长鑫存储技术有限公司
Priority to US17/449,448 priority Critical patent/US11854845B2/en
Publication of WO2022057386A1 publication Critical patent/WO2022057386A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
    • B08B9/027—Cleaning the internal surfaces; Removal of blockages
    • B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/89—Arrangement or mounting of control or safety devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F6/00—Air-humidification, e.g. cooling by humidification
    • F24F6/12—Air-humidification, e.g. cooling by humidification by forming water dispersions in the air
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions

Definitions

  • the embodiments of the present application relate to the field of semiconductors, and in particular, to an environmental monitoring system.
  • the gas used to clean the sampling pipeline of the existing environmental monitoring system is mainly dry gas, but some pollutants remaining in the sampling pipeline are difficult to be quickly cleaned by the dry gas, resulting in long cleaning time, long system sampling cycle time, and low system sampling frequency. Moreover, because it is difficult to thoroughly clean some residual pollutants with dry gas, it will also cause the problem of inaccuracy of the gas pollutant data obtained by sampling and analysis.
  • the embodiment of the present application provides an environmental monitoring system, which is beneficial to quickly clean the residual pollutants in the pipeline, shorten the cleaning time of the pipeline, speed up the sampling cycle time of the system, increase the sampling frequency of the system, and improve the accuracy of the gas pollutant data obtained by sampling and analysis .
  • An embodiment of the present application provides an environmental monitoring system for monitoring the concentration of air pollutants in multiple process areas in a clean room, including: a sampling device for collecting environmental samples in the process areas, and the sampling device includes system sampling a pipeline, the environmental sample includes air; an analysis device, communicated with the output end of the system sampling pipeline; an air supply device, communicated with the system sampling pipeline, for providing purging to the system sampling pipeline Gas; a humidification device for providing water mist, the humidification device is communicated between the gas supply device and the system sampling pipeline.
  • the humidifying device provides water mist, and utilizes the characteristic that some residual pollutants in the pipeline are easily soluble in water to quickly clean the residual pollutants in the pipeline.
  • the cleaning time is shortened, thereby increasing the sampling frequency; after one sampling and before another sampling, the residual pollutants in the sampling pipeline of the system are more thoroughly cleaned by the humidification device, so as to ensure that each sampling is not affected by the air pollutants in the process area of the last sampling.
  • the interference is beneficial to ensure that the air pollutant data in the process area obtained by each sampling and analysis has higher accuracy.
  • FIG. 1 is a schematic structural diagram of an environmental monitoring system provided by an embodiment of the present application.
  • FIG. 2 and FIG. 3 are schematic partial structural diagrams of an environmental monitoring system provided by an embodiment of the application.
  • FIG. 4 is a schematic structural diagram of another environment monitoring system provided by an embodiment of the present application.
  • FIG. 1 is a schematic structural diagram of an environment monitoring system provided by an embodiment of the present application.
  • the environmental monitoring system is used to monitor the concentration of air pollutants in the process area 10 in the clean room, including: the clean room has a plurality of process areas 10 ; a sampling device (not shown) is used to collect environmental samples in the process area 10 , the sampling device includes the system sampling line 114, and the environmental sample includes air; the analysis device 12 is connected to the output end of the system sampling line 114; 114 provides purge gas; humidification device 14 is used to provide water mist, and humidification device 14 is communicated between the gas supply device 13 and the system sampling pipeline 114 .
  • the sampling device includes a sampling pump 111, the sampling pump 111 is communicated with the process area 10, and the sampling pump 111 is used to extract air in the process area.
  • the sampling device further includes a buffer box (not shown), which pre-mixes and stabilizes the environmental samples collected by the sampling pump 111 to ensure that the air pressure of the environmental samples used for analysis is within a preset range to avoid sampling The pressure fluctuation caused by the intermittent sampling of the pump 111 is avoided, and the data analysis of the analysis device 12 is prevented from being affected by the pressure fluctuation, so as to ensure the accuracy of the air pollutant concentration data obtained by the analysis device 12 .
  • a buffer box not shown
  • the analysis device 12 can perform data analysis when the pressure in the buffer tank is within a preset range, and the buffer tank can have a pressure calculation function; in addition, the buffer tank can have a pressure relief port, so that the pressure in the buffer tank suddenly increases before it can be carried out. Part of the pressure is released during data analysis to ensure high accuracy of the concentration data obtained by analysis.
  • the type of the sampling pump 111 includes a diaphragm pump.
  • the conveying pipeline of conveying gas is separated from the live column by the diaphragm, so as to prevent the surface contaminants of the live column from contaminating the conveyed gas, thereby ensuring the accuracy of the concentration data obtained by the analysis device 12 .
  • the analysis device 12 includes a plurality of analysis modules, each analysis module is used for analyzing the concentration of a corresponding type of air pollutant, and the plurality of analysis modules can simultaneously analyze the environmental samples collected by the sampling device at a time.
  • the concentrations of different types of air pollutants can be obtained at the same time, without the need for successive analysis, which is beneficial to shorten the overall analysis time of air pollutant concentrations; in addition, the sampling times of environmental samples can be reduced, thereby further shortening the monitoring time of air pollutant concentrations. , which is conducive to the rapid monitoring and rapid treatment of air pollutant concentrations.
