WO2022030177A1 - Capteur de courant électrique - Google Patents

Capteur de courant électrique Download PDF

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Publication number
WO2022030177A1
WO2022030177A1 PCT/JP2021/025882 JP2021025882W WO2022030177A1 WO 2022030177 A1 WO2022030177 A1 WO 2022030177A1 JP 2021025882 W JP2021025882 W JP 2021025882W WO 2022030177 A1 WO2022030177 A1 WO 2022030177A1
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Prior art keywords
electrode portion
detection element
magnetic detection
connection electrode
current
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PCT/JP2021/025882
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English (en)
Japanese (ja)
Inventor
秀幸 佐藤
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株式会社村田製作所
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Publication of WO2022030177A1 publication Critical patent/WO2022030177A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
    • G01R15/20—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using galvano-magnetic devices, e.g. Hall-effect devices, i.e. measuring a magnetic field via the interaction between a current and a magnetic field, e.g. magneto resistive or Hall effect devices

Definitions

  • the present invention relates to a current sensor.
  • Patent Document 1 Japanese Patent Application Laid-Open No. 2016-40558
  • Patent Document 2 Japanese Patent Application Laid-Open No. 2017-133943
  • Patent Document 3 Japanese Patent Application Laid-Open No. 2020-30046
  • the current sensor described in Patent Document 1 includes a U-shaped conductor, a first magnetic detection element, and a second magnetic detection element.
  • the U-shaped conductor includes a first conductor portion and a second conductor portion extending in parallel at intervals from each other, and a third conductor portion connecting the first conductor portion and the second conductor portion to each other.
  • the first magnetic detection element detects a magnetic field generated by a measurement target current flowing through the first conductor portion.
  • the second magnetic detection element detects the magnetic field generated by the measurement target current flowing through the second conductor portion.
  • Each of the first magnetic detection element and the second magnetic detection element detects the magnetic field component in the first direction of the magnetic field generated by the measurement target current. From the outputs of the first magnetic detection element and the second magnetic detection element, the value of the current to be measured flowing through the U-shaped conductor is calculated.
  • the current sensor described in Patent Document 2 includes a first conductor portion, a second conductor portion, a third conductive portion, a fourth conductive portion, a first magnetic sensor, and a second magnetic sensor. And prepare. The current inflow portion of the first conductor portion and the current inflow portion of the second conductor portion are electrically connected by the third conductive portion. The current outflow portion of the first conductor portion and the current outflow portion of the second conductor portion are electrically connected by the fourth conductive portion. A first magnetic sensor and a second magnetic sensor are provided in the non-conductive region.
  • the current sensor described in Patent Document 3 includes a conductor, a first magnetic element, a second magnetic element, a substrate, and a lead frame.
  • a part of the current to be measured flows through the first flow path portion.
  • a current other than the above-mentioned part of the current to be measured flows through the second flow path portion.
  • the first magnetic element detects the strength of the first magnetic field generated by the current flowing in the first flow path portion.
  • the second magnetic element detects the strength of the second magnetic field generated by the current flowing in the second flow path portion.
  • the substrate holds the first magnetic element and the second magnetic element.
  • the lead frame is connected to the first magnetic element, the second magnetic element, and the substrate.
  • the lead frame is provided on one main surface side of the substrate.
  • the first magnetic element and the second magnetic element are arranged between the first flow path portion and the second flow path portion, and between the lead frame and one main surface of the substrate.
  • Japanese Unexamined Patent Publication No. 2016-40558 Japanese Unexamined Patent Publication No. 2017-133943 Japanese Unexamined Patent Publication No. 2020-30046
  • the magnetic field component in the second direction orthogonal to the first direction in the magnetic field generated by the current to be measured acts on each of the first magnetic detection element and the second magnetic detection element. If this is the case, the characteristics such as the linearity of the outputs of the first magnetic detection element and the second magnetic detection element are deteriorated. As a result, the measurement accuracy of the current sensor is reduced.
  • the current sensors described in Patent Documents 2 and 3 cannot be applied to surface mount type current sensors.
  • the present invention has been made in view of the above problems, and suppresses the action of the magnetic field component in the direction orthogonal to the magnetic field detection direction of the magnetic detection element on the magnetic detection element, and accurately measures the current to be measured. It is an object of the present invention to provide a surface mountable current sensor as well as being able to measure the value of.
  • the current sensor based on the present invention includes a conductor, a first magnetic detection element, and a second magnetic detection element.
