WO2022004006A1 - Dispositif et procédé de mesure d'inclinaison - Google Patents

Dispositif et procédé de mesure d'inclinaison Download PDF

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Publication number
WO2022004006A1
WO2022004006A1 PCT/JP2020/047971 JP2020047971W WO2022004006A1 WO 2022004006 A1 WO2022004006 A1 WO 2022004006A1 JP 2020047971 W JP2020047971 W JP 2020047971W WO 2022004006 A1 WO2022004006 A1 WO 2022004006A1
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WIPO (PCT)
Prior art keywords
laser beam
measurement object
laser
rotation axis
inclination
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PCT/JP2020/047971
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English (en)
Japanese (ja)
Inventor
修之 牧野
浩二 村上
昂志 橘▲高▼
Original Assignee
日本電産株式会社
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Application filed by 日本電産株式会社 filed Critical 日本電産株式会社
Priority to JP2022533033A priority Critical patent/JPWO2022004006A1/ja
Priority to CN202080102462.8A priority patent/CN115917247A/zh
Publication of WO2022004006A1 publication Critical patent/WO2022004006A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

Definitions

  • This disclosure relates to a tilt measuring device and a tilt measuring method.
  • a conventional multipoint angle measuring device includes a rotating support for measuring the angle of rotation of a reference plane, an XY table attached to the rotating support, an X-ray table having a movable part, an X-ray source having a fixed radiation direction, and a receiving tube (for example,). , Patent Document 1). Then, two laser focus displacement meters each having a light source are installed above the crystal plate. An angle calculator is connected to the laser focus displacement meter. It was
  • the laser focus displacement meter measures the displacement in the direction perpendicular to the main surface at two points on the crystal plate. Then, the angle calculator calculates the slope between the two points by a trigonometric function from the preset distance between the light sources and the displacement difference between the two points. That is, the deviation angle from the reference plane between the two points of the crystal plate is obtained.
  • two laser focus displacement meters are prepared to calculate the inclination between two points. Therefore, for example, two laser focus displacement meters are additionally required to calculate the slope between the other two points. That is, four laser focus displacement meters are required. It was
  • the present disclosure has been made in view of the above problems, and the purpose of the present disclosure is to reduce the number of mounted laser displacement meters and to determine the inclination of the object to be measured around the rotation axis for each of a plurality of different rotation axes. It is an object of the present invention to provide a tilt measuring device and a tilt measuring method capable of measuring.
  • the exemplary tilt measuring device of the present disclosure measures the tilt of the object to be measured.
  • the tilt measuring device includes a first laser displacement meter, a second laser displacement meter, and a reflection member.
  • the first laser displacement meter irradiates the measurement object with the first laser beam and measures the displacement of the measurement object.
  • the second laser displacement meter irradiates the measurement object with the second laser beam and measures the displacement of the measurement object.
  • the reflecting member is located at a retracted position or an approaching position with respect to the optical path of the first laser beam and the optical path of the second laser beam.
  • the first laser displacement meter and the second laser displacement meter measure the displacement of the object to be measured in both the case where the reflection member is located at the retracted position and the case where the reflecting member is located at the approach position.
  • the reflecting member changes the traveling directions of the first laser beam and the second laser beam at the approach position, and reflects the first laser beam and the second laser beam toward the measurement object. It was
  • the tilt of the object to be measured is measured.
  • the measurement object when the reflecting member is located at a retracted position with respect to the optical path of the first laser beam and the optical path of the second laser beam, the measurement object is irradiated with the first laser beam to measure the object.
  • the step of moving the reflecting member to the approach position with respect to the optical path of the first laser beam and the optical path of the second laser beam, and when the reflecting member is located at the approaching position, the measurement object is described as described above.
  • a tilt measuring device and a tilt measuring method capable of measuring the tilt around a rotation axis of a measurement object for each of a plurality of different rotation axes while suppressing the number of mounted laser displacement meters. Can be provided.
  • FIG. 1A is a perspective view showing a tilt measuring device when the reflective member according to the embodiment of the present disclosure is located at a retracted position.
  • FIG. 1B is a side view showing a state in which the reflective member according to the present embodiment is located at the retracted position.
  • FIG. 2A is a perspective view showing a tilt measuring device when the reflective member according to the present embodiment is located at an approach position.
  • FIG. 2B is a side view showing a state in which the reflective member according to the present embodiment is located at the approach position.
  • FIG. 3 is a block diagram showing an inclination measuring device according to the present embodiment.
  • FIG. 1A is a perspective view showing a tilt measuring device when the reflective member according to the embodiment of the present disclosure is located at a retracted position.
  • FIG. 1B is a side view showing a state in which the reflective member according to the present embodiment is located at the retracted position.
  • FIG. 2A is a perspective view showing a tilt measuring device when the reflective member according
  • FIG. 4A is a perspective view showing the relationship between the second laser beam and the third laser beam and the measurement object when the inclination measuring device according to the present embodiment measures the inclination of the measurement object around the third rotation axis. It is a figure.
  • FIG. 4B shows the second laser beam and the third laser beam viewed from the third rotation axis direction when the inclination measuring device according to the present embodiment measures the inclination of the object to be measured around the third rotation axis. It is a figure which shows the measurement object.
  • FIG. 5A is a perspective view showing the relationship between the first laser beam and the second laser beam and the measurement object when the inclination measuring device according to the present embodiment measures the inclination around the first rotation axis of the measurement object. It is a figure.
  • FIG. 5A is a perspective view showing the relationship between the first laser beam and the second laser beam and the measurement object when the inclination measuring device according to the present embodiment measures the inclination around the first rotation axis of the measurement object. It is a figure
  • FIG. 5B shows the first laser beam and the second laser beam viewed from the direction of the first rotation axis when the inclination measuring device according to the present embodiment measures the inclination of the object to be measured around the first rotation axis. It is a figure which shows the measurement object.
  • FIG. 6A is a perspective view showing the relationship between the first laser beam and the second laser beam and the measurement object when the inclination measuring device according to the present embodiment measures the inclination of the measurement object around the second rotation axis. It is a figure.
  • FIG. 6B shows the first laser beam and the second laser beam viewed from the second rotation axis direction when the inclination measuring device according to the present embodiment measures the inclination of the object to be measured around the second rotation axis.
  • FIG. 7 is a diagram showing a state when the measurement object according to the present embodiment rotates around the third rotation axis.
  • FIG. 8 is a diagram showing a state when the measurement object according to the present embodiment rotates around the first rotation axis.
  • FIG. 9 is a diagram showing a state when the measurement object according to the present embodiment rotates around the second rotation axis.
  • FIG. 10 is a side view showing a moving mechanism of the tilt measuring device according to the present embodiment.
  • FIG. 11 is a flowchart showing the first stage of the inclination measuring method according to the present embodiment.
  • FIG. 12 is a flowchart showing the latter stage of the inclination measuring method according to the present embodiment.
  • the same or corresponding parts are designated by the same reference numerals and the description is not repeated.
  • the X-axis, Y-axis, and Z-axis of the three-dimensional Cartesian coordinate system are appropriately described.
  • the X-axis and the Y-axis are parallel in the horizontal direction
  • the Z-axis is parallel in the vertical direction.
  • the positive direction of the Z axis indicates the upward direction
  • the negative direction of the Z axis indicates the downward direction.
  • first rotation shaft AX1, the second rotation shaft AX2, and the third rotation shaft AX3 will be described, but the first rotation shaft is oriented in a direction parallel to the first rotation shaft AX1.
