WO2020224006A1 - 一种螺旋线式质谱仪连续性变压取样装置及方法 - Google Patents

一种螺旋线式质谱仪连续性变压取样装置及方法 Download PDF

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WO2020224006A1
WO2020224006A1 PCT/CN2019/087705 CN2019087705W WO2020224006A1 WO 2020224006 A1 WO2020224006 A1 WO 2020224006A1 CN 2019087705 W CN2019087705 W CN 2019087705W WO 2020224006 A1 WO2020224006 A1 WO 2020224006A1
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mass spectrometer
gas
inner cylinder
pressure
spiral
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French (fr)
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韩峰
张世伟
张志军
岳泰
李津铭
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Northeastern University China
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Northeastern University China
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0409—Sample holders or containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0422—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for gaseous samples

Definitions

  • the invention belongs to the technical field of gas analysis, and in particular relates to a continuous variable pressure sampling device and method for a spiral mass spectrometer.
  • Mass spectrometer also known as mass spectrometer, is an instrument that analyzes and detects different components in gas. It is a type of material composition that separates and detects material composition based on the principle that charged particles can be deflected in an electromagnetic field, according to the difference in mass of material atoms, molecules or molecular fragments instrument. Mass spectrometer measurement technology has been widely used in pharmaceuticals, food, medicine, geology, steel production, vacuum system leak detection, environmental simulation, manned aerospace and other industrial fields and scientific and technological research, which is important for the development of modern technology and the construction of national economy Both play an important role.
  • the analysis chamber of the mass spectrometer must work in a specific high vacuum state, and the initial pressure of the analyzed gas is often close to the uncertain value of the ambient atmospheric pressure; especially the mass spectrometer applied to the gas composition monitoring in various vacuum equipment is The pressure of the measured gas may change from normal pressure to high vacuum state. Therefore, the mass spectrometer must be equipped with a gas sampling device so that the gases at different pressures can be decompressed and transported to the analysis chamber in a high vacuum state under the premise of keeping the composition unchanged.
  • the present invention provides a continuous variable pressure sampling device and method for a spiral mass spectrometer.
  • the present invention can continuously sample under the condition of gas pressure changes, which fills the gas analysis industry’s expertise in this aspect. It is blank, and it is also applicable to the work of continuous sampling in the case of gas pressure changes in other industries.
  • the technical solution is as follows:
  • a continuous variable pressure sampling device for a spiral mass spectrometer comprising a cylindrical shell and a mass spectrometer system.
  • the cylindrical shell is slidably installed with an inner cylinder, and the outer surface of the inner cylinder is provided with a regular cross-section spiral line for easy processing Linear groove, and the helical linear groove gradually increases the cross-sectional area from the inlet end to the outlet end, the outer surface of the inner cylinder closely fits the inner wall surface of the cylindrical shell, and the middle of the inner wall surface of the cylindrical shell
  • An annular air inlet chamber is provided on the circumference, and the air inlet chamber penetrates the cylindrical shell and is connected with the air inlet pipe and the air inlet valve.
  • the air outlet end of the spiral linear groove is provided with an air outlet passage that penetrates the right wall of the inner tube ,
  • the right shell wall of the cylindrical shell is provided with a connecting hole, and the connecting hole is connected to one end of the pipeline, and the other end of the pipeline passes through the right shell wall of the cylindrical shell to connect to the mass spectrometer system, and the left end of the inner tube is fixedly installed
  • the fixing frame is fixed with a nut in the middle of the fixing frame.
  • the fixing frame is provided with a guide hole, the left end of the cylindrical shell is fixed with a mounting flange, the right wall of the flange is fixed with a guide rod, and the guide rod is slidably installed in the guide hole, so
  • the nut is equipped with a lead screw, and the other end of the lead screw penetrates the left shell wall of the cylindrical housing and is equipped with the output end of the reducer, the input end of the reducer is equipped with the output end of the motor, and the cylindrical housing
  • a throttle valve and a vacuum pump are installed in the pipeline between the mass spectrometry system and a vacuum gauge is installed in the pipeline between the vacuum pump and the throttle valve.