  • Each of the magnetic detection element and the second magnetic detection element detects the magnetic field component in the first direction of the magnetic field generated by the measurement target current flowing through the conductor.
  • the conductor includes a first lower electrode portion, a second lower electrode portion, an upper electrode portion, a first connection electrode portion, a second connection electrode portion, and a third connection electrode portion.
  • Each of the first lower electrode portion and the second lower electrode portion is located at a distance from each other in the second direction orthogonal to the first direction.
  • the upper electrode portion is opposed to each of the first lower electrode portion and the second lower electrode portion in a third direction orthogonal to each of the first direction and the second direction, while facing the first lower electrode portion. It extends in two directions.
  • Each of the first connection electrode portion and the second connection electrode portion extends in the third direction while being spaced apart from each other in the second direction, and electrically connects the first lower electrode portion and the upper electrode portion to each other.
  • the third connection electrode portion extends in the third direction, and electrically connects the second lower electrode portion and the upper electrode portion to each other.
  • Each of the first connection electrode portion, the second connection electrode portion, and the third connection electrode portion is axisymmetric with respect to the axis of symmetry extending in the second direction when viewed from the third direction.
  • the first magnetic detection element and the second magnetic detection element are located side by side between the first connection electrode portion and the second connection electrode portion in the second direction.
  • the present invention it is possible to accurately measure the value of the current to be measured by suppressing the magnetic field component in the direction orthogonal to the magnetic field detection direction of the magnetic detection element from acting on the magnetic detection element, and to mount the current sensor on the surface. can do.
  • FIG. 3 is a cross-sectional view of the current sensor of FIG. 1 as viewed from the direction of the arrow along line II-II. It is a circuit diagram which shows the circuit structure of the current sensor which concerns on Embodiment 1 of this invention. It is a vertical cross-sectional view which shows the result of the simulation analysis of the distribution of the current density when the current to be measured flowed through the conductor of the current sensor which concerns on the modification of Embodiment 1 of this invention.
  • FIG. 10 is a plan view of the current sensor of FIG. 10 as viewed from the direction of arrow XI. It is a vertical sectional view which shows the structure of the conductor of the current sensor which concerns on the modification of Embodiment 3 of this invention. It is a top view which shows the structure of the 1st connection electrode part, the 2nd connection electrode part, and the 3rd connection electrode part in the current sensor which concerns on Embodiment 4 of this invention.
  • FIG. 1 is a front view showing the configuration of the current sensor according to the first embodiment of the present invention.
  • FIG. 2 is a cross-sectional view of the current sensor of FIG. 1 as viewed from the direction of the arrow along line II-II.
  • the Y direction is the first direction
  • the X direction is the second direction
  • the Z direction is the third direction.
  • the X direction is orthogonal to the Y direction.
  • the Z direction is orthogonal to each of the X direction and the Y direction.
  • the current sensor 100 includes a conductor 110, a first magnetic detection element 121, and a second magnetic detection element 122.
  • the conductor 110 includes a first lower electrode portion 111, a second lower electrode portion 112, an upper electrode portion 116, a first connection electrode portion, a second connection electrode portion, and a third connection electrode portion.
  • the first connection electrode portion is composed of one first columnar electrode 113.
  • the second connection electrode portion is composed of one second columnar electrode 114.
  • the third connection electrode portion is composed of one third columnar electrode 115.
  • Each of the first columnar electrode 113, the second columnar electrode 114, and the third columnar electrode 115 has a columnar shape.
  • Each of the first lower electrode portion 111 and the second lower electrode portion 112 is located at a distance from each other in the X direction.
  • the upper electrode portion 116 extends in the X direction while facing each of the first lower electrode portion 111 and the second lower electrode portion 112 in the Z direction.
  • Each of the first columnar electrode 113 and the second columnar electrode 114 extends in the Z direction while being spaced apart from each other in the X direction, and electrically connects the first lower electrode portion 111 and the upper electrode portion 116 to each other.
  • the third columnar electrode 115 extends in the Z direction and electrically connects the second lower electrode portion 112 and the upper electrode portion 116 to each other.
  • Each of the first columnar electrode 113, the second columnar electrode 114, and the third columnar electrode 115 is axisymmetric with respect to the axis of symmetry C extending in the X direction when viewed from the Z direction.
  • the conductor 110 is made of copper.
  • the material of the conductor 110 is not limited to this, and may be a metal such as silver or aluminum or an alloy containing these metals.
  • the conductor 110 may be surface-treated.
  • at least one plating layer made of a metal such as nickel, tin, silver, copper or an alloy containing these metals may be provided on the surface of the conductor 110.
