WO2021042316A1

WO2021042316A1 - Acceleration sensor

Info

Publication number: WO2021042316A1
Application number: PCT/CN2019/104490
Authority: WO
Inventors: 严鑫洋
Original assignee: 深圳市柔宇科技有限公司
Priority date: 2019-09-05
Filing date: 2019-09-05
Publication date: 2021-03-11
Also published as: CN113366321A

Abstract

An acceleration sensor (100), comprising: a flexible substrate (11); a deformation layer (12), the deformation layer (12) being disposed on the flexible substrate (11), the deformation layer (12) being capable of conducting electricity, and when the deformation layer (12) deforms under the action of an external force, the resistance of the deformation layer (12) changing with the amount of deformation of the deformation layer (12); and a detector (13) electrically connected to the deformation layer (12), and used for obtaining an acceleration according to the change value of the resistance of the deformation layer (12). The acceleration sensor (100) has simple processing technology and low costs, and can be used for the surface of a curved object.

Description

Accelerometer

Technical field

This application relates to the field of electronic technology, and in particular to an acceleration sensor.

Background technique

The existing piezoresistive acceleration sensor usually has an elastic beam-mass structure, and the mass is suspended on a fixed support frame through the elastic beam. The fixed support frame remains stationary, and the mass undergoes relative movement related to the acceleration under the action of acceleration, which causes the deformation of the elastic beam. The resistance value of the resistance on the elastic beam changes with the occurrence of the deformation. The resistance value is measured by the resistance. Can realize acceleration measurement.

However, the existing piezoresistive three-axis acceleration sensor is usually formed by integral etching of a silicon wafer through a process such as photolithography, and the processing process is complicated, the cost is high, and the structure is fragile and easily damaged. In addition, the piezoresistive three-axis acceleration sensor, which is processed from silicon wafers, does not have flexibility, which limits its application to curved surfaces or other places.

Summary of the invention

The application provides an acceleration sensor with simple processing technology and low cost, which can be used on the surface of curved objects.

On the one hand, the present application provides an acceleration sensor, including: a flexible substrate; a deformation layer, the deformation layer is provided on the flexible substrate, the deformation layer can conduct electricity, when the deformation layer is under the action of external force When deformed, the resistance of the deformed layer changes with the amount of deformation of the deformed layer; and a detector, which is electrically connected to the deformed layer, for obtaining acceleration according to the change value of the resistance of the deformed layer .

On the other hand, the present application provides an acceleration sensor, including: a flexible substrate; a first deforming member and a second deforming member, the first deforming member and the second deforming member are spaced apart on the flexible lining On the bottom, both the first deformable part and the second deformable part can conduct electricity, and the first deformable part and the second deformable part can be deformed under inertial force to change the resistance; and a detector, so The detector is electrically connected to the first deformable part for detecting accelerations in the first tangential and normal directions according to the resistance change of the first deformable part, and the detector is electrically connected to the second deformable part for The second tangential and normal accelerations are detected according to the resistance change of the second deformable part, and the second tangential intersects the first tangential direction.

In yet another aspect, the present application provides an acceleration sensor, including: an elastic sleeve having a through hole penetrating in the axial direction, the elastic sleeve sleeved on the outer peripheral surface of the object to be detected; at least one A deformable element, the deformable element is fixed on the outer peripheral surface of the elastic sleeve, the deformable element can conduct electricity, and the resistance of the deformable element changes with the deformation of the deformable element; and a detector, which is electrically connected The deformation element is used to obtain acceleration according to the resistance of the deformation element.

By setting the deformation layer and the detector in the acceleration sensor, the deformation layer can be deformed under inertial force, which in turn causes the resistance of the deformation layer to change. The detector can detect the inertial force received by the deformation layer by detecting the resistance of the deformation layer. Then the acceleration is detected; because the deformation layer can be formed of flexible materials, the acceleration sensor is flexible and can be used on curved surfaces and other surfaces, which improves the application field of acceleration sensing. In addition, compared to silicon wafers through photolithography and other processes For the acceleration sensor formed by integral etching, the acceleration sensor provided in this embodiment has a simple processing technology, low cost, low structural brittleness, and is not easy to be damaged under impact force, thereby improving the service life of the acceleration sensor.

Description of the drawings

In order to explain the technical solution of the present application more clearly, the following will briefly introduce the drawings that need to be used in the embodiments. Obviously, the drawings in the following description are only some embodiments of the present application, which are common in the art. As far as technical personnel are concerned, they can also obtain other drawings like these drawings without paying creative work.

FIG. 1 is a side view of an acceleration sensor provided in Embodiment 1 of the present application.

FIG. 2 is a top view of an acceleration sensor according to Embodiment 1 of the present application.

FIG. 3 is a side view of another acceleration sensor provided in Embodiment 1 of the present application.

FIG. 4 is a top view of another acceleration sensor provided by Embodiment 1 of the present application.

FIG. 5 is a top view of still another acceleration sensor according to Embodiment 1 of the present application.

FIG. 6 is a side view of still another acceleration sensor provided by Embodiment 1 of the present application.

FIG. 7 is a partial top view of an acceleration sensor according to Embodiment 2 of the present application.

FIG. 8 is a top view of an acceleration sensor according to Embodiment 2 of the present application.

Fig. 9 is a cross-sectional view of Fig. 8 along the A-A direction.

FIG. 10 is a partial view of an acceleration sensor provided in Embodiment 3 of the present application.

FIG. 11 is another partial view of an acceleration sensor provided in Embodiment 3 of the present application.

FIG. 12 is a schematic structural diagram of an acceleration sensor provided in Embodiment 3 of the present application.

detailed description

The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all of them. Based on the implementation manners in this application, all other implementation manners obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of this application.

Referring to FIG. 1, Embodiment 1 of the present application provides an acceleration sensor 100. The acceleration sensor 100 includes a flexible substrate 11, a deformation layer 12 and a detector 13. The deformable layer 12 is disposed on the flexible substrate 11. The deformable layer 12 can conduct electricity. When the deformable layer 12 is deformed under the action of an external force, the resistance of the deformed layer 12 changes with the amount of deformation of the deformed layer 12. The detector 13 is electrically connected to the deformable layer 12, and the detector 13 is configured to obtain acceleration according to the change value of the resistance of the deformable layer 12.

