WO2020258745A1 - 一种干式双涡旋真空泵 - Google Patents

一种干式双涡旋真空泵 Download PDF

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Publication number
WO2020258745A1
WO2020258745A1 PCT/CN2019/124711 CN2019124711W WO2020258745A1 WO 2020258745 A1 WO2020258745 A1 WO 2020258745A1 CN 2019124711 W CN2019124711 W CN 2019124711W WO 2020258745 A1 WO2020258745 A1 WO 2020258745A1
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Prior art keywords
scroll
vacuum pump
drive assembly
cooling
fixed plate
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Ceased
Application number
PCT/CN2019/124711
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English (en)
French (fr)
Inventor
熊树生
江仁埔
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Zhejiang University
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Zhejiang University
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Publication of WO2020258745A1 publication Critical patent/WO2020258745A1/zh
Priority to US17/500,942 priority Critical patent/US11988210B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/007—General arrangements of parts; Frames and supporting elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F04C18/0223—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving with symmetrical double wraps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/008—Hermetic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/02—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0021—Systems for the equilibration of forces acting on the pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F04C29/045—Heating; Cooling; Heat insulation of the electric motor in hermetic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/60—Shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/807—Balance weight, counterweight
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/005—Axial sealings for working fluid

Definitions

  • the invention relates to the field of vacuum pumps, in particular to a dry double-scroll vacuum pump.
  • Dry-type oil-free scroll vacuum pumps also known as scroll dry pumps, scroll vacuum pumps, and scroll pumps, are clean and oil-free vacuum acquisition equipment with few moving parts, good sealing performance, and compact overall structure.
  • the advantages are widely used in the production and manufacturing of emerging industries such as thin film, analysis and testing, semiconductor manufacturing and biomedicine.
  • the production and manufacturing of the above-mentioned new industries put forward new requirements and challenges for the structural design and optimization of vacuum pumps.
  • the technical problem to be solved by the present invention is to provide a dry double-scroll vacuum pump, which improves the pumping performance, complete machine sealing and heat resistance of the dry-type oil-free scroll vacuum pump, and has a highly integrated design, high efficiency and energy saving, and compactness.
  • a dry double scroll vacuum pump including a drive assembly and an upper cover located above the drive assembly, the drive assembly includes an output shaft, the output shaft is A moving disc is set eccentrically.
  • the side of the moving plate facing the upper cover is provided with two sets of symmetrical first scroll teeth; the lower end of the upper cover is provided with a fixed plate, and the fixed plate is provided with a one-to-one correspondence with the first scroll teeth
  • the second scroll tooth, the first scroll tooth and the second scroll tooth mesh to form a compression cavity; the upper cover is also provided with an air inlet and an air outlet corresponding to the compression cavity.
  • the tooth tops of the first scroll tooth and the second scroll tooth are respectively provided with a sealing groove, and an elastic sealing material is arranged in the sealing groove, and the first scroll tooth and the fixed plate are extruded and sealed, The second scroll tooth and the movable plate are extruded and sealed.
  • the drive assembly includes a housing, an upper end cover and a lower end cover, and the output shaft passes through the upper end cover and the lower end cover, and is respectively rotatably and movably connected with the upper end cover and the lower end cover. Sealing components are respectively arranged between the output shaft and the upper end cover and the lower end cover.
  • a number of counterweights for balancing the moving plate are distributed on the output shaft to balance the torque generated when the eccentrically arranged moving plate rotates and improve the overall stability of the vacuum pump.
  • it also includes at least one set of anti-rotation components arranged between the movable disk and the drive component or the fixed disk.