  • the thread surface length of the lead screw is slightly longer than the arrangement length of the spiral linear grooves, and the length of the inner cylinder is equal to half the length of the cylindrical shell.
  • the surfaces of the outer inner cylinder at both ends of the spiral linear groove on the inner cylinder are provided with closed grooves, and a rubber sealing ring is clamped in the closed groove.
  • the upper end of the flange is provided with an exhaust hole.
  • a continuous variable pressure sampling method for a spiral mass spectrometer adopts the described continuous variable pressure sampling device for a spiral mass spectrometer, and includes the following steps:
  • Step 1 Close the intake valve, open the throttle valve, and turn on the vacuum pump to vacuum.
  • the gas pressure in the gas path gradually drops to the maximum working pressure of the mass spectrometer, start the vacuum pump in the mass spectrometer system to speed up the vacuuming speed.
  • the gas path for analyzing gas components is cleaned until the vacuum reaches the optimal working pressure of the mass spectrometer;
  • Step 2 Start the motor, move the inner cylinder to the position closest to the mass spectrometer, make the inlet chamber on the inner wall of the cylindrical shell communicate with the smallest cross-section of the inlet end of the spiral groove, open the inlet valve, and the gas to be analyzed Enter the gas passage;
  • Step 3 Control the motor according to the feedback of the vacuum degree measured by the vacuum gauge, and gradually move the inner cylinder away from the mass spectrometer, so that the length of the gas path of the spiral line groove connected with the inlet chamber of the cylindrical shell gradually Decrease, the gas flow gradually increases, and the gas flow and vacuum in the channel meet the requirements of the mass spectrometer;
  • Step 4 When the pressure of the gas to be analyzed in the intake pipe changes, the motor is controlled by feedback according to the vacuum degree measured by the vacuum gauge.
  • the sample gas pressure When the sample gas pressure is high, move the inner cylinder toward the mass spectrometer to increase the gas path and reduce the pressure , Return to the working pressure of the mass spectrometer; when the sampling gas pressure is low, move the inner cylinder away from the mass spectrometer to shorten the gas path, increase the pressure, and return to the working pressure of the mass spectrometer to always ensure the sampling gas collected in the channel It has stable pressure and flow to ensure that the vacuum is in line with the working vacuum of the mass spectrometer;
  • This working process is a continuous process, and this equipment can continuously detect gas components online.
  • the present invention can enable the analyzed gas to continuously flow into the sampling system and update in time, thereby realizing the function of continuous gas sampling and continuous online detection of the analyzed gas Capability, fast response time and high sensitivity, overcome the shortcomings of intermittent gas sampling.
  • variable cross-section and variable length gas sampling channel structure proposed by the present invention can flexibly adjust the conductance of the gas sampling channel in a large range.
  • the position of the inner cylinder can be adjusted by feedback to make the gas sampling channel have proper conductance, so as to always ensure a stable gas pressure and flow at the outlet of the sampling channel, and ensure that the mass spectrometer is in good condition Working status.
  • the invention breaks through the limitation that the traditional online sampling method can only be applied to a single pressure, and can work normally under the condition of a wide range of gas pressure changes.
  • the present invention turns a very long gas pipeline into a gas passage engraved on the outer wall of the cylinder in a spiral curve, which greatly reduces the volume of the equipment and the occupied space; the two ends of the spiral groove in the inner cylinder are respectively sealed
  • the outer wall of the inner cylinder is completely attached to the inner wall of the cylindrical shell, which can ensure the airtightness of the gas sampling channel and reduce the entry of external air into the sampling channel, thereby improving the measurement accuracy of the sampling device.
  • variable cross-section and variable-length spiral groove-shaped gas channel proposed in the present invention can be designed and processed in sections according to actual working conditions, and its cross-sectional area and length can be designed and processed, thereby changing the relationship between the channel flow conductance and the moving position of the inner cylinder to make it It is suitable for practical applications with different pressure sections and different flow requirements, and can specifically improve the adjustment accuracy of a certain pressure section. Therefore, the gas sampling device proposed by the present invention has a wider application range and higher measurement accuracy.
  • Fig. 1 is a structural principle diagram of a continuous variable pressure sampling device for a spiral mass spectrometer of the present invention
  • Figure 2 is a schematic diagram of the front view of the inner cylinder of the present invention.
