WO2021042316A1 - Capteur d'accélération - Google Patents

Capteur d'accélération Download PDF

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Publication number
WO2021042316A1
WO2021042316A1 PCT/CN2019/104490 CN2019104490W WO2021042316A1 WO 2021042316 A1 WO2021042316 A1 WO 2021042316A1 CN 2019104490 W CN2019104490 W CN 2019104490W WO 2021042316 A1 WO2021042316 A1 WO 2021042316A1
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WO
WIPO (PCT)
Prior art keywords
layer
deformable
deformation
mass
acceleration sensor
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Application number
PCT/CN2019/104490
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English (en)
Chinese (zh)
Inventor
严鑫洋
Original Assignee
深圳市柔宇科技有限公司
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Application filed by 深圳市柔宇科技有限公司 filed Critical 深圳市柔宇科技有限公司
Priority to CN201980090088.1A priority Critical patent/CN113366321A/zh
Priority to PCT/CN2019/104490 priority patent/WO2021042316A1/fr
Publication of WO2021042316A1 publication Critical patent/WO2021042316A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance

Definitions

  • This application relates to the field of electronic technology, and in particular to an acceleration sensor.
  • the existing piezoresistive acceleration sensor usually has an elastic beam-mass structure, and the mass is suspended on a fixed support frame through the elastic beam.
  • the fixed support frame remains stationary, and the mass undergoes relative movement related to the acceleration under the action of acceleration, which causes the deformation of the elastic beam.
  • the resistance value of the resistance on the elastic beam changes with the occurrence of the deformation.
  • the resistance value is measured by the resistance. Can realize acceleration measurement.
  • the existing piezoresistive three-axis acceleration sensor is usually formed by integral etching of a silicon wafer through a process such as photolithography, and the processing process is complicated, the cost is high, and the structure is fragile and easily damaged.
  • the piezoresistive three-axis acceleration sensor which is processed from silicon wafers, does not have flexibility, which limits its application to curved surfaces or other places.
  • the application provides an acceleration sensor with simple processing technology and low cost, which can be used on the surface of curved objects.
  • the present application provides an acceleration sensor, including: a flexible substrate; a deformation layer, the deformation layer is provided on the flexible substrate, the deformation layer can conduct electricity, when the deformation layer is under the action of external force When deformed, the resistance of the deformed layer changes with the amount of deformation of the deformed layer; and a detector, which is electrically connected to the deformed layer, for obtaining acceleration according to the change value of the resistance of the deformed layer .
  • the present application provides an acceleration sensor, including: a flexible substrate; a first deforming member and a second deforming member, the first deforming member and the second deforming member are spaced apart on the flexible lining
  • both the first deformable part and the second deformable part can conduct electricity, and the first deformable part and the second deformable part can be deformed under inertial force to change the resistance
  • a detector so The detector is electrically connected to the first deformable part for detecting accelerations in the first tangential and normal directions according to the resistance change of the first deformable part, and the detector is electrically connected to the second deformable part for The second tangential and normal accelerations are detected according to the resistance change of the second deformable part, and the second tangential intersects the first tangential direction.
  • the present application provides an acceleration sensor, including: an elastic sleeve having a through hole penetrating in the axial direction, the elastic sleeve sleeved on the outer peripheral surface of the object to be detected; at least one A deformable element, the deformable element is fixed on the outer peripheral surface of the elastic sleeve, the deformable element can conduct electricity, and the resistance of the deformable element changes with the deformation of the deformable element; and a detector, which is electrically connected The deformation element is used to obtain acceleration according to the resistance of the deformation element.
  • the deformation layer By setting the deformation layer and the detector in the acceleration sensor, the deformation layer can be deformed under inertial force, which in turn causes the resistance of the deformation layer to change.
  • the detector can detect the inertial force received by the deformation layer by detecting the resistance of the deformation layer. Then the acceleration is detected; because the deformation layer can be formed of flexible materials, the acceleration sensor is flexible and can be used on curved surfaces and other surfaces, which improves the application field of acceleration sensing.
  • the acceleration sensor compared to silicon wafers through photolithography and other processes for the acceleration sensor formed by integral etching, the acceleration sensor provided in this embodiment has a simple processing technology, low cost, low structural brittleness, and is not easy to be damaged under impact force, thereby improving the service life of the acceleration sensor.
  • FIG. 1 is a side view of an acceleration sensor provided in Embodiment 1 of the present application.
  • FIG. 2 is a top view of an acceleration sensor according to Embodiment 1 of the present application.
  • FIG. 3 is a side view of another acceleration sensor provided in Embodiment 1 of the present application.
  • FIG. 4 is a top view of another acceleration sensor provided by Embodiment 1 of the present application.
  • FIG. 5 is a top view of still another acceleration sensor according to Embodiment 1 of the present application.
  • FIG. 6 is a side view of still another acceleration sensor provided by Embodiment 1 of the present application.
  • FIG. 7 is a partial top view of an acceleration sensor according to Embodiment 2 of the present application.
  • FIG. 8 is a top view of an acceleration sensor according to Embodiment 2 of the present application.
  • Fig. 9 is a cross-sectional view of Fig. 8 along the A-A direction.
  • FIG. 10 is a partial view of an acceleration sensor provided in Embodiment 3 of the present application.
