WO2021152705A1 - 基板処理装置、半導体装置の製造方法及びプログラム - Google Patents
基板処理装置、半導体装置の製造方法及びプログラム Download PDFInfo
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- WO2021152705A1 WO2021152705A1 PCT/JP2020/003022 JP2020003022W WO2021152705A1 WO 2021152705 A1 WO2021152705 A1 WO 2021152705A1 JP 2020003022 W JP2020003022 W JP 2020003022W WO 2021152705 A1 WO2021152705 A1 WO 2021152705A1
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a batch of workpieces
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
Definitions
- This disclosure relates to a substrate processing apparatus, a manufacturing method and a program of a semiconductor apparatus.
- Patent Document 1 describes a substrate processing apparatus that forms a film on the surface of a substrate in a state where the substrate is held in multiple stages by a substrate holder in a processing furnace.
- a gap is provided between the top plate of the substrate holder and the inner surface of the reaction tube constituting the processing furnace for accommodating the substrate holder. Need to form. Further, since the product substrate used as a product has a larger surface area than a monitor substrate or a dummy substrate not used as a product, a large amount of processing gas is consumed when processing the substrate.
- the uniformity of the formed film may deteriorate due to the excess gas generated in the gap between the top plate of the substrate holder and the inner surface of the reaction tube. Such deterioration of uniformity is called a loading effect.
- the object of the present disclosure is to improve the in-plane uniformity of the film formed on the substrate.
- a board holder that arranges and holds the boards, A reaction tube for accommodating the substrate holder is provided inside.
- the substrate holder is A plurality of pillars extending in a direction substantially perpendicular to the substrate around the substrate to be arranged, a top plate in which one end of each of the plurality of pillars is fixed to each other and an opening is provided in the center, and the plurality of pillars.
- the reaction tube has a protruding portion having a flat tip that protrudes inward in a shape corresponding to the shape of the opening.
- the protrusion is provided so as to be inserted into the opening while the substrate holder is housed in the reaction tube, and is arranged on a substrate closest to the top plate of the substrate holder rather than the top plate.
- the technology to approach is provided.
- FIG. 6A is a side sectional view for explaining the relationship between the substrate holder and the inner tube according to the embodiment of the present disclosure.
- FIG. 6B is an enlarged view for explaining the periphery of the recess 204c of FIG. 6A.
- FIG. 9 (A) is a diagram showing the distribution of SiCl 2 partial pressure in the processing furnace in the case of supplying the Si 2 Cl 6 gas onto the wafer by using a process furnace according to the comparative example
- FIG. 9 (B ) is a diagram showing the distribution of SiCl 2 partial pressure in the processing furnace 202 in the case of supplying the Si 2 Cl 6 gas onto the wafer by using the processing furnace 202 according to the present embodiment.
- Figure 10 (A) is, SiCl 2 partial pressure on the wafer in each slot number of the case of supplying the Si 2 Cl 6 gas onto the wafer by using the processing furnace 202 according to the processing furnace and the embodiment according to the comparative example It is a figure which shows the uniformity between the wafer surfaces which evaluated the average value of.
- FIG. 10B shows the center of the wafer and the end of the wafer at each slot number when Si 2 Cl 6 gas is supplied onto the wafer using the processing furnace according to the comparative example and the processing furnace 202 according to the present embodiment. It is a figure which shows the uniformity in the wafer surface which compared the numerical value which divided the difference by the average value.
- FIG. 1 is a schematic configuration diagram of a substrate processing device 101 according to an embodiment of the present disclosure.
- FIG. 2 is a side sectional view of the processing furnace 202 according to the embodiment of the present disclosure.
- the substrate processing apparatus 101 according to the present embodiment is configured as a vertical apparatus that performs oxidation, diffusion processing, thin film forming processing, and the like on a substrate such as a wafer.
- the substrate processing apparatus 101 is configured as a batch type vertical heat treatment apparatus.
- the substrate processing apparatus 101 includes a housing 111 in which a main portion such as a processing furnace 202 is provided.
- a pod (also referred to as a FOUP) 110 is used as the substrate transport container (wafer carrier) into the housing 111.
- the pod 110 is configured to accommodate, for example, 25 wafers 200 as a substrate made of silicon (Si), silicon carbide (SiC), or the like.
- a pod stage 114 is arranged on the front side of the housing 111. The pod 110 is configured to be placed on the pod stage 114 with the lid closed.
- a pod transfer device 118 is provided on the front side (right side in FIG. 1) of the housing 111 and at a position facing the pod stage 114. In the vicinity of the pod transfer device 118, a pod mounting shelf 105, a pod opener (not shown), and a wafer number detector are provided.
- the pod mounting shelf 105 is arranged above the pod opener and is configured to hold a plurality of pods 110 in a mounted state.
- the wafer number detector is provided adjacent to the pod opener.
- the pod transfer device 118 includes a pod elevator 118a that can move up and down while holding the pod, and a pod transfer mechanism 118b as a transfer mechanism.
- the pod transfer device 118 is configured to transfer the pod 110 between the pod stage 118, the pod mounting shelf 105, and the pod opener by the continuous operation of the pod elevator 118a and the pod transfer mechanism 118b.
- the pod opener is configured to open the lid of the pod 110.
- the wafer number detector is configured to detect the number of wafers 200 in the lid-opened pod 110.
- a wafer transfer machine 125 and a boat 217 as a substrate holder are provided in the housing 111.
- the wafer transfer machine 125 has an arm (tweezer) 125c, and has a structure capable of raising and lowering in the vertical direction and rotating in the horizontal direction by a driving means (not shown).
- the arm 125c is configured so that, for example, five wafers can be taken out at the same time.
- the wafer 200 is configured to be transported between the pod 110 and the boat 217 placed at the position of the pod opener.
- the pod 110 is placed on the pod stage 114 by an in-process transfer device (not shown) so that the wafer 200 is in a vertical position and the wafer loading / unloading port of the pod 110 faces upward.
- the pod 110 is rotated by the pod stage 114 in the vertical direction by 90 ° toward the rear of the housing 111.
- the wafer 200 in the pod 110 is in a horizontal posture, and the wafer loading / unloading port of the pod 110 faces the rear in the housing 111.
- the pod 110 is automatically transported to a designated shelf position of the pod mounting shelf 105 by the pod transport device 118, delivered, and temporarily stored, and then the pod is temporarily stored from the pod loading shelf 105. Transferred to the opener or transported directly to the pod opener.
- the pod 110 When the pod 110 is transferred to the pod opener, the pod 110 can be opened by the pod opener. Then, the number of wafers in the pod 110 is detected by the wafer number detector of the pod 110 whose lid is opened.
- the wafer 200 is picked up from inside the pod 110 by the arm 125c of the wafer transfer machine 125 through the wafer loading / unloading port, and is loaded (charged) into the boat 217 by the transfer operation of the wafer transfer machine 125.
- the wafer transfer machine 125 which has delivered the wafer 200 to the boat 217, returns to the pod 110 and loads the next wafer 200 into the boat 217.
- the wafer 200 and the pod 110 are carried out from the processing furnace 202 (boat unloading), the wafer 200 is removed (discharged) from the boat 217 in the reverse procedure of the above procedure, and the wafer 200 and the pod 110 are removed (discharged) from the boat 217 to the outside of the housing 111. It will be paid out.
- the processing furnace 202 includes a reaction tube 203 constituting a processing container.
- the reaction tube 203 includes an inner tube 204 as an inner tube and an outer tube 205 as an outer tube provided on the outer side thereof.
- the inner tube 204 is made of a heat-resistant material such as quartz (SiO 2) or silicon carbide (SiC).
- quartz SiO 2
- SiC silicon carbide
- the inner tube 204 is formed in a cylindrical shape in which the upper end is closed and the lower end is open.
- the inner tube 204 forms a processing chamber 201 that performs a process of forming a thin film on the wafer 200 inside the inner tube 204.
- the processing chamber 201 is configured so that the wafer 200 can be accommodated in a state where the wafer 200 is aligned and held in multiple stages in the vertical direction in a horizontal posture by a boat 217.
- the inner pipe 204 has one or more bulging portions 207 formed by extending from the outer peripheral surface toward the outer pipe 205 side and bulging outward on the side surface.
- a nozzle chamber 201a extending in the vertical direction is formed in the bulging portion 207, and the nozzle chamber 201a is configured to accommodate the nozzles 230b and 230c described later.
- the inner tube 204 has an outlet 215 which opens at a position facing the arranged wafers on the outer peripheral surface opposite to the nozzle chamber 201a and allows an atmosphere to flow out into the tubular space 250 between the inner tube 204 and the outer tube 205. ..