  • the analysis device 12 includes an acid analysis module, an ammonia analysis module, a sulfur analysis module, and an organic substance analysis module, which are respectively used for monitoring the acid gas concentration, ammonia gas concentration, sulfur dioxide concentration, and organic substance concentration in the process area 10 .
  • the analysis device may also include analysis modules for other air pollutants. It should be noted that any gas that may affect the process or product yield can be regarded as air pollutants, and the types of air pollutants may vary in different process areas.
  • the sampling device further includes a plurality of single sampling pipelines 113 , each process area 10 is communicated with a single sampling pipeline 113 , and the single sampling pipelines 113 communicated with different process areas 10 are different, and the system sampling pipeline 114 can be Connected with any single sampling line 113, the output end of the system sampling line 114 is communicated with the analysis device 12; the sampling device further includes: a sampling valve 115, the sampling valve 115 is used to connect or block the single sampling line 113 and the system sampling Line 114.
  • the system sampling line 114 is a continuous channel. On the extension path of the system sampling line 114 , the system sampling Lines 114 may communicate with each single sampling line 113 through a sampling valve 115 .
  • the sampling valve 115 blocks the single sampling line 113 and the system sampling line 114, the gas in the process area 10 can only enter the single sampling line 113, but cannot reach the system sampling line 114; when the sampling valve 115 conducts the single sampling line 113
  • the sampling pipeline 113 and the system sampling pipeline 114 are connected, the gas in the process area 10 can reach the system sampling pipeline 114 through the single sampling pipeline 113 .
  • one or more sampling valves 115 may be in the state of conducting the single sampling line 113 and the system sampling line 114, that is to say, the analysis device 12 can be used to analyze a single process area.
  • the air pollutant concentration of 10 can also be used to analyze the average air pollutant concentration of multiple process areas 10 .
  • a plurality of sampling valves 115 are fixed on the valve disc 16a.
  • the sampling valve 115 can be set at the end of the single sampling line 113 facing the system sampling line 114, so as to ensure that the single sampling line 113 has a higher cleanliness, and the sampling valve 115 itself can be cleaned to a certain extent.
  • the environmental monitoring system further includes a control device (not marked) for controlling the sampling device to collect environmental samples in the preset process area 10 , and the control device is also used for controlling the valve state of the sampling valve 115 , that is, the control device passes the The valve state of the sampling valve 115 is controlled to switch the sampling object of the process area 10 , so as to obtain the air pollutant concentration data of the specific process area 10 .
  • control device is also used to set the concentration threshold of at least one process area 10 ;
  • the environmental monitoring system further includes: a warning device (not shown), used for the concentration threshold of any process area 10 exceeding the concentration threshold of the process area 10 .
  • a warning message is issued when the concentration threshold is preset. In this way, it is beneficial to quickly clean the specific process area where the air pollutants exceed the standard.
  • the gas supply device 13 is communicated with the system sampling pipeline 114, and the gas supply device 13 is used for supplying purging gas, and using the purging gas to purge the system sampling pipeline 114, and sending the purged gas into the Analysis device 12 .
  • the control device can control the air supply device 13 to stop purging and perform the next sampling, so as to ensure the environment of the system sampling pipeline 114 during the next sampling.
  • the preset requirements are met, so as to prevent the environment of the system sampling pipeline 114 from interfering with the analysis of the concentration of air pollutants in the process area 10 and ensure the accuracy of the detection results.
  • the purging of the system sampling pipeline 114 by the air supply device 13 will also affect the adsorption properties of the inner wall of the system sampling pipeline 114 .
  • the dirtier the inner wall, the more air pollutants on the inner wall of the system sampling pipeline 114 will affect the detection result, that is, the detection value of the air pollutants is high. That is, when cleaning the system sampling line 114, the cleaning time needs to be controlled so that the inner wall of the system sampling line 114 is at a preset clean level.
  • the humidifying device 14 is used to provide water mist, and the humidifying device 14 is connected between the gas supply device 13 and the system sampling line 114 , so that the purge gas enters the system sampling line 114 after passing through the humidifying device 14 .
  • the purging gas contains water mist, because some residual pollutants in the system sampling line 114 are easily soluble in water, so the system can be quickly cleaned
  • the residual contaminants in the sampling pipeline 114 can shorten the cleaning time, thereby increasing the sampling frequency; and after one sampling and before sampling again, the residual contaminants in the sampling pipeline 114 of the system are more thoroughly cleaned by the humidification device 14 to ensure that every time Sampling is not disturbed by the air pollutants in the process area sampled last time, which helps to ensure that the air pollutant data in the process area obtained by each sampling and analysis has higher accuracy.
  • the residual pollutants in the pipeline may specifically be ammonia gas.
  • the humidification device 14 in this embodiment includes: a humidification pipeline 14a, which is connected between the system sampling pipeline 114 and the air supply device 13; a water storage tank 14e, which includes a water storage area 14f and a water storage tank 14e.
  • the gas circulation area 14g communicated with the water storage area 14f, and the humidification pipeline 14a is communicated with the gas circulation area 14g; the oscillator 14i, the oscillator 14i is located in the water storage area 14f, and is used for oscillating the water in the water storage area 14f to generate water mist.
  • the humidification device 14 further includes a drying pipeline 14b, the drying pipeline 14b and the humidification pipeline 14a are independent of each other, and the drying pipeline 14b is connected between the air supply device 13 and the system sampling pipeline 114; the valve 14c, It is used to switch between the humidification pipeline 14a and the drying pipeline 14b to communicate with the system sampling pipeline 114 , and the other to be blocked from the system sampling pipeline 114 .