  • FIG. 11 is another partial view of an acceleration sensor provided in Embodiment 3 of the present application.
  • FIG. 12 is a schematic structural diagram of an acceleration sensor provided in Embodiment 3 of the present application.
  • Embodiment 1 of the present application provides an acceleration sensor 100.
  • the acceleration sensor 100 includes a flexible substrate 11, a deformation layer 12 and a detector 13.
  • the deformable layer 12 is disposed on the flexible substrate 11.
  • the deformable layer 12 can conduct electricity.
  • the detector 13 is electrically connected to the deformable layer 12, and the detector 13 is configured to obtain acceleration according to the change value of the resistance of the deformable layer 12.
  • the detector 13 the deformable layer 12, and the constant voltage power supply 16 are connected to each other to form an energization circuit.
  • the deformable layer 12 deforms under inertial force, and the resistance value of the deformable layer 12 changes with the deformation of the deformable layer 12.
  • the detector 13 may be a galvanometer to detect the change in the resistance of the deformable layer 12 to obtain the inertial force received by the deformable layer 12, and divide the inertial force by the mass of the deformable layer 12 to obtain the acceleration.
  • the deformable layer 12 can sense the inertial force, and can deform under the inertial force.
  • the material of the deformation layer 12 may be a flexible material, so that the acceleration sensor 100 is a flexible acceleration sensor 100 that can be bent.
  • the deformation layer 12 and the detector 13 in the acceleration sensor 100 By providing the deformation layer 12 and the detector 13 in the acceleration sensor 100, the deformation layer 12 can be deformed under inertial force, which in turn causes the resistance of the deformation layer 12 to change, and the detector 13 can detect the deformation by detecting the resistance of the deformation layer 12 The inertial force received by the layer 12 can then detect acceleration; since the deformable layer 12 can be formed of a flexible material, the acceleration sensor 100 is flexible and can be used on the surface of objects such as curved surfaces, which broadens the application field of the acceleration sensor 100.
  • the acceleration sensor 100 provided by this embodiment has simple processing technology, low cost, low structural brittleness, and is not easy to be damaged under impact force, thereby improving the performance of the acceleration sensor 100 Service life.
  • the acceleration sensor 100 further includes a mass 14.
  • the mass 14 is fixed on the upper surface of the deformable layer 12.
  • the bottom surface of the deformable layer 12 is fixed to the flexible substrate 11.
  • the mass 14 is used to drive the deformation of the deformable layer 12 under inertial force.
  • the sensing sensitivity of the mass block 14 to inertial force is greater than the sensing sensitivity of the deformable layer 12.
  • the density of the mass 14 is greater than the density of the deformable layer 12.
  • the mass 14 is displaced along the X axis under inertial force.
  • the displacement of the mass 14 drives the upper surface of the deformable layer 12 to move along the X-axis direction, so that the deformable layer 12 is stretched along the X-axis direction to change the resistance of the deformed layer 12, and the detector 13 detects the deformation layer 12
  • the amount of change in resistance can be used to calculate the magnitude of the inertial force, and then the magnitude of the acceleration.
  • the material of the mass 14 is a flexible material, so that the acceleration sensor 100 can be bent and can be used on the surface of objects such as curved surfaces, which broadens the application field of the acceleration sensor 100.
  • the deformable layer 12 may be at least one of a porous conductive layer and a nano conductive layer.
  • the mass 14 may be plastic, such as polyester resin (Polyethylene terephthalate, PET), polyurethane (Polyurethane, PU), polyimide (Polyimide, PI), and the like. Both the mass 14 and the deformable layer 12 have good flexibility to facilitate the bending of the acceleration sensor 100.
  • the density of the mass 14 is relatively high, so that the mass 14 is highly sensitive to inertial forces; the density of the deformation layer 12 is relatively low, so that the deformation layer 12 is easily deformed with the force of the mass 14.
  • a mass 14 is provided on the deformable layer 12 for description.
  • the mass 14 may not be provided on the deformable layer 12.
  • the acceleration sensor 100 further includes a first electrode 151 and a second electrode 152 provided on the flexible substrate 11.
  • the deformable layer 12 is electrically connected between the first electrode 151 and the second electrode 152 respectively.
  • the detector 13 detects the change value of the resistance of the deformable layer 12 by detecting the current between the first electrode 151 and the second electrode 152.
  • the first electrode 151 and the second electrode 152 are arranged along the X-axis direction, so that the detector 13 detects the deformation of the deformable layer 12 in the X-axis direction, and according to the deformation The deformation of the layer 12 in the X-axis direction obtains the acceleration of the mass 14 in the X-axis direction.
  • the first electrode 151 and the second electrode 152 can also be arranged along the Y-axis direction, so that the detector 13 detects the deformation of the deformation layer 12 in the Y-axis direction, and according to the The deformation amount of the deformable layer 12 in the Y-axis direction obtains the acceleration of the mass 14 in the Y-axis direction.
  • the acceleration sensor 100 may include a first electrode 151 and a second electrode 152 arranged along the X-axis direction, and a third electrode 153 and a fourth electrode 154 arranged along the Y-axis direction to The acceleration sensor 100 can acquire the acceleration of the mass 14 along the X-axis direction and the acceleration along the Y-axis direction.
  • the flexible substrate 11 is flexible, can be bent arbitrarily, or has tensile properties.
