WO2021084794A1 - Ultraviolet radiation device - Google Patents

Ultraviolet radiation device Download PDF

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Publication number
WO2021084794A1
WO2021084794A1 PCT/JP2020/025011 JP2020025011W WO2021084794A1 WO 2021084794 A1 WO2021084794 A1 WO 2021084794A1 JP 2020025011 W JP2020025011 W JP 2020025011W WO 2021084794 A1 WO2021084794 A1 WO 2021084794A1
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WO
WIPO (PCT)
Prior art keywords
light source
housing
cooling
irradiation device
ultraviolet irradiation
Prior art date
Application number
PCT/JP2020/025011
Other languages
French (fr)
Japanese (ja)
Inventor
肇 石原
Original Assignee
ウシオ電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ウシオ電機株式会社 filed Critical ウシオ電機株式会社
Priority to KR1020227010254A priority Critical patent/KR20220053004A/en
Priority to CN202080063790.1A priority patent/CN114365260A/en
Publication of WO2021084794A1 publication Critical patent/WO2021084794A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/122—Incoherent waves
    • B01J19/123—Ultraviolet light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/54—Igniting arrangements, e.g. promoting ionisation for starting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/56—One or more circuit elements structurally associated with the lamp

Definitions

  • the present invention relates to an ultraviolet irradiation device that emits ultraviolet rays.
  • Patent Document 1 Japanese Unexamined Patent Publication No. 2017-157458 discloses an ultraviolet irradiation device provided with a cooling mechanism for supplying cooling air to a lamp.
  • the housing of the ultraviolet irradiation device may house electrical components such as a lighting power supply (transformer) for lighting the lamp and a sensor (photodiode) for confirming the lighting of the lamp.
  • electrical components have a heat resistant temperature and need to be cooled to an appropriate temperature.
  • ozone is generated by the ultraviolet rays radiated from the lamp, but there is a problem that the above-mentioned electrical components are deteriorated by the ozone.
  • Patent Document 1 Japanese Unexamined Patent Publication No. 2017-157458
  • the present invention provides an ultraviolet irradiation device capable of appropriately cooling a lamp, appropriately cooling electrical components installed inside the device, and preventing deterioration of the electrical components due to ozone. It is an issue.
  • one aspect of the ultraviolet irradiation device includes a housing, a partition plate fixed to the housing and partitioning the inside of the housing into a cooling unit and a light source unit.
  • the light source arranged inside the light source portion and radiating ultraviolet rays, and the inside of the cooling portion.
  • the cooling air is introduced from the cooling unit to the light source unit through the first through hole, and is exhausted as exhaust air from the light source unit through the exhaust passage.
  • the electrical components arranged inside the cooling unit and the light source arranged inside the light source unit can be appropriately cooled. Therefore, it is possible to prevent a decrease in the ultraviolet transmittance due to the high temperature of the light source. Further, the temperature of the electrical component can be maintained below the heat resistant temperature, and the life of the electrical component can be extended. Further, since the electrical components are arranged inside the cooling portion on the upstream side of the light source due to the flow of the cooling air, it is possible to surely prevent the electrical components from being deteriorated by ozone.
  • the rectifying member may be a plate-shaped member arranged in the vicinity of the electrical component.
  • the electrical component can include a sensor for confirming the lighting of the light source and a lighting power source for lighting the light source. In this case, deterioration of the lighting confirmation sensor and the lighting power supply can be appropriately suppressed, so that the ultraviolet irradiation device can be operated properly.
  • the partition plate vertically divides the inside of the housing into the cooling portion which is the upper space and the light source portion which is the lower space, and the exhaust passage is at least.
  • a part of the cooling unit may be formed directly above the light source inside the cooling unit, may be formed on the partition plate, and may further include a second through hole for communicating the light source unit and the exhaust passage. In this case, it is possible to form a wind flow that combines ozone exhaust, cooling of the light source, and cooling of electrical components inside the housing.
  • the electrical components are fixed to the upper surface of the partition plate, and a first intake hole is formed in the vicinity of the partition plate on the side wall of the housing forming the cooling portion. It may have been done. In this case, the cooling air supplied from the first intake hole can be reliably applied to the electrical components fixed to the upper surface of the partition plate, and the electrical components can be efficiently cooled. Further, in the ultraviolet irradiation device, the electrical components are arranged above the inside of the cooling unit, and a second intake hole is formed above the electrical components on the upper wall of the housing. May be good. In this case, the cooling air supplied from the second intake hole can be reliably applied to the electrical components arranged above inside the cooling unit, and the electrical components can be efficiently cooled.
  • the ultraviolet irradiation device further includes a handle portion provided on the side wall of the housing forming the cooling portion, and is provided in the vicinity of the side wall provided with the handle portion on the upper wall of the housing.
  • a third intake hole may be formed.
  • the cooling air supplied from the third intake hole can be applied to the side wall, and the handle portion provided on the side wall can be cooled.
  • the side wall provided with the handle portion can also be cooled, it is possible to suppress the temperature rise of the housing and prevent the housing from bending due to thermal expansion.
  • the handle portion may be provided so as to project from the side wall of the housing to the inside of the cooling portion.
  • the cooling air supplied from the third intake hole can be reliably applied to the handle portion, and the handle portion can be efficiently cooled.
  • the ultraviolet irradiation device includes a plurality of the housings, the light source is arranged along the longitudinal direction of the housing, and the housing is a pair of wide side walls parallel to the longitudinal direction.
  • the wide side wall is provided with a pair of narrow side walls perpendicular to the longitudinal direction, and the outer surface of the wide side wall is a flat surface, and holes through which the cooling air and the exhaust air pass are not formed.
  • the plurality of housings may be arranged side by side with the wide side walls facing each other. Even in an ultraviolet irradiation device in which a plurality of housings are arranged in this way, the lamp is properly cooled, the electrical components installed inside the device are also appropriately cooled, and deterioration of the electrical components due to ozone is prevented. be able to.
  • the narrow side wall may be rotatably connected to the upper wall of the housing.
  • the narrow side wall since the narrow side wall can be opened, the inside of the housing can be easily accessed even when a plurality of housings are arranged so that the wide side walls face each other. Therefore, maintenance work such as replacement of the light source can be appropriately and easily performed.
  • the present invention it is possible to properly cool the lamp, properly cool the electrical components installed inside the apparatus, and prevent the deterioration of the electrical components due to ozone.
  • the above-mentioned purpose, aspect and effect of the present invention and the above-mentioned purpose, aspect and effect of the present invention not described above will be used by those skilled in the art to carry out the following invention by referring to the accompanying drawings and the description of the scope of claims. Can be understood from the form of (detailed description of the invention).
  • FIG. 1 is an external view of the ultraviolet irradiation device according to the present embodiment.
  • FIG. 2 is a schematic configuration diagram of an ultraviolet irradiation device.
  • FIG. 3 is a diagram showing a first through hole and a second through hole.
  • FIG. 4 is a diagram schematically showing the flow of cooling air inside the cooling unit.
  • FIG. 5 is a diagram schematically showing the flow of the cooling air supplied from the third intake hole.
  • FIG. 6 is a diagram schematically showing the flow of cooling air inside the light source unit.
  • FIG. 1 is an external view of the ultraviolet irradiation device 10 according to the present embodiment.
  • the ultraviolet irradiation device 10 is small and lightweight enough to be carried by one person will be described.
  • the X direction in FIG. 1 is referred to as the "width direction”
  • the Y direction in FIG. 1 is referred to as the “longitudinal direction”
  • the Z direction in FIG. 1 is referred to as the "height direction”.
  • the ultraviolet irradiation device 10 includes a rectangular parallelepiped housing 11.
  • the housing 11 includes a pair of narrow side walls 11a perpendicular to the longitudinal direction, an upper wall 11b, and a pair of wide side walls 11c parallel to the longitudinal direction.
  • the external dimensions (length x width x height) of the housing 11 of the ultraviolet irradiation device 10 can be 500 mm to 750 mm x 160 mm x 360 mm.
  • a first intake hole 21 is formed on the side wall 11a, and a second intake hole 22 and a third intake hole 23 are formed on the upper wall 11b.
  • These intake holes 21 to 23 are openings for taking in outside air as cooling air inside the ultraviolet irradiation device 10, and can be configured by, for example, a plurality of slits.
  • the cooling air taken in from the intake holes 21 to 23 cools the components of the ultraviolet irradiation device 10 through the air passage defined inside the housing 11, and is exhausted from the exhaust passage 31 as exhaust air.
  • the side wall 11a may be connected to, for example, the upper wall 11b by a hinge 11d. That is, the side wall 11a may be rotatable about the X-axis with respect to the upper wall 11b around the hinge 11d.
  • FIG. 2 is a schematic configuration diagram of the ultraviolet irradiation device 10. As shown in FIG. 2, both ends of the partition plate 14 are fixed to the side wall of the housing 11, and the inside of the housing 11 is vertically partitioned by the partition plate 14. Of the spaces partitioned above and below, the upper space is the cooling unit 15a, and the lower space is the light source unit 15b. A part of the exhaust passage 31 through which the exhaust air flows is formed in the cooling portion 15a.
  • the exhaust passage 31 has, for example, a cylindrical shape, and is arranged so that its axial direction coincides with the height direction.
  • the upper end of the exhaust passage 31 is inserted into an opening provided in the upper wall 11b of the housing 11 and projects from the upper wall 11b to the outside (upward) of the housing 11.
  • the exhaust passage 31 is connected to the upper wall of the exhaust chamber 32 formed in the cooling portion 15a.
  • the exhaust chamber 32 is formed of a rectangular parallelepiped housing having an open bottom surface, and its four side walls are airtightly connected to the upper surface of the partition plate 14.
  • the inside of the exhaust passage 31 and the inside of the exhaust chamber 32 are communicated with each other, and the inside of the exhaust passage 31 and the exhaust chamber 32 and the inside of the cooling unit 15a are not communicated with each other, that is, the inside of the exhaust passage 31 and the exhaust chamber 32.
  • the inside and the inside of the cooling unit 15a are spatially independent of each other.
  • the partition plate 14 is formed with a first through hole 14a that communicates the inside of the cooling portion 15a and the inside of the light source portion 15b. As shown in FIG. 3, the first through hole 14a is formed along the longitudinal direction on both sides of the exhaust chamber 32 in the width direction of the ultraviolet irradiation device 10. Further, as shown in FIG. 3, the partition plate 14 is formed with a second through hole 14b that communicates the inside of the exhaust passage 31 (the inside of the exhaust chamber 32) and the inside of the light source portion 15b. As shown in FIG. 3, the second through hole 14b is formed in the central portion of the partition plate 14 along the longitudinal direction.
  • a lamp 51 as a light source is arranged in the light source unit 15b.
  • the lamp 51 an excimer lamp that emits ultraviolet rays in a specific wavelength range can be used.
  • the lamp 51 includes, for example, a rectangular arc tube having a flat cross section perpendicular to the central axis of the lamp, and is arranged so that the central axis of the lamp coincides with the longitudinal direction of the ultraviolet irradiation device 10.
  • the arc tube may be, for example, a glass tube made of synthetic quartz.
  • the length of the lamp 51 in the longitudinal direction can be, for example, 385 mm to 635 mm.
  • the input power to the lamp 51 can be, for example, about 250 W in the case of the above-mentioned 385 mm lamp 51 and 420 W in the case of the 635 mm lamp 51.
