WO2021058259A1 - Dispositif de spectromètre miniaturisé et procédé de production d'un dispositif de spectromètre miniaturisé - Google Patents
Dispositif de spectromètre miniaturisé et procédé de production d'un dispositif de spectromètre miniaturisé Download PDFInfo
- Publication number
- WO2021058259A1 WO2021058259A1 PCT/EP2020/074713 EP2020074713W WO2021058259A1 WO 2021058259 A1 WO2021058259 A1 WO 2021058259A1 EP 2020074713 W EP2020074713 W EP 2020074713W WO 2021058259 A1 WO2021058259 A1 WO 2021058259A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- circuit board
- housing
- wiring substrate
- printed circuit
- spectrometer device
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 238000001514 detection method Methods 0.000 claims abstract description 98
- 239000000758 substrate Substances 0.000 claims abstract description 72
- 230000003287 optical effect Effects 0.000 claims abstract description 35
- 238000007493 shaping process Methods 0.000 claims description 27
- 239000011521 glass Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 description 9
- 239000004020 conductor Substances 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 238000013461 design Methods 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- 230000003595 spectral effect Effects 0.000 description 5
- 230000010354 integration Effects 0.000 description 4
- 238000001465 metallisation Methods 0.000 description 4
- 238000005538 encapsulation Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 238000000862 absorption spectrum Methods 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 2
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 239000003351 stiffener Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910003266 NiCo Inorganic materials 0.000 description 1
- QXZUUHYBWMWJHK-UHFFFAOYSA-N [Co].[Ni] Chemical compound [Co].[Ni] QXZUUHYBWMWJHK-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000000930 thermomechanical effect Effects 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0202—Mechanical elements; Supports for optical elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0262—Constructional arrangements for removing stray light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0264—Electrical interface; User interface
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
Definitions
- Tunable Fabry-Perot interferometers can ideally be constructed from two parallel mirrors that can be moved relative to one another and have high reflectivity in the relevant wavelength range, with a distance between the two mirrors being adjustable by means of an actuation mechanism.
- the Fabry-Perot interferometer can advantageously be designed as a MOEMS (micro-opto-electro-mechanical system).
- a transmission wavelength of the FPI can be set precisely by means of the distance.
- a light can be generated and transmitted onto the object to be examined.
- the object to be examined is referred to below as a sample.
- the light source can be a diffusely emitting light source, for example one or more LEDs, for example phosphor-coated white light LEDs.
- the light source can emit in the wavelength range relevant for the function of the spectrometer.
- the emission component can also additionally comprise optical elements for beam shaping. The light as a stimulus can advantageously encompass the entire spectral range to be analyzed.
- the miniaturized spectrometer device has a compact design, a miniaturized overall system can be created with an advantageous spatial arrangement and design of the detection component and emission component, which can have all the necessary components for the function of the spectrometer at the same connection level.
- This can be referred to as a so-called “first level package”.
- Such an arrangement of the emission and detection components within the housing and towards the opening can advantageously be achieved that the required installation space is minimized and, moreover, an advantageous beam path can be generated which can guide the light along the desired optical axis towards the sample, and block unwanted stray light.
- the parabolic mirror or the reflective cavity can advantageously focus the light transmitted by the FPI on a photodetector.
- a detection area of the photodetector can be smaller, about half or even smaller, than the emission area of the FPI, whereby a compact detection component can be provided.
- FIG. 9a-c are perspective views of a carrier element for a spectrometer device according to a further exemplary embodiment of the present invention.
- FIG. 11a-b perspective views of a carrier element with an emission component and a detection component in a spectrometer device according to a further exemplary embodiment of the present invention.
- the mirror element SP and the glass plates GP can represent a chip sandwich.
- the opening O can be coaxial with the optical aperture OB of the FPI in order to ensure the optical signal access to the photodetector.
- a material can advantageously be selected whose thermal expansion coefficient is adapted to glass and silicon in order to avoid thermomechanical deformation of the FPI sandwich via temperature changes.
- the alloy NiCo 2918 (nickel-cobalt) can be a suitable material.
- 5a shows a plan view of a carrier element in a spectrometer device.
- 10a-c show perspective views of a detection component for a spectrometer device according to a further exemplary embodiment of the present invention.
- 10a shows a detector component DK with a second printed circuit board section LE2, which includes both the interferometer section LE2-I and the detector section LE2-D. These two can comprise a common flexible area, wherein the interferometer section LE2-I can comprise contact elements KE for contacting the FPI in a stiffened area of the second printed circuit board section LE2, wherein the FPI can be contacted with the contact elements KE via wire bonds. At one end of the flexible printed circuit board, these contacts can comprise Kt for making contact with the wiring substrate.
- the detection component DK can comprise a holder PL, for example according to FIG.
- FIG. 11a shows a rear view of the carrier element TE from FIG. 9b with a detector component DK from FIG. 10a arranged thereon and an FPI arranged thereon.
- the carrier element TE is arranged on a wiring substrate VS.
