WO2021227909A1 - 挤压装置、光刻胶供应系统以及光刻胶供应方法 - Google Patents

挤压装置、光刻胶供应系统以及光刻胶供应方法 Download PDF

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Publication number
WO2021227909A1
WO2021227909A1 PCT/CN2021/091799 CN2021091799W WO2021227909A1 WO 2021227909 A1 WO2021227909 A1 WO 2021227909A1 CN 2021091799 W CN2021091799 W CN 2021091799W WO 2021227909 A1 WO2021227909 A1 WO 2021227909A1
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WIPO (PCT)
Prior art keywords
photoresist
liquid level
bottle
extrusion
extruded structure
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PCT/CN2021/091799
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English (en)
French (fr)
Inventor
李生骄
董佳仁
Original Assignee
长鑫存储技术有限公司
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Application filed by 长鑫存储技术有限公司 filed Critical 长鑫存储技术有限公司
Priority to US17/598,730 priority Critical patent/US20230314947A1/en
Publication of WO2021227909A1 publication Critical patent/WO2021227909A1/zh

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D83/00—Containers or packages with special means for dispensing contents
    • B65D83/0005—Containers or packages provided with a piston or with a movable bottom or partition having approximately the same section as the container
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00—Measuring or testing not otherwise provided for
    • G01D21/02—Measuring two or more variables by means not covered by a single other subclass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like

Definitions

  • This application relates to the field of semiconductor technology, and in particular to an extrusion device, a photoresist supply system, and a photoresist supply method.
  • Photoresist is a key material for micro-pattern processing in microelectronics technology. Especially in recent years, the development of large-scale and ultra-large-scale integrated circuits has greatly promoted the research, development and application of photoresist. Generally, the photoresist is placed in a photoresist bottle, and the photoresist is extracted by applying pressure to the photoresist bottle by nitrogen gas to realize the taking of the photoresist. By adopting this method, the utilization rate of photoresist is low.
  • the photoresist bottle In order to increase the usage rate of photoresist, the photoresist bottle is placed obliquely, but the residual rate of photoresist is still high.
  • the embodiments of the present application provide an squeezing device, a photoresist supply system, and a photoresist supply method.
  • the photoresist bottle is squeezed by the squeezing device, thereby improving the utilization rate of the photoresist in the photoresist bottle.
  • an embodiment of the present application provides an squeezing device, including: a base, which is used to carry and place the photoresist bottle; a support rail, which is vertically arranged on the base; an extrusion structure, squeezing The end of the structure is movably arranged on the support rail so that the extruded structure moves up and down along the track direction of the support rail; the driving module is used to drive the extruded structure to deform the extruded structure and make the extruded structure The enclosed area is reduced in area, and is also used to drive the deformed extruded structure to move the extruded structure up and down along the track direction of the support rail.
  • the photoresist bottle is extruded by the driving module to drive the extruded structure, so that the photoresist bottle is in the horizontal plane of the extruded structure, and the utilization rate of the photoresist in the photoresist bottle is higher. ; Through the drive module to drive the extrusion structure to move up and down along the track direction of the support track, so that the extrusion structure can squeeze different planes of the photoresist bottle, so that the photoresist in the entire photoresist bottle has a higher utilization rate .
  • the support rail includes a first rail and a second rail; the first rail and the second rail are vertically arranged on the base; one end of the extruded structure is movably arranged on the first rail, and the other end of the extruded structure It is movably arranged on the second track; the driving module is used to drive the extrusion structure between the first track and the second track, so as to reduce the area of the area enclosed by the extrusion structure.
  • the first rail and the second rail jointly support the extruded structure, and fix the two ends of the extruded structure to improve the effect of the extruded structure to squeeze the photoresist bottle.
  • the support rail is movably arranged on the base; the driving module is used to drive the extrusion structure between the first rail and the second rail, including: the driving module is used to drive the support rail to move in a horizontal direction to drive the extrusion structure to The extruded structure is deformed, and the area enclosed by the extruded structure is reduced.
  • the extruded structure is a closed ring structure.
  • it also includes a fixing unit, which is arranged on the base and used to fix the photoresist bottle placed on the base.
  • the photoresist bottle is fixed by the fixing unit to prevent the photoresist bottle from moving along with the movement of the extrusion structure, thereby affecting the extrusion effect of the extrusion structure.
  • a first detection module for detecting the liquid level of the photoresist in the photoresist bottle, and the first detection module is in communication with the driving module, and the driving module drives the deformation based on the detected liquid level The extruded structure moves away from the base.
  • the first detection module the liquid level of the photoresist is detected, thereby controlling the driving module to drive the extrusion structure, and the automation of the extrusion process is realized.
  • the first detection module includes: a first sensing unit, the first sensing unit is used to detect whether the liquid level is lower than the first warning height, and the driving module is in communication with the first sensing unit, when the first detection module detects the liquid When the surface height is lower than the first warning height, the drive module drives the deformed extruded structure to move the extruded structure away from the base along the track direction of the support rail; the second sensing unit is used for the second sensing unit In detecting whether the liquid level is lower than the second warning height, the second warning height is lower than the first warning height, and the second warning height indicates the liquid level when the photoresist is exhausted.
  • the second sensing unit detects the liquid level of the photoresist to know whether the stock of the photoresist in the photoresist bottle is sufficient.
  • the first detection module further includes: a first alarm unit, the first alarm unit is communicatively connected with the first sensing unit, and configured to issue a first alarm message when the first sensing unit detects that the liquid level is lower than the first warning height ;
  • the second alarm unit the second alarm unit is in communication with the second sensing unit, and is used to issue a second alarm message when the second sensing unit detects that the liquid level is lower than the second warning height.
  • the liquid level photoresist of the photoresist is monitored in real time through the alarm unit, and an alarm message is sent out to notify the relevant staff to check, so as to ensure that the extrusion device is in a normal working state.
  • the second detection module which is located on the extruded structure, is used to detect the shape of the extruded structure during the deformation of the extruded structure; the driving module is communicatively connected with the second detection module, and when the second detection module detects When the shape of the extruded structure meets the preset shape, the driving module stops driving the extruded structure to stop the deformation of the extruded structure.
  • the second detection module detects the shape of the extruded structure in real time, and stops extruding when the preset shape is satisfied, avoiding unnecessary energy loss.
  • the third detection module the third detection module is located on the support rail, is used to detect the height of the extruded structure; the driving module is communicatively connected with the third detection module, when the third detection module detects that the height of the extruded structure reaches a preset At the maximum height, the drive module controls the extrusion structure to stop moving.
  • the third detection module detects the height of the extruded structure in real time, and when the preset maximum height is reached, the driving of the extruded structure is stopped to prevent the extruded structure from slipping off the support rail.
  • the embodiment of the application also provides a photoresist supply system, including: the above-mentioned squeezing device and a photoresist bottle placed on a base; the photoresist bottle includes a bottle body, a bottle bottom, and a bottle cap.
  • the bottle cap Used to store photoresist, the bottle cap is provided with a through hole, and a tube that passes through the through hole and extends from the outside of the photoresist bottle to the body of the bottle; the driving module is used to drive the extruded structure to deform the extruded structure , The area of the area enclosed by the extrusion structure is reduced to squeeze the photoresist bottle; the drive module is also used to drive the extrusion structure to move the extrusion structure away from the base along the track direction of the support rail to Ensure that the liquid level of the photoresist in the bottle body is within the preset range, so that the photoresist flows out through the conduit.
  • the material of the bottle body includes a ductile material part and a plastic material part.
  • the area where the bottle body is compressed by the extruded structure is the plastic material part, and the area where the bottle body is not compressed by the extruded structure is the ductile material part.
  • the photoresist bottle is squeezed by the squeezing device, so that the photoresist bottle is in the horizontal plane squeezed by the squeezing device, and the utilization rate of the photoresist in the photoresist bottle is higher;
  • the squeezing device squeezes different planes of the photoresist bottle, so that the utilization rate of the photoresist in the whole photoresist bottle is higher.
  • the embodiment of the present application also provides a photoresist supply method, including: being applied to the above photoresist supply system, including: driving the extruded structure to deform the extruded structure so that the area enclosed by the extruded structure is reduced Small, to squeeze the photoresist bottle located on the base of the squeezing device; drive the deformed squeeze structure to move the squeeze structure away from the base along the track direction of the support rail to ensure that it is located on the base.
  • the liquid level of the photoresist in the plastic bottle is within a preset range, so that the photoresist flows out through the pipe.
  • driving the extruded structure to deform the extruded structure and reduce the area of the area enclosed by the extruded structure to extrude the photoresist bottle located on the base of the extruding device including: when the photoresist is detected When the liquid level of the photoresist is not within the preset range or the liquid level of the photoresist cannot be detected, an early warning message is issued; based on the warning information, the extruded structure is driven to deform the extruded structure and the area enclosed by the extruded structure Reduce or drive the deformed extruded structure to move the extruded structure away from the base along the track direction of the supporting track.
