Classifications

• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
  • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
  • H10D84/101—Integrated devices comprising main components and built-in components, e.g. IGBT having built-in freewheel diode
  • H10D84/131—Thyristors having built-in components
  • H10D84/135—Thyristors having built-in components the built-in components being diodes
  • H10D84/136—Thyristors having built-in components the built-in components being diodes in anti-parallel configurations, e.g. reverse current thyristor [RCT]
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
  • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
  • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
  • H10D62/113—Isolations within a component, i.e. internal isolations
  • H10D62/114—PN junction isolations
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
  • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
  • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
  • H10D62/117—Shapes of semiconductor bodies
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
  • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
  • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
  • H10D62/124—Shapes, relative sizes or dispositions of the regions of semiconductor bodies or of junctions between the regions
  • H10D62/126—Top-view geometrical layouts of the regions or the junctions
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
  • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
  • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
  • H10D62/129—Cathode regions of diodes
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
  • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
  • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
  • H10D62/17—Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
  • H10D62/192—Base regions of thyristors
  • H10D62/206—Cathode base regions of thyristors
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
  • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
  • H10D62/50—Physical imperfections
  • H10D62/53—Physical imperfections the imperfections being within the semiconductor body 
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
  • H10D64/00—Electrodes of devices having potential barriers
  • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
  • H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
  • H10D64/291—Gate electrodes for thyristors
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
  • H10D8/00—Diodes
  • H10D8/411—PN diodes having planar bodies
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
  • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
  • H10D84/01—Manufacture or treatment
  • H10D84/0102—Manufacture or treatment of thyristors having built-in components, e.g. thyristor having built-in diode

Definitions

• the present invention relates to a reverse conducting power semiconductor device according to the preamble of claim 1 and to a method for manufacturing such reverse conducting power semiconductor device. Background of the invention
• the integrated gate commutated thyristor has been established as the device of choice for many high power applications such as medium voltage drives, STATCOMs, and pumped hydro.
• IGCTs have been optimized for current source inverter (CSI) and voltage source inverter (VSI) applications with state-of-the-art devices having voltage ratings ranging from 4.5kV up to 6.5kV and are today available as asymmetric, symmetric (reverse blocking), and reverse conducting (RC) devices.
• CSI current source inverter
• VSI voltage source inverter
• RC reverse conducting
• the integrated gate commutated thyristor is the ideal device of choice for many high-power electronics applications due to its thyristor like conduction and transistor like turn-off.
• the reverse conducting integrated gate commutated thyristor is a reverse conducting power semiconductor device that includes within one single semiconductor wafer an IGCT part and a single built-in freewheeling diode part.
• the diode part includes a p-doped anode layer and an n + -doped cathode layer, which are separated by the n -doped drift layer and the n-doped buffer layer.
• the diode part is circular and arranged adjacent to the IGCT part, in top view, in the center of the semiconductor wafer.
• n _ -doped separation region which separates the p-doped base layers of the thyristor cells in the IGCT part from the p-doped anode layer of the diode part.
• the diode part of the device is optimized with lifetime control to reduce the reverse recovery current peak, thereby decreasing reverse recovery losses and hence protect the diode from high power failures.
• the IGCT part of the semiconductor wafer does, however, not make use of any lifetime control.
• a metal mask with a thickness of around 0.5 mm (depending on ion energy and mechanical stability of the mask) is used to efficiently block the heavy ions and prevent generation of recombination centers in areas of the IGCT part.
• the forward conducting state and in the reverse conducting state only part of the semiconductor wafer is used for the current. Therefore, losses in forward or reverse conducting state are relatively high.
• a known reverse conducting power semiconductor device which was developed to decrease the on-state losses by making use of the whole semiconductor wafer in forward and reverse conducting state, respectively, is the bi-mode gate commutated thyristor (BGCT) as shown in Figs. 1 and 2.
• FIG. 1 shows the BGCT in top view and
• FIG. 2 shows the device in cross-section taken along line c’-c in FIG. 1.
• the BGCT comprises in a single semiconductor wafer 1 a plurality of thyristor cells 2 electrically connected in parallel to one another. In the BGCT shown in Figs.
• each of the thyristor cells 2 is made up from three thyristor cathode electrodes 3 in form of a cathode metallization layer, an n + -doped thyristor cathode layer comprising three stripe-shaped thyristor cathode layer segments 4, a p-doped base layer 5, an n _ -doped drift layer 6, an n-doped buffer layer 7, a p + -doped thyristor anode layer 8 and a thyristor anode electrode 9 in form of an anode metallization layer.