  • the anti-rotation assembly includes a limit shaft, and one end of the limit shaft is fixedly connected to the movable plate.
  • the drive assembly or the fixed plate is provided with a guide groove corresponding to the free end of the limit shaft and used to accommodate the free end of the limit shaft and restrict the movement of the free end of the limit shaft.
  • the anti-rotation assembly includes a limit shaft, two ends of the limit shaft are respectively provided with eccentrically arranged connecting posts, one of the connecting posts is rotatably connected with the moving disc, and the other connecting post is connected with the drive assembly or Fixed plate rotating movable connection.
  • the anti-rotation component is used to restrict the movement of the movable plate relative to the fixed plate and the drive assembly to ensure that the movable plate swings relative to the fixed plate, but cannot rotate relative to the center.
  • a first cooling cavity is provided in the fixed plate; a bottom cover is connected to the lower end of the driving assembly, and a second cooling cavity is provided in the bottom cover.
  • the first cooling cavity and the second cooling cavity are communicated through a cooling channel to form a cooling system.
  • the cooling circulation system also includes a liquid inlet and a liquid outlet.
  • At least two sets of cooling channels are arranged between the first cooling cavity and the second cooling cavity, and the cooling channels are arranged closely to the drive assembly and are evenly distributed circumferentially around the drive assembly.
  • liquid inlet-the first cooling cavity-the cooling channel-the second cooling cavity-the liquid outlet are connected in sequence.
  • the cooling liquid enters through the liquid inlet, enters the first cooling cavity through the cooling channel, enters the second cooling cavity through another cooling channel, and is finally discharged from the liquid outlet to form a water circulation, which is used for the fixed plate and drive
  • the components are cooled.
  • the cooling water internal circulation channel design can effectively take away the heat, reduce the thermal deformation of the scroll teeth, and improve the vacuum efficiency.
  • Figure 1 is a perspective view of the dry double scroll vacuum pump of this embodiment
  • Figure 2 is a full cross-sectional view of the dry double scroll vacuum pump of this embodiment
  • Figure 3 is a perspective view of the fixed plate in the dry double scroll vacuum pump of this embodiment
  • Figure 5 is a perspective view of the moving disk of the dry double scroll vacuum pump of this embodiment.
  • Figure 6 is a bottom view of the moving disk of the dry double scroll vacuum pump of this embodiment.
  • Figure 7 is a schematic diagram of the upper end cover in the dry double scroll vacuum pump of this embodiment.
  • Figure 8 is a top view of the shell of the dry double scroll vacuum pump of this embodiment.
  • Figure 9 is a perspective view of the shaft seal in the dry double scroll vacuum pump of this embodiment.
  • Figure 10 is a schematic diagram of the bottom cover in the dry double scroll vacuum pump of this embodiment.
  • a dry double-scroll vacuum pump includes a drive assembly and an upper cover located above the drive assembly.
  • the drive assembly includes an output shaft 16, and the output shaft 16 is eccentrically arranged with Moving plate 6.
  • a number of counterweights 14 for balancing the moving disc 6 are distributed on the output shaft 16 to balance the torque generated when the eccentrically arranged moving disc 6 rotates and improve the overall stability of the vacuum pump.
  • the drive assembly includes a housing 8, an upper end cover 7 and a lower end cover 11, and the rotor 9 and stator 10 of the motor are arranged in the housing 8.
  • the output shaft 16 passes through the upper end cover 7 and the lower end cover 11, and is rotatably connected with the upper end cover 7 and the lower end cover 11, respectively.
  • a sealing assembly is provided between the output shaft 16 and the upper end cover 7 and the lower end cover 11, and the sealing assembly includes a shaft arranged between the output shaft 16 and the upper end cover 7.
  • the seal 18 has a plurality of sealing strips 19 distributed on the outer edge of the shaft seal 18.
  • the side of the moving disk 6 facing the upper cover is provided with two sets of first scroll teeth 24 with symmetrical centers.
  • the lower end of the upper cover is provided with a fixed plate 4, and the fixed plate 4 is provided with second scroll teeth 23 corresponding to the first scroll teeth 24 one-to-one, the first scroll teeth 24 and the second scroll teeth 24