  • an early warning message is issued, including: detecting whether the liquid level of the photoresist is higher than the first warning height , The first warning height is the highest height of the preset range; when it is detected that the liquid level of the photoresist is lower than the first warning height, a warning message is issued.
  • a warning message is issued, including: detecting whether the liquid level of the photoresist is higher than the second warning height , The second warning height is the lowest height of the preset range; when it is detected that the liquid level of the photoresist is lower than the second warning height or the liquid level of the photoresist cannot be detected, it will indicate that the photoresist is exhausted Alert information.
  • the utilization rate of the photoresist in the photoresist bottle is higher;
  • the different planes of the resist bottle make the photoresist utilization rate in the whole photoresist bottle higher.
  • FIG. 1 is a schematic structural diagram of an extrusion device provided by an embodiment of the application.
  • FIG. 2 is an extrusion principle diagram of an extrusion structure provided by an embodiment of the application
  • FIG. 3 is a schematic structural diagram of a photoresist bottle provided by another embodiment of the application.
  • FIG. 4 is a schematic structural diagram of a photoresist supply system provided by another embodiment of the application.
  • 5-7 are working schematic diagrams of the photoresist supply system provided by another embodiment of the application.
  • the photoresist bottle is placed obliquely, but the residual rate of photoresist is still relatively high.
  • an embodiment of the present application provides an squeezing device that drives the squeezing structure to squeeze the photoresist bottle through a driving module, so that the photoresist bottle is in the horizontal plane squeezed by the squeezing structure, and the photoresist
  • the utilization rate of the photoresist in the bottle is high;
  • the driving module drives the extrusion structure to move up and down along the track direction of the supporting track, so that the extrusion structure can squeeze different planes of the photoresist bottle, so that the photoresist bottle
  • the overall utilization rate of photoresist is relatively high.
  • FIG. 1 is a schematic diagram of the structure of the extrusion device provided in this embodiment
  • FIG. 2 is a schematic diagram of the extrusion structure provided in this embodiment.
  • the extrusion device 10 provided in this embodiment will be described in detail below with reference to the drawings. ,details as follows:
  • the squeezing device 10 includes: a base 100 for supporting and placing a photoresist bottle (not shown); a supporting rail 101 that is vertically arranged on the base 100; and an squeezing structure 102,
  • the end of the extrusion structure 102 is movably arranged on the support rail 101, so that the extrusion structure 102 moves up and down along the track direction of the support rail 101; the driving module 103 is used to drive the extrusion structure 102 to make the extrusion structure 102 move up and down.
  • the pressing structure 102 is deformed, so that the area enclosed by the pressing structure 102 is reduced, and it is also used to drive the deformed pressing structure 102 to move the pressing structure 102 up and down along the track direction of the support rail 101.
  • the supporting rail 101 includes: a first rail 111 and a second rail 121; the first rail 111 and the second rail 121 are vertically arranged on the base 100; one end of the extrusion structure 102 is movably arranged on On the first rail 111, the other end of the extruded structure 102 is movably arranged on the second rail 121; the driving module 103 is used to drive the extruded structure 102 between the first rail 111 and the second rail 121 to make The area enclosed by the extruded structure 102 is reduced; the extruded structure 102 is jointly supported by the first rail 111 and the second rail 121, and the two ends of the extruded structure 102 are fixed to improve the compression lithography of the extruded structure 102.
  • the effect of the glue bottle is: a first rail 111 and a second rail 121; the first rail 111 and the second rail 121 are vertically arranged on the base 100; one end of the extrusion structure 102 is movably arranged on
  • the support rail 101 is movably disposed on the base 10; the driving module 103 is used to drive the extrusion structure 102 between the first rail 111 and the second rail 121, and includes: the driving module 103 is used to drive the support rail 101 along the The horizontal movement drives the extruded structure 102 to deform the extruded structure 102, so that the area enclosed by the extruded structure 102 is reduced.
  • FIG. 2 is a top view of the extruded structure 102 in which the base 100 is located in a circular area.
  • the first rail 111 and the second rail 121 are located at the edge of the base 100 (as shown by the dashed line in the figure), and the extruded structure 102 is a closed ring structure (as shown by the dashed line in the figure), and the photoresist bottle Place in the area enclosed by the extruded structure 102.
  • the driving module drives the first rail 111 and the second rail 121 to approach each other in the direction of the connection line, the extruded structure 102 between the first rail 111 and the second rail 121 is extruded inward, and the extruded structure 102 is formed from a circle.
  • the shape becomes an ellipse, and as the first track 111 and the second track 121 move, the eccentricity of the ellipse enclosed by the extruded structure 102 gradually increases, and finally approaches two close straight lines.
  • the eccentricity of the ellipse enclosed by the extruded structure 102 increases, that is, the area enclosed by the extruded structure 102 decreases.
  • the amount of photoresist contained in the photoresist bottle is The capacity becomes smaller and smaller, and eventually approaches 0, so that the remaining amount of photoresist is reduced in the horizontal plane of the extrusion structure 102, thereby increasing the utilization rate of the photoresist.
  • the first rail 111 and the second rail 121 are used as the specific implementation solution of the support rail 101, which does not constitute a limitation to the solution. In other embodiments, only one support rail or multiple support rails may be used. It is clear to those skilled in the art that in this embodiment, the support rail is used to provide a fulcrum for the up and down movement of the extruded structure, and is used to realize the deformation of the extruded structure. Related devices that meet the above-mentioned functions should be It belongs to the protection scope of this method.
  • the squeezing device 10 further includes: a first detection module 105, the first detection module 105 is used to detect the liquid level of the photoresist in the photoresist bottle, and the first detection module 105 is in communication connection with the driving module 103, and the driving module 103 drives the formed extruded structure 102 to move away from the base 100 based on the detected liquid level.
  • the first detection module 105 detects the liquid level of the photoresist, so as to control the driving module 103 to drive the extrusion structure 102, which realizes the automation of the extrusion process.
  • the first detection module includes: a first sensing unit 115 and a second sensing unit 125; the first sensing unit 115 is used to detect whether the liquid level of the photoresist is lower than the first warning height, and the first sensing unit 115 Communicatingly connected with the driving module 103, when the first detection module detects that the liquid level of the photoresist is lower than the first warning height, the driving module 103 drives the deformed extruded structure 102 so that the extruded structure 102 is supported along The track direction of the track 101 moves in a direction away from the base 100.
  • the drive The module 103 drives the extrusion structure 102 to squeeze the photoresist bottle. Due to the extrusion of the extrusion structure 102, the volume of the photoresist bottle in the same horizontal plane as the extrusion structure 102 is reduced, and the corresponding photoresist liquid level The height will rise, and as the photoresist is used, the extruded structure 102 will continue to extrude until it reaches the minimum position.
  • the driving module 103 drives the squeezing structure 102 to move away from the base 100 along the track direction of the support track 101 to squeeze the photoresist bottles in different planes, so that the photoresist liquid in the photoresist bottle As the surface rises, as the extrusion structure 102 moves away from the base 100 along the track direction of the support rail 101, when the extrusion structure 102 moves to the highest point, the photoresist bottle located below the height of the extrusion structure 102 is lithographically The utilization rate of glue is high.
  • the second sensing unit 125 is used to detect whether the liquid level is lower than the second warning height, the second warning height is lower than the first warning height, and the second warning height represents the liquid level when the photoresist is exhausted.
  • the liquid level of the photoresist is always near the first warning height.
  • the liquid level of the photoresist continues to drop to the second warning height, indicating that the photoresist in the photoresist bottle is about to be exhausted.
  • the second sensing unit 125 can notify the relevant staff of the light exposure in time. Resist bottles are replaced to ensure the continuous supply of photoresist and avoid the lack of photoresist supply which will affect the operation of the semiconductor manufacturing process.
  • the first warning height is set to a height at which the catheter can smoothly suck out the photoresist in the photoresist bottle, and the liquid level of the photoresist is higher than the first warning height to ensure the supply of photoresist;
  • the second warning height Set to the height of the conduit opening.
  • the first detection module 105 further includes a first alarm unit 135 and a second alarm unit 145.
  • the first alarm unit 135 is communicatively connected with the first sensing unit 115, and is configured to send a first alarm message when the first sensing unit 115 detects that the liquid level is lower than the first warning height.
  • the second alarm unit 145 is in communication connection with the second sensing unit 125, and is configured to send a second alarm message when the second sensing unit 125 detects that the liquid level is lower than the second warning height.
  • the first alarm information and the second alarm information can be realized by alarm bells of different frequencies, or can be realized by sending the alarm information to the relevant operating platform for display.
  • the devices and alarm conditions of the working mode of the detection module 105 should all fall within the protection scope of the present application.
