WO2021213433A1 - 交易请求的处理方法及半导体生产系统 - Google Patents

交易请求的处理方法及半导体生产系统 Download PDF

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Publication number
WO2021213433A1
WO2021213433A1 PCT/CN2021/088653 CN2021088653W WO2021213433A1 WO 2021213433 A1 WO2021213433 A1 WO 2021213433A1 CN 2021088653 W CN2021088653 W CN 2021088653W WO 2021213433 A1 WO2021213433 A1 WO 2021213433A1
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transaction request
machine control
control system
manufacturing execution
execution system
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PCT/CN2021/088653
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English (en)
French (fr)
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黎焕诚
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长鑫存储技术有限公司
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Priority to US17/497,164 priority Critical patent/US12045042B2/en
Publication of WO2021213433A1 publication Critical patent/WO2021213433A1/zh

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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F9/00—Arrangements for program control, e.g. control units
    • G06F9/06—Arrangements for program control, e.g. control units using stored programs, i.e. using an internal store of processing equipment to receive or retain programs
    • G06F9/46—Multiprogramming arrangements
    • G06F9/52—Program synchronisation; Mutual exclusion, e.g. by means of semaphores
    • G06F9/524—Deadlock detection or avoidance
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/4185—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by the network communication
    • G05B19/4186—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by the network communication by protocol, e.g. MAP, TOP
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F9/00—Arrangements for program control, e.g. control units
    • G06F9/06—Arrangements for program control, e.g. control units using stored programs, i.e. using an internal store of processing equipment to receive or retain programs
    • G06F9/46—Multiprogramming arrangements
    • G06F9/52—Program synchronisation; Mutual exclusion, e.g. by means of semaphores
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/02—Reservations, e.g. for tickets, services or events
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q40/00—Finance; Insurance; Tax strategies; Processing of corporate or income taxes
    • G06Q40/04—Trading; Exchange, e.g. stocks, commodities, derivatives or currency exchange
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q50/00—Information and communication technology [ICT] specially adapted for implementation of business processes of specific business sectors, e.g. utilities or tourism
    • G06Q50/04—Manufacturing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41835—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by programme execution
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/25—Pc structure of the system
    • G05B2219/25202—Internet, tcp-ip, web server : see under S05B219-40
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/25—Pc structure of the system
    • G05B2219/25204—Translate between different communication protocols
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/25—Pc structure of the system
    • G05B2219/25394—Execute next step on feedback of result of previous step
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/26—Pc applications
    • G05B2219/2602—Wafer processing
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32126—Hyperlink, access to program modules and to hardware modules in www, web server, browser
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Definitions

  • the invention relates to the technical field of semiconductor production systems, in particular to a method for processing transaction requests and a semiconductor production system.
  • the semiconductor field generally uses Manufacturing Execution System 1'(Manufacturing Execution System, MES) and machine control system 2'( Tool Control System, TCS) to improve work efficiency.
  • Manufacturing Execution System 1' Manufacturing Execution System, MES
  • machine control system 2' Tool Control System, TCS
  • the machine control system 2' will reject the request of the manufacturing execution system 1'to ensure safe operation and avoid deadlocks, which often leads to the manufacturing execution system 1'Appointment failure:
  • the number of times that the semiconductor factory has failed to make appointments can be as high as hundreds or thousands of times in a day. It can be seen that the above problems have a relatively large impact on production efficiency.
  • One aspect of the present invention provides a method for processing a transaction request, including:
  • the information exchange includes that the machine control system sends a first transaction request to the agent module, and the agent module sends the first transaction request to the manufacturing execution system.
  • Another aspect of the present application provides a semiconductor production system, including a manufacturing execution system, a machine control system, and an agent module, wherein:
  • the agent module is respectively communicatively connected to the manufacturing execution system and the machine control system, and is used to complete the information exchange between the manufacturing execution system and the machine control system;
  • the agent module is configured to receive the first transaction request sent by the machine control system and then send it to the manufacturing execution system, and receive the first feedback corresponding to the first transaction request sent by the manufacturing execution system The result is then sent to the machine control system.
  • Figure 1 is a working principle diagram of a machine control system and a manufacturing execution system in the prior art when a transaction request is sent at the same time on both sides;
  • Figure 2 is a sequence flow chart of the machine control system and the manufacturing execution system in the prior art when both sides send transaction requests simultaneously;
  • Fig. 3 is a flowchart of a method for processing a transaction request of the present invention
  • FIG. 4 is a sequence flow chart of the machine control system and the manufacturing execution system of the transaction request processing method in an embodiment of the present invention when the transaction request is sent at the same time on both sides;
  • FIG. 5 is a structural block diagram of the semiconductor production system of the present invention.