  • the tops of the scroll teeth 23 are respectively provided with a sealing groove 21, and an elastic sealing material is arranged in the sealing groove 21, the first scroll teeth 24 and the fixed plate 4 are extruded and sealed, and the second scroll teeth 23 and the movable plate 6 are squeezed and sealed.
  • the first scroll teeth 24 and the second scroll teeth 23 mesh to form a compression cavity.
  • the upper cover is also provided with an air inlet 5 and an air outlet 1 corresponding to the compression chamber.
  • the scroll teeth 24 and the second scroll teeth 23 During the vacuuming operation, driven by the first scroll teeth 24 and the second scroll teeth 23, gas enters from the air inlet 5 and is discharged from the air outlet 1 through the compression chamber.
  • the two sets of one-to-one correspondence of the first scroll teeth 24 and the second scroll teeth 23 form a double scroll structure, which increases the suction volume and increases the vacuum rate. Under the premise of the same vacuum rate, the scroll can be reduced The relative sliding speed of the teeth.
  • the symmetrically arranged scroll teeth make the movable scroll meet the state of static balance, reduce the rotational inertia force and gas pressure, and improve the stable performance of the running vacuum pump.
  • the anti-rotation component 22 includes a limit shaft, and the setting form of the limit shaft can be different. It is specifically used to limit the movement of the movable plate 6 relative to the fixed plate 4 and the drive assembly to ensure that the movable plate 6 can be relative to the fixed plate 4 Swing without being able to rotate relative to the center.
  • the structure and working principle of the limit shaft are described in two different forms below (the specific structure of the limit shaft is not shown in the drawings): 1.
  • One end of the limit shaft is fixedly connected to the moving plate 6
  • the drive assembly or fixed plate 4 is provided with a guide groove corresponding to the free end of the limit shaft and used to accommodate the free end of the limit shaft and restrict the movement of the free end of the limit shaft.
  • the anti-rotation component 22 includes a limit shaft, and two ends of the limit shaft are respectively provided with eccentrically arranged connecting columns, one of which is rotatably connected to the moving plate 6 and the other connecting column is connected to the drive assembly Or the fixed plate 4 rotates and connects.
  • the corresponding moving plate 6 is provided with a connecting hole 25 corresponding to the mounting post
  • the driving assembly or fixed plate 4 is also provided with a connecting hole 25 corresponding to the mounting post.
  • a first cooling cavity 3 is provided in the fixed plate 4, and a cover plate 2 for sealing the first cooling cavity 3 is provided on the fixed plate 4.
  • the lower end of the drive assembly is connected with a bottom cover 12, the bottom cover 12 is provided with a second cooling cavity 13, and the bottom cover 12 is provided with a second cooling cavity 13 for sealing ⁇ 2.
  • the first cooling cavity 3 and the second cooling cavity 13 are communicated with each other through a cooling channel 27 to form a cooling system.
  • the cooling circulation system also includes a liquid inlet 29 and a liquid outlet 30. At least two sets of cooling channels 27 are provided between the first cooling cavity 3 and the second cooling cavity 13.
  • the cooling channels 27 are arranged closely to the drive assembly and are evenly distributed around the drive assembly.
  • the liquid inlet 29-the first cooling cavity 3-the cooling channel 27-the second cooling cavity 13-the liquid outlet 30 are connected in sequence.
  • the cooling liquid enters through the liquid inlet 29, enters the first cooling cavity 3 through the cooling channel 27, enters the second cooling cavity 13 through another cooling channel 27, and is finally discharged from the liquid outlet 30, forming a water circulation , Cool the fixed plate 4 and the drive assembly.
  • the cooling water internal circulation channel design can effectively take away the heat, reduce the thermal deformation of the scroll teeth, and improve the vacuum efficiency.
  • the above-mentioned dry-type double scroll vacuum pump improves the pumping performance, complete machine sealing and heat resistance of the dry-type oil-free scroll vacuum pump.
  • the design is highly integrated, highly efficient and energy-saving, simple and compact.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)