• the thyristor cells 2 also each include a gate electrode 10 in form of a gate metallization layer, which is in contact with the p-doped base layer 5.
• the gate metallization layer is arranged in a plane, which is below the plane, in which the thyristor cathode electrodes 3 are arranged, so that the gate electrodes 10 are vertically separated from the thyristor cathode electrodes 3.
• the BGCT includes one single common gate contact 11 in the form of an annular metallic region in the center of the semiconductor wafer 1.
• the common gate contact 11 is in direct contact with the gate metallization layer, so that the gate contact 11 and the gate electrodes 10 of all thyristor cells 2 are electrically connected with each other.
• the BGCT comprises a plurality of diode cells 12 distributed between the thyristor cells 2.
• the diode cells 12 are electrically connected in parallel to one another and to the thyristor cells 2, albeit with opposing forward direction.
• Each diode cell 12 includes a diode anode electrode 17, a p-doped diode anode layer 13, an n + -doped diode cathode layer 14, and a diode cathode electrode 16, wherein the p-doped diode anode layer 13 and the n + -doped diode cathode layer 14 are separated by the n -doped drift layer 6 and the n-doped buffer layer 7.
• a metal mask with a thickness of around 0.5 mm is used to selectively form an LLC region in the diode part of a known RC-IGCT (having a single diode part integrated in the same semiconductor wafer together with the IGCT part).
• the masked structures must be larger than the thickness of the mask.
• the width of the diode cells is in the same order or smaller than the required thickness of the metal mask.
• implantation of heavy ions has to be carried out at an inclination angle of 7° to the surface normal in order to avoid channeling. Therefore, the implantation of heavy ions is offset from the diode segment even at perfect alignment and avoiding implantation into the GCT regions becomes more critical.
• diode robustness is weak if the diode parts and the GCT- parts have different blocking junction depths.
• a turn-off power semiconductor device comprising a plurality of thyristor cells, each thyristor cell comprising a cathode region; a base layer; a drift layer; an anode layer; a gate electrode which is arranged lateral to the cathode region in contact with the base layer; a cathode electrode; and an anode electrode.
• Interfaces between the cathode regions and the cathode electrodes as well as interfaces between the base layers and the gate electrodes of the plurality of thyristor cells are flat and coplanar.
• the base layer includes a gate well region extending from its contact with the gate electrode to a depth, which is at least half of the depth of the cathode region, wherein, for any depth, the minimum doping concentration of the gate well region at this depth is 50% above a doping concentration of the base layer between the cathode region and the gate well region at this depth and at a lateral position, which has in an orthogonal projection onto a plane parallel to the first main side a distance of 2 pm from the cathode region.
• the base layer includes a compensated region of the second conductivity type, the compensated region being arranged directly adjacent to the first main side and between the cathode region and the gate well region, wherein the density of first conductivity type impurities relative to the net doping concentration in the compensated region is at least 0.4.
• a reverse-conducting power semiconductor device with a wafer having a first and a second main side, which are arranged opposite and parallel to each other.
• the device includes a plurality of diode cells and a plurality of gate commutated thyristors (GCT) cells.
• GCT gate commutated thyristors
• Each GCT cell includes layers of a first conductivity type (e.g., n-type) and a second conductivity type (e.g., p-type) between the first and second main sides.
• the device includes at least one mixed part in which diode anode layers of the diode cells alternate with first cathode layers of the GCT cells.
• a diode buffer layer of the first conductivity type is arranged between the diode anode layer and a drift layer such that the diode buffer layer covers lateral sides of the diode anode layer from the first main side to a depth of approximately 90% of the thickness of the diode anode layer.
• a reverse conducting (RC) thyristor of a planar- gate structure for low-and-medium power use which is relatively simple in construction because of employing a planar structure for each of thyristor and diode regions, permits simultaneous formation of the both region and have high-speed performance and a RC thyristor of a buried-gate or recessed-gate structure which has a high breakdown voltage by the use of a buried-gate or recessed-gate structure, permits simultaneous formation of thyristor and diode regions and high-speed, high current switching performance
• the RC thyristor of the planar-gate structure has a construction which comprises a static induction (SI) thyristor or miniaturized GTO of a planar-gate structure in the thyristor region and an SI diode of a planar structure in the diode region, the diode region having at its cathode side a Schottky contact between n emitting
• SI static induction
• the object of the invention to provide a reverse conducting power semiconductor device, which can overcome some or all of the above-described problems in the prior art.