  • the humidification device 14 can be reasonably adjusted to use different pipelines according to different situations.
  • the system sampling pipeline 114 contains residual gas pollutants that are easily soluble in water
  • the humidification pipeline 14a is used
  • the drying pipeline 14b is used.
  • valve 14c can be a solenoid valve.
  • the humidifying device 14 further includes a timing module 14d, and the timing module 14d is used to set the time during which the humidification pipeline 14a and the system sampling pipeline 114 are connected, and the timing module 14d sets the drying pipeline 14b and the system sampling pipeline The time the line 114 is on.
  • the environmental monitoring system of this embodiment further includes a first processing module 15 , and the first processing module 15 controls the valve 14c to switch one of the drying pipeline 14b and the humidification pipeline 14a to sample the system based on the analysis result of the analysis device 12 .
  • the pipelines 114 communicate with each other, and the other is blocked from the system sampling pipeline 114 .
  • the gas supply device 13 purges the gas in the sampling pipeline 114 of the system through the drying pipeline 14b of the humidification device 14 to the analysis device 12, and the analysis device 12 finds that the gas contains gas pollutants that are more soluble in water
  • the first A processing module 15 controls the valve 14c to switch the drying line 14b to the humidifying line 14a, and continues to purge the sampling line 114 of the system.
  • the drying line 14b of the humidification device 14 is switched to the humidification line 14a, which can quickly clean the system sampling line 114. Gas contaminants, reduce cleaning time, and thus increase sampling frequency.
  • the humidification device 14 uses the humidification pipeline 14a or the drying pipeline 14b to communicate with the system sampling pipeline 114 , which can be switched by the timing module 14d or by the first processing module 15 .
  • the water storage tank 14e further includes: a mesh structure 14h, the water storage area 14f and the gas circulation area 14g are communicated through the mesh structure 14h, and the mesh structure 14h can be a metal mesh; ), the water injection port is connected to the water storage area 14f and the external water supply pipeline; the liquid level detection sensor (not marked), when the liquid level detection sensor detects that the water level of the water storage tank 14e is lower than the warning water level, the external water supply pipeline passes the injection The nozzle fills the water storage tank 14e with water.
  • the humidifying device 14 in this embodiment further includes: a circulating pump 14j, which is communicated with the water storage tank 14e, and is used to operate and keep the water in the water storage tank 14e flowing continuously to prevent the growth of bacteria.
  • a circulating pump 14j which is communicated with the water storage tank 14e, and is used to operate and keep the water in the water storage tank 14e flowing continuously to prevent the growth of bacteria.
  • the environmental monitoring system of this embodiment further includes: a humidity sensor, which is disposed at the port of the system sampling line 114 facing the humidification device 14, and is used to detect the humidity of the purge gas in the system sampling line 114; the second processing module, the first The second processing module adjusts the amount of water mist provided by the humidification device 14 according to the humidity sensor display.
  • a humidity sensor which is disposed at the port of the system sampling line 114 facing the humidification device 14, and is used to detect the humidity of the purge gas in the system sampling line 114
  • the second processing module the first The second processing module adjusts the amount of water mist provided by the humidification device 14 according to the humidity sensor display.
  • the humidity sensor 14k and the second processing module 14L may be arranged in the humidification device 14 , and the humidity sensor 14k is arranged at the port of the pipeline of the humidification device 14 facing the system sampling pipeline 114 .
  • the environmental monitoring system further includes: a cleaning pipeline 16 , a first end of which is used for introducing clean dry air (CDA), and a second end of the cleaning pipeline 16 It can be communicated with the single sampling line 16 , and the sampling valve 115 is used to control the single sampling line 113 to communicate with the system sampling line 114 or the cleaning line 16 .
  • CDA clean dry air
  • the sampling valve 115 blocks the single sampling line 113 and the system sampling line 114 , and the gas in the system sampling line 114 cannot pass into the single sampling line 114 In the pipeline 113 or the corresponding process area 10 , at this time, the single sampling pipeline 113 can be cleaned through the cleaning pipeline 16 . In this way, the single sampling pipeline 113 can be guaranteed to have a high degree of cleanliness, thereby preventing the air pollutants in the single sampling pipeline 113 from interfering with the analysis results of the air pollutant concentration in the process area 10 .
  • the environmental monitoring system further includes: an air intake line 17, one end of the air intake line 17 is communicated with the first end of the cleaning line 16, the other end of the air intake line 17 is used for introducing clean gas, and the humidifying device 14 It also communicates between the intake line 17 and the cleaning line 16 .
  • the clean gas humidified by the water mist in the intake line 17 can be used to clean the single sampling line 113 through the cleaning line 16. Because some residual pollutants in the single sampling line 113 are easily soluble in water, the single sampling line can be quickly cleaned. Residual contaminants in the pipeline 113 shorten the cleaning time, thereby increasing the sampling frequency.
  • the air supply device 13 Before sampling the process area 10 again, it is necessary to use the air supply device 13 to purge the system sampling line 114 to remove the air pollutants left in the system sampling line 114 during the last sampling of the process area 10 and avoid the system
  • the air pollutants in the sampling line 114 affect the analysis results of the analysis device 12; in addition, since a small amount of air pollutants cannot be purged and removed by the air supply device 13, it can be backflushed by entering clean gas, thereby sampling the second time
  • the single sampling valve 113 corresponding to the process area 10 of the 2000 is further cleaned, and since there are less residual air pollutants, the impact of backflushing on the analysis results is small.