- the outer pipe 205 has a pressure-resistant structure and airtightly accommodates the inner pipe 204. Further, the outer pipe 205 may be provided concentrically with the inner pipe 204.
- the outer tube 205 has an inner diameter larger than the outer diameter of the inner tube 204, and is formed in a cylindrical shape in which the upper end is closed and the lower end is open.
- the outer tube 205 is made of a heat-resistant material such as quartz or silicon carbide. In such a reaction tube configuration, the gas flow (convection) formed in parallel to the respective surfaces of the plurality of wafers 200 is dominantly responsible for mass transfer to the vicinity of the surface. At this time, the reaction tube 203 is called a cross-flow reaction tube.
- the nozzle 230b and the nozzle 230c extend in parallel with the arrangement axis (arrangement direction) of the wafer 200 and are arranged in the bulging portion 207.
- the nozzle 230b and the nozzle 230c may be provided in an arcuate space between the inner wall of the inner tube 204 and the wafer 200.
- the nozzle 230b and the nozzle 230c may each be composed of a U-shaped and linear quartz pipe whose tip is closed.
- Gas supply holes 234b and gas supply holes 234c as gas supply ports for supplying gas to each of the arranged wafers 200 are provided on the side surfaces of the nozzle 230b and the nozzle 230c.
- the gas supply holes 234b and 234c each have the same or inclined opening area from the lower part to the upper part, and a plurality of gas supply holes 234b and 234c are provided at the same pitch.
- the upstream ends of the nozzle 230b and the nozzle 230c are connected to the downstream ends of the gas supply pipe 232b and the gas supply pipe 232c, respectively. Further, the nozzles 230b and 230c are configured so as not to have gas supply holes 234b and 234c at positions corresponding to a plurality of arrangement positions surrounded by the cover 400 described later.
- the nozzles 230b and 230c have gas supply holes 234b and 234c at positions corresponding to a plurality of wafers 200 such as a product substrate or a monitor substrate held at a plurality of arrangement positions between the cover 400 and the top plate 211, which will be described later. It is configured to have.
- the gas flow (convection) formed in parallel to the respective surfaces of the plurality of wafers 200 is dominantly responsible for mass transfer to the vicinity of the surface.
- the reaction tube 203 is called a cross-flow reaction tube.
- a heater 206 As a furnace body is provided concentrically surrounding the side wall surface and the ceiling surface of the reaction tube 203.
- the heater 206 is formed in a cylindrical shape.
- the heater 206 is vertically installed by being supported by a heater base as a holding plate (not shown).
- a temperature sensor 263 as a temperature detector is installed in the reaction tube 203 (for example, between the inner tube 204 and the outer tube 205, inside the inner tube 204, etc.).
- a temperature control unit 238, which will be described later, is electrically connected to the heater 206 and the temperature sensor 263.
- the temperature control unit 238 controls the energization condition to the heater 206 at a predetermined timing based on the temperature information detected by the temperature sensor 263 so that the temperature in the processing chamber 201 has a predetermined temperature distribution. It is configured.
- a manifold (inlet adapter) 209 is arranged concentrically with the outer pipe 205.
- the manifold 209 is made of, for example, stainless steel.
- the manifold 209 is formed in a cylindrical shape with open upper and lower ends.
- the manifold 209 is provided so as to engage with the lower end of the inner pipe 204 and the lower end of the outer pipe 205, or to support the lower end of the inner pipe 204 and the lower end of the outer pipe 205, respectively. It has been done.
- An O-ring 220a as a sealing member is provided between the manifold 209 and the outer pipe 205. Since the manifold 209 is supported by a heater base (not shown), the reaction tube 203 is vertically installed.
- a processing container is mainly formed by the reaction tube 203 and the manifold 209.
- a boat 217 as a substrate holder is carried in from the lower side of the lower end opening of the manifold 209 and accommodated.
- the boat 217 is made of a heat resistant material such as quartz or silicon carbide.
- the boat 217 is a plurality of pillars, for example, three pillars 212, a ring-shaped top plate 211 having an opening at the center for fixing the upper ends of the three pillars 212 to each other, and three.
- a disk-shaped bottom plate 210 for fixing the lower ends of the book pillars 212 to each other is provided.
- the boat 217 is configured to hold a plurality of wafers 200 arranged at predetermined intervals in a horizontal posture and centered on each other. Further, the boat 217 has a plurality of disk-shaped heat insulating plates 216 as heat insulating members arranged in a horizontal posture below the wafer processing region in which the wafers 200 are arranged, which is the lower part of the boat 217. It is configured to be arranged and held at predetermined intervals with the centers aligned.
- the heat insulating plate 216 is made of a heat-resistant material such as quartz or silicon carbide. The heat insulating plate 216 is configured to make it difficult to transfer the heat from the heater 206 to the manifold 209 side.
- a cover 400 that covers the periphery of the boat 217 is provided below the boat 217 and above the heat insulating region on which the heat insulating plate 216 is loaded below the wafer processing region.
- the cover 400 surrounds a plurality of arrangement positions including the arrangement position closest to the bottom plate 210 among the arrangement positions (also referred to as loading positions) of the wafer 200 on the boat 217 from the upper surface and the side surface.
- the boat 217 does not hold the wafer 200 such as a product substrate or a monitor substrate at a plurality of arrangement positions surrounded by the cover 400.
- These arrangement positions can correspond to the positions where the dummy substrate is arranged because sufficient uniformity cannot be obtained in the past.
- the boat 217 is configured to hold a plurality of wafers 200 such as a product substrate and a monitor substrate at a plurality of arrangement positions between the cover 400 and the top plate 211.
- nozzles 230b and nozzles 230c for supplying, for example, nitrogen (N 2 ) gas as carrier gas into the processing chamber 201 are provided so as to communicate with each other in the processing chamber 201.
- the gas supply pipe 232a is provided with a carrier gas source 300a, a mass flow controller 241a as a flow rate controller (flow rate control means), and a valve 310a in this order from the upstream side.
- a gas flow rate control unit 235 which will be described later, is electrically connected to the valve 310a and the mass flow controller 241a.
- the gas flow rate control unit 235 is configured to control the start and stop of the carrier gas supply into the processing chamber 201, the supply flow rate, and the like at predetermined timings.
- the carrier gas supply system is mainly composed of a valve 310a, a mass flow controller 241a, a gas supply pipe 232a, a gas supply pipe 232b, a nozzle 230b, a gas supply pipe 232c, and a nozzle 230c.
- the carrier gas supply system including the carrier gas source 300a may be considered.
- a nozzle 230b for supplying, for example, hexachlorodisilane (Si 2 Cl 6 , abbreviated as HCDS) gas as an example of the raw material gas (Si-containing gas) into the processing chamber 201 communicates with the inside of the processing chamber 201. It is provided as follows. The upstream end of the nozzle 230b is connected to the downstream end of the gas supply pipe 232b. The gas supply pipe 232b is provided with a Si raw material gas source 300b, a mass flow controller 241b, and a valve 310b in this order from the upstream side. With the above configuration, it is possible to control the supply flow rate of the Si raw material gas supplied into the processing chamber 201, and the concentration and partial pressure of the Si raw material gas in the processing chamber 201.
- HCDS hexachlorodisilane
- a gas flow rate control unit 235 which will be described later, is electrically connected to the valve 310b and the mass flow controller 241b.
- the gas flow rate control unit 235 is configured to control the start and stop of the supply of Si raw material gas into the processing chamber 201, the supply flow rate, and the like at predetermined timings.
- the valve 310b, the mass flow controller 241b, the gas supply pipe 232b, and the nozzle 230b constitute the Si raw material gas supply system according to the present embodiment.
- the Si raw material gas supply system may be considered including the Si raw material gas source 300b.
- Niriding raw material gas supply system On the side wall of the manifold 209, as an example of the reforming raw material (reaction gas or reactor), for example, ammonia (NH 3 ), nitrogen (N 2 ), nitrous oxide (N 2 O), monomethylhydrazine (CH) which are nitride raw material gases.
- a nozzle 230c for supplying gas such as 6 N 2 ) into the processing chamber 201 is provided so as to communicate with the inside of the processing chamber 201.
- the upstream end of the nozzle 230c is connected to the downstream end of the gas supply pipe 232c.
- the gas supply pipe 232c is provided with a nitriding raw material gas source 300c, a mass flow controller 241c, and a valve 310c in this order from the upstream side.
- a gas flow rate control unit 235 which will be described later, is electrically connected to the valve 310c and the mass flow controller 241c.
