WO2021092749A1 - Procédé et dispositif d'étalonnage de multiples capteurs pour mesure sans contact, et bloc de référence - Google Patents

Procédé et dispositif d'étalonnage de multiples capteurs pour mesure sans contact, et bloc de référence Download PDF

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Publication number
WO2021092749A1
WO2021092749A1 PCT/CN2019/117453 CN2019117453W WO2021092749A1 WO 2021092749 A1 WO2021092749 A1 WO 2021092749A1 CN 2019117453 W CN2019117453 W CN 2019117453W WO 2021092749 A1 WO2021092749 A1 WO 2021092749A1
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WO
WIPO (PCT)
Prior art keywords
spectral confocal
probe
horizontal
confocal probe
standard block
Prior art date
Application number
PCT/CN2019/117453
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English (en)
Chinese (zh)
Inventor
颜昌亚
周向东
张子龙
张庆祥
李振瀚
唐小琦
卢少武
曾祥兵
Original Assignee
东莞市三姆森光电科技有限公司
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Application filed by 东莞市三姆森光电科技有限公司 filed Critical 东莞市三姆森光电科技有限公司
Priority to PCT/CN2019/117453 priority Critical patent/WO2021092749A1/fr
Publication of WO2021092749A1 publication Critical patent/WO2021092749A1/fr
Priority to ZA2022/01072A priority patent/ZA202201072B/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Definitions