  • the second through hole 14b and the exhaust passage 31 are formed directly above the lamp 51.
  • a heat shield plate 52 may be arranged between the housing 11 and the lamp 51 along the lamp 51.
  • the heat shield plates 52 can be arranged on both sides of the lamp 51 in the width direction of the ultraviolet irradiation device 10.
  • each of the heat shield plates 52 is fixed to the lower surface of the partition plate 14, and has a vertical surface 52a that is continuous downward from the lower surface of the partition plate 14 and a horizontal surface 52b that projects inward in the width direction from the lower end of the vertical surface 52a.
  • It may be a plate-shaped member having a C-shaped cross section.
  • a predetermined gap is formed between the inner end of the vertical surface 52a in the width direction and both side surfaces of the lamp 51 in the width direction.
  • the first through hole 14a is formed on the outer side in the width direction with respect to the heat shield plate 52, and communicates between the inside of the cooling portion 15a and the outside of the space surrounded by the heat shield plate 52 inside the light source portion 15b.
  • the second through hole 14b communicates the inside of the exhaust passage 31 (the inside of the exhaust chamber 32) with the inside of the space surrounded by the heat shield plate 52 inside the light source portion 15b.
  • the ultraviolet irradiation device 10 inside the cooling unit 15a of the ultraviolet irradiation device 10, electrical equipment such as a sensor (photodiode) 41 for confirming the lighting of the lamp 51 and a lighting power supply (transformer) 42 for lighting the lamp 51.
  • the parts are arranged. Since the ultraviolet irradiation device 10 in the present embodiment is a portable ultraviolet irradiation device, it is necessary to store various electrical components necessary for lighting control of the ultraviolet irradiation device in the housing.
  • the sensor 41 is arranged in the vicinity of the lamp 51 in order to confirm the lighting of the lamp 51.
  • the sensor 41 is fixed to the partition plate 14.
  • the partition plate 14 is provided with a window portion 14c (see FIG. 4), and the sensor 41 is configured to detect the light emitted from the lamp 51 and transmitted through the window portion 14c.
  • the window portion 14c can be configured such that, for example, glass transparent to the light radiated from the lamp 51 is arranged in the opening formed in the partition plate 14 and sealed with an O-ring or the like.
  • the lighting power supply 42 is arranged above the inside of the cooling unit 15a. Further, a rectifying plate (rectifying member) 43 is provided in the vicinity of the lighting power supply 42.
  • the straightening vane 43 is a plate-shaped member that guides the cooling air supplied from the second intake hole 22 provided in the upper wall 11b to the lighting power supply 42, and is, for example, tubular or U-shaped as shown in FIG. It is formed.
  • the straightening vane 43 can be fixed to, for example, the side wall 11c. Further, the lighting power supply 42 can be placed on the bottom surface of the straightening vane 43. The power supply to the lighting power supply 42 is performed via the power cable 13.
  • the first intake hole 21 is formed in the vicinity of the partition plate 14 on the narrow side wall 11a. Further, the second intake hole 22 is formed above the lighting power supply 42 on the upper wall 11b. That is, the first intake hole 21 and the second intake hole 22 are formed in the vicinity of the sensor 41 and the lighting power supply 42, respectively. Further, the third intake hole 23 is formed in the vicinity of the side wall 11c on the upper wall 11b, for example, at a position facing the first through hole 14a.
  • the opening area (total area) of the third intake hole 23 and the opening area (total area) of the first through hole 14a may be equivalent.
  • the ultraviolet irradiation device 10 includes an exhaust fan (not shown), and by driving the exhaust fan, the pressure outside the device is applied to the inside of the space surrounded by the heat shield plate 52 in the exhaust passage 31, the exhaust chamber 32, and the light source unit 15b. Can be negative pressure against.
  • outside air is taken into the cooling portion 15a from the intake holes 21 to 23 provided in the housing 11.
  • the wind 61 taken into the cooling portion 15a from the first intake hole 21 hits the sensor 41 arranged in the vicinity of the first intake hole 21 and acts as a cooling air for cooling the sensor 41. ..
  • the partition plate 14 functions as a rectifying member that guides the cooling air supplied from the first intake hole 21 to the inside of the cooling unit 15a to the sensor 41.
  • the wind 62 that has cooled the sensor 41 flows into the light source unit 15b through the first through hole 14a formed in the partition plate 14.
  • the wind 63 taken into the cooling unit 15a from the second intake hole 22 is changed in the direction of the flow by the rectifying plate 43 and hits the lighting power supply 42 arranged in the vicinity of the second intake hole 22.
  • the straightening vane 43 guides the cooling air supplied from the second intake hole 22 into the cooling unit 15a toward the lighting power supply 42 without flowing downward as it is.
  • the wind 64 applied to the lighting power supply 42 acts as a cooling air for cooling the lighting power supply 42, and the wind 65 for cooling the lighting power supply 42 passes through the first through hole 14a formed in the partition plate 14 to the light source unit. It flows into 15b.
  • the second intake hole 22 is formed closer to the center in the longitudinal direction on the upper wall 11b.
  • the cooling air supplied from the second intake hole 22 to the inside of the cooling unit 15a hits the end of the rectifying plate 43 and flows outward along the rectifying plate 43 in the longitudinal direction of the ultraviolet irradiation device 10 and then downwards. Facing, it will flow from the first through hole 14a into the light source unit 15b. Therefore, the cooling air can be appropriately applied to the lighting power supply 42 mounted on the straightening vane 43.
  • the wind 66 taken into the cooling portion 15a from the third intake hole 23 flows linearly toward the first through hole 14a arranged to face each other, and flows into the light source portion 15b through the first through hole 14a. ..
  • the wide side wall 11c of the ultraviolet irradiation device 10 is provided with a handle portion 12 that is gripped by a person when carrying the ultraviolet irradiation device 10. As shown in FIG. 5, the handle portion 12 is provided so as to project from the side wall 11c into the cooling portion 15a. Since the third intake hole 23 is formed in the vicinity of the side wall 11c on the upper wall 11b, the wind 66 taken into the cooling portion 15a from the third intake hole 23 flows along the side wall 11c and penetrates the first. It directly hits the handle portion 12 in the process of flowing into the hole 14a. That is, the wind 66 acts as a cooling air for cooling the handle portion 12.
  • FIG. 6 is a diagram schematically showing the flow of wind inside the light source unit 15b.
  • the wind 66 introduced into the light source portion 15b from the first through hole 14a flows downward along the vertical surface 52a of the heat shield plate 52, and a gap formed between the lamp 51 and the horizontal plane 52b of the heat shield plate 52. It flows through the space surrounded by the heat shield plate 52.
  • the wind 67 that has flowed into the space surrounded by the heat shield plate 52 flows along the peripheral surface of the lamp 51 and acts as a cooling air that cools the lamp 51.
  • the wind 68 that has cooled the lamp 51 flows toward the second through hole 14b and flows into the exhaust chamber 32 through the second through hole 14b.
  • the second through hole 14b is formed directly above the lamp 51. Therefore, the wind 67 that has flowed into the space surrounded by the heat shield plate 52 from the gap between the lamp 51 and the heat shield plate 52 flows so as to trace the surface of the lamp 51 and passes through the second through hole 14b. It will flow into the exhaust chamber 32. Therefore, the lamp 51 can be appropriately cooled.
  • the wind 69 introduced into the exhaust chamber 32 becomes exhaust air and is exhausted to the outside of the ultraviolet irradiation device 10 through the exhaust passage 31.
  • the cooling air supplied to the inside of the cooling unit 15a cools the electrical components such as the sensor 41 and the lighting power supply 42 inside the cooling unit 15a, and then cools the lamp 51 inside the light source unit 15b. That is, the lamp 51 is cooled by the wind that has cooled the electrical components. Since the temperature of the electrical components is very low with respect to the temperature of the lamp 51, the air that cools the electrical components can be used without problems as the cooling air that cools the lamp 51.
  • the cooling air supplied to the inside of the cooling unit 15a from the intake hole formed in the wall of the housing 11 forming the cooling unit 15a is the cooling unit. It is introduced from the 15a through the first through hole 14a to the light source unit 15b, and is exhausted as exhaust air from the light source unit 15b through the exhaust passage 31. In this way, the cooling air can be introduced into the light source unit 15b in which the lamp 51 is arranged, so that the lamp 51 can be appropriately cooled. Therefore, it is possible to suppress a decrease in the ultraviolet transmittance of the arc tube included in the lamp 51, and it is possible to obtain a desired ultraviolet intensity.
  • the cooling air before cooling the lamp 51 can be introduced into the cooling unit 15a in which the electrical components such as the sensor 41 (photodiode) and the lighting power supply 42 (transformer) are arranged, the electrical components can be appropriately cooled. can do. Therefore, it is possible to extend the life of electrical components.
  • the ultraviolet irradiation device 10 can include a rectifying member (rectifying plate 43, partition plate 14) that guides the cooling air supplied to the inside of the cooling unit 15a to the electrical components. As a result, the electrical components can be cooled efficiently.
  • the rectifying member may be a plate-shaped member arranged in the vicinity of the electrical component. Therefore, it is possible to easily and appropriately form a flow of cooling air that surely passes through the electrical components.
  • the ultraviolet irradiation device 10 in the present embodiment appropriately defines the positional relationship between the electrical components and the intake holes 21 and 22 for taking in the cooling air into the cooling unit 15a, so that the inside of the cooling unit 15a An appropriate flow of cooling air can be formed, and the electrical components installed in the cooling unit 15a can be reliably cooled.
  • the first intake hole 21 is formed in the vicinity of the sensor 41
  • the second intake hole 22 is formed in the vicinity of the lighting power supply 42. Therefore, fresh cooling air taken in from the outside of the apparatus can be first applied to these electrical components, and the electrical components can be efficiently cooled.
  • the rectifying plate 43 having a tubular shape or a U-shaped cross section so as to surround the lighting power supply 42 having the highest temperature among the electrical components, the lighting power supply 42 can be reliably cooled.
  • the inside of the light source unit 15b in which the lamp 51 is arranged is directly communicated with the exhaust passage 31, ozone generated by the ultraviolet rays radiated from the lamp 51 inside the light source unit 15b can be appropriately exhausted. Further, the inside of the exhaust passage 31 is configured not to communicate with the inside of the cooling unit 15a. As a result, the ozone generated in the light source unit 15b can be prevented from flowing into the cooling unit 15a, and the electrical components installed inside the cooling unit 15a can be prevented from being exposed to ozone. In this way, since the electrical components are arranged inside the cooling portion 15a on the upstream side of the lamp 51 due to the flow of the cooling air, it is possible to reliably prevent the electrical components from being deteriorated by ozone.
  • the ultraviolet irradiation device 10 when the heat of the lamp 51 is directly transferred to the housing 11, a temperature difference occurs between the upper side (cooling portion 15a side) and the lower side (light source portion 15b side) of the housing 11, and the heat is generated.
  • the housing 11 may bend due to the difference in expansion.
  • An object to be irradiated (work) is arranged under the housing 11 (the light irradiation side of the lamp 51), and the gap between the housing 11 and the work is generally about several mm. Therefore, if the housing 11 bends, the housing 11 may come into contact with the work.
  • the third intake hole 23 is formed in the vicinity of the wide side wall 11c on the upper wall 11b.
  • the cooling air taken in from the third intake hole 23 can be applied to the side wall 11c to uniformly cool the side wall 11c. Therefore, the temperature of the housing 11 can be made uniform, and as a result, the bending of the housing 11 can be appropriately suppressed, and the position of the housing 11 with respect to the work can be stably maintained.