  • Fig. 3 is a schematic diagram of the left side view of the inner cylinder of the present invention.
  • the present invention provides a continuous variable pressure sampling device for a spiral mass spectrometer, which includes a cylindrical shell 6 and a mass spectrometer system 17.
  • the cylindrical shell 6 is the external installation infrastructure of the device.
  • the mass spectrometry system 17 is a mass spectrometry analysis device for the gas to be detected.
  • the inner cylinder 11 is slidably installed inside the cylindrical 6 shell, and the outer surface of the inner cylinder 11 is provided with a regular cross-section spiral line for easy processing
  • the linear groove 12 provides a foundation for the spiral linear groove 12.
  • the relative position of the spiral linear groove 12 and the air inlet chamber 9 is adjusted by moving, and the original linear linear groove is spirally arranged , Reduce the occupied space, and the helical linear groove 12 gradually increases the cross-sectional area from the inlet end to the outlet end.
  • the outer surface of the inner cylinder 11 closely adheres to the inner wall surface of the cylindrical shell 6 to achieve effective combination, and the spiral linear groove 12 forms a closed gas passage.
  • the inner wall surface of the cylindrical shell 6 has a middle circumference
  • a ring-shaped air inlet chamber 9 is opened on the upper part, which cooperates with the spiral linear groove 12 to control the cross-sectional area of the air inlet, so as to achieve effective coverage of the spiral linear groove 12 on the spiral inner cylinder 11.
  • the chamber 9 penetrates the cylindrical shell 6 and is connected to the inlet pipe 22 and the inlet valve 10, and the gas is controllably introduced into the device.
  • the outlet end of the spiral linear groove 12 is provided with a hole penetrating the right cylinder wall of the inner cylinder 11
  • the air outlet passage 13 connects the spiral linear groove 12 to the closed chamber formed by the cylindrical shell 6 and the right 7 end of the inner cylinder 11.
  • the right shell wall of the cylindrical shell 6 is provided with a connecting hole, and the connecting hole is connected to the pipeline
  • One end of the tube 22 guides the gas to the mass spectrometer system 17, while the other end of the pipeline 22 passes through the right shell wall of the cylindrical shell 6 and then connects to the mass spectrometer system 17, and the introduced gas is subjected to mass spectrometry analysis.
  • the left end of the inner cylinder 11 is fixedly installed
  • the fixing frame 20 provides a foundation for installation and opening of the nut 8 and the guide hole 19, and the middle part of the fixing frame 20 is welded with the nut 8 to cooperate with the screw 5 to realize power transmission and control the sliding of the inner cylinder 11.
  • the fixing frame 20 is provided with a guide Hole 19 cooperates with the guide rod 7 to limit the rotation of the inner cylinder 11, so as to avoid synchronous rotation with the lead screw 5, resulting in inability to move.
  • the left end of the cylindrical housing 6 is fixed with the mounting flange 4, and the cylindrical housing 6 is fixed Closed to form a closed structure, a guide rod 7 is fixedly installed on the right wall of the flange 4, and used with the fixed guide hole 19, and the guide rod 7 is slidably installed in the guide hole 19, and the nut 8 is equipped with a screw 5 to introduce power Inside the device, and the other end of the lead screw 5 penetrates the left shell wall of the cylindrical shell 6 and is equipped with the output end of the reducer 2 to reduce the speed of the motor output, thereby ensuring the stability and accuracy of the device control.
  • the embodiment adopts a fixed gear connection.
  • the input end of the reducer 2 is equipped with the output end of the motor 1 to provide power for the device.
  • the pipeline 22 between the cylindrical housing 6 and the mass spectrometry system 17 is sequentially installed with a throttle valve 15 and vacuum pump 18 to realize the control of the gas circuit and the internal
  • a vacuum gauge 16 is installed on the pipeline 22 between the vacuum pump 18 and the throttle valve 15 to monitor the vacuum degree in the device.
  • the thread surface length of the screw 5 is slightly longer than the arrangement length of the spiral linear groove 12, and the length of the inner cylinder 11 is equal to half the length of the cylindrical shell 6, so that the screw 5 can effectively pull the inner cylinder 11 Make adjustments while avoiding the lead screw 5 from falling off.
