WO2021215032A1 - 分光測定装置 - Google Patents

分光測定装置 Download PDF

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Publication number
WO2021215032A1
WO2021215032A1 PCT/JP2020/040843 JP2020040843W WO2021215032A1 WO 2021215032 A1 WO2021215032 A1 WO 2021215032A1 JP 2020040843 W JP2020040843 W JP 2020040843W WO 2021215032 A1 WO2021215032 A1 WO 2021215032A1
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WO
WIPO (PCT)
Prior art keywords
spectrum
unit
peak
light
wavelength
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2020/040843
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English (en)
French (fr)
Japanese (ja)
Inventor
亮二 平岡
善央 米澤
徹也 永井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
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Shimadzu Corp
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Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to CN202080099125.8A priority Critical patent/CN115335668B/zh
Priority to US17/917,002 priority patent/US12228452B2/en
Priority to JP2022516832A priority patent/JP7494905B2/ja
Publication of WO2021215032A1 publication Critical patent/WO2021215032A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/027—Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J2003/2859—Peak detecting in spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0264—Electrical interface; User interface

Definitions

  • the present invention relates to a spectroscopic measuring device, and more particularly to a spectroscopic measuring device suitable for analysis of laser light.
  • the optical spectrum analyzer is a device that measures and displays the light intensity distribution (optical spectrum) of the light to be measured input by an optical fiber or the like, and can confirm the peak wavelength, peak width, or light intensity on the spectrum. Is.
  • a general optical spectrum analyzer is intended for analysis and evaluation of various optical devices as well as laser devices, so it is suitable for detailed analysis, but tends to be inferior in real-time performance.
  • a spectroscopic measurement device that emphasizes real-time performance
  • a device called a multi-channel spectroscope that can simultaneously measure the light intensity over a predetermined wavelength range for the light to be measured input to the device is known ( Non-Patent Document 1 and the like).
  • Such a spectroscopic measuring device is mainly used for measuring a spectrum due to light emission, absorption, reflection, etc. in substantially real time.
  • a multi-channel spectroscope compatible with a laser beam monitor having a narrow peak wavelength width has been developed by increasing the wavelength resolution.
  • the optical spectrum of the input laser light (hereinafter, simply referred to as “spectrum”) can be presented to the user in almost real time. Therefore, for example, adjustment of the laser device can be performed. It is useful when you do. However, in general, it is not easy to make appropriate adjustments and evaluations of a laser device while observing the spectrum displayed in real time, and it is required to provide more effective information for such adjustments and evaluations. ing.
  • the present invention has been made to solve such a problem, and its main purpose is to provide a spectroscopic measurement device capable of efficiently and accurately performing adjustment and evaluation of a laser device or the like.
  • a spectrum measurement unit that repeatedly measures the spectrum of the light to be measured, which is laser light, over a predetermined wavelength range. Each time a spectrum is obtained by the spectrum measuring unit, a peak counting unit that detects a peak from the spectrum and counts the number of detected peaks, and a peak counting unit.
  • a display processing unit that displays the numerical value of the peak counting result by the peak counting unit on the screen of the display unit in real time. Is provided.
  • lasers are roughly classified into single-mode lasers and multi-mode lasers. Since the single-mode laser has high light-collecting property and the cross-sectional shape of the beam is circular, it is suitable for applications such as fine printing, medical treatment, and fine processing. On the other hand, although the multi-mode laser is inferior in light-collecting property to the single-mode laser, it is easy to increase the output and is suitable for machining such as cutting and welding. Since the number of longitudinal modes is 1 in the single mode laser, only one peak appears in the spectrum. Therefore, it is relatively easy for the user to adjust the laser device to oscillate in single mode while checking the spectrum on the display screen.
  • the spectroscopic measuring apparatus of the above aspect according to the present invention when laser light is given as the light to be measured, the number of peaks observed on the latest spectrum is numerically displayed on the display unit each time the spectrum is updated. It is displayed on the screen. Therefore, according to the spectroscopic measuring apparatus of the above aspect according to the present invention, the user can confirm the number of vertical modes of the laser beam to be measured in real time on the screen of the display unit. Therefore, for example, when the user adjusts the multi-mode laser device, the number of vertical modes is adjusted to a desired number, or the number of vertical modes is confirmed to immediately determine the appropriateness of the adjustment. Can be done. As a result, the efficiency of adjustment of the laser device and the like is improved, and the accuracy thereof is also improved.