  • the cooling air taken in from the third intake hole 23 hits the side wall 11c, so that the handle portion 12 provided on the side wall 11c can also be cooled. ..
  • the cooling air taken in from the third intake hole 23 can be reliably applied to the handle portion 12, and the handle portion 12 can be efficiently applied. Can be cooled. As a result, it is possible to prevent the handle portion 12 from becoming too hot to be gripped, and to appropriately carry and move the ultraviolet irradiation device 10.
  • the third intake hole 23 is arranged to face the first through hole 14a, the fresh cooling air taken in from the third intake hole 23 can be linearly flowed into the first through hole 14a. Therefore, the side wall 11c and the handle portion 12 can be appropriately cooled. Further, the lamp 51 and the heat shield plate 52 arranged inside the light source unit 15b can also be appropriately cooled. By cooling the heat shield plate 52, the heat shield function of the heat shield plate 52 can be improved.
  • FIG. 2 the case where the third intake hole 23 and the first through hole 14a are formed in a range shorter than the length in the longitudinal direction of the lamp 51 has been described. It may be formed in a range equal to or longer than the length in the longitudinal direction of 51.
  • the shapes and numbers of the intake holes 21 to 23 for taking the cooling air into the cooling unit 15a are not limited to the shapes and numbers shown in FIG.
  • the shapes and numbers of the intake holes 21 to 23 are arbitrary as long as it is possible to form a flow in which the cooling air is introduced into the light source unit 15b through the electrical components arranged in the cooling unit 15a and exhausted from the exhaust passage 31. Can be set to. At this time, the flow velocity of the cooling air is set to, for example, 2 m / s or more.
  • the ultraviolet irradiation device 10 of the present embodiment may include a plurality of housings 11.
  • the handle portion 12 provided on the wide side wall 11c of the housing 11 has a shape protruding inside the housing 11, and the outer surface of the side wall 11c is a flat surface.
  • the intake hole for taking in the cooling air and the exhaust hole for exhausting the exhaust air are not formed on the side wall 11c. Therefore, the ultraviolet irradiation device 10 may have a configuration in which a plurality of housings 11 are arranged side by side with the wide side walls 11c facing each other. Thereby, a large-sized ultraviolet irradiation device can be configured.
  • the narrow side wall 11a is connected to the upper wall 11b of the housing 11 by a hinge 11d, and the side wall 11a is centered on the hinge 11d. It can rotate about the X axis with respect to the upper wall 11b. By opening the narrow side wall 11a, the inside of the housing 11 can be accessed. Therefore, even when a plurality of ultraviolet irradiation devices 10 are arranged so that the wide side walls 11c face each other, maintenance work such as replacement of the lamp 51 in the housing 11 can be easily performed.
  • the ultraviolet irradiation device 10 in the present embodiment it is possible to form a wind flow that combines ozone exhaust, cooling of the ultraviolet light source, and cooling of electrical components inside the housing 11. Then, the electrical components can be arranged on the upstream side of the ultraviolet light source due to the flow of wind. Therefore, the lamp 51, which is a light source, can be appropriately cooled, the electrical components in the housing 11 can be reliably cooled, and the electrical components can be prevented from being deteriorated by ozone.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
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Abstract

Disclosed is an ultraviolet radiation device that enables: a lamp to be suitably cooled and an electrical component disposed inside of the device to be suitably cooled; and degradation of the electrical component by ozone to be prevented.　An ultraviolet radiation device (10) comprises: a housing (11); a partition plate (14) that divides the interior of the housing (11) into a cooling section (15a) and a light source section (15b); a first through-hole (14a) that is formed in the partition plate (14) and that passes through the inside of the cooling section (15a) and the inside of the light source section (15b); a light source (lamp) (51) that is disposed inside the light source section (15b) and that projects ultraviolet rays; electrical components (41, 42) that are disposed inside of the cooling section (15a); a rectifying member that guides, to the electrical components (41, 42), cooling air that has been supplied into the cooling section (15a); and an exhaust passage (31) that passes through the inside of the light source section (15b) but does not pass through the inside of the cooling section (15a). The cooling air is guided from the cooling section (15a) into the light source section (15b) through the first through-hole (14a), and then exhausted, as exhaust air, from the light source section (15b) via the exhaust passage (31).

Description

紫外線照射装置Ultraviolet irradiation device
　本発明は、紫外線を放射する紫外線照射装置に関する。 The present invention relates to an ultraviolet irradiation device that emits ultraviolet rays.
　従来、半導体ウエハの洗浄などにおいて、エキシマランプを光源とした紫外線照射装置が使用されている。このような紫外線照射装置では、エキシマランプが高温になると発光管の紫外線透過率が低下し、所望の紫外線強度が得られなくなることから、適切な温度となるようにエキシマランプを冷却する必要がある。
　例えば特許文献１（特開２０１７－１５７４５８号公報）には、ランプに冷却風を供給する冷却機構を備えた紫外線照射装置が開示されている。 Conventionally, an ultraviolet irradiation device using an excimer lamp as a light source has been used for cleaning semiconductor wafers and the like. In such an ultraviolet irradiation device, when the excimer lamp becomes hot, the ultraviolet transmittance of the arc tube decreases and the desired ultraviolet intensity cannot be obtained. Therefore, it is necessary to cool the excimer lamp to an appropriate temperature. ..
For example, Patent Document 1 (Japanese Unexamined Patent Publication No. 2017-157458) discloses an ultraviolet irradiation device provided with a cooling mechanism for supplying cooling air to a lamp.
特開２０１７－１５７４５８号公報JP-A-2017-157458
　紫外線照射装置の筐体には、ランプを点灯させるための点灯電源（トランス）や、ランプの点灯を確認するためのセンサ（フォトダイオード）等の電装部品を収納する場合がある。このような電装部品には耐熱温度があり、適切な温度に冷却する必要がある。また、紫外線照射装置では、ランプから放射される紫外線によってオゾンが発生するが、上記のような電装部品は、オゾンによって劣化するといった問題がある。
　しかしながら、上記特許文献１（特開２０１７－１５７４５８号公報）に記載の技術では、紫外線照射装置の内部に点灯電源やセンサ等の電装部品が設置された場合の昇温対策や、オゾンによる劣化防止対策については全く考慮されていない。 The housing of the ultraviolet irradiation device may house electrical components such as a lighting power supply (transformer) for lighting the lamp and a sensor (photodiode) for confirming the lighting of the lamp. Such electrical components have a heat resistant temperature and need to be cooled to an appropriate temperature. Further, in the ultraviolet irradiation device, ozone is generated by the ultraviolet rays radiated from the lamp, but there is a problem that the above-mentioned electrical components are deteriorated by the ozone.
However, in the technique described in Patent Document 1 (Japanese Unexamined Patent Publication No. 2017-157458), measures for raising the temperature when electrical components such as a lighting power supply and a sensor are installed inside the ultraviolet irradiation device, and prevention of deterioration due to ozone. No measures are taken into consideration.
　そこで、本発明は、ランプを適正に冷却するとともに、装置内部に設置された電装部品も適正に冷却し、かつ、電装部品のオゾンによる劣化を防止することができる紫外線照射装置を提供することを課題としている。 Therefore, the present invention provides an ultraviolet irradiation device capable of appropriately cooling a lamp, appropriately cooling electrical components installed inside the device, and preventing deterioration of the electrical components due to ozone. It is an issue.
　上記課題を解決するために、本発明に係る紫外線照射装置の一態様は、筐体と、前記筐体に固定され、前記筐体の内部を冷却部と光源部とに区画する仕切板と、前記仕切板に形成され、前記冷却部の内部と前記光源部の内部とを連通する第１貫通孔と、前記光源部の内部に配置され、紫外線を放射する光源と、前記冷却部の内部に配置された電装部品と、前記冷却部の内部に供給された冷却風を前記電装部品に導く整流部材と、前記光源部の内部に連通され、前記冷却部の内部に連通されていない排気路と、を備え、前記冷却風は、前記冷却部から前記第１貫通孔を通って前記光源部へ導入され、前記光源部から前記排気路を介して排気風として排気される。 In order to solve the above problems, one aspect of the ultraviolet irradiation device according to the present invention includes a housing, a partition plate fixed to the housing and partitioning the inside of the housing into a cooling unit and a light source unit. In the first through hole formed in the partition plate and communicating the inside of the cooling portion and the inside of the light source portion, the light source arranged inside the light source portion and radiating ultraviolet rays, and the inside of the cooling portion. The arranged electrical components, the rectifying member that guides the cooling air supplied to the inside of the cooling section to the electrical components, and the exhaust passage that is communicated with the inside of the light source section and not communicated with the inside of the cooling section. , The cooling air is introduced from the cooling unit to the light source unit through the first through hole, and is exhausted as exhaust air from the light source unit through the exhaust passage.
　これにより、冷却部内部に配置された電装部品および光源部内部に配置された光源を、適切に冷却することができる。したがって、光源が高温になることに起因する紫外線透過率の低下を防止することができる。また、電装部品の温度を耐熱温度以下に維持することができ、電装部品の寿命を延ばすことができる。さらに、冷却風の流れで光源よりも上流側の冷却部の内部に、電装部品を配置するので、電装部品がオゾンによって劣化することを確実に防止することができる。 As a result, the electrical components arranged inside the cooling unit and the light source arranged inside the light source unit can be appropriately cooled. Therefore, it is possible to prevent a decrease in the ultraviolet transmittance due to the high temperature of the light source. Further, the temperature of the electrical component can be maintained below the heat resistant temperature, and the life of the electrical component can be extended. Further, since the electrical components are arranged inside the cooling portion on the upstream side of the light source due to the flow of the cooling air, it is possible to surely prevent the electrical components from being deteriorated by ozone.
　また、上記の紫外線照射装置において、前記整流部材は、前記電装部品の近傍に配置された板状部材であってもよい。この場合、容易かつ適切に、電装部品を確実に通るような冷却風の流れを形成することができる。
　さらに、上記の紫外線照射装置において、前記電装部品は、前記光源の点灯を確認するためのセンサと、前記光源を点灯するための点灯電源とを含むことができる。この場合、点灯確認用のセンサや点灯用の電源の劣化を適切に抑制することができるので、紫外線照射装置を適正に動作させることができる。 Further, in the above-mentioned ultraviolet irradiation device, the rectifying member may be a plate-shaped member arranged in the vicinity of the electrical component. In this case, it is possible to easily and appropriately form a flow of cooling air that surely passes through the electrical components.
Further, in the above-mentioned ultraviolet irradiation device, the electrical component can include a sensor for confirming the lighting of the light source and a lighting power source for lighting the light source. In this case, deterioration of the lighting confirmation sensor and the lighting power supply can be appropriately suppressed, so that the ultraviolet irradiation device can be operated properly.
　また、上記の紫外線照射装置において、前記仕切板は、前記筐体の内部を、上側空間である前記冷却部と下側空間である前記光源部とに上下に区画し、前記排気路は、少なくとも一部が、前記冷却部の内部における前記光源の直上に形成されており、前記仕切板に形成され、前記光源部と前記排気路とを連通する第２貫通孔をさらに備えていてもよい。
　この場合、筐体の内部において、オゾン排気と光源の冷却と電装部品の冷却とを兼ねた風の流れを形成することができる。 Further, in the ultraviolet irradiation device, the partition plate vertically divides the inside of the housing into the cooling portion which is the upper space and the light source portion which is the lower space, and the exhaust passage is at least. A part of the cooling unit may be formed directly above the light source inside the cooling unit, may be formed on the partition plate, and may further include a second through hole for communicating the light source unit and the exhaust passage.
