WO2021143578A1

WO2021143578A1 - Cleaning device

Info

Publication number: WO2021143578A1
Application number: PCT/CN2021/070306
Authority: WO
Inventors: 李相鑫; 吴仪
Original assignee: 北京北方华创微电子装备有限公司
Priority date: 2020-01-19
Filing date: 2021-01-05
Publication date: 2021-07-22
Also published as: TW202128293A; CN111261553A; CN111261553B

Abstract

The embodiments of the present application provide a cleaning device. The cleaning device comprises: a base, a first spraying mechanism and a flexible cleaning member; the base is used for bearing a part to be cleaned and can drive said part to rotate, and the outer diameter of the base is smaller than the outer diameter of said part; the first spraying mechanism is movably provided on a side of the base and is used for spraying a cleaning liquid onto the surface of said part when the first spraying mechanism moves to a first position; and the flexible cleaning member is connected to the first spraying mechanism, and is used for flexibly contacting an edge portion of said part when the first spraying mechanism moves to the first position, so as to clean the edge portion of said part. The cleaning device provided in the embodiments of the present application can remove particles and residual contaminants adhered to the edge of a part to be cleaned more completely, and therefore, the cleaning effect can be improved without causing damage to the surface of the part to be cleaned, thereby increasing the yield of the part to be cleaned.

Description

Cleaning device

Technical field

This application relates to the technical field of semiconductor processing. Specifically, this application relates to a cleaning device.

Background technique

At present, with the continuous development of semiconductor manufacturing process technology, the feature size of devices continues to decrease, and the impact of nano-scale defects on wafers is gradually increasing. Wafer cleaning has become a key technology to improve wafer yield. When the minimum feature size of the device is gradually decreasing, the wafer size is increasing, and the edge area of the wafer is correspondingly increased. The number of chips distributed in the edge area of the wafer is also gradually increasing. In this case, the wafer Defects on the edge will seriously affect the yield of the entire wafer. At the same time, since the film attached to the edge of the wafer may peel off, the peeled film may migrate to the surface of the wafer. Therefore, the wafer edge cleaning step is the successful manufacturing of the wafer. One of the key steps of the circle.

In the existing wafer cleaning device, the chuck is usually used to clamp the wafer and drive the wafer to rotate. In this process, the spray arm swings over the wafer while spraying the cleaning solution. However, the spray arm is Due to the limitation of the swing angle of the wafer, the existing wafer cleaning device has a limited cleaning effect on the edge of the wafer, and particles and other contaminants still remain on the edge of the wafer after cleaning.

Summary of the invention

In view of the shortcomings of the existing methods, this application proposes a cleaning device that can more thoroughly remove particles and contaminants attached to the edges of the parts to be cleaned, thereby improving the cleaning effect without causing damage to the surface of the parts to be cleaned. In turn, the yield of the parts to be cleaned can be improved.

The embodiment of the present application provides a cleaning device, including: a base, a first spray mechanism, and a flexible cleaning part, wherein the base is used to carry the part to be cleaned and can drive the part to be cleaned to rotate, and The outer diameter of the base is smaller than the outer diameter of the part to be cleaned;

The first spray mechanism is movably arranged on one side of the base, and is used to spray cleaning liquid on the surface of the part to be cleaned when it moves to the first position;

The flexible cleaning element is connected to the first spraying mechanism, and is used to flexibly contact the edge portion of the to-be-cleaned part when the first spraying mechanism moves to the first position, so as to The edges of the parts to be cleaned are cleaned.

Optionally, a groove is provided on the flexible cleaning member, and when the first spray mechanism moves to the first position, the edge portion of the member to be cleaned is inserted into the groove, and the The inner surface of the groove is in contact with the outer surface of the edge portion of the piece to be cleaned.

Optionally, on the axial cross-section of the base, the orthographic shape of the groove is consistent with the orthographic shape of the edge portion of the object to be cleaned.

Optionally, the flexible cleaning member includes a sponge body.

Optionally, the sponge is made of polyvinyl alcohol.

Optionally, the cleaning device further includes an infiltration tank containing a cleaning liquid;

When the flexible cleaning element is moved to the second position of the first spray mechanism, the flexible cleaning element can be moved into the infiltration tank and immersed in the cleaning liquid.