  • the first magnetic detection element 121 and the second magnetic detection element 122 are located side by side between the first columnar electrode 113 and the second columnar electrode 114 in the X direction.
  • the first magnetic detection element 121 is located closer to the first columnar electrode 113
  • the second magnetic detection element 122 is located closer to the second columnar electrode 114.
  • Each of the first magnetic detection element 121 and the second magnetic detection element 122 detects a magnetic field component in the Y direction of the magnetic field generated by the measurement target current flowing through the conductor 110.
  • the first magnetic detection element 121 has a sensitivity axis 121a oriented in the + Y direction, and outputs a positive value when a magnetic field component in the + Y direction is detected. It has an odd function input / output characteristic that outputs a negative value when a magnetic field component in the ⁇ Y direction is detected.
  • the second magnetic detection element 122 has a sensitivity axis 121b facing in the ⁇ Y direction, outputs a positive value when detecting a magnetic field component in the ⁇ Y direction, and detects a magnetic field component in the + Y direction. It has an odd function input / output characteristic that outputs a negative value to.
  • FIG. 3 is a circuit diagram showing a circuit configuration of a current sensor according to the first embodiment of the present invention.
  • each of the first magnetic detection element 121 and the second magnetic detection element 122 has a Wheatstone bridge type bridge circuit composed of four TMR (Tunnel Magneto Resistance) elements.
  • each of the first magnetic detection element 121 and the second magnetic detection element 122 replaces the TMR element with a bridge circuit composed of a magnetoresistive element such as a GMR (Giant Magneto Resistance) element or an AMR (Anisotropic Magneto Resistance) element. You may have.
  • each of the first magnetic detection element 121 and the second magnetic detection element 122 may have a half-bridge circuit including two magnetoresistive elements.
  • each of the first magnetic detection element 121 and the second magnetic detection element 122 may be a Hall element.
  • each of the first magnetic detection element 121 and the second magnetic detection element 122 is connected to the adder amplifier 190.
  • the value of the measurement target current flowing through the conductor 110 is calculated by calculating the detection value of the first magnetic detection element 121 and the detection value of the second magnetic detection element 122 by the adder amplifier 190.
  • Each of the first magnetic detection element 121 and the second magnetic detection element 122 may be connected to an adder instead of the adder amplifier 190.
  • FIG. 4 is a vertical sectional view showing the result of simulation analysis of the distribution of the current density when the current to be measured flows through the conductor of the current sensor according to the modified example of the first embodiment of the present invention.
  • FIG. 5 is a plan view showing the result of simulation analysis of the distribution of the current density when the current to be measured flows through the conductor of the current sensor according to the modified example of the first embodiment of the present invention.
  • the constricted portion 111n is formed at a position intermediate in the Z direction of the first lower electrode portion 111.
  • the constricted portion 111n is located below the second columnar electrode 114.
  • the upper electrode portion 116 is axisymmetric with respect to the axis of symmetry C when viewed from the Z direction.
  • the measurement target current flowing from the lower surface of the first lower electrode portion 111 passes through the constricted portion 111n and then is diverted toward the first columnar electrode 113 and the second columnar electrode 114.
  • the current I1 toward the first columnar electrode 113 flows in the ⁇ X direction above the first lower electrode portion 111.
  • a part of the current to be measured flows through the first columnar electrode 113 in the + Z direction.
  • the balance of the current to be measured flows through the second columnar electrode 114 in the + Z direction. Since the current to be measured flows more in the shorter path, the current density of the current I3 flowing through the second columnar electrode 114 was higher than the current density of the current I2 flowing through the first columnar electrode 113.
  • the current I4 directed from the upper electrode portion 116 toward the third columnar electrode 115 flows in the + X direction.
  • each of the first columnar electrode 113, the second columnar electrode 114, and the third columnar electrode 115 is located line-symmetrically with respect to the axis of symmetry C extending in the X direction when viewed from the Z direction.
  • the upper electrode portion 116 is located line-symmetrically with respect to the axis of symmetry C when viewed from the Z direction, the upper portion is above the mounting region of the first magnetic detection element 121 and the second magnetic detection element 122.
  • the current densities of the current I4a flowing through the electrode portion 116 in the + X direction and the + Y direction and the current I4b flowing through the upper electrode portion 116 in the + X direction and the ⁇ Y direction were substantially the same.
  • the current I5 flowing through the third columnar electrode 115 flows in the ⁇ Z direction.
  • the current to be measured flows out from the lower surface of the second lower electrode portion 112.