Abstract

一种干式双涡旋真空泵，包括驱动组件及位于驱动组件上方的上盖，驱动组件包括输出轴（16），输出轴（16）上偏心设置有动盘（6）；动盘（6）面向上盖的一侧设有两组中心对称的第一涡旋齿（24）；上盖的下端设有定盘（4），定盘（4）上设有与第一涡旋齿（24）一一对应的第二涡旋齿（23），第一涡旋齿（24）和第二涡旋齿（23）啮合形成压缩腔；上盖还设有与压缩腔对应的进气口（5）和出气口（1）。该干式双涡旋真空泵的抽气性能、整机密封和耐热性显著提升，设计高度集成、高效节能、简洁紧凑。

Description

一种干式双涡旋真空泵 技术领域
本发明涉及真空泵领域，尤其涉及一种干式双涡旋真空泵。
背景技术
干式无油涡旋真空泵，又称为称涡旋干泵、涡旋真空泵、涡旋泵，是一种清洁无油的真空获得设备，具有运动零部件少、密封性能良好、整体结构紧凑等优点，广泛应用于薄膜、分析测试、半导体制造及生物医疗等新兴行业的生产制造中，同时上述新型行业的生产制造业对对真空泵的结构设计和优化提出了新的要求与挑战。
为了适应上述新兴产业的生产制造要求，如何优化设计理论、提高抽气性能、改善整机可靠性，成为当前真空干泵发展迫切需要解决的问题。如何在在兼顾干式无油涡旋真空泵原有优点的前提下，提升其密封性、热平衡性能以及抽真空速率，是目前干式无油涡旋真空泵研究的主要方向。
发明内容
本发明要解决的技术问题是提供一种干式双涡旋真空泵，提升干式无油涡旋真空泵的抽气性能、整机密封和耐热性，设计高度集成、高效节能、简洁紧凑。
为了解决上述技术问题，本发明提供的技术方案如下：一种干式双涡旋真空泵，包括驱动组件及位于驱动组件上方的上盖，所述的驱动组件包括输出轴，所述的输出轴上偏心设置有动盘。所述动盘面向上盖的一侧设有两组中心对称的第一涡旋齿；所述上盖的下端设有定盘，所述的定盘上设有与第一涡旋齿一一对应的第二涡旋齿，所述的第一涡旋齿和第二涡旋齿啮合形成压缩腔；所述的上盖还设有与压缩腔对应的进气口和出气口。
进行抽真空操作时，在第一涡旋齿和第二涡旋齿的驱动下，气体从进气口进入，经由压缩腔从出气口排出。两组一一对应的第一涡旋齿和第二涡旋齿构 成双涡旋结构，增大了吸气容积，提高抽真空速率，在相同抽真空速率的前提下，可以降低涡旋齿的相对滑动速度。另外，对称设置的涡旋齿使得动涡旋盘满足静平衡状态，减小旋转惯性力和气体压力，提高运转真空泵平稳性能。
作为优选，所述第一涡旋齿和第二涡旋齿的齿顶分别设有密封槽，并在密封槽内设有弹性密封材料，所述第一涡旋齿与定盘挤压密封，所述的第二涡旋齿与动盘挤压密封。
作为优选，所述的驱动组件包括壳体、上端盖和下端盖，所述的输出轴穿过上端盖和下端盖，并与上端盖和下端盖分别旋转活动连接。所述的输出轴与上端盖和下端盖之间分别设有密封组件。
作为优选，所述的输出轴上分布有若干用于平衡动盘的配重块，平衡偏心设置的动盘转动时产生的转矩，提高真空泵整体的稳定性。
作为优选，还包括至少一组设置在动盘与驱动组件或定盘之间的防自转组件。
作为优选，所述的防自转组件包括限位轴，所述限位轴的一端与动盘固定连接。所述的驱动组件或定盘上设有与限位轴自由端对应，用于容纳限位轴自由端并限制限位轴自由端运动的导向槽。
作为优选，所述的防自转组件包括限位轴，所述限位轴的两端分别设有偏心设置的连接柱，其中一个连接柱与动盘旋转活动连接，另一个连接柱与驱动组件或定盘旋转活动连接。
防自转组件用于限制动盘相对于定盘及驱动组件的运动，以确保动盘相对于定盘摆动，而无法相对于中心旋转。
作为优选，所述的定盘内设有第一冷却腔；所述驱动组件的下端连接有底盖，所述底盖内设有第二冷却腔。所述的第一冷却腔和第二冷却腔之间通过冷却通道连通并形成冷却系统。所述的冷却循环系统还包括进液口和排液口。
作为优选，所述的第一冷却腔和第二冷却腔之间设有至少两组冷却通道，所述的冷却通道紧贴驱动组件设置，并围绕驱动组件周向均布。
作为优选，所述的进液口‐第一冷却腔‐冷却通道‐第二冷却腔‐排液口依次连通。
冷却液经过所述的进液口进入，并通过冷却通道进入第一冷却腔，再经过另一冷却通道进入第二冷却腔，并最后从出液口排出，形成一个水循环，对定盘和驱动组件进行冷却。冷却水内循环通道设计，有效带走热量，减小涡旋齿热变形，提高抽真空效率。
附图说明
图1为本实施例干式双涡旋真空泵的透视图；
图2为本实施例干式双涡旋真空泵的全剖视图；
图3为本实施例干式双涡旋真空泵中定盘的透视图；
图4为本实施例干式双涡旋真空泵中第一冷却腔的示意图；
图5为本实施例干式双涡旋真空泵中动盘的透视图；