  • the direction may be described as the direction
  • the direction parallel to the second rotation axis AX2 may be described as the second rotation axis direction
  • the direction parallel to the third rotation axis AX3 may be described as the third rotation axis direction.
  • parallel includes substantially parallel
  • orthogonal includes substantially orthogonal. It was
  • FIG. 1A is a perspective view showing the inclination measuring device 100.
  • the inclination measuring device 100 shown in FIG. 1A measures the inclination of the object to be measured 200. It was
  • the measurement object 200 is affected by an action from the outside of the measurement object 200, rotates around the first rotation shaft AX1, and tilts around the first rotation shaft AX1 with respect to the reference state.
  • the reference state of the measurement object 200 indicates a state in which the measurement object 200 is not affected by an external action. It was
  • the measurement object 200 reflects light.
  • the surface of the object to be measured 200 is a mirror surface made of a metal surface, a tape surface, or the like.
  • the object to be measured 200 preferably performs specular reflection, but is not particularly limited as long as it can reflect incident light. It was
  • the measurement target object 200 includes a first irradiation target object 201 and a second irradiation target object 203.
  • the second irradiation target 203 is fixed to the first irradiation target 201.
  • the second irradiation target object 203 protrudes with respect to the first irradiation target object 201.
  • the first irradiation target object 201 and the second irradiation target object 203 will be described later. It was
  • the tilt measuring device 100 includes a first laser displacement meter 1, a second laser displacement meter 2, and a reflection member 5. It was
  • the first laser displacement meter 1 irradiates the measurement object 200 with the first laser beam B1 to measure the displacement of the measurement object 200. Specifically, the first laser displacement meter 1 irradiates the measurement object 200 with the first laser beam B1 and receives the first laser beam B1 reflected by the measurement object 200 to receive the measurement object 200. Measure the displacement. It was
  • the second laser displacement meter 2 irradiates the measurement object 200 with the second laser beam B2 to measure the displacement of the measurement object 200. Specifically, the second laser displacement meter 2 irradiates the measurement object 200 with the second laser beam B2, receives the second laser beam B2 reflected by the measurement object 200, and receives the second laser beam B2 of the measurement object 200. Measure the displacement. It was
  • the reflective member 5 reflects light.
  • the reflective member 5 is, for example, a mirror.
  • the surface of the reflective member 5 is a mirror surface such as a metal surface or a tape surface.
  • the reflecting member 5 preferably performs specular reflection, but is not particularly limited as long as it can refract the incident light and emit it. It was
  • the reflection member 5 is located at the retracted position P1 or the approach position P2 with respect to the optical path of the first laser beam B1 and the optical path of the second laser beam B2.
  • the reflective member 5 is located at the retracted position P1.
  • the retracted position P1 indicates a position deviated from the optical path of the first laser beam B1 and the optical path of the second laser beam B2. That is, the retracted position P1 indicates a position where the first laser beam B1 and the second laser beam B2 do not enter the reflecting member 5.
  • the reflective member 5 is separated from the object to be measured 200. It was
  • the first laser displacement meter 1 is the measurement object 200 in a state where the measurement object 200 is tilted and stopped around the first rotation axis AX1 with respect to the reference state. Is irradiated with the first laser beam B1 and receives the first laser beam B1 reflected by the measurement object 200 to measure the displacement of the measurement object 200 from the reference state.
  • the second laser displacement meter 2 measures in a state where the measurement object 200 is tilted and stopped around the first rotation axis AX1 with respect to the reference state.
  • the inclination measuring device 100 makes the first rotation of the object to be measured 200 based on the measurement results by the first laser displacement meter 1 and the second laser displacement meter 2 when the reflecting member 5 is located at the retracted position P1.
  • the slope around the axis AX1 can be calculated. It was
  • FIG. 2A is a perspective view showing a tilt measuring device 100 when the reflective member 5 is located at the approach position P2.
  • FIG. 2B shows the state of the reflective member 5 located at the approach position P2.
  • the approach position P2 indicates a position on the optical path of the first laser beam B1 and on the optical path of the second laser beam B2. That is, the approach position P2 indicates a position where the first laser beam B1 and the second laser beam B2 are incident on the reflection member 5.
  • the reflective member 5 is not in contact with the object to be measured 200. It was
  • the reflecting member 5 changes the traveling directions of the first laser beam B1 and the second laser beam B2 at the approach position P2, and reflects the first laser beam B1 and the second laser beam B2 toward the measurement object 200.
  • first laser beam B10 the first laser beam B1 after being reflected by the reflecting member 5
  • second laser beam B20 the second laser beam B2 after being reflected by the reflecting member 5
  • the first laser displacement meter 1 is the measurement object 200 in a state where the measurement object 200 is tilted and stopped around the second rotation axis AX2 with respect to the reference state.
  • the reference state of the measurement object 200 is increased. Measure the displacement of.
  • the second laser displacement meter 2 measures in a state where the measurement object 200 is tilted and stopped around the second rotation axis AX2 with respect to the reference state.
  • the object 200 is irradiated with the second laser beam B20 via the reflection member 5, and the second laser beam B20 reflected by the measurement object 200 is received through the reflection member 5, whereby the object 200 is measured. Measure the displacement from the reference state.
  • the inclination measuring device 100 makes a second rotation of the object to be measured 200 based on the measurement results by the first laser displacement meter 1 and the second laser displacement meter 2 when the reflecting member 5 is located at the approach position P2.
  • the slope around the axis AX2 can be calculated. It was
  • the inclination measuring device 100 includes the reflecting member 5, so that the retracting position P1 and the approaching position P2 of the reflecting member 5 are on the measurement object 200.
  • the irradiation positions of the first laser beam B1 and the second laser beam B2 can be different.
  • the first laser displacement meter 1 and the second laser displacement meter 2 measure the displacement of the measurement object 200 in both the case where the reflection member 5 is located at the retracted position P1 and the case where the reflecting member 5 is located at the approach position P2. ..
  • the first rotation of the object to be measured 200 is based on the measurement results of the first laser displacement meter 1 and the second laser displacement meter 2 when the reflection member 5 is located at the retracted position P1 (FIGS. 1A and 1B). Not only can the inclination around the axis AX1 be calculated, but also based on the measurement results by the first laser displacement meter 1 and the second laser displacement meter 2 when the reflecting member 5 is located at the approach position P2 (FIGS. 2A and 2B). , The inclination of the object to be measured 200 around the second rotation axis AX2 can also be calculated. It was
  • two different laser displacement meters (first laser displacement meter 1, second laser displacement meter 2) have two different rotation axes (first rotation axis AX1, second rotation axis).
  • the inclination of the object to be measured 200 can be measured for each AX2).
  • the tilt measuring device according to the comparative example does not include the reflective member 5. Therefore, in the inclination measuring device according to the comparative example, the two laser displacement meters for measuring the inclination around the first rotation axis AX1 of the measurement object 200 and the second rotation axis AX2 of the measurement object 200 It is essential to have two laser displacement meters to measure the tilt around. That is, in the inclination measuring device according to the comparative example, in order to measure the inclination of the measurement object 200 with respect to each of the two rotation axes (first rotation axis AX1 and second rotation axis AX2), a total of four It is required to have a laser displacement meter.
