WO2021060727A1

WO2021060727A1 - Foreign substance cleaning sheet for test socket

Info

Publication number: WO2021060727A1
Application number: PCT/KR2020/011649
Authority: WO
Inventors: 정영배
Original assignee: 주식회사 아이에스시
Priority date: 2019-09-23
Filing date: 2020-08-31
Publication date: 2021-04-01
Also published as: TWI764274B; KR102187264B1; TW202112458A

Abstract

The present invention relates to a foreign substance cleaning sheet for a test socket and, more specifically, to a foreign substance cleaning sheet for a test socket, the foreign substance cleaning sheet being used in a test socket in order to remove foreign substances from the surface of the test socket, the test socket comprising a plurality of conductive portions in which a plurality of conductive particles are blended with silicone rubber and are arranged in the thickness direction at locations corresponding to terminals of a device to be tested, and insulation portions respectively supporting and insulating the conductive portions, and the foreign substance cleaning sheet comprising: a base sheet having a size corresponding to the size of the surface having foreign substances in the test socket; an adhesive sheet arranged on a surface of the base sheet and having adhesive strength so as to remove the foreign substances from the surface of the test socket; and protruding adhesive portions which are provided at each one of the positions on the adhesive sheet corresponding to the conductive portions of the test socket, and which protrude from the surface of the adhesive sheet and have a hemispherical shape and adhesive strength.

Description

Washing sheet for foreign matter in the inspection socket

The present invention relates to a foreign material cleaning sheet for an inspection socket, and more particularly, to a foreign material cleaning sheet for an inspection socket that has excellent foreign material removal ability and is easily detachable from the inspection socket.

In general, an inspection socket is used in an inspection process to determine whether a manufactured device to be inspected is defective. That is, the manufactured device under test performs a predetermined electrical test to determine whether it is defective. At this time, the device to be tested and the test device for inspection do not directly contact each other, but indirectly through the test socket. Will be connected. The reason is that because the inspection apparatus for inspection is relatively expensive, it is not easy to replace when worn or damaged due to frequent contact with the device to be inspected, and the replacement cost is high. Accordingly, the test socket is mounted on the upper side of the test device so that the device to be tested is electrically connected to the test device by contacting the test socket, not the test device. Accordingly, the test signal from the test apparatus is transmitted to the device under test through the test socket.

The test socket is disposed between the device under test 140 and the test device 130, as shown in FIGS. 1 and 2, and the terminal 141 of the device under test 140 and the test device 130 In the test socket for electrically connecting the pads 131 of) to each other, as a conductive part disposed at a position corresponding to a terminal of the device under test and exhibiting conductivity in a thickness direction, the conductive part 110 is elastic A conductive part 110 in which a plurality of conductive particles 111 are arranged and disposed in the thickness direction in the insulating material; And an insulating support part 120 that supports and insulates each of the conductive parts 110. At this time, the test socket 100 is in a state mounted on the test device 130, the pad 131 of the test device 130 and the conductive part 110 are in contact with each other, and the device to be tested 140 is It is configured to be in contact with the conductive part 110 of the test socket 100.

The device to be inspected 140, which is moved by the insert, comes into contact with the conductive part 110 of the socket for inspection 100, so that it is seated on the socket for inspection 100, and then is determined from the inspection device 130. When the electrical signal of is applied, the signal is transmitted to the device 140 for testing via the socket for testing 100 to perform a predetermined electrical test.

These test sockets are contaminated by foreign substances buried in the devices to be tested in the process of performing tests on numerous devices to be tested. Specifically, Sn buried in the terminal of the device under test is deposited on the surface of the test socket during the movement and contact process.If foreign matter is excessively accumulated in the test socket, it becomes a problem in terms of reliability of the test. It becomes necessary to clean it.

Freon cleaning and cleaning with a cleaning sheet are used as cleaning methods.

Of these, in the case of Freon cleaning, the treatment time is long, the treatment capacity per unit area is low, impurities remain at rest, and it cannot be applied to materials that cannot withstand environmental pollution or washing by freon or organic solvents. Because of the wet method, the space of the device There is a problem that this is greatly needed. On the other hand, cleaning by the cleaning sheet is convenient, there is no problem of environmental pollution, and does not occupy a relatively large space, so it is preferable as a cleaning method for the inspection socket.

