WO2021092749A1 - Multi-sensor calibration method and device for non-contact measurement, and reference block - Google Patents

Multi-sensor calibration method and device for non-contact measurement, and reference block Download PDF

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Publication number
WO2021092749A1
WO2021092749A1 PCT/CN2019/117453 CN2019117453W WO2021092749A1 WO 2021092749 A1 WO2021092749 A1 WO 2021092749A1 CN 2019117453 W CN2019117453 W CN 2019117453W WO 2021092749 A1 WO2021092749 A1 WO 2021092749A1
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spectral confocal
probe
horizontal
confocal probe
standard block
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PCT/CN2019/117453
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French (fr)
Chinese (zh)
Inventor
颜昌亚
周向东
张子龙
张庆祥
李振瀚
唐小琦
卢少武
曾祥兵
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东莞市三姆森光电科技有限公司
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Application filed by 东莞市三姆森光电科技有限公司 filed Critical 东莞市三姆森光电科技有限公司
Priority to PCT/CN2019/117453 priority Critical patent/WO2021092749A1/en
Publication of WO2021092749A1 publication Critical patent/WO2021092749A1/en
Priority to ZA2022/01072A priority patent/ZA202201072B/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Definitions

  • the invention belongs to the field of non-contact measurement, and more specifically relates to a multi-probe calibration method, calibration device and standard block in non-contact measurement.
  • non-contact measurement is one of the common methods for parts inspection. This method usually uses optical measurement technology to avoid direct contact between the measuring equipment and the parts. But for the detection of curved parts, the accuracy of non-contact measurement is usually related to the angle between the probe axis and the normal direction of the measured surface point. When the curvature of the surface to be tested changes greatly, if the posture of the non-contact probe remains unchanged, it may not be possible to obtain complete surface profile data.
  • the first is to install the probe on a multi-axis (4-5 axis) motion mechanism to meet the spatial angle adjustment requirements of the measuring beam vector, but due to the motion
  • the accuracy of the mechanism will greatly reduce the measurement accuracy of the entire measurement system, which cannot meet the requirements of high-precision measurement of curved parts
  • the other is to use a measuring device equipped with multiple probes, and let each probe be responsible for measuring the curved surface. Part of the area data, and then the measurement data of each probe is converted to a unified coordinate system.
  • the problem with this solution is that the calibration of multiple non-contact probes and the calculation of the relative position between the probes must Fast and high-precision completion.
  • the patent document "Method and Equipment for Measuring the Contour of Mobile Phone Curved Shell Based on Spectral Confocal Technology" (application number CN201711415852.7) provides a method and equipment for high-precision detection of mobile phone back and side surfaces.
  • the device installs three spectral confocal probes on the linear motion axis, and each probe is connected to the motion axis through an angle adjustment mechanism. Using these three probes, the surface scanning measurement of the mobile phone shell parts fixed on the platform carried by the DD motor is carried out.
  • the patent requires that the light spots of the three spectral confocal measuring instruments are located on a straight line parallel to the axis, and the angle between the ray extension line of the dispersive spectral confocal measuring instrument on both sides and the vertical ray extension line of the intermediate dispersion spectral confocal measuring instrument It needs to be accurately calculated, but the method disclosed in the patent document is used to calibrate and calculate the included angle between each spectral confocal probe, which is more complicated.
  • the present invention provides the society with a multi-probe calibration method, a calibration device and a standard block in a non-contact measurement with convenient and accurate calibration and easy calculation of the included angle.
  • the technical scheme of the present invention is to provide the society with a multi-probe calibration method in non-contact measurement, which is suitable for having measuring equipment, horizontal rotating device and machine tool, and the measuring equipment and horizontal rotating device are respectively arranged on the machine tool, and the measuring equipment
  • the multi-probe calibration of the measuring device located above the horizontal rotating device includes the following steps:
  • S1 Install the standard block on the workbench of the horizontal rotation device.
  • the upper and bottom surface of the standard block includes a first inclined plane, a horizontal plane, and a second inclined plane connected in sequence, and the first inclined plane and the second inclined plane are respectively inclined downwardly ;
  • Starting from the first inclined plane successively through the horizontal plane and the second inclined plane are provided with a continuous first horizontal groove, a second horizontal groove and a third horizontal groove, and a first vertical groove is provided on the first inclined plane perpendicular to the first horizontal groove , A third vertical groove is provided on the second inclined plane perpendicular to the third horizontal groove;
  • the step of adjusting the edge of the horizontal groove of the standard block to be parallel to the x-axis of the machine tool is that the machine tool drives the intermediate spectral confocal probe to measure the standard block to obtain the working starting point A to the spectral confocal probe
  • record the position B of the sudden change in the measured value make the machine tool move a predetermined distance along the x-axis from BC to position C, and then control the middle spectral confocal probe to move along the machine's y-axis, and record the second sudden change in the measurement data
  • the standard block is rotated by the angle ⁇ , so that the edge of the horizontal groove of the standard block is parallel to the x-axis of the machine tool.
  • the steps of adjusting the axes of the middle spectral confocal probe, the left spectral confocal probe and the right spectral confocal probe to be in the same plane are as follows:
  • the distance value obtained by the intermediate spectrum confocal probe will change suddenly, record the position of the sudden change of data, and share the intermediate spectrum.
  • the focus probe is fixed at this position; the light spot of the left spectral confocal probe is moved from the side of the first horizontal groove of the standard block to the first horizontal groove, and the light spot of the left spectral confocal probe is recorded from the surface of the standard block.
  • the step of calculating the first included angle ⁇ 1 and the second included angle ⁇ 2 in step S6 is: controlling the left side spectral confocal probe to move from the outside to the inside of the first vertical slot along the x-axis of the machine tool,
  • the obtained distance value will undergo a sudden change.
  • the distance value before the sudden change is recorded as d 1
  • the distance value after the sudden change is recorded as d 2 ;
  • Formula two you can calculate the angle ⁇ 1 between the axis of the left probe and the axis of the middle probe,
  • d is the vertical distance between the edge of the vertical groove of the standard block and the bottom surface of the vertical groove
  • d 1 and d 2 are the light spots of the left or right spectral confocal probe projected to the edge of the vertical groove and the vertical groove of the standard block, respectively The measured distance value at the bottom
  • ⁇ is the angle between the inclined plane of the standard block and the horizontal plane.
  • the present invention also provides a calibration device for multiple probes in non-contact measurement, which includes a measuring device, a horizontal rotating device, a machine tool and a standard block.
  • the measuring device and the horizontal rotating device are respectively arranged on the machine tool, and the measuring device is located on the horizontal rotating device.
  • the horizontal rotating device includes a worktable, And a motor for driving the work platform to move under the workbench, the standard block is arranged on the workbench of the horizontal rotating device, and the upper bottom surface of the standard block includes a first inclined plane, a horizontal plane, and a second inclined plane connected in sequence, The first inclined surface and the second inclined surface are respectively inclined downward; starting from the first inclined surface, successively passing through the horizontal plane and the second inclined surface, a continuous first transverse groove, a second transverse groove and a third transverse groove are provided.
  • a first vertical groove is provided on the inclined surface perpendicular to the first horizontal groove, and a third vertical groove is provided on the second inclined surface perpendicular to the third horizontal groove.
  • the left spectral confocal probe includes a first probe, a first angle adjustment mechanism, the first probe is arranged on the first angle adjustment mechanism, and the first angle adjustment
  • the mechanism is set on the first manual angle table, the first manual angle table is set on the first forward and backward movement device, the first forward and backward movement device is set on the first up and down movement device, and the first up and down movement The device is provided on the first left-right moving device.
  • the right spectral confocal probe includes a third probe and a third angle adjustment mechanism, the third probe is arranged on the third angle adjustment mechanism, and the third angle adjustment The mechanism is arranged on the third manual angle table, the third manual angle table is arranged on the third forward and backward movement device, the third forward and backward movement device is arranged on the third up and down movement device, the third up and down movement The device is arranged on the third left and right moving device.
  • the upper bottom surface of the standard block includes a first inclined plane, a horizontal plane, and a second inclined plane connected in sequence.
  • the first inclined plane and the second inclined plane are respectively inclined downward; starting from the first inclined plane, pass through the horizontal plane in sequence
  • a first horizontal groove, a second horizontal groove, and a third horizontal groove are provided on the second inclined plane.
  • the first vertical groove is perpendicular to the first horizontal groove on the first inclined plane, and the first vertical groove is arranged on the second inclined plane.
  • the horizontal groove is provided with a third vertical groove.
  • the standard block is made of metal materials.
  • the metal material is iron alloy, aluminum alloy, copper alloy or stainless steel.
  • the calibration of the equipment must meet two standards. One is to adjust the light spots of the three spectral confocal measuring instruments to the same straight line, and the other is to calculate the difference between the axis of the spectral confocal probe on both sides and the axis of the central spectral confocal probe.
  • the present invention can simply adjust the light spots of the three spectral confocal measuring instruments to the same straight line by using the designed standard block; the standard block and the calibration method provided by the present invention can be easily calculated The angle between the axis of the spectral confocal probe on both sides and the axis of the central spectral confocal probe.
  • Fig. 1 is a schematic block diagram of an embodiment of the calibration method of the present invention.
  • Fig. 2 is a schematic plan view of an embodiment of the calibration device of the present invention.
  • Fig. 3 is a schematic side view of the structure of Fig. 2.
  • FIG. 4 is a schematic diagram of the three-dimensional structure of FIG. 2.
  • FIG. 5 is a schematic diagram of the three-dimensional structure of the standard block in FIG. 2.
  • Fig. 6 is a schematic top view of the structure of Fig. 5.
  • Fig. 7 is a schematic side view of the structure of Fig. 5.
  • Fig. 8 is a schematic diagram of the structure of a calibration state of the present invention.
  • Fig. 9 is a schematic diagram of the structure of the included angle calculation of the present invention.
  • Fig. 1 discloses a multi-probe calibration method in non-contact measurement, which is suitable for measuring equipment, horizontal rotating device and machine tool, and the measuring equipment and horizontal rotating device are respectively set on the machine tool, and the measuring equipment
  • the multi-probe calibration of the measuring device located above the horizontal rotating device includes the following steps:
  • S1 Install the standard block on the workbench of the horizontal rotation device.
