WO2021093054A1 - 一种制程设备的控制方法及装置 - Google Patents

一种制程设备的控制方法及装置 Download PDF

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Publication number
WO2021093054A1
WO2021093054A1 PCT/CN2019/123151 CN2019123151W WO2021093054A1 WO 2021093054 A1 WO2021093054 A1 WO 2021093054A1 CN 2019123151 W CN2019123151 W CN 2019123151W WO 2021093054 A1 WO2021093054 A1 WO 2021093054A1
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WIPO (PCT)
Prior art keywords
process equipment
total number
display panel
defect
type
Prior art date
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PCT/CN2019/123151
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English (en)
French (fr)
Inventor
闫立磊
Original Assignee
深圳市华星光电半导体显示技术有限公司
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Application filed by 深圳市华星光电半导体显示技术有限公司 filed Critical 深圳市华星光电半导体显示技术有限公司
Priority to US16/622,591 priority Critical patent/US20210325859A1/en
Publication of WO2021093054A1 publication Critical patent/WO2021093054A1/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by quality surveillance of production
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/4184—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by fault tolerance, reliability of production system
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/4183—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by data acquisition, e.g. workpiece identification
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31355—Fault, if one station defect, stop it, other stations take over
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32222—Fault, defect detection of origin of fault, defect of product
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/35—Nc in input of data, input till input file format
    • G05B2219/35481—Display, panel
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45174—Making panels
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Definitions

  • the present invention relates to the field of display technology, in particular to a method and device for controlling process equipment.
  • the inspection equipment detects a defect of the display panel
  • the defect is manually analyzed to determine whether the process equipment is abnormal. If there is an abnormality, the abnormal process equipment is manually shut down.
  • the purpose of the present invention is to provide a method and device for controlling process equipment, which can improve the product yield.
  • the present invention provides a method for controlling process equipment, including:
  • Each display panel prepared by each type of process equipment within a preset period of time is tested.
  • the category of the defect is determined and the number of each type of defect is obtained to obtain multiple inspection data ;
  • Each display panel corresponds to a test data;
  • the process equipment is turned off or the process equipment is controlled to intercept the display panel currently in preparation.
  • the present invention also provides a method for controlling process equipment, including:
  • Each display panel prepared by each type of process equipment within a preset period of time is tested.
  • the category of the defect is determined and the number of each type of defect is obtained to obtain multiple inspection data ;
  • Each display panel corresponds to a test data;
  • the present invention also provides a control device for manufacturing process equipment, which includes:
  • the detection module is used to detect each display panel prepared by each type of process equipment within a preset time period, and when a defect in the display panel is detected, determine the category to which the defect belongs and obtain the quantity of each type of defect, Obtain multiple test data; each display panel corresponds to one test data;
  • An obtaining module configured to obtain the total number of various defects in the display panel prepared by each type of process equipment according to the plurality of inspection data
  • the judgment module is used to judge whether the process equipment is abnormal according to the total number of various defects
  • the control module is used to handle the abnormality of the process equipment when the process equipment is abnormal.
  • the control device of the process equipment of the present invention includes, when a defect is detected in the display panel, determining the category to which the defect belongs and obtaining the quantity of each type of defect to obtain a plurality of detection data; and obtaining according to the plurality of detection data
  • the total number of various defects in the display panel prepared by each type of process equipment; judge whether the process equipment is abnormal according to the total number of each type of defect; if the process equipment is abnormal, the process equipment is abnormally handled; It can automatically detect whether the process equipment is abnormal, so abnormal machines can be detected in time to avoid material waste. When the machine is abnormal, it can be turned off or intercepted the display panel, thereby reducing the scrap rate of the panel and improving the product quality. rate.
  • FIG. 1 is a flowchart of a method for controlling a process equipment according to an embodiment of the present invention
  • FIG. 2 is a flowchart of a method for controlling a process equipment according to the second embodiment of the present invention
  • FIG. 3 is a schematic diagram of the structure of the control device of the process equipment of the present invention.
  • FIG. 4 is a schematic diagram of a preferred structure of the control device of the process equipment of the present invention.
  • Fig. 5 is a schematic structural diagram of the control system of the process equipment of the present invention.
  • the process device for the panel includes a variety of process equipment, each of which can prepare multiple display panels.
  • control method of the process equipment of this embodiment includes:
  • each type of process equipment prepares multiple display panels within a preset period of time, and each display panel is inspected by the inspection equipment. When a defect in the display panel is detected, determine which type of defect the defect belongs to and determine each type. The number of defects, get multiple inspection data. Each display panel corresponds to a detection data.
  • the method may further include: acquiring location information of the defect.