As shown in FIG. 3, the cleaning sheet 200 includes a PCB substrate 201 as a support, and after applying an adhesive 202 to the lower surface of the PCB substrate 201, the cleaning substrate 203 made of a silicon sheet. ) Is attached. Since the cleaning substrate 203 has adhesive strength, in the process of repeatedly contacting the inspection socket, foreign substances on the surface of the inspection socket 100 are adhered to and removed.

When the conventional cleaning sheet 200 is applied to the test socket 100 protruding from the insulating part 120 on the surface of the conductive part 110, the cleaning ability can be secured to some extent, but the conductive part 110 ) And the insulating portion 120 is applied to the inspection socket 100 shown in FIG. 3 in a flat state, there is a disadvantage that a reliable cleaning effect cannot be obtained.

Specifically, in the repeated inspection process, foreign substances on the terminals of the device under test are often buried not only on the upper surface of the conductive part, but also around the conductive part. Is greatly degraded.

Specifically, FIGS. 4 to 7 show a state in which the socket for inspection is cleaned using a conventional cleaning sheet. 4 and 5 are a case where a cleaning sheet having low adhesive strength is used, and FIG. 4 is a photograph of the surface of the cleaning sheet after cleaning, and FIG. 5 is a photograph of the surface of the inspection socket. In addition, FIGS. 6 and 7 are cases in which a cleaning sheet having high adhesive strength is used, and FIG. 6 is a photograph of the surface of the cleaning sheet after cleaning, and FIG. 7 is a photograph of the surface of the inspection socket.

In the case of using a cleaning sheet with low adhesive strength, it can be seen that the part where the conductive part is located in the cleaning sheet and foreign substances around the cleaning sheet are not stained, as shown in FIG. 4. As shown in FIG. 5, the test socket It can also be seen that foreign matter was not removed from the conductive part and its surroundings.

In addition, as shown in Fig. 6, even when a cleaning sheet having high adhesive strength is used, it can be confirmed that the part where the conductive part is located and the surrounding area are not stained with foreign substances. As can be seen in Fig. 7, the inspection socket It can be seen that the foreign matter is not sufficiently removed from the part immediately adjacent to the conductive part of.

As described above, it can be seen that when the cleaning operation is performed using a conventional planar cleaning sheet, foreign matter is not sufficiently removed from the conductive part and the immediately adjacent part. When the foreign matter is not easily removed as described above, there is a problem in that the reliability of the electrical test is very deteriorated.

On the other hand, in the case of the prior art, when the adhesive strength is very high, there is a problem in that it becomes difficult to separate the cleaning sheet from the inspection socket after the cleaning sheet contacts the surface of the inspection socket by pressure.

The present invention has been created in order to solve the above-described problems, and more particularly, an object of the present invention is to provide a foreign matter cleaning sheet for an inspection socket that is excellent in removing foreign matter and is easily detachable from the inspection socket.

In order to achieve the above object, a plurality of conductive particles are fused to the silicon rubber at each position corresponding to the terminal of the device under test, and a plurality of conductive parts arranged in the thickness direction, and each conductive part while supporting each conductive part. It is used for inspection sockets having an insulating part for insulation,

In the foreign matter cleaning sheet for removing foreign matter adhering to the surface of the inspection socket,

A base sheet having a size corresponding to a surface on which foreign substances are buried in the inspection socket;

A pressure-sensitive adhesive sheet disposed on one surface of the base sheet and having adhesive strength to remove foreign matters adhering to the surface of the test socket; And

The adhesive sheet is provided at each position corresponding to the conductive portion of the test socket, and includes a protruding adhesive portion protruding from the surface of the adhesive sheet and having a hemispherical shape and having adhesive force.

In the foreign matter cleaning sheet,

The adhesive sheet and the protruding adhesive part may be made of different materials, and the protruding adhesive part may be made of a material having a lower hardness and higher elasticity than the adhesive sheet.

In the foreign matter cleaning sheet,

The protruding adhesive portion may be made of a material having higher adhesive strength than the adhesive sheet.

In the foreign matter cleaning sheet,

When the protruding adhesive part is in contact with the conductive part, it is elastically deformed to increase the contact area, thereby removing foreign substances from the surface of the conductive part and the peripheral surface of the conductive part.