In this case, it is possible to form a wind flow that combines ozone exhaust, cooling of the light source, and cooling of electrical components inside the housing.
　さらに、上記の紫外線照射装置において、前記電装部品は、前記仕切板の上面に固定されており、前記冷却部を形成する前記筐体の側壁における前記仕切板の近傍に、第１吸気孔が形成されていてもよい。この場合、第１吸気孔から供給された冷却風を、仕切板の上面に固定された電装部品に確実に当てることができ、当該電装部品を効率良く冷却することができる。
　また、上記の紫外線照射装置において、前記電装部品は、前記冷却部の内部における上方に配置されており、前記筐体の上壁における前記電装部品の上方に、第２吸気孔が形成されていてもよい。この場合、第２吸気孔から供給された冷却風を、冷却部の内部における上方に配置された電装部品に確実に当てることができ、当該電装部品を効率良く冷却することができる。 Further, in the ultraviolet irradiation device, the electrical components are fixed to the upper surface of the partition plate, and a first intake hole is formed in the vicinity of the partition plate on the side wall of the housing forming the cooling portion. It may have been done. In this case, the cooling air supplied from the first intake hole can be reliably applied to the electrical components fixed to the upper surface of the partition plate, and the electrical components can be efficiently cooled.
Further, in the ultraviolet irradiation device, the electrical components are arranged above the inside of the cooling unit, and a second intake hole is formed above the electrical components on the upper wall of the housing. May be good. In this case, the cooling air supplied from the second intake hole can be reliably applied to the electrical components arranged above inside the cooling unit, and the electrical components can be efficiently cooled.
　さらにまた、上記の紫外線照射装置は、前記冷却部を形成する前記筐体の側壁に設けられた取っ手部をさらに備え、前記筐体の上壁における前記取っ手部が設けられた前記側壁の近傍に、第３吸気孔が形成されていてもよい。
　この場合、第３吸気孔から供給された冷却風を、側壁に当てることができ、当該側壁に設けられた取っ手部を冷却することができる。これにより、取っ手部が把持できないほど高温になることを防止し、紫外線照射装置の持ち運びや移動等を適切に行えるようにすることができる。また、取っ手部が設けられた側壁も冷却することができるので、筐体の温度上昇を抑制し、熱膨張による筐体の撓みを防止することができる。 Furthermore, the ultraviolet irradiation device further includes a handle portion provided on the side wall of the housing forming the cooling portion, and is provided in the vicinity of the side wall provided with the handle portion on the upper wall of the housing. , A third intake hole may be formed.
In this case, the cooling air supplied from the third intake hole can be applied to the side wall, and the handle portion provided on the side wall can be cooled. As a result, it is possible to prevent the handle portion from becoming too hot to be gripped, and to appropriately carry and move the ultraviolet irradiation device. Further, since the side wall provided with the handle portion can also be cooled, it is possible to suppress the temperature rise of the housing and prevent the housing from bending due to thermal expansion.
　また、上記の紫外線照射装置において、前記取っ手部は、少なくとも一部が、前記筐体の側壁から前記冷却部の内部に突出して設けられていてもよい。
　この場合、第３吸気孔から供給された冷却風を、確実に取っ手部に当てることができ、当該取っ手部を効率良く冷却することができる。 Further, in the above-mentioned ultraviolet irradiation device, at least a part of the handle portion may be provided so as to project from the side wall of the housing to the inside of the cooling portion.
In this case, the cooling air supplied from the third intake hole can be reliably applied to the handle portion, and the handle portion can be efficiently cooled.
　さらに、上記の紫外線照射装置は、前記筐体を複数備え、前記光源は、前記筐体の長手方向に沿って配置されており、前記筐体は、前記長手方向に平行な一対の幅広の側壁と、前記長手方向に対して垂直な一対の幅狭の側壁とを備え、前記幅広の側壁は、外面がフラット面であり、前記冷却風および前記排気風が通る孔が形成されておらず、複数の前記筐体は、前記幅広の側壁を対向配置させて並べて配置されていてもよい。
　このように筐体を複数並べた紫外線照射装置であっても、ランプを適正に冷却するとともに、装置内部に設置された電装部品も適正に冷却し、かつ、電装部品のオゾンによる劣化を防止することができる。 Further, the ultraviolet irradiation device includes a plurality of the housings, the light source is arranged along the longitudinal direction of the housing, and the housing is a pair of wide side walls parallel to the longitudinal direction. The wide side wall is provided with a pair of narrow side walls perpendicular to the longitudinal direction, and the outer surface of the wide side wall is a flat surface, and holes through which the cooling air and the exhaust air pass are not formed. The plurality of housings may be arranged side by side with the wide side walls facing each other.
Even in an ultraviolet irradiation device in which a plurality of housings are arranged in this way, the lamp is properly cooled, the electrical components installed inside the device are also appropriately cooled, and deterioration of the electrical components due to ozone is prevented. be able to.
　また、上記の紫外線照射装置において、前記幅狭の側壁は、前記筐体の上壁に対して回動可能に連結されていてもよい。
　この場合、幅狭の側壁を開くことができるので、幅広な側壁を対向配置して筐体を複数並べた場合にも、容易に筐体内にアクセスすることができる。したがって、光源の交換等のメンテナンス作業を適切に容易に行うことができる。 Further, in the above-mentioned ultraviolet irradiation device, the narrow side wall may be rotatably connected to the upper wall of the housing.
In this case, since the narrow side wall can be opened, the inside of the housing can be easily accessed even when a plurality of housings are arranged so that the wide side walls face each other. Therefore, maintenance work such as replacement of the light source can be appropriately and easily performed.
　本発明によれば、ランプを適正に冷却するとともに、装置内部に設置された電装部品も適正に冷却し、かつ、電装部品のオゾンによる劣化を防止することができる。
　上記した本発明の目的、態様及び効果並びに上記されなかった本発明の目的、態様及び効果は、当業者であれば添付図面及び請求の範囲の記載を参照することにより下記の発明を実施するための形態（発明の詳細な説明）から理解できるであろう。 According to the present invention, it is possible to properly cool the lamp, properly cool the electrical components installed inside the apparatus, and prevent the deterioration of the electrical components due to ozone.
The above-mentioned purpose, aspect and effect of the present invention and the above-mentioned purpose, aspect and effect of the present invention not described above will be used by those skilled in the art to carry out the following invention by referring to the accompanying drawings and the description of the scope of claims. Can be understood from the form of (detailed description of the invention).
図１は、本実施形態における紫外線照射装置の外観図である。FIG. 1 is an external view of the ultraviolet irradiation device according to the present embodiment. 図２は、紫外線照射装置の概略構成図である。FIG. 2 is a schematic configuration diagram of an ultraviolet irradiation device. 図３は、第１貫通孔および第２貫通孔を示す図である。FIG. 3 is a diagram showing a first through hole and a second through hole. 図４は、冷却部内部での冷却風の流れを概略的に示す図である。FIG. 4 is a diagram schematically showing the flow of cooling air inside the cooling unit. 図５は、第３吸気孔から供給された冷却風の流れを概略的に示す図である。FIG. 5 is a diagram schematically showing the flow of the cooling air supplied from the third intake hole. 図６は、光源部内部での冷却風の流れを概略的に示す図である。FIG. 6 is a diagram schematically showing the flow of cooling air inside the light source unit.
　以下、本発明の実施形態を図面に基づいて説明する。
　図１は、本実施形態における紫外線照射装置１０の外観図である。本実施形態では、紫外線照射装置１０は、人が一人でも持ち運びできる程度に小型で軽量な装置である場合について説明する。
　なお、以下の説明においては、図１のＸ方向を「幅方向」、図１のＹ方向を「長手方向」、図１のＺ方向を「高さ方向」という。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is an external view of the ultraviolet irradiation device 10 according to the present embodiment. In the present embodiment, the case where the ultraviolet irradiation device 10 is small and lightweight enough to be carried by one person will be described.
In the following description, the X direction in FIG. 1 is referred to as the "width direction", the Y direction in FIG. 1 is referred to as the "longitudinal direction", and the Z direction in FIG. 1 is referred to as the "height direction".
　図１に示すように、紫外線照射装置１０は、直方体状の筐体１１を備える。筐体１１は、長手方向に対して垂直な一対の幅狭の側壁１１ａと、上壁１１ｂと、長手方向に平行な一対の幅広な側壁１１ｃとを備える。例えば、紫外線照射装置１０の筐体１１の外形寸法（長さ×幅×高さ）は、５００ｍｍ～７５０ｍｍ×１６０ｍｍ×３６０ｍｍとすることができる。 As shown in FIG. 1, the ultraviolet irradiation device 10 includes a rectangular parallelepiped housing 11. The housing 11 includes a pair of narrow side walls 11a perpendicular to the longitudinal direction, an upper wall 11b, and a pair of wide side walls 11c parallel to the longitudinal direction. For example, the external dimensions (length x width x height) of the housing 11 of the ultraviolet irradiation device 10 can be 500 mm to 750 mm x 160 mm x 360 mm.
　側壁１１ａには第１吸気孔２１が形成され、上壁１１ｂには第２吸気孔２２および第３吸気孔２３が形成されている。これら吸気孔２１～２３は、紫外線照射装置１０の内部に冷却風となる外気を取り込むための開口部であり、例えば複数本のスリットにより構成することができる。これら吸気孔２１～２３から取り込まれた冷却風は、筐体１１内部において規定された風路を通って紫外線照射装置１０の構成部品を冷却し、排気風として排気路３１から排気される。
　側壁１１ａは、例えば上壁１１ｂに丁番１１ｄによって連結されていてもよい。つまり、側壁１１ａは、丁番１１ｄを中心に、上壁１１ｂに対してＸ軸回りに回動可能であってもよい。 A first intake hole 21 is formed on the side wall 11a, and a second intake hole 22 and a third intake hole 23 are formed on the upper wall 11b. These intake holes 21 to 23 are openings for taking in outside air as cooling air inside the ultraviolet irradiation device 10, and can be configured by, for example, a plurality of slits. The cooling air taken in from the intake holes 21 to 23 cools the components of the ultraviolet irradiation device 10 through the air passage defined inside the housing 11, and is exhausted from the exhaust passage 31 as exhaust air.
The side wall 11a may be connected to, for example, the upper wall 11b by a hinge 11d. That is, the side wall 11a may be rotatable about the X-axis with respect to the upper wall 11b around the hinge 11d.
　図２は、紫外線照射装置１０の概略構成図である。
　この図２に示すように、筐体１１の側壁には、仕切板１４の両端部が固定されており、筐体１１内は、仕切板１４によって上下に区画されている。上下に区画された空間のうち、上側空間は冷却部１５ａ、下側空間は光源部１５ｂである。
　冷却部１５ａには、排気風が流れる排気路３１の一部が形成されている。排気路３１は、例えば円筒形状であって、その軸方向が高さ方向に一致するように配置されている。排気路３１の上端部は、筐体１１の上壁１１ｂに設けられた開口部に挿通されて、上壁１１ｂから筐体１１外部（上方）へ突出している。 FIG. 2 is a schematic configuration diagram of the ultraviolet irradiation device 10.