- the gas flow rate control unit 235 is configured to control the start and stop of the nitriding raw material gas supply into the processing chamber 201, the supply flow rate, and the like at predetermined timings.
- the nitriding raw material gas supply system is mainly composed of a valve 310c, a mass flow controller 241c, a gas supply pipe 232c, and a nozzle 230c.
- the nitriding raw material gas supply system may be considered including the nitriding raw material gas source 300c.
- the gas supply system according to the present embodiment is mainly composed of the Si raw material gas supply system, the nitriding raw material gas supply system, and the carrier gas supply system.
- An exhaust pipe 231 for exhausting the inside of the processing chamber 201 is provided on the side wall of the manifold 209.
- the exhaust pipe 231 penetrates the side surface portion of the manifold 209 and communicates with the lower end portion of the tubular space 250, which is an exhaust space formed by the gap between the inner pipe 204 and the outer pipe 205.
- a pressure sensor 245 as a pressure detector
- an APC (Auto Pressure Controller) valve 242 as a pressure regulator
- a vacuum pump. 246 is provided on the downstream side of the exhaust pipe 231 (the side opposite to the connection side with the manifold 209)
- the pressure control unit 236 controls the opening degree of the APC valve 242 based on the pressure information detected by the pressure sensor 245 so that the pressure in the processing chamber 201 becomes a predetermined pressure (vacuum degree) at a predetermined timing. It is configured to do.
- the APC valve 242 is an on-off valve that can open and close the valve to stop vacuum exhaust and vacuum exhaust in the processing chamber 201, and further adjust the valve opening degree to adjust the pressure.
- the exhaust system according to the present embodiment is mainly composed of the exhaust pipe 231 and the pressure sensor 245 and the APC valve 242.
- the vacuum pump 246 may be included in the exhaust system, and the trap device and the abatement device may be included in the exhaust system.
- the lower end opening of the manifold 209 is provided with a seal cap 219 as a lid capable of airtightly closing the opening for inserting and removing the boat 217 into and out of the processing container.
- the seal cap 219 is made of a metal such as stainless steel, and is formed in a disk shape.
- An O-ring 220b as a sealing member to be joined to the lower end of the manifold 209 is provided on the upper surface of the seal cap 219.
- the seal cap 219 is configured to sandwich the O-ring 220b and abut the lower end of the manifold 209 from the lower side in the vertical direction of the reaction vessel.
- the O-ring 220b seals between the reaction tube 203 and the seal cap 219 without directly contacting the reaction tube 203 with the seal cap 219.
- the O-ring 220b can be sufficiently sealed when pressed to a desired crushing amount.
- the preferable amount of crushing may vary due to deterioration of the O-ring 220b, but the amount is small compared to the arrangement interval of the wafer 200. If the manifold 209 and the seal cap 219 come into direct contact with each other, particles are generated, which is not preferable. Therefore, a cushion member having no sealing property may be provided on the outer periphery of the O-ring 220b.
- a rotation mechanism 254 for rotating the boat 217 is provided below the seal cap 219 (that is, on the side opposite to the processing chamber 201 side).
- the rotation mechanism 254 holds the boat 217.
- the rotation shaft 255 included in the rotation mechanism 254 is provided so as to penetrate the seal cap 219.
- the upper end of the rotating shaft 255 rotatably supports the boat 217 from below.
- an inert gas is flowed in the vicinity of the rotating shaft 255 by an inert gas supply system (not shown) to protect the rotating shaft 255 from the processing gas.
- the seal cap 219 is configured to be vertically lifted and lowered by a boat elevator 115 as a lifting mechanism provided vertically outside the reaction tube 203. By operating the boat elevator 115, the boat 217 can be carried in and out of the processing chamber 201 (boat load or boat unload).
- the drive control unit 237 is electrically connected to the rotation mechanism 254 and the boat elevator 115.
- the drive control unit 237 is configured to control the rotation mechanism 254 and the boat elevator 115 at a predetermined timing so as to perform a predetermined operation.
- the gas flow rate control unit 235, the pressure control unit 236, the drive control unit 237, and the temperature control unit 238 are electrically connected to the main control unit 239 that controls the entire substrate processing device 101.
- a controller 240 as a control unit according to the present embodiment is mainly composed of a gas flow rate control unit 235, a pressure control unit 236, a drive control unit 237, a temperature control unit 238, and a main control unit 239.
- the controller 240 is an example of a control unit (control means) that controls the overall operation of the substrate processing device 101, such as flow rate adjustment of mass flow controllers 241a, 241b, 241c, opening / closing operation of valves 310a, 310b, 310c, and APC valve. Opening and closing of 242 and pressure adjustment operation based on pressure sensor 245, temperature adjustment operation of heater 206 based on temperature sensor 263, start / stop of vacuum pump 246, rotation speed adjustment of rotation mechanism 254, lifting operation of boat elevator 115, etc. It is designed to be controlled.
- a method of forming a SiN film, which is a silicon nitride film, on the wafer 200 will be described.
- the Si raw material gas and the reaction gas (nitriding raw material gas) are alternately supplied to form a SiN film on the wafer 200.
- Si 2 Cl 6 gas is used as the Si raw material gas
- NH 3 gas is used as the nitriding raw material gas as the reaction gas.
- FIG. 3 shows an example of the control flow in this embodiment.
- the boat 217 loaded with the plurality of wafers 200 is lifted by the boat elevator 115 and carried into the processing chamber 201 (boat load).
- a boat 217 loaded with a plurality of wafers 200 is housed inside the reaction tube 203.
- the seal cap 219 is in a state of sealing the lower end of the reaction tube 203 via the O-ring 220b.
- the controller 240 controls the substrate processing apparatus 101 as follows. That is, the heater 206 is controlled to keep the inside of the processing chamber 201 at a temperature in the range of, for example, 300 ° C.
- the boat 217 is rotated by the rotation mechanism 254 to rotate the wafer 200.
- the vacuum pump 246 is operated and the APC valve 242 is opened to evacuate the inside of the processing chamber 201.
- the temperature inside the processing chamber 201 is set to 600 ° C. In the holding state, the steps described later are sequentially executed to perform the step of processing the wafer 200.
- Step 11 Si 2 Cl 6 gas is flowed.
- Si 2 Cl 6 is a liquid at room temperature, and in order to supply it to the processing chamber 201, a method of heating and vaporizing it before supplying it, or using a vaporizer (not shown), He (helium) called carrier gas, Ne ( An inert gas such as neon), Ar (argon), N 2 (nitrogen) is passed through a container containing Si 2 Cl 6 gas, and the vaporized gas is supplied to the processing chamber 201 together with the carrier gas.
- a vaporizer not shown
- He helium
- Ne An inert gas such as neon
- Ar argon
- N 2 nitrogen
- Si 2 Cl 6 gas is flowed through the gas supply pipe 232b, and carrier gas (N 2 gas) is flowed through the carrier gas supply pipe 232a connected to the gas supply pipe 232b.
- carrier gas N 2 gas
- the valve 310b of the gas supply pipe 232b, the valve 310a of the carrier gas supply pipe 232a connected to the nozzle 230b, and the APC valve 242 of the exhaust pipe 231 are opened together.
- the carrier gas flows from the carrier gas supply pipe 232a, and the flow rate is adjusted by the mass flow controller 241a.
- the Si 2 Cl 6 gas flows from the gas supply pipe 232b, the flow rate is adjusted by the mass flow controller 241b, vaporized by a vaporizer (not shown), and the carrier gas whose flow rate is adjusted is mixed.
- the APC valve 242 is appropriately adjusted to maintain the pressure in the processing chamber 201 in the range of 20 to 60 Pa, for example, 53 Pa.
- the supply amount of Si 2 Cl 6 gas controlled by the mass flow controller 241b is 0.3 slm.
- N 2 gas as a carrier gas is supplied from the carrier gas supply pipe 232a connected to the gas supply pipe 232b.
- the supply flow rate of N 2 gas controlled by the mass flow controller 241a of the carrier gas supply pipe 232a connected to the gas supply pipe 232b is, for example, 1 slm.
- the time for exposing the wafer 200 to the Si 2 Cl 6 gas is 3 to 10 seconds.
- the temperature of the heater 206 is set so that the temperature of the wafer is in the range of 300 ° C. to 600 ° C., for example, 600 ° C.
- the gases flowing in the processing chamber 201 are only Si 2 Cl 6 gas, N 2 gas, Ar gas and other inert gases, and NH 3 gas does not exist. Therefore, the Si 2 Cl 6 gas does not cause a gas phase reaction, but undergoes a surface reaction (chemical adsorption) with the surface or base film of the wafer 200 to adsorb the raw material (Si 2 Cl 6 ) or the Si layer (hereinafter referred to as Si layer). Si-containing layer) is formed.