A flat adhesive portion is provided at a position corresponding to the insulating portion in the adhesive sheet of the foreign matter cleaning sheet, and foreign matter buried on the surface of the insulating portion may be removed by the flat adhesive portion.

In the foreign matter cleaning sheet,

The base sheet may be made of a PCB, a metal or a hard non-metal material.

In the foreign matter cleaning sheet,

The adhesive sheet may be rubber or silicone.

In the foreign matter cleaning sheet,

An antistatic sheet for preventing static electricity may be disposed on one side or the other side of the base sheet.

In the foreign matter cleaning sheet,

The antistatic sheet may be made of a copper material.

In the foreign matter cleaning sheet,

An adhesive layer is formed between the base sheet and the adhesive sheet, and the adhesive sheet may be attached to one surface of the base sheet by the adhesive layer.

In the foreign matter cleaning sheet, the protruding adhesive portion may have a hemispherical shape.

In the foreign matter cleaning sheet,

The protruding adhesive portion may have a shape of any one of a columnar shape, a cone shape, a polygonal pyramidal shape, a truncated cone shape, and a polygonal pyramidal shape.

In the foreign matter cleaning sheet,

The cross-sectional shape of the protruding adhesive portion may have a shape corresponding to the cross-sectional shape of the conductive portion.

The foreign matter cleaning sheet of the present invention for achieving the above object is for inspection having a conductive portion provided by fusing a plurality of conductive particles with silicone rubber at each position corresponding to a terminal of a device under test, and an insulating portion for supporting the conductive portion. In the foreign matter cleaning sheet used for the socket and for removing foreign matters adhering to the inspection socket,

And an antistatic sheet disposed between the base sheet and the adhesive sheet to prevent the adhesive sheet from sticking to the test socket due to static electricity caused by contact with the repeated test socket.

In the foreign matter cleaning sheet,

The antistatic sheet may be made of a copper material.

In the foreign matter cleaning sheet,

An adhesive layer is formed between the antistatic sheet and the adhesive sheet, and the adhesive sheet may be attached to the antistatic sheet by the adhesive layer.

In the present invention, the part in contact with the conductive part on the lower surface of the cleaning sheet forms a hemispherical cleaning ball. In the process of pressing the cleaning sheet toward the socket for inspection, the hemispherical cleaning ball is compressed to reliably clean the conductive part and the vicinity of the conductive part. It has an effect that can be.

In addition, even when the adhesion of the cleaning sheet is increased, the compression-deformed hemispherical cleaning ball is elastically restored, and the cleaning sheet can be easily separated from the inspection socket by the elastic recovery force.

1 and 2 are views showing an electrical inspection state using a conventional inspection socket.

3 is a view showing a state in which a cleaning operation is performed using a conventional cleaning sheet.

4 to 7 are photographs showing the state after washing using a conventional cleaning sheet.

8 and 9 are views showing a state in which a cleaning operation is performed using a cleaning sheet according to an embodiment of the present invention.

Fig. 10 is a view showing a state when the cleaning sheet of Fig. 8 is brought into close contact with an inspection socket.

11 to 14 are photographs showing a state after washing using the cleaning sheet of FIG. 8.

15 and 16 are views showing a cleaning sheet according to another embodiment of the present invention.

Embodiments of the present disclosure are illustrated for the purpose of describing the technical idea of the present disclosure. The scope of the rights according to the present disclosure is not limited to the embodiments presented below or specific descriptions of these embodiments.

All technical and scientific terms used in the present disclosure have meanings generally understood by those of ordinary skill in the art, unless otherwise defined. All terms used in the present disclosure are selected for the purpose of more clearly describing the present disclosure, and are not selected to limit the scope of the rights according to the present disclosure.

Expressions such as "comprising", "having", "having" and the like used in the present disclosure are open terms that imply the possibility of including other embodiments, unless otherwise stated in the phrase or sentence in which the expression is included. It should be understood as (open-ended terms).

Expressions in the singular form described in the present disclosure may include the meaning of the plural form unless otherwise stated, and the same applies to the expression in the singular form described in the claims.

In the present disclosure, when a component is referred to as being "connected" or "connected" to another component, the component may be directly connected to or connected to the other component, or It is to be understood that it may be connected or may be connected via other components.