  • the block diagram of the main part of the spectroscopic measuring apparatus which is one Embodiment of this invention.
  • the schematic optical path block diagram of the multi-channel spectroscope in the spectroscopic measurement apparatus of this embodiment The figure which shows an example of the display screen in the spectroscopic measurement apparatus of this embodiment.
  • FIG. 1 is a block diagram of a main part of the spectroscopic measuring apparatus according to the present embodiment.
  • the present apparatus includes a multi-channel spectroscope 1, a data processing unit 2, a control unit 3, an operation unit 4, and a display unit 5.
  • the multi-channel spectroscope 1 includes an optical input connector 10 to which an optical fiber for inputting the light to be measured is connected, a spectroscope 11 that wavelength-disperses the input light to be measured, and a multi that detects the wavelength-dispersed light.
  • a channel type detection unit 12 and the like are included.
  • the data processing unit 2 includes a data storage unit 20, a spectrum creation unit 21, a peak counting unit 22, a trend graph creation unit 23, and a display processing unit 24 as functional blocks.
  • the data processing unit 2 and the control unit 3 can realize their respective functions by using a computer including a CPU or the like as a hardware resource and executing software installed in the computer on the computer.
  • FIG. 2 is a schematic optical path configuration diagram of the multi-channel spectroscope 1 in FIG.
  • the spectroscopic unit 11 is a Zellni-Turner type spectroscope, and includes an incident slit 110, a first concave mirror 111, a diffraction grating 112, a second concave mirror 113, and a rotating unit 114.
  • the diffraction grating 112 is rotatable in a predetermined angle range by a rotating portion 114 including a motor and the like.
  • the detection unit 12 is a linear sensor in which a large number of light receiving elements are arranged in the wavelength dispersion direction so that light in a predetermined wavelength range can be detected all at once.
  • a CCD linear sensor or the like can be used.
  • control unit 3 controls the rotating unit 114 and sets the diffraction grating 112 so that the diffraction surface has a predetermined initial angle with respect to the first concave mirror 111.
  • the initial angle at this time corresponds to the wavelength range, which is one of the parameters selected first.
  • the light to be measured first hits the first concave mirror 111, is reflected by the first concave mirror 111, and travels toward the diffraction surface of the diffraction grating 112.
  • the light to be measured at this time is substantially parallel light.
  • the light to be measured that hits the diffraction surface of the diffraction grating 112 is wavelength-dispersed and sent to the second concave mirror 113.
  • the wavelength-dispersed light that hits the second concave mirror 113 is reflected while being converged, and reaches each light receiving element of the detection unit 12.
  • Light of different wavelengths reaches each light receiving element of the detection unit 12 within a predetermined wavelength range ⁇ 1 to ⁇ 2.
  • Each light receiving element outputs a detection signal according to the intensity of the incident light.
  • This detection signal corresponds to the spectrum of light having a wavelength range of ⁇ 1 to ⁇ 2.
  • the data storage unit 20 digitizes the detection signal obtained by each light receiving element of the detection unit 12 and temporarily stores the detection signal. At this time, the detection unit 12 first accumulates (that is, integrates) the received light signal for the exposure time selected as one of the parameters, and generates the detection signal. Therefore, when the intensity of the incident light is weak, a high-intensity detection signal can be obtained by lengthening the exposure time. When the light to be measured is a single laser beam, the spectrum can usually be sufficiently covered in this one wavelength range.
  • the multi-channel spectroscope 1 repeats acquisition of detection signals for different wavelength ranges. That is, when a detection signal over a predetermined wavelength range is obtained with the position (angle) of the diffraction grating 112 temporarily fixed, the control unit 3 controls the rotating unit 114 and arrives from the first concave mirror 111. The angle of the diffraction grating 112 with respect to the light to be measured is changed by a predetermined angle. As a result, the wavelength range of the wavelength-dispersed light sent from the diffraction grating 112 to the second concave mirror 113 changes. Therefore, each light receiving element of the detection unit 12 can obtain a detection signal for light in a wavelength range (for example, ⁇ 2 to ⁇ 3) different from the wavelength range ⁇ 1 to ⁇ 2.
  • a wavelength range for example, ⁇ 2 to ⁇ 3
  • the detection unit 12 repeats the acquisition of the detection signal over a predetermined wavelength range.
  • the data storage unit 20 can collect data representing a spectrum of light over the entire wavelength range initially selected as one of the parameters.
  • the control unit 3 returns the diffraction grating 112 to the initial position and repeats the above-mentioned measurement. As a result, data representing a spectrum over a predetermined wavelength range can be repeatedly obtained at predetermined time intervals.
  • FIG. 3 is a diagram showing an example of a display screen of the display unit 5.
  • the spectrum creation unit 21 creates a spectrum (emission spectrum) based on the data.
  • the peak counting unit 22 detects peaks in the created spectrum according to a predetermined algorithm, and further counts the number of detected peaks.