图6为本实施例干式双涡旋真空泵中动盘的底部视图；
图7为本实施例干式双涡旋真空泵中上端盖的示意图；
图8为本实施例干式双涡旋真空泵中壳体的俯视图；
图9为本实施例干式双涡旋真空泵中轴封件的透视图；
图10为本实施例干式双涡旋真空泵中底盖的示意图。
具体实施方式
为了使本发明的目的、技术方案及优点更加清楚明白，以下结合附图及实施例，对本发明进行进一步详细说明。应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。
实施例
如图1和图2所示，一种干式双涡旋真空泵，包括驱动组件及位于驱动组件上方的上盖，所述的驱动组件包括输出轴16，所述的输出轴16上偏心设置有动盘6。所述的输出轴16上分布有若干用于平衡动盘6的配重块14，平衡偏心设置的动盘6转动时产生的转矩，提高真空泵整体的稳定性。
如图2所示，所述的驱动组件包括壳体8、上端盖7和下端盖11，电机的转子9和定子10设置在壳体8内。所述的输出轴16穿过上端盖7和下端盖11，并与上端盖7和下端盖11分别旋转活动连接。如图2和图9所示，所述的输出轴16与上端盖7和下端盖11之间分别设有密封组件，所述的密封组件包括设置在输出轴16与上端盖7之间的轴封件18，所述轴封件18的外缘分布有若干密封条19。
如图3和图5所示，所述动盘6面向上盖的一侧设有两组中心对称的第一涡旋齿24。所述上盖的下端设有定盘4，所述的定盘4上设有与第一涡旋齿24一一对应的第二涡旋齿23，所述第一涡旋齿24和第二涡旋齿23的齿顶分别设有密封槽21，并在密封槽21内设有弹性密封材料，所述第一涡旋齿24与定盘4挤压密封，所述的第二涡旋齿23与动盘6挤压密封。所述的第一涡旋齿24和第二涡旋齿23啮合形成压缩腔。如图1和图2所示，所述的上盖还设有与压缩腔对应的进气口5和出气口1。
进行抽真空操作时，在第一涡旋齿24和第二涡旋齿23的驱动下，气体从进气口5进入，经由压缩腔从出气口1排出。两组一一对应的第一涡旋齿24和第二涡旋齿23构成双涡旋结构，增大了吸气容积，提高抽真空速率，在相同抽真空速率的前提下，可以降低涡旋齿的相对滑动速度。另外，对称设置的涡旋齿使得动涡旋盘满足静平衡状态，减小旋转惯性力和气体压力，提高运转真空泵平稳性能。
进一步的，如图2所示，还包括至少一组设置在动盘6与驱动组件或定盘4之间的防自转组件22。所述的防自转组件22包括限位轴，限位轴的设置形式可以不同，具体用于限制动盘6相对于定盘4及驱动组件的运动，以确保动盘6可以相对于定盘4摆动，而无法相对于中心旋转。
下面以两种不同的形式来对限位轴的结构和工作原理做具体说明(附图中未示出限位轴的具体结构)：1.所述限位轴的一端与动盘6固定连接；所述的驱动组件或定盘4上设有与限位轴自由端对应，用于容纳限位轴自由端并限制限位轴自由端运动的导向槽。2.所述的防自转组件22包括限位轴，所述限位轴的 两端分别设有偏心设置的连接柱，其中一个连接柱与动盘6旋转活动连接，另一个连接柱与驱动组件或定盘4旋转活动连接。如图6和图7所示，对应的动盘6上设有与安装柱对应的连接孔25，驱动组件或定盘4上也设有与安装柱对应的连接孔25。
如图2、图3和图4所示，进一步的，所述的定盘4内设有第一冷却腔3，并在定盘4上设有用于密封第一冷却腔3的盖板2。如图2和图10所示，所述驱动组件的下端连接有底盖12，所述底盖12内设有第二冷却腔13，并在底盖12上设有用于密封第二冷却腔13的盖板2。如图2和图8所示，所述的第一冷却腔3和第二冷却腔13之间通过冷却通道27连通并形成冷却系统。所述的冷却循环系统还包括进液口29和排液口30。所述的第一冷却腔3和第二冷却腔13之间设有至少两组冷却通道27，所述的冷却通道27紧贴驱动组件设置，并围绕驱动组件周向均布。所述的进液口29‐第一冷却腔3‐冷却通道27‐第二冷却腔13‐排液口30依次连通。
冷却液经过所述的进液口29进入，并通过冷却通道27进入第一冷却腔3，再经过另一冷却通道27进入第二冷却腔13，并最后从出液口30排出，形成一个水循环，对定盘4和驱动组件进行冷却。冷却水内循环通道设计，有效带走热量，减小涡旋齿热变形，提高抽真空效率。
以上所述的干式双涡旋真空泵，提升干式无油涡旋真空泵的抽气性能、整机密封和耐热性，设计高度集成、高效节能、简洁紧凑。
总之，以上所述仅为本发明的较佳实施例而已，并不用以限制本发明，凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等，均应包含在本发明的保护范围之内。