Optionally, the cleaning device further includes a liquid inlet pipeline and a liquid outlet pipeline, the liquid inlet pipeline is used to inject cleaning liquid into the infiltration tank; the liquid outlet pipeline is used to discharge the Soak the cleaning liquid in the tank.

Optionally, the first spray mechanism includes a spray arm, a spray head arranged on the spray arm, a rotation drive source and a lift drive source; wherein the flexible cleaning member is connected to the spray arm;

The rotation driving source is used to drive the spray arm to rotate to the first position or the second position;

The spray head is used to spray cleaning liquid toward the surface of the part to be cleaned when the spray arm rotates to the first position;

The lifting driving source is used to drive the spray arm to rise and fall when the spray arm rotates to the second position, so that the spray arm can drive the flexible cleaning member to move into or out of the soaking tank .

Optionally, the cleaning device further includes a vacuum suction mechanism provided in the base, and the vacuum suction mechanism is used to fix the object to be cleaned on the base by means of suction and fixation.

Optionally, the cleaning device further includes a second spray mechanism, which is arranged on one side of the base and is used to spray cleaning gas onto the surface of the part to be cleaned.

The beneficial technical effects brought about by the technical solutions provided by the embodiments of the present application are:

The cleaning device provided by the embodiment of the present application uses the first spray mechanism to clean the object to be cleaned, and by using the flexible cleaning element to clean the edge of the object to be cleaned, the edge adhesion of the object to be cleaned can be removed more thoroughly The particles and contaminants remain, which can improve the cleaning effect, and thus can improve the yield of the parts to be cleaned. Further, since the flexible cleaning element is in flexible contact with the edge of the object to be cleaned, it will not cause damage to the surface of the object to be cleaned.

The additional aspects and advantages of this application will be partly given in the following description, which will become obvious from the following description, or be understood through the practice of this application.

Description of the drawings

The above and/or additional aspects and advantages of the present application will become obvious and easy to understand from the following description of the embodiments in conjunction with the accompanying drawings, in which:

1 is a schematic structural diagram of the cleaning device provided by the first embodiment of the application when the first spray mechanism is moved to the second position;

2 is a schematic structural diagram of the cleaning device provided by the first embodiment of the application when the first spray mechanism is moved to the first position;

3 is a partial schematic diagram of the flexible cleaning element used in the first embodiment of the application and the edge of the to-be-cleaned element fitted on the axial cross-section of the base;

Fig. 4 is a schematic structural diagram of the cleaning device provided in the second embodiment of the application in the initial state.

Detailed ways

The present application will be described in detail below. Examples of embodiments of the present application are shown in the accompanying drawings, wherein the same or similar reference numerals indicate the same or similar components or components with the same or similar functions. In addition, if a detailed description of the known technology is unnecessary for the illustrated features of the present application, it will be omitted. The embodiments described below with reference to the drawings are exemplary, and are only used to explain the present application, and cannot be construed as a limitation to the present application.

Those skilled in the art can understand that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meanings as those commonly understood by those of ordinary skill in the art to which this application belongs. It should also be understood that terms such as those defined in general dictionaries should be understood to have a meaning consistent with the meaning in the context of the prior art, and unless specifically defined as here, they will not be idealized or overly Explain the formal meaning.

The technical solution of the present application and how the technical solution of the present application solves the above technical problems will be described in detail below with specific embodiments.

The first embodiment

The first embodiment of the present application provides a cleaning device. As shown in FIG. 1, the cleaning device includes a base 13, a first spray mechanism 2 and a flexible cleaning member 31. Wherein, the base 13 is used to carry the object 10 (for example, a wafer) to be cleaned, and can drive the object 10 to be cleaned to rotate. In this embodiment, the cleaning device further includes a driving device 1 for driving the rotation of the base 13. The driving device 1 specifically includes a rotating shaft 12 vertically arranged and connected to the bottom of the base 13, and a driving source 11 for driving the rotating shaft 12 to rotate, and the driving source 11 is, for example, a rotating electric machine. Moreover, the outer diameter of the base 13 is smaller than the outer diameter of the object to be cleaned 10 so that the edge portion of the object to be cleaned 10 placed on the base 13 can protrude from the edge of the base 13.