  • the inclination measuring device 100 measures the inclination of the measurement object 200 with respect to each of the two rotation axes (first rotation axis AX1 and second rotation axis AX2). It suffices to include a total of two laser displacement meters (first laser displacement meter 1 and second laser displacement meter 2). It was
  • the first virtual plane 11, the second virtual plane 12, the virtual intersection surface 15, the first direction D1, and the second direction D2 are defined. It was
  • the first virtual plane 11 is a virtual plane including an optical path of the first laser beam B1 and an optical path of the second laser beam B2 when the reflecting member 5 is located at the retracted position P1.
  • the first rotation axis AX1 of the measurement object 200 intersects the first virtual plane 11. Therefore, the first rotation axis AX1 is included in, for example, the virtual intersection surface 15.
  • the virtual intersection surface 15 is a virtual plane that intersects the first laser beam B1 and the second laser beam B2 when the reflection member 5 is located at the retracted position P1. Therefore, according to the present embodiment, when the reflection member 5 is located at the retracted position P1, the first laser displacement meter 1 and the second laser displacement meter 2 measure the displacement of the measurement object 200, thereby imaginary crossing.
  • the inclination of the object to be measured 200 around the first rotation axis AX1 included in the surface 15 can be calculated. It was
  • the virtual intersection surface 15 is substantially orthogonal to the first laser beam B1 and the second laser beam B2. It was
  • the first direction D1 indicates a direction that intersects the first virtual plane 11.
  • the first direction D1 is substantially orthogonal to the first virtual plane 11.
  • the first direction D1 is, for example, substantially parallel to the horizontal direction. It was
  • the second virtual plane 12 is a virtual plane including the optical path of the first laser beam B10 and the optical path of the second laser beam B20 after being reflected by the reflecting member 5.
  • the second rotation axis AX2 of the measurement object 200 intersects the second virtual plane 12. Since the second rotation axis AX2 intersects the virtual intersection surface 15, it is not included in the virtual intersection surface 15. Therefore, when the reflective member 5 is located at the approach position P2, the first laser displacement meter 1 and the second laser displacement meter 2 measure the displacement of the object to be measured 200, so that the second laser displacement meter 2 is not included in the virtual intersection surface 15. 2
  • the inclination of the object to be measured 200 around the rotation axis AX2 can be calculated. It was
  • the second direction D2 indicates a direction that intersects the second virtual plane 12.
  • the second direction D2 is substantially orthogonal to the second virtual plane 12.
  • the second direction D2 is, for example, substantially parallel to the vertical direction. It was
  • the inclination measuring device 100 includes the reflecting member 5, so that the first laser displacement meter 1 and the second laser displacement meter 100 are provided without using the four laser displacement meters.
  • the laser displacement meter 2 can be used to measure the inclination of the object to be measured 200 around the first rotation axis AX1 and the second rotation axis AX2, respectively. That is, while suppressing the number of mounted laser displacement meters, the inclination of the measurement object 200 around the first rotation axis AX1 included in the virtual intersection surface 15 and the second rotation axis not included in the virtual intersection surface 15. It is possible to measure the inclination of the measurement object 200 around the AX2. It was
  • the inclination angle of the reflective member 5 with respect to the first virtual plane 11 is approximately 45 degrees. Therefore, the reflecting member 5 refracts the first laser beam B1 and the second laser beam B2 by about 90 degrees and reflects them. It was
  • the measurement object 200 receives an action from the outside of the measurement object 200 and rotates around the third rotation axis AX3, and the third rotation axis with respect to the reference state. Tilt around AX3. It was
  • the tilt measuring device 100 further includes a third laser displacement meter 3.
  • the third laser displacement meter 3 irradiates the measurement object 200 with the third laser beam B3 to measure the displacement of the measurement object 200.
  • the third laser displacement meter 3 irradiates the measurement object 200 with the third laser beam B3, receives the third laser beam B3 reflected by the measurement object 200, and receives the third laser beam B3 of the measurement object 200. Measure the displacement. It was
  • the third laser displacement meter 3 is in a state where the measurement object 200 is tilted around the third rotation axis AX3 with respect to the reference state and stopped.
  • the measurement object 200 is irradiated with the third laser beam B3, and the displacement of the measurement object 200 from the reference state is measured.
  • the second laser displacement meter 2 measures in a state where the measurement object 200 is tilted and stopped around the third rotation axis AX3 with respect to the reference state.
  • the object 200 is irradiated with the second laser beam B2, and the displacement of the object 200 from the reference state is measured.
  • the inclination measuring device 100 makes a third rotation of the object to be measured 200 based on the measurement results by the second laser displacement meter 2 and the third laser displacement meter 3 when the reflecting member 5 is located at the retracted position P1.
  • the slope around the axis AX3 can be calculated. It was
  • the inclination measuring device 100 includes the reflecting member 5, so that the first laser displacement meter is not used.
  • the laser displacement meter 1, the second laser displacement meter 2, and the third laser displacement meter 3 the inclination of the object to be measured 200 around the first rotation axis AX1 and the circumference of the second rotation axis AX2.
  • the inclination of the measurement object 200 and the inclination of the measurement object 200 around the third rotation axis AX3 can be measured.
  • the inclination of the measurement object 200 around the first rotation axis AX1 to the third rotation axis AX3 can be measured while suppressing the number of mounted laser displacement meters.
  • the restriction on the shape of the measurement object 200 can be relaxed as compared with the case where the inclination of the measurement object 200 is measured by using the diffraction grating. .. It was
  • the tilt measuring device according to the comparative example does not include the reflective member 5. Therefore, in the inclination measuring device according to the comparative example, there are three laser displacement meters for measuring the inclination around the first rotation axis AX1 and the inclination around the third rotation axis AX3 of the measurement object 200, respectively. It is essential to have two laser displacement meters for measuring the inclination of the object to be measured 200 around the second rotation axis AX2.
  • the tilt measuring device 100 measures the object 200 for each of the three rotation axes (first rotation axis AX1, second rotation axis AX2, and third rotation axis AX3).
  • a total of three laser displacement meters (first laser displacement meter 1, second laser displacement meter 2, third laser displacement meter 3) may be provided. It was
  • the third virtual plane 13 is a virtual plane including the optical path of the second laser beam B2 and the optical path of the third laser beam B3 when the reflecting member 5 is located at the retracted position P1.
  • the third rotation axis AX3 of the measurement object 200 intersects the third virtual plane 13. It was
  • the first virtual plane 11 and the third virtual plane 13 are substantially orthogonal to each other.
  • the trigonometry makes it easy to tilt the objects 200 around the first rotation axis AX1 to the third rotation axis AX3, respectively. Can be calculated.
  • Trigonometry is an operation that uses trigonometric functions.
  • the first laser beam B1, the second laser beam B2, and the third laser beam B3 when the reflecting member 5 is located at the retracted position P1 are substantially parallel to each other. According to this preferred example, the adjustment of the optical system is even easier. It was
  • the first virtual plane 11 is substantially orthogonal to the first rotation axis AX1.
  • the third virtual plane 13 is substantially orthogonal to the third rotation axis AX3.
  • the second virtual plane 12 is substantially orthogonal to the second rotation axis AX2. According to this preferred example, the inclination of the object to be measured 200 around the first rotation axis AX1 to the third rotation axis AX3 can be calculated more easily by the trigonometry. It was
  • the virtual intersection surface 15 intersects the first laser beam B1, the second laser beam B2, and the third laser beam B3 when the reflection member 5 is located at the retracted position P1.
  • the virtual intersection surface 15 is substantially orthogonal to the first laser beam B1, the second laser beam B2, and the third laser beam B3. It was
  • FIG. 3 is a block diagram showing the inclination measuring device 100.