  • the extrusion device 10 further includes: a second detection module 107 located on the extrusion structure 102 for detecting the shape of the extrusion structure 102 during the deformation of the extrusion structure 102.
  • the driving module 103 is in communication connection with the second detecting module 107.
  • the driving module 103 stops driving the extruded structure 102 to stop the deformation of the extruded structure 102.
  • the second detection module 107 can be implemented by a sensor located on the side wall of the extruded structure 102.
  • the area enclosed by the extruded structure 102 is reduced, that is, the extruded structure 102 includes the distance between one end of the sensor and the other end detected by the sensor gradually decreases.
  • the preset shape By converting the preset shape into a preset distance, when the distance detected by the sensor meets the preset distance, at this time, the shape of the extruded structure 102 Meet the preset shape.
  • the second detection module 107 detects the shape of the extruded structure 102 in real time, and stops extruding when the preset shape is satisfied, avoiding unnecessary energy loss.
  • the extrusion device 10 further includes: a third detection module 106, which is located on the support rail 101, and is used to detect the height of the extrusion structure 102.
  • the driving module 103 is in communication connection with the third detection module 106, and when the third detection module 106 detects that the height of the extruded structure 102 reaches the preset maximum height, the driving module 103 controls the extruded structure 102 to stop moving.
  • the preset maximum height is flush with the above-mentioned second warning height to ensure that the photoresist in the photoresist bottle is consumed, and to further ensure that the residual amount of photoresist in the photoresist bottle is low.
  • the third detection module 106 may be a sensor located at the preset maximum height of the support rail.
  • the extruded structure 102 moves in the direction away from the base 100 along the rail direction of the support rail 101, it touches When the sensor is used, that is, the height of the extruded structure 102 reaches the preset maximum height.
  • the third detection module 106 detects the height of the extruded structure 102 in real time, and when the preset maximum height is reached, the driving of the extruded structure 102 is stopped to prevent the extruded structure 102 from slipping off on the support rail.
  • the position setting of the second detection module 107 and the third detection module 106 is only for the understanding of those skilled in the art.
  • the second detection module 107 and the third detection module 106 Both can be set at the base 100, the extruded structure 102, or the support rail 101, as long as the preset shape and the preset maximum height for the extruded structure 102 can be detected.
  • the squeezing device 10 further includes a fixing unit 104, which is arranged on the base 100 and used to fix the photoresist bottle placed on the base 100.
  • the photoresist bottle is fixed by the fixing unit 104 to prevent the photoresist bottle from moving along with the movement of the extrusion structure 102, thereby affecting the extrusion effect of the extrusion structure 102.
  • the driving module 103 includes a control unit 113 and a driving motor 123.
  • the control unit 113 is in communication connection with the first detection module, the second detection module or the third detection module, and is used to control whether the driving motor 123 works.
  • the driving motor 123 is used to drive the extrusion structure 102 to move the extrusion structure 102 up and down along the track direction of the support rail 101, and is also used to drive the extrusion structure 102 to deform the extrusion structure 102 so that the extrusion structure 102 surrounds The area of the resulting area is reduced.
  • the squeezing structure 102 is driven by the driving module 103 to squeeze the photoresist bottle, so that the photoresist bottle is in the horizontal plane squeezed by the squeezing structure 102, and the photoresist in the photoresist bottle is used
  • the rate is high; the driving module 103 drives the extrusion structure 102 to move up and down along the track direction of the support rail 101, so that the extrusion structure 102 can squeeze different planes of the photoresist bottle, so that the light in the whole photoresist bottle
  • the utilization rate of the resist is higher.
  • each unit involved in this embodiment is a logical unit.
  • a logical unit can be a physical unit, a part of a physical unit, or multiple physical units. The combination of units is realized.
  • this embodiment does not introduce units that are not closely related to solving the technical problems proposed by the present application, but this does not indicate that there are no other units in this embodiment.
  • Another embodiment of the present application relates to a photoresist supply system.
  • the photoresist supply system of this embodiment will be described in detail below with reference to the accompanying drawings.
  • the photoresist supply system includes: the above-mentioned squeezing device 10 and a photoresist bottle placed on the base of the squeezing device 10.
  • the photoresist bottle includes a bottle body 202, a bottle bottom 203, and a bottle cap 201.
  • the bottle body 202 is used to store photoresist.
  • the outside of the plastic bottle extends to the tube 221 in the body of the bottle;
  • the driving module 103 of the squeezing device 10 is used to drive the squeezing structure 102 to deform the squeezing structure 102, so that the area enclosed by the squeezing structure 102 is reduced to Squeeze the photoresist bottle;
  • the driving module 103 is also used to drive the extruded structure 102 to move the extruded structure 102 away from the base 100 along the track direction of the support rail 101 to ensure that the photoresist is located in the bottle body
  • the liquid level is within a preset range, allowing the photoresist to flow out through the conduit.
  • the squeezing device 10 further includes a first detection module (not shown), the first detection module (not shown) is used to detect the liquid level of the photoresist in the photoresist bottle, and the first detection The module (not shown) is communicatively connected with the driving module 103 of the extrusion device 10; when the first detection module (not shown) detects that the liquid level of the photoresist is not within the preset range or the photoresist cannot be detected Early warning information is issued when the liquid level is high; the driving module 103 receives the warning information, drives the extruded structure 102 to deform the extruded structure 102, reduces the area enclosed by the extruded structure 102 or drives the deformed extruded structure 102, so that the extrusion structure 102 moves in a direction away from the base 100 along the track direction of the support track 101.
  • a first detection module (not shown) is used to detect the liquid level of the photoresist in the photoresist bottle, and the first detection The module (
  • the first detection module includes a first sensing unit 204 and a second sensing unit 205.
  • the first sensing unit 204 is arranged at the bottom of the bottle cap 201, the first sensing unit 204 is used to detect whether the liquid level of the photoresist 20 is higher than the first warning height, the first warning height is The highest height of the preset range; when the first sensing unit 204 detects that the liquid level of the photoresist 20 is lower than the first warning height, a warning message is issued;
  • the driving module 103 drives the extrusion structure 102 to squeeze the photoresist bottle. Due to the extrusion of the extrusion structure 102, the volume of the photoresist bottle in the same horizontal plane as the extrusion structure 102 is reduced, and the corresponding photoresist The liquid level of 20 will rise, and as the photoresist 20 is used, the extrusion structure 102 will continue to squeeze until it reaches the minimum position.
  • the driving module 103 drives the squeezing structure 102 to move away from the base 100 along the track direction of the supporting track 101 to squeeze the photoresist bottles in different horizontal planes, so that the photoresist 20 in the photoresist bottle As the liquid level rises, as the extrusion structure 102 moves away from the base 100 along the track direction of the support rail 101, when the extrusion structure 102 moves to the highest point, the light of the photoresist bottle below the height of the extrusion structure 102 The utilization rate of the resist 20 is relatively high.
  • the second sensing unit 205 is arranged at the nozzle of the pipe 221, and the second sensing unit 205 is used to detect whether the liquid level of the photoresist 20 is higher than the second warning height, and the second warning height is the lowest height of the preset range; When the second sensing unit 205 detects that the liquid level of the photoresist 20 is lower than the second warning height or cannot detect the liquid level of the photoresist 20, an alarm message indicating that the photoresist is exhausted is issued.
  • the liquid level of the photoresist 20 is always near the first warning height.
  • the liquid level of the photoresist 20 continues to drop to the second warning height, indicating that the photoresist 20 in the photoresist bottle is about to be exhausted, and the second sensing unit 125 can promptly notify Relevant staff replace the photoresist bottle to ensure the continuous supply of photoresist 20 and avoid the lack of supply of photoresist 20 which will affect the operation of the semiconductor manufacturing process.
  • the position setting of the first sensing unit 204 and the second sensing unit 205 is only for the understanding of those skilled in the art.
  • the first sensing unit 204 and the second sensing unit 205 Both can be set on the screen wall of the bottleneck of the photoresist bottle or the bottom of the bottle cap, as long as the liquid level position of the photoresist 20 for marking the need to drive the extrusion structure can be detected, and the photoresist 20 can be detected.
  • the position of the exhausted liquid level is sufficient.
  • the liquid level of the photoresist 20 is detected, so as to control the driving module 103 to drive the extrusion structure, which realizes the automation of the extrusion process.
  • the material of the body portion 202 includes a ductile material portion and a plastic material portion.
  • the area where the body portion 202 is squeezed by the extruded structure 102 is the plastic material portion, and the area where the body portion 202 is not squeezed by the extruded structure 102 is Department of tough materials.
  • the area squeezed by the extruded structure 102 is made of plastic material, which is convenient for the extruded structure 102 to squeeze the photoresist bottle; the area not squeezed by the extruded structure 102 (the area adjacent to the support rail 101) has toughness It is made of material to prevent the photoresist bottle from moving along with the movement of the extrusion structure 102, thereby affecting the extrusion effect of the extrusion structure 102.