  • FIG. 6 is a plan view showing the distribution of the magnetic field generated when the current to be measured flows through the conductor of the current sensor according to the first embodiment of the present invention.
  • the vertical axis shows the magnetic flux density (mT)
  • the horizontal axis shows the distance X (mm) from the starting point.
  • the magnetic field generated by the current I1, the current I2, the current I4, and the current I5 flowing with respect to the mounting region of the first magnetic detection element 121 and the second magnetic detection element 122 acts in the + Y direction, and the current I3 is generated.
  • the magnetic field generated by the flow acts in the ⁇ Y direction.
  • the distance X becomes large in the range of 0.6 mm ⁇ X ⁇ 1.6 mm, which is the mounting region of the first magnetic detection element 121 and the second magnetic detection element 122. Therefore, the magnetic field component in the Y direction changed from + 5 mT to ⁇ 5 mT while having linearity.
  • each of the first columnar electrode 113, the second columnar electrode 114, and the third columnar electrode 115 is located line-symmetrically with respect to the axis of symmetry C extending in the X direction when viewed from the Z direction, and Since the upper electrode portion 116 is located line-symmetrically with respect to the axis of symmetry C when viewed from the Z direction, the current density of the current I4a flowing in the + Y direction and the current density of the current I4b flowing in the ⁇ Y direction are different. Since they are substantially the same as each other, the magnetic field component in the X direction generated by the current I4a flowing in the + Y direction and the magnetic field component in the X direction generated by the current I4b flowing in the ⁇ Y direction cancel each other out.
  • the magnetic field components in the X direction and the Z direction acting on each of the first magnetic detection element 121 and the second magnetic detection element 122 can be reduced. It is possible to suppress deterioration of characteristics such as linearity of the outputs of the first magnetic detection element 121 and the second magnetic detection element 122, and it is possible to accurately measure the value of the current to be measured.
  • the first connection electrode portion, the second connection electrode portion, and the third connection electrode portion are positioned line-symmetrically with respect to the axis of symmetry C extending in the X direction when viewed from the Z direction. Since the magnetic field components in the X and Z directions acting on each of the 1 magnetic detection element 121 and the 2nd magnetic detection element 122 can be reduced, the first magnetic detection element 121 also in the current sensor 100 according to the first embodiment of the present invention. In addition, it is possible to suppress deterioration of characteristics such as linearity of the output of each of the second magnetic detection elements 122, and it is possible to accurately measure the value of the current to be measured.
  • the current to be measured is passed from the lower surface of the first lower electrode portion 111 to the lower surface of the second lower electrode portion 112 through the conductor 110. Therefore, the current sensor 100 can be surface-mounted.
  • the current sensor according to the second embodiment of the present invention is different from the current sensor 100 according to the first embodiment of the present invention in that it is chipped including a signal terminal. Therefore, the current according to the first embodiment of the present invention is provided. The description of the configuration similar to that of the sensor 100 will not be repeated.
  • FIG. 8 is a cross-sectional view showing the configuration of the current sensor according to the second embodiment of the present invention.
  • FIG. 9 is a plan view showing through the upper electrode portion and the mold resin in the current sensor according to the second embodiment of the present invention.
  • each of the first lower electrode portion 111 and the second lower electrode portion 112 is formed on one printed circuit board 130. ing. A signal terminal 160 is formed on the printed circuit board 130.
  • the lower surfaces of the first lower electrode portion 111 and the second lower electrode portion 112 are exposed from the lower surface of the printed circuit board 130.
  • a protruding portion 111p is formed on the upper surface of the first lower electrode portion 111. Only the protruding portion 111p of the upper surface of the first lower electrode portion 111 is exposed from the upper surface of the printed circuit board 130, and the portion other than the protruding portion 111p is not exposed from the upper surface of the printed circuit board 130. The upper surface of the first lower electrode portion 111 is exposed from the upper surface of the printed circuit board 130.
  • the first magnetic detection element and the second magnetic detection element are built in the magnetic sensor chip 120.
  • the magnetic sensor chip 120 is mounted on the upper surface of the printed circuit board 130.
  • the magnetic sensor chip 120 is fixed on the printed circuit board 130 by a die attach film, an insulating bonding material, or the like. As a result, each of the first magnetic detection element and the second magnetic detection element is fixed on the printed circuit board 130.
  • the magnetic sensor chip 120 is electrically connected to the signal terminal 160 by a wire 170.
  • the magnetic sensor chip 120 may be electrically connected to the signal terminal 160 by mounting a flip chip.