  • the invention belongs to the field of non-contact measurement, and more specifically relates to a multi-probe calibration method, calibration device and standard block in non-contact measurement.
  • non-contact measurement is one of the common methods for parts inspection. This method usually uses optical measurement technology to avoid direct contact between the measuring equipment and the parts. But for the detection of curved parts, the accuracy of non-contact measurement is usually related to the angle between the probe axis and the normal direction of the measured surface point. When the curvature of the surface to be tested changes greatly, if the posture of the non-contact probe remains unchanged, it may not be possible to obtain complete surface profile data.
  • the first is to install the probe on a multi-axis (4-5 axis) motion mechanism to meet the spatial angle adjustment requirements of the measuring beam vector, but due to the motion
  • the accuracy of the mechanism will greatly reduce the measurement accuracy of the entire measurement system, which cannot meet the requirements of high-precision measurement of curved parts
  • the other is to use a measuring device equipped with multiple probes, and let each probe be responsible for measuring the curved surface. Part of the area data, and then the measurement data of each probe is converted to a unified coordinate system.
  • the problem with this solution is that the calibration of multiple non-contact probes and the calculation of the relative position between the probes must Fast and high-precision completion.
  • the patent document "Method and Equipment for Measuring the Contour of Mobile Phone Curved Shell Based on Spectral Confocal Technology" (application number CN201711415852.7) provides a method and equipment for high-precision detection of mobile phone back and side surfaces.
  • the device installs three spectral confocal probes on the linear motion axis, and each probe is connected to the motion axis through an angle adjustment mechanism. Using these three probes, the surface scanning measurement of the mobile phone shell parts fixed on the platform carried by the DD motor is carried out.
  • the patent requires that the light spots of the three spectral confocal measuring instruments are located on a straight line parallel to the axis, and the angle between the ray extension line of the dispersive spectral confocal measuring instrument on both sides and the vertical ray extension line of the intermediate dispersion spectral confocal measuring instrument It needs to be accurately calculated, but the method disclosed in the patent document is used to calibrate and calculate the included angle between each spectral confocal probe, which is more complicated.
  • the present invention provides the society with a multi-probe calibration method, a calibration device and a standard block in a non-contact measurement with convenient and accurate calibration and easy calculation of the included angle.
  • the technical scheme of the present invention is to provide the society with a multi-probe calibration method in non-contact measurement, which is suitable for having measuring equipment, horizontal rotating device and machine tool, and the measuring equipment and horizontal rotating device are respectively arranged on the machine tool, and the measuring equipment
  • the multi-probe calibration of the measuring device located above the horizontal rotating device includes the following steps:
  • S1 Install the standard block on the workbench of the horizontal rotation device.
  • the upper and bottom surface of the standard block includes a first inclined plane, a horizontal plane, and a second inclined plane connected in sequence, and the first inclined plane and the second inclined plane are respectively inclined downwardly ;
  • Starting from the first inclined plane successively through the horizontal plane and the second inclined plane are provided with a continuous first horizontal groove, a second horizontal groove and a third horizontal groove, and a first vertical groove is provided on the first inclined plane perpendicular to the first horizontal groove , A third vertical groove is provided on the second inclined plane perpendicular to the third horizontal groove;
  • the step of adjusting the edge of the horizontal groove of the standard block to be parallel to the x-axis of the machine tool is that the machine tool drives the intermediate spectral confocal probe to measure the standard block to obtain the working starting point A to the spectral confocal probe
  • record the position B of the sudden change in the measured value make the machine tool move a predetermined distance along the x-axis from BC to position C, and then control the middle spectral confocal probe to move along the machine's y-axis, and record the second sudden change in the measurement data
  • the standard block is rotated by the angle ⁇ , so that the edge of the horizontal groove of the standard block is parallel to the x-axis of the machine tool.
  • the steps of adjusting the axes of the middle spectral confocal probe, the left spectral confocal probe and the right spectral confocal probe to be in the same plane are as follows:
  • the distance value obtained by the intermediate spectrum confocal probe will change suddenly, record the position of the sudden change of data, and share the intermediate spectrum.
  • the focus probe is fixed at this position; the light spot of the left spectral confocal probe is moved from the side of the first horizontal groove of the standard block to the first horizontal groove, and the light spot of the left spectral confocal probe is recorded from the surface of the standard block.
  • the step of calculating the first included angle ⁇ 1 and the second included angle ⁇ 2 in step S6 is: controlling the left side spectral confocal probe to move from the outside to the inside of the first vertical slot along the x-axis of the machine tool,
  • the obtained distance value will undergo a sudden change.
  • the distance value before the sudden change is recorded as d 1
  • the distance value after the sudden change is recorded as d 2 ;
  • Formula two you can calculate the angle ⁇ 1 between the axis of the left probe and the axis of the middle probe,
  • d is the vertical distance between the edge of the vertical groove of the standard block and the bottom surface of the vertical groove
  • d 1 and d 2 are the light spots of the left or right spectral confocal probe projected to the edge of the vertical groove and the vertical groove of the standard block, respectively The measured distance value at the bottom
  • ⁇ is the angle between the inclined plane of the standard block and the horizontal plane.
  • the present invention also provides a calibration device for multiple probes in non-contact measurement, which includes a measuring device, a horizontal rotating device, a machine tool and a standard block.
  • the measuring device and the horizontal rotating device are respectively arranged on the machine tool, and the measuring device is located on the horizontal rotating device.
  • the horizontal rotating device includes a worktable, And a motor for driving the work platform to move under the workbench, the standard block is arranged on the workbench of the horizontal rotating device, and the upper bottom surface of the standard block includes a first inclined plane, a horizontal plane, and a second inclined plane connected in sequence, The first inclined surface and the second inclined surface are respectively inclined downward; starting from the first inclined surface, successively passing through the horizontal plane and the second inclined surface, a continuous first transverse groove, a second transverse groove and a third transverse groove are provided.
  • a first vertical groove is provided on the inclined surface perpendicular to the first horizontal groove, and a third vertical groove is provided on the second inclined surface perpendicular to the third horizontal groove.
  • the left spectral confocal probe includes a first probe, a first angle adjustment mechanism, the first probe is arranged on the first angle adjustment mechanism, and the first angle adjustment
  • the mechanism is set on the first manual angle table, the first manual angle table is set on the first forward and backward movement device, the first forward and backward movement device is set on the first up and down movement device, and the first up and down movement The device is provided on the first left-right moving device.
  • the right spectral confocal probe includes a third probe and a third angle adjustment mechanism, the third probe is arranged on the third angle adjustment mechanism, and the third angle adjustment The mechanism is arranged on the third manual angle table, the third manual angle table is arranged on the third forward and backward movement device, the third forward and backward movement device is arranged on the third up and down movement device, the third up and down movement The device is arranged on the third left and right moving device.
  • the upper bottom surface of the standard block includes a first inclined plane, a horizontal plane, and a second inclined plane connected in sequence.
  • the first inclined plane and the second inclined plane are respectively inclined downward; starting from the first inclined plane, pass through the horizontal plane in sequence
  • a first horizontal groove, a second horizontal groove, and a third horizontal groove are provided on the second inclined plane.
  • the first vertical groove is perpendicular to the first horizontal groove on the first inclined plane, and the first vertical groove is arranged on the second inclined plane.
  • the horizontal groove is provided with a third vertical groove.
  • the standard block is made of metal materials.
  • the metal material is iron alloy, aluminum alloy, copper alloy or stainless steel.
  • the calibration of the equipment must meet two standards. One is to adjust the light spots of the three spectral confocal measuring instruments to the same straight line, and the other is to calculate the difference between the axis of the spectral confocal probe on both sides and the axis of the central spectral confocal probe.