  • the surface of the outer inner cylinder 11 at both ends of the spiral linear groove 12 on the inner cylinder 11 is provided with a closed groove 21, and a rubber sealing ring 14 is clamped in the closed groove 21 to add an inner cylinder 11 and a cylindrical shell 6 Closeness of coordination.
  • the upper end of the flange 4 is provided with an exhaust hole 3 to adjust the pressure change generated during the movement of the inner cylinder 11 to avoid affecting the accuracy of the device.
  • a sampling method for a continuous variable pressure sampling device of a spiral mass spectrometer includes the following steps:
  • Step 1 Close the intake valve 10, open the throttle valve 15, and open the vacuum pump 18 to vacuum.
  • the gas pressure in the gas path gradually drops to the maximum working pressure of the mass spectrometer, start the vacuum pump 18 in the mass spectrometer system 17 to speed up the vacuum Speed, vacuuming also cleans the gas path for analyzing gas components until the vacuum reaches the optimal working pressure of the mass spectrometer;
  • Step 2 Start the electric motor 1, move the inner cylinder 11 to the position closest to the mass spectrometer, make the air inlet chamber 9 of the inner wall of the cylindrical shell 6 communicate with the minimum cross section of the air inlet end of the spiral linear groove 12, and open the air inlet Valve 10, the gas to be analyzed enters the gas path;
  • Step 3 According to the feedback control of the vacuum degree measured by the vacuum gauge 16, the inner cylinder 11 is gradually moved away from the mass spectrometer to make the spiral linear groove connected to the air inlet chamber 9 on the inner wall of the cylindrical housing 6
  • the length of the gas passage of 12 gradually decreases, and the gas flow gradually increases.
  • the gas flow and vacuum in the passage meet the requirements of the mass spectrometer;