  • the first electrode 151 and the second electrode 152 can be prepared on the surface of the flexible substrate 11 through processes such as printing or coating.
  • the flexible substrate 11 can be made of polyester resin (PET), polydimethylsiloxane (PDMS), silica gel, etc., and the first electrode 151 and the second electrode 152 can be made of silver glue, silver nanowire, etc. material.
  • the flexible substrate 11 has a supporting surface 111 for supporting the deformable layer 12.
  • the deformable layer 12 includes a first deformable layer 121.
  • the resistance of the first deformed layer 121 is sensitive to the tangential deformation of the first deformed layer 121.
  • the tangential deformation becomes parallel to the deformation of the supporting surface 111.
  • the mass 14 moves relative to the flexible substrate 11 driven by the inertial force parallel to the supporting surface 111 of the flexible substrate 11
  • the first deformable layer 121 is driven by the mass 14 Tangential deformation occurs to increase the resistance of the first deformed layer 121, and the detector 13 obtains the tangential acceleration of the mass 14 according to the change in resistance of the first deformed layer 121.
  • the first deformable layer 121 is prone to tensile deformation under the tangential force of the flexible substrate 11, so that the resistance of the first deformable layer 121 is sensitive to the tangential deformation of the first deformed layer 121, and the first The deformable layer 121 can sense the inertial force in the tangential direction and can deform under the inertial force in the tangential direction, and then detect the acceleration in the tangential direction.
  • the tangential plane is the X-Y plane, so the first deformation layer 121 of this embodiment combined with the detector 13 can detect the acceleration in the X-axis direction and the acceleration in the Y-axis direction.
  • the first deformed layer 121 is tangentially stretched under the tangential inertial force, so that the first deformed layer 121 undergoes tangential deformation, so that the density of the conductive medium in the first deformed layer 121 is small.
  • the resistance of the first deformed layer 121 is increased, and the detector 13 obtains the tangential acceleration value of the mass 14 according to the change of the resistance of the first deformed layer 121.
  • the first deformable layer 121 is a nano conductive layer.
  • the nano-conductive material of the nano-conductive layer may be nano-graphene, carbon nanotube, disulfide, and the like.
  • the mass 14 generates an inertial force on the nano-conductive layer under the action of tangential acceleration
  • the nano-conductive layer is stretched laterally under the tangential inertial force, and the connection between the part of the nano-material of the nano-conductive layer is loosened, so that the first The overall impedance of the deformable layer 121 increases.
  • the first electrode 151 and the second electrode 152 are connected to the constant voltage power supply 16, the current in the detection circuit becomes smaller, and the detector 13 obtains the acceleration value according to the change of the current.
  • the deformable layer 12 further includes a second deformable layer 122.
  • the resistance of the second deformable layer 122 is sensitive to the normal deformation of the second deformable layer 122.
  • the second deformable layer 122 is driven by the mass 14 Normally deforms to reduce the resistance of the second deformed layer 122, and the detector 13 is used to obtain the normal acceleration of the mass 14 according to the change value of the resistance of the second deformed layer 122.
  • the first deformable layer 121 is fixed on the flexible substrate 11, and the first deformable layer 121 is connected to the first electrode 151 and the second electrode 152.
  • the second deformable layer 122 is fixed on the first deformable layer 121, and the mass 14 is fixed on the second deformable layer 122.
  • the second deformable layer 122 may be fixed on the flexible substrate 11, the second deformable layer 122 is connected to the first electrode 151 and the second electrode 152, and the first deformable layer 121 is fixed to the second deformable layer 122 Above, the mass 14 is fixed on the first deformable layer 121.
  • the first deformable layer 121 is a nano conductive layer.
  • the second deformable layer 122 is a porous conductive layer.
  • the second deformable layer 122 may be polydimethylsiloxane (PDMS) or silica gel doped with a certain proportion of conductive particles.
  • the conductive particles include but are not limited to graphene.
  • the first deformation layer 121 and the second deformation layer 122 combine to form an acceleration sensitive layer.
  • the nano-conductive layer is connected with the first electrode 151 and the second electrode 152 to form a path, and the porous conductive layer is connected in parallel with the nano-conductive layer, and the two work together to detect changes in the tangential and normal acceleration of the acceleration sensor 100.
  • the second deformable layer 122 has a high sensitivity to normal inertial force, so as to improve the sensitivity of the acceleration sensor 100 to normal acceleration.
  • the acceleration sensitive layer is prone to compression deformation in the Z-axis direction under the normal force of the flexible substrate 11.
  • the amount of compression deformation of the second deformable layer 122 in the Z-axis direction is relatively large, and the amount of compression deformation of the first deformable layer 121 in the Z-axis direction is relatively small.
  • the acceleration sensitive layer will be squeezed by the mass 14, which will cause the acceleration sensitive layer to undergo compression and deformation, so that the conductive materials inside the holes of the acceleration sensitive layer are in closer contact.
  • the density of the conductive material in the acceleration sensitive layer increases, which in turn reduces the overall resistance of the acceleration sensitive layer.
  • the constant voltage power supply 16 is connected to the first electrode 151 and the second electrode 152, the current in the detection circuit becomes larger, and the detector 13 determines the normal acceleration value of the acceleration sensor 100 according to the amount of change in the current.