It should be noted that in practical applications, the base 13 may be arranged in the process chamber, or may also be arranged in other spaces such as a cleaning tank, and does not have to be arranged in the process chamber. This is not done in the embodiment of the present application. Limited, those skilled in the art can adjust the settings by themselves according to the actual situation.

The first spray mechanism 2 is movably arranged on one side of the base 13, and is used to spray the cleaning liquid on the surface of the object 10 to be cleaned when moving to the first position shown in FIG. 2, that is, the first spray The shower mechanism 2 is in a cleaning state when it moves to the first position shown in FIG. 2, and is used to clean the entire surface of the object 10 to be cleaned. The above-mentioned cleaning liquid may specifically be ultrapure water or a chemical liquid used to clean the part 10 to be cleaned, which is not limited in the embodiment of the present application.

The flexible cleaning element 31 is connected to the first spray mechanism 2 and is used to flexibly contact the edge portion of the object to be cleaned 10 extending out of the base 13 when the first spray mechanism 2 moves to the above-mentioned first position, so that the object to be cleaned 10 can be flexibly contacted. The edge part is cleaned. In addition, as shown in FIG. 1, when the first spray mechanism 2 moves to the second position shown in FIG. 1, the flexible cleaning member 31 is separated from the edge portion of the member 10 to be cleaned, that is, the first spray mechanism 2 When moving to the second position shown in FIG. 1, it is in the initial state, and the part 10 to be cleaned is not cleaned.

The cleaning device provided by the embodiment of the present application uses the first spray mechanism 2 to clean the object 10 to be cleaned, and by using the flexible cleaning member 31 to clean the edge of the object 10 to be cleaned, it is possible to more thoroughly remove the object to be cleaned. The particles and contaminants attached to the edge of the part 10 remain, so that the cleaning effect can be improved, and the yield of the part 10 to be cleaned can be improved. Furthermore, since the flexible cleaning element 31 is in flexible contact with the edge of the object to be cleaned 10, it will not cause damage to the surface of the object to be cleaned.

In an embodiment of the present application, the above-mentioned flexible cleaning element 31 includes, for example, a sponge body, which can not only flexibly contact the edge portion of the object to be cleaned 10, but also has good permeability and is sprayed from the first spray mechanism 2. The cleaning liquid can soak the sponge, and the sponge soaked with the cleaning liquid can effectively clean the edges of the object 10 to be cleaned without damaging the surface of the object 10 to be cleaned. The sponge is, for example, a flexible material with good permeability such as polyvinyl alcohol.

In an embodiment of the present application, as shown in FIG. 3, the flexible cleaning member 31 is provided with a groove 311, and when the first spray mechanism 2 moves to the above-mentioned first position, the edge portion of the to-be-cleaned member 10 is inserted into the In the groove 311, the inner surface of the groove 311 is in contact with the outer surface of the edge portion of the object 10 to be cleaned. In this way, the contact area between the flexible cleaning member 31 and the edge portion of the object to be cleaned 10 can be increased, so that the cleaning effect of the edge portion of the object to be cleaned 10 can be further improved.

Furthermore, as shown in FIG. 3, on the axial section of the base 13, the orthographic shape of the groove 311 is consistent with the orthographic shape of the edge portion of the object 10 to be cleaned. Taking the workpiece 10 to be cleaned as an example of a wafer with chamfered upper and lower edges, the inner surface of the groove 311 is in contact with the edge area of the upper and lower surfaces and part of the outer peripheral surface of the wafer. The inner surface of the groove 311 is also provided with a chamfer to achieve complete contact with the edge of the wafer. Of course, in practical applications, the embodiment of the present application does not limit the specific shape of the groove 311, as long as the orthographic projection shape of the groove 311 is consistent with the orthographic projection shape of the edge portion of the object 10 to be cleaned.

Of course, in practical applications, according to different needs, the groove 311 may not be provided, and the flexible cleaning member 31 is only attached to the upper surface, outer peripheral surface, or lower surface of the member 10 to be cleaned; or, it can be changed. The shape of the groove 311 is to fit the flexible cleaning member 31 with at least one of the upper surface, the outer peripheral surface, and the lower surface of the object 10 to be cleaned.