• the object of the invention is attained by a reverse conducting power semiconductor device according to claim 1. Further developments of the invention are specified in the dependent claims.
• the reverse conducting power semiconductor device of the invention comprises a plurality of thyristor cells and a freewheeling diode integrated in a semiconductor wafer having a first main side and a second main side opposite to the first main side.
• Each of the plurality of thyristor cells comprises in an order from a first main side to the second main side: a thyristor cathode layer of a first conductivity type, a base layer of a second conductivity type different from the first conductivity type, wherein a first p-n junction is formed between the base layer and the thyristor cathode layer, a drift layer of the first conductivity type forming a second p-n junction with the base layer, and a thyristor anode layer of the second conductivity type separated from the base layer by the drift layer.
• Each thyristor cell further comprises a gate electrode which is arranged lateral to the thyristor cathode layer and forms an ohmic contact with the base layer, a thyristor cathode electrode arranged on the first main side and forming an ohmic contact with the thyristor cathode layer, and a thyristor anode electrode arranged on the second main side and forming an ohmic contact with the thyristor anode layer.
• the freewheeling diode comprises: at the first main side a diode anode layer of the second conductivity type, which forms a third p-n junction with the drift layer and which is separated from the base layer by the drift layer, on the first main side a diode anode electrode electrically connected to the diode anode layer, at the second main side a diode cathode layer of the first conductivity type, which is electrically connected to the drift layer, and on the second main side a diode anode electrode forming an ohmic contact with the diode cathode layer.
• the diode anode layer comprises plural first diode anode layer segments that are stripe shaped in an orthogonal projection onto a plane parallel to the second main side, a longitudinal main axis of each first diode anode layer segment extending in a lateral direction away from a lateral center of the semiconductor wafer, wherein the first lateral width of each first diode anode layer segment in a plane parallel to the second main side and in a direction perpendicular to its longitudinal main axis is at any position along the longitudinal main axis at least 1000 pm, or at least 1200 pm. That means that a minimal lateral width of each first diode anode layer segment is at least 1000 pm, or at least 1200 pm.
• lateral refers to a direction parallel to the second main side
• a lateral center of the semiconductor wafer is determined as a center in the plane parallel to the second main side.
• a center of an area is to be understood as the centroid, i.e. as the arithmetic mean position of all the points in the area.
• a stripe-shaped element is defined as any element having a width in a predetermined longitudinal direction, which is larger than in any other direction, wherein the width in the predetermined longitudinal direction is at least twice a width along any line perpendicular to the predetermined longitudinal direction.
• a longitudinal main axis of the stripe-shaped element extends along the predetermined longitudinal direction.
• the reverse conducting power semiconductor device of the invention implementing the freewheeling diode with the plural stripe-shaped first diode anode layer segments ensures a good thermal and electrical current spreading within the semiconductor wafer. Further, the segmentation of the freewheeling diode results in a less snappy behavior thereof, which in turn allows to reduce to the thickness of the semiconductor wafer resulting in decreased losses in reverse and in forward conduction state.
• the lower limit for the first lateral width of the stripe-shaped first diode anode layer segments results in lower forward conduction losses compared to the known BGCT. This can be explained by minimizing conductivity modulation due to reduced current spreading.
• the reverse conducting power semiconductor device of the invention comprises plural local lifetime control regions including radiation induced recombination centers, wherein each local lifetime control region is in an orthogonal projection onto a plane parallel to the second main side stripe-shaped and is in the orthogonal projection arranged within a corresponding one of the first diode anode layer segments such that a longitudinal main axis of each local lifetime control region extends along the longitudinal main axis of the corresponding one of the first diode anode layer segments, and each local lifetime control region has a second lateral width which is at least 200 pm or at least 300pm less than the first lateral width of the corresponding one of the first diode anode layer segments.
• the second lateral width is at least 200 pm or at least 300pm less than the first lateral width of the corresponding one of the first diode anode layer segments in each vertical cross section along a plane orthogonal to the second main side and orthogonal to the longitudinal main axis of the corresponding one of the first diode anode layer segments.