  • the photoresist bottle placed on the base 100 can be fixed by the fixing unit 104 provided on the base 100, so as to prevent the photoresist bottle from moving with the movement of the extrusion structure 102, thereby affecting The extrusion effect of the extrusion structure 102.
  • the photoresist bottle is squeezed by the squeezing device 10, so that the photoresist bottle is in the horizontal plane squeezed by the squeezing device 10, and the utilization rate of the photoresist 20 in the photoresist bottle is higher;
  • the squeezing device 10 squeezes different planes of the photoresist bottle, so that the photoresist 20 in the entire photoresist bottle has a higher utilization rate.
  • each unit involved in this embodiment is a logical unit.
  • a logical unit can be a physical unit, a part of a physical unit, or multiple physical units. The combination of units is realized.
  • this embodiment does not introduce units that are not closely related to solving the technical problems proposed by the present application, but this does not indicate that there are no other units in this embodiment.
  • Another embodiment of the present application relates to a photoresist supply method, which is specifically as follows: applied to the above-mentioned extrusion device, including: driving the extrusion structure to deform the extrusion structure and reduce the area of the area enclosed by the extrusion structure , To squeeze the photoresist bottle located on the base of the squeezing device; or drive the squeezing structure to move the squeezing structure away from the base along the track direction of the support rail to ensure that the photoresist is located on the base of the squeezing device
  • the liquid level of the photoresist in the bottle is within a preset range, so that the photoresist flows out through the pipe.
  • the above method provides an squeezing device to squeeze the photoresist bottle to increase the utilization rate of the photoresist stored in the photoresist bottle.
  • the following is combined with the squeezing device to automatically squeeze the photoresist with the squeezing device
  • the bottle method is described in detail:
  • Step A1 detecting whether the liquid level of the photoresist is within a preset range.
  • the warning message is issued, including: detecting whether the liquid level of the photoresist is higher than The first warning height, the first warning height is the highest height of the preset range; when it is detected that the liquid level of the photoresist is lower than the first warning height, a warning message is issued.
  • an early warning message is issued, including: detecting whether the liquid level of the photoresist is higher than the second warning height, first The second warning height is the lowest height of the preset range; when it is detected that the liquid level of the photoresist is lower than the second warning height or the liquid level of the photoresist cannot be detected, an alarm indicating that the photoresist is exhausted will be issued information.
  • the first warning height is set to a height at which the catheter can smoothly suck out the photoresist in the photoresist bottle, and the liquid level of the photoresist is higher than the first warning height to ensure the supply of photoresist;
  • the second warning height Set to the height of the conduit opening.
  • step A2 when the liquid level of the photoresist is within the preset range, step A2 is executed; when the liquid level of the photoresist is not within the preset range and the liquid level of the photoresist is higher than the second warning height, execute Step A3, when the liquid level of the photoresist is not within the preset range and the liquid level of the photoresist is lower than the second warning height or the liquid level of the photoresist cannot be detected, step A4 is performed.
  • Step A2 continue to step A1.
  • Step A3 based on the warning information, drive the squeezing structure to squeeze the photoresist bottle.