  • the tilt measuring device 100 further includes a moving mechanism 4, a driving mechanism 6, a control unit 10, and a storage unit 20.
  • the control unit 10 corresponds to an example of a “calculation unit”. It was
  • the control unit 10 includes a processor such as a CPU (Central Processing Unit).
  • the storage unit 20 includes a storage device and stores data and computer programs. Specifically, the storage unit 20 includes a main storage device such as a semiconductor memory and an auxiliary storage device such as a semiconductor memory, a solid state drive, and / or a hard disk drive. The storage unit 20 may include removable media.
  • the storage unit 20 corresponds to an example of a non-temporary computer-readable storage medium.
  • the processor of the control unit 10 executes a computer program stored in the storage device of the storage unit 20 to execute various calculations, and also executes the first laser displacement meter 1, the second laser displacement meter 2, and the third laser displacement meter. 3. Controls the moving mechanism 4 and the driving mechanism 6.
  • the control unit 10 and the storage unit 20 constitute, for example, a computer.
  • the moving mechanism 4 for moving the reflective member 5 and the driving mechanism 6 for driving the measurement object 200 will be described later. It was
  • the control unit 10 around the first rotation axis AX1 based on the measurement result by the first laser displacement meter 1 and the measurement result by the second laser displacement meter 2 when the reflection member 5 is located at the retracted position P1.
  • the inclination of the measurement object 200 is calculated.
  • the control unit 10 has the second rotation axis AX2 based on the measurement result by the first laser displacement meter 1 and the measurement result by the second laser displacement meter 2 when the reflection member 5 is located at the approach position P2. Calculate the inclination of the object to be measured 200 around. It was
  • control unit 10 uses the measurement results of the first laser displacement meter 1 and the second laser displacement meter 2 without using the measurement results of the four laser displacement meters.
  • the inclination of the measurement object 200 around the 1 rotation shaft AX1 and the 2nd rotation shaft AX2 can be calculated, respectively. It was
  • the control unit 10 has the third rotation axis AX3 based on the measurement result by the second laser displacement meter 2 and the measurement result by the third laser displacement meter 3 when the reflection member 5 is located at the retracted position P1. Calculate the inclination of the object to be measured 200 around.
  • the control unit 10 does not use the measurement results of the five laser displacement meters, but the measurement results of the first laser displacement meter 1, the second laser displacement meter 2, and the third laser displacement meter 3. Can be used to calculate the inclination of the measurement object 200 around the first rotation axis AX1 to the third rotation axis AX3, respectively. It was
  • FIG. 4A shows the relationship between the second laser beam B2 and the third laser beam B3 and the measurement object 200 when the inclination measuring device 100 measures the inclination of the measurement object 200 around the third rotation axis AX3. It is a perspective view.
  • FIG. 4B shows the second laser beam B2 and the third laser beam B3 viewed from the third rotation axis direction when the inclination measuring device 100 measures the inclination of the object 200 to be measured around the third rotation axis AX3. It is a figure which shows the measurement object 200.
  • the reflective member 5 and the second irradiation target 203 are omitted for the sake of simplification of the drawings. It was
  • the control unit 10 when the reflecting member 5 is located at the retracted position P1, the control unit 10 is in a reference state by trigonometry based on the laser spot distance L3 and the laser spot displacement amount d3.
  • a tilt angle ⁇ 3 indicating the tilt of the object to be measured 200 with respect to the target is calculated. Therefore, according to the present embodiment, the inclination angle ⁇ 3 of the object to be measured 200 can be calculated accurately by a simple calculation formula.
  • the tilt angle ⁇ 3 indicates the tilt of the object to be measured 200 with respect to the reference state around the third rotation axis AX3. It was
  • the laser spot distance L3 is the irradiation spot of the second laser beam B2 and the irradiation spot of the third laser beam B3 in the measurement object 200 in the reference state when the reflection member 5 is located at the retracted position P1. Shows the distance to T3. That is, the laser spot distance L3 indicates the distance between the second laser beam B2 and the third laser beam B3 when the reflecting member 5 is located at the retracted position P1.
  • the laser spot displacement amount d3 is a physical quantity corresponding to the inclination of the measurement object 200 with respect to the reference state when the reflection member 5 is located at the retracted position P1, and is a physical quantity of the irradiation spot T2 of the second laser beam B2 with respect to the reference state. The sum of the displacement amount and the displacement amount of the irradiation spot T3 of the third laser beam B3 is shown. It was
  • the second laser displacement meter 2 measures the amount of displacement of the irradiation spot T2 with respect to the reference state of the measurement object 200 in a state where the measurement object 200 is tilted around the third rotation axis AX3.
  • the third laser displacement meter 3 measures the displacement amount of the irradiation spot T3 with respect to the reference state of the measurement object 200 in a state where the measurement object 200 is tilted around the third rotation axis AX3.
  • the control unit 10 calculates the laser spot displacement amount d3, which is the sum of the displacement amount of the irradiation spot T2 and the displacement amount of the irradiation spot T3. It was
  • control unit 10 executes the calculation shown in the following equation to calculate the tilt angle ⁇ 3.
  • ⁇ 3 arc tan (d3 / L3)
  • the laser spot distance L3 when the reflection member 5 is located at the retracted position P1 is set in advance. That is, it is preferable to set the laser spot distance L3 required for the calculation formula by the trigonometry in advance and set it as a fixed value.
  • the work of measuring the laser spot distance L3 for each measurement object 200 is not required. That is, the work of measuring the laser spot distance L3 every time the measurement object 200 is replaced is not required. As a result, the measurement work for calculating the inclination angle ⁇ 3 of the measurement object 200 can be simplified. It was
  • the measurement object 200 includes a plane F1.
  • the first irradiation target object 201 of the measurement target object 200 includes a plane F1.
  • the first irradiation object 201 has, for example, a substantially flat plate shape.
  • the plane F1 of the measurement object 200 in the reference state is substantially parallel to the first direction D1 and is substantially orthogonal to the second direction D2.
  • the plane F1 includes a first irradiation surface TA1, a second irradiation surface TA2, and a third irradiation surface TA3.
  • the plane F1 of the measurement object 200 in the reference state is shown by the alternate long and short dash line. It was
  • the second laser displacement meter 2 irradiates the second irradiation surface TA2 of the measurement object 200 with the second laser beam B2 to obtain a second laser beam.
  • the displacement of the measurement object 200 around the third rotation axis AX3 with respect to the reference state is measured.
  • the third laser displacement meter 3 has the third laser beam B3 on the third irradiation surface TA3 on the same plane F1 as the second irradiation surface TA2 in the measurement object 200.
  • the displacement of the object to be measured 200 with respect to the reference state around the third rotation axis AX3 is measured.
  • the third rotation axis AX3 of the measurement object 200 can be accurately adjusted while facilitating the adjustment of the optical system. The tilt around the can be measured. It was
  • FIG. 5A shows the relationship between the first laser beam B1 and the second laser beam B2 and the measurement object 200 when the inclination measuring device 100 measures the inclination of the measurement object 200 around the first rotation axis AX1. It is a perspective view.
  • FIG. 5B shows the first laser beam B1 and the second laser beam B2 viewed from the direction of the first rotation axis when the inclination measuring device 100 measures the inclination of the object to be measured 200 around the first rotation axis AX1. It is a figure which shows the measurement object 200.