  • FIG. 6 is a structural block diagram of an agent module in a semiconductor production system in an embodiment of the present invention.
  • the existing semiconductor production system includes: a manufacturing execution system 1', a machine control system 2'connected to the manufacturing execution system 1', and an operation client/monitoring program 5'connected to the manufacturing execution system 1', The equipment automation system 3'connected to the machine control system 2'and the operating machine 4'connected to the equipment automation system 3'; wherein the user sends a request to the manufacturing execution system 1'through the operating client and displays the manufacturing execution through the operating client
  • the execution result of the system 1', the monitoring program 5' is used to control the manufacturing execution system 1'to automatically start the operation at a fixed time, to reserve and transmit the goods to be produced to the operation machine 4'that meets the production conditions.
  • the Corba protocol Common Object Request
  • Broker Architecture general object request agent system
  • the machine control system 2' In order to avoid deadlock (Dead Lock), the machine control system 2'will first "check the busy flag” (Check Busy Flag), and since the busy flag has been checked, the machine control system 2' "Reject Reserve Tx" will be fed back to the manufacturing execution system 1'to remind the manufacturing execution system 1'that the reservation of the transaction request has failed.
  • the machine control system 1'and the manufacturing execution system 2' both send transaction requests at the same time, the main process of the machine control system 1'and the machine objects of the manufacturing execution system 2'are locked at the same time, and the system program The default execution machine control system 2'rejects the reservation transaction request of the manufacturing execution system 1'. This process directly leads to the failure of the reservation of the manufacturing execution system.
  • the present invention provides a method for processing a transaction request, which includes: completing the information exchange between the manufacturing execution system 1 and the machine control system 2 through the agent module 6. It is understandable that the information exchange mentioned here can be all the information that needs to be interacted between the machine control system 2 and the manufacturing execution system 1, or it can be part of it.
  • the information exchange in the transaction request processing method includes: the machine control system 2 sends the first transaction request to the agent module 6, and the agent module 6 sends the first transaction request to the manufacturing execution system 1. This avoids the situation that the original machine control system 2 needs to be locked when sending the first transaction request, thereby effectively improving the reservation success rate when the manufacturing execution system 1 sends the second transaction request to the machine control system 2. And then improve production efficiency.
  • the information exchange may also include: after the manufacturing execution system 1 receives and executes the first transaction request, it sends the corresponding first feedback result to the agent module 6, and the agent module 6 sends the first feedback result to the machine control system. 2.
  • the agent module 6 receives the first feedback result from the manufacturing execution system 1 in real time.
  • the processing method of the transaction request further includes: after the machine control system 2 sends the first transaction request, and before the machine control system 2 receives the first feedback result, the machine control system 2 can receive The second transaction request sent by the manufacturing execution system 1.
  • the machine control system 2 When the machine control system 2 receives the second transaction request sent from the manufacturing execution system 1, it responds and executes the second transaction request, and then sends the corresponding second feedback result to the manufacturing execution system 1.
  • the agent module 6 performs the first transaction request on the first transaction request.
  • An information format is converted and sent to the manufacturing execution system 1; the agent module 6 performs a second information format conversion on the first feedback result and then sends it to the machine control system 2.
  • the first information format conversion includes the format conversion from the Postman protocol to the Web Service protocol; the second information format conversion includes the format conversion from the Web Service protocol to the Postman protocol.
  • the method for processing a transaction request specifically includes the following steps:
  • the first transaction request may include "Update EQP State”; specifically, the "Update EQP State” is converted from the Postman protocol to the Web Service protocol, and then the "Update EQP State” is based on the Web Service protocol.
  • the “machine status” request is sent to the process 2 of the manufacturing execution system 1; the manufacturing execution system 1 may provide multiple Web Service information receiving modules for receiving the “update machine status” request;
  • the locking program in the main process of the machine control system 2 can be cancelled or not executed, thereby improving the success rate of the appointment of the manufacturing execution system 1;
  • the first feedback result may include: a feedback result (Return Result) after the manufacturing execution system 2 has executed the first transaction request, such as success (Normal End), failure (Error Code), and failure reason (Error Description). Specifically, the execution result is sent to the main thread (Main Thread) of the machine control system 2.
  • a feedback result (Return Result) after the manufacturing execution system 2 has executed the first transaction request, such as success (Normal End), failure (Error Code), and failure reason (Error Description).