  • Step 4 When the pressure of the gas to be analyzed in the intake pipe changes, the motor 1 is feedback-controlled according to the vacuum degree measured by the vacuum gauge 16.
  • the inner cylinder 11 When the sample gas pressure is high, the inner cylinder 11 is moved toward the mass spectrometer to increase the gas path. Reduce the pressure and return to the working pressure of the mass spectrometer; when the sample gas pressure is low, move the inner cylinder 11 away from the mass spectrometer to shorten the gas path, increase the pressure, and return to the working pressure of the mass spectrometer to always ensure collection in the channel
  • the sampled gas has a stable pressure and flow rate to ensure that the vacuum degree matches the working vacuum degree of the mass spectrometer;
  • This working process is a continuous process, and this equipment can continuously detect gas components online.

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  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
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Abstract

一种螺旋线式质谱仪连续性变压取样装置，包括圆筒形外壳（6）与质谱系统（17），外壳（6）内部滑动安装有外表面开设有螺旋线状线式槽（12）的内筒（11），螺旋线状线式槽（12）由进气端向出气端逐渐增加截面面积，内筒（11）外表面与圆筒形外壳（6）内壁面紧密贴合，圆筒形外壳（6）内壁面中部圆周上开设有环形的进气室（9），螺旋线状线式槽（12）出气端开设有贯穿内筒（11）近质谱系统（17）端筒壁的出气通路（13），经连接管路（22）穿透外壳（6）侧壁与质谱系统（17）连接，电动机（1）通过丝杠机构带动内筒（11）在外壳（6）内滑动，改变螺旋线状线式槽（12）的气路长度和截面面积，对大范围变压气体高精度取样分析。

Description

一种螺旋线式质谱仪连续性变压取样装置及方法 技术领域
本发明属于气体分析技术领域，尤其是涉及一种螺旋线式质谱仪连续性变压取样装置及方法。
背景技术
质谱仪又称质谱计，是分析检测气体中不同成分的仪器，它是根据带电粒子在电磁场中能够偏转的原理，按物质原子、分子或分子碎片的质量差异进行分离和检测物质组成的一类仪器。质谱仪测量技术现已大量应用于药品、食品、医学、地质、钢铁生产、真空系统检漏、环境模拟、载人航天等工业领域和科学技术研究中，对于现代科技的发展和国民经济的建设都起着重要的作用。