  • the upper and bottom surface of the standard block includes a first inclined plane, a horizontal plane, and a second inclined plane connected in sequence, and the first inclined plane and the second inclined plane are respectively inclined downwardly ;
  • Starting from the first inclined plane successively through the horizontal plane and the second inclined plane are provided with a continuous first horizontal groove, a second horizontal groove and a third horizontal groove, and a first vertical groove is provided on the first inclined plane perpendicular to the first horizontal groove ,
  • a third vertical groove is provided on the second inclined plane perpendicular to the third horizontal groove, wherein the depth of the horizontal groove and the vertical groove are fixed and known;
  • the standard block is rotated by the angle ⁇ , so that the edge of the horizontal groove of the standard block is parallel to the x-axis of the machine tool.
  • S3 Adjust the spatial angle of the mid-spectrum confocal probe so that the axis of the mid-spectrum confocal probe is perpendicular to the horizontal plane xoy of the machine tool table; the specific method is to adjust the second angle adjustment mechanism and use an adjustment spacer to make the center
  • the axis of the spectral confocal probe is perpendicular to the horizontal plane of the worktable xoy; the distance between the working origin of the spectral confocal probe and the surface of the standard block is adjusted to ensure that the standard block is within the working range of the spectral confocal probe.
  • the distance value obtained by the middle spectral confocal probe will change suddenly. Record the position where the data change occurs, and fix the middle spectral confocal probe at this position; make the left spectrum common
  • the spot of the focal probe moves from the side of the first transverse groove of the standard block to the first transverse groove, and the position where the distance abruptly changes when the spot of the confocal probe on the left side is projected from the surface of the standard block to the bottom of the first transverse groove , And fix the left spectral confocal probe at this position; make the light spot of the right spectral confocal probe move from the side of the third horizontal groove of the standard block to the third horizontal groove, and record the right spectral confocal measurement
  • the position where the distance changes suddenly, and the right spectral confocal probe is fixed at this position.
  • d is the vertical distance between the edge of the vertical groove of the standard block and the bottom surface of the vertical groove
  • d 1 and d 2 are the light spots of the left or right spectral confocal probe projected to the edge of the vertical groove and the vertical groove of the standard block, respectively The measured distance value at the bottom
  • ⁇ is the angle between the inclined plane of the standard block and the horizontal plane (see Figure 9).
  • the present invention also provides a calibration device for multiple probes in non-contact measurement, including a measuring device 1, a horizontal rotating device 2, a machine tool (not shown) and a standard block 3.
  • the measuring device 1 and the horizontal rotating device 2 are respectively arranged on the machine tool, and the measuring device 1 is located above the horizontal rotating device 2, wherein the measuring device 1 is arranged in sequence on the left side spectral confocal probe on the mounting frame 11. 12.
  • the middle spectrum confocal probe 13 and the right spectrum confocal probe 14, the horizontal rotating device 2 includes a worktable 21, and a motor 22 located under the worktable 21 for driving the work platform to move, the motor 22 is provided with a base 23, the standard block 3 is set on the workbench 21 of the horizontal rotating device 2, and the upper bottom surface 31 of the standard block 3 includes a first inclined surface 311, a horizontal surface 312, and a second inclined surface 313 connected in sequence, The first inclined surface 311 and the second inclined surface 313 are respectively inclined obliquely downward; starting from the first inclined surface 311, passing through the horizontal plane 312 and the second inclined surface 313 in turn, a continuous first transverse groove 3111, a second transverse groove 3121, and a second transverse groove 3121 are provided.
  • a first vertical groove 3112 is provided on the first inclined surface 311 perpendicular to the first horizontal groove 3111, and a third vertical groove 3132 is provided on the second inclined surface 313 perpendicular to the third horizontal groove 3131 (see FIG. 6 ).
  • the standard block 3 is provided with a continuous first horizontal groove 3111, a second horizontal groove 3121, and a third horizontal groove 3131, and the edges of the continuous first horizontal groove 3111, the second horizontal groove 3121 and the third horizontal groove 3131 are in In the same plane, it is easy to adjust the light spots of the three spectral confocal measuring instruments to the same straight line; and the first vertical groove 3112 is provided on the first inclined surface 311 perpendicular to the first horizontal groove 3111, which can be conveniently Calculate the first included angle ⁇ (see FIG. 9); and the third vertical groove 3132 is provided on the second inclined surface 313 perpendicular to the third horizontal groove 3131 to easily calculate the second included angle ⁇ 2 (see FIG. 9 ).
  • the left side spectral confocal probe 12 includes a first probe 121, a first angle adjustment mechanism 122, the first probe 121 is provided on the first angle adjustment mechanism 122, and the first The angle adjustment mechanism 122 is provided on the first manual angle table 123, the first manual angle table 123 is provided on the first forward and backward movement device 124, and the first forward and backward movement device 124 is provided on the first up and down movement device 125 Above, the first up and down movement device 125 is provided on the first left and right movement device 126.
  • the intermediate spectrum confocal probe 13 includes a second probe 131, a second angle adjustment mechanism 132, the second probe 131 is provided on the second angle adjustment mechanism 132, and the third angle The adjustment mechanism 132 is provided on the second left-right moving device 133.
  • the right spectral confocal probe 14 includes a third probe 141, a third angle adjustment mechanism 142, the third probe 141 is provided on the third angle adjustment mechanism 142, and the third The angle adjustment mechanism 142 is provided on the third manual angle table 143, the third manual angle table 143 is provided on the third forward and backward movement device 144, and the third forward and backward movement device 144 is provided on the third up and down movement device 145 Above, the third up and down movement device 145 is provided on the third left and right movement device 146.
  • the present invention also provides a standard block 3.
  • the upper bottom surface 31 of the standard block 3 includes a first inclined surface 311, a horizontal surface 312, and a second inclined surface 313 connected in sequence.
  • the inclined surface 311 and the second inclined surface 313 are respectively inclined downward; starting from the first inclined surface 311, successively passing through the horizontal plane 312 and the second inclined surface 313, a continuous first transverse groove 3111, a second transverse groove 3121 and a third transverse groove 3131 are provided.
  • a first vertical groove 3112 is provided on the first inclined surface 311 perpendicular to the first horizontal groove 3111, and a third vertical groove 3132 is provided on the second inclined surface 313 perpendicular to the third horizontal groove 3131.
  • the standard block 3 is made of metal material.
  • the metal material is iron alloy, aluminum alloy, copper alloy or stainless steel.
  • the horizontal grooves (the first horizontal groove, the second horizontal groove and the third horizontal groove) or/and the vertical grooves (the first vertical groove, the second vertical groove and the third vertical groove) may be U-shaped flat-bottomed grooves, It can also be a trapezoidal groove.
  • the horizontal and vertical grooves in each diagram are described as examples of trapezoidal grooves. It is not difficult to understand that when the horizontal and vertical grooves are U-shaped flat-bottomed grooves, the The method and device are also applicable.

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Abstract

A multi-sensor calibration method for non-contact measurement comprises: mounting a reference block (3) on an operating platform (21) of a horizontal rotation device (2); adjusting edges of traverse slots (3111, 3121, 3131) of the reference block (3) to be parallel to an x-axis of a machine tool; adjusting a spatial angle of an intermediate spectral confocal sensor (13) such that an axis of the intermediate spectral confocal sensor (13) is perpendicular to a horizontal plane xoy of the operating platform (21) of the machine tool; adjusting spatial angles of a left-side spectral confocal sensor (12) and a right-side spectral confocal sensor (14), such that axes of the left-side spectral confocal sensor (12) and the right-side spectral confocal sensor (14) are parallel to a front plane or a rear plane xoz of the operating platform (21) of the machine tool; adjusting the axes of the three spectral confocal sensors (12, 13, 14) to be in the same plane; and calculating a first angle α 1 between the axis of the left-side spectral confocal sensor (12) and the axis of the intermediate spectral confocal sensor (13), and calculating a second angle α 2 between the axis of the right-side spectral confocal sensor (14) and the axis of the intermediate spectral confocal sensor (13). Also disclosed are a multi-sensor calibration device for non-contact measurement, and the reference block (3). Calibration is easy and accurate. An angle is easily calculated.

Description

非接触式测量中多测头标定方法、标定装置及标准块Multi-probe calibration method, calibration device and standard block in non-contact measurement 技术领域Technical field
本发明属于非接触测量领域，更具体地涉及一种非接触式测量中多测头标定方法、标定装置及标准块。The invention belongs to the field of non-contact measurement, and more specifically relates to a multi-probe calibration method, calibration device and standard block in non-contact measurement.
背景技术Background technique
目前非接触式测量是零件检测的常用方法之一，该方法通常采用光测量技术，避免了测量设备与零件的直接接触。但对于曲面零件的检测，非接触测量的精度通常与测头轴线和被测曲面点的法向之间的角度有关。当待检测曲面的曲率变化较大时，如果非接触测头的姿态保持不变，可能无法获得完整的曲面轮廓数据。At present, non-contact measurement is one of the common methods for parts inspection. This method usually uses optical measurement technology to avoid direct contact between the measuring equipment and the parts. But for the detection of curved parts, the accuracy of non-contact measurement is usually related to the angle between the probe axis and the normal direction of the measured surface point. When the curvature of the surface to be tested changes greatly, if the posture of the non-contact probe remains unchanged, it may not be possible to obtain complete surface profile data.