  • the execution result is sent to the main thread (Main Thread) of the machine control system 2.
  • the machine control system 2 When the machine control system 2 receives the second transaction request from the manufacturing execution system 1, it retains the second transaction request, responds to and executes the second transaction request, and sends the corresponding second feedback result to the manufacturing execution system 1.
  • the second feedback result may include the success of the transaction request (Normal End);
  • the machine control system 2 also transfers the second transaction request to the main process for execution;
  • the second transaction request may include "Lot Reserve Tx".
  • the manufacturing execution system 1 sends the "Reserve Tx" to the machine control system 2, the machine objects will be locked at the same time. Therefore, the successful transaction request of the manufacturing execution system 1 is fed back from the server process (Server Thread) to the process 1 of the manufacturing execution system 1 to unlock the previous machine objects and facilitate the smooth execution of the first transaction request;
  • the aforementioned "reservation dispatching transaction request" is sent to the server process of the machine control system 2.
  • the agent module 6 sends the first feedback result of the manufacturing execution system 1 to the machine control system 2;
  • the "feedback result” is converted from the Web Service protocol to the Postman protocol, and then the "feedback result” based on the Postman protocol is sent to the process 2 of the manufacturing execution system 1.
  • steps S1 to S2 can be performed simultaneously or in any order, and the objective of the present invention can be achieved.
  • step S1 Before the step S1, it may further include:
  • the machine control system 2 sends the first transaction request to the agent module 6; specifically, the first transaction request is sent from the main process of the machine control system 2.
  • the present invention also provides a semiconductor production system, which includes a manufacturing execution system 1, a machine control system 2, and an agent module 6, wherein:
  • the agent module 6 respectively communicates with the manufacturing execution system 1 and the machine control system 2 to complete the information exchange between the manufacturing execution system 1 and the machine control system 2;
  • the agent module 6 is used to receive the first transaction request sent by the station control system 2 and then send it to the manufacturing execution system 1, and to receive the first feedback result corresponding to the first transaction request sent by the manufacturing execution system 1 and then send it To the machine control system 2.
  • the machine control system 2 is connected to the manufacturing execution system 1, after the machine control system 2 sends the first transaction request, and the machine control system 2 receives the first feedback result Previously, the machine control system 2 was able to receive the second transaction request sent by the manufacturing execution system 1;
  • the machine control system 2 When the machine control system 2 receives the second transaction request, it responds and executes the second transaction request, and then sends the corresponding second feedback result to the manufacturing execution system 1.
  • the agent module 6 includes:
  • the first receiving unit 61 whose input is connected to the machine control system 2, is used to receive the first transaction request sent by the machine control system 2;
  • the first conversion processing unit 62 whose input terminal is connected to the output terminal of the first receiving unit 61, is used to convert the first information format of the first transaction request;
  • the first sending unit 63 whose input terminal is connected to the output terminal of the first conversion processing unit 62, and whose output terminal is connected to the manufacturing execution system 1, is used to send the first transaction request after the first information format conversion to the manufacturing execution system 1 .
  • the agent module 6 further includes:
  • the second receiving unit 64 the input terminal of which is connected to the manufacturing execution system 1, and is used to receive the first feedback result of the manufacturing execution system 1;
  • the second conversion processing unit 65 whose input terminal is connected to the output terminal of the second receiving unit 64, is used to convert the first feedback result to the second information format;
  • the second sending unit 66 whose input terminal is connected to the output terminal of the second conversion processing unit 65, and whose output terminal is connected to the machine control system 2, is used to send the first feedback result after the second information format conversion to the machine control System 2.
  • the embodiment of the present application has the following advantages: the agent module replaces the machine control system to send the first transaction request, avoiding the situation that the original machine control system needs to be locked when sending the first transaction request, thereby effectively improving manufacturing execution
  • the reservation success rate when the system sends the second transaction request to the machine control system thereby improving production efficiency.
  • Non-volatile memory may include read-only memory (Read-Only Memory, ROM), magnetic tape, floppy disk, flash memory, or optical storage.
  • Volatile memory may include random access memory (RAM) or external cache memory.
  • RAM may be in various forms, such as static random access memory (Static Random Access Memory, SRAM) or dynamic random access memory (Dynamic Random Access Memory, DRAM), etc.