Claims (10)

  1. 一种干式双涡旋真空泵，其特征在于：包括驱动组件及位于驱动组件上方的上盖，所述的驱动组件包括输出轴(16)，所述的输出轴(16)上偏心设置有动盘(6)；所述动盘(6)面向上盖的一侧设有两组中心对称的第一涡旋齿(24)；
    所述上盖的下端设有定盘(4)，所述的定盘(4)上设有与第一涡旋齿(24)一一对应的第二涡旋齿(23)，所述的第一涡旋齿(24)和第二涡旋齿(23)啮合形成压缩腔；所述的上盖还设有与压缩腔对应的进气口(5)和出气口(1)。
  2. 根据权利要求1所述的干式双涡旋真空泵，其特征在于：所述第一涡旋齿(24)和第二涡旋齿(23)的齿顶分别设有密封槽(21)，并在密封槽(21)内设有弹性密封材料，所述第一涡旋齿(24)与定盘(4)挤压密封，所述的第二涡旋齿(23)与动盘(6)挤压密封。
  3. 根据权利要求1所述的干式双涡旋真空泵，其特征在于：所述的驱动组件包括壳体(8)、上端盖(7)和下端盖(11)，所述的输出轴(16)穿过上端盖(7)和下端盖(11)，并与上端盖(7)和下端盖(11)分别旋转活动连接；所述的输出轴(16)与上端盖(7)和下端盖(11)之间分别设有密封组件。
  4. 根据权利要求1所述的干式双涡旋真空泵，其特征在于：所述的输出轴(16)上分布有若干用于平衡动盘(6)的配重块(14)。
  5. 根据权利要求1‐4中任一项所述的干式双涡旋真空泵，其特征在于：还包括至少一组设置在动盘(6)与驱动组件或定盘(4)之间的防自转组件(22)。
  6. 根据权利要求5所述的干式双涡旋真空泵，其特征在于：所述的防自转组件(22)包括限位轴，所述限位轴的一端与动盘(6)固定连接；所述的驱动组件或定盘(4)上设有与限位轴自由端对应，用于容纳限位轴自由端并限制限位轴自由端运动的导向槽。
  7. 根据权利要求5所述的干式双涡旋真空泵，其特征在于：所述的防自转组件(22)包括限位轴，所述限位轴的两端分别设有偏心设置的连接柱，其中一个连接柱与动盘(6)旋转活动连接，另一个连接柱与驱动组件或定盘(4)旋转活动连接。
  8. 根据权利要求1‐4、6、7中任一项所述的干式双涡旋真空泵，其特征在于：所述的定盘(4)内设有第一冷却腔(3)；所述驱动组件的下端连接有底盖(12)，所述底盖(12)内设有第二冷却腔(13)；所述的第一冷却腔(3)和第二冷却腔(13)之间通过冷却通道(27)连通并形成冷却系统；所述的冷却循环系统还包括进液口(29)和排液口(30)。
  9. 根据权利要求8所述的干式双涡旋真空泵，其特征在于：所述的第一冷却腔(3)和第二冷却腔(13)之间设有至少两组冷却通道(27)，所述的冷却通道(27)紧贴驱动组件设置，并围绕驱动组件周向均布。
  10. 根据权利要求8所述的干式双涡旋真空泵，其特征在于：所述的进液口(29)‐第一冷却腔(3)‐冷却通道(27)‐第二冷却腔(13)‐排液口(30)依次连通。
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JP2024537931A (ja) * 2021-06-01 2024-10-17 ハンオン システムズ 圧縮機で圧縮される流体、特に、冷媒を熱媒体流体に冷却する装置
EP4348051A4 (en) * 2021-06-01 2025-04-23 Hanon Systems DEVICE FOR COOLING A FLUID TO BE COMPRESSED IN A COMPRESSOR AND COMPRESSOR COMPRISING THE DEVICE

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