为了改善上述存在的问题，目前通常有以下两种方案：第一种是将测头安装在多轴（4-5轴）运动机构上，以满足测量光束矢量的空间角度调整要求，但由于运动机构的精度问题，使得整个测量系统的测量精度会大大降低，无法满足曲面零件的高精度测量的要求；另一种是使用装有多个测头的测量设备，让每个测头负责测量曲面部分区域的数据，然后将各个测头的测量数据转换到一个统一的坐标系下，该方案存在的问题是，多个非接触式测头的标定、各测头之间的相对位置的计算必须快速且高精度的完成。In order to improve the above-mentioned problems, there are usually the following two solutions: The first is to install the probe on a multi-axis (4-5 axis) motion mechanism to meet the spatial angle adjustment requirements of the measuring beam vector, but due to the motion The accuracy of the mechanism will greatly reduce the measurement accuracy of the entire measurement system, which cannot meet the requirements of high-precision measurement of curved parts; the other is to use a measuring device equipped with multiple probes, and let each probe be responsible for measuring the curved surface. Part of the area data, and then the measurement data of each probe is converted to a unified coordinate system. The problem with this solution is that the calibration of multiple non-contact probes and the calculation of the relative position between the probes must Fast and high-precision completion.
专利文献《基于光谱共焦技术的手机曲面外壳轮廓测量方法及其测量设备》（申请号CN201711415852.7）提供了一种针对手机背壳和侧边曲面进行高精度检测的方法与设备。该设备将三个光谱共焦测头安装在线性运动轴上，每个测头通过角度调整机构与运动轴连接。利用这三个测头，对固定在DD马达所承载的平台上的手机外壳零件进行曲面扫描测量。该专利要求三个光谱共焦量仪的光斑位于一条平行于 轴的直线上，并且两侧色散光谱共焦量仪的射线延长线与中间色散光谱共焦量仪垂直方向射线延长线的夹角要精确的计算出来，但利用该专利文献所公开的方法来进行标定和计算各光谱共焦测头之间的夹角，其方法比较繁锁。The patent document "Method and Equipment for Measuring the Contour of Mobile Phone Curved Shell Based on Spectral Confocal Technology" (application number CN201711415852.7) provides a method and equipment for high-precision detection of mobile phone back and side surfaces. The device installs three spectral confocal probes on the linear motion axis, and each probe is connected to the motion axis through an angle adjustment mechanism. Using these three probes, the surface scanning measurement of the mobile phone shell parts fixed on the platform carried by the DD motor is carried out. The patent requires that the light spots of the three spectral confocal measuring instruments are located on a straight line parallel to the axis, and the angle between the ray extension line of the dispersive spectral confocal measuring instrument on both sides and the vertical ray extension line of the intermediate dispersion spectral confocal measuring instrument It needs to be accurately calculated, but the method disclosed in the patent document is used to calibrate and calculate the included angle between each spectral confocal probe, which is more complicated.
技术问题technical problem
为了解决上述问题，本发明向社会提供一种标定方便准确，夹角计算容易的非接触式测量中多测头标定方法、标定装置及标准块。In order to solve the above-mentioned problems, the present invention provides the society with a multi-probe calibration method, a calibration device and a standard block in a non-contact measurement with convenient and accurate calibration and easy calculation of the included angle.
技术解决方案Technical solutions
本发明的技术方案是：向社会提供一种非接触式测量中多测头标定方法，适合于具有测量设备、水平旋转装置和机床，且测量设备、水平旋转装置分别设在机床上，测量设备位于水平旋转装置上方的测量装置的多测头标定，包括如下步骤：The technical scheme of the present invention is to provide the society with a multi-probe calibration method in non-contact measurement, which is suitable for having measuring equipment, horizontal rotating device and machine tool, and the measuring equipment and horizontal rotating device are respectively arranged on the machine tool, and the measuring equipment The multi-probe calibration of the measuring device located above the horizontal rotating device includes the following steps:
S1：将标准块安装在水平转动装置的工作台上，所述标准块的上底面包括依次连接的第一斜面、水平面和第二斜面，所述第一斜面和第二斜面分别向斜下方倾斜；从第一斜面开始，依次经过水平面和第二斜面设有连贯的第一横槽、第二横槽和第三横槽，在第一斜面上垂直于第一横槽设有第一竖槽，在第二斜面上垂直于第三横槽设有第三竖槽；S1: Install the standard block on the workbench of the horizontal rotation device. The upper and bottom surface of the standard block includes a first inclined plane, a horizontal plane, and a second inclined plane connected in sequence, and the first inclined plane and the second inclined plane are respectively inclined downwardly ; Starting from the first inclined plane, successively through the horizontal plane and the second inclined plane are provided with a continuous first horizontal groove, a second horizontal groove and a third horizontal groove, and a first vertical groove is provided on the first inclined plane perpendicular to the first horizontal groove , A third vertical groove is provided on the second inclined plane perpendicular to the third horizontal groove;
S2：将标准块的横槽的边缘调节至与机床x轴平行；S2: Adjust the edge of the horizontal groove of the standard block to be parallel to the x-axis of the machine tool;
S3：调整中间光谱共焦测头的空间角度，使中间光谱共焦测头的轴线垂直于机床工作台的水平面xoy；S3: Adjust the spatial angle of the mid-spectrum confocal probe so that the axis of the mid-spectrum confocal probe is perpendicular to the horizontal plane xoy of the machine tool table;
S4：调整左侧光谱共焦测头和右侧光谱共焦测头的空间角度，使左侧光谱共焦测头和右侧光谱共焦测头的轴线平行于机床工作台前平面或后平面xoz；S4: Adjust the spatial angle of the left spectral confocal probe and the right spectral confocal probe to make the axes of the left spectral confocal probe and the right spectral confocal probe parallel to the front or rear plane of the machine tool table xoz;
S5：调整中间光谱共焦测头、左侧光谱共焦测头和右侧光谱共焦测头的轴线在同一个平面内；S5: Adjust the axes of the middle spectral confocal probe, left spectral confocal probe and right spectral confocal probe to be in the same plane;
S6：计算左侧光谱共焦测头轴线与中间光谱共焦测头轴线之间的第一夹角α 1，以及计算右侧光谱共焦测头轴线与中间光谱共焦测头轴线之间的第二夹角α 2。 S6: Calculate the first angle α 1 between the axis of the left spectral confocal probe and the axis of the middle spectral confocal probe, and calculate the difference between the axis of the right spectral confocal probe and the axis of the middle spectral confocal probe The second included angle α 2 .
作为对本发明的进，所述将标准块的横槽的边缘调节至与机床x轴平行的步骤为机床带动中间光谱共焦测头对标准块进行测量，得到光谱共焦测头工作起点A到标准块表面的距离d；将中间光谱共焦测头朝一个方向移动，当中间光谱共焦测头发出的光线射到标准块的第二横槽的内底面时，所获得的数据会发生第一次突变，记录测量值发生突变的位置B；令机床沿x轴水平运动预定距离l BC到位置C，然后控制中间光谱共焦测头沿机床y轴移动，记录测量数据发生第二次突变的位置D，同时记录位置C到位置D之间的距离l CD；通过公式一，即得到将标准块横槽的边沿调节至与机床x轴平行需要调整水平转动装置的角度值θ， As an improvement to the present invention, the step of adjusting the edge of the horizontal groove of the standard block to be parallel to the x-axis of the machine tool is that the machine tool drives the intermediate spectral confocal probe to measure the standard block to obtain the working starting point A to the spectral confocal probe The distance d from the surface of the standard block; move the middle-spectrum confocal probe in one direction, when the light from the middle-spectrum confocal probe hits the inner bottom surface of the second horizontal groove of the standard block, the obtained data will be For a sudden change, record the position B of the sudden change in the measured value; make the machine tool move a predetermined distance along the x-axis from BC to position C, and then control the middle spectral confocal probe to move along the machine's y-axis, and record the second sudden change in the measurement data At the same time, record the distance l CD between position C and position D; through formula 1, the angle value θ of the horizontal rotation device needs to be adjusted to adjust the edge of the horizontal groove of the standard block to be parallel to the x-axis of the machine tool,
        公式一 ... Formula one
通过控制水平转动装置的DD马达，使标准块旋转角度θ，从而使标准块的横槽的边沿与机床x轴平行。By controlling the DD motor of the horizontal rotation device, the standard block is rotated by the angle θ, so that the edge of the horizontal groove of the standard block is parallel to the x-axis of the machine tool.
作为对本发明的改进，所述调整中间光谱共焦测头、左侧光谱共焦测头和右侧光谱共焦测头的轴线在同一个平面内的步骤为：As an improvement to the present invention, the steps of adjusting the axes of the middle spectral confocal probe, the left spectral confocal probe and the right spectral confocal probe to be in the same plane are as follows:
调整左侧光谱共焦测头、中间光谱共焦测头，以及右侧光谱共焦测头与标准块之间的距离，让标准块在左侧光谱共焦测头、中间光谱共焦测头和右侧光谱共焦测头的工作范围内；控制机床主轴带动中间光谱共焦测头沿机床y轴移动，使中间光谱共焦测头的光斑从标准块的第二横槽的一侧向第二横槽内移动，当光斑从标准块的表面投射到第二横槽的底部时，中间光谱共焦测头得到的距离值会发生突变，记录发生数据突变的位置，并将中间光谱共焦测头固定在该位置；使左侧光谱共焦测头的光斑从标准块第一横槽的一侧向第一横槽内移动，记录左侧光谱共焦测头的光斑从标准块表面投射到第一横槽底部时距离发生突变的位置，并将左侧光谱共焦测头固定在该位置；使右侧光谱共焦测头的光斑从标准块第三横槽的一侧向第三横槽内移动，记录右侧光谱共焦测头的光斑从标准块表面投射到第三横槽底部时距离发生突变的位置，并将右侧光谱共焦测头固定在该位置。Adjust the distance between the left spectral confocal probe and the middle spectral confocal probe, and the distance between the right spectral confocal probe and the standard block, so that the standard block is on the left spectral confocal probe and the middle spectral confocal probe And the working range of the right spectral confocal probe; control the machine tool spindle to drive the middle spectral confocal probe to move along the y-axis of the machine tool, so that the light spot of the middle spectral confocal probe is from the side of the second horizontal groove of the standard block When moving in the second horizontal groove, when the light spot is projected from the surface of the standard block to the bottom of the second horizontal groove, the distance value obtained by the intermediate spectrum confocal probe will change suddenly, record the position of the sudden change of data, and share the intermediate spectrum. The focus probe is fixed at this position; the light spot of the left spectral confocal probe is moved from the side of the first horizontal groove of the standard block to the first horizontal groove, and the light spot of the left spectral confocal probe is recorded from the surface of the standard block. When projecting to the bottom of the first horizontal groove, the distance changes suddenly, and fix the left spectral confocal probe at this position; make the light spot of the right spectral confocal probe from the side of the third horizontal groove of the standard block to the second Move in the three horizontal grooves, record the position where the distance change occurs when the light spot of the right spectral confocal probe is projected from the surface of the standard block to the bottom of the third horizontal groove, and fix the right spectral confocal probe at this position.