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Abstract

一种交易请求的处理方法，其包括：通过代理模块完成制造执行系统与机台控制系统之间的信息交换；所述信息交换包括，所述机台控制系统将第一交易请求发送给所述代理模块，所述代理模块再将所述第一交易请求发送给所述制造执行系统。

Description

交易请求的处理方法及半导体生产系统
本申请要求于2020年4月21日提交的申请号为202010317228.9、名称为“交易请求的处理方法及半导体生产系统”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本发明涉及半导体生产系统技术领域，具体涉及交易请求的处理方法及半导体生产系统。
背景技术
如图1所示，为减轻人力的负担、提升操作的质量以及降低制造成本，半导体领域(Semiconductor)一般会用到制造执行系统1’(Manufacturing Execution System，MES)与机台控制系统2’(Tool Control System，TCS)来提高工作效率。
但当制造执行系统1’与机台控制系统2’同时发送交易请求时，将由机台控制系统2’拒绝制造执行系统1’的请求以保证安全运行避免死锁，因此经常会导致制造执行系统1’预约失败；根据日常数据统计，正常生产中，半导体厂一天内产生上述预约失败的次数可高达成百上千次，由此可见，上述问题对生产效率造成了比较大的影响。
发明内容
本发明一方面提供一种交易请求的处理方法，包括：
通过代理模块完成制造执行系统与机台控制系统之间的信息交换；
所述信息交换包括，所述机台控制系统将第一交易请求发送给所述代理模块，所述代理模块再将所述第一交易请求发送给所述制造执行系统。
本申请另一方面提供一种半导体生产系统，包括制造执行系统、机台控制系统以及代理模块，其中：
所述代理模块分别通信连接所述制造执行系统以及机台控制系统，用于完成所述制造执行系统与所述机台控制系统之间的信息交换；
所述代理模块用于接收所述机台控制系统发送出的第一交易请求再发送给所述制造执行系统，以及接收所述制造执行系统发出的与所述第一交易请求对应的第一反馈结果再发送给所述机台控制系统。
本发明的一个或多个实施例的细节在下面的附图和描述中提出。本发明的其它特征、目的和优点将从说明书、附图以及权利要求书变得明显。
附图说明
为了更好地描述和说明本申请的实施例，可参考一幅或多幅附图，但用于描述附图的附加细节或示例不应当被认为是对本申请的发明创造、目前所描述的实施例或优选方式中任何一者的范围的限制。
图1为现有技术中的机台控制系统与制造执行系统在双边同时发送交易请求时的工作原理图；
图2为现有技术中的机台控制系统与制造执行系统在双边同时发送交易请求时的时序流程图；
图3为本发明的交易请求的处理方法的流程图；
图4为本发明的一实施例中的交易请求的处理方法的机台控制系统与制造 执行系统在双边同时发送交易请求时的时序流程图；
图5为本发明的半导体生产系统的结构框图；
图6为本发明的一实施例中的半导体生产系统中的代理模块的结构框图。
具体实施方式
为了更好地理解本发明的目的、技术方案以及技术效果，以下结合附图和实施例对本发明进行进一步的讲解说明。同时声明，以下所描述的实施例仅用于解释本发明，并不用于限定本发明。
除非另有定义，本文所使用的所有的技术和科学术语与属于本申请的技术领域的技术人员通常理解的含义相同。本文中在本申请的说明书中所使用的术语只是为了描述具体的实施例的目的，不是旨在于限制本申请。本文所使用的术语“及/或”包括一个或多个相关的所列项目的任意的和所有的组合。
在使用本文中描述的“包括”、“具有”、和“包含”的情况下，除非使用了明确的限定用语，例如“仅”、“由……组成”等，否则还可以添加另一部件或方法。除非相反地提及，否则单数形式的术语可以包括复数形式，并不能理解为其数量为一个。
如图1所示，现有的半导体生产系统包括：制造执行系统1’、连接制造执行系统1’的机台控制系统2’、连接制造执行系统1’的操作客户端/监控程序5’，连接机台控制系统2’的设备自动化系统3’以及连接设备自动化系统3’的操作机台4’；其中，用户通过操作客户端向制造执行系统1’发送请求以及通过操作客户端显示制造执行系统1’的执行结果，监控程序5’用于控制制造执行系统1’自动定时启动运行，将待生产的货预约并传送至符合生产条件的操作机台4’上，上述各设备、系统之间的信息交互需要通过相应的通信协 议来完成，例如，所述制造执行系统1’与所述机台控制系统2’、操作客户端以及监控程序5’之间分别通过Corba协议(Common Object Request Broker Architecture，通用对象请求代理体系)完成通信，所述设备自动化系统3’与所述机台控制系统2’之间通过Postman协议完成通信，所述机台控制系统2’与所述操作机台4’之间通过SECS协议完成通信。