  • the drive The module 103 drives the extrusion structure 102 to squeeze the photoresist bottle. Due to the extrusion of the extrusion structure 102, the volume of the photoresist bottle in the same horizontal plane as the extrusion structure 102 is reduced, and the corresponding photoresist liquid level The height will rise, and as the photoresist is used, the extruded structure 102 will continue to extrude until it reaches the minimum position.
  • the driving module 103 drives the squeezing structure 102 to move away from the base 100 along the track direction of the support track 101 to squeeze the photoresist bottles in different planes, so that the photoresist liquid in the photoresist bottle As the surface rises, as the extrusion structure 102 moves away from the base 100 along the track direction of the support rail 101, when the extrusion structure 102 moves to the highest point, the photoresist bottle located below the height of the extrusion structure 102 is lithographically The utilization rate of glue is high.
  • Step A4 based on the alarm information indicating that the photoresist is exhausted, an alarm is issued.
  • the photoresist bottle is made in the horizontal plane squeezed by the squeezing device, and the utilization rate of the photoresist in the photoresist bottle is higher; by squeezing the photoresist The different planes of the bottle make the photoresist utilization rate in the whole photoresist bottle higher.

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Abstract

一种挤压装置(10)、光刻胶供应系统以及光刻胶供应方法，挤压装置(10)包括：底座(100)，底座(100)用于承载放置光刻胶瓶；支撑轨道(101)，支撑轨道(101)竖直设置在底座(100)上；挤压结构(102)，挤压结构(102)的端部可移动的设置在支撑轨道(101)上，以使挤压结构(102)沿支撑轨道(101)的轨道方向上下移动；驱动模块(103)，驱动模块(103)用于驱动挤压结构(102)以使挤压结构(102)发生形变，使挤压结构(102)围成的区域面积减小，且还用于驱动发生形变后的挤压结构(102)以使挤压结构(102)沿支撑轨道(101)的轨道方向上下移动；通过挤压装置(10)挤压光刻胶瓶，从而提高光刻胶瓶中光刻胶的利用率。

Description

挤压装置、光刻胶供应系统以及光刻胶供应方法
交叉引用
本申请引用于2020年5月12日递交的名称为“挤压装置、光刻胶供应系统以及光刻胶供应方法”的第202010396944.0号中国专利申请，其通过引用被全部并入本申请。
技术领域
本申请涉及半导体技术领域，特别涉及一种挤压装置、光刻胶供应系统以及光刻胶供应方法。
背景技术
光刻胶是微电子技术中微细图形加工的关键材料，特别是近年来大规模和超大规模集成电路的发展，更是大大促进了光刻胶的研究开发和应用。通常的，光刻胶置于光刻胶瓶内，通过氮气向光刻胶瓶内施加压力抽取光刻胶实现光刻胶的取用。采用这种取用手段，光刻胶的利用率较低。
为了提高光刻胶的使用率，会将光刻胶瓶倾斜放置，但光刻胶的残留率依然较高。
发明内容
本申请实施例提供一种挤压装置、光刻胶供应系统以及光刻胶供应方法，通过挤压装置挤压光刻胶瓶，从而提高光刻胶瓶中光刻胶的利用率。
为解决上述技术问题，本申请实施例提供了一种挤压装置，包括：底座，底座用于承载放置光刻胶瓶；支撑轨道，支撑轨道竖直设置在底座上；挤压结构，挤压结构的端部可移动的设置在支撑轨道上，以使挤压结构沿支撑轨道的 轨道方向上下移动；驱动模块，驱动模块用于驱动挤压结构以使挤压结构发生形变，使挤压结构围成的区域面积减小，且还用于驱动发生形变后的挤压结构以使挤压结构沿支撑轨道的轨道方向上下移动。
相对于相关技术而言，通过驱动模块驱动挤压结构挤压光刻胶瓶，使得光刻胶瓶在挤压结构挤压的水平面内，光刻胶瓶中的光刻胶的利用率较高；通过驱动模块驱动挤压结构沿支撑轨道的轨道方向上下移动，以使挤压结构可以挤压光刻胶瓶的不同平面，以使光刻胶瓶整体中的光刻胶的利用率较高。
另外，支撑轨道包括第一轨道以及第二轨道；第一轨道与第二轨道竖直设置在底座上；挤压结构的一端部可移动地设置在第一轨道上，挤压结构的另一端部可移动地设置在第二轨道上；驱动模块用于驱动第一轨道与第二轨道之间的挤压结构，以使挤压结构围成的区域面积减小。通过第一轨道和第二轨道共同支撑挤压结构，固定挤压结构的两个端部，以提高挤压结构挤压光刻胶瓶的效果。
另外，支撑轨道可移动的设置在底座上；驱动模块用于驱动第一轨道与第二轨道之间的挤压结构，包括：驱动模块用于驱动支撑轨道沿水平方向移动以带动挤压结构以使挤压结构发生形变，使挤压结构围成的区域面积减小。
另外，挤压结构为封闭环形结构。
另外，还包括：固定单元，固定单元设置在底座上，用于固定放置在底座上的光刻胶瓶。通过固定单元固定光刻胶瓶，避免光刻胶瓶随着挤压结构的移动而移动，从而影响挤压结构的挤压效果。
另外，还包括：第一检测模块，用于检测光刻胶瓶中光刻胶的液面高度，且第一检测模块与驱动模块通信连接，驱动模块基于检测到的液面高度驱动发 生形变后的挤压结构向远离底座的方向移动。通过第一检测模块，检测光刻胶的液面高度，从而控制驱动模块驱动挤压结构，实现了挤压过程的自动化。
另外，第一检测模块包括：第一感应单元，第一感应单元用于检测液面高度是否低于第一预警高度，且驱动模块与第一感应单元通信连接，当第一检测模块检测到液面高度低于第一预警高度时，驱动模块驱动发生形变后的挤压结构，以使挤压结构沿支撑轨道的轨道方向向远离于底座的方向移动；第二感应单元，第二感应单元用于检测液面高度是否低于第二预警高度，第二预警高度低于第一预警高度，且第二预警高度表示光刻胶耗尽时的液面高度。通过第二感应单元检测光刻胶的液面高度，以知晓光刻胶瓶中的光刻胶的存量是否充足。
另外，第一检测模块还包括：第一报警单元，第一报警单元与第一感应单元通信连接，用于在第一感应单元检测到液面高度低于第一预警高度时发出第一报警信息；第二报警单元，第二报警单元与第二感应单元通信连接，用于在第二感应单元检测到液面高度低于第二预警高度时发出第二报警信息。通过报警单元实时监控光刻胶的液面光刻胶，发出报警信息以通知相关工作人员进行查看，以保证挤压装置处于正常工作状态。
另外，第二检测模块，第二检测模块位于挤压结构上，用于在挤压结构发生形变期间检测挤压结构的形状；驱动模块与第二检测模块通信连接，当第二检测模块检测到挤压结构的形状满足预设形状时，驱动模块停止驱动挤压结构以使挤压结构停止形变。通过第二检测模块实时检测挤压结构的形状，满足预设形状时停止挤压，避免不必要的能量损耗。
另外，第三检测模块，第三检测模块位于支撑轨道上，用于检测挤压结 构的高度；驱动模块与第三检测模块通信连接，当第三检测模块检测到挤压结构的高度到达预设最大高度时，驱动模块控制挤压结构停止移动。通过第三检测模块实时检测挤压结构的高度，达到预设最大高度时，停止对挤压结构的驱动，防止挤压结构在支撑轨道上滑脱。
本申请实施例还提供了一种光刻胶供应系统，包括：上述挤压装置以及放置底座上的光刻胶瓶；光刻胶瓶包括瓶身部、瓶底部以及瓶盖部，瓶身部用于存放光刻胶，瓶盖部设置有通孔，以及穿过通孔且自光刻胶瓶外部延伸至瓶身部内的导管；驱动模块用于驱动挤压结构以使挤压结构发生形变，使挤压结构围成的区域面积减小，以挤压光刻胶瓶；驱动模块还用于驱动挤压结构以使挤压结构沿支撑轨道的轨道方向向远离于底座的方向移动，以保证位于瓶身部内的光刻胶的液面高度在预设范围内，使光刻胶经由导管流出。
另外，瓶身部的材料包括韧性材料部以及塑性材料部，瓶身部受到挤压结构挤压的区域为塑性材料部，瓶身部未受到挤压结构挤压的区域为韧性材料部。通过设置一种光刻胶瓶的材料，使得光刻胶瓶不用固定在底座上，也能防止光刻胶瓶随着挤压结构的移动而移动。
