WO2021103125A1 - 半导体功率器件的制造方法及半导体功率器件 - Google Patents
半导体功率器件的制造方法及半导体功率器件 Download PDFInfo
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- WO2021103125A1 WO2021103125A1 PCT/CN2019/123905 CN2019123905W WO2021103125A1 WO 2021103125 A1 WO2021103125 A1 WO 2021103125A1 CN 2019123905 W CN2019123905 W CN 2019123905W WO 2021103125 A1 WO2021103125 A1 WO 2021103125A1
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 74
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 31
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 25
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 25
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 20
- 229920005591 polysilicon Polymers 0.000 claims abstract description 20
- 238000005530 etching Methods 0.000 claims abstract description 17
- 238000000034 method Methods 0.000 claims abstract description 13
- 238000000151 deposition Methods 0.000 claims abstract description 9
- 230000003647 oxidation Effects 0.000 claims abstract description 9
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 9
- 125000006850 spacer group Chemical group 0.000 claims description 17
- 210000000746 body region Anatomy 0.000 claims description 9
- 238000002955 isolation Methods 0.000 claims description 4
- 230000009286 beneficial effect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 230000008021 deposition Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66484—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with multiple gate, at least one gate being an insulated gate
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42356—Disposition, e.g. buried gate electrode
- H01L29/4236—Disposition, e.g. buried gate electrode within a trench, e.g. trench gate electrode, groove gate electrode
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/6656—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using multiple spacer layers, e.g. multiple sidewall spacers
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66666—Vertical transistors
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7827—Vertical transistors
Definitions
- This application relates to the technical field of semiconductor power devices, for example, to a method for manufacturing a semiconductor power device and a semiconductor power device.
- a related art semiconductor power device includes an n-type drain region, an n-type drift region located above the n-type drain region, and a gate trench recessed in the n-type drift region.
- the gate trench includes an upper part and a lower part of the gate trench .
- the gate polysilicon is located at the sidewall position of the upper part of the gate trench, the shielding gate is located in the lower part of the gate trench and extends up to the upper part of the gate trench, and the shielding gate is isolated from the n-type drift region and the gate polysilicon by a field oxide layer.
- the gate polysilicon when the lower part of the gate trench is formed by etching, the gate polysilicon will be etched laterally, resulting in a reduction in the width of the gate polysilicon.
- the field oxide layer is formed by an oxidation process, the gate polysilicon will also be etched. Oxidation causes the width of the gate polysilicon to be further reduced, which makes it difficult to draw out the gate polysilicon.
- the present application provides a method for manufacturing a semiconductor power device and a semiconductor power device to solve the problem of gate polysilicon extraction in the related art.
- the method for manufacturing a semiconductor power device includes:
- the semiconductor substrate is etched using the hard mask layer as a mask, and a first trench is formed in the semiconductor substrate.
- the width of the first trench is greater than that in the hard mask layer.
- the gate oxide layer and the semiconductor substrate are etched using the hard mask layer as a mask to form a second trench in the semiconductor substrate, and the second trench is located in the first Under the trench
- the semiconductor substrate is etched using the hard mask layer and the silicon nitride sidewall spacers as a mask to form a third trench in the semiconductor substrate, and the third trench is located in the Below the second groove;
- a second layer of polysilicon is deposited and etched back to form a shielding gate in the third trench, the second trench and the first trench.
- the silicon nitride sidewall spacers are first etched away, and then the second field oxide layer is deposited to form the second field oxide layer.
- the width of the third trench is greater than the width of the second trench by increasing the lateral etching.
- a semiconductor power device provided in this application is manufactured by using the manufacturing method of a semiconductor power device provided in this application, including:
- An n-type drift region located above the n-type drain region
- a gate trench recessed in the n drift region, the gate trench includes from top to bottom three parts: the upper part of the gate trench, the middle part of the gate trench, and the lower part of the gate trench;
- P-type body regions located in the n-type drift region and located on both sides of the upper part of the gate trench;
- a shield gate located in the lower part of the gate trench, the shield gate extends from bottom to top into the upper part of the gate trench, and the shield gate communicates with the n-type drift region and the gate through a field oxide layer isolation.
