WO2022052614A1 - 曝光机台的门板密闭监测系统、方法、装置、介质和设备 - Google Patents

曝光机台的门板密闭监测系统、方法、装置、介质和设备 Download PDF

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Publication number
WO2022052614A1
WO2022052614A1 PCT/CN2021/105800 CN2021105800W WO2022052614A1 WO 2022052614 A1 WO2022052614 A1 WO 2022052614A1 CN 2021105800 W CN2021105800 W CN 2021105800W WO 2022052614 A1 WO2022052614 A1 WO 2022052614A1
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WO
WIPO (PCT)
Prior art keywords
door panel
servo motor
exposure machine
proximity switch
monitoring
Prior art date
Application number
PCT/CN2021/105800
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English (en)
French (fr)
Inventor
梁学玉
Original Assignee
长鑫存储技术有限公司
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Publication date
Application filed by 长鑫存储技术有限公司 filed Critical 长鑫存储技术有限公司
Priority to US17/580,754 priority Critical patent/US20220136304A1/en
Publication of WO2022052614A1 publication Critical patent/WO2022052614A1/zh

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05F—DEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION; CHECKS FOR WINGS; WING FITTINGS NOT OTHERWISE PROVIDED FOR, CONCERNED WITH THE FUNCTIONING OF THE WING
    • E05F15/00—Power-operated mechanisms for wings
    • E05F15/60—Power-operated mechanisms for wings using electrical actuators
    • E05F15/603—Power-operated mechanisms for wings using electrical actuators using rotary electromotors
    • E05F15/611—Power-operated mechanisms for wings using electrical actuators using rotary electromotors for swinging wings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D43/00—Lids or covers for rigid or semi-rigid containers
    • B65D43/26—Mechanisms for opening or closing, e.g. pedal-operated
    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05C—BOLTS OR FASTENING DEVICES FOR WINGS, SPECIALLY FOR DOORS OR WINDOWS
    • E05C17/00—Devices for holding wings open; Devices for limiting opening of wings or for holding wings open by a movable member extending between frame and wing; Braking devices, stops or buffers, combined therewith
    • E05C17/56—Devices for holding wings open; Devices for limiting opening of wings or for holding wings open by a movable member extending between frame and wing; Braking devices, stops or buffers, combined therewith by magnetic or electromagnetic attraction or operated by electric or electromagnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00—Measuring or testing not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/3473—Circular or rotary encoders
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G—PHYSICS
    • G08—SIGNALLING
    • G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B21/00—Alarms responsive to a single specified undesired or abnormal condition and not otherwise provided for
    • G08B21/18—Status alarms
    • G08B21/182—Level alarms, e.g. alarms responsive to variables exceeding a threshold
    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES E05D AND E05F, RELATING TO CONSTRUCTION ELEMENTS, ELECTRIC CONTROL, POWER SUPPLY, POWER SIGNAL OR TRANSMISSION, USER INTERFACES, MOUNTING OR COUPLING, DETAILS, ACCESSORIES, AUXILIARY OPERATIONS NOT OTHERWISE PROVIDED FOR, APPLICATION THEREOF
    • E05Y2201/00—Constructional elements; Accessories therefor
    • E05Y2201/40—Motors; Magnets; Springs; Weights; Accessories therefor
    • E05Y2201/43—Motors
    • E05Y2201/434—Electromotors; Details thereof
    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES E05D AND E05F, RELATING TO CONSTRUCTION ELEMENTS, ELECTRIC CONTROL, POWER SUPPLY, POWER SIGNAL OR TRANSMISSION, USER INTERFACES, MOUNTING OR COUPLING, DETAILS, ACCESSORIES, AUXILIARY OPERATIONS NOT OTHERWISE PROVIDED FOR, APPLICATION THEREOF
    • E05Y2400/00—Electronic control; Electrical power; Power supply; Power or signal transmission; User interfaces
    • E05Y2400/10—Electronic control
    • E05Y2400/32—Position control, detection or monitoring
    • E05Y2400/35—Position control, detection or monitoring related to specific positions
    • E05Y2400/354—End positions
    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES E05D AND E05F, RELATING TO CONSTRUCTION ELEMENTS, ELECTRIC CONTROL, POWER SUPPLY, POWER SIGNAL OR TRANSMISSION, USER INTERFACES, MOUNTING OR COUPLING, DETAILS, ACCESSORIES, AUXILIARY OPERATIONS NOT OTHERWISE PROVIDED FOR, APPLICATION THEREOF
    • E05Y2400/00—Electronic control; Electrical power; Power supply; Power or signal transmission; User interfaces
    • E05Y2400/10—Electronic control
    • E05Y2400/44—Sensors not directly associated with the wing movement
    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES E05D AND E05F, RELATING TO CONSTRUCTION ELEMENTS, ELECTRIC CONTROL, POWER SUPPLY, POWER SIGNAL OR TRANSMISSION, USER INTERFACES, MOUNTING OR COUPLING, DETAILS, ACCESSORIES, AUXILIARY OPERATIONS NOT OTHERWISE PROVIDED FOR, APPLICATION THEREOF
    • E05Y2400/00—Electronic control; Electrical power; Power supply; Power or signal transmission; User interfaces
    • E05Y2400/80—User interfaces
    • E05Y2400/81—Feedback to user, e.g. tactile
    • E05Y2400/812—Acoustic
    • E05Y2400/814—Sound emitters, e.g. loudspeakers
    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES E05D AND E05F, RELATING TO CONSTRUCTION ELEMENTS, ELECTRIC CONTROL, POWER SUPPLY, POWER SIGNAL OR TRANSMISSION, USER INTERFACES, MOUNTING OR COUPLING, DETAILS, ACCESSORIES, AUXILIARY OPERATIONS NOT OTHERWISE PROVIDED FOR, APPLICATION THEREOF
    • E05Y2400/00—Electronic control; Electrical power; Power supply; Power or signal transmission; User interfaces
    • E05Y2400/80—User interfaces
    • E05Y2400/81—Feedback to user, e.g. tactile
    • E05Y2400/818—Visual
    • E05Y2400/822—Light emitters, e.g. light emitting diodes [LED]
    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES E05D AND E05F, RELATING TO CONSTRUCTION ELEMENTS, ELECTRIC CONTROL, POWER SUPPLY, POWER SIGNAL OR TRANSMISSION, USER INTERFACES, MOUNTING OR COUPLING, DETAILS, ACCESSORIES, AUXILIARY OPERATIONS NOT OTHERWISE PROVIDED FOR, APPLICATION THEREOF
    • E05Y2999/00—Subject-matter not otherwise provided for in this subclass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Definitions

  • the present disclosure relates to the field of semiconductor technology, and in particular, to a door panel sealing monitoring system, method, device, computer-readable storage medium, and electronic equipment of an exposure machine.
  • the door panel outside the exposure machine can isolate the internal environment of the machine from the external environment, preventing particles from entering the machine from the external environment and affecting the product yield.
  • the purpose of the embodiments of the present disclosure is to provide a door panel airtight monitoring system, method, device, computer-readable storage medium, and electronic device of an exposure machine, so as to improve product yield at least to a certain extent.
  • a door panel airtightness monitoring system of an exposure machine comprising: a servo motor, the rotation axis of the servo motor is coaxial with the rotation axis of the door panel Fixed connection; a photoelectric encoder, arranged on the servo motor, used to measure the angle rotated by the rotating shaft of the servo motor; a controller, connected with the servo motor and the photoelectric encoder, used to control the The servo motor rotates, and it is judged whether the door panel is airtight according to the angle.
  • a method for monitoring the airtightness of a door panel of an exposure machine wherein a shaft of the door panel of the exposure machine is coaxially and fixedly connected to a shaft of a servo motor, and the servo motor is provided with a A photoelectric encoder for detecting the rotation angle of the rotating shaft of the servo motor;
  • the door panel airtight monitoring method includes: generating a servo motor control signal to control the rotation of the servo motor; acquiring the servo motor detected by the photoelectric encoder The angle that the rotating shaft rotates; according to the angle, it is judged whether the door panel is airtight.