相比于相关技术而言，通过挤压装置挤压光刻胶瓶，使得光刻胶瓶在挤压装置挤压的水平面内，光刻胶瓶中的光刻胶的利用率较高；通过挤压装置挤压光刻胶瓶的不同平面，以使光刻胶瓶整体中的光刻胶的利用率较高。
本申请实施例还提供了一种光刻胶供应方法，包括：应用于上述光刻胶供应系统，包括：驱动挤压结构以使挤压结构发生形变，使挤压结构围成的区域面积减小，以挤压位于挤压装置底座上光刻胶瓶；驱动发生形变后的挤压结构以使挤压结构沿支撑轨道的轨道方向向远离于底座的方向移动，以保证位于 底座上光刻胶瓶内的光刻胶的液面高度在预设范围内，使光刻胶经由导管流出。
另外，驱动挤压结构以使挤压结构发生形变，使挤压结构围成的区域面积减小，以挤压位于挤压装置底座上光刻胶瓶之前，还包括：当检测到光刻胶的液面高度不在预设范围内或无法检测到光刻胶的液面高度时发出预警信息；基于预警信息，驱动挤压结构以使挤压结构发生形变，使挤压结构围成的区域面积减小或驱动发生形变后的挤压结构，使挤压结构沿支撑轨道的轨道方向向远离于底座的方向移动。
另外，当检测到光刻胶的液面高度不在预设范围内或无法检测到光刻胶的液面高度时发出预警信息，包括：检测光刻胶的液面高度是否高于第一预警高度，第一预警高度为预设范围的最高高度；当检测到光刻胶的液面高度低于第一预警高度时，发出预警信息。
另外，当检测到光刻胶的液面高度不在预设范围内或无法检测到光刻胶的液面高度时发出预警信息，包括：检测光刻胶的液面高度是否高于第二预警高度，第二预警高度为预设范围的最低高度；当检测到光刻胶的液面高度低于第二预警高度时或无法检测到光刻胶的液面高度时，发出标示光刻胶耗尽的警报信息。
相比于相关技术而言，通过挤压光刻胶瓶，使得光刻胶瓶在挤压装置挤压的水平面内，光刻胶瓶中的光刻胶的利用率较高；通过挤压光刻胶瓶的不同平面，以使光刻胶瓶整体中的光刻胶的利用率较高。
附图说明
图1为本申请一实施例提供的挤压装置的结构示意图；
图2为本申请一实施例提供的挤压结构的挤压原理图；
图3为本申请另一实施例提供的光刻胶瓶的结构示意图；
图4为本申请另一实施例提供的光刻胶供应系统的结构示意图；
图5～图7为本申请另一实施例提供的光刻胶供应系统的工作示意图。
具体实施方式
目前，为了提高光刻胶的使用率而将光刻胶瓶倾斜放置，但光刻胶的残留率依然较高。
为解决上述问题，本申请一实施例提供了一种挤压装置，通过驱动模块驱动挤压结构挤压光刻胶瓶，使得光刻胶瓶在挤压结构挤压的水平面内，光刻胶瓶中的光刻胶的利用率较高；通过驱动模块驱动挤压结构沿支撑轨道的轨道方向上下移动，以使挤压结构可以挤压光刻胶瓶的不同平面，以使光刻胶瓶整体中的光刻胶的利用率较高。
为使本申请实施例的目的、技术方案和优点更加清楚，下面将结合附图对本申请的各实施例进行详细的阐述。然而，本领域的普通技术人员可以理解，在本申请各实施例中，为了使读者更好地理解本申请而提出了许多技术细节。但是，即使没有这些技术细节和基于以下各实施例的种种变化和修改，也可以实现本申请所要求保护的技术方案。以下各个实施例的划分是为了描述方便，不应对本申请的具体实现方式构成任何限定，各个实施例在不矛盾的前提下可以相互结合，相互引用。
图1为本实施例提供的挤压装置的结构示意图，图2为本实施例提供的挤压结构的挤压原理图，下面将结合附图对本实施例提供的挤压装置10，进行详细说明，具体如下：
参考图1，挤压装置10，包括：底座100，底座100用于承载放置光刻 胶瓶(未图示)；支撑轨道101，支撑轨道101竖直设置在底座100上；挤压结构102，挤压结构102的端部可移动的设置在支撑轨道101上，以使挤压结构102沿支撑轨道101的轨道方向上下移动；驱动模块103，驱动模块103用于驱动挤压结构102以使挤压结构102发生形变，使挤压结构102围成的区域面积减小，且还用于驱动发生形变后的挤压结构102以使挤压结构102沿支撑轨道101的轨道方向上下移动。
在本实施例中，支撑轨道101包括：第一轨道111以及第二轨道121；第一轨道111与第二轨道121竖直设置在底座100上；挤压结构102的一端部可移动地设置在第一轨道111上，挤压结构102的另一端部可移动地设置在第二轨道121上；驱动模块103用于驱动第一轨道111与第二轨道121之间的挤压结构102，以使挤压结构102围成的区域面积减小；通过第一轨道111和第二轨道121共同支撑挤压结构102，固定挤压结构102的两个端部，以提高挤压结构102挤压光刻胶瓶的效果。
具体地，支撑轨道101可移动的设置在底座10上；驱动模块103用于驱动第一轨道111与第二轨道121之间的挤压结构102，包括：驱动模块103用于驱动支撑轨道101沿水平方向移动以带动挤压结构102以使挤压结构102发生形变，使挤压结构102围成的区域面积减小。
参考图2，图2为挤压结构102的俯视图，底座100位于的圆形区域内。
初始状态下，第一轨道111以及第二轨道121位于底座100的边缘位置(如图中虚线所示)，且挤压结构102为封闭环形结构(如图中虚线所示)，光刻胶瓶放置在挤压结构102所围成的区域内。随着驱动模块驱动第一轨道111与第二轨道121沿连线的方向相互靠近，使得第一轨道111与第二轨道121之 间的挤压结构102向内挤压，挤压结构102由圆形变为椭圆形，且随着第一轨道111以及第二轨道121的移动，挤压结构102围成的椭圆形的偏心率逐渐增大，最终趋近于两条靠近的直线。随着挤压结构102围成的椭圆形的偏心率增大，即挤压结构102围成的面积减小，在挤压结构挤压的水平面内，光刻胶瓶中可容纳的光刻胶的容量越来越小，最终趋近于0，以使挤压结构102挤压的水平面内，减少光刻胶的剩余量，从而提高光刻胶的利用率。
需要说明的是，本实施例以具体第一轨道111和第二轨道121作为支撑轨道101的具体实现方案，并不构成对本方案的限定，在其他实施例中也可以仅采用一个支撑轨道或多个支撑轨道实现，本领域技术人员清楚，本实施例中，支撑轨道用于提供挤压结构上下移动的支点，且用于实现挤压结构挤压的形变，符合上述作用的相关装置，都应该属于本方式的保护范围。
继续参考图1，在本实施例中，挤压装置10还包括：第一检测模块105，第一检测模块105用于检测光刻胶瓶中光刻胶的液面高度，且第一检测模块105与驱动模块103通信连接，驱动模块103基于检测到的液面高度驱动发生形成后的挤压结构102向远离底座100的方向移动。通过第一检测模块105，检测光刻胶的液面高度，从而控制驱动模块103驱动挤压结构102，实现了挤压过程的自动化。
具体地，第一检测模块包括：第一感应单元115和第二感应单元125；第一感应单元115用于检测光刻胶的液面高度是否低于第一预警高度，且第一感应单元115与驱动模块103通信连接，当第一检测模块检测到光刻胶的液面高度低于第一预警高度时，驱动模块103驱动发生形变后的挤压结构102，以使挤压结构102沿支撑轨道101的轨道方向向远离底座100的方向移动。
在具体的应用中，随着光刻胶瓶中光刻胶的使用，光刻胶瓶中光刻胶的液面高度下降，当光刻胶的液面高度下降至第一预警高度时，驱动模块103驱动挤压结构102挤压光刻胶瓶，由于挤压结构102的挤压，与挤压结构102所在同一水平面内的光刻胶瓶的容积减小，相应的光刻胶的液面高度将会上升，随着光刻胶的使用，挤压结构102持续挤压，直至挤压到最小位置。此时，驱动模块103驱动挤压结构102沿支撑轨道101的轨道方向向远离底座100的方向移动，以挤压不同平面内的光刻胶瓶，以使光刻胶瓶中光刻胶的液面上升，随着挤压结构102沿支撑轨道101的轨道方向向远离底座100的方向移动，当挤压结构102移动到最高点时，位于挤压结构102高度以下的光刻胶瓶的光刻胶的利用率较高。
第二感应单元125，用于检测液面高度是否低于第二预警高度，第二预警高度低于第一预警高度，且第二预警高度表示光刻胶耗尽时的液面高度。
在具体的应用中，随着光刻胶的使用以及挤压结构102的挤压，光刻胶的液面高度始终是位于第一预警高度附近，当挤压结构102无法继续挤压时，随着光刻胶的使用，光刻胶的液面高度持续下降至第二预警高度，表明光刻胶瓶中的光刻胶即将耗尽，通过第二感应单元125可以及时通知相关工作人员对光刻胶瓶进行更换，保证光刻胶的持续供应，避免光刻胶的供应缺失从而影响半导体制程过程的运行。
具体地，第一预警高度设置为导管可以顺利吸出光刻胶瓶中的光刻胶的高度，光刻胶的液面高度高于第一预警高度可以确保光刻胶的供应；第二预警高度设置为导管口的高度，当光刻胶的液面低于导管口的高度或者无法检测到光刻胶的液面时，光刻胶瓶中的光刻胶消耗完，发出标示光刻胶耗尽的警报信 息以提醒相关工作人员更换光刻胶瓶。
相应地，第一检测模块105还包括第一报警单元135和第二报警单元145。第一报警单元135与第一感应单元115通信连接，用于在第一感应单元115检测到液面高度低于第一预警高度时发出第一报警信息。第二报警单元145与第二感应单元125通信连接，用于在第二感应单元125检测到液面高度低于第二预警高度时发出第二报警信息。通过第一报警信息以及第二报警信息可以及时通知相关的工作人员检测挤压装置10的具体工作状况，保证挤压装置10处于正常的运行状态。
在具体的应用中，第一报警信息和第二报警信息可以通过不同频率的报警铃声进行实现，也可以通过将报警信息发送到相关的操作平台进行显示实现，本领域技术人员清楚符合本申请第一检测模块105的工作模式的器件以及报警条件，都应该属于本申请的保护范围之内。
本实施例中，挤压装置10还包括：第二检测模块107，第二检测模块107位于挤压结构102上，用于在挤压结构102发生形变期间检测挤压结构102的形状。驱动模块103与第二检测模块107通信连接，当第二检测模块107检测到挤压结构102的形状满足预设形状时，驱动模块103停止驱动挤压结构102以使挤压结构102停止形变。