质谱仪的分析室必须工作在特定的高真空状态下，而被分析气体的初始压强常常是接近环境大气压力的不确定值；特别是应用于各种真空设备内气体成分监测的质谱仪，被测气体的压强更是可能从常压一直变化到高真空状态。因此，质谱仪必须配置有气体取样装置，以便将处于不同压强的气体在保持成分构成不发生变化的前提下减压输送至高真空状态的分析室。现有的气体取样装置(如膨胀法取样)工作方式大多是间歇作业的，不能对气体样品进行在线连续取样；而能够连续取样的气体取样装置(如针阀节流取样)通常只适用于测量单一固定气压的工况，难以对压力大范围变化的工况进行连续取样。例如采用针阀作为一种微调阀，可以调节气流量，但是限于其自身结构，可调节压力范围有限，且可调节精度不够高。目前，随着科学研究和工业生产技术水平的持续进步，对气体分析技术的要求也不断提高，在气体压力大范围变化条件下实现气体成分的高精度在线连续监测，已成为迫切的实际需求，现有的质谱仪气体取样方法与装置，无法满足在气体压力变化的情况下实现高精度连续取样的要求，制约了气体分析质谱仪的发展和应用，迫切需要一种全新的气体取样装置及方法。
发明概述
技术问题
问题的解决方案
技术解决方案
针对现有技术存在的问题，本发明提供一种螺旋线式质谱仪连续性变压取样装置及方法，本发明可以在气体压力变化的情况下连续取样，填补了气体分析行业在这一方面的空白，且对于其他行业中在气体压力变化的情况下连续取样的工作同样适用，其技术方案如下：
一种螺旋线式质谱仪连续性变压取样装置，包括圆筒形外壳与质谱系统，所述圆筒形外壳内部滑动安装内筒，而内筒外表面开设有便于加工的规则截面的螺旋线状线式槽，且螺旋线状线式槽由进气端向出气端逐渐增加截面面积，所述内筒外表面与圆筒形外壳内壁面紧密贴合，所述圆筒形外壳内壁面中部圆周上开设有环形的进气室，且进气室贯穿圆筒形外壳与进气管路和进气阀相连，所述螺旋线状线式槽出气端开设有贯穿内筒右筒壁的出气通路，所述圆筒形外壳右壳壁开设连接孔，且连接孔连接管路的一端，而管路的另一端穿过圆筒形外壳右壳壁后连接质谱系统，所述内筒左端固定安装固定架，且固定架中部焊接螺母，所述固定架开设有导向孔，所述圆筒形外壳左端固定安装法兰，法兰右壁面固定安装导向杆，且导向杆滑动安装导向孔内，所述螺母配装有丝杠，且丝杠另一端贯穿圆筒形外壳左壳壁后配装减速器的输出端，所述减速器的输入端配装电动机的输出端，所述圆筒形外壳与质谱系统之间的管路依次安装节流阀门与真空泵，所述真空泵上与节流阀门之间的管路安装真空规。
所述丝杠的螺纹表面长度略长于螺旋线状线式槽的排布长度，所述内筒长度等于圆筒形外壳一半长度。
所述内筒上螺旋线状线式槽两端外内筒的表面均开设有封闭槽，所述封闭槽内卡装橡胶密封圈。
所述法兰上端开设有排气孔。
一种螺旋线式质谱仪连续性变压取样方法，采用了所述的一种螺旋线式质谱仪连续性变压取样装置，包括如下步骤：
步骤1：关闭进气阀门，打开节流阀门，开启真空泵抽真空，气体通路内的气 体压力逐渐下降到质谱仪的最大工作压强时，启动质谱系统内真空泵，加快抽真空的速度，抽真空的同时也清洁了分析气体成分的气体通路，直至真空度达到质谱仪的最佳工作压强；
步骤2：启动电动机，将内筒移动至最靠近质谱仪位置，使圆筒形外壳内壁进气室与螺旋线状线式槽的进气端最小截面处相通，打开进气阀门，被分析气体进入气体通路；
步骤3：根据真空规测量到的真空度反馈控制电动机，将内筒逐渐向远离质谱仪方向移动，使与圆筒形外壳内壁进气室接通的螺旋线状线式槽的气体通路长度逐渐变小，气体流量逐渐增大，通道内气体流量和真空度满足质谱仪工作的要求；
步骤4：当进气管中被分析气体压力变化时，根据真空规测量到的真空度反馈控制电动机，当取样气体压力大时，往质谱仪的方向移动内筒，以增长气体通路，减小压力，恢复至质谱仪工作压力；当取样气体压力小时，往远离质谱仪的方向移动内筒，以减短气体通路，增大压力，恢复至质谱仪工作压力，始终保证通道内收集到的取样气体具有稳定的压力和流量，保证真空度符合质谱仪工作真空度；
此工作过程是连续性过程，此设备可以连续在线检测气体成分。
发明的有益效果
有益效果
与现有技术相比，本发明的有益效果是：
1、本发明通过流导可变的气体采样通道与真空泵的配合工作，可以使被分析气体能够持续流入采样系统，及时更新，从而实现了气体在线连续取样功能，具备了对分析气体连续在线检测能力，而且响应时间快，灵敏度高，克服了气体间歇采样的不足。
2、本发明提出的变截面、变长度的气体采样通道结构，配合可移动内筒，能够灵活地大范围调节气体采样通道的流导。当被分析气体的压力出现变化时，通过反馈调节内筒的位置，能够使气体采样通道具有合适的流导，从而始终保证在采样通道出口处具有稳定的气体压力和流量，保证质谱仪处于良好的工作 状态。本发明突破了传统在线采样方法只能适用于单一压力下的限制，能在气体压力大范围变化情况下正常工作。
3、本发明将很长的气体管路变成螺旋线状曲线刻制在圆筒外壁上的气体通路，大大减小了设备体积和占用空间；在内筒螺旋线式槽两端分别设置密封圈，利用内筒外壁完全贴合于圆筒形外壳内壁，能够确保气体采样通道的气密性，减少外部气体进入采样通道，从而提高采样装置的测量精度。