  • a door panel airtightness monitoring device of an exposure machine wherein a shaft of the door panel of the exposure machine is coaxially and fixedly connected to a shaft of a servo motor, and the servo motor is provided with a A photoelectric encoder for detecting the rotation angle of the rotating shaft of the servo motor;
  • the door panel airtight monitoring device includes: a control unit for generating a servo motor control signal to control the rotation of the servo motor; an acquisition unit for acquiring The angle detected by the photoelectric encoder that the rotating shaft of the servo motor rotates; the judgment unit is used for judging whether the door panel is airtight according to the angle.
  • a computer-readable storage medium on which a computer program is stored, and when the program is executed by a processor, implements the exposure machine according to the second aspect of the above-mentioned embodiments The method of monitoring the airtightness of the door panel.
  • an electronic device comprising: one or more processors; and a storage device for storing one or more programs, when the one or more programs are stored by the one When executed by the one or more processors, the one or more processors are made to implement the method for monitoring the airtightness of a door panel of an exposure machine as described in the second aspect of the above embodiment.
  • the door panel can be monitored by using a servo motor that rotates coaxially with the door panel to open or close the door panel, and using a photoelectric encoder to measure the angle rotated by the rotating shaft of the servo motor. Whether it is airtight, so as to improve the yield of the product.
  • FIG. 1 schematically shows a schematic diagram of a door panel sealing monitoring system of an exposure machine according to an embodiment of the present disclosure
  • FIG. 2 schematically shows a schematic diagram of a door panel according to an embodiment of the present disclosure
  • Fig. 3a schematically shows a schematic diagram of a human-computer interaction device according to an embodiment of the present disclosure
  • Fig. 3b schematically shows a schematic diagram of an audible and visual alarm circuit according to an embodiment of the present disclosure
  • FIG. 4 schematically shows a flow chart of a method for monitoring the airtightness of a door panel of an exposure machine according to an embodiment of the present disclosure
  • Fig. 5a schematically shows a schematic diagram of a door panel sealing monitoring process of an exposure machine according to an embodiment of the present disclosure
  • Fig. 5b schematically shows a schematic diagram of a door panel sealing monitoring process of an exposure machine according to another embodiment of the present disclosure
  • Fig. 5c schematically shows a schematic diagram of a door panel sealing monitoring process of an exposure machine according to still another embodiment of the present disclosure
  • FIG. 6 schematically shows a block diagram of a door panel sealing monitoring device of an exposure machine according to an embodiment of the present disclosure
  • FIG. 7 schematically shows a structural diagram of a computer system suitable for implementing an electronic device of an embodiment of the present disclosure.
  • the cover of the exposure machine is manually opened and closed, and the operation steps are complicated. Specifically, when the door panel is closed, an Allen key is required to manually lock the door lock of the door panel. If the door panel is not fully closed, you need to look for a hex key when re-locking the current door panel. If you are not around, you cannot quickly lock the door panel.
  • the present disclosure provides a door panel seal monitoring system, method, device, computer-readable storage medium, and electronic equipment for an exposure machine to automatically open and close the door panel and improve product yield.
  • an embodiment of the present disclosure provides a door panel airtightness monitoring system of an exposure machine.
  • the door panel airtightness monitoring system includes: a servo motor 140 , and a rotating shaft of the servo motor 140 is coaxially and fixedly connected to the rotating shaft 130 of the door panel 120 ; Photoelectric encoder (not shown in the figure), arranged on the servo motor, used to measure the rotation angle of the rotation shaft of the servo motor; the controller 150, connected with the servo motor and the photoelectric encoder, used to control the rotation of the servo motor , and judge whether the door panel 120 is airtight according to the angle.
  • the controller drives the servo motor to rotate clockwise or counterclockwise through a dedicated motor driver chip.
  • the motor driver chip can generate and send the servo motor control signal according to the controller to drive the servo motor to rotate, and can also use the feedback signal detected inside the servo motor. It is transmitted to the controller to form a closed-loop control, and the two jointly complete the control of the door panel.
  • the controller may be a microprocessor.
  • the servo motor can calculate the rotation angle of the servo motor according to the photoelectric encoder, and record the corresponding rotation angle of the servo motor through the storage circuit, so as to realize the measurement of the rotation angle of the door panel, so that the closed state of the door panel can be monitored.
  • the photoelectric encoder When the photoelectric encoder is working, the light is projected on the code disc of the photoelectric encoder, and the code disc rotates with the moving object. The light passing through the bright area passes through the slit and is received by the photosensitive element of the photoelectric encoder.
  • the arrangement of the photosensitive element is the same as that of the photoelectric encoder.
  • the code channels are in one-to-one correspondence, and the signals output by the photosensitive elements in the bright area and the dark area are "1" and "0" respectively.
  • the combination of the output signal of the photosensitive element is a digital quantity with a certain regularity, which represents the angular displacement of the code disc shaft.
  • the initial angle value of the servo motor rotation can be set to 0. It can be set that when the rotating shaft of the servo motor rotates in one direction, the measurement angle increases; when the rotation direction changes, the measurement angle decreases. By default, when the door panel is completely closed, the rotation angle of the servo motor is 0. As the opening angle between the door panel and the door panel frame 110 increases, the rotation angle of the servo motor increases equally.
  • the photoelectric encoder attached to the servo motor can calculate the rotation angle of the door panel, and the opening degree of the door panel can be indirectly calculated through the rotation angle. , to determine whether the door panel is fully closed.
  • the servo motor can drive the mechanical parts to rotate, and can control the rotation speed, and the position accuracy is very accurate. Specifically, the servo motor can convert the voltage signal into torque and rotational speed to drive the rotating shaft of the door panel. The rotor speed of the servo motor is controlled by the input signal and can respond quickly. In the automatic control system, the servo motor is used as the actuator, which can convert the received electrical signal into the angular displacement or angular velocity output on the rotating shaft of the motor servo motor. The servo motor does not rotate when the signal voltage is zero, so that the door can be in a static state after being adjusted to open or close the door.
  • the servo motor mainly relies on pulses for positioning. When the servo motor receives 1 pulse, it will rotate the angle corresponding to 1 pulse to realize displacement.
  • the servo motor itself has the function of sending out pulses, so every time the servo motor rotates an angle, it will send out a corresponding number of pulses, forming a closed loop that echoes the pulses received by the servo motor, so that the system can know the number of pulses sent to the servo motor, and
  • the number of retracting pulses can be precisely controlled to control the rotation of the motor to achieve precise positioning. For example, the positioning accuracy can reach 0.001mm.
  • the door panel airtight monitoring system further includes: a proximity switch sensing board 121, which is arranged above the side of the door panel that is far from the rotation axis of the door panel; a proximity switch sensor 111, which is signal-connected to the controller and is connected to the proximity switch sensing panel. Correspondingly, it is arranged above the side of the door panel frame of the exposure machine away from the rotation axis of the door panel, and is used to generate a proximity signal and send it to the controller when the door panel is closed and the proximity switch sensing board is close to the proximity switch sensor.
  • the proximity switch can be an inductive proximity switch.
  • the inductive proximity switch sensor installed on the door panel frame of the machine can measure the distance between the door panel and the door panel frame, and can calculate the rotation axis of the servo motor through the photoelectric encoder with the servo motor itself. The rotation angles complement each other to prevent the door panel from being completely closed, and the servo motor continues to drive the door panel to rotate, damaging the door panel and the servo motor, thus providing better protection for the device.
  • the controller can send a deceleration command, the servo motor starts to decelerate, and finally the door panel and the door panel frame of the machine are approached at a slower speed. Make the closing action smoother.
  • the output signal of the proximity switch sensor is amplified, stabilized, filtered, and A/D converted through the signal conditioning circuit, and finally becomes a digital signal that the controller can recognize.
  • the inductive proximity switch sensor consists of three parts: oscillator, switching circuit and amplifying output circuit.
  • the oscillator generates an alternating magnetic field.
  • a metal target such as a proximity switch induction plate approaches this magnetic field and reaches the sensing distance
  • an eddy current is generated in the metal target, which causes the metal oscillator to decay and even stop the vibration.
  • the changes of oscillator oscillation and vibration stop are processed by the post-stage amplifying output circuit and converted into switching signals, and finally transmitted to the controller, so as to achieve the purpose of non-contact detection.