  • the present invention can simply adjust the light spots of the three spectral confocal measuring instruments to the same straight line by using the designed standard block; the standard block and the calibration method provided by the present invention can be easily calculated The angle between the axis of the spectral confocal probe on both sides and the axis of the central spectral confocal probe.
  • Fig. 1 is a schematic block diagram of an embodiment of the calibration method of the present invention.
  • Fig. 2 is a schematic plan view of an embodiment of the calibration device of the present invention.
  • Fig. 3 is a schematic side view of the structure of Fig. 2.
  • FIG. 4 is a schematic diagram of the three-dimensional structure of FIG. 2.
  • FIG. 5 is a schematic diagram of the three-dimensional structure of the standard block in FIG. 2.
  • Fig. 6 is a schematic top view of the structure of Fig. 5.
  • Fig. 7 is a schematic side view of the structure of Fig. 5.
  • Fig. 8 is a schematic diagram of the structure of a calibration state of the present invention.
  • Fig. 9 is a schematic diagram of the structure of the included angle calculation of the present invention.
  • Fig. 1 discloses a multi-probe calibration method in non-contact measurement, which is suitable for measuring equipment, horizontal rotating device and machine tool, and the measuring equipment and horizontal rotating device are respectively set on the machine tool, and the measuring equipment
  • the multi-probe calibration of the measuring device located above the horizontal rotating device includes the following steps:
  • S1 Install the standard block on the workbench of the horizontal rotation device.
  • the upper and bottom surface of the standard block includes a first inclined plane, a horizontal plane, and a second inclined plane connected in sequence, and the first inclined plane and the second inclined plane are respectively inclined downwardly ;
  • Starting from the first inclined plane successively through the horizontal plane and the second inclined plane are provided with a continuous first horizontal groove, a second horizontal groove and a third horizontal groove, and a first vertical groove is provided on the first inclined plane perpendicular to the first horizontal groove ,
  • a third vertical groove is provided on the second inclined plane perpendicular to the third horizontal groove, wherein the depth of the horizontal groove and the vertical groove are fixed and known;
  • the standard block is rotated by the angle ⁇ , so that the edge of the horizontal groove of the standard block is parallel to the x-axis of the machine tool.
  • S3 Adjust the spatial angle of the mid-spectrum confocal probe so that the axis of the mid-spectrum confocal probe is perpendicular to the horizontal plane xoy of the machine tool table; the specific method is to adjust the second angle adjustment mechanism and use an adjustment spacer to make the center
  • the axis of the spectral confocal probe is perpendicular to the horizontal plane of the worktable xoy; the distance between the working origin of the spectral confocal probe and the surface of the standard block is adjusted to ensure that the standard block is within the working range of the spectral confocal probe.
  • the distance value obtained by the middle spectral confocal probe will change suddenly. Record the position where the data change occurs, and fix the middle spectral confocal probe at this position; make the left spectrum common
  • the spot of the focal probe moves from the side of the first transverse groove of the standard block to the first transverse groove, and the position where the distance abruptly changes when the spot of the confocal probe on the left side is projected from the surface of the standard block to the bottom of the first transverse groove , And fix the left spectral confocal probe at this position; make the light spot of the right spectral confocal probe move from the side of the third horizontal groove of the standard block to the third horizontal groove, and record the right spectral confocal measurement
  • the position where the distance changes suddenly, and the right spectral confocal probe is fixed at this position.
  • d is the vertical distance between the edge of the vertical groove of the standard block and the bottom surface of the vertical groove
  • d 1 and d 2 are the light spots of the left or right spectral confocal probe projected to the edge of the vertical groove and the vertical groove of the standard block, respectively The measured distance value at the bottom
  • ⁇ is the angle between the inclined plane of the standard block and the horizontal plane (see Figure 9).
  • the present invention also provides a calibration device for multiple probes in non-contact measurement, including a measuring device 1, a horizontal rotating device 2, a machine tool (not shown) and a standard block 3.
  • the measuring device 1 and the horizontal rotating device 2 are respectively arranged on the machine tool, and the measuring device 1 is located above the horizontal rotating device 2, wherein the measuring device 1 is arranged in sequence on the left side spectral confocal probe on the mounting frame 11. 12.
  • the middle spectrum confocal probe 13 and the right spectrum confocal probe 14, the horizontal rotating device 2 includes a worktable 21, and a motor 22 located under the worktable 21 for driving the work platform to move, the motor 22 is provided with a base 23, the standard block 3 is set on the workbench 21 of the horizontal rotating device 2, and the upper bottom surface 31 of the standard block 3 includes a first inclined surface 311, a horizontal surface 312, and a second inclined surface 313 connected in sequence, The first inclined surface 311 and the second inclined surface 313 are respectively inclined obliquely downward; starting from the first inclined surface 311, passing through the horizontal plane 312 and the second inclined surface 313 in turn, a continuous first transverse groove 3111, a second transverse groove 3121, and a second transverse groove 3121 are provided.
  • a first vertical groove 3112 is provided on the first inclined surface 311 perpendicular to the first horizontal groove 3111, and a third vertical groove 3132 is provided on the second inclined surface 313 perpendicular to the third horizontal groove 3131 (see FIG. 6 ).
  • the standard block 3 is provided with a continuous first horizontal groove 3111, a second horizontal groove 3121, and a third horizontal groove 3131, and the edges of the continuous first horizontal groove 3111, the second horizontal groove 3121 and the third horizontal groove 3131 are in In the same plane, it is easy to adjust the light spots of the three spectral confocal measuring instruments to the same straight line; and the first vertical groove 3112 is provided on the first inclined surface 311 perpendicular to the first horizontal groove 3111, which can be conveniently Calculate the first included angle ⁇ (see FIG. 9); and the third vertical groove 3132 is provided on the second inclined surface 313 perpendicular to the third horizontal groove 3131 to easily calculate the second included angle ⁇ 2 (see FIG. 9 ).
  • the left side spectral confocal probe 12 includes a first probe 121, a first angle adjustment mechanism 122, the first probe 121 is provided on the first angle adjustment mechanism 122, and the first The angle adjustment mechanism 122 is provided on the first manual angle table 123, the first manual angle table 123 is provided on the first forward and backward movement device 124, and the first forward and backward movement device 124 is provided on the first up and down movement device 125 Above, the first up and down movement device 125 is provided on the first left and right movement device 126.
  • the intermediate spectrum confocal probe 13 includes a second probe 131, a second angle adjustment mechanism 132, the second probe 131 is provided on the second angle adjustment mechanism 132, and the third angle The adjustment mechanism 132 is provided on the second left-right moving device 133.
  • the right spectral confocal probe 14 includes a third probe 141, a third angle adjustment mechanism 142, the third probe 141 is provided on the third angle adjustment mechanism 142, and the third The angle adjustment mechanism 142 is provided on the third manual angle table 143, the third manual angle table 143 is provided on the third forward and backward movement device 144, and the third forward and backward movement device 144 is provided on the third up and down movement device 145 Above, the third up and down movement device 145 is provided on the third left and right movement device 146.
  • the present invention also provides a standard block 3.
  • the upper bottom surface 31 of the standard block 3 includes a first inclined surface 311, a horizontal surface 312, and a second inclined surface 313 connected in sequence.
  • the inclined surface 311 and the second inclined surface 313 are respectively inclined downward; starting from the first inclined surface 311, successively passing through the horizontal plane 312 and the second inclined surface 313, a continuous first transverse groove 3111, a second transverse groove 3121 and a third transverse groove 3131 are provided.
  • a first vertical groove 3112 is provided on the first inclined surface 311 perpendicular to the first horizontal groove 3111, and a third vertical groove 3132 is provided on the second inclined surface 313 perpendicular to the third horizontal groove 3131.
  • the standard block 3 is made of metal material.
  • the metal material is iron alloy, aluminum alloy, copper alloy or stainless steel.
  • the horizontal grooves (the first horizontal groove, the second horizontal groove and the third horizontal groove) or/and the vertical grooves (the first vertical groove, the second vertical groove and the third vertical groove) may be U-shaped flat-bottomed grooves, It can also be a trapezoidal groove.
  • the horizontal and vertical grooves in each diagram are described as examples of trapezoidal grooves. It is not difficult to understand that when the horizontal and vertical grooves are U-shaped flat-bottomed grooves, the The method and device are also applicable.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