作为对本发明的改进，S6步中计算第一夹角α 1和第二夹角α 2的步骤为：控制左侧光谱共焦测头沿机床x轴从第一竖槽的外侧向内侧移动，当左侧光谱共焦测头的光斑从标准块表面投射到第一竖槽底部时，获得的距离值会发生突变，突变前距离值记为d 1，突变后距离值记为d 2；根据公式二，即可计算得到左侧测头轴线与中间测头轴线之间的夹角α 1， As an improvement to the present invention, the step of calculating the first included angle α 1 and the second included angle α 2 in step S6 is: controlling the left side spectral confocal probe to move from the outside to the inside of the first vertical slot along the x-axis of the machine tool, When the light spot of the spectral confocal probe on the left is projected from the surface of the standard block to the bottom of the first vertical groove, the obtained distance value will undergo a sudden change. The distance value before the sudden change is recorded as d 1 , and the distance value after the sudden change is recorded as d 2 ; Formula two, you can calculate the angle α 1 between the axis of the left probe and the axis of the middle probe,
Figure 813789dest_path_image002
     公式二
Figure 813789dest_path_image002
Formula two
则  α 1=β+γ Then α 1 =β+γ
利用同样的步骤，计算出第二夹角α 1； Using the same steps, calculate the second included angle α 1 ;
上式中，d为标准块的竖槽的边沿距竖槽底面的垂直距离，d 1、d 2为左侧或右侧光谱共焦测头的光斑分别投射到标准块竖槽边沿和竖槽底部时测得的距离值，γ为标准块上斜面与水平面的夹角。 In the above formula, d is the vertical distance between the edge of the vertical groove of the standard block and the bottom surface of the vertical groove, d 1 and d 2 are the light spots of the left or right spectral confocal probe projected to the edge of the vertical groove and the vertical groove of the standard block, respectively The measured distance value at the bottom, γ is the angle between the inclined plane of the standard block and the horizontal plane.
本发明还提供一种非接触式测量中多测头的标定装置，包括测量设备、水平旋转装置、机床和标准块，所述测量设备和水平旋转装置分别设在机床上，测量设备位于水平旋转装置上方,其中，所述包括测量设备依次排布在安装架上的左侧光谱共焦测头、中间光谱共焦测头和右侧光谱共焦测头，所述水平旋转装置包括工作台，以及位于工作台下面的用于带动工作平台移动的电机，所述标准块设置在水平转动装置的工作台上，所述标准块的上底面包括依次连接的第一斜面、水平面和第二斜面，所述第一斜面和第二斜面分别向斜下方倾斜；从第一斜面开始，依次经过水平面和第二斜面设有连贯的第一横槽、第二横槽和第三横槽，在第一斜面上垂直于第一横槽设有第一竖槽，在第二斜面上垂直于第三横槽设有第三竖槽。The present invention also provides a calibration device for multiple probes in non-contact measurement, which includes a measuring device, a horizontal rotating device, a machine tool and a standard block. The measuring device and the horizontal rotating device are respectively arranged on the machine tool, and the measuring device is located on the horizontal rotating device. Above the device, where the left side spectrum confocal probe, the middle spectrum confocal probe and the right side spectrum confocal probe including measuring equipment are arranged in sequence on the mounting frame, the horizontal rotating device includes a worktable, And a motor for driving the work platform to move under the workbench, the standard block is arranged on the workbench of the horizontal rotating device, and the upper bottom surface of the standard block includes a first inclined plane, a horizontal plane, and a second inclined plane connected in sequence, The first inclined surface and the second inclined surface are respectively inclined downward; starting from the first inclined surface, successively passing through the horizontal plane and the second inclined surface, a continuous first transverse groove, a second transverse groove and a third transverse groove are provided. A first vertical groove is provided on the inclined surface perpendicular to the first horizontal groove, and a third vertical groove is provided on the second inclined surface perpendicular to the third horizontal groove.
作为对本发明的改进，所述左侧光谱共焦测头包括第一测头、第一角度调整机构，所述第一测头设在所述第一角度调整机构上，所述第一角度调整机构设在第一手动角位台上，所述第一手动角位台设在第一前后移动装置上，所述第一前后移动装置设在第一上下移动装置上，所述第一上下移动装置设在第一左右移动装置上。As an improvement to the present invention, the left spectral confocal probe includes a first probe, a first angle adjustment mechanism, the first probe is arranged on the first angle adjustment mechanism, and the first angle adjustment The mechanism is set on the first manual angle table, the first manual angle table is set on the first forward and backward movement device, the first forward and backward movement device is set on the first up and down movement device, and the first up and down movement The device is provided on the first left-right moving device.
作为对本发明的改进，所述右侧光谱共焦测头包括第三测头、第三角度调整机构，所述第三测头设在所述第三角度调整机构上，所述第三角度调整机构设在第三手动角位台上，所述第三手动角位台设在第三前后移动装置上，所述第三前后移动装置设在第三上下移动装置上，所述第三上下移动装置设在第三左右移动装置上。 As an improvement to the present invention, the right spectral confocal probe includes a third probe and a third angle adjustment mechanism, the third probe is arranged on the third angle adjustment mechanism, and the third angle adjustment The mechanism is arranged on the third manual angle table, the third manual angle table is arranged on the third forward and backward movement device, the third forward and backward movement device is arranged on the third up and down movement device, the third up and down movement The device is arranged on the third left and right moving device.
作为对本发明的改进，在标准块的上底面包括依次连接的第一斜面、水平面和第二斜面，所述第一斜面和第二斜面分别向斜下方倾斜；从第一斜面开始，依次经过水平面和第二斜面设有连贯的第一横槽、第二横槽和第三横槽，在第一斜面上垂直于第一横槽设有第一竖槽，在第二斜面上垂直于第三横槽设有第三竖槽。As an improvement to the present invention, the upper bottom surface of the standard block includes a first inclined plane, a horizontal plane, and a second inclined plane connected in sequence. The first inclined plane and the second inclined plane are respectively inclined downward; starting from the first inclined plane, pass through the horizontal plane in sequence A first horizontal groove, a second horizontal groove, and a third horizontal groove are provided on the second inclined plane. The first vertical groove is perpendicular to the first horizontal groove on the first inclined plane, and the first vertical groove is arranged on the second inclined plane. The horizontal groove is provided with a third vertical groove.
作为对本发明的改进，所述标准块是用金属材料制成的。As an improvement to the present invention, the standard block is made of metal materials.
作为对本发明的改进，所述金属材料是铁合金、铝合金、铜合金或不锈钢。As an improvement to the present invention, the metal material is iron alloy, aluminum alloy, copper alloy or stainless steel.
有益效果Beneficial effect
设备的标定要达到两个标准，一个是将三个光谱共焦测量仪的光斑调整到同一条直线上，另一个是计算出两侧光谱共焦测头轴线与中间光谱共焦测头轴线之间的夹角；而本发明通过使用所设计的标准块可以简单地将三个光谱共焦测量仪的光斑调整到同一条直线上；利用标准块及本发明提供的标定方法可以简便的计算出两侧光谱共焦测头轴线与中间光谱共焦测头轴线之间的夹角。The calibration of the equipment must meet two standards. One is to adjust the light spots of the three spectral confocal measuring instruments to the same straight line, and the other is to calculate the difference between the axis of the spectral confocal probe on both sides and the axis of the central spectral confocal probe. The present invention can simply adjust the light spots of the three spectral confocal measuring instruments to the same straight line by using the designed standard block; the standard block and the calibration method provided by the present invention can be easily calculated The angle between the axis of the spectral confocal probe on both sides and the axis of the central spectral confocal probe.
附图说明Description of the drawings
图1是本发明标定方法的一种实施例的方框结构示意图。Fig. 1 is a schematic block diagram of an embodiment of the calibration method of the present invention.
图2是本发明的标定装置的一种实施例的平面结构示意图。Fig. 2 is a schematic plan view of an embodiment of the calibration device of the present invention.
图3是图2的侧面结构示意图。Fig. 3 is a schematic side view of the structure of Fig. 2.
图4是图2的立体结构示意图。FIG. 4 is a schematic diagram of the three-dimensional structure of FIG. 2.
图5是图2中的标准块的立体结构示意图。FIG. 5 is a schematic diagram of the three-dimensional structure of the standard block in FIG. 2.
图6是图5的俯视结构示意图。Fig. 6 is a schematic top view of the structure of Fig. 5.
图7是图5的侧视结构示意图。Fig. 7 is a schematic side view of the structure of Fig. 5.
图8是本发明一种标定状态结构示意图。Fig. 8 is a schematic diagram of the structure of a calibration state of the present invention.
图9是本发明夹角计算的结构示意图。Fig. 9 is a schematic diagram of the structure of the included angle calculation of the present invention.
本发明的最佳实施方式The best mode of the present invention
为了使本发明的目的、技术方案及优点更加清楚明白，以下结合附图对本发明做进一步详细说明。In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings.
本领域的技术人员容易理解，以上所述仅为本发明的较佳实施例而已，并不用以限制本发明，凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等，均应包含在本发明的保护范围之内。Those skilled in the art can easily understand that the above descriptions are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modification, equivalent replacement and improvement, etc. made within the spirit and principle of the present invention, All should be included in the protection scope of the present invention.