- the adsorption layer of Si 2 Cl 6 includes a continuous adsorption layer of raw material molecules as well as a discontinuous adsorption layer.
- the Si layer includes not only a continuous layer composed of Si but also a Si thin film formed by overlapping these layers. A continuous layer composed of Si may be referred to as a Si thin film.
- the supply flow rate of N 2 gas controlled by the mass flow controller 241a of the carrier gas supply pipe 232a connected to the gas supply pipe 232c is, for example, 0.1 slm.
- Step 12 The valve 310b of the gas supply pipe 232b is closed to stop the supply of Si 2 Cl 6 gas to the processing chamber 201.
- the APC valve 242 of the exhaust pipe 231 is left open, the inside of the processing chamber 201 is exhausted to 20 Pa or less by the vacuum pump 246, and the residual Si 2 Cl 6 is removed from the inside of the processing chamber 201.
- an inert gas such as N 2 is supplied into the treatment chamber 201, the effect of removing residual Si 2 Cl 6 is further enhanced.
- Step 13 NH 3 gas is flowed. NH 3 gas is flowed through the gas supply pipe 232c, and carrier gas (N 2 gas) is flowed through the carrier gas supply pipe 232a connected to the gas supply pipe 232c.
- carrier gas N 2 gas
- the valve 310c of the gas supply pipe 232c, the valve 310a of the carrier gas supply pipe 232a, and the APC valve 242 of the exhaust pipe 231 are opened together.
- the carrier gas flows from the carrier gas supply pipe 232a, and the flow rate is adjusted by the mass flow controller 241a.
- the NH 3 gas flows from the gas supply pipe 232c, the flow rate is adjusted by the mass flow controller 241c, the carrier gas whose flow rate is adjusted is mixed, and the NH 3 gas is supplied into the processing chamber 201 from the gas supply hole 234c of the nozzle 230c and from the exhaust pipe 231. It is exhausted.
- the APC valve 242 is appropriately adjusted to maintain the pressure inside the processing chamber 201 in the range of 50 to 1000 Pa, for example, 60 Pa.
- the supply flow rate of NH 3 gas controlled by the mass flow controller 241c is 1 to 10 slm.
- the time for exposing the wafer 200 to the NH 3 gas is 10 to 30 seconds.
- the temperature of the heater 206 at this time is a predetermined temperature in the range of 300 ° C. to 600 ° C., and is set to be, for example, 600 ° C.
- the Si-containing layer chemically adsorbed on the wafer 200 and NH 3 undergo a surface reaction (chemisorption) to form a SiN film on the wafer 200.
- Step 14 by closing the valve 310c of the gas supply pipe 232c, it stops the supply of the NH 3 gas. Further, the APC valve 242 of the exhaust pipe 231 is left open, the processing chamber 201 is exhausted to 20 Pa or less by the vacuum pump 246, and the residual NH 3 gas is excluded from the processing chamber 201. At this time, an inert gas such as N 2 gas is supplied to the processing chamber 201 from the gas supply pipe 232c on the NH 3 gas supply side and the gas supply pipe 232 b on the Si 2 Cl 6 gas supply side, respectively, and purged. Then, further enhanced effect of removing the residual NH 3 gas.
- N 2 gas an inert gas
- the above steps 11 to 14 are set as one cycle, and a SiN film having a predetermined film thickness is formed on the wafer 200 by performing the steps at least once.
- the atmosphere composed of the Si raw material gas in step 11 and the atmosphere composed of the nitrided raw material gas in step 13 are not mixed in the processing chamber 201. Note that it is processed in.
- the film thickness of the SiN film may be adjusted to about 1 to 5 nm by controlling the number of cycles.
- the SiN film formed at this time has a smooth surface and is a dense continuous film.
- the boat 217 has a plurality of pillars 212 having substantially the same length extending in a direction substantially perpendicular to the wafer 200 and a plurality of pillars 212 around the wafers 200 arranged. It has a ring-shaped top plate 211 having an opening at the center for fixing the vicinity of each upper end to each other, and a disk-shaped bottom plate 210 for fixing the vicinity of the lower ends of the plurality of pillars 212 to each other. That is, three pillars 212 are erected between the bottom plate 210 and the top plate 211 of the boat 217 at intervals of approximately 90 degrees.
- each pillar 212 is provided with a plurality of support pins 221 as support members for holding the wafer 200 substantially horizontally.
- Each support pin 221 is provided so as to extend substantially horizontally toward the inner circumference from each of the three pillars 212.
- a plurality of support pins 221 are provided on each of the three pillars 212 at predetermined intervals (pitch).
- the cover 400 has a top plate 401 and a tubular side plate 402, and a disk-shaped quartz plate 403 is arranged inside the cover 400 as a substitute for a dummy substrate.
- the top plate 401 can be airtightly welded to the pillar 212 penetrating the hole, and can be seamlessly welded to the side plate 402 all around.
- the quartz plate 403 can be welded to the column 212 before the cover 400 is provided.
- the cover 400 may have a bottom surface, but in that case, a degassing hole is provided on the bottom surface so that the inside is not sealed.
- the side plate 402 may be divided into three to avoid interference with the pillar 212.
- the inner tube 204 has a ceiling 204a whose upper end is closed and the upper end of the inner tube 204 is terminated at the end in the direction in which the wafers 200 are loaded and arranged.
- the outer surface side (upper surface side) of the ceiling 204a has a flat shape, and the inner surface side of the ceiling 204a is provided with a convex portion 204b as a projecting portion that protrudes inward in a cylindrical shape. It can be said that the convex portion 204b has a cylindrical shape with a flat tip, and the tip portion is extruded along the arrangement axis of the wafer 200.
- An annular concave portion (groove) 204c is formed around the convex portion 204b between the outer peripheral surface of the inner tube 204 and the convex portion 204b.
- the convex portion 204b is smaller than the opening of the top plate 211 of the boat 217, in other words, the outer diameter of the convex portion 204b is smaller than the inner diameter of the top plate 211.
- the inner diameter of the recess 204c is smaller than the inner diameter of the top plate 211.
- the outer diameter of the recess 204c is larger than the outer diameter of the top plate 211.
- the entire inner surface of the ceiling 204a of the inner pipe 204 is formed along the shape of the upper end (top plate 211) of the boat 217 with a predetermined margin (clearance).
- the inner surface of the ceiling 204a of the inner pipe 204 has a shape corresponding to the shape of the opening of the top plate 211, and in a state where the inner pipe 204 accommodates the boat 217, the boat 217 is contained in the recess 204c of the inner pipe 204.
- the top plate 211 is fitted in the top plate 211, and the top plate 211 is arranged in the recess 204c. That is, in a state where the inner pipe 204 accommodates the boat 217, the convex portion 204b of the inner pipe 204 is inserted and fitted into the opening of the top plate 211 of the boat 217.
- the top plate 211 has a square cross section because it is a ring having a rectangular cross section (a rotating body obtained by rotating a rectangle about a wafer arrangement axis), the corners of the recess 204c are also angular. In the inner tube 204, which requires almost no mechanical strength, it is not necessary to round the corners greatly in order to avoid stress concentration. Therefore, the recess 204c can faithfully follow the shape of the top plate 211.
- the pillar 212 protrudes from the upper surface of the top plate 211, it can be regarded as a part of the top plate 211.
- that portion can be regarded as a part of the bottom plate 210.
- the convex portion 204b is provided at a position where the inner pipe 204 is inserted into the opening of the top plate 211 in a state where the boat 217 is accommodated and can be fitted. There is. At this time, the opening of the top plate 211 and the convex portion 204b of the inner tube 204 are formed in a circular shape concentric with the rotating shaft 255.
- the height H of the convex portion 204b is a state in which the boat 217 on which the wafer 200 is loaded is airtightly housed in the inner tube 204, that is, the wafer in the inner tube 204.
- the distance P1 between the tip of the convex portion 204b and the wafer 200 located closest to the top plate 211 and facing the convex portion 204b is the distance between the wafers 200 adjacent to each other in the boat 217. It is set to be substantially equal to P2, that is, the pitch between the wafers 200.
- the height H of the convex portion 204b is between the convex portion 204b and the wafer 200 arranged closest to the top plate 211 when the O-ring 220b has a predetermined crushing amount that can be sealed.
- the spacing P1 is set to be substantially equal to the spacing P2 between the wafers 200 adjacent to each other in the boat 217.
- the height H of the convex portion 204b is between the convex portion 204b and the dummy substrate arranged closest to the top plate 211 when the O-ring 220b has a predetermined crushing amount that can be sealed.