In addition, in the present disclosure, the meaning of correspondence does not mean only that the two components have the same shape and shape, but may include both components having a similar shape and a similar shape, and at this time, a similar shape It should be understood that the and shape include those that can be easily substituted and changed by those skilled in the art within a range having the same effect in terms of functionality.

Hereinafter, embodiments will be described with reference to the accompanying drawings. In the accompanying drawings, the same or corresponding elements are denoted with the same reference numerals. In addition, in the description of the following embodiments, overlapping descriptions of the same or corresponding components may be omitted. However, even if description of a component is omitted, it is not intended that such component is not included in any embodiment.

The foreign matter cleaning sheet 10 according to an embodiment of the present invention is for removing foreign matter from the surface of the test socket 20 used to perform an electrical test of a device to be tested.

At this time, the test socket 20 includes a plurality of conductive parts 21 arranged in the thickness direction by fusion of a plurality of conductive particles with silicon rubber at each position corresponding to the terminal of the device under test, and each conductive part 21 It includes an insulating portion 22 for insulating each conductive portion 21 while supporting it, and since it is a known technique, a detailed description thereof will be omitted.

The cleaning sheet 10 of the present invention includes a base sheet 11, an adhesive layer 12, an adhesive sheet 13, and a protruding adhesive portion 14.

The base sheet 11 has a size corresponding to the surface of the inspection socket 20 on which foreign substances are buried, and functions as a support for supporting the adhesive sheet 13 and the protruding adhesive portion 14.

The base sheet 11 is not particularly limited, but may be made of a PCB, a metal or a hard non-metal material. Examples of the hard non-metallic material include plastic films such as polyethylene, polyethylene terephthalate, acetyl cellulose, polycarbonate, polypropylene, and polyamide. The thickness of the base sheet 11 is usually about 0,05 to 2.0 mm.

The adhesive layer 12 is for attaching the adhesive sheet 13 to one surface of the base sheet 11, and any adhesive that is generally widely used may be used. The adhesive sheet 13 can be reliably attached to the base sheet 11 by the adhesive layer 12.

The adhesive sheet 13 is attached to one surface of the base sheet 11 by the adhesive layer 12 and has adhesive strength so as to remove foreign substances on the surface of the test socket 20. The adhesive sheet 13 may be in contact with the insulating part 22 of the inspection socket 20 to remove foreign substances that are buried in the insulating part 22. Specifically, in the adhesive sheet 13, a flat adhesive portion is provided at a position corresponding to the insulating portion 22, and foreign substances buried on the surface of the insulating portion 22 can be removed at the flat adhesive portion.

The pressure-sensitive adhesive sheet 13 is not particularly limited as long as it is capable of attaching foreign substances, but in particular, if its surface resistivity is 1×10 ¹³ Ω or more, the material and the like are not particularly limited. By designing the pressure-sensitive adhesive sheet 13 to have a surface resistivity equal to or higher than this specific value, and making the pressure-sensitive adhesive sheet 13 an insulator as much as possible, the effect of trapping and adsorbing foreign substances by static electricity can be obtained. Therefore, when the surface resistivity is ^{less than 1×10 13} Ω, there is a concern that the performance of removing foreign matters may deteriorate.

As long as the surface resistivity of the pressure-sensitive adhesive sheet 13 is within the above range, the material or the like is not particularly limited, but it is preferable that the adhesive sheet 13 does not contain a conductive material such as an additive having a conductive function. For example, it is preferable that the crosslinking reaction and curing are promoted by an active energy source such as ultraviolet rays or heat, and that the tensile modulus of elasticity can be increased.

The tensile modulus of the pressure-sensitive adhesive sheet 13 (according to the test method JIS K7127) is 0.98 to 4900 N/cm ² , preferably 9.8 to 3000 N/cm ² . By designing the tensile modulus of the pressure-sensitive adhesive sheet 13 within such a specific range, foreign matter can be more reliably removed without causing a transport problem.

In addition, a pressure-sensitive adhesive in which the molecular structure is formed into a three-dimensional network by crosslinking or curing and its adhesion is lowered is preferable. For example, the adhesive force of 180 peeling to the silicon wafer (mirror surface) is 0.20 N (20 g) / 10 mm or less, preferably Is about 0.010 ~ 0.10N (1 ~ 10g) / 10 mm. If this adhesive force exceeds 0.20 N (20 g)/mm, there is a fear that it adheres to the part to be cleaned in the device during transport, resulting in a transport problem.