  • FIG. 5A shows the relationship between the first laser beam B1 and the second laser beam B2 and the measurement object 200 when the inclination measuring device 100 measures the inclination of the measurement object 200 around the first rotation axis AX1. It is a perspective view.
  • FIG. 5B shows the first laser beam B1 and the second laser beam B2 viewed from the direction of the first rotation axis when the inclination measuring device 100 measures the inclination of the object to be measured 200 around the first rotation
  • the plane F1 of the measurement object 200 in the reference state is shown by the alternate long and short dash line.
  • the reflective member 5 and the second irradiation target 203 are omitted for the sake of simplification of the drawings. It was
  • the control unit 10 when the reflecting member 5 is located at the retracted position P1, the control unit 10 is in a reference state by trigonometry based on the laser spot distance L1 and the laser spot displacement amount d1.
  • the inclination angle ⁇ 1 indicating the inclination of the object to be measured 200 with respect to the object 200 is calculated. Therefore, according to the present embodiment, the inclination angle ⁇ 1 of the measurement object 200 can be calculated accurately by a simple calculation formula.
  • the tilt angle ⁇ 1 indicates the tilt of the object to be measured 200 with respect to the reference state around the first rotation axis AX1. It was
  • the laser spot distance L1 is the irradiation spot of the first laser beam B1 and the irradiation spot of the second laser beam B2 in the measurement object 200 in the reference state when the reflection member 5 is located at the retracted position P1.
  • the distance to T2 is shown. That is, the laser spot distance L1 indicates the distance between the first laser beam B1 and the second laser beam B2 when the reflecting member 5 is located at the retracted position P1.
  • the laser spot displacement amount d1 is a physical quantity corresponding to the inclination of the measurement object 200 with respect to the reference state when the reflection member 5 is located at the retracted position P1, and is the physical quantity of the irradiation spot T1 of the first laser beam B1 with respect to the reference state.
  • the sum of the displacement amount and the displacement amount of the irradiation spot T2 of the second laser beam B2 is shown. It was
  • the first laser displacement meter 1 measures the amount of displacement of the irradiation spot T1 with respect to the reference state of the measurement object 200 in a state where the measurement object 200 is tilted around the first rotation axis AX1.
  • the second laser displacement meter 2 measures the displacement amount of the irradiation spot T2 with respect to the reference state of the measurement object 200 in a state where the measurement object 200 is tilted around the first rotation axis AX1.
  • the control unit 10 calculates the laser spot displacement amount d1, which is the sum of the displacement amount of the irradiation spot T1 and the displacement amount of the irradiation spot T2. It was
  • control unit 10 executes the calculation shown in the following equation to calculate the tilt angle ⁇ 1.
  • ⁇ 1 arc tan (d1 / L1)
  • the laser spot distance L1 when the reflection member 5 is located at the retracted position P1 is set in advance. That is, it is preferable to set the laser spot distance L1 required for the calculation formula by the trigonometry in advance and set it as a fixed value.
  • the work of measuring the laser spot distance L1 for each measurement object 200 is not required. That is, the work of measuring the laser spot distance L1 every time the measurement object 200 is replaced is not required. As a result, the measurement work for calculating the inclination angle ⁇ 1 of the measurement object 200 can be simplified. It was
  • the first laser displacement meter 1 irradiates the first irradiation surface TA1 of the measurement object 200 with the first laser beam B1 to obtain the first laser displacement meter 1.
  • the displacement of the measurement object 200 around the first rotation axis AX1 with respect to the reference state is measured.
  • the second laser displacement meter 2 has a second laser beam B2 on the second irradiation surface TA2 on the same plane F1 as the first irradiation surface TA1 in the measurement object 200.
  • the displacement of the object to be measured 200 with respect to the reference state around the first rotation axis AX1 is measured.
  • the first rotation axis AX1 of the measurement object 200 can be accurately adjusted while facilitating the adjustment of the optical system. The tilt around the can be measured. It was
  • FIG. 6A shows the relationship between the first laser beam B10 and the second laser beam B20 and the measurement object 200 when the inclination measuring device 100 measures the inclination of the measurement object 200 around the second rotation axis AX2. It is a perspective view.
  • FIG. 6B shows the first laser beam B10 and the second laser beam B20 viewed from the second rotation axis direction when the inclination measuring device 100 measures the inclination of the object 200 to be measured around the second rotation axis AX2. It is a figure which shows the measurement object 200.
  • the reflective member 5 is shown by a two-dot chain line in order to make the drawing easier to see. It was
  • the control unit 10 measures the reference state by trigonometry based on the laser spot distance L2 and the laser spot displacement amount d2.
  • the inclination angle ⁇ 2 indicating the inclination of the object 200 is calculated. Therefore, according to the present embodiment, the inclination angle ⁇ 2 of the object to be measured 200 can be calculated accurately by a simple calculation formula.
  • the tilt angle ⁇ 2 indicates the tilt of the object to be measured 200 with respect to the reference state around the second rotation axis AX2. It was
  • the laser spot distance L2 is the irradiation spot of the first laser beam B10 and the irradiation spot of the second laser beam B20 in the measurement object 200 in the reference state when the reflection member 5 is located at the approach position P2.
  • the distance to T20 is shown. That is, the laser spot distance L2 indicates the distance between the first laser beam B10 and the second laser beam B20 when the reflecting member 5 is located at the approach position P2.
  • the laser spot displacement amount d2 is a physical quantity corresponding to the inclination of the measurement object 200 with respect to the reference state when the reflection member 5 is located at the approach position P2, and is a physical quantity of the irradiation spot T10 of the first laser beam B10 with respect to the reference state.
  • the sum of the displacement amount and the displacement amount of the irradiation spot T20 of the second laser beam B20 is shown. It was
  • the first laser displacement meter 1 measures the amount of displacement of the irradiation spot T10 with respect to the reference state of the measurement object 200 in a state where the measurement object 200 is tilted around the second rotation axis AX2.
  • the second laser displacement meter 2 measures the amount of displacement of the irradiation spot T20 with respect to the reference state of the measurement object 200 in a state where the measurement object 200 is tilted around the second rotation axis AX2.
  • the control unit 10 calculates the laser spot displacement amount d2, which is the sum of the displacement amount of the irradiation spot T10 and the displacement amount of the irradiation spot T20. It was
  • control unit 10 executes the calculation shown in the following equation to calculate the tilt angle ⁇ 2.
  • ⁇ 2 arc tan (d2 / L2)
  • the laser spot distance L2 when the reflection member 5 is located at the approach position P2 is set in advance. That is, it is preferable to set the laser spot distance L2 required for the calculation formula by the trigonometry in advance and set it as a fixed value.
  • the work of measuring the laser spot distance L2 for each measurement object 200 is not required. That is, the work of measuring the laser spot distance L2 every time the measurement object 200 is replaced is not required. As a result, the measurement work for calculating the inclination angle ⁇ 2 of the measurement object 200 can be simplified. It was
  • the measurement object 200 includes a plane F2.
  • the second irradiation target 203 of the measurement target 200 includes a plane F2.
  • the second irradiation object 203 has, for example, a substantially flat plate shape.
  • the plane F2 intersects the plane F1.
  • the plane F2 is substantially orthogonal to the plane F1. That is, the second irradiation object 203 extends substantially vertically from the plane F1.
  • the plane F2 of the measurement object 200 in the reference state is substantially orthogonal to the first direction D1 and substantially parallel to the second direction D2.