- the spacing is set sufficiently smaller than the spacing P2 between the wafers 200 adjacent to each other in the boat 217 and larger than the fluctuation of the predetermined crushing amount.
- the convex portion 204b is provided so as to be inserted into the opening of the top plate 211 in a state where the boat 217 is housed in the reaction tube 203, and is arranged closer to the top plate 211 of the boat 217 than the top plate 211. It is configured to approach the wafer 200.
- the top plate 211 of the boat 217 is around the convex portion 204b of the inner pipe 204, and a narrow gap is formed in the concave portion 204c so that the boat 217 can be raised and rotated. , The excess gas space in the upper part of the boat 217 can be reduced.
- the partial pressure of the processing gas supplied to the arranged wafers 200 can be made equal. That is, it is possible to improve the inter-plane uniformity of a wafer such as a product substrate having a large surface area.
- the cover 400 below the boat 217 and above the heat insulating region on which the heat insulating plate 216 is loaded, the excess gas space in the lower part of the boat 217 can be reduced, and the inter-plane uniformity of the wafer can be improved. It can be improved and the side dummy substrate is not required.
- the height H is the height H of the top plate 211 of the boat 217 from the bottom surface of the recess 204c of the ceiling 204a of the inner pipe 204. It is configured to be larger than the sum of the distance A1 to the upper surface and the thickness A2 of the top plate 211 in the height direction. Further, the length B1 from the side surface of the convex portion 204b of the inner tube 204 to the inner peripheral surface of the top plate 211 and the length B2 from the outer peripheral surface of the top plate 211 to the inner peripheral surface of the inner tube 204 are substantially equal. It is configured to be.
- the distance A1 between the bottom surface of the recess 204c of the ceiling 204a of the inner pipe 204 and the top surface of the top plate 211 of the boat 217 is configured to be smaller than that of either B1 or B2. That is, the interval A1 can be made relatively small because it is a margin for the dimensional accuracy of the boat 217 and the fluctuation of the crushing amount of the O-ring 220a.
- the above-mentioned interval P1 changes depending on the amount of crushing of the O-ring 220a, but usually this fluctuation is slight and can be ignored. If the film quality of the substrate placed closest to the top plate is not stable, that substrate is used as a dummy substrate.
- the interval P1 is made smaller than the interval P2, for example, about the same as the interval A1, the excess gas space generated above the dummy substrate can be reduced. can.
- the modified example of FIG. 7 has a different shape from the ceiling 204a of the inner pipe 204 in the above-described embodiment. In this modification, only the configuration different from the inner tube 204 described above will be described.
- the inner tube 304 according to the modified example has a ceiling 304a whose upper end is closed and the inner tube 304 is terminated at the end in the direction in which the wafers 200 are loaded and arranged.
- the ceiling 304a has a convex portion 304b as a protruding portion whose upper surface is recessed inward in a cylindrical shape and the inner surface side of the ceiling 304a projects inward in a cylindrical shape.
- the convex portion 304b has a cylindrical shape with a flat tip.
- a concave portion 304c is formed around the convex portion 304b and between the outer peripheral surface of the inner tube 304 and the convex portion 304b.
- the outer diameter of the convex portion 304b is smaller than the opening of the top plate 211 of the boat 217, in other words, it is smaller than the inner diameter of the top plate 211. Further, the inner diameter of the recess 304c is smaller than the inner diameter of the top plate 211.
- the outer diameter of the recess 304c is larger than the outer diameter of the top plate 211. That is, the inner surface of the ceiling 304a of the inner pipe 304 has a shape corresponding to the shape of the top plate 211, and when the boat 217 is housed in the inner pipe 304, the top plate 211 is inserted into the recess 304c. , It is configured to be arranged in the recess 304c. That is, with respect to the ceiling 204a having a flat upper surface of the inner pipe 204 described above, the upper surface of the ceiling 304a of the inner pipe 304 according to the modified example has a recessed center and protrudes inward in a flat shape.
- the convex portion 304b is provided at a position where the boat 217 is inserted into the opening of the top plate 211 while the boat 217 is housed in the reaction tube 203. That is, the convex portion 304b is provided so as to be inserted into the opening of the top plate 211 in a state where the boat 217 is housed in the reaction tube 203, and is arranged closer to the top plate 211 of the boat 217 than the top plate 211. It is configured to approach the wafer 200.
- the corners of the convex portion 304b and the concave portion 304c can be formed to be angular without intentional chamfering for the same reason as in the present embodiment described above. Further, the wall thickness of the ceiling 304a can be reduced to almost the same thickness as the other parts of the inner pipe 304, except for the difficulty of manufacturing and the cost.
- the upper surface of the ceiling 304a is recessed to form a convex portion 304b protruding inward, and the thickness of the ceiling 304a is reduced to form the ceiling 204a according to the above-described embodiment. Compared with this, the heat capacity can be reduced, and the heat from the heater 206 can be easily transferred into the processing chamber 201.
- the heat from the heater 206 is transferred to the processing chamber 201 by making the quartz constituting the ceiling 204a according to the present embodiment and the ceiling 304a according to the modified example opaque so as to have different transmittance and thermal conductivity. It is difficult to transfer to the inside, or the heat capacity can be reduced.
- a modified example of FIG. 8 includes a reaction tube 503 having a single tube structure instead of the reaction tube 203 having a double tube structure composed of an inner tube 204 and an outer tube 205 in the present embodiment described above.
- the ceiling 503a of the reaction tube 503 has a convex shape similar to that of the ceiling 204a, and a convex portion 503b as a protruding portion is formed and fits into the opening of the top plate 211 of the boat 217. That is, the convex portion 503b is provided so as to be inserted into the opening of the top plate 211 in a state where the boat 217 is housed in the reaction tube 503, and is arranged closer to the top plate 211 of the boat 217 than the top plate 211. It is configured to approach the wafer 200.
- the wafer 200 as a product substrate having a large area 200 times larger than that of the bare wafer is subjected to substrate processing by the above-described semiconductor device manufacturing method using the processing furnace 202 according to the present embodiment as shown in FIG. 2 (hereinafter, In the case of the wafer 200 as a product substrate by the above-mentioned manufacturing method of the semiconductor device using the processing furnace according to the comparative example, which is different only in that the convex portion 204b and the opening of the top plate 211 are not provided. It was compared with the case where the substrate was processed.
- the inner surface side of the ceiling of the inner pipe has a flat shape and no protrusion 204b is provided. Further, the top plate of the boat is disk-shaped and no opening is formed. Further, a plurality of dummy substrates are loaded on the boat at the upper and lower ends of the wafer 200 as the product substrate in the arrangement direction. That is, the cover 400 is not provided at the bottom of the boat.
- FIG. 9A is a diagram showing the partial pressure distribution of SiCl 2 , which is a decomposition product of SiCl 2 gas, when the SiCl 2 gas is supplied in the processing furnace according to the comparative example
- FIG. 9B is a diagram showing the present. It is a figure which shows the partial pressure distribution of SiCl 2 which is a decomposition product of SiCl 2 gas at the time of supply of SiCl 2 gas in the processing furnace 202 which concerns on Example.
- FIG. 9 (A) and 9 (B) show how SiCl 2 gas is supplied from the left side, respectively.
- SiCl 2 gas is supplied onto the wafer in a high concentration above the processing furnace (near the ceiling).
- FIG. 9B in the processing furnace 202 according to the present embodiment, the SiCl 2 gas above the processing furnace 202 (near the ceiling) as compared with the case where the processing furnace according to the comparative example is used. It was confirmed that the concentration difference of the SiCl 2 gas between the wafers was relaxed, the concentration difference of the SiCl 2 gas was relaxed, and the partial pressure distribution of the SiCl 2 was the same in the arrangement direction of the wafers.
- FIG. 10A is a diagram showing the uniformity between wafer surfaces in which the average value of the SiCl 2 partial pressures on the wafer at each slot number is evaluated.
- FIG. 10B is a diagram showing in-plane uniformity of the wafer comparing the numerical values obtained by dividing the difference between the center of the wafer and the outer circumference of the wafer at each slot number by the average value. The larger the slot number, the more the wafer is arranged above the boat 217.
- the SiCl 2 partial pressure is divided in the upper and lower stages of the boat as compared with that on the wafer in the middle stage. Has become higher. That is, it was confirmed that the film thickness of the SiN film formed on the wafer in the upper and lower stages was thicker than the film thickness of the SiN film formed on the wafer in the middle stage.
- the difference between the maximum value and the minimum value of the SiCl 2 partial pressure was 0.242.