As shown in FIG. 2, both ends of the partition plate 14 are fixed to the side wall of the housing 11, and the inside of the housing 11 is vertically partitioned by the partition plate 14. Of the spaces partitioned above and below, the upper space is the cooling unit 15a, and the lower space is the light source unit 15b.
A part of the exhaust passage 31 through which the exhaust air flows is formed in the cooling portion 15a. The exhaust passage 31 has, for example, a cylindrical shape, and is arranged so that its axial direction coincides with the height direction. The upper end of the exhaust passage 31 is inserted into an opening provided in the upper wall 11b of the housing 11 and projects from the upper wall 11b to the outside (upward) of the housing 11.
　また、排気路３１の下端は、冷却部１５ａに形成された排気室３２の上壁に接続されている。排気室３２は、底面が開口した直方体形状の筐体により形成されており、その４つの側壁が仕切板１４の上面に気密に接続されている。
　排気路３１の内部と排気室３２の内部とは連通しており、排気路３１および排気室３２の内部と冷却部１５ａの内部とは連通していない、つまり、排気路３１および排気室３２の内部と冷却部１５ａの内部とは、それぞれ空間的に独立している。 Further, the lower end of the exhaust passage 31 is connected to the upper wall of the exhaust chamber 32 formed in the cooling portion 15a. The exhaust chamber 32 is formed of a rectangular parallelepiped housing having an open bottom surface, and its four side walls are airtightly connected to the upper surface of the partition plate 14.
The inside of the exhaust passage 31 and the inside of the exhaust chamber 32 are communicated with each other, and the inside of the exhaust passage 31 and the exhaust chamber 32 and the inside of the cooling unit 15a are not communicated with each other, that is, the inside of the exhaust passage 31 and the exhaust chamber 32. The inside and the inside of the cooling unit 15a are spatially independent of each other.
　仕切板１４には、冷却部１５ａ内部と光源部１５ｂ内部とを連通する第１貫通孔１４ａが形成されている。図３に示すように、第１貫通孔１４ａは、紫外線照射装置１０の幅方向において排気室３２を挟んで両側に、長手方向に沿って形成されている。
　また、仕切板１４には、図３に示すように、排気路３１内部（排気室３２内部）と光源部１５ｂ内部とを連通する第２貫通孔１４ｂが形成されている。この図３に示すように、第２貫通孔１４ｂは、仕切板１４の中央部に、長手方向に沿って形成されている。 The partition plate 14 is formed with a first through hole 14a that communicates the inside of the cooling portion 15a and the inside of the light source portion 15b. As shown in FIG. 3, the first through hole 14a is formed along the longitudinal direction on both sides of the exhaust chamber 32 in the width direction of the ultraviolet irradiation device 10.
Further, as shown in FIG. 3, the partition plate 14 is formed with a second through hole 14b that communicates the inside of the exhaust passage 31 (the inside of the exhaust chamber 32) and the inside of the light source portion 15b. As shown in FIG. 3, the second through hole 14b is formed in the central portion of the partition plate 14 along the longitudinal direction.
　光源部１５ｂには、光源としてのランプ５１が配置されている。ランプ５１としては、特定の波長範囲の紫外線を放射するエキシマランプを用いることができる。このランプ５１は、例えばランプ中心軸に垂直な断面が扁平な矩形状の発光管を備えており、ランプ中心軸が紫外線照射装置１０の長手方向に一致するように配置されている。上記発光管は、例えば合成石英からなるガラス管とすることができる。
　ランプ５１の長手方向の長さは、例えば３８５ｍｍ～６３５ｍｍとすることができる。また、ランプ５１への入力電力は、例えば、上記の３８５ｍｍのランプ５１の場合で約２５０Ｗ、６３５ｍｍのランプ５１の場合で４２０Ｗとすることができる。
　図３に示すように、第２貫通孔１４ｂおよび排気路３１は、ランプ５１の直上に形成されている。 A lamp 51 as a light source is arranged in the light source unit 15b. As the lamp 51, an excimer lamp that emits ultraviolet rays in a specific wavelength range can be used. The lamp 51 includes, for example, a rectangular arc tube having a flat cross section perpendicular to the central axis of the lamp, and is arranged so that the central axis of the lamp coincides with the longitudinal direction of the ultraviolet irradiation device 10. The arc tube may be, for example, a glass tube made of synthetic quartz.
The length of the lamp 51 in the longitudinal direction can be, for example, 385 mm to 635 mm. Further, the input power to the lamp 51 can be, for example, about 250 W in the case of the above-mentioned 385 mm lamp 51 and 420 W in the case of the 635 mm lamp 51.
As shown in FIG. 3, the second through hole 14b and the exhaust passage 31 are formed directly above the lamp 51.
　また、光源部１５ｂには、筐体１１とランプ５１との間に、ランプ５１に沿って遮熱板５２が配置されていてもよい。遮熱板５２は、紫外線照射装置１０の幅方向において、ランプ５１を挟んで両側に配置することができる。例えば、遮熱板５２は、それぞれ仕切板１４の下面に固定されており、仕切板１４の下面から下方に連続する垂直面５２ａと、垂直面５２ａの下端部から幅方向内側に突出する水平面５２ｂと、を備える断面Ｃ字状の板状部材であってよい。この場合、垂直面５２ａの幅方向内側の端部とランプ５１の幅方向両側面との間には、所定の隙間が形成される。
　このように、遮熱板５２を設けることで、筐体１１にランプ５１からの熱が直接伝わらないようにすることができる。したがって、筐体１１の温度が過度に上昇することを防止することができる。 Further, in the light source unit 15b, a heat shield plate 52 may be arranged between the housing 11 and the lamp 51 along the lamp 51. The heat shield plates 52 can be arranged on both sides of the lamp 51 in the width direction of the ultraviolet irradiation device 10. For example, each of the heat shield plates 52 is fixed to the lower surface of the partition plate 14, and has a vertical surface 52a that is continuous downward from the lower surface of the partition plate 14 and a horizontal surface 52b that projects inward in the width direction from the lower end of the vertical surface 52a. It may be a plate-shaped member having a C-shaped cross section. In this case, a predetermined gap is formed between the inner end of the vertical surface 52a in the width direction and both side surfaces of the lamp 51 in the width direction.
By providing the heat shield plate 52 in this way, it is possible to prevent the heat from the lamp 51 from being directly transferred to the housing 11. Therefore, it is possible to prevent the temperature of the housing 11 from rising excessively.
　第１貫通孔１４ａは、遮熱板５２に対して幅方向外側に形成されており、冷却部１５ａ内部と、光源部１５ｂ内部における遮熱板５２によって囲まれた空間の外部とを連通する。第２貫通孔１４ｂは、排気路３１内部（排気室３２内部）と、光源部１５ｂ内部における遮熱板５２によって囲まれた空間の内部とを連通する。 The first through hole 14a is formed on the outer side in the width direction with respect to the heat shield plate 52, and communicates between the inside of the cooling portion 15a and the outside of the space surrounded by the heat shield plate 52 inside the light source portion 15b. The second through hole 14b communicates the inside of the exhaust passage 31 (the inside of the exhaust chamber 32) with the inside of the space surrounded by the heat shield plate 52 inside the light source portion 15b.
　図２に戻って、紫外線照射装置１０の冷却部１５ａ内部には、ランプ５１の点灯を確認するためのセンサ（フォトダイオード）４１と、ランプ５１を点灯させるための点灯電源（トランス）４２といった電装部品が配置されている。本実施形態における紫外線照射装置１０は、持ち運び可能な紫外線照射装置であるため、紫外線照射装置の点灯制御等に必要な各種電装部品を筐体内に収納する必要がある。 Returning to FIG. 2, inside the cooling unit 15a of the ultraviolet irradiation device 10, electrical equipment such as a sensor (photodiode) 41 for confirming the lighting of the lamp 51 and a lighting power supply (transformer) 42 for lighting the lamp 51. The parts are arranged. Since the ultraviolet irradiation device 10 in the present embodiment is a portable ultraviolet irradiation device, it is necessary to store various electrical components necessary for lighting control of the ultraviolet irradiation device in the housing.
　センサ４１は、ランプ５１の点灯を確認するために、ランプ５１の近傍に配置される。具体的には、センサ４１は、仕切板１４に固定されている。仕切板１４には、窓部１４ｃ（図４参照）が設けられており、センサ４１は、ランプ５１から放射され窓部１４ｃを透過した光を検出するように構成されている。ここで、窓部１４ｃは、例えば、仕切板１４に形成された開口にランプ５１から放射される光に対して透明なガラスを配置し、Ｏリング等により封止した構成とすることができる。 The sensor 41 is arranged in the vicinity of the lamp 51 in order to confirm the lighting of the lamp 51. Specifically, the sensor 41 is fixed to the partition plate 14. The partition plate 14 is provided with a window portion 14c (see FIG. 4), and the sensor 41 is configured to detect the light emitted from the lamp 51 and transmitted through the window portion 14c. Here, the window portion 14c can be configured such that, for example, glass transparent to the light radiated from the lamp 51 is arranged in the opening formed in the partition plate 14 and sealed with an O-ring or the like.
　点灯電源４２は、冷却部１５ａの内部における上方に配置されている。また、点灯電源４２の近傍には、整流板（整流部材）４３が設けられている。整流板４３は、上壁１１ｂに設けられた第２吸気孔２２から供給された冷却風を点灯電源４２に導く板状部材であり、例えば、筒状もしくは図２に示すようにＵ字状に形成されている。整流板４３は、例えば側壁１１ｃに固定することができる。また、点灯電源４２は、整流板４３の底面上に載置することができる。
　点灯電源４２への電力供給は、電力ケーブル１３を介して行われる。 The lighting power supply 42 is arranged above the inside of the cooling unit 15a. Further, a rectifying plate (rectifying member) 43 is provided in the vicinity of the lighting power supply 42. The straightening vane 43 is a plate-shaped member that guides the cooling air supplied from the second intake hole 22 provided in the upper wall 11b to the lighting power supply 42, and is, for example, tubular or U-shaped as shown in FIG. It is formed. The straightening vane 43 can be fixed to, for example, the side wall 11c. Further, the lighting power supply 42 can be placed on the bottom surface of the straightening vane 43.
The power supply to the lighting power supply 42 is performed via the power cable 13.
　第１吸気孔２１は、幅狭の側壁１１ａにおける仕切板１４の近傍に形成されている。また、第２吸気孔２２は、上壁１１ｂにおける点灯電源４２の上方に形成されている。つまり、第１吸気孔２１、第２吸気孔２２は、それぞれセンサ４１、点灯電源４２の近傍に形成されている。
　さらに、第３吸気孔２３は、上壁１１ｂにおける側壁１１ｃの近傍、例えば、第１貫通孔１４ａに対向する位置に形成されている。ここで、第３吸気孔２３の開口面積（総面積）と第１貫通孔１４ａの開口面積（総面積）とは同等であってよい。 The first intake hole 21 is formed in the vicinity of the partition plate 14 on the narrow side wall 11a. Further, the second intake hole 22 is formed above the lighting power supply 42 on the upper wall 11b. That is, the first intake hole 21 and the second intake hole 22 are formed in the vicinity of the sensor 41 and the lighting power supply 42, respectively.
Further, the third intake hole 23 is formed in the vicinity of the side wall 11c on the upper wall 11b, for example, at a position facing the first through hole 14a. Here, the opening area (total area) of the third intake hole 23 and the opening area (total area) of the first through hole 14a may be equivalent.