  • the acceleration of the object to be detected can be obtained by detecting the acceleration of the acceleration sensor 100.
  • the tangential acceleration of the mass 14 can be obtained by detecting the decrease of the current by the detector 13, and by detecting the electrodes arranged along the X-axis direction (or Y-axis direction), the direction along the X-axis can be obtained. (Or Y-axis direction) acceleration direction; according to the amount of current change, the tangential acceleration value of the mass 14 can be obtained; the increase in the current is detected by the detector 13, and the normal acceleration of the mass 14 can be obtained according to the change of the current The normal acceleration value of the mass block 14 can be obtained by the quantity.
  • the acceleration sensor 100 provided in this embodiment realizes the detection of three-axis (X, Y, Z axis) acceleration values, because the flexible substrate 11, the first deformable layer 121, and the second deformable layer 122 are formed of a bendable material Therefore, the acceleration sensor 100 is flexible and can be used on surfaces such as curved surfaces, which broadens the application field of the acceleration sensor 100; in addition, compared with the acceleration sensor formed by etching the silicon wafer as a whole through photolithography and other processes, this embodiment provides The acceleration sensor 100 has simple processing technology, low cost, low structural brittleness, and is not easy to be damaged under impact force, thereby improving the service life of the acceleration sensor 100.
  • the acceleration sensitive layer may only be the second deformable layer 122, so that the acceleration sensor 100 is a sensor that detects normal acceleration.
  • the materials of the mass 14, the first deformation layer 121, and the second deformation layer 122 are all flexible materials, so that the acceleration sensor 100 provided by this embodiment has better bending performance and can be used Acceleration measurement in a variety of flat or curved states broadens the application field of acceleration sensors.
  • the density of the mass 14 is greater than the density of the first deformed layer 121 and the density of the second deformed layer 122, so that the mass 14 can transfer all the inertial forces it receives into stretching as much as possible
  • the force of the acceleration sensitive layer or the compression acceleration sensitive layer improves the detection accuracy of the acceleration sensor 100 for the inertial force received by the mass 14.
  • the acceleration sensor 100 is designed based on the conductive properties of nanomaterials and other flexible materials in combination with the sensitive characteristics of the state of change, so that the acceleration sensor 100 is highly sensitive to inertial forces and can be used in a variety of flat or curved states. Acceleration measurement.
  • the mass 14, the deformation layer 12, and the substrate in the acceleration sensor 100 proposed in this embodiment are all made of flexible materials. Therefore, the overall structure of the acceleration sensor 100 is flexible.
  • the acceleration sensor 100 can be designed in various shapes and is convenient to be used in various shapes.
  • the first deformation layer 121 in the acceleration sensor 100 can achieve acceleration measurement in two dimensions (X-axis direction and Y-axis direction), and the combination of the first deformation layer 121 and the second deformation layer 122 can achieve three dimensions Acceleration measurement (X-axis direction, Y-axis direction and Z-axis direction) greatly simplifies the structure of the three-axis acceleration sensor 100; the preparation process of the acceleration sensor 100 is simple and does not require complex processes such as photolithography, which is convenient for mass industrial production. The production cost is low.
  • the acceleration sensor 200 includes a flexible substrate 21, a first deforming member 22, a second deforming member 23 and a detector 24.
  • the first deforming member 22 and the second deforming member 23 are provided on the flexible substrate 21. Both the first deforming member 22 and the second deforming member 23 can conduct electricity, and the first deforming member 22 and the second deforming member 23 can be deformed under inertial force to change their resistance.
  • the detector 24 is electrically connected to the first deformable part 22 for detecting accelerations in the first tangential and normal directions according to the resistance change of the first deformable part 22; the detector 24 is electrically connected to the second deformable part 23. Used to detect the acceleration in the second tangential direction and the normal direction according to the resistance change of the second deformable part 23.
  • the second tangential direction intersects the first tangential direction.
  • the first tangential direction is the X-axis direction
  • the second tangential direction is the Y-axis direction
  • the normal direction is the Z-axis direction.
  • the first deforming part 22 and the second deforming part 23 are connected in parallel
  • the detector 24 is electrically connected to the parallel structure of the first deforming part 22 and the second deforming part 23, and the detector 24 is electrically connected to a constant voltage power supply 241 to form a detection loop .
  • the acceleration sensor 200 can realize three-axis (X-axis direction, Y-axis direction). Direction and Z-axis direction) acceleration measurement; the detector 24 detects the triaxial acceleration by detecting the resistance changes of the first deformed part 22 and the second deformed part 23, without complicated processes such as photolithography, and the preparation process is simple, which is convenient for mass industrialization
  • the production cost is low; the acceleration sensor 200 is made of flexible materials, so the overall structure of the acceleration sensor 200 is flexible, and the acceleration sensor 200 can be designed in various shapes, which is convenient for use in various occasions.
  • first deforming member 22 and the second deforming member 23 may be the same. Both the first deforming member 22 and the second deforming member 23 are essentially the deformable layer in the first embodiment.
  • the first deformation member 22 and the second deformation member 23 may also be referred to as acceleration sensitive layers. Therefore, the specific structures of the first deforming member 22 and the second deforming member 23 will not be repeated here.
  • the acceleration sensor 200 further includes a first electrode 251, a second electrode 252, a third electrode 253 and a fourth electrode 254 provided on the flexible substrate 21.