• a relatively high carrier lifetime at the edges of the drift layer portion in the stripe-shaped diode parts leads to injection of much more charge there than in the central part of the stripe-shaped diode parts.
• a central part refers to a part which is central regarding a direction perpendicular to the longitudinal main axis and parallel to the second main side).
• the freewheeling diode is a FCE diode that is enhanced by lifetime segmentation.
• the mountain of charge carriers gets an optimal lateral placement while the low-lifetime region ensures a reasonable diode reverse recovery peak current Irr. This results in a soft recovery of the freewheeling diode.
• the diode cathode layer comprises plural diode cathode layer segments, wherein each diode cathode layer segment is in the orthogonal projection onto the plane parallel to the second main side stripe-shaped and is in this orthogonal projection arranged within a corresponding one of the stripe-shaped first diode anode layer segments such that a longitudinal main axis of each diode cathode layer segment extends along the longitudinal main axis of the corresponding one of the first diode anode layer segments, and wherein each diode cathode layer segment has a third lateral width which is at least 200 pm or at least 300 pm less than the second lateral width of a corresponding one of the local lifetime control regions, wherein the corresponding one of the local lifetime control regions is arranged within the corresponding one of the first diode anode layer segments in the orthogonal projection onto the plane parallel to the second main side.
• the FCE effect during reverse recovery of the freewheeling diode is more pronounced, resulting in a soft recovery and less snappy behavior of the freewheeling diode.
• the third lateral width is at least 200 pm or at least 300 pm less than the second lateral width of a corresponding one of the local lifetime control regions in each vertical cross section along a plane orthogonal to the second main side and orthogonal to the longitudinal main axis of the corresponding one of the first diode anode layer segments.
• the semiconductor wafer has a circular shape and the longitudinal main axis of each first diode anode layer segment extends along a radial direction of this circular shape.
• each first diode anode layer segment is at any position along its longitudinal main axis less than 5000 pm or less than 4000 pm or less than 3000 pm. That means that a maximum of the first lateral width is less than 5000 pm or less than 4000 pm or less than 3000 pm.
• a circular shaped portion of the freewheeling diode is arranged in the orthogonal projection onto the plane parallel to the second main side. In such arrangement most efficient use is made of the available semiconductor wafer area.
• each first diode anode layer segment may laterally extend from the circular-shaped portion of the freewheeling diode.
• a length of each first diode anode layer segment in a direction along its longitudinal main axis is at least 20% or at least 25% of a width of the semiconductor wafer in this direction.
• the diode anode layer comprises stripe-shaped second diode anode layer segments that extend along radial directions that are arranged laterally between two adjacent first diode anode layer segments, respectively, a distance between each second diode anode layer segment and the lateral center of the semiconductor wafer being larger than a distance between each first diode anode layer segment and the lateral center of the semiconductor wafer.
• a variation of a distance between neighboring stripe-shaped diode anode layer segments may be reduced and thermal spreading is enhanced.
• the minimum of the first lateral width of each first diode anode layer segment is less than 2000 pm. With such parameter the thermal performance is improved and the freewheeling diode exhibits less snappy behavior than in the known RC-IGCT.
• the third lateral width is at least 600 pm less or at least 800 pm less than the first lateral width of the corresponding one of the first diode anode layer segments.
• the FCE effect during reverse recovery of the freewheeling diode is more pronounced, resulting in soft recovery and less snappy behavior of the freewheeling diode.
• the third lateral width is at least 600 pm less or at least 800 pm less than the first lateral width of the corresponding one of the first diode anode layer segments in each vertical cross section along a plane orthogonal to the second main side and orthogonal to the longitudinal main axis of the corresponding one of the first diode anode layer segments.
• a depth of each base layer and a depth of the diode anode layer are the same.
• the diode robustness is improved compared to a known BGCT with different junction depth of diode (i.e. the depth of the diode anode layer) and GCT parts (i.e. depth of the base layer).
• the base layer and the diode anode layer can be formed in the same process step simultaneously. Therefore, the manufacturing of the reverse conducting power semiconductor device is facilitated.
• the gate electrodes of the plurality of thyristor cells are electrically connected with each other, and the device further comprises a common gate contact for contacting the gate electrodes of the plurality of thyristor cells, wherein the common gate contact is arranged on a circumferential edge of the semiconductor wafer on the first main side.