As a specific example of such an adhesive sheet 13, it is preferable that, for example, a pressure-sensitive adhesive polymer contains a compound having one or more unsaturated double bonds in the molecule.

In addition, examples of such pressure-sensitive adhesive polymers include acrylic polymers containing (meth) acrylic acid and/or (meth) acrylic acid ester selected from acrylic acid, acrylic acid ester, methacrylic acid, and methacrylic acid ester as the main monomer. . When synthesizing this acrylic polymer, a compound having two or more unsaturated double bonds in the molecule is used as a copolymerization monomer, or a compound having an unsaturated double bond in the molecule is chemically bonded to the synthesized acrylic polymer through a reaction between functional groups. By introducing an unsaturated double bond in the molecule of the polymer, the polymer itself can also be involved in the polymerization and curing reaction by active energy.

Here, the compound having at least one unsaturated double bond in the molecule (hereinafter referred to as a polymerizable unsaturated compound) is preferably a nonvolatile and low molecular weight having a weight average molecular weight of 10000 or less. , It is preferable to have a molecular weight of 5000 or less.

In addition, the polymerization initiator added to the adhesive sheet 13 is not particularly limited, and a known one can be used. For example, when heat is used as an active energy source, a thermal polymerization initiator such as benzoyl peroxide and azobis isobutyronitrile, In addition, in the case of using light, benzoyl, benzoin ethyl ether, cybenzyl, isopropyl benzoin ether, benzophenone, mihiraz ketone chromothioxanthone, dodecyl thioxanthone, dimethyl thioxanthone, acetophenone diethyl ketal , Benzyl dimethyl ketal, -hydroxycyclohikisirphenirketone, 2-hydroxydimethylphenyl propane, 2,2-dimethoxy-2-phenylacetophenone, and other photoinitiators.

The protruding adhesive portion 14 is provided at each position corresponding to the conductive portion 21 of the test socket 20 in the adhesive sheet 13, and protrudes from the surface of the adhesive sheet 13 and has a hemispherical shape. It has adhesive power while having it. Specifically, the protruding adhesive portion 14 is formed to protrude from the surface of the adhesive sheet 13, and is disposed at each position corresponding to the conductive portion 21 and is in contact with the conductive portion 21 to form the upper surface of the conductive portion 21 It is to remove foreign substances on the surface

The protruding adhesive portion 14 may be made of a material different from the pressure-sensitive adhesive sheet 13, and specifically, may be made of a material that can be easily elastically deformed because it has a lower hardness than the pressure-sensitive adhesive sheet 13 and has good elasticity. In addition, the protruding adhesive portion 14 has higher adhesive strength than the adhesive sheet 13, so that foreign matters adhering to the conductive portion 21 can be easily removed. On the other hand, the protruding adhesive portion 14 may be made of the same material as the adhesive sheet 13, but in this case, it is preferable to have different hardness or adhesive strength. For example, it is possible for both the protruding adhesive portion 14 and the adhesive sheet 13 to be made of silicone rubber, but even at this time, the protruding adhesive portion 14 has different physical properties from the adhesive sheet 13 in terms of hardness, elasticity, and adhesive force. It is possible for eggplants to be applied with silicone rubber.

When the cleaning sheet 10 is pressed against the inspection socket 20 by a predetermined pressing device, the protruding adhesive portion 14 is pressed while contacting the conductive portion 21. When the protruding adhesive part 14 is pressed in this way, the ball area of the adhesive sheet 13 is enlarged in the left and right direction, and the area in contact with the conductive part 21 is increased by pressing rather than the initial contact area. An area may be enlarged not only to the conductive part 21 but also to a peripheral part of the conductive part 21. As the area of the protruding adhesive portion 14 is enlarged to the conductive portion 21 and the peripheral portion of the conductive portion 21, foreign matters buried in the peripheral portion of the conductive portion 21 and the conductive portion 21 can be reliably attached.