- the width of the upper part of the gate trench is greater than the width of the middle part of the gate trench.
- the width of the lower part of the gate trench is greater than the width of the middle part of the gate trench.
- the thickness of the field oxide layer in the lower part of the gate trench is greater than the thickness of the field oxide layer in the upper part of the gate trench and the middle part of the gate trench.
- silicon nitride sidewall spacers located in the upper part of the gate trench and in the middle part of the gate trench. Isolation.
- the silicon nitride sidewall spacers isolate the field oxide layer from the n-type drift region in the middle of the gate trench.
- the gate polysilicon is protected from being oxidized by the silicon nitride sidewalls, which ensures that the gate polysilicon is protected from oxidation. Width; secondly, after the first field oxide layer is formed by oxidation, the second field oxide layer is deposited to form a thicker field oxide layer in the third trench, which is beneficial to improve the charge balance at the bottom of the gate trench , Improve the withstand voltage of the semiconductor power device; again, when the third trench is formed by etching, the width of the third trench can be increased by increasing the lateral etching, thereby reducing the gap between adjacent third trenches.
- the width of the n-type drift region is beneficial to increase the doping concentration of the n-type drift region and reduce the on-resistance of the semiconductor power device.
- FIG. 1 is a schematic cross-sectional structure diagram of an embodiment of a semiconductor power device provided by the present application
- FIGS. 2 to 7 are schematic cross-sectional structure diagrams of the main process technology node structure in the manufacturing method of the semiconductor power device provided by the present application.
- a semiconductor power device provided by an embodiment of the present application includes an n-type drain region 21; The n-type drift region 22 above the region 21; the gate trench recessed in the n drift region 22, the gate trench includes the upper part of the gate trench, the middle part of the gate trench and the lower part of the gate trench from top to bottom; The p-type body region 28 in the n-type drift region 22 and located on both sides of the upper part of the gate trench; the n-type source region 29 in the p-type body region 28.
- the gate 24 is located on the sidewall of the upper part of the gate trench.
- the gate 24 is isolated from the p-type body region 28 by the gate oxide layer 23;
- the shield gate 27 is located in the lower part of the gate trench, and the shield gate 27 extends from bottom to top.
- the shielding gate 27 is isolated from the n-type drift region 22 by the field oxide layer 26 in the lower part of the gate trench, and the shielding gate 27 is connected to the n-type drift region 22 by the silicon nitride sidewall 25 and the field oxide layer 26 in the middle of the gate trench.
- the n-type drift region 22 is isolated, and the shielding gate 27 is isolated from the gate 24 in the upper part of the gate trench by the silicon nitride sidewall spacer 25 and the field oxide layer 26; the silicon nitride sidewall spacer 25 is an optional structure, that is, it may not be formed Silicon nitride sidewalls, so that the shielding gate 27 is only isolated from the n-type drift region 22 by the field oxide layer 26 in the middle of the gate trench, and the shielding gate 27 is only separated from the n-type drift region 22 by the field oxide layer 26 and the gate 24 in the upper part of the gate trench. isolation.
- the width of the upper part of the gate trench is greater than the width of the middle part of the gate trench.
- the width of the lower part of the gate trench is greater than the width of the middle part of the gate trench, which can reduce the width of the n-type drift region 22 between the lower parts of adjacent gate trenches, which is beneficial to improve the width of the n-type drift region 22.
- Doping concentration reduces the on-resistance of semiconductor power devices.
- the thickness of the field oxide layer 26 in the lower part of the gate trench is greater than the thickness of the field oxide layer 26 in the upper part of the gate trench and the middle part of the gate trench, which helps to improve the charge balance at the bottom of the gate trench and increase the semiconductor power.
- the withstand voltage of the device is provided.
- FIG. 2 to 7 are schematic cross-sectional structure diagrams of the main process technology node structure in the manufacturing method of the semiconductor power device provided by the present application.
- a semiconductor substrate 20 is provided.