• the thyristor cathode layer comprises plural separate thyristor cathode layer segments that are at least partially surrounded in a plane parallel to the first main side by a gate metallization layer forming the plurality of gate electrodes and connections there between.
• the thyristor cathode layer segments of the plurality of thyristor cells may be arranged at the first main side as stripes placed in concentric rings around the lateral center of the semiconductor wafer, the longitudinal main axis of each stripe extending along a radial direction which is a direction extending from the lateral center of the semiconductor wafer and parallel to the first main side.
• fast commutation of the conduction current from the cathode to the gate is facilitated.
• a reverse conducting power semiconductor device may be manufactured by a method according to claim 15.
• FIG. 1 shows a top view onto a bi-mode gate commutated thyristor (BGCT), which is a known turn-off power semiconductor device;
• BGCT bi-mode gate commutated thyristor
• FIG. 2 shows a cross-section of the BGCT taken along line c’c in FIG. 1;
• FIG. 3 shows a top view onto a reverse conducting power semiconductor device according to an embodiment of the invention
• FIG. 4 shows an enlarged portion A of the top view of FIG. 3;
• FIG. 5 shows a partial vertical cross-section along line B-B’ in FIG. 4;
• FIG. 6 shows an orthogonal projection of a stripe-shaped freewheeling diode part of the reverse conducting power semiconductor device of FIG. 3 onto a horizontal plane;
• FIG. 7 shows a snap-off voltage peak of the reverse conducting power semiconductor device of FIG. 3 for different widths of the lifetime control region (proton irradiation width);
• FIG. 8 shows a snap-off voltage peak of the reverse conducting power semiconductor device of FIG. 3 for different widths of diode cathode layer segments
• FIG. 9 shows a top view onto a reverse conducting power semiconductor device according to a second embodiment.
• FIGs. 10A and 10B illustrate method steps for manufacturing the reverse conducting power semiconductor device according to an embodiment of the invention.
• FIG. 3 shows a top view onto the reverse conducting power semiconductor device
• FIG. 4 shows an enlarged portion A of the top view of FIG. 3
• FIG. 5 shows a partial vertical cross-section along line B-B' in FIG. 4
• FIG. 6 shows an orthogonal projection of a part of the reverse conducting power semiconductor device onto a horizontal plane.
• the reverse conducting power semiconductor device according to the first embodiment comprises a semiconductor wafer 20 having a first main side 21 and a second main side 22.
• a plurality of thyristor cells 50 and a freewheeling diode 60 are integrated in the semiconductor wafer 20.
• Each thyristor cell 50 comprises in the order from the first main side 21 to the second main side 22:
• Each thyristor cell 50 further comprises a gate electrode 55, which is arranged lateral to the thyristor cathode layer 51 and forms an ohmic contact with the base layer 52, a thyristor cathode electrode 56 arranged on the first main side 21 and forming an ohmic contact with the thyristor cathode layer 51, and a thyristor anode electrode 57 arranged on the second main side 22 and forming an ohmic contact with the thyristor anode layer 54.
• the freewheeling diode 60 integrated in the semiconductor wafer 20 comprises: • at the first main side 21, a p-type diode anode layer 32, which diode anode layer 32 forms a third p-n-junction with the drift layer 53 and which is separated from the base layer 52 by the drift layer 53;
• a diode anode electrode 31 electrically connected to the diode anode layer 32;
• an n-type diode cathode layer 33 which is electrically connected to the drift layer 53 through the buffer layer 55 (throughout the specification, if two semiconductor regions of the same conductivity type are described to be electrically connected it shall mean that these two semiconductor regions are either in direct contact or are connected to each other by one or more semiconductor regions of the same conductivity type or are connected to each other by a metal); and
• a diode cathode electrode 36 forming an ohmic contact with the diode cathode layer 33.
• the base layers 52 of thyristor cells 50 are separated from the diode anode layer 32 by a separation region 70 comprising at least a portion of the drift layer 53.
• the diode anode layer 32 comprises plural first diode anode layer segments 321 which correspond in the top view of FIG. 3 and in the partial top view of FIG. 4 to stripe shaped portions 31a of the diode anode electrode 31 extending on the first main side 21 on first diode anode layer segments 321.
• the diode anode electrode 31 is shown in light gray color.
• each first diode anode layer segment 321 has a longitudinal main axis MA extending in a direction away from a lateral center of the semiconductor wafer 20.