Specifically, referring to FIG. 2, the detector 13, the deformable layer 12, and the constant voltage power supply 16 are connected to each other to form an energization circuit. The deformable layer 12 deforms under inertial force, and the resistance value of the deformable layer 12 changes with the deformation of the deformable layer 12. The detector 13 may be a galvanometer to detect the change in the resistance of the deformable layer 12 to obtain the inertial force received by the deformable layer 12, and divide the inertial force by the mass of the deformable layer 12 to obtain the acceleration. In one embodiment, the deformable layer 12 can sense the inertial force, and can deform under the inertial force.

The material of the deformation layer 12 may be a flexible material, so that the acceleration sensor 100 is a flexible acceleration sensor 100 that can be bent.

By providing the deformation layer 12 and the detector 13 in the acceleration sensor 100, the deformation layer 12 can be deformed under inertial force, which in turn causes the resistance of the deformation layer 12 to change, and the detector 13 can detect the deformation by detecting the resistance of the deformation layer 12 The inertial force received by the layer 12 can then detect acceleration; since the deformable layer 12 can be formed of a flexible material, the acceleration sensor 100 is flexible and can be used on the surface of objects such as curved surfaces, which broadens the application field of the acceleration sensor 100. In addition, the corresponding Compared with the acceleration sensor formed by etching the silicon wafer as a whole through photolithography and other processes, the acceleration sensor 100 provided by this embodiment has simple processing technology, low cost, low structural brittleness, and is not easy to be damaged under impact force, thereby improving the performance of the acceleration sensor 100 Service life.

In one embodiment, referring to FIG. 3, the acceleration sensor 100 further includes a mass 14. The mass 14 is fixed on the upper surface of the deformable layer 12. The bottom surface of the deformable layer 12 is fixed to the flexible substrate 11. The mass 14 is used to drive the deformation of the deformable layer 12 under inertial force. In other words, the sensing sensitivity of the mass block 14 to inertial force is greater than the sensing sensitivity of the deformable layer 12. Specifically, the density of the mass 14 is greater than the density of the deformable layer 12. For example, the mass 14 is displaced along the X axis under inertial force. The displacement of the mass 14 drives the upper surface of the deformable layer 12 to move along the X-axis direction, so that the deformable layer 12 is stretched along the X-axis direction to change the resistance of the deformed layer 12, and the detector 13 detects the deformation layer 12 The amount of change in resistance can be used to calculate the magnitude of the inertial force, and then the magnitude of the acceleration.

Specifically, the material of the mass 14 is a flexible material, so that the acceleration sensor 100 can be bent and can be used on the surface of objects such as curved surfaces, which broadens the application field of the acceleration sensor 100.

Specifically, the deformable layer 12 may be at least one of a porous conductive layer and a nano conductive layer. The mass 14 may be plastic, such as polyester resin (Polyethylene terephthalate, PET), polyurethane (Polyurethane, PU), polyimide (Polyimide, PI), and the like. Both the mass 14 and the deformable layer 12 have good flexibility to facilitate the bending of the acceleration sensor 100. The density of the mass 14 is relatively high, so that the mass 14 is highly sensitive to inertial forces; the density of the deformation layer 12 is relatively low, so that the deformation layer 12 is easily deformed with the force of the mass 14.

In the following embodiments, a mass 14 is provided on the deformable layer 12 for description. Of course, in other embodiments, the mass 14 may not be provided on the deformable layer 12.

Further, referring to FIGS. 1 and 2 together, the acceleration sensor 100 further includes a first electrode 151 and a second electrode 152 provided on the flexible substrate 11. The deformable layer 12 is electrically connected between the first electrode 151 and the second electrode 152 respectively. The detector 13 detects the change value of the resistance of the deformable layer 12 by detecting the current between the first electrode 151 and the second electrode 152.

In one embodiment, referring to FIG. 2, the first electrode 151 and the second electrode 152 are arranged along the X-axis direction, so that the detector 13 detects the deformation of the deformable layer 12 in the X-axis direction, and according to the deformation The deformation of the layer 12 in the X-axis direction obtains the acceleration of the mass 14 in the X-axis direction.

In another embodiment, referring to FIG. 4, the first electrode 151 and the second electrode 152 can also be arranged along the Y-axis direction, so that the detector 13 detects the deformation of the deformation layer 12 in the Y-axis direction, and according to the The deformation amount of the deformable layer 12 in the Y-axis direction obtains the acceleration of the mass 14 in the Y-axis direction.

For a similar principle, referring to FIG. 5, the acceleration sensor 100 may include a first electrode 151 and a second electrode 152 arranged along the X-axis direction, and a third electrode 153 and a fourth electrode 154 arranged along the Y-axis direction to The acceleration sensor 100 can acquire the acceleration of the mass 14 along the X-axis direction and the acceleration along the Y-axis direction.

The flexible substrate 11 is flexible, can be bent arbitrarily, or has tensile properties. The first electrode 151 and the second electrode 152 can be prepared on the surface of the flexible substrate 11 through processes such as printing or coating. The flexible substrate 11 can be made of polyester resin (PET), polydimethylsiloxane (PDMS), silica gel, etc., and the first electrode 151 and the second electrode 152 can be made of silver glue, silver nanowire, etc. material.

In one embodiment, referring to FIG. 6, the flexible substrate 11 has a supporting surface 111 for supporting the deformable layer 12. The deformable layer 12 includes a first deformable layer 121. The resistance of the first deformed layer 121 is sensitive to the tangential deformation of the first deformed layer 121. The tangential deformation becomes parallel to the deformation of the supporting surface 111. When the mass 14 moves relative to the flexible substrate 11 driven by the inertial force parallel to the supporting surface 111 of the flexible substrate 11, the first deformable layer 121 is driven by the mass 14 Tangential deformation occurs to increase the resistance of the first deformed layer 121, and the detector 13 obtains the tangential acceleration of the mass 14 according to the change in resistance of the first deformed layer 121.

Specifically, the first deformable layer 121 is prone to tensile deformation under the tangential force of the flexible substrate 11, so that the resistance of the first deformable layer 121 is sensitive to the tangential deformation of the first deformed layer 121, and the first The deformable layer 121 can sense the inertial force in the tangential direction and can deform under the inertial force in the tangential direction, and then detect the acceleration in the tangential direction. In this embodiment, the tangential plane is the X-Y plane, so the first deformation layer 121 of this embodiment combined with the detector 13 can detect the acceleration in the X-axis direction and the acceleration in the Y-axis direction.