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Human Computer Interaction (AREA)
- Spectrometry And Color Measurement (AREA)
Abstract
La présente invention concerne un dispositif de spectromètre miniaturisé (1), comprenant un boîtier (G) ayant une ouverture (GO) ou un moyen d'accès optique, à travers lequel un échantillon (P) peut être exposé à la lumière et à travers lequel la lumière réfléchie par l'échantillon peut être capturée ; un substrat de câblage (VS), qui est disposé à l'intérieur du boîtier (G) ou est formé en tant que partie du boîtier (G) ; une interface électrique (ES), au moyen de laquelle le substrat de câblage (VS) peut être mis en contact électrique depuis l'extérieur du boîtier ; un composant d'émission (EK) à l'intérieur du boîtier (G), au moyen duquel un échantillon (P) peut être exposé à la lumière à travers l'ouverture (GO) ou le moyen d'accès et qui est électriquement mis en contact par le substrat de câblage (VS) ; et un composant de détection (DK) à l'intérieur du boîtier (G), au moyen duquel la lumière réfléchie par l'échantillon (P) à travers l'ouverture (GO) ou le moyen d'accès peut être détectée et analysée, un angle d'émission (EW)) et un angle de détection (DW), l'un opposé à l'autre, peuvent être identiques ou différents l'un de l'autre par rapport à une normale (N) sur une face supérieure de boîtier (GOS).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102019126050.7A DE102019126050A1 (de) | 2019-09-26 | 2019-09-26 | Miniaturisierte Spektrometereinrichtung und Verfahren zum Herstellen einer miniaturisierten Spektrometereinrichtung |
| DE102019126050.7 | 2019-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2021058259A1 true WO2021058259A1 (fr) | 2021-04-01 |
Family
ID=72428264
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/EP2020/074713 WO2021058259A1 (fr) | 2019-09-26 | 2020-09-04 | Dispositif de spectromètre miniaturisé et procédé de production d'un dispositif de spectromètre miniaturisé |
Country Status (2)
| Country | Link |
|---|---|
| DE (1) | DE102019126050A1 (fr) |
| WO (1) | WO2021058259A1 (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI808014B (zh) * | 2022-05-25 | 2023-07-01 | 采鈺科技股份有限公司 | 在晶圓上的微縮化光譜儀 |
| US12123776B2 (en) | 2022-05-25 | 2024-10-22 | Visera Technologies Company Ltd. | Spectrometer |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12061116B2 (en) | 2021-07-29 | 2024-08-13 | Si-Ware Systems | Compact spectral analyzer |
| WO2023009840A1 (fr) * | 2021-07-29 | 2023-02-02 | Si-Ware Systems | Analyseur spectral compact |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090225330A1 (en) * | 2008-03-06 | 2009-09-10 | Hong Kong Applied Science and Technology Research Institute Company Limited | Optoelectronic distance sensor |
| WO2014014415A1 (fr) * | 2012-07-17 | 2014-01-23 | Heptagon Micro Optics Pte. Ltd. | Module de spectromètre compact et son procédé de fabrication |
| EP3064912A1 (fr) | 2013-10-31 | 2016-09-07 | Hamamatsu Photonics K.K. | Dispositif de détection de lumière |
| WO2018203831A1 (fr) * | 2017-05-03 | 2018-11-08 | Heptagon Micro Optics Pte. Ltd. | Étalonnage de spectromètre |
| WO2018236287A1 (fr) * | 2017-06-22 | 2018-12-27 | Ams Sensors Singapore Pte. Ltd. | Modules de spectromètre compacts |
| US20190011313A1 (en) * | 2014-10-23 | 2019-01-10 | Verifood, Ltd. | Accessories for handheld spectrometer |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2447686B1 (fr) * | 2010-10-28 | 2014-05-21 | Canon Kabushiki Kaisha | Appareil colorimétrique spectral et appareil de formation d'images doté de celui-ci |
| TWI707483B (zh) * | 2012-07-17 | 2020-10-11 | 新加坡商新加坡恒立私人有限公司 | 發射可變強度分布的光線的光電模組 |
| WO2017051424A1 (fr) * | 2015-09-25 | 2017-03-30 | Verifood Ltd. | Mélangeur spectral |
| CN109983313B (zh) * | 2016-06-15 | 2021-12-31 | 斯维尔系统 | 集成光谱单元 |
-
2019
- 2019-09-26 DE DE102019126050.7A patent/DE102019126050A1/de active Pending
-
2020
- 2020-09-04 WO PCT/EP2020/074713 patent/WO2021058259A1/fr active Application Filing
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090225330A1 (en) * | 2008-03-06 | 2009-09-10 | Hong Kong Applied Science and Technology Research Institute Company Limited | Optoelectronic distance sensor |
| WO2014014415A1 (fr) * | 2012-07-17 | 2014-01-23 | Heptagon Micro Optics Pte. Ltd. | Module de spectromètre compact et son procédé de fabrication |
| EP3064912A1 (fr) | 2013-10-31 | 2016-09-07 | Hamamatsu Photonics K.K. | Dispositif de détection de lumière |
| US20190011313A1 (en) * | 2014-10-23 | 2019-01-10 | Verifood, Ltd. | Accessories for handheld spectrometer |
| WO2018203831A1 (fr) * | 2017-05-03 | 2018-11-08 | Heptagon Micro Optics Pte. Ltd. | Étalonnage de spectromètre |
| WO2018236287A1 (fr) * | 2017-06-22 | 2018-12-27 | Ams Sensors Singapore Pte. Ltd. | Modules de spectromètre compacts |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI808014B (zh) * | 2022-05-25 | 2023-07-01 | 采鈺科技股份有限公司 | 在晶圓上的微縮化光譜儀 |
| US12123776B2 (en) | 2022-05-25 | 2024-10-22 | Visera Technologies Company Ltd. | Spectrometer |
Also Published As
| Publication number | Publication date |
|---|---|
| DE102019126050A1 (de) | 2021-04-01 |
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