4、本发明提出的变截面变长度螺旋线式槽形气体通道，可以根据实际工况需要分段设计加工其截面面积和长度，从而改变通道流导随内筒移动位置的变化关系，使其适合于不同压力段和不同流量要求的实际应用场合，并能专门提高某一压力段的调节精度。因此，本发明提出的气体采样装置，适用范围更加广泛，测量精度更高。
对附图的简要说明
附图说明
图1为本发明的一种螺旋线式质谱仪连续性变压取样装置的结构原理图；
图2为本发明的内筒的主视结构示意图；
图3为本发明的内筒的左视结构示意图。
图中，1、电动机，2、减速器，3、排气孔，4、法兰，5、丝杠，6、圆筒形外壳，7、导向杆，8、螺母，9、进气室，10、进气阀，11、内筒，12、螺旋线状线式槽，13、出气通路，14、橡胶密封圈，15、截流阀门，16、真空规，17、质谱系统，18、真空泵，19、导向孔，20、固定架，21、封闭槽，22、管路。
发明实施例
本发明的实施方式
需要说明，本发明实施例中所有方向性指示(诸如上、下、左、右、前、后……)仅用于解释在某一特定姿态(如附图所示)下各部件之间的相对位置关系、运动情况等，如果该特定姿态发生改变时，则该方向性指示也相应地随之改变。
如图1至图3所示，本发明提供了一种螺旋线式质谱仪连续性变压取样装置，包括圆筒形外壳6与质谱系统17，圆筒形外壳6为装置的外部安装基础结构，同时 为内部结构提供保护，质谱系统17是对待检测气体进行质谱分析装置，所述圆筒形6外壳内部滑动安装内筒11，而内筒11外表面开设有便于加工的规则截面的螺旋线状线式槽12，为螺旋线状线式槽12提供开设基础，同时通过移动调节螺旋线状线式槽12与进气室9的相对位置，将原有的直线式线式槽进行螺旋设置，减小占用空间，且螺旋线状线式槽12由进气端向出气端逐渐增加截面面积，通过面积的持续性变化，及与进气室9相对位置的变化，实现对进气流量的控制，所述内筒11外表面与圆筒形外壳6内壁面紧密贴合，实现有效组合，配合螺旋线状线式槽12构成封闭的气体通路，所述圆筒形外壳6内壁面中部圆周上开设有环形的进气室9，配合螺旋线状线式槽12，控制进气口的截面面积，实现对螺旋在内筒11上的螺旋线状线式槽12的有效覆盖，且进气室9贯穿圆筒形外壳6与进气管路22和进气阀10相连，将气体可控的导入装置内，所述螺旋线状线式槽12出气端开设有贯穿内筒11右筒壁的出气通路13，将螺旋线状线式槽12连通圆筒形外壳6与内筒11右7端构成的封闭室，所述圆筒形外壳6右壳壁开设连接孔，且连接孔连接管路22的一端，将气体导向质谱系统17，而管路22的另一端穿过圆筒形外壳6右壳壁后连接质谱系统17，将导入的气体进行质谱分析，所述内筒11左端固定安装固定架20，为螺母8及导向孔19提供安装及开设基础，且固定架20中部焊接螺母8，配合丝杠5实现动力的传动，控制内筒11的滑动，所述固定架20开设有导向孔19，配合导向杆7对内筒11进行转动限位，避免随丝杠5进行同步转动，导致无法移动，所述圆筒形外壳6左端固定安装法兰4，对圆筒形外壳6进行封闭，构成封闭结构，法兰4右壁面固定安装导向杆7，配合固定导向孔19进行使用，且导向杆7滑动安装导向孔19内，所述螺母8配装有丝杠5，将动力导入装置内，且丝杠5另一端贯穿圆筒形外壳6左壳壁后配装减速器2的输出端，将电机输出的转速进行降速，继而保证装置控制的稳定性和精确性，同时本实施例采用齿轮固定连接，所述减速器2的输入端配装电动机1的输出端，为装置提供动力，所述圆筒形外壳6与质谱系统17之间的管路22依次安装节流阀门15与真空泵18，实现对气路的有控制，及对装置内部的真空度的调节，所述真空泵18上与节流阀门15之间的管路22安装真空规16，监测装置内的真空度。
所述丝杠5的螺纹表面长度略长于螺旋线状线式槽12的排布长度，所述内筒11 长度等于圆筒形外壳6一半长度，使得丝杠5能给有效的拉动内筒11进行调节，同时避免丝杠5的脱落。
所述内筒11上螺旋线状线式槽12两端外内筒11的表面均开设有封闭槽21，所述封闭槽21内卡装橡胶密封圈14，增加内筒11与圆筒形外壳6配合的封闭性。
所述法兰4上端开设有排气孔3，对内筒11移动过程中产生的压力变化进行调节，避免影响装置的准确性。
一种螺旋线式质谱仪连续性变压取样装置的取样方法，包括如下步骤：
步骤1：关闭进气阀门10，打开节流阀门15，开启真空泵18抽真空，气体通路内的气体压力逐渐下降到质谱仪的最大工作压强时，启动质谱系统17内真空泵18，加快抽真空的速度，抽真空的同时也清洁了分析气体成分的气体通路，直至真空度达到质谱仪的最佳工作压强；