  • the environmental monitoring system further includes: a ventilation valve 171 , an air outlet line 172 and a cleaning pump 173 , and the ventilation valve 171 is used to control one end of the cleaning line 16 and one end of the air intake line 17
  • the other end of the gas outlet pipe 172 is used to pass clean gas; or, the ventilation valve 171 is used to control one end of the cleaning pipe 16 to communicate with one end of the gas outlet pipe 172, and the other end of the gas outlet pipe 172 is connected to the cleaning pump 173 is connected, and the cleaning pump 173 is used for air extraction.
  • a single sampling line 113 corresponding to other process areas 10 can be connected to the cleaning line 16, and one end of the cleaning line 16 is connected to the air outlet line 172, and the cleaning pump 173 is pumped through the air Make the gas in the single sampling line 113 the same as the ambient gas in the corresponding process area 10, which is convenient for the next sampling; and keep the gas in the single sampling line 113 in a flowing state, so as to avoid the air in the single sampling line 113
  • the pollutants are adsorbed on the inner wall of the single sampling pipeline 113 due to the static gas, thereby ensuring that the single sampling pipeline 113 has high cleanliness, which is beneficial to improve the accuracy of the detection results.
  • air extraction cleaning may extract different air pollutants in the process area 10 in equal or non-proportional proportions, thereby causing inaccurate detection results.
  • the concentration of the air pollutants in the process area 10 will increase or decrease; when the proportions of different types of air pollutants extracted to the total amount of these types of air pollutants are different, the concentration comparison relationship of different types of air pollutants in the process area 10 will change.
  • the backflushing cleaning scheme can eliminate the influence of clean gas on the analysis of air pollutant concentration through calculation, and then accurately obtain the analysis results of air pollutants.
  • the analysis results include the types of air pollutants, the concentration of air pollutants and the concentration ratio of different air pollutants.
  • a humidification device is added between the air supply device and the system sampling pipeline and between the air intake pipeline and the cleaning pipeline, and the humidification device provides water mist, taking advantage of the characteristics of the residual pollutants in the pipeline part being easily soluble in water , to quickly clean the residual pollutants in the pipeline, shorten the cleaning time, and thus increase the sampling frequency; after one sampling, before another sampling, use the humidification device to more thoroughly clean the residual contaminants in the sampling pipeline of the system to ensure that each sampling is not collected.