Specifically, the first deformed layer 121 is tangentially stretched under the tangential inertial force, so that the first deformed layer 121 undergoes tangential deformation, so that the density of the conductive medium in the first deformed layer 121 is small. In turn, the resistance of the first deformed layer 121 is increased, and the detector 13 obtains the tangential acceleration value of the mass 14 according to the change of the resistance of the first deformed layer 121.

For example, the first deformable layer 121 is a nano conductive layer. The nano-conductive material of the nano-conductive layer may be nano-graphene, carbon nanotube, disulfide, and the like. When the mass 14 generates an inertial force on the nano-conductive layer under the action of tangential acceleration, the nano-conductive layer is stretched laterally under the tangential inertial force, and the connection between the part of the nano-material of the nano-conductive layer is loosened, so that the first The overall impedance of the deformable layer 121 increases. When the first electrode 151 and the second electrode 152 are connected to the constant voltage power supply 16, the current in the detection circuit becomes smaller, and the detector 13 obtains the acceleration value according to the change of the current.

In one embodiment, referring to FIG. 6, the deformable layer 12 further includes a second deformable layer 122. The resistance of the second deformable layer 122 is sensitive to the normal deformation of the second deformable layer 122. When the mass 14 moves relative to the flexible substrate 11 under the inertial force perpendicular to the supporting surface 111 of the flexible substrate 11, the second deformable layer 122 is driven by the mass 14 Normally deforms to reduce the resistance of the second deformed layer 122, and the detector 13 is used to obtain the normal acceleration of the mass 14 according to the change value of the resistance of the second deformed layer 122.

In this embodiment, referring to FIG. 6, the first deformable layer 121 is fixed on the flexible substrate 11, and the first deformable layer 121 is connected to the first electrode 151 and the second electrode 152. The second deformable layer 122 is fixed on the first deformable layer 121, and the mass 14 is fixed on the second deformable layer 122. Of course, in other embodiments, the second deformable layer 122 may be fixed on the flexible substrate 11, the second deformable layer 122 is connected to the first electrode 151 and the second electrode 152, and the first deformable layer 121 is fixed to the second deformable layer 122 Above, the mass 14 is fixed on the first deformable layer 121.

Specifically, the first deformable layer 121 is a nano conductive layer. The second deformable layer 122 is a porous conductive layer. The second deformable layer 122 may be polydimethylsiloxane (PDMS) or silica gel doped with a certain proportion of conductive particles. The conductive particles include but are not limited to graphene. The first deformation layer 121 and the second deformation layer 122 combine to form an acceleration sensitive layer. The nano-conductive layer is connected with the first electrode 151 and the second electrode 152 to form a path, and the porous conductive layer is connected in parallel with the nano-conductive layer, and the two work together to detect changes in the tangential and normal acceleration of the acceleration sensor 100.

It can be understood that the second deformable layer 122 has a high sensitivity to normal inertial force, so as to improve the sensitivity of the acceleration sensor 100 to normal acceleration. The acceleration sensitive layer is prone to compression deformation in the Z-axis direction under the normal force of the flexible substrate 11. The amount of compression deformation of the second deformable layer 122 in the Z-axis direction is relatively large, and the amount of compression deformation of the first deformable layer 121 in the Z-axis direction is relatively small. Regardless of whether the mass 14 is subjected to inertial force normal upward or normal downward, the acceleration sensitive layer will be squeezed by the mass 14, which will cause the acceleration sensitive layer to undergo compression and deformation, so that the conductive materials inside the holes of the acceleration sensitive layer are in closer contact. , The density of the conductive material in the acceleration sensitive layer increases, which in turn reduces the overall resistance of the acceleration sensitive layer. When the constant voltage power supply 16 is connected to the first electrode 151 and the second electrode 152, the current in the detection circuit becomes larger, and the detector 13 determines the normal acceleration value of the acceleration sensor 100 according to the amount of change in the current.

When the acceleration sensor 100 is fixed on the object to be detected, the acceleration of the object to be detected can be obtained by detecting the acceleration of the acceleration sensor 100.

In this embodiment, combined with the previous embodiment, the tangential acceleration of the mass 14 can be obtained by detecting the decrease of the current by the detector 13, and by detecting the electrodes arranged along the X-axis direction (or Y-axis direction), the direction along the X-axis can be obtained. (Or Y-axis direction) acceleration direction; according to the amount of current change, the tangential acceleration value of the mass 14 can be obtained; the increase in the current is detected by the detector 13, and the normal acceleration of the mass 14 can be obtained according to the change of the current The normal acceleration value of the mass block 14 can be obtained by the quantity. In this way, the acceleration sensor 100 provided in this embodiment realizes the detection of three-axis (X, Y, Z axis) acceleration values, because the flexible substrate 11, the first deformable layer 121, and the second deformable layer 122 are formed of a bendable material Therefore, the acceleration sensor 100 is flexible and can be used on surfaces such as curved surfaces, which broadens the application field of the acceleration sensor 100; in addition, compared with the acceleration sensor formed by etching the silicon wafer as a whole through photolithography and other processes, this embodiment provides The acceleration sensor 100 has simple processing technology, low cost, low structural brittleness, and is not easy to be damaged under impact force, thereby improving the service life of the acceleration sensor 100.

Of course, in other embodiments, the acceleration sensitive layer may only be the second deformable layer 122, so that the acceleration sensor 100 is a sensor that detects normal acceleration.

Further, the materials of the mass 14, the first deformation layer 121, and the second deformation layer 122 are all flexible materials, so that the acceleration sensor 100 provided by this embodiment has better bending performance and can be used Acceleration measurement in a variety of flat or curved states broadens the application field of acceleration sensors. The density of the mass 14 is greater than the density of the first deformed layer 121 and the density of the second deformed layer 122, so that the mass 14 can transfer all the inertial forces it receives into stretching as much as possible The force of the acceleration sensitive layer or the compression acceleration sensitive layer improves the detection accuracy of the acceleration sensor 100 for the inertial force received by the mass 14.