  • the door panel airtight monitoring system further includes: a metal suction plate 123, which is arranged below the side of the door panel far from the rotation axis of the door panel; an electromagnet 113, which is signal-connected with the controller, and is arranged on the exposure machine corresponding to the metal suction plate 123.
  • the lower part of the side of the door panel frame away from the rotation axis of the door panel is used to attract the metal suction panel according to the electromagnet control signal sent by the controller.
  • the metal suction plate 122 and the electromagnet 112 may also be arranged in pairs below the door panel and the side of the door panel frame that is far away from the rotation axis of the door panel.
  • the width of the door panel is 700mm
  • the force arm of the electromagnet is 700mm
  • the force arm of the servo motor is about 5mm.
  • the iron suction door panel is more labor-saving.
  • the door panel airtight monitoring system further includes an electromagnetic relay 160 connected between the controller 150 and the electromagnet 113 for controlling the on-off of the path where the electromagnetic relay is located according to the electromagnet control signal sent by the controller.
  • the pin on the electromagnetic relay that controls the electromagnet When the pin on the electromagnetic relay that controls the electromagnet outputs a low level, the electromagnet does not work and the armature is reset. When it is necessary to close the metal suction plate on the door panel, the pin on the electromagnetic relay that controls the electromagnet outputs a high level, the electromagnet control circuit is turned on, and the electromagnet generates a magnetic force, which firmly attracts the door panel.
  • a relay is an electrical control device that can control the interaction between the system and the controlled system. Usually used in automated control circuits, it is actually an "automatic switch” that uses a small current to control the operation of a large current, and plays the role of automatic adjustment, safety protection, and conversion circuit in the circuit.
  • Electromagnetic relays are generally composed of iron cores, coils, armatures, contact reeds, etc. As long as a certain voltage is applied to both ends of the coil, a certain current will flow in the coil, resulting in an electromagnetic effect, and the armature will overcome the pulling force of the return spring and attract to the iron core under the action of electromagnetic attraction, thereby driving the armature. The moving contact and the normally open contact are pulled together.
  • a relay generally has two circuits, a low-voltage control circuit and a high-voltage working circuit. Wherein, in the embodiment of the present disclosure, the low-voltage control circuit is connected to the controller, and the high-voltage working circuit is connected to the electromagnet.
  • the door panel airtightness monitoring system further includes a human-computer interaction device 170, which is signal-connected to the controller and used to display the open or closed state of the door panel according to the state signal sent by the controller, and make the controller generate a state of the door panel through manual operation.
  • Servo motor control signal to control the door panel to open or close.
  • the human-computer interaction device may include a display unit 310 and a keyboard 320 .
  • the display unit 310 can display the working state of the current door panel in real time. When the distance between the door panel and the door panel frame is 0mm, the door panel is in a closed state, and the door panel closed state indicator light will be on. When the distance between the door panel and the door panel frame is greater than 0mm, the open indicator light will be on, and other All lights are off. If the motor is turning, only the action light is on. Through the display function of the current state of the door panel of the display unit, you can know the real-time state of the machine door panel in time.
  • the keys in the keyboard 320 are correspondingly connected to the input pins of the controller of the human-computer interaction device. When the keys are disconnected, the voltage of the pins corresponding to the keys is 5V. After the keys are pressed, the voltages of the pins corresponding to the keys are 0. According to the change of the pin voltage, it can be judged whether there is a button pressed, and then according to the software programming setting, the corresponding button function can be executed.
  • the human-computer interaction device can be a touch screen, and the drive decoding chip of the touch screen can make the touch screen display the information sent by the controller, convert the input signal sensed by the touch screen into an output signal, and drive the executive element to realize the function required by the device.
  • the display unit driven by the controller can display the opening angle of the door panel and the distance between the machine frame and the door panel detected by the proximity switch sensor, so that the current status of the door panel can be seen more intuitively;
  • the door panel can be opened and closed manually.
  • the servo motor will calculate the opening angle of the current door panel according to the rotation angle and display it on the display.
  • the door In manual mode, the door can be opened or closed manually by pressing the button, and the door can be opened or closed by pressing the corresponding button.
  • the door panel airtightness monitoring system further includes an audible and visual alarm circuit 180, which is connected to the controller, and is used for generating according to the controller when the time when the door panel is in an incompletely closed state reaches a set first time period.
  • the alarm signal performs sound and light alarm, and the incompletely closed state means that the distance between the door panel and the door panel frame is greater than the set first distance.
  • the sound and light alarm circuit can open the door for more than 2 hours, reminding the operator to confirm the current state of the door and close the door in time.
  • the angle between the door panel and the door panel frame is greater than 2 degrees, and it is not closed for more than 2 hours, the electromagnet will automatically close the door panel.
  • the suction force of the electromagnet suction method is strong, which can prevent the door panel from loosening.
  • FIG. 4 schematically shows a flow chart of a method for monitoring the airtightness of a door panel of an exposure machine according to an embodiment of the present disclosure.
  • the methods provided by the embodiments of the present disclosure may be executed by any electronic device with computer processing capability, such as a terminal device and/or a server.
  • the shaft of the door panel of the exposure machine is coaxially and fixedly connected to the shaft of a servo motor, and the servo motor is provided with a photoelectric encoder for detecting the rotation angle of the rotating shaft of the servo motor.
  • an exemplary embodiment of the present disclosure provides a method for monitoring the airtightness of a door panel of an exposure machine, including:
  • Step S402 generating a servo motor control signal to control the rotation of the servo motor.
  • Step S404 acquiring the rotation angle of the rotation axis of the servo motor detected by the photoelectric encoder.
  • Step S406 it is judged whether the door panel is airtight according to the angle.
  • a proximity switch sensor is provided on the door panel frame of the exposure machine, and a proximity switch sensing panel is correspondingly provided on the door panel.
  • the above-mentioned door panel airtight monitoring method further includes: when the proximity switch sensor senses that the proximity switch sensing panel is approaching The proximity switch signal generated when the distance between the door panel and the door panel frame is less than the set second distance, the first control signal is generated to control the servo motor to decelerate; when the proximity switch sensor senses that the proximity switch sensing panel is approaching The switch signal indicates that when the distance between the door panel and the door panel frame is equal to 0, a second control signal is generated to control the servo motor to stop working.
  • the second distance may be 50mm.
  • an electromagnet is arranged on the door panel frame of the exposure machine, and a metal suction plate is correspondingly arranged on the door panel.
  • the above-mentioned method for monitoring the airtightness of the door panel further includes: when the proximity switch sensor senses the proximity of the proximity switch sensing panel, generating The proximity switch signal indicates that when the distance between the door panel and the door panel frame is less than the first distance, an electromagnet control signal is generated to control the electromagnet and the metal suction plate to attract.
  • the first distance may be 50mm.
  • the controller is connected to the human-computer interaction device, and the above-mentioned door panel airtight monitoring method further includes: sending a status signal to the human-computer interaction device to display the open or closed state of the door panel; collecting data collected by the human-computer interaction device The human-computer interaction signal and the servo motor control signal are generated according to the human-computer interaction signal to control the opening or closing of the door panel.
  • the controller is connected to the sound and light alarm circuit, and the above airtight detection method further includes: when the door panel is in an incompletely closed state and reaches a set first time period, generating an alarm signal and sending it to The sound and light alarm circuit is used for sound and light alarm, and the state of incomplete closing means that the distance between the door panel and the door panel frame is greater than the set first distance.
  • the electromagnet is located at the edge of the lever due to the advantages of suction, and can be used as the main door panel closing method. It is detected that the door panel is not closed within a certain period of time, and the door panel will be automatically closed.
  • the first time period may be 2h, and the first distance may be 50mm or 25mm.
  • the opening angle of the cover panel exceeds 2°, and the timer in the controller starts to work.
  • the timer exceeds 2h, it will drive the sound and light alarm circuit to the staff. prompt.
  • the staff confirms that the machine is troubleshooting, they can restore the device to the initial 0 state by pressing the reset button and re-time. If you forget to close the door after troubleshooting, the device drives the servo motor to rotate and the electromagnet to work to close the door.
  • the controller controls the servo motor and the electromagnet to open and close the door panel.
  • the door panel is opened or closed by using a servo motor that rotates coaxially with the door panel, and the photoelectric encoder is used to measure the rotation angle of the rotation axis of the servo motor.