  • the plane F2 includes a first cross-irradiation surface TA10 and a second cross-irradiation surface TA20.
  • FIG. 6B the plane F2 of the measurement object 200 in the reference state is shown by a alternate long and short dash line. It was
  • the reflecting member 5 When the reflecting member 5 is located at the approach position P2, the reflecting member 5 reflects the first laser beam B10 toward the first crossing irradiation surface TA10 intersecting the first irradiation surface TA1 in the measurement object 200. Then, the first laser displacement meter 1 receives the first laser beam B1 reflected by the first cross-irradiation surface TA10 through the reflection member 5, so that the second rotation shaft of the measurement object 200 with respect to the reference state is received. Measure the displacement around AX2. In addition, when the reflecting member 5 is located at the approach position P2, the reflecting member 5 emits a second laser beam toward the second crossing irradiation surface TA20 on the same plane F2 as the first crossing irradiation surface TA10 in the measurement object 200. Reflects B20.
  • the second laser displacement meter 2 receives the second laser beam B20 reflected by the second cross-irradiation surface TA20 via the reflection member 5, so that the second rotation axis of the measurement object 200 with respect to the reference state is received. Measure the displacement around AX2.
  • the second rotation of the measurement object 200 can be performed accurately while facilitating the adjustment of the optical system.
  • the inclination around the axis AX2 can be measured. It was
  • the first cross-irradiation surface TA10 is substantially orthogonal to the first irradiation surface TA1
  • the second cross-irradiation surface TA20 is substantially orthogonal to the second irradiation surface TA2. According to this preferred example, the adjustment of the optical system can be further facilitated. It was
  • the laser spot distance L1, the laser spot distance L2, and the laser spot distance L3 may be the same or different from each other, and can be set to arbitrary values.
  • the first irradiation surface TA1 and the second irradiation surface TA2 do not have to be on the same plane F1.
  • the second irradiation surface TA2 and the third irradiation surface TA3 do not have to be on the same plane F1.
  • the first cross-irradiation surface TA10 and the second cross-irradiation surface TA20 do not have to be on the same plane F2. It was
  • the displacement measurement method by the first laser displacement meter 1, the second laser displacement meter 2, and the third laser displacement meter 3 is not particularly limited, but may be, for example, a triangular distance measuring method.
  • Each of the first laser displacement meter 1 to the third laser displacement meter 3 may include, for example, at least a laser light source and a light receiving element.
  • the laser light source is, for example, a semiconductor laser.
  • the light receiving element is, for example, a position detection element (PSD: Position Sensitive Device) or a linear image sensor.
  • PSD Position Sensitive Device
  • each of the first laser displacement meter 1 to the third laser displacement meter 3 adopts, for example, a specular reflection method, but a diffuse reflection method may be adopted. It was
  • FIG. 7 is a diagram showing a state when the measurement object 200 rotates around the third rotation shaft AX3.
  • the measurement object 200 is viewed from the third rotation axis direction. Further, in FIG. 7, the state in which the measurement object 200 is tilted is shown by a broken line. It was
  • the inclination measuring device 100 further includes a mounting portion 300 for mounting the work W.
  • the mounting unit 300 is, for example, a stand.
  • the work W includes a measurement object 200 and a support 210.
  • the support 210 supports the measurement object 200 in a rotatable state.
  • the mounting portion 300 includes a reference surface 301.
  • the reference surface 301 is a flat surface.
  • the reference plane 301 is substantially parallel to the horizontal plane.
  • the work W is placed on the reference surface 301.
  • the bottom surface of the support 210 is a flat surface.
  • the bottom surface of the support 210 comes into contact with the reference surface 301.
  • the plane F1 of the measurement object 200 is substantially parallel to the reference surface 301
  • the plane F2 of the measurement object 200 is substantially orthogonal to the reference surface 301.
  • the measurement object 200 receives an external action from the drive mechanism 6 shown in FIG. 3, rotates around the third rotation shaft AX3 with respect to the reference state, and stops. As a result, the measurement object 200 is tilted around the third rotation axis AX3 with respect to the reference state. That is, the plane F1 of the object to be measured 200 is tilted around the third rotation axis AX3 with respect to the reference surface 301. It was
  • the drive mechanism 6 drives the measurement object 200 around the third rotation axis AX3 when the reflection member 5 is located at the retracted position P1 to bring the measurement object 200 to the reference state. And tilt it around the third rotation shaft AX3 to stop it. Then, the second laser displacement meter 2 and the third laser displacement meter 3 measure the displacement of the object to be measured 200 around the third rotation axis AX3.
  • the drive mechanism 6 includes, for example, a third coil (not shown) and a third magnet (not shown). Of the third coil and the third magnet, one is arranged on the object to be measured 200 and the other is arranged on the support 210.
  • the drive mechanism 6 drives the measurement object 200 around the third rotation shaft AX3 by passing a current through the third coil. It was
  • FIG. 8 is a diagram showing a state when the measurement object 200 rotates around the first rotation shaft AX1.
  • the measurement object 200 is viewed from the direction of the first rotation axis. Further, in FIG. 8, the state in which the measurement object 200 is tilted is shown by a broken line. It was
  • the measurement object 200 receives an external action from the drive mechanism 6 shown in FIG. 3, rotates around the first rotation shaft AX1 with respect to the reference state, and stops. As a result, the measurement object 200 is tilted around the first rotation axis AX1 with respect to the reference state. That is, the plane F1 of the object to be measured 200 is tilted around the first rotation axis AX1 with respect to the reference surface 301. It was
  • the drive mechanism 6 drives the measurement object 200 around the first rotation shaft AX1 when the reflection member 5 is located at the retracted position P1 to bring the measurement object 200 to the reference state. And tilt it around the first rotation shaft AX1 to stop it. Then, the first laser displacement meter 1 and the second laser displacement meter 2 measure the displacement of the object to be measured 200 around the first rotation axis AX1.
  • the drive mechanism 6 includes, for example, a first coil (not shown) and a first magnet (not shown). Of the first coil and the first magnet, one is arranged on the object to be measured 200 and the other is arranged on the support 210.
  • the drive mechanism 6 drives the measurement object 200 around the first rotation shaft AX1 by passing a current through the first coil. It was
  • FIG. 9 is a diagram showing a state when the measurement object 200 rotates around the second rotation shaft AX2.
  • the measurement object 200 is viewed from the second rotation axis direction.
  • the state in which the second irradiation target 203 of the measurement target 200 is tilted around the second rotation axis AX2 with respect to the reference state is shown by a broken line.
  • the first irradiation object 201 in a state of being tilted around the second rotation shaft AX2 is omitted. It was
  • the measurement object 200 receives an external action from the drive mechanism 6 shown in FIG. 3, rotates around the second rotation shaft AX2 with respect to the reference state, and stops. As a result, the measurement object 200 is tilted around the second rotation axis AX2 with respect to the reference state. That is, the plane F2 of the object to be measured 200 is tilted around the second rotation axis AX2 with respect to the reference state. It was
  • the drive mechanism 6 drives the measurement object 200 around the second rotation shaft AX2 to bring the measurement object 200 to the reference state. And tilt it around the second rotation shaft AX2 to stop it. Then, the first laser displacement meter 1 and the second laser displacement meter 2 measure the displacement of the object to be measured 200 around the second rotation axis AX2.
  • the drive mechanism 6 includes, for example, a second coil (not shown) and a second magnet (not shown). Of the second coil and the second magnet, one is arranged on the object to be measured 200 and the other is arranged on the support 210.