步骤2：启动电动机1，将内筒11移动至最靠近质谱仪位置，使圆筒形外壳6内壁进气室9与螺旋线状线式槽12的进气端最小截面处相通，打开进气阀门10，被分析气体进入气体通路；
步骤3：根据真空规16测量到的真空度反馈控制电动机1，将内筒11逐渐向远离质谱仪方向移动，使与圆筒形外壳6内壁进气室9接通的螺旋线状线式槽12的气体通路长度逐渐变小，气体流量逐渐增大，通道内气体流量和真空度满足质谱仪工作的要求；
步骤4：当进气管中被分析气体压力变化时，根据真空规16测量到的真空度反馈控制电动机1，当取样气体压力大时，往质谱仪的方向移动内筒11，以增长气体通路，减小压力，恢复至质谱仪工作压力；当取样气体压力小时，往远离质谱仪的方向移动内筒11，以减短气体通路，增大压力，恢复至质谱仪工作压力，始终保证通道内收集到的取样气体具有稳定的压力和流量，保证真空度符合质谱仪工作真空度；
此工作过程是连续性过程，此设备可以连续在线检测气体成分。
以上实施例仅用以说明本发明的技术方案而非对其限制，尽管参照上述实施例对本发明进行了详细说明，领域的普通技术人员应当理解：依然可以对本发明的具体实施方式进行修改或者等同替换，而未脱离本发明精神和范围的任何修 改或者等同替换，其均应涵盖在本权利要求范围当中。

Claims (5)

  1. 一种螺旋线式质谱仪连续性变压取样装置，包括圆筒形外壳与质谱系统，其特征在于，所述圆筒形外壳内部滑动安装内筒，而内筒外表面开设有便于加工的规则截面的螺旋线状线式槽，且螺旋线状线式槽由进气端向出气端逐渐增加截面面积，所述内筒外表面与圆筒形外壳内壁面紧密贴合，所述圆筒形外壳内壁面中部圆周上开设有环形的进气室，且进气室贯穿圆筒形外壳与进气管路和进气阀相连，所述螺旋线状线式槽出气端开设有贯穿内筒右筒壁的出气通路，所述圆筒形外壳右壳壁开设连接孔，且连接孔连接管路的一端，而管路的另一端穿过圆筒形外壳右壳壁后连接质谱系统，所述内筒左端固定安装固定架，且固定架中部焊接螺母，所述固定架开设有导向孔，所述圆筒形外壳左端固定安装法兰，法兰右壁面固定安装导向杆，且导向杆滑动安装导向孔内，所述螺母配装有丝杠，且丝杠另一端贯穿圆筒形外壳远质谱系统端壳壁后配装减速器的输出端，所述减速器的输入端配装电动机的输出端，所述圆筒形外壳与质谱系统之间的管路依次安装节流阀门与真空泵，所述真空泵上与节流阀门之间的管路安装真空规。
  2. 根据权利要求1所述的一种螺旋线式质谱仪连续性变压取样装置，其特征在于，所述丝杠的螺纹表面长度略长于螺旋线状线式槽的排布长度，所述内筒长度等于圆筒形外壳一半长度。
  3. 根据权利要求1所述的一种螺旋线式质谱仪连续性变压取样装置，其特征在于，所述内筒上螺旋线状线式槽两端外的内筒表面均开设有封闭槽，所述封闭槽内卡装橡胶密封圈。
  4. 根据权利要求1所述的一种螺旋线式质谱仪连续性变压取样装置，其特征在于，所述法兰上端开设有排气孔。
  5. 权利要求1所述的一种螺旋线式质谱仪连续性变压取样装置的取样方法，包括如下步骤：
    步骤1：关闭进气阀门，打开节流阀门，开启真空泵抽真空，气体 通路内的气体压力逐渐下降到质谱仪的最大工作压强时，启动质谱系统内真空泵，加快抽真空的速度，抽真空的同时也清洁了分析气体成分的气体通路，直至真空度达到质谱仪的最佳工作压强；
    步骤2：启动电动机，将内筒移动至最靠近质谱仪位置，使圆筒形外壳内壁进气室与螺旋线状线式槽的进气端最小截面处相通，打开进气阀门，被分析气体进入气体通路；
    步骤3：根据真空规测量到的真空度反馈控制电动机，将内筒逐渐向远离质谱仪方向移动，使与圆筒形外壳内壁进气室接通的螺旋线状线式槽的气体通路长度逐渐变小，气体流量逐渐增大，通道内气体流量和真空度满足质谱仪工作的要求；
    步骤4：当进气管中被分析气体压力变化时，根据真空规测量到的真空度反馈控制电动机，当取样气体压力大时，往质谱仪的方向移动内筒，以增长气体通路，减小压力，恢复至质谱仪工作压力；当取样气体压力小时，往远离质谱仪的方向移动内筒，以减短气体通路，增大压力，恢复至质谱仪工作压力，始终保证通道内收集到的取样气体具有稳定的压力和流量，保证真空度符合质谱仪工作真空度；
    此工作过程是连续性过程，此设备可以连续在线检测气体成分。
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