如图2所示，现有的制造执行系统1’与机台控制系统2’在运行时，当制造执行系统1’与机台控制系统2’同时向对方发送交易请求(Transaction Request，Tx)时存在如下情况：由机台控制系统1’向制造执行系统2’发送“更新机台状态请求”(Update EQP State)时，机台控制系统2’的主进程将预先“启动忙碌标志”(Enable Busy Flag)使主进程进入锁定，如果与此同时制造执行系统也向机台控制系统发送“预约派送交易请求”(Lot Reserve Tx)，则同时制造执行系统1’的机台物件(EQP Object)也进入锁定，为了避免死锁(Dead Lock)，机台控制系统2’将首先“检查忙碌标志”(Check Busy Flag)，并且由于检查到忙碌标志已经被启动，因此机台控制系统2’将向制造执行系统1’反馈“拒绝预约交易请求”(Reject Reserve Tx)以提示制造执行系统1’的交易请求预约失败。也就是说，当出现机台控制系统1’与制造执行系统2’双边同时发送交易请求时，机台控制系统1’的主进程与制造执行系统2’的机台物件同时被锁定，系统程序默认执行机台控制系统2’拒绝制造执行系统1’的预约交易请求，这一过程直接导致制造执行系统预约失败。
为了解决上述当机台控制系统2’与制造执行系统1’双边同时发送交易请求时由机台控制系统2’拒绝制造执行系统1’以避免死锁，因此导致制造执行系统1’预约失败的问题，请参阅图4、图5，本发明提供了一种交易请求的处理方法，其包括：通过代理模块6完成制造执行系统1与机台控制系统2 之间的信息交换。可以理解的是，这里所说的信息交换，可以是机台控制系统2与制造执行系统1之间所有需要进行交互的信息，也可以是部分。
在一实施例中，交易请求的处理方法中的信息交换包括：机台控制系统2将第一交易请求发送给所述代理模块6，代理模块6将第一交易请求发送给制造执行系统1，由此，避免了原先机台控制系统2在发送第一交易请求时需要被锁定的情况，从而有效地提高制造执行系统1向机台控制系统2发送的第二交易请求时的预约成功率，进而提升生产效率。
作为示例，信息交换还可以包括：制造执行系统1接收并执行第一交易请求后，将对应的第一反馈结果发送给代理模块6，代理模块6再将第一反馈结果发送给机台控制系统2。在一实施例中，代理模块6实时地从制造执行系统1接收所述第一反馈结果。
在一实施例中，交易请求的处理方法还包括：在机台控制系统2发送出第一交易请求之后，且在机台控制系统2接收到第一反馈结果之前，机台控制系统2能够接收由制造执行系统1发送的第二交易请求。
当机台控制系统2接收到来自制造执行系统1发送的第二交易请求时响应并执行第二交易请求，再将对应的第二反馈结果发送给制造执行系统1。
由于采用的是外部代理模块6，因此为了达到机台控制系统2与制造执行系统1之间收发信息格式匹配的目的，具体的，在一实施例中，代理模块6对第一交易请求进行第一信息格式转换以后发送给制造执行系统1；代理模块6对第一反馈结果进行第二信息格式转换以后发送给机台控制系统2。具体的：第一信息格式转换包括由Postman协议到Web Service协议的格式转换；第二信息格式转换包括由Web Service协议到Postman协议的格式转换。
接下来，将结合一个具体实施例，对本发明的交易请求的处理方法的工作 原理以及所能达到的技术效果进行详细解释：
如图3、图4所示，在本实施例中，交易请求的处理方法具体包括如下步骤：
S1、通过代理模块6将机台控制系统2的第一交易请求发送给制造执行系统1；制造执行系统1接收并执行第一交易请求后，将对应的第一反馈结果发送给代理模块6；
作为示例，第一交易请求可以包括“更新机台状态(Update EQP State)”；具体的，将“更新机台状态”进行Postman协议到Web Service协议的转换，然后将基于Web Service协议的“更新机台状态”请求发送到制造执行系统1的进程2中；所述制造执行系统1可以提供多个Web Service信息接收模块用于接收所述“更新机台状态”请求；
通过代理模块6将“更新机台状态”的请求进行发送后，就可以取消或者不执行机台控制系统2中主进程中的锁定程序，从而提高了制造执行系统1的预约成功率；
作为示例，第一反馈结果可以包括：制造执行系统2执行完第一交易请求后的反馈结果(Return Result)，例如：成功(Normal End)、失败(Error Code)与失败原因(Error Description)。具体的，执行结果被发送到机台控制系统2的主进程(Main Thread)。
S2、当机台控制系统2接收到来自制造执行系统1的第二交易请求时保留第二交易请求，响应并执行第二交易请求，同时将对应的第二反馈结果发送给制造执行系统1，第二反馈结果可以包括交易请求成功(Normal End)；
这里，对第二交易请求进行保留后机台控制系统2还将第二交易请求转到主进程中进行执行；
作为示例，第二交易请求可以包括“预约派送交易请求(Lot Reserve Tx)”，当制造执行系统1发送“预约派送交易请求”给机台控制系统2时，会同时对机台物件进行锁定，因此，制造执行系统1的交易请求成功是从服务器进程(Server Thread)反馈到所述制造执行系统1的进程1中，以解除之前机台物件的锁定，便于第一交易请求的顺利执行；所述的“预约派送交易请求”是发送到机台控制系统2的服务器进程中的。
S3、代理模块6将制造执行系统1的第一反馈结果发送给机台控制系统2；
具体的，将“反馈结果”进行Web Service协议到Postman协议的转换，然后将基于Postman协议的“反馈结果”发送到制造执行系统1的进程2中。