Since it is necessary to clean the edge portion of the object to be cleaned 10, it is difficult to fix the object to be cleaned 10 on the base 13 by a mechanical fixing method. In this case, optionally, the cleaning device further includes a cleaning device arranged in the base 13 The vacuum suction mechanism (not shown in the figure) is used to fix the object to be cleaned 10 on the base 13 by suction and fixation. The vacuum suction mechanism includes, for example, a suction hole provided in the base 13, one end of the suction hole is located on the bearing surface of the base 13 for carrying the object to be cleaned 10, and the other end is connected to the vacuuming device through a corresponding pipeline. When the vacuum device is started, the gas between the bearing surface and the back surface of the object to be cleaned 10 is extracted through the pipeline to generate negative pressure on the back surface of the object to be cleaned 10, so that the suction and fixation of the object to be cleaned 10 can be achieved, and it can be avoided. Movement occurs when the base 13 rotates.

In an embodiment of the present application, the cleaning device further includes a second spraying mechanism 4, which is arranged on one side of the base 13 and used to spray cleaning gas onto the surface of the object 10 to be cleaned. Therefore, the cleaning liquid remaining on the cleaning member 10 can be cleaned. The second spraying mechanism 4 can adopt the same structure as the first spraying mechanism 2, except that: the second spraying mechanism 4 can be arranged on the opposite side of the first spraying mechanism 2; and the first spraying mechanism The shower mechanism 2 is connected to a gas source, and the gas source may be, for example, a nitrogen source. After the first spray mechanism 2 and the flexible cleaning element 31 have cleaned the part to be cleaned 10, the second spray mechanism 4 can spray cleaning gas on the surface of the part to be cleaned 10 to remove the remaining cleaning liquid on the part to be cleaned 10. Clean up.

Second embodiment

As shown in FIG. 4, the cleaning device provided in the second embodiment of the present application is an improvement made on the basis of the above-mentioned first embodiment. Specifically, on the basis of the above-mentioned first embodiment, the cleaning device provided in this embodiment is additionally provided with an infiltration tank 32 containing a cleaning liquid. When the first spray mechanism 2 moves to the second position shown in FIG. 4, the flexible cleaning member 31 can be moved into the soaking tank 32 and immersed in the cleaning liquid. In this way, by immersing the flexible cleaning member 31 in the cleaning liquid during the non-cleaning time, the flexible cleaning member 31 can always be in a state of being soaked by the cleaning liquid, which not only prevents the flexible cleaning member 31 from being exposed to the air for a long time and becoming dry. It is hard to cause damage to the surface of the cleaning member 10 during use, and the flexible cleaning member 31 can be used at any time, which saves the time of waiting for the flexible cleaning member 31 to infiltrate.

In an embodiment of the present application, the cleaning device further includes a liquid inlet pipe 33 and a liquid outlet pipe 34, wherein the liquid inlet pipe 33 is used for injecting cleaning liquid into the infiltration tank 32; the liquid outlet pipe 34 is used for The cleaning liquid in the infiltration tank 32 is discharged. In use, by using the inlet pipe 33 and the outlet pipe 34 to inject and discharge the cleaning liquid at the same time, the cleaning liquid in the infiltration tank 32 can be circulated, so that the cleanliness of the cleaning liquid can be improved, and the cleanliness of the cleaning liquid can be improved. In order to clean the flexible cleaning member 31, it is avoided that particles attached to the flexible cleaning member 31 contaminate the member 10 to be cleaned.

In an embodiment of the present application, the first spray mechanism 2 includes a spray arm 22, a spray head 21 arranged on the spray arm 22, a rotating drive source 24, and a lifting drive source 23; wherein, the flexible cleaning member 31 and The spray arm 22 is connected; the rotation drive source 23 is used to drive the spray arm 22 to rotate to the first position shown in FIG. 2 or the second position shown in FIG. 4; the spray head 21 is used to rotate the spray arm 22 to the above-mentioned first position In the first position, the cleaning liquid is sprayed toward the surface of the object to be cleaned 10; the lifting drive source 24 is used to drive the spray arm 22 to lift when the spray arm 22 rotates to the second position, so that the spray arm 22 can drive flexible cleaning The piece 31 is moved into or out of the infiltration tank 32.