  • the first electrode 251 and the second electrode 252 are arranged opposite to each other along the first tangential direction (that is, along the X-axis direction).
  • the first deforming member 22 is electrically connected between the first electrode 251 and the second electrode 252.
  • the third electrode 253 and the fourth electrode 254 are arranged opposite to each other along the second tangential direction (that is, along the Y-axis direction).
  • the first deforming element 22 is electrically connected between the first electrode 251 and the second electrode 252, and the second deforming element 23 is electrically connected between the third electrode 253 and the fourth electrode 254.
  • the detector 24 detects the resistance change value of the first deformable part 22 by detecting the current value between the first electrode 251 and the second electrode 252, and detects the third electrode 253 and the The current value between the fourth electrodes 254 is used to detect the resistance change value of the second deformable part 23.
  • the acceleration sensor 200 receives the inertial force in the first tangential direction
  • the first deforming member 22 is stretched along the X-axis direction
  • the overall resistance of the first deforming member 22 increases, and the first electrode 251 and the second
  • the second deformation member 23 is stretched along the X-axis direction, but there is no deformation in the Y-axis direction, so the current between the third electrode 253 and the fourth electrode 254 does not change
  • detection The device 24 detects that the current between the first electrode 251 and the second electrode 252 decreases, while the current between the third electrode 253 and the fourth electrode 254 remains unchanged, and the direction of acceleration can be measured as the first tangential direction.
  • the device 24 obtains the acceleration value according to the amount of current change between the first electrode 251 and the second electrode 252.
  • the second deforming member 23 When the acceleration sensor 200 receives the inertial force in the second tangential direction, the second deforming member 23 is stretched along the Y-axis direction, the overall resistance of the second deforming member 23 increases, and the third electrode 253 and the fourth electrode 254 are The current between the first electrode 251 and the second electrode 252 is reduced; the first deformable member 22 is stretched along the Y-axis direction, but there is no deformation in the X-axis direction, so the current between the first electrode 251 and the second electrode 252 does not change; the detector 24 detects The current between the third electrode 253 and the fourth electrode 254 decreases, while the current between the first electrode 251 and the second electrode 252 does not change.
  • the direction in which the acceleration can be measured is the second tangential direction.
  • the amount of current change between the third electrode 253 and the fourth electrode 254 obtains an acceleration value.
  • the acceleration sensor 200 When the acceleration sensor 200 receives the inertial force in the first tangential direction and the second tangential direction, the current between the third electrode 253 and the fourth electrode 254 decreases, and the current between the first electrode 251 and the second electrode 252 decreases.
  • the detector 24 can measure the decrease in the current between the third electrode 253 and the fourth electrode 254 and the decrease in the current between the first electrode 251 and the second electrode 252. The acceleration value and the acceleration value along the first tangential direction.
  • the acceleration sensor 200 When the acceleration sensor 200 receives the inertial force in the normal direction, the current between the third electrode 253 and the fourth electrode 254 increases, the current between the first electrode 251 and the second electrode 252 increases, and the detector 24 passes the detection
  • the increase in current between the third electrode 253 and the fourth electrode 254 and the increase in current between the first electrode 251 and the second electrode 252 can measure the acceleration value in the normal direction.
  • the acceleration sensor 200 further includes a first mass 261 and a second mass 262.
  • the first mass 261 is fixed on the first deforming member 22.
  • the first mass 261 can drive the first deforming member 22 to deform under inertial force.
  • the second mass block 262 is fixed on the second deforming member 23.
  • the second mass 262 can drive the second deforming member 23 to deform under inertial force.
  • first mass 261 and the second mass 262 may be of the same material and structure.
  • the materials of the first mass block 261 and the second mass block 262 can refer to the material of the mass block in the first embodiment.
  • the density of the first mass 261 is greater than the density of the first deforming part 22, so that the first mass 261 converts all the inertial force as much as possible into the force on the first deforming part 22, so as to improve the first deformation part 22.
  • the density of the second mass 262 is greater than the density of the second deforming part 23, so that the second mass 262 converts all the inertial force as far as possible into the force on the second deforming part 23, so as to improve the second deforming part 23. 23 Accuracy of detection of acceleration.
  • the first deformation member 22 includes a first deformation layer 221 and a second deformation layer 222 that are stacked.
  • the resistance of the first deformation layer 221 is sensitive to the deformation of the first tangential direction.
  • the resistance of the second deformation layer 222 is sensitive to the deformation in the normal direction.
  • the first deformable layer 221 in this embodiment is substantially the same as the first deformable layer 221 in the first embodiment
  • the second deformable layer 222 is substantially the same as the second deformable layer 222 in the first embodiment.
  • the material and structure of the deformable layer 221 and the second deformable layer 222 and the specific process of converting the inertial force into the amount of current change will not be repeated.
  • the second deformation member 23 includes a third deformation layer 231 and a fourth deformation layer 232 that are stacked.
  • the resistance of the third deformation layer 231 is sensitive to the deformation in the second tangential direction.
  • the resistance of the fourth deformation layer 232 is sensitive to the deformation in the normal direction.
  • the third deformable layer 231 in this embodiment is substantially the same as the first deformable layer 221 in the first embodiment
  • the fourth deformable layer 232 is substantially the same as the second deformable layer 222 in the first embodiment.