请参见图1，图1揭示的是一种非接触式测量中多测头标定方法，适合于具有测量设备、水平旋转装置和机床，且测量设备、水平旋转装置分别设在机床上，测量设备位于水平旋转装置上方的测量装置的多测头标定，包括如下步骤：Please refer to Fig. 1. Fig. 1 discloses a multi-probe calibration method in non-contact measurement, which is suitable for measuring equipment, horizontal rotating device and machine tool, and the measuring equipment and horizontal rotating device are respectively set on the machine tool, and the measuring equipment The multi-probe calibration of the measuring device located above the horizontal rotating device includes the following steps:
S1：将标准块安装在水平转动装置的工作台上，所述标准块的上底面包括依次连接的第一斜面、水平面和第二斜面，所述第一斜面和第二斜面分别向斜下方倾斜；从第一斜面开始，依次经过水平面和第二斜面设有连贯的第一横槽、第二横槽和第三横槽，在第一斜面上垂直于第一横槽设有第一竖槽，在第二斜面上垂直于第三横槽设有第三竖槽，其中横槽和竖槽的深度固定且已知；S1: Install the standard block on the workbench of the horizontal rotation device. The upper and bottom surface of the standard block includes a first inclined plane, a horizontal plane, and a second inclined plane connected in sequence, and the first inclined plane and the second inclined plane are respectively inclined downwardly ; Starting from the first inclined plane, successively through the horizontal plane and the second inclined plane are provided with a continuous first horizontal groove, a second horizontal groove and a third horizontal groove, and a first vertical groove is provided on the first inclined plane perpendicular to the first horizontal groove , A third vertical groove is provided on the second inclined plane perpendicular to the third horizontal groove, wherein the depth of the horizontal groove and the vertical groove are fixed and known;
S2：将标准块的横槽的边缘调节至与机床x轴平行；具体方法为（参见图8），机床带动中间光谱共焦测头对标准块进行测量，得到光谱共焦测头工作起点A到标准块表面的距离d；将中间光谱共焦测头朝一个方向移动，当中间光谱共焦测头发出的光线射到标准块的第二横槽的内底面时，所获得的数据会发生第一次突变，记录测量值发生突变的位置B；令机床沿x轴水平运动预定距离l BC到位置C，然后控制中间光谱共焦测头沿机床y轴移动，记录测量数据发生第二次突变的位置D，同时记录位置C到位置D之间的距离l CD；通过公式一，即得到将标准块横槽的边沿调节至与机床x轴平行需要调整水平转动装置的角度值θ， S2: Adjust the edge of the horizontal groove of the standard block to be parallel to the x-axis of the machine tool; the specific method is (see Figure 8), the machine tool drives the intermediate spectral confocal probe to measure the standard block, and obtains the starting point of the spectral confocal probe A The distance d to the surface of the standard block; move the middle-spectrum confocal probe in one direction, when the light from the middle-spectrum confocal probe hits the inner bottom surface of the second horizontal groove of the standard block, the obtained data will occur For the first sudden change, record the position B where the measured value changes suddenly; make the machine tool move a predetermined distance along the x-axis from BC to position C, and then control the mid-spectrum confocal probe to move along the machine's y-axis, and record the measurement data for the second time The position D of the sudden change, while recording the distance l CD between position C and position D; through formula 1, the angle value θ of the horizontal rotation device needs to be adjusted to adjust the edge of the horizontal groove of the standard block to be parallel to the x-axis of the machine tool,
        公式一 ... Formula one
通过控制水平转动装置的DD马达，使标准块旋转角度θ，从而使标准块的横槽的边沿与机床x轴平行。By controlling the DD motor of the horizontal rotation device, the standard block is rotated by the angle θ, so that the edge of the horizontal groove of the standard block is parallel to the x-axis of the machine tool.
S3：调整中间光谱共焦测头的空间角度，使中间光谱共焦测头的轴线垂直于机床工作台的水平面xoy；具体做法是，调节第二角度调整机构，并且使用调整垫片，使得中间光谱共焦测头的轴线垂直于工作台水平面xoy；调整光谱共焦测头工作原点距标准块表面的距离，保证标准块处在光谱共焦测头的工作范围内。S3: Adjust the spatial angle of the mid-spectrum confocal probe so that the axis of the mid-spectrum confocal probe is perpendicular to the horizontal plane xoy of the machine tool table; the specific method is to adjust the second angle adjustment mechanism and use an adjustment spacer to make the center The axis of the spectral confocal probe is perpendicular to the horizontal plane of the worktable xoy; the distance between the working origin of the spectral confocal probe and the surface of the standard block is adjusted to ensure that the standard block is within the working range of the spectral confocal probe.
S4：调整左侧光谱共焦测头和右侧光谱共焦测头的空间角度，使左侧光谱共焦测头和右侧光谱共焦测头的轴线平行于机床工作台前平面或后平面xoz；调整第一角度调整机构，使左侧光谱共焦测头的轴线与中间光谱共焦测头的轴线之间的第一夹角α 1在预定范围内；调整第三角度调整机构，使右侧光谱共焦测头的轴线和中间光谱共焦测头的轴线的第二夹α 2在预定范围内；调整第一手动角位台和第三手动角位台的旋钮，使左侧光谱共焦测头的轴线和右侧光谱共焦测头的轴线平行于机床工作台前面或后面xoz。 S4: Adjust the spatial angle of the left spectral confocal probe and the right spectral confocal probe to make the axes of the left spectral confocal probe and the right spectral confocal probe parallel to the front or rear plane of the machine tool table xoz; adjust the first angle adjustment mechanism so that the first included angle α 1 between the axis of the left spectral confocal probe and the axis of the middle spectral confocal probe is within a predetermined range; adjust the third angle adjustment mechanism to make The second clamp α 2 between the axis of the right spectral confocal probe and the axis of the middle spectral confocal probe is within a predetermined range; adjust the knobs of the first manual angle stage and the third manual angle stage to make the left spectrum The axis of the confocal probe and the axis of the spectral confocal probe on the right are parallel to xoz in front of or behind the machine table.
S5：调整中间光谱共焦测头、左侧光谱共焦测头和右侧光谱共焦测头的轴线在同一个平面内；具体做法为，调整左侧光谱共焦测头、中间光谱共焦测头，以及右侧光谱共焦测头与标准块之间的距离，让标准块在左侧光谱共焦测头、中间光谱共焦测头和右侧光谱共焦测头的工作范围内；控制机床主轴带动中间光谱共焦测头沿机床y轴移动，使中间光谱共焦测头的光斑从标准块的第二横槽的一侧向第二横槽内移动，当光斑从标准块的表面投射到第二横槽的底部时，中间光谱共焦测头得到的距离值会发生突变，记录发生数据突变的位置，并将中间光谱共焦测头固定在该位置；使左侧光谱共焦测头的光斑从标准块第一横槽的一侧向第一横槽内移动，记录左侧光谱共焦测头的光斑从标准块表面投射到第一横槽底部时距离发生突变的位置，并将左侧光谱共焦测头固定在该位置；使右侧光谱共焦测头的光斑从标准块第三横槽的一侧向第三横槽内移动，记录右侧光谱共焦测头的光斑从标准块表面投射到第三横槽底部时距离发生突变的位置，并将右侧光谱共焦测头固定在该位置。S5: Adjust the axis of the middle spectral confocal probe, the left spectral confocal probe and the right spectral confocal probe to be in the same plane; the specific method is to adjust the left spectral confocal probe and the middle spectral confocal probe The distance between the probe and the right spectral confocal probe and the standard block, so that the standard block is within the working range of the left spectral confocal probe, the middle spectral confocal probe and the right spectral confocal probe; Control the spindle of the machine tool to drive the middle spectrum confocal probe to move along the y-axis of the machine tool, so that the light spot of the middle spectrum confocal probe moves from the side of the second horizontal groove of the standard block to the second horizontal groove. When the surface is projected to the bottom of the second horizontal groove, the distance value obtained by the middle spectral confocal probe will change suddenly. Record the position where the data change occurs, and fix the middle spectral confocal probe at this position; make the left spectrum common The spot of the focal probe moves from the side of the first transverse groove of the standard block to the first transverse groove, and the position where the distance abruptly changes when the spot of the confocal probe on the left side is projected from the surface of the standard block to the bottom of the first transverse groove , And fix the left spectral confocal probe at this position; make the light spot of the right spectral confocal probe move from the side of the third horizontal groove of the standard block to the third horizontal groove, and record the right spectral confocal measurement When the light spot of the head is projected from the surface of the standard block to the bottom of the third horizontal groove, the position where the distance changes suddenly, and the right spectral confocal probe is fixed at this position.
S6：计算左侧光谱共焦测头轴线与中间光谱共焦测头轴线之间的第一夹角α 1，以及计算右侧光谱共焦测头轴线与中间光谱共焦测头轴线之间的第二夹角α 2。具体做法为，控制左侧光谱共焦测头沿机床x轴从第一竖槽的外侧向内侧移动，当左侧光谱共焦测头的光斑从标准块表面投射到第一竖槽底部时，获得的距离值会发生突变，突变前距离值记为d 1，突变后距离值记为d 2；根据公式二，即可计算得到左侧测头轴线与中间测头轴线之间的第一夹角α 1， S6: Calculate the first angle α 1 between the axis of the left spectral confocal probe and the axis of the middle spectral confocal probe, and calculate the difference between the axis of the right spectral confocal probe and the axis of the middle spectral confocal probe The second included angle α 2 . The specific method is to control the left spectral confocal probe to move from the outside to the inside of the first vertical groove along the x-axis of the machine tool. When the light spot of the left spectral confocal probe is projected from the surface of the standard block to the bottom of the first vertical groove, The obtained distance value will have a sudden change. The distance value before the change is recorded as d 1 , and the distance value after the change is recorded as d 2 ; According to formula 2, the first clamp between the axis of the left probe and the axis of the middle probe can be calculated Angle α 1 ,
Figure 926419dest_path_image002
     公式二
Figure 926419dest_path_image002
Formula two
则   α 1=β+γ Then α 1 =β+γ
利用同样的步骤，计算出第二夹角α 2； Using the same steps, calculate the second included angle α 2 ;
上式中，d为标准块的竖槽的边沿距竖槽底面的垂直距离，d 1、d 2为左侧或右侧光谱共焦测头的光斑分别投射到标准块竖槽边沿和竖槽底部时测得的距离值，γ为标准块上斜面与水平面的夹角（参见图9）。 In the above formula, d is the vertical distance between the edge of the vertical groove of the standard block and the bottom surface of the vertical groove, d 1 and d 2 are the light spots of the left or right spectral confocal probe projected to the edge of the vertical groove and the vertical groove of the standard block, respectively The measured distance value at the bottom, γ is the angle between the inclined plane of the standard block and the horizontal plane (see Figure 9).