  • the detection data may also include the position information of the defect, such as the coordinate of the defect.
  • the types of defects include scratches and corrosion.
  • the number of scratches detected on the display panel is 3, and the number of corrosions is 6.
  • each of the detection data is associated with an identification number of a display panel; the identification number of the display panel is associated with an identification number of the process equipment.
  • the total number of various defects in all display panels prepared by each type of process equipment is calculated. For example, if process equipment A has prepared 5 display panels, the total number of scratches and the total number of corrosion on the 5 display panels in process equipment A are calculated.
  • the step of obtaining the total number of defects of each type of each display panel prepared by each type of process equipment according to the plurality of inspection data includes:
  • the identification number of each type of process equipment is obtained, and the identification number of the corresponding display panel is obtained according to the identification number of each type of process equipment.
  • the number of the display panel corresponding to the process equipment A is P1 to P5.
  • the process equipment A determines whether the process equipment is abnormal.
  • the total number of scratches and the total number of corrosion can be compared with a preset value, and if one of them is greater than the preset value, it is determined that the process equipment A is abnormal.
  • the average number of the total number of scratches and the total number of corrosion can also be obtained.
  • the average number is greater than the preset value, it is determined that the process equipment is abnormal.
  • the understandable way to determine whether the process equipment is abnormal is not limited to this. When it is determined that there is no abnormality in the process equipment A, return to step S101.
  • the process equipment can be turned off or the process equipment can be controlled to intercept the display panel currently in preparation.
  • the control method of the process equipment of the present invention includes, when a defect is detected in the display panel, determining the category to which the defect belongs and obtaining the quantity of each type of defect to obtain a plurality of inspection data; and acquiring according to the plurality of inspection data
  • the total number of various defects in the display panel prepared by each type of process equipment; judge whether the process equipment is abnormal according to the total number of each type of defect; if the process equipment is abnormal, the process equipment is abnormally handled; It can automatically detect whether the process equipment is abnormal, so that abnormal machines can be detected in time to avoid material waste. When the machine is abnormal, it will be closed, thereby reducing the number of discarded panels and improving the product yield.
  • control method of the process equipment of this embodiment includes:
  • the process equipment includes process equipment A and process equipment B.
  • Process equipment A prepares 5 display panels within a preset time period
  • process equipment B prepares 10 display panels within a preset time period.
  • Each display panel in equipment A and each display panel in process equipment B are tested.
  • Each display panel corresponds to a detection data.
  • the method may further include: acquiring location information of the defect.
  • the detection data may also include the position information of the defect, such as the coordinate of the defect.
  • each of the detection data is associated with an identification number of a display panel; the identification number of the display panel is associated with an identification number of the process equipment.
  • the types of defects include scratches and corrosion.
  • the number of scratches detected from the first display panel to the fifth display panel in the process equipment A are 3, 4, 7, 8, and 6, respectively, and the number of corrosion is 2. 3, 7, 9, 10.
  • the set defect is a defect that has a greater impact on the yield of the display panel.
  • the set defect here may include one type of defect or multiple types of defects. Take the setting defect as scratch as an example.
  • the total number of preset defects in all display panels prepared by each type of process equipment is calculated. For example, if process equipment A prepares 5 display panels, the total number of scratches on the 5 display panels in process equipment A is 28.
  • the step of obtaining the total number of set defects existing in the display panels prepared by each type of process equipment according to the plurality of inspection data includes:
  • the identification number of each type of process equipment is obtained, and the identification number of the corresponding display panel is obtained according to the identification number of each type of process equipment.
  • the number of display panel corresponding to process equipment A is P1 to P5.
  • the numbers of scratches on the display panels P1 to P5 are 3, 4, 7, 8, and 6, respectively.
  • S203 Obtain the total number of display panels prepared by each type of process equipment within the preset time period to obtain the total number of panels;
  • the process equipment A prepares 5 display panels within the preset time period, the total number of panels is 5.
  • S204 Determine whether the process equipment is abnormal according to the total number of set defects and the total number of panels.
  • the step of judging whether the process equipment is abnormal based on the total number of set defects and the total number of panels includes the total number of each type of defect:
  • the ratio of the total number of scratches of each type of process equipment to the total number of panels for example, 28/5 is equal to 5.6
  • determine whether the ratio is greater than the preset threshold determines whether the ratio is greater than the preset threshold, and if the ratio is greater than the preset threshold, determine that the process equipment is abnormal .
  • the preset threshold can be set according to empirical values.
  • the process equipment when it is determined that the process equipment A is abnormal, the process equipment is turned off or the process equipment is controlled to intercept the display panel currently in preparation.
  • this embodiment performs abnormal judgment based on the number of set defects, the judgment process is simplified, thus the detection efficiency is improved, and the production efficiency is further improved.