  • the door panel can be monitored for airtightness, thereby improving product yield.
  • a door panel sealing monitoring device 600 of an exposure machine provided according to an embodiment of the present disclosure may include:
  • the control unit 602 is configured to generate a servo motor control signal to control the rotation of the servo motor.
  • the obtaining unit 604 is configured to obtain the angle rotated by the rotation axis of the servo motor detected by the photoelectric encoder.
  • the judgment unit 606 is used for judging whether the door panel is airtight according to the angle.
  • each functional module of the device for monitoring the airtightness of the door panel of the exposure machine corresponds to the steps of the above-mentioned exemplary embodiment of the method for monitoring the airtightness of the door panel of the exposure machine, the details not disclosed in the embodiment of the device of the present disclosure are not disclosed. , please refer to the embodiments of the above-mentioned method for monitoring the airtightness of the door panel of the exposure machine in the present disclosure.
  • the door panel is opened or closed by using a servo motor that rotates coaxially with the door panel, and the photoelectric encoder is used to measure the rotation angle of the rotation axis of the servo motor.
  • the door panel can be monitored for airtightness, thereby improving product yield.
  • FIG. 7 shows a schematic structural diagram of a computer system 700 suitable for implementing an electronic device of an embodiment of the present disclosure.
  • the computer system 700 of the electronic device shown in FIG. 7 is only an example, and should not impose any limitation on the function and scope of use of the embodiments of the present disclosure.
  • a computer system 700 includes a central processing unit (CPU) 701 which can be loaded into a random access memory (RAM) 703 according to a program stored in a read only memory (ROM) 702 or a program from a storage section 708 Instead, various appropriate actions and processes are performed.
  • RAM random access memory
  • ROM read only memory
  • various programs and data required for system operation are also stored.
  • the CPU 701, the ROM 702, and the RAM 703 are connected to each other through a bus 704.
  • An input/output (I/O) interface 705 is also connected to bus 704 .
  • the following components are connected to the I/O interface 705: an input section 706 including a keyboard, a mouse, etc.; an output section 707 including a cathode ray tube (CRT), a liquid crystal display (LCD), etc., and a speaker, etc.; a storage section 708 including a hard disk, etc. ; and a communication section 709 including a network interface card such as a LAN card, a modem, and the like. The communication section 709 performs communication processing via a network such as the Internet.
  • a drive 710 is also connected to the I/O interface 705 as needed.
  • a removable medium 711 such as a magnetic disk, an optical disk, a magneto-optical disk, a semiconductor memory, etc., is mounted on the drive 710 as needed so that a computer program read therefrom is installed into the storage section 708 as needed.
  • embodiments of the present disclosure include a computer program product comprising a computer program carried on a computer-readable storage medium, the computer program containing program code for performing the method illustrated in the flowchart.
  • the computer program may be downloaded and installed from the network via the communication portion 709 and/or installed from the removable medium 711 .
  • the central processing unit (CPU) 701 the above-described functions defined in the system of the present application are executed.
  • the computer-readable storage medium shown in the present disclosure may be a computer-readable signal medium or a computer-readable storage medium, or any combination of the above two.
  • the computer-readable storage medium can be, for example, but not limited to, an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus or device, or a combination of any of the above. More specific examples of computer readable storage media may include, but are not limited to, electrical connections with one or more wires, portable computer disks, hard disks, random access memory (RAM), read only memory (ROM), erasable Programmable read only memory (EPROM or flash memory), fiber optics, portable compact disk read only memory (CD-ROM), optical storage devices, magnetic storage devices, or any suitable combination of the foregoing.
  • a computer-readable storage medium may be any tangible medium that contains or stores a program that can be used by or in conjunction with an instruction execution system, apparatus, or device.
  • a computer-readable signal medium may include a data signal propagated in baseband or as part of a carrier wave, carrying computer-readable program code therein. Such propagated data signals may take a variety of forms, including but not limited to electromagnetic signals, optical signals, or any suitable combination of the foregoing.
  • a computer-readable signal medium can also be any computer-readable storage medium other than a computer-readable storage medium that can be sent, propagated, or transmitted for use by or in connection with the instruction execution system, apparatus, or device program of.
  • Program code embodied on a computer-readable storage medium may be transmitted using any suitable medium including, but not limited to, wireless, wireline, optical fiber cable, RF, etc., or any suitable combination of the foregoing.
  • each block in the flowchart or block diagrams may represent a module, segment, or portion of code that contains one or more logical functions for implementing the specified functions executable instructions.
  • the functions noted in the blocks may occur out of the order noted in the figures. For example, two blocks shown in succession may, in fact, be executed substantially concurrently, or the blocks may sometimes be executed in the reverse order, depending upon the functionality involved.
  • the units involved in the embodiments of the present disclosure may be implemented in software or hardware, and the described units may also be provided in a processor. Among them, the names of these units do not constitute a limitation on the unit itself under certain circumstances.
  • the present application also provides a computer-readable storage medium.
  • the computer-readable storage medium may be included in the electronic device described in the above-mentioned embodiments; in electronic equipment.
  • the above-mentioned computer-readable storage medium carries one or more programs, and when the above-mentioned one or more programs are executed by one of the electronic equipment, the electronic equipment is made to realize the method for monitoring the sealing of the door panel of the exposure machine as described in the above-mentioned embodiment. .
  • the electronic device may implement as shown in FIG. 4 : step S402 , generating a servo motor control signal to control the rotation of the servo motor.
  • step S404 acquiring the angle rotated by the rotation axis of the servo motor detected by the photoelectric encoder.
  • Step S406 it is judged whether the door panel is airtight according to the angle.
  • the electronic device can also implement the various steps shown in FIG. 5 a , FIG. 5 b and FIG. 5 c .
  • modules or units of the apparatus for action performance are mentioned in the above detailed description, this division is not mandatory. Indeed, according to embodiments of the present disclosure, the features and functions of two or more modules or units described above may be embodied in one module or unit. Conversely, the features and functions of one module or unit described above may be further divided into multiple modules or units to be embodied.
  • the exemplary embodiments described herein may be implemented by software, or may be implemented by software combined with necessary hardware. Therefore, the technical solutions according to the embodiments of the present disclosure may be embodied in the form of software products, and the software products may be stored in a non-volatile storage medium (which may be CD-ROM, U disk, mobile hard disk, etc.) or on the network , which includes several instructions to cause a computing device (which may be a personal computer, a server, a touch terminal, or a network device, etc.) to execute the method according to an embodiment of the present disclosure.
  • a computing device which may be a personal computer, a server, a touch terminal, or a network device, etc.