可以理解的是，上述方法中，步骤S1～S2可以同时进行也可以按照任意顺序进行，都可以达到本发明目的。
所述的步骤S1之前还可以包括：
S0：机台控制系统2将第一交易请求发送给代理模块6；具体的，第一交易请求从机台控制系统2的主进程发出。
本发明还提出一种半导体生产系统，其包括制造执行系统1、机台控制系统2以及代理模块6，其中：
代理模块6分别通信连接制造执行系统1以及机台控制系统2，用于完成制造执行系统1与机台控制系统2之间的信息交换；
具体的，代理模块6用于接收机台控制系统2发送出的第一交易请求再发送给制造执行系统1，以及接收制造执行系统1发出的与第一交易请求对应的第一反馈结果再发送给机台控制系统2。
所述的半导体生产系统中：机台控制系统2连接所述制造执行系统1，在机台控制系统2发送出所述第一交易请求之后，且在机台控制系统2接收到第 一反馈结果之前，机台控制系统2能够接收由制造执行系统1发送的第二交易请求；
当机台控制系统2接收到第二交易请求时对第二交易请求进行响应并执行，再将对应的第二反馈结果发送给制造执行系统1。
如图6所示，所述的半导体生产系统中，代理模块6包括：
第一接收单元61，其输入端连接机台控制系统2，用于接收机台控制系统2发出的第一交易请求；
第一转换处理单元62，其输入端连接第一接收单元61的输出端，用于将第一交易请求进行第一信息格式转换；
第一发送单元63，其输入端连接第一转换处理单元62的输出端，其输出端连接制造执行系统1，用于将进行第一信息格式转换后的第一交易请求发送给制造执行系统1。
所述的半导体生产系统，其中，代理模块6还包括：
第二接收单元64，其输入端连接制造执行系统1，用于接收制造执行系统1的第一反馈结果；
第二转换处理单元65，其输入端连接第二接收单元64的输出端，用于将第一反馈结果进行第二信息格式转换；
第二发送单元66，其输入端连接第二转换处理单元65的输出端，其输出端连接机台控制系统2，用于将进行第二信息格式转换后的第一反馈结果发送给机台控制系统2。
本申请的实施例具有以下优点：透过代理模块替代机台控制系统发送第一交易请求，避免了原先机台控制系统在发送第一交易请求时需要被锁定的情况，从而有效地提高制造执行系统向机台控制系统发送的第二交易请求时的预 约成功率，进而提升生产效率。
本领域普通技术人员可以理解实现上述实施例方法中的全部或部分流程，是可以通过计算机程序来指令相关的硬件来完成，所述的计算机程序可存储于一非易失性计算机可读取存储介质中，该计算机程序在执行时，可包括如上述各方法的实施例的流程。非易失性存储器可包括只读存储器(Read-Only Memory，ROM)、磁带、软盘、闪存或光存储器等。易失性存储器可包括随机存取存储器(Random Access Memory，RAM)或外部高速缓冲存储器。作为说明而非局限，RAM可以是多种形式，比如静态随机存取存储器(Static Random Access Memory，SRAM)或动态随机存取存储器(Dynamic Random Access Memory，DRAM)等。
以上所述实施例的各技术特征可以进行任意的组合，为使描述简洁，未对上述实施例中的各个技术特征所有可能的组合都进行描述，然而，只要这些技术特征的组合不存在矛盾，都应当认为是本说明书记载的范围。
以上所述实施例仅表达了本发明的几种实施方式，其描述较为具体和详细，但并不能因此而理解为对发明专利范围的限制。应当指出的是，对于本领域的普通技术人员来说，在不脱离本发明构思的前提下，还可以做出若干变形和改进，这些都属于本发明的保护范围。因此，本发明专利的保护范围应以所附权利要求为准。

Claims (10)

  1. 一种交易请求的处理方法，包括：
    通过代理模块完成制造执行系统与机台控制系统之间的信息交换；
    所述信息交换包括，所述机台控制系统将第一交易请求发送给所述代理模块，所述代理模块再将所述第一交易请求发送给所述制造执行系统。
  2. 如权利要求1所述的交易请求的处理方法，其中：
    所述信息交换还包括，所述制造执行系统接收并执行第一交易请求后，将对应的第一反馈结果发送给所述代理模块，所述代理模块再将所述第一反馈结果发送给所述机台控制系统。
  3. 如权利要求2所述的交易请求的处理方法，其中：
    在所述机台控制系统发送出所述第一交易请求之后，且在所述机台控制系统接收到所述第一反馈结果之前，所述机台控制系统能够接收由所述制造执行系统发送的第二交易请求。
  4. 如权利要求3所述的交易请求的处理方法，其中：
    当所述机台控制系统接收到来自所述制造执行系统发送的第二交易请求时响应并执行所述第二交易请求，再将对应的第二反馈结果发送给所述制造执行系统。
  5. 如权利要求2所述的交易请求的处理方法，其中：
    所述代理模块对所述第一交易请求进行第一信息格式转换以后发送给所述制造执行系统；
    所述代理模块对所述第一反馈结果进行第二信息格式转换以后发送给所述机台控制系统。
  6. 如权利要求5所述的交易请求的处理方法，其中：
    所述第一信息格式转换包括由Postman协议到Web Service协议的格式转换；
    所述第二信息格式转换包括由Web Service协议到Postman协议的格式转换。
  7. 一种半导体生产系统，包括制造执行系统、机台控制系统以及代理模块，其中：