  • the drive mechanism 6 drives the measurement object 200 around the second rotation shaft AX2 by passing a current through the second coil. It was
  • the plane F1 of the measurement object 200 may have a shape that is inclined with respect to the reference surface 301 in the reference state, for example.
  • the plane F2 of the object to be measured 200 may have a shape inclined with respect to the reference surface 301 in the reference state, for example.
  • the first irradiation surface TA1 and / or the second irradiation surface TA2 of the measurement object 200 shown in FIG. 5A may have a shape inclined with respect to the reference surface 301 in the reference state.
  • the first crossing irradiation surface TA10 and / or the second crossing irradiation surface TA20 of the measurement object 200 shown in FIG. 6A may have a shape inclined with respect to the reference surface 301 in the reference state.
  • FIG. 10 is a side view showing the moving mechanism 4. As shown in FIG. 10, the moving mechanism 4 moves the reflecting member 5 along the first direction D1 and the second direction D2. It was
  • the reflective member 5 can be moved in the first direction D1, the reflective member 5 can be accurately arranged at the desired approach position P2 (FIG. 2B).
  • the first laser beam B10 and the second laser beam B20 can be moved to the measurement object 200 even if the length of the second direction D2 of the measurement object 200 is small.
  • the position of the reflective member 5 can be adjusted so that it is irradiated. That is, since the reflecting member 5 can be moved in the second direction D2, the first laser beam B10 and the second laser beam B20 are the second irradiation targets even when the length of the second direction D2 of the second irradiation object 203 is small.
  • the position of the reflective member 5 can be adjusted so that the object 203 is irradiated. It was
  • the moving mechanism 4 includes a first cylinder 401, a second cylinder 402, a first support body 404, a support member 405, a first guide rail 406, a first slider 408, and a second support. It includes a body 410, a second guide rail 412, a second slider 414, a connecting member 416, and a third support 418.
  • the first support body 404 includes a lower body 404A and an upper body 404B.
  • the moving mechanism 4 preferably further includes a columnar member 415, a stopper member 417, a compression coil spring 419, a stopper 420, and a tension spring 422. It was
  • the second support 410 extends along the second direction D2.
  • the second support 410 supports the second cylinder 402.
  • the second guide rail 412 is fixed to the second support 410.
  • the second guide rail 412 extends along the second direction D2. It was
  • the second slider 414 engages with the second guide rail 412.
  • the second slider 414 is fixed to the lower body 404A of the first support 404.
  • the lower body 404A extends along the second direction D2.
  • the lower body 404A and the second cylinder 402 are connected by a connecting member (not shown). Therefore, when the second cylinder 402 is driven along the second direction D2, the first support 404 moves along the second guide rail 412 via the second slider 414. That is, the second cylinder 402 moves the first support 404 along the second direction D2.
  • the second cylinder 402 is, for example, an air cylinder. It was
  • the stopper 420 contacts the bottom of the lower body 404A of the first support 404 and determines the lower limit position of the first support 404.
  • the tension spring 422 is connected to the lower body 404A and pulls the first support 404 downward. It was
  • the support member 405 is arranged on the upper body 404B of the first support body 404.
  • the support member 405 supports the first cylinder 401.
  • the upper body 404B extends along the first direction D1.
  • the first guide rail 406 is fixed to the upper body 404B.
  • the first guide rail 406 extends along the first direction D1. It was
  • the first slider 408 engages with the first guide rail 406.
  • the first slider 408 is fixed to the third support 418.
  • the third support 418 and the first cylinder 401 are connected by a connecting member 416. Therefore, when the first cylinder 401 is driven along the first direction D1, the third support 418 moves along the first guide rail 406 via the first slider 408. That is, the first cylinder 401 moves the third support 418 along the first direction D1.
  • the first cylinder 401 is, for example, an air cylinder. It was
  • the columnar member 415 is coupled to the base end portion 418B of the third support 418.
  • the columnar member 415 extends along the first direction D1.
  • the columnar member 415 has, for example, a substantially cylindrical shape.
  • the columnar member 415 is, for example, a hinge pin.
  • the columnar member 415 movably penetrates the support member 405 along the first direction D1.
  • the compression coil spring 419 is inserted into the columnar member 415 between the base end portion 418B of the third support 418 and the support member 405.
  • the compression coil spring 419 pushes the third support 418 in the direction D11.
  • the direction D11 is a direction parallel to the first direction D1 and indicates a direction from the support member 405 toward the base end portion 418B of the third support body 418.
  • a stopper member 417 is fixed to the columnar member 415.
  • the stopper member 417 regulates the movement of the columnar member 415 and the third support 418 in the direction D11 by coming into contact with the support member 405.
  • the stopper member 417 is, for example, a retaining ring. It was
  • the third support 418 moves in the direction D11 while receiving an urging force from the compression coil spring 419 toward the direction D11. Then, the movement of the third support 418 in the direction D11 is restricted by the stopper member 417. As a result, the reflective member 5 is stationary at a desired position. It was
  • the reflective member 5 is attached to the tip portion 418A of the third support 418. Therefore, the first cylinder 401 moves the reflective member 5 along the first direction D1 via the third support 418. In addition, the second cylinder 402 moves the reflective member 5 along the second direction D2 via the first support 404.
  • the control unit 10 controls the first cylinder 401 and the second cylinder 402 to move the reflective member 5 in the first direction D1 and the second direction D2. It was
  • the moving mechanism 4 in FIG. 10 is an example, and is not particularly limited as long as the reflective member 5 can be moved between the retracted position P1 and the approached position P2. Further, the retracted position P1 is not particularly limited as long as it is a position where the first laser beam B1 and the second laser beam B2 are not incident. It was
  • the inclination measuring method for measuring the inclination of the object to be measured 200 is executed by the inclination measuring device 100.