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Abstract

一种曝光机台的门板密闭监测系统、方法、装置、介质和设备，门板密闭监测系统包括：伺服电机（140），伺服电机（140）的转动轴与门板（120）的转动轴（130）同轴固定连接；光电编码器，设置于伺服电机（140）上，用于测量伺服电机（140）的转动轴转过的角度；控制器（150），与伺服电机（140）和光电编码器连接，用于控制伺服电机（140）转动，并根据角度判断门板（120）是否密闭。

Description

曝光机台的门板密闭监测系统、方法、装置、介质和设备
交叉引用
本公开要求于2020年9月11日提交的申请号为202010956265.4、名称为“曝光机台的门板密闭监测系统、方法、装置、介质和设备”的中国专利申请的优先权，该中国专利申请的全部内容通过引用全部并入本文。
技术领域
本公开涉及半导体技术领域，具体而言，涉及一种曝光机台的门板密闭监测系统、方法、装置、计算机可读存储介质和电子设备。
背景技术
曝光机台外部的门板可以将机台内部环境与外部环境隔离开，避免颗粒物从外部环境进入机台内部，影响产品良率。同时有些门板下有很多电路板和断路器，如果门板不能完全闭合的话，容易造成安全隐患。
在机台进行生产的过程中，随着机台震动及气流影响，门板门锁会出现松动，进而出现门板打开的情况。受门板结构设计因素影响，判断门板是否完全闭合即是否密闭难度较大。
如何简单方便地监测门板是否完全闭合是当前亟需解决的技术问题。
发明内容
本公开实施例的目的在于提供一种曝光机台的门板密闭监测系统、方法、装置、计算机可读存储介质和电子设备，进而至少在一定程度上提高产品的良率。
本公开的其它特性和优点将通过下面的详细描述变得显然，或部分地通过本公开的实践而习得。
根据本公开实施例的第一方面，提供了一种曝光机台的门板密闭监测系统，所述门板密闭监测系统包括：伺服电机，所述伺服电机的转动轴与所述门板的转动轴同轴固定连接；光电编码器，设置于所述伺服电机上，用于测量所述伺服电机的转动轴转过的角度；控制器，与所述伺服电机和所述光电编码器连接，用于控制所述伺服电机转动，并根据所述角度判断所述门板是否密闭。
根据本公开实施例的第二方面，提供了一种曝光机台的门板密闭监测方法，所述曝光机台的门板的轴与一伺服电机的轴同轴固定连接，所述伺服电机上设置有用于检测所述伺服电机的转动轴转过角度的光电编码器；所述门板密闭监测方法包括：生成伺服电机控制信号，以控制所述伺服电机转动；获取光电编码器检测到的所述伺服电机的转动轴转过的角度；根据所述角度判断所述门板是否密闭。
根据本公开实施例的第三方面，提供了一种曝光机台的门板密闭监测装置，所述曝光机台的门板的轴与一伺服电机的轴同轴固定连接，所述伺服电机上设置有用于检测所述伺服电机的转动轴转过角度的光电编码器；所述门板密闭监测装置包括：控制单元，用于生成伺服电机控制信号，以控制所述伺服电机转动；获取单元，用于获取光电编码器检测到的所述伺服电机的转动轴转过的角度；判断单元，用于根据所述角度判断所述门板是否密闭。
根据本公开实施例的第四方面，提供了一种计算机可读存储介质，其上存储有计算机程序，所述程序被处理器执行时实现如上述实施例中第二方面所述的曝光机台的门板密闭监测方法。
根据本公开实施例的第五方面，提供了一种电子设备，包括：一个或多个处理器；存储装置，用于存储一个或多个程序，当所述一个或多个程序被所述一个或多个处理器执行时，使得所述一个或多个处理器实现如上述实施例中第二方面所述的曝光机台的门板密闭监测方法。
本公开实施例提供的技术方案可以包括以下有益效果：
在本公开的一些实施例所提供的技术方案中，通过应用与门板同轴转动的伺服电机来打开或关闭门板，并且应用光电编码器来测量伺服电机的转动轴转过的角度，可以监测门板是否密闭，从而提高产品的良率。
应当理解的是，以上的一般描述和后文的细节描述仅是示例性和解释性的，并不能限制本公开。
附图说明
此处的附图被并入说明书中并构成本说明书的一部分，示出了符合本公开的实施例，并与说明书一起用于解释本公开的原理。显而易见地，下面描述中的附图仅仅是本公开的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据 这些附图获得其它的附图。在附图中：
图1示意性示出了根据本公开的一种实施例的曝光机台的门板密闭监测系统的示意图；
图2示意性示出了根据本公开的一种实施例的门板的示意图；
图3a示意性示出了根据本公开的一种实施例的人机交互装置的示意图；
图3b示意性示出了根据本公开的一种实施例的声光报警电路的示意图；
图4示意性示出了根据本公开的一种实施例的曝光机台的门板密闭监测方法的流程图；
图5a示意性示出了根据本公开的一种实施例的曝光机台的门板密闭监测过程的示意图；
图5b示意性示出了根据本公开的另一种实施例的曝光机台的门板密闭监测过程的示意图；
图5c示意性示出了根据本公开的又一种实施例的曝光机台的门板密闭监测过程的示意图；
图6示意性示出了根据本公开一种实施例的曝光机台的门板密闭监测装置的方框图；
图7示意性示出了适于用来实现本公开实施例的电子设备的计算机系统的结构图。
具体实施方式
现在将参考附图更全面地描述示例性实施方式。然而，示例性实施方式能够以多种形式实施，且不应被理解为限于在此阐述的范例；相反，提供这些实施例使得本公开将更加全面和完整，并将示例性实施方式的构思全面地传达给本领域的技术人员。图中相同的附图标记表示相同或类似的结构，因而将省略它们的详细描述。
虽然本说明书中使用相对性的用语，例如“上”“下”来描述图标的一个组件对于另一组件的相对关系，但是这些术语用于本说明书中仅出于方便，例如根据附图中所述的示例的方向。能理解的是，如果将图标的模块翻转使其上下颠倒，则所叙述在“上”的组件将会成为在“下”的组件。其他相对性的用语，例如“高”“低”“顶”“底”“左”“右”等也作具有类似含义。当某结构在其它结构“上”时，有可能是指某结构一体形成于其它结构上，或指某结构“直接”设置在其它结构上，或指某结构通过另一结构“间接”设置在其它结构上。
用语“一个”、“一”、“所述”用以表示存在一个或多个要素/组成部分/等；用语 “包括”和“具有”用以表示开放式的包括在内的意思并且是指除了列出的要素/组成部分/等之外还可存在另外的要素/组成部分/等。
在相关技术中，曝光机台的门板(cover)通过手动打开和闭合，操作步骤比较繁琐。具体地，在闭合门板时，需要内六角扳手对门板的门锁进行手动锁紧。如果门板未完全闭合，在将当前的门板重新锁紧时，需要寻找六角扳手，如果不在身边，则不能快速将门板锁紧。
此外，门板是否密闭无法进行监测，而在门板未完全闭合时，会有外部颗粒进入机台内部，影响产品良率。
为解决以上问题，本公开提供一种曝光机台的门板密闭监测系统、方法、装置、计算机可读存储介质和电子设备，以自动打开和闭合门板，并提高产品的良率。
如图1所示，本公开实施例提供了一种曝光机台的门板密闭监测系统，门板密闭监测系统包括：伺服电机140，伺服电机140的转动轴与门板120的转动轴130同轴固定连接；光电编码器(图中未示出)，设置于伺服电机上，用于测量伺服电机的转动轴转过的角度；控制器150，与伺服电机和光电编码器连接，用于控制伺服电机转动，并根据角度判断门板120是否密闭。
控制器通过专用的电机驱动芯片驱动伺服电机做顺时针或逆时针转动，电机驱动芯片既可以根据控制器生成并发送伺服电机控制信号驱动伺服电机转动，又可以将伺服电机内部检测到的反馈信号传递给控制器，形成闭环控制，二者共同完成对门板的控制。这里，控制器可以为微处理器。
伺服电机可以根据光电编码器来计算伺服电机转动角度，并通过存储电路记录伺服电机对应的转动角度，实现了对门板转动角度的测量，从而可以对门板密闭状态进行监控。
在光电编码器工作时，光投射在光电编码器的码盘上，码盘随运动物体一起转动，透过亮区的光经过狭缝后由光电编码器的光敏元件接受，光敏元件的排列与码道一一对应，亮区和暗区的光敏元件输出的信号分别为“1”和“0”。当光电编码器的码盘转动在不同位置时，光敏元件输出信号的组合为具有一定规律的数字量，其代表了码盘轴的角位移。