  • Each of the first columnar electrode 113 and the second columnar electrode 114 is bonded to the protruding portion 111p of the first lower electrode portion 111 by a bonding material 150 such as solder.
  • the third columnar electrode 115 is bonded to the second lower electrode portion 112 by a bonding material 150 such as solder.
  • Each of the first columnar electrode 113, the second columnar electrode 114, and the third columnar electrode 115 is bonded to the upper electrode portion 116 by a bonding material 150 such as solder.
  • the printed circuit board 130 is covered with a mold resin 140, and the first columnar electrode 113, the second columnar electrode 114, the third columnar electrode 115, the upper electrode portion 116, the magnetic sensor chip 120, and the wire 170 are molded resin 140. It is sealed with. That is, the first connection electrode portion, the second connection electrode portion, the third connection electrode portion, the upper electrode portion 116, the first magnetic detection element, and the second magnetic detection element are sealed with the mold resin 140.
  • the current sensor 200 it is possible to suppress deterioration of characteristics such as linearity of the outputs of the first magnetic detection element and the second magnetic detection element, and the value of the current to be measured with high accuracy. Can be measured.
  • the printed circuit board 130 and the conductor 110 are integrally configured, and the lower surfaces of the first lower electrode portion 111 and the second lower electrode portion 112 are exposed from the lower surface of the printed circuit board 130, so that the current is generated.
  • the sensor 200 can be surface-mounted.
  • the current sensor according to the third embodiment of the present invention is different from the current sensor 100 according to the first embodiment of the present invention in that it is chipped including a signal terminal. Therefore, the current according to the first embodiment of the present invention is provided. The description of the configuration similar to that of the sensor 100 will not be repeated.
  • FIG. 10 is a cross-sectional view showing the configuration of the current sensor according to the third embodiment of the present invention.
  • FIG. 11 is a plan view of the current sensor of FIG. 10 as viewed from the direction of arrow XI.
  • each of the first lower electrode portion 111 and the second lower electrode portion 112 is a lead made of a metal such as Cu. It is formed of a frame.
  • the magnetic sensor chip 120 is mounted on the upper surface of the lead frame.
  • the magnetic sensor chip 120 is fixed on the lead frame by an insulating bonding portion 180 such as a die attach film or an insulating bonding material.
  • an insulating bonding portion 180 such as a die attach film or an insulating bonding material.
  • the magnetic sensor chip 120 is electrically connected to the signal terminal 160 by a wire 170.
  • the magnetic sensor chip 120 may be electrically connected to the signal terminal 160 by mounting a flip chip.
  • Each of the first columnar electrode 113 and the second columnar electrode 114 is bonded to the first lower electrode portion 111 by a bonding material 150 such as solder.
  • the third columnar electrode 115 is bonded to the second lower electrode portion 112 by a bonding material 150 such as solder.
  • Each of the first columnar electrode 113, the second columnar electrode 114, and the third columnar electrode 115 is bonded to the upper electrode portion 116 by a bonding material 150 such as solder.
  • a part of the lead frame is covered with a mold resin 140, a part of the first lower electrode portion 111, a part of the second lower electrode portion 112, the first columnar electrode 113, the second columnar electrode 114, and the third.
  • the columnar electrode 115, the upper electrode portion 116, the magnetic sensor chip 120, a part of the signal terminal 160, and the wire 170 are sealed with the mold resin 140. That is, a part of the first lower electrode part 111, a part of the second lower electrode part 112, a first connection electrode part, a second connection electrode part, a third connection electrode part, an upper electrode part 116, and a first magnetic detection element.
  • the second magnetic detection element and the second magnetic detection element are sealed with the mold resin 140.
  • each of the end portion 111e in the Y direction of the first lower electrode portion 111 and the end portion 112e in the ⁇ Y direction of the second lower electrode portion 112 are exposed from the mold resin 140. Further, the end portion of the signal terminal 160 in the + Y direction is exposed from the mold resin 140.
  • the current sensor 300 it is possible to suppress deterioration of characteristics such as linearity of the outputs of the first magnetic detection element and the second magnetic detection element, and the value of the current to be measured with high accuracy. Can be measured.
  • the lead frame and the conductor 110 are integrally formed, and each of the end portion 111e of the first lower electrode portion 111 and the end portion 112e of the second lower electrode portion 112 is unidirectional from the mold resin 140.
  • the current sensor 300 can be surface-mounted by exposing only the current sensor 300.
  • the end portion 111e of the first lower electrode portion 111 and the end portion 112e of the second lower electrode portion 112 which are located offset in the Y direction with respect to the magnetic sensor chip 120, can be surface-mounted, the current can be mounted.