- the material of the semiconductor substrate 20 is usually Silicon with n-type doping
- a hard mask layer 30 is formed on the semiconductor substrate 20, and an opening is formed in the hard mask layer 30; then the semiconductor substrate 20 is etched using the hard mask layer 30 as a mask , Forming a first trench in the semiconductor substrate 20.
- the width of the first trench is greater than the width of the opening in the hard mask layer 30 by increasing the lateral etching;
- a trench is the upper part of the gate trench of the semiconductor power device of the embodiment of the application.
- a gate oxide layer 23 is formed on the surface of the first trench, and then a first layer of polysilicon is deposited and the hard mask layer 30 is used as a mask to perform a process on the deposited first layer of polysilicon. Engraving back, a gate 24 is formed on the sidewall of the first trench.
- the gate oxide layer 23 and the semiconductor substrate 20 are etched using the hard mask layer 30 as a mask to form a second trench in the semiconductor substrate 20, and the second trench is located Below the first trench and the width of the second trench is smaller than the width of the first trench, and the second trench is the middle of the gate trench of the semiconductor power device of the embodiment of the application.
- the sidewall spacer 25 is a mask to etch the semiconductor substrate 20, and a third trench is formed in the semiconductor substrate 20.
- the third trench is located below the second trench.
- the third trench is the semiconductor of the embodiment of the application.
- the width of the third trench is increased by increasing the lateral etching, so that the width of the third trench is greater than the width of the second trench, which can reduce the adjacent third trench.
- the width of the n-type drift region between the trenches is beneficial to increase the doping concentration of the n-type drift region and reduce the on-resistance of the semiconductor power device.
- thermal oxidation is performed to form a first field oxide layer on the surface of the third trench.
- the gate 26 will not be oxidized; and then deposit A second field oxide layer is formed, and the second oxide layer and the first oxide layer together constitute the field oxide layer 26 of the semiconductor power device.
- the field oxide layer 26 is formed by the method of thermal oxidation and then deposition, which can make the thickness of the field oxide layer thicker in the third trench, which is beneficial to improve the charge balance at the bottom of the gate trench and increase the withstand voltage of the semiconductor power device.
- the silicon nitride sidewall spacer 25 may be etched away first, and then the second field oxide layer may be deposited.
- a second layer of polysilicon is deposited and etched back to form a shielding gate 27 in the third trench, the second trench, and the first trench.