  • the present invention also provides a control device for manufacturing process equipment. As shown in FIGS. 3 and 4, the device includes: a detection module 21, an acquisition module 22, a judgment module 23, and a control module 24.
  • the detection module 21 is used to detect each display panel prepared by each type of process equipment within a preset time period, and when a defect in the display panel is detected, determine the category to which the defect belongs and obtain the quantity of each type of defect, Obtain multiple detection data; each display panel corresponds to one detection data.
  • the obtaining module 22 is configured to obtain the total number of various defects in the display panel prepared by each type of process equipment according to the plurality of inspection data;
  • the judging module 23 is used for judging whether the process equipment is abnormal according to the total number of various defects;
  • the control module 24 is configured to perform abnormal processing on the process equipment when the process equipment is abnormal.
  • the acquiring module 22 includes:
  • the first obtaining unit 221 is configured to obtain the total number of set defects existing in the display panels prepared by each type of process equipment according to the plurality of inspection data;
  • the second obtaining unit 222 is configured to obtain the total number of display panels prepared by each type of process equipment within a preset time period to obtain the total number of panels;
  • the determining module 23 is specifically configured to determine whether the process equipment is abnormal based on the total number of set defects and the total number of panels.
  • the judgment unit 23 is specifically configured to:
  • a ratio of the total number of the set defects to the total number of the panels is obtained; when the ratio is greater than a preset threshold, it is determined that the process equipment is abnormal.
  • Each of the detection data is associated with the identification number of the display panel; the identification number of the display panel is associated with the identification number of the process equipment;
  • the obtaining module 22 is specifically configured to: obtain the identification number of the display panel corresponding to each type of process equipment to obtain a plurality of target identification numbers; obtain the detection data corresponding to each of the target identification numbers, and calculate each type of detection data in the detection data. The sum of the number of defects.
  • the detection module 21 is further used to obtain location information of the defect.
  • control module 24 is specifically configured to turn off the process equipment or control the process equipment to intercept the display panel currently in preparation when the process equipment is abnormal.
  • the inspection module 41 inspects each display panel prepared by the process equipment 30. When a defect is detected, it obtains the coordinates of the defect and determines the type and design of the defect. Determine the number of defects, obtain inspection data, associate the inspection data with the identification number of the display panel, and send it to the monitoring module 42.
  • the monitoring module 42 obtains the total number of set defects of the process equipment 30 and the total number of display panels prepared by the process equipment 30 within the preset time period, calculates the ratio of the two, and determines whether the ratio is greater than the preset threshold, and if the ratio is greater than the preset If the threshold is set, the monitoring module 42 determines that the process equipment 30 is abnormal, and then the monitoring module 42 generates an abnormal handling instruction and sends it to the management module 43.
  • the monitoring module 42 can set a delay time, and can analyze whether the abnormality needs to actually issue an instruction to intercept the panel or shut down the standstill during the delay time. If it is not abnormal, the message can be cancelled.
  • the management module 43 When the management module 43 receives the abnormal handling instruction sent by the monitoring module 42, it converts the message and sends it to the relay module 44, and the relay module 44 directly issues instructions to the process equipment 30 to intercept abnormally produced panels to prevent inflow to the subsequent process; or The process equipment 30 is directly shut down for the engineer to monitor and repair it.
  • the control device of the process equipment of the present invention includes, when a defect is detected in the display panel, determining the category to which the defect belongs and obtaining the quantity of each type of defect to obtain a plurality of detection data; and obtaining according to the plurality of detection data
  • the total number of various defects in the display panel prepared by each type of process equipment; determine whether the process equipment is abnormal according to the total number of each type of defect; if the process equipment is abnormal, the process equipment is abnormally handled; It can automatically detect whether the process equipment is abnormal, so the abnormal machine can be detected in time to avoid material waste. When the machine is abnormal, it can be turned off or the display panel is blocked, thereby reducing the scrap rate of the panel and improving the product quality. rate.