  • the sensor 300 is mounted on the surface, the stress applied to each of the first magnetic detection element and the second magnetic detection element is reduced, and the deterioration of the characteristics of each of the first magnetic detection element and the second magnetic detection element due to the stress load is suppressed. be able to.
  • FIG. 12 is a vertical sectional view showing a configuration of a conductor of a current sensor according to a modified example of the third embodiment of the present invention.
  • a constricted portion 111n is formed at a position intermediate in the Z direction of the first lower electrode portion 111.
  • the constricted portion 112n is formed at a position intermediate in the Z direction of the second lower electrode portion 112 located below the second columnar electrode 114.
  • the constricted portion 112n is located at the end of the second columnar electrode 114 in the + X direction.
  • the current sensor according to the fourth embodiment of the present invention will be described with reference to the drawings.
  • at least one of the first connection electrode portion, the second connection electrode portion, and the third connection electrode portion is composed of a plurality of columnar electrodes, that is, the first embodiment of the present invention. Since it is different from the current sensor 100 according to the above, the description of the same configuration as the current sensor 100 according to the first embodiment of the present invention will not be repeated.
  • FIG. 13 is a plan view showing the configurations of the first connection electrode portion, the second connection electrode portion, and the third connection electrode portion in the current sensor according to the fourth embodiment of the present invention. In FIG. 13, the upper electrode portion is not shown.
  • the first connection electrode portion is composed of the first columnar electrode 113a, the first columnar electrode 113b, and the first columnar electrode 113c. ..
  • the first columnar electrode 113a, the first columnar electrode 113b, and the first columnar electrode 113c are arranged side by side in the Y direction, and are axisymmetric with respect to the axis of symmetry C when viewed from the Z direction.
  • the second connection electrode portion is composed of a second columnar electrode 114a and a second columnar electrode 114b.
  • the second columnar electrode 114a and the second columnar electrode 114b are arranged side by side in the Y direction, and are axisymmetric with respect to the axis of symmetry C when viewed from the Z direction.
  • the third connection electrode portion is composed of a third columnar electrode 115a and a third columnar electrode 115b.
  • the third columnar electrode 115a and the third columnar electrode 115b are arranged side by side in the X direction, and are axisymmetric with respect to the axis of symmetry C when viewed from the Z direction.
  • each of the first connection electrode portion, the second connection electrode portion, and the third connection electrode portion is located line-symmetrically with respect to the axis of symmetry C extending in the X direction when viewed from the Z direction.
  • the magnetic field components in the X and Z directions acting on each of the first magnetic detection element and the second magnetic detection element can be reduced. Therefore, also in the current sensor 400 according to the fourth embodiment of the present invention, the first magnetic detection element.
  • the number and arrangement of columnar electrodes constituting each of the first connection electrode portion, the second connection electrode portion, and the third connection electrode portion are not limited to the above.
  • FIG. 14 is a plan view showing the configurations of the first connection electrode portion, the second connection electrode portion, and the third connection electrode portion in the current sensor according to the modified example of the fourth embodiment of the present invention.
  • the upper electrode portion is not shown.
  • the first connection electrode portion is composed of one first columnar electrode 113.
  • the first columnar electrode 113 is located line-symmetrically with respect to the axis of symmetry C when viewed from the Z direction.
  • the second connection electrode portion is composed of a second columnar electrode 114a and a second columnar electrode 114b.
  • the second columnar electrode 114a and the second columnar electrode 114b are arranged side by side in the X direction, and are axisymmetric with respect to the axis of symmetry C when viewed from the Z direction.
  • the third connection electrode portion is composed of a third columnar electrode 115a and a third columnar electrode 115b.
  • the third columnar electrode 115a and the third columnar electrode 115b are arranged side by side in the Y direction, and are axisymmetric with respect to the axis of symmetry C when viewed from the Z direction.
  • the first columnar electrode 113, the second columnar electrode 114a, the second columnar electrode 114b, the third columnar electrode 115a, and the third columnar electrode 115b are formed in the same shape as each other.
  • each of the first connection electrode portion, the second connection electrode portion, and the third connection electrode portion is located line-symmetrically with respect to the axis of symmetry C extending in the X direction when viewed from the Z direction.
  • the magnetic field components in the X and Z directions acting on each of the first magnetic detection element and the second magnetic detection element can be reduced. Therefore, even in the current sensor 400a according to the modified example of the fourth embodiment of the present invention, the first It is possible to suppress deterioration of characteristics such as the linearity of the outputs of the magnetic detection element and the second magnetic detection element, and it is possible to accurately measure the value of the current to be measured.