请参见图2、图3和图4，本发明还提供一种非接触式测量中多测头的标定装置，包括测量设备1、水平旋转装置2、机床（未画出）和标准块3，所述测量设备1和水平旋转装置2分别设在机床上，测量设备1位于水平旋转装置2上方,其中，所述包括测量设备1依次排布在安装架11上的左侧光谱共焦测头12、中间光谱共焦测头13和右侧光谱共焦测头14，所述水平旋转装置2包括工作台21，以及位于工作台21下面的用于带动工作平台移动的电机22，所述电机22设有底座23上，所述标准块3设置在水平转动装置2的工作台21上，所述标准块3的上底面31包括依次连接的第一斜面311、水平面312和第二斜面313，所述第一斜面311和第二斜面313分别向斜下方倾斜；从第一斜面311开始，依次经过水平面312和第二斜面313设有连贯的第一横槽3111、第二横槽3121和第三横槽3131，在第一斜面311上垂直于第一横槽3111设有第一竖槽3112，在第二斜面313上垂直于第三横槽3131设有第三竖槽3132（参见图6）。由于标准块3中设有连贯的第一横槽3111、第二横槽3121和第三横槽3131，且连贯的第一横槽3111、第二横槽3121和第三横槽3131的边沿在同一平面内，所以，很容易将三个光谱共焦测量仪的光斑调整到同一条直线上；而在第一斜面311上垂直于第一横槽3111设有第一竖槽3112，可以方便地计算出第一夹角α（参见图9）；以及在在第二斜面313上垂直于第三横槽3131设有第三竖槽3132可以方便地计算出第二夹角α 2（参见图9）。 Please refer to Fig. 2, Fig. 3 and Fig. 4, the present invention also provides a calibration device for multiple probes in non-contact measurement, including a measuring device 1, a horizontal rotating device 2, a machine tool (not shown) and a standard block 3. The measuring device 1 and the horizontal rotating device 2 are respectively arranged on the machine tool, and the measuring device 1 is located above the horizontal rotating device 2, wherein the measuring device 1 is arranged in sequence on the left side spectral confocal probe on the mounting frame 11. 12. The middle spectrum confocal probe 13 and the right spectrum confocal probe 14, the horizontal rotating device 2 includes a worktable 21, and a motor 22 located under the worktable 21 for driving the work platform to move, the motor 22 is provided with a base 23, the standard block 3 is set on the workbench 21 of the horizontal rotating device 2, and the upper bottom surface 31 of the standard block 3 includes a first inclined surface 311, a horizontal surface 312, and a second inclined surface 313 connected in sequence, The first inclined surface 311 and the second inclined surface 313 are respectively inclined obliquely downward; starting from the first inclined surface 311, passing through the horizontal plane 312 and the second inclined surface 313 in turn, a continuous first transverse groove 3111, a second transverse groove 3121, and a second transverse groove 3121 are provided. Three horizontal grooves 3131, a first vertical groove 3112 is provided on the first inclined surface 311 perpendicular to the first horizontal groove 3111, and a third vertical groove 3132 is provided on the second inclined surface 313 perpendicular to the third horizontal groove 3131 (see FIG. 6 ). Since the standard block 3 is provided with a continuous first horizontal groove 3111, a second horizontal groove 3121, and a third horizontal groove 3131, and the edges of the continuous first horizontal groove 3111, the second horizontal groove 3121 and the third horizontal groove 3131 are in In the same plane, it is easy to adjust the light spots of the three spectral confocal measuring instruments to the same straight line; and the first vertical groove 3112 is provided on the first inclined surface 311 perpendicular to the first horizontal groove 3111, which can be conveniently Calculate the first included angle α (see FIG. 9); and the third vertical groove 3132 is provided on the second inclined surface 313 perpendicular to the third horizontal groove 3131 to easily calculate the second included angle α 2 (see FIG. 9 ).
优选的，所述左侧光谱共焦测头12包括第一测头121、第一角度调整机构122，所述第一测头121设在所述第一角度调整机构122上，所述第一角度调整机构122设在第一手动角位台123上，所述第一手动角位台123设在第一前后移动装置124上，所述第一前后移动装置124设在第一上下移动装置125上，所述第一上下移动装置125设在第一左右移动装置126上。Preferably, the left side spectral confocal probe 12 includes a first probe 121, a first angle adjustment mechanism 122, the first probe 121 is provided on the first angle adjustment mechanism 122, and the first The angle adjustment mechanism 122 is provided on the first manual angle table 123, the first manual angle table 123 is provided on the first forward and backward movement device 124, and the first forward and backward movement device 124 is provided on the first up and down movement device 125 Above, the first up and down movement device 125 is provided on the first left and right movement device 126.
优选的，所述中间光谱共焦测头13包括第二测头131、第二角度调整机构132，所述第二测头131设在所述第二角度调整机构132上，所述第三角度调整机构132设在第二左右移动装置133上。Preferably, the intermediate spectrum confocal probe 13 includes a second probe 131, a second angle adjustment mechanism 132, the second probe 131 is provided on the second angle adjustment mechanism 132, and the third angle The adjustment mechanism 132 is provided on the second left-right moving device 133.
优选的，所述右侧光谱共焦测头14包括第三测头141、第三角度调整机构142，所述第三测头141设在所述第三角度调整机构142上，所述第三角度调整机构142设在第三手动角位台143上，所述第三手动角位台143设在第三前后移动装置144上，所述第三前后移动装置144设在第三上下移动装置145上，所述第三上下移动装置145设在第三左右移动装置146上。 Preferably, the right spectral confocal probe 14 includes a third probe 141, a third angle adjustment mechanism 142, the third probe 141 is provided on the third angle adjustment mechanism 142, and the third The angle adjustment mechanism 142 is provided on the third manual angle table 143, the third manual angle table 143 is provided on the third forward and backward movement device 144, and the third forward and backward movement device 144 is provided on the third up and down movement device 145 Above, the third up and down movement device 145 is provided on the third left and right movement device 146.
请参见图5、图6和图7，本发明还提供一种标准块3，在标准块3的上底面31包括依次连接的第一斜面311、水平面312和第二斜面313，所述第一斜面311和第二斜面313分别向斜下方倾斜；从第一斜面311开始，依次经过水平面312和第二斜面313设有连贯的第一横槽3111、第二横槽3121和第三横槽3131，在第一斜面311上垂直于第一横槽3111设有第一竖槽3112，在第二斜面313上垂直于第三横槽3131设有第三竖槽3132。Referring to Figures 5, 6 and 7, the present invention also provides a standard block 3. The upper bottom surface 31 of the standard block 3 includes a first inclined surface 311, a horizontal surface 312, and a second inclined surface 313 connected in sequence. The inclined surface 311 and the second inclined surface 313 are respectively inclined downward; starting from the first inclined surface 311, successively passing through the horizontal plane 312 and the second inclined surface 313, a continuous first transverse groove 3111, a second transverse groove 3121 and a third transverse groove 3131 are provided. A first vertical groove 3112 is provided on the first inclined surface 311 perpendicular to the first horizontal groove 3111, and a third vertical groove 3132 is provided on the second inclined surface 313 perpendicular to the third horizontal groove 3131.
优选的，所述标准块3是用金属材料制成的。Preferably, the standard block 3 is made of metal material.
优选的，所述金属材料是铁合金、铝合金、铜合金或不锈钢。Preferably, the metal material is iron alloy, aluminum alloy, copper alloy or stainless steel.
本发明中，横槽（第一横槽、第二横槽和第三横槽）或/和竖槽（第一竖槽、第二竖槽和第三竖槽）可以是U形平底槽，也可以是梯形槽，本发明中，各示图中的横槽和竖槽是以梯形槽为例加以说明的，不难理解，当横槽和竖槽为U形平底槽时，本发明的方法和装置也是适用的。In the present invention, the horizontal grooves (the first horizontal groove, the second horizontal groove and the third horizontal groove) or/and the vertical grooves (the first vertical groove, the second vertical groove and the third vertical groove) may be U-shaped flat-bottomed grooves, It can also be a trapezoidal groove. In the present invention, the horizontal and vertical grooves in each diagram are described as examples of trapezoidal grooves. It is not difficult to understand that when the horizontal and vertical grooves are U-shaped flat-bottomed grooves, the The method and device are also applicable.
本领域的技术人员容易理解，以上所述仅为本发明的较佳实施例而已，并不用以限制本发明，凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等，均应包含在本发明的保护范围之内。Those skilled in the art can easily understand that the above descriptions are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modification, equivalent replacement and improvement, etc. made within the spirit and principle of the present invention, All should be included in the protection scope of the present invention.