  • Various algorithms for peak detection can be considered, and for example, the following method can be adopted.
  • FIG. 4 is an explanatory diagram of an example of peak detection processing.
  • the data representing the light intensity on the wavelength axis are D 0 , D 1 , D 2 , D 3 , ....
  • Each of these data is a digitized version of the detection signal obtained by one light receiving element of the detection unit 12.
  • D 0 is the data of the shortest wavelength in the set wavelength range.
  • the parameters for peak detection are the continuously changing number of data points P and the intensity threshold Q for distinguishing between peaks and noise.
  • P 3.
  • FIG. 4 (A) three consecutive ones (in this example, the right direction (wavelength increasing direction), but the left direction (wavelength decreasing direction) may be used) along the wavelength axis.
  • the intensity values of the P data are examined, and the first set of three data whose intensity values increase in order is found.
  • D 0 , D 1 , and D 2 are a set of the three data. From there, the intensity values of the data are further examined in the direction of increasing wavelength, and the last set of three data whose intensity values decrease in order is found.
  • D 6 , D 7 , and D 8 are a set of the three data. In this case, the range from the first data of the first three data sets to the third data of the last three data sets, that is, the range of D 0 to D 8 is one peak.
  • the first data D 0 of the first three continuous data sets and the last data of the last three continuous data sets Connect the intensity value of D 8 with a straight line.
  • the intensity value S of the data D 4 is obtained by using the intersection C of the line and the perpendicular line passing through the data D 4 indicating the maximum intensity in the peak candidate as the base point (zero point) of the intensity. If the intensity value S exceeds the threshold value Q, this peak candidate is recognized as a formal peak.
  • peak detection is performed as described above, and the total number of peaks recognized as official peaks is calculated. Ask and end the process. By such processing, the number of peaks observed over the set wavelength range can be obtained.
  • the display processing unit 24 creates a measurement result display window 6 as shown in FIG. 3, and displays the measurement result display window 6 on the screen of the display unit 5 via the control unit 3.
  • a spectrum display column 60, a peak number display column 61, a trend graph display column 63, and the like are arranged in the measurement result display window 6, and display ON / OFF is on the left side of the peak number display column 61.
  • Check box 62 is arranged.
  • the display processing unit 24 displays the latest spectrum created by the spectrum creation unit 21 in the spectrum display column 60. Every time a new spectrum is acquired, the spectrum displayed in the spectrum display column 60 is updated. Further, the display processing unit 24 displays the peak count value obtained by the peak counting unit 22 in the peak number display column 61 as a numerical value. In the example of FIG. 3, "15" is the number of peaks. This value is also updated every time the number of peaks corresponding to the newly acquired spectrum is obtained, that is, in almost real time. Furthermore, when the display ON / OFF check box 62 is checked, the display processing unit 24 has the peak counted as the number of peaks on the spectrum displayed in the spectrum display field 60, that is, Overlays the mark 64 indicating the peak detected according to the algorithm described above.
  • the ⁇ mark attached near the peak top of each peak is the mark 64.
  • the mark 64 may be a mark having an appropriate shape such as an arrow mark as long as it can be easily visually distinguished from the one counted as a peak and the one not counted as a peak.
  • the mark 64 is used to indicate the level of the threshold value used instead of pointing to each individual peak. The line may be overlaid on the spectrum and displayed so that the peaks beyond this line are counted.
  • the trend graph creating unit 23 sets the horizontal axis as time (or the number of samplings) and the vertical axis as the number of peaks each time a numerical value of the number of peaks corresponding to the spectrum is obtained, and indicates a trend indicating a change in the number of peaks over time. Create a graph.
  • the display processing unit 24 displays the created trend graph in the trend graph display field 63. Therefore, every time a new spectrum is obtained and the number of peaks is obtained based on the new spectrum, the trend graph is also updated and a new line is added on the graph. Since the numerical value displayed in the peak number display column 61 is the latest value, the user cannot grasp the past numerical value even if he / she sees it. On the other hand, since the trend graph is the passage of time, the user can check the value of the number of peaks in the past and the state of change in the number of peaks on the trend graph.
  • the user adjusts the laser oscillator, if the parameters of the oscillator are changed, the position and number of the vertical modes of the laser will change accordingly. Therefore, as the parameters of the laser oscillator change, the spectrum displayed in the spectrum display column 60 changes, and the numerical value displayed in the peak number display column 61 also changes. Further, a line corresponding to a new number of peaks is added on the trend graph displayed in the trend graph display column 63. Therefore, the user adjusts the parameters of the laser oscillator so that, for example, the number of peaks becomes the target value while looking at these displays. Further, when it is desired to confirm the operational stability of the laser oscillator, the user may confirm whether or not the number of peaks does not fluctuate while looking at the above display.