  • the interference of air pollutants in the process area of one sampling is beneficial to ensure that the air pollutant data in the process area obtained by each sampling and analysis has higher accuracy.
  • the environmental monitoring system includes: a sampling device for collecting environmental samples in the process area, the sampling device includes a system sampling pipeline, and the environmental sample includes air; an analysis device communicates with the output end of the system sampling pipeline; The gas device is communicated with the system sampling pipeline and is used for supplying the purging gas to the system sampling pipeline; the humidification device is used for providing water mist, and the humidification device is connected between the gas supply device and the system sampling pipeline.
  • the humidification device provides water mist, and utilizes the characteristic that some residual pollutants in the pipeline are easily soluble in water to quickly clean the residual pollutants in the pipeline and shorten the cleaning time.

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Abstract

一种环境监测系统，用于监测无尘室内多个制程区域（10）的空气污染物浓度，包括：采样装置，用于采集所述制程区域（10）的环境样品，所述采样装置包括系统采样管路（114），所述环境样品包括空气；分析装置（12），与所述系统采样管路（114）的输出端连通；供气装置（13），与所述系统采样管路（114）连通，用于向所述系统采样管路（114）提供吹扫气体；加湿装置（14），用于提供水雾，所述加湿装置（14）连通在所述供气装置（13）与所述系统采样管路（114）之间；该系统有利于快速清洁管路残留污染物，缩短清洁管路时间，加快系统采样循环时间，提高系统采样频率，提高采样分析得到的气体污染物数据的准确性。

Description

环境监测系统
相关申请的交叉引用
本申请要求在2020年09月16日提交中国专利局、申请号为202010973453.8、申请名称为“环境监测系统”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本申请实施例涉及半导体领域，特别涉及一种环境监测系统。
背景技术
随着半导体工业工序复杂性的增加和产品特征尺寸的微缩，空气污染物对产品的影响成为无尘室环境控制的重点关注问题。
现有环境监测系统清洁采样管路的气体主要为干燥气体，但采样管路中残留有部分污染物难以被干燥气体快速清洁，造成清洁时间长，导致系统采样循环时间长，系统采样频率低的问题；而且由于部分残留污染物用干燥气体难以彻底清洁干净，所以也会造成采样分析得到的气体污染物数据准确性不高的问题。
发明内容
本申请实施例提供一种环境监测系统，有利于快速清洁管路残留污染物，缩短清洁管路时间，加快系统采样循环时间，提高系统采样频率，提高采样分析得到的气体污染物数据的准确性。
本申请实施例提供一种环境监测系统，用于监测无尘室内多个制程区域的空气污染物浓度，包括：采样装置，用于采集所述制程区域的环境样品，所述采样装置包括系统采样管路，所述环境样品包括空气；分析装置，与所述系统采样管路的输出端连通；供气装置，与所述系统采样管路连通，用于向所述系统采样管路提供吹扫气体；加湿装置，用于提供水雾，所述加湿装置连通在所 述供气装置与所述系统采样管路之间。
与现有技术相比，本申请实施例提供的技术方案具有以下优点：
上述技术方案中，通过在供气装置和系统采样管路之间增加加湿装置，加湿装置提供水雾，利用管路中部分残留污染物易溶于水的特性，快速清洁管路残留污染物，缩短清洁时间，从而提高采样频率；在一次采样之后，再一次采样之前，通过加湿装置更彻底的清洁系统采样管路残留污染物，保证每一次采样不被上一次采样的制程区域的空气污染物所干扰，有利于保证每一次采样分析得到的制程区域的空气污染物数据具有更高的准确性。
附图说明
一个或多个实施例通过与之对应的附图中的图片进行示例性说明，这些示例性说明并不构成对实施例的限定，附图中具有相同参考数字标号的元件表示为类似的元件，除非有特别申明，附图中的图不构成比例限制。
图1为本申请实施例提供的环境监测系统的结构示意图；
图2和图3为本申请实施例提供的环境监测系统的局部结构示意图；
图4为本申请实施例提供的另一种环境监测系统的结构示意图。
具体实施方式