It is understandable that the conductivity of the nano conductive layer is extremely sensitive to external pressure, and the material deformation caused by a slight pressure change can cause a large change in its impedance. In this embodiment, the acceleration sensor 100 is designed based on the conductive properties of nanomaterials and other flexible materials in combination with the sensitive characteristics of the state of change, so that the acceleration sensor 100 is highly sensitive to inertial forces and can be used in a variety of flat or curved states. Acceleration measurement. The mass 14, the deformation layer 12, and the substrate in the acceleration sensor 100 proposed in this embodiment are all made of flexible materials. Therefore, the overall structure of the acceleration sensor 100 is flexible. The acceleration sensor 100 can be designed in various shapes and is convenient to be used in various shapes. In addition, the first deformation layer 121 in the acceleration sensor 100 can achieve acceleration measurement in two dimensions (X-axis direction and Y-axis direction), and the combination of the first deformation layer 121 and the second deformation layer 122 can achieve three dimensions Acceleration measurement (X-axis direction, Y-axis direction and Z-axis direction) greatly simplifies the structure of the three-axis acceleration sensor 100; the preparation process of the acceleration sensor 100 is simple and does not require complex processes such as photolithography, which is convenient for mass industrial production. The production cost is low.

Please refer to FIG. 7, an acceleration sensor 200 provided in the second embodiment of the present application. The acceleration sensor 200 includes a flexible substrate 21, a first deforming member 22, a second deforming member 23 and a detector 24. The first deforming member 22 and the second deforming member 23 are provided on the flexible substrate 21. Both the first deforming member 22 and the second deforming member 23 can conduct electricity, and the first deforming member 22 and the second deforming member 23 can be deformed under inertial force to change their resistance. The detector 24 is electrically connected to the first deformable part 22 for detecting accelerations in the first tangential and normal directions according to the resistance change of the first deformable part 22; the detector 24 is electrically connected to the second deformable part 23. Used to detect the acceleration in the second tangential direction and the normal direction according to the resistance change of the second deformable part 23. The second tangential direction intersects the first tangential direction.

In this embodiment, the first tangential direction is the X-axis direction, and the second tangential direction is the Y-axis direction. The normal direction is the Z-axis direction. The first deforming part 22 and the second deforming part 23 are connected in parallel, the detector 24 is electrically connected to the parallel structure of the first deforming part 22 and the second deforming part 23, and the detector 24 is electrically connected to a constant voltage power supply 241 to form a detection loop .

By matching the first deforming part 22 and the second deforming part 23 to detect the acceleration in the first tangential direction, the second tangential direction, and the normal direction, the acceleration sensor 200 can realize three-axis (X-axis direction, Y-axis direction). Direction and Z-axis direction) acceleration measurement; the detector 24 detects the triaxial acceleration by detecting the resistance changes of the first deformed part 22 and the second deformed part 23, without complicated processes such as photolithography, and the preparation process is simple, which is convenient for mass industrialization The production cost is low; the acceleration sensor 200 is made of flexible materials, so the overall structure of the acceleration sensor 200 is flexible, and the acceleration sensor 200 can be designed in various shapes, which is convenient for use in various occasions.

It can be understood that the structures of the first deforming member 22 and the second deforming member 23 may be the same. Both the first deforming member 22 and the second deforming member 23 are essentially the deformable layer in the first embodiment. The first deformation member 22 and the second deformation member 23 may also be referred to as acceleration sensitive layers. Therefore, the specific structures of the first deforming member 22 and the second deforming member 23 will not be repeated here.

Further, referring to FIG. 7, the acceleration sensor 200 further includes a first electrode 251, a second electrode 252, a third electrode 253 and a fourth electrode 254 provided on the flexible substrate 21. The first electrode 251 and the second electrode 252 are arranged opposite to each other along the first tangential direction (that is, along the X-axis direction). The first deforming member 22 is electrically connected between the first electrode 251 and the second electrode 252. The third electrode 253 and the fourth electrode 254 are arranged opposite to each other along the second tangential direction (that is, along the Y-axis direction). The first deforming element 22 is electrically connected between the first electrode 251 and the second electrode 252, and the second deforming element 23 is electrically connected between the third electrode 253 and the fourth electrode 254. The detector 24 detects the resistance change value of the first deformable part 22 by detecting the current value between the first electrode 251 and the second electrode 252, and detects the third electrode 253 and the The current value between the fourth electrodes 254 is used to detect the resistance change value of the second deformable part 23.

Specifically, when the acceleration sensor 200 receives the inertial force in the first tangential direction, the first deforming member 22 is stretched along the X-axis direction, the overall resistance of the first deforming member 22 increases, and the first electrode 251 and the second The current between the two electrodes 252 is reduced; the second deformation member 23 is stretched along the X-axis direction, but there is no deformation in the Y-axis direction, so the current between the third electrode 253 and the fourth electrode 254 does not change; detection The device 24 detects that the current between the first electrode 251 and the second electrode 252 decreases, while the current between the third electrode 253 and the fourth electrode 254 remains unchanged, and the direction of acceleration can be measured as the first tangential direction. The device 24 obtains the acceleration value according to the amount of current change between the first electrode 251 and the second electrode 252.

When the acceleration sensor 200 receives the inertial force in the second tangential direction, the second deforming member 23 is stretched along the Y-axis direction, the overall resistance of the second deforming member 23 increases, and the third electrode 253 and the fourth electrode 254 are The current between the first electrode 251 and the second electrode 252 is reduced; the first deformable member 22 is stretched along the Y-axis direction, but there is no deformation in the X-axis direction, so the current between the first electrode 251 and the second electrode 252 does not change; the detector 24 detects The current between the third electrode 253 and the fourth electrode 254 decreases, while the current between the first electrode 251 and the second electrode 252 does not change. The direction in which the acceleration can be measured is the second tangential direction. The amount of current change between the third electrode 253 and the fourth electrode 254 obtains an acceleration value.

When the acceleration sensor 200 receives the inertial force in the first tangential direction and the second tangential direction, the current between the third electrode 253 and the fourth electrode 254 decreases, and the current between the first electrode 251 and the second electrode 252 decreases. , The detector 24 can measure the decrease in the current between the third electrode 253 and the fourth electrode 254 and the decrease in the current between the first electrode 251 and the second electrode 252. The acceleration value and the acceleration value along the first tangential direction.

When the acceleration sensor 200 receives the inertial force in the normal direction, the current between the third electrode 253 and the fourth electrode 254 increases, the current between the first electrode 251 and the second electrode 252 increases, and the detector 24 passes the detection The increase in current between the third electrode 253 and the fourth electrode 254 and the increase in current between the first electrode 251 and the second electrode 252 can measure the acceleration value in the normal direction.

Further, referring to FIG. 7, the acceleration sensor 200 further includes a first mass 261 and a second mass 262. The first mass 261 is fixed on the first deforming member 22. The first mass 261 can drive the first deforming member 22 to deform under inertial force. The second mass block 262 is fixed on the second deforming member 23. The second mass 262 can drive the second deforming member 23 to deform under inertial force.