La présente invention concerne un procédé d'étalonnage de multiples capteurs pour une mesure sans contact, le procédé comprenant les étapes consistant à : monter un bloc de référence (3) sur une plate-forme de manœuvre (21) d'un dispositif à rotation horizontal (2) ; ajuster les bords de fentes transversales (3111, 3121, 3131) du bloc de référence (3) pour qu'ils soient parallèles à un axe x d'une machine-outil ; ajuster un angle spatial d'un capteur confocal spectral intermédiaire (13) pour qu'un axe du capteur confocal spectral intermédiaire (13) soit perpendiculaire à un plan horizontal xoy de la plate-forme de manœuvre (21) de la machine-outil ; ajuster les angles spatiaux d'un capteur confocal spectral côté gauche (12) et un capteur confocal spectral côté droit (14), pour que les axes du capteur confocal spectral côté gauche (12) et le capteur confocal spectral côté droit (14) soient parallèles à un plan avant ou à un plan arrière xoz de la plate-forme de manœuvre (21) de la machine-outil ; ajuster les axes des trois capteurs confocaux spectraux (12, 13, 14) pour qu'ils soient dans le même plan ; et calculer un premier angle α 1 entre l'axe du capteur confocal spectral côté gauche (12) et l'axe du capteur confocal spectral intermédiaire (13), et calculer un second angle α 2 entre l'axe du capteur confocal spectral côté droit (14) et l'axe du capteur confocal spectral intermédiaire (13). L'invention concerne également un dispositif d'étalonnage de multiples capteurs pour une mesure sans contact, et le bloc de référence (3). L'étalonnage est facile et précis. Un angle est facilement calculé.
PCT/CN2019/117453 2019-11-12 2019-11-12 Procédé et dispositif d'étalonnage de multiples capteurs pour mesure sans contact, et bloc de référence WO2021092749A1 (fr)