为使本申请实施例的目的、技术方案和优点更加清楚，下面将结合附图对本申请的各实施例进行详细的阐述。然而，本领域的普通技术人员可以理解，在本申请各实施例中，为了使读者更好地理解本申请而提出了许多技术细节。但是，即使没有这些技术细节和基于以下各实施例的种种变化和修改，也可以实现本申请所要求保护的技术方案。
图1为本申请实施例提供的环境监测系统的结构示意图。
参考图1，环境监测系统用于监测无尘室内制程区域10的空气污染物浓度，包括：无尘室内具有多个制程区域10；采样装置(未标示)，用于采集制程区域10的环境样品，采样装置包括系统采样管路114，环境样品包括空气；分析 装置12，与系统采样管路114的输出端连通；供气装置13，与系统采样管路114连通，用于向系统采样管路114提供吹扫气体；加湿装置14，用于提供水雾，加湿装置14连通在供气装置13与系统采样管路114之间。
本实施例中，采样装置包括采样泵111，采样泵111与制程区域10连通，采样泵111用于抽取制程区域的空气。
在另一个例子中，采样装置还包括缓冲箱(未标示)，缓冲箱对采样泵111采集到的环境样品进行预混合稳定，保证用于分析的环境样品的气压处于预设范围内，避免采样泵111间断式采样所带来的压力波动，且避免分析装置12的数据分析受到压力波动的影响，保证分析装置12获取到的空气污染物浓度数据的准确性。
其中，分析装置12可在缓冲箱内的压力处于预设范围内时进行数据分析，缓冲箱可具有压力计算功能；此外，缓冲箱可具有泄压口，在缓冲箱内部压力骤然增加而来不及进行数据分析时泄除部分压力，保证分析得到的浓度数据具有较高的准确性。
本实施例中，采样泵111的类型包括隔膜泵。通过隔膜将输送气体的输送管路和活柱隔开，从而避免活柱的表面污染物污染被输送气体，进而保证分析装置12获取到的浓度数据的准确性。
在一个例子中，分析装置12包括多个分析模块，每一分析模块用于分析对应类型的空气污染物浓度，多个分析模块可同步分析采样装置单次采集的环境样品。如此，可同时获取不同类型的空气污染物浓度，无需进行逐次分析，有利于缩短空气污染物浓度的整体分析时间；此外，能够减少环境样品的采样次数，从而进一步缩短空气污染物浓度的监测时间，有利于实现空气污染物浓度的快速监测以及快速处理。
在另一个例子中，分析装置12包括酸分析模块、氨分析模块、硫分析模块以及有机物质分析模块，分别用于监测制程区域10内的酸性气体浓度、氨气浓度、二氧化硫浓度以及有机物质浓度，避免酸性气体以及氨气影响金属导线的形成，避免酸性气体与氨气反应生成的盐类影响产品良率，避免二氧化硫与氨 结合而导致光罩表面形成雾化，进而避免雾化导致的产品良率下降以及重工率升高。
在其他实施例中，分析装置还可以包括针对其他空气污染物的分析模块。需要说明的是，只要是可能会影响工艺制程或产品良率的气体都可以被视为空气污染物，空气污染物的类型在不同制程区域内可能不同。本实施例中，采样装置还包括多个单一采样管路113，每一制程区域10与一单一采样管路113连通，不同制程区域10连通的单一采样管路113不同，系统采样管路114可与任一单一采样管路113连通，系统采样管路114的输出端与分析装置12连通；采样装置还包括：采样阀115，采样阀115用于连通或阻断单一采样管路113和系统采样管路114。
关于单一采样管路113、系统采样管路114以及采样阀115三者的位置关系，可参考图2，系统采样管路114为一连续通道，在系统采样管路114的延伸路径上，系统采样管路114可通过采样阀115与每一单一采样管路113连通。当采样阀115阻断单一采样管路113与系统采样管路114时，制程区域10内的气体只能进入单一采样管路113，而无法到达系统采样管路114；当采样阀115导通单一采样管路113与系统采样管路114时，制程区域10内的气体可通过单一采样管路113到达系统采样管路114。
需要说明的是，在同一时刻，可以有一个或多个采样阀115处于导通单一采样管路113与系统采样管路114的状态，也就是说，分析装置12既可以用于分析单一制程区域10的空气污染物浓度，也可以用于分析多个制程区域10的平均空气污染物浓度。
多个采样阀115固定在阀件盘16a上。
由于系统采样管路114是共用的，为避免前一次采样过程的空气污染物残留影响下一次的采样，需要在两次采集之间，对系统采样管路114进行清洁，为避免清洁过程中空气污染物堆积在单一采样管路113内而无法被有效去除，可将采样阀115设置在单一采样管路113朝向系统采样管路114的一端，如此，有利于保证单一采样管路113具有较高的洁净度，以及可对采样阀115本身进 行一定的清洁。
本实施例中，环境监测系统还包括控制装置(未标记)，用于控制采样装置采集预设的制程区域10的环境样品，控制装置还用于控制采样阀115的阀门状态，即控制装置通过控制采样阀115的阀门状态，实现制程区域10采集对象的切换，从而获取特定制程区域10的空气污染物浓度数据。
本实施例中，控制装置还用于设定至少一制程区域10的浓度阈值；环境监测系统还包括：警示装置(未图示)，用于在任一制程区域10的浓度阈值超出制程区域10的预设浓度阈值时发出警示信息。如此，有利于对空气污染物超标的特定制程区域进行快速清洁。
本实施例中，供气装置13与系统采样管路114连通，供气装置13用于提供吹扫气体，并利用吹扫气体吹扫系统采样管路114，并将吹扫后的气体送入分析装置12。如此，在分析装置12确认系统采样管路114的环境满足采样需求时，控制装置可控制供气装置13停止吹扫并进行下一次采样，保证在进行下一次采样时系统采样管路114的环境满足预设要求，从而避免系统采样管路114的环境对制程区域10的空气污染物浓度分析造成干扰，保证检测结果的准确性。
需要说明的是，供气装置13对系统采样管路114的吹扫还会对系统采样管路114内壁的吸附性造成影响。具体地，吹扫时间越长，系统采样管路114内壁越干净，内壁吸附空气污染物的能力增强，空气污染物的检测值偏低；相应地，吹扫时间越短，系统采样管路114内壁越脏，系统采样管路114内壁的空气污染物会对检测结果造成影响，即空气污染物的检测值偏高。也就是说，在进行系统采样管路114的清洁，需要控制清洁时间，使得系统采样管路114的内壁处于预设的洁净水平。