  • first columnar electrode 113, the second columnar electrode 114a, the second columnar electrode 114b, the third columnar electrode 115a, and the third columnar electrode 115b are formed in the same shape as each other, thereby reducing the manufacturing cost. be able to.
  • FIG. 15 is a plan view showing the configurations of the first connection electrode portion, the second connection electrode portion, and the third connection electrode portion in the current sensor according to the comparative example.
  • the upper electrode portion is not shown.
  • the first connection electrode portion is composed of the first columnar electrode 113a and the first columnar electrode 113b.
  • the first columnar electrode 113a and the first columnar electrode 113b are arranged side by side in the X direction, and are located on the + Y direction side with respect to the axis of symmetry C when viewed from the Z direction.
  • the second connection electrode portion is composed of one second columnar electrode 114.
  • the second columnar electrode 114 is located on the ⁇ Y direction side with respect to the axis of symmetry C when viewed from the Z direction.
  • the third connection electrode portion is composed of a third columnar electrode 115a and a third columnar electrode 115b.
  • the third columnar electrode 115a and the third columnar electrode 115b are arranged side by side in the Y direction, and are axisymmetric with respect to the axis of symmetry C when viewed from the Z direction.
  • each of the first connection electrode portion and the second connection electrode portion is not positioned line-symmetrically with respect to the axis of symmetry C extending in the X direction when viewed from the Z direction, the upper electrode portion is formed.
  • the current Ia flows toward the third columnar electrode 115a in the + X direction
  • the current Ib flows toward the third columnar electrode 115b in the + X direction and the ⁇ Y direction.
  • the magnetic field component in the X direction generated by the current Ib flowing in the ⁇ Y direction acts on each of the first magnetic detection element and the second magnetic detection element, and the first magnetic detection element and the second magnetic detection element. Characteristics such as the linearity of each output of the are deteriorated.
  • the current sensor according to the fifth embodiment of the present invention has different shapes of the first connection electrode portion, the second connection electrode portion, and the third connection electrode portion from the current sensor 100 according to the first embodiment of the present invention. The description of the configuration similar to that of the current sensor 100 according to the first embodiment of the present invention will not be repeated.
  • FIG. 16 is a plan view showing the configurations of the first connection electrode portion, the second connection electrode portion, and the third connection electrode portion in the current sensor according to the fifth embodiment of the present invention. In FIG. 16, the upper electrode portion is not shown.
  • the first connection electrode portion is composed of one first columnar electrode 113.
  • the second connection electrode portion is composed of one second columnar electrode 114.
  • the third connection electrode portion is composed of one third columnar electrode 115.
  • Each of the first columnar electrode 113 and the second columnar electrode 114 has a square columnar shape.
  • the third columnar electrode 115 has a triangular columnar shape.
  • Each of the first columnar electrode 113, the second columnar electrode 114, and the third columnar electrode 115 is axisymmetric with respect to the axis of symmetry C extending in the X direction when viewed from the Z direction.
  • each of the first connection electrode portion, the second connection electrode portion, and the third connection electrode portion is located line-symmetrically with respect to the axis of symmetry C extending in the X direction when viewed from the Z direction.
  • the magnetic field components in the X and Z directions acting on each of the first magnetic detection element and the second magnetic detection element can be reduced. Therefore, also in the current sensor 500 according to the fifth embodiment of the present invention, the first magnetic detection element.
  • the current sensor according to the sixth embodiment of the present invention will be described with reference to the drawings.
  • the upper electrode portion is located line-symmetrically with respect to the axis of symmetry. The description of the configuration similar to that of the current sensor 100 according to the first embodiment of the present invention will not be repeated.
  • FIG. 17 is a plan view showing the configuration of the current sensor according to the sixth embodiment of the present invention.
  • the upper electrode portion 116 is located line-symmetrically with respect to the axis of symmetry C when viewed from the Z direction. Therefore, when viewed from the Z direction, the symmetry axis C of each of the first connection electrode portion, the second connection electrode portion, and the third connection electrode portion coincides with the symmetry axis 116c of the upper electrode portion 116.
  • the current Ic flows in the + X direction
  • the current Ia flows in the + X direction and the + Y direction
  • the current Ia flows in the + X direction and-in the upper electrode portion 116 located above the mounting area of the first magnetic detection element and the second magnetic detection element.
  • the current Ib flows in the Y direction.