- the upper stage of the boat 217 was compared with the case where the processing furnace according to the above-mentioned comparative example was used. It was confirmed that the SiCl 2 partial pressure was lowered and the variation was improved. That is, it was confirmed that the film thickness of the SiN film formed on the wafer in the upper stage is equivalent to the film thickness of the SiN film formed on the wafer in the middle stage. In addition, as a difference 0.242 half is between the maximum and minimum values of SiCl 2 partial pressure in the difference becomes 0.131, Comparative Example between the maximum value and the minimum value of SiCl 2 partial pressure. That is, it was confirmed that the inter-plane uniformity was improved as compared with the case where the processing furnace according to the comparative example was used.
- the upper stage of the boat 217 was compared with the case where the processing furnace according to the above-mentioned comparative example was used. It was confirmed that the in-plane uniformity was improved and the variation in the height direction of the boat 217 was improved.
- the gas capacity in the surplus gas space is 68% as compared with the processing furnace according to the comparative example. It was confirmed that the degree can be reduced. As a result, it was confirmed that the SiCl 2 partial pressure can be made equivalent in the loading direction of the wafer, and the interplane uniformity and the in-plane uniformity are improved as compared with the processing furnace according to the comparative example.
- the above-described embodiment has the following effects. That is, the surplus gas generated on the monitor board or dummy board that consumes less processing gas or in the gap between the top plate 211 of the boat 217 and the inner surface of the reaction tube 203 is reduced, and the surplus gas is the product board. The amount of gas invading the area where the gas is placed is reduced. Therefore, the product board placed in the area where the monitor board or the dummy board is placed or the area close to the top plate of the board holder is the area where the monitor board or the dummy board is placed or the top plate of the boat 217. Compared with the product substrate placed in the region far from 211, the supply amount of the processing gas is increased, and it is possible to prevent the film to be formed from becoming thicker.
- the inter-plane uniformity can be improved. Since the surplus gas is supplied from the periphery (end side) of the wafer 200, it is possible to prevent the film formed at the end of the wafer 200 from becoming relatively thick and the in-plane uniformity from deteriorating.
- Substrate processing equipment 203, 503 Reaction tube 204, 304 Inner tube 204a, 304a, 503a Ceiling 204b, 304b, 503b Convex part (example of protruding part) 204c, 304c, 503c Recessed 205 Outer tube 200 Wafer (example of substrate) 201 Processing room 210 Bottom plate 211 Top plate 217 Boat (an example of substrate holder) 400 cover
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Abstract
Description
基板を配列させて保持する基板保持具と、
内部に前記基板保持具を収容する反応管と、を備え、
前記基板保持具は、
配列される前記基板の周囲において前記基板と略垂直な方向にそれぞれ伸びる、複数の柱と、前記複数の柱のそれぞれの一端を互いに固定し、中心に開口を有する天板と、前記複数の柱のそれぞれの他端を互いに固定する底板と、を有し、
前記反応管は、前記開口の形状に対応した形状で内側に向かって突出する先端が平坦な突出部を有し、
前記突出部は、前記基板保持具を前記反応管に収容した状態において前記開口に挿入されるように設けられ、前記天板よりも、前記基板保持具の最も天板寄りに配置される基板に対して接近する技術が提供される。
以下に、本開示の一実施形態について説明する。
まず、本実施形態に係る基板処理装置101の構成について、図1、図2を参照しながら説明する。図1は、本開示の一実施形態に係る基板処理装置101の概略構成図である。図2は、本開示の一実施形態に係る処理炉202の側面断面図である。なお、本実施形態にかかる基板処理装置101は、例えばウエハ等の基板に酸化、拡散処理、薄膜形成処理などを行なう縦型の装置として構成されている。
図1に示すように、基板処理装置101は、バッチ式縦型熱処理装置として構成されている。基板処理装置101は、内部に処理炉202などの主要部が設けられる筐体111を備えている。筐体111内への基板搬送容器(ウエハキャリア)としては、ポッド(FOUP(フープ)ともいう)110が用いられる。ポッド110内には、シリコン(Si)又は炭化シリコン(SiC)等で構成された基板としてのウエハ200が、例えば25枚収納されるように構成されている。筐体111の正面側には、ポッドステージ114が配置されている。ポッド110は、蓋が閉じられた状態でポッドステージ114上に載置されるように構成されている。
続いて、本実施形態に係る処理炉202の構成について、図2を用いて説明する。
図2に示すように、処理炉202は処理容器を構成する反応管203を備えている。反応管203は、内管としてのインナー管204と、その外側に設けられた外管としてのアウター管205と、を備えている。インナー管204は、例えば石英(SiO2)または炭化シリコン(SiC)等の耐熱性材料により構成されている。詳細には後述するが、インナー管204は、上端が閉塞し下端が開口した円筒形状に形成されている。インナー管204は、その内部にウエハ200上に薄膜を形成する処理を行う処理室201を形成している。処理室201は、ウエハ200をボート217によって水平姿勢で垂直方向に多段に整列保持した状態で収容可能に構成されている。インナー管204は、外周面からアウター管205側へ向けて延出し、側面が外側に膨らんで形成される膨らみ部207を1つ以上有する。膨らみ部207内には、上下方向に延びるノズル室201aが形成され、ノズル室201a内に後述するノズル230bとノズル230cを収容するよう構成されている。また、インナー管204は、ノズル室201aと反対側の外周面において、配列されたウエハを臨む位置に開口し、アウター管205との間の筒状空間250に雰囲気を流出させる排出口215を有する。