本实施例中，加湿装置14用于提供水雾，加湿装置14连通在供气装置13与系统采样管路114之间，以使吹扫气体经由加湿装置14后进入系统采样管路114。如此，供气装置13提供的吹扫气体经过加湿装置14提供的水雾加湿后，吹扫气体含有水雾，因为系统采样管路114中部分残留污染物易溶于水，所以 可以快速清洁系统采样管路114的残留污染物，缩短清洁时间，从而提高采样频率；并且在一次采样之后，再一次采样之前，通过加湿装置14更彻底的清洁系统采样管路114残留的污染物，保证每一次采样不被上一次采样的制程区域的空气污染物所干扰，有利于保证每一次采样分析得到的制程区域的空气污染物数据具有更高的准确性。
管路残留污染物具体可为氨气。
参考图3，本实施例加湿装置14包括：加湿管路14a，加湿管路14a连通在系统采样管路114与供气装置13之间；蓄水槽14e，蓄水槽14e包括蓄水区14f以及与蓄水区14f连通的气体流通区域14g，且加湿管路14a与气体流通区域14g相连通；振荡器14i，振荡器14i位于蓄水区14f内，用于振荡蓄水区14f内的水以产生水雾。
在一个例子中，加湿装置14还包括干燥管路14b，干燥管路14b与加湿管路14a相互独立，且干燥管路14b连通在供气装置13与系统采样管路114之间；阀门14c，用于切换加湿管路14a与干燥管路14b中任一者与系统采样管路114之间连通，另一者与系统采样管路114之间截止。如此，加湿装置14可根据不同情况合理调节采用不同的管路，当系统采样管路114中含有易溶于水的残留气体污染物时，采用加湿管路14a；当系统采样管路114中没有易溶于水的残留气体污染物时，采用干燥管路14b。
其中，阀门14c可以为电磁阀。
在另一个例子中，加湿装置14还包括定时模块14d，定时模块14d用于设定加湿管路14a与系统采样管路114导通的时间，且定时模块14d设定干燥管路14b与系统采样管路114导通的时间。
参考图1，本实施例环境监测系统还包括第一处理模块15，第一处理模块15基于分析装置12的分析结果，控制阀门14c切换干燥管路14b与加湿管路14a中一者与系统采样管路114之间连通，另一者与系统采样管路114之间截止。当供气装置13通过加湿装置14的干燥管路14b吹扫系统采样管路114内的气体到分析装置12，分析装置12分析得到该气体内含有较易溶于水的气体 污染物时，第一处理模块15控制阀门14c将干燥管路14b切换到加湿管路14a，继续吹扫系统采样管路114。如此，当分析装置12分析得到系统采样管路114含有较易溶于水的气体污染物时，将加湿装置14的干燥管路14b切换到加湿管路14a，可以快速清洁系统采样管路114的气体污染物，缩短清洁时间，从而提高采样频率。
综上可知，加湿装置14采用加湿管路14a或干燥管路14b与系统采样管路114连通可由定时模块14d切换或者通过第一处理模块15切换。
参考图3，本实施例中，蓄水槽14e还包括：网状结构14h，蓄水区14f与气体流通区域14g通过网状结构14h连通，网状结构14h可为金属网；注水口(未标记)，注水口连通蓄水区14f与外界供水管路；液位侦测传感器(未标记)，当液位侦测传感器侦测到蓄水槽14e水位低于警戒水位时，外界供水管路通过注水口向蓄水槽14e注水。
本实施例加湿装置14还包括：循环泵14j，循环泵14j与蓄水槽14e连通，用于运行保持蓄水槽14e内的水持续流动，防止细菌滋生。
本实施例环境监测系统，还包括：湿度传感器，湿度传感器设置在系统采样管路114朝向加湿装置14的端口，用于检测系统采样管路114的吹扫气体的湿度；第二处理模块，第二处理模块根据湿度传感器显示湿度调节加湿装置14提供的水雾的量。
参考图3，在一个例子中，湿度传感器14k和第二处理模块14L可以设置在加湿装置14中，湿度传感器14k设置在加湿装置14的管路朝向系统采样管路114的端口。
参考图1，本实施例中，环境监测系统还包括：清洁管路16，清洁管路16的第一端用于通入清洁气体(clean dry air，CDA)，清洁管路16的第二端可与单一采样管路16连通，采样阀115用于控制单一采样管路113与系统采样管路114或清洁管路16连通。
具体地，参考图2，当单一采样管路113与清洁管路16连通时，采样阀115阻隔单一采样管路113与系统采样管路114，系统采样管路114内的气体无法 通入单一采样管路113或对应的制程区域10内，此时，可通过清洁管路16对单一采样管路113进行清洁。如此，可保证单一采样管路113具有较高的清洁度，从而避免单一采样管路113内的空气污染物对制程区域10的空气污染物浓度分析结果造成干扰。
本实施例中，环境监测系统还包括：进气管路17，进气管路17的一端与清洁管路16的第一端连通，进气管路17的另一端用于通入清洁气体，加湿装置14还连通在进气管路17与清洁管路16之间。如此，进气管路17含有水雾加湿的清洁气体可通过清洁管路16对单一采样管路113进行清洁，因为单一采样管路113中部分残留污染物易溶于水，所以可以快速清洁单一采样管路113的残留污染物，缩短清洁时间，从而提高采样频率。
在进行一制程区域10的采样过程中，由于系统采样管路114与每一采样阀115接触，因此每一采样阀115的被系统采样管路114暴露的表面都会沉积有空气污染物，同时，由于空气污染物分子较小且容易发生漂移，因此会有少量空气污染物转移至采样阀的其他位置。当再次进行制程区域10的采样之前，需要采用供气装置13吹扫系统采样管路114，以去除对上一次制程区域10进行采样时留在系统采样管路114内的空气污染物，避免系统采样管路114内的空气污染物影响分析装置12的分析结果；此外，由于少量空气污染物无法被供气装置13吹扫去除，因此可通过入清洁气体进行逆吹，从而对第二次采样的制程区域10对应的单一采样阀113进行进一步地清洁，而由于残余的空气污染物较少，因此逆吹对分析结果的影响较小。
需要说明的是，由于供气装置13用于吹扫的气体最后通入缓冲箱，因此可采用惰性气体或氮气进行吹扫，而由于逆吹时的气体最后通入无尘室的制程区域10，而无尘室内可能有工作人员，因此最好采用可呼吸的干燥空气，从而保证工作人员的生命安全。
参考图4，在另一个例子中，环境监测系统还包括：换气阀171、出气管路172以及清洁泵173，换气阀171用于控制清洁管路16的一端与进气管路17的一端连通，出气管路172的另一端用于通入清洁气体；或者，换气阀171用 于控制清洁管路16的一端与出气管路172的一端连通，出气管路172的另一端与清洁泵173连通，清洁泵173用于抽气。