It can be understood that the first mass 261 and the second mass 262 may be of the same material and structure. The materials of the first mass block 261 and the second mass block 262 can refer to the material of the mass block in the first embodiment. Specifically, the density of the first mass 261 is greater than the density of the first deforming part 22, so that the first mass 261 converts all the inertial force as much as possible into the force on the first deforming part 22, so as to improve the first deformation part 22. Accuracy of a deformation element 22 for detecting acceleration. The density of the second mass 262 is greater than the density of the second deforming part 23, so that the second mass 262 converts all the inertial force as far as possible into the force on the second deforming part 23, so as to improve the second deforming part 23. 23 Accuracy of detection of acceleration.

Further, referring to FIGS. 8 and 9, the first deformation member 22 includes a first deformation layer 221 and a second deformation layer 222 that are stacked. The resistance of the first deformation layer 221 is sensitive to the deformation of the first tangential direction. The resistance of the second deformation layer 222 is sensitive to the deformation in the normal direction. When the first mass 261 drives the first deformable layer 221 to deform along the first tangential direction, the detector 24 acquires the acceleration in the first tangential direction. When the first mass 261 drives the first deformable layer 221 to deform along the normal direction, the detector 24 acquires the acceleration in the normal direction.

The first deformable layer 221 in this embodiment is substantially the same as the first deformable layer 221 in the first embodiment, and the second deformable layer 222 is substantially the same as the second deformable layer 222 in the first embodiment. The material and structure of the deformable layer 221 and the second deformable layer 222 and the specific process of converting the inertial force into the amount of current change will not be repeated.

Further, referring to FIG. 8 and FIG. 9, the second deformation member 23 includes a third deformation layer 231 and a fourth deformation layer 232 that are stacked. The resistance of the third deformation layer 231 is sensitive to the deformation in the second tangential direction. The resistance of the fourth deformation layer 232 is sensitive to the deformation in the normal direction. When the second mass 262 drives the second deformed layer 222 to deform in the second tangential direction, the detector 24 acquires the acceleration in the second tangential direction. When the second mass 262 drives the second deformed layer 222 to deform in the normal direction, the detector 24 acquires the acceleration in the normal direction.

The third deformable layer 231 in this embodiment is substantially the same as the first deformable layer 221 in the first embodiment, and the fourth deformable layer 232 is substantially the same as the second deformable layer 222 in the first embodiment. The material and structure of the deformable layer 231 and the fourth deformable layer 232 and the specific process of converting the inertial force into the amount of current change will not be repeated.

Further, referring to FIGS. 8 and 9, the acceleration sensor 200 further includes a packaging frame 27. The packaging frame 27 is arranged on the flexible substrate 21. The packaging frame 27 has a first receiving cavity 271 and a second receiving cavity 272 spaced apart from each other. The first deforming element 22 and the first mass 261 are received in the first receiving cavity 271. The first deforming member 22 matches the shape of the first receiving cavity 271. The peripheral side surface of the first deforming member 22 is attached to the inner wall of the first receiving cavity 271. The first receiving cavity 271 has a first side wall 273 and a second side wall 274 disposed opposite to each other along the Y-axis direction. The opposite ends of the first mass 261 are slidably connected to the first side wall 273 and the second side wall 274, and the first mass 261 is spaced apart from the inner wall of the first receiving cavity 271 in the X-axis direction to The first mass 261 can slide freely along the first tangential direction under the inertial force of the first tangential direction.

In other words, the left and right sides of the first mass 261 are spaced from the inner wall of the first receiving cavity 271, so that the first mass 261 can move freely left and right under the inertial force of the X-axis direction. The binding force of the packaging frame 27 further improves the sensitivity of the first mass 261 to the inertial force in the X-axis direction.

Please refer to FIG. 8, the second deforming member 23 and the second mass block 262 are received in the second receiving cavity 272. The second receiving cavity 272 has a first inner wall 275 and a second inner wall 276 arranged opposite to each other along the X-axis direction. The opposite ends of the second mass 262 are slidably connected to the first inner wall 275 and the second inner wall 276, and the second mass 262 is spaced from the inner wall of the second receiving cavity 272 in the Y-axis direction, so that the The second mass 262 can slide freely along the second tangential direction under the inertial force of the second tangential direction. The second deforming member 23 matches the shape of the second receiving cavity 272. The peripheral side surface of the second deforming member 23 is attached to the inner wall of the second receiving cavity 272.

Further, referring to FIGS. 8 and 9, the acceleration sensor 200 further includes a flexible cover 28. The flexible cover 28 is disposed on the packaging frame 27 and covers the openings of the first receiving cavity 271 and the second receiving cavity 272. The first mass 261 and the second mass 262 are spaced apart from the flexible cover 28.

In other words, there is a distance between the first mass 261 and the flexible cover 28, so that the first mass 261 will not be blocked by the flexible cover 28 under normal inertial force, which improves the resistance of the first mass 261 to the flexible cover 28. Sensitivity of normal inertial force. Similar to the second mass 262, there is a distance between the second mass 262 and the flexible cover 28, so that the second mass 262 will not be blocked by the flexible cover 28 under normal inertial force, which improves the first mass. The sensitivity of the second mass 262 to the normal inertial force.

Further, the materials of the packaging frame 27, the first deforming member 22, the second deforming member 23, the first mass 261, and the second mass 262 are all flexible materials. Specifically, the packaging frame 27 and the flexible cover 28 are made of flexible materials, such as polyester resin (PET), polydimethylsiloxane (PDMS), silica gel, and other materials. Therefore, the overall structure of the acceleration sensor 200 is flexible, and the acceleration sensor 200 can be designed in various shapes, which is convenient for use in various occasions;

In this embodiment, the first deformable member 22 and the second deformable member 23 are respectively arranged on the plane formed by the X and Y axes to limit the degree of freedom of the first mass 261 along the Y axis, and limit the second mass 262 to move along the X axis. The degree of freedom in the axial direction, the X-axis and Y-axis acceleration are measured by the shear force sensitivity characteristics of the first deformable part 22 and the second deformable part 23, and the normal directions of the first deformable part 22 and the second deformable part 23 are used at the same time The force-sensitive characteristic measures the Z-axis acceleration, so as to realize the acceleration measurement of the acceleration sensor 200 for the three-axis.