伺服电机转动的初始角度值可以被设置为0。可以设定伺服电机的转动轴沿一种方向转动时，测量角度随之增加；转动方向改变时，测量角度随之减少。默认在门板在完全闭合时，伺服电机转动的角度为0，随着门板与门板框架110之间张开角度的增加，伺服电机转动的角度同等增加。
将伺服电机的转动轴与门板的转动轴固定在一起，可以实现门板伴随伺服电机一起转 动，伺服电机内部附带的光电编码器，可以计算门板转动角度，通过该转动角度即可以间接计算门板开度，判断门板是否完全闭合。
伺服电机可以带动机械部件转动，并可以控制转动速度，位置精度非常准确。具体地，伺服电机可以将电压信号转化为转矩和转速以驱动门板的转动轴。伺服电机转子转速受输入信号控制，并能快速反应。在自动控制系统中，伺服电机用作执行元件，可以把所接收到的电信号转换成电动机伺服电机的转动轴上的角位移或角速度输出。伺服电机在信号电压为零时无自转现象，从而可以使调节得打开或闭合门板之后，门板处于静止状况。
伺服电机主要靠脉冲来定位，伺服电机接收到1个脉冲，就会转动1个脉冲对应的角度，从而实现位移。伺服电机本身具备发出脉冲的功能，所以伺服电机每转动一个角度，都会发出对应数量的脉冲，和伺服电机接受的脉冲形成了呼应即闭环，这样，系统可以知道发送脉冲给伺服电机的数量，和收回脉冲的数量，从而能够很精确的控制电机的转动，以实现精确的定位，例如，定位精度可以达到0.001mm。
如图1所示，门板密闭监测系统还包括：接近开关感应板121，设置于门板的远离门板的转动轴的一侧的上方；接近开关传感器111，与控制器信号连接，与接近开关感应板相对应地设置于曝光机台的门板框架上的远离门板的转动轴的一侧的上方，用于在门板闭合，接近开关感应板靠近接近开关传感器时，生成接近信号并发送给控制器。
这里，接近开关可以为电感式接近开关，机台门板框架上安装的电感式接近开关传感器，可以测量门板与门板框架的距离，并可以与伺服电机自身通过光电编码器计算伺服电机的转动轴的转动角度相互补充，以防止门板已经完全关闭，伺服电机还在继续带动门板转动，损坏门板和伺服电机，从而对装置起到较好的防护作用。
在接近开关感应板距离门板框架为50mm时，进入接近开关传感器的工作范围，这时控制器可以发送减速指令，伺服电机开始减速，最后以较慢的速度使门板与机台的门板框架接近，使闭合动作更加顺畅。
接近开关传感器的输出信号经由信号调理电路进行信号的放大、稳压、滤波、并完成A/D转换后，最终变成控制器可以识别的数字信号。
电感式接近开关传感器由三大部分组成：振荡器、开关电路以及放大输出电路。振荡器产生一个交变磁场。当接近开关感应板等金属目标接近这一磁场，并达到感应距离时，在金属目标内产生涡流，从而导致金属震荡器衰减，以至停振。振荡器振荡及停振的变化被后级放大输出电路处理并转换成开关信号，并最终传送到控制器，从而达到非接触式的检测目的。
门板密闭监测系统还包括：金属吸板123，设置于门板的远离门板的转动轴的一侧的下方；电磁铁113，与控制器信号连接，与金属吸板123相对应地设置于曝光机台的门板框架上的远离门板的转动轴的一侧的下方，用于根据控制器发送的电磁铁控制信号吸合金属吸板。
此外，金属吸板122和电磁铁112还可以成对设置在门板和门板框架的远离门板的转动轴的一侧的下方。
在本公开实施例中，如图2所示，门板的宽为700mm，则电磁铁力臂为700mm，而伺服电机的力臂约为5mm，这样，在门板距离电磁铁较近时，使用电磁铁吸合门板较为省力。
由于控制器的输出信号电压为5v，电磁铁工作电压为220v，因此需要用电磁继电器控制电磁铁所在回路的通断，来控制电磁铁的吸力的有无。
如图1所示，门板密闭监测系统中还包括电磁继电器160，连接于控制器150和电磁铁113之间，用于根据控制器发送的电磁铁控制信号控制电磁继电器所在的通路的通断。
电磁继电器上对电磁铁进行控制的引脚输出低电平时，电磁铁不工作，衔铁复位。在需要吸合门板上的金属吸板时，电磁继电器上对电磁铁进行控制的引脚输出高电平，电磁铁控制回路导通，电磁铁产生磁力，牢牢吸住门板。
继电器是一种电控制器件，它可以控制系统和被控制系统之间的互动关系。通常应用于自动化的控制电路中，它实际上是用小电流去控制大电流运作的一种“自动开关”，在电路中起着自动调节、安全保护、转换电路等作用。电磁继电器一般由铁芯、线圈、衔铁、触点簧片等组成的。只要在线圈两端加上一定的电压，线圈中就会流过一定的电流，从而产生电磁效应，衔铁就会在电磁力吸引的作用下克服返回弹簧的拉力吸向铁芯，从而带动衔铁的动触点与常开触点吸合。当线圈断电后，电磁的吸力也随之消失，衔铁就会在弹簧的反作用力返回原来的位置，使动触点与原来的常闭触点释放。这样吸合、释放，达到了在电路中的导通、切断的目的。其中，继电器线圈未通电时处于断开状态的静触点，称为“常开触点”；处于接通状态的静触点称为“常闭触点”。继电器一般有两股电路，为低压控制电路和高压工作电路。其中，在本公开实施例中，低压控制电路与控制器连接，高压工作电路与电磁铁连接。
如图1所示，门板密闭监测系统还包括人机交互装置170，与控制器信号连接，用于根据控制器发送的状态信号显示门板的打开或闭合的状态，并通过手动操作使得控制器生成伺服电机控制信号，以控制门板打开或闭合。
如图3a所示，人机交互装置可以包括显示单元310和键盘320。
显示单元310可以实时显示当前门板的工作状态，门板与门板框架的距离为0mm时门板为关闭状态，门板关闭状态指示灯会亮起，门板与门板框架的距离大于0mm时打开指示灯会亮起，其他指示灯全部熄灭。如果电机正在转动，则只有动作中指示灯亮起。通过显示单元的门板当前状态显示功能，可以及时了解机台门板的实时状态。
键盘320中的按键与人机交互装置的控制器的输入引脚对应连接，按键断开时，该按键对应的引脚的电压为5V，按键按下后，该按键对应的引脚的电压为0。根据引脚电压变化可以判断出是否有按键按下，然后根据软件编程设定，执行对应的按键功能。
人机交互装置可以为触摸屏，触摸屏的驱动译码芯片可以使得触摸屏显示控制器发送的信息，并将触摸屏感应到的输入信号，转换成输出信号，驱动执行元件实现装置要求的功能。
控制器驱动的显示单元可以显示门板打开角度及接近开关传感器检测到的机台框架与门板的距离，可以较为直观的看到门板当前状况；使按键及按键电路，可以在无需使用扭矩扳手时即可实现对门板的手动打开和关闭。
伺服电机会根据转动角度计算当前门板的打开角度，并在显示屏上面显示。手动模式可以通过按键实现门板的手动打开或关闭，对应按键按下，可以实现门板的打开或关闭。
如图1所示，门板密闭监测系统还包括声光报警电路180，与控制器连接，用于在门板处于未完全闭合的状态的时间达到设定的第一时间段时，根据控制器生成的报警信号进行声光报警，未完全闭合的状态是指门板与门板框架的距离大于设定的第一距离。
声光报警电路可以在门板打开超过2h，提醒操作人员确认当前门板状态，及时关闭门板。在门板距离门板框架角度大于2度内，且超过2h未关闭，电磁铁自动将门板吸合，专业那个即使出现人为漏关门板，装置能自动关闭。采用电磁铁吸合方式中的吸力较强，可以避免门板松动。
如图3b所示的一种声光报警电路中，控制器检测到门板密闭时，输入输出接口P1.0输出低电平，绿色LED灯点亮，输入输出接口P1.2输出低电平，三极管截止，蜂鸣器不工作。当控制器检测到门板未密闭时，输入输出接口P1.1引脚输出低电平，红色LED指示灯点亮，输入输出接口P1.2输出高电平，与蜂鸣器相连的三极管Q1导通，蜂鸣器工作。
图4示意性示出了根据本公开的一种实施例的曝光机台的门板密闭监测方法的流程图。本公开实施例提供的方法可以由任意具备计算机处理能力的电子设备执行，例如终端设备和/或服务器。在本公开实施例中，曝光机台的门板的轴与一伺服电机的轴同轴固定 连接，伺服电机上设置有用于检测伺服电机的转动轴转过角度的光电编码器。如图4所示，本公开示例性实施例提供一种曝光机台的门板密闭监测方法，包括：
步骤S402，生成伺服电机控制信号，以控制伺服电机转动。