  • the material and structure of the deformable layer 231 and the fourth deformable layer 232 and the specific process of converting the inertial force into the amount of current change will not be repeated.
  • the acceleration sensor 200 further includes a packaging frame 27.
  • the packaging frame 27 is arranged on the flexible substrate 21.
  • the packaging frame 27 has a first receiving cavity 271 and a second receiving cavity 272 spaced apart from each other.
  • the first deforming element 22 and the first mass 261 are received in the first receiving cavity 271.
  • the first deforming member 22 matches the shape of the first receiving cavity 271.
  • the peripheral side surface of the first deforming member 22 is attached to the inner wall of the first receiving cavity 271.
  • the first receiving cavity 271 has a first side wall 273 and a second side wall 274 disposed opposite to each other along the Y-axis direction.
  • the opposite ends of the first mass 261 are slidably connected to the first side wall 273 and the second side wall 274, and the first mass 261 is spaced apart from the inner wall of the first receiving cavity 271 in the X-axis direction to The first mass 261 can slide freely along the first tangential direction under the inertial force of the first tangential direction.
  • the left and right sides of the first mass 261 are spaced from the inner wall of the first receiving cavity 271, so that the first mass 261 can move freely left and right under the inertial force of the X-axis direction.
  • the binding force of the packaging frame 27 further improves the sensitivity of the first mass 261 to the inertial force in the X-axis direction.
  • the second deforming member 23 and the second mass block 262 are received in the second receiving cavity 272.
  • the second receiving cavity 272 has a first inner wall 275 and a second inner wall 276 arranged opposite to each other along the X-axis direction.
  • the opposite ends of the second mass 262 are slidably connected to the first inner wall 275 and the second inner wall 276, and the second mass 262 is spaced from the inner wall of the second receiving cavity 272 in the Y-axis direction, so that the The second mass 262 can slide freely along the second tangential direction under the inertial force of the second tangential direction.
  • the second deforming member 23 matches the shape of the second receiving cavity 272.
  • the peripheral side surface of the second deforming member 23 is attached to the inner wall of the second receiving cavity 272.
  • the acceleration sensor 200 further includes a flexible cover 28.
  • the flexible cover 28 is disposed on the packaging frame 27 and covers the openings of the first receiving cavity 271 and the second receiving cavity 272.
  • the first mass 261 and the second mass 262 are spaced apart from the flexible cover 28.
  • the materials of the packaging frame 27, the first deforming member 22, the second deforming member 23, the first mass 261, and the second mass 262 are all flexible materials.
  • the packaging frame 27 and the flexible cover 28 are made of flexible materials, such as polyester resin (PET), polydimethylsiloxane (PDMS), silica gel, and other materials. Therefore, the overall structure of the acceleration sensor 200 is flexible, and the acceleration sensor 200 can be designed in various shapes, which is convenient for use in various occasions;
  • the first deformable member 22 and the second deformable member 23 are respectively arranged on the plane formed by the X and Y axes to limit the degree of freedom of the first mass 261 along the Y axis, and limit the second mass 262 to move along the X axis.
  • the degree of freedom in the axial direction, the X-axis and Y-axis acceleration are measured by the shear force sensitivity characteristics of the first deformable part 22 and the second deformable part 23, and the normal directions of the first deformable part 22 and the second deformable part 23 are used at the same time
  • the force-sensitive characteristic measures the Z-axis acceleration, so as to realize the acceleration measurement of the acceleration sensor 200 for the three-axis.
  • first deformable member 22 and the second deformable member 23 may be respectively arranged on a plane perpendicular to the X and Y axes, and the normal force sensitive characteristics of the first deformable member 22 and the second deformable member 23 can be used.
  • the accelerations of the X and Y axes are respectively measured, and the Z-axis acceleration is measured by using the shear force sensitive characteristics of the first deforming part 22 and the second deforming part 23, so as to realize the acceleration measurement of the acceleration sensor 200 for the three axes.
  • the acceleration sensor 200 provided in the present application may be a patch type flexible three-axis acceleration sensor 200.
  • the specific structure of the acceleration sensor 200 is shown in Figures 8 and 9: electrodes and external pins are printed on the flexible substrate 21; a package frame 27 is attached to the flexible substrate 21 and the electrodes; a box inside the package frame 27 Attach the first deformable piece 22 and the second deformed piece 23 in the middle, and use conductive glue to stick the electrode with the first deformed piece 22 and the second deformed piece 23 firmly; stick on the surface of the first deformed piece 22 and the second deformed piece 23 respectively A first mass 261 and a second mass 262 with degrees of freedom in the X-axis direction and the Y-axis direction are attached; the entire sensor is packaged with a flexible cover 28 on the package frame 27.
  • the flexible substrate 21, the flexible cover 28, and the middle packaging frame 27 form a first receiving cavity 271 and a second receiving cavity 272, and the first mass 261 and the first receiving cavity 271 are placed inside the first receiving cavity 271.
  • the second mass 262 and the second deformable part 23 are placed inside the second receiving cavity 272.
  • the lower part of the first deforming member 22 and the second deforming member 23 is a nano conductive layer
  • the upper part is a porous conductive layer.