It should be noted that the embodiment of the present application does not limit the connection position and connection mode of the flexible cleaning element 31 and the spray arm 22, as long as the flexible cleaning element 31 can be connected to the object to be cleaned when the spray arm 22 is in the first position. The edge part of 10 is in flexible contact; when the spray arm 22 is in the second position, the flexible cleaning member 31 can be moved into or out of the infiltration tank 32.

It should also be noted that, in this embodiment, driven by the rotary drive source 24 and the lift drive source 23, the spray arm 22 can perform a rotating movement or a lifting movement. FIG. 4 only schematically shows the connection relationship between the rotation drive source 24 and the lift drive source 23, that is, the rotation drive source 24 is connected to the lift shaft of the lift drive source 23, and the rotation shaft of the rotation drive source 24 is connected to the spray arm 22. In this way, the lifting drive source 23 is used to drive the rotary drive source 24 and the spray arm 22 connected to it to move up and down synchronously; the rotary drive source 24 is used to drive the spray arm 22 to rotate. Of course, in practical applications, the rotating shaft of the rotating drive source 24 can also be connected to the lifting drive source 23, and the lifting shaft of the lifting drive source 23 can be connected to the spray arm 22. In this case, the rotating drive source 24 is used The lifting drive source 23 is driven to rotate synchronously with the spray arm 22 connected to it; the lifting drive source 23 is used to drive the spray arm 22 up and down. In addition, the embodiment of the present application does not limit the specific structures of the rotary drive source 24 and the lift drive source 23, as long as the above-mentioned drive function can be realized.

To further illustrate the embodiments of the present application, the cleaning process of the cleaning device provided in the implementation of the present application for cleaning the object to be cleaned 10 will be described in detail below with reference to FIGS. 1 to 3. Specifically, before performing the cleaning process, the flexible cleaning member 31 is immersed in the infiltration tank 32. First, driven by the lifting drive source 23, the spray arm 22 is raised to move the flexible cleaning member 31 out of the infiltration tank 32; then, driven by the rotary drive source 24, the spray arm 22 is rotated from the above-mentioned second position to In the above-mentioned first position, during this process, the flexible cleaning element 31 rotates synchronously and approaches the base 13 until the flexible cleaning element 31 flexibly contacts the edge portion of the object 10 to be cleaned. If the flexible cleaning member 31 is provided with a groove 311, the edge portion of the object 10 to be cleaned is inserted into the groove 311 at this time, and the inner surface of the groove 311 and the outer surface of the edge portion of the object 10 to be cleaned are attached to each other.

The cleaning process is started. Driven by the driving source 11, the base 13 rotates, and the rotation speed of the object 10 to be cleaned can be set to 600 revolutions per minute; the nozzle 21 is turned on to spray and clean the surface of the object 10 to be cleaned. Liquid, the cleaning liquid is deionized water, for example, and the flow rate can be set to 1.5 liters per minute; at the same time, the flexible cleaning member 31 will clean the edge of the cleaning member 10, so that the edge particles with the cleaning member 10 can be removed more thoroughly And pollutant residues.

After the cleaning process of the cleaning liquid is completed, driven by the rotary drive source 24, the spray arm 22 rotates from the first position to the second position, so that the flexible cleaning member 31 rotates to the top of the infiltration tank 32; Driven by the lifting driving source 23, the spray arm 22 descends until the flexible cleaning member 31 is immersed in the infiltration tank 32.

The purge process is started. At this time, the second spray mechanism 4 is used to spray the cleaning gas toward the surface of the object to be cleaned 10; in this process, the rotation speed of the object to be cleaned 10 can be increased, for example, 1700 revolutions per minute. The flow rate can be set to 10 liters/minute. After the purge process is completed, the entire cleaning process ends.

It should be noted that the specific data and the sequence of operations involved in the foregoing specific embodiments are only for illustrative purposes, and are used to limit the application.