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PCT/CN2019/117453 WO2021092749A1 (fr) 2019-11-12 2019-11-12 Procédé et dispositif d'étalonnage de multiples capteurs pour mesure sans contact, et bloc de référence
ZA2022/01072A ZA202201072B (en) 2019-11-12 2022-01-24 Multi-sensor calibration method and device for non-contact measurement, and reference block

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PCT/CN2019/117453 WO2021092749A1 (fr) 2019-11-12 2019-11-12 Procédé et dispositif d'étalonnage de multiples capteurs pour mesure sans contact, et bloc de référence

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Cited By (5)

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CN113740033A (zh) * 2021-08-17 2021-12-03 中国科学院合肥物质科学研究院 一种光谱共焦测量系统中光学测头的光束方向校准方法
CN114111672A (zh) * 2021-11-26 2022-03-01 南京航空航天大学 一种多位移传感器法向测量的传感器安装位置参数快速标定方法
CN114923412A (zh) * 2022-05-24 2022-08-19 绍兴职业技术学院 轴类零件多测头测量系统校准方法
WO2023142186A1 (fr) * 2022-01-27 2023-08-03 浙江大学 Procédé et dispositif de mesure simultanée de la forme de la surface et de la répartition de l'épaisseur de la paroi intérieure et de la paroi extérieure d'un corps rotatif à paroi mince
US11761756B2 (en) 2022-01-27 2023-09-19 Zhejiang University Method and device for simultaneously detecting surface shapes and thickness distribution of inner and outer walls of thin-wall rotating body

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CN113740033A (zh) * 2021-08-17 2021-12-03 中国科学院合肥物质科学研究院 一种光谱共焦测量系统中光学测头的光束方向校准方法
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CN114111672A (zh) * 2021-11-26 2022-03-01 南京航空航天大学 一种多位移传感器法向测量的传感器安装位置参数快速标定方法
WO2023142186A1 (fr) * 2022-01-27 2023-08-03 浙江大学 Procédé et dispositif de mesure simultanée de la forme de la surface et de la répartition de l'épaisseur de la paroi intérieure et de la paroi extérieure d'un corps rotatif à paroi mince
US11761756B2 (en) 2022-01-27 2023-09-19 Zhejiang University Method and device for simultaneously detecting surface shapes and thickness distribution of inner and outer walls of thin-wall rotating body
CN114923412A (zh) * 2022-05-24 2022-08-19 绍兴职业技术学院 轴类零件多测头测量系统校准方法
CN114923412B (zh) * 2022-05-24 2024-03-12 绍兴职业技术学院 轴类零件多测头测量系统校准方法

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