In other embodiments, the first deformable member 22 and the second deformable member 23 may be respectively arranged on a plane perpendicular to the X and Y axes, and the normal force sensitive characteristics of the first deformable member 22 and the second deformable member 23 can be used. The accelerations of the X and Y axes are respectively measured, and the Z-axis acceleration is measured by using the shear force sensitive characteristics of the first deforming part 22 and the second deforming part 23, so as to realize the acceleration measurement of the acceleration sensor 200 for the three axes.

The acceleration sensor 200 provided in the present application may be a patch type flexible three-axis acceleration sensor 200. The specific structure of the acceleration sensor 200 is shown in Figures 8 and 9: electrodes and external pins are printed on the flexible substrate 21; a package frame 27 is attached to the flexible substrate 21 and the electrodes; a box inside the package frame 27 Attach the first deformable piece 22 and the second deformed piece 23 in the middle, and use conductive glue to stick the electrode with the first deformed piece 22 and the second deformed piece 23 firmly; stick on the surface of the first deformed piece 22 and the second deformed piece 23 respectively A first mass 261 and a second mass 262 with degrees of freedom in the X-axis direction and the Y-axis direction are attached; the entire sensor is packaged with a flexible cover 28 on the package frame 27.

8 and 9, the flexible substrate 21, the flexible cover 28, and the middle packaging frame 27 form a first receiving cavity 271 and a second receiving cavity 272, and the first mass 261 and the first receiving cavity 271 are placed inside the first receiving cavity 271. For the deformable part 22, the second mass 262 and the second deformable part 23 are placed inside the second receiving cavity 272. Among them, the lower part of the first deforming member 22 and the second deforming member 23 is a nano conductive layer, and the upper part is a porous conductive layer. When the acceleration sensor 200 accelerates along the X axis, the first mass 261 can generate an inertial force along the X axis and cause shear deformation on the surface of the first deformable part 22, thereby causing the first electrode 251 and the second electrode 252 The resistance in the circuit path where it is located increases, and the current detected by the detector 24 decreases. When the sensor accelerates along the Y-axis, the second mass 262 can generate an inertial force along the Y-axis and cause shear deformation on the surface of the second deforming part 23, resulting in the third electrode 253 and the fourth electrode 254. The resistance in the circuit channel increases, and the current detected by the detector 24 decreases; when the acceleration sensor 200 accelerates along the Z axis, the first mass 261 and the second mass 262 can generate inertial force along the Z axis, and The surfaces of the first deformable part 22 and the second deformed part 23 cause compression deformation, which causes the resistance in the circuit path where the first electrode 251 and the second electrode 252, the third electrode 253 and the fourth electrode 254 are located to decrease, and the detector 24 The detected current increases. Connect the external pin to the external circuit and detect the current change in different acceleration environments to get the corresponding acceleration value.

Please refer to FIG. 10, a third embodiment of the present application provides an acceleration sensor 300. The acceleration sensor 300 includes an elastic sleeve 31, at least one deformable element 32, and a detector (not shown). The elastic sleeve 31 has a through hole 311 penetrating in the axial direction. The elastic sleeve 31 is used to sleeve on the outer peripheral surface of the object 33 to be detected, and the object 33 to be detected may be cylindrical. Among them, the object 33 to be detected can serve as the mass block in the first embodiment and the second embodiment. The deforming member 32 is fixed on the outer peripheral surface of the elastic sleeve 31. The deformation member 32 can conduct electricity. The resistance of the deforming member 32 changes with the deformation of the deforming member 32. The object to be detected 33 is disposed in the through hole 311, and the object to be detected 33 drives the deformation member 32 to deform under inertial force. The detector is electrically connected to the deformable part 32 for obtaining acceleration according to the resistance of the deformable part 32.

The acceleration is detected by detecting the resistance change of the deformable part 32, without complicated processes such as photolithography, and the preparation process is simple, convenient for mass industrial production, and low production cost; the overall structure of the acceleration sensor 300 in this embodiment is cylindrical and can be applied More restricted space occasions.

Further, the deforming member 32 extends along the axial direction of the elastic sleeve 31. The axial direction of the elastic sleeve 31 is the direction of the rotation center axis of the elastic sleeve 31. The axial direction of the elastic sleeve 31 extends along the Z-axis direction.

Referring to FIGS. 10 and 11, the acceleration sensor 300 further includes a pair of

electrodes

351 and 352 arranged opposite to each other along the axial direction of the elastic sleeve 31. The deformable element 32 is electrically connected between the electrode pairs 351 and 352. The detector detects the resistance change value of the deformable member 32 by detecting the current between the

electrodes

351 and 352.

When the object 33 to be detected moves relative to the elastic sleeve 31 in the axial direction of the elastic sleeve 31 (the Z-axis direction in FIG. 10), the deformation member 32 is positioned on the elastic sleeve 31. The axial direction of the elastic sleeve 31 is stretched and deformed to increase the resistance of the deformable piece 32, and the detector obtains the acceleration along the axial direction of the elastic sleeve 31 according to the change of the resistance of the deformable piece 32.

When the object 33 to be detected moves relative to the elastic sleeve 31 in the radial direction of the elastic sleeve 31, the deforming member 32 moves in the radial direction of the elastic sleeve 31 (X in FIG. 10 Axis and Y-axis directions) undergo compression deformation to reduce the resistance of the deformation member 32, and the detector obtains the acceleration along the radial direction of the elastic sleeve 31 according to the resistance change of the deformation member 32.

Further, referring to FIG. 10, the at least one deforming member 32 includes a first deforming member 321 and a second deforming member 322. The first deforming member 321 and the second deforming member 322 are arranged opposite to each other along the first direction. The first direction is the X-axis direction.

When the object 33 to be detected moves relative to the elastic sleeve 31 in the first direction, the first deforming member 321 undergoes compression deformation in the first direction, so that the first deforming member 321 is compressed and deformed in the first direction. The resistance decreases, and the detector obtains the acceleration in the first direction according to the resistance change of the first deformable part 321. The first direction is the positive X direction.

When the object 33 to be detected moves relative to the elastic sleeve 31 in the first direction, the second deforming member 322 undergoes compression deformation in the first direction, so that the second deforming member 322 is compressed and deformed in the first direction. The resistance decreases, and the detector obtains the acceleration in the first direction according to the resistance change of the second deformable part 322. The first direction is X reverse.