  • the current densities of the current Ia flowing in the + X direction and the + Y direction and the current Ib flowing in the + X direction and the ⁇ Y direction in the upper electrode portion 116 are substantially the same.
  • the magnetic field components in the X direction and the Z direction acting on each of the first magnetic detection element and the second magnetic detection element can be reduced, so that the first magnetic detection can be performed. It is possible to suppress deterioration of characteristics such as linearity of the outputs of the element and the second magnetic detection element, and it is possible to accurately measure the value of the current to be measured.
  • FIG. 18 is a plan view showing the configuration of the current sensor according to the modified example of the sixth embodiment of the present invention.
  • the upper electrode portion 116 is not positioned line-symmetrically with respect to the axis of symmetry C when viewed from the Z direction. Therefore, when viewed from the Z direction, the symmetry axis C of each of the first connection electrode portion, the second connection electrode portion, and the third connection electrode portion does not match the symmetry axis 116c of the upper electrode portion 116.
  • the current sensor 600a acts on each of the first magnetic detection element and the second magnetic detection element as compared with the current sensor 600 according to the sixth embodiment of the present invention.
  • the magnetic field component in the X direction becomes large.
  • each of the first connection electrode portion, the second connection electrode portion, and the third connection electrode portion is located line-symmetrically with respect to the axis of symmetry C extending in the X direction when viewed from the Z direction, the first is Since the magnetic field components in the X and Z directions acting on each of the first magnetic detection element and the second magnetic detection element can be reduced, the first magnetic detection element is also used in the current sensor 600a according to the modified example of the sixth embodiment of the present invention.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)

Abstract

L'invention concerne une première électrode de connexion (113) et une deuxième électrode de connexion (114), chacune : s'étendant dans une troisième direction tout en maintenant un espace entre elles dans une seconde direction; et connectant mutuellement une première électrode inférieure (111) et une électrode supérieure. Une troisième électrode de connexion (115) s'étend dans la troisième direction et connecte électriquement une deuxième électrode inférieure (112) et l'électrode supérieure l'une à l'autre. La première électrode de connexion (113), la deuxième électrode de connexion (114) et la troisième électrode de connexion (115) sont chacune positionnées de manière à présenter une symétrie linéaire avec un axe de symétrie (C) s'étendant dans la deuxième direction, vu depuis la troisième direction. Un premier élément de détection magnétique (121) et un second élément de détection magnétique (122) sont positionnés alignés entre la première électrode de connexion (113) et la seconde électrode de connexion (114) dans la seconde direction.
PCT/JP2021/025882 2020-08-06 2021-07-09 Capteur de courant électrique WO2022030177A1 (fr)

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003167009A (ja) * 2001-12-03 2003-06-13 Stanley Electric Co Ltd 電流検出装置
JP2007218729A (ja) * 2006-02-16 2007-08-30 Tokai Rika Co Ltd 電流センサ
WO2014123007A1 (fr) * 2013-02-06 2014-08-14 株式会社村田製作所 Capteur de courant électrique
WO2015053174A1 (fr) * 2013-10-11 2015-04-16 株式会社村田製作所 Capteur de courant
JP2015125042A (ja) * 2013-12-26 2015-07-06 パナソニックＩｐマネジメント株式会社 電流検出器
WO2016002501A1 (fr) * 2014-07-02 2016-01-07 株式会社村田製作所 Capteur de courant
WO2016009807A1 (fr) * 2014-07-17 2016-01-21 株式会社村田製作所 Capteur de courant
WO2018092336A1 (fr) * 2016-11-17 2018-05-24 株式会社村田製作所 Capteur de courant

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003167009A (ja) * 2001-12-03 2003-06-13 Stanley Electric Co Ltd 電流検出装置
JP2007218729A (ja) * 2006-02-16 2007-08-30 Tokai Rika Co Ltd 電流センサ
WO2014123007A1 (fr) * 2013-02-06 2014-08-14 株式会社村田製作所 Capteur de courant électrique
WO2015053174A1 (fr) * 2013-10-11 2015-04-16 株式会社村田製作所 Capteur de courant
JP2015125042A (ja) * 2013-12-26 2015-07-06 パナソニックＩｐマネジメント株式会社 電流検出器
WO2016002501A1 (fr) * 2014-07-02 2016-01-07 株式会社村田製作所 Capteur de courant
WO2016009807A1 (fr) * 2014-07-17 2016-01-21 株式会社村田製作所 Capteur de courant
WO2018092336A1 (fr) * 2016-11-17 2018-05-24 株式会社村田製作所 Capteur de courant

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