  • the acceleration sensor 200 accelerates along the X axis
  • the first mass 261 can generate an inertial force along the X axis and cause shear deformation on the surface of the first deformable part 22, thereby causing the first electrode 251 and the second electrode 252
  • the resistance in the circuit path where it is located increases, and the current detected by the detector 24 decreases.
  • the second mass 262 can generate an inertial force along the Y-axis and cause shear deformation on the surface of the second deforming part 23, resulting in the third electrode 253 and the fourth electrode 254.
  • the resistance in the circuit channel increases, and the current detected by the detector 24 decreases; when the acceleration sensor 200 accelerates along the Z axis, the first mass 261 and the second mass 262 can generate inertial force along the Z axis, and The surfaces of the first deformable part 22 and the second deformed part 23 cause compression deformation, which causes the resistance in the circuit path where the first electrode 251 and the second electrode 252, the third electrode 253 and the fourth electrode 254 are located to decrease, and the detector 24 The detected current increases. Connect the external pin to the external circuit and detect the current change in different acceleration environments to get the corresponding acceleration value.
  • a third embodiment of the present application provides an acceleration sensor 300.
  • the acceleration sensor 300 includes an elastic sleeve 31, at least one deformable element 32, and a detector (not shown).
  • the elastic sleeve 31 has a through hole 311 penetrating in the axial direction.
  • the elastic sleeve 31 is used to sleeve on the outer peripheral surface of the object 33 to be detected, and the object 33 to be detected may be cylindrical. Among them, the object 33 to be detected can serve as the mass block in the first embodiment and the second embodiment.
  • the deforming member 32 is fixed on the outer peripheral surface of the elastic sleeve 31.
  • the deformation member 32 can conduct electricity. The resistance of the deforming member 32 changes with the deformation of the deforming member 32.
  • the object to be detected 33 is disposed in the through hole 311, and the object to be detected 33 drives the deformation member 32 to deform under inertial force.
  • the detector is electrically connected to the deformable part 32 for obtaining acceleration according to the resistance of the deformable part 32.
  • the acceleration is detected by detecting the resistance change of the deformable part 32, without complicated processes such as photolithography, and the preparation process is simple, convenient for mass industrial production, and low production cost; the overall structure of the acceleration sensor 300 in this embodiment is cylindrical and can be applied More restricted space occasions.
  • the deforming member 32 extends along the axial direction of the elastic sleeve 31.
  • the axial direction of the elastic sleeve 31 is the direction of the rotation center axis of the elastic sleeve 31.
  • the axial direction of the elastic sleeve 31 extends along the Z-axis direction.
  • the acceleration sensor 300 further includes a pair of electrodes 351 and 352 arranged opposite to each other along the axial direction of the elastic sleeve 31.
  • the deformable element 32 is electrically connected between the electrode pairs 351 and 352.
  • the detector detects the resistance change value of the deformable member 32 by detecting the current between the electrodes 351 and 352.
  • the deformation member 32 When the object 33 to be detected moves relative to the elastic sleeve 31 in the axial direction of the elastic sleeve 31 (the Z-axis direction in FIG. 10), the deformation member 32 is positioned on the elastic sleeve 31.
  • the axial direction of the elastic sleeve 31 is stretched and deformed to increase the resistance of the deformable piece 32, and the detector obtains the acceleration along the axial direction of the elastic sleeve 31 according to the change of the resistance of the deformable piece 32.
  • the deforming member 32 moves in the radial direction of the elastic sleeve 31 (X in FIG. 10 Axis and Y-axis directions) undergo compression deformation to reduce the resistance of the deformation member 32, and the detector obtains the acceleration along the radial direction of the elastic sleeve 31 according to the resistance change of the deformation member 32.
  • the at least one deforming member 32 includes a first deforming member 321 and a second deforming member 322.
  • the first deforming member 321 and the second deforming member 322 are arranged opposite to each other along the first direction.
  • the first direction is the X-axis direction.
  • the first deforming member 321 undergoes compression deformation in the first direction, so that the first deforming member 321 is compressed and deformed in the first direction.
  • the resistance decreases, and the detector obtains the acceleration in the first direction according to the resistance change of the first deformable part 321.
  • the first direction is the positive X direction.
  • the second deforming member 322 undergoes compression deformation in the first direction, so that the second deforming member 322 is compressed and deformed in the first direction.
  • the resistance decreases, and the detector obtains the acceleration in the first direction according to the resistance change of the second deformable part 322.
  • the first direction is X reverse.
  • the at least one deforming member 32 further includes a third deforming member 323 and a fourth deforming member 324.
  • the third deforming member 323 and the fourth deforming member 324 are disposed opposite to each other along the second direction.
  • the second direction intersects the first direction.
  • the second direction is the Y-axis direction.
  • the third deforming member 323 undergoes compression deformation in the second direction, so that the third deforming member 323 is compressed and deformed in the second direction.
  • the resistance decreases, and the detector obtains the acceleration in the second direction according to the resistance change of the third deformable part 323.
  • the second direction is the positive direction of the Y axis.
  • the fourth deforming member 324 undergoes compression deformation in the second direction, so that the fourth deforming member 324 is compressed and deformed in the second direction.
  • the resistance decreases, and the detector obtains the acceleration in the second direction according to the resistance change of the fourth deforming part 324.
  • the second direction is the opposite direction of the Y axis.