　紫外線照射装置１０は、不図示の排気ファンを備え、排気ファンを駆動することで、排気路３１、排気室３２および光源部１５ｂにおける遮熱板５２に囲まれた空間の内部を装置外部の圧力に対して負圧にすることができる。これにより、筐体１１に設けられた各吸気孔２１～２３から冷却部１５ａ内部に外気が取り込まれる。
　図４に示すように、第１吸気孔２１から冷却部１５ａ内部に取り込まれた風６１は、第１吸気孔２１の近傍に配置されたセンサ４１に当たり、センサ４１を冷却する冷却風として作用する。このとき、仕切板１４は、第１吸気孔２１から冷却部１５ａの内部に供給された冷却風をセンサ４１に導く整流部材として機能する。センサ４１を冷却した風６２は、仕切板１４に形成された第１貫通孔１４ａを通って光源部１５ｂへ流れ込む。 The ultraviolet irradiation device 10 includes an exhaust fan (not shown), and by driving the exhaust fan, the pressure outside the device is applied to the inside of the space surrounded by the heat shield plate 52 in the exhaust passage 31, the exhaust chamber 32, and the light source unit 15b. Can be negative pressure against. As a result, outside air is taken into the cooling portion 15a from the intake holes 21 to 23 provided in the housing 11.
As shown in FIG. 4, the wind 61 taken into the cooling portion 15a from the first intake hole 21 hits the sensor 41 arranged in the vicinity of the first intake hole 21 and acts as a cooling air for cooling the sensor 41. .. At this time, the partition plate 14 functions as a rectifying member that guides the cooling air supplied from the first intake hole 21 to the inside of the cooling unit 15a to the sensor 41. The wind 62 that has cooled the sensor 41 flows into the light source unit 15b through the first through hole 14a formed in the partition plate 14.
　一方、第２吸気孔２２から冷却部１５ａ内部に取り込まれた風６３は、整流板４３によって流れの向きが変えられて、第２吸気孔２２の近傍に配置された点灯電源４２に当たる。このように、整流板４３は、第２吸気孔２２から冷却部１５ａの内部に供給された冷却風を、そのまま下方へ流さずに、点灯電源４２の方へ導くようにしている。点灯電源４２に当てられた風６４は、点灯電源４２を冷却する冷却風として作用し、点灯電源４２を冷却した風６５は、仕切板１４に形成された第１貫通孔１４ａを通って光源部１５ｂへ流れ込む。 On the other hand, the wind 63 taken into the cooling unit 15a from the second intake hole 22 is changed in the direction of the flow by the rectifying plate 43 and hits the lighting power supply 42 arranged in the vicinity of the second intake hole 22. In this way, the straightening vane 43 guides the cooling air supplied from the second intake hole 22 into the cooling unit 15a toward the lighting power supply 42 without flowing downward as it is. The wind 64 applied to the lighting power supply 42 acts as a cooling air for cooling the lighting power supply 42, and the wind 65 for cooling the lighting power supply 42 passes through the first through hole 14a formed in the partition plate 14 to the light source unit. It flows into 15b.
　本実施形態では、第２吸気孔２２を、上壁１１ｂにおける長手方向中央寄りに形成している。これにより、第２吸気孔２２から冷却部１５ａの内部に供給された冷却風は、整流板４３の端部に当たり、整流板４３に沿って紫外線照射装置１０の長手方向外側に流れてから下方へ向かい、第１貫通孔１４ａから光源部１５ｂへ流れ込むことになる。したがって、整流板４３上に載置された点灯電源４２に適切に冷却風を当てることができる。 In the present embodiment, the second intake hole 22 is formed closer to the center in the longitudinal direction on the upper wall 11b. As a result, the cooling air supplied from the second intake hole 22 to the inside of the cooling unit 15a hits the end of the rectifying plate 43 and flows outward along the rectifying plate 43 in the longitudinal direction of the ultraviolet irradiation device 10 and then downwards. Facing, it will flow from the first through hole 14a into the light source unit 15b. Therefore, the cooling air can be appropriately applied to the lighting power supply 42 mounted on the straightening vane 43.
　さらに、第３吸気孔２３から冷却部１５ａ内部に取り込まれた風６６は、対向配置された第１貫通孔１４ａに向けて直線的に流れ、第１貫通孔１４ａを通って光源部１５ｂに流れ込む。
　ここで、紫外線照射装置１０の幅広な側壁１１ｃには、紫外線照射装置１０を持ち運ぶ際に人が把持する取っ手部１２が設けられている。取っ手部１２は、図５に示すように、側壁１１ｃから冷却部１５ａ内部に突出して設けられている。第３吸気孔２３は、上壁１１ｂにおける側壁１１ｃの近傍に形成されているため、第３吸気孔２３から冷却部１５ａ内部に取り込まれた風６６は、側壁１１ｃに沿って流れ、第１貫通孔１４ａに流れ込むまでの過程で取っ手部１２に直接当たる。つまり、風６６は、取っ手部１２を冷却する冷却風として作用する。 Further, the wind 66 taken into the cooling portion 15a from the third intake hole 23 flows linearly toward the first through hole 14a arranged to face each other, and flows into the light source portion 15b through the first through hole 14a. ..
Here, the wide side wall 11c of the ultraviolet irradiation device 10 is provided with a handle portion 12 that is gripped by a person when carrying the ultraviolet irradiation device 10. As shown in FIG. 5, the handle portion 12 is provided so as to project from the side wall 11c into the cooling portion 15a. Since the third intake hole 23 is formed in the vicinity of the side wall 11c on the upper wall 11b, the wind 66 taken into the cooling portion 15a from the third intake hole 23 flows along the side wall 11c and penetrates the first. It directly hits the handle portion 12 in the process of flowing into the hole 14a. That is, the wind 66 acts as a cooling air for cooling the handle portion 12.
　図６は、光源部１５ｂ内部での風の流れを概略的に示す図である。
　第１貫通孔１４ａから光源部１５ｂに導入された風６６は、遮熱板５２の垂直面５２ａに沿って下方に流れ、ランプ５１と遮熱板５２の水平面５２ｂとの間に形成された隙間を通って、遮熱板５２によって囲まれた空間内に流れ込む。 FIG. 6 is a diagram schematically showing the flow of wind inside the light source unit 15b.
The wind 66 introduced into the light source portion 15b from the first through hole 14a flows downward along the vertical surface 52a of the heat shield plate 52, and a gap formed between the lamp 51 and the horizontal plane 52b of the heat shield plate 52. It flows through the space surrounded by the heat shield plate 52.
　遮熱板５２によって囲まれた空間内に流れ込んだ風６７は、ランプ５１の周面に沿って流れ、ランプ５１を冷却する冷却風として作用する。ランプ５１を冷却した風６８は、第２貫通孔１４ｂに向かって流れ、第２貫通孔１４ｂを介して排気室３２に流れ込む。
　本実施形態では、第２貫通孔１４ｂは、ランプ５１の直上に形成されている。そのため、ランプ５１と遮熱板５２との間の隙間から遮熱板５２によって囲まれた空間内に流れ込んだ風６７は、ランプ５１の表面をなぞるように流れ、第２貫通孔１４ｂを介して排気室３２に流れ込むことになる。したがって、ランプ５１を適切に冷却することができる。
　排気室３２に導入された風６９は、排気風となって排気路３１を通って紫外線照射装置１０外部に排気される。 The wind 67 that has flowed into the space surrounded by the heat shield plate 52 flows along the peripheral surface of the lamp 51 and acts as a cooling air that cools the lamp 51. The wind 68 that has cooled the lamp 51 flows toward the second through hole 14b and flows into the exhaust chamber 32 through the second through hole 14b.
In the present embodiment, the second through hole 14b is formed directly above the lamp 51. Therefore, the wind 67 that has flowed into the space surrounded by the heat shield plate 52 from the gap between the lamp 51 and the heat shield plate 52 flows so as to trace the surface of the lamp 51 and passes through the second through hole 14b. It will flow into the exhaust chamber 32. Therefore, the lamp 51 can be appropriately cooled.
The wind 69 introduced into the exhaust chamber 32 becomes exhaust air and is exhausted to the outside of the ultraviolet irradiation device 10 through the exhaust passage 31.
　このように、冷却部１５ａの内部に供給された冷却風は、冷却部１５ａの内部においてセンサ４１や点灯電源４２といった電装部品を冷却し、その後、光源部１５ｂの内部においてランプ５１を冷却する。つまり、電装部品を冷却した風でランプ５１を冷却する。電装部品の温度はランプ５１の温度に対して非常に低いため、電装部品を冷却した風は、ランプ５１を冷却する冷却風として問題なく利用することができる。 In this way, the cooling air supplied to the inside of the cooling unit 15a cools the electrical components such as the sensor 41 and the lighting power supply 42 inside the cooling unit 15a, and then cools the lamp 51 inside the light source unit 15b. That is, the lamp 51 is cooled by the wind that has cooled the electrical components. Since the temperature of the electrical components is very low with respect to the temperature of the lamp 51, the air that cools the electrical components can be used without problems as the cooling air that cools the lamp 51.
　以上説明したように、本実施形態における紫外線照射装置１０においては、冷却部１５ａを形成する筐体１１の壁に形成された吸気孔から冷却部１５ａの内部に供給された冷却風は、冷却部１５ａから第１貫通孔１４ａを通って光源部１５ｂへ導入され、光源部１５ｂから排気路３１を介して排気風として排気される。
　このように、ランプ５１が配置された光源部１５ｂに冷却風を導入することができるので、ランプ５１を適正に冷却することができる。したがって、ランプ５１が備える発光管の紫外線透過率の低下を抑制することができ、所望の紫外線強度を得ることができる。 As described above, in the ultraviolet irradiation device 10 of the present embodiment, the cooling air supplied to the inside of the cooling unit 15a from the intake hole formed in the wall of the housing 11 forming the cooling unit 15a is the cooling unit. It is introduced from the 15a through the first through hole 14a to the light source unit 15b, and is exhausted as exhaust air from the light source unit 15b through the exhaust passage 31.
In this way, the cooling air can be introduced into the light source unit 15b in which the lamp 51 is arranged, so that the lamp 51 can be appropriately cooled. Therefore, it is possible to suppress a decrease in the ultraviolet transmittance of the arc tube included in the lamp 51, and it is possible to obtain a desired ultraviolet intensity.
　また、センサ４１（フォトダイオード）や点灯電源４２（トランス）といった電装部品が配置された冷却部１５ａに、ランプ５１を冷却する前の冷却風を導入することができるので、電装部品を適切に冷却することができる。したがって、電装部品の高寿命化を図ることができる。
　ここで、紫外線照射装置１０は、冷却部１５ａの内部に供給された冷却風を電装部品に導く整流部材（整流板４３、仕切板１４）を備えることができる。これにより、電装部品を効率良く冷却することができる。また、整流部材は、電装部品の近傍に配置された板状部材とすることができる。したがって、容易かつ適切に、電装部品を確実に通るような冷却風の流れを形成することができる。 Further, since the cooling air before cooling the lamp 51 can be introduced into the cooling unit 15a in which the electrical components such as the sensor 41 (photodiode) and the lighting power supply 42 (transformer) are arranged, the electrical components can be appropriately cooled. can do. Therefore, it is possible to extend the life of electrical components.