In summary, the cleaning device provided in the embodiments of the present application uses the first spray mechanism to clean the object to be cleaned, and by using the flexible cleaning element to clean the edge of the object to be cleaned, the cleaning device can be more thoroughly removed. Particles and contaminants attached to the edges of the cleaning part remain, so that the cleaning effect can be improved, and the yield of the part to be cleaned can be improved. Further, since the flexible cleaning element is in flexible contact with the edge of the object to be cleaned, it will not cause damage to the surface of the object to be cleaned.

It can be understood that the above implementations are merely exemplary implementations used to illustrate the principle of the present invention, but the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also deemed to be within the protection scope of the present invention.

In the description of this application, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", The orientation or positional relationship indicated by "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying The referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention.

The terms "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of these features. In the description of the present invention, unless otherwise specified, "plurality" means two or more.

In the description of this application, it should be noted that the terms "installation", "connection", and "connection" should be understood in a broad sense, unless otherwise clearly specified and limited. For example, it can be a fixed connection or a detachable connection. Connected, or integrally connected; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the internal communication between two components. For those of ordinary skill in the art, the specific meanings of the above-mentioned terms in the present invention can be understood under specific circumstances.

The above are only part of the implementation of this application. It should be pointed out that for those of ordinary skill in the art, without departing from the principles of this application, several improvements and modifications can be made, and these improvements and modifications are also Should be regarded as the scope of protection of this application.

Claims

A cleaning device, characterized by comprising: a base, a first spray mechanism, and a flexible cleaning part, wherein the base is used to carry the part to be cleaned and can drive the part to be cleaned to rotate, and the The outer diameter of the base is smaller than the outer diameter of the part to be cleaned;

The first spray mechanism is movably arranged on one side of the base, and is used to spray cleaning liquid on the surface of the part to be cleaned when it moves to the first position;

The flexible cleaning element is connected to the first spraying mechanism, and is used to flexibly contact the edge portion of the to-be-cleaned part when the first spraying mechanism moves to the first position, so as to The edges of the parts to be cleaned are cleaned.
The cleaning device according to claim 1, wherein the flexible cleaning member is provided with a groove, and when the first spray mechanism moves to the first position, the edge portion of the to-be-cleaned member Inserted into the groove, and the inner surface of the groove is in contact with the outer surface of the edge portion of the part to be cleaned.
3. The cleaning device according to claim 2, wherein in the axial cross section of the base, the orthographic projection shape of the groove is consistent with the orthographic projection shape of the edge portion of the object to be cleaned.
The cleaning device according to claim 1, wherein the flexible cleaning member comprises a sponge body.
The cleaning device according to claim 4, wherein the sponge is made of polyvinyl alcohol.
The cleaning device according to any one of claims 1-5, wherein the cleaning device further comprises an infiltration tank containing a cleaning liquid;

When the first spray mechanism moves to the second position, the flexible cleaning member can be moved into the soaking tank and immersed in the cleaning liquid.
The cleaning device according to claim 6, wherein the cleaning device further comprises a liquid inlet pipeline and a liquid outlet pipeline, the liquid inlet pipeline is used to inject cleaning liquid into the infiltration tank; The liquid outlet pipeline is used to discharge the cleaning liquid in the infiltration tank.
The cleaning device according to claim 6, wherein the first spray mechanism comprises a spray arm, a spray head arranged on the spray arm, a rotating drive source and a lifting drive source; wherein the flexible The cleaning part is connected with the spray arm;

The rotation driving source is used to drive the spray arm to rotate to the first position or the second position;

The spray head is used to spray cleaning liquid toward the surface of the part to be cleaned when the spray arm rotates to the first position;

The lifting drive source is used to drive the spray arm to rise and fall when the spray arm rotates to the second position, so that the spray arm can drive the flexible cleaning member to move into or out of the soaking tank .
The cleaning device according to claim 1, wherein the cleaning device further comprises a vacuum suction mechanism arranged in the base, and the vacuum suction mechanism is used to fix the object to be cleaned by suction. Fixed on the base.
The cleaning device according to claim 1, wherein the cleaning device further comprises a second spraying mechanism, and the second spraying mechanism is arranged on one side of the base and is used for spraying to the to-be-cleaned The surface of the parts is sprayed with cleaning gas.