In particular, in the conventional flat sheet, the pressing force applied to the cleaning sheet 10 is applied to the entire surface, so that the pressing force applied to the conductive part 21 cannot be increased unless excessive pressing force is applied. However, in the present invention, the pressure sensitive adhesive sheet ( As the pressing force is concentrated on the protruding adhesive portion 14 protruding from the surface of 13), the portion that is in contact with the protruding adhesive portion 14, that is, the conductive portion 21 and its adjacent portions, removes foreign matter by a more reliable pressing force. It will be able to attach it securely.

In addition, the protruding adhesive portion 14 is in close contact with the conductive portion 21 of the inspection socket 20 as the spherical ball area is enlarged by the pressing force. When the pressing force applied to the cleaning sheet 10 is removed, the spherical ball area While restoring to this original state, the function of pushing the socket for inspection 20 by the elastic restoring force is also performed. In particular, since the expansion and reduction area of the ball area is larger than other shapes due to the characteristic of the spherical shape, the elastic restoration force is very excellent, and even if the adhesive force of the protruding adhesive portion 14 is strong, the socket for inspection by the elastic restoration force of the protruding adhesive portion 14 The cleaning sheet 10 can be easily separated from the 20.

On the other hand, in the present invention, since the hardness of the protruding adhesive portion 14 is lower than that of the adhesive sheet 13, it is easy to elastically deform, so when it comes into contact with the conductive portion 21, it is easy to expand the area, and the elastic restoration force is more excellent It is done. In addition, by making the hardness of the adhesive sheet 13 higher than that of the protruding adhesive portion 14, the supporting force for supporting the protruding adhesive portion 14 increases, so that the protruding adhesive portion 14 contacts and presses the conductive portion 21. It supports the protruding adhesive part 14 so that it can be easily elastically deformed when it is formed.

On the other hand, if the shape of the protruding adhesive portion 14 has the same cross-sectional shape as the conductive portion of the inspection socket, a hemispherical shape having excellent elastic repulsion is most suitable, but various other shapes are possible. For example, the shape of the protruding adhesive portion 14 is a pill type, a cylinder type, a polygonal column type, a cone type, a polygonal pyramid type, a cone type, a polygonal pyramid type, etc. The area is enlarged during the pressing process, and accordingly, it is easy to separate by the elastic repulsion force. It can be applied in various ways if it is a shape that allows you to

The cleaning sheet 10 according to an embodiment of the present invention has the following effects.

First, as shown in FIG. 8, the cleaning sheet 10 is placed on the inspection socket 20 where foreign substances are stained on the surface during the repeated inspection process.

Thereafter, as shown in FIG. 9, the cleaning sheet 10 is pressed while contacting the surface of the inspection socket 20. At this time, the pressing of the cleaning sheet 10 is performed by a separate pressing device (not shown). When pressing the cleaning sheet 10, the protruding adhesive portion 14 protruding from the adhesive sheet 13 comes into contact with the conductive portion 21, and at this time, the protruding adhesive portion 14 supported by the adhesive sheet 13 ), the area is expanded to the periphery of the conductive part 21 and the conductive part 21 as the area is widened in the left and right direction. On the other hand, when the cleaning sheet 10 is additionally pressed, the adhesive sheet 13 may also contact the insulating part 22 of the test socket 20 as shown in FIG. 10.

On the other hand, when the cleaning sheet 10 is pressed, the conductive part 21 and the periphery of the conductive part 21 come into contact with the surface of the pressed protruding adhesive part 14, and in this process, the protruding adhesive part ( 14) It is possible to reliably remove foreign matters buried around the conductive part 21 and the conductive part 21.

First, specifically, FIGS. 11 to 14 show a state in which the inspection socket 20 is cleaned using the cleaning sheet 10 of the present invention. 11 and 12 are a case in which the cleaning sheet 10 having low adhesive strength is used, and FIG. 11 is a photograph of the surface of the cleaning sheet 10 after cleaning, and FIG. 12 is a photograph of the surface of the inspection socket 20 will be. In addition, FIGS. 13 and 14 show a case of using the cleaning sheet 10 having high adhesive strength, and FIG. 13 is a photograph of the surface of the cleaning sheet 10 after cleaning, and FIG. 14 shows the surface of the inspection socket 20. It was filmed.