Abstract

本发明提供一种制程设备的控制方法及装置，该方法包括：当检测到所述显示面板存在缺陷时，确定所述缺陷所属的类别以及获取每种缺陷的数量，得到多个检测数据；根据所述多个检测数据获取每种制程设备制备的显示面板存在的各种缺陷的总数；根据各种缺陷的总数判断所述制程设备是否出现异常；以对所述制程设备进行异常处理。

Description

一种制程设备的控制方法及装置 技术领域
本发明涉及显示技术领域，特别是涉及一种制程设备的控制方法及装置。
 背景技术
目前当检测设备检测出显示面板的缺陷（Defect）时，由人工对缺陷进行分析，以判断制程设备是否出现异常，如果出现异常，通过人工将异常的制程设备关闭。
 技术问题
然而，当缺陷过多时，人工无法及时对多个缺陷进行处理，因此容易将不合格的面板流入后续制程，浪费加工材料，此外由于无法将异常的制程设备关闭，导致报废的面板数量增加，因而导致产品良率较低。
因此，有必要提供一种制程设备的控制方法及装置，以解决现有技术所存在的问题。
 技术解决方案
本发明的目的在于提供一种制程设备的控制方法及装置，能够提高产品良率。
为解决上述技术问题，本发明提供一种制程设备的控制方法，包括：
对每种制程设备在预设时长内制备的每个显示面板进行检测，当检测到所述显示面板存在缺陷时，确定所述缺陷所属的类别以及获取每种缺陷的数量，得到多个检测数据；每个显示面板对应一检测数据；
根据所述多个检测数据获取每种制程设备制备的显示面板存在的设定缺陷的总数；
获取预设时长内每种制程设备制备的显示面板的总数，得到面板总量；
根据所述设定缺陷的总数和所述面板总量，判断所述制程设备是否出现异常；以及
若所述制程设备出现异常，则关闭所述制程设备或者控制所述制程设备拦截当前制备中的显示面板。
本发明还提供一种制程设备的控制方法，包括：
对每种制程设备在预设时长内制备的每个显示面板进行检测，当检测到所述显示面板存在缺陷时，确定所述缺陷所属的类别以及获取每种缺陷的数量，得到多个检测数据；每个显示面板对应一检测数据；
根据所述多个检测数据获取每种制程设备制备的显示面板存在的各种缺陷的总数；
根据各种缺陷的总数判断所述制程设备是否出现异常；
若所述制程设备出现异常，则对所述制程设备进行异常处理。
本发明还提供一种制程设备的控制装置，其包括：
检测模块，用于对每种制程设备在预设时长内制备的每个显示面板进行检测，当检测到所述显示面板存在缺陷时，确定所述缺陷所属的类别以及获取每种缺陷的数量，得到多个检测数据；每个显示面板对应一检测数据；
获取模块，用于根据所述多个检测数据获取每种制程设备制备的显示面板存在的各种缺陷的总数；
判断模块，用于根据各种缺陷的总数判断所述制程设备是否出现异常；
控制模块，用于当所述制程设备出现异常时，对所述制程设备进行异常处理。
 有益效果
本发明的制程设备的控制装置，包括当检测到所述显示面板存在缺陷时，确定所述缺陷所属的类别以及获取每种缺陷的数量，得到多个检测数据；根据所述多个检测数据获取每种制程设备制备的显示面板存在的各种缺陷的总数；根据每种缺陷的总数判断所述制程设备是否出现异常；若所述制程设备出现异常，则对所述制程设备进行异常处理；由于可以自动检测制程设备是否异常，因此可以及时地检测出异常的机台，避免材料的浪费，当机台异常时，将其关闭或者拦截显示面板，从而降低了面板的报废率，提高了产品良率。
 附图说明
图1为本发明实施例一制程设备的控制方法的流程图；
图2为本发明实施例二制程设备的控制方法的流程图；
图3为本发明制程设备的控制装置的结构示意图；
图4为本发明制程设备的控制装置的优选结构示意图；
图5为本发明制程设备的控制系统的结构示意图。
 本发明的实施方式
以下各实施例的说明是参考附加的图式，用以例示本发明可用以实施的特定实施例。本发明所提到的方向用语，例如「上」、「下」、「前」、「后」、「左」、「右」、「内」、「外」、「侧面」等，仅是参考附加图式的方向。因此，使用的方向用语是用以说明及理解本发明，而非用以限制本发明。在图中，结构相似的单元是以相同标号表示。
本申请的说明书和权利要求书及上述附图中的术语“第一”、“第二”等是用于区别不同对象，而不是用于描述特定顺序。此外，术语“包括”和“具有”以及它们任何变形，意图在于覆盖不排他的包含。
面板的制程装置包括多种制程设备，每种制程设备可以制备多个显示面板。
如图1所示，本实施例的制程设备的控制方法包括：
S101、对每种制程设备在预设时长内制备的每个显示面板进行检测，当检测到所述显示面板存在缺陷时，确定所述缺陷所属的类别以及获取每种缺陷的数量，得到多个检测数据；