步骤S404，获取光电编码器检测到的伺服电机的转动轴转过的角度。
步骤S406，根据角度判断门板是否密闭。
在本公开实施例中，曝光机台的门板框架上设置有接近开关传感器，门板上对应设置有接近开关感应板，上述门板密闭监测方法还包括：在接近开关传感器在感应到接近开关感应板接近时生成的接近开关信号表征门板与门板框架的距离小于设定的第二距离时，生成第一控制信号，以控制伺服电机减速；在接近开关传感器在感应到接近开关感应板接近时生成的接近开关信号表征门板与门板框架的距离等于0时，生成第二控制信号，以控制伺服电机停止工作。这里，第二距离可以为50mm。在本公开实施例中，曝光机台的门板框架上设置有电磁铁，门板上对应设置有金属吸板，上述门板密闭监测方法还包括：在接近开关传感器在感应到接近开关感应板接近时生成的接近开关信号表征门板与门板框架的距离小于第一距离时，生成电磁铁控制信号，以控制电磁铁与金属吸板吸合。这里第一距离可以为50mm。
在本公开实施例中，控制器与人机交互装置连接，上述门板密闭监测方法还包括：发送状态信号给人机交互装置，以显示门板的打开或闭合的状态；采集人机交互装置采集的人机交互信号并根据人机交互信号生成伺服电机控制信号，以控制门板打开或闭合。
在本公开实施例中，控制器与声光报警电路连接，上述密闭检测方法还包括：在门板处于未完全闭合的状态的时间达到设定的第一时间段时，生成报警信号，并发送给声光报警电路，以进行声光报警，未完全闭合的状态是指门板与门板框架的距离大于设定的第一距离。
由于伺服电机的力臂大约为5mm，其在扭矩上面有一定的局限性，因此在门板距离框架50mm以内，电磁铁由于吸力上面的优势，又处于杠杆的边缘，可以作为主要门板的关闭方式，在一定时间内检测到门板未关闭，将自动将门板吸合。
这里，第一时间段可以为2h，第一距离可以为50mm，也可以为25mm。如图5a所示，当门板距离门板框架的距离大于25mm时，盖板的张角超过2°，控制器中的计时器开始工作，当计时时间超过2h，会驱动声光报警电路给工作人员进行提示。工作人员在确认机台正在排除故障时，通过复位按键，将装置恢复到初始0状态，重新计时。如果是排除故障完之后，忘记关闭，则装置驱动伺服电机转动和电磁铁工作，将门板闭合。
如图5b和图5c所示，在按下打开和闭合操作按键后，控制器控制伺服电机和电磁铁对门板进行打开和闭合。
在本公开实施例提供的曝光机台的门板密闭监测方法中，通过应用与门板同轴转动的伺服电机来打开或关闭门板，并且应用光电编码器来测量伺服电机的转动轴转过的角度，可以监测门板是否密闭，从而提高产品的良率。
以下介绍本公开的装置实施例，可以用于执行本公开上述的曝光机台的门板密闭监测方法。在本公开实施例中，曝光机台的门板的轴与一伺服电机的轴同轴固定连接，伺服电机上设置有用于检测伺服电机的转动轴转过角度的光电编码器。如图6所示，根据本公开实施例提供的一种曝光机台的门板密闭监测装置600可以包括：
控制单元602，用于生成伺服电机控制信号，以控制伺服电机转动。
获取单元604，用于获取光电编码器检测到的伺服电机的转动轴转过的角度。
判断单元606，用于根据角度判断门板是否密闭。
由于本公开的示例实施例的曝光机台的门板密闭监测装置的各个功能模块与上述曝光机台的门板密闭监测方法的示例实施例的步骤对应，因此对于本公开装置实施例中未披露的细节，请参照本公开上述的曝光机台的门板密闭监测方法的实施例。
在本公开实施例提供的曝光机台的门板密闭监测装置中，通过应用与门板同轴转动的伺服电机来打开或关闭门板，并且应用光电编码器来测量伺服电机的转动轴转过的角度，可以监测门板是否密闭，从而提高产品的良率。
下面参考图7，其示出了适于用来实现本公开实施例的电子设备的计算机系统700的结构示意图。图7示出的电子设备的计算机系统700仅是一个示例，不应对本公开实施例的功能和使用范围带来任何限制。
如图7所示，计算机系统700包括中央处理单元(CPU)701，其可以根据存储在只读存储器(ROM)702中的程序或者从存储部分708加载到随机访问存储器(RAM)703中的程序而执行各种适当的动作和处理。在RAM 703中，还存储有系统操作所需的各种程序和数据。CPU 701、ROM 702以及RAM 703通过总线704彼此相连。输入/输出(I/O)接口705也连接至总线704。
以下部件连接至I/O接口705：包括键盘、鼠标等的输入部分706；包括诸如阴极射线管(CRT)、液晶显示器(LCD)等以及扬声器等的输出部分707；包括硬盘等的存储部分708；以及包括诸如LAN卡、调制解调器等的网络接口卡的通信部分709。通信部分709经由诸如因特网的网络执行通信处理。驱动器710也根据需要连接至I/O接口705。 可拆卸介质711，诸如磁盘、光盘、磁光盘、半导体存储器等等，根据需要安装在驱动器710上，以便于从其上读出的计算机程序根据需要被安装入存储部分708。
特别地，根据本公开的实施例，上文参考流程图描述的过程可以被实现为计算机软件程序。例如，本公开的实施例包括一种计算机程序产品，其包括承载在计算机可读存储介质上的计算机程序，该计算机程序包含用于执行流程图所示的方法的程序代码。在这样的实施例中，该计算机程序可以通过通信部分709从网络上被下载和安装，和/或从可拆卸介质711被安装。在该计算机程序被中央处理单元(CPU)701执行时，执行本申请的系统中限定的上述功能。
需要说明的是，本公开所示的计算机可读存储介质可以是计算机可读信号介质或者计算机可读存储介质或者是上述两者的任意组合。计算机可读存储介质例如可以是——但不限于——电、磁、光、电磁、红外线、或半导体的系统、装置或器件，或者任意以上的组合。计算机可读存储介质的更具体的例子可以包括但不限于：具有一个或多个导线的电连接、便携式计算机磁盘、硬盘、随机访问存储器(RAM)、只读存储器(ROM)、可擦式可编程只读存储器(EPROM或闪存)、光纤、便携式紧凑磁盘只读存储器(CD-ROM)、光存储器件、磁存储器件、或者上述的任意合适的组合。在本公开中，计算机可读存储介质可以是任何包含或存储程序的有形介质，该程序可以被指令执行系统、装置或者器件使用或者与其结合使用。而在本公开中，计算机可读的信号介质可以包括在基带中或者作为载波一部分传播的数据信号，其中承载了计算机可读的程序代码。这种传播的数据信号可以采用多种形式，包括但不限于电磁信号、光信号或上述的任意合适的组合。计算机可读的信号介质还可以是计算机可读存储介质以外的任何计算机可读存储介质，该计算机可读存储介质可以发送、传播或者传输用于由指令执行系统、装置或者器件使用或者与其结合使用的程序。计算机可读存储介质上包含的程序代码可以用任何适当的介质传输，包括但不限于：无线、电线、光缆、RF等等，或者上述的任意合适的组合。
附图中的流程图和框图，图示了按照本公开各种实施例的系统、方法和计算机程序产品的可能实现的体系架构、功能和操作。在这点上，流程图或框图中的每个方框可以代表一个模块、程序段、或代码的一部分，上述模块、程序段、或代码的一部分包含一个或多个用于实现规定的逻辑功能的可执行指令。也应当注意，在有些作为替换的实现中，方框中所标注的功能也可以以不同于附图中所标注的顺序发生。例如，两个接连地表示的方框实际上可以基本并行地执行，它们有时也可以按相反的顺序执行，这依所涉及的功能而定。也要注意的是，框图或流程图中的每个方框、以及框图或流程图中的方框的组合，可以用 执行规定的功能或操作的专用的基于硬件的系统来实现，或者可以用专用硬件与计算机指令的组合来实现。
描述于本公开实施例中所涉及到的单元可以通过软件的方式实现，也可以通过硬件的方式来实现，所描述的单元也可以设置在处理器中。其中，这些单元的名称在某种情况下并不构成对该单元本身的限定。
作为另一方面，本申请还提供了一种计算机可读存储介质，该计算机可读存储介质可以是上述实施例中描述的电子设备中所包含的；也可以是单独存在，而未装配入该电子设备中。上述计算机可读存储介质承载有一个或者多个程序，当上述一个或者多个程序被一个该电子设备执行时，使得该电子设备实现如上述实施例中所述的曝光机台的门板密闭监测方法。