Here, the ultraviolet irradiation device 10 can include a rectifying member (rectifying plate 43, partition plate 14) that guides the cooling air supplied to the inside of the cooling unit 15a to the electrical components. As a result, the electrical components can be cooled efficiently. Further, the rectifying member may be a plate-shaped member arranged in the vicinity of the electrical component. Therefore, it is possible to easily and appropriately form a flow of cooling air that surely passes through the electrical components.
　とりわけ、本実施形態における紫外線照射装置１０は、電装部品と、冷却部１５ａの内部に冷却風を取り込むための吸気孔２１および２２との位置関係を適切に規定することで、冷却部１５ａ内部で適切な冷却風の流れを形成し、冷却部１５ａ内に設置された電装部品を確実に冷却することができる。
　具体的には、センサ４１の近傍に第１吸気孔２１を形成し、点灯電源４２の近傍に第２吸気孔２２を形成する。したがって、これら電装部品に、装置外部から取り込まれたフレッシュな冷却風を最初に当てることができ、電装部品を効率良く冷却することができる。
　また、電装部品の中で最も高温になる点灯電源４２を囲むように筒状もしくは断面Ｕ字状の整流板４３を設けることで、点灯電源４２を確実に冷却することができる。 In particular, the ultraviolet irradiation device 10 in the present embodiment appropriately defines the positional relationship between the electrical components and the intake holes 21 and 22 for taking in the cooling air into the cooling unit 15a, so that the inside of the cooling unit 15a An appropriate flow of cooling air can be formed, and the electrical components installed in the cooling unit 15a can be reliably cooled.
Specifically, the first intake hole 21 is formed in the vicinity of the sensor 41, and the second intake hole 22 is formed in the vicinity of the lighting power supply 42. Therefore, fresh cooling air taken in from the outside of the apparatus can be first applied to these electrical components, and the electrical components can be efficiently cooled.
Further, by providing the rectifying plate 43 having a tubular shape or a U-shaped cross section so as to surround the lighting power supply 42 having the highest temperature among the electrical components, the lighting power supply 42 can be reliably cooled.
　さらに、ランプ５１が配置された光源部１５ｂの内部を排気路３１に直接連通させるので、光源部１５ｂ内部においてランプ５１から放射される紫外線によって発生されたオゾンを適切に排気することができる。また、排気路３１の内部は、冷却部１５ａの内部に連通されていない構成とする。これにより、光源部１５ｂにおいて発生されたオゾンが冷却部１５ａに流れ込まない構成とすることができ、冷却部１５ａ内部に設置された電装部品がオゾンに曝されることを防止することができる。
　このように、冷却風の流れでランプ５１よりも上流側の冷却部１５ａの内部に、電装部品を配置するので、電装部品がオゾンによって劣化することを確実に防止することができる。 Further, since the inside of the light source unit 15b in which the lamp 51 is arranged is directly communicated with the exhaust passage 31, ozone generated by the ultraviolet rays radiated from the lamp 51 inside the light source unit 15b can be appropriately exhausted. Further, the inside of the exhaust passage 31 is configured not to communicate with the inside of the cooling unit 15a. As a result, the ozone generated in the light source unit 15b can be prevented from flowing into the cooling unit 15a, and the electrical components installed inside the cooling unit 15a can be prevented from being exposed to ozone.
In this way, since the electrical components are arranged inside the cooling portion 15a on the upstream side of the lamp 51 due to the flow of the cooling air, it is possible to reliably prevent the electrical components from being deteriorated by ozone.
　また、紫外線照射装置１０においては、ランプ５１の熱が直接筐体１１に伝わると、筐体１１の上側（冷却部１５ａ側）と下側（光源部１５ｂ側）とで温度差が生じ、熱膨張差により筐体１１が撓んでしまうおそれがある。筐体１１の下（ランプ５１の光照射側）には、被照射物（ワーク）が配置されるが、筐体１１とワークとの間のギャップは、一般に数ｍｍ程度である。そのため、筐体１１が撓むと、筐体１１がワークに接触するおそれがある。
　本実施形態では、上壁１１ｂにおける幅広の側壁１１ｃの近傍に、第３吸気孔２３が形成されている。これにより、第３吸気孔２３から取り込まれた冷却風を側壁１１ｃに当て、側壁１１ｃを均一に冷却することができる。したがって、筐体１１の温度を均一化することができ、その結果、筐体１１の撓みを適切に抑制し、筐体１１のワークに対する位置を安定して維持することができる。 Further, in the ultraviolet irradiation device 10, when the heat of the lamp 51 is directly transferred to the housing 11, a temperature difference occurs between the upper side (cooling portion 15a side) and the lower side (light source portion 15b side) of the housing 11, and the heat is generated. The housing 11 may bend due to the difference in expansion. An object to be irradiated (work) is arranged under the housing 11 (the light irradiation side of the lamp 51), and the gap between the housing 11 and the work is generally about several mm. Therefore, if the housing 11 bends, the housing 11 may come into contact with the work.
In the present embodiment, the third intake hole 23 is formed in the vicinity of the wide side wall 11c on the upper wall 11b. As a result, the cooling air taken in from the third intake hole 23 can be applied to the side wall 11c to uniformly cool the side wall 11c. Therefore, the temperature of the housing 11 can be made uniform, and as a result, the bending of the housing 11 can be appropriately suppressed, and the position of the housing 11 with respect to the work can be stably maintained.
　さらに、側壁１１ｃには取っ手部１２が設けられているため、第３吸気孔２３から取り込まれた冷却風が、側壁１１ｃに当たることで、側壁１１ｃに設けられた取っ手部１２も冷却することができる。このとき、取っ手部１２が側壁１１ｃから冷却部１５ａの内部に突出していれば、第３吸気孔２３から取り込まれた冷却風を確実に取っ手部１２に当てることができ、取っ手部１２を効率良く冷却することができる。
　これにより、取っ手部１２が把持できないほど高温になることを防止し、紫外線照射装置１０の持ち運びや移動等を適切に行えるようにすることができる。 Further, since the side wall 11c is provided with the handle portion 12, the cooling air taken in from the third intake hole 23 hits the side wall 11c, so that the handle portion 12 provided on the side wall 11c can also be cooled. .. At this time, if the handle portion 12 projects from the side wall 11c to the inside of the cooling portion 15a, the cooling air taken in from the third intake hole 23 can be reliably applied to the handle portion 12, and the handle portion 12 can be efficiently applied. Can be cooled.
As a result, it is possible to prevent the handle portion 12 from becoming too hot to be gripped, and to appropriately carry and move the ultraviolet irradiation device 10.
　ここで、第３吸気孔２３を、第１貫通孔１４ａと対向配置すれば、第３吸気孔２３から取り込んだフレッシュな冷却風を、直線的に第１貫通孔１４ａに流し込むことができる。したがって、側壁１１ｃや取っ手部１２を適切に冷却することができる。また、光源部１５ｂ内部に配置されたランプ５１および遮熱板５２も適切に冷却することができる。遮熱板５２を冷却することで、遮熱板５２の遮熱機能を向上させることができる。
　なお、本実施形態では、図２に示すように、第３吸気孔２３および第１貫通孔１４ａは、ランプ５１の長手方向における長さよりも短い範囲に形成されている場合について説明したが、ランプ５１の長手方向における長さと同等もしくはそれ以上の範囲に形成されていてもよい。 Here, if the third intake hole 23 is arranged to face the first through hole 14a, the fresh cooling air taken in from the third intake hole 23 can be linearly flowed into the first through hole 14a. Therefore, the side wall 11c and the handle portion 12 can be appropriately cooled. Further, the lamp 51 and the heat shield plate 52 arranged inside the light source unit 15b can also be appropriately cooled. By cooling the heat shield plate 52, the heat shield function of the heat shield plate 52 can be improved.
In the present embodiment, as shown in FIG. 2, the case where the third intake hole 23 and the first through hole 14a are formed in a range shorter than the length in the longitudinal direction of the lamp 51 has been described. It may be formed in a range equal to or longer than the length in the longitudinal direction of 51.
　なお、本実施形態の紫外線照射装置１０においては、冷却部１５ａへ冷却風を取り込むための吸気孔２１～２３の形状や数は、図１に示す形状や数に限定されない。吸気孔２１～２３の形状や数は、冷却風が冷却部１５ａに配置された電装部品を通って光源部１５ｂに導入され、排気路３１から排気されるという流れを形成可能であれば、任意に設定可能である。このとき、冷却風の流速は、例えば２ｍ／ｓ以上に設定する。 In the ultraviolet irradiation device 10 of the present embodiment, the shapes and numbers of the intake holes 21 to 23 for taking the cooling air into the cooling unit 15a are not limited to the shapes and numbers shown in FIG. The shapes and numbers of the intake holes 21 to 23 are arbitrary as long as it is possible to form a flow in which the cooling air is introduced into the light source unit 15b through the electrical components arranged in the cooling unit 15a and exhausted from the exhaust passage 31. Can be set to. At this time, the flow velocity of the cooling air is set to, for example, 2 m / s or more.
　また、本実施形態の紫外線照射装置１０は、複数の筐体１１を備えていてもよい。
　筐体１１の幅広の側壁１１ｃに設けられた取っ手部１２は、筐体１１内部に突出した形状を有し、側壁１１ｃの外面はフラット面となっている。また、冷却風を取り込むための吸気孔や、排気風を排気するための排気孔は、側壁１１ｃには形成されていない。そこで、紫外線照射装置１０は、複数の筐体１１を、幅広の側壁１１ｃ同士を向かい合わせて並べて配置した構成としてもよい。これにより、大型の紫外線照射装置を構成することができる。 Further, the ultraviolet irradiation device 10 of the present embodiment may include a plurality of housings 11.
The handle portion 12 provided on the wide side wall 11c of the housing 11 has a shape protruding inside the housing 11, and the outer surface of the side wall 11c is a flat surface. Further, the intake hole for taking in the cooling air and the exhaust hole for exhausting the exhaust air are not formed on the side wall 11c. Therefore, the ultraviolet irradiation device 10 may have a configuration in which a plurality of housings 11 are arranged side by side with the wide side walls 11c facing each other. Thereby, a large-sized ultraviolet irradiation device can be configured.
　さらに、本実施形態における紫外線照射装置１０は、幅狭の側壁１１ａが筐体１１の上壁１１ｂに対して丁番１１ｄによって連結されており、当該側壁１１ａは、この丁番１１ｄを中心に、上壁１１ｂに対してＸ軸回りに回動可能である。この幅狭の側壁１１ａが開くことにより、筐体１１内にアクセスできるようになる。したがって、幅広の側壁１１ｃ同士を向かい合わせて複数の紫外線照射装置１０を並べた場合であっても、筐体１１内のランプ５１を交換する等のメンテンナンス作業を容易に行うことができる。 Further, in the ultraviolet irradiation device 10 of the present embodiment, the narrow side wall 11a is connected to the upper wall 11b of the housing 11 by a hinge 11d, and the side wall 11a is centered on the hinge 11d. It can rotate about the X axis with respect to the upper wall 11b. By opening the narrow side wall 11a, the inside of the housing 11 can be accessed. Therefore, even when a plurality of ultraviolet irradiation devices 10 are arranged so that the wide side walls 11c face each other, maintenance work such as replacement of the lamp 51 in the housing 11 can be easily performed.