在具体的应用中，第二检测模块107可以通过位于挤压结构102侧壁的传感器实现，挤压结构102在挤压过程中，挤压结构102所围成的面积减小，即挤压结构102包含传感器的一端与传感器检测的另一端之间的距离逐渐减少，通过将预设形状转换成预设距离，当传感器检测到的距离满足预设距离时，此时，挤压结构102的形状满足预设形状。通过第二检测模块107实时检测挤压 结构102的形状，满足预设形状时停止挤压，避免不必要的能量损耗。
本实施例中，挤压装置10还包括：第三检测模块106，第三检测模块106位于支撑轨道101上，用于检测挤压结构102的高度。驱动模块103与第三检测模块106通信连接，当第三检测模块106检测到挤压结构102的高度达到预设最大高度时，驱动模块103控制挤压结构102停止移动。
具体地，预设最大高度与上述第二预警高度齐平，以保证光刻胶瓶中的光刻胶被消耗完，进一步确保光刻胶瓶中光刻胶的残留量较低。
在具体的应用中，第三检测模块106可以是位于支撑轨道预设最大高度的传感器，当挤压结构102在沿支撑轨道101的轨道方向向远离底座100的方向移动的过程中，触碰到传感器时，即挤压结构102的高度达到预设最大高度。通过第三检测模块106实时检测挤压结构102的高度，达到预设最大高度时，停止对挤压结构102的驱动，防止挤压结构102在支撑轨道上滑脱。
需要说明的是，在本实施例中，第二检测模块107与第三检测模块106的位置设置只是为了本领域技术人员理解，在具体应用过程中，第二检测模块107与第三检测模块106都可以设置在底座100或挤压结构102或支撑轨道101等位置，只要能保证检测到用于挤压结构102的预设形状以及预设最大高度即可。
另外，本实施例中，挤压装置10还包括：固定单元104，固定单元设置在底座100上，用于固定放置在底座100上的光刻胶瓶。通过固定单元104固定光刻胶瓶，避免光刻胶瓶随着挤压结构102的移动而移动，从而影响挤压结构102的挤压效果。
在本实施例中，驱动模块103包括控制单元113和驱动电机123。控制 单元113与第一检测模块、第二检测模块或者第三检测模块通信连接，用于控制驱动电机123是否工作。驱动电机123用于驱动挤压结构102以使挤压结构102沿支撑轨道101的轨道方向上下移动，且还用于驱动挤压结构102以使挤压结构102发生形变，使挤压结构102围成的区域面积减小。
相对于相关技术而言，通过驱动模块103驱动挤压结构102挤压光刻胶瓶，使得光刻胶瓶在挤压结构102挤压的水平面内，光刻胶瓶中的光刻胶的利用率较高；通过驱动模块103驱动挤压结构102沿支撑轨道101的轨道方向上下移动，以使挤压结构102可以挤压光刻胶瓶的不同平面，以使光刻胶瓶整体中的光刻胶的利用率较高。
值得一提的是，本实施例中所涉及到的各单元均为逻辑单元，在实际应用中，一个逻辑单元可以是一个物理单元，也可以是一个物理单元的一部分，还可以以多个物理单元的组合实现。此外，为了突出本申请的创新部分，本实施例中并没有将与解决本申请所提出的技术问题关系不太密切的单元引入，但这并不表明本实施例中不存在其它的单元。
本申请另一实施例涉及一种光刻胶供应系统，下面将结合附图对本实施例的光刻胶供应系统进行具体说明。
参考图3以及图4，光刻胶供应系统，包括：上述挤压装置10以及放置在挤压装置10的底座上的光刻胶瓶。
光刻胶瓶包括瓶身部202、瓶底部203以及瓶盖部201，瓶身部202用于存放光刻胶，瓶盖部201设置有通孔211，以及穿过通孔211且自光刻胶瓶外部延伸至瓶身部内的导管221；挤压装置10的驱动模块103用于驱动挤压结构102以使挤压结构102发生形变，使挤压结构102围成的区域面积减小，以挤 压光刻胶瓶；驱动模块103还用于驱动挤压结构102以使挤压结构102沿支撑轨道101的轨道方向向远离于底座100的方向移动，以保证位于瓶身部内的光刻胶的液面高度在预设范围内，使光刻胶经由导管流出。
在本实施例中，挤压装置10还包括第一检测模块(未图示)，第一检测模块(未图示)用于检测光刻胶瓶中光刻胶的液面高度，第一检测模块(未图示)与挤压装置10的驱动模块103通信连接；当第一检测模块(未图示)检测到光刻胶的液面高度不在预设范围内或无法检测到光刻胶的液面高度时发出预警信息；驱动模块103接收预警信息，驱动挤压结构102以使挤压结构102发生形变，使挤压结构102围成的区域面积减小或驱动发生形变后的挤压结构102，以使挤压结构102沿支撑轨道101的轨道方向向远离于底座100的方向移动。
具体地，第一检测模块包括第一感应单元204以及第二感应单元205。
参考图5～图7，第一感应单元204设置在瓶盖部201的底部，第一感应单元204用于检测光刻胶20的液面高度是否高于第一预警高度，第一预警高度为预设范围的最高高度；当第一感应单元204检测到光刻胶20的液面高度低于第一预警高度时，发出预警信息；
在具体的应用中，随着光刻胶瓶中光刻胶20的使用，光刻胶瓶中光刻胶20的液面高度下降，当光刻胶20的液面高度下降至第一预警高度时，驱动模块103驱动挤压结构102挤压光刻胶瓶，由于挤压结构102的挤压，与挤压结构102所在同一水平面内的光刻胶瓶的容积减小，相应的光刻胶20的液面高度将会上升，随着光刻胶20的使用，挤压结构102持续挤压，直至挤压到最小位置。此时，驱动模块103驱动挤压结构102沿支撑轨道101的轨道方向向远离底座100的方向移动，以挤压不同水平面内的光刻胶瓶，以使光刻胶瓶中光刻 胶20的液面上升，随着挤压结构102沿支撑轨道101的轨道方向向远离底座100的方向移动，当挤压结构102移动到最高点时，位于挤压结构102高度以下的光刻胶瓶的光刻胶20的利用率较高。
第二感应单元205设置在导管221的管口，第二感应单元205用于检测光刻胶20的液面高度是否高于第二预警高度，第二预警高度为预设范围的最低高度；当第二感应单元205检测到光刻胶20的液面高度低于第二预警高度时或无法检测到光刻胶20的液面高度时，发出标示光刻胶耗尽的警报信息。
在具体的应用中，随着光刻胶20的使用以及挤压结构102的挤压，光刻胶20的液面高度始终是位于第一预警高度附近，当挤压结构102无法继续挤压时，随着光刻胶20的使用，光刻胶20的液面高度持续下降至第二预警高度，表明光刻胶瓶中的光刻胶20即将耗尽，通过第二感应单元125可以及时通知相关工作人员对光刻胶瓶进行更换，保证光刻胶20的持续供应，避免光刻胶20的供应缺失从而影响半导体制程过程的运行。
需要说明的是，在本实施例中，第一感应单元204以及第二感应单元205的位置设置只是为了本领域技术人员理解，在具体应用过程中，第一感应单元204以及第二感应单元205都可以设置在光刻胶瓶的瓶颈的屏壁或瓶盖底部等位置，只要能保证检测到用于标示需要驱动挤压结构的光刻胶20的液面位置，以及检测到光刻胶20耗尽的液面位置即可。
通过第一感应单元204以及第二感应单元205，检测光刻胶20的液面高度，从而控制驱动模块103驱动挤压结构，实现了挤压过程的自动化。
另外，瓶身部202的材料包括韧性材料部以及塑性材料部，瓶身部202受到挤压结构102挤压的区域为塑性材料部，瓶身部202未受到挤压结构102 挤压的区域为韧性材料部。受到挤压结构102挤压的区域通过塑性材料制成，便于挤压结构102挤压光刻胶瓶；而未受到挤压结构102挤压的区域(与支撑轨道101相邻的区域)通过韧性材料制成，防止光刻胶瓶随着挤压结构102的移动而移动，进而影响挤压结构102的挤压效果。在其他实施例中，还可以通过设置在底座100上的固定单元104，固定放置在底座100上的光刻胶瓶，从而防止光刻胶瓶随着挤压结构102的移动而移动，进而影响挤压结构102的挤压效果。
与相关技术相比，通过挤压装置10挤压光刻胶瓶，使得光刻胶瓶在挤压装置10挤压的水平面内，光刻胶瓶中的光刻胶20的利用率较高；通过挤压装置10挤压光刻胶瓶的不同平面，以使光刻胶瓶整体中的光刻胶20的利用率较高。
值得一提的是，本实施例中所涉及到的各单元均为逻辑单元，在实际应用中，一个逻辑单元可以是一个物理单元，也可以是一个物理单元的一部分，还可以以多个物理单元的组合实现。此外，为了突出本申请的创新部分，本实施例中并没有将与解决本申请所提出的技术问题关系不太密切的单元引入，但这并不表明本实施例中不存在其它的单元。
由于上述实施例与本实施例相互对应，因此本实施例可与上述实施例互相配合实施。上述实施例中提到的相关技术细节在本实施例中依然有效，在上述实施例中所能达到的技术效果在本实施例中也同样可以实现，为了减少重复，这里不再赘述。相应地，本实施例中提到的相关技术细节也可应用在上述实施例中。
本申请又一实施例涉及一种光刻胶供应方法，具体如下：应用于上述挤 压装置，包括：驱动挤压结构以使挤压结构发生形变，使挤压结构围成的区域面积减小，以挤压位于挤压装置底座上光刻胶瓶；或驱动挤压结构以使挤压结构沿支撑轨道的轨道方向向远离于底座的方向移动，以保证位于挤压装置底座上光刻胶瓶内的光刻胶的液面高度在预设范围内，使光刻胶经由导管流出。
以上方法提供了挤压装置以挤压光刻胶瓶以实现提高光刻胶瓶中存放的光刻胶的利用率的方法，以下结合挤压装置，对自动化实现挤压装置挤压光刻胶瓶的方法进行详细描述：
步骤A1，检测光刻胶的液面高度是否位于预设范围内。
驱动挤压结构以使挤压结构发生形变，使挤压结构围成的区域面积减小，以挤压位于挤压装置底座上光刻胶瓶之前，还包括：检测光刻胶的液面高度。