• the longitudinal main axis MA may be defined as a direction, in which the first diode anode layer segment 321 has its largest extension.
• the longitudinal main axis MA forms an axis of symmetry of the first diode anode layer segment 321 in top view (i.e. in an orthogonal projection onto a plane parallel to the second main side 22) with regard to reflection (i.e. the projection of the first diode anode layer segment 321 has mirror symmetry relative to the longitudinal main axis MA).
• the semiconductor wafer 20 has a circular shape and the longitudinal main axis MA of each first diode anode layer segment 321 extends along a radial direction from the lateral center of the circular shaped semiconductor wafer 20.
• the stripe-shaped first diode anode layer segment 321 has, in a vertical cross- section along a plane perpendicular to the second main side 22 and perpendicular to the longitudinal main axis MA of the first diode anode layer segment 321, a first lateral width wl . It is to be mentioned that in FIG. 5 only half of the stripe-shaped portion of the freewheeling diode 60, which corresponds to the first diode anode layer segment 321, is shown. Therefore, a width 0.5 x wl of the first diode anode layer segment 321 is indicated in FIG. 5.
• the first lateral width wl of the first diode anode layer segment 321 may vary along the longitudinal main axis MA of the first diode anode layer segment 321.
• the first lateral width wl of each first diode anode layer segment 321 in a direction perpendicular to its longitudinal main axis MA is at any position along the longitudinal axis MA at least 1000 pm or at least 1200 pm (i.e. a minimum of the first lateral width wl is at least 1000 pm or at least 1200 pm).
• a maximum of the first lateral width wl of each first diode anode layer segment 321 may be less than 5 times the minimal lateral width or less than four times the minimal lateral width of that first diode anode layer segment 321.
• the first lateral width wl of each first diode anode layer segment 321 may be at any position along the longitudinal axis less than 5000 pm or less than 4000 pm or less than 3000 pm (i.e. a maximum of the first lateral width is less than 5000 pm or less than 4000 pm or less than 3000 pm).
• the minimum of the first lateral width wl of each first diode anode layer segment 321 in the direction perpendicular to its longitudinal main axis MA is less than 2000 pm, so that the minimum of the first lateral width wl is in a range between 1000 pm and 2000 pm or in a range between 1200 pm and 2000 pm.
• a length of each first diode anode layer segment 321 in a direction along its longitudinal main axis MA is exemplarily as shown in FIG. 3 at least 20% or at least 25% of a width or diameter of the semiconductor wafer 20 in this direction.
• the reverse conducting power semiconductor device comprises in addition plural local life time control regions 91 in an area close to the p-n-junction between first diode anode layer segments 321 and drift layer 53.
• Each local life time control region 91 includes radiation induced recombination centers.
• each local life time control region 91 is stripe-shaped and is arranged within a corresponding one of the first diode anode layer segments 321 in such orthogonal projection, such that a longitudinal main axis of each local life time control region 91 extends along the longitudinal main axis MA of one of the first diode anode layer segments 321 in the orthogonal projection. That means that each local life time control region 91 and the corresponding first diode anode layer segment 321 share the same longitudinal main axis MA.
• each local life time control region 91 has mirror symmetry with the longitudinal main axis MA as an axis of symmetry regarding reflection like the corresponding first diode anode layer segment 321.
• each local life time control region 91 has in each vertical cross- section along a plane orthogonal to the second main side 22 and orthogonal to the longitudinal main axis MA of the corresponding one of the first diode anode layer segment 321 a second lateral width w2 which is at least 200 pm or at least 300 pm less than the first lateral width wl of the corresponding one of the first diode anode layer segment 321 in this vertical cross-section.
• additional second local life time control regions 92 may be arranged (optional) at a larger depth in the drift layer 53 as shown in FIG. 5.
• a lateral width of such additional second local life time control region 92 may be the same as that of the local life time control regions 91.
• the diode cathode layer 33 comprises plural diode cathode layer segments 331, wherein each diode cathode layer segment 331 is in the orthogonal projection onto a plane parallel to the second main side 22 stripe-shaped and is in this orthogonal projection arranged within a corresponding one of the stripe-shaped first diode anode layer segments 321 such that a longitudinal main axis of each diode cathode layer segment 331 extends along the longitudinal main axis MA of the corresponding one of the first diode anode layer segments 321. That means that each diode cathode layer segment 331 and the corresponding first diode anode layer segment 321 share the same longitudinal main axis MA.