Claims (1)

  1. 一种非接触式测量中多测头标定方法，适合于具有测量设备、水平旋转装置和机床，且测量设备、水平旋转装置分别设在机床上，测量设备位于水平旋转装置上方的测量装置的多测头标定，其特征在于：包括如下步骤：A calibration method for multiple probes in non-contact measurement is suitable for multiple measuring devices with measuring equipment, horizontal rotating devices and machine tools, and the measuring equipment and horizontal rotating devices are respectively arranged on the machine tools, and the measuring equipment is located above the horizontal rotating device. Probe calibration is characterized in that it includes the following steps:
    S1：将标准块安装在水平转动装置的工作台上，所述标准块的上底面包括依次连接的第一斜面、水平面和第二斜面，所述第一斜面和第二斜面分别向斜下方倾斜；从第一斜面开始，依次经过水平面和第二斜面设有连贯的第一横槽、第二横槽和第三横槽，在第一斜面上垂直于第一横槽设有第一竖槽，在第二斜面上垂直于第三横槽设有第三竖槽；S1: Install the standard block on the workbench of the horizontal rotation device. The upper and bottom surface of the standard block includes a first inclined plane, a horizontal plane, and a second inclined plane connected in sequence, and the first inclined plane and the second inclined plane are respectively inclined downwardly ; Starting from the first inclined plane, successively through the horizontal plane and the second inclined plane are provided with a continuous first horizontal groove, a second horizontal groove and a third horizontal groove, and a first vertical groove is provided on the first inclined plane perpendicular to the first horizontal groove , A third vertical groove is provided on the second inclined plane perpendicular to the third horizontal groove;
    S2：将标准块的横槽的边缘调节至与机床x轴平行；S2: Adjust the edge of the horizontal groove of the standard block to be parallel to the x-axis of the machine tool;
    S3：调整中间光谱共焦测头的空间角度，使中间光谱共焦测头的轴线垂直于机床工作台的水平面xoy；S3: Adjust the spatial angle of the mid-spectrum confocal probe so that the axis of the mid-spectrum confocal probe is perpendicular to the horizontal plane xoy of the machine tool table;
    S4：调整左侧光谱共焦测头和右侧光谱共焦测头的空间角度，使左侧光谱共焦测头和右侧光谱共焦测头的轴线平行于机床工作台前平面或后平面xoz；S4: Adjust the spatial angle of the left spectral confocal probe and the right spectral confocal probe to make the axes of the left spectral confocal probe and the right spectral confocal probe parallel to the front or rear plane of the machine tool table xoz;
    S5：调整中间光谱共焦测头、左侧光谱共焦测头和右侧光谱共焦测头的轴线在同一个平面内；S5: Adjust the axes of the middle spectral confocal probe, left spectral confocal probe and right spectral confocal probe to be in the same plane;
    S6：计算左侧光谱共焦测头轴线与中间光谱共焦测头轴线之间的第一夹角α 1，以及计算右侧光谱共焦测头轴线与中间光谱共焦测头轴线之间的第二夹角α 2。 S6: Calculate the first angle α 1 between the axis of the left spectral confocal probe and the axis of the middle spectral confocal probe, and calculate the difference between the axis of the right spectral confocal probe and the axis of the middle spectral confocal probe The second included angle α 2 .
    根据权利要求1所述的非接触式测量中多测头标定方法，其特征在于：所述将标准块的横槽的边缘调节至与机床x轴平行的步骤为机床带动中间光谱共焦测头对标准块进行测量，得到光谱共焦测头工作起点A到标准块表面的距离d；将中间光谱共焦测头朝一个方向移动，当中间光谱共焦测头发出的光线射到标准块的第二横槽的内底面时，所获得的数据会发生第一次突变，记录测量值发生突变的位置B；令机床沿x轴水平运动预定距离l BC到位置C，然后控制中间光谱共焦测头沿机床y轴移动，记录测量数据发生第二次突变的位置D，同时记录位置C到位置D之间的距离l CD；通过公式一，即得到将标准块横槽的边沿调节至与机床x轴平行需要调整水平转动装置的角度值θ， The method for multi-probe calibration in non-contact measurement according to claim 1, wherein the step of adjusting the edge of the horizontal groove of the standard block to be parallel to the x-axis of the machine tool is that the machine tool drives the intermediate spectral confocal probe Measure the standard block to obtain the distance d from the starting point A of the spectral confocal probe to the surface of the standard block; move the intermediate spectral confocal probe in one direction, when the light from the intermediate spectral confocal probe hits the surface of the standard block When the inner bottom surface of the second horizontal groove, the acquired data will undergo a sudden change for the first time, record the position B where the measured value changes suddenly; make the machine tool move horizontally along the x-axis for a predetermined distance l BC to position C, and then control the intermediate spectrum confocal The probe moves along the y-axis of the machine tool, and records the position D where the measurement data undergoes the second mutation. At the same time, it records the distance l CD from position C to position D; through formula 1, the edge of the horizontal groove of the standard block is adjusted to and The x-axis of the machine tool needs to be adjusted for the angle value θ of the horizontal rotation device,
            公式一 ... Formula one
    通过控制水平转动装置的DD马达，使标准块旋转角度θ，从而使标准块的横槽的边沿与机床x轴平行。By controlling the DD motor of the horizontal rotation device, the standard block is rotated by the angle θ, so that the edge of the horizontal groove of the standard block is parallel to the x-axis of the machine tool.
    根据权利要求1或2所述的非接触式测量中多测头标定方法，其特征在于：所述调整中间光谱共焦测头、左侧光谱共焦测头和右侧光谱共焦测头的轴线在同一个平面内的步骤为：The multi-probe calibration method in non-contact measurement according to claim 1 or 2, characterized in that: the adjustment of the middle spectral confocal probe, the left spectral confocal probe and the right spectral confocal probe The steps for the axis to be in the same plane are:
    调整左侧光谱共焦测头、中间光谱共焦测头，以及右侧光谱共焦测头与标准块之间的距离，让标准块在左侧光谱共焦测头、中间光谱共焦测头和右侧光谱共焦测头的工作范围内；控制机床主轴带动中间光谱共焦测头沿机床y轴移动，使中间光谱共焦测头的光斑从标准块的第二横槽的一侧向第二横槽内移动，当光斑从标准块的表面投射到第二横槽的底部时，中间光谱共焦测头得到的距离值会发生突变，记录发生数据突变的位置，并将中间光谱共焦测头固定在该位置；使左侧光谱共焦测头的光斑从标准块第一横槽的一侧向第一横槽内移动，记录左侧光谱共焦测头的光斑从标准块表面投射到第一横槽底部时距离发生突变的位置，并将左侧光谱共焦测头固定在该位置；使右侧光谱共焦测头的光斑从标准块第三横槽的一侧向第三横槽内移动，记录右侧光谱共焦测头的光斑从标准块表面投射到第三横槽底部时距离发生突变的位置，并将右侧光谱共焦测头固定在该位置。Adjust the distance between the left spectral confocal probe and the middle spectral confocal probe, and the distance between the right spectral confocal probe and the standard block, so that the standard block is on the left spectral confocal probe and the middle spectral confocal probe And the working range of the right spectral confocal probe; control the machine tool spindle to drive the middle spectral confocal probe to move along the y-axis of the machine tool, so that the light spot of the middle spectral confocal probe is from the side of the second horizontal groove of the standard block When moving in the second horizontal groove, when the light spot is projected from the surface of the standard block to the bottom of the second horizontal groove, the distance value obtained by the intermediate spectrum confocal probe will change suddenly, record the position of the sudden change of data, and share the intermediate spectrum. The focus probe is fixed at this position; the light spot of the left spectral confocal probe is moved from the side of the first horizontal groove of the standard block to the first horizontal groove, and the light spot of the left spectral confocal probe is recorded from the surface of the standard block. When projecting to the bottom of the first horizontal groove, the distance changes suddenly, and fix the left spectral confocal probe at this position; make the light spot of the right spectral confocal probe from the side of the third horizontal groove of the standard block to the second Move in the three horizontal grooves, record the position where the distance change occurs when the light spot of the right spectral confocal probe is projected from the surface of the standard block to the bottom of the third horizontal groove, and fix the right spectral confocal probe at this position.
    根据权利要求1或2所述的非接触式测量中多测头标定方法，其特征在于：S6步中计算第一夹角α 1和第二夹角α 2的步骤为：控制左侧光谱共焦测头沿机床x轴从第一竖槽的外侧向内侧移动，当左侧光谱共焦测头的光斑从标准块表面投射到第一竖槽底部时，获得的距离值会发生突变，突变前距离值记为d 1，突变后距离值记为d 2；根据公式二，即可计算得到左侧测头轴线与中间测头轴线之间的夹角α 1， The method for calibrating multiple probes in non-contact measurement according to claim 1 or 2, characterized in that the step of calculating the first included angle α 1 and the second included angle α 2 in step S6 is: controlling the total spectrum of the left side The focus probe moves along the x-axis of the machine tool from the outside to the inside of the first vertical groove. When the spot of the left spectral confocal probe is projected from the surface of the standard block to the bottom of the first vertical groove, the obtained distance value will undergo abrupt changes. The value of the front distance is recorded as d 1 , and the value of the distance after the sudden change is recorded as d 2 ; According to formula 2, the angle α 1 between the axis of the left probe and the axis of the middle probe can be calculated,
    Figure 843405dest_path_image002
         公式二
    Figure 843405dest_path_image002
    Formula two
    则  α 1=β+γ Then α 1 =β+γ
    利用同样的步骤，计算出第二夹角α 2； Using the same steps, calculate the second included angle α 2 ;
    上式中，d为标准块的竖槽的边沿距竖槽底面的垂直距离，d 1、d 2为左侧或右侧光谱共焦测头的光斑分别投射到标准块竖槽边沿和竖槽底部时测得的距离值，γ为标准块上斜面与水平面的夹角。 In the above formula, d is the vertical distance between the edge of the vertical groove of the standard block and the bottom surface of the vertical groove, d 1 and d 2 are the light spots of the left or right spectral confocal probe projected to the edge of the vertical groove and the vertical groove of the standard block, respectively The measured distance value at the bottom, γ is the angle between the inclined plane of the standard block and the horizontal plane.