例如，每种制程设备在预设时长内制备多个显示面板，通过检测设备对每个显示面板进行检测，当检测到显示面板存在缺陷时，确定该缺陷属于哪一种缺陷以及确定每一种缺陷的数量，得到多个检测数据。每个显示面板对应一检测数据。
当检测到所述显示面板存在缺陷时，所述方法还可包括：获取所述缺陷的位置信息。
也即，其中检测数据还可包括缺陷的位置信息，位置信息比如缺陷的坐标。
比如缺陷的种类包括刮伤和腐蚀，检测到该显示面板刮伤的数量为3个，腐蚀的数量为6个。
在一实施方式中，其中每个所述检测数据与显示面板的标识号关联；所述显示面板的标识号与所述制程设备的标识号关联。
S102、根据所述多个检测数据获取每种制程设备制备的显示面板存在的各种缺陷的总数；
例如，根据步骤S101中获取的检测数据，计算得到每种制程设备制备的所有显示面板存在各种缺陷的总数。比如制程设备A，制备了5个显示面板，则计算制程设备A中的5个显示面板存在刮伤的总数和存在腐蚀的总数。
所述根据所述多个检测数据获取每种制程设备制备的各显示面板的每种缺陷的总数的步骤包括：
S1021、获取每种制程设备对应的显示面板的标识号，得到多个目标标识号；
例如，获取每种制程设备的标识号，根据每种制程设备的标识号获取对应的显示面板的标识号。比如制程设备A对应显示面板的编号为P1至P5。
S1022、获取每个所述目标标识号对应的检测数据；
分别获取P1至P5对应的检测数据。
S1023、计算所述检测数据中每种缺陷的数量的总和。
例如，分别计算P1至P5中每种缺陷的数量的总和，也即P1至P5中每种缺陷的总数量。
S103、根据每种缺陷的总数判断所述制程设备是否出现异常；
例如，根据制程设备A中的5个显示面板存在刮伤的总数和存在腐蚀的总数判断制程设备是否出现异常。
比如在一实施方式中，可以将刮伤的总数、腐蚀的总数与预设值比较，如果其中一个大于预设值，则判断制程设备A出现异常。当然，可以理解的，在其他实施方式中，还可以获取刮伤的总数和腐蚀的总数的平均数，当平均数大于预设值时，则判定该制程设备出现异常。可以理解的判断制程设备是否出现异常的方式不限于此。当确定制程设备A未出现异常，则返回步骤S101。
S104、若所述制程设备出现异常，则对所述制程设备进行异常处理。
例如，当确定制程设备A出现异常，则可关闭所述制程设备或者控制所述制程设备拦截当前制备中的显示面板。
本发明的制程设备的控制方法，包括当检测到所述显示面板存在缺陷时，确定所述缺陷所属的类别以及获取每种缺陷的数量，得到多个检测数据；根据所述多个检测数据获取每种制程设备制备的显示面板存在的各种缺陷的总数；根据每种缺陷的总数判断所述制程设备是否出现异常；若所述制程设备出现异常，则对所述制程设备进行异常处理；由于可以自动检测制程设备是否异常，因此可以及时地检测出异常的机台，避免材料的浪费，当机台异常时，将其关闭，从而降低了报废的面板数量，提高了产品良率。
如图2所示，本实施例的制程设备的控制方法包括：
S201、对每种制程设备在预设时长内制备的每个显示面板进行检测，当检测到所述显示面板存在缺陷时，确定所述缺陷所属的类别以及获取每种缺陷的数量，得到多个检测数据；
例如，比如制程设备包括制程设备A和制程设备B，制程设备A在预设时长内制备了5个显示面板，制程设备B在预设时长内制备了10个显示面板，则通过检测设备对制程设备A中的每个显示面板以及制程设备B中的每个显示面板进行检测，当检测到显示面板存在缺陷时，确定该缺陷属于哪一种缺陷以及确定每一种缺陷的数量，得到多个检测数据。每个显示面板对应一检测数据。
当检测到所述显示面板存在缺陷时，所述方法还可包括：获取所述缺陷的位置信息。
也即，其中检测数据还可包括缺陷的位置信息，位置信息比如缺陷的坐标。
在一实施方式中，其中每个所述检测数据与显示面板的标识号关联；所述显示面板的标识号与所述制程设备的标识号关联。
比如缺陷的种类包括刮伤和腐蚀，检测到制程设备A中第一个显示面板至第五个显示面板的刮伤的数量分别为3、4、7、8、6，腐蚀的数量为2、3、7、9、10。
S202、根据所述多个检测数据获取每种制程设备制备的显示面板存在的设定缺陷的总数；
例如，其中设定缺陷为对显示面板的良率影响较大的缺陷，这里的设定缺陷可以包括一种缺陷，也可包括多种缺陷。以设定缺陷为刮伤为例。
根据步骤S101中获取的检测数据，计算得到每种制程设备制备的所有显示面板存在设定缺陷的总数。比如制程设备A，制备了5个显示面板，则计算制程设备A中的5个显示面板存在刮伤的总数为28。
所述根据所述多个检测数据获取每种制程设备制备的显示面板存在的设定缺陷的总数的步骤包括：
S2021、获取每种制程设备对应的显示面板的标识号，得到多个目标标识号；
例如，获取每种制程设备的标识号，根据每种制程设备的标识号获取对应的显示面板的标识号。比如制程设备A对应显示面板的编号为P1至P5.