ノズル230b及びノズル230cは、ウエハ200の配列軸(配列方向)と平行に延びて、膨らみ部207内に配置されている。ノズル230b及びノズル230cは、インナー管204の内壁とウエハ200との間における円弧状の空間に設けてもよい。ノズル230b及びノズル230cは、それぞれ先端が閉塞するU字形状および直線状の石英パイプで構成されうる。ノズル230bおよびノズル230cの側面には、配列されたウエハ200のそれぞれにガスを供給するガス供給口としてのガス供給孔234bとガス供給孔234cが設けられている。ガス供給孔234b,234cは、下部から上部にわたってそれぞれ同一又は、大きさに傾斜を付けた開口面積を有し、さらに同じピッチで複数設けられている。ノズル230b及びノズル230cの上流端は、それぞれガス供給管232b及びガス供給管232cの下流端に接続されている。また、ノズル230b,230cは、後述するカバー400に包囲された複数の配列位置に対応する位置にガス供給孔234b,234cを有さないように構成されている。また、ノズル230b,230cは、後述するカバー400と天板211の間の複数の配列位置で保持されるプロダクト基板又はモニタ基板等の複数のウエハ200に対応する位置にガス供給孔234b,234cを有するように構成されている。このような処理室とノズルの構成において、複数のウエハ200のそれぞれの表面に対する平行に形成されるガスの流れ(対流)は、表面近傍への物質移動を支配的に担う。このとき反応管203はクロスフロー反応管と呼ばれる。
反応管203の外側には、反応管203の側壁面及び天井面を囲う同心円状に、炉体としてのヒータ206が設けられている。ヒータ206は円筒形状に形成されている。ヒータ206は、図示しない保持板としてのヒータベースに支持されることにより垂直に据え付けられている。反応管203内(例えばインナー管204とアウター管205との間や、インナー管204の内側等)には、温度検出器としての温度センサ263が設置されている。ヒータ206及び温度センサ263には、後述する温度制御部238が電気的に接続されている。温度制御部238は、処理室201内の温度が所定の温度分布となるように、温度センサ263により検出された温度情報に基づいてヒータ206への通電具合を所定のタイミングにて制御するように構成されている。
アウター管205の下方には、アウター管205と同心円状にマニホールド(インレットアダプタ)209が配設されている。マニホールド209は、例えばステンレス等により構成されている。マニホールド209は、上端及び下端が開口した円筒形状に形成されている。マニホールド209は、インナー管204の下端部とアウター管205の下端部とにそれぞれ係合するように設けられたり、インナー管204の下端部とアウター管205の下端部とをそれぞれ支持するように設けられたりしている。なお、マニホールド209とアウター管205との間には、シール部材としてのOリング220aが設けられている。マニホールド209が図示しないヒータベースに支持されることにより、反応管203は垂直に据え付けられた状態となっている。主に、反応管203とマニホールド209とにより処理容器が形成されている。
反応管203の内部であって処理室201内には、基板保持具としてのボート217が、マニホールド209の下端開口の下方側から搬入されて収容されるように構成されている。ボート217は、例えば石英や炭化シリコン等の耐熱性材料により構成されている。ボート217は、詳細には後述するが、複数の柱であって例えば3本の柱212と、3本の柱212の上端を互いに固定する中心に開口を有するリング形状の天板211と、3本の柱212の下端を互いに固定する円板形状の底板210と、を備える。ボート217は、複数枚のウエハ200を、水平姿勢であって互いに中心を揃えた状態で、所定の間隔で配列させて保持するように構成されている。また、ボート217は、ボート217の下部であってウエハ200が配列されたウエハ処理領域よりも下方に、円板形状をした複数枚の断熱部材としての断熱板216を、水平姿勢であって互いに中心をそろえた状態で、所定の間隔で配列させて保持するように構成されている。断熱板216は、例えば石英や炭化シリコン等の耐熱性材料により構成されている。断熱板216は、ヒータ206からの熱をマニホールド209側に伝え難くするように構成されている。
マニホールド209の側壁には、キャリアガスとして例えば窒素(N2)ガスを処理室201内に供給するノズル230b及びノズル230cが、処理室201内に連通するように設けられている。ガス供給管232aには、上流側から順に、キャリアガス源300a、流量制御器(流量制御手段)としてのマスフローコントローラ241a及びバルブ310aが設けられている。上記構成により、ガス供給管232aを介して処理室201内へ供給するキャリアガスの供給流量、処理室201内のキャリアガスの濃度や分圧を制御することができる。
マニホールド209の側壁には、原料ガス(Si含有ガス)の一例として例えばヘキサクロロジシラン(Si2Cl6、略称、HCDS)ガスを処理室201内に供給するノズル230bが、処理室201内に連通するように設けられている。ノズル230bの上流端は、ガス供給管232bの下流端に接続されている。ガス供給管232bには、上流側から順に、Si原料ガス源300b、マスフローコントローラ241b及びバルブ310bが設けられている。上記構成により、処理室201内へ供給するSi原料ガスの供給流量、処理室201内のSi原料ガスの濃度や分圧を制御することができる。
マニホールド209の側壁には、改質原料(反応ガスまたはリアクタント)の一例として例えば窒化原料ガスであるアンモニア(NH3)、窒素(N2)、亜酸化窒素(N2O)、モノメチルヒドラジン(CH6N2)等のガスを処理室201内に供給するノズル230cが、処理室201内に連通するように設けられている。ノズル230cの上流端は、ガス供給管232cの下流端に接続されている。ガス供給管232cには、上流側から順に、窒化原料ガス源300c、マスフローコントローラ241c及びバルブ310cが設けられている。上記構成により、処理室201内へ供給する窒化原料ガスの供給流量、処理室201内の窒化原料ガスの濃度や分圧を制御することができる。
マニホールド209の側壁には、処理室201内を排気する排気管231が設けられている。排気管231は、マニホールド209の側面部を貫通しており、インナー管204とアウター管205との隙間によって形成される排気空間である筒状空間250の下端部に連通している。排気管231の下流側(マニホールド209との接続側と反対側)には、上流側から順に、圧力検出器としての圧力センサ245、圧力調整装置としてのAPC(Auto Pressure Controller)バルブ242、真空ポンプ246が設けられている。
マニホールド209の下端開口には、処理容器にボート217を出し入れする開口を気密に閉塞することが可能な蓋としてのシールキャップ219が設けられている。シールキャップ219は、例えばステンレス等の金属により構成されており、円盤状に形成されている。シールキャップ219の上面には、マニホールド209の下端と接合するシール部材としてのOリング220bが設けられている。シールキャップ219は、Oリング220bを挟み込んで、マニホールド209の下端に、反応容器の垂直方向下側から当接するように構成されている。Oリング220bは、反応管203とシールキャップ219を直接接触させることなく、反応管203とシールキャップ219との間を密封する。Oリング220bは、押圧され好ましい潰し量となったときに十分な密封を行うことができる。なお好ましい潰し量は、Oリング220bの劣化により変動しうるが、その量はウエハ200の配列間隔に比べればわずかである。マニホールド209とシールキャップ219が直接接触するとパーティクルが発生するため好ましくない。このためOリング220bの外周に、シール性を有しないクッション部材が設けられうる。
シールキャップ219の下方(すなわち処理室201側とは反対側)には、ボート217を回転させる回転機構254が設けられている。回転機構254は、ボート217を保持する。回転機構254が備える回転軸255は、シールキャップ219を貫通するように設けられている。回転軸255の上端部は、ボート217を下方から回転可能に支持している。回転機構254を作動させることにより、ボート217及びウエハ200を処理室201内で回転させることが可能に構成されている。なお、回転軸255が処理ガスにより影響を受けにくくなるように、不図示の不活性ガス供給系により回転軸255の近傍に不活性ガスを流し、処理ガスから保護するようにしている。
シールキャップ219は、反応管203の外部に垂直に設けられた昇降機構としてのボートエレベータ115によって、垂直方向に昇降されるように構成されている。ボートエレベータ115を作動させることにより、ボート217を処理室201内外へ搬入出(ボートロード或いはボートアンロード)させることが可能に構成されている。
上述のガス流量制御部235、圧力制御部236、駆動制御部237及び温度制御部238は、基板処理装置101全体を制御する主制御部239に電気的に接続されている。主に、ガス流量制御部235、圧力制御部236、駆動制御部237、温度制御部238及び主制御部239により、本実施形態に係る制御部としてのコントローラ240が構成されている。
次に、上述の基板処理装置101の処理炉202を用いて、半導体装置(デバイス)の製造工程の一工程として、大規模集積回路(Large Scale Integration;LSI)を製造する際などに、ウエハ200上に絶縁膜を成膜する方法の例について説明する。尚、以下の説明において、基板処理装置101を構成する各部の動作はコントローラ240により制御される。
まずSi原料ガスと反応ガス(窒化原料ガス)とを交互に供給してウエハ200上にSiN膜を形成する。
本実施形態では、Si原料ガスとしてSi2Cl6ガス、反応ガスとしての窒化原料ガスとしてNH3ガスを用いる例について説明する。
ステップ11では、Si2Cl6ガスを流す。Si2Cl6は常温で液体であり、処理室201に供給するには、加熱して気化させてから供給する方法、図示しない気化器を使用してキャリアガスと呼ばれるHe(ヘリウム)、Ne(ネオン)、Ar(アルゴン)、N2(窒素)などの不活性ガスをSi2Cl6ガスの入った容器の中に通し、気化している分をそのキャリアガスと共に処理室201へと供給する方法などがあるが、例として後者のケースで説明する。
ガス供給管232bのバルブ310bを閉めて処理室201へのSi2Cl6ガスの供給を停止する。このとき排気管231のAPCバルブ242は開いたままとし、真空ポンプ246により処理室201内を20Pa以下となるまで排気し、残留Si2Cl6を処理室201内から排除する。このときN2等の不活性ガスを処理室201内へ供給すると、更に残留Si2Cl6を排除する効果が高まる。
ステップ13では、NH3ガスを流す。ガス供給管232cにNH3ガスを、ガス供給管232cに接続されるキャリアガス供給管232aにキャリアガス(N2ガス)を流す。ガス供給管232cのバルブ310c、キャリアガス供給管232aのバルブ310a、および排気管231のAPCバルブ242のそれぞれを共に開ける。キャリアガスは、キャリアガス供給管232aから流れ、マスフローコントローラ241aにより流量調整される。NH3ガスは、ガス供給管232cから流れ、マスフローコントローラ241cにより流量調整され、流量調整されたキャリアガスを混合し、ノズル230cのガス供給孔234cから処理室201内に供給されつつ排気管231から排気される。NH3ガスを流すときは、APCバルブ242を適正に調節して処理室201内圧力を50~1000Paの範囲であって、例えば60Paに維持する。マスフローコントローラ241cで制御するNH3ガスの供給流量は1~10slmである。NH3ガスにウエハ200を晒す時間は10~30秒間である。このときのヒータ206の温度は、300℃~600℃の範囲の所定の温度であって、例えば600℃になるよう設定してある。
