WO2021205199A1 - Agencement de tuyau - Google Patents

Agencement de tuyau Download PDF

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Publication number
WO2021205199A1
WO2021205199A1 PCT/IB2020/053264 IB2020053264W WO2021205199A1 WO 2021205199 A1 WO2021205199 A1 WO 2021205199A1 IB 2020053264 W IB2020053264 W IB 2020053264W WO 2021205199 A1 WO2021205199 A1 WO 2021205199A1
Authority
WO
WIPO (PCT)
Prior art keywords
pipe section
cooling
pipe
temperature
fluid
Prior art date
Application number
PCT/IB2020/053264
Other languages
English (en)
Inventor
HeeGun JO
SeungHo JUN
SeongWoo YOON
Original Assignee
Edwards Korea Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Korea Limited filed Critical Edwards Korea Limited
Priority to PCT/IB2020/053264 priority Critical patent/WO2021205199A1/fr
Priority to GB2103417.8A priority patent/GB2597820A/en
Publication of WO2021205199A1 publication Critical patent/WO2021205199A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L41/00—Branching pipes; Joining pipes to walls
    • F16L41/02—Branch units, e.g. made in one piece, welded, riveted
    • F16L41/021—T- or cross-pieces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L41/00—Branching pipes; Joining pipes to walls
    • F16L41/02—Branch units, e.g. made in one piece, welded, riveted
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/06—Cooling; Heating; Prevention of freezing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D1/00—Pipe-line systems
    • F17D1/08—Pipe-line systems for liquids or viscous products