S2022、获取每个所述目标标识号对应的检测数据；
分别获取P1至P5对应的检测数据。P1至P5显示面板的刮伤的数量分别为3、4、7、8、6。
S2023、计算所述检测数据中设定缺陷的数量的总和。
例如，分别计算P1至P5中刮伤数量的总和，也即P1至P5中刮伤的总数量，比如为28。
S203、获取预设时长内每种制程设备制备的显示面板的总数，得到面板总量；
例如，制程设备A在预设时长内制备了5个显示面板，则面板总量为5。
S204、根据所述设定缺陷的总数和面板总量，判断所述制程设备是否出现异常。
例如，根据每种制程设备刮伤的总数和面板总量判断该制程设备是否出现异常。
在一实施方式中，为了提高检测的准确性，所述根据所述设定缺陷的总数和面板总量，判断所述制程设备是否出现异常的步骤包括每种缺陷的总数：
S2041、获取所述设定缺陷的总数和所述面板总量的比值；
S2042、当所述比值大于预设阈值时，则确定所述制程设备出现异常。
比如，分别获取每种制程设备刮伤的总数和面板总量的比值，比如为28/5等于5.6，判断该比值是否大于预设阈值，如果该比值大于预设阈值则判定该制程设备出现异常。该预设阈值可以根据经验值设定。
可以理解的，当设定缺陷为多种时，当其中一种比值大于预设阈值时，则判定该制程设备出现异常。
S205、若所述制程设备出现异常，则对所述制程设备进行异常处理。
例如，当确定制程设备A出现异常，则关闭所述制程设备或者控制所述制程设备拦截当前制备中的显示面板。
在上一实施例的基础上，由于本实施例根据设定缺陷的数量进行异常的判断，简化了判断流程，因此提高了检测效率，此外进一步提高了生产效率。
本发明还提供一种制程设备的控制装置，如图3和4所示，所述装置包括：检测模块21、获取模块22、判断模块23以及控制模块24。
检测模块21用于对每种制程设备在预设时长内制备的每个显示面板进行检测，当检测到所述显示面板存在缺陷时，确定所述缺陷所属的类别以及获取每种缺陷的数量，得到多个检测数据；每个显示面板对应一检测数据。
获取模块22用于根据所述多个检测数据获取每种制程设备制备的显示面板存在的各种缺陷的总数；
判断模块23用于根据各种缺陷的总数判断所述制程设备是否出现异常；
控制模块24用于当所述制程设备出现异常时，对所述制程设备进行异常处理。
在一实施方式中，所述获取模块22包括：
第一获取单元221，用于根据所述多个检测数据获取每种制程设备制备的显示面板存在的设定缺陷的总数；
第二获取单元222，用于获取预设时长内每种制程设备制备的显示面板的总数，得到面板总量；
所判断模块23具体用于：根据所述设定缺陷的总数和所述面板总量，判断所述制程设备是否出现异常。
在一实施方式中，所述判断单元23具体用于；
获取所述设定缺陷的总数和所述面板总量的比值；当所述比值大于预设阈值时，则确定所述制程设备出现异常。
其中每个所述检测数据与显示面板的标识号关联；所述显示面板的标识号与所述制程设备的标识号关联；
所述获取模块22具体用于：获取每种制程设备对应的显示面板的标识号，得到多个目标标识号；获取每个所述目标标识号对应的检测数据，计算所述检测数据中每种缺陷的数量的总和。
当检测到所述显示面板存在缺陷时，所述检测模块21还用于：获取所述缺陷的位置信息。
在一实施方式至，控制模块24具体用于当所述制程设备出现异常时，关闭所述制程设备或者控制所述制程设备拦截当前制备中的显示面板。
比如，在一具体实施例中，如图5所示，检测模块41对该制程设备30制备的每个显示面板进行检测，当检测到存在缺陷时，获取缺陷的坐标以及确定缺陷的种类以及设定缺陷的数量，得到检测数据，将该检测数据与显示面板的标识号关联后发送至监控模块42。监控模块42获取该制程设备30的设定缺陷的总数和预设时长内该制程设备制备30的显示面板的总数，计算两个的比值，判断该比值是否大于预设阈值，如果该比值大于预设阈值，则监控模块42确定该制程设备30出现异常，之后监控模块42生成异常处理指令，并将其发送给管理模块43。
其中监控模块42可设置延迟时间，可在延迟时间内分析此异常是否需要真正下发拦截面板或者关停机台的指令，若非异常可取消发送消息。
管理模块43收到监控模块42发送的异常处理指令时，对消息进行转换后发给中转模块44，中转模块44直接对制程设备30下发指令，拦截异常生产的面板，防止流入后制程；或直接将该制程设备30停机，以便工程师监测并对其修复。