在本实施例中，当检测到光刻胶的液面高度不在预设范围内或无法检测到光刻胶的液面高度时发出预警信息，包括：检测光刻胶的液面高度是否高于第一预警高度，第一预警高度为预设范围的最高高度；当检测到光刻胶的液面高度低于第一预警高度时，发出预警信息。当检测到光刻胶的液面高度不在预设范围内或无法检测到光刻胶的液面高度时发出预警信息，包括：检测光刻胶的液面高度是否高于第二预警高度，第二预警高度为预设范围的最低高度；当检测到光刻胶的液面高度低于第二预警高度时或无法检测到光刻胶的液面高度时，发出标示光刻胶耗尽的警报信息。
具体地，第一预警高度设置为导管可以顺利吸出光刻胶瓶中的光刻胶的高度，光刻胶的液面高度高于第一预警高度可以确保光刻胶的供应；第二预警高度设置为导管口的高度，当光刻胶的液面低于的导管口的高度或者无法检测到光刻胶的液面时，光刻胶瓶中的光刻胶消耗完，发出标示光刻胶耗尽的警报 信息以提醒相关工作人员更换光刻胶瓶。
即光刻胶的液面高度位于预设范围内时，执行步骤A2；当光刻胶的液面高度不位于预设范围内且光刻胶的液面高度高于第二预警高度时，执行步骤A3，当光刻胶的液面高度不位于预设范围内且光刻胶的液面高度低于第二预警高度时或无法检测到光刻胶的液面高度时，执行步骤A4。
步骤A2，继续执行步骤A1。
步骤A3，基于预警信息，驱动挤压结构挤压光刻胶瓶。
具体地，基于预警信息，驱动挤压结构以使挤压结构发生形变，使挤压结构围成的区域面积减小或驱动发生形变后的挤压结构，使挤压结构沿支撑轨道的轨道方向向远离于底座的方向移动。
在具体的应用中，随着光刻胶瓶中光刻胶的使用，光刻胶瓶中光刻胶的液面高度下降，当光刻胶的液面高度下降至第一预警高度时，驱动模块103驱动挤压结构102挤压光刻胶瓶，由于挤压结构102的挤压，与挤压结构102所在同一水平面内的光刻胶瓶的容积减小，相应的光刻胶的液面高度将会上升，随着光刻胶的使用，挤压结构102持续挤压，直至挤压到最小位置。此时，驱动模块103驱动挤压结构102沿支撑轨道101的轨道方向向远离底座100的方向移动，以挤压不同平面内的光刻胶瓶，以使光刻胶瓶中光刻胶的液面上升，随着挤压结构102沿支撑轨道101的轨道方向向远离底座100的方向移动，当挤压结构102移动到最高点时，位于挤压结构102高度以下的光刻胶瓶的光刻胶的利用率较高。
步骤A4，基于标示光刻胶耗尽的警报信息，发出警报。
与相关技术相比，通过挤压光刻胶瓶，使得光刻胶瓶在挤压装置挤压的 水平面内，光刻胶瓶中的光刻胶的利用率较高；通过挤压光刻胶瓶的不同平面，以使光刻胶瓶整体中的光刻胶的利用率较高。
由于上述实施例与本实施例相互对应，因此本实施例可与上述实施例互相配合实施。上述实施例中提到的相关技术细节在本实施例中依然有效，在上述实施例中所能达到的技术效果在本实施例中也同样可以实现，为了减少重复，这里不再赘述。相应地，本实施例中提到的相关技术细节也可应用在上述实施例中。
本领域的普通技术人员可以理解，上述各实施例是实现本申请的具体实施例，而在实际应用中，可以在形式上和细节上对其作各种改变，而不偏离本申请的精神和范围。

Claims (16)

  1. 一种挤压装置，其特征在于，包括：
    底座，所述底座用于承载放置光刻胶瓶；
    支撑轨道，所述支撑轨道竖直设置在所述底座上；
    挤压结构，所述挤压结构的端部可移动的设置在所述支撑轨道上，以使所述挤压结构沿所述支撑轨道的轨道方向上下移动；
    驱动模块，所述驱动模块用于驱动所述挤压结构以使所述挤压结构发生形变，使所述挤压结构围成的区域面积减小，且还用于驱动发生形变后的所述挤压结构以使所述挤压结构沿所述支撑轨道的轨道方向上下移动。
  2. 根据权利要求1所述的挤压装置，其特征在于，所述支撑轨道包括第一轨道以及第二轨道；
    所述第一轨道与所述第二轨道竖直设置在所述底座上；
    所述挤压结构的一端部可移动地设置在所述第一轨道上，所述挤压结构的另一端部可移动地设置在所述第二轨道上；
    所述驱动模块用于驱动所述第一轨道与所述第二轨道之间的所述挤压结构，以使所述挤压结构围成的区域面积减小。
  3. 根据权利要求2所述的挤压装置，其特征在于，所述支撑轨道可移动的设置在所述底座上；所述驱动模块用于驱动所述第一轨道与所述第二轨道之间的所述挤压结构，包括：
    所述驱动模块用于驱动所述支撑轨道沿水平方向移动以带动所述挤压结构以使所述挤压结构发生形变，使所述挤压结构围成的区域面积减小。
  4. 根据权利要求1所述的挤压装置，其特征在于，所述挤压结构为封闭环形结 构。
  5. 根据权利要求1所述的挤压装置，其特征在于，还包括：固定单元，所述固定单元设置在所述底座上，用于固定放置在所述底座上的所述光刻胶瓶。
  6. 根据权利要求1所述的挤压装置，其特征在于，还包括：第一检测模块，用于检测所述光刻胶瓶中光刻胶的液面高度，且所述第一检测模块与所述驱动模块通信连接，所述驱动模块基于检测到的液面高度驱动发生形变后的所述挤压结构向远离所述底座的方向移动。
  7. 根据权利要求6所述的挤压装置，其特征在于，所述第一检测模块包括：
    第一感应单元，所述第一感应单元用于检测所述液面高度是否低于第一预警高度，且所述驱动模块与所述第一感应单元通信连接，当所述第一检测模块检测到所述液面高度低于第一预警高度时，所述驱动模块驱动发生形变后的所述挤压结构，以使所述挤压结构沿所述支撑轨道的轨道方向向远离于所述底座的方向移动；
    第二感应单元，所述第二感应单元用于检测所述液面高度是否低于第二预警高度，所述第二预警高度低于所述第一预警高度，且所述第二预警高度表示光刻胶耗尽时的液面高度。
  8. 根据权利要求7所述的挤压装置，其特征在于，所述第一检测模块还包括：
    第一报警单元，所述第一报警单元与所述第一感应单元通信连接，用于在所述第一感应单元检测到所述液面高度低于所述第一预警高度时发出第一报警信息；
    第二报警单元，所述第二报警单元与所述第二感应单元通信连接，用于在所述第二感应单元检测到所述液面高度低于所述第二预警高度时发出第二报警 信息。
  9. 根据权利要求1所述的挤压装置，其特征在于，还包括：
    第二检测模块，所述第二检测模块位于所述挤压结构上，用于在所述挤压结构发生形变期间检测所述挤压结构的形状；
    所述驱动模块与所述第二检测模块通信连接，当所述第二检测模块检测到所述挤压结构的形状满足预设形状时，所述驱动模块停止驱动所述挤压结构以使所述挤压结构停止形变。
  10. 根据权利要求1所述的挤压装置，其特征在于，还包括：第三检测模块，所述第三检测模块位于所述支撑轨道上，用于检测所述挤压结构的高度；
    所述驱动模块与所述第三检测模块通信连接，当所述第三检测模块检测到所述挤压结构的高度到达预设最大高度时，所述驱动模块控制所述挤压结构停止移动。
  11. 一种光刻胶供应系统，其特征在于，包括：如权利要求1所述的挤压装置以及放置在所述底座上的光刻胶瓶；
    所述光刻胶瓶包括瓶身部、瓶底部以及瓶盖部，所述瓶身部用于存放光刻胶，所述瓶盖部设置有通孔，以及穿过所述通孔且自所述光刻胶瓶外部延伸至所述瓶身部内的导管；
    所述驱动模块用于驱动挤压结构以使所述挤压结构发生形变，使所述挤压结构围成的区域面积减小，以挤压所述光刻胶瓶；
    所述驱动模块还用于驱动所述挤压结构以使所述挤压结构沿支撑轨道的轨道方向向远离于所述底座的方向移动，以保证位于所述瓶身部内的光刻胶的液 面高度在预设范围内，使所述光刻胶经由所述导管流出。
  12. 根据权利要求11所述的光刻胶供应系统，其特征在于，所述瓶身部的材料包括韧性材料部以及塑性材料部，所述瓶身部受到所述挤压结构挤压的区域为所述塑性材料部，所述瓶身部未受到所述挤压结构挤压的区域为所述韧性材料部。
  13. 一种光刻胶供应方法，应用于权利要求11所述的光刻胶供应系统，其特征在于，包括：
    驱动挤压结构以使所述挤压结构发生形变，使所述挤压结构围成的区域面积减小，以挤压位于所述挤压装置底座上光刻胶瓶；
    驱动发生形变后的所述挤压结构以使所述挤压结构沿支撑轨道的轨道方向向远离于所述底座的方向移动，以保证位于所述底座上光刻胶瓶内的光刻胶的液面高度在预设范围内，使所述光刻胶经由所述导管流出。
  14. 根据权利要求13所述的光刻胶供应方法，其特征在于，所述驱动挤压结构以使所述挤压结构发生形变，使所述挤压结构围成的区域面积减小，以挤压位于所述挤压装置底座上光刻胶瓶之前，还包括：
    当检测到所述光刻胶的液面高度不在预设范围内或无法检测到所述光刻胶的液面高度时发出预警信息；
    基于所述预警信息，驱动所述挤压结构以使所述挤压结构发生形变，使所述挤压结构围成的区域面积减小或驱动发生形变后的所述挤压结构，使所述挤压结构沿所述支撑轨道的轨道方向向远离于所述底座的方向移动。
  15. 根据权利要求14所述的光刻胶供应方法，其特征在于，所述当检测到所述光刻胶的液面高度不在预设范围内或无法检测到所述光刻胶的液面高度时发出 预警信息，包括：
    检测所述光刻胶的液面高度是否高于第一预警高度，所述第一预警高度为所述预设范围的最高高度；
    当检测到所述光刻胶的液面高度低于所述第一预警高度时，发出所述预警信息。
  16. 根据权利要求14所述的光刻胶供应方法，其特征在于，所述当检测到所述光刻胶的液面高度不在预设范围内或无法检测到所述光刻胶的液面高度时发出预警信息，包括：
    检测所述光刻胶的液面高度是否高于第二预警高度，所述第二预警高度为所述预设范围的最低高度；
    当检测到所述光刻胶的液面高度低于所述第二预警高度时或无法检测到所述光刻胶的液面高度时，发出标示光刻胶耗尽的警报信息。
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