- the source contact metal layer, the gate contact metal layer, the n-type drain region, the drain contact metal layer and other structures of the semiconductor power device can be prepared by the manufacturing method of the semiconductor power device in the related art. This step will not be shown in detail.
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Abstract
Description
Claims (8)
- 半导体功率器件的制造方法,包括:提供一半导体衬底;在所述半导体衬底上形成硬掩膜层,并在所述硬掩膜层中形成开口;以所述硬掩膜层为掩膜对所述半导体衬底进行刻蚀,在所述半导体衬底内形成第一沟槽,所述第一沟槽的宽度大于所述硬掩膜层中的开口的宽度;在所述第一沟槽的表面形成栅氧化层;淀积第一层多晶硅并以所述硬掩膜层为掩膜对所述第一层多晶硅进行回刻,在所述第一沟槽的侧壁处形成栅极;以所述硬掩膜层为掩膜对所述栅氧化层和所述半导体衬底进行刻蚀,在所述半导体衬底内形成第二沟槽,所述第二沟槽位于所述第一沟槽下方;淀积一层氮化硅并回刻,在所述第一沟槽和所述第二沟槽内形成氮化硅侧墙;以所述硬掩膜层和所述氮化硅侧墙为掩膜对所述半导体衬底进行刻蚀,在所述半导体衬底内形成第三沟槽,所述第三沟槽位于所述第二沟槽下方;进行热氧化,在所述第三沟槽的表面形成第一场氧化层;淀积形成第二场氧化层,所述第二氧化层和所述第一氧化层共同构成半导体功率器件的场氧化层;淀积第二层多晶硅并回刻,在所述第三沟槽、第二沟槽和第一沟槽内形成屏蔽栅。
- 如权利要求1所述的半导体功率器件的制造方法,其中,在形成所述第一场氧化层后,先刻蚀掉所述氮化硅侧墙,再淀积形成所述第二场氧化层。
- 如权利要求1所述的半导体功率器件的制造方法,其中,在刻蚀形成所述第三沟槽时,通过增加横向的刻蚀,使得第三沟槽的宽度大于所述第二沟槽的宽度。
- 如权利要求1所述的半导体功率器件的制造方法制造的半导体功率器件,包括:n型漏区;位于所述n型漏区之上的n型漂移区;凹陷在所述n漂移区中的栅沟槽,所述栅沟槽自上而下包括栅沟槽上部、 栅沟槽中部和栅沟槽下部三部分;位于所述n型漂移区内且位于所述栅沟槽上部的两侧的p型体区;位于所述p型体区内的n型源区;位于所述栅沟槽上部的侧壁处的栅极,所述栅极通过栅氧化层与所述p型体区隔离;位于所述栅沟槽下部内的屏蔽栅,所述屏蔽栅自下而上延伸至所述栅沟槽上部内,所述屏蔽栅通过场氧化层与所述n型漂移区和所述栅极隔离。
- 如权利要求4所述的半导体功率器件,其中,所述栅沟槽上部的宽度大于所述栅沟槽中部的宽度。
- 如权利要求4所述的半导体功率器件,其中,所述栅沟槽下部的宽度大于所述栅沟槽中部的宽度。
- 如权利要求4所述的半导体功率器件,其中,所述栅沟槽下部内的场氧化层的厚度大于所述栅沟槽上部和所述栅沟槽中部内的场氧化层的厚度。
- 如权利要求4所述的半导体功率器件,还包括位于所述栅沟槽上部和所述栅沟槽中部内的氮化硅侧墙,所述氮化硅侧墙在所述栅沟槽上部内将所述场氧化层于所述栅极隔离,所述氮化硅侧墙在所述栅沟槽中部内将所述场氧化层与所述n型漂移区隔离。
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CN201911194101.6 | 2019-11-28 | ||
CN201911194101.6A CN112864019A (zh) | 2019-11-28 | 2019-11-28 | 半导体功率器件的制造方法及半导体功率器件 |
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WO2021103125A1 true WO2021103125A1 (zh) | 2021-06-03 |
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JP2002299618A (ja) * | 2001-01-24 | 2002-10-11 | Toyota Central Res & Dev Lab Inc | 半導体装置とその製造方法 |
US20070138547A1 (en) * | 2005-12-09 | 2007-06-21 | Kabushiki Kaisha Toshiba | Semiconductor device and method of manufacturing the same |
TW201112418A (en) * | 2009-09-16 | 2011-04-01 | Anpec Electronics Corp | Overlapping trench gate semiconductor device and manufacturing method thereof |
CN107527948A (zh) * | 2017-07-28 | 2017-12-29 | 上海华虹宏力半导体制造有限公司 | 屏蔽栅沟槽mosfet及其制造方法 |
CN108376647A (zh) * | 2018-04-19 | 2018-08-07 | 张帅 | 屏蔽栅场效应晶体管及其制造方法(哑铃形) |
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JP2002299618A (ja) * | 2001-01-24 | 2002-10-11 | Toyota Central Res & Dev Lab Inc | 半導体装置とその製造方法 |
US20070138547A1 (en) * | 2005-12-09 | 2007-06-21 | Kabushiki Kaisha Toshiba | Semiconductor device and method of manufacturing the same |
TW201112418A (en) * | 2009-09-16 | 2011-04-01 | Anpec Electronics Corp | Overlapping trench gate semiconductor device and manufacturing method thereof |
CN107527948A (zh) * | 2017-07-28 | 2017-12-29 | 上海华虹宏力半导体制造有限公司 | 屏蔽栅沟槽mosfet及其制造方法 |
CN108376647A (zh) * | 2018-04-19 | 2018-08-07 | 张帅 | 屏蔽栅场效应晶体管及其制造方法(哑铃形) |
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