本发明的制程设备的控制装置，包括当检测到所述显示面板存在缺陷时，确定所述缺陷所属的类别以及获取每种缺陷的数量，得到多个检测数据；根据所述多个检测数据获取每种制程设备制备的显示面板存在的各种缺陷的总数；根据每种缺陷的总数判断所述制程设备是否出现异常；若所述制程设备出现异常，则对所述制程设备进行异常处理；由于可以自动检测制程设备是否异常，因此可以及时地检测出异常的机台，避免材料的浪费，当机台异常时，将其关闭或者拦截显示面板，从而降低了面板的报废率，提高了产品良率。
综上所述，虽然本发明已以优选实施例揭露如上，但上述优选实施例并非用以限制本发明，本领域的普通技术人员，在不脱离本发明的精神和范围内，均可作各种更动与润饰，因此本发明的保护范围以权利要求界定的范围为准。

Claims (16)

  1. 一种制程设备的控制方法，其特征在于，
    对每种制程设备在预设时长内制备的每个显示面板进行检测，当检测到所述显示面板存在缺陷时，确定所述缺陷所属的类别以及获取每种缺陷的数量，得到多个检测数据；每个显示面板对应一检测数据；
    根据所述多个检测数据获取每种制程设备制备的显示面板存在的设定缺陷的总数；
    获取预设时长内每种制程设备制备的显示面板的总数，得到面板总量；
    根据所述设定缺陷的总数和所述面板总量，判断所述制程设备是否出现异常；以及
    若所述制程设备出现异常，则关闭所述制程设备或者控制所述制程设备拦截当前制备中的显示面板。
  2. 根据权利要求1所述的制程设备的控制方法，其特征在于，所述根据设定缺陷的总数和面板总量，判断所述制程设备是否出现异常的步骤包括：
    获取所述设定缺陷的总数和所述面板总量的比值；以及
    当所述比值大于预设阈值时，则确定所述制程设备出现异常。
  3. 根据权利要求1所述的制程设备的控制方法，其特征在于，其中每个所述检测数据与显示面板的标识号关联；所述显示面板的标识号与所述制程设备的标识号关联；
    所述根据所述多个检测数据获取每种制程设备制备的各显示面板的每种缺陷的总数的步骤包括：
    获取每种制程设备对应的显示面板的标识号，得到多个目标标识号；
    获取每个所述目标标识号对应的检测数据；以及
    计算所述检测数据中每种缺陷的数量的总和。
  4. 根据权利要求1所述的制程设备的控制方法，其特征在于，当检测到所述显示面板存在缺陷时，所述方法还包括：
    获取所述缺陷的位置信息。
  5. 一种制程设备的控制方法，其特征在于，
    对每种制程设备在预设时长内制备的每个显示面板进行检测，当检测到所述显示面板存在缺陷时，确定所述缺陷所属的类别以及获取每种缺陷的数量，得到多个检测数据；每个显示面板对应一检测数据；
    根据所述多个检测数据获取每种制程设备制备的显示面板存在的各种缺陷的总数；
    根据各种缺陷的总数判断所述制程设备是否出现异常；以及
    若所述制程设备出现异常，则对所述制程设备进行异常处理。
  6. 根据权利要求5所述的制程设备的控制方法，其特征在于，所述根据所述多个检测数据获取每种制程设备制备的显示面板存在的各种缺陷的总数的步骤包括：
    根据所述多个检测数据获取每种制程设备制备的显示面板存在的设定缺陷的总数；
    获取预设时长内每种制程设备制备的显示面板的总数，得到面板总量；
    所根据各种缺陷的总数判断所述制程设备是否出现异常的步骤包括：
    根据所述设定缺陷的总数和所述面板总量，判断所述制程设备是否出现异常。
  7. 根据权利要求6所述的制程设备的控制方法，其特征在于，所述根据设定缺陷的总数和面板总量，判断所述制程设备是否出现异常的步骤包括：
    获取所述设定缺陷的总数和所述面板总量的比值；
    当所述比值大于预设阈值时，则确定所述制程设备出现异常。
  8. 根据权利要求5所述的制程设备的控制方法，其特征在于，其中每个所述检测数据与显示面板的标识号关联；所述显示面板的标识号与所述制程设备的标识号关联；
    所述根据所述多个检测数据获取每种制程设备制备的各显示面板的每种缺陷的总数的步骤包括：
    获取每种制程设备对应的显示面板的标识号，得到多个目标标识号；
    获取每个所述目标标识号对应的检测数据；以及
    计算所述检测数据中每种缺陷的数量的总和。
  9. 根据权利要求5所述的制程设备的控制方法，其特征在于，当检测到所述显示面板存在缺陷时，所述方法还包括：
    获取所述缺陷的位置信息。
  10. 根据权利要求5所述的制程设备的控制方法，其特征在于，所述对所述制程设备进行异常处理的步骤包括：
    关闭所述制程设备或者控制所述制程设备拦截当前制备中的显示面板。
  11. 一种制程设备的控制装置，其特征在于，
    检测模块，用于对每种制程设备在预设时长内制备的每个显示面板进行检测，当检测到所述显示面板存在缺陷时，确定所述缺陷所属的类别以及获取每种缺陷的数量，得到多个检测数据；每个显示面板对应一检测数据；