  • the user can use the numerical value of the counting result of the number of peaks on the spectrum displayed on the screen of the display unit 5 and the information on the temporal change of the numerical value.
  • the laser device can be adjusted and evaluated while visually confirming. As a result, efficient and accurate adjustment and evaluation can be performed.
  • the display mode of the spectrum, the number of peaks, and the trend graph is not limited to that shown in FIG. 3, and can be appropriately changed.
  • One aspect of the spectroscopic measuring apparatus is A spectrum measurement unit that repeatedly measures the spectrum of the light to be measured, which is laser light, over a predetermined wavelength range. Each time a spectrum is obtained by the spectrum measuring unit, a peak counting unit that detects a peak from the spectrum and counts the number of detected peaks, and a peak counting unit. A display processing unit that displays the numerical value of the peak counting result by the peak counting unit on the screen of the display unit in real time. Is provided.
  • the number of peaks corresponding to the number of vertical modes of laser light is displayed on the display screen in real time. Therefore, for example, when the user adjusts the multimode laser oscillator, the suitability of the adjustment can be quickly determined based on the number of peaks, and the efficiency of the adjustment is improved and the accuracy thereof is also improved.
  • the spectroscopic measuring apparatus further includes a graph creating unit that creates a trend graph showing the time course of the peak counting result by the peak counting unit.
  • the display processing unit may display the trend graph on the same screen as the real-time numerical value of the peak count result.
  • the user can not only easily grasp the number of peaks at that time, that is, the number of longitudinal modes of the laser from the display, but also change the number of longitudinal modes over time. You can grasp it at a glance. Therefore, for example, by checking the trend graph while adjusting the laser oscillator, the user can grasp the relationship between the adjusted state and the corresponding number of longitudinal modes, and can quickly obtain the desired number of longitudinal modes. Adjustments can be made.
  • the display processing unit displays the spectrum obtained by the spectrum measuring unit on the same screen as the trend graph and the real-time numerical value of the peak counting result. Information indicating the detected individual peaks displayed above and reflected in the numerical value can be displayed on the displayed spectrum.
  • the user can confirm on the spectrum a waveform detected as a peak at that time and a waveform not detected as a peak. As a result, the user can determine whether or not the peak detection condition (parameter) at that time is appropriate, and change the peak detection condition as necessary.
  • the spectrum measuring unit includes a diffraction grating that wavelength-disperses the light to be measured and the wavelength-dispersed light by the diffraction grating. It can include a multi-channel type detector that simultaneously detects the above, and a rotating portion that rotates the diffraction grating to change the wavelength range of the wavelength-dispersed light that reaches the detector.
  • the spectroscopic measuring apparatus described in the fourth item it is possible to measure a spectrum in a wide wavelength range in a short time while improving the wavelength resolution.
  • the spectroscopic measuring apparatus according to the fourth item can observe peaks having a narrow wavelength width, and can expand the range and types of laser light that can be measured.
  • Multi-channel spectroscope 10 Optical input connector 11 ... Spectrometer 110 ... Incident slit 111 ... First concave mirror 112 ... Diffraction grating 113 ... Second concave mirror 114 ... Rotating unit 12 ... Detection unit 2 ... Data processing unit 20 ... Data storage unit 21 ... Spectrum creation unit 22 ... Peak counting unit 23 ... Trend graph creation unit 24 ... Display processing unit 3 ... Control unit 4 ... Operation unit 5 ... Display unit

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Lasers (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
PCT/JP2020/040843 2020-04-23 2020-10-30 分光測定装置 Ceased WO2021215032A1 (ja)

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Application Number Priority Date Filing Date Title
CN202080099125.8A CN115335668B (zh) 2020-04-23 2020-10-30 分光测定装置
US17/917,002 US12228452B2 (en) 2020-04-23 2020-10-30 Spectrometer
JP2022516832A JP7494905B2 (ja) 2020-04-23 2020-10-30 分光測定装置

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JP2020076923 2020-04-23

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CN119394438B (zh) * 2025-01-03 2025-03-21 中国科学院长春光学精密机械与物理研究所 一种宽波段、高工作效率太阳光谱仪

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JP2002064235A (ja) * 2000-08-21 2002-02-28 Hitachi Ltd 光増幅装置
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JP7494905B2 (ja) 2024-06-04
US12228452B2 (en) 2025-02-18
CN115335668A (zh) 2022-11-11
JPWO2021215032A1 (https=) 2021-10-28
US20230168125A1 (en) 2023-06-01
CN115335668B (zh) 2025-04-11

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