    一种非接触式测量中多测头的标定装置，包括测量设备（1）、水平旋转装置（2）和机床，所述测量设备（1）和水平旋转装置（2）分别设在机床上，测量设备（1）位于水平旋转装置（2）上方,其中，所述包括测量设备（1）依次排布在安装架（11）上的左侧光谱共焦测头（12）、中间光谱共焦测头（13）和右侧光谱共焦测头（14），所述水平旋转装置（2）包括工作台（21），以及位于工作台（21）下面的用于带动工作平台移动的电机（22），其特征在于：还包括标准块（3），所述标准块（3）设置在水平转动装置（2）的工作台（21）上，所述标准块（3）的上底面（31）包括依次连接的第一斜面（311）、水平面（312）和第二斜面（313），所述第一斜面（311）和第二斜面（313）分别向斜下方倾斜；从第一斜面（311）开始，依次经过水平面（312）和第二斜面（313）设有连贯的第一横槽（3111）、第二横槽（3121）和第三横槽（3131），在第一斜面（311）上垂直于第一横槽（3111）设有第一竖槽（3112），在第二斜面（313）上垂直于第三横槽（3131）设有第三竖槽（3132）。A calibration device for multiple probes in non-contact measurement, comprising a measuring device (1), a horizontal rotating device (2) and a machine tool. The measuring device (1) and the horizontal rotating device (2) are respectively arranged on the machine tool, The measuring device (1) is located above the horizontal rotating device (2), wherein the measuring device (1) is arranged in sequence on the left side spectral confocal probe (12) and the middle spectral confocal probe (12) on the mounting frame (11). The measuring head (13) and the right spectral confocal measuring head (14), the horizontal rotating device (2) includes a working table (21), and a motor located below the working table (21) for driving the working platform to move ( 22), characterized in that it further comprises a standard block (3), the standard block (3) is arranged on the worktable (21) of the horizontal rotating device (2), and the upper and bottom surface (31) of the standard block (3) ) Includes a first inclined plane (311), a horizontal plane (312) and a second inclined plane (313) connected in sequence, the first inclined plane (311) and the second inclined plane (313) are respectively inclined downward; from the first inclined plane ( 311) Beginning, passing through the horizontal plane (312) and the second inclined plane (313) in turn to set up a continuous first transverse groove (3111), a second transverse groove (3121) and a third transverse groove (3131), in the first inclined plane ( A first vertical groove (3112) is provided on 311) perpendicular to the first horizontal groove (3111), and a third vertical groove (3132) is provided on the second slope (313) perpendicular to the third horizontal groove (3131).
    根据权利要求5所述的非接触式测量中多测头的标定装置，其特征在于：所述左侧光谱共焦测头（12）包括第一测头（121）、第一角度调整机构（122），所述第一测头（121）设在所述第一角度调整机构（122）上，所述第一角度调整机构（122）设在第一手动角位台（123）上，所述第一手动角位台（123）设在第一前后移动装置（124）上，所述第一前后移动装置（124）设在第一上下移动装置（125）上，所述第一上下移动装置（125）设在第一左右移动装置（126）上。The calibration device for multiple probes in non-contact measurement according to claim 5, characterized in that: the left side spectral confocal probe (12) comprises a first probe (121) and a first angle adjustment mechanism ( 122), the first measuring head (121) is set on the first angle adjustment mechanism (122), and the first angle adjustment mechanism (122) is set on the first manual angle table (123), so The first manual angle table (123) is arranged on the first forward and backward movement device (124), the first forward and backward movement device (124) is arranged on the first up and down movement device (125), and the first up and down movement The device (125) is provided on the first left-right moving device (126).
    根据权利要求5或6所述的非接触式测量中多测头的标定装置，其特征在于：所述右侧光谱共焦测头（14）包括第三测头（141）、第三角度调整机构（142），所述第三测头（141）设在所述第三角度调整机构（142）上，所述第三角度调整机构（142）设在第三手动角位台（143）上，所述第三手动角位台（143）设在第三前后移动装置（144）上，所述第三前后移动装置（144）设在第三上下移动装置（145）上，所述第三上下移动装置（145）设在第三左右移动装置（146）上。 The calibration device for multiple probes in non-contact measurement according to claim 5 or 6, characterized in that: the right spectral confocal probe (14) includes a third probe (141), a third angle adjustment The mechanism (142), the third measuring head (141) is set on the third angle adjustment mechanism (142), and the third angle adjustment mechanism (142) is set on the third manual angle table (143) , The third manual angle table (143) is arranged on the third forward and backward movement device (144), the third forward and backward movement device (144) is arranged on the third up and down movement device (145), and the third The up and down moving device (145) is provided on the third left and right moving device (146).
    一种用于非接触式测量中多测头标定的标准块，其特征在于：在标准块（3）的上底面（31）包括依次连接的第一斜面（311）、水平面（312）和第二斜面（313），所述第一斜面（311）和第二斜面（313）分别向斜下方倾斜；从第一斜面（311）开始，依次经过水平面（312）和第二斜面（313）设有连贯的第一横槽（3111）、第二横槽（3121）和第三横槽（3131），在第一斜面（311）上垂直于第一横槽（3111）设有第一竖槽（3112），在第二斜面（313）上垂直于第三横槽（3131）设有第三竖槽（3132）。A standard block used for multi-probe calibration in non-contact measurement, characterized in that: the upper bottom surface (31) of the standard block (3) includes a first inclined surface (311), a horizontal plane (312) and a first inclined surface (312) connected in sequence. Two inclined planes (313), the first inclined plane (311) and the second inclined plane (313) are respectively inclined downward; starting from the first inclined plane (311), passing through the horizontal plane (312) and the second inclined plane (313) in turn There are consecutive first horizontal grooves (3111), second horizontal grooves (3121) and third horizontal grooves (3131), and a first vertical groove is provided on the first inclined plane (311) perpendicular to the first horizontal groove (3111) (3112), a third vertical groove (3132) is provided on the second inclined surface (313) perpendicular to the third horizontal groove (3131).
    根据权利要求8所述的非接触式测量中多测头的标定装置，其特征在于：所述标准块（3）是用金属材料制成的。The calibration device for multiple probes in non-contact measurement according to claim 8, wherein the standard block (3) is made of metal material.
    根据权利要求9所述的非接触式测量中多测头的标定装置，其特征在于：所述金属材料是铁合金、铝合金、铜合金或不锈钢。The calibration device for multiple probes in non-contact measurement according to claim 9, wherein the metal material is iron alloy, aluminum alloy, copper alloy or stainless steel.
     To
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113740033A (en) * 2021-08-17 2021-12-03 中国科学院合肥物质科学研究院 Method for calibrating light beam direction of optical measuring head in spectrum confocal measuring system
CN114111672A (en) * 2021-11-26 2022-03-01 南京航空航天大学 Method for quickly calibrating sensor installation position parameters measured by multiple displacement sensors in normal direction
CN114923412A (en) * 2022-05-24 2022-08-19 绍兴职业技术学院 Calibration method for multi-measuring-head measuring system of shaft parts
WO2023142186A1 (en) * 2022-01-27 2023-08-03 浙江大学 Method and device for simultaneously measuring surface shape and thickness distribution of inner wall and outer wall of thin-wall revolving body
US11761756B2 (en) 2022-01-27 2023-09-19 Zhejiang University Method and device for simultaneously detecting surface shapes and thickness distribution of inner and outer walls of thin-wall rotating body

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200408793A (en) * 2002-11-22 2004-06-01 Ind Tech Res Inst Object surface 3-D contour measurement method and system
CN1758018A (en) * 2005-09-30 2006-04-12 中国海洋大学 Multi visual angle laser measuring head and its calibration method
CN101216295A (en) * 2008-01-14 2008-07-09 浙江大学 Combined point laser feeler based unknown free curved face measurement method and feeler device
CN103267491A (en) * 2012-07-17 2013-08-28 深圳大学 Method and system for automatically acquiring complete three-dimensional data of object surface
CN107621235A (en) * 2017-08-26 2018-01-23 东莞市三姆森光电科技有限公司 Mobile phone curved surface housing profile measuring method and its measuring apparatus based on Spectral Confocal technology
CN108020171A (en) * 2017-12-25 2018-05-11 东莞市三姆森光电科技有限公司 Mobile phone curved surface housing profile measuring method and its measuring apparatus based on Spectral Confocal technology
CN207622709U (en) * 2017-12-25 2018-07-17 东莞市三姆森光电科技有限公司 Mobile phone curved surface housing profile measuring apparatus based on Spectral Confocal technology
CN110260819A (en) * 2019-07-08 2019-09-20 东莞市三姆森光电科技有限公司 More head calibration methods, caliberating device and calibrated bolck in non-contact measurement

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200408793A (en) * 2002-11-22 2004-06-01 Ind Tech Res Inst Object surface 3-D contour measurement method and system
CN1758018A (en) * 2005-09-30 2006-04-12 中国海洋大学 Multi visual angle laser measuring head and its calibration method
CN101216295A (en) * 2008-01-14 2008-07-09 浙江大学 Combined point laser feeler based unknown free curved face measurement method and feeler device
CN103267491A (en) * 2012-07-17 2013-08-28 深圳大学 Method and system for automatically acquiring complete three-dimensional data of object surface
CN107621235A (en) * 2017-08-26 2018-01-23 东莞市三姆森光电科技有限公司 Mobile phone curved surface housing profile measuring method and its measuring apparatus based on Spectral Confocal technology
CN108020171A (en) * 2017-12-25 2018-05-11 东莞市三姆森光电科技有限公司 Mobile phone curved surface housing profile measuring method and its measuring apparatus based on Spectral Confocal technology
CN207622709U (en) * 2017-12-25 2018-07-17 东莞市三姆森光电科技有限公司 Mobile phone curved surface housing profile measuring apparatus based on Spectral Confocal technology
CN110260819A (en) * 2019-07-08 2019-09-20 东莞市三姆森光电科技有限公司 More head calibration methods, caliberating device and calibrated bolck in non-contact measurement

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113740033A (en) * 2021-08-17 2021-12-03 中国科学院合肥物质科学研究院 Method for calibrating light beam direction of optical measuring head in spectrum confocal measuring system
CN113740033B (en) * 2021-08-17 2023-05-02 中国科学院合肥物质科学研究院 Beam direction calibration method for optical measuring head in spectral confocal measurement system
CN114111672A (en) * 2021-11-26 2022-03-01 南京航空航天大学 Method for quickly calibrating sensor installation position parameters measured by multiple displacement sensors in normal direction
WO2023142186A1 (en) * 2022-01-27 2023-08-03 浙江大学 Method and device for simultaneously measuring surface shape and thickness distribution of inner wall and outer wall of thin-wall revolving body
US11761756B2 (en) 2022-01-27 2023-09-19 Zhejiang University Method and device for simultaneously detecting surface shapes and thickness distribution of inner and outer walls of thin-wall rotating body
CN114923412A (en) * 2022-05-24 2022-08-19 绍兴职业技术学院 Calibration method for multi-measuring-head measuring system of shaft parts
CN114923412B (en) * 2022-05-24 2024-03-12 绍兴职业技术学院 Calibration method for shaft part multi-measuring head measuring system

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