Definitions

  • the present invention relates to a cooling pipe arrangement for a vacuum pumping system.
  • Vacuum pumping systems are used in various different industries to pump gas out of a desired chamber using one or more vacuum pumps. Vacuum pumps tend to generate a large amount of heat during operation. Thus, vacuum pumping systems typically include cooling lines carrying cooling fluid (e.g. water) for cooling the vacuum pumps.
  • cooling fluid e.g. water
  • a pipe arrangement for conveying cooling fluid for cooling a vacuum pumping system comprising a first pipe section containing and arranged to convey a first cooling fluid having a first temperature, a second pipe section containing and arranged to convey a second cooling fluid having a second temperature lower than the first temperature, and a third pipe section fluidly connected to the first and second pipe sections.
  • the third pipe section is arranged to receive the first cooling fluid from the first pipe section and to receive the second cooling fluid from the second pipe section.
  • the third pipe section contains and is arranged to convey a mixture of the first and second cooling fluids, wherein the mixture has a third temperature lower than the first temperature and greater than the second temperature.
  • the third pipe section is formed from a different type of material to the first pipe section.
  • the third pipe section may be formed from a plastic material.
  • the third pipe section may be formed from PA12.
  • the first pipe section may be formed from a metallic material.
  • the third pipe section may be formed from stainless steel.
  • the third pipe section may be formed from a different type of material to the second pipe section.
  • the second pipe section may be formed from the same type of material as the first pipe section.
  • the first and second cooling fluids may be the same type of fluid.
  • the type of fluid may be water.
  • the first temperature may be greater than 80°C
  • the second temperature may be less than 80°C
  • the third temperature may be less than or equal to 80° C.
  • the second temperature may be less than 50°C and the third temperature may be between 50°C and 80°C.
  • the first, second and third pipe sections may be connected together to form a T-joint or cross joint.
  • a vacuum pumping system comprising a vacuum pump and a cooling system arranged to cool the vacuum pump, the cooling system comprising cooling lines comprising the pipe arrangement according to the first aspect.
  • the cooling lines may comprise a first cooling line comprising the first pipe section, wherein the first cooling line passes proximate to or through the vacuum pump to cool the vacuum pump, and a second cooling line comprising the second pipe section, wherein the second cooling line does not pass proximate to or through the vacuum pump, wherein the first cooling line connects to the second cooling line at a point on the first cooling line downstream of the vacuum pump.
  • the first cooling fluid may be cooling fluid which has been used to cool the vacuum pump by absorbing heat therefrom.
  • Figure 1 is a schematic illustration (not to scale) showing a vacuum pumping system comprising a cooling pipe arrangement
  • Figure 2 is a schematic illustration (not to scale) showing a close up view of a pipe arrangement of the vacuum pumping system of Figure 1.
  • FIG. 1 is a schematic illustration (not to scale) showing a vacuum pumping system 100.
  • the vacuum pumping system 100 comprises a vacuum pump 110 and a plurality of cooling lines 120a-d.
  • the vacuum pump 110 is arranged to pump gas out of a particular location (e.g. a chamber in a manufacturing facility) via one or more vacuum pumping lines (not shown).
  • the vacuum pump 110 may be any type of vacuum pump, e.g. a rotary vane pump, diaphragm pump, liquid ring pump, scroll pump or screw pump.
  • the operation of vacuum pumps and their industrial application are well understood and will not be described herein for the sake of brevity.
  • the vacuum pump 110 During operation, the vacuum pump 110 generates a significant amount of heat.
  • the cooling lines 120a-d are arranged to convey cooling fluid (e.g. a liquid such as water) proximate to (or through) the vacuum pump 110 to absorb the generated heat into the cooling fluid and to carry the absorbed heat away from the vacuum pump 110.
  • cooling fluid e.g. a liquid such as water
  • the cooling lines 120a-d comprise a first cooling line 120a, a second cooling line 120b, a third cooling line 120c and a fourth cooling line 120d.
  • the cooling lines 120a-d are formed from a plurality of pipe sections joined together. The direction of travel of the cooling fluid conveyed by the cooling lines 120a-d is shown by arrows 130 in Figure 1.
  • the first cooling line 120a is arranged to receive cooling fluid from a cooling fluid source (such as a cooling water tank or a cooling fluid source external to the vacuum pumping system 100), convey the received cooling fluid therethrough, and output the conveyed cooling fluid into the second and third cooling lines 120b, 120c.
  • the second cooling line 120b is arranged to receive cooling fluid from the first cooling line 120a, convey the received cooling fluid therethrough, and output the conveyed cooling fluid into the fourth cooling line 120d.
  • the second cooling line 120b passes proximate to (or through) the vacuum pump 110 such that the cooling fluid conveyed by the second cooling line 120b absorbs and carries away heat generated by the vacuum pump 110.
  • the cooling liquid in the second cooling line 120b downstream of the vacuum pump 110 is at a higher temperature than the cooling fluid in the second cooling line 120b upstream of the vacuum pump 110.
  • the third cooling line 120c is arranged to receive cooling fluid from the first cooling line 120a, convey the received cooling fluid therethrough, and output the conveyed cooling fluid into the fourth cooling line 120d.
  • the third cooling line 120c does not pass proximate to or through the vacuum pump 110.
  • the third cooling line 120c may pass proximate to or through a cooler part of the vacuum pump 110 (e.g.
  • the cooling fluid conveyed by the third cooling line 120c does not absorb heat from the vacuum pump 110 and is at substantially the same temperature throughout the third cooling line 120c.
  • the temperature of the cooling fluid in the third cooling line 120c is substantially the same as the temperature of the cooling fluid in the second cooling line 120b upstream of the vacuum pump 110.
  • the fourth cooling line 120d is arranged to receive cooling fluid from the second and third cooling lines 120b, 120c, convey the received cooling fluid therethrough, and output the conveyed cooling fluid to another location, e.g. a location external to the vacuum pumping system 100 for recirculation.
  • the fourth cooling line 120d is arranged to receive from the second cooling line 120b cooling fluid which has absorbed the heat generated by the vacuum pump 110, i.e. cooling fluid from the second cooling line 120b downstream of the vacuum pump 110.
  • the cooling fluid entering the fourth cooling line 120d from the second cooling line 120b is at higher temperature than the cooling fluid entering the fourth cooling line 120d from the third cooling line 120c.