• each diode cathode layer segment 331 has mirror symmetry with the longitudinal main axis MA as an axis of symmetry regarding reflection similar to the mirror symmetry of the corresponding first diode anode layer segment 321.
• Each diode cathode layer segment 331 has in each vertical cross section along a plane orthogonal to the second main side 22 and orthogonal to the longitudinal main axis MA of the corresponding one of the first diode anode layer segments 321, a third lateral width w3 which is at least 200 pm or at least 300 pm less than the second lateral width w2 of a corresponding one of the local lifetime control regions 91 in this cross section, wherein the corresponding one of the local lifetime control regions 91 is arranged within the corresponding one of the first diode anode layer segments 321 in the orthogonal projection onto the plane parallel to the second main side 22.
• FIG. 6 shows a top view (orthogonal projection onto a plane parallel to the second main side 22) of a section of a first diode anode layer segment 321, a corresponding section of a corresponding lifetime control region 91 and a section of a corresponding diode cathode layer segment 331 which overlap with each other in this orthogonal projection.
• the first lateral width wl, the second lateral width w2 and the third lateral width w3 are shown to be constant. However, as set out above, these lateral widths wl, w2 and w3 may vary along the longitudinal main axis MA within limits set out above.
• Each first diode anode layer segment 321, the corresponding lifetime control region 91, the corresponding diode cathode layer segment 331 and finger portion 3 la of diode anode electrode 31 correspond to a stripe-shaped portion of the freewheeling diode 60.
• each diode cathode layer segment 331 may have, in each vertical cross section along a plane orthogonal to the second main side 22 and orthogonal to the longitudinal main axis MA of the corresponding one of the first diode anode layer segments 321 a third lateral width w3 which is at least 600 pm less or at least 800 pm less than the first lateral width wl of the corresponding one of the first diode anode layer segments 321 in this cross section.
• the diode anode electrode 31 comprises, besides the first finger portions 31a corresponding to the first diode anode layer segments 321, second finger portions 3 lb and third finger portions 3 lc.
• a longitudinal main axis of all these finger portions 3 la, 3 lb and 3 lc extends from a lateral center of the semiconductor wafer 20 in a radial direction.
• the diode anode electrode 31 comprises a circular shaped portion 3 Id, from which the first finger portions 31a extend in the radial direction.
• the second finger portion 31b extend in the radial direction between two neighboring first finger portions 31a, respectively.
• the second finger portions 3 lb are shorter than the first finger portions 31a and are separated from the circular portion 3 Id.
• Third finger portions 31c extend in the radial direction between a first finger portion 31a and a closest second finger portion 31b.
• Third finger portions 3 lc are shorter than the first finger portions 31a and also shorter than the second finger portions 3 lb.
• Third finger portions 3 lc are separated from the circular portion 3 Id by a larger distance than the second finger portions 31b.
• each first finger portion 31a corresponds to a first diode anode layer segment 321 and have each a longitudinal main axis extending, in an orthogonal projection onto a plane parallel to the second main side 22, along the longitudinal main axis MA of a corresponding one of the first diode anode layer segments 321.
• each finger portion of the freewheeling diode 60 corresponding to each of the second, third and fourth finger portions 31b, 31c and 31e of the diode anode electrode 31 has the same structure as described above with reference to FIG. 5 for the finger portions of the freewheeling diode 60 which correspond to first finger portions 31a.
• the stripe-shaped diode anode layer segments 321 corresponding to the second finger portions 31b are referred to as second diode anode layer segments 321.
• the thyristor cathode layers 51 of the plural thyristor cells 50 comprise plural thyristor cathode layer segments 511, which are stripe-shaped and separate from each other.
• the finger portions of the thyristor cathode electrode 56 have the same or a corresponding pattern and shape as the thyristor cathode layer segments 511. As can be seen best from FIG.
• the thyristor cathode layer segments 511 are arranged at the first main side 21 as stripes placed in concentric rings around the lateral center of the semiconductor wafer 20, wherein a longitudinal main axis of each stripe extends along a radial direction (which is a direction extending from the lateral center of the semiconductor wafer 20 and parallel to the first main side 21).
• the thyristor cathode layer segments 511 have the same distance to the lateral center of the semiconductor wafer 20.