First, as confirmed through FIG. 11, even when the cleaning sheet 10 having low adhesive strength is used, it can be confirmed that a large amount of foreign matter is buried in the ball. As confirmed through FIG. 12, the conductive part 21 ) And its surroundings were confirmed to have foreign substances removed.

In addition, as shown in FIG. 13, even when the cleaning sheet 10 having high adhesive strength was used, it was confirmed that a large amount of foreign matter was buried around the protruding adhesive portion 14, and as can be seen in FIG. 14, It can be seen that almost no foreign matter remains around the conductive part 21 and the conductive part 21 of the test socket 20.

When comparing FIGS. 11, 12, 13, and 14 with each other, it can be seen that the case of using the cleaning sheet having high adhesive strength is more advantageous in terms of the ability to remove foreign substances than the case of using the cleaning sheet having low adhesive strength. As for the cleaning ability, it can be seen that the adhesive force of the adhesive sheet, the presence or absence of the protruding adhesive portion, and the adhesive force of the protruding adhesive portion act in combination. On the other hand, it is not desirable to considerably increase the adhesive strength by considering only the cleaning ability. The reason is that high adhesion is excellent in cleaning ability, but it is not easy to remove the cleaning sheet from the inspection socket. Therefore, it is important to maintain proper adhesion with excellent cleaning ability while being easy to remove from the inspection socket.

As a result, when the cleaning sheet 10 according to the present invention is used as compared to the state in which the cleaning operation is performed using the conventional cleaning sheet 10 (Figs. 4 and 5), the conductive part 21 and its It can be seen that the foreign matter is removed reliably around the area.

It can be seen that in the prior art, the conductive portion and the foreign matter around it were not easily removed, whereas when the cleaning sheet of the present invention was used, the conductive portion and the surrounding foreign matter were more reliably removed.

On the other hand, in the present invention, even when a protruding adhesive portion having a high adhesive force as well as a foreign substance removal ability is used, the area having a high adhesive force is small, so that it can be easily separated from the inspection socket.

In addition, although the conventional cleaning sheet had a limit on the deformable area even when pressed, in the present invention, the adhesive sheet functions as a support, and the protruding adhesive portion is supported by the adhesive sheet to reliably elastically deform, resulting in more reliable elastic deformation, and also elastic deformation. Later, since the elastic restoring force is excellent, the elastic restoring force has the advantage of acting to easily separate the cleaning sheet from the inspection socket.

As a result, when the cleaning sheet according to the present invention is used, it is possible to more reliably remove the conductive part and the foreign matter around it, and it has the advantage that it can be easily separated by the elastic restoring force of the protruding adhesive part.

The cleaning sheet of the present invention can be modified as follows.

In general, the cleaning sheet and the inspection socket are cleaned by repeated contact instead of once.In this repeated contact process, static electricity is generated, causing the cleaning sheet to stick to the inspection socket. There will be.

When the sticking phenomenon occurs due to such an electrostatic force, it becomes difficult to separate the cleaning sheet from the inspection socket, which causes a delay in cleaning time.

In a modified embodiment of the present invention, as shown in FIG. 15, an antistatic sheet made of a material such as copper is additionally disposed.

Specifically, the cleaning sheet 10 ′ of the present invention includes the base sheet 11 ′ and the adhesive sheet 13 ′ in addition to the base sheet 11 ′, the adhesive layer 12 ′, and the adhesive sheet 13 ′. An antistatic sheet 15' is provided between them. The adhesive sheet 13 ′ is attached to the antistatic sheet 15 ′ by an adhesive layer 12 ′. When the antistatic sheet 15 ′ is provided on the adhesive sheet 13 ′ as described above, the adhesive sheet 13 ′ is transferred to the test socket due to static electricity caused by contact with the repeated test socket 20. It can prevent sticking.

16 illustrates that a protruding adhesive portion is additionally formed on the cleaning sheet of FIG. 15. When the protruding adhesive part (14'') and the antistatic sheet (15'') are provided in this way, it is possible to more reliably prevent the cleaning sheet (10'') from sticking to the inspection socket by removing the electrostatic force. You will be able to.

Meanwhile, in the above-described embodiment, it is exemplified that the adhesive sheet and the protruding adhesive portion are made of different materials. However, the present invention is not limited thereto, and the adhesive sheet and the protruding adhesive portion may be made of the same material. For example, since it is possible to be made of silicone rubber having the same physical properties, it is possible to configure the adhesive sheet and the protruding adhesive portion using silicone rubber having the same hardness and adhesive strength.