Further, referring to FIG. 10, the at least one deforming member 32 further includes a third deforming member 323 and a fourth deforming member 324. The third deforming member 323 and the fourth deforming member 324 are disposed opposite to each other along the second direction. The second direction intersects the first direction. The second direction is the Y-axis direction.

When the object 33 to be detected moves relative to the elastic sleeve 31 in the second direction, the third deforming member 323 undergoes compression deformation in the second direction, so that the third deforming member 323 is compressed and deformed in the second direction. The resistance decreases, and the detector obtains the acceleration in the second direction according to the resistance change of the third deformable part 323. The second direction is the positive direction of the Y axis.

When the object 33 to be detected moves relative to the elastic sleeve 31 in the second direction, the fourth deforming member 324 undergoes compression deformation in the second direction, so that the fourth deforming member 324 is compressed and deformed in the second direction. The resistance decreases, and the detector obtains the acceleration in the second direction according to the resistance change of the fourth deforming part 324. The second direction is the opposite direction of the Y axis.

The structure of the acceleration sensor 300 is shown in Figures 10 to 12: electrodes 351-358 and external pins are printed on the elastic sleeve 31; deformable pieces 321-324 are attached to the elastic sleeve 31 and the electrodes 351-358; The entire acceleration sensor 300 is encapsulated by the flexible cover 36 above the deforming parts 321-324.

The acceleration sensor 300 is attached or sleeved on the cylindrical object 33 to be detected. When the acceleration sensor 300 accelerates along the positive or negative direction of the X axis, the object 33 to be detected can generate inertial force along the positive or negative direction of the X axis. , And cause compression deformation on the surface of the deformable part 322 or 321, resulting in a decrease in resistance and an increase in current in the circuit channel where the electrodes 353-354 or 351-352 are located. Similarly, when the sensor is along the positive or negative axis of the Y axis When accelerating in the direction, the object 33 to be detected can generate inertial force along the positive or negative direction of the Y-axis, and cause compression deformation on the surface of the

deformable piece

323 or 324, thereby causing the electrode 355-356 or 357-358 to be located in the circuit channel The resistance decreases and the current increases; when the acceleration sensor 300 accelerates along the Z axis, the object 33 to be detected can generate an inertial force along the Z axis, and cause shear deformation on the surface of the

deformable parts

321, 322, 323, 324, As a result, the resistance in the circuit path where the electrodes 351-358 are located increases, and the current decreases. Connect the external pin to the external circuit and detect the current change in different acceleration environments to get the corresponding acceleration value. Wherein, the direction indicated by the X-axis arrow in FIG. 10 is the positive X direction, and the direction indicated by the Y-axis arrow is the positive Y direction.

In this embodiment, the first deforming element 321 and the second deforming element 322 are arranged opposite to each other along the X axis, the third deforming element 323 and the fourth deforming element 324 are arranged opposite to each other along the Y axis direction, and the electrode of each deforming element 32 is electrically connected along the X axis. The Z-axis direction is set so that the acceleration sensor 300 can detect the three axial directions (the acceleration in the X, Y, and Z-axis directions).

Further, the deformation member 32 includes a first deformation layer and a second deformation layer which are stacked. The resistance of the first deformed layer is sensitive to the deformation of the first deformed layer along the axial direction of the elastic sleeve 31 (the Z-axis direction in FIG. 10). The resistance of the second deformed layer is sensitive to the deformation of the second deformed layer along the radial direction of the elastic sleeve 31 (the X-axis and Y-axis directions in FIG. 10).

It can be understood that the specific structure and material of the deformable member 32 can refer to the deformable layer of the first embodiment, and will not be repeated here.

The implementation of this application is described in detail above, and specific examples are used in this article to illustrate the principle and implementation of this application. The description of the above implementation is only used to help understand the method and core idea of this application; at the same time, for Those of ordinary skill in the art, based on the ideas of the application, will have changes in the specific implementation and the scope of application. In summary, the content of this specification should not be construed as limiting the application.

Claims

An acceleration sensor, characterized in that it comprises:

Flexible substrate

The deformable layer is provided on the flexible substrate, and the deformable layer can conduct electricity. When the deformable layer is deformed under the action of an external force, the resistance of the deformable layer varies with the deformation of the deformable layer And change; and

A detector, which is electrically connected to the deformable layer, and is used to obtain acceleration according to the change value of the resistance of the deformable layer.
The acceleration sensor according to claim 1, wherein the acceleration sensor further comprises a mass, the mass is fixed on the deformation layer, the mass can drive the deformation of the deformation layer under inertial force .
The acceleration sensor according to claim 2, wherein the flexible substrate has a supporting surface for carrying the deformable layer; the deformable layer includes a first deformable layer, and the resistance of the first deformable layer is The tangential deformation of the first deformation layer is sensitive;

When the mass moves relative to the flexible substrate under the inertial force parallel to the supporting surface of the flexible substrate, the first deformable layer is tangentially deformed under the drive of the mass to make The resistance of the first deformed layer increases, and the detector obtains the tangential acceleration of the mass according to the change in resistance of the first deformed layer.
The acceleration sensor according to claim 3, wherein the deformable layer further comprises a second deformable layer laminated with the first deformable layer, and the resistance of the second deformable layer has an impact on the second deformable layer. Is sensitive to normal deformation;

When the mass block moves relative to the flexible substrate under the inertial force perpendicular to the supporting surface of the flexible substrate, the second deformable layer undergoes normal deformation under the drive of the mass block to make The resistance of the second deformed layer is reduced, and the detector obtains the normal acceleration of the mass block according to the change value of the resistance of the second deformed layer.
The acceleration sensor according to claim 4, wherein the first deformation layer is fixed on the flexible substrate, and the second deformation layer is fixedly connected to the first deformation layer and the mass block. between.
The acceleration sensor according to claim 4, wherein the first deformable layer is a nano conductive layer, and the second deformed layer is a porous conductive layer.
The acceleration sensor according to claim 4, wherein the materials of the mass, the first deformation layer, and the second deformation layer are all flexible materials, and the density of the mass is greater than that of the first deformation layer. The density of a deformed layer and the density of the second deformed layer.
The acceleration sensor according to claim 1, wherein the acceleration sensor further comprises a first electrode and a second electrode provided on the flexible substrate, and the deformable layer is electrically connected to the first electrode and the second electrode. Between the second electrodes, the detector is used to detect the change value of the resistance of the deformable layer by detecting the current between the first electrode and the second electrode.
An acceleration sensor, characterized in that it comprises:

Flexible substrate

A first deforming member and a second deforming member, the first deforming member and the second deforming member are spaced apart on the flexible substrate, and both the first deforming member and the second deforming member can conduct electricity , And the first deformable element and the second deformable element can be deformed under inertial force to change the resistance; and

The detector is electrically connected to the first deformation member for detecting accelerations in the first tangential direction and the normal direction according to the resistance change of the first deformation member, and the detector is electrically connected to the second deformation member A piece for detecting accelerations in a second tangential direction and a normal direction according to the resistance change of the second deformable piece, and the second tangential direction intersects the first tangential direction.
The acceleration sensor according to claim 9, wherein the acceleration sensor further comprises a first mass and a second mass, the first mass is fixed on the first deformable part, and the first mass The mass can drive the first deformable piece to deform under inertial force; the second mass is fixed on the second deformed piece, and the second mass can drive the second deformed piece under the inertial force deformation.
The acceleration sensor according to claim 10, wherein the first deformation member comprises a first deformation layer and a second deformation layer that are stacked, and the resistance of the first deformation layer is relative to the first tangential direction. Deformation-sensitive, the resistance of the second deformation layer is sensitive to the deformation in the normal direction;

When the first mass drives the first deformed layer to deform along the first tangential direction, the detector acquires the acceleration of the first tangential direction;

When the first mass drives the first deformable layer to deform in the normal direction, the detector acquires the acceleration in the normal direction.
The acceleration sensor according to claim 9, wherein the acceleration sensor further comprises a first electrode, a second electrode, a third electrode, and a fourth electrode provided on the flexible substrate, the first electrode Disposed opposite to the second electrode along the first tangential direction, the first deforming member is electrically connected between the first electrode and the second electrode; the third electrode and the fourth electrode Are arranged oppositely along the second tangential direction, the second deformable part is electrically connected between the third electrode and the fourth electrode; the detector is used to detect the first electrode and the second electrode The current value between the electrodes is used to detect the resistance change value of the first deformable part, and the current value between the third electrode and the fourth electrode is detected to detect the resistance change value of the second deformable part.
The acceleration sensor according to claim 10, wherein the acceleration sensor further comprises a packaging frame, the packaging frame has a first accommodating cavity and a second accommodating cavity, the first deformable part and the first mass The block is accommodated in the first accommodating cavity, and the second deformable piece and the second mass block are accommodated in the second accommodating cavity;

The first accommodating cavity has a first side wall and a second side wall that are arranged oppositely, and opposite ends of the first mass are slidably connected to the first side wall and the second side wall respectively, so that the A mass slides along the first tangential direction;

The second accommodating cavity has a first inner wall and a second inner wall that are arranged oppositely, and opposite ends of the second mass are slidably connected to the first inner wall and the second inner wall, so that the second mass is The second tangential sliding.
The acceleration sensor according to claim 13, wherein the acceleration sensor further comprises a flexible cover, the flexible cover is provided on the packaging frame and covers the first housing cavity and the second housing The opening of the cavity, the first mass and the second mass are all spaced apart from the flexible cover.
The acceleration sensor of claim 13, wherein the packaging frame, the first deformable part, the second deformed part, the first mass and the second mass are all made of Flexible material.
An acceleration sensor, characterized in that it comprises:

An elastic sleeve, the elastic sleeve having a through hole penetrating in the axial direction, and the elastic sleeve is used to sleeve the object to be detected;

At least one deformable element, the deformable element is fixed on the outer peripheral surface of the elastic sleeve, the deformable element can conduct electricity, and the resistance of the deformable element changes with the deformation of the deformable element; and

The detector is electrically connected to the deformable part, and is used to obtain acceleration according to the resistance of the deformable part.
The acceleration sensor according to claim 16, wherein the deformable element comprises a first deformed layer and a second deformed layer which are stacked, and the resistance of the first deformed layer is opposite to the first deformed layer along the The elastic sleeve is sensitive to the deformation in the axial direction; the resistance of the second deformation layer is sensitive to the deformation of the second deformation layer in the radial direction of the elastic sleeve.
The acceleration sensor according to claim 16, wherein the deformation member extends along the axial direction of the elastic sleeve, and the acceleration sensor further comprises a pair of electrodes arranged opposite to each other along the axial direction of the elastic sleeve The deformable element is electrically connected between the pair of electrodes, and the detector is used to detect the resistance change value of the deformable element by detecting the current between the pair of electrodes;

When the object to be detected moves relative to the elastic sleeve in the axial direction of the elastic sleeve, the deformable part is stretched and deformed in the axial direction of the elastic sleeve, so that the deformation of the deformable part The resistance increases, the detector obtains the acceleration along the axial direction of the elastic sleeve according to the resistance change of the deformable part;

When the object to be detected moves relative to the elastic sleeve in the radial direction of the elastic sleeve, the deforming member is compressed and deformed in the radial direction of the elastic sleeve, so that the resistance of the deforming member is Decrease, the detector obtains the acceleration along the radial direction of the elastic sleeve according to the resistance change of the deformation member.
The acceleration sensor according to claim 16, wherein the at least one deforming member includes a first deforming member and a second deforming member, and the first deforming member and the second deforming member are arranged opposite to each other in a first direction ；

When the object to be detected moves relative to the elastic sleeve in the first direction, the first deforming member undergoes compression deformation in the first direction, so that the resistance of the first deforming member is reduced , The detector obtains the acceleration in the first direction according to the resistance change of the first deformable part; or, when the object to be detected moves relative to the elastic sleeve in the first direction, the The second deformable part is compressed and deformed in the first direction to reduce the resistance of the second deformed part, and the detector obtains the acceleration in the first direction according to the resistance change of the second deformed part .
The acceleration sensor according to claim 19, wherein the at least one deforming member further comprises a third deforming member and a fourth deforming member, and the third deforming member and the fourth deforming member are opposite to each other in the second direction Provided that the second direction intersects the first direction;

When the object to be detected moves relative to the elastic sleeve in the second direction, the third deforming member undergoes compression deformation in the second direction, so that the resistance of the third deforming member is reduced , The detector obtains the acceleration in the second direction according to the resistance change of the third deformable part; or, when the object to be detected moves relative to the elastic sleeve in the second direction, the The fourth deforming part is compressed and deformed in the second direction to reduce the resistance of the fourth deforming part, and the detector obtains the acceleration in the second direction according to the resistance change of the fourth deforming part.