　このように、本実施形態における紫外線照射装置１０によれば、筐体１１の内部において、オゾン排気と紫外線光源の冷却と電装部品の冷却とを兼ねた風の流れを形成することができる。そして、電装部品は、風の流れで紫外線光源よりも上流側に配置することができる。したがって、光源であるランプ５１を適正に冷却するとともに、筐体１１内の電装部品も確実に冷却し、かつ、電装部品がオゾンによって劣化しないようにすることができる。 As described above, according to the ultraviolet irradiation device 10 in the present embodiment, it is possible to form a wind flow that combines ozone exhaust, cooling of the ultraviolet light source, and cooling of electrical components inside the housing 11. Then, the electrical components can be arranged on the upstream side of the ultraviolet light source due to the flow of wind. Therefore, the lamp 51, which is a light source, can be appropriately cooled, the electrical components in the housing 11 can be reliably cooled, and the electrical components can be prevented from being deteriorated by ozone.
（変形例）
　上記実施形態においては、筐体１１の内部が仕切板１４によって上下に区画されている場合について説明したが、区画方法は上記に限定されない。例えば、筐体１１の内部は、左右に区画されていてもよい。
　また、上記実施形態においては、排気路３１が冷却部１５ａの内部に形成されている場合について説明したが、光源部１４ｂの内部に連通され、冷却部１５ａの内部に連通されていない構成であれば、冷却部１５ａの外部に形成されていてもよい。 (Modification example)
In the above embodiment, the case where the inside of the housing 11 is vertically partitioned by the partition plate 14 has been described, but the partitioning method is not limited to the above. For example, the inside of the housing 11 may be divided into left and right.
Further, in the above embodiment, the case where the exhaust passage 31 is formed inside the cooling unit 15a has been described, but the configuration may be such that the exhaust passage 31 is communicated with the inside of the light source unit 14b and not inside the cooling unit 15a. For example, it may be formed outside the cooling unit 15a.
　なお、上記において特定の実施形態が説明されているが、当該実施形態は単なる例示であり、本発明の範囲を限定する意図はない。本明細書に記載された装置及び方法は上記した以外の形態において具現化することができる。また、本発明の範囲から離れることなく、上記した実施形態に対して適宜、省略、置換及び変更をなすこともできる。かかる省略、置換及び変更をなした形態は、請求の範囲に記載されたもの及びこれらの均等物の範疇に含まれ、本発明の技術的範囲に属する。 Although a specific embodiment is described above, the embodiment is merely an example, and there is no intention of limiting the scope of the present invention. The devices and methods described herein can be embodied in forms other than those described above. Further, without departing from the scope of the present invention, omissions, substitutions and changes can be appropriately made to the above-described embodiments. Such abbreviations, substitutions and modifications are included in the claims and equivalents thereof and fall within the technical scope of the invention.
　１０…紫外線照射装置、１１…筐体、１２…取っ手部、１４…仕切板、１４ａ…第１貫通孔、１４ｂ…第２貫通孔、１５ａ…冷却部、１５ｂ…光源部、２１…第１吸気孔、２２…第２吸気孔、２３…第３吸気孔、３１…排気路、３２…排気室、４１…センサ、４２…点灯電源、４３…整流板、５１…ランプ、５２…遮熱板、５２ａ…垂直面、５２ｂ…水平面 10 ... UV irradiation device, 11 ... Housing, 12 ... Handle part, 14 ... Partition plate, 14a ... First through hole, 14b ... Second through hole, 15a ... Cooling part, 15b ... Light source part, 21 ... First intake Holes, 22 ... 2nd intake holes, 23 ... 3rd intake holes, 31 ... exhaust passages, 32 ... exhaust chambers, 41 ... sensors, 42 ... lighting power supplies, 43 ... rectifying plates, 51 ... lamps, 52 ... heat shield plates, 52a ... vertical plane, 52b ... horizontal plane

Claims (10)

  1. 　筐体と、
    　前記筐体に固定され、前記筐体の内部を冷却部と光源部とに区画する仕切板と、
    　前記仕切板に形成され、前記冷却部の内部と前記光源部の内部とを連通する第１貫通孔と、
    　前記光源部の内部に配置され、紫外線を放射する光源と、
    　前記冷却部の内部に配置された電装部品と、
    　前記冷却部の内部に供給された冷却風を前記電装部品に導く整流部材と、
    　前記光源部の内部に連通され、前記冷却部の内部に連通されていない排気路と、を備え、
    　前記冷却風は、前記冷却部から前記第１貫通孔を通って前記光源部へ導入され、前記光源部から前記排気路を介して排気風として排気されることを特徴とする紫外線照射装置。     With the housing
    A partition plate fixed to the housing and partitioning the inside of the housing into a cooling unit and a light source unit.
    A first through hole formed in the partition plate and communicating the inside of the cooling portion and the inside of the light source portion,
    A light source that is arranged inside the light source and emits ultraviolet rays,
    Electrical components arranged inside the cooling unit and
    A rectifying member that guides the cooling air supplied to the inside of the cooling unit to the electrical components, and
    An exhaust passage that is communicated with the inside of the light source unit and is not communicated with the inside of the cooling unit is provided.
    An ultraviolet irradiation device characterized in that the cooling air is introduced from the cooling unit through the first through hole into the light source unit, and is exhausted as exhaust air from the light source unit through the exhaust passage.
  2. 　前記整流部材は、前記電装部品の近傍に配置された板状部材であることを特徴とする請求項１に記載の紫外線照射装置。 The ultraviolet irradiation device according to claim 1, wherein the rectifying member is a plate-shaped member arranged in the vicinity of the electrical component.
  3. 　前記電装部品は、前記光源の点灯を確認するためのセンサと、前記光源を点灯するための点灯電源とを含むことを特徴とする請求項１または２に記載の紫外線照射装置。 The ultraviolet irradiation device according to claim 1 or 2, wherein the electrical component includes a sensor for confirming the lighting of the light source and a lighting power source for lighting the light source.
  4. 　前記仕切板は、前記筐体の側壁に固定され、前記筐体の内部を、上側空間である前記冷却部と下側空間である前記光源部とに上下に区画し、
    　前記排気路は、少なくとも一部が、前記冷却部の内部における前記光源の直上に形成されており、
    　前記仕切板に形成され、前記光源部と前記排気路とを連通する第２貫通孔をさらに備えることを特徴とする請求項１から３のいずれか１項に記載の紫外線照射装置。     The partition plate is fixed to the side wall of the housing, and the inside of the housing is vertically divided into a cooling portion which is an upper space and a light source portion which is a lower space.
    The exhaust passage is formed at least in part directly above the light source inside the cooling unit.
    The ultraviolet irradiation device according to any one of claims 1 to 3, further comprising a second through hole formed in the partition plate and communicating the light source portion and the exhaust passage.
  5. 　前記電装部品は、前記仕切板の上面に固定されており、
    　前記冷却部を形成する前記筐体の側壁における前記仕切板の近傍に、第１吸気孔が形成されていることを特徴とする請求項４に記載の紫外線照射装置。     The electrical components are fixed to the upper surface of the partition plate.
    The ultraviolet irradiation device according to claim 4, wherein a first intake hole is formed in the vicinity of the partition plate on the side wall of the housing forming the cooling portion.
  6. 　前記電装部品は、前記冷却部の内部における上方に配置されており、
    　前記筐体の上壁における前記電装部品の上方に、第２吸気孔が形成されていることを特徴とする請求項４または５に記載の紫外線照射装置。     The electrical components are arranged above the inside of the cooling unit.
    The ultraviolet irradiation device according to claim 4 or 5, wherein a second intake hole is formed above the electrical component on the upper wall of the housing.
  7. 　前記冷却部を形成する前記筐体の側壁に設けられた取っ手部をさらに備え、
    　前記筐体の上壁における前記取っ手部が設けられた前記側壁の近傍に、第３吸気孔が形成されていることを特徴とする請求項４から６のいずれか１項に記載の紫外線照射装置。     A handle portion provided on the side wall of the housing forming the cooling portion is further provided.
    The ultraviolet irradiation device according to any one of claims 4 to 6, wherein a third intake hole is formed in the vicinity of the side wall provided with the handle portion on the upper wall of the housing. ..
  8. 　前記取っ手部は、少なくとも一部が、前記筐体の側壁から前記冷却部の内部に突出して設けられていることを特徴とする請求項７に記載の紫外線照射装置。 The ultraviolet irradiation device according to claim 7, wherein at least a part of the handle portion is provided so as to project from the side wall of the housing to the inside of the cooling portion.
  9. 　前記筐体を複数備え、
    　前記光源は、前記筐体の長手方向に沿って配置されており、
    　前記筐体は、前記長手方向に平行な一対の幅広の側壁と、前記長手方向に対して垂直な一対の幅狭の側壁とを備え、
    　前記幅広の側壁は、外面がフラット面であり、前記冷却風および前記排気風が通る孔が形成されておらず、
    　複数の前記筐体は、前記幅広の側壁を対向配置させて並べて配置されていることを特徴とする請求項１から８のいずれか１項に記載の紫外線照射装置。     With a plurality of the above-mentioned housings
    The light source is arranged along the longitudinal direction of the housing.
    The housing comprises a pair of wide side walls parallel to the longitudinal direction and a pair of narrow side walls perpendicular to the longitudinal direction.
    The wide side wall has a flat outer surface and is not formed with holes through which the cooling air and the exhaust air pass.
    The ultraviolet irradiation device according to any one of claims 1 to 8, wherein the plurality of housings are arranged side by side with the wide side walls facing each other.
  10. 　前記幅狭の側壁は、前記筐体の上壁に対して回動可能に連結されていることを特徴とする請求項９に記載の紫外線照射装置。

     
     
          The ultraviolet irradiation device according to claim 9, wherein the narrow side wall is rotatably connected to the upper wall of the housing.
PCT/JP2020/025011 2019-10-28 2020-06-25 Ultraviolet radiation device WO2021084794A1 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009095724A (en) * 2007-10-15 2009-05-07 Toshiba Corp Ultraviolet sterilization device
WO2011122257A1 (en) * 2010-03-31 2011-10-06 株式会社Ｇｓユアサ Uv irradiation device and inkjet printer
JP2012011341A (en) * 2010-07-02 2012-01-19 Ushio Inc Light irradiation device
JP2017060912A (en) * 2015-09-24 2017-03-30 東芝ライテック株式会社 Ultraviolet irradiation module, and ultraviolet irradiation device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004165100A (en) * 2002-11-15 2004-06-10 Hamamatsu Photonics Kk Light source device, and method of cooling light source
KR20080063688A (en) * 2007-01-02 2008-07-07 삼성전자주식회사 Image projection apparatus
JP5821520B2 (en) * 2011-10-24 2015-11-24 ウシオ電機株式会社 UV irradiation equipment
JP6102212B2 (en) * 2012-11-21 2017-03-29 ウシオ電機株式会社 Small ultraviolet irradiation device
JP6711023B2 (en) 2016-03-03 2020-06-17 ウシオ電機株式会社 UV irradiation device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009095724A (en) * 2007-10-15 2009-05-07 Toshiba Corp Ultraviolet sterilization device
WO2011122257A1 (en) * 2010-03-31 2011-10-06 株式会社Ｇｓユアサ Uv irradiation device and inkjet printer
JP2012011341A (en) * 2010-07-02 2012-01-19 Ushio Inc Light irradiation device
JP2017060912A (en) * 2015-09-24 2017-03-30 東芝ライテック株式会社 Ultraviolet irradiation module, and ultraviolet irradiation device

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