在对一制程区域10进行采样时，可将其他制程区域10对应的单一采样管路113连通至清洁管路16，且清洁管路16的一端连通至出气管路172，清洁泵173通过抽气使得单一采样管路113内的气体与对应的制程区域10内的环境气体相同，便于下次采样；以及使得单一采样管路113内的气体保持流动状态，从而避免单一采样管路113内的空气污染物因气体静止而吸附在单一采样管路113内壁，进而保证单一采样管路113具有较高的清洁度，有利于提高检测结果的准确性。
相对于进行逆吹清洁，抽气清洁可能等比例或非等比例地抽离制程区域10内的不同空气污染物，进而造成检测结果不准确。具体地，当抽离的空气污染物占全部空气污染物的比例与抽离的载气(除空气污染物以外的气体)占全部载气的比例不同时，制程区域10内的空气污染物浓度就会增大或减小；当抽离的不同类空气污染物占该类空气污染物总量的比例不同时，制程区域10内不同类空气污染物的浓度对比关系会发生改变。
由于进行逆吹时通入的清洁气体总量是可以计算的，因此采用逆吹清洁方案，能够通过计算消除清洁气体对空气污染物浓度分析造成的影响，进而准确获取空气污染物的分析结果。分析结果包括空气污染物的类型，空气污染物的浓度以及不同空气污染物的浓度比值。
本实施例中，通过在供气装置和系统采样管路之间以及进气管路和清洁管路之间增加加湿装置，加湿装置提供水雾，利用管路部分残留污染物易溶于水的特性，快速清洁管路残留污染物，缩短清洁时间，从而提高采样频率；在一次采样之后，再一次采样之前，通过加湿装置更彻底的清洁系统采样管路残留污染物，保证每一次采样不被上一次采样的制程区域的空气污染物所干扰，有利于保证每一次采样分析得到的制程区域的空气污染物数据具有更高的准确性。
本领域的普通技术人员可以理解，上述各实施方式是实现本申请的具体实 施例，而在实际应用中，可以在形式上和细节上对其作各种改变，而不偏离本申请的精神和范围。任何本领域技术人员，在不脱离本申请的精神和范围内，均可作各自更动与修改，因此本申请的保护范围应当以权利要求限定的范围为准。
工业实用性
本申请实施例中，环境监测系统包括：采样装置，用于采集制程区域的环境样品，采样装置包括系统采样管路，环境样品包括空气；分析装置，与系统采样管路的输出端连通；供气装置，与系统采样管路连通，用于向系统采样管路提供吹扫气体；加湿装置，用于提供水雾，加湿装置连通在供气装置与系统采样管路之间。这样，通过在供气装置和系统采样管路之间增加加湿装置，加湿装置提供水雾，利用管路中部分残留污染物易溶于水的特性，快速清洁管路残留污染物，缩短清洁时间，从而提高采样频率；在一次采样之后，再一次采样之前，通过加湿装置更彻底的清洁系统采样管路残留污染物，保证每一次采样不被上一次采样的制程区域的空气污染物所干扰，有利于保证每一次采样分析得到的制程区域的空气污染物数据具有更高的准确性。

Claims (13)

  1. 一种环境监测系统，用于监测无尘室内多个制程区域的空气污染物浓度，包括：
    采样装置，用于采集所述制程区域的环境样品，所述采样装置包括系统采样管路，所述环境样品包括空气；
    分析装置，与所述系统采样管路的输出端连通；
    供气装置，与所述系统采样管路连通，用于向所述系统采样管路提供吹扫气体；
    加湿装置，用于提供水雾，所述加湿装置连通在所述供气装置与所述系统采样管路之间。
  2. 根据权利要求1所述的环境监测系统，其中，所述加湿装置包括：
    加湿管路，所述加湿管路连通在所述系统采样管路与所述供气装置之间；
    蓄水槽，所述蓄水槽包括蓄水区以及与所述蓄水区连通的气体流通区域，且所述加湿管路与所述气体流通区域相连通；
    振荡器，所述振荡器位于所述蓄水区内。
  3. 根据权利要求2所述的环境监测系统，其中，所述蓄水槽还包括网状结构，所述蓄水区与所述气体流通区域通过所述网状结构连通。
  4. 根据权利要求2所述的环境监测系统，其中，所述蓄水槽还包括注水口，所述注水口连通所述蓄水区与外界供水管路。
  5. 根据权利要求2所述的环境监测系统，其中，所述加湿装置还包括循环泵，所述循环泵与所述蓄水槽连通。
  6. 根据权利要求2所述的环境监测系统，其中，所述加湿装置还包括：干燥管路，所述干燥管路与所述加湿管路相互独立，且所述干燥管路连通在所述供气装置与所述系统采样管路之间；
    阀门，用于切换所述加湿管路与所述干燥管路中一者与所述系统采样管路之间连通，另一者与所述系统采样管路之间截止。
  7. 根据权利要求6所述的环境监测系统，其中，还包括：第一处理模块，所述第一处理模块基于所述分析装置的分析结果，控制所述阀门切换所述干燥管路与所述加湿管路中一者与所述系统采样管路之间连通，另一者与所述系统采样管路之间截止。
  8. 根据权利要求6所述的环境监测系统，其中，所述加湿装置还包括：定时模块，所述定时模块用于设定所述加湿管路与所述系统采样管路导通的时间，且设定所述干燥管路与所述系统采样管路导通的时间。
  9. 根据权利要求1所述的环境监测系统，其中，还包括：湿度传感器，所述湿度传感器设置在所述系统采样管路朝向所述加湿装置的端口，用于检测所述系统采样管路的所述吹扫气体的湿度。
  10. 根据权利要求9所述的环境监测系统，其中，还包括：第二处理模块，所述第二处理模块根据所述湿度调节所述加湿装置提供的所述水雾的量。
  11. 根据权利要求1所述的环境监测系统，其中，所述采样装置还包括：多个单一采样管路，每一所述制程区域与一所述单一采样管路连通，不同所述制程区域连通的所述单一采样管路不同；所述采样装置还包括：采样阀，所述采样阀用于连通或阻断所述单一采样管路与所述系统采样管路。
  12. 根据权利要求11所述的环境监测系统，其中，还包括：清洁管路，所述清洁管路的第一端用于通入清洁气体，所述清洁管路的第二端与所述单一采样管路连通，所述采样阀用于控制所述单一采样管路与所述系统采样管路或所述清洁管路连通；
    进气管路，所述进气管路的一端与所述清洁管路的第一端连通，所述进气管路的另一端用于通入所述清洁气体；
    所述加湿装置还连通在所述进气管路与所述清洁管路之间。
  13. 根据权利要求1所述的环境监测系统，其中，所述采样装置包括采样泵，所述采样泵与所述制程区域连通，所述采样泵用于抽取所述制程区域的所述空气。
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