例如，所述的电子设备可以实现如图4中所示的：步骤S402，生成伺服电机控制信号，以控制所述伺服电机转动。步骤S404，获取光电编码器检测到的所述伺服电机的转动轴转过的角度。步骤S406，根据所述角度判断所述门板是否密闭。
又如，所述的电子设备还可以实现如图5a、图5b和图5c所示的各个步骤。
应当注意，尽管在上文详细描述中提及了用于动作执行的设备的若干模块或者单元，但是这种划分并非强制性的。实际上，根据本公开的实施方式，上文描述的两个或更多模块或者单元的特征和功能可以在一个模块或者单元中具体化。反之，上文描述的一个模块或者单元的特征和功能可以进一步划分为由多个模块或者单元来具体化。
通过以上的实施方式的描述，本领域的技术人员易于理解，这里描述的示例实施方式可以通过软件实现，也可以通过软件结合必要的硬件的方式来实现。因此，根据本公开实施方式的技术方案可以以软件产品的形式体现出来，该软件产品可以存储在一个非易失性存储介质(可以是CD-ROM，U盘，移动硬盘等)中或网络上，包括若干指令以使得一台计算设备(可以是个人计算机、服务器、触控终端、或者网络设备等)执行根据本公开实施方式的方法。
本领域技术人员在考虑说明书及实践这里公开的公开后，将容易想到本公开的其它实施方案。本申请旨在涵盖本公开的任何变型、用途或者适应性变化，这些变型、用途或者适应性变化遵循本公开的一般性原理并包括本公开未公开的本技术领域中的公知常识或惯用技术手段。说明书和实施例仅被视为示例性的，本公开的真正范围和精神由下面的权利要求指出。
应当理解的是，本公开并不局限于上面已经描述并在附图中示出的精确结构，并且可 以在不脱离其范围进行各种修改和改变。本公开的范围仅由所附的权利要求来限制。

Claims (20)

  1. 一种曝光机台的门板密闭监测系统，包括：
    伺服电机，所述伺服电机的转动轴与所述门板的转动轴同轴固定连接；
    光电编码器，设置于所述伺服电机上，用于测量所述伺服电机的转动轴转过的角度；
    控制器，与所述伺服电机和所述光电编码器连接，用于控制所述伺服电机转动，并根据所述角度判断所述门板是否密闭。
  2. 根据权利要求1所述的曝光机台的门板密闭监测系统，还包括：
    接近开关感应板，设置于所述门板的远离所述门板的转动轴的一侧的上方；
    接近开关传感器，与所述控制器信号连接，与所述接近开关感应板相对应地设置于所述曝光机台的门板框架上的远离所述门板的转动轴的一侧的上方，用于在所述门板闭合，所述接近开关感应板靠近所述接近开关传感器时，生成接近信号并发送给所述控制器。
  3. 根据权利要求2所述的曝光机台的门板密闭监测系统，其中，所述接近感应开关为电感式接近开关，所述接近开关传感器为电感式接近开关传感器。
  4. 根据权利要求1所述的曝光机台的门板密闭监测系统，还包括：
    金属吸板，设置于所述门板的远离所述门板的转动轴的一侧的下方；
    电磁铁，与所述控制器信号连接，与所述金属吸板相对应地设置于所述曝光机台的门板框架上的远离所述门板的转动轴的一侧的下方，用于根据所述控制器发送的电磁铁控制信号吸合所述金属吸板。
  5. 根据权利要求4所述的曝光机台的门板密闭监测系统，其中，所述金属吸板和所述电磁铁成对设置在所述门板和所述曝光机台的门板框架的远离所述门板的转动轴的一侧的下方。
  6. 根据权利要求4所述的曝光机台的门板密闭监测系统，其中，所述门板的宽为700mm，所述电磁铁力臂为700mm，所述伺服电机的力臂为5mm。
  7. 根据权利要求1所述的曝光机台的门板密闭监测系统，还包括：
    人机交互装置，与所述控制器信号连接，用于根据所述控制器发送的状态信号显示所述门板的打开或闭合的状态，并通过手动操作使得所述控制器生成伺服电机控制信号，以控制所述门板打开或闭合。
  8. 根据权利要求4所述的曝光机台的门板密闭监测系统，还包括：
    电磁继电器，连接于所述控制器和所述电磁铁之间，用于根据所述控制器发送的电磁铁控制信号控制所述电磁继电器所在的通路的通断。
  9. 根据权利要求8所述的曝光机台的门板密闭监测系统，其中，所述电磁继电器具有低压控制电路和高压工作电路，所述低压控制电路与所述控制器连接，所述高压工作电路与所述电磁铁连接。
  10. 根据权利要求1所述的曝光机台的门板密闭监测系统，还包括：
    声光报警电路，与所述控制器连接，用于在所述门板处于未完全闭合的状态的时间达到设定的第一时间段时，根据所述控制器生成的报警信号进行声光报警，所述未完全闭合的状态是指所述门板与所述门板框架的距离大于设定的第一距离。
  11. 一种曝光机台的门板密闭监测方法，其中，所述曝光机台的门板的轴与一伺服电机的轴同轴固定连接，所述伺服电机上设置有用于检测所述伺服电机的转动轴转过角度的光电编码器；所述门板密闭监测方法包括：
    生成伺服电机控制信号，以控制所述伺服电机转动；
    获取光电编码器检测到的所述伺服电机的转动轴转过的角度；
    根据所述角度判断所述门板是否密闭。
  12. 根据权利要求11所述的曝光机台的门板密闭监测方法，其中，所述曝光机台的门板框架上设置有接近开关传感器，所述门板上对应设置有接近开关感应板，所述门板密闭监测方法还包括：
    在所述接近开关传感器在感应到所述接近开关感应板接近时生成的接近开关信号表征所述门板与所述门板框架的距离小于设定的第二距离时，生成第一控制信号，以控制所述伺服电机减速；
    在所述接近开关传感器在感应到所述接近开关感应板接近时生成的接近开关信号表征所述门板与所述门板框架的距离等于0时，生成第二控制信号，以控制所述伺服电机停止工作。
  13. 根据权利要求12所述的曝光机台的门板密闭监测方法，其中，所述曝光机台的门板框架上设置有电磁铁，所述门板上对应设置有金属吸板，所述门板密闭监测方法还包括：
    在所述接近开关传感器在感应到所述接近开关感应板接近时生成的接近开关信号表征所述门板与所述门板框架的距离小于第一距离时，生成电磁铁控制信号，以控制所述电磁铁与所述金属吸板吸合。
  14. 根据权利要求13所述的曝光机台的门板密闭监测方法，其中，所述第一距离和所述第二距离均为50mm。
  15. 根据权利要求11所述的曝光机台的门板密闭监测方法，还包括：
    发送状态信号给人机交互装置，以显示所述门板的打开或闭合的状态；
    采集所述人机交互装置采集的人机交互信号并根据所述人机交互信号生成伺服电机控制信号，以控制所述门板打开或闭合。
  16. 根据权利要求11所述的曝光机台的门板密闭监测方法，还包括：
    在所述门板处于未完全闭合的状态的时间达到设定的第一时间段时，生成报警信号，并发送给声光报警电路，以进行声光报警，所述未完全闭合的状态是指所述门板与所述门板框架的距离大于设定的第一距离。
  17. 根据权利要求16所述的曝光机台的门板密闭监测方法，其中，所述第一时间段为2h，所述第一距离为50mm或25mm。
  18. 一种曝光机台的门板密闭监测装置，其中，所述曝光机台的门板的轴与一伺服电机的轴同轴固定连接，所述伺服电机上设置有用于检测所述伺服电机的转动轴转过角度的光电编码器；所述门板密闭监测装置包括：
    控制单元，用于生成伺服电机控制信号，以控制所述伺服电机转动；
    获取单元，用于获取光电编码器检测到的所述伺服电机的转动轴转过的角度；
    判断单元，用于根据所述角度判断所述门板是否密闭。
  19. 一种计算机可读存储介质，其上存储有计算机程序，其中，所述程序被处理器执行时实现如权利要求11至17中任一项所述的曝光机台的门板密闭监测方法。
  20. 一种电子设备，包括：
    一个或多个处理器；
    存储装置，用于存储一个或多个程序，当所述一个或多个程序被所述一个或多个处理器执行时，使得所述一个或多个处理器实现如权利要求11至17中任一项所述的曝光机台的门板密闭监测方法。
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