  • 11 and 12 are flowcharts showing the inclination measuring method according to the present embodiment. As shown in FIGS. 11 and 12, the inclination measuring method includes steps S1 to S19. Before the execution of step S1, the reflective member 5 is located at the retracted position P1. It was
  • step S1 the operator or the robot arm (not shown) arranges the work W including the measurement object 200 on the reference surface 301 of the mounting portion 300. It was
  • step S2 the drive mechanism 6 drives the measurement object 200 around the third rotation shaft AX3 from the reference state of the measurement object 200 and stops it. As a result, the measurement object 200 is in a state of being tilted around the third rotation axis AX3 with respect to the reference state. It was
  • step S3 when the reflection member 5 is located at the retracted position P1, the second laser displacement meter 2 irradiates the measurement object 200 with the second laser beam B2 to displace the measurement object 200. measure. It was
  • step S4 when the reflection member 5 is located at the retracted position P1, the third laser displacement meter 3 irradiates the measurement object 200 with the third laser beam B3 to displace the measurement object 200. measure. It was
  • step S5 the control unit 10 around the third rotation axis AX3 of the measurement object 200 based on the measurement result by the second laser displacement meter 2 and the measurement result by the third laser displacement meter 3. Calculate the slope. It was
  • step S6 the drive mechanism 6 releases the drive of the measurement object 200 and returns the measurement object 200 from the tilted state to the reference state. It was
  • step S7 the drive mechanism 6 drives the measurement object 200 around the first rotation shaft AX1 from the reference state of the measurement object 200 and stops it. As a result, the measurement object 200 is in a state of being tilted around the first rotation axis AX1 with respect to the reference state. It was
  • step S8 when the reflection member 5 is located at the retracted position P1, the first laser displacement meter 1 irradiates the measurement object 200 with the first laser beam B1 to displace the measurement object 200. measure. It was
  • step S9 when the reflection member 5 is located at the retracted position P1, the second laser displacement meter 2 irradiates the measurement object 200 with the second laser beam B2 to displace the measurement object 200. measure. It was
  • step S10 the control unit 10 around the first rotation axis AX1 of the measurement object 200 based on the measurement result by the first laser displacement meter 1 and the measurement result by the second laser displacement meter 2. Calculate the slope. It was
  • step S11 the drive mechanism 6 releases the drive of the measurement object 200 and returns the measurement object 200 from the tilted state to the reference state. It was
  • step S12 the moving mechanism 4 moves the reflecting member 5 from the retracting position P1 to the approaching position P2. It was
  • step S13 the drive mechanism 6 drives the measurement object 200 around the second rotation shaft AX2 from the reference state of the measurement object 200 and stops it. As a result, the measurement object 200 is in a state of being tilted around the second rotation axis AX2 with respect to the reference state. It was
  • step S14 when the reflective member 5 is located at the approach position P2, the first laser displacement meter 1 irradiates the measurement object 200 with the first laser beam B1 to displace the measurement object 200. measure. It was
  • step S15 when the reflective member 5 is located at the approach position P2, the second laser displacement meter 2 irradiates the measurement object 200 with the second laser beam B2 to displace the measurement object 200. measure. It was
  • step S16 the control unit 10 around the second rotation axis AX2 of the measurement object 200 based on the measurement result by the first laser displacement meter 1 and the measurement result by the second laser displacement meter 2. Calculate the slope. It was
  • step S17 the drive mechanism 6 releases the drive of the measurement object 200 and returns the measurement object 200 from the tilted state to the reference state. It was
  • step S18 the moving mechanism 4 moves the reflecting member 5 from the approaching position P2 to the retracting position P1. It was
  • step S19 the operator or the robot arm moves the work W including the measurement object 200 from the reference surface 301 of the mounting portion 300. Then, the inclination measurement method ends. It was
  • the retracted position P1 and the approach position P2 of the reflective member 5 are set.
  • the irradiation positions of the first laser beam B1 and the second laser beam B2 on the measurement object 200 can be made different. Therefore, while suppressing the number of mounted laser displacement meters, the inclination of the measurement object 200 around the first rotation axis AX1 and the second rotation axis AX2 in steps S8, S9, S10, S14, S15, and S16, respectively. Can be measured.
  • steps S3, S4, and S5 the inclination of the object to be measured 200 around the third rotation axis AX3 can also be measured. It was
  • the inclination measuring method it is possible to measure the inclination around the rotation axis of the measurement object 200 for each of a plurality of different rotation axes while suppressing the number of mounted laser displacement meters. It was
  • the order of each process in the tilt measurement method can be changed arbitrarily.
  • the order of the three series of processes of the series of processes of steps S2 to S6, the series of processes of steps S7 to S11, and the series of processes of steps S12 to S17 is not particularly limited, and is an arbitrary order. May be. It was
  • step S3 and step S4 may be reversed, or step S3 and step S4 may be executed in parallel.
  • step S8 and step S9 may be reversed, or step S8 and step S9 may be executed in parallel.
  • step S14 and step S15 may be reversed, or step S14 and step S15 may be executed in parallel.
  • step S12 and step S13 may be reversed, or step S12 and step S13 may be executed in parallel. It was
  • step S5 is not particularly limited as long as it is after steps S3 and S4.
  • the execution order of step S10 is not particularly limited as long as it is after steps S8 and S9.
  • the execution order of step S16 is not particularly limited as long as it is after steps S14 and S15. It was
  • the work W shown in FIG. 7 is used, for example, as a dummy unit of an optical unit.
  • the optical unit includes an optical module, a support, and a drive mechanism.
  • the measurement object 200 shown in FIG. 7 is used, for example, as a dummy module of an optical module.
  • the support and drive mechanism of the optical unit correspond to the support 210 shown in FIG. 7 and the drive mechanism 6 shown in FIG. 3, respectively. It was
  • the optical module is, for example, an image pickup device such as a thin camera mounted on an electronic device such as a mobile phone with a camera and a tablet PC.
  • the optical unit has a correction function for pitching (longitudinal runout), yawing (horizontal runout), and rolling (shake around the optical axis) of the optical module.
  • the optical module is rotatably supported by a support around a pitch axis, a yaw axis, and a roll axis.
  • the drive mechanism drives the optical module around the pitch axis, the yaw axis, and the roll axis in the same manner as the drive mechanism 6 shown in FIG. It was
  • the first rotation axis AX1 shown in FIG. 1A corresponds to, for example, a pitch axis
  • the third rotation axis AX3 corresponds to, for example, a yaw axis
  • the second rotation shaft AX2 shown in FIG. 2A corresponds to, for example, a roll shaft. It was
  • the present disclosure can be used, for example, for a tilt measuring device and a tilt measuring method.

Abstract

L'invention concerne un dispositif de mesure d'inclinaison qui comprend un premier appareil de mesure de déplacement à laser, un second appareil de mesure de déplacement à laser et un élément réfléchissant. Le premier appareil de mesure du déplacement à laser irradie un objet à mesurer avec un premier faisceau laser et mesure le déplacement de l'objet à mesurer. Le second appareil de mesure du déplacement à laser irradie l'objet à mesurer avec un second faisceau laser et mesure le déplacement de l'objet à mesurer. L'élément réfléchissant est situé dans une position rétractée ou une position d'approche par rapport au trajet optique du premier faisceau laser et au trajet optique du second faisceau laser. Le premier mesureur de déplacement à laser et le second mesureur de déplacement à laser mesurent le déplacement de l'objet à mesurer tant dans le cas où l'élément réfléchissant est situé dans la position rétractée que dans le cas où l'élément réfléchissant est situé dans la position d'approche. L'élément réfléchissant change les directions de déplacement du premier faisceau laser et du second faisceau laser à la position d'approche pour réfléchir le premier faisceau laser et le second faisceau laser vers l'objet à mesurer.
PCT/JP2020/047971 2020-06-30 2020-12-22 Dispositif et procédé de mesure d'inclinaison WO2022004006A1 (fr)

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CN202080102462.8A CN115917247A (zh) 2020-06-30 2020-12-22 倾斜测量装置及倾斜测量方法

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114719784A (zh) * 2022-04-11 2022-07-08 沈阳理工大学 一种圆柱形称重传感器倾斜角度检测装置和方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014057082A (ja) * 2007-08-24 2014-03-27 Nikon Corp 露光方法及び露光装置、並びにデバイス製造方法
JP2017167033A (ja) * 2016-03-17 2017-09-21 コマツＮｔｃ株式会社 測定装置および測定装置を備えた加工ライン

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014057082A (ja) * 2007-08-24 2014-03-27 Nikon Corp 露光方法及び露光装置、並びにデバイス製造方法
JP2017167033A (ja) * 2016-03-17 2017-09-21 コマツＮｔｃ株式会社 測定装置および測定装置を備えた加工ライン

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114719784A (zh) * 2022-04-11 2022-07-08 沈阳理工大学 一种圆柱形称重传感器倾斜角度检测装置和方法
CN114719784B (zh) * 2022-04-11 2023-08-18 沈阳理工大学 一种圆柱形称重传感器倾斜角度检测装置和方法

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