ステップ14では、ガス供給管232cのバルブ310cを閉めて、NH3ガスの供給を止める。また、排気管231のAPCバルブ242は開いたままにし、真空ポンプ246により、処理室201を20Pa以下に排気し、残留NH3ガスを処理室201から排除する。また、この時には、N2ガス等の不活性ガスを、NH3ガス供給側であるガス供給管232cおよびSi2Cl6ガス供給側であるガス供給管232bからそれぞれ処理室201に供給してパージすると、残留NH3ガスを排除する効果が更に高まる。
次に、本実施形態における処理炉202の変形例を、図7、図8を用いて説明する。
以下、本実施形態を比較例との対比を通じて説明する。
203、503 反応管
204、304 インナー管
204a、304a、503a 天井
204b、304b、503b 凸部(突出部の一例)
204c、304c、503c 凹部
205 アウター管
200 ウエハ(基板の一例)
201 処理室
210 底板
211 天板
217 ボート(基板保持具の一例)
400 カバー
Claims (13)
- 基板を配列させて保持する基板保持具と、
内部に前記基板保持具を収容する反応管と、を備え、
前記基板保持具は、
配列される前記基板の周囲において前記基板と略垂直な方向にそれぞれ伸びる複数の柱と、前記複数の柱のそれぞれの一端を互いに固定し、中心に開口を有する天板と、前記複数の柱のそれぞれの他端を互いに固定する底板と、を有し、
前記反応管は、前記開口の形状に対応した形状で内側に向かって突出する先端が平坦な突出部を有し、
前記突出部は、前記基板保持具を前記反応管に収容した状態において前記開口に挿入されるように設けられ、前記天板よりも、前記基板保持具の最も天板寄りに配置される基板に対して接近するよう構成される基板処理装置。 - 前記突出部の高さは、前記突出部と、最も天板寄りに前記基板保持具に配置される前記基板との間の間隔が、前記基板保持具で互いに隣接する基板間の間隔と略等しくなるように設定される請求項1に記載の基板処理装置。
- 前記反応管は、前記基板保持具を収容する内管と、耐圧構造を有し前記内管を収容する外管と、を有し、
前記内管は、上部を終端する天井を更に有し、前記突出部は前記天井に設けられる請求項1又は2に記載の基板処理装置。 - 前記基板の配列方向と平行に延びて、配列された前記基板のそれぞれにガスを供給するノズルと、を更に備え、前記内管は、側面において外側に膨らんで形成され、その内部に前記ノズルを収容する膨らみ部を更に有する請求項3に記載の基板処理装置。
- 前記基板保持具を回転可能に支持する回転軸を更に備え、
前記開口及び前記突出部は、前記回転軸と同心の円形に形成される請求項1に記載の基板処理装置。 - 前記基板保持具における基板の配列位置の内、最も底板に近い配列位置を含む複数の配列位置を、上面及び側面から包囲するカバーを更に備え、
前記基板保持具は、前記カバーに包囲された前記複数の配列位置で、製品基板及びモニタ基板を保持することなく、前記カバーと前記天板の間の複数の配列位置で、複数の製品基板又はモニタ基板を保持するように構成される請求項1記載の基板処理装置。 - 前記基板保持具における基板の配列位置の内、最も底板に近い配列位置を含む複数の配列位置を、上面及び側面から包囲するカバーを更に備え、
前記ノズルは、前記カバーに包囲された前記複数の配列位置に対応する位置にガス供給口を有することなく、前記カバーと前記天板の間の複数の配列位置で保持される複数の製品基板又はモニタ基板に対応する位置にガス供給口を有する請求項4に記載の基板処理装置。 - 前記内管の天井の内面全体が、前記基板保持具の天板の形状に沿って形成される請求項3に記載の基板処理装置。
- 前記反応管が構成する処理容器に前記基板保持具を出し入れする開口を塞ぐ蓋と、
前記蓋に設けられ、前記反応管で前記基板保持具を保持する回転機構と、
前記反応管と前記蓋を直接接触させることなく、前記反応管と前記蓋との間を密封するシール部材と、を有し、
前記突出部の高さは、前記シール部材が密封することができる所定の潰し量となったときに、前記突出部と、最も天板寄りに配置される前記基板との間の間隔が、前記基板保持具内で互いに隣接する基板間の間隔と略等しくなるように設定される請求項1又は5に記載の基板処理装置。 - 前記反応管が構成する処理容器に前記基板保持具を出し入れする開口を塞ぐ蓋と、
前記蓋に設けられ、前記反応管で前記基板保持具を保持する回転機構と、
前記反応管と前記蓋を直接接触させることなく、前記反応管と前記蓋との間を密封するシール部材と、を有し、
前記突出部の高さは、前記シール部材が密封することができる所定の潰し量となったときに、前記突出部と、最も天板寄りに配置されるダミー基板との間の間隔が、前記基板保持具内で互いに隣接する基板間の間隔より十分小さく且つ前記所定の潰し量の変動よりも大きく設定される請求項1に記載の基板処理装置。 - 前記基板保持具は、前記最も天板寄りの配置位置を除く、前記カバーと前記天板の間の複数の配列位置で、前記複数の製品基板又はモニタ基板を保持するように構成される請求項6に記載の基板処理装置。
- 基板を配列させて保持しつつ、前記基板の周囲において前記基板と略垂直な方向にそれぞれ伸びる、複数の柱と、前記複数の柱のそれぞれの一端を互いに固定し、中心に開口を有する天板と、前記複数の柱のそれぞれの他端を互いに固定する底板と、を有する基板保持具を、前記開口の形状に対応した形状で内側に向かって突出する先端が平坦な突出部を有する反応管の内部に収容する工程と、
前記反応管の内部において前記基板を処理する工程と、を有し、
前記反応管の内部に収容する工程では、
前記突出部が、前記開口に挿入され、前記天板よりも、前記基板保持具の最も天板寄りに配置される基板に対して接近させる
半導体装置の製造方法。 - 基板を配列させて保持しつつ、前記基板の周囲において前記基板と略垂直な方向にそれぞれ伸びる、複数の柱と、前記複数の柱のそれぞれの一端を互いに固定し、中心に開口を有する天板と、前記複数の柱のそれぞれの他端を互いに固定する底板と、を有する基板保持具を、前記開口の形状に対応した形状で内側に向かって突出する先端が平坦な突出部を有する反応管の内部に収容する手順と、
前記反応管の内部において前記基板を処理する手順と、を基板処理装置のコンピュータに実行させるプログラムであって、
前記反応管の内部に収容する手順では、
前記突出部が、前記開口に挿入され、前記天板よりも、前記基板保持具の最も天板寄りに配置される基板に対して接近させるように制御するプログラム。
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JP2010034406A (ja) * | 2008-07-30 | 2010-02-12 | Hitachi Kokusai Electric Inc | 基板処理装置及び半導体装置の製造方法 |
JP2012195562A (ja) * | 2011-02-28 | 2012-10-11 | Hitachi Kokusai Electric Inc | 異径基板用アタッチメントおよび基板処理装置ならびに基板若しくは半導体デバイスの製造方法 |
WO2016046947A1 (ja) * | 2014-09-25 | 2016-03-31 | 株式会社日立国際電気 | 基板保持具、基板処理装置および半導体装置の製造方法 |
JP2018160513A (ja) * | 2017-03-22 | 2018-10-11 | 特許機器株式会社 | ウエハ収容装置 |
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KR20190109216A (ko) | 2018-03-15 | 2019-09-25 | 가부시키가이샤 코쿠사이 엘렉트릭 | 기판 처리 장치 및 반도체 장치의 제조 방법 |
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- 2020-01-28 WO PCT/JP2020/003022 patent/WO2021152705A1/ja active Application Filing
- 2020-01-28 CN CN202080082498.4A patent/CN114762092A/zh active Pending
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JPH11501160A (ja) * | 1995-03-03 | 1999-01-26 | シリコン・バリー・グループ・インコーポレーテッド | 熱処理装置及びプロセス |
JP2002261028A (ja) * | 2001-03-02 | 2002-09-13 | Ftl:Kk | 半導体装置の製造用基板載置治具と縦型炉の組合わせ、基板載置治具、及び半導体装置の製造方法 |
JP2010034406A (ja) * | 2008-07-30 | 2010-02-12 | Hitachi Kokusai Electric Inc | 基板処理装置及び半導体装置の製造方法 |
JP2012195562A (ja) * | 2011-02-28 | 2012-10-11 | Hitachi Kokusai Electric Inc | 異径基板用アタッチメントおよび基板処理装置ならびに基板若しくは半導体デバイスの製造方法 |
WO2016046947A1 (ja) * | 2014-09-25 | 2016-03-31 | 株式会社日立国際電気 | 基板保持具、基板処理装置および半導体装置の製造方法 |
JP2018160513A (ja) * | 2017-03-22 | 2018-10-11 | 特許機器株式会社 | ウエハ収容装置 |
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JP7308299B2 (ja) | 2023-07-13 |
JPWO2021152705A1 (ja) | 2021-08-05 |
TWI769629B (zh) | 2022-07-01 |
US20220301865A1 (en) | 2022-09-22 |
KR20220088920A (ko) | 2022-06-28 |
TW202130853A (zh) | 2021-08-16 |
CN114762092A (zh) | 2022-07-15 |
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