    获取模块，用于根据所述多个检测数据获取每种制程设备制备的显示面板存在的各种缺陷的总数；
    判断模块，用于根据各种缺陷的总数判断所述制程设备是否出现异常；
    控制模块，用于当所述制程设备出现异常时，对所述制程设备进行异常处理。
  12. 根据权利要求11所述的制程设备的控制装置，其特征在于，所获取模块包括：
    第一获取单元，用于根据所述多个检测数据获取每种制程设备制备的显示面板存在的设定缺陷的总数；
    第二获取单元，用于获取预设时长内每种制程设备制备的显示面板的总数，得到面板总量；
    所判断模块具体用于：根据所述设定缺陷的总数和所述面板总量，判断所述制程设备是否出现异常。
  13. 根据权利要求12所述的制程设备的控制装置，其特征在于，所述判断单元，具体用于；
    获取所述设定缺陷的总数和所述面板总量的比值；当所述比值大于预设阈值时，则确定所述制程设备出现异常。
  14. 根据权利要求11所述的制程设备的控制装置，其特征在于，其中每个所述检测数据与显示面板的标识号关联；所述显示面板的标识号与所述制程设备的标识号关联；
    所述获取模块具体用于：获取每种制程设备对应的显示面板的标识号，得到多个目标标识号；获取每个所述目标标识号对应的检测数据，并计算所述检测数据中每种缺陷的数量的总和。
  15. 根据权利要求11所述的制程设备的控制装置，其特征在于，当检测到所述显示面板存在缺陷时，所述检测模块还用于获取所述缺陷的位置信息。
  16. 根据权利要求11所述的制程设备的控制装置，其特征在于，所述控制模块具体用于：关闭所述制程设备或者控制所述制程设备拦截当前制备中的显示面板。
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5389786A (en) * 1992-10-06 1995-02-14 President Of Nagoya University Method of quantitative determination of defect concentration on surfaces
CN1501434A (zh) * 2002-11-14 2004-06-02 旺宏电子股份有限公司 连续异常缺陷快速警示系统及方法
CN1521822A (zh) * 2003-01-29 2004-08-18 力晶半导体股份有限公司 缺陷检测参数分析方法
CN102522350A (zh) * 2011-11-29 2012-06-27 上海华力微电子有限公司 故障生产机台检测的方法和装置
CN110146513A (zh) * 2019-05-27 2019-08-20 深圳市华星光电技术有限公司 缺陷判定方法及缺陷判定装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100533657C (zh) * 2006-06-30 2009-08-26 株式会社东芝 警报装置
CN103811367B (zh) * 2012-11-07 2016-06-15 中芯国际集成电路制造(上海)有限公司 产品缺陷检测方法
KR20190051395A (ko) * 2017-11-06 2019-05-15 삼성전자주식회사 피검사 장치의 검사 시스템 및 방법

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5389786A (en) * 1992-10-06 1995-02-14 President Of Nagoya University Method of quantitative determination of defect concentration on surfaces
CN1501434A (zh) * 2002-11-14 2004-06-02 旺宏电子股份有限公司 连续异常缺陷快速警示系统及方法
CN1521822A (zh) * 2003-01-29 2004-08-18 力晶半导体股份有限公司 缺陷检测参数分析方法
CN102522350A (zh) * 2011-11-29 2012-06-27 上海华力微电子有限公司 故障生产机台检测的方法和装置
CN110146513A (zh) * 2019-05-27 2019-08-20 深圳市华星光电技术有限公司 缺陷判定方法及缺陷判定装置

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