    所述代理模块分别通信连接所述制造执行系统以及机台控制系统，用于完成所述制造执行系统与所述机台控制系统之间的信息交换；
    所述代理模块用于接收所述机台控制系统发送出的第一交易请求再发送给所述制造执行系统，以及接收所述制造执行系统发出的与所述第一交易请求对应的第一反馈结果再发送给所述机台控制系统。
  8. 如权利要求7所述的半导体生产系统，其中：
    所述机台控制系统连接所述制造执行系统，在所述机台控制系统发送出所述第一交易请求之后，且在所述机台控制系统接收到所述第一反馈结果之前，所述机台控制系统能够接收由所述制造执行系统发送的第二交易请求；
    当所述机台控制系统接收到所述第二交易请求时对所述第二交易请求进行响应并执行，再将对应的第二反馈结果发送给所述制造执行系统。
  9. 如权利要求7所述的半导体生产系统，其中，所述代理模块包括：
    第一接收单元，其输入端连接所述机台控制系统，用于接收所述机台控制系统发出的第一交易请求；
    第一转换处理单元，其输入端连接所述第一接收单元的输出端，用于将所述第一交易请求进行第一信息格式转换；
    第一发送单元，其输入端连接所述第一转换处理单元的输出端，其输出端连接所述制造执行系统，用于将进行第一信息格式转换后的所述第一交易请求发送给所述制造执行系统。
  10. 如权利要求9所述的半导体生产系统，其中，所述代理模块还包括：
    第二接收单元，其输入端连接所述制造执行系统，用于接收所述制造执行系统的第一反馈结果；
    第二转换处理单元，其输入端连接所述第二接收单元的输出端，用于将所述第一反馈结果进行第二信息格式转换；
    第二发送单元，其输入端连接所述第二转换处理单元的输出端，其输出端连接所述机台控制系统，用于将进行第二信息格式转换后的所述第一反馈结果发送给所述机台控制系统。
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6775584B1 (en) * 2001-08-30 2004-08-10 Taiwan Semiconductor Manufacturing Company Operation-supervision integrated interface
US20050256599A1 (en) * 2004-05-12 2005-11-17 Chin-Lang Peng System and method thereof for real-time batch dispatching manufacturing process
CN1848364A (zh) * 2005-04-15 2006-10-18 力晶半导体股份有限公司 缩短机台闲置时间的方法以及使用该方法的制造系统
CN101236418A (zh) * 2007-01-30 2008-08-06 力晶半导体股份有限公司 半导体群集的统计工艺控制系统与方法
CN104166378A (zh) * 2013-05-17 2014-11-26 上海和辉光电有限公司 Amoled厂物料cim自动管理系统及方法
CN105223914A (zh) * 2014-06-30 2016-01-06 中芯国际集成电路制造(上海)有限公司 管控机台生产数据的系统及其方法

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7184966B1 (en) * 1999-12-30 2007-02-27 Honeywell International Inc. Systems and methods for remote role-based collaborative work environment
US20020198964A1 (en) * 2001-06-26 2002-12-26 International Business Machines Corporation Method and system for wireless remote monitoring and control of a manufacturing execution system
US7496574B2 (en) * 2003-05-01 2009-02-24 International Business Machines Corporation Managing locks and transactions
US7369912B2 (en) * 2003-05-29 2008-05-06 Fisher-Rosemount Systems, Inc. Batch execution engine with independent batch execution processes
JP4828831B2 (ja) * 2005-01-18 2011-11-30 パナソニック株式会社 半導体装置の製造方法
TWI304185B (en) * 2005-12-02 2008-12-11 Powerchip Semiconductor Corp A dispatch integration method for semiconductor