  • the cooling fluid entering the fourth cooling line 120d from the second and third cooling lines 120b, 120c mix in the fourth cooling line 120d, such that the mixture is at a lower temperature than the cooling fluid entering from the second cooling line 120b and at a higher temperature than the cooling fluid entering from the third cooling line 120c.
  • the cooler cooling fluid entering from the third cooling 120c acts to cool the hotter cooling fluid entering from the second cooling line 120b by mixing therewith.
  • Different pipe sections used to form the cooling lines 120a-d can be formed from different types of material depending on the temperature of the cooling fluid that they convey.
  • a pipe arrangement 200 at the connection point between the second, third and fourth cooling lines 120b-d can make use of different types of material for different sections of pipe, as will now be described in more detail with reference to Figure 2.
  • Figure 2 is a schematic illustration (not to scale) showing a close up view of the pipe arrangement 200.
  • the pipe arrangement 200 comprises a first pipe section 210, a second pipe section 220, and a third pipe section 230.
  • the first pipe section 210 forms part of the second cooling line 120b described above
  • the second pipe section 220 forms part of the third cooling line 120c described above
  • the third pipe section 230 forms part of the fourth cooling line 120d described above.
  • the pipe arrangement 200 comprises an intersection of the second, third and fourth cooling lines 120b-d.
  • the first, second and third pipe sections 210, 220, 230 are fluidly connected together such that an input of the third pipe section 230 is arranged to receive cooling fluid from outputs of the first and section pipe sections 210, 220.
  • the first, second and third pipe sections 210, 220, 230 are connected together to form a T-joint.
  • the first, second and third pipe section may be connected together to form a cross joint.
  • the first, second and third pipe sections may be connected together using any appropriate connection means, e.g. by use of a screw threaded connector or other appropriate commercially available connectors such as a plastic quick connector.
  • the first pipe section 210 is arranged to convey a first fluid having a first temperature towards the third pipe section 230, and to output the first fluid into the third pipe section 230.
  • the second pipe section 220 is arranged to convey a second fluid having a second temperature towards the third pipe section 230, and to output the second fluid into the third pipe section 230.
  • the third pipe section 230 is arranged to receive the first fluid from the first pipe section 210, receive the second fluid from the second pipe section 220, and to convey a mixture of the first and second fluids away from the first and second pipe sections 210, 220.
  • the direction of travel of the cooling fluid conveyed by the first, second and third pipe sections is shown by arrows 240 in Figure 2.
  • the mixture conveyed by the third pipe section 230 has a third temperature lower than the first temperature and greater than the second temperature.
  • the third pipe section 230 is formed from a different type of material to the first pipe section 210.
  • the third pipe section 230 is formed from a plastic material.
  • the third pipe section 230 is formed from Polyamide 12 “PA12” (also known as Nylon 12).
  • the first pipe section 210 is formed from a metallic material.
  • the first pipe section 210 is formed from stainless steel.
  • the third pipe section 230 is formed from a different type of material to the second pipe section 220.
  • the second pipe section 220 is formed from the same material as the first pipe section 210.
  • the second pipe section 220 is formed from stainless steel.
  • the second pipe section 220 may alternatively be formed from the same material as the third pipe section 230 and/or a different type of material to the first pipe section 210.
  • the first, second and third pipe sections 210, 220, 230 are arranged to convey the same type of fluid.
  • the first fluid is the same type of fluid as the second fluid and the same type of fluid as the mixture.
  • the type of fluid is water.
  • the first temperature is greater than 80°C
  • the second temperature is less than 80°C
  • the third temperature is less than or equal to 80°C.
  • the second temperature may be less than 50°C
  • the third temperature may be between 50°C and 80°C.
  • PA12 can be used for the third pipe section 230 (which conveys fluid having a temperature of 80°C or less) without a significant risk of leaks occurring due to temperature, whilst stainless steel is used for the first pipe section 210 as the first pipe section 210 conveys fluid having a temperature of over 80°C.
  • a pipe arrangement for a cooling system for a vacuum pumping system is provided.
  • the above-described pipe arrangement tends to allow the use of a cheaper more lightweight material for some of the piping in the vacuum pumping system without overly compromising the structural integrity of the piping with regard to leaks.
  • the second pipe section is formed from a different type of material to the third pipe section, further cost reductions tend to be achieved,
  • the above pipe arrangement tends to mean that no further complicated additional equipment is required to cool the cooling fluid in the second cooling line.
  • the fluid in the second pipe section comes from a different location to that shown in Figure 1.
  • the fluid in the second pipe section may come from a cooling line which passes proximate to or through a cooler part of the vacuum pump (e.g. a motor of the vacuum pump) to the part of the vacuum pump that the second cooling line passes proximate to or through (e.g. a low vacuum side of the vacuum pump).
  • a cooling line which passes proximate to or through a cooler part of the vacuum pump (e.g. a motor of the vacuum pump) to the part of the vacuum pump that the second cooling line passes proximate to or through (e.g. a low vacuum side of the vacuum pump).
  • the third pipe section is formed from another type of material.
  • the third pipe section may be formed from another type of plastic suitable for conveying the mixture of the first and second fluid.
  • the third pipe section may be formed a non-plastic material suitable for conveying the mixture of the first and second fluid.
  • the first pipe section is formed from stainless steel.
  • the first pipe section is formed from another type of material.
  • the first pipe section may be formed from another type of metal suitable for conveying the first fluid.
  • the first pipe section may be formed from a non-metallic material suitable for conveying the first fluid.
  • first, second and third pipe sections form a T-joint.
  • first, second and third pipe sections form a differently shaped joint, e.g. a joint where the pipe sections are evenly angularly spaced from each other.
  • the first temperature is greater than 80°C
  • the second temperature is less than 80°C
  • the third temperature is less than or equal to 80°C.
  • the first, second and third temperatures have different specific values or value ranges.
  • first, second and third pipe sections all convey the same type of fluid.
  • first and second pipe sections convey different types of fluid
  • the third pipe section conveys a mixture of the different types of fluid.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Water Supply & Treatment (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressor (AREA)