Although the present invention has been described in detail with reference to a preferred embodiment above, the present invention is not necessarily limited to these embodiments and modifications, and various modifications may be made without departing from the spirit of the present invention.

Claims

In the test socket having a plurality of conductive parts arranged in the thickness direction by fusion of a number of conductive particles at each position corresponding to the terminal of the device under test, and an insulating part for insulating each conductive part while supporting each conductive part. Is used,

In the foreign matter cleaning sheet for removing foreign matter adhering to the surface of the inspection socket,

A base sheet having a size corresponding to a surface on which foreign substances are buried in the inspection socket;

A pressure-sensitive adhesive sheet disposed on one surface of the base sheet and having adhesive strength to remove foreign matters adhering to the surface of the test socket; And

The foreign matter cleaning sheet of the inspection socket, wherein the adhesive sheet is provided at each position corresponding to the conductive portion of the inspection socket, and includes a protruding adhesive portion protruding from the surface of the adhesive sheet and having adhesive force.
The method of claim 1,

The adhesive sheet and the protruding adhesive part are made of different materials, and the protruding adhesive part is made of a material having a lower hardness and higher elasticity than the adhesive sheet.
The method of claim 2,

The protruding adhesive portion, the foreign matter cleaning sheet of the inspection socket, characterized in that made of a material having a higher adhesive strength than the adhesive sheet.
The method of claim 1,

The protruding adhesive portion is elastically deformed when in contact with the conductive portion, thereby increasing the contact area, thereby removing foreign matter from the surface of the conductive portion and the peripheral surface of the conductive portion.
The method of claim 1,

A foreign matter cleaning sheet for an inspection socket, wherein a flat adhesive portion is provided at a position corresponding to the insulating portion in the adhesive sheet, and foreign matters buried on the surface of the insulating portion are removed by the flat adhesive portion.
The method of claim 1,

The base sheet is a cleaning sheet for foreign matter of the inspection socket, characterized in that the PCB, metal or hard non-metallic material.
The method of claim 1,

The adhesive sheet is a foreign matter cleaning sheet of the inspection socket, characterized in that the rubber or silicone.
The method of claim 1,

A foreign matter cleaning sheet for an inspection socket, wherein an antistatic sheet for preventing static electricity is disposed on one side or the other side of the base sheet.
The method of claim 8,

The antistatic sheet is a foreign material cleaning sheet for the inspection socket, characterized in that made of a copper material.
The method of claim 1,

An adhesive layer is formed between the base sheet and the adhesive sheet, and the adhesive sheet is attached to one surface of the base sheet by the adhesive layer.
The method of claim 1,

The foreign matter cleaning sheet of the inspection socket, characterized in that the protruding adhesive portion has a hemispherical shape.
The method of claim 1,

The protruding adhesive portion, the foreign matter cleaning sheet of the inspection socket, characterized in that it has any one shape of a column-shaped, conical, polygonal pyramidal, truncated cone, and polygonal pyramidal shape.
The method of claim 1,

The cross-sectional shape of the protruding adhesive portion has a shape corresponding to the cross-sectional shape of the conductive portion.
Used in a test socket having a conductive part prepared by fusing a plurality of conductive particles in a position corresponding to the terminal of the device under test and an insulating part for supporting the conductive part, and removing foreign matters from the test socket. In the foreign matter cleaning sheet for,

A base sheet having a size corresponding to a surface on which foreign substances are buried in the inspection socket;

A pressure-sensitive adhesive sheet disposed on one surface of the base sheet and having adhesive strength to remove foreign matters adhering to the surface of the test socket; And

And an antistatic sheet disposed between the base sheet and the adhesive sheet and configured to prevent the adhesive sheet from sticking to the test socket due to static electricity caused by contact with the repeated test socket. Washing sheet for foreign matter in the inspection socket.
The method of claim 14,

The antistatic sheet is a foreign material cleaning sheet for the inspection socket, characterized in that made of a copper material.
The method of claim 14,

An adhesive layer is formed between the antistatic sheet and the adhesive sheet, and the adhesive sheet is attached to the antistatic sheet by the adhesive layer.