DE102006025407A1 (de) * 2006-05-31 2007-12-06 Advanced Micro Devices, Inc., Sunnyvale Verfahren und System zum dynamischen Ändern der Transportsequenz in einer Cluster-Anlage
US20080126414A1 (en) * 2006-11-27 2008-05-29 International Business Machines Corporation Method, system, and computer program product for providing a program interface for communications between a manufacturing execution system and a transport system
JP4908304B2 (ja) * 2007-04-27 2012-04-04 東京エレクトロン株式会社 基板の処理方法、基板の処理システム及びコンピュータ読み取り可能な記憶媒体
US7668613B2 (en) * 2007-09-28 2010-02-23 Rockwell Automation Technologies, Inc. MES appliance integrated with control modules
US8505038B2 (en) * 2008-01-28 2013-08-06 Blue Coat Systems, Inc. Method and system for enhancing MS exchange (MAPI) end user experiences in a split proxy environment
US9665668B2 (en) * 2012-02-29 2017-05-30 Applied Materials, Inc. Configuring a dispatching rule for execution in a simulation
CN103389693A (zh) * 2012-05-07 2013-11-13 擎泰科技股份有限公司 自动化量产方法及其系统
KR101370836B1 (ko) * 2012-05-29 2014-03-07 홍경천 Ｍｅｓ와 ｐｌｃ 간 데이터 전송용 인터페이스 모듈
CN104079624A (zh) * 2014-05-09 2014-10-01 国云科技股份有限公司 一种基于服务的消息接入层框架及其实现方法
TWI506702B (zh) * 2014-07-28 2015-11-01 Powerchip Technology Corp 爐管製程的派工控制方法
KR101779827B1 (ko) * 2015-08-19 2017-10-10 티클로버(주) 제조 장비 및 설비에 대한 원격 모니터링 및 제어 시스템 및 이에 관한 컴퓨터 판독가능 저장 매체
TWI588636B (zh) * 2015-12-01 2017-06-21 亞智科技股份有限公司 用於控制工業設備的方法以及控制工業設備的系統
CN106371416B (zh) * 2016-11-18 2018-08-10 安徽江淮汽车集团股份有限公司 装配线上的装配控制方法及系统
CN107168253B (zh) * 2017-05-10 2019-07-12 武汉华星光电技术有限公司 计算机集成制造系统及其制造方法
EP3540661A1 (en) * 2018-03-15 2019-09-18 Siemens Industry Software Ltd. Method for balancing a production line

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6775584B1 (en) * 2001-08-30 2004-08-10 Taiwan Semiconductor Manufacturing Company Operation-supervision integrated interface
US20050256599A1 (en) * 2004-05-12 2005-11-17 Chin-Lang Peng System and method thereof for real-time batch dispatching manufacturing process
CN1848364A (zh) * 2005-04-15 2006-10-18 力晶半导体股份有限公司 缩短机台闲置时间的方法以及使用该方法的制造系统
CN101236418A (zh) * 2007-01-30 2008-08-06 力晶半导体股份有限公司 半导体群集的统计工艺控制系统与方法
CN104166378A (zh) * 2013-05-17 2014-11-26 上海和辉光电有限公司 Amoled厂物料cim自动管理系统及方法
CN105223914A (zh) * 2014-06-30 2016-01-06 中芯国际集成电路制造(上海)有限公司 管控机台生产数据的系统及其方法

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