Abstract

La présente invention concerne un agencement de tuyau pour transporter un fluide de refroidissement pour refroidir un système de pompage à vide, comprenant une première section de tuyau contenant et agencée pour transporter un premier fluide de refroidissement ayant une première température, une deuxième section de tuyau contenant et agencée pour transporter un deuxième fluide de refroidissement ayant une deuxième température inférieure à la première température, et une troisième section de tuyau en raccordement fluidique avec les première et deuxième sections de tuyau. La troisième section de tuyau est agencée pour recevoir le premier fluide de refroidissement depuis la première section de tuyau et pour recevoir le deuxième fluide de refroidissement depuis la deuxième section de tuyau. La troisième section de tuyau contient et est agencée pour transporter un mélange des premier et deuxième fluides de refroidissement, le mélange ayant une troisième température inférieure à la première température et supérieure à la deuxième température. La troisième section de tuyau est formée d'un type de matériau différent de la première section de tuyau.
PCT/IB2020/053264 2020-04-06 2020-04-06 Agencement de tuyau WO2021205199A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/IB2020/053264 WO2021205199A1 (fr) 2020-04-06 2020-04-06 Agencement de tuyau
GB2103417.8A GB2597820A (en) 2020-04-06 2021-03-12 Pipe arrangement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/IB2020/053264 WO2021205199A1 (fr) 2020-04-06 2020-04-06 Agencement de tuyau

Publications (1)

Publication Number Publication Date
WO2021205199A1 true WO2021205199A1 (fr) 2021-10-14

Family

ID=75623033

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2020/053264 WO2021205199A1 (fr) 2020-04-06 2020-04-06 Agencement de tuyau

Country Status (2)

Country Link
GB (1) GB2597820A (fr)
WO (1) WO2021205199A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3863612A (en) * 1973-09-17 1975-02-04 Gen Electric Cooling system
EP0694143B1 (fr) * 1993-03-27 1998-03-04 WIRSBO ROHRPRODUKTION UND VERTRIEBS-GmbH Raccordement de tuyauterie, element de raccordement de tuyauterie et dispositif hydraulique permettant de realiser des raccordements de tuyauterie
US20050274130A1 (en) * 2004-06-09 2005-12-15 Chen Kuo-Mei Atomized liquid jet refrigeration system
US20090145489A1 (en) * 2004-11-15 2009-06-11 Smc Corporation Temperature regulation method and system for low flow rate liquid
US20170314715A1 (en) * 2014-10-28 2017-11-02 General Electric Technology Gmbh Dissimilar piping joint at high temperature, high pressure transient and under cyclic loading

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1008967B (de) * 1956-01-19 1957-05-23 Phoenix Rheinrohr Ag Aus Kunststoff bestehendes UEbergangsstueck fuer Rohrleitungen, insbesondere fuer die Verbindung von Metall- mit Kunststoffrohrleitungen
DE202008009931U1 (de) * 2008-07-23 2009-12-10 Voss Automotive Gmbh Verbinder für Fluid-Leitungen
DE102014101113A1 (de) * 2014-01-30 2015-07-30 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB2560183B (en) * 2017-03-02 2019-12-18 Pegler Yorkshire Group Ltd Sealing pipe liner for connecting metal pipes to plastic pipes
CN111032244B (zh) * 2017-06-18 2022-06-14 福斯工业公司 复合式流体接头组件
DE202018104697U1 (de) * 2018-08-16 2019-11-20 Rehau Ag + Co Verbindungselement sowie dieses umfassende Rohrverbindung

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3863612A (en) * 1973-09-17 1975-02-04 Gen Electric Cooling system
EP0694143B1 (fr) * 1993-03-27 1998-03-04 WIRSBO ROHRPRODUKTION UND VERTRIEBS-GmbH Raccordement de tuyauterie, element de raccordement de tuyauterie et dispositif hydraulique permettant de realiser des raccordements de tuyauterie
US20050274130A1 (en) * 2004-06-09 2005-12-15 Chen Kuo-Mei Atomized liquid jet refrigeration system
US20090145489A1 (en) * 2004-11-15 2009-06-11 Smc Corporation Temperature regulation method and system for low flow rate liquid
US20170314715A1 (en) * 2014-10-28 2017-11-02 General Electric Technology Gmbh Dissimilar piping joint at high temperature, high pressure transient and under cyclic loading

Also Published As

Publication number Publication date
GB2597820A (en) 2022-02-09
GB202103417D0 (en) 2021-04-28

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