• the thyristor cathode layer segments 511 may be placed in twelve concentric rings. However, the number of concentric rings may be any other number.
• plural concentric rings are provided.
• groups of thyristor cathode layer segments 511 alternate with finger portions 3 la to 3 lc, 3 le.
• groups of directly adjacent thyristor cathode layer segments 511 alternate only with first finger portions 31a along each ring, respectively.
• groups of directly adjacent thyristor cathode layer segments 511 alternate with first and second finger portions 3 la and 3 lb along each ring, respectively.
• the finger portions of the thyristor cathode electrode 56 corresponding to the thyristor cathode layer segments 511 are shown as black stripes.
• the gate electrodes 55 of the plurality of thyristor cells 50 are electrically connected with each other, and the reverse conducting power semiconductor device further comprises a common gate contact 40 for contacting the gate electrodes 55 of the plurality of thyristor cells 50, wherein the common gate contact 40 is arranged on a circumferential edge of the semiconductor wafer 20 on the first main side 21.
• the first diode anode layer segments 321 extend in the radial direction through all of the concentric rings, in which the thyristor cathode layer segments 511 are arranged.
• the flow of gate current to (or from) a common gate contact 40 at the circumferential edge of the semiconductor wafer 20 from (or to) the thyristor cells 50 is not obstructed by the finger portions of the freewheeling diode corresponding to the stripe-shaped first diode anode layer segments 321. This facilitates in particular current commutation during turn-off.
• FIG. 9 a top view of a reverse conducting power semiconductor according to a second embodiment of the invention is shown.
• the areas in light gray color correspond to areas of the diode anode electrode 31.
• Four first finger portions 301a and four second finger portions 301b of the diode anode electrode 31 extend from a lateral center of the semiconductor wafer 20 in a radial direction.
• Additional third finger portions 301c extend respectively from the four finger portions 301a in a direction away from a lateral center of semiconductor wafer 20.
• the first and second finger portions 301a and 301b are arranged with rotational symmetry.
• Each of the finger portions 301a to 301c corresponds to a stripe-shaped portion of the freewheeling diode 60 and has a structure as shown in cross-section in FIG. 5 and as described above with reference to FIG. 5.
• the thyristor cells 50 in the reverse conducting power semiconductor device according to the second embodiment differ from the thyristor cells 50 in the first embodiment only in a different arrangement in top view.
• the cathode layer segments 511 illustrated as black stripes in FIG. 9 are arranged along a longitudinal main axis of stripes laterally extending between directly adjacent finger portions 301b, 301c, respectively. That means the cathode layer segments 511 extend in a direction inclined to the radial direction.
• the structure of thyristor cells 50 of the reverse conducting power semiconductor device according to the second embodiment is basically the same as shown in cross-section in FIG. 5 and as described above with reference to FIG. 5.
• FIG. 7 shows a graph illustrating the dependency of the snap-off voltage VRMsn of the freewheeling diode 60 on the second lateral width w2 of the lifetime control region 91 for a stripe-shaped freewheeling diode 60 with a first lateral width wl of 1200 pm and a third lateral width w3 of 200 pm.
• the different symbols, namely the triangle, the filled circle and the hollow circle correspond to a different proton irradiation dose, respectively (indicated as 1E+13, 2E+13 and 4E+14 in FIG. 7).
• FIG. 8 shows a graph illustrating the dependency of the snap-off voltage on the third lateral width w3 for a freewheeling diode 60 with a first lateral width wl of 1200 pm and a second lateral width w2 of 800 pm.
• a decreasing third lateral width w3 results in a decreased snap-off voltage VRMsn.
• the second openings 241 comprise stripe-shaped openings that are laterally aligned with regions of the semiconductor layer 200 in which the first diode anode layer segments 321 are to be formed such that, in an orthogonal projection onto a plane parallel to the first side 201, each second opening 241 is arranged within a projection area of a corresponding one of the first diode anode layer segments 321, the stripe-shaped openings 241 having a lateral width w4, which is at least at least 200 pm or at least 300 pm less than the lateral width wl of a corresponding one of the first diode anode layer segments 321 at all positions along a longitudinal main axis MA of the corresponding one of the first diode anode layer segments 321 in the final reverse conducting power semiconductor device.
• the reverse conducting power semiconductor device are described with a circular semiconductor wafer 20.
• the semiconductor wafer may have any other shape such as a rectangular or a polygon shape.

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• 2021
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