  • the structure of the acceleration sensor 300 is shown in Figures 10 to 12: electrodes 351-358 and external pins are printed on the elastic sleeve 31; deformable pieces 321-324 are attached to the elastic sleeve 31 and the electrodes 351-358; The entire acceleration sensor 300 is encapsulated by the flexible cover 36 above the deforming parts 321-324.
  • the acceleration sensor 300 is attached or sleeved on the cylindrical object 33 to be detected.
  • the object 33 to be detected can generate inertial force along the positive or negative direction of the X axis.
  • the object 33 to be detected can generate inertial force along the positive or negative direction of the Y-axis, and cause compression deformation on the surface of the deformable piece 323 or 324, thereby causing the electrode 355-356 or 357-358 to be located in the circuit channel
  • the resistance decreases and the current increases; when the acceleration sensor 300 accelerates along the Z axis, the object 33 to be detected can generate an inertial force along the Z axis, and cause shear deformation on the surface of the deformable parts 321, 322, 323, 324, As a result, the resistance in the circuit path where the electrodes 351-358 are located increases, and the current decreases.
  • the direction indicated by the X-axis arrow in FIG. 10 is the positive X direction
  • the direction indicated by the Y-axis arrow is the positive Y direction.
  • the first deforming element 321 and the second deforming element 322 are arranged opposite to each other along the X axis
  • the third deforming element 323 and the fourth deforming element 324 are arranged opposite to each other along the Y axis direction
  • the electrode of each deforming element 32 is electrically connected along the X axis.
  • the Z-axis direction is set so that the acceleration sensor 300 can detect the three axial directions (the acceleration in the X, Y, and Z-axis directions).
  • the deformation member 32 includes a first deformation layer and a second deformation layer which are stacked.
  • the resistance of the first deformed layer is sensitive to the deformation of the first deformed layer along the axial direction of the elastic sleeve 31 (the Z-axis direction in FIG. 10).
  • the resistance of the second deformed layer is sensitive to the deformation of the second deformed layer along the radial direction of the elastic sleeve 31 (the X-axis and Y-axis directions in FIG. 10).
  • deformable member 32 can refer to the deformable layer of the first embodiment, and will not be repeated here.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

L'invention concerne un capteur d'accélération (100) comprenant : un substrat flexible (11) ; une couche de déformation (12), la couche de déformation (12) étant disposée sur le substrat flexible (11), la couche de déformation (12) étant apte à conduire l'électricité, et la résistance de la couche de déformation (12) changeant en fonction du degré de déformation de la couche de déformation (12) lorsque la couche de déformation (12) se déforme sous l'action d'une force externe ; et un détecteur (13) connecté électriquement à la couche de déformation (12), et utilisé pour obtenir une accélération en fonction de la valeur de changement de la résistance de la couche de déformation (12). Le capteur d'accélération (100) est doté d'une technologie de traitement simple et peu coûteuse, et peut être utilisé pour la surface d'un objet incurvé.
PCT/CN2019/104490 2019-09-05 2019-09-05 Capteur d'accélération WO2021042316A1 (fr)

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CN201980090088.1A CN113366321A (zh) 2019-09-05 2019-09-05 加速度传感器
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Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1409118A (zh) * 2001-09-26 2003-04-09 日立金属株式会社 加速度传感器
CN1793937A (zh) * 2004-12-22 2006-06-28 冲电气工业株式会社 加速度传感器
US20070051182A1 (en) * 2005-09-06 2007-03-08 Akira Egawa Mechanical quantity sensor
CN101949952A (zh) * 2009-07-10 2011-01-19 雅马哈株式会社 单轴加速度传感器
CN102901843A (zh) * 2012-10-12 2013-01-30 西安信唯信息科技有限公司 一种矢量加速度传感器
CN204286669U (zh) * 2014-11-19 2015-04-22 中国电子科技集团公司第四十八研究所 一种薄膜压力传感器
CN104880206A (zh) * 2015-06-09 2015-09-02 中国科学院深圳先进技术研究院 电阻应变片及电阻应变式传感器
CN104931730A (zh) * 2015-07-10 2015-09-23 四川奇胜科技有限公司 三维加速度传感器
CN107076777A (zh) * 2014-11-06 2017-08-18 Iee国际电子工程股份公司 碰撞传感器

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1409118A (zh) * 2001-09-26 2003-04-09 日立金属株式会社 加速度传感器
CN1793937A (zh) * 2004-12-22 2006-06-28 冲电气工业株式会社 加速度传感器
US20070051182A1 (en) * 2005-09-06 2007-03-08 Akira Egawa Mechanical quantity sensor
CN101949952A (zh) * 2009-07-10 2011-01-19 雅马哈株式会社 单轴加速度传感器
CN102901843A (zh) * 2012-10-12 2013-01-30 西安信唯信息科技有限公司 一种矢量加速度传感器
CN107076777A (zh) * 2014-11-06 2017-08-18 Iee国际电子工程股份公司 碰撞传感器
CN204286669U (zh) * 2014-11-19 2015-04-22 中国电子科技集团公司第四十八研究所 一种薄膜压力传感器
CN104880206A (zh) * 2015-06-09 2015-09-02 中国科学院深圳先进技术研究院 电阻应变片及电阻应变式传感器
CN104931730A (zh) * 2015-07-10 2015-09-23 四川